JP2013186053A - Magnetic inspection system for magnetic sensors - Google Patents

Abstract

PROBLEM TO BE SOLVED: To allow each of a plurality of test devices to inspect magnetic properties of a three-dimensional magnetic sensor with a simple configuration while eliminating influences of magnetic fields from adjacent devices in an environment where the plurality of test devices are placed side-by-side, which makes it unnecessary to secure a magnetic shield room and a large installation space for keeping distance between each device.SOLUTION: A test magnetic field generator coil of a first magnetic test device and a canceling magnetic field generator coil of a second magnetic test device are brought into electrical contact by aligning one of the three axes of each coil. The canceling magnetic field generator coil generates a canceling magnetic field whose intensity is inversely proportional to a square of a distance ratio L2/L1 against a test magnetic field generated by the test magnetic field generator coil, where L1 is a distance from the test magnetic field generator coil to a test region of the first magnetic test device and L2 is a distance from the test magnetic field generator coil to a test region of the second magnetic test device. Each magnetic test device inspects a three-dimensional magnetic sensor while canceling a magnetic field from the second magnetic test device acting on a test region thereof using a canceling magnetic field generator coil.

Description

  The present invention relates to a magnetic inspection apparatus for a magnetic sensor that inspects magnetic characteristics and the like of a three-dimensional magnetic sensor while generating a magnetic field.

When inspecting the magnetic characteristics of a magnetic sensor, the magnetic sensor is placed in a magnetic field generated by a magnetic field generating coil such as a Helmholtz coil, and an output signal of the magnetic sensor with respect to the magnetic field is measured. When the magnetic sensor is an azimuth sensor, a geomagnetic simulator has been developed as a magnetic inspection apparatus having a magnetic field generating coil.
Such a magnetic inspection device is installed in a magnetic shield room surrounded by a magnetic shielding material so as not to be affected by an external magnetic field, or when another magnetic field generation source exists nearby. Although it is installed at a location that is not affected by the magnetic field from the magnetic field generation source, an expensive magnetic shield room or a large space for installing the device is required. Invite.
In view of this, an active magnetic shield device has been developed in which a reverse magnetic field is generated with respect to a magnetic field influenced from the outside to cancel the external magnetic field.

  In Patent Document 1, a vacuum cylinder of an electron microscope is arranged in the center of a three-dimensional form-hertz coil, and a sensor (sonde) is oriented in each of the X, Y, and Z directions in the vicinity of the vacuum cylinder. There is disclosed a device in which one of these sensors is connected to a magnetometer and an output amplifier, and each output amplifier is connected to a respective Holm coil. By applying a current dependent on the magnetic field detected by the sensor to the Helmholtz coil to form a magnetic field in the direction opposite to the external magnetic field (disturbance magnetic field), the sum of the magnetic fields generated at the location where the sensor is installed becomes substantially zero. In this way, the influence on the vacuum cylinder is eliminated. In addition, in order to eliminate mutual interference from each coil to the sensor, an adjustable resistor and a compensation winding connected to each coil are provided in each sensor. The influence of the magnetic field acting on the sensor is also removed.

  Also, in Patent Document 2, the outer surface of a rectangular parallelepiped space is disposed so as to be orthogonal to the X, Y, and Z directions, and the shield surface positions of the electromagnetic coils disposed in the axial directions are opposed to each other. Magnetic sensors that measure the magnetic fluctuations in the axial direction are provided, and the direction of canceling the magnetic fluctuations independently at each magnetic sensor installation location based on the amount of magnetic fluctuation obtained by the measurement by these magnetic sensors. A technique is disclosed in which a magnetic field is applied to a space surrounded by electromagnetic coils to make an active magnetic shield space.

Japanese Patent Publication No.51-38215 Japanese Patent No. 3883855

  By using such a technique described in the patent document, it is possible to cancel the influence of a magnetic field from an adjacent device even in an environment where a magnetic inspection device that requires precise magnetic field control and magnetic field measurement such as a geomagnetic simulator is installed. It is not necessary to install and divide the devices in a magnetic shield room surrounded by magnetic shielding materials, and it is not necessary to secure a wide space for separating the devices, and the devices are arranged at close positions. It is possible.

