JP2013194309A5

JP2013194309A5 -

Info

Publication number: JP2013194309A5
Application number: JP2012065564A
Authority: JP
Filing date: 2012-03-22
Publication date: 2015-03-12
Anticipated expiration: 2032-03-22

Description

そのために、２つの絶縁部材６４０Ａ，６４０Ｂの各々は、上枠部材６３１の両端に固定される固定部６４１と、固定部６４１に固定された筒体６４２とを有し、筒体６４２の孔６４２Ａを、２つの縦枠部材６３３，６３４の各一つの上端部６３３Ａ，６３４Ａを垂直方向に摺動案内する案内部とすることができる。なお、固定部６４１と筒体６４２は一体成形してもよい。固定部６４１は、上枠部材６３１に固定される垂直片６４１Ａと、例えば２つの水平片６４１Ｂ，６４１Ｃとを有することができる。筒体６４２は、水平片６４１Ｂの直下にて垂直片６４１Ａ及び水平片６４１Ｂに固定することができる。２つの縦枠部材６３３，６３４の各一つの上端部６３３Ａ，６３４Ａに設けられたフランジ６３３Ｂ，６３４Ｂは、下限ストッパーである水平片６４１Ｂと当接することができるが、ワーク２０を保持した使用時通常にはフランジ６３３Ｂ，６３４Ｂと水平片６４１Ｂとの間に隙間δが確保されるように設計される。隙間δが確保される限り、上述したようにワーク２０は自重により垂直状態に保持される。 Therefore, each of the two insulating members 640A and 640B has a fixing portion 641 fixed to both ends of the upper frame member 631 and a cylinder 642 fixed to the fixing portion 641, and a hole 642A of the cylinder 642 is provided. The upper end portions 633A and 634A of the two vertical frame members 633 and 634 can be used as guide portions for sliding and guiding in the vertical direction. Note that the fixing portion 641 and the cylindrical body 642 may be integrally formed. The fixing portion 641 can include a vertical piece 641A fixed to the upper frame member 631, and two horizontal pieces 641B and 641C, for example. Cylindrical body 642 can be fixed to the vertical piece 641A and the horizontal plate 641B just below the horizontal plate 641B. The flanges 633B and 634B provided on the respective upper ends 633A and 634A of the two vertical frame members 633 and 634 can contact the horizontal piece 641B which is a lower limit stopper. Is designed such that a gap δ is secured between the flanges 633B and 634B and the horizontal piece 641B. As long as the gap δ is secured, the workpiece 20 is held in the vertical state by its own weight as described above.

このように、縦枠通電ケーブル６７１Ａ（６７１Ｂ）は、固定部材６４４、付勢部材６４３を介して縦枠部材６３３（６３４）に通電することができる。 Thus, the vertical frame energizing cable 671A (671B) can energize the vertical frame member 633 (634) via the fixing member 644 and the urging member 643.

ここで、固定部材６４４は、図８に示すように、ボルト６４４Ａ、ナット６４４Ｂ及び例えば２枚の金属ワッシャー６４４Ｃ，６４４Ｄにて構成できる。水平片６４１Ｃの上部では、ボルト６４４Ａの頭とワッシャー６４４Ｃとの間で縦枠通電ケーブル６７１Ａ（６７１Ｂ）が締結保持される。水平片６４１Ｃの直下では、ナット６４４Ｂとワッシャー６４４Ｄのとの間に、圧縮コイルスプリング６４３の上端が締結保持される。こうして、縦枠通電ケーブル６７１Ａ（６７１Ｂ）と付勢部材６４３との固定と導通が確保される。 Here, as shown in FIG. 8, the fixing member 644 can be configured by a bolt 644A, a nut 644B, and, for example, two metal washers 644C and 644D. In the upper part of the horizontal piece 641C, the vertical frame energizing cable 671A (671B) is fastened and held between the head of the bolt 644A and the washer 644C. Immediately below the horizontal piece 641C, the upper end of the compression coil spring 643 is fastened and held between the nut 644B and the washer 644D. In this way, the vertical frame energization cable 671A (671B) and the urging member 643 are secured and electrically connected.

