JP2013197435A - Wiring substrate - Google Patents

Wiring substrate Download PDF

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JP2013197435A
JP2013197435A JP2012064807A JP2012064807A JP2013197435A JP 2013197435 A JP2013197435 A JP 2013197435A JP 2012064807 A JP2012064807 A JP 2012064807A JP 2012064807 A JP2012064807 A JP 2012064807A JP 2013197435 A JP2013197435 A JP 2013197435A
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frequency signal
signal line
frequency
wiring board
ground conductor
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Yoshiki Kawazu
芳規 川頭
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Kyocera Corp
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Kyocera Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a wiring substrate improved in high frequency characteristics.SOLUTION: A wiring substrate 10 includes a grounded coplanar line having: a substrate 1 having a front surface and a back surface which are made from dielectric bodies; a high frequency signal line 2 formed on the front surface; first ground conductors 3 arranged on both sides of the high frequency signal line 2 at an interval; and a second ground conductor 4 formed on the back surface. The high frequency signal line 2 has width widely formed at an end portion 1b including a terminal end, and the second ground conductor 4 has an opening 5 at a part corresponding to the end portion 1b of the high frequency signal line 2. At a position corresponding to the terminal end 1a of the high frequency signal line 2, a short circuit portion 6 by a conductor around the opening 5 is provided. The short circuit portion 6 can suppress excitation generated at both ends of the opening 5, and improve high frequency characteristics.

Description

本発明は、電極端子や配線と接続する接続端を有するプリント基板、回路基板、フレキシブル配線基板等の高周波信号用の配線基板に関するものである。   The present invention relates to a high-frequency signal wiring board such as a printed board, a circuit board, or a flexible wiring board having a connection end connected to an electrode terminal or wiring.

高周波用配線基板の一つに、コプレーナ型高周波線路を用いた配線基板がある。コプレーナ型の配線基板には、表面に配置された高周波信号用線路の両側に接地導体が形成されている。コプレーナ型配線基板には、さらに裏面にも接地導体を形成したグランデッドコプレーナ型の高周波線路を用いた配線基板もある。これら高周波用配線基板は、電子部品の電極や他の配線基板と信号を導通させるための接続端部を有している。   One of the high frequency wiring boards is a wiring board using a coplanar type high frequency line. In the coplanar wiring board, ground conductors are formed on both sides of a high-frequency signal line arranged on the surface. Some coplanar type wiring boards use a grounded coplanar type high frequency line having a ground conductor on the back surface. These high-frequency wiring boards have connection ends for conducting signals with electrodes of electronic components and other wiring boards.

図5は、従来のグランデッドコプレーナ型線路を有する配線基板の接続端部の例を示す斜視図である。図5(a)は配線基板100の表面、図5(b)は配線基板100の裏面の例を示す(例えば、特許文献1)。   FIG. 5 is a perspective view showing an example of a connection end portion of a wiring board having a conventional grounded coplanar type line. FIG. 5A shows an example of the front surface of the wiring board 100, and FIG. 5B shows an example of the back surface of the wiring board 100 (for example, Patent Document 1).

図5(a),(b)に示すように、基板101の表面に配設された高周波信号用線路102の両側には接地導体103が形成され、裏面にも高周波信号用線路102の配設されている対応部分に接地導体104が形成されている。   As shown in FIGS. 5A and 5B, ground conductors 103 are formed on both sides of the high-frequency signal line 102 disposed on the surface of the substrate 101, and the high-frequency signal line 102 is disposed on the back surface. A ground conductor 104 is formed in the corresponding portion.

配線基板100の終端101a部では、接続される外部回路のリード端子等の導体幅に合わせて、また、接続を容易にするために、高周波信号用線路102の線幅を広くするように形成されることがある。しかし、このように高周波信号用線路102の線幅を広くする場合、広くした部分の高周波信号用線路102の高周波インピーダンスを、他の部分の高周波インピーダンスとマッチングさせる必要がある。このため、終端101a部の高周波信号用線路102を広くした部分に合わせて接地導体103の幅を拡げ、基板101が非常に薄い等の理由により、それだけで十分でない場合には、裏面の接地導体104の高周波信号用線路102の接続端に対応する部分に接地導体104の非形成部105が設けられる。   In the terminal end 101a of the wiring board 100, the line width of the high-frequency signal line 102 is increased in accordance with the width of a conductor such as a lead terminal of an external circuit to be connected and for easy connection. Sometimes. However, when the line width of the high-frequency signal line 102 is widened in this way, it is necessary to match the high-frequency impedance of the widened high-frequency signal line 102 with the high-frequency impedance of the other part. For this reason, if the width of the ground conductor 103 is increased in accordance with the widened portion of the high-frequency signal line 102 at the end portion 101a, and the substrate 101 is very thin, it is not sufficient. A non-forming portion 105 of the ground conductor 104 is provided at a portion corresponding to the connection end of the high-frequency signal line 102 of 104.