  However, any of the techniques described in the patent documents is affected by the outside because the magnetic field from the outside is measured by a magnetic sensor and a magnetic field in the opposite direction to the magnetic field from the outside is formed based on the measured value. There is a need for a magnetic sensor that accurately measures the magnetic field. As described above, when a plurality of magnetic inspection devices such as a geomagnetic simulator are installed side by side, in each inspection device, in order to cancel out the influence of the magnetic field from other inspection devices, a three-dimensional form as described in each patent document. A plurality of magnetic sensors corresponding to the Hertz coil are required, and the apparatus configuration is complicated.

  The present invention has been made in view of such circumstances, and in an environment in which a plurality of inspection devices are installed side by side, it is not necessary to secure a large installation space for separating the magnetic shield room and the inspection devices. An object of the present invention is to provide a magnetic sensor magnetic inspection apparatus capable of inspecting the magnetic characteristics of a three-dimensional magnetic sensor while eliminating the influence of a magnetic field from an adjacent device with a simple configuration.

  The magnetic inspection apparatus of the present invention includes a first inspection region magnetic inspection device for inspecting the magnetic characteristics of the three-dimensional magnetic sensor in the first inspection region and a three-dimensional magnetic sensor in the second inspection region separated from the first inspection region. A magnetic inspection device for a second inspection region for inspecting magnetic characteristics, and each of the inspection region magnetic inspection devices generates an inspection magnetic field in an inspection region to be inspected out of both inspection regions and arranges the inspection magnetic field in the inspection region. Three-dimensional inspection magnetic field generating coil for inspecting the magnetic characteristics of the magnetic sensor, and a three-dimensional structure canceling magnetic field generation for canceling the magnetic field from the other inspection device acting on the inspection region The inspection magnetic field generating coil of one inspection region magnetic inspection device and the canceling magnetic field generation coil of the other inspection region magnetic inspection device are in three dimensions. The inspection magnetic field generating coil and the cancel magnetic field generating coil which are provided in an electrically connected state with the axis of one of the coils directed on the same axis are connected to the inspection magnetic field generating coil from the inspection magnetic field generating coil. When the distance to the target inspection region is L1, and the distance from the inspection magnetic field generating coil to the other inspection region is L2, the canceling magnetic field is compared with the inspection magnetic field generated by the inspection magnetic field generating coil. The generating coil generates a cancel magnetic field having a magnitude inversely proportional to the square of the distance ratio L2 / L1, and each inspection region magnetic inspection device acts on its own inspection region from the other inspection region magnetic inspection device. A three-dimensional magnetic field generated in the inspection region by generating an inspection magnetic field from the inspection magnetic field generation coil in a state where the magnetic field is canceled by the cancellation magnetic field generation coil. Characterized by inspecting the magnetic characteristics of the sensor.

  When a magnetic sensor is inspected in both the first inspection region and the second inspection region, when a current is passed through each inspection region magnetic inspection device, the first inspection region magnetic inspection device uses the inspection magnetic field generating coil to generate magnetism. The inspection magnetic field required for the inspection of the magnetic characteristics of the sensor is generated in the first inspection region. Also, in the magnetic inspection equipment for the second inspection region, the inspection magnetic field required for the inspection is generated by the inspection magnetic field generating coil. Occurs in the area. Therefore, in the first inspection area, not only the inspection magnetic field but also the magnetic field from the magnetic inspection device for the second inspection area acts, but the cancel magnetic field generating coil installed in the first inspection area has the second inspection area. Since the cancel magnetic field for canceling the magnetic field from the magnetic inspection apparatus for the machine is generated in the first inspection area, the magnetic field by the magnetic inspection apparatus for the second inspection area is substantially zero in the first inspection area, and the first inspection area Only the magnetic field for inspection by the magnetic inspection equipment remains. In this case, the magnetic field affecting the first inspection region from the magnetic inspection device for the second inspection region is set to L1 as the distance from the inspection magnetic field generating coil of the magnetic inspection device for the second inspection region to the second inspection region. When the distance from the inspection magnetic field generating coil to the region is L2, the distance is reduced in inverse proportion to the square of the ratio L2 / L1, and the cancellation magnetic field generating coil cancels the reduced magnetic field. A cancel magnetic field may be generated.

  Similarly, in the second inspection region magnetic inspection device, the inspection magnetic field generating coil generates an inspection magnetic field in the second inspection region, and the first inspection region magnetic inspection device generates a magnetic field that affects the second inspection region. The canceling magnetic field generating coil provided in the two inspection areas cancels out the magnetic field in the second inspection area by the magnetic field inspection device for the first inspection area.

As described above, each of the magnetic inspection devices for the inspection region includes the inspection magnetic field generation coil and the cancel magnetic field generation coil, and the inspection region of the magnetic inspection device of its own by the inspection magnetic field generated for the inspection in the other inspection region. Since the influence on the magnetic field is cancelled, in each inspection area, even if the inspection magnetic field generated by the other magnetic inspection equipment is in any axial direction, it is not affected by that magnetic field, but only its own inspection magnetic field. In the case of sequentially inspecting while switching the inspection magnetic field, such as a single magnetic field in each axial direction or a synthetic magnetic field thereof, it is possible to inspect continuously without interruption. In this case, since the influence of the mutual magnetic field is canceled according to the separation distance between the inspection regions in both inspection apparatuses, the separation distance between both inspection apparatuses can be reduced.
It should be noted that the relationship between the magnitudes of the magnetic fields is the ratio of the above-mentioned distance (L2 / L1) to the magnitude of the cancel magnetic field of the cancel magnetic field generating coil with respect to the test magnetic field of the test magnetic field generating coil in the electrically connected state. It is sufficient that the relationship is inversely proportional to the square of.

  Further, it is conceivable that the cancel magnetic field generated in each cancel magnetic field generating coil acts on the other inspection region, but the cancel magnetic field is a small magnetic field that is inversely proportional to the square of the distance as described above, and vice versa. Since the action is further reduced in inverse proportion to the square of the distance, if it is assumed that a realistic magnetic inspection apparatus equipped with a 1 m square Helmholtz type coil is arranged at a separation distance of about 2 m, Above can be ignored.

  In the magnetic inspection apparatus of the present invention, the inspection magnetic field generating coil and the cancel magnetic field generating coil in the electrically connected state are connected in series to one power source and wound in opposite directions, The number of turns with respect to the coil diameter may be set so that the cancel magnetic field generating coil is inversely proportional to the square of the distance ratio L2 / L1 with respect to the inspection magnetic field generating coil.

  Alternatively, the inspection magnetic field generating coil and the canceling magnetic field generating coil in the electrical connection state are wound in opposite directions, and the number of turns with respect to the coil diameter is set to be the same and connected to these coils. The power source may be provided with current control means for supplying a current that is inversely proportional to the square of the distance ratio L2 / L1 to the current supplied to the inspection magnetic field generating coil. Good.

  According to the magnetic inspection apparatus of the present invention, when a magnetic sensor is inspected by the inspection magnetic field generated in the inspection region to be inspected by each inspection region magnetic inspection device, the magnetic field extending from the other magnetic inspection device to the inspection region. Is canceled by the canceling magnetic field, so that it can be inspected only by its own inspection magnetic field without being influenced by the magnetic fields from other magnetic inspection devices, while it is inspected by the magnetic field in the X-axis direction. On the other hand, each magnetic inspection device can independently perform a three-dimensional inspection of the magnetic sensor, such as inspection with a magnetic field in the Y-axis direction. Therefore, a large space for separating the magnetic shield room and the inspection equipment is not required, and a cancel magnetic field is generated according to the distance between the inspection area to be inspected and the other inspection area. No measurement or the like is required, and the apparatus configuration can be simplified.

It is the schematic perspective view which abbreviate | omitted and showed one Embodiment of the magnetic inspection apparatus which concerns on this invention. It is the schematic diagram which extracted and showed the X-axis coil in order to demonstrate the principle of the magnetic field cancellation of the magnetic inspection apparatus of one Embodiment. It is a perspective view which shows the magnetic field generation coil, stage, and probe card in the magnetic inspection apparatus of FIG. It is a top view which shows the positional relationship on the horizontal surface of the stage of FIG. 3, and a probe card. It is the same schematic diagram as FIG. 2 which showed 2nd Embodiment of this invention.

