JP2013179347A - Semiconductor light-emitting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a semiconductor light-emitting device excellent in reliability.SOLUTION: A semiconductor layer includes a first primary surface, a second primary surface formed on the opposite side of the first primary surface, and a light-emitting layer. A first wiring layer is provided on the second primary surface side and is connected to a first electrode, and a second wiring layer is provided on second primary surface side and is connected to a second electrode. A first metal pillar is provided on the surface of the first wiring layer opposite to the surface on which the first electrode is provided, and has side surfaces having irregularity. A second metal pillar is provided on the surface of the second wiring layer opposite to the surface on which the second electrode is provided, and has side surfaces having irregularity. A resin layer covers the side surfaces of the first metal pillar and the side surfaces of the second metal pillar.

Description

  Embodiments described herein relate generally to a semiconductor light emitting device.

  A technique is known in which an LED (Light Emitting Diode) chip in which an n-side electrode and a p-side electrode are formed on one main surface side in a semiconductor layer is flip-chip mounted using, for example, solder. In the flip chip structure, it is required to reduce the size and not to deteriorate the reliability.

Japanese Patent Application Laid-Open No. 2000-244012 JP-A-2005-79551

  Embodiments provide a semiconductor light emitting device with excellent reliability.

  According to the embodiment, the semiconductor light emitting device includes a semiconductor layer, a first electrode, a second electrode, a first wiring layer, a second wiring layer, a first metal pillar, Metal pillars and a resin layer. The semiconductor layer includes a first main surface, a second main surface formed on the opposite side, and a light emitting layer. The first electrode is provided in a region having the light emitting layer on the second main surface. The second electrode is provided in a region having no light emitting layer on the second main surface. The first wiring layer is provided on the second main surface side and connected to the first electrode. The second wiring layer is provided on the second main surface side and connected to the second electrode. The first metal pillar is provided on a surface of the first wiring layer opposite to the first electrode, and has a side surface on which irregularities are formed. The second metal pillar is provided on a surface of the second wiring layer opposite to the second electrode, and has a side surface on which irregularities are formed. The resin layer covers a side surface of the first metal pillar and a side surface of the second metal pillar.

1 is a schematic diagram of a semiconductor light emitting device according to a first embodiment. FIG. 3 is a schematic view showing a method for manufacturing the semiconductor light emitting device according to the first embodiment. FIG. 3 is a schematic view showing a method for manufacturing the semiconductor light emitting device according to the first embodiment. FIG. 3 is a schematic view showing a method for manufacturing the semiconductor light emitting device according to the first embodiment. FIG. 3 is a schematic view showing a method for manufacturing the semiconductor light emitting device according to the first embodiment. FIG. 3 is a schematic view showing a method for manufacturing the semiconductor light emitting device according to the first embodiment. FIG. 3 is a schematic view showing a method for manufacturing the semiconductor light emitting device according to the first embodiment. FIG. 3 is a schematic view showing a method for manufacturing the semiconductor light emitting device according to the first embodiment. FIG. 3 is a schematic view showing a method for manufacturing the semiconductor light emitting device according to the first embodiment. FIG. 3 is a schematic view showing a method for manufacturing the semiconductor light emitting device according to the first embodiment. FIG. 3 is a schematic view showing a method for manufacturing the semiconductor light emitting device according to the first embodiment. FIG. 3 is a schematic view showing a method for manufacturing the semiconductor light emitting device according to the first embodiment. The schematic diagram of the semiconductor light-emitting device concerning 2nd Embodiment. The schematic diagram which shows the manufacturing method of the semiconductor light-emitting device concerning 2nd Embodiment. The schematic diagram of the semiconductor light-emitting device concerning 3rd Embodiment. The schematic diagram which shows the manufacturing method of the semiconductor light-emitting device concerning 3rd Embodiment. The schematic diagram which shows the manufacturing method of the semiconductor light-emitting device concerning 3rd Embodiment. The schematic diagram which shows the manufacturing method of the semiconductor light-emitting device concerning 3rd Embodiment. The schematic diagram which shows the manufacturing method of the semiconductor light-emitting device concerning 3rd Embodiment. The schematic diagram of the semiconductor light-emitting device concerning 4th Embodiment. FIG. 9 is a schematic view showing a method for manufacturing a semiconductor light emitting device according to a fourth embodiment. FIG. 9 is a schematic view showing a method for manufacturing a semiconductor light emitting device according to a fourth embodiment. FIG. 9 is a schematic view showing a method for manufacturing a semiconductor light emitting device according to a fourth embodiment. FIG. 9 is a schematic view showing a method for manufacturing a semiconductor light emitting device according to a fourth embodiment. The schematic diagram which shows the modification of a lens and a fluorescent substance layer. The schematic diagram which shows the tombstone defect at the time of mounting.

  Hereinafter, embodiments will be described with reference to the drawings. In addition, the same code | symbol is attached | subjected to the same element in each drawing. In the drawings showing the steps, a partial region in the wafer state is shown.

(First embodiment)
FIG. 1A is a schematic cross-sectional view of the semiconductor light emitting device according to the first embodiment, and FIG. 1B is a bottom view thereof.

