JP2013530911A5 - - Google Patents

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Publication number
JP2013530911A5
JP2013530911A5 JP2013509053A JP2013509053A JP2013530911A5 JP 2013530911 A5 JP2013530911 A5 JP 2013530911A5 JP 2013509053 A JP2013509053 A JP 2013509053A JP 2013509053 A JP2013509053 A JP 2013509053A JP 2013530911 A5 JP2013530911 A5 JP 2013530911A5
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JP
Japan
Prior art keywords
opening
plenum
sheet
width
gas jet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013509053A
Other languages
English (en)
Japanese (ja)
Other versions
JP5771271B2 (ja
JP2013530911A (ja
Filing date
Publication date
Priority claimed from US13/037,789 external-priority patent/US8685162B2/en
Application filed filed Critical
Publication of JP2013530911A publication Critical patent/JP2013530911A/ja
Publication of JP2013530911A5 publication Critical patent/JP2013530911A5/ja
Application granted granted Critical
Publication of JP5771271B2 publication Critical patent/JP5771271B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2013509053A 2010-05-06 2011-03-02 ガスジェットを用いる融液の表面からのシートの取り出し Expired - Fee Related JP5771271B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US33207310P 2010-05-06 2010-05-06
US61/332,073 2010-05-06
US13/037,789 2011-03-01
US13/037,789 US8685162B2 (en) 2010-05-06 2011-03-01 Removing a sheet from the surface of a melt using gas jets
PCT/US2011/026790 WO2011139402A1 (en) 2010-05-06 2011-03-02 Removing a sheet from the surface of a melt using gas jets

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2015084457A Division JP5961303B2 (ja) 2010-05-06 2015-04-16 ガスジェットを用いる融液の表面からのシートの取り出し

Publications (3)

Publication Number Publication Date
JP2013530911A JP2013530911A (ja) 2013-08-01
JP2013530911A5 true JP2013530911A5 (OSRAM) 2014-03-13
JP5771271B2 JP5771271B2 (ja) 2015-08-26

Family

ID=44901074

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2013509053A Expired - Fee Related JP5771271B2 (ja) 2010-05-06 2011-03-02 ガスジェットを用いる融液の表面からのシートの取り出し
JP2015084457A Expired - Fee Related JP5961303B2 (ja) 2010-05-06 2015-04-16 ガスジェットを用いる融液の表面からのシートの取り出し

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2015084457A Expired - Fee Related JP5961303B2 (ja) 2010-05-06 2015-04-16 ガスジェットを用いる融液の表面からのシートの取り出し

Country Status (7)

Country Link
US (2) US8685162B2 (OSRAM)
EP (2) EP2567003B1 (OSRAM)
JP (2) JP5771271B2 (OSRAM)
KR (2) KR101898905B1 (OSRAM)
CN (1) CN103025926B (OSRAM)
TW (1) TWI550142B (OSRAM)
WO (1) WO2011139402A1 (OSRAM)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9957636B2 (en) * 2014-03-27 2018-05-01 Varian Semiconductor Equipment Associates, Inc. System and method for crystalline sheet growth using a cold block and gas jet
US10526720B2 (en) * 2015-08-19 2020-01-07 Varian Semiconductor Equipment Associates, Inc. Apparatus for forming crystalline sheet from a melt
US10179958B2 (en) * 2016-09-16 2019-01-15 Varian Semiconductor Equipment Associates, Inc Apparatus and method for crystalline sheet growth
US11661672B2 (en) * 2018-08-06 2023-05-30 Carnegie Mellon University Method for producing a sheet from a melt by imposing a periodic change in the rate of pull
KR20220017413A (ko) * 2019-05-13 2022-02-11 리딩 엣지 이큅먼트 테크놀로지스, 아이엔씨. 용광로 내 가스에 대한 실리콘 리본의 노출
KR20220044806A (ko) * 2019-08-09 2022-04-11 리딩 엣지 이큅먼트 테크놀로지스, 아이엔씨. 산소 농도가 낮은 영역이 있는 리본 또는 웨이퍼의 제조
WO2021168244A1 (en) * 2020-02-19 2021-08-26 Leading Edge Equipment Technologies, Inc. Controlling the thickness and width of a crystalline sheet formed on the surface of a melt using combined surface cooling and melt heating
TW202136597A (zh) 2020-02-19 2021-10-01 美商先鋒設備科技公司 在熔體表面形成之結晶片材的主動邊緣控制

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2633961C2 (de) * 1975-07-28 1986-01-02 Mitsubishi Kinzoku K.K. Verfahren zum Ziehen eines dünnen Halbleiter-Einkristallbandes
JPS5215485A (en) * 1975-07-28 1977-02-05 Toyo Silicon Kk Process for growth of ribbon crystals by lateral pulling
JPS5261180A (en) 1975-11-14 1977-05-20 Toyo Shirikon Kk Horizontal growth of crystal ribbons
US4221754A (en) * 1977-12-29 1980-09-09 Nowak Welville B Method for producing solid ribbons
US4289571A (en) 1979-06-25 1981-09-15 Energy Materials Corporation Method and apparatus for producing crystalline ribbons
US4627887A (en) * 1980-12-11 1986-12-09 Sachs Emanuel M Melt dumping in string stabilized ribbon growth
US6019576A (en) * 1997-09-22 2000-02-01 Thut; Bruno H. Pumps for pumping molten metal with a stirring action
JP2001122696A (ja) 1999-10-21 2001-05-08 Matsushita Seiko Co Ltd リボンシリコンウェハの製造方法
JP2002114597A (ja) * 2000-10-06 2002-04-16 Sharp Corp 結晶シートの製造方法およびその結晶シートを用いた太陽電池
US7608146B2 (en) 2006-09-28 2009-10-27 Bp Corporation North America Inc. Method and apparatus for the production of crystalline silicon substrates
US7855087B2 (en) 2008-03-14 2010-12-21 Varian Semiconductor Equipment Associates, Inc. Floating sheet production apparatus and method
US7816153B2 (en) 2008-06-05 2010-10-19 Varian Semiconductor Equipment Associates, Inc. Method and apparatus for producing a dislocation-free crystalline sheet
US8475591B2 (en) 2008-08-15 2013-07-02 Varian Semiconductor Equipment Associates, Inc. Method of controlling a thickness of a sheet formed from a melt
WO2010021967A1 (en) * 2008-08-18 2010-02-25 Evergreen Solar, Inc. Controlling transport of gas borne contaminants across a ribbon surface
WO2010104838A1 (en) 2009-03-09 2010-09-16 1366 Technologies Inc. Methods and apparati for making thin semiconductor bodies from molten material

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