Embodiments of the present invention will be described below with reference to the drawings.
1 to 4 show a magnetic inspection apparatus according to a first embodiment of the present invention. The magnetic inspection apparatus 1 includes a first inspection area T1 and a second inspection area T2 spaced from the first inspection area T1. Two sets of magnetic inspection devices 2 and 3 for magnetic inspection are provided.
The first inspection region magnetic inspection device 2 includes an inspection magnetic field generating coil 4 that generates an inspection magnetic field in the first inspection region T1 to be inspected, and a second inspection region magnetic inspection device 3 that operates on the first inspection region T1. And a cancel magnetic field generating coil 5 for generating a cancel magnetic field for canceling the magnetic field from the first inspection region T1, and the second inspection region magnetic inspection device 3 is a second inspection to be inspected. An inspection magnetic field generating coil 6 for generating an inspection magnetic field in the region T2 and a cancel magnetic field for canceling the magnetic field from the first inspection region magnetic inspection apparatus 2 acting on the second inspection region T2 are generated in the second inspection region T2. The cancel magnetic field generating coil 7 is included.
These inspection devices 2 and 3 have the same basic configuration, and the details of the apparatus configuration will be described below with the first inspection region magnetic inspection device 2 as a representative.

  The first inspection region magnetic inspection apparatus 2 includes a set of two inspection magnetic field generating coils 4 that face each other in the X-axis direction, the Y-axis direction, and the Z-axis direction orthogonal to each other. The three sets of Helmholtz type coils 11, 12, 13 are arranged on the both sides, upper and lower, front and back of the frame 14, respectively, so as to constitute a regular hexahedron as a whole. Has been.

  Specifically, as shown in FIG. 3, a pair of X-axis coils 11 are provided on both sides of the frame 14 so that the axial direction along the horizontal direction (X-axis direction) coincides. A set of Y-axis coils 12 having an axial direction (referred to as the Y-axis direction) oriented in the horizontal direction perpendicular to the axial direction of the coil 11 are provided on the front surface and the back surface of the frame 14, and these X-axis coil 11 and Y-axis coil A pair of Z-axis coils 13 are provided on the upper and lower portions of the frame 14 with the axial direction (referred to as the Z-axis direction) oriented in the vertical direction orthogonal to both of the two axial directions. In FIG. 3, the X axis, the Y axis, and the Z axis are indicated by alternate long and short dash lines. In addition, a first inspection region T1 is provided at the center position of the space surrounded by the coils 11, 12, and 13, and each set of coils 11, 12, and 13 provides the first inspection region T1 to the first inspection region T1 in the X-axis direction. In addition, a single magnetic field in each of the three axial directions of the Y-axis direction and the Z-axis direction can be generated, and a composite magnetic field of these three axes can be applied.

  In the first inspection region T1, a probe card 15 is fixed, and a movable stage 18 on which a wafer 17 having a magnetic sensor 16 is placed is provided. In this case, the magnetic sensor 16 is in a state before being separated from the wafer 17, and a plurality of magnetic sensors 16 formed in an aligned state on the wafer 17 are used. The probe card 15 is provided with a probe group 19 that can simultaneously contact a plurality of magnetic sensors 16 among the many magnetic sensors 16 arranged in the wafer state, and the plurality of magnetic sensors 16 are simultaneously inspected. Can be done. Then, while moving the wafer 17 fixed on the stage 18 in the X direction and the Y direction as indicated by the arrows in FIG. 4, a plurality of magnetic sensors 16 are opposed to the probe group 19 of the probe card 15. The probe group 119 is brought into contact with these magnetic sensors 16 by moving the stage 18 in the Z direction, and each magnetic sensor 16 is energized, and the magnetic characteristics of the magnetic sensor 16 are inspected from the output. This inspection is performed while generating magnetic fields in the X-axis, Y-axis, and Z-axis directions by the three sets of coils 11, 12, and 13.

