JP2013165121A5

JP2013165121A5 -

Info

Publication number: JP2013165121A5
Application number: JP2012026423A
Authority: JP
Filing date: 2012-02-09
Publication date: 2015-03-19

Description

上記目的を達成するために、本発明の一側面としての描画装置は、荷電粒子線で基板に描画を行う描画装置であって、描画データを生成する生成部と、前記生成部で生成された描画データに基づいて前記荷電粒子線を生成する荷電粒子光学系と、を有し、前記生成部は、幅を有する目標パターンに対応する複数のピクセルを設定し、前記複数のピクセルのうち前記目標パターンの端部に対応するピクセルとそれ以外のピクセルとでは異なる予め設定された線量を前記複数のピクセルに与えた場合に前記基板上で得られる線量分布に基づいて、前記幅に対応した線量分布が前記基板上で得られるように前記予め設定された線量を調整することにより、前記描画データを生成する、ことを特徴とする。 In order to achieve the above object, a drawing apparatus according to one aspect of the present invention is a drawing apparatus that performs drawing on a substrate with a charged particle beam, the generation unit generating drawing data, and the generation unit A charged particle optical system that generates the charged particle beam based on drawing data, and the generation unit sets a plurality of pixels corresponding to a target pattern having a width, and the target among the plurality of pixels The dose distribution corresponding to the width based on the dose distribution obtained on the substrate when different preset doses are given to the plurality of pixels in the pixel corresponding to the edge of the pattern and the other pixels. The drawing data is generated by adjusting the preset dose so that can be obtained on the substrate.

Claims

A drawing apparatus for drawing on a substrate with a charged particle beam,
A generator for generating drawing data;
A charged particle optical system that generates the charged particle beam based on the drawing data generated by the generation unit, and
The generator is
Set multiple pixels corresponding to the target pattern with width,
Based on the dose distribution obtained on the substrate when different preset doses are given to the pixels corresponding to the end of the target pattern and the other pixels among the plurality of pixels. by dose distribution corresponding to the width adjusting the preset dose so as to obtain on said substrate, generates the drawing data,
A drawing apparatus characterized by that.

The drawing apparatus according to claim 1, wherein the dose distribution obtained on the substrate is obtained by convolving an intensity distribution of the charged particle beam with the dose set in advance in the plurality of pixels.

The said generation part adjusts the said preset dose so that the total value of the dose given to these pixels may become a preset value according to the said width | variety. Or the drawing apparatus of 2 .

The drawing apparatus according to claim 3 , wherein the generation unit adjusts the preset dose based on a ratio of the preset value to the total value.

Wherein the preset dose, drawing apparatus according to any one of claims 1 to 4, wherein said on the basis of the proportion of the target pattern is set, it in each of the plurality of pixels.

The drawing apparatus performs drawing on the substrate with a plurality of charged particle beams,
The said production | generation part produces | generates the said drawing data based on the dose distribution on the said board | substrate of each of these charged particle beams, The any one of Claim 1 thru | or 5 characterized by the above-mentioned. Drawing device.

A generation method for generating the drawing data used in a drawing apparatus for drawing on a substrate with a charged particle beam generated by a charged particle optical system based on the drawing data,
Setting a plurality of pixels corresponding to a target pattern having a width;
Based on the dose distribution obtained on the substrate when different preset doses are given to the pixels corresponding to the end of the target pattern and the other pixels among the plurality of pixels. by dose distribution corresponding to the width adjusting the preset dose so as to obtain on said substrate, and generating the drawing data,
A generation method characterized by comprising:

A program causing a computer to execute each step of the generation method according to claim 7 .

Drawing on a substrate using the drawing apparatus according to any one of claims 1 to 6 ;
Developing the substrate on which the drawing has been performed in the step;
A method for producing an article comprising: