JP2013160892A - Oscillation mirror element, method of manufacturing oscillation mirror element, and electronic equipment having projector function - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an oscillation mirror element capable of increasing a swing angle of a mirror part while securing durability to oscillation.SOLUTION: A portable type projector 100 (electronic equipment having a projector function) includes: a mirror 10 capable of oscillating around at least an axial line 200; a first drive unit 20 that is connected to the mirror 10 and oscillates the mirror 10 by deformation thereof; and a first support part 30 that is connected to the first drive unit 20 and supports the first drive unit 20. Base materials of the mirror 10, the first drive unit 20, and the first support part 30 are constituted by a stainless substrate 11 made of metal and common thereamong; and a reinforce member 90 made of silicon is not attached on at least part of a portion of the stainless substrate 11 corresponding to the first drive unit 20; and the reinforce member 90 made of silicon is attached on a portion of the stainless substrate 11 corresponding to at least the first support part 30.

Description

  The present invention relates to a vibrating mirror element, a method of manufacturing a vibrating mirror element, and an electronic device having a projector function, and more particularly to a vibrating mirror element capable of swinging a mirror portion, a method of manufacturing the vibrating mirror element, and an electronic device having a projector function. .

  2. Description of the Related Art Conventionally, a vibrating mirror element in which a mirror portion can swing is known (for example, see Patent Documents 1 and 2).

  Patent Document 1 includes a mirror unit that can swing around the X axis (first axis) and a substrate (first drive unit) that is connected to the mirror unit and swings the mirror unit by being deformed. An optical scanning device (vibrating mirror element) is disclosed. Moreover, the mirror part and the board | substrate are comprised by the common base material which consists of metals, and the board | substrate is supported by the supporting member comprised with the base material different from a board | substrate. The support member is formed to have a thickness larger than that of the substrate, thereby ensuring sufficient rigidity to support the substrate.

  Further, in Patent Document 2, a mirror unit that can swing around an axis x1 (first axis), and a first actuator (first drive) that is connected to the mirror unit and swings the mirror unit by being deformed. An optical deflector (vibrating mirror element) including a unit) and a movable frame (first support part) connected to the first actuator and supporting the first actuator is disclosed. Further, the mirror unit, the first actuator, and the movable frame are made of a common SOI substrate (base material) made of SOI (Silicon on Insulator) configured by sequentially bonding single crystal silicon, silicon oxide, and single crystal silicon. It is configured. Further, in the optical deflector of Patent Document 2, the SOI substrate is etched so as to have a partially different thickness, so that the portion corresponding to the first actuator to be deformed has a smaller thickness than the movable frame. Is formed. Thereby, it is possible to easily deform the first actuator.

JP 2006-293116 A JP 2009-169290 A

  However, in the optical scanning device described in Patent Document 1, when a common base material made of metal is used for the support member as well as the mirror portion and the substrate, the support member resonates with the substrate and the mirror portion. Therefore, the vibration energy for deforming the substrate to swing the mirror portion is also consumed for the deformation of the support member, and accordingly, the amount of deformation of the substrate is reduced and the deflection angle of the mirror portion is reduced. On the other hand, when the thickness of the base material is increased to increase the rigidity of the support member, the rigidity of the substrate also increases and becomes difficult to deform, so the deflection angle of the mirror portion decreases. Therefore, in the optical scanning device described in Patent Document 1, it is difficult to increase the deflection angle of the mirror portion when a common base material made of metal is used for the support member as well as the mirror portion and the substrate. There is a problem. In addition, when using the base material which consists of metals, it is difficult to form in a partially different thickness by etching etc.

  Further, in the optical deflector described in Patent Document 2, since the SOI substrate including the Si layer is used as a common base material for the mirror unit, the first actuator, and the movable frame, the movable frame is obtained by etching the Si layer. While the thickness of the first actuator can be easily reduced as compared to Si, since Si is a brittle material, when Si is used as a base material, the durability against vibration is inferior compared to a metal material. There is a problem.

  The present invention has been made to solve the above-described problems, and one object of the present invention is to provide vibration that can increase the deflection angle of the mirror portion while ensuring durability against vibration. An object is to provide a mirror element, a method of manufacturing a vibrating mirror element, and an electronic apparatus having a projector function.

  A vibrating mirror element according to a first aspect of the present invention includes a mirror unit that can swing at least around a first axis, a first drive unit that is connected to the mirror unit and swings the mirror unit by being deformed, A first support unit that is connected to one drive unit and supports the first drive unit, and the base material of the mirror unit, the first drive unit, and the first support unit is configured by a common metal base material made of metal. A reinforcing member made of silicon is not bonded to at least a part of the part corresponding to the first drive unit of the metal base, and at least a part corresponding to the first support part of the metal base A reinforcing member made of silicon is joined.

  In the vibrating mirror element according to the first aspect of the present invention, the base of the mirror unit, the first drive unit, and the first support is formed of a common metal base made of metal, and the first drive of the metal base is performed. The reinforcing member made of silicon is not joined to at least a part of the portion corresponding to the unit, and the deformation is made by joining the reinforcing member made of silicon to at least the portion corresponding to the first support portion of the metal base. The rigidity of at least a part of the portion corresponding to the possible first drive unit can be reduced, and at least the rigidity of the first support portion that supports the first drive unit is increased by the reinforcing member made of silicon. Can do. Accordingly, when the mirror portion is vibrated, it is possible to prevent the first support unit from resonating while resonating at least a part of the first drive unit. Therefore, vibration energy for deforming the first drive unit. Can be prevented from being consumed by the first support portion. As a result, the deflection angle of the mirror part can be increased. In addition, since the swing angle of the mirror portion can be increased, when the mirror portion is swung at a predetermined angle, the mirror portion can be swung at a desired swing angle with lower power consumption. In addition, since the mirror unit, the first drive unit, and the first support unit are all formed of a common metal base material, the durability against vibration is increased unlike the case of using a base material made of a brittle material such as Si. be able to. Therefore, in the vibrating mirror element according to the first aspect, the deflection angle of the mirror portion can be increased while ensuring durability against vibration.

  In the vibrating mirror element according to the first aspect, a reinforcing member made of silicon is bonded to a portion corresponding to the mirror portion of the metal substrate. If comprised in this way, since the rigidity of a mirror part is improved, a deformation | transformation of a mirror part can be suppressed. Thereby, it can suppress that the beam which a mirror part reflects is distorted.

  In the vibrating mirror element according to the first aspect, the reinforcing member made of silicon bonded to the metal base has a thickness larger than the thickness of the metal base. If comprised in this way, since the rigidity of the 1st support part to which a reinforcement member is joined can be raised easily, it will suppress that a vibration energy is consumed by a 1st support part easily, and a mirror part will have. The deflection angle can be increased.

  In the vibrating mirror element according to the first aspect, the first drive unit has a piezoelectric body that is deformed by application of a voltage, and the piezoelectric body is provided on a metal base material that functions as an electrode. ing. With this configuration, the metal substrate can be used as an electrode for applying a voltage to the piezoelectric body, so there is no need to provide a dedicated electrode member, and the number of parts can be reduced accordingly. Can do.

  In the oscillating mirror element according to the first aspect, the first drive unit includes a mirror connecting portion that is connected to the mirror portion at one end side so as to be able to swing the mirror portion, and the other end portion side of the mirror connecting portion. A beam portion to be connected, and a first drive portion that is connected to one end portion and the other end portion of the beam portion and swings the mirror portion, and at least a portion corresponding to the first drive portion of the metal base In this case, the reinforcing member made of silicon is not joined, and the reinforcing member made of silicon is joined to at least a portion corresponding to the first support portion of the metal base. If comprised in this way, the rigidity of the 1st drive part which rocks | fluctuates a mirror part can be made low, and the rigidity of a 1st support part can be improved with the reinforcement member which consists of silicon | silicone, Therefore The deflection angle of a mirror part can be increased. It can surely be enlarged.

  In the vibrating mirror element according to the first aspect, a second drive unit that swings the first support portion around a second axis that is substantially orthogonal to the first axis, and the second drive unit that is connected to the second drive unit, And a second support unit for supporting, in addition to the mirror unit, the first drive unit, and the first support unit base material, the second drive unit and the second support unit base material are made of a common metal base material. A portion corresponding to at least the second support portion of the metal base material, wherein the reinforcing member made of silicon is not joined to at least a part of the portion corresponding to the second drive unit of the metal base material. A reinforcing member made of silicon is bonded to the substrate. If comprised in this way, a mirror part can be rock | fluctuated to both the surroundings of a 1st axis line and a 2nd axis line by a 1st drive unit and a 2nd drive unit. Further, not only on the first axis side but also on the second axis side, the rigidity of at least a part of the portion corresponding to the second drive unit can be reduced, and the reinforcing member made of silicon allows the second to Since the rigidity of the second support portion that supports the drive unit can be increased, the deflection angle around the second axis can be increased in addition to the deflection angle around the first axis. In addition, it is possible to ensure durability against vibration while configuring the mirror unit to be able to swing around both the first axis and the second axis.

  In this case, preferably, the second drive unit is provided so as to extend in a direction substantially parallel to the first axis, and includes a plurality of second drive units that swing the first support unit. The part corresponding to the second drive part of the metal base is made of silicon, including a plurality of connection parts for connecting each of the plurality of second drive parts and a fixing part for fixing the second drive part. The reinforcing member is not joined, and a reinforcing member made of silicon is joined to portions corresponding to at least the plurality of connecting portions and the fixing portion of the metal base. If comprised in this way, since the rigidity of a some 2nd drive part can be lowered | hung like the 1st axis side, and the rigidity of a some connection part and fixing | fixed part can be improved with the reinforcement member which consists of silicon | silicone. In addition to the deflection angle around the first axis, the deflection angle around the second axis can be reliably increased.

  A method of manufacturing a vibrating mirror element according to a second aspect of the present invention includes a mirror unit that can swing at least about a first axis, and a first drive unit that is connected to the mirror unit and swings the mirror unit by deformation. And a step of forming a common metal substrate made of metal constituting the substrate with the first support unit connected to the first drive unit and supporting the first drive unit, and bonding a silicon layer to the metal substrate And removing the silicon layer in at least a part of the part corresponding to the first drive unit of the metal base, with the silicon layer of the part corresponding to the first support unit of the metal base remaining at least. And a step of providing a reinforcing member made of silicon on at least a portion of the metal base material corresponding to the first support portion.

  In the method for manufacturing a vibrating mirror element according to the second aspect of the present invention, a mirror unit that can swing at least about the first axis, and a first drive unit that is connected to the mirror unit and swings the mirror unit by deformation. And a step of forming a common metal substrate made of metal constituting the substrate with the first support unit connected to the first drive unit and supporting the first drive unit, and bonding a silicon layer to the metal substrate And removing the silicon layer in at least a part of the part corresponding to the first drive unit of the metal base, with the silicon layer of the part corresponding to the first support unit of the metal base remaining at least. By providing a step of providing a reinforcing member made of silicon in at least a portion corresponding to the first support portion of the metal base, a portion corresponding to the deformable first drive unit It is possible to reduce at least a portion of the rigidity of, the reinforcing member made of silicon, it is possible to increase the rigidity of the first supporting portion for supporting at least a first drive unit. Accordingly, when the mirror portion is vibrated, it is possible to prevent the first support unit from resonating while resonating at least a part of the first drive unit. Therefore, vibration energy for deforming the first drive unit. Can be prevented from being consumed by the first support portion. As a result, the deflection angle of the mirror part can be increased. In addition, since the swing angle of the mirror portion can be increased, when the mirror portion is swung at a predetermined angle, the mirror portion can be swung at a desired swing angle with lower power consumption. In addition, since the mirror unit, the first drive unit, and the first support unit are all formed of a common metal base material, the durability against vibration is increased unlike the case of using a base material made of a brittle material such as Si. be able to. Therefore, with the method for manufacturing a vibrating mirror element according to the second aspect, it is possible to obtain a vibrating mirror element capable of increasing the deflection angle of the mirror portion while ensuring durability against vibration. Further, by partially removing the silicon layer bonded to the metal substrate, a reinforcing member made of silicon can be easily provided only at a predetermined position of the metal substrate.

  In the method of manufacturing a vibrating mirror element according to the second aspect, preferably, the step of bonding the silicon layer includes a step of bonding an integrally formed silicon wafer to a plurality of metal substrates. The step of providing the reinforcing member is at least a part of the portion corresponding to the first drive unit of the metal substrate, with at least a portion of the silicon wafer corresponding to the first support portion of each metal substrate left. A step of providing a reinforcing member made of silicon on at least a portion corresponding to the first support portion of the metal base material by removing a portion of the silicon wafer corresponding to the above by etching, and a plurality of the reinforcing members made of silicon provided The method further includes the step of dividing the individual metal substrates into individual metal substrates. If comprised in this way, since the reinforcement member which consists of silicon | silicones can be simultaneously provided in the several metal base material using the silicon wafer formed integrally, a several vibration mirror element is produced easily. be able to. Further, unlike the case where a silicon layer is bonded to each of a plurality of metal bases and a reinforcing member made of silicon is provided, a reinforcing member made of silicon is applied to each of a plurality of metal bases from one silicon wafer. Since it can be provided, the manufacturing process can be simplified.

