JP2013511842A5 - - Google Patents

Download PDF

Info

Publication number
JP2013511842A5
JP2013511842A5 JP2012539934A JP2012539934A JP2013511842A5 JP 2013511842 A5 JP2013511842 A5 JP 2013511842A5 JP 2012539934 A JP2012539934 A JP 2012539934A JP 2012539934 A JP2012539934 A JP 2012539934A JP 2013511842 A5 JP2013511842 A5 JP 2013511842A5
Authority
JP
Japan
Prior art keywords
prism
interval
output wavelength
predicted
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012539934A
Other languages
Japanese (ja)
Other versions
JP2013511842A (en
JP5986927B2 (en
Filing date
Publication date
Priority claimed from US12/620,967 external-priority patent/US8254420B2/en
Application filed filed Critical
Publication of JP2013511842A publication Critical patent/JP2013511842A/en
Publication of JP2013511842A5 publication Critical patent/JP2013511842A5/ja
Application granted granted Critical
Publication of JP5986927B2 publication Critical patent/JP5986927B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Claims (13)

レーザ波長制御の方法であって、
第１の個別の間隔でレーザシステム内のプリズムの位置の予測を行う段階と、
第２の通常の間隔が前記第１の通常の間隔よりも長い第２の個別の間隔で前記レーザシステム内の主発振器チャンバの出力波長の測定値を受信する段階と、
各第１の個別の間隔中に、
前記出力波長測定値が前記第１の個別の間隔中に受信されなかった場合に、前記プリズムの前記予測位置を使用して該プリズムに対する制御電圧を制御コンピュータにおいて計算する段階、
前記出力波長測定値が前記第１の個別の間隔中に受信された場合に、該出力波長測定値を使用して前記プリズムの前記予測位置を更新し、該プリズムの該更新予測位置を使用して該プリズムに対する制御電圧を前記制御コンピュータにおいて計算する段階、及び
前記計算制御電圧を前記制御コンピュータから前記プリズムを位置決めするための電子機器に出力する段階と、
を含むことを特徴とする方法。 A laser wavelength control method comprising:
Predicting the position of the prism in the laser system at a first discrete interval;
Receiving a measurement of the output wavelength of a master oscillator chamber in the laser system at a second discrete interval where a second normal interval is longer than the first normal interval;
During each first individual interval,
Calculating the control voltage for the prism in the control computer using the predicted position of the prism if the output wavelength measurement is not received during the first discrete interval;
If the output wavelength measurement is received during the first individual interval, the output wavelength measurement is used to update the predicted position of the prism, and the updated predicted position of the prism is used. Calculating a control voltage for the prism in the control computer; and outputting the calculated control voltage from the control computer to an electronic device for positioning the prism;
A method comprising the steps of: 第１の個別の間隔で前記プリズムの前記位置の前記予測を行う段階は、該プリズムの移動のモデルを使用することを特徴とする請求項１に記載の方法。   The method of claim 1, wherein the predicting the position of the prism at first discrete intervals uses a model of movement of the prism. 前記プリズムの移動の前記モデルは、該プリズムの物理的移動及び前記レーザシステム内の外乱に基づくことを特徴とする請求項２に記載の方法。   The method of claim 2, wherein the model of prism movement is based on physical movement of the prism and disturbances in the laser system. 前記モデルは、その積分形式では、
Figure 2013511842
であり、ここで、
ｘ（ｔ＋Ｔ）は、初期状態ｘ（ｔ）よりＴ秒先んじた予測状態、
ｅ AT は、線形システムの標準な状態遷移行列、
Ｂは、標準入力行列、
ｕは、変換器信号の値、
τは、ダミー変数、
であることを特徴とする請求項２に記載の方法。 The model is in its integral form
Figure 2013511842
And where
x (t + T) is a predicted state that is T seconds ahead of the initial state x (t),
e AT is the standard state transition matrix for linear systems,
B is the standard input matrix,
u is the value of the transducer signal,
τ is a dummy variable,
The method of claim 2, wherein: 前記出力波長測定値を使用して前記プリズムの前記予測位置を更新する段階は、以下の式：
Figure 2013511842
を使用し、ここで、
ｋは、レーザ発射イベントを示しており、
Ｉは、ｎ行ｎ列の恒等行列であり、ｎは状態ベクトルｘの要素数であり、
Ｌ k は、新しいデータを信頼すること及び前の予測を信じることの間の妥協点を捕捉する利得行列であり、
Ｃ k は、予測状態から予測出力への標準的マッピングであり、
ｘ（ｋ／ｋ）は、指標ｋでの最新データが与えられて更新された予測であり、
ｘ（ｋ／ｋ−１）は、前のレーザ発射イベントｋ−１からのデータが与えられてレーザ発射指標ｋでの状態の「古い」予測である、
ことを特徴とする請求項１に記載の方法。 Updating the predicted position of the prism using the output wavelength measurement comprises the following formula:
Figure 2013511842
Where
k indicates a laser firing event,
I is an n-by-n identity matrix, n is the number of elements of the state vector x,
L k is a gain matrix that captures a compromise between trusting new data and believing in previous predictions;
C k is a standard mapping from the predicted state to the predicted output;
x (k / k) is an updated prediction given the latest data at index k,
x (k / k−1) is the “old” prediction of the state at the laser firing index k given the data from the previous laser firing event k−1.
The method according to claim 1. レーザ波長制御の方法であって、
第１の個別の間隔でレーザシステム内のプリズムの位置の予測を行う段階と、
第２の通常の間隔が前記第１の通常の間隔よりも長い第２の個別の間隔で前記レーザシステム内の主発振器チャンバの出力波長の測定値を受信する段階と、
各第１の個別の間隔中に、
前記出力波長測定値が前記第１の個別の間隔中に受信されなかった場合に、前記プリズムの前記予測位置を使用して該プリズムに対する制御電圧を制御コンピュータにおいて計算する段階、
前記出力波長測定値が前記第１の個別の間隔中に受信された場合に、
前記レーザが前記出力波長測定値を受信してから再び発射した場合に、該出力波長測定値を使用して前のプリズム位置予測を更新し、該更新された前のプリズム位置予測に基づいてプリズム位置予測の新しい予測を行い、かつ該新しいプリズム位置予測を使用して該プリズムに対する前記制御電圧を前記制御コンピュータにおいて計算する段階、及び
前記レーザが前記出力波長測定値を受信してから再び発射しなかった場合に、該出力波長測定値を使用して前記プリズムの前記予測位置を更新し、かつ該更新プリズム位置予測を使用して該プリズムに対する前記制御電圧を前記制御コンピュータにおいて計算する段階、及び
前記計算制御電圧を前記制御コンピュータから前記プリズムを位置決めするための電子機器に出力する段階と、
を含むことを特徴とする方法。 A laser wavelength control method comprising:
Predicting the position of the prism in the laser system at a first discrete interval;
Receiving a measurement of the output wavelength of a master oscillator chamber in the laser system at a second discrete interval where a second normal interval is longer than the first normal interval;
