JP2013200283A - Method and device for measuring filler in synthetic resin film - Google Patents

Abstract

PROBLEM TO BE SOLVED: To measure a filling rate of a filler in a synthetic resin film, a dimension of the filler, and non-uniformity of filler distribution by quick and simple processing.SOLUTION: A film material formed by mixing minute filler in a synthetic resin base material is defined as a measuring object 100, X ray is applied to the measuring object 100, and a state of the filler is measured from a transmission quantity of the X ray. The method for measuring filler includes: dividing a measurement field of the measuring object into micro regions a, b, c, ...; obtaining detection values of the X rays transmitting the micro regions a, b, c, ...; creating frequency distribution of the detection values in the respective micro regions; and arithmetically processing the obtained frequency distribution to calculate the filling rate of the filler, the dimension of the filler, and the like.

Description

  The present invention relates to a synthetic resin film filler measurement method and a synthetic resin film filler measurement device, and more particularly, from the amount of electromagnetic wave transmission of a synthetic resin sheet in which a fine filler is mixed into a synthetic resin substrate. The present invention relates to a method for measuring a filler for a synthetic resin film and a device for measuring a filler for a synthetic resin film.

  Examples of the synthetic resin film include a conductive film having conductivity and an insulating film having insulation. The conductive film is manufactured by mixing metal particles or the like as a conductor as a filler in a synthetic resin base material, and the insulating film is manufactured by mixing ceramic fine particles or the like as an insulator in the synthetic resin base material. . FIG. 15 is a schematic diagram showing a configuration of a synthetic resin film that is an object to be measured. Any synthetic resin film 10 has a thickness dimension of 100 to 200 μm as shown in FIG. 15A, for example, and as shown in FIG. For example, fine particles of several μm to several tens of μm are mixed. In addition, since the shape of the microparticles | fine-particles in FIG.15 (b) is modeled, it differs from an actual shape.

  When inspecting such a synthetic resin film, there is a demand to measure the filling rate, average particle diameter, and distribution state of the filler in a non-destructive and non-contact manner. This is done in the shortest possible time during the flow operation during the production and acceptance of the synthetic resin film.

  As a method for nondestructively measuring the filling rate of the synthetic resin film filler, there is the following method. FIG. 16 is a schematic view showing an example of a conventional method for measuring a filler of a synthetic resin film. In this case, visible light is irradiated with the synthetic resin film 10 as an object to be measured, and the transmission state is observed. A projected image 21 (FIG. 16C) is obtained with the transmitted light.

  However, in the case of observing the optical projection image 21, if the filler 12 is overlapped in the projection direction, the overlapping state cannot be grasped and the filling rate cannot be measured accurately. Moreover, it is difficult to control the reflection of light on the incident surface, and the measurement accuracy is poor. Furthermore, there is a problem that a measurement error occurs due to unnecessary reflection by the filler inside the object to be measured.

  As a measurement method using X-rays, Patent Document 1 measures the relationship between the density measured in advance by the Archimedes method and the amount of X-ray transmission as shown in FIG. A method for calculating the specific gravity of the measurement location, that is, the filling rate, from the X-ray transmission image of the object to be measured ((a) in the figure) is disclosed.

  Further, Patent Document 2 discloses a method in which the object to be measured is divided into a plurality of regions, the mass for each region is obtained from the amount of X-ray transmission, and the mass of the entire region is obtained by integration over the entire region.

JP 2001-201465 A Japanese Patent Laid-Open No. 2002-296022

  However, the method described in Patent Document 1 can measure the density of a uniform object to be measured, but cannot measure a non-uniform object to be measured, and measures the size and surface distribution of the filler. There is a problem that you can not.

  Moreover, although the method of patent document 2 can measure the average mass of a to-be-measured object, it cannot measure the magnitude | size and surface distribution of a filler, and is compared with the calibration curve obtained beforehand. In addition, since it is necessary to perform integration over the entire region, there is a problem that time and labor are required for the calculation.

