JP2013161580A - Electrode substrate checking method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electrode substrate checking method capable of precisely checking failures such as a flash on a slit face of an electrode substrate.SOLUTION: First radiation light β1 horizontally radiated to a slit face 10a is radiated to a first coating layer 12 (cross section 12a) on the slit face 10a from the first coating layer 12 side (upper side) of an electrode substrate 10, and second radiation light γ1 horizontally radiated to the slit face 10a is radiated to a second coating layer 13 (cross section 13a) on the slit face 10a from the second coating layer 13 side (lower side) of the electrode substrate 10. Furthermore, while third radiation light α1 vertically radiated to the slit face 10a is radiated to a core material 11 (cross section 11a) on the slit face 10a from a position not interfering with the first radiation light β1 and the second radiation light γ1, an image of the slit face 10a is taken by a camera 2 from a direction vertical to the slit face 10a.

Description

  The present invention relates to a technique for inspecting an electrode substrate, and more particularly to a technique for detecting the presence or absence of defects such as burrs in a slit section of an electrode substrate.

If the electrode base material used for secondary batteries, etc. has defects such as burrs, it will cause problems such as internal short circuit after being incorporated into the secondary battery. It is indispensable to confirm.
As a technique related to the appearance inspection of the electrode base material, for example, the technique disclosed in Patent Document 1 shown below is known and is publicly known.

  In the prior art disclosed in Patent Document 1, the surface of the electrode substrate is irradiated with inspection light, the transmitted light, regular reflected light, and scattered light are imaged, and the captured image data is analyzed by image processing. In addition, the type of defect, the position of existence, and the like are continuously recorded.

JP 2010-272250 A

The electrode base material is generally used by being slit (cut) to a predetermined width, but defects such as burrs may also occur on the slit surface.
And the burr | flash which arises in such a slit surface can also cause malfunctions, such as an internal short circuit.

However, the conventional technique disclosed in Patent Document 1 targets the surface of the electrode base material, and it has been difficult to detect defects on the slit surface using such a conventional technique.
In addition, on the slit surface of the electrode base material, there is a problem that it is difficult to see the boundary between the core material made of metal foil and the active material (hereinafter referred to as the coating portion) coated on the front and back of the core material. For this reason, it has been difficult to detect defects such as burrs on the slit surface.

  The present invention has been made in view of such current problems, and an object of the present invention is to provide an electrode substrate inspection method capable of accurately detecting defects such as burrs on the slit surface of the electrode substrate. Yes.

  The problem to be solved by the present invention is as described above. Next, means for solving the problem will be described.

  That is, in claim 1, a core material as a metal foil member, a first coating layer formed by applying an active material to one surface of the core material, and the core material An electrode substrate comprising: a second coating layer formed by coating an active material on the side surface; and an electrode substrate inspection method for detecting defects in a slit surface, wherein the slit With respect to the first coating layer on the surface, the first illumination light irradiated horizontally to the slit surface is irradiated from the first coating layer side of the electrode substrate, and the slit For the second coating layer on the surface, irradiate the second illumination light that irradiates horizontally with respect to the slit surface from the second coating layer side of the electrode substrate, and Third illumination light that irradiates perpendicularly to the slit surface with respect to the core material on the slit surface While irradiated from a position not interfering with the first illumination light and the second illumination light, the slit plane is for imaging from a direction perpendicular to said slit plane.

  In the present invention, the third illumination light has a wavelength distribution different from that of the first illumination light and the second illumination light.

  According to a third aspect of the present invention, the first illumination light is red light, the second illumination light is blue light, and the third illumination light is white light.

  According to a fourth aspect of the present invention, the first illumination light is red light, the second illumination light is red light, and the third illumination light is blue light.

  According to a fifth aspect of the present invention, the first illumination light is blue light, the second illumination light is blue light, and the third illumination light is red light.

  In the present invention, the first illumination light is green light, the second illumination light is blue light, and the third illumination light is red light.

  As effects of the present invention, the following effects can be obtained.

In claim 1, the boundary between the core material and the coating layer and the boundary between the coating layer and the background can be clearly recognized.
As a result, defects such as burrs and chips generated from the core material can be detected easily and reliably.

  In claim 2, the boundary between the core material and the coating layer and the boundary between the coating layer and the background can be clearly recognized.

  In claim 3, even when an inclined portion is formed in the upper coating layer or when the core material is close to the lower side, the boundary between the core material and the coating layer and the coating layer The boundary with the background can be clearly recognized.

  In claim 4, even when the thickness of the core material is small, the boundary between the core material and the coating layer and the boundary between the coating layer and the background can be clearly recognized.

  In claim 5, even when the thickness of the core material made of copper or gold is small, the boundary between the core material and the coating layer and the boundary between the coating layer and the background can be clearly recognized. it can.

  In claim 6, even when the core is close to the lower side, the boundary between the core and the coating layer and the boundary between the coating and the background can be clearly recognized.

The schematic diagram which shows the whole structure of the test | inspection apparatus used for the test | inspection method of the electrode base material which concerns on one Embodiment of this invention. The perspective schematic diagram which shows the imaging condition of the slit surface by the test | inspection apparatus used for the test | inspection method of the electrode base material which concerns on one Embodiment of this invention. The schematic diagram which shows the irradiation condition of the illumination light by the test | inspection apparatus used for the test | inspection method of the electrode base material which concerns on one Embodiment of this invention. The schematic diagram which shows the light source irradiated to the direction coaxial with the camera with which the inspection apparatus used for the inspection method of the electrode base material which concerns on one Embodiment of this invention is equipped, (a) The schematic diagram which shows 1st embodiment, (b) ) A schematic diagram showing a second embodiment. Schematic diagram showing each aspect of the slit surface of the electrode substrate, (a) Schematic diagram showing a case where an inclined surface is generated in the coating layer, (b) Schematic diagram showing a case where the thickness of the core material is small, (c) Core The schematic diagram which shows the case where a shift | offset | difference arises in a material. The schematic diagram which shows the combination condition of the illumination color corresponding to an application pattern.

Next, embodiments of the invention will be described.
First, an overall configuration of an inspection apparatus used in an electrode substrate inspection method according to an embodiment of the present invention will be described with reference to FIGS. 1 to 4.
In this embodiment, an XYZ coordinate system as shown in FIGS. 1 to 3 is defined, and the length direction of the electrode base material to be inspected is the X-axis direction, the width direction is the Y-axis direction, and the thickness direction is the thickness direction. It is defined as the Z-axis direction.
Moreover, in this embodiment, although the case where it test | inspects in the state which has arrange | positioned the electrode base material with the length direction turned horizontally and the thickness direction turned to the vertical direction is illustrated, the electrode according to the present invention The substrate inspection method is not limited to the case where the posture of the electrode substrate is such an embodiment.

First, the electrode base material to be inspected will be described.
As shown in FIG. 1, an electrode base material 10 to be inspected in an electrode base material inspection method according to an embodiment of the present invention has a first coating layer 12 formed on the surface of a core material 11, and the core material. 11 is configured such that the second coating layer 13 is formed on the back surface of the substrate 11.
The core material 11 is a foil-like member made of a metal such as copper, aluminum, or gold, and each of the first and second coating layers 12 and 13 is an active material with respect to the core material 11. It is formed by coating.

The electrode base material 10 is used by slitting (cutting) into a predetermined width by equipment such as a slitter (not shown), and a slit surface 10a having a cut surface is formed.
In this embodiment, when slitting the electrode substrate 10 with a slitter, the surface on the side where the blade of the slitter hits is defined as the upper surface of the electrode substrate 10, and the opposite surface is the lower side. It is prescribed as a surface. In the electrode base material 10, the surface of the first coating layer 12 is assumed to be the upper surface, and the surface of the second coating layer 13 is assumed to be the lower surface.
Moreover, below, the site | part corresponding to each layer 11,12,13 which appears on the slit surface 10a is displayed as the cross section 11a * 12a * 13a.

And the test | inspection method which concerns on one Embodiment of this invention aims at test | inspecting the presence or absence of defects, such as a burr | flash and a chip, which appear on the slit surface 10a.
The burr is a defect that appears in the cross section 11a of the core material 11 and is recognized as a portion protruding in a needle shape from the core material 11 toward the coating layers 12 and 13, and the chips are the core material 11. This is a defect caused by burrs that are torn off, chips or the like at the time of slitting adhere to the slit surface 10a.

Next, an inspection apparatus used for inspecting the electrode substrate 10 will be described.
As shown in FIG. 1, an inspection apparatus 1 used for an electrode substrate inspection method according to an embodiment of the present invention is an apparatus that can image a slit surface 10 a of an electrode substrate 10, The first, second, and third light sources 3, 4, and 5 are provided.

The camera 2 is an apparatus for imaging the slit surface 10a. In this embodiment, an apparatus for imaging a minute part called a microscope is employed.
And in this embodiment, as shown in FIGS. 1-3, the visual field S of the camera 2 exceeds the thickness of the electrode base material 10 in the slit surface 10a (namely, each cross section 11a * 11a * 12a can be visually recognized). The distance between the slit surface 10a and the lens 2a is set so as to be in the range.

The lens 2a is arranged at a position facing the cross section 11a of the core member 11 on the slit surface 10a while the optical axis of the lens 2a included in the camera 2 is directed in the horizontal direction (parallel to the Y axis).
Thereby, it is set as the structure which can image each cross section 11a * 12a * 13a from the direction perpendicular | vertical with respect to the slit surface 10a with the camera 2. FIG.

The camera 2 is supported by a displacement device (not shown) and is configured to be displaceable in the X-axis direction.
In addition, a monitor, an image processing device, and the like (not shown) are connected to the camera 2, and image data captured by the camera 2 is confirmed on the monitor, or taken into the image processing device and image processing is performed. It has a configuration that can.

As shown in FIGS. 1 to 3, the first light source 3 is arranged on the side of the lens 2 a so that the irradiation direction is parallel to the optical axis of the lens 2 a of the camera 2.
With such a configuration, as shown in FIG. 1, the illumination light α1 emitted from the first light source 3 is directly reflected on the cross section 11a of the core material 11, and the directly reflected light α2 can be received by the lens 2a. It is said.
That is, the first light source 3 is configured as coaxial incident illumination with respect to the camera 2.

As the 1st light source 3, as shown to Fig.4 (a), it can be set as the structure which arrange | positions each two independent light sources 3 * 3 to the side part of the lens 2a, for example.
In the inspection apparatus 1, the illumination light from the light sources 3 and 3 is concentrated only on the cross-section 11 a by selecting the light source 3 corresponding to the thickness of the cross-section 11 a of the core material 11 (that is, the extent of the illumination light) (that is, The illumination light from the light source 3 is not applied to the cross sections 12a and 13a as much as possible.

Further, as shown in FIG. 4B, the first light source 3 includes a substantially ring-shaped light source 3 around the lens 2a, and the light source 3 is partially blocked by the shielding plates 8 and 8. It can also be set as the structure which forms the two irradiation parts 3a * 3a.
With such a configuration, the arrangement of the shielding plates 8 and 8 can be changed in accordance with the thickness of the cross section 11a of the core material 11 that is the irradiation target of the light source 3, and thereby, from each of the irradiation units 3a and 3a of the light source 3 While adjusting the spreading | diffusion degree of the illumination light to irradiate, it is set as the structure which concentrates the illumination light from irradiation part 3a * 3a only on the cross section 11a.

As shown in FIGS. 1 to 3, the second light source 4 is positioned above the electrode substrate 10 (that is, the first coating) so that the irradiation direction is orthogonal to the optical axis of the lens 2 a of the camera 2. (On the layer 12 side).
With such a configuration, the illumination light β1 emitted from the second light source 4 can be applied to the cross section 12a of the first coating layer 12 as diffuse reflection light, and the diffuse reflection light β2 is received by the lens 2a. It is configured as possible.

The third light source 5 is arranged below the electrode substrate 10 (that is, on the second coating layer 13 side) so that the irradiation direction is orthogonal to the optical axis of the lens 2a of the camera 2. .
With such a configuration, the illumination light γ1 emitted from the third light source 5 can be applied to the cross section 13a of the second coating layer 13 as diffuse reflection light, and the diffuse reflection light γ2 is received by the lens 2a. It is configured as possible.

The second light source 4 and the third light source 5 are fixed to the camera 2 by stays 6 and 7, respectively.
With such a configuration, in the inspection apparatus 1, even when the camera 2 is displaced in the X-axis direction, the irradiation state of the illumination light from the light sources 3, 4, and 5 on the electrode substrate 10 is kept constant. I have to.

Next, the light sources 3, 4, 5 used in the inspection method according to the embodiment of the present invention will be described.
In the inspection method according to an embodiment of the present invention, “white LED”, “red LED”, “blue LED”, and “green LED” are employed as the light sources 3, 4, and 5 in the inspection apparatus 1. .

The “red LED” used in the present embodiment adopts a light emitting red light having a wavelength range of about 610 to 750 nm, and the “blue LED” used in the present embodiment has a wavelength range of about 435 to 480 nm. What emits blue light is adopted, and “green LED” used in the present embodiment adopts one emitting green light having a wavelength range of around 560 nm.
Furthermore, the “white LED” used in the present embodiment employs a combination of a blue LED and a phosphor that emits white light, and the white light has a wavelength close to that of blue light, It has a wide wavelength range of about 480 to 600 nm.

  The white light emitted from the “white LED” has a wavelength distribution close to that of the blue light emitted from the “blue LED”, and is characterized by being easily distinguishable from the red light emitted from the “red LED”. .

Further, blue light emitted from the “blue LED” has a shorter wavelength and a higher scattering rate than red light and white light. For this reason, blue light has a feature that visibility is better than red light and white light, and detailed portions are easy to see.
Also, blue light has a feature that it can be easily distinguished from red light emitted from a “red LED”.

  Furthermore, the red light emitted from the “red LED” has a feature that it can be easily distinguished from white and blue light. When the irradiation target is copper or gold, the reflectance is high, and the copper or gold portion is It has the feature of being easy to distinguish. In addition, red light has a longer wavelength than blue light and white light, and thus has a straight traveling property and is suitable for observing a slope or the like.

  Furthermore, since the green light emitted from the “green LED” has a wavelength different from that of the red light, it is easily distinguished from the red light, and has a characteristic that it has an intermediate property between the blue light and the white light.

  In this embodiment, the case where four colors of white, red, blue, and green are adopted as the types of colors of illumination light emitted from the light source is illustrated. However, the electrode base material according to one embodiment of the present invention The illumination color of each of the light sources 3, 4, 5 employed in the inspection method is not limited to this, and a light source that emits illumination colors other than these four colors may be appropriately employed depending on the properties of the slit surface 10 a and the like. Is possible.

Here, the property of the slit surface 10a in the electrode substrate 10 to be inspected will be described with reference to FIG.
In the slit surface 10a formed when cutting with a slitter (not shown), an inclined portion 12b as shown in FIG. 5A may be formed depending on how the slitter blade hits. Such an inclined portion 12b is easily formed in the first coating layer 12 located on the upper side of the electrode substrate 10.
And the electrode base material 10 in which such an inclination part 12b is formed WHEREIN: Depending on how the illumination light hits, illumination light diffuses in the inclination part 12b, and the 1st coating layer 12 (namely, cross section 12a). ) And its background are difficult to confirm.
In the following description, the slit surface 10a in which the inclined portion 12b is formed in the cross section 12a is referred to as “pattern 1”.

Moreover, the specifications of the core material 11 used for the electrode substrate 10 are various, and as shown in FIG. 5B, when the thickness of the cross section 11a appearing on the slit surface 10a is small, the core material 11 (that is, , The boundary between the cross section 11a) and the coating layers 12 and 13 (that is, the cross sections 12a and 13a) may be difficult to confirm.
In the following description, the slit surface 10a in a state where the thickness of the core material 11 is reduced is referred to as “pattern 2”.
Further, among the slit surfaces 10a corresponding to “pattern 2”, the slit surface 10a in the case where the core material 11 is made of a material having a high reflectance with respect to red light such as copper or gold is referred to as “pattern 3”. And

  Furthermore, when the electrode base material 10 is pressed by a blade at the time of slitting, the deviation of the core material 11 may change (that is, shift from the center position in the thickness direction of the electrode base material 10). Such a shift often becomes a mode close to the lower side of the electrode substrate 10 (that is, the second coating layer 13 side).

When the core material 11 is deviated, it becomes difficult to identify the center position on the slit surface 10a, and the thickness of the cross section 13a becomes small. Therefore, it is difficult to confirm the boundaries of the cross sections 11a, 12a, and 13a. There is a problem of becoming.
In the following description, the slit surface 10a in a state where the core material 11 is close to the lower side (that is, the second coating layer 13 side) is referred to as “pattern 4”.
Further, among the slit surfaces 10a corresponding to “pattern 4”, the slit surface 10a in the case where the core material 11 is made of a material having a high reflectance with respect to red light such as copper or gold is referred to as “pattern 5”. And

  In the electrode substrate inspection method according to an embodiment of the present invention, each light source 3, 4, 5 is made to correspond to the properties of the slit surface 10 a (that is, the presence or absence of an inclined portion, the position of the core material, etc.). The illumination color is selected so that the cross sections 11a, 12a, and 13a on the slit surface 10a are clearly recognized and the boundaries of the cross sections 11a, 12a, and 13a are made to stand out.

Next, the combination state of illumination light in the electrode substrate inspection method according to an embodiment of the present invention will be described with reference to FIG.
First, the combination of illumination light when the slit surface 10a corresponds to “pattern 1” will be described.
As shown in FIG. 6, when the state of the slit surface 10 a corresponds to “pattern 1”, the illumination color of the light source 3 is “white”, the illumination color of the light source 4 is “red”, and the illumination color of the light source 5 is “ "Blue".
By adopting such a combination, the cross section 11a can be irradiated with white light, the cross section 12a can be irradiated with red light, and the cross section 13a can be irradiated with blue light.

In such an illumination light irradiation state, white / blue light has a wavelength range different from that of red light. Therefore, the boundary between the cross-section 11a of the core 11 that irradiates red light and the cross-sections 12a and 13a can be easily obtained. Can be distinguished.
Moreover, it becomes possible to prevent the cross-section 12a from becoming difficult to see by irradiating the cross-section 12a having the inclined portion 12b with red light having good straightness.
Thereby, in the slit surface 10a corresponding to "Pattern 1", the state and boundary of each cross section 11a, 12a, 13a can be clearly recognized, and defects such as burrs and chips can be easily recognized. become.

  As described above, in the method for inspecting an electrode substrate according to an embodiment of the present invention, in each of the cross sections 11a, 12a, and 13a on the slit surface 10a, the illumination light is arranged so that adjacent cross sections have a color combination that is easy to distinguish. Is irradiated.

That is, in the electrode substrate inspection method according to an embodiment of the present invention, the illumination light α1 as the third illumination light includes the illumination light β1 as the first illumination light and the illumination light γ1 as the second illumination light. It has a different wavelength distribution.
With such a configuration, the boundary between the core material 11 (that is, the cross section 11a) and the coating layers 12 and 13 (that is, the respective cross sections 12a and 13a) and the boundary between the coating layers 12 and 13 and the background are clearly defined. Can be recognized.

Next, the combination of illumination light when the slit surface 10a corresponds to “pattern 2” will be described.
When the state of the slit surface 10a corresponds to “pattern 2”, the illumination color of the light source 3 is “blue”, the illumination color of the light source 4 is “red”, and the illumination color of the light source 5 is “red”.
By adopting such a combination, the cross section 11a can be irradiated with blue light, and the cross section 12a and the cross section 13a can be irradiated with red light.

In such an illumination light irradiation state, the blue light has a wavelength distribution close to that of the white light and has a high diffusivity. Therefore, even the core material 11 having a small thickness can easily pick up the diffused light. Further, blue light and red light are easily distinguished from each other because their wavelengths are greatly different.
For this reason, even if it is the core material 11 with small thickness, the state of each cross section 11a * 12a * 13a can be visually recognized clearly.
Thereby, in the slit surface 10a corresponding to "Pattern 2", the state and boundary of each cross section 11a, 12a, 13a can be clearly recognized, and defects such as burrs and chips can be easily recognized. become.

That is, in the electrode substrate inspection method according to an embodiment of the present invention, when the slit surface 10a corresponds to “pattern 2”, the illumination light β1 as the first illumination light is set to red light, and the second The illumination light γ1 as illumination light is red light, and the illumination light α1 as third illumination light is blue light.
With such a configuration, even when the thickness of the core material 11 is small (that is, the case corresponding to “pattern 2”), the core material 11 (that is, the cross section 11a) and the coating layers 12 and 13 (that is, The boundary between each cross section 12a and 13a) and the boundary between each coating layer 12 and 13 and the background can be clearly recognized.

Next, the combination of illumination light when the slit surface 10a corresponds to “pattern 3” will be described.
When the state of the slit surface 10a corresponds to “pattern 3”, the illumination color of the light source 3 is “red”, the illumination color of the light source 4 is “blue”, and the illumination color of the light source 5 is “blue”.
By adopting such a combination, the cross section 11a can be irradiated with red light, and the cross section 12a and the cross section 13a can be irradiated with blue light.

In such an illumination light irradiation state, the red light has a high reflectance with respect to copper and gold, and thus even the core material 11 having a small thickness can easily pick up the reflected light. Further, blue light and red light are easily distinguished from each other because their wavelengths are greatly different.
For this reason, even if it is the core material 11 with small thickness, the state of each cross section 11a * 12a * 13a can be visually recognized clearly.
Thereby, in the slit surface 10a corresponding to "Pattern 3", the state and boundary of each cross section 11a, 12a, 13a can be clearly recognized, and defects such as burrs and chips can be easily recognized. become.

That is, in the electrode substrate inspection method according to an embodiment of the present invention, when the slit surface 10a corresponds to “pattern 3”, the illumination light β1 as the first illumination light is blue light, and the second The illumination light γ1 as illumination light is blue light, and the illumination light α1 as third illumination light is red light.
With such a configuration, even when the thickness of the core material 11 made of copper or gold is small (that is, the case corresponding to “Pattern 3”), the core material 11 (that is, the cross section 11a) and each coating material are applied. The boundary between the working layers 12 and 13 (that is, the cross sections 12a and 13a) and the boundary between the coating layers 12 and 13 and the background can be clearly recognized.

Next, the combination of illumination light when the slit surface 10a corresponds to “pattern 4” will be described.
When the state of the slit surface 10a corresponds to “pattern 4”, the illumination color of the light source 3 is “white”, the illumination color of the light source 4 is “red”, and the illumination color of the light source 5 is “blue”.
By adopting such a combination, the cross section 11a can be irradiated with white light, the cross section 12a can be irradiated with red light, and the cross section 13a can be irradiated with blue light.

  In “Pattern 4”, the thickness of the cross section 13a is reduced due to the shift, but by irradiating the cross section 13a with blue light suitable for visually recognizing a minute part, the cross section 11a of the core 11 is obtained. And the cross section 12a can be clearly distinguished.

Further, as described in “Pattern 1” in the cross section 12a, the upper cross section 12a is likely to have an inclined portion 12b (not shown here). It is preferable to irradiate light.
This makes it possible to clearly recognize the states and boundaries of the cross sections 11a, 12a, and 13a on the slit surface 10a corresponding to “Pattern 4”, and easily recognize defects such as burrs and chips. become.

That is, in the electrode substrate inspection method according to an embodiment of the present invention, when the slit surface 10a corresponds to “pattern 1” or “pattern 4”, the illumination light β1 as the first illumination light is red light. The illumination light γ1 as the second illumination light is blue light, and the illumination light α1 as the third illumination light is white light.
With such a configuration, when the inclined portion 12b is generated in the upper coating layer 12 (that is, when it corresponds to “pattern 1”), or when the core material 11 is close to the lower side (that is, “ Even in the case of “pattern 4”, the boundary between the core material 11 (that is, the cross section 11a) and the coating layers 12 and 13 (that is, the cross sections 12a and 13a) and the coating layers 12 and 13 And the background can be clearly recognized.

Next, the combination of illumination light when the slit surface 10a corresponds to “pattern 5” will be described.
When the state of the slit surface 10a corresponds to “pattern 5”, the illumination color of the light source 3 is “red”, the illumination color of the light source 4 is “green”, and the illumination color of the light source 5 is “blue”.
By adopting such a combination, the cross section 11a can be irradiated with red light, the cross section 12a can be irradiated with green light, and the cross section 13a can be irradiated with blue light.

And since red light has a high reflectance with respect to copper and gold | metal | money, even if it is a case where the core material 11 has shifted | deviated, it is easy to pick up reflected light.
Also, in “Pattern 5”, as in “Pattern 4”, the thickness of the cross section 13a is reduced due to the shift, but the cross section 13a is irradiated with blue light suitable for visually recognizing a minute part. Thus, the cross section 11a and the cross section 12a of the core material 11 can be clearly distinguished. Further, blue light and red light are easily distinguished from each other because their wavelengths are greatly different.

Further, as described in “Pattern 1”, the inclined portion 12b (not shown here) is likely to be generated in the cross section 12a. However, as in “Pattern 3,” blue light having a high diffusivity with respect to the cross section 12a. , It is difficult to visually recognize the cross section 12a. Therefore, it is preferable to irradiate green light having a wavelength longer than that of blue light and easily distinguishable from red light.
For this reason, even in the slit surface 10a of “pattern 5” where the deviation occurs, the states and boundaries of the cross sections 11a, 12a, and 13a can be clearly recognized.

That is, in the electrode substrate inspection method according to the embodiment of the present invention, when the slit surface 10a corresponds to the “pattern 5”, the illumination light β1 that is the first illumination light is green light, and the second The illumination light γ1 as illumination light is blue light, and the illumination light α1 as third illumination light is red light.
With such a configuration, even when the core material 11 is close to the lower side (that is, when it corresponds to the “pattern 5”), the core material 11 (that is, the cross section 11a) and each coating layer 12 · 13 (that is, each cross section 12a and 13a) and the boundary between each coating layer 12 and 13 and the background can be clearly recognized.

  As described above, the configuration in which the combination of the colors of the illumination light is selected in accordance with the properties of the slit surface 10a has the effect of improving the visibility when the inspector visually recognizes the slit surface 10a, and the captured image data In the case of performing image processing based on this, it is also effective to increase the recognition accuracy of burrs, chips and the like.

  That is, the electrode base material inspection method according to an embodiment of the present invention includes a core material 11 that is a metal foil member, and an active material is applied to one surface (upper side in the present embodiment) of the core material 11. A second coating layer 13 formed by coating an active material on the surface of the first coating layer 12 formed on the other side (lower side in the present embodiment) of the core material 11; The electrode base material 10 comprising: a method for detecting defects in the slit surface 10a, with respect to the slit surface 10a with respect to the first coating layer 12 (that is, the cross section 12a) in the slit surface 10a. The first illumination light β1 that is irradiated horizontally is irradiated from the first coating layer 12 side (that is, the upper side) of the electrode substrate 10 and the second coating layer 13 (that is, the cross section) of the slit surface 10a. 13a), the second illumination light γ1 irradiated horizontally to the slit surface 10a is Irradiation is performed from the second coating layer 13 side (that is, the lower side) of the electrode substrate 10, and further, perpendicular to the slit surface 10a with respect to the core material 11 (that is, the cross section 11a) of the slit surface 10a. The camera is viewed from the direction perpendicular to the slit surface 10a while irradiating the third illumination light α1 irradiating from the position that does not interfere with the first illumination light β1 and the second illumination light γ1. 2 is used for imaging.

With such a configuration, the boundary between the core material 11 and the coating layers 12 and 13 and the boundary between the coating layers 12 and 13 and the background can be clearly recognized.
Thereby, defects such as burrs and chips generated from the core material 11 can be detected easily and reliably.

DESCRIPTION OF SYMBOLS 1 Inspection apparatus 10 Electrode base material 10a Slit surface 11 Core material 11a Section 12 1st coating layer 12a Section 13 Second coating layer 13a Section

Claims (6)

A core material that is a metal foil member;
A first coating layer formed by coating an active material on one side of the core material;
A second coating layer formed by coating an active material on the other surface of the core;
An electrode substrate comprising:
An inspection method of an electrode base material for detecting a defect in a slit surface,
With respect to the first coating layer in the slit surface, the first illumination light that is irradiated horizontally to the slit surface is irradiated from the first coating layer side in the electrode substrate,
With respect to the second coating layer on the slit surface, the second illumination light that is irradiated horizontally to the slit surface is irradiated from the second coating layer side of the electrode substrate,
Further, the third illumination light that is irradiated perpendicularly to the slit surface is irradiated from a position that does not interfere with the first illumination light and the second illumination light onto the core material on the slit surface. While
Imaging the slit surface from a direction perpendicular to the slit surface;
A method for inspecting an electrode substrate. The third illumination light is
The first illumination light and the second illumination light have a different wavelength distribution,
The method for inspecting an electrode substrate according to claim 1. The first illumination light is red light,
The second illumination light is blue light,
The third illumination light is white light,
The method for inspecting an electrode substrate according to claim 2. The first illumination light is red light,
The second illumination light is red light,
The third illumination light is blue light,
The method for inspecting an electrode substrate according to claim 2. The first illumination light is blue light,
The second illumination light is blue light,
The third illumination light is red light,
The method for inspecting an electrode substrate according to claim 2. The first illumination light is green light,
The second illumination light is blue light,
The third illumination light is red light,
The method for inspecting an electrode substrate according to claim 2.

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