JP2013148490A - Detector, safety device, robot device, and method of adjusting detector - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a detector for facilitating optical axis adjustment for reliably directing the optical axis of a plurality of detection beams to one light receiving device, a safety device that reliably detects entry of an object by use of the detector to improve safety of the device, and a robot device that includes the safety device and protects people from a person entering a safe area or operation of the robot beyond the safe area.SOLUTION: The detector includes a light source part, a reflection part having a reflection surface for reflecting light emitted from the light source part, an imaging part for imaging the reflection light from the reflection surface; and an image processing part that forms an image of the reflection light from an image signal from the imaging part to calculate the pixel area of the image or the amount of light. The reflection part includes one or more concave reflection surfaces and one or more convex reflection surfaces. A drive device includes the concave reflection surfaces and the convex reflection surfaces arranged on the reflection surface.

Description

  The present invention relates to a detection device, a safety device, a robot device, and a detection device adjustment method.

  Conventionally, an infrared detection device is generally known as a device for detecting an object entering a space. In this infrared detecting device, when an infrared emitting device and an infrared receiving device are paired, and infrared rays received and emitted between both devices are blocked by an object, an infrared blocking signal is sent from the infrared receiving device, For example, predetermined operations such as issuing an alarm and emergency stop of the apparatus are executed. However, in such a device, since the detection light emitting device and the light receiving device are a pair, a plurality of emitting devices and a pair of light receiving devices are required to detect the entry of an object over a wide range. This was a factor in increasing the size and cost of the equipment.

  Therefore, as a method and device for detecting the entry of an object with a smaller number of light receiving devices with respect to a plurality of emitting devices, for example, as in Patent Document 1, radiated light from LEDs that are a plurality of light sources is detected by a detecting device. By concentrating on an image pickup means and detecting the object shape between the LED and the image pickup means, the object shape, that is, the intrusion of the object is detected even if the LED of the light source and the image pickup means of the detection device are not configured as a pair. It has been proposed that it will be possible.

Japanese Patent Application Laid-Open No. 11-241917

  In the above-mentioned patent document 1, in order to concentrate the radiated light from the LED on the imaging unit, the LED group is installed toward the imaging unit. However, in order to concentrate the radiated light on the image pickup means with certainty, the LED group must be accurately installed, and there is a problem that it takes a lot of time for the adjustment. In addition, as the time elapses, for example, when the position of the LED group is shifted due to vibrations of the installed device, the installation position of the LED group must be readjusted, resulting in a problem of lowering productivity. It was.

  Therefore, a detection device that facilitates optical axis adjustment for reliably directing the optical axes of a plurality of detection light beams to a single light receiving device, and the safety of the device by reliably detecting object intrusion using the detection device Provided is a safety device that enhances safety, and a robot device that includes the safety device and that can ensure human safety against intrusion of a person into the safety area or operation beyond the safety area of the robot .

  The present invention can be realized as the following forms or application examples so as to solve at least one of the above-described problems.

  Application Example 1 A detection apparatus according to this application example includes a light source unit, a reflection unit including a reflection surface that reflects light emitted from the light source unit, an imaging unit that images reflected light from the reflection surface, An image processing unit that forms an image of the reflected light from an image signal from the imaging unit and calculates a pixel area or a light amount of the image, the reflecting unit including one or more concave-shaped reflecting surfaces, and one or more And a drive device in which the reflection surface is the concave reflection surface or the convex reflection surface.

  According to the detection device of this application example, by providing the concave reflection surface capable of forming a large reflected light image, a change in the amount of emitted light blocked by the detected object and a change in the image area are substantially reduced. Will be expanded. Therefore, a detection device with high detection sensitivity can be obtained. In addition, by providing a convex reflection surface that can capture a wide area as a field of view, when installing the light source unit, reflection unit, and imaging unit of the detection device, even if the arrangement position is not strictly regulated, the convex surface A wide area including the light source unit can be imaged from the imaging unit through the shape reflection surface. In other words, the light emitted from the light source unit can be easily directed to the image pickup unit by the concave reflecting surface, and the image formation of the reflected light can be reliably formed. By simply driving the reflector so that the formed image is formed at the center of the reflecting surface, the reflected light image for detection by the concave reflecting surface can be formed within the image area of the concave reflecting surface. Can be adjusted.

  Application Example 2 In the application example described above, the reflecting section includes a plurality of concave reflection surfaces, and the plurality of concave reflection surfaces have different focal lengths.

  According to the application example described above, it is possible to obtain a detection device with high detection sensitivity by selecting a concave reflection surface that makes the reflected light image larger in the reflection surface image region.

  Application Example 3 In the application example described above, the light source unit includes a plurality of light emitting units arranged linearly.

  According to the application example described above, the detection area can be widened. Furthermore, in the reflection surface position adjustment of the reflection part using the concave reflection surface, the center of the reflected light image can be easily identified from the linear arrangement of the light emitting part, and the center of the reflection light image and the center of the concave reflection surface Can be accurately calculated. Therefore, it is possible to obtain a detection device that can accurately adjust the position of the reflecting surface.

  Application Example 4 The safety device according to this application example includes the detection device according to the application example described above, and a determination unit that determines the presence or absence of an object on the emission optical path from the pixel area or the light amount calculated by the image processing unit. And a control unit that controls driving of the apparatus according to a determination result of the determination unit.

  According to the safety device of this application example, by using a detection device with high detection sensitivity, it is possible to reliably detect the entry of an object, particularly a human body, into the dangerous area into the mechanical device, and to instruct the mechanical device to perform a danger avoidance operation. A safety device can be obtained.

  Application Example 5 A robot apparatus according to this application example includes the safety device shown in the application example described above.

  According to the robot apparatus of this application example, the robot can surely execute the danger avoidance operation by the safety device that reliably detects the intrusion of an object, particularly a human body, into the robot operation area as the danger area. Further, even when a runaway operation that exceeds a predetermined operation region occurs due to a failure of the robot, it is possible to reliably detect the operation of the robot and execute an emergency treatment operation such as an emergency stop.

  [Application Example 6] In the adjustment method of the detection apparatus according to this application example, the reflection surface of the reflection unit is a convex reflection surface, and the convex reflection surface image acquisition step of acquiring the convex reflection surface image of the convex reflection surface by the imaging unit A convex reflected light image acquisition step of acquiring a reflected light image of the reflected light obtained by reflecting the emitted light from the light source unit by the convex reflecting surface, the center of the convex reflective surface image, An image center-to-center distance calculation step for calculating the center-to-center distance between the centers of the convex reflected light images, a comparison step for comparing the center-to-center distance between the two images, and a center-to-center distance threshold value; and When the comparison result indicates that the distance between the image centers is within the image center distance threshold, the reflection surface switching step in which the reflection surface is a concave reflection surface, and the concave surface on which the concave reflection surface is reflected by the imaging unit Concave reflection to obtain reflected light image Characterized in that it comprises an image acquisition step.

  According to the adjustment method of the detection device of this application example, when the light source unit, the reflection unit, and the imaging unit of the detection device are installed by providing a convex reflection surface that can capture a wide area as a field of view, Even if the arrangement position is not strictly regulated, it is possible to image a wide area including the light source unit from the imaging unit via the convex reflection surface. In other words, the light emitted from the light source unit can be easily directed to the image pickup unit by the concave reflecting surface, and the image formation of the reflected light can be reliably formed. By simply driving the reflector so that the formed image is formed at the center of the reflecting surface, the reflected light image for detection by the concave reflecting surface can be formed within the image area of the concave reflecting surface. Can be adjusted.

  Application Example 7 In the application example described above, the reflection unit includes a plurality of the concave reflection surfaces having different focal lengths, and the concave reflection image acquisition step includes the step of reflecting the concave reflection light image into the concave reflection surface. A determination step for determining whether the concave reflection surface image is formed within the image area, and the determination result of the determination step determines that the concave reflection light image is formed beyond the image area A concave reflecting surface switching step of switching to a concave reflecting surface having a focal length longer than that of the concave reflecting surface.

  According to the application example described above, it is possible to obtain a detection device with high detection sensitivity by selecting a concave reflection surface that makes the reflected light image larger in the reflection surface image region.

The detection apparatus which concerns on 1st Embodiment is shown, (a) is an external view, (b) is a front view of the arrow A direction shown to (a). The reflective part of the detection apparatus which concerns on 1st Embodiment is shown, (a) is sectional drawing of the BB 'part shown to FIG.1 (b), (b) is the sectional view of the CC' part shown to (a). Figure. The image figure explaining the captured image in the detection apparatus which concerns on 1st Embodiment. Sectional drawing which shows the other form of the reflection part of the detection apparatus which concerns on 1st Embodiment. The block block diagram of the detection apparatus explaining the adjustment method of the detection apparatus which concerns on 2nd Embodiment. The flowchart which shows the adjustment method of the detection apparatus which concerns on 2nd Embodiment. The flowchart which shows the adjustment method of the detection apparatus which concerns on 2nd Embodiment. The image figure explaining the image in the adjustment method of the detection apparatus which concerns on 2nd Embodiment. The image figure explaining the image in the adjustment method of the detection apparatus which concerns on 2nd Embodiment. The image figure explaining the image in the adjustment method of the detection apparatus which concerns on 2nd Embodiment. The external view of the robot apparatus which concerns on 3rd Embodiment. The image figure explaining the detection image in the robot apparatus which concerns on 3rd Embodiment.

