JP2013201032A - Heating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a heating device which can perform heating by multiple heating means and which can achieve a compact structure.SOLUTION: A heating device 10 comprises: an induction heating coil 16 provided opposite to a heating object loading region 28; a graphite 18 provided between the heating object loading region 28 and the induction heating coil 16; and hot-air generation means 20 arranged in a region where magnetic flux generated by the induction heating coil 16 reaches, for blowing hot air to the heating object loading region 28. In the heating device 10 having such configuration, it is preferable that the hot-air generation means 20 is formed by a blast air duct composed of a plurality of graphite plates 22 arranged at a distance from each other.

Description

  The present invention relates to a heating apparatus suitable for rapidly and evenly heating an object to be heated having portions having different heat capacities.

  As a heating method of the object to be heated, there are known methods by induction heating in which the object to be heated is directly heated in addition to hot air heating and radiant heating using heat exchange.

  As a heating device using hot air heating, for example, a device disclosed in Patent Document 1 is known. The hot air heating device disclosed in Patent Document 1 is mainly composed of a cylindrical hot air chamber and a heating chamber arranged on the outer periphery thereof. In the heating chamber, shelves for placing an object to be heated are arranged radially with the hot air chamber as the center. And inflow of the hot air from a hot air chamber to a heating chamber is made through the duct extended to the upper direction of the to-be-heated material mounted in each shelf. By setting it as such a structure, the hot air sprayed on each to-be-heated material will be directly applied to a to-be-heated material from a hot air chamber. For this reason, it is supposed that the temperature of each to-be-heated material can be equalized.

  As a heating device using radiant heating, for example, a device as disclosed in Patent Document 2 is known. The radiant heating device disclosed in Patent Document 2 is mainly composed of a combustion chamber and a radiant heating box, absorbs heat generated from the combustion chamber by the inner wall surface of the radiant heating box, and radiates it from the outer wall surface. Thus, the apparatus is intended to uniformly heat the object to be heated disposed on the outer wall surface side. In the radiant heating device disclosed in Patent Document 2, a tubular flame burner is disposed as a heat source disposed in the combustion chamber. As a result, the flame generated in the radiant heating box spreads radially, the direct heating area to the heating surface on the inner wall side of the radiant heating box can be expanded, overheating of the inner wall surface is prevented, and uniform heating over a wide range is possible. It is said that it can be.

  As a heating device using induction heating, for example, a device disclosed in Patent Document 3 is known. The induction heating device disclosed in the patent document is a device for heating a billet for forging, a rail for moving a billet that is an object to be heated, and an induction heating coil that surrounds the billet including the rail. And the main constituent. In the induction heating device disclosed in Patent Document 3, a plurality of solenoid-like induction heating coils are arranged along a rail for moving a billet. And between the induction heating coils which adjoin, the winding direction of a coil and the flow direction of an electric current are made into the reverse direction, It is characterized by the above-mentioned. According to such a structure, generation | occurrence | production of the axial current produced between the billets which are closely_contact | adhered and sent out continuously can be suppressed, and it is supposed that welding between billets can be prevented.

JP 2011-7471 A JP 2008-209112 A JP 2008-66039 A

  Each heating device as disclosed in the above-mentioned patent document is considered to be useful for solving individual problems. However, as is apparent when referring to the heating object (object to be heated) in each heating device, each heating method has its own weakness and the heated object has a simple shape in principle. Has been.

  For example, hot air heating and radiant heating are advantageous for equalizing the heating temperature, but are not suitable for heating an object to be heated having a large heat capacity. On the other hand, direct heating by induction heating is suitable for rapid heating to a high temperature range or heating of an object to be heated having a relatively large heat capacity, but is suitable for laminating heating of thin objects where the possibility of discharge is high. Absent.

  From such an actual situation, it is conceivable that if the object to be heated is heated by a composite heating means, the drawbacks of the respective heating means can be compensated. However, since a heating apparatus that performs combined heating is premised on having a plurality of heating sources, there are concerns about problems such as an increase in the size of the apparatus and an increase in manufacturing costs.

  Accordingly, an object of the present invention is to provide a heating apparatus that can perform combined heating and can have a compact structure.

  In order to achieve the above object, a heating device according to the present invention is provided between an induction heating coil provided opposite to a heated object placement region, and between the heated object placement region and the induction heating coil. The induction heated member, the hot air generating means that is arranged in the magnetic flux reaching region by the induction heating coil, and blows hot air to the heated object placement region, the temperature of the induction heating member, and the hot air generating means And control means for matching the temperature of the generated hot air to a desired temperature.

Moreover, in the heating apparatus having the above-described features, the hot air generating means may be configured by a blower path constituted by a plurality of induction heating plates arranged with a gap therebetween.
By setting it as such a structure, the gas supplied to the ventilation path can be converted into a hot air. Further, since the temperature of the gas is increased by heat exchange with the induction heated plate that is induction-heated, the heating temperature can be adjusted depending on the number of the induction heated plates arranged in the air passage. .

Further, in the heating device having the above-described characteristics, the induction heating plate is provided with a through hole in the vicinity of one end in the longitudinal direction, and the induction heating plate arranged adjacent to the induction heating plate It is good to set it as the structure arrange | positioned so that the arrangement | positioning side edge part may reverse.
By setting it as such a structure, the ventilation path through which gas passes becomes a cradle shape. For this reason, even if it is a case where the number of the induction | guidance | derivation heating plates is decreased, the full length of a ventilation path can be lengthened. Therefore, it can contribute to size reduction of a heating apparatus.

In the heating apparatus having the above-described features, it is preferable that the gap between the induction heating plates is configured by sandwiching an induction heating ring.
By adopting such a configuration, heat exchange is performed not only between the induction heating plate but also between the induction heating ring and the gas, and the air flow for raising the temperature of the gas to a desired temperature. The road can be shortened. Therefore, it can contribute to size reduction of a heating apparatus.

Further, in the heating apparatus having the above-described characteristics, the induction heating coil can individually heat at least the induction heating member and the hot air generating means configured by the induction heating plate and the induction heating ring. It is better to be divided into
According to such a configuration, it is possible to individually control the heating temperature by radiant heating and the temperature of hot air by hot air heating. For this reason, it becomes possible to uniformly heat the object to be heated with higher accuracy.

  According to the heating device having the above-described characteristics, the object to be heated can be heated by a combined means using radiant heating and hot air heating. Further, since the hot air heating means is arranged in the magnetic flux reaching region of the induction heating coil, a compact structure can be obtained. Furthermore, the object to be heated can be stably heated at a desired temperature.

It is a figure which shows the front cross section (BB cross section in FIG. 2) of the heating apparatus which concerns on embodiment. It is a figure which shows the AA cross section in FIG. It is a figure which shows an example of a structure of a graphite board. It is a figure which shows the structure of the graphite board from which the arrangement | positioning form of a through-hole differs. It is a figure which shows the structure of the graphite board provided with the through-hole as a jet nozzle. It is a figure which shows the example in the case of dividing | segmenting into a plurality of induction heating coils and making it the form which can carry out electric power control separately. It is a figure for demonstrating the effect | action at the time of heating the to-be-heated object containing a site | part with a small heat capacity and a site | part with a large heat capacity.

Hereinafter, embodiments according to the heating device of the present invention will be described in detail with reference to the drawings.
As shown in FIGS. 1 and 2, the heating apparatus 10 according to the present embodiment is configured based on an induction heating coil 16, graphite 18, and hot air generation means 20. 1 is a view showing a front cross section (BB cross section in FIG. 2) in the heating apparatus, and FIG. 2 is a view showing the AA cross section in FIG.

In the present embodiment, a semiconductor wafer will be described as an example of the heated object 50 placed in the heated object placement area 28.
The induction heating coil 16 is disposed so as to face the object placement region 28 to be heated. In the present embodiment, the induction heating coil 16 is disposed so as to surround the object to be heated 50 in order to heat the object to be heated 50 from the entire surrounding surface. As a specific arrangement form of the induction heating coil 16, as shown in FIG. 2, the winding surface is a solenoid having an oval shape. By setting it as such an arrangement | positioning form, the distance of the outer peripheral surface of the semiconductor wafer which is the flat-shaped to-be-heated object 50, and the induction heating coil 16 can be made substantially equal. In addition, in the heating apparatus 10 which concerns on this embodiment, the structure which carries out induction heating also about the hot-air production | generation means 20 mentioned later for details is taken. For this reason, the induction heating coil 16 is arranged over the entire interior of the heating furnace 12.

  Here, a power supply (not shown) is connected to the induction heating coil 16 so that power can be supplied to the induction heating coil 16. The electric power is supplied by control means (not shown). The control means detects the temperature of hot air generated by the graphite 18, which will be described in detail later, the graphite plate 22 constituting the hot air generating means 20, the graphite ring 23, and the hot air generating means 20, and this temperature becomes a desired temperature. The amount of supplied power is determined so that it approaches (matches the desired temperature).

  The graphite 18 is an induction heating member for radiant heating, and is disposed between the heated object placement region 28 and the induction heating coil 16. Similarly to the induction heating coil 16, the graphite 18 is also arranged so as to surround the heated object placement region 28. In the present embodiment, cylindrical graphite 18 having an elliptical cross-sectional shape is mainly employed so as to mainly cover the object to be heated 50. It should be noted that the distance between each portion of the graphite 18 and the above-described induction heating coil 16 is preferably equal in any portion. This is because the graphite 18 heated by induction heating can be evenly heated.

  The hot air generating means 20 is arranged so as to sandwich the heated object placement region 28 at the opening end portion of the graphite 18 formed in a cylindrical shape. This makes it possible to introduce hot air into the heated object placement region 28 sealed by the graphite 18 and the hot air generating means 20.

The hot air generating means 20 according to the present embodiment is configured based on an air passage that heats gas supplied from the outside. In addition, the ventilation means which supplies gas is not specifically limited. For example, when the object to be heated 50 is a semiconductor wafer, the gas supplied to the air passage may be a reaction gas. When the object to be heated 50 is a simple object to be heated, nitrogen ( N ₂ ) gas or the like may be used. In such a case, the blowing means may be a cylinder filled with a reaction gas or nitrogen gas.

  As described above, the air passage plays a role as a gas heating means. The configuration is such that a plurality of graphite plates (inductive heating plates) 22 are stacked with a gap therebetween. In the present embodiment, a graphite ring (inductive heating ring) 23 is disposed between the graphite plates 22 to form a gap between the graphite plates 22. This is because the gas can be heated not only by the graphite plate 22 but also by the graphite ring 23 by adopting such a configuration. Moreover, by setting it as such a structure, it becomes possible to adjust the length of a ventilation path and the heating temperature of a hot air with the number of the graphite plates 22. FIG.

  In order to be based on such a configuration, the hot air generating means 20 is arranged in a magnetic flux reaching region by the induction heating coil 16. In this way, induction heating of the graphite plate 22 and the graphite ring 23 becomes possible, and both the heat generated by the radiation heating source and the heat generated by the hot air heating source can be generated by the induction heating coil 16. Thereby, it becomes possible to arrange | position the hot air production | generation means 20 in the heating furnace 12, and size reduction of the heating apparatus 10 is realizable.

  As shown in FIGS. 3 and 4, the graphite plate 22 has a through hole 24 formed on a plate surface near one end in the longitudinal direction. In the air passage, the positions of the through holes 24 in the adjacent graphite plates 22 are not overlapped with the stack of the graphite plates 22 having such a configuration, that is, the positions of the through holes 24 are as shown in FIG. As in the example shown in FIG. By setting it as such a structure, the ventilation path connected by the clearance gap between the graphite plates 22 and the through-hole 24 will comprise a kink-fold path. According to such a configuration, even if the number of graphite plates 22 is reduced, the length of the air blowing path can be earned. Therefore, even when the number of graphite plates 22 is reduced, the temperature of the gas can be raised to a desired temperature. For this reason, it can contribute to size reduction of the heating apparatus 10.

  Among the graphite plates 22 constituting the air passage, the graphite plate 22 adjacent to the heated object placement region 28 has a plurality of through holes 26 formed along the axis thereof as shown in FIG. Provided. The through-holes 26 provided in the graphite plate 22 disposed closest to the heated object placement region 28 have a smaller hole diameter and a larger number than the through-holes 24 provided in the other graphite plates 22. Has been. The through hole 26 provided in the graphite plate 22 adjacent to the article to be heated placement region 28 serves as a hot air outlet for the article to be heated placement region 28. For this reason, the flow velocity to be ejected can be increased by reducing the hole diameter.

  The air inlets 32 for introducing the gas into the heating furnace 12 are respectively provided at positions opposite to the heated object placement region 28 through the air passage. By adopting such a configuration, the gas introduced from the air supply port 32 passes through the air blowing path and reaches the heated object placement region 28. In the air passage, the gas rises in temperature by exchanging heat with the graphite plate 22 and the graphite ring 23 heated by induction heating. For this reason, the gas which passes a ventilation path can be converted into high temperature by extending a path | route length by making a ventilation path into a twisted folding shape as mentioned above.

  In addition, the heating device 10 according to the embodiment is located outside the heating furnace 12 at the center of the article to be heated 28, in other words, at a position at an equal distance from the opening end in the graphite 18 formed in a cylindrical shape. An exhaust port 34 having an opening is provided. By adopting such a configuration, the hot air introduced from the end side of the heated object placement region 28 heats the heated object 50 from the end side and is discharged to the outside at the center. Become. For this reason, the temperature gradient of the hot air can be reduced as compared with the case where the exhaust port 34 is arranged close to one of the opening ends of the graphite 18.

  In the heating apparatus 10 according to the present embodiment, the heat insulating material 14 is arranged in a gap generated between the induction heating coil 16 and the graphite 18, the graphite plate 22, and the graphite ring 23. By adopting such a configuration, it is possible to prevent the induction heating coil 16 from being overheated by the radiant heat of the graphite 18, the graphite plate 22, and the graphite ring 23 that have been induction heated, and the inside of the heating furnace 12. The heat retention effect can be enhanced. The heat insulating material 14 may be alumina or the like.

  Moreover, in the heating apparatus 10 of the said embodiment, it is good to comprise the induction heating coil 16 with a cylindrical body. And when the induction heating coil 16 is comprised by the cylindrical body, it is good to provide the refrigerant | coolant supply means (not shown) which supplies refrigerant | coolants, such as cooling water and a cooling gas, inside the induction heating coil 16. FIG. By setting it as such a structure, it becomes possible to let a refrigerant pass through the inside of a cylindrical body. Thereby, it is possible to prevent the induction heating coil 16 from being overheated by heat transfer from the graphite 18, the graphite plate 22, and the graphite ring 23. Moreover, it becomes possible to make the induction heating coil 16 act as a heat-absorbing material by inserting the refrigerant after stopping the supply of electric power to the induction heating coil 16. As a result, heat from the graphite 18 or the like is absorbed, and a temperature lowering action is brought about inside the heating furnace 12.

  Moreover, in the said embodiment, the induction heating coil 16 is described so that it may be an integral thing. However, the induction heating coil 16 employed in the present embodiment may be divided into a plurality along the winding surface as shown in FIG. And when the induction heating coil 16 is divided | segmented into plurality, the power supply part 17 (17a-17d) which enables electric power control to each induction heating coil 16 (16a-16d) individually is connected. It is desirable. With such a configuration, for example, the hot air generating means 20 is individually heated by the induction heating coil 16a serving as the first zone and the induction heating coil 16d serving as the fourth zone, and the induction heating coil 16b serving as the second zone. And the induction heating coil 16c in the third zone can heat the graphite 18. Thereby, the graphite 18, the graphite plate 22, and the graphite ring 23 can be adjusted to desired temperature, and the heating state of the to-be-heated material 50 can be stabilized.

  Further, in the heating apparatus 10 according to the present embodiment, the mounting table 30 is disposed in the heated object mounting region 28, and the heated object 50 is mounted on the mounting table 30. In the present embodiment, the object to be heated 50 is heated from both the upper surface side and the lower surface side in the drawing. For this reason, by adjusting the mounting height of the object 50 to be heated by the mounting table 30, the distance from the upper graphite 18 to the object 50 to be heated, and the lower graphite 18 and the object 50 to be heated in the figure. The distance can be made equal. Thereby, the temperature difference which arises in the upper surface side and the lower surface side of the to-be-heated material 50 can be suppressed. It should be noted that the constituent member of the mounting table 30 may be transparent quartz or the like. This is because it is resistant to thermal shock and has heat resistance and heat permeability.

Next, heating of the article to be heated 50 by the heating apparatus 10 having the above configuration will be described.
First, the object to be heated 50 is mounted on the mounting table 30 provided in the object to be heated mounting area 28. Next, power is supplied to the induction heating coil 16 to heat the graphite 18, the graphite plate 22, and the graphite ring 23 that are induction heating members.

  When the graphite 18, the graphite plate 22, and the graphite ring 23 are heated, the heated object 50 is rapidly heated by the combined heating by the hot air from the hot air generating means 20 and the radiant heat from the graphite 28. Become.

  After the object to be heated 50 is heated to a desired temperature, the graphite 18, the graphite plate 22 constituting the hot air generating means 20, and the graphite ring 23 are controlled so as to coincide with the desired temperature. As a result, the hot air generated by the hot air generating means 20 also has a desired temperature, and the object to be heated 50 can be reliably heated at the desired temperature. Since all the ambient temperatures of the object to be heated 50 become the desired temperature, there is no possibility of a temperature drop due to heat dissipation or an excessive temperature rise.

  Further, according to the heating apparatus 10 according to the present embodiment, even heating can be performed even when an object having an irregular shape as shown in FIG. The object to be heated 50 shown in FIG. 7 is an object provided with a part having a small heat capacity (quasi-heated part 54) at the center of the object and a part having a large heat capacity (main heated part 52) at the end of the object. Usually, when the object to be heated 50 having such a configuration is heated, there is a problem that a large amount of time is spent until a portion having a large heat capacity reaches a desired temperature, or a portion having a small heat capacity falls into an overheated state. Arise. However, according to the heating device 10 having the configuration according to the present embodiment, the semi-heated portion 54 in the heated object 50 is rapidly heated mainly by radiant heating via the graphite 18. On the other hand, the main heated portion 52 is mainly subjected to combined heating by radiant heat from the graphite 18 and the graphite plate 22 and hot air ejected from the air passage. For this reason, even the main heated part 52 having a large heat capacity can be rapidly heated in the same manner as the semi-heated part 54. Further, as in the example shown in FIG. 6, when the induction heating coil 16 is divided into a plurality of parts and the power supplied to each induction heating coil 16 can be individually controlled, the temperature of the graphite 18 and the graphite plate 22, the temperature of the hot air passing through the graphite ring 23 and the air passage can be individually controlled. Therefore, even the object to be heated 50 having a large heat capacity portion or a small portion in a complex manner can be uniformly heated in a short time with high accuracy.

  Moreover, in the heating apparatus 10 which concerns on this embodiment, the means to heat the to-be-heated material 50 directly by induction heating is not taken. For this reason, even if the article to be heated 50 is a conductive member, there is little possibility that the article to be heated 50 is directly heated and the temperature distribution is disturbed. Further, even when the object to be heated 50 is a conductive member and includes such a proximity part (soft contact part), there is no possibility of discharge based on eddy currents.

  Moreover, in the said embodiment, it described that the control means determined the input electric power with respect to the induction heating coil 16 by detecting the temperature of the graphite 18 grade | etc.,. However, the power control by the control means may be performed based on a control map indicating a relationship between the temperature distribution and the input power (current) in advance.

DESCRIPTION OF SYMBOLS 10 ......... Heating apparatus, 14 ......... Insulation, 16 ......... Induction heating coil, 18 ......... Graphite, 20 ......... Hot air generating means, 22 ......... Graphite plate, 23 ......... Graphite ring, 24... Through-hole, 26... Through-hole, 28... Heated object placement area, 30. ... Substance to be heated.

Claims (6)

An induction heating coil provided opposite to the heated object placement area;
An induction heating member provided between the heated object placement region and the induction heating coil;
Hot air generating means that is disposed in the magnetic flux arrival region by the induction heating coil and that blows hot air to the heated object placement region;
Control means for causing the temperature of the induction heating member and the temperature of hot air generated by the hot air generation means to coincide with a desired temperature;
A heating apparatus comprising: The hot air generating means includes
2. The heating apparatus according to claim 1, wherein the heating apparatus comprises a blower path constituted by a plurality of induction heating plates arranged with a gap therebetween. The induction heating plate is provided with a through hole in the vicinity of one end in the longitudinal direction,
3. The heating apparatus according to claim 2, wherein the induction heating plates arranged adjacent to each other are arranged so that the end portion on the through hole arrangement side is reversed.   The heating apparatus according to claim 2 or 3, wherein the gap between the induction heating plates is configured by holding an induction heating ring.   The said induction heating coil is divided | segmented so that at least the said induction heating member and the hot-air production | generation means comprised by the said induction heating plate and the said induction heating ring can be heated separately. 4. The heating device according to 4.   The heating apparatus according to any one of claims 1 to 5, wherein the induction heating coil is configured by a cylindrical body into which a refrigerant can be inserted.

Images