JP2013200944A - Light source device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a light source device capable of detecting leakage of a coolant from a cooling system for cooling the light source device and preventing damage to a light source and a power source due to adhesion of the coolant.SOLUTION: A light source device includes: a conductive cooling section 1 capable of internally circulating coolant; irradiation sections 21a, 21b connected at the outside of the cooling section 1 so as to be cooled with the coolant; a detection electrode 41 arranged at a position electrically insulated against the cooling section 1 and at a position where the coolant can be crosslinked between the cooling section 1 and the detection electrode 41 when the coolant leaks from the cooling section 1; and a detection section 51 for detecting electric characteristics between the detection electrode 41 and the cooling section 1, and detecting leakage by means of the changes in the electric characteristics.

Description

  Embodiments described herein relate generally to a light source device.

For example, liquid crystal and semiconductor manufacturing processes, fluid sterilization and photoreaction processing, lighting,
A light source device used for a photochemical reaction or the like is required to increase the amount of light. In order to obtain a large amount of light, it is necessary to turn on the light source by turning on a large amount of power. However, there is a problem that the conversion efficiency of the light source device is lowered or the life is shortened due to the influence of heat generated from the light source or the power source.

  In this type of light source device, a liquid cooling type cooling system using a cooling liquid is used to reduce heat generation from the light source and the power source, thereby achieving higher efficiency and longer life. However, if the coolant leaks from the cooling system due to a manufacturing failure of the light source device or deterioration of parts, for example, the coolant may adhere to the light source or the power source, causing an electrical short circuit, which may damage the light source or the power source. In order to ensure safety, it is necessary to accurately detect liquid leakage.

JP 2002-14068 A

  The problem to be solved by the present invention is to provide a light source device that can detect a leakage of coolant from a cooling system that cools the light source device and prevent damage to the light source and power supply accompanying the attachment of the coolant. There is.

  The light source device according to the present embodiment includes a conductive cooling unit capable of circulating a cooling liquid therein, an irradiation unit connected to the outside of the cooling unit so as to be cooled by the cooling liquid, and the cooling unit. And a detection electrode provided at a position where the cooling liquid can be bridged with the cooling section when the cooling liquid leaks from the cooling section. And a detecting unit for detecting the liquid leakage from a change in the electric characteristic.

It is a disassembled perspective view for demonstrating the light source device in 1st Embodiment. It is an external appearance perspective view for demonstrating the assembly state of the light source device shown in FIG. It is sectional drawing for demonstrating the cross-section of the light source device shown in FIG. It is the schematic for demonstrating the cooling system and system configuration | structure of a light source device. It is an external view for demonstrating the example of installation of the detection electrode to an irradiation part. It is the schematic of the method of detecting the liquid leakage of the cooling fluid from a cooling unit using the detection electrode provided in the irradiation part. It is the schematic for demonstrating the circuit structure and detection method of a detection part. It is sectional drawing for demonstrating the light source device of 2nd Embodiment. FIG. 9 is a schematic diagram for explaining a method of detecting a leakage of coolant by providing a detection electrode in the power supply unit in the configuration of FIG. 8. It is the schematic for demonstrating the light source device of 3rd Embodiment.

  Hereinafter, embodiments for carrying out the invention will be described.

(First embodiment)
A light source device according to a first embodiment will be described with reference to the drawings. 1 is an exploded perspective view of the light source device, FIG. 2 is an external perspective view for explaining an assembled state of the light source device shown in FIG. 1, and FIG. 3 is a sectional view for explaining the cross-sectional structure of the light source device shown in FIG. It is sectional drawing. FIG. 4 is a schematic diagram for explaining a cooling system and a system configuration of the light source device. In FIG. 4, the light source device is schematically illustrated in a plane in order to simplify the description.

  The light source device 100 of the first embodiment is a light source device used for manufacturing processes such as liquid crystals and semiconductors, fluid sterilization, photoreaction processing, illumination, and the like, and includes a cooling unit 1 as a main part.