特許文献1において、回路基板の端子と高周波信号用線路とを金属バンプで接続する際、金属バンプに十分な圧力を加える目的で、接地導体104の非形成部105に、島状配線パッド106が設けられている。   In Patent Document 1, when connecting the terminal of the circuit board and the high-frequency signal line with a metal bump, an island-like wiring pad 106 is formed on the non-formed portion 105 of the ground conductor 104 for the purpose of applying sufficient pressure to the metal bump. Is provided.

特開2000−151039号公報JP 2000-151039 A

特許文献1の例のように、従来の配線基板の端部に備えられた接地導体104の非形成部105は、配線基板の端面に向けて開くように形成されていた。このような配線基板の高周波信号用線路102に導体を接続し、数十GHz程度の高周波信号を導通させると、反射損失や挿入損失が生じ、十分な性能が得られないという問題があった。   As in the example of Patent Document 1, the non-forming portion 105 of the ground conductor 104 provided at the end portion of the conventional wiring board is formed so as to open toward the end face of the wiring substrate. When a conductor is connected to the high-frequency signal line 102 of such a wiring board and a high-frequency signal of about several tens of GHz is conducted, there is a problem that reflection loss and insertion loss occur and sufficient performance cannot be obtained.

本発明は、上記の課題に鑑みてなされたものであり、その目的は、高周波特性に優れる配線基板を提供することにある。   This invention is made | formed in view of said subject, The objective is to provide the wiring board excellent in a high frequency characteristic.

本発明の一態様の配線基板は、誘電体から成り表面および裏面を有する基板と、前記表面に形成された高周波信号用線路と、前記表面の前記高周波信号用線路の両側に間隔を隔てて配された第1接地導体と、前記裏面に形成された第2接地導体とを備えたグランデッドコプレーナ線路を有する配線基板において、前記高周波信号用線路は、終端を含む端部において幅が広く形成されており、前記第2接地導体は、前記高周波信号用線路の前記端部に対応する部位に、開口を有することを特徴とする。   A wiring board according to an aspect of the present invention includes a substrate made of a dielectric material and having a front surface and a back surface, a high-frequency signal line formed on the front surface, and a space on both sides of the high-frequency signal line on the front surface. In the wiring board having a grounded coplanar line provided with the first ground conductor formed and the second ground conductor formed on the back surface, the high-frequency signal line is formed to have a wide width at the end including the termination. The second ground conductor has an opening at a portion corresponding to the end of the high-frequency signal line.

本発明の一態様の配線基板において、前記第2接地導体の前記開口は前記高周波信号用線路の前記終端側に、幅を広くした拡幅部を有するのが好ましい。   In the wiring board of one aspect of the present invention, it is preferable that the opening of the second ground conductor has a widened portion with a wide width on the terminal end side of the high-frequency signal line.

また、前記高周波信号用線路の前記終端は、前記基板の周縁部に位置しているのが好ましい。   Moreover, it is preferable that the said termination | terminus of the said high frequency signal track | line is located in the peripheral part of the said board | substrate.

また、前記拡幅部の長さは、前記高周波信号用線路を伝播する高周波信号の周波数範囲内の少なくとも一部の周波数に対して共振する長さであのが好ましい。   Moreover, it is preferable that the length of the widened portion is a length that resonates with respect to at least a part of frequencies within a frequency range of a high-frequency signal propagating through the high-frequency signal line.

前記高周波信号用線路の前記終端における特性インピーダンスが、前記高周波信号用線路の特性インピーダンスに対して5%乃至20%の低インピーダンスとされているのが好ましい。   It is preferable that the characteristic impedance at the end of the high-frequency signal line is a low impedance of 5% to 20% with respect to the characteristic impedance of the high-frequency signal line.

前記高周波信号用線路の前記拡幅部における特性インピーダンスが、前記高周波信号用線路の特性インピーダンスに対して5%乃至20%の高インピーダンスとされているのが好ましい。   It is preferable that the characteristic impedance in the widened portion of the high-frequency signal line is a high impedance of 5% to 20% with respect to the characteristic impedance of the high-frequency signal line.

本発明の一態様の配線基板によれば、裏面に形成された第2接地導体の高周波信号用線路の端部に対応する部位に、開口を有し、高周波信号用線路の接続端に対応する位置において、第2接地導体の非形成部の両端をとじるように短絡して接続する導体を有することから、非形成部両端の第2接地導体の間に生じる励振を抑制し、高周波特性を向上することができる。   According to the wiring substrate of one aspect of the present invention, the second grounding conductor formed on the back surface has an opening in a portion corresponding to the end of the high-frequency signal line and corresponds to the connection end of the high-frequency signal line. Since it has a conductor that is short-circuited to connect both ends of the non-formed portion of the second ground conductor at the position, excitation generated between the second ground conductors at both ends of the non-formed portion is suppressed, and high frequency characteristics are improved. can do.

また、高周波信号用線路の終端側に、第2接地導体の開口幅を広くした拡幅部を有すると、非形成部の両端を短絡して接続することによる高周波インピーダンスの変化が緩和され、高周波特性をさらに向上することができる。   In addition, if there is a widened portion with a wide opening width of the second ground conductor on the terminal side of the high-frequency signal line, the change in high-frequency impedance caused by short-circuiting both ends of the non-formed portion is mitigated, and the high-frequency characteristics Can be further improved.

高周波信号用線路の終端が、基板の周縁部に位置していると、基板の外側の空間部を用いて、非形成部の両端を短絡して接続することによる高周波インピーダンスの変化を緩和することができる。   When the end of the high-frequency signal line is located at the peripheral edge of the board, use the space outside the board to mitigate changes in the high-frequency impedance caused by short-circuiting both ends of the non-formed part. Can do.

拡幅部の長さが、高周波信号用線路を伝播する高周波信号の周波数範囲内の少なくとも一部の周波数に対して共振する長さであると、高周波特性曲線をドロップさせて、高周波特性を向上することができる。   If the length of the widened portion is a length that resonates with respect to at least a part of the frequency within the frequency range of the high-frequency signal propagating through the high-frequency signal line, the high-frequency characteristic is dropped and the high-frequency characteristic is improved. be able to.

また、高周波信号用線路の終端における特性インピーダンスが高周波信号用線路の特性インピーダンスに対して5%乃至20%の低インピーダンスとされていると、非形成部の両端を短絡して接続することによる高周波インピーダンスの変化の緩和が最適化されて、高周波特性を向上することができる。   Further, when the characteristic impedance at the end of the high-frequency signal line is set to a low impedance of 5% to 20% with respect to the characteristic impedance of the high-frequency signal line, the high frequency by short-circuiting both ends of the non-formed part and connecting them The relaxation of the change in impedance is optimized, and the high frequency characteristics can be improved.

高周波信号用線路の拡幅部における特性インピーダンスが高周波信号用線路の特性イン
ピーダンスに対して5%乃至20%の高インピーダンスとされていると、非形成部の両端を短絡して接続することによる高周波インピーダンスの変化の緩和が最適化されて、高周波特性を向上することができる。
When the characteristic impedance in the widened portion of the high-frequency signal line is high impedance of 5% to 20% with respect to the characteristic impedance of the high-frequency signal line, the high-frequency impedance is obtained by short-circuiting both ends of the non-formed portion The relaxation of the change is optimized and the high frequency characteristics can be improved.

本発明の一実施形態の配線基板示し、(a)は配線基板の表面から見た平面図、(b)は配線基板を裏面から見た平面図である。The wiring board of one Embodiment of this invention is shown, (a) is the top view seen from the surface of the wiring board, (b) is the top view which looked at the wiring board from the back surface. 本発明の他の実施形態の配線基板を示し、(a)は配線基板の表面から見た平面図、(b)は配線基板を裏面から見た平面図である。The wiring board of other embodiment of this invention is shown, (a) is the top view seen from the surface of the wiring board, (b) is the top view which looked at the wiring board from the back surface. 本発明の配線基板の実施形態例の高周波特性を示す線図である。It is a diagram which shows the high frequency characteristic of the example of embodiment of the wiring board of this invention. 本発明の配線基板を用いた電子装置との接続の例を示す斜視図である。It is a perspective view which shows the example of a connection with the electronic device using the wiring board of this invention. 従来の配線基板の例を示し、(a)は配線基板の表面から見た平面図、(b)は配線基板を裏面から見た平面図である。An example of a conventional wiring board is shown, (a) is a plan view seen from the front surface of the wiring board, and (b) is a plan view seen from the back surface of the wiring board.

以下、本発明の一実施形態に係る配線基板10について、図を参照して説明する。なお、図はいずれも模式的なものであって、実際の寸法関係とは異なることがある。また、以下の説明において上下左右表裏という用語は、単に図面上の位置関係を説明するために用いるものであり、実際の使用時における位置関係を意味するものではない。   Hereinafter, a wiring board 10 according to an embodiment of the present invention will be described with reference to the drawings. In addition, all the figures are schematic and may differ from an actual dimensional relationship. Further, in the following description, the terms “upper, lower, left, and right” are merely used for explaining the positional relationship on the drawings, and do not mean the positional relationship in actual use.

図1は本発明の一実施形態の配線基板10を示す平面図であり、図1(a)は配線基板10の表面、図1(b)はその反対面である裏面を示す。なお、図において、分かりやすくするために導体部分にハッチングを付している。これらハッチングは断面を示すものではない。また、それぞれの図において、その反対面の導体形状を破線で示している。図は配線基板の要部である一端部の例を示したもので、他端側や両側を省略して示している。通常は、図の上側および左右側にさらに導体が延びて回路が形成されている。また、図では、高周波信号用線路に差動信号線路を用いた例を示しているが、これに限ることはなく、通常の一本の高周波信号用線路を用いたグランデッドコプレーナ線路でもよい。これらは、他の実施形態における配線基板の図についても同じである。   FIG. 1 is a plan view showing a wiring board 10 according to an embodiment of the present invention. FIG. 1 (a) shows the front surface of the wiring board 10, and FIG. 1 (b) shows the opposite surface. In the figure, the conductor portions are hatched for easy understanding. These hatches do not indicate a cross section. Moreover, in each figure, the conductor shape of the opposite surface is shown with the broken line. The figure shows an example of one end, which is a main part of the wiring board, and the other end and both sides are omitted. Usually, a circuit is formed by further extending conductors on the upper and left and right sides of the figure. In the figure, an example in which a differential signal line is used as the high-frequency signal line is shown, but the present invention is not limited to this, and a grounded coplanar line using a single normal high-frequency signal line may be used. These also apply to the wiring board diagrams in the other embodiments.

図1に示すように、配線基板10には、誘電体から成る基板1の表面に、一対の高周波信号用線路2(2a,2b)が形成されており、高周波信号用線路2の両側には、所定間隔を隔てて第1接地導体3が形成されている。配線基板10の高周波信号用線路2が形成されている部分の裏面には、第2接地導体4が形成されている。基板1の一端(図1においては下端)側が高周波信号用線路の終端1aとなる。終端1a側の他の配線基板の端子や配線との接続処理が行われる部分を端部1bまたは接続端部1bと呼称する。   As shown in FIG. 1, a pair of high-frequency signal lines 2 (2a, 2b) is formed on the surface of a substrate 1 made of a dielectric material on the wiring board 10, and on both sides of the high-frequency signal line 2 The first ground conductor 3 is formed at a predetermined interval. A second ground conductor 4 is formed on the back surface of the portion of the wiring board 10 where the high-frequency signal line 2 is formed. One end (the lower end in FIG. 1) side of the substrate 1 is the terminal end 1a of the high-frequency signal line. A portion where a connection process with a terminal or wiring of another wiring board on the terminal end 1a side is performed is referred to as an end portion 1b or a connecting end portion 1b.

高周波信号用線路2は終端1aの直前の終端1aを含む接続端部1bにおいて線幅を広くするように形成されている。線幅が広い部分と細い部分との間は、高周波インピーダンスを徐々に変化させ、高周波信号の反射を避ける目的で、線幅が広い部分に向けて徐々に幅が広くなるように形成される。線幅の広い部分に、リード端子を介する等して別の高周波回路が接続される。   The high-frequency signal line 2 is formed so as to widen the line width at the connection end 1b including the termination 1a immediately before the termination 1a. In order to gradually change the high-frequency impedance and avoid reflection of the high-frequency signal, the width between the wide-width portion and the narrow-width portion is gradually increased toward the wide-width portion. Another high-frequency circuit is connected to the wide portion of the line through a lead terminal or the like.

第1接地導体3は高周波信号用線路2の両側に所定間隔を隔てて形成される。本実施形態において、第1接地導体3は、高周波信号用線路2の線路が広く形成された接続端部1bにおいても、他の部分と同じ間隔とされている。しかし、高周波インピーダンス整合の都合によっては、接続端部1bにおいてより広い間隔とする場合もある。   The first ground conductor 3 is formed on both sides of the high-frequency signal line 2 with a predetermined interval. In the present embodiment, the first ground conductor 3 has the same interval as the other portions even at the connection end 1b where the line of the high-frequency signal line 2 is widely formed. However, depending on the convenience of high-frequency impedance matching, there may be a wider interval at the connection end 1b.

第2接地導体4には、接続端部1bに開口5が設けられる。開口5は、第2接地導体4の非形成部として設けられている部分の終端1a側に第2接地導体4の両側を短絡する導
体を設けて開口5としたものである。この第2接地導体4の両側を短絡する導体を短絡部6とも呼称することとする。
The second ground conductor 4 is provided with an opening 5 at the connection end 1b. The opening 5 is formed by providing a conductor for short-circuiting both sides of the second ground conductor 4 on the end 1a side of a portion provided as a non-forming portion of the second ground conductor 4. A conductor that short-circuits both sides of the second ground conductor 4 is also referred to as a short-circuit portion 6.

開口5の高周波信号用線路2の線路方向に直交する方向の幅W1は、高周波インピーダンスに応じて決められる。図1においては、高周波信号用線路2の両端の幅W2に対して開口5の幅W1が広い場合を示しているが、狭く形成される場合もある。開口5の終端1a側と反対側は、高周波インピーダンスを徐々に変化させるために、終端1a側から奥へ行くにしたがって、徐々に幅が狭くなるように形成される。   The width W1 of the opening 5 in the direction orthogonal to the line direction of the high-frequency signal line 2 is determined according to the high-frequency impedance. Although FIG. 1 shows a case where the width W1 of the opening 5 is wider than the width W2 of both ends of the high-frequency signal line 2, it may be formed narrowly. The side opposite to the terminal end 1a side of the opening 5 is formed such that the width gradually decreases from the terminal end 1a side to the back in order to gradually change the high-frequency impedance.

そして、開口5には終端1a部において、第2接地導体4の非形成部を閉じるように左右の第2接地導体4同士を短絡する短絡部6が形成され、開口5が形成される。短絡部6は、第2接地導体4を形成する際に、同時に一体形成されるが、第2接地導体4を形成後にこれと接続するように形成してもよい。短絡部6は、開口5の終端1a側と反対側とは異なり、徐々に高周波インピーダンスが変化するようにはされていない。すなわち、例えば図に示すように、一定幅で高周波信号用線路2を横切るように形成される。   In the opening 5, a short-circuit portion 6 that short-circuits the left and right second ground conductors 4 is formed so as to close the non-formation portion of the second ground conductor 4 at the terminal end 1 a, thereby forming the opening 5. The short-circuit portion 6 is integrally formed at the same time when the second ground conductor 4 is formed, but may be formed so as to be connected to the second ground conductor 4 after the second ground conductor 4 is formed. Unlike the terminal 1a side of the opening 5 opposite to the terminal 1a side, the short-circuit portion 6 is not designed to gradually change the high-frequency impedance. That is, for example, as shown in the figure, it is formed so as to cross the high-frequency signal line 2 with a constant width.

このように短絡部6を形成することによって、高周波信号の反射損失の増大や挿入損失の増大等が抑制される。これは、終端1aにおける両側の第2接地導体4間に生じる励振が短絡部6によって抑制されるためと考えられる。   By forming the short-circuit portion 6 in this way, an increase in reflection loss of high-frequency signals, an increase in insertion loss, and the like are suppressed. This is presumably because excitation that occurs between the second ground conductors 4 on both sides at the terminal end 1 a is suppressed by the short-circuit portion 6.

短絡部6によって、この部位における高周波信号用線路2の高周波インピーダンスは、高周波信号用線路2の他の部位における特性インピーダンスより低インピーダンスとなる。好ましくは、この部位における高周波インピーダンスが他の部位における特性インピーダンスの5%〜20%低くなる範囲とするのがよい。例えば、高周波信号用線路2a,2bの特性インピーダンスが100Ωである場合、短絡部6部分においての高周波インピーダンスが80Ω〜95Ωとするのがよい。インピーダンスのミスマッチ量を適度なものとし、高周波特性の改善が劣化しないようにできる。   Due to the short-circuit portion 6, the high-frequency impedance of the high-frequency signal line 2 in this part is lower than the characteristic impedance in other parts of the high-frequency signal line 2. Preferably, the high-frequency impedance in this part is in a range that is 5% to 20% lower than the characteristic impedance in other parts. For example, when the characteristic impedance of the high-frequency signal lines 2a and 2b is 100Ω, the high-frequency impedance in the short-circuit portion 6 is preferably 80Ω to 95Ω. Impedance mismatch can be made moderate, and improvement in high frequency characteristics can be prevented from deteriorating.

次に、図2は本発明の他の実施形態の配線基板11を示す平面図であり、図2(a)は配線基板11の表面、図2(b)はその反対面である裏面を示す。図2も図1と同様の形式で示している。また、図1と対応する部位には同じ符号を示している。   Next, FIG. 2 is a plan view showing a wiring board 11 according to another embodiment of the present invention. FIG. 2 (a) shows the front surface of the wiring board 11, and FIG. 2 (b) shows the back surface which is the opposite surface. . FIG. 2 is also shown in the same format as FIG. Moreover, the same code | symbol is shown to the site | part corresponding to FIG.

図1に対して、図2に示す実施形態では、開口5の終端1a側であって、短絡部6に隣接した部位に開口5の幅W1を広くした拡幅部7が設けられている。このような、高周波信号用線路2の線路方向に直角な方向の幅W4が開口5の幅W1より広く形成された拡幅部7を設けるのが好ましい。拡幅部7を設けることによって、終端1aにおいて低くなる高周波インピーダンスを拡幅部7において高くし、短絡部6での高周波インピーダンスの変化を補償することができるので、高周波特性をさらに改善することができる。   In contrast to FIG. 1, in the embodiment shown in FIG. 2, a widened portion 7 is provided in which the width W <b> 1 of the opening 5 is widened at the end 1 a side of the opening 5 and adjacent to the short-circuit portion 6. It is preferable to provide the widened portion 7 in which the width W4 in the direction perpendicular to the line direction of the high-frequency signal line 2 is formed wider than the width W1 of the opening 5. By providing the widened portion 7, the high-frequency impedance that is lowered at the terminal end 1 a can be increased in the widened portion 7, and the change in the high-frequency impedance at the short-circuit portion 6 can be compensated.

拡幅部7の短絡部6と反対側の面は、開口5の短絡部6と反対側の面と同様に、奥に向けて次第に幅が狭くなり、開口5の幅W1と同じになるようにして接続されている。なお、配線基板10,11の終端1aより外側では第2接地導体4は当然配設されないので、高インピーダンス領域になることを考慮する必要がある。   The surface of the widened portion 7 on the side opposite to the short-circuited portion 6 becomes narrower toward the back and becomes the same as the width W1 of the opening 5 in the same manner as the surface of the opening 5 opposite to the short-circuited portion 6. Connected. It should be noted that the second ground conductor 4 is naturally not arranged outside the terminal end 1a of the wiring boards 10 and 11, and therefore it is necessary to consider that it becomes a high impedance region.

拡幅部7の幅W4は、高周波信号用線路2の他の部位における特性インピーダンスに対して5%〜20%の高インピーダンスとするのが好ましい。例えば、高周波信号用線路2a,2bの特性インピーダンスが100Ωである場合は、拡幅部7における高周波インピーダンスを105Ω〜120Ωとするのがよい。このように、高周波信号用線路の高周波インピーダンスは、短絡部6において低インピーダンスとし、拡幅部7において高インピーダンスとするのが好ましい。   The width W4 of the widened portion 7 is preferably set to a high impedance of 5% to 20% with respect to the characteristic impedance in other parts of the high-frequency signal line 2. For example, when the characteristic impedance of the high-frequency signal lines 2a and 2b is 100Ω, the high-frequency impedance in the widened portion 7 is preferably set to 105Ω to 120Ω. Thus, it is preferable that the high-frequency impedance of the high-frequency signal line is low impedance in the short-circuit portion 6 and high impedance in the widened portion 7.

また、拡幅部7の高周波信号用線路2と平行な方向の長さL1を高周波信号用線路2の周波数帯域における少なくとも一部の周波数が共振する長さとしておくのが好ましい。これによって、周波数帯域中に共振に伴うディップを生じさせ、高周波特性のピークを下げて高周波特性を良好なものとすることができる。   Further, it is preferable that the length L1 of the widened portion 7 in the direction parallel to the high-frequency signal line 2 is a length at which at least a part of the frequencies in the frequency band of the high-frequency signal line 2 resonate. As a result, a dip due to resonance is generated in the frequency band, and the peak of the high frequency characteristic is lowered to improve the high frequency characteristic.

図3は、終端1aから高周波線路2aを見たときの反射損失をシミュレーションしたものである。実線Aは、図5に示すような従来の短絡部6がない場合の反射損失を示す。実線Aに示されるように、従来のものは、36GHz付近に−5dBを超える極大部を有している。   FIG. 3 shows a simulation of reflection loss when the high-frequency line 2a is viewed from the termination 1a. A solid line A indicates the reflection loss when there is no conventional short-circuit portion 6 as shown in FIG. As shown by the solid line A, the conventional one has a local maximum exceeding −5 dB in the vicinity of 36 GHz.

一点鎖線Bは、図1に示す実施形態のものを同様にシミュレーションしたものである。実線Aに現れていた極大部はなくなり、25GHzより高い周波数領域において、ほぼ−15dBの一定な反射損失となるように改善されることがわかる。   The alternate long and short dash line B is a simulation of the embodiment shown in FIG. It can be seen that the local maximum portion appearing in the solid line A disappears, and in a frequency region higher than 25 GHz, the reflection loss is improved to be approximately −15 dB.

二点差線Cは、図2に示す実施形態のものを同様にシミュレーションしたものである。一点鎖線Bに示すものよりも反射損失が少なくなり、さらに改善されていることがわかる。   A two-dot difference line C is a simulation of the embodiment shown in FIG. It can be seen that the reflection loss is smaller than that indicated by the alternate long and short dash line B, and further improved.

そして、破線Dは、図2の拡幅部7の長さLを周波数42GHz付近で共振する長さとし、短絡部6における高周波インピーダンスを85Ω、拡幅部7における高周波インピーダンスを115Ωに最適化した場合の反射特性を示す。42GHz付近に極小点が現れるとともに、50GHz以下の周波数領域で反射損失が−20dB以下の良好な特性を示すことがわかる。なお、反射特性の他、挿入損失等の高周波特性も改善される。   The broken line D is a reflection when the length L of the widened portion 7 in FIG. 2 is made to resonate near a frequency of 42 GHz, the high frequency impedance in the short-circuit portion 6 is optimized to 85Ω, and the high frequency impedance in the widened portion 7 is optimized to 115Ω. Show properties. It can be seen that a minimum point appears in the vicinity of 42 GHz, and that the reflection loss is -20 dB or less in a frequency region of 50 GHz or less. In addition to the reflection characteristics, high-frequency characteristics such as insertion loss are also improved.

基板1には、誘電体、すなわち電気的絶縁材が用いられる。具体的には、ポリイミド樹脂等を用いたフレキシブル基板や、エポキシ樹脂等の樹脂を用いた有機基板、セラミックスまたはガラス等の無機材を用いたリジッド回路基板等、一般的に回路基板に用いられる電気的絶縁材を用いることができる。   A dielectric material, that is, an electrical insulating material is used for the substrate 1. Specifically, electric circuits generally used for circuit boards, such as flexible boards using polyimide resins, organic boards using resins such as epoxy resins, rigid circuit boards using inorganic materials such as ceramics or glass, etc. Insulating material can be used.