  An electronic apparatus having a projector function according to a third aspect of the present invention includes a laser light generation unit that emits laser light, a control unit that analyzes input video and recognizes pixel information, and vibration that scans the laser light. A oscillating mirror element, a mirror unit capable of oscillating at least about the first axis, a first drive unit connected to the mirror unit and oscillating the mirror unit by being deformed, and a first drive A first support unit that is connected to the unit and supports the first drive unit, and the base of the mirror unit, the first drive unit, and the first support unit is configured by a common metal base made of metal. The reinforcing member made of silicon is not joined to at least a part of the part corresponding to the first drive unit of the metal base, and the part corresponding to at least the first support part of the metal base is not Reinforcing member made of silicon is bonded.

  In the electronic device having a projector function according to the third aspect of the present invention, the base material of the mirror part, the first drive unit and the first support part is constituted by a common metal base material made of metal, The reinforcing member made of silicon is not joined to at least a part of the portion corresponding to the first drive unit, and the reinforcing member made of silicon is joined to at least the portion corresponding to the first support portion of the metal base. The rigidity of at least a part of the portion corresponding to the deformable first drive unit is reduced, and at least the rigidity of the first support portion that supports the first drive unit is increased by the reinforcing member made of silicon. Can do. Accordingly, when the mirror portion is vibrated, it is possible to prevent the first support unit from resonating while resonating at least a part of the first drive unit. Therefore, vibration energy for deforming the first drive unit. Can be prevented from being consumed by the first support portion. As a result, the deflection angle of the mirror part can be increased. In addition, since the swing angle of the mirror portion can be increased, when the mirror portion is swung at a predetermined angle, the mirror portion can be swung at a desired swing angle with lower power consumption. In addition, since the mirror unit, the first drive unit, and the first support unit are all formed of a common metal base material, the durability against vibration is increased unlike the case of using a base material made of a brittle material such as Si. be able to. Therefore, in the electronic device having the projector function according to the third aspect, the deflection angle of the mirror portion can be increased while ensuring durability against vibration. As a result, the scanning range of the laser beam can be increased by the oscillating mirror element, so that an image can be projected in a larger range.

  According to the present invention, as described above, the deflection angle of the mirror portion can be increased while ensuring the durability against vibration of the vibrating mirror element.

1 is a block diagram of a portable projector incorporating a vibrating mirror element according to an embodiment of the present invention. FIG. It is the perspective view which showed the structure of the vibration mirror element by one Embodiment of this invention. It is the top view which showed the structure of the vibration mirror element by one Embodiment of this invention. It is the disassembled perspective view which showed the structure of the vibration mirror element by one Embodiment of this invention. FIG. 4 is a cross-sectional view along the axis 200 in FIG. 3. FIG. 4 is a cross-sectional view along the axis 300 in FIG. 3. It is an expanded sectional view showing a portion in which a piezoelectric body of a vibrating mirror element according to an embodiment of the present invention is provided. It is the top view which showed the structure of the back surface of the vibration mirror element by one Embodiment of this invention. It is the perspective view which showed the state in which the vibration mirror element by one Embodiment of this invention inclined to the a1 side. It is the perspective view which showed the state in which the vibration mirror element by one Embodiment of this invention inclined to B1 side. It is the perspective view which showed the state in which the vibration mirror element by one Embodiment of this invention inclined to B2 side. It is the perspective view which showed the stainless steel base material of the vibration mirror element by one Embodiment of this invention. It is the perspective view which showed the state which sputter | spatterd the piezoelectric material of the vibration mirror element by one Embodiment of this invention. It is sectional drawing which showed the state which sputter | spatterd the piezoelectric material of the vibration mirror element by one Embodiment of this invention. It is the perspective view which showed the state which sputter | spattered the upper electrode of the vibration mirror element by one Embodiment of this invention. It is sectional drawing which showed the state which sputter | spattered the upper electrode of the vibration mirror element by one Embodiment of this invention. It is the perspective view which showed the state which bonded the silicon wafer of the vibration mirror element by one Embodiment of this invention to the some vibration mirror element. It is sectional drawing which showed the structure of one vibration mirror element among the several vibration mirror elements which joined the silicon wafer of the vibration mirror element by one Embodiment of this invention.

  DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments embodying the present invention will be described below with reference to the drawings.

  First, the configuration of a portable projector 100 according to an embodiment of the present invention will be described with reference to FIGS.

  As shown in FIG. 1, a portable projector 100 according to an embodiment of the present invention analyzes pixel images by analyzing an image input from the outside via a vibrating mirror element 1 that scans laser light and a terminal 2. In the control unit 3 that recognizes, the red laser diode 4 that generates red laser light, the blue laser diode 5 that generates blue laser light, the green laser diode 6 that generates green laser light, and the control unit 3 Based on the recognized pixel information, a laser control unit 7 is provided for controlling the gradation of the laser light emitted from the red laser diode 4, the blue laser diode 5, and the green laser diode 6. The red laser diode 4, the blue laser diode 5, and the green laser diode 6 are examples of the “laser light generation unit” in the present invention. The portable projector 100 is an example of the “electronic device having a projector function” in the present invention.

  Here, in the present embodiment, as shown in FIGS. 2 and 3, the vibrating mirror element 1 includes a mirror 10 that scans light, a first drive unit 20 that swings the mirror 10, and a first drive unit 20. The 1st support part 30 which supports is provided. Further, the vibrating mirror element 1 includes a pair of second drive units 40 and 50 connected to the first support unit 30 and a second support unit 60 that supports the second drive units 40 and 50. The base material of the part corresponding to the mirror 10, the first drive unit 20, the first support part 30, the second drive units 40 and 50, and the second support part 60 is a common stainless steel base material made of stainless steel. 11 is formed integrally. As shown in FIG. 4, the vibrating mirror element 1 is formed by stacking an upper electrode 80, a piezoelectric body 70, a stainless steel base 11, and a reinforcing member 90 from the upper side (Z1 direction side). The vibrating mirror element 1 is formed in a substantially rectangular shape as a whole in plan view. Further, the stainless steel substrate 11 has a thickness t1 (see FIGS. 5 and 6) of about 30 μm or more and about 40 μm or less. Further, the stainless steel base 11 is electrically connected to the outside through a terminal (not shown) at a portion corresponding to a fixing portion 65 described later. The mirror 10 is an example of the “mirror part” in the present invention. The stainless steel substrate 11 is an example of the “metal substrate” in the present invention.

  As shown in FIGS. 2 and 3, the first drive unit 20 is a torsionally deformable torsion bar 21 a and 21 b that couples the mirror 10 so as to be swingable, and is flexibly deformable connected to the torsion bar 21 a and 21 b. Bars 22a and 22b and first drive units 23a and 23b connected to the ends of the bars 22a and 22b, respectively, are provided. The torsion bars 21a and 21b are examples of the “first drive unit” and the “mirror connecting portion” in the present invention. The bars 22a and 22b are examples of the “first drive unit” and the “beam portion” in the present invention. The first drive units 23a and 23b are examples of the “first drive unit” in the present invention.