  The present invention has been made in view of the above-mentioned problems, and it is possible to measure the filling rate of the filler in the synthetic resin film, the size of the filler, and the non-uniformity of the filler distribution by a quick and simple process. An object of the present invention is to provide a synthetic resin film filler measurement method and a synthetic resin film filler measurement apparatus.

The invention according to claim 1, which solves the above problem, uses a film material in which a fine filler is mixed in a synthetic resin substrate as a measurement object, irradiates the measurement object with electromagnetic waves, and transmits the electromagnetic waves. In the filler measurement method for a synthetic resin film material that measures the state of the filler from the quantity, the measurement area of the object to be measured is divided into minute areas, and the detected value of the electromagnetic wave that has passed through the minute area is obtained, and each minute quantity A frequency distribution of detection values in a region is created, and the obtained frequency distribution is processed to calculate the state of the filler.
According to the present invention, the frequency distribution of the detected values in the micro area is calculated to obtain the state of the filler, so that the process can be performed easily and quickly, and the state of the filler in the synthetic resin film is measured. be able to.

Similarly, the invention of claim 2 is the method for measuring a filler of a synthetic resin film according to claim 1, wherein the statistical processing is to obtain an average value of the frequency distribution state, and the measured object is obtained from the obtained average value. The average filling rate of the filler in is obtained.
According to the present invention, since the average value of the detected values in the minute region is obtained, the average filling rate of the filler can be obtained easily, with high accuracy and quickly.

Similarly, the invention of claim 3 is the synthetic resin film filler measurement method according to claim 1, wherein the divided micro-regions are set to have a plurality of different areas, and the amount of electromagnetic wave transmitted is set for each micro-area of different areas. Detect and create a frequency distribution of the detected values for each area of the micro area, obtain a relationship curve between the area of the micro area and the variance value based on the frequency distribution of the detected value, and based on the variation of the relationship curve And measuring the size of the filler.
According to the present invention, the size of the filler can be determined easily and quickly from the change in the relationship curve between the area of the minute region and the dispersion value.

Similarly, the invention of claim 4 is the method for measuring a filler of a synthetic resin film according to claim 1, wherein a minute region is set on the line of the object to be measured, and the filler in the line is determined from the detected value in the minute region. The average filling rate and the dispersion value are obtained.
According to the present invention, the average filling factor on the line of the object to be measured and the dispersion value can be obtained easily and quickly, which is suitable for measuring the object to be measured during conveyance.

Similarly, the invention of claim 5 is characterized in that, in the synthetic resin film filler measurement method according to claim 1, uniformity of the filler in the measurement region is determined from the frequency distribution of the detected values.
According to the present invention, the dispersion uniformity of the filler in the synthetic resin fill can be determined easily and quickly.

Similarly, the invention of claim 6 is the synthetic resin film filler measurement method according to any one of claims 1 to 5, wherein the electromagnetic wave is an X-ray.
According to the present invention, X-rays having a predetermined intensity and wavelength can be used in accordance with the physical properties of the object to be measured.

According to a seventh aspect of the present invention, in the synthetic resin film filler measurement apparatus, a sheet in which a fine filler is mixed into a base material is used as an object to be measured, and the object to be measured is irradiated with an electromagnetic wave. In the filler measuring apparatus for measuring the state of the filler from the electromagnetic wave source, the electromagnetic wave source for irradiating the object to be measured, the detecting means for detecting the transmission amount of the electromagnetic wave in each region of the object to be measured, and the minute amount region Computational processing means for creating a frequency distribution of detected values and calculating the state of the filler by calculating the acquired frequency distribution.
According to the present invention, the frequency distribution of the detected values in the micro area is calculated to obtain the state of the filler, so that the process can be performed easily and quickly, and the state of the filler in the synthetic resin film is measured. be able to.

Similarly, the invention of claim 8 is the synthetic resin film filling material measuring apparatus according to claim 7, wherein the electromagnetic wave source irradiates an electromagnetic wave to a predetermined measurement region of the object to be measured, and the detection means includes an electromagnetic wave The amount of transmission of electromagnetic waves at each point of the measurement region irradiated with is detected.
According to the present invention, the state of the filler in the measurement region can be measured easily and quickly by irradiation with electromagnetic waves for a short time.