これら基板1の表面に、銅や銀,マンガン,モリブデン,その他の金属や合金から成る金属導体をめっき、印刷、蒸着、焼結等することによって、高周波信号用線路2,第1接地導体3,短絡部6および/または拡幅部7を有する開口5を備えた第2接地導体4等が形成される。   By plating, printing, vapor deposition, sintering, etc., a metal conductor made of copper, silver, manganese, molybdenum, or other metals or alloys on the surface of the substrate 1, the high-frequency signal line 2, the first ground conductor 3, A second grounding conductor 4 having an opening 5 having a short-circuit portion 6 and / or a widened portion 7 is formed.

これら配線基板10,11の接続端1aに外部回路基板の高周波線路が接続される。図4に、その一例として、半導体パッケージ21に高周波半導体が封止された半導体装置20と配線基板10との接続例を示す。なお、図4において、半導体パッケージ21内部の半導体素子等の図示は省略している。   A high-frequency line of the external circuit board is connected to the connection end 1a of the wiring boards 10 and 11. As an example, FIG. 4 shows a connection example between the semiconductor device 20 in which the high frequency semiconductor is sealed in the semiconductor package 21 and the wiring board 10. In FIG. 4, illustration of semiconductor elements and the like inside the semiconductor package 21 is omitted.

この半導体パッケージ21は、一例を挙げると、筐体が鉄−ニッケル−コバルト合金等の金属やアルミナセラミック等のセラミックス材によって形成される。その筐体の一側壁を貫通するように、アルミナセラミック等のセラミックスから成り、半導体パッケージ21の内外を接続する接続導体を備えた入出力端子22が嵌着されたものである。   In the semiconductor package 21, for example, the casing is formed of a metal such as iron-nickel-cobalt alloy or a ceramic material such as alumina ceramic. An input / output terminal 22 made of a ceramic such as alumina ceramic and having a connection conductor for connecting the inside and the outside of the semiconductor package 21 is fitted so as to penetrate one side wall of the housing.

図4に示すように、配線基板10,11は、半導体パッケージ21の高周波入出力端子22にリード端子23を介して半田等で接続される。リード端子23は、それぞれ入出力端子22の高周波線路と配線基板10,11の高周波信号用線路2同士、および接地導体と配線基板10,11の第1接地導体3同士を電気的に接続する。配線基板10,11の第1接地導体3と第2接地導体4とは配線基板10,11の内部でビア導体を介する等に
よって接続されているので、このように接続することによって、半導体装置20と配線基板10,11とを接続できる。
As shown in FIG. 4, the wiring boards 10 and 11 are connected to the high-frequency input / output terminals 22 of the semiconductor package 21 by solder or the like via lead terminals 23. The lead terminals 23 electrically connect the high-frequency lines of the input / output terminals 22 and the high-frequency signal lines 2 of the wiring boards 10 and 11, and the ground conductor and the first ground conductors 3 of the wiring boards 10 and 11, respectively. Since the first grounding conductor 3 and the second grounding conductor 4 of the wiring boards 10 and 11 are connected to each other through the via conductors inside the wiring boards 10 and 11, the semiconductor device 20 is connected by such connection. And the wiring boards 10 and 11 can be connected.

図4に示した例の他に、配線基板10,11を上下反対の配置とし、リード端子22の上面に配線基板10,11の高周波信号用線路2および第1接地導体3を接続してもよい。また、リード端子22を省略し、入出力端子22の線路導体に配線基板10,11の高周波信号用線路2および第1接地導体3を半田バンプ等を介して直接接続することもできる。   In addition to the example shown in FIG. 4, the wiring boards 10, 11 may be arranged upside down, and the high-frequency signal line 2 and the first ground conductor 3 of the wiring boards 10, 11 may be connected to the upper surface of the lead terminal 22. Good. Alternatively, the lead terminal 22 may be omitted, and the high-frequency signal line 2 and the first ground conductor 3 of the wiring boards 10 and 11 may be directly connected to the line conductor of the input / output terminal 22 via solder bumps or the like.

このように、配線基板10,11を用いて半導体パッケージ21内部の高周波半導体と外部回路とを接続することによって、高周波入出力信号の接続端における高周波特性が改善されるので、良好な性能を有する半導体装置20とすることができる。   As described above, by connecting the high-frequency semiconductor inside the semiconductor package 21 and the external circuit using the wiring boards 10 and 11, the high-frequency characteristics at the connection end of the high-frequency input / output signal are improved. The semiconductor device 20 can be obtained.

なお、本発明は上述の実施形態に限定されるものではなく、本発明の要旨を逸脱しない範囲において種々の変更、改良等が可能である。   In addition, this invention is not limited to the above-mentioned embodiment, A various change, improvement, etc. are possible in the range which does not deviate from the summary of this invention.

例えば、本実施形態においては、基板1の表面に高周波信号用線路2および第1接地導体3、裏面に第2接地導体4を形成した配線基板10,11を示したが、これら配線の上層または下層にさらに他の回路配線を積層し、多層の配線基板としてもよい。   For example, in the present embodiment, the wiring boards 10 and 11 in which the high-frequency signal line 2 and the first ground conductor 3 are formed on the front surface of the substrate 1 and the second ground conductor 4 is formed on the back surface are shown. Another circuit wiring may be further laminated on the lower layer to form a multilayer wiring board.

また、本実施形態では、一本の高周波信号用線路2(または一対の高周波信号用線路2)と第1接地導体3および第2接地導体4とから成る一本のグランデッドコプレーナ配線を用いた例を示したが、これら高周波配線を複数並列に配置し、複数のグランデッドコプレーナ配線を有する配線基板10,11としてもよいことは言うまでもない。   Further, in the present embodiment, one grounded coplanar wiring composed of one high-frequency signal line 2 (or a pair of high-frequency signal lines 2), the first ground conductor 3 and the second ground conductor 4 is used. Although an example has been shown, it goes without saying that a plurality of high-frequency wirings may be arranged in parallel to form wiring boards 10 and 11 having a plurality of grounded coplanar wirings.

1:基板
1a:終端
1b:接続端部
2(2a,2b):高周波信号用線路
3:第1接地導体
4:第2接地導体
5:開口
6:短絡部
7:拡幅部
10,11:配線基板
1: Substrate 1a: Termination 1b: Connection end 2 (2a, 2b): High-frequency signal line 3: First ground conductor 4: Second ground conductor 5: Opening 6: Short-circuit portion 7: Widening portion 10, 11: Wiring substrate

Claims (6)

誘電体から成り表面および裏面を有する基板と、前記表面に形成された高周波信号用線路と、前記表面の前記高周波信号用線路の両側に間隔を隔てて配された第1接地導体と、前記裏面に形成された第2接地導体とを備えたグランデッドコプレーナ線路を有する配線基板において、
前記高周波信号用線路は、終端を含む端部において幅が広く形成されており、前記第2接地導体は、前記高周波信号用線路の前記端部に対応する部位に開口を有することを特徴とする配線基板。
A substrate made of a dielectric material and having a front surface and a back surface, a high-frequency signal line formed on the front surface, a first ground conductor disposed on both sides of the high-frequency signal line on the front surface, and the back surface In a wiring board having a grounded coplanar line with a second ground conductor formed in
The high-frequency signal line is formed to have a wide width at an end including a termination, and the second ground conductor has an opening at a portion corresponding to the end of the high-frequency signal line. Wiring board.
前記第2接地導体の前記開口は前記高周波信号用線路の前記終端側に、幅を広くした拡幅部を有することを特徴とする請求項1記載の配線基板。 2. The wiring board according to claim 1, wherein the opening of the second ground conductor has a widened portion having a wider width on the end side of the high-frequency signal line. 前記高周波信号用線路の前記終端は、前記基板の周縁部に位置していることを特徴とする請求項1または2記載の配線基板。 The wiring board according to claim 1, wherein the end of the high-frequency signal line is located at a peripheral edge of the board. 前記拡幅部の長さは、前記高周波信号用線路を伝播する高周波信号の周波数範囲内の少なくとも一部の周波数に対して共振する長さであることを特徴とする請求項2記載の配線基板。 3. The wiring board according to claim 2, wherein the width of the widened portion is a length that resonates with respect to at least a part of frequencies within a frequency range of a high-frequency signal propagating through the high-frequency signal line. 前記高周波信号用線路の前記終端における特性インピーダンスが、前記高周波信号用線路の特性インピーダンスに対して5%乃至20%の低インピーダンスとされていることを特徴とする請求項1乃至4のいずれかに記載の配線基板。 5. The characteristic impedance at the end of the high-frequency signal line is a low impedance of 5% to 20% with respect to the characteristic impedance of the high-frequency signal line. The wiring board described. 前記高周波信号用線路の前記拡幅部における特性インピーダンスが、前記高周波信号用線路の特性インピーダンスに対して5%乃至20%の高インピーダンスとされていることを特徴とする請求項1乃至5のいずれかに記載の配線基板。

6. The characteristic impedance in the widened portion of the high frequency signal line is set to a high impedance of 5% to 20% with respect to the characteristic impedance of the high frequency signal line. Wiring board as described in.

JP2012064807A 2012-03-22 2012-03-22 Wiring substrate Pending JP2013197435A (en)

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JP2020017622A (en) * 2018-07-25 2020-01-30 京セラ株式会社 Wiring board, package for electronic component, and electronic device
JP7036687B2 (en) 2018-07-25 2022-03-15 京セラ株式会社 Wiring boards, electronic component packages and electronic devices
JP2020107882A (en) * 2018-12-27 2020-07-09 廣達電腦股▲ふん▼有限公司Quanta Computer Inc. Gold finger connector for high speed differential signal interconnection
WO2024075816A1 (en) * 2022-10-07 2024-04-11 京セラ株式会社 Wiring board, electronic component mounting package using wiring board, and electronic module

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