  Similarly to the inspection magnetic field generating coil 4, the cancel magnetic field generating coil 5 is a set of two facing each other in the X axis direction, the Y axis direction, and the Z axis direction orthogonal to each other. It is composed of three sets of Helmholtz type coils 21, 22, 23. In the example shown in the figure, the coil diameter is larger than that of the inspection magnetic field generating coil 4, One set is disposed on each of the lower part, the front face, and the rear face, and is arranged so as to constitute a regular hexahedron as a whole.

  On the other hand, in the second inspection region magnetic inspection device 3, as in the first inspection region magnetic inspection device 2, the inspection magnetic field generating coil 6 includes the X-axis coil 31, the Y-axis coil 32, the same coil diameter, The Z-axis coil 33 constitutes a Helmholtz type coil fixed to the frame 30 one by one, and the canceling magnetic field generating coil 7 is larger than each coil of the inspection magnetic field generating coil 6 as an X-axis coil 35 and a Y-axis coil 36. The Z-axis coils 37 constitute a Helmholtz type coil fixed to the frame 38 one by one, the inspection magnetic field generating coil 6 is provided surrounding the second inspection region T2, and the canceling magnetic field generating coil 7 is arranged outside thereof. Has been.

The first inspection region magnetic inspection device 2 and the second inspection region magnetic inspection device 3 include an inspection magnetic field generation coil of one inspection device and a cancellation magnetic field generation coil of the other inspection device in FIG. As shown, one of the three axes, in the illustrated example, the X axis is arranged on the same axis, and the other Y axis and Z axis are parallel to each other.
Further, the inspection magnetic field generating coil 4 of the first inspection region magnetic inspection device 2 and the cancel magnetic field generation coil 7 of the second inspection region magnetic inspection device 3 are arranged in series for each of the X axis, the Y axis, and the Z axis. They are connected to one power source 25 so that the same current flows. Similarly, each of the inspection magnetic field generating coil 6 of the second inspection region magnetic inspection device 3 and the cancel magnetic field generation coil 5 of the first inspection region magnetic inspection device 2 is also provided for each of the X axis, the Y axis, and the Z axis. They are connected in series and connected to a single power supply so that the same current flows. Further, the winding directions of the inspection magnetic field generating coil and the canceling magnetic field generating coil are reversed for each axis in the electrical connection state, and are set to different numbers of turns.

Referring to FIG. 2 taking an X-axis coil as an example, the X-axis coil 11 of the inspection magnetic field generating coil 4 and the X-axis coil 34 of the canceling magnetic field generating coil 7 are connected in series and their winding directions are opposite to each other. The X-axis coil 34 of the cancel magnetic field generating coil 7 is set to have a smaller number of turns than the X-axis coil 11 of the inspection magnetic field generating coil 4.
The magnitude of the magnetic field generated by the coil is proportional to the number of turns of the coil and inversely proportional to the coil diameter. Bio-Savart's law Is inversely proportional to the square of the distance from the coil.

  Therefore, the X-axis coil 11 of the inspection magnetic field generating coil 4 and the X-axis coil 34 of the canceling magnetic field generating coil 7 have a distance L1 from the X-axis coil 11 of the inspection magnetic field generating coil 4 to the first inspection region T1. When the distance from the X-axis coil 11 to the second inspection region T2 is L2, the inspection magnetic field acting on the first inspection region T1 is up to the second inspection region T2 with respect to the distance L1 to the first inspection region T1. The relationship of the number of turns to the coil diameter may be set so that a canceling magnetic field having a magnitude inversely proportional to the square of the ratio (L2 / L1) of the distance L2 is generated in the second inspection region T2. For example, when the distance L1 from the X-axis coil 11 of the inspection magnetic field generating coil 4 to the first inspection region T1 is 50 cm and the distance L2 from the X-axis coil 11 to the second inspection region T2 is 2 m, the inspection magnetic field is generated. The magnetic field applied to the second inspection region T2 by the X-axis coil 11 of the coil 4 is inversely proportional to the square of (200/50) of the magnetic field received in the first inspection region T1, and becomes 1/16. Therefore, the number of turns with respect to the coil diameter of the X-axis coil 34 in the cancel magnetic field generating coil 7 may be set so that 1/16 of the magnetic field generated in the X-axis coil 11 in the inspection magnetic field generating coil 4 is generated.