  Embodiments according to the present invention will be described below with reference to the drawings.

(First embodiment)
1A and 1B show a detection device according to a first embodiment, in which FIG. 1A is a schematic external view, and FIG. 1B is an arrow view in the A direction shown in FIG. As illustrated in FIG. 1A, the detection device 100 forms an image from a light source unit 10, a reflection unit 40, an imaging device 50 as an imaging unit, and an image signal acquired by the imaging device 50 and performs various calculations. And an image processing device 60 to be executed. The light source unit 10 includes a plurality of LEDs 12 serving as light sources, and the LEDs 12 are mounted on the LED holding unit 11. A control current from a control device (not shown) is input to the LED holding unit 11, current is supplied to the LED 12 through a wiring formed on the mounting board on which the LED 12 is mounted, and the LED 12 is lit.

  The reflection unit 40 is a columnar reflector 20 having a plurality of reflection surfaces 20a, 20b, 20c, 20d, 20e, and 20f, a drive unit 32 that rotationally drives the reflector 20, and an actuator (not shown) provided in the drive unit 32. A driving device 30 including a rotating shaft 31 coupled to the reflector 20 at a columnar center portion of the reflector 20 is provided. The reflecting surfaces 20a, 20b, 20c, 20d, 20e and 20f will be described in detail later, but the concave reflecting surfaces 20a, 20b and 20c having different curvatures, the convex reflecting surfaces 20e and 20f having different curvatures, the planar reflecting surface 20d, It is.

  In the imaging device 50, the light R emitted from the LED 12 of the light source unit 10 is reflected by the reflecting surface 20 a, 20 b, 20 c, 20 d, 20 e, 20 f of the reflecting unit 40 to the light receiving unit 50 a. The light is received and imaged on a CCD (Charge Coupled Device) sensor provided inside the imaging device 50 (not shown), and an image is formed in the image processing device 60 as an image processing unit. Data of the formed image is sent to the control device 70, and a drive control signal for the drive unit 32 is generated in the control device 70.

  As shown in FIG. 1 (b), which is an arrow view from the direction A shown in FIG. 1 (a), the detection device 100 has a plurality of LEDs 12 linearly arranged in the vertical direction on the drawing sheet. ing. And the reflection part 40 is arrange | positioned so that the reflective surfaces 20a, 20b, 20c, 20d, 20e, and 20f may be located in the place of the distance L1 from LED12 of the light source part 10. FIG. Furthermore, the imaging device 50 is arranged so that the light receiving unit 50a is located at a distance L2 from the reflecting surfaces 20a, 20b, 20c, 20d, 20e, and 20f. Thus, by disposing the reflection unit 40 between the light source unit 10 and the imaging device 50, the detection device 100 can be installed in a small installation range while ensuring the optical path between the emitted light R from the LED 12 and the reflected light Rr. It becomes possible to do.

  On the other hand, for example, when the imaging device 50 is provided at the position of the reflection unit 40, that is, at a distance L1 from the LED 12, the optical lens system (not shown) provided in the light receiving unit 50a is configured by a so-called wide-angle lens group. Therefore, the image pickup apparatus 50 includes an expensive lens group. However, in the detection apparatus 100 according to the present embodiment, since the optical path length can be substantially formed with a length of (L1 + L2), an image of the light source unit 10 can be acquired without using a wide-angle lens group. The cost increase of the detection apparatus 100 can be suppressed.

  FIG. 2 illustrates details of the reflecting surfaces 20a, 20b, 20c, 20d, 20e, and 20f included in the reflecting portion 40, (a) is a cross-sectional view taken along the line BB 'shown in FIG. 1 (b), and (b). FIG. 3 is a cross-sectional view taken along the line CC ′ shown in FIG. As shown in FIG. 2A, the reflector 20 provided in the reflecting unit 40 includes a plurality of reflecting surfaces 20a, 20b, 20c, 20d, 20e, and 20f. In this example, the reflecting surfaces 20a, 20b, and 20c are concave reflecting surfaces, and the reflecting surfaces 20e and 20f are convex reflecting surfaces. The reflection surface 20d is formed as a planar reflection surface. The reflector 20 is formed by attaching a mirror having the shape of the reflecting surfaces 20a, 20b, 20c, 20d, 20e, and 20f to the frame, or formed of metal or plastic, and the reflecting surfaces 20a, 20b, 20c, 20d, The integrated reflector 20 in which a reflective material is formed on the surfaces of the portions 20e and 20f may be used.

The reflective surfaces 20a, 20b, 20c, 20d, 20e, and 20f have curved surfaces with different curvatures. In the case of the detection device 100 according to the present embodiment shown in FIG. The curvature of the reflecting surfaces 20a, 20b, and 20c having a flat surface, that is, a curvature of 0 and having a concave shape, is
(Curvature of reflective surface 20c) <(curvature of reflective surface 20b) <(curvature of reflective surface 20a)
Therefore, the curvature of the reflecting surface 20a is the largest. When this relationship is expressed by the focal lengths of the reflecting surfaces 20a, 20b, and 20c,
(Focal length of reflective surface 20c)> (focal length of reflective surface 20b)> (focal length of reflective surface 20a)
Thus, the reflecting surface 20a has a reflecting surface shape having a concave shape with the shortest focal length.

Further, in the convex reflecting surfaces 20e and 20f, the curvature is
(Curvature of reflecting surface 20e) <(curvature of reflecting surface 20f)
Therefore, the curvature of the reflecting surface 20f is the largest. When this relationship is expressed by the focal length of the reflecting surfaces 20e and 20f,
(Focal length of reflecting surface 20e)> (focal length of reflecting surface 20f)
Thus, the reflecting surface 20f has a reflecting surface shape having a convex shape with the shortest focal length.

  The reflection unit 40 includes a drive unit 32 that rotationally drives the reflector 20. The drive unit 32 includes an actuator 32b serving as a drive source including an encoder or the like that detects a rotation angle (not shown), and a reduction device 32c that reduces the rotational drive speed of the actuator 32b, inside the drive base 32a. By rotating the rotating shaft 31 connected to 32c, the reflector 20 can be driven to rotate at a predetermined angle. The rotation angle or stop position of the reflector 20 is controlled by the calculation result of a calculation unit (not shown) provided in the image processing device 60. Note that the arithmetic unit may be provided not in the image processing device 60 but in an external control device (not shown).

  Images of the LEDs 12 of the light source unit 10 reflected by the reflecting surfaces 20a, 20b, 20c, 20d, 20e, and 20f are obtained as shown in FIG. FIG. 3A is a reflected image obtained by the planar reflecting surface 20d. FIG. 3B is a reflected image obtained by the convex reflecting surfaces 20e and 20f. FIG. 3C is a reflected image obtained by the concave reflecting surfaces 20a, 20b, and 20c. In addition, LED12 shows the case where it has a circular light emission shape.

As shown in FIG. 3A, the imaging device 50 receives the circular image, which is the light emission shape of the LED 12, from the light emitted from the LED 12 reflected by the planar reflecting surface 20d, and forms an image. Assuming that the diameter of the formed circular image is Pd, the light emitted from the LED 12 reflected by the convex reflecting surfaces 20e and 20f shown in FIG. 3B follows the curved shape of the reflecting surfaces 20e and 20f. Reduce the width of the image,
Pd>Pe> Pf
The relationship is shown. That is, on the convex reflecting surface, the reflected light of the LED 12 on the reflecting surface 20f having a larger curvature is formed into an elliptical image having a narrower width along the curved surface shape.

The reflected light of the LED 12 reflected by the concave reflecting surfaces 20a, 20b, and 20c shown in FIG. 3 (c) increases the width of the image along the reflecting surfaces 20a, 20b, and 20c.
Pd <Pc <Pb <Pa
The relationship is shown. That is, on the concave reflecting surface, the reflected light of the LED 12 on the reflecting surface 20a having a larger curvature is formed into a wider elliptical image along the curved surface shape. In the detection apparatus 100 according to the present embodiment, the features of the reflected light image reflected by the concave surface and the convex reflection surface described above are used to facilitate installation and adjustment of the detection apparatus 100 described later. .

  In addition, the reflector 20 is not limited to the structure which combines several reflective surface 20a, 20b, 20c, 20d, 20e, 20f mentioned above. For example, the reflecting surface 21a that is elastically deformed as shown in FIG. 4A is driven by the feeding means 21c connected to the driving device 21b to drive the substantially central portion of the reflecting surface 21a, thereby forming the concave shape 21d or the convex shape 21e. Alternatively, the reflector 21 may be formed selectively. Further, the feeding means 21c is not the mechanical means shown in this example, but may be a reflector 22 in the shape of a sealed container including the reflecting surface 22a, and the internal pressure of the reflector 22 is reduced by a liquid or gas. Thus, the reflective surface 22a can be selectively formed in the convex shape 22c by bringing the concave shape 22b into a pressurized state.

(Second Embodiment)
FIG. 5 is a control block diagram of the detection apparatus 100 according to the first embodiment. As shown in FIG. 5, in the detection device 100, the control device 70 obtains angle information from an encoder (not shown) of the actuator 32 b provided in the reflection unit 40 and calculates the angular position of the reflector 20. In this case, for example, a mark serving as a reference for the position and direction when the detection apparatus 100 is installed is formed on the reflecting portion 40, and the relative angular position of the reflector 20 with respect to the reference mark is calculated, thereby reflecting the reflecting surfaces 20a and 20b. , 20c, 20d, 20e, and 20f can be determined with respect to the reference position.

  An adjustment method when installing the detection apparatus 100 including the control block shown in FIG. 5 will be described based on the flowcharts shown in FIGS. 6 and 7. As shown in FIG. 1, the adjustment method for installing the detection device 100 according to the present embodiment is performed on the reflection unit 40 in a state where the light source unit 10, the reflection unit 40, and the imaging device 50 are arranged in advance at predetermined positions. This is a so-called fine adjustment method in which a desired detection image can be formed on the imaging device 50 by rotationally driving the reflector 20 provided. In addition, about the reflective surfaces 20a, 20b, 20c, 20d, 20e, and 20f described above, the reflective surface 20f having the convex shape with the largest curvature is smaller in curvature than the first convex reflective surface 20f and the first convex reflective surface 20f. The reflecting surface 20e having a convex shape is referred to as a second convex reflecting surface 20e. Further, the reflecting surface 20c having the concave shape with the smallest curvature is the first concave reflecting surface 20c, the reflecting surface 20b having the concave shape having a larger curvature than the first concave reflecting surface 20c is the second concave reflecting surface 20b, and the second concave reflecting surface. The reflecting surface 20a having a concave shape having a larger curvature than the surface 20b is referred to as a third concave reflecting surface 20a. The reflection surface 20d having a curvature of 0, that is, a planar shape is hereinafter referred to as a planar reflection surface 20d.

  As described above, first, as illustrated in FIG. 1, the detection apparatus 100 according to the first embodiment has the light source unit 10, the reflection unit 40, and the imaging device 50 arranged at predetermined installation positions according to the second embodiment. The adjustment method of the detection apparatus 100 is implemented.

[Reflecting surface first confirmation process]
Of the reflective surfaces 20a, 20b, 20c, 20d, 20e, and 20f provided in the reflector 20 of the installed reflective unit 40, the reflective surface that reflects the emitted light of the LED 12 of the light source unit 10 to the imaging device 50 is first convex. A reflective surface first confirmation step (S101) for confirming whether the reflective surface is 20f is executed. In the reflection surface first confirmation step (S101), the angle position detection means of the reflector 20 provided in the reflection unit 40, for example, an encoder, from the detection signal of the encoder at the predetermined arrangement position of the detection device 100, the control device 70 from the LED 12 It is possible to confirm which of the reflecting surfaces 20a, 20b, 20c, 20d, 20e, and 20f is the reflecting surface that is disposed at a position where the emitted light is reflected to the imaging device 50. Thereby, it is confirmed whether or not the first convex reflection surface 20f is arranged at a position where the emitted light from the LED 12 is reflected to the imaging device 50 (hereinafter referred to as a reference position).

[Reflective surface alignment process]
In the first reflection surface confirmation step (S101), when the first convex reflection surface is arranged at the reference position (YES), the process proceeds to the next reflection surface first imaging step (S102). However, when the first convex reflection surface is not arranged at the reference position (NO), the reflection surface alignment step (S111) is executed until the first convex reflection surface is arranged at the reference position. In the reflection surface alignment step (S111), the reflector 20 is rotated by the driving device 30 provided in the reflection unit 40 until the first convex reflection surface 20f is arranged at the reference position. In this case, the reflector 20 of the detection apparatus 100 according to the first embodiment has a configuration in which the six reflecting surfaces are arranged substantially evenly in the rotation direction of the reflector 20, so that the reflection surface alignment is performed at 60 ° once. It may be driven to rotate and repeated a plurality of times, or the rotation angle to the first convex reflection surface 20f may be rotated at a time.

[Reflecting surface first imaging step]
In the first reflection surface confirmation step (S101), if YES, that is, if it is confirmed that the first convex reflection surface 20f is arranged at the reference position, the reflection surface first imaging step (S102) is executed. In the reflection surface first imaging step (S102), the imaging device 50 images the first convex reflection surface 20f, sends image data to the image processing device 60, and the image forming unit 60a forms a shape image of the first convex reflection surface 20f. Is formed. Fig.8 (a) is an image figure of the shape image of the formed 1st convex reflective surface 20f. In the image area P0 representing the imaging area of the imaging device 50 as shown in FIG. 8 (a), the reflective surface image P ₁₁ is a shape image of the first convex reflecting surface 20f is formed. A reflection surface image P ₁₁ having the shape of the first convex reflection surface 20f is formed, and the process proceeds to the first calculation process of the reflection surface image center position.

[Reflecting surface image center position first calculation step]
In the reflection surface image center position first calculation step (S103), since the image of the reflected light of linearly multiple LED12 in the Y direction is formed, X in the first convex reflecting surface 20f shape of the reflecting surface image P ₁₁ The graphic center position with respect to the direction is calculated in the image position calculation unit 60b. Reflective surface image center position first calculation step (S103) is the center C _p1 of the reflecting surface image P ₁₁ a step of calculating the position in the image region P0. As a method for calculating the center line, for example, pre-reflective surfaces 20a, 20b, formed 20c, 20d, 20e, a recognizable center line as an image on the surface of 20f, forming a center line image S on the reflecting surface image P ₁₁ Let The formed center line image S as the center C _p2 of the reflecting surface image P _11, calculates the position in the image area P0 of the center C _p2. Alternatively, the outer edges h1, h2, h3, and calculates the position of the center C _p1 of the reflecting surface images P ₁₁ from the position of the h4, or corner k1, k2, k3, the reflecting surface from k4 coordinates of the reflecting surface image P ₁₁ calculates the position of the center C _p1 of the image P _11, by a method such as calculating the position in the image area P0 of the center C _p1 or C _p2 of the reflecting surface image P _11, then moves to the first imaging step reflected light .

[First reflected light imaging process]
In the reflected light first imaging step (S104), the reflected light reflected by the first convex reflection surface 20f of the light emitted from the plurality of LEDs 12 included in the light source unit 10 is captured by the imaging device 50, and the image of the image processing device 60 is captured. A reflected light image is formed by the forming unit 60a. FIG. 8B is a partially enlarged view of an image of the reflected light reflected by the formed first convex reflection surface 20f. As shown in FIG. 8B, the plurality of reflected light images P _q1 of the light emitted from the plurality of LEDs 12 reflected by the first convex reflecting surface 20f having the largest curvature is the reflected light of the circular light emitted from the LEDs 12. _With respect to the image P _qc , the LED 12 arranged linearly in the Y direction is formed in an ellipse having a short axial length in the X direction intersecting the image arrangement direction. When the reflected light image P _q1 is formed, the process _proceeds to the reflected light image center first calculation step.

[Reflected light image center first calculation step]
In the reflected light image center first calculation step (S105), the position of the array center line C _q1 of the plurality of reflected light images P _q1 obtained in the reflected light first imaging step (S104) with respect to the image region P0 is calculated as an image position. It calculates in the part 60b. In the reflected light image center first calculation step (S105), for example, the average value of the position coordinate values in the X direction for each image region P0 of the pixels constituting the plurality of reflected light images P _q1 is obtained, and the position of the center line C _q1 Is calculated. Then, the process proceeds to the image center distance first calculation step.

[Image center distance first calculation step]
In the first image center distance calculation step (S106), the center C _p1 or C _p2 obtained in the above-described reflection surface image center first calculation step (S103) and reflected light image center first calculation step (S105), and the center The distance d1 with C _q1 is calculated. When the distance d1 is calculated, the process proceeds to the first distance determination step.

[First distance determination step]
In the first distance determining step (S107), whether or not the installation angle in the rotation direction of the reflector 20 is appropriate is determined using the distance d1 obtained in the first image center distance calculating step (S106) and the determination threshold value. The distance d _{q1 at} which the installation angle of the reflector 20 can be determined to be appropriate is compared and determined by the comparison unit 70b provided in the control device 70,
| D1 | ≦ | d _q1 |
That is, if it is YES, it will transfer to a reflective surface 2nd confirmation process. In addition,
| D1 |> | d _q1 |
That is, if it is NO, it will transfer to a reflector angle position adjustment process.

[Reflector angular position adjustment process]
In the first distance determination step (S107), NO, that is,
| D1 |> | d _q1 |
Is determined, the reflector angular position adjustment step (S121) is executed. In the reflector angle position adjusting step (S121), in the control unit 70a provided in the control device 70, when the difference d _q1 between the distances d _q1 and d1 in the comparison unit 70b is δ _q1 ,
δ _q1 = d1-d _q1
(D _q1 is calculated as a positive number, and d1 is calculated as, for example, a positive number in the X (+) direction and a negative number in the X (−) direction.)
As a comparison result, a drive signal of a predetermined rotation angle of the reflector 20 is sent to the actuator 32b in a direction corresponding to the sign and value of δ _q1 , and the actuator 32b is driven. After execution of the reflector angle position adjustment step (S121), the process proceeds to the reflection surface first imaging step (S102), and the appropriate rotation position after adjustment of the reflector 20 is confirmed.

[Reflecting surface second confirmation step]
In the first distance determination step (S107), YES, that is,
| D1 | ≦ | d _q1 |
If it is determined, the process proceeds to the reflection surface second confirmation step (S108) for confirming the reflection surface to be determined. In the reflection surface second confirmation step (S108), as in the reflection surface first confirmation step (S101), the reflection surface arranged at the reference position from the angle information from the encoder is the first convex reflection surface 20f, Alternatively, it is confirmed whether the second convex reflection surface 20e or the planar reflection surface 20d. In the adjustment method of the detection apparatus 100 according to the present embodiment, the first convex reflection surface 20f is arranged at the reference position at the beginning of the process by the reflection surface first confirmation step (S101) and the reflection surface alignment step (S111). However, there is a possibility that the first convex reflection surface 20f may deviate from the reference position due to an external factor during the adjustment process. Therefore, by incorporating the reflection surface second confirmation step (S108). It is possible to cope with process abnormality.

[Second convex reflection surface switching step]
When it is confirmed that the first convex reflection surface 20f is disposed at the reference position in the second reflection surface confirmation step (S108), the process proceeds to the second convex reflection surface switching step (S121). In the second convex reflection surface switching step (S121), the control unit 70a sends a command to the actuator 32b to rotate the reflector 20 to a predetermined rotation angle so that the second convex reflection surface 20e is disposed at the reference position. . Then, it returns to a reflective surface 1st imaging process (S102), and subsequent processes are performed. When the second convex reflection surface 20e is arranged at the reference position by the second convex reflection surface switching step (S131), an image as shown in FIG. 8C is obtained. That is, as described above, the second convex reflective surface 20e has a convex-shaped reflective surface having a curvature smaller than the curvature of the first convex reflective surface 20f, and thus the reflected light image P by the second convex reflective surface 20e. _q2 is reflected light image of the wide oval shape in the X direction from the reflected light image P _q1 of the first convex reflecting surface 20f is obtained.

The distance d2 between the center line C _r2 of the reflected light image P _q2 and the image center C _p1 or C _p2 of the second convex reflection surface 20e is slightly smaller than the first convex reflection surface 20f. Even if there is a shift in the arrangement position, it is greatly enlarged. In other words, the substantial determination criterion in the first distance determination step (S107) is tightened, and the angular position of the reflector 20 can be further finely corrected. That is, as shown in FIG. 8C, a distance d _{q2 at} which the installation angle of the reflector 20 where the second convex reflection surface 20e as the determination threshold is arranged at the reference position can be determined to be appropriate, and the first convex reflection surface 20f. in the distance d _q1, and adjusting the angle α of the reflector 20 corresponding to the distance d _q1, and distance adjustment angle of the reflector 20 corresponding to the d _q2 beta, is related,
d _q2 = d _q1
Even
β <α
It becomes. That is, by using a convex reflecting surface with a small curvature, it is possible to detect the angular deviation of the reflector 20 in an enlarged manner, and the angular position of the reflector 20 can be finely adjusted. The reflection surface first imaging step (S102) to the reflection surface second confirmation step (S108) by the second convex reflection surface 20e are executed, and the second convex reflection surface 20e is confirmed in the reflection surface second confirmation step (S108). And it transfers to a plane reflective surface switching process (S141).

[Plane reflective surface switching process]
In the plane reflection surface switching step (S141), the second convex reflection surface 20e is switched to the plane reflection surface 20d. That is, it is possible to enlarge and detect the angular deviation of the reflector 20 by using the convex reflection surface having a reduced curvature, which is obtained by the second convex reflection surface switching step (S131) described above. Is a convex surface having the smallest curvature, that is, the smallest curvature, and the angular position of the reflector 20 can be further finely adjusted.