なお、縦枠通電ケーブル６７１Ａ（６７１Ｂ）は、固定部材６４４及び付勢部材６４３を介在させずに、縦枠部材６３３（６３４）に直接接続してもよい。例えば、図６においてワーク２０の上辺２０ａと、上枠部材６３１との間に、処理液Ｑの液面Ｑ１（図９参照）が位置する。縦枠通電ケーブル６７１Ａ（６７１Ｂ）は、液面Ｑ１よりも上方にて、縦枠部材６３３（６３４）に直接接続することができる。この場合、図６〜図８に示す付勢部材（圧縮コイルスプリング）６４３は、水平片６４１とフランジ６３３Ｂ（６３４Ｂ）との間に配置されればよく、導電ルートを形成しなくてよい。 The vertical frame energization cable 671A (671B) may be directly connected to the vertical frame member 633 (634) without the fixing member 644 and the biasing member 643 interposed. For example, the liquid surface Q1 (see FIG. 9) of the processing liquid Q is located between the upper side 20a of the workpiece 20 and the upper frame member 631 in FIG. The vertical frame energizing cable 671A (671B) can be directly connected to the vertical frame member 633 (634) above the liquid level Q1. In this case, the urging member (compression coil spring) 643 shown in FIGS. 6 to 8 may be disposed between the horizontal piece 641 and the flange 633B (634B) and does not have to form a conductive route.

中継通電部４２０が接続される陽極電極４１０Ｒ（４１０Ｌ）の垂直方向の中間位置とは、ワーク保持治具３０Ｂにて垂下して保持されたワーク２０の縦寸法を２分する位置が好ましい。ワーク２０として縦寸法が異なる複数種が使用される場合には、中継通電部４２０を周知の昇降機構を利用して接点部材４２０Ａの上下位置を調整することができる。なお、接点部材４２０Ａは図９の紙面と垂直な方向で、所定長さで陽極電極４１０Ｒ（４１０Ｌ）と接触させることができる。 The intermediate position in the vertical direction of the anode electrode 410R (410L) to which the relay energization unit 420 is connected is preferably a position that bisects the vertical dimension of the work 20 held down by the work holding jig 30B. When a plurality of types having different vertical dimensions are used as the workpiece 20, the vertical position of the contact member 420A can be adjusted by using a known lifting mechanism for the relay energization unit 420. The contact member 420A can be brought into contact with the anode electrode 410R (410L) with a predetermined length in a direction perpendicular to the paper surface of FIG.

５．電流分布の面内均一性の評価
図１０は、図６に示すワーク保持治具３０Ｂの通電ルートを模式的に示している。図１０において、第１，第２の上枠通電ケーブル６６３Ａ，６６３Ｂと、第１，第２の縦枠通電ケーブル６７１Ａ，６７１Ｂとは、導電部の長さと断面積が等しい同一ケーブルを使用している。第１通電部６６０のうち第１，第２の上枠通電ケーブル６６３Ａ，６６３Ｂを除く通電ルート（図１０のＦ１〜Ｆ２）と、第２通電部６７０のうち第１，第２の縦枠通電ケーブル６７１Ａ，６７１Ｂを除く通電ルート（図１０のＦ３〜Ｆ４）は、共に抵抗値が実質的に等しく設定されている。 5. Evaluation of In-Plane Uniformity of Current Distribution FIG. 10 schematically shows an energization route of the work holding jig 30B shown in FIG. In FIG. 10, the first and second upper frame energization cables 663A and 663B and the first and second vertical frame energization cables 671A and 671B use the same cable having the same length and cross-sectional area of the conductive portion. Yes. The energization route (F1 to F2 in FIG. 10 ) excluding the first and second upper frame energization cables 663A and 663B in the first energization unit 660, and the first and second vertical frame energization in the second energization unit 670. The energization routes (F3 to F4 in FIG. 10) excluding the cables 671A and 671B are set to have substantially the same resistance value.

Claims

A workpiece holding jig that holds a thin plate-like rectangular workpiece in a vertical state in a liquid in a processing tank, and sets the workpiece as a cathode,
A frame-like member disposed around the rectangular workpiece;
A plurality of conductive first chuck members supported by the frame-like member and gripping an upper side of the rectangular workpiece;
A plurality of conductive second chuck members that are electrically insulated from the plurality of first chucks and supported by the frame-shaped member and grip a lower side of the rectangular workpiece;
A first energization section for energizing the plurality of first chuck members;
A second energization section for energizing the plurality of second chuck members;
A workpiece holding jig characterized by comprising:

In claim 1,
The frame-shaped member is
A conductive upper frame member supporting the plurality of first chuck members;
A conductive lower frame member supporting the plurality of second chuck members;
Two insulating members provided at both ends of the upper frame member;
Two conductive vertical frame members having upper end portions supported by the two insulating members and lower end portions connected to both end portions of the lower frame member;
Including
The first energization unit energizes the upper frame member,
The work holding jig, wherein the second energization section energizes the two vertical frame members.

In claim 2,
A work holding jig, further comprising a common energization unit that supports the frame-like member through a part of the first energization unit and energizes the first and second energization units.

In claim 3,
The first energization unit includes:
An insulating part fixed to the common energization part;
A conductive connecting portion that connects the insulating portion and the upper frame member;
At least one upper frame energization cable connecting the common energization part and the coupling part;
Have
The work holding jig, wherein the second energization section includes first and second vertical frame energization cables that connect the common energization section and the two vertical frame members.

In claim 4,
The connecting portion is
A first vertical arm portion and a second vertical arm portion connecting the insulating portion and the upper frame member;
A first protrusion protruding from the first vertical arm;
A second projecting portion projecting from the second vertical arm portion;
Including
The at least one upper frame energization cable includes a first upper frame energization cable that connects the common energization part and the first protrusion, and a second that connects the common energization part and the front second protrusion. A work holding jig comprising an upper frame energizing cable.

In any one of Claims 3 thru | or 5,
A resistance value of a current path flowing from the common energization part to the upper frame member and a resistance value of a current path flowing from the common energization part to the lower frame member are set to be substantially the same. Holding jig.

In any one of Claims 2 thru | or 6,
Each of the two insulating members includes a guide portion that slides and guides an upper end portion of each of the two vertical frame members in a vertical direction.

In claim 7,
A work holding jig, further comprising an urging member that moves and urges each one of the two vertical frame members slidably guided by the guide portion.

In claim 8,
A lower end of the urging member is fixed to each of the two vertical frame members that are slidably guided by the guide portion,
The upper end of the biasing member is fixed to a conductive fixing member supported by each one of the two insulating members,
Each one of the two upper frame energization cables is connected to the fixing member.

A surface treatment tank containing a treatment liquid and having an upper end opening;
The workpiece holding jig according to any one of claims 1 to 9, wherein the workpiece immersed in the treatment liquid of the surface treatment tank is suspended and held, and the workpiece is set as a cathode.
In the surface treatment tank, an anode electrode disposed at a position facing the workpiece,
A surface treatment apparatus comprising:

A surface treatment tank containing a treatment liquid and having an upper end opening;
A work holding jig that hangs down and holds a work immersed in the treatment liquid of the surface treatment tank, and sets the work as a cathode; and
An anode electrode extending in the vertical direction in the surface treatment tank and disposed at a position facing the workpiece;
A relay energization unit for energizing the anode electrode at a position lower than the liquid level of the treatment liquid in the surface treatment tank;
A surface treatment apparatus comprising:

In claim 11,
The workpiece is rectangular;
The workpiece holding jig is
A frame-like member disposed around the rectangular workpiece;
A plurality of conductive first chuck members supported by the frame-like member and gripping an upper side of the rectangular workpiece;
A plurality of conductive second chuck members that are electrically insulated from the plurality of first chucks and supported by the frame-like member, and grip a lower side of the rectangular workpiece;
A first energization section for energizing the plurality of first chuck members;
A second energization section for energizing the plurality of second chuck members;
A surface treatment apparatus comprising: