JP2013155419A - Fixture for surface treatment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a fixture for surface treatment which is used for accommodating an object to be treated such as a rare earth permanent magnet when forming a metal deposition coating on the surface of the object, in which the metal coating formed by deposition on the surface of the object can be effectively prevented from getting damaged or the object itself can be effectively prevented from being cracked or chipped, and the receiving and delivering of the objec is easy.SOLUTION: A fixture for surface treatment accommodates an object to be treated in a spring-shaped cylindrical body prepared by winding a linear member with a gap to perform surface treatment. One end of the cylindrical body is sealed by arranging a spring body in which at least the end face on the inner side of the cylindrical body is formed in a spiral line-shaped surface. Another end is opened, and after the object is received therefrom, the opened end is sealed by fitting, as a lid, the spring body in which at least the end face on the inner side of the cylindrical body is formed in a spiral line-shaped surface.

Description

  The present invention relates to a surface treatment jig that accommodates and uses an object to be processed, for example, when a metal deposition film is formed on the surface of the object to be processed such as a rare earth permanent magnet.

  As is well known, rare earth permanent magnets represented by R—Fe—B permanent magnets are used in various fields today because they have high magnetic properties. However, since rare earth permanent magnets contain a highly reactive rare earth element: R, they are easily oxidized and corroded in the atmosphere. Corrosion proceeds from the surface due to the presence of rust, and rust is generated, resulting in deterioration and variation in magnetic properties. Furthermore, when a magnet in which rust is generated is incorporated in an apparatus such as a magnetic circuit, the rust may be scattered to contaminate peripheral components. Therefore, for the purpose of imparting excellent corrosion resistance to the rare earth permanent magnet, a metal film such as an aluminum film is formed on the surface thereof by vapor phase plating such as vapor deposition.

  Formation of a metal vapor-deposited film on the surface of an object to be processed such as a rare earth-based permanent magnet is performed by a porous chamber for accommodating an evaporation portion of an evaporation material and an object to be processed on which the evaporation material is evaporated on the surface. This is performed using a vapor deposition film forming apparatus that includes a cylindrical barrel having a conductive peripheral surface, and deposits a vapor deposition material on the surface of an object while rotating the cylindrical barrel around a horizontal rotation axis. It is common (for example, patent document 1). In this case, when a large number of objects to be processed are accommodated in the cylindrical barrel and the objects to be processed collide with each other inside the cylindrical barrel, the metal film deposited on the surface of the object to be processed is deposited. May be damaged, or the workpiece itself may be cracked or chipped. Therefore, as a surface treatment holder for solving such problems, a linear member is wound around a gap and formed into a spring-like cylindrical body having spiral surfaces on both end faces. Has been proposed in If the objects to be processed are accommodated one by one in the surface treatment holder and the holders accommodating the objects to be processed are accommodated in the cylindrical barrel and then processed, it evaporates from the gap between the linear member of the holder and the linear member. A metal vapor deposition film is formed by the metal vapor deposition material reaching the surface of the object to be treated, but even if the holders collide with each other inside the cylindrical barrel, the inner object to be treated is large due to the spring property of the holder. Since the impact is not applied, it is possible to effectively prevent the metal film deposited on the surface of the object to be processed from being damaged or the object to be processed itself from being cracked or chipped. However, it is necessary to put the workpiece into and out of the surface treatment holder by bending the longitudinal direction of the holder by utilizing the spring property of the holder and widening the gap between the linear member and the linear member. So work is troublesome.

Japanese Patent No. 3801418 JP 2000-169964 A

  Accordingly, the present invention is a surface treatment jig for accommodating and using a workpiece when forming a metal vapor deposition film on the surface of the workpiece such as a rare earth permanent magnet, To provide a surface treatment jig that can effectively prevent the metal film formed by vapor deposition from being damaged or that the object to be processed itself is cracked or chipped and that allows the object to be processed to be taken in and out easily. With the goal.

The surface treatment jig of the present invention made in view of the above points contains the object to be treated in a spring-like cylindrical body formed by winding a linear member with a gap as described in claim 1. A surface treatment jig for performing surface treatment, and at least one end portion of the cylindrical body is provided with a spring body in which an end surface on the inner side of the cylindrical body is formed in a spiral surface. The other end is opened, and after the object to be processed is accommodated therefrom, a spring body in which at least the end face on the inner side of the cylindrical body is formed in a spiral surface is provided. It is characterized by being sealed by fitting as a lid.
Further, the jig according to claim 2 is the jig according to claim 1, wherein the lower frame that fixes the lower end portion of the cylindrical body that is open at the upper end portion and the upper end portion of the spring body as the lid body are provided. The fixed upper frame is placed opposite to each other by joining the fixed columns to each other, allowing the upper frame to move up and down relative to the lower frame, and moving the upper frame downward to open the upper frame. A spring body as a lid body is fitted in a state in which the upper end portion of the cylindrical body is pressed.
According to a third aspect of the present invention, there is provided the jig according to the second aspect, wherein a plurality of cylindrical bodies and a plurality of spring bodies as lids are respectively fixed to the lower frame and the upper frame.
Moreover, the surface treatment method of the to-be-processed object of this invention is carried out by accommodating a to-be-processed object in the jig for surface treatment in any one of Claims 1 thru | or 3 as described in Claim 4. To do.
The surface treatment method according to claim 5 is the surface treatment method according to claim 4, wherein the surface treatment is vapor deposition film formation.
In addition, as described in claim 6, the vapor deposition coating film forming apparatus of the present invention has any one of claims 1 to 3 on the outer side in the circumferential direction of the rotation axis of the support member that is rotatable about the rotation axis in the horizontal direction. The vacuum processing chamber is provided with a vapor deposition unit on which the surface treatment jig described above is supported in a freely revolving manner.

  If the surface treatment jig of the present invention is used, the spring body that functions as a cushion member is located at both ends of the tubular body. When forming a metal vapor deposition film on the surface of the object to be processed accommodated in the body, the impact applied to the object to be processed can be reduced. Accordingly, it is possible to effectively prevent the metal film deposited on the surface of the object to be processed from being damaged or the object to be processed itself from being cracked or chipped. In addition, since the object to be processed can be taken in and out from the open end of the cylindrical body, the operation is easy.

It is a perspective view of one embodiment of the jig for surface treatment of the present invention. It is AA sectional drawing in FIG. It is the schematic of the accommodation method of the to-be-processed object in the cylindrical body of the jig for surface treatment of FIG. It is a front view of the other embodiment of the jig for surface treatment of the present invention. FIG. It is a typical front view of one embodiment of the vapor deposition unit using the jig for surface treatment of FIG. FIG. 7 is a schematic left side view of the vapor deposition unit in FIG. 6 (only a relationship among a fixed gear, a small gear, and a bearing is illustrated). It is the left side schematic of the inside of the vacuum processing chamber of one embodiment of the vapor deposition film forming apparatus provided with the vapor deposition unit of FIG. It is the elements on larger scale of another embodiment of the jig for surface treatment of the present invention. It is a front view of the spring-shaped cylindrical body which wound the spring for prevention of a tangle around a linear member.

The surface treatment jig of the present invention is a surface treatment jig for performing a surface treatment by accommodating an object to be processed in a spring-like cylindrical body formed by winding a linear member with a gap. One end of the cylindrical body is sealed by a spring body in which at least an end surface on the inner side of the cylindrical body is formed in a spiral surface, and the other end is opened. Then, after accommodating the object to be processed from there, at least the end face on the inner side of the cylindrical body is sealed by fitting a spring body formed in a spiral surface as a lid. It is characterized by.
Hereinafter, although the jig for surface treatment of the present invention (when used for forming a metal vapor deposition film on the surface of an object to be processed) will be described with reference to the drawings, the present invention is limited to the following description. It is not a thing.

  FIG. 1 is a perspective view of one embodiment of the surface treatment jig of the present invention. 2 is a cross-sectional view taken along line AA in FIG. This surface treatment jig 1 has two spring-like cylindrical bodies 2 formed by winding a linear member made of stainless steel (SUS304) having a wire diameter of 2 mm with a gap as a main constituent element. . The linear member is wound in a left-handed manner at a pitch interval of about 9 mm, but both ends are tightly wound about 3 turns without a gap. The upper end portion of the cylindrical body 2 is open, whereas the lower end portion has a spiral surface on the end surface. Inside the lower end portion of the cylindrical body 2, a spring body 3 for sealing the lower end portion of the cylindrical body 2 and having both end surfaces formed in a spiral surface is disposed. Both the lower end surface of the cylindrical body 2 and the lower end surface of the spring body 3 are fixed to the frame-like lower frame 5 with one screw. A frame-like upper frame 6 opposed to the frame-like lower frame 5 is fitted as a lid to the upper end of the open cylindrical body 2 to seal the upper end of the cylindrical body 2. The upper end surface of the spring body 4 whose both end surfaces are formed in a spiral surface is fixed with one screw. The lower end surface of the cylindrical body 2 and the spiral surfaces on both end surfaces of the spring body 3 and the spring body 4 are formed with a gap between them, to the surface of the object to be treated of the evaporated metal deposition material from the end surface direction. Is not disturbed. The spring body 3 and the spring body 4 function as a lower cushion member and an upper cushion member inside the cylindrical body 2, respectively, and alleviate the impact applied to the workpiece accommodated in the cylindrical body 2. Two struts 7 are fixed to the frame-like lower frame 5 so as to face each other, and two struts 8 are fixed to the frame-like upper frame 6 so as to face each other. Thus, the surface treatment jig 1 is configured. The support column 7 and the support column 8 are joined by a vertical hole 9 provided in the support column 8 and a stopper projection 10 protruding into the long hole 9 provided in the support column 7. The frame-like upper frame 6 can be moved up and down with respect to the frame-like lower frame 5 by moving the column 8 up and down, and the column-like lower frame 5 can be moved sideways with the stopper projection 10 as a fulcrum. The frame-like upper frame 6 can be turned over.

  FIG. 3 is a schematic view of a method for accommodating an object to be processed in the cylindrical body 2 of the surface treatment jig 1. First, the support 8 fixed to the frame-like upper frame 6 is moved up with respect to the support 7 to move the frame-like upper frame 6 up with respect to the frame-like lower frame 5, and then the stopper projection 10 is used as a fulcrum. The frame-like upper frame 6 is caused to lie sideways with respect to the frame-like lower frame 5 by laying down the support column 8 so that the workpieces are accommodated one by one from the upper end of the open cylindrical body 2. (A). Next, after the frame-like upper frame 6 is erected (b) and then moved downward, the upper end portion of the cylindrical body 2 in which the spring body 4 as a lid fixed to the frame-like upper frame 6 is opened. To fit. When the frame-like upper frame 6 is further moved downward, the upper end of the cylindrical body 2 opened by the frame-like upper frame 6 is pressed. In this state, the pin 11 attached to the column 8 and the column 11 are attached to the column 7. When the hook 12 is hooked, the pin 11 and the hook 12 are securely hooked by the restoring force of the cylindrical body 2, and the upper end of the cylindrical body 2 that is open is opened by the spring body 4 as a lid. Sealed tightly (c) (the object to be processed is omitted in b and c). Since the cylindrical body 2 in the state where the workpiece has been accommodated and set has been compressed in this way, there is an advantage that the deformation of the cylindrical body 2 due to strain and deflection is small. If the surface treatment jig 1 in which the object to be processed is accommodated in the cylindrical body 2 is accommodated in the cylindrical barrel of the vapor deposition film forming apparatus and processed, the gap between the linear member of the cylindrical body 2 and the linear member is obtained. The evaporated metal deposition material reaches the surface of the workpiece to form a deposited metal film, but the spring body 3 and the spring body 4 that function as cushion members are located at both ends of the cylindrical body 2. Therefore, in combination with the spring property of the spring-like cylindrical body 2, the impact applied to the object to be processed can be reduced. Accordingly, it is possible to effectively prevent the metal film deposited on the surface of the object to be processed from being damaged or the object to be processed itself from being cracked or chipped. When taking out the object to be processed from the cylindrical body 2, the above operations may be performed in the reverse order. Since the workpiece can be taken in and out from the open end of the cylindrical body 2, the work is easy.

  Since the surface treatment jig 1 fixes the cylindrical body 2 to the frame-like lower frame 5 together with the spring body 3 with one screw, the lower end portion of the cylindrical body 2 has a spiral-shaped surface as an end surface. However, the cylindrical body 2 may have a lower end opened. In this case, the cylindrical body 2 may be fixed to the frame-like lower frame 5 separately from the spring body 3 using, for example, a stopper.

  FIG. 4 is a front view of another embodiment of the surface treatment jig of the present invention. FIG. 5 is a partially enlarged plan view thereof. The surface treatment jig 21 includes six spring-like cylindrical bodies 22 formed by winding a linear member with a gap therebetween as a main component. The upper end portion of the cylindrical body 22 is open, whereas the lower end portion has a spiral surface on the end surface. Inside the lower end portion of the cylindrical body 22, a spring body 23 for sealing the lower end portion of the cylindrical body 22 and having both end faces formed in a spiral surface is disposed. Both the lower end surface of the cylindrical body 22 and the lower end surface of the spring body 23 are fixed to the rod-like lower frame 25 with one screw in one row. Both ends of the rod-like upper frame 26 opposed to the rod-like lower frame 25 seal the upper end portion of the cylindrical body 22 by fitting the upper end portion of the open cylindrical body 22 as a lid. The upper end surface of the spring body 24 formed on the spiral surface is fixed with one screw. Two struts 27 are fixed to the bar-shaped lower frame 25 so as to face each other, and two struts 28 are fixed to the bar-shaped upper frame 26 so as to face each other. Thus, the surface treatment jig 21 is configured. The joining mode of the support columns 27 and the support columns 28 and the method of accommodating the object to be processed in the cylindrical body 22 are the same as those in the surface treatment jig 1 (FIG. In this case, the set is completed, but the workpiece is omitted).

  Japanese Patent No. 4560971 discloses a vapor deposition provided with a cylindrical barrel having a porous peripheral surface for accommodating an evaporation portion of a vapor deposition material and an object to be vapor deposited on the surface thereof in a vacuum processing chamber. A film forming apparatus, in which a cylindrical barrel having a support shaft is rotatably supported by a support shaft on the outer side in the circumferential direction of the rotation axis of a support member that is rotatable about a horizontal rotation axis. There is described a vapor deposition film forming apparatus that includes a unit and that allows the distance between a cylindrical barrel that revolves around the rotation axis of the support member and the evaporation section to be variable by rotating the support member. However, the surface treatment jig 21 can be used in place of the cylindrical barrel in the vapor deposition film forming apparatus. FIG. 6 is a schematic front view of an embodiment of the vapor deposition unit using the surface treatment jig 21 (the surface treatment jig 21 accommodates the object to be processed in the cylindrical body 22 and the setting is completed). The state is shown but the object to be processed is omitted). In this vapor deposition unit 30, six surface treatment jigs 21 are provided on a support shaft 29 (FIGS. 4, 5) on the outer side in the circumferential direction of the rotation axis of a support member 31 that is rotatable about a rotation axis in the horizontal direction. (See Fig. 6), so that a total of 12 jigs are supported (in Fig. 6, one jig is supported for each series). . In the vapor deposition unit 30, power is transmitted from the sprocket 32 to the drive ring 33, and the support member 31 rotates around the rotation axis, so that the surface treatment jig 21 revolves around the rotation axis of the support member 31. Is configured to do. The surface treatment jig 21 revolves around the rotation axis of the support member 31 and rotates at the same time by a small gear 36 meshing with a fixed gear 35 fixed to the base member 34 and a bearing 37. (Refer to FIG. 7: FIG. 6 is a schematic left side view of the vapor deposition unit 30 in FIG. 6 and shows only the relationship between the fixed gear 35, the small gear 36, and the bearing 37).

  FIG. 8 is a schematic left side view of the inside of the vacuum processing chamber of one embodiment of the vapor deposition film forming apparatus including the vapor deposition unit 30 (the vapor deposition unit 30 corresponds to FIG. 7). The vapor deposition film forming apparatus 38 has a vacuum processing chamber 39 connected to a vacuum exhaust system (not shown). Two vapor deposition units 30 are provided above the room. A plurality of boats 40, which are evaporation units for evaporating the vapor deposition material, are arranged on a boat support base 42 erected on a support table 41 below the room. Inside the support table 41, a wire 43 made of vapor deposition material is wound and held on a supply reel 44. The tip of the wire 43 of vapor deposition material is guided above the boat 40 by a heat-resistant protective tube 45 facing the inner surface of the boat 40. A cutout window 46 is provided in a part of the protective tube 45, and a feeding gear 47 provided corresponding to the cutout window 46 is in direct contact with the vapor deposition material wire 43. The vapor deposition material is continuously supplied into the boat 40 by being fed out. The surface treatment jig 21 revolves around the rotation axis of the support member 31 and rotates at the same time, so that metal deposition is performed on the surface of the workpiece accommodated in the cylindrical body 22 of the surface treatment jig 21. The coating is formed with excellent vapor deposition efficiency and high uniformity (the surface treatment jig 21 rotates with the boat 40 by restricting the movement of the object to be treated accommodated in the cylindrical body 22). This is particularly effective for forming a uniform metal deposition film when the relative positional relationship of the workpieces is fixed. Further, in the surface treatment jig 21, since each of the six cylindrical bodies 22 is fixed apart from each other, the cylindrical bodies do not collide with each other. It is possible to more effectively prevent the metal film deposited on the substrate from being damaged or the object to be processed itself from being cracked or chipped.

  FIG. 9 is a partially enlarged plan view of still another embodiment of the surface treatment jig of the present invention. The surface treatment jig 51 includes a plurality of spring-like cylindrical bodies 52 formed by winding a linear member with a gap therebetween as a main component. The upper end portion of the cylindrical body 52 is open, whereas the lower end portion has a spiral surface on the end surface. Inside the lower end portion of the cylindrical body 52, a spring body (not shown) having both end faces formed in a spiral surface for sealing the lower end portion of the cylindrical body 52 is disposed. Both the lower end surface of the cylindrical body 52 and the lower end surface of the unillustrated spring body are fixed in two rows to the unillustrated frame-like lower frame with one screw. A frame-like upper frame 56 facing a frame-like lower frame (not shown) is fitted as a lid to the upper end portion of the open cylindrical body 52 to seal the upper end portion of the cylindrical body 52. The upper end surface of the spring body 54 having both end surfaces formed in a spiral surface is fixed with a single screw. A pedestal 58 for upstanding three rod-shaped members 57 is attached to the vicinity of the outer periphery of the cylindrical body 52 on the frame-like lower frame (not shown), and the rod-shaped member 57 is made to stand upright near the outer periphery of the cylindrical body 52. Thus, when the workpiece is taken in and out from the upper end portion of the opened cylindrical body 52, the cylindrical body 52 in an upright state is deformed or bent, and the adjacent cylindrical body is deformed. 52 is prevented from being entangled with 52. Other configurations of the surface treatment jig 51 and a method for accommodating the object to be processed in the cylindrical body 52 are the same as those in the surface treatment jig 1. As shown in FIG. 10, the tangling prevention spring 59 is wound around the linear member constituting the spring-like cylindrical body 52, so that the linear member and the linear member constituting the cylindrical body 52 are wound. You may make it prevent the to-be-processed object accommodated in the cylindrical body 52 becoming entangled in the clearance gap between members.

  The above explanation is for the case where the surface treatment jig of the present invention is used for forming a metal vapor deposition film on the surface of the object to be treated. It is not limited.

  The present invention relates to a jig for surface treatment that accommodates and uses an object to be processed when forming a metal vapor deposition film on the surface of the object to be processed, such as a rare earth permanent magnet, and deposits on the surface of the object to be processed. To provide a surface treatment jig that can effectively prevent the formed metal film from being damaged or that the object to be processed itself is cracked or chipped, and that allows the object to be processed to be taken in and out easily. It has industrial applicability in terms of what it can do.

1, 21, 51 Surface treatment jig 2, 22, 52 Cylindrical body 3, 23 Spring body 4, 24, 54 Spring body (lid body)
5 Frame-shaped lower frame 6, 56 Frame-shaped upper frame 7, 27 Column 8, 28 Column 9 Long hole 10 Stopper projection 11 Pin 12 Hook 25 Rod-shaped lower frame 26 Rod-shaped upper frame 29 Support shaft 30 Vapor deposition unit 31 Support member 32 Sprocket 33 Drive ring 34 Base member 35 Fixed gear 36 Small gear 37 Bearing 38 Vapor deposition coating device 39 Vacuum processing chamber 40 Boat 41 Support table 42 Boat support base 43 Wire for vapor deposition material 44 Feed reel 45 Protection tube 46 Cutout window 47 Feed gear 57 Bar-shaped member 58 Base 59 Spring for preventing entanglement

Claims (6)

  A surface treatment jig for carrying out a surface treatment by accommodating an object to be processed in a spring-like tubular body formed by winding a linear member with a gap, and one end of the tubular body Is sealed by a spring body in which at least the end face on the inner side of the cylindrical body is formed in a spiral surface, and the other end is open, from which the object to be processed is placed. A jig characterized in that after being accommodated, at least an end face on the inner side of the cylindrical body is sealed by fitting a spring body formed in a spiral surface as a lid.   The lower frame that fixes the lower end of the cylindrical body with the upper end open and the upper frame that fixes the upper end of the spring body as a lid are placed opposite each other by joining the fixed struts to each other. The upper frame can be moved up and down with respect to the lower frame, and the upper frame is moved downward to fit the spring body as a lid while pressing the upper end of the cylindrical body that the upper frame opens. The jig according to claim 1, wherein the jig is configured as described above.   3. A jig according to claim 2, wherein a plurality of cylindrical bodies and a plurality of spring bodies as lids are fixed to the lower frame and the upper frame, respectively.   A surface treatment method for an object to be processed, which is performed by accommodating the object to be processed in the surface treatment jig according to claim 1.   The surface treatment method according to claim 4, wherein the surface treatment is vapor deposition film formation.   A vapor deposition unit in which the surface treatment jig according to any one of claims 1 to 3 is supported so as to be revolved outwardly in a circumferential direction of a rotation axis of a support member that is rotatable about a horizontal rotation axis. Is provided in a vacuum processing chamber.

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