  The two torsion bars 21a and 21b are formed to extend in the Y direction, as shown in FIGS. Further, the inner ends of the torsion bars 21a and 21b in the Y direction are connected to the mirror 10, respectively. Also, as shown in FIG. 9, the torsion bars 21a and 21b are coupled to be able to swing around the axis 200 (see FIG. 2) relative to the first support 30 by torsional deformation. ing. The axis 200 is an example of the “first axis” in the present invention.

  The two bars 22a and 22b are formed so as to extend in the X direction as shown in FIGS. The bars 22a and 22b are connected to the outer ends of the torsion bars 21a and 21b in the Y direction, respectively.

  The first drive units 23a and 23b are connected to both ends of the bars 22a and 22b as shown in FIGS. 2, 3, 10 and 11, respectively. The first drive units 23a and 23b are configured to bend and deform when a voltage is applied to the piezoelectric body 70 (see FIGS. 5 to 7). As shown in FIG. 2, the mirror 10 is configured to swing around the axis 200 in the a1 direction and the a2 direction by the bending deformation of the first drive units 23a and 23b. Further, the mirror 10 is configured to be inclined more than the inclination of the bars 22a and 22b by resonance.

  As shown in FIGS. 2, 3, 10, and 11, the first support portion 30 includes a shaft portion 31a connected to the first drive portion 23a, and a shaft portion 31b connected to the first drive portion 23b. And a frame 32 connected to the shaft portion 31a and the shaft portion 31b. The shaft portions 31a and 31b are formed to extend in the direction (X direction) of the axis 300 (see FIG. 3). The shaft portions 31a and 31b are connected to support the first drive portions 23a and 23b, respectively. The frame 32 is formed in a substantially rectangular shape so as to surround the first drive parts 23a and 23b. As shown in FIG. 2, the axis 200 and the axis 300 both pass through the center R of the mirror 10 and are orthogonal to each other in plan view. The axis 300 is an example of the “second shaft portion” in the present invention.

  As shown in FIGS. 2, 3, 10 and 11, the second drive unit 40 includes second drive units 41, 42, 43, 44 and 45 connected to the shaft portion 31 a of the first drive unit 20. I have. Further, the second drive unit 50 includes second drive parts 51, 52, 53, 54 and 55 connected to the shaft part 31 b of the first drive unit 20. The second drive units 40 and 50 are supported by the second support part 60.

  Here, as shown in FIG. 3, the second drive unit 40 formed on the X1 side of the first drive unit 20 and the second drive unit 50 formed on the X2 side of the first drive unit 20 are The mirror 10 is configured to have a substantially point-symmetric shape with the center R of the mirror 10 as the center. That is, the second drive units 41 to 45 of the second drive unit 40 are substantially the same as the second drive units 51 to 55 of the second drive unit 50 by rotating 180 degrees about the center R of the mirror 10, respectively. It is arranged at the overlapping position. In addition, the connection parts 61 to 64 of the second drive unit 40 are positioned so as to substantially overlap the connection parts 66 to 69 of the second drive unit 50 by being rotated 180 degrees around the center R of the mirror 10. Arranged in a relationship. Therefore, hereinafter, the configuration of the second drive unit 40 will be described, and the description of the second drive unit 50 will be omitted.

  As shown in FIGS. 2, 3, and 8, the second drive units 41 to 45 of the second drive unit 40 are configured to extend in a direction (Y direction) substantially parallel to the axis 200 (see FIG. 3). ing. The second drive units 41 to 45 are provided at a predetermined interval in the X direction. The 2nd drive parts 41-45 are comprised so that it may deform | transform when a voltage is applied. Further, the second drive units 41 to 45 are configured to swing the first support unit 30 in the B1 direction and the B2 direction around the axis 300 substantially orthogonal to the axis 200 (see FIG. 3) by being deformed. Yes. The first drive unit 20 is driven at a frequency of about 30 kHz and is configured to resonate the mirror 10 and the torsion bars 21a and 21b. On the other hand, the second drive units 40 and 50 are driven at a frequency of about 60 Hz, and are configured not to resonate the mirror 10 and the torsion bars 21a and 21b. The second drive units 41 to 45 are examples of the “second drive unit” in the present invention. The axis 300 is an example of the “second axis” in the present invention.

  As shown in FIGS. 2, 3, 10, and 11, the second support unit 60 connected to the second drive unit 40 and supporting the second drive unit 40 includes four connection units 61 to 64, and a frame. And a fixed portion 65 having a shape. The mirror 10, the first drive unit 20, and the second drive unit 40 are configured to be accommodated inside the frame-shaped fixing portion 65. Further, the fixed portion 65 is connected to the second drive portion 45. The four connection portions 61 to 64 and the fixing portion 65 are configured so as not to be substantially deformed even when a voltage is applied to the five second drive portions 41 to 44 and 45. The connection unit 61 is configured to connect the second drive units 41 and 42. Further, the connecting part 62 is configured to connect the second driving parts 42 and 43. The connection unit 63 is configured to connect the second drive units 43 and 44. The connection unit 64 is configured to connect the second drive units 44 and 45. In addition, the connection parts 61-64 are examples of the "2nd support part" of this invention. The fixing portion 65 is an example of the “second support portion” in the present invention.

  Further, as shown in FIGS. 5, 6 and 13, the first drive parts 23a and 23b, the shaft parts 31a and 31b, the frame body 32, and the second drive of the stainless steel base 11 that functions as an electrode. Piezoelectric bodies 70 are respectively formed on the upper surfaces (Z1 direction) of the portions 41 to 45 and 51 to 55, the connecting portions 61 to 64 and 66 to 69, and the portions corresponding to a part of the fixed portion 65. ing. The piezoelectric body 70 is made of lead zirconate titanate (PZT). Further, as shown in FIGS. 5 and 6, the piezoelectric body 70 has a thickness t2 of about 3 μm in the Z direction.

  The piezoelectric body 70 is configured to expand and contract in the Y direction when a voltage is applied by being polarized in the film thickness direction (Z direction). Specifically, in the piezoelectric body 70, the lower surface side (Z2 side) of the piezoelectric body 70 contracts more than the upper surface side (Z1 side) or the upper surface side (Z1 side) of the piezoelectric body 70 according to the phase of the applied voltage. Is configured to contract and deform from the lower surface side (Z2 side). Further, the second drive units 41, 43 and 45 and the second drive units 42 and 44 are configured to be applied with voltages having opposite phases. The second drive units 41, 43, and 45 of the second drive unit 40 and the second drive units 52 and 54 of the second drive unit 50 are configured to be applied with voltages having the same phase. The second drive units 42 and 44 of the second drive unit 40 and the second drive units 51, 53, and 55 of the second drive unit 50 are configured to be applied with voltages having the same phase. As a result, the second drive units 40 and 50 are configured to perform driving opposite to each other.

  Further, as shown in FIGS. 5 to 7 and 15, upper electrodes 80 are formed on the upper surface of the piezoelectric body 70, respectively. The upper electrode 80 is made of a conductive metal material such as al, Cr, Cu, au, or Pt. Further, each of the upper electrodes 80 is electrically connected to the outside by a terminal (not shown). The upper electrode 80 has a thickness t3 (see FIG. 5) of about 100 nm in the Z direction.

  Further, as shown in FIGS. 5, 6, and 8, the reinforcing member 90 made of silicon includes the mirror 10, the shaft portions 31 a and 31 b, the frame body 32, the connection portions 61 to 64 and 66 to 69, The portion corresponding to the fixed portion 65 is joined to the back side (Z2 direction side) of the stainless steel substrate 11. That is, the stainless base of the portion corresponding to the torsion bars 21a and 21b, the bars 22a and 22b, the first drive units 23a and 23b, and the second drive units 41 to 45 and 51 to 55 configured to be deformable. A reinforcing member 90 made of silicon is not joined to the back side (Z2 direction side) of the material 11. Further, the reinforcing member 90 made of silicon is bonded to the stainless steel substrate 11 with an adhesive made of, for example, Cyclotene (registered trademark). As shown in FIGS. 5 and 6, the reinforcing member 90 has a thickness t4 of about 200 μm or more and about 300 μm or less. The reinforcing member 90 made of silicon is configured to have a thickness t4 larger than the thickness t1 of the stainless steel base material 11.

  Next, with reference to FIGS. 2 and 9 to 11, the driving operation of the vibrating mirror element 1 according to the embodiment of the present invention will be described.

  First, driving around the axis 200 will be described. As shown in FIG. 9, when a voltage that causes the first drive unit 23a to expand is applied to the first drive unit 23a and a voltage that causes the first drive unit 23b to contract is applied to the first drive unit 23b, The first drive unit 23a is deformed into a convex shape so that the central part is located above the end part (projects upward), and the first drive part 23b has the central part below the end part. It is deformed into a concave shape so as to be positioned (project downward).

  Thereby, as shown in FIG. 9, each of the bars 22a and 22b is inclined so that the upper surface thereof faces the X1 direction. As the bars 22a and 22b are inclined, the torsion bars 21a and 21b are inclined toward the X1 direction. Further, the mirror 10 and the torsion bars 21a and 21b are resonated by making the resonance frequency of the mirror 10 and the torsion bars 21a and 21b substantially coincide with the frequency of the voltage applied to the first drive units 23a and 23b. To do. Thereby, a force twisted in the a1 direction is applied to the torsion bars 21a and 21b, and the mirror 10 is swung in the a1 direction at an angle larger than the inclination angle of the bars 22a and 22b.

  On the other hand, when a voltage that causes the first drive unit 23a to contract is applied to the first drive unit 23a, and a voltage that causes the first drive unit 23b to extend is applied to the first drive unit 23b, The drive unit 23a is deformed into a concave shape so that the central portion is located below the end portion, and the first drive portion 23b is deformed into a convex shape so that the central portion is located above the end portion. Is done. Accordingly, the bars 22a and 22b are inclined so that the upper surfaces thereof are directed in the X2 direction by the operation in the direction opposite to the shake in the a1 direction. In this case, a force twisted in the a2 direction by resonance is applied to the torsion bars 21a and 21b, and the mirror 10 is swung in the a2 direction at an angle larger than the inclination angle of the bars 22a and 22b.

  Next, driving around the axis 300 will be described. As shown in FIG. 10, the second drive units 41 and 43 of the second drive unit 40 from the state where the second drive units 40 and 50 as shown in FIG. A voltage is applied to the second drive units 52 and 54 of the second drive unit 50 such that the upper surface side (Z1 side) of the piezoelectric body 70 is contracted more than the lower surface side (Z2 side). On the other hand, the second drive units 42 and 44 of the second drive unit 40 and the second drive units 51, 53 and 55 of the second drive unit 50 are applied to the second drive units 41, 43, 45, 52 and 54. A voltage is applied so that the lower surface side (Z2 side) of the piezoelectric body 70 having a phase opposite to the applied voltage is contracted more than the upper surface side (Z1 side).

  Accordingly, as shown in FIG. 10, in the second drive unit 40, the second drive units 41, 43, and 45 have an end S1, an end S6, and an end S10, respectively, an end S3, and an end S7. And it deform | transforms so that it may incline upwards (Z1 side) with respect to edge part S2. On the other hand, as for the 2nd drive parts 42 and 44, edge part S4 and edge part S8 respectively incline below (Z2 side) with respect to edge part S5 and edge part S9. As a result, the shaft portion 31a connected to the end portion S1 positions the first drive unit 20 on the Y1 side above the Y2 side (Z1 side) with the inclination of the second drive portions 41 to 45 accumulated. Tilt to do. Further, the second drive unit 50 is driven in the opposite direction to the second drive unit 40, so that the shaft portion 31b moves the first drive unit 20 in a state where the inclinations of the second drive units 51 to 55 are accumulated. Inclination is performed so that the Y1 side is positioned above the Z2 side (Z1 side). Accordingly, the first drive unit 20 is rotated in the B1 direction around the axis 300 (see FIG. 2).

  Further, as shown in FIG. 11, the second drive unit 41 of the second drive unit 40 from the state in which the second drive units 40 and 50 as shown in FIG. , 43 and 45 and a voltage that causes the lower surface side (Z2 side) of the piezoelectric body 70 to contract more than the upper surface side (Z1 side) is applied to the second drive units 52 and 54 of the second drive unit 50. . On the other hand, the second drive units 42 and 44 of the second drive unit 40 and the second drive units 51, 53 and 55 of the second drive unit 50 are applied to the second drive units 41, 43, 45, 52 and 54. A voltage is applied so that the upper surface side (Z1 side) of the piezoelectric body 70 having a phase opposite to the applied voltage is contracted more than the lower surface side (Z2 side).

  As a result, the second drive unit 40 is driven so as to be opposite to the state of FIG. 10, so that the shaft portion 31 a is in a state where the inclinations of the second drive units 41 to 45 are accumulated. The drive unit 20 is inclined so that the Y1 side is positioned below the Z2 side (Z2 side). Further, the second drive unit 50 is driven in the opposite direction to the second drive unit 40, so that the shaft portion 31b moves the first drive unit 20 in a state where the inclinations of the second drive units 51 to 55 are accumulated. It is made to incline so that the Y1 side is located below the Z2 side (Z2 side). Thus, the first drive unit 20 is rotated in the B2 direction around the axis 300 (see FIG. 2). By repeating these series of driving operations, the first driving unit 20 is swung around the axis 300 by the second driving units 40 and 50.

  Next, with reference to FIG. 2, FIG. 6 and FIGS. 12-18, the manufacturing method of the vibration mirror element 1 by one Embodiment of this invention is demonstrated.

  First, as shown in FIG. 12, the stainless steel substrate 11 is formed in a shape corresponding to the vibrating mirror element 1. Next, after a resist pattern (not shown) is formed on the upper side (Z1 direction side) of the stainless steel substrate 11 by photolithography, the stainless steel substrate is used as shown in FIGS. 13 and 14 using the resist pattern as a mask. 11 first drive parts 23a and 23b, shaft parts 31a and 31b, frame 32, second drive parts 41 to 45 and 51 to 55, connection parts 61 to 64 and 66 to 69, and fixing part 65. A piezoelectric body 70 is formed by sputtering or the like on the upper surface (Z1 side) of a portion corresponding to a portion of the substrate. Thereafter, the resist pattern is removed.

  And after forming a resist pattern (not shown) on the upper side (Z1 direction side) of the stainless steel substrate 11 and the piezoelectric body 70 by photolithography, as shown in FIGS. 15 and 16, using the resist pattern as a mask, An upper electrode 80 is formed by sputtering or the like on the upper surface of the piezoelectric body 70 at positions corresponding to the first drive units 23a and 23b and the second drive units 41 to 45 and 51 to 55. That is, in the portion where the piezoelectric body 70 is provided, the shaft portions 31 a and 31 b, the frame body 32, the connection portions 61 to 64 and 66 to 69, and a part of the fixed portion 65 are provided with the upper electrode 80. Absent. Thereafter, the resist pattern is removed.

  Next, as shown in FIGS. 17 and 18, the silicon wafer 91 integrally formed on the lower side (Z2 direction side) of the plurality of stainless steel base materials 11 forming the plurality of vibrating mirror elements 1 is bonded. To do. The silicon wafer 91 is an example of the “silicon layer” in the present invention.

  Then, after forming a resist pattern (not shown) on the lower side (Z2 direction side) of the silicon wafer 91 by photolithography, using the resist pattern as a mask, as shown in FIG. 2, FIG. 5, and FIG. 10. Reinforcing member 90 (silicon wafer 91) is left in the portion of stainless steel base 11 corresponding to shaft portions 31a and 31b, frame body 32, connection portions 61 to 64 and 66 to 69, and fixing portion 65. In this state, the silicon wafer 91 bonded to the portion of the stainless steel base 11 corresponding to the first drive parts 23a and 23b of the stainless steel base 11 and the second drive parts 41 to 45 and 51 to 55 is etched. Remove with. Accordingly, the reinforcing member 90 made of silicon is formed on the portion of the stainless steel base 11 corresponding to the mirror 10, the shaft portions 31 a and 31 b, the frame body 32, the connection portions 61 to 64 and 66 to 69, and the fixing portion 65. Provided. Thereafter, the resist pattern is removed.

  Then, the silicon wafer 91 is cut along the cutting line shown in FIG. 17 to divide the plurality of stainless steel base materials 11 provided with the reinforcing members 90 into the individual stainless steel base materials 11. In this way, the vibrating mirror element 1 shown in FIG. 2 is formed.

  In the present embodiment, as described above, the base material of the mirror 10, the first drive unit 20, and the first support portion 30 is configured by the common stainless steel base material 11, and the first drive unit 20 of the stainless steel base material 11. Corresponding to the deformable first drive unit 20 by joining the reinforcing member 90 to the portion corresponding to the first support portion 30 of the stainless steel base material 11 without joining the reinforcing member 90 to the portion corresponding to. While reducing the rigidity of a part, the rigidity of the 1st support part 30 which supports the 1st drive unit 20 by the reinforcement member 90 can be improved. Accordingly, when the mirror 10 is vibrated, it is possible to prevent the first support unit 30 from resonating while resonating a part of the first drive unit 20, so that the first drive unit 20 can be deformed. It is possible to suppress vibration energy from being consumed by the first support portion 30. As a result, the deflection angle of the mirror 10 can be increased. Further, since the swing angle of the mirror 10 can be increased, when the mirror 10 is swung at a predetermined angle, the mirror 10 can be swung at a desired swing angle with lower power consumption. Further, since the mirror 10, the first drive unit 20, and the first support portion 30 are all constituted by the common stainless steel base material 11, unlike the case of using a base material made of a brittle material such as Si, durability against vibrations is achieved. Can increase the sex. Therefore, the deflection angle of the mirror 10 can be increased while ensuring durability against vibration.

  In this embodiment, since the rigidity of the mirror 10 is increased by joining the reinforcing member 90 to the portion corresponding to the mirror 10 of the stainless steel base 11 as described above, deformation of the mirror 10 can be suppressed. . Thereby, distortion of the beam reflected by the mirror 10 can be suppressed.

  In the present embodiment, as described above, the reinforcing member 90 to be joined to the stainless steel base material 11 is formed to have a thickness t4 larger than the thickness t1 of the stainless steel base material 11, thereby joining the reinforcing member 90. Since the rigidity of the 1st support part 30 can be raised easily, it can suppress easily that vibration energy is consumed by the 1st support part 30, and can make the deflection angle of the mirror 10 large.

  In the present embodiment, as described above, the piezoelectric substrate 70 that is deformed when a voltage is applied to the first drive unit 20 is provided on the stainless substrate 11 that functions as an electrode. Since it can also be used as an electrode for applying a voltage to the piezoelectric body 70, it is not necessary to separately provide a dedicated electrode member, and the number of parts can be reduced accordingly.

  In the present embodiment, as described above, one end side is connected to the mirror 10, and is connected to the torsion bars 21a and 21b that slidably couple the mirror 10 and the other end side of the torsion bars 21a and 21b. Bars 22a and 22b, and first drive units 23a and 23b that are connected to one end and the other end of the bars 22a and 22b and swing the mirror 10, are provided in the first drive unit 20, and the stainless steel base 11 The reinforcing member 90 is not joined to the portions corresponding to the first driving portions 23a and 23b, and the reinforcing member 90 is joined to the portion corresponding to the first support portion 30 of the stainless steel base 11, The rigidity of the first drive parts 23a and 23b for swinging the mirror 10 can be reduced, and the rigidity of the first support part 30 can be increased by the reinforcing member 90. Since it is, the deflection angle of the mirror 10 can be reliably increased.

  In the present embodiment, as described above, the first support portion 30 is connected to the second drive units 40 and 50 that swing around the axis 300 that is substantially orthogonal to the axis 200, and the second drive units 40 and 50, and And a second support unit 60 for supporting the two drive units 40 and 50, and in addition to the base material of the mirror 10, the first drive unit 20 and the first support unit 30, the second drive units 40 and 50 and the second support unit 60 are provided. The base material for the support portion 60 is also constituted by the common stainless steel base material 11, and the reinforcing member 90 is not joined to the portion corresponding to the second drive units 40 and 50 of the stainless steel base material 11. A reinforcing member 90 is joined to a portion corresponding to the second support portion 60 of the material 11, so that the mirror 1 is driven by the first drive unit 20 and the second drive units 40 and 50. It can be swung to both the axis 200 and axis 300 about. Further, not only on the axis line 200 side but also on the axis line 300 side, the rigidity of the portion corresponding to the second drive units 40 and 50 can be reduced, and the second drive units 40 and 50 are supported by the reinforcing member 90. Since the rigidity of the second support portion 60 to be increased can be increased, the deflection angle around the axis 300 can be increased in addition to the deflection angle around the axis 200. In addition, durability against vibration can be ensured while the mirror 10 can be swung around both the axis 200 and the axis 300.

  In the present embodiment, as described above, the second drive units 40 and 50 are provided so as to extend in a direction substantially parallel to the axis 200, and the plurality of second drive units 41 to 45 that swing the first support unit 30 and 51 to 55 are provided in the second drive units 40 and 50, and a plurality of connection portions 61 to 64 and 66 to which the second support portions 60 are connected to the plurality of second drive portions 41 to 45 and 51 to 55, respectively. 69 and a fixing portion 65 for fixing the second driving portions 41 to 45 and 51 to 55, and portions corresponding to the second driving portions 41 to 45 and 51 to 55 of the stainless steel base 11 are The reinforcing member 90 is not joined, and the reinforcing member 90 is joined to portions corresponding to the plurality of connecting portions 61 to 64 and 66 to 69 and the fixing portion 65 of the stainless steel base material 11, so that the axis 200 side Similarly, the rigidity of the plurality of second drive parts 41 to 45 and 51 to 55 can be lowered, and the rigidity of the connection parts 61 to 64 and 65 to 69 and the fixing part 65 can be increased by the reinforcing member 90. Therefore, not only the deflection angle around the axis 200 but also the deflection angle of the mirror 10 around the axis 300 can be reliably increased.

  In the present embodiment, as described above, the mirror 10 that can swing around the axis 200, the first drive unit 20 that is connected to the mirror 10 and swings the mirror 10 by being deformed, and the first drive unit 20. A step of forming a common stainless steel base material 11 that forms a base material with the first support unit 30 that is connected to the first drive unit 20, and a step of bonding a silicon wafer 91 to the stainless steel base material 11, By removing the portion of the silicon wafer 91 corresponding to the first drive unit 20 of the stainless steel base material 11 while leaving the portion of the silicon wafer 91 corresponding to the first support portion 30 of the stainless steel base material 11, A step of providing a reinforcing member 90 at a portion corresponding to the first support portion 30 of the material 11, thereby supporting the deformable first drive unit 20. It is possible to reduce the rigidity of the portion that, by the reinforcing member 90 can be produced to increase the rigidity of the first supporting portion 30 for supporting the first driving unit 20. Accordingly, when the mirror 10 is vibrated, it is possible to prevent the first support unit 30 from resonating while at least resonating the first drive unit 20, and thus vibration energy for deforming the first drive unit 20. Can be prevented from being consumed by the first support portion 30. As a result, the deflection angle of the mirror 10 can be increased. Further, since the swing angle of the mirror 10 can be increased, when the mirror 10 is swung at a predetermined angle, the mirror 10 can be swung at a desired swing angle with lower power consumption. Further, since the mirror 10, the first drive unit 20, and the first support portion 30 are all made of a common stainless steel base material, unlike the case of using a base material made of a brittle material such as Si, durability against vibrations is achieved. Can be increased. Therefore, it is possible to obtain the vibrating mirror element 1 capable of increasing the deflection angle of the mirror 10 while ensuring durability against vibration. Further, by partially removing the silicon wafer 91 bonded to the stainless steel substrate 11, the reinforcing member 90 can be easily provided only at a predetermined position of the stainless steel substrate 11. Further, since the silicon wafer 91 bonded to the stainless steel base material 11 can be removed so as to remain in a portion corresponding to the first support portion 30 of the stainless steel base material 11 on which the reinforcing member 90 is provided, the reinforcing member 90 is provided. In the case where the stainless base material 11 is provided at a plurality of locations for manufacturing, the number of parts can be reduced.

  In the present embodiment, as described above, the step of bonding the silicon wafer 91 integrally formed to the plurality of stainless steel bases 11 and the step of providing the reinforcing member 90 By removing the portion of the silicon wafer 91 corresponding to the portion corresponding to the first drive unit 20 of the stainless steel substrate 11 by etching while leaving the portion of the silicon wafer 91 corresponding to the first support portion 30, the stainless steel Including a step of providing the reinforcing member 90 at a portion corresponding to the first support portion 30 of the base material 11, and a step of dividing the plurality of stainless steel base materials 11 provided with the reinforcing member 90 into the individual stainless steel base materials 11. Furthermore, the reinforcing member 90 is simultaneously provided on the plurality of stainless steel bases 11 using the integrally formed silicon wafer 91. Since bets can be, it is possible to easily produce a plurality of vibrating mirror element 1. Unlike the case where the reinforcing member 90 is provided by bonding a silicon layer to each of the plurality of stainless steel bases 11, the reinforcing member 90 is collectively applied to each of the plurality of stainless steel bases 11 from a single silicon wafer 91. Therefore, the manufacturing process can be simplified.

  The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is shown not by the above description of the embodiments but by the scope of claims for patent, and further includes all modifications within the meaning and scope equivalent to the scope of claims for patent.

  In the above embodiment, the mirror (mirror part), the torsion bar (mirror connecting part), the bar (beam part), the shaft part (first support part), the frame (first support part), the connection part (second support part). ) And the example in which the reinforcing member is provided on the stainless steel base of the portion corresponding to all of the fixed portion (second support portion), the present invention is not limited to this. In this invention, you may provide a reinforcement member only in the one part part among the parts corresponding to a mirror, a torsion bar, a bar | burr, a shaft part, a frame, a connection part, and a fixing | fixed part.

  In the above embodiment, the example in which the reinforcing member is not provided on the stainless base material in the portion corresponding to all of the first drive unit is shown, but the present invention is not limited to this. In the present invention, the reinforcing member may not be provided only in a part of the portion corresponding to the first drive unit.

  In the above-described embodiment, an example in which a pair of the second drive unit 40 and the second drive unit 50 having the same configuration is configured to have a substantially point-symmetrical relationship with respect to the center R of the mirror is shown. However, the present invention is not limited to this. In the present invention, for example, the pair of second drive units may be configured in an asymmetric shape.

In the said embodiment, although the piezoelectric material showed the example which consists of lead zirconate titanate (PZT), this invention is not limited to this. In the present invention, for example, the piezoelectric body may be formed of a piezoelectric material made of an oxide mainly composed of lead, titanium and zirconium other than PZT, or other piezoelectric materials. Specifically, the piezoelectric body includes zinc oxide (ZnO), lead lanthanum zirconate titanate ((Pb, La) (Zr, Ti) O ₃ ), potassium niobate (KNbO ₃ ), sodium niobate (NaNbO). _It may be formed of a piezoelectric material such as ₃ ).

  In the said embodiment, although the example which deform | transformed the 1st drive unit with the piezoelectric material was shown, this invention is not limited to this. In the present invention, the first drive unit may be deformed by a material other than the piezoelectric body.

  In the said embodiment, although the example which joins a reinforcement member to a stainless steel base material with the adhesive agent which consists of Cyclotene (trademark) was shown, this invention is not limited to this. In the present invention, for example, an adhesive mainly composed of paraxylylene resin or polyimide resin may be used.

  In the said embodiment, although the metal base material showed the example which consists of stainless steel, this invention is not limited to this. In the present invention, for example, the metal substrate may be made of a metal such as titanium other than stainless steel or aluminum.

  In the above embodiment, the example in which the oscillating mirror element is configured to scan light two-dimensionally by including the first drive unit and the second drive unit is shown, but the present invention is not limited to this. In the present invention, the oscillating mirror element may be configured to scan light only in one dimension by using only the first drive unit and not having the second drive unit.

  In the above embodiment, an example in which the present invention is applied to a portable projector has been shown, but the present invention is not limited to this. In the present invention, the present invention may be applied to electronic devices other than the portable projector, such as a mobile phone.

1 Vibrating mirror element 3 Control unit 4 Red laser diode (laser light generation unit)
5 Blue laser diode (laser beam generator)
6 Green laser diode (laser beam generator)
10 Mirror (mirror part)
11 Stainless steel substrate (metal substrate)
20 1st drive unit 21a, 21b Torsion bar (mirror connection part, 1st drive unit)
22a, 22b Bar (beam, first drive unit)
23a, 23b 1st drive part (1st drive unit)
30 1st support part 40, 50 2nd drive unit 41, 42, 43, 44, 45 2nd drive part (2nd drive unit)
51, 52, 53, 54, 55 Second drive unit (second drive unit)
60 2nd support part (2nd drive unit)
61, 62, 63, 64 Connection part (second support part)
65 Fixing part (second support part)
66, 67, 68, 69 Connection part (second support part)
70 Piezoelectric 90 Reinforcing member (Reinforcing member made of silicon)
91 Silicon wafer (silicon layer)
100 Portable projector (electronic equipment having a projector function)
200 axis (first axis)
300 axis (second axis)

Claims (10)

A mirror that can swing at least about the first axis;
A first drive unit that is connected to the mirror part and swings the mirror part by being deformed;
A first support unit connected to the first drive unit and supporting the first drive unit;
The mirror part, the first drive unit, and the base material of the first support part are composed of a common metal base material made of metal,
A reinforcing member made of silicon is not joined to at least a part of the part corresponding to the first drive unit of the metal base, and at least a part corresponding to the first support part of the metal base. Is a vibrating mirror element to which a reinforcing member made of silicon is bonded.   The vibrating mirror element according to claim 1, wherein a reinforcing member made of silicon is bonded to a portion of the metal base material corresponding to the mirror portion.   The vibrating mirror element according to claim 1, wherein the reinforcing member made of silicon bonded to the metal base has a thickness larger than a thickness of the metal base. The first drive unit has a piezoelectric body that is deformed by application of a voltage,
The vibrating mirror element according to claim 1, wherein the piezoelectric body is provided on the metal base material that functions as an electrode. The first drive unit has one end side connected to the mirror part, a mirror connecting part that connects the mirror part so as to be swingable, a beam part connected to the other end side of the mirror connecting part, A first driving unit that is connected to one end and the other end of the beam unit and swings the mirror unit;
A reinforcing member made of silicon is not bonded to at least a portion corresponding to the first driving portion of the metal base, and at least a portion corresponding to the first support portion of the metal base is the silicon. The vibration mirror element according to claim 1, wherein a reinforcing member made of A second drive unit that swings the first support portion around a second axis substantially perpendicular to the first axis;
A second support unit connected to the second drive unit and supporting the second drive unit;
In addition to the mirror part, the first drive unit and the base material of the first support part, the base material of the second drive unit and the second support part is also composed of the common metal base material,
The reinforcing member made of silicon is not joined to at least a part of the part corresponding to the second drive unit of the metal base, and the part corresponding to at least the second support part of the metal base The vibrating mirror element according to claim 1, wherein a reinforcing member made of silicon is bonded to the vibrating mirror element. The second drive unit includes a plurality of second drive units that are provided so as to extend in a direction substantially parallel to the first axis and swing the first support unit.
The second support part includes a plurality of connection parts for connecting the plurality of second drive parts, and a fixing part for fixing the second drive part,
The reinforcing member made of silicon is not joined to the portion corresponding to the second drive portion of the metal base, and at least the portion corresponding to the plurality of connecting portions and the fixing portion of the metal base The vibrating mirror element according to claim 6, wherein the reinforcing member made of silicon is bonded. A mirror unit that can swing at least about a first axis, a first drive unit that is connected to the mirror unit and that swings the mirror unit by being deformed, and is connected to the first drive unit; Forming a common metal base material made of a metal constituting the base material with the first support portion supporting the drive unit;
Bonding a silicon layer to the metal substrate;
The silicon layer in at least a part of the part corresponding to the first drive unit of the metal base while leaving the silicon layer of the part corresponding to the first support part of the metal base at least. And a step of providing a reinforcing member made of silicon on at least a portion of the metal base material corresponding to the first support portion by removing the metal base material. The step of bonding the silicon layer includes a step of bonding the silicon wafer formed integrally with the plurality of metal substrates,
The step of providing the reinforcing member made of silicon corresponds to the first drive unit of the metal base material, with at least a portion of the silicon wafer corresponding to the first support portion of each metal base material left. A step of providing a reinforcing member made of silicon on at least a portion of the metal base corresponding to the first support portion by removing the portion of the silicon wafer corresponding to at least a portion of the portion to be etched. Including
The method of manufacturing a vibrating mirror element according to claim 8, further comprising a step of dividing the plurality of the metal bases provided with the reinforcing member made of silicon for each of the metal bases. A laser beam generator that emits laser beam;
A controller that analyzes input video and recognizes pixel information;
A vibrating mirror element that scans the laser beam,
The vibrating mirror element is
A mirror that can swing at least about the first axis;
A first drive unit that is connected to the mirror part and swings the mirror part by being deformed;
A first support unit connected to the first drive unit and supporting the first drive unit;
The mirror part, the first drive unit, and the base material of the first support part are composed of a common metal base material made of metal,
A reinforcing member made of silicon is not bonded to at least a part of the part corresponding to the first drive unit of the metal base, and at least a part corresponding to the first support part of the metal base An electronic apparatus having a projector function, wherein a reinforcing member made of silicon is bonded.

Images