JP2013532850A - 張り出し部およびマイクロ構造位置合わせ機能を有する単一アセンブリとしてのフリップチップ光学ダイによる光接続 - Google Patents
張り出し部およびマイクロ構造位置合わせ機能を有する単一アセンブリとしてのフリップチップ光学ダイによる光接続 Download PDFInfo
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Abstract
【選択図】図1
Description
本特許文書の開示の一部は、著作権保護の対象となる題材を含む。著作権所有者は、特許商標庁の特許包袋もしくは記録の通りに特許文書もしくは特許開示が何人により再現されようと異議を申し立てないが、その他のあらゆる著作権およびその他の権利を留保する。著作権表示は、以下に記載されるあらゆる情報、本明細書に添付される図面に記載されるあらゆる情報、および、以下に記載されるいかなるソフトウェアにも適用される:著作権(2010年、インテル・コーポレーション、無断複写・複製・転載を禁ず。
Claims (20)
- 光学送受信機回路の実装マウントとなる実装基板と、
光学送受信機回路を有し、前記実装基板にフリップチップ接合され、前記光学送受信機回路の光モードにおいてアクティブとなるよう縁部が前記実装基板から張り出す半導体ダイであって、前記実装基板に接合されたときに前記実装基板に対向する溝が半導体バルクに作り込まれた半導体ダイと、
前記溝において前記半導体ダイにコンタクトし、前記半導体ダイよりも延伸して前記実装基板から離れて前記光学送受信機回路の前記光モードを光学レンズに受動的に位置合わせさせる位置合わせピンと、
前記位置合わせピンを、前記溝において前記半導体ダイに保持する支持部材と
を備える装置。 - 前記溝は、前記光学送受信機回路の1つ以上のコンポーネントを形成するために用いられるフォトリソグラフィープロセスにより前記半導体バルクにエッチングされる溝である請求項1に記載の装置。
- 前記溝は、前記光学送受信機回路の導波管面にリソグラフィーにより位置合わせされる溝である請求項2に記載の装置。
- 前記溝は、V形トレンチである請求項1に記載の装置。
- 前記位置合わせピンは、前記半導体ダイの張り出し部における前記溝において前記半導体ダイに当接する請求項1に記載の装置。
- 前記位置合わせピンは、前記溝の幅より大きい直径を有し、前記支持部材は、前記位置合わせピンを前記溝との間に保持する窪みを有する請求項5に記載の装置。
- 前記位置合わせピンは、さらに、前記実装基板に当接する請求項1に記載の装置。
- 前記半導体ダイと、前記実装基板と、前記支持部材との間の空間、前記位置合わせピンの周りの空間、および前記半導体ダイの周りの空間を充填して、前記実装基板、前記半導体ダイ、前記位置合わせピン、および前記支持部材を単一のモジュールアセンブリとして固定するアンダーフィル接着剤をさらに備える請求項1に記載の装置。
- 前記光学送受信機回路とインターフェースする光学レンズであって、前記位置合わせピンに対応するギャップを有し、バネ機構により前記光学送受信機回路とインターフェースして前記ギャップにおいて前記位置合わせピンに受動的に位置合わせされる光学レンズをさらに備える請求項1に記載の装置。
- 前記光学レンズは、光信号を拡大して前記光モードと光ファイバとの間に集光させる自由空間光学レンズである請求項9に記載の装置。
- 光学送受信機回路を有し、前記光学送受信機回路の導波管に最近接する面にボールグリッドアレイ(BGA)コンタクトインターフェースを有し、前記BGAコンタクトインターフェースによりフリップチップ接合される半導体ダイであって、前記導波管に最近接する前記面に、位置合わせピンとインターフェースするマイクロエンジニアリング構造を有し、前記半導体ダイがフリップチップ接合される対象の基板から張り出す半導体ダイと、
前記マイクロエンジニアリング構造において前記半導体ダイとコンタクトし、前記半導体ダイよりも延伸して前記張り出す部分から離れて前記光学送受信機回路の前記導波管を光学レンズに受動的に位置合わせさせる位置合わせピンと、
前記位置合わせピンを、前記マイクロエンジニアリング構造において前記半導体ダイに保持する支持部材と
を備える装置。 - 前記マイクロエンジニアリング構造は、前記半導体ダイに作り込まれた溝である請求項11に記載の装置。
- 前記溝は、V形もしくはU形のトレンチである請求項12に記載の装置。
- 前記半導体ダイを前記基板に、前記位置合わせピンを前記半導体ダイに接着するアンダーフィル接着剤をさらに備える請求項11に記載の装置。
- 前記光学送受信機回路にインターフェースする光学レンズであって、前記位置合わせピンに対応するギャップを有し、バネ機構により前記光学送受信機回路にインターフェースして前記ギャップにおいて前記位置合わせピンに受動的に位置合わせされる光学レンズをさらに備える請求項11に記載の装置。
- 半導体ダイを基板にフリップチップ接続したときに前記基板に対向する前記半導体ダイの溝と、フリップチップ接続したときに前記基板に対向する、光学送受信機回路の導波管に最近接する前記半導体ダイの面とにおいて、前記半導体ダイを前記基板にフリップチップ接続する段階と
前記光学送受信機回路を光学レンズに受動的に位置合わせさせる位置合わせピンを前記溝において前記半導体ダイに固定する段階と
を備え、
前記半導体ダイは、前記半導体ダイ上に光学送受信機回路が作り込まれ、かつ、前記半導体ダイ上にマイクロエンジニアリング溝を有し、
前記フリップチップ接続する段階は、前記半導体ダイを前記基板の縁から張り出させて、光モードの面を前記基板から張り出させる段階を有する
方法。 - 前記半導体ダイ上の前記マイクロエンジニアリング溝は、さらに、前記光学送受信機回路の作り込みとともに、前記半導体ダイにリソグラフィーにより作り込まれた溝である請求項16に記載の方法。
- 前記半導体ダイを前記基板にフリップチップ接続する段階は、前記半導体ダイを前記基板にボールグリッドアレイ(BGA)により接続する段階さらに有する請求項16に記載の方法。
- 前記位置合わせピンを前記半導体ダイに固定する段階は、前記半導体ダイと前記基板との間と、前記半導体ダイにおける前記位置合わせピンの周りとにアンダーフィル接着剤を挿入するアンダーフィルプロセスにより、前記位置合わせピンを前記半導体ダイに接着する段階をさらに有する請求項16に記載の方法。
- 前記光学送受信機回路の前記導波管に光学レンズを結合する段階と、
機械的なバネ力により前記光学レンズを前記半導体ダイに固定する段階と
をさらに備える請求項16に記載の方法。
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US12/844,656 US8373259B2 (en) | 2010-07-27 | 2010-07-27 | Optical connection through single assembly overhang flip chip optics die with micro structure alignment |
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