  The semiconductor light emitting device according to the present embodiment has a structure in which an electrode and a wiring layer are provided on one main surface (second main surface) side of the semiconductor layer 15. Light is mainly extracted from the first main surface 15a opposite to the second main surface.

  The semiconductor layer 15 includes a first semiconductor layer 11 and a second semiconductor layer 13. The first semiconductor layer 11 is, for example, an n-type GaN layer, and functions as a current horizontal path. However, the conductivity type of the first semiconductor layer 11 is not limited to n-type and may be p-type. The second semiconductor layer 13 has a stacked structure in which a light emitting layer (active layer) 12 is sandwiched between an n-type layer and a p-type layer.

  The second main surface side of the semiconductor layer 15 is processed into an uneven shape, and an upper step portion and a lower step portion are provided on the second main surface side. The upper stage portion located on the upper stage side with respect to the lower stage section when viewed from the first main surface 15 a includes the light emitting layer 12. The lower part does not include the light emitting layer 12 and is provided outside the outer periphery of the light emitting layer 12.

  A p-side electrode 16 is provided as a first electrode on the surface of the second semiconductor layer 13 that is the surface of the upper stage. That is, the p-side electrode 16 is provided in a region having the light emitting layer 12. An n-side electrode 17 is provided as a second electrode on the surface of the lower first semiconductor layer 11.

  FIG. 2B shows an example of a planar layout of the p-side electrode 16 and the n-side electrode 17. In one semiconductor layer 15, the area of the p-side electrode 16 is larger than the area of the n-side electrode 17. Therefore, a wide light emitting area can be secured.

  The second main surface side of the semiconductor layer 15 is covered with an insulating layer 18. Further, the end portion (side surface) of the semiconductor layer 15 is also covered with the insulating layer 18. The insulating layer 18 is, for example, a resin such as polyimide that is excellent in patterning characteristics of a fine opening. Alternatively, silicon oxide may be used as the insulating layer 18.

  In the insulating layer 18, the surface opposite to the semiconductor layer 15 is flattened, and a p-side wiring layer 21 as a first wiring layer and an n-side wiring layer 22 as a second wiring layer are provided on the surface. ing. The p-side wiring layer 21 is also provided in the first opening 18 a that reaches the p-side electrode 16 and is formed in the insulating layer 18, and is connected to the p-side electrode 16. The n-side wiring layer 22 is also provided in the second opening 18 b that reaches the n-side electrode 17 and is formed in the insulating layer 18, and is connected to the n-side electrode 17.

  A p-side metal pillar 23 is provided as a first metal pillar on the surface opposite to the p-side electrode 16 in the p-side wiring layer 21. An n-side metal pillar 24 is provided as a second metal pillar on the surface opposite to the n-side electrode 17 in the n-side wiring layer 22.

  An insulating film 26 is formed on the side surface of the p-side metal pillar 23 and the side surface of the n-side metal pillar 24. The p-side metal pillar 23 and the n-side metal pillar 24 are made of, for example, copper or mainly contain copper. The insulating film 26 has a solder wettability worse than that of copper. The wettability of the solder represents the property that the solder melted on the metal surface spreads without repelling. For example, the insulating film 26 is an inorganic film such as a silicon oxide film or a silicon nitride film.

  As shown in FIG. 1B, the insulating film 26 continuously covers the periphery of each side surface of the p-side metal pillar 23 and the n-side metal pillar 24. The insulating film 26 is also formed on the insulating layer 18 between the p-side wiring layer 21 and the n-side wiring layer 22.

  The periphery of the insulating film 26, the p-side wiring layer 21 and the n-side wiring layer 22 are covered with a resin layer 25. The resin layer 25 is filled between the p-side metal pillar 23 and the n-side metal pillar 24 and reinforces them. The lower surfaces of the p-side metal pillar 23 and the n-side metal pillar 24 are exposed from the resin layer 25.

  The area where the n-side wiring layer 22 and the n-side metal pillar 24 are in contact is larger than the area where the n-side wiring layer 22 and the n-side electrode 17 are in contact.

  That is, the area of the n-side wiring layer 22 connected to the n-side electrode 17 provided in the portion not including the light emitting layer 12 in the semiconductor layer 15 is opposite to the n-side electrode 17 than the surface on the n-side electrode 17 side. It is larger on the side surface. Further, a part of the n-side wiring layer 22 extends on the insulating layer 18 to a position overlapping the light emitting layer 12.

  Thereby, while maintaining a high light output by the wider light emitting layer 12, the n-side electrode 17 provided in a narrow area of the semiconductor layer 15 not including the light emitting layer 12 can be further passed through the n-side wiring layer 22. A wide lead electrode can be formed.

  The first semiconductor layer 11 is electrically connected to the n-side metal pillar 24 through the n-side electrode 17 and the n-side wiring layer 22. The second semiconductor layer 13 is electrically connected to the p-side metal pillar 23 via the p-side electrode 16 and the p-side wiring layer 21.