  The cooling unit 1 has a configuration in which a plurality of irradiation units 21a and 21b are placed on the outer peripheral surface, and heat generated from the irradiation units 21a and 21b is cooled by a liquid cooling method.

  For example, as shown in FIG. 1, the cooling unit 1 is configured such that four ends of an assembly in which four cooling bases 111 having the same shape are arranged in an annular shape are opened via joining members 131 and 132 that prevent liquid leakage. These are columnar bodies having structures fixed by lid portions 141 and 151, each having a substantially octagonal outer peripheral shape and an octagonal inner peripheral shape.

  Inside the space between the exterior surface 112 and the interior surface 113 of the cooling base 111, cooling water channels 121 to 128 penetrating in the longitudinal direction are formed by, for example, extrusion molding or excavation. The cooling water paths 121 to 128 are paths through which a cooling liquid, which will be described later, circulates. For example, the cooling water paths 121 to 128 are provided for each of the two exterior surfaces 112.

  As shown in FIG. 4, the lid 141 that closes one end side in the longitudinal direction of the cooling base 111 is connected to connect the cooling water channels 121 and 122, 123 and 124, 125 and 126, and 127 and 128, respectively. Paths 142, 143, 144, and 145 are provided. Further, the lid 151 that closes the other end side in the longitudinal direction of the cooling base body 111 is connected to cooling passages 122 and 123, 124 and 125, and 126 and 127, respectively. An intake port 155 connected to the water channel 121 and a drain port 156 connected to the cooling water channel 128 are provided. The connection paths 142 to 145 and 152 to 154 have a U-shaped cross section, for example.

  As a result, a series of flow paths through which the cooling liquid flows are formed between the intake port 155 and the drain port 156 in the cooling unit 1.

  The cooling base 111 and the lids 141 and 151 are made of a conductive metal such as stainless steel, aluminum alloy, or copper.

  The joining members 131 and 132 are fixing sealing materials used for providing airtightness and watertightness on the joining surface. The joining members 131 and 132 are gaskets and have a configuration in which an insulator such as rubber or resin, a metal body, or a composite body of an insulator and a metal body is processed into a sheet shape in accordance with the joining shape.

For example, a 16-sided rectangular exterior surface 112 is provided on the outer peripheral portion of the cooling base 111 assembly, and is formed in a zigzag shape having continuous mountain folds and valley folds. Irradiation parts 21 a and 21 b are placed on the exterior surface 112.
Here, the angle α between the exterior surfaces 112 of the valley fold portion is set at, for example, 135 degrees, and the emitted light from the irradiation units 21a and 21b placed on one exterior surface 112 of the valley portion is the other. Adjustment is made so as to reduce the incidence of light loss on the irradiation parts 21a and 21b placed on the exterior surface 112. In this manner, by forming the plurality of exterior surfaces 112, the plurality of irradiation units 21a and 21b can be efficiently arranged without increasing the size of the cooling unit 1, and the light quantity of the light source device can be increased. realizable.

  The irradiation units 21a and 21b have a configuration in which a predetermined number of light emitting diodes (LEDs) 212 are arranged in a matrix on one side of a rectangular substrate 211, for example.

  As the substrate 211, a ceramic substrate such as aluminum nitride or alumina is used.

  The light-emitting diode 212 is a light-emitting diode that emits ultraviolet light, visible light, or infrared light, and a type having a wavelength of light emission required for the application of the light source device 100 is selected. The light emitting diode 212 is a surface-mounting type light emitting diode having a substantially rectangular shape of 3 mm to 4 mm square, for example, and the light distribution characteristic is adjusted by a lens member provided on the emission surface. For example, the light emitting diodes 212 are mounted on the substrate 211 at intervals of 0.5 mm to 1 mm. The light emitting diode 212 is electrically connected by a wiring pattern (not shown) provided on the substrate 211, and emits light when power is supplied from the power supply unit 22 as shown in FIG.

  As shown in FIG. 4, the heat generated when the irradiation units 21 a and 21 b are turned on fills the cooling water channels 121 to 128 and the connection channels 142 to 145 and 152 to 154 in the cooling unit 1 and circulates them. Can be liquid-cooled. As the cooling liquid, water, oil, or the like is used.