Similarly, the invention of claim 9 is the synthetic resin film filling material measuring apparatus according to claim 8, wherein the arithmetic processing means predetermines an irradiation area from a transmission amount at each point of the measurement area acquired by the detection means. The transmission amount in a minute region divided by an area is acquired.
According to the present invention, it is possible to easily and quickly obtain a frequency distribution based on the amount of transmission of a minute region having an arbitrary area with a short-time measurement.

Similarly, the invention of claim 10 is the synthetic resin film filling material measuring apparatus according to any one of claims 7 to 9, wherein a plurality of objects to be measured are sequentially conveyed between the electromagnetic wave source and the detection means. It has the conveyance means to do.
ADVANTAGE OF THE INVENTION According to this invention, it can measure a filler easily and rapidly, conveying a to-be-measured object.

Similarly, the invention of claim 11 is the synthetic resin film filler measurement method according to any one of claims 7 to 10, wherein the electromagnetic wave source irradiates the object to be measured with X-rays, and the detection means is the object to be measured. X-rays transmitted through the measurement object are detected.
According to the present invention, X-rays having a predetermined intensity and wavelength can be used in accordance with the physical properties of the object to be measured.

Similarly, the invention of claim 12 is the synthetic resin film filler measurement method according to any one of claims 7 to 11, wherein the filler measurement method according to any one of claims 1 to 7 is used. Based on this, the state of the filler is calculated.
According to the present invention, the filling rate, the size of the filler, and the non-uniform state of filling can be measured easily and quickly.

  According to the synthetic resin film filler measurement method and the synthetic resin film filler measurement device according to the present invention, the filling rate, the size of the filler, and the filling rate of the filler in the synthetic resin film can be quickly and easily processed. The non-uniformity of the material distribution can be measured.

FIGS. 2A and 2B show an object to be measured, and FIGS. 3A and 3B are X-ray photographs of the object to be measured, and FIG. 3D is a schematic diagram showing a structure of the object to be measured. It is a schematic diagram which shows the basic process of the filler measuring method of the synthetic resin film which concerns on Embodiment 1. FIG. 4 is a graph showing an example of an X-ray transmission number distribution by the method for measuring a filler of a synthetic resin film according to Embodiment 1. It is a graph which shows the calibration curve used for the filler measuring method of the synthetic resin film. It is a graph which shows the case where there are two peaks of frequency distribution in the filler measuring method of the synthetic resin film. It is a schematic diagram which shows the basic process of the filler measuring method of the synthetic resin film which concerns on Embodiment 2. FIG. It is a graph which shows X-ray transmittance number distribution of a to-be-measured object. It is a graph which shows the relationship between the half value width obtained based on the graph shown in FIG. 7, and the area of a micro area | region. It is a graph which shows the X-ray transmittance frequency distribution of another to-be-measured object. It is a graph which shows the relationship between the half value width obtained based on the graph shown in FIG. 9, and the area of a micro area | region. It is a schematic diagram which shows the basic process of the filler measuring method of the synthetic resin film which concerns on Embodiment 3. FIG. The measurement example of the filler measuring method of the synthetic resin film which concerns on Embodiment 3 is shown, (a) is an X-ray photograph which shows the line of measurement, (b) is a graph which shows the X-ray count on a line. . It is a perspective view which shows the external appearance of the synthetic resin film filler measuring apparatus which concerns on Embodiment 4. FIG. It is a block diagram which shows the structure of the filler measuring apparatus of the synthetic resin film shown in FIG. It is a schematic diagram which shows the structure of the synthetic resin film which is a to-be-measured object. It is a schematic diagram which shows an example of the conventional filler measuring method of a synthetic resin film. It is a schematic diagram which shows an example of the conventional filler measuring method of a synthetic resin film.