On the lower surface exposed from the resin layer 25 in the n-side metal pillar 24 and the p-side metal pillar 23, as shown in FIG. 1C, an external terminal such as a ball-shaped solder 50 is provided. The semiconductor light emitting device can be electrically connected to an external circuit through the solder 50 and pads 82a and 82b formed on the mounting substrate 81, wirings, and the like. The solder 50 includes, for example, tin (Sn), silver (Ag), bismuth (Bi), copper (Cu), and the like.
Alternatively, the lower surfaces of the n-side metal pillar 24 and the p-side metal pillar 23 may be covered with an inert metal such as gold. In this case, the semiconductor light emitting device is mounted on the mounting substrate 81 on which the solder paste is printed, and the solder is wetted and connected to the gold surface. In addition, it is possible to coat the lower surfaces of the n-side metal pillar 24 and the p-side metal pillar 23 with a volatile organic thin film called OSP (organic solderbility preservatives). In this case, the solder is wetted and connected to the copper surface that is prevented from being oxidized by being covered with OSP.

  The thicknesses of the n-side metal pillar 24 and the p-side metal pillar 23 (the thickness in the vertical direction in FIG. 1A) are the semiconductor layer 15, the n-side electrode 17, the p-side electrode 16, the insulating layer 18, and the n-side wiring. It is thicker than the thickness of the laminated body including the layer 22 and the p-side wiring layer 21. The aspect ratio (thickness ratio with respect to the planar size) of each metal pillar 23 and 24 is not limited to 1 or more, and the ratio may be smaller than 1. That is, the metal pillars 23 and 24 may have a thickness smaller than the planar size.

  According to the structure of this embodiment, even if the semiconductor layer 15 is thin, the mechanical strength can be maintained by increasing the n-side metal pillar 24, the p-side metal pillar 23, and the resin layer 25. Further, when mounted on the mounting substrate 81, the stress applied to the semiconductor layer 15 through the solder 50 can be relaxed by the n-side metal pillar 24 and the p-side metal pillar 23 absorbing the stress.

  As a material of the n-side wiring layer 22, the p-side wiring layer 21, the n-side metal pillar 24, and the p-side metal pillar 23, copper, gold, nickel, silver, or the like can be used. Of these, copper having good thermal conductivity, high migration resistance, and excellent adhesion to an insulating material is more preferable.

  As the resin layer 25 that serves to reinforce the n-side metal pillar 24 and the p-side metal pillar 23, it is desirable to use a resin layer having the same or similar thermal expansion coefficient as that of the mounting substrate 81. As such a resin layer 25, an epoxy resin, a silicone resin, a fluororesin, etc. can be mentioned as an example, for example.

  A lens 27 and a phosphor layer 28 are provided on the first main surface 15 a of the semiconductor layer 15. The phosphor layer 28 can absorb light from the light emitting layer 12 and emit wavelength-converted light. For this reason, the mixed light of the light from the light emitting layer 12 and the wavelength conversion light in the phosphor layer 28 can be emitted. For example, when the light emitting layer 12 is made of nitride, white or a light bulb color can be obtained as a mixed color of blue light from the light emitting layer 12 and yellow light which is wavelength converted light in the yellow phosphor layer 28, for example. . Further, the phosphor layer 28 may be configured to include a plurality of types of phosphors (for example, a red phosphor and a green phosphor).

  The light emitted from the light emitting layer 12 mainly travels through the first semiconductor layer 11, the first main surface 15a, the lens 27, and the phosphor layer 28 and is emitted to the outside.

  Next, with reference to FIGS. 2A to 12B, a method for manufacturing the semiconductor light emitting device according to the present embodiment will be described.

  First, the first semiconductor layer 11 is formed on the main surface of the substrate 10, and the second semiconductor layer 13 including the light emitting layer 12 is formed thereon. When these semiconductor layers 15 are nitride semiconductors, for example, the semiconductor layers 15 can be grown on a sapphire substrate, for example.

  Next, as shown in FIG. 2A and the bottom view of FIG. 2B, for example, by RIE (Reactive Ion Etching) using a resist (not shown), the semiconductor layer 15 is penetrated to the substrate 10. The reaching separation groove 14 is formed. The separation grooves 14 are formed, for example, in a lattice shape on the substrate 10 and separate the semiconductor layer 15 into a plurality of pieces.

  Further, a part of the second semiconductor layer 13 including the light emitting layer 12 is removed by, for example, the RIE method using a resist (not shown) to expose a part of the first semiconductor layer 11. As a result, an upper step portion that is positioned relatively higher than the substrate 10 and a lower step portion that is positioned lower than the upper step portion on the substrate 10 side are formed on the second main surface side of the semiconductor layer 15. The upper part includes the light emitting layer 12, and the lower part does not include the light emitting layer 12.

  Then, the p-side electrode 16 is formed on the upper surface (the surface of the second semiconductor layer 13), and the n-side electrode 17 is formed on the lower surface (the surface of the first semiconductor layer 11). Either the p-side electrode 16 or the n-side electrode 17 may be formed first, or the p-side electrode 16 and the n-side electrode 17 may be simultaneously formed of the same material.

  Next, after covering all the exposed portions on the substrate 10 with the insulating layer 18, as shown in FIG. 3A, the insulating layer 18 is patterned by wet etching, for example, so that the insulating layer 18 is selectively formed. A first opening 18a and a second opening 18b are formed. The first opening 18 a reaches the p-side electrode 16. The second opening 18 b reaches the n-side electrode 17. The isolation groove 14 is filled with an insulating layer 18.

  Next, as shown in FIG. 3B, a continuous seed metal 19 is formed on the surface of the insulating layer 18 and the inner surfaces of the first opening 18a and the second opening 18b. Further, a resist 41 is selectively formed on the seed metal 19 and Cu electrolytic plating using the seed metal 19 as a current path is performed.

As a result, as shown in FIG. 4A and the bottom view of FIG. 4B, the p-side wiring layer 21 and the n-side wiring layer 22 are selectively formed on the seed metal 19. The p-side wiring layer 21 and the n-side wiring layer 22 are made of a copper material that is simultaneously formed by a plating method. The p-side wiring layer 21 is also formed in the first opening 18 a and is connected to the p-side electrode 16 through the seed metal 19. The n-side wiring layer 22 is also formed in the second opening 18 b and is connected to the n-side electrode 17 through the seed metal 19.
The surface on the opposite side to the n-side electrode 17 in the n-side wiring layer 22 has a larger area than the surface connected to the n-side electrode 17 and is formed in a pad shape on the surface of the insulating layer 18. Similarly, the surface opposite to the p-side electrode 16 in the p-side wiring layer 21 has a larger area than the surface connected to the p-side electrode 16 and is formed in a pad shape on the surface of the insulating layer 18.

  The resist 41 used for plating the p-side wiring layer 21 and the n-side wiring layer 22 is removed with, for example, a chemical solution (FIG. 5A). Thereafter, as shown in FIG. 5B, another resist 42 for forming metal pillars is formed, and Cu electrolytic plating using the seed metal 19 as a current path is performed. The resist 42 is thicker than the resist 41.

  As a result, the p-side metal pillar 23 is formed on the p-side wiring layer 21 and the n-side metal is formed on the n-side wiring layer 22 as shown in FIG. A pillar 24 is formed. The p-side metal pillar 23 and the n-side metal pillar 24 are made of a copper material that is simultaneously formed by a plating method.

  The resist 42 is removed with, for example, a chemical solution (FIG. 7A). Thereafter, the exposed portion of the seed metal 19 is wet-etched using the p-side metal pillar 23 and the n-side metal pillar 24 as a mask (FIG. 7B). As a result, the electrical connection between the p-side wiring layer 21 and the n-side wiring layer 22 through the seed metal 19 is broken.

  Next, the insulating film 26 is formed on the exposed portion on the substrate 10 by, for example, a chemical vapor deposition (CVD) method or a PVD (physical vapor deposition) method such as a sputtering method. As shown in FIG. 8A, the insulating film 26 covers the side surface of the p-side metal pillar 23, its lower surface, the side surface of the n-side metal pillar 24, and its lower surface. The insulating film 26 is also formed on the surface of the insulating layer 18 where the seed metal 19 is removed.

  Next, as shown in FIG. 8B, a resin layer 25 is laminated on the insulating layer 18. The resin layer 25 covers a portion covered with the insulating film 26. That is, the resin layer 25 is filled between the p-side wiring layer 21 and the n-side wiring layer 22 and between the p-side metal pillar 23 and the n-side metal pillar 24. The periphery of each of the p-side metal pillar 23 and the n-side metal pillar 24 is covered with a resin layer 25 via an insulating film 26.

  Thereafter, as shown in FIGS. 9A and 9B, the substrate 10 is removed. The substrate 10 is removed by, for example, a laser lift-off method. Specifically, laser light is irradiated from the back surface side of the substrate 10 toward the first semiconductor layer 11. The laser beam is transmissive to the substrate 10 and has a wavelength that serves as an absorption region for the first semiconductor layer 11.

  When the laser light reaches the interface between the substrate 10 and the first semiconductor layer 11, the first semiconductor layer 11 near the interface absorbs the energy of the laser light and decomposes. For example, when the first semiconductor layer 11 is GaN, it decomposes into Ga and nitrogen gas. By this decomposition reaction, a minute gap is formed between the substrate 10 and the first semiconductor layer 11, and the substrate 10 and the first semiconductor layer 11 are separated.

  Laser light irradiation is performed over the entire wafer in multiple times for each set region, and the substrate 10 is removed. By removing the substrate 10 from the first main surface 15a, the light extraction efficiency can be improved.

  The surface from which the substrate 10 has been removed is cleaned and further roughened by frosting. The light extraction efficiency can be improved by roughening the first main surface 15a.

  Thereafter, as shown in FIG. 10A, a lens 27 is formed on the first main surface 15a, and further, as shown in FIG. 10B, a phosphor layer 28 is formed on the lens 27. For example, the phosphor layer 28 is formed by applying a liquid transparent resin in which phosphor particles are dispersed by spin coating and then thermally curing.

  Thereafter, the back surface of the resin layer 25 is ground. Further, the insulating film 26 formed on the lower surfaces of the p-side metal pillar 23 and the n-side metal pillar 24 is removed. As a result, the lower surfaces of the p-side metal pillar 23 and the n-side metal pillar 24 are exposed as shown in FIG.

  Thereafter, the wafer is diced at the position of the separation groove 14 (FIGS. 2A and 2B) to be separated into a plurality of semiconductor light emitting devices (FIGS. 12A and 12B). At the time of dicing, the substrate 10 has already been removed. Further, the semiconductor layer 15 does not exist in the separation groove 14, and if resin is embedded as the insulating layer 18, dicing can be easily performed and productivity can be improved. Furthermore, damage to the semiconductor layer 15 during dicing can be avoided. In addition, after singulation, a structure in which the end (side surface) of the semiconductor layer 15 is covered with a resin and protected is obtained.

  The separated semiconductor light emitting device may have a single chip structure including one semiconductor layer 15 or a multichip structure including a plurality of semiconductor layers 15.

  Here, FIG. 26 shows a mounting failure of the structure of the comparative example in which the side surface of the p-side metal pillar 23 and the side surface of the n-side metal pillar 24 are directly covered with the resin layer 25. FIG. 26 shows a state in which a part of the resin layer 25 is peeled off during dicing, and the side surface of the p-side metal pillar 23 is exposed, for example.

  In this state, when the solder 50 is melted by reflow at the time of mounting, the solder 50 is wetted and scoops up on the exposed side surface of the pillar, and the device tilts so that one pillar (in this case, the n-side metal pillar 24) side is lifted. Tombstone defects may occur. The raised n-side metal pillar 24 is not bonded to the pad 82b.

  The p-side metal pillar 23 and the n-side metal pillar 24 are preferably copper in consideration of heat dissipation, cost, a stable process by a plating method, and the like. However, solder is very excellent in wettability with respect to copper, and a tombstone defect is likely to occur.

  Even if the mounting can be performed normally, the pillar side surface, which is a conductive surface, is exposed, so that an electrical failure such as a short circuit due to dust tends to occur.

  In this embodiment, the side surface of the p-side metal pillar 23 and the side surface of the n-side metal pillar 24 are covered with the insulating film 26. Therefore, even if the resin layer 25 is chipped or peeled off during dicing, the side surface of the p-side metal pillar 23 and the side surface of the n-side metal pillar 24 are not exposed. The insulating film 26 is an inorganic film having a poor wettability with respect to solder than the metal (for example, copper) constituting the p-side metal pillar 23 and the n-side metal pillar 24. For this reason, even if the insulating film 26 is exposed when the solder 50 is reflowed, it is possible to suppress the solder 50 from being wetted by the insulating film 26 on the side surface of the pillar. As a result, it is possible to avoid a bonding failure, a short circuit due to dust, and the like.

  If an inorganic film such as a silicon oxide film or silicon nitride is formed as the insulating film 26 by, for example, a CVD method or a PVD method, the side surfaces of the p-side metal pillars 23 and the side surfaces of the n-side metal pillars 24 are surely secured by a stable process. It can be coated continuously.

  The separation groove 14 which is a dicing region is an ineffective region where no device is formed, and the width should be as small as possible. Moreover, in order to improve the heat dissipation of the semiconductor light emitting device, the p-side metal pillar 23 and the n-side metal pillar 24 should have a large cross-sectional area (plane size). When the separation groove 14 is made smaller and the cross-sectional areas of the p-side metal pillar 23 and the n-side metal pillar 24 are made larger, the resin layer 25 covering the side surfaces of the p-side metal pillar 23 and the n-side metal pillar 24 on the dicing region side is covered. The thickness is reduced, and the pillar side surface is easily exposed due to chipping or peeling during dicing.

  However, in this embodiment, even if the resin layer 25 is chipped or peeled off, the insulating film 26 is exposed, and mounting defects and short-circuit defects can be avoided. Therefore, it is not necessary to increase the coating thickness of the resin layer 25 on the side surface of the p-side metal pillar 23 and the side surface of the n-side metal pillar 24 more than necessary. As a result, the width of the dicing area can be reduced, and the number of chips that can be taken from the wafer increases. Furthermore, since the cross-sectional area of the pillar and the solder joined thereto can be increased, heat dissipation can be improved.

  The above-described processes before dicing are performed all at once in the wafer state, so there is no need to perform wiring and packaging for each individual device, and the production cost can be greatly reduced. It becomes possible. That is, wiring and packaging have already been completed in the state of being separated. In addition, it is easy to reduce the size of each device so that the planar size of each device is close to the planar size of the bare chip (semiconductor layer 15). In addition, it becomes possible to inspect at the wafer level. For this reason, productivity can be improved and as a result, price reduction becomes easy.

(Second Embodiment)
FIG. 13A is a schematic cross-sectional view of the semiconductor light emitting device according to the second embodiment, and FIG. 13B is a bottom view thereof.

  In the present embodiment, the insulating film 31 is formed on the side surface of the p-side metal pillar 23 and the side surface of the n-side metal pillar 24. The p-side metal pillar 23 and the n-side metal pillar 24 are made of, for example, copper or mainly contain copper. The insulating film 31 is a cuprous oxide film obtained by blackening copper. This insulating film 31 is less wettable with respect to solder than copper. Further, as shown in FIG. 13B, the insulating film 31 continuously covers the periphery of each side surface of the p-side metal pillar 23 and the n-side metal pillar 24. The periphery of the insulating film 31, the p-side wiring layer 21 and the n-side wiring layer 22 are covered with a resin layer 25.

  The cuprous oxide film has excellent adhesion to the resin, and chipping or peeling of the resin layer 25 can hardly occur during dicing. Even if the resin layer 25 is chipped or peeled, the side surface of the p-side metal pillar 23 and the side surface of the n-side metal pillar 24 are not exposed. Since the insulating film 31 has poor wettability with respect to solder than the metal (for example, copper) constituting the p-side metal pillar 23 and the n-side metal pillar 24, the insulating film 31 is exposed even when the solder is reflowed. , It is possible to suppress the solder from getting wet to the insulating film 31 on the side surface of the pillar. As a result, it is possible to avoid poor bonding due to the tombstone phenomenon. In addition, since the insulating film is used, a short circuit due to dust can be avoided.

  The semiconductor light emitting device according to the present embodiment proceeds in the same manner as in the first embodiment described above until the step of FIG.

  7B, that is, the exposed portion of the seed metal 19 is wet-etched, and the p-side wiring layer 21 and the n-side wiring layer 22 are electrically connected via the seed metal 19. After dividing, the following steps are performed.

  For example, the wafer is immersed in a mixed solution of sodium chlorite and sodium hydroxide, and the exposed surfaces of the p-side metal pillar 23 and the n-side metal pillar 24 are blackened. As a result, as shown in FIG. 14A, a cuprous oxide insulating film, which is a copper blackening film, is formed on the side surface and the lower surface of the p-side metal pillar 23 and the side surface and the lower surface of the n-side metal pillar 24. 31 is formed.

  Next, as shown in FIG. 14B, a resin layer 25 is laminated on the insulating layer 18, and thereafter, each process proceeds in the same manner as in the first embodiment.

  As shown in FIGS. 13A and 13B, the back surface of the resin layer 25 is ground and the insulating film 31 formed on the lower surfaces of the p-side metal pillar 23 and the n-side metal pillar 24 is removed. The lower surfaces of the p-side metal pillar 23 and the n-side metal pillar 24 are exposed.

(Third embodiment)
FIG. 15A is a schematic cross-sectional view of a semiconductor light emitting device according to the third embodiment, and FIG. 15B is a bottom view thereof.

  In the present embodiment, the metal film 32 is formed on the side surface of the p-side metal pillar 23 and the side surface of the n-side metal pillar 24. The metal film 32 is made of a metal different from the p-side metal pillar 23 and the n-side metal pillar 24. The metal film 32 is, for example, a laminated film of a titanium (Ti) film and a nickel (Ni) film. A titanium film is formed on the interface side of the p-side wiring layer 21, the n-side wiring layer 22, and the resin layer 45, and a nickel film is formed on the titanium film. Titanium and nickel are both less wettable to solder than copper.

  The metal film 32 is not limited to a laminated film of a titanium film and a nickel film, and may be only one of a titanium film and a nickel film. Or you may use the other metal film whose wettability with respect to a solder is worse than the copper which comprises the p side metal pillar 23 and the n side metal pillar 24. FIG.

  As shown in FIG. 15B, the metal film 32 continuously covers the periphery of each side surface of the p-side metal pillar 23 and the n-side metal pillar 24. The periphery of the metal film 32, the p-side wiring layer 21 and the n-side wiring layer 22 are covered with a resin layer 45. As will be described later, the resin layer 45 is formed by leaving the resist used when the p-side metal pillar 23 and the n-side metal pillar 24 are plated.

  Also in this embodiment, even if the resin layer 45 is chipped or peeled off, the side surface of the p-side metal pillar 23 and the side surface of the n-side metal pillar 24 are not exposed because they are covered with the metal film 32. Since the metal film 32 has poorer wettability with respect to solder than the metal (for example, copper) constituting the p-side metal pillar 23 and the n-side metal pillar 24, even if the metal film 32 is exposed during solder reflow. , It is possible to suppress the solder from getting wet to the metal film 32 on the side surface of the pillar. As a result, it is possible to avoid poor bonding due to the tombstone phenomenon.

  The semiconductor light emitting device according to this embodiment proceeds in the same manner as in the first embodiment described above until the removal of the resist 41 used for plating the p-side wiring layer 21 and the n-side wiring layer 22 (FIG. 16A). It is done.

  Thereafter, as shown in FIG. 16B, the exposed portion of the seed metal 19 is wet-etched using the p-side wiring layer 21 and the n-side wiring layer 22 as a mask. As a result, the electrical connection between the p-side wiring layer 21 and the n-side wiring layer 22 through the seed metal 19 is broken.

  Thereafter, as shown in FIG. 17A and FIG. 17B which is a bottom view thereof, the resin layer 45 which also serves as a plating resist is formed on the insulating layer 18, the p-side wiring layer 21 and the n-side wiring layer 22. After forming the cover, the openings 45a and 45b are selectively formed. The opening 45 a reaches the p-side wiring layer 21, and the opening 45 b reaches the n-side wiring layer 22.

  The resin layer 45 is cured and remains after plating. Therefore, a material that can withstand reliability is used as the reinforcing resin for the p-side metal pillar 23 and the n-side metal pillar 24.

  Next, as shown in FIG. 18A, a metal film 32 is formed on the surface of the resin layer 45, the side surfaces in the openings 45a and 45b, and the surfaces of the p-side wiring layer 21 and the n-side wiring layer 22. Then, electrolytic plating is performed using the metal film 32 as a seed metal.

  As a result, as shown in FIG. 18B, the p-side metal pillar 23 is formed in the opening 45a, and the n-side metal pillar 24 is formed in the opening 45b. The p-side metal pillar 23 and the n-side metal pillar 24 are made of a copper material that is simultaneously formed by a plating method. The p-side metal pillar 23 is connected to the p-side wiring layer 21 via the metal film 32, and the n-side metal pillar 24 is connected to the n-side wiring 22 layer via the metal film 32. Further, the side surface of the p-side metal pillar 23 and the side surface of the n-side metal pillar 24 are each covered with a metal film 32.

  Thereafter, the substrate 10 is removed, the lens 27 and the phosphor layer 28 are formed on the first main surface 15a, and then the p-side metal pillar 23 and the n-side metal pillar 24 protruding from the openings 45a and 45b are ground. To do. Further, the metal film 32 on the surface of the resin layer 45 is removed. As a result, the electrical connection between the p-side metal pillar 23 and the n-side metal pillar 24 through the metal film 32 is cut off as shown in FIG. 19A and the bottom view of FIG. 19B. The

(Fourth embodiment)
FIG. 20A is a schematic cross-sectional view of the semiconductor light emitting device according to the fourth embodiment, and FIG. 20B is a bottom view thereof.

  In the present embodiment, irregularities are formed on the side surface of the p-side metal pillar 23 and the side surface of the n-side metal pillar 24. For example, unevenness is repeated like a folding screen in a direction surrounding the side surfaces of the p-side metal pillar 23 and the n-side metal pillar 24.

  The side surface of the p-side metal pillar 23 and the side surface of the n-side metal pillar 24 are covered with a resin layer 25. Since unevenness is formed on the side surface of the p-side metal pillar 23 and the side surface of the n-side metal pillar 24, the adhesion between the side surface and the resin layer 25 can be increased. As a result, the resin layer 25 can be hardly chipped or peeled off during dicing, and the side surface of the p-side metal pillar 23 and the side surface of the n-side metal pillar 24 can be suppressed from being exposed.

  The semiconductor light emitting device according to the present embodiment proceeds in the same manner as in the first embodiment described above until the step of FIG.

  Then, a resist 42 that covers the p-side wiring layer 21 and the n-side wiring layer 22 is formed on the surface of the insulating layer 18 opposite to the semiconductor layer 15. Thereafter, a plurality of openings 42a and 42b are selectively formed in the resist 42, as shown in FIG. The opening 42 a reaches the p-side wiring layer 21, and the opening 42 b reaches the n-side wiring layer 22. Irregularities are formed on the side surfaces in the openings 42a and 42b.

  The openings 42a and 42b are formed by a lithography method using a mask (not shown). By forming irregularities in the pattern corresponding to the openings 42a and 42b in the mask, irregularities are also formed in the openings 42a and 42b formed in the resist 42.

  By performing electroplating in this state, as shown in FIG. 22A and the bottom view thereof, FIG. 22B, the p-side metal pillar 23 is formed in the opening 42a, and the n-side metal pillar is formed in the opening 42b. 24 is formed. Since the unevenness is formed on the side surfaces in the openings 42 a and 42 b, the unevenness is also formed on the side surface of the p-side metal pillar 23 and the side surface of the n-side metal pillar 24.

  Thereafter, the resist 42 is removed with, for example, a chemical solution (FIG. 23A). Thereafter, the exposed portion of the seed metal 19 is wet-etched using the p-side metal pillar 23 and the n-side metal pillar 24 as a mask (FIG. 23B). As a result, the electrical connection between the p-side wiring layer 21 and the n-side wiring layer 22 through the seed metal 19 is broken.

  Thereafter, as in the first embodiment, the resin layer 25 is filled between the p-side metal pillar 23 and the n-side metal pillar 24. Further, after that, the substrate 10 is removed, the lens 27 and the phosphor layer 28 are formed on the first main surface 15a, and then the back surface of the resin layer 25 is ground. As a result, the lower surfaces of the p-side metal pillar 23 and the n-side metal pillar 24 are exposed as shown in FIG. 24A and FIG.

  In the present embodiment, the number of steps can be reduced as compared with a mode in which the side surface of the p-side metal pillar 23 and the side surface of the n-side metal pillar 24 are covered with a film.

  In each of the embodiments described above, the entire substrate 10 may be removed and left on the first major surface 15a after being thinly ground. By leaving the substrate 10 in a thin layer, the mechanical strength can be increased as compared with a structure in which the entire substrate 10 is removed, and a highly reliable structure can be obtained. Moreover, since the board | substrate 10 remains, the curvature after dividing into pieces can be suppressed and mounting to a circuit board etc. becomes easy.

  Further, as shown in FIG. 25A, after forming the phosphor layer 28 on the first main surface 15a, the lens 51 may be provided on the phosphor layer 28. In the embodiment described above, the concave lens 27 is exemplified, but a convex lens 51 may be used as shown in FIG.

  Or after forming the lens 51 on the 1st main surface 15a as shown in FIG.25 (b), you may form the fluorescent substance layer 28 so that the lens 51 may be covered.

  Although the embodiments have been described above, the present invention is not limited thereto, and various modifications, substitutions, and omissions are possible based on the technical idea of the present invention.

The red phosphor layer can contain, for example, a nitride phosphor CaAlSiN ₃ : Eu or a sialon phosphor.
When using sialon phosphors,
(M _1-x , R _x ) _a1 AlSi _b1 O _c1 N _d1 ... Formula (1)
(M is at least one metal element excluding Si and Al, and is preferably at least one of Ca or Sr. R is a luminescent center element, and particularly Eu, x, a1, b1, c1, d1 satisfies the following relationship: 0 <x ≦ 1, 0.6 <a1 <0.95, 2 <b1 <3.9, 0.25 <c1 <0.45, 4 <d1 <5.7. ) Is preferably used.
By using the sialon-based phosphor represented by the composition formula (1), the temperature characteristics of the wavelength conversion efficiency can be improved, and the efficiency in the large current density region can be further improved.

The yellow phosphor layer can contain, for example, a silicate phosphor (Sr, Ca, Ba) ₂ SiO ₄ : Eu.

The green phosphor layer can contain, for example, a halophosphate phosphor (Ba, Ca, Mg) ₁₀ (PO ₄ ) ₆ .Cl ₂ : Eu or a sialon phosphor.
When using sialon phosphors,
(M _1-x , R _x ) _a2 AlSi _b2 O _c2 N _d2 ... Formula (2)
(M is at least one metal element excluding Si and Al, and at least one of Ca and Sr is particularly desirable. R is an emission center element, and particularly Eu is preferred. X, a2, b2, c2, d2 satisfies the following relationship: 0 <x ≦ 1, 0.93 <a2 <1.3, 4.0 <b2 <5.8, 0.6 <c2 <1, 6 <d2 <11) It is preferable to use it.
By using the sialon-based phosphor represented by the composition formula (2), the temperature characteristics of the wavelength conversion efficiency can be improved, and the efficiency in the large current density region can be further improved.

The blue phosphor layer can contain, for example, an oxide phosphor BaMgAl ₁₀ O ₁₇ : Eu.

  DESCRIPTION OF SYMBOLS 10 ... Board | substrate, 11 ... 1st semiconductor layer, 12 ... Light emitting layer, 13 ... 2nd semiconductor layer, 15 ... Semiconductor layer, 15a ... 1st main surface, 16 ... p side electrode, 17 ... n side electrode, DESCRIPTION OF SYMBOLS 18 ... Insulating layer, 19 ... Seed metal, 21 ... P side wiring layer, 22 ... N side wiring layer, 23 ... P side metal pillar, 24 ... N side metal pillar, 25, 45 ... Resin layer, 26, 31 ... Insulation Membrane, 28 ... phosphor layer, 32 ... metal film, 41, 42 ... resist, 50 ... solder, 81 ... mounting substrate

Claims (9)

A semiconductor layer including a first main surface, a second main surface formed on the opposite side, and a light emitting layer;
A first electrode provided in a region having the light emitting layer on the second main surface;
A second electrode provided in a region not having the light emitting layer on the second main surface;
A first wiring layer provided on the second main surface side and connected to the first electrode;
A second wiring layer provided on the second main surface side and connected to the second electrode;
A first metal pillar provided on a surface opposite to the first electrode in the first wiring layer and having a side surface on which irregularities are formed;
A second metal pillar provided on an opposite surface of the second wiring layer with respect to the second electrode and having a side surface on which irregularities are formed;
A resin layer covering a side surface of the first metal pillar and a side surface of the second metal pillar;
A semiconductor light emitting device comprising:   Each thickness of the first metal pillar and the second metal pillar includes the semiconductor layer, the first electrode, the second electrode, the first wiring layer, and the second wiring layer. The semiconductor light emitting device according to claim 1, wherein the semiconductor light emitting device is thicker than a thickness of the stacked body.   The semiconductor light emitting device according to claim 1, wherein an area of the first electrode is larger than an area of the second electrode.   The area where the second wiring layer and the second metal pillar are in contact with each other is larger than the area where the second wiring layer and the second electrode are in contact with each other. 4. The semiconductor light emitting device according to any one of 3 above.   5. The semiconductor light emitting device according to claim 1, wherein a part of the second wiring layer extends to a position overlapping the light emitting layer. An insulating layer provided on the second main surface side of the semiconductor layer;
The first wiring layer penetrates through the insulating layer to reach the first electrode, and the second wiring layer penetrates through the insulating layer to reach the second electrode. The semiconductor light emitting device according to any one of 1 to 5.   The area of the second wiring layer is larger on a surface opposite to the second electrode than a surface connected to the second electrode. The semiconductor light-emitting device described in 1. The semiconductor layer does not have a substrate on the first main surface side,
The semiconductor light-emitting device according to claim 1, further comprising a phosphor layer provided on the first main surface side without a substrate interposed therebetween.   The unevenness is formed continuously around the side surface of the first metal pillar and around the side surface of the second metal pillar. Semiconductor light emitting device.

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