  For example, the coolant that has received the heat generated from the irradiation units 21 a and 21 b is discharged from the drain port 156, and then sent to the cold liquid unit 32 through the liquid supply pipe 31 to be cooled. The cold liquid part 32 is comprised from a cooling tank, a heat exchanger, etc.

  The cooled coolant is, for example, via a liquid feed pipe 33, a pump 34 for circulating the coolant, a liquid feed pipe 35, an electromagnetic valve 36 for electronically controlling the amount of coolant supplied, and a liquid feed pipe 37. And supplied to the water intake 155 of the cooling unit 1.

  The coolant again circulates in the cooling water channels 121 to 128 and the connection channels 142 to 145 and 152 to 154 of the cooling unit 1 and is used for exhaust heat from the irradiation units 21a and 21b. By repeating this, the irradiation unit 21a, 21b is cooled. By cooling the irradiation parts 21a and 21b, the temperature of the light emitting diode 212 can be reduced, and the decrease in the light emission efficiency and the thermal deterioration of the member due to heat can be suppressed.

  By the way, the cooling base 111 and the lid portions 141 and 151 are airtightly joined through the joining members 131 and 132. However, the airtightness is deteriorated due to a manufacturing defect or deterioration of the joining members 131 and 132 due to thermal or temporal deterioration. There is a possibility that the cooling liquid W may leak from these joints.

  In order to detect liquid leakage from these joint surfaces, a position (first position condition) that is electrically insulated from the exterior surface 112 of the cooling base 111 of the cooling unit 1 and the liquid from the cooling unit 1 The detection electrode 41 is arranged at a position that satisfies both the position (second position condition) where the coolant W can be bridged between the outer surface 112 and the exterior surface 112 at the time of leakage.

  For example, when arrange | positioning so that the longitudinal direction of the cooling part 1 may follow a gravity direction, the cooling fluid which has leaked has the property to move below by gravity. In this case, for example, as shown in FIG. 5, the upper surface of the substrate 211 (second position condition) on the surface side (first position condition) on which the light emitting diode 212 of the substrate 211 of the irradiation unit 21 a disposed at the uppermost part is mounted. By disposing the linear detection electrode 41 at the position (positional condition), it is possible to detect liquid leakage from the bonding surface between the upper lid portion 151 and the cooling base 111 and the bonding member 132. The detection electrode 41 is conductive, and is formed by printing, vapor deposition, or the like on a substrate 211 such as a silver paste, solder, or a gold plating pattern.

  A schematic diagram of a method for detecting the leakage of the coolant W from the cooling unit 1 using the detection electrode 41 is shown in FIG. When there is no liquid leakage, as shown in FIG. 6A, an air layer as an insulating layer and the substrate 211 are interposed between the detection electrode 41 and the exterior surface 112 of the cooling base 111, The two are electrically insulated. Here, the cooling base 111 is connected to, for example, a power supply unit 22 or a ground terminal provided outside via a harness, and is subjected to a grounding process G.

  On the other hand, when the coolant W leaks, for example, as shown in FIG. 6B, the coolant W is lowered along the exterior surface 112 of the cooling base 111 due to gravity or surface tension. It moves and reaches on the substrate 211 of the irradiation part 21a. When the coolant W crosslinks between the detection electrode 41 on the substrate 211 and the cooling base 111, that is, when the coolant W is continuously connected, the coolant W is electrically conductive and energizes the detection electrode 41. The electrical characteristics between the cooling body 111 and the cooling base 111, for example, resistance, capacitance, etc. change. By detecting a change in electrical characteristics between the detection electrode 41 and the cooling base 111 by the detection unit 51, it is possible to determine whether or not the coolant W has leaked. For example, as shown in FIG. 6, the detection unit 51 is provided with an output terminal Vo, and outputs a low voltage (low) when there is no liquid leakage, and a high voltage (high) when a liquid leakage is detected. To output.

  FIG. 7 shows an example of the circuit configuration of the detection unit 51. The detection unit 51 performs determination using a comparator (comparator) 511. The comparator 511 is configured to receive the input voltage Vi and the reference voltage Vr and output different output voltages Vo depending on the magnitude of the input voltage Vi and the reference voltage Vr. For example, the comparator 511 outputs a low voltage (low) signal as the output voltage Vo when the input voltage Vi is larger than the reference voltage Vr, and conversely, when the input voltage Vi is smaller than the reference voltage Vr. Outputs a high voltage signal as the output voltage Vo.

  The power source Vc, the resistor R1, and the resistor R2 are connected in series, and the power source Vc and the resistor R2 are grounded. Here, the potential between the resistors R2 is input to the comparator 511 as the reference voltage Vr. When the potential of the power supply Vc is E, the resistance value of the resistor R1 is r1, and the resistance value of the resistor R2 is r2, the reference voltage Vr is given by Vr = r2 × E / (r1 + r2).

  On the other hand, the output from the detection electrode 41 is connected in series with the power source Vc via the resistor R3. Here, the power source Vc and the cooling base 111 are grounded G, and the potential of the detection electrode 41 with respect to the exterior surface 112 of the cooling base 111 is input to the comparator 511 as the input voltage Vi.

  As shown in FIG. 6A, when the coolant W does not exist between the detection electrode 41 and the cooling base 111, an insulator is formed between the two, so that the input voltage Vi is equal to the potential E of the power source Vc. It becomes equal and becomes larger than the above-mentioned reference voltage Vr, and the output Vo of the comparator 511 outputs a low voltage signal.

  As shown in FIG. 6B, when the coolant W is interposed between the detection electrode 41 and the cooling base 111, the coolant W has conductivity, so that a current flows between them. That is, the coolant W becomes the resistance Rw in terms of an equivalent circuit. Here, assuming that the resistance value of the coolant resistance Rw is rw and the resistance value of the resistor R3 is r3, the input voltage Vi is given by Vi = rw × E / (r3 + rw). Here, the resistor r3 is adjusted so that the input voltage Vi becomes smaller than the reference voltage Vr, and thereby the comparator 511 outputs a high voltage (high) signal. The comparator 511 can output different signals depending on whether or not the coolant W leaks.

  The output signal Vo from the detection unit 51 is guided to the control unit 61 as shown in FIG. 4, for example. For example, the control unit 61 that has detected the liquid leakage abnormality automatically stops the power supply unit 22 to cut off the power supply to the irradiation units 21a and 21b. As a result, it is possible to prevent an electrical short circuit caused by the coolant W of the irradiation units 21a and 21b, and to prevent the irradiation units 21a and 21b from being damaged in advance. In addition, leakage due to the energized coolant W can be prevented, and operator safety can be ensured.

In addition, the electromagnetic valve 36 connected to the control unit 61 is controlled to automatically stop the supply of the cooling liquid to the cooling unit 1 to suppress the expansion of the liquid leakage of the cooling liquid and to operate the alarm device 63. Thus, it is possible to notify the operator of an abnormality by an alarm sound or flashing light. An operator who detects an abnormality can stop the light source device or perform a recovery operation from the abnormality using the operation panel 62 or the like, and can improve the safety of the light source device when an abnormality occurs.
(Second Embodiment)
8 and 9 are cross-sectional views of the light source device for explaining a second embodiment related to the light source device. About each part of this 2nd Embodiment, the same part as each part of the light source device of 1st Embodiment is shown with the same code | symbol.

  In the second embodiment, the power supply unit 22 is installed on the interior surface 113 of the cooling base 111 of the cooling unit 1. Thereby, the power supply part 22 can also be efficiently cooled with a cooling liquid similarly to the irradiation part 21b.

  The area of the exterior surface 112 on which the irradiation unit 21b is installed is configured to be larger than the area of the interior surface 113 on which the power supply unit 22 is installed, so that the plurality of irradiation units 21b can be made efficient without causing an increase in the size of the cooling unit 1. Therefore, it is possible to increase the light quantity of the light source device.

  The power supply unit 22 has, for example, a configuration in which the circuit component 222 is mounted on the substrate 221, and generates heat from a heat generating component such as a resistance of the circuit component or a transistor. Although the amount of heat generated from the power supply unit 22 is smaller than the amount of heat generated from the irradiation unit 21b, when the circuit component 222 of the power supply unit 22 rises in temperature, malfunction of the circuit, reduction in circuit loss, and reduction in circuit life occur. . By cooling the power supply unit 22 according to the same principle as in the first embodiment, the influence of heat on the circuit component 222 can be suppressed, stable circuit operation can be ensured, and circuit efficiency and circuit life can be improved. be able to.

  For example, the power supply unit 22 is disposed on the interior surface 113 so as to straddle two cooling water channels 121 and 122, 123 and 124, 125 and 126, and 127 and 128 having different directions of the coolant. Cooling efficiency can be improved by liquid-cooling the power supply part 22 via two cooling water channels.

In the second embodiment, as shown in FIG. 9, the cooling unit 1 is arranged so that the longitudinal direction thereof is along the direction of gravity, and the surface side on which the circuit component 222 of the substrate 221 of the power supply unit 22 is mounted ( The detection electrode 41 for detecting the leakage of the coolant W is formed at a position on the lid 151 side (second position condition) that is the upper side of gravity under the first position condition). By detecting an electrical change between the detection electrode 41 and the cooling base 111 of the cooling unit 1 by the detection unit 51 as in the first embodiment, it is possible to detect the presence or absence of liquid leakage of the cooling liquid W. it can.
(Third embodiment)
FIG. 10 is a cross-sectional view of a light source device for explaining a third embodiment related to the light source device. About each part of this 3rd Embodiment, the same part as each part of the light source device of 1st Embodiment is shown with the same code | symbol.

  In 3rd Embodiment, it is the structure which has arrange | positioned the detection electrode 41 which detects the liquid leak from the cooling unit 1 in the joining member 132 interposed between the cooling base | substrate 111 of the cooling unit 1, and the cover part 151. FIG. .

  The detection electrode 41 ensures insulation between the detection electrode 41 and the cooling base 111 and the lid 151 by interposing an insulating bonding member 132 between the cooling base 111 and the lid 151. ing. The side of the detection electrode 41 facing the cooling passages 121 to 128 is exposed to the air layer. The detection electrode 41 is separated from the cooling base 111 and the lid 151 via the bonding member 132 and the air layer, and is in an insulated state (first position condition). On the other hand, the cooling electrode 121 to 128 side of the detection electrode 41 is covered with the joining member 132, and the detection electrode 41, the cooling base 111, and the lid 151 are connected to each other through the cooling liquid circulating through the cooling passages 121 to 128. However, it is not energized.

  When liquid leakage of the cooling liquid W occurs, the joining member is configured so that the cooling liquid bridges between the detection electrode 41 and the cooling base 111 or between the detection electrode 41 and the lid portion 151 (second position condition). The thickness of 132 is adjusted.

  The detection electrode 41 is connected to the detection unit 51. Here, in order to facilitate the connection between the detection electrode 41 and the output line, for example, the detection electrode 41 is partially enlarged and protruded from the cooling unit 1, and a terminal is connected at the protruding portion (not shown). Take the configuration.

  A method of detecting the leakage of the coolant W from the cooling unit 1 using the detection electrode 41 will be described with reference to FIG. When there is no liquid leakage, as shown in FIG. 10A, an insulating bonding member 132 and an air layer are interposed between the detection electrode 41 and the cooling base 111 and the lid 151. There is no electrical conduction between the two. Here, the cooling base 111 or the lid 151 is subjected to a grounding process G, for example.

  On the other hand, when the leakage of the coolant W occurs, for example, as shown in FIG. 10B, the coolant W is a part of the surface of the cooling base 111, the detection electrode 41, the joining member 132, and the lid 151. Cover. When the coolant W is bridged between the detection electrode 41 and the cooling base 111 or between the detection electrode 41 and the lid 151, the coolant W is electrically conductive and energizes. The electrical characteristics between the substrate 111 or the detection electrode 41 and the lid 151, such as resistance and capacitance, change. As in the first embodiment, the detection unit 51 detects a change in electrical characteristics between the detection electrode 41 and the cooling base 111 or between the detection electrode 41 and the lid 151, so that the coolant W The presence or absence of liquid leakage can be detected.

  In the first embodiment and the second embodiment, it is possible to detect the leakage of the coolant W that moves downward from above the gravity of the cooling unit 1, whereas in the third embodiment, the detection electrode 41 is provided. The liquid leakage of the cooling liquid W can be detected without considering the leakage direction of the cooling liquid due to gravity by disposing it on the joint surface on the lid 141 side of the cooling base 111 where the liquid leakage occurs. is there. As a result, detection with a configuration other than the longitudinal direction of the cooling unit 1 extending along the direction of gravity and detection on the lid unit 151 side in addition to the lid unit 141 side of the cooling base 111 are possible. Accuracy can be improved.

  The present invention is not limited to the above embodiment, and various modifications are possible.

  For example, since the light sources of the irradiation units 21a and 21b may be any light source according to the application, they can be replaced with a metal halide lamp, a low-pressure mercury lamp, an HID lamp, or a laser diode in addition to the light emitting diode. The power supply unit 22 can have a configuration suitable for each light source.

  Although the usage form of the light source device showed the structure which has arrange | positioned the longitudinal direction of the elongate cooling part 1 in the direction in alignment with a gravitational direction, the structure inclined with respect to the gravitational direction and the structure arrange | positioned in a horizontal direction are also shown. good. In this case, the cooling liquid moves below gravity and spreads along a part of the surface of the cooling unit 1 due to the surface tension of the cooling liquid. A configuration in which the detection electrode 41 is disposed in that portion may be obtained by determination in terms of experience and experience.

  The cooling unit 1 and the irradiation units 21a and 21b may be used with a configuration in which the periphery is covered with, for example, quartz glass and penetrates into the processing liquid. In this case, the detection electrode 41 may be used to detect a leakage of the processing liquid accompanying the cracking of the quartz glass.

  In addition, the moisture in the air condenses with the cooling by the cooling unit 1 and adheres to the irradiation units 21 a and 21 b and the power supply unit 22, so that the moisture of the condensation may be detected by the detection electrode 41.

  The configuration of the detection electrode 41 provided in a part of the irradiation units 21a and 21b or a part of the power supply unit 22 is shown. For example, the detection electrode 41 is provided in the lid 141 on the gravity side shown in FIG. A configuration may be adopted in which an independent substrate is arranged and coolant that leaks downward from the joint surface on the lid 141 side of the cooling base 111 is detected.

  Although the detection unit 51 has shown the circuit configuration using the comparator, for example, a microcomputer may be used.

  Although several embodiments of the present invention have been described, these embodiments are presented by way of example and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

100 Light source device 1 Cooling unit
21a, 21b Irradiation part 211 Substrate 212 Light emitting diode (LED)
22 Power supply part 41 Detection electrode 51 Detection part 61 Control part W Cooling liquid

Claims (3)

A conductive cooling section capable of circulating a coolant inside;
An irradiation unit connected to the outside of the cooling unit so as to be cooled by the cooling liquid;
A detection electrode provided at a position that is electrically insulated from the cooling section and at a position where the cooling liquid can be bridged with the cooling section when the cooling liquid leaks from the cooling section. When,
A detection unit that detects an electrical characteristic between the detection electrode and the cooling unit, and detects the liquid leakage from a change in the electrical characteristic;
A light source device comprising:   The cooling unit has a long shape, and is arranged such that its longitudinal direction is along the direction of gravity, and the irradiation unit is a substrate connected to the outside of the cooling unit and a light emission mounted on the substrate. The light source device according to claim 1, further comprising a diode, wherein the detection electrode is provided at an upper end portion on the substrate.   A power supply unit that supplies power to the irradiation unit; and a control circuit that controls driving of the power supply unit, wherein the control unit drives the power supply unit when the detection unit detects the liquid leakage. The light source device according to claim 1, wherein the light source device is stopped.

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