  The relationship between the X-axis coils 11 and 34 of the inspection magnetic field generating coil 4 and the cancel magnetic field generating coil 7 is the same for the Y-axis coils 12 and 35 and the Z-axis coils 13 and 36. The winding direction of the magnetic field generating coil 4 and the canceling magnetic field generating coil 7 is reversed, and the distance from the Y-axis coil 12 and the Z-axis coil 13 of the inspection magnetic field generation coil 4 to the first inspection region T1 is set respectively. When the distance from the Y-axis coil 12 and the Z-axis coil 13 to the second inspection region T2 is L2, respectively, the first inspection region from the Y-axis coil 12 and the Z-axis coil 13 of the inspection magnetic field generating coil 4 is L1. A coil is generated so as to generate a canceling magnetic field inversely proportional to the square of the ratio (L2 / L1) of the distance L2 to the second inspection region T2 with respect to the distance L1 to T1. The number of turns is set against. In this case, the distances L1 and L2 are the same as those in the case of the X-axis coil 11 in FIG.

  In addition, with respect to the inspection magnetic field generating coil 6 that generates the inspection magnetic field in the second inspection region T2, the cancel magnetic field generation coil 5 that generates the cancellation magnetic field in the first inspection region T1 is also reversed in the coil winding direction. In addition, a cancellation magnetic field that is inversely proportional to the square of the ratio (L2 / L1) of the distance L2 to the first inspection region T1 with respect to the distance L1 from the inspection magnetic field generating coil 6 to the second inspection region T2 is generated with respect to the inspection magnetic field. Thus, the number of turns with respect to the coil diameter is set. In this case as well, the same reference numerals are used for the distances L1 and L2 as in the case of the first inspection region magnetic inspection device 2, but the distances L1 and L2 are not necessarily the same as those in the case of the first inspection region magnetic inspection device 2. .

  The first inspection region magnetic inspection device 2 and the second inspection region magnetic inspection device 3 are combined, and the mutual inspection magnetic field generation coil 4 and cancel magnetic field generation coil 5 are combined into the first inspection region T1 and the second inspection region. By arranging in T2 in the above-described positional relationship, the magnetic inspection apparatus 1 that can inspect magnetic characteristics separately in the two inspection regions T1 and T2 is configured.

  In the magnetic inspection apparatus 1 configured as described above, when a magnetic inspection is performed in both the first inspection region T1 and the second inspection region T2, when a current is passed through the magnetic field generating coil 4 of the magnetic inspection device 2 for the first inspection region, The same current also flows through the cancellation magnetic field generating coil 7 of the magnetic inspection device 3 for the second inspection region, and the inspection magnetic field generating coil 4 generates an inspection magnetic field having a magnitude necessary for the inspection in the first inspection region T1. As described above, the magnetic field generated by the inspection magnetic field generating coil 4 has a magnitude corresponding to the distances L1 and L2 from the inspection magnetic field generating coil 4 to the first inspection region T1 and the second inspection region T2, and is second. This also affects the inspection area T2. In the second inspection region T2, the cancel magnetic field generating coil 7 generates a cancel magnetic field having the same magnitude in the opposite direction as the magnetic field affecting the second inspection region T2 from the inspection magnetic field generating coil 4. Cancel the magnetic field from 4.

  On the other hand, in the second inspection region magnetic inspection device 3, when a current is passed through the magnetic field generation coil 6, the same current also flows through the cancellation magnetic field generation coil 5 of the first inspection region magnetic inspection device 2. An inspection magnetic field is generated by the inspection magnetic field generating coil 6 at T <b> 2, and the magnetic field that affects the first inspection region T <b> 1 from the inspection magnetic field generating coil 6 is canceled by the magnetic field in the reverse direction of the cancel magnetic field generating coil 5.

  Therefore, both the magnetic inspection devices 2 and 3 generate the inspection magnetic field for the inspection in their own inspection region, so that the influence on the inspection region from other magnetic inspection devices is canceled by the cancellation magnetic field. In the inspection regions T1 and T2, it is possible to inspect only with its own inspection magnetic field without being affected by the magnetic field from other magnetic inspection equipment.

  For example, in each of the magnetic inspection devices 2 and 3, the X-axis, Y-axis, and Z-axis inspection magnetic field generating coils sequentially generate the magnetic fields of the respective axes in the inspection area while switching for each axis, and are arranged in the inspection areas. When the probe card is brought into contact with the magnetic sensor and the magnetic characteristics for each axis are sequentially inspected, the first inspection region magnetic inspection device 2 generates, for example, an inspection magnetic field in the X-axis direction for inspection. When the magnetic field generated by the second inspection region magnetic inspection device 3 is in any axial direction, the influence of the magnetic field from the second inspection region magnetic inspection device 3 is affected by the first inspection region magnetic inspection. In the apparatus 2, since the cancel magnetic field generating coil 5 cancels, the magnetic inspection can be performed only by the inspection magnetic field in the X-axis direction in the first inspection region T1. The same applies to each magnetic field in the Y-axis direction and the Z-axis direction.

In the second inspection region magnetic inspection apparatus 3, the magnetic field generated by the first inspection region magnetic inspection apparatus 2 when performing inspection by generating inspection magnetic fields in the X-axis, Y-axis, and Z-axis directions. Can be inspected only by the inspection magnetic field generated from its own inspection magnetic field generating coil in its own inspection region T2.
These two magnetic inspection devices 2 and 3 can be independently magnetically inspected without being affected by each other's magnetic field, such as a single magnetic field in each axial direction, or a synthetic magnetic field of these, etc. Even when sequentially inspecting while switching, it is possible to inspect continuously without interruption.

  FIG. 5 shows a second embodiment of the magnetic inspection apparatus of the present invention, and schematically shows only the X-axis coil as in FIG. As in the first embodiment, this magnetic inspection apparatus includes both a first inspection region magnetic inspection device and a second inspection region magnetic inspection device, an inspection magnetic field generating coil that generates an inspection magnetic field in its own inspection region, and the other And a cancel magnetic field generating coil for generating a cancel magnetic field for canceling the magnetic field generated in the inspection region of the magnetic inspection device, each of which is in the X axis direction, the Y axis direction, and the Z axis direction orthogonal to each other. A magnetic field generating coil of one inspection region magnetic inspection device and a canceling magnetic field generation coil of the other inspection region magnetic inspection device, which are composed of two sets of two Helmholtz coils facing each other in the axial direction And the inspection magnetic field generating coil and the canceling magnetic field generating coil in the electrical connection state, the X-axis coil is on the same axis, the Y-axis coil and the Z-axis coil. They are arranged in parallel.

  In addition, the inspection magnetic field generating coil and the cancel magnetic field generating coil in the electrical connection state are formed such that the cancel magnetic field generating coil has a larger coil diameter in all of the X-axis coil, the Y-axis coil, and the Z-axis coil. The number of turns with respect to the coil diameter is set to be the same, and the winding direction of the inspection magnetic field generating coil and that of the canceling magnetic field generating coil are opposite to each other. The power source connected to the inspection magnetic field generating coil and the canceling magnetic field generating coil Current control means is provided for controlling the current supplied to. In FIG. 5, the X-axis coil 52 of the inspection magnetic field generating coil 51 and the X-axis coil 54 of the canceling magnetic field generating coil 53 are connected to the power supply 55, and current control means 56 that controls the current to each X-axis coil 52, 54. Is provided.

For example, the current control means 56 is provided with a shunt circuit between the power supply 55 and the cancel magnetic field generating coil 53 to adjust the current according to the distance ratio L2 / L1. That is, the current that is inversely proportional to the square of the ratio (L2 / L1) of the distance L2 from the inspection magnetic field generation coil to the first inspection region to the second inspection region with respect to the current flowing through the inspection magnetic field generation coil. It comes to flow. In FIG. 5, the ratio of the distance L2 from the X-axis coil 52 to the first inspection region T1 to the second inspection region T2 (L2) with respect to the current flowing through the X-axis coil 52 of the inspection magnetic field generating coil 51 Current that is inversely proportional to the square of / L1) flows through the X-axis coil 54 of the cancellation magnetic field generation coil 53. By such current control, the magnetic field that affects the first inspection region T1 by the inspection magnetic field generated in the second inspection region T2 by the inspection magnetic field generation coil can be canceled by the cancellation magnetic field generation coil.
Other configurations are the same as those of the first embodiment.