During each first individual interval,
Calculating the control voltage for the prism in the control computer using the predicted position of the prism if the output wavelength measurement is not received during the first discrete interval;
If the output wavelength measurement is received during the first individual interval,
When the laser receives the output wavelength measurement and fires again, the output wavelength measurement is used to update a previous prism position prediction, and a prism based on the updated previous prism position prediction Making a new prediction of position prediction and calculating the control voltage for the prism in the control computer using the new prism position prediction; and relaunching after the laser receives the output wavelength measurement If not, updating the predicted position of the prism using the output wavelength measurement and calculating the control voltage for the prism in the control computer using the updated prism position prediction; and Outputting the calculated control voltage from the control computer to an electronic device for positioning the prism;
A method comprising the steps of: 第１の個別の間隔で前記プリズムの前記位置の前記予測を行う段階は、該プリズムの移動のモデルを使用することを特徴とする請求項６に記載の方法。   The method of claim 6, wherein the predicting the position of the prism at first discrete intervals uses a model of movement of the prism. 前記プリズムの移動の前記モデルは、該プリズム物理的移動及び前記レーザシステム内の外乱に基づくことを特徴とする請求項７に記載の方法。   8. The method of claim 7, wherein the model of the prism movement is based on the prism physical movement and disturbances in the laser system. プリズムコントローラ方法であって、
プリズム移動モデルを使用してプリズムの位置を第１の個別の間隔で予測する段階と、 第２の通常の間隔が前記第１の通常の間隔よりも長い第２の個別の間隔で前記プリズムによって制御された主発振器チャンバの出力波長の測定値を受信する段階と、
各第１の個別の間隔中に、
前記出力波長測定値が前記第１の個別の間隔中に受信されなかった場合に、前記プリズムの前記予測位置を使用して該プリズムに対する制御電圧を計算する段階、
前記出力波長測定値が前記第１の個別の間隔中に受信された場合に、該出力波長測定値を使用して前記プリズムの前記予測位置を更新し、かつ該プリズムの該更新予測位置を使用して該プリズムに対する制御電圧を計算する段階、及び
前記計算制御電圧を前記プリズムを位置決めするための電子機器に出力する段階と、
を含むことを特徴とする方法。 A prism controller method comprising:
Predicting the position of the prism at a first discrete interval using a prism movement model; and by the prism at a second discrete interval where the second regular interval is longer than the first regular interval. Receiving a measurement of the output wavelength of the controlled master oscillator chamber;
During each first individual interval,
Calculating the control voltage for the prism using the predicted position of the prism if the output wavelength measurement is not received during the first discrete interval;
If the output wavelength measurement is received during the first individual interval, use the output wavelength measurement to update the predicted position of the prism and use the updated predicted position of the prism Calculating a control voltage for the prism; and outputting the calculated control voltage to an electronic device for positioning the prism;
A method comprising the steps of: 第１の個別の間隔で前記プリズムの前記位置の前記予測を行う段階は、該プリズムの移動のモデルを使用することを特徴とする請求項９に記載の方法。   The method of claim 9, wherein the predicting the position of the prism at a first discrete interval uses a model of the movement of the prism. 前記プリズムの移動の前記モデルは、該プリズム物理的移動及びレーザシステム内の外乱に基づくことを特徴とする請求項１０に記載の方法。   11. The method of claim 10, wherein the model of the prism movement is based on the prism physical movement and disturbances in a laser system. 前記モデルは、その積分形式では、
Figure 2013511842
であり、ここで、
ｘ（ｔ＋Ｔ）は、初期状態ｘ（ｔ）よりＴ秒先んじた予測状態、
ｅ AT は、線形システムの標準な状態遷移行列、
Ｂは、標準入力行列、
ｕは、変換器信号の値、
τは、ダミー変数、
であることを特徴とする請求項１０に記載の方法。 The model is in its integral form
Figure 2013511842
Der is, here,
x (t + T) is a predicted state that is T seconds ahead of the initial state x (t),
e AT is the standard state transition matrix for linear systems,
B is the standard input matrix,
u is the value of the transducer signal,
τ is a dummy variable,
The method according to claim 10, wherein: 前記出力波長測定値を使用して前記プリズムの前記予測位置を更新する段階は、以下の式：
Figure 2013511842
を使用し、ここで、
ｋは、レーザ発射イベントを示しており、
Ｉは、ｎ行ｎ列の恒等行列であり、ｎは状態ベクトルｘの要素数であり、
Ｌ k は、新しいデータを信頼すること及び前の予測を信じることの間の妥協点を捕捉する利得行列であり、
Ｃ k は、予測状態から予測出力への標準的マッピングであり、
ｘ（ｋ／ｋ）は、指標ｋでの最新データが与えられて更新された予測であり、
ｘ（ｋ／ｋ−１）は、前のレーザ発射イベントｋ−１からのデータが与えられてレーザ発射指標ｋでの状態の「古い」予測である、
ことを特徴とする請求項９に記載の方法。 Updating the predicted position of the prism using the output wavelength measurement comprises the following formula:
Figure 2013511842
Where
k indicates a laser firing event,
I is an n-by-n identity matrix, n is the number of elements of the state vector x,
L k is a gain matrix that captures a compromise between trusting new data and believing in previous predictions;
C k is a standard mapping from the predicted state to the predicted output;
x (k / k) is an updated prediction given the latest data at index k,
x (k / k−1) is the “old” prediction of the state at the laser firing index k given the data from the previous laser firing event k−1.
The method of claim 9.
JP2012539934A 2009-11-18 2010-11-04 Latest laser wavelength control Active JP5986927B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/620,967 2009-11-18
US12/620,967 US8254420B2 (en) 2009-11-18 2009-11-18 Advanced laser wavelength control
PCT/US2010/055372 WO2011062772A1 (en) 2009-11-18 2010-11-04 Advanced laser wavelength control

Publications (3)

Publication Number Publication Date
JP2013511842A JP2013511842A (en) 2013-04-04
JP2013511842A5 true JP2013511842A5 (en) 2013-12-26
JP5986927B2 JP5986927B2 (en) 2016-09-06

Family

ID=44011262

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012539934A Active JP5986927B2 (en) 2009-11-18 2010-11-04 Latest laser wavelength control

Country Status (7)

Country Link
US (1) US8254420B2 (en)
EP (1) EP2502317B1 (en)
JP (1) JP5986927B2 (en)
KR (1) KR101772608B1 (en)
CN (1) CN102576974B (en)
TW (1) TWI440269B (en)
WO (1) WO2011062772A1 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9261794B1 (en) 2014-12-09 2016-02-16 Cymer, Llc Compensation for a disturbance in an optical source
US10816905B2 (en) 2015-04-08 2020-10-27 Cymer, Llc Wavelength stabilization for an optical source
US9785050B2 (en) 2015-06-26 2017-10-10 Cymer, Llc Pulsed light beam spectral feature control
US9762023B2 (en) * 2015-12-21 2017-09-12 Cymer, Llc Online calibration for repetition rate dependent performance variables
US10727642B2 (en) 2015-12-21 2020-07-28 Cymer, Llc Online calibration for repetition rate dependent performance variables
US10036963B2 (en) 2016-09-12 2018-07-31 Cymer, Llc Estimating a gain relationship of an optical source
US10096967B2 (en) * 2016-12-07 2018-10-09 Cymer, Llc Wavelength control system for pulse-by-pulse wavelength target tracking in DUV light source
JP7325452B2 (en) * 2019-01-29 2023-08-14 ギガフォトン株式会社 Wavelength control method for laser device and method for manufacturing electronic device
US11868900B1 (en) 2023-02-22 2024-01-09 Unlearn.AI, Inc. Systems and methods for training predictive models that ignore missing features

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5856991A (en) * 1997-06-04 1999-01-05 Cymer, Inc. Very narrow band laser
US6192064B1 (en) * 1997-07-01 2001-02-20 Cymer, Inc. Narrow band laser with fine wavelength control
US6393037B1 (en) 1999-02-03 2002-05-21 Lambda Physik Ag Wavelength selector for laser with adjustable angular dispersion
US6493374B1 (en) * 1999-09-03 2002-12-10 Cymer, Inc. Smart laser with fast deformable grating
US6882674B2 (en) * 1999-12-27 2005-04-19 Cymer, Inc. Four KHz gas discharge laser system
US6563128B2 (en) 2001-03-09 2003-05-13 Cymer, Inc. Base stabilization system
US6914919B2 (en) * 2000-06-19 2005-07-05 Cymer, Inc. Six to ten KHz, or greater gas discharge laser system
US6704340B2 (en) 2001-01-29 2004-03-09 Cymer, Inc. Lithography laser system with in-place alignment tool
US7366219B2 (en) * 2004-11-30 2008-04-29 Cymer, Inc. Line narrowing module
US7450623B2 (en) * 2005-04-12 2008-11-11 Eric G. Johnson Wavelength locked laser including integrated wavelength selecting total internal reflection (TIR) structure
US7885309B2 (en) * 2005-11-01 2011-02-08 Cymer, Inc. Laser system
US7778302B2 (en) 2005-11-01 2010-08-17 Cymer, Inc. Laser system
US7852889B2 (en) * 2006-02-17 2010-12-14 Cymer, Inc. Active spectral control of DUV light source
US7822084B2 (en) 2006-02-17 2010-10-26 Cymer, Inc. Method and apparatus for stabilizing and tuning the bandwidth of laser light
JP5114767B2 (en) * 2006-10-10 2013-01-09 株式会社小松製作所 Narrowband laser spectral width adjustment device
JP2008171961A (en) 2007-01-10 2008-07-24 Nikon Corp Laser device, method and device for exposure, and manufacturing method of device
JP4972427B2 (en) * 2007-02-15 2012-07-11 株式会社小松製作所 Excimer laser device capable of high repetitive operation and high bandwidth narrowing efficiency

Similar Documents

Publication Publication Date Title
JP2013511842A5 (en)
JP4787578B2 (en) Sensor network system, sensor node, sensor information collection device, event observation method, and program
TWI440269B (en) Advanced laser wavelength control
JP5634607B2 (en) Stream data processing server and recording medium recording stream data processing program
JP5847361B2 (en) Method and apparatus for acquiring dynamic information
CN109711530B (en) Landslide prediction method and system
CN107561933B (en) Speed adjusting method and device, computer equipment and storage medium
JP2018181184A (en) Evaluation device, evaluation method, and program therefor
WO2018166418A1 (en) Network timing method and device
US9412267B2 (en) Auto-calibration for road traffic prediction
JP2009219315A (en) Electric power system monitoring control system
JP6290029B2 (en) Production control support device, production control support method and program
JP2020098459A (en) Communication system, communication device, and control program
JP5933147B2 (en) COMMUNICATION DEVICE, COMMUNICATION METHOD, AND PROGRAM
US20220360534A1 (en) Communication equipment, communication methods and programs
US10599918B2 (en) Information processing method and information processing apparatus
CN117376202A (en) Information processing device, information processing method, and storage medium
JP6172160B2 (en) Performance prediction apparatus and performance prediction method
KR20170037724A (en) Apparatus, system and method for calculating supply capacity of combined cycle power generator
JP6778760B2 (en) Control devices, control methods, and control programs
JPWO2018131311A1 (en) Sensing system, sensor node device, sensor measurement value processing method, and program
US20220245447A1 (en) Systems and methods for quantization aware training of a neural network for heterogeneous hardware platform
JP2024011741A (en) Time correction device, time correction method, and time correction system
WO2020054599A1 (en) Model generator, prediction device, model generation method, prediction method, and program
JPWO2017090078A1 (en) Embedded device, communication method, and communication program