  Hereinafter, a synthetic resin film filler measurement method and a synthetic resin film filler measurement device according to embodiments for carrying out the present invention will be described.

  First, an object to be measured for measuring a filler by the method for measuring a filler of a synthetic resin film described below will be described. FIG. 1 shows an object to be measured. (A), (b), and (c) are X-ray photographs of the object to be measured, and (d) is a schematic diagram showing the structure of the object to be measured.

  A synthetic resin film as an object to be measured was an insulating film, and three types (A, B, C) were prepared depending on the filling rate of ceramic fine particles and the difference in film thickness. The thickness dimensions of the insulating sheet were A: 130 μm, B: 100 μm, and C: 90 μm. Each insulating film has a structure in which an insulating sheet is sandwiched between two protective materials (thickness: 100 μm) as shown in FIG. This protective material is transparent to X-rays and does not affect the measurement.

  Note that the radiographing area shown in FIG. 1 is 336 μm wide and 256 μm long, and the size of the imaging dots (1 × 1) is 0.25 μm × 0.25 μm. Further, product type names L11091 and C7876 manufactured by Hamamatsu Photonics Co., Ltd. were used as the X-ray source and the X-ray detector. In the following embodiments, X-rays are used for imaging. The optimum wavelength and intensity of the X-ray are selected in advance by experiments in accordance with the material and thickness of the object to be measured. Further, the electromagnetic wave to be used is not necessarily limited to the X-ray, and any other wavelength region can be used as long as it can capture a transmission image of the object to be measured.

<Embodiment 1>
First, the synthetic resin film filler measurement method according to Embodiment 1 will be described. First, the basic processing flow will be described. FIG. 2 is a schematic diagram illustrating a basic process of the synthetic resin film filler measurement method according to the first embodiment.

  In the synthetic resin film filler measurement method according to the first embodiment, first, the measurement region of the object to be measured is divided into minute regions (FIGS. 1A and 1B), and X-rays transmitted through the minute region are measured. Get the detection value. That is, the measurement region 110 of the device under test 100 is divided as shown in FIG. 1B, and minute regions 1, 2, 3, 4,... Are set (the same (a)).

  The size of the minute region is equal to or smaller than the size of the filler of the object to be measured, and a predetermined region that is predetermined as the measurement region is divided. For example, using the apparatus that has taken the X-ray photographs shown in FIGS. 1A, 1B, and 1C, a region of 336 μm in width and 256 μm in length are set as a measurement region, and a micro region of 0.25 μm × 0.25 μm is set as a pixel (1 × 1).

  In the first embodiment, the minute regions 1, 2, 3, 4,... Are set so as to regularly cover the measurement region 110. Thereby, the filling rate of the filler of an insulating film can be measured more correctly. Note that the micro area does not necessarily have to be arranged on the entire measurement area without a gap, and a gap may be formed between the micro area and the micro area. Further, it is not necessary to make the minute regions regularly continuous, and the minute regions may be set at any position in the measurement region with any arrangement pattern. In FIG. 1A, since the size of the filler is emphasized, the size and shape are different from the actual ones.

  Next, the measurement object 100 is irradiated with X-rays to measure the amount of X-ray transmission in each minute region. Specifically, the X-ray count is acquired based on the density of each micro area of the captured X-ray transmission image. Then, as shown in FIG. 2C, a frequency distribution table of count numbers in each minute amount region is created. Next, the average value of the filler distribution measuring method frequency distribution state of the synthetic resin film material is obtained, and the average filling rate of the filler in the object to be measured is obtained from the obtained average value.

  The average value (X-ray average count value) of the frequency distribution represents (average filling rate × thickness) of the object to be measured, and is quantified by a predetermined calculation.

  A measurement example of the synthetic resin film filler measurement method according to Embodiment 1 will be described. FIG. 3 is a graph showing an example of X-ray transmission number distribution by the synthetic resin film filler measurement method according to Embodiment 1, and FIG. 4 is a graph showing a calibration curve used in the synthetic resin film filler measurement method. . The calibration curve graph shown in FIG. 4 is prepared in advance from the relationship between [thickness (mm) × filling rate (vol%)] and the number of X-ray counts.

  In this example, the A, B, and C insulating films described above were used as objects to be measured. From the frequency distribution table obtained in FIG. 3, the average values of the X-ray counts were obtained (in FIG. 3, the respective values are indicated by bars on A, B, and C). And this average value was applied to the calibration curve shown in FIG. 4, and A: filling rate 49 vol%, B: filling rate 49 vol%, and C: 62 vol% were obtained from known thickness dimensions.

  This value agrees with the filling rate (A: 50 vol%, B: 50 vol%, C: 60 vol%) of each object obtained by the destruction method with high accuracy.

  In addition, when the shape of the frequency distribution deviates from the normal distribution, the following determination is performed. FIG. 5 is a graph showing a case where there are two peaks in the frequency distribution in the synthetic resin film filler measurement method. In such a case, the dispersion uniformity of the filler filling rate can be determined from the frequency distribution.

  Specifically, if the frequency distribution has one peak, the dispersion is considered to be uniform. Further, when the frequency distribution has two peaks as shown in FIG. 5, it can be determined that there are two large surface distributions. Furthermore, if there are three peaks, it can be determined that there are three surface distributions, and if the shape of the frequency distribution is distorted, it can be determined that a plurality of surface distributions overlap.

<Embodiment 2>
Next, a method for measuring a filler in a synthetic resin film according to Embodiment 2 will be described. FIG. 6 is a schematic diagram showing a basic process of the synthetic resin film filler measurement method according to the second embodiment. In the synthetic resin film filler measurement method according to the second embodiment, first, when setting a micro area in the measurement area 110 of the object to be measured 100, a plurality of micro areas to be divided are set to have different areas.

  In this example, as shown in FIGS. 6A and 6B, the minimum minute regions a (a1, a2, a3),... Are set first. Next, a micro area b and a micro area c are set. Here, the micro area a is the size of the minimum pixel (1 × 1) for X-ray imaging, the micro area b is four times (2 × 2) the micro area a, and the micro area c is The size is 9 times (3 × 3) the micro area a. In this way, a necessary number of minute regions having different sizes are sequentially set. In this example, it is assumed that the size of the minute region is the size of N 2 times the smallest minute region a (N is a natural number of 2 or more), and the size is displayed as N.

  Next, the amount of X-ray transmission (count number) is counted in each micro area a, b, c,..., And as shown in FIG. The width of the frequency distribution in each minute region, for example, the variance or the half value width is obtained. The same (c) shows the frequency distribution for the minute regions a, b, and c. Next, as shown in FIG. 6C, a relationship curve between the area of the minute regions a, b, c,... And the dispersion value or the half value width is obtained, and the size of the filler is determined based on the change in the relationship curve. Measure the thickness. As a change point identified as a point where this change occurs, for example, an inflection point or an intersection of asymptotes of each curve in a region having a different slope can be adopted.

  Thus, the reason why the average particle diameter of the filler can be determined from the graph change point is as follows. First, when the micro area has an area equal to or smaller than the average particle diameter, the X-ray count number in each micro area is examined. In this case, most of the X-rays are completely blocked or completely transmitted in each minute region, and the variance value of the frequency distribution is maximized. As the micro area increases from the smallest one, the variance of the X-ray count number in the micro area decreases. When the micro area is maximized and the entire measurement area is set, the X-ray count distribution becomes a straight line with the count number N, and the dispersion value becomes zero. When attention is paid to the value of the dispersion value while increasing the area of the minute region in this way, a change occurs when the minute region exceeds the average particle diameter. For this reason, the average particle diameter can be measured by obtaining a graph change point of the dispersion value at which the tendency of the dispersion value changes.

  A measurement example of the synthetic resin film filler measurement method according to Embodiment 2 will be described. First, measurement example 1 will be described. FIG. 7 is a graph showing the X-ray transmission frequency distribution of the object to be measured. In the example shown in FIG. 6, examples of N, 1, 2, 3, 4, 5, 6, 7 are shown as N.

  In the measurement example 1, the micro area a [N = 1 (1 × 1 pixel)] is set to 0.25 μm × 0.25 μm (1 × 1), which is the same as the measurement in the first embodiment. Next, a micro area b [N = 2 (2 × 2 pixels)], a micro area c (N = 3 (4 × 4),...), And a micro area g (N = 7 (64 × 64 pixels)) A larger number is measured as N (for example, N = 100).

  Next, the measurement area was scanned with each of the micro areas a to g, the X-ray transmission amount (X-ray count number) was measured at each scan position, and a frequency distribution curve was drawn based on this (FIG. 7A). ). Since this frequency distribution is based on measured values, unevenness occurs due to noise during measurement and other effects. For this reason, as shown in FIGS. 7B and 7C, the curve is corrected smoothly. Correction is performed by the method of least squares. Then, the six curves are normalized (FIG. 7D), and the half width of each distribution curve is obtained.

  Next, the relationship between the half width and the area of the minute region is graphed to draw a relationship curve. FIG. 8 is a graph showing the relationship between the half width obtained based on the graph shown in FIG. 7 and the area of the minute region. In FIG. 8, the size of the minute region is expressed by using N described above, and the half-value width is expressed by a relative value when N = 1 is 1. Then, a change point of the relation curve, for example, an intersection of asymptotic lines of different inclined portions is obtained. In the example shown in FIG. 8, the intersection of the two asymptotes is N = 20, which indicates that the average particle diameter of the filler is about 0.25 μm × 20 = 5 μm.

  As another measurement example 2, different objects to be measured were measured in the same manner as measurement example 1. FIG. 9 is a graph showing the X-ray transmission frequency distribution of another object to be measured, and FIG. 10 is a graph showing the relationship between the full width at half maximum obtained based on the graph shown in FIG. 9 and the area of the minute region.

  In measurement example 2, the same process as in measurement example 1 is performed, and it is found that the average particle size of the filler in the object to be measured is N = 12, that is, about 0.25 μm × 12 = 3.0 μm.

  In the measurement examples 1 and 2, the case where one type of filler having substantially the same diameter was used was described. When two or more types of diameters are used as the filler, change points appear at two or more locations in the relationship curve. For this reason, the average particle diameter of each filler can be similarly obtained in this case.

<Embodiment 3>
Next, a method for measuring a filler in a synthetic resin film according to Embodiment 3 will be described. FIG. 11 is a schematic diagram showing a basic process of the synthetic resin film filler measurement method according to the third embodiment. In the synthetic resin film filler measurement method according to the third embodiment, first, one line 111 is set on the device under test 100 as shown in FIG. The position of the line 111 can be determined as necessary. Then, a minute region aligned on the line 111 is set. And as shown in FIG.11 (b), the frequency distribution of the detected value in this micro area | region is calculated | required, and the average filling rate and dispersion value of the filler in a line are calculated | required from this frequency distribution.

  Further, as shown in FIG. 11C, an intensity distribution of one line is drawn on the average value line. Thereby, the average filling rate in one line, the dispersion value, and the distribution on the line can be measured. This method can measure a distribution on a line that is perpendicular to the direction of travel in the mass production process (arrow in FIG. 11A).

  A measurement example of the synthetic resin film filler measurement method according to Embodiment 3 will be described. FIG. 12 shows a measurement example of the synthetic resin film filler measurement method according to Embodiment 3, wherein (a) shows an X-ray photograph showing a measurement line, and (b) shows an X-ray count on the line. It is a graph. As shown in FIG. 11B, the filling state of the filler on the line can be displayed.

  In this example, when the above-described insulating sheet A (see FIG. 1) was measured, 50 vol% was obtained as an average filling rate in the measurement line.

<Embodiment 4>
Next, a synthetic resin film filler measuring apparatus according to Embodiment 4 will be described. FIG. 13 is a perspective view showing the appearance of the synthetic resin film filler measuring apparatus according to Embodiment 4, and FIG. 14 is a block diagram showing the configuration of the synthetic resin film filler measuring apparatus shown in FIG.

  The synthetic resin film filler measuring apparatus 200 according to the fourth embodiment performs the synthetic resin film filler measuring method according to the first to third embodiments. The filler measuring apparatus 200 includes an X-ray tube unit 201 that is an electromagnetic wave source and outputs X-rays, an X-ray camera 202 that is detection means, an X-ray camera controller 203 that controls driving of the X-ray camera 202, and an X-ray An X-ray control unit 204 that controls the tube unit, and a carry-in belt 205 and a carry-out belt 206 that are carrying means for carrying the synthetic resin film that is the object to be measured are provided.

  Further, as shown in FIG. 14, the filler measuring apparatus 200 includes a frequency counting unit 210 that measures the X-ray transmission frequency in a minute region of the measurement region 110 from the image captured by the X-ray camera 202, and from the counted frequency, An arithmetic processing unit 220 that creates a frequency distribution and calculates an average value, variance, half-value width, etc., a display unit 230 that displays various information, an input unit 240 that inputs necessary support, conditions, etc., and a filler measuring apparatus 200 And a transport control unit 260 that controls the carry-in belt 205 and the carry-out belt 206.

This filler measuring device 200 is arranged at a carry-out place or a carry-in place of a synthetic resin film production line. Then, the manufactured object 100 such as an insulating film or a conductive film is transported to the imaging position of the X-ray camera 202 by the carry-in belt 205, and an X-ray transmission image from the X-ray tube unit 201 is taken.

  The X-ray camera 202 images, for example, an area of 336 μm in width and 256 μm in length, and the size of the imaging dot (1 × 1) is 0.25 μm × 0.25 μm. The DUT 100 for which imaging has been completed is carried out by the carry-out belt 206.

  An X-ray image obtained by the X-ray camera 202 is counted by a frequency counting unit 210 to perform a transmission amount count (X-ray count) in a necessary minute area size of a necessary area, and a necessary frequency distribution is obtained. . Then, statistical values such as an average value, a variance value, and a half value width, which are determined in advance by the arithmetic processing unit 220, are acquired. Based on the statistical values, the filling rate, particle size, distribution state, and the like of the filler can be acquired.

  Here, the arithmetic processing unit 220 is a computer including a CPU, a ROM, a RAM, an HDD, and the like, and executes each process by executing a predetermined program by the CPU. Thereby, the filler measuring method of the synthetic resin film of Embodiment 1, 2, 3 designated from the input means 240 can be performed.

  In other words, the synthetic resin film filler measurement method according to Embodiment 1 is performed according to the following procedure. First, the thickness dimension of the DUT 100 is input from the input unit 240. Then, the DUT 100 is carried in by the carry-in belt 205, and the X-ray tube unit 201 and the X-ray camera 202 are operated to take an X-ray image of the DUT 100. Then, the frequency counting means 210 acquires the count value in each pixel from the output of the X-ray camera 202. Next, the arithmetic processing means 220 creates a frequency distribution (see FIGS. 2C and 3), obtains the filling rate of the filler in the DUT 100 from this frequency distribution, and further, the state of the distribution of the filler (See FIG. 5).

  In addition, in order to execute the synthetic resin film filler measurement method according to the second embodiment, X-rays in minute regions having different sizes by the frequency counting unit 210 are obtained from images obtained by the X-ray camera 202 similarly obtained. The amount of permeation (count number) is counted. Then, as shown in FIG. 5C, the arithmetic processing means 220 creates a frequency distribution of the detected values for each minute region, and obtains the width of the frequency distribution in each minute region, for example, the variance and the half-value width. Next, as shown in FIG. 5C, the arithmetic processing means 220 obtains a relational curve between the area of each minute region and the dispersion value or half-value width, and fills based on the change in the relational curve. Get the size of the material.

  In addition, in order to execute the synthetic resin film filler measurement method according to the third embodiment, the frequency distribution of detected values in a minute region in one necessary line from the captured image of the X-ray camera 202 similarly obtained (see FIG. 11 (b)), and the average filling rate and dispersion value of the filler in the line are obtained from this frequency distribution (FIG. 11 (c)).

10: Synthetic resin film 11: Base material 12: Filler 21: Optical projection image 22: X-ray projection image 100: Object to be measured 110: Measurement area 200: Filler measurement device 201: X-ray tube unit 202: X-ray camera 203: X-ray camera controller 204: X-ray control unit 205: carry-in belt 206: carry-out belt 210: frequency counting means 220: arithmetic processing means 230: display means 240: input means 250: control device 260: transport control unit

Claims (12)

A synthetic resin film material in which a fine filler is mixed in a synthetic resin substrate is used as an object to be measured, the object is irradiated with electromagnetic waves, and the state of the filler is measured from the amount of transmission of the electromagnetic waves. In the filler measurement method,
Divide the measurement area of the object under measurement into small areas,
Obtaining the detection value of the electromagnetic wave that has passed through the minute region,
Create a frequency distribution of detected values in each minute area,
Compute the acquired frequency distribution to calculate the state of the filler,
Method for measuring filler in synthetic resin film material   The said statistical process calculates | requires the average value of a frequency distribution state, and calculates | requires the average filling rate of the filler in a to-be-measured object from this calculated | required average value. The synthetic resin film of Claim 1 characterized by the above-mentioned. Filler measurement method. Set a plurality of types of micro-regions to be divided, with different areas,
Detect the amount of electromagnetic wave transmission for each micro area of different area,
Create a frequency distribution of the detected value for each area of the trace area,
2. A relationship curve between the area of the minute region and the spread of the frequency distribution is obtained based on the frequency distribution of the detected values, and the size of the filler is measured based on the fluctuation of the relationship curve. The filler measuring method of the synthetic resin film as described in 2. Set a minute area on the line of the object to be measured,
The method for measuring a filler of a synthetic resin film according to claim 1, wherein an average filling rate and a dispersion value of the filler in the line are obtained from a detected value in the minute region. The method for measuring a filler in a synthetic resin film according to claim 1, wherein the uniformity of the filler in the measurement region is determined from the frequency distribution of the detected values.   6. The synthetic resin film filler measurement method according to claim 1, wherein the electromagnetic wave is an X-ray. In a measuring device for a filler, in which a sheet in which a fine filler is mixed into a substrate is an object to be measured, the object is irradiated with electromagnetic waves, and the state of the filler is measured from the amount of transmission of the electromagnetic waves.
An electromagnetic wave source for irradiating the object to be measured with an electromagnetic wave;
Detecting means for detecting the amount of electromagnetic wave transmitted in each region of the object to be measured;
Calculation processing means for creating a frequency distribution of detected values in each minute amount region, calculating the acquired frequency distribution and calculating the state of the filler,
A synthetic resin film filler measurement apparatus comprising:   The electromagnetic wave source irradiates an electromagnetic wave to a predetermined measurement region of the object to be measured, and the detection means detects the transmission amount of the electromagnetic wave at each point of the measurement region irradiated with the electromagnetic wave. The synthetic resin film filler measuring apparatus according to claim 7.   The said arithmetic processing means acquires the transmission amount in the micro area | region which divided | segmented the irradiation area | region into the predetermined area from the transmission amount in each point of the measurement area | region acquired by the detection means. Synthetic resin film filler measuring device.   The synthetic resin film filling material measuring apparatus according to any one of claims 7 to 9, further comprising conveying means for sequentially conveying a plurality of objects to be measured between the electromagnetic wave source and the detecting means. .   The synthetic resin film according to any one of claims 7 to 10, wherein the electromagnetic wave source irradiates an object to be measured with X-rays, and the detection means detects X-rays transmitted through the object to be measured. Filling material measurement method.   The synthetic resin film according to any one of claims 7 to 11, wherein a state of the filler is calculated based on the method for measuring the filler according to any one of claims 1 to 7. Filler measurement method.