In addition, this invention is not limited to the said embodiment, A various change can be added in the range which does not deviate from the meaning of this invention.
For example, in the above embodiment, the cancel magnetic field generating coil is arranged outside the inspection magnetic field generating coil in each magnetic inspection device, but conversely, the inspection magnetic field generating coil may be arranged outside the cancel magnetic field generating coil. In addition, the inspection magnetic field generating coil and the cancel magnetic field generating coil that are in an electrically connected state can be compared with the inspection magnetic field generated by the inspection magnetic field generating coil by appropriately combining the coil diameter, the number of turns, and the current. Is set so as to generate a canceling magnetic field whose magnitude is inversely proportional to the square of the ratio L2 / L1 between the distance L1 from the inspection magnetic field generating coil to the inspection area to be inspected and the distance L2 to the other inspection area. That's fine.

DESCRIPTION OF SYMBOLS 1 ... Magnetic test | inspection apparatus, 2 ... Magnetic test | inspection apparatus for 1st test | inspection areas, 3 ... Magnetic test | inspection apparatus for 2nd test | inspection areas, 4 ... Test magnetic field generating coil, 5 ... Cancel magnetic field generating coil, 6 ... Test magnetic field generating coil, 7 ... canceling magnetic field generating coil, 11, 31 ... X-axis coil, 12, 32 ... Y-axis coil, 13, 33 ... Z-axis coil, 14, 30 ... frame, 15 ... probe card, 16 ... magnetic sensor, 17 ... wafer, DESCRIPTION OF SYMBOLS 18 ... Stage, 19 ... Probe group, 25 ... Power supply, 21, 35 ... X-axis coil, 22, 36 ... Y-axis coil, 23, 37 ... Z-axis coil, 24, 38 ... Frame, 51 ... Inspection magnetic field generating coil, 52 ... X-axis coil, 53 ... Cancel magnetic field generating coil, 54 ... X-axis coil, 55 ... Power source, 56 ... Current control means, T1 ... First inspection region, T2 ... Second inspection region

Claims (1)

  A first inspection region magnetic inspection device that inspects the magnetic characteristics of the three-dimensional magnetic sensor in the first inspection region and a second inspection that inspects the magnetic properties of the three-dimensional magnetic sensor in the second inspection region that is separated from the first inspection region. These inspection area magnetic inspection devices generate an inspection magnetic field in the inspection area to be inspected, and inspect the magnetic characteristics of the magnetic sensor arranged in the inspection area. A three-dimensional structure inspection magnetic field generating coil and a three-dimensional structure cancellation magnetic field generation coil for generating a cancel magnetic field for canceling the magnetic field from the other inspection device acting on the inspection area, The inspection magnetic field generating coil of the magnetic inspection device for the inspection region and the canceling magnetic field generation coil of the magnetic inspection device for the other inspection region have the same axis of one of the three dimensions. The inspection magnetic field generating coil and the cancel magnetic field generating coil that are provided in an electrically connected state upward and are in the electrically connected state have a distance from the inspection magnetic field generating coil to the inspection region to be inspected. When the distance from the inspection magnetic field generating coil to the other inspection region is L2, the cancel magnetic field generating coil has a ratio L2 / of the distance to the inspection magnetic field generated by the inspection magnetic field generating coil. A cancellation magnetic field having a magnitude inversely proportional to the square of L1 is generated, and each inspection area magnetic inspection apparatus cancels the magnetic field acting on its own inspection area from the other inspection area magnetic inspection apparatus by the cancellation magnetic field generating coil. In this state, an inspection magnetic field is generated from the inspection magnetic field generating coil to inspect the magnetic characteristics of the three-dimensional magnetic sensor arranged in the inspection area. The magnetic testing apparatus of the magnetic sensor according to claim Rukoto.

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