  A series of steps of adjusting the rotational angle position of the reflector 20 with respect to the reference position of the reflecting portion 40 by sequentially switching the reflecting surfaces starting with the first convex reflecting surface 20f and the second convex reflecting surface 20e and the planar reflecting surface 20d. This is the initial setting process of the reflector 20. After these initial setting steps, the process proceeds to a step for optimizing the sensitivity detected by the detection apparatus 100.

[First concave reflecting surface switching step]
In the reflection surface second confirmation step (S108), when the flat reflection surface 20d is confirmed, the first concave reflection surface switching step (S109) is performed. In the first concave reflecting surface switching step (S109), the reflector 20 is rotationally driven by the actuator 32b for the arrangement angle from the planar reflecting surface 20d to the first concave reflecting surface 20c in the reflector 20. When the first concave reflecting surface 20c is arranged at the reference position, the process proceeds to the reflecting surface second imaging step.

[Reflecting surface second imaging step]
In the second reflective surface imaging step (S201), the first concave reflective surface 20c is imaged by the imaging device 50, image data is sent to the image processing device 60, and the shape image of the first concave reflective surface 20c is transmitted by the image forming unit 60a. Is formed. Fig.9 (a) is an image figure of the shape image of the formed 1st concave reflective surface 20c. In the image area P0 representing the imaging area of the imaging device 50 as shown in FIG. 9 (a), the reflective surface image P ₂₁ is formed as a shape image of the first concave reflecting surface 20c. A reflection surface image P ₂₁ having the shape of the first concave reflection surface 20c is formed, and the process proceeds to the second calculation step of the reflection surface image center position.

[Reflecting surface image center position second calculation step]
Reflective surface image center position the second calculation step (S202) calculates the image position calculating unit 60b a graphical central position with respect to the X direction of the first concave reflecting surface 20c shape of the reflective surface image P _21. The calculation method is performed by the same method as the above-described reflection surface image center position first calculation step (S103). For example, a method of calculating the center C _p2 by recognizing the image S of the center line previously formed on the first concave reflecting surface 20c, or four sides h1, h2, h3, h4 or corners of the reflecting surface image P ₂₁ k1, k2, k3, method k4 recognize calculates the center C _p1 and, such as by calculating the center C _p1 or C _p2 of the reflective surface image P _21. Then, the process proceeds to the reflected light second imaging step.

[Second reflected light imaging step]
In the reflected light second imaging step (S203), the reflected light reflected by the first concave reflecting surface 20c of the light emitted from the plurality of LEDs 12 included in the light source unit 10 is imaged by the imaging device 50, and the image of the image processing device 60 is captured. A reflected light image is formed by the forming unit 60a. FIG. 9B is a partially enlarged view of an image of the reflected light reflected by the formed first concave reflecting surface 20c. As shown in FIG. 9B, the plurality of reflected light images P _r1 of the reflected light of the light emitted from the plurality of LEDs 12 reflected by the first concave reflecting surface 20 c having the smallest curvature is the circular light emitted from the LEDs 12. The reflected light image P _rc is formed in an ellipse having a long axial length in the X direction intersecting the image arrangement direction of the LEDs 12 linearly arranged in the Y direction. When the reflected light image P _r1 is formed, the process proceeds to the reflected light image center second calculation step.

[Image center distance second calculation step]
In the image center distance second calculation step (S205), the center C _p1 or C _p2 obtained in the reflection surface image center second calculation step (S202) and the reflected light image center second calculation step (S204), A distance d1 from the center C _r1 is calculated. When the distance d1 is calculated, the process proceeds to the second distance determination step.

[Second distance determination step]
In the second distance determination step (S206), whether or not the installation angle in the rotation direction of the reflector 20 is appropriate is determined based on the distance d1 obtained in the image center distance second calculation step (S106) and the installation of the reflector 20. The comparison unit 70b provided in the control device 70 compares and determines the distance _{dr1 at} which the angle can be determined to be appropriate,
| D1 | ≦ | d _r1 |
That is, if it is YES, it will transfer to an image comparison process. In addition,
| D1 |> | d _r1 |
That is, if it is NO, it will transfer to a reflector angle position adjustment process.

[Reflector angular position adjustment process]
The reflector angular position adjusting step (S231) is performed in the second distance determining step (S206) by the same method as the reflector angular position adjusting step (S121) described above.
| D1 |> | d _r1 |
It is executed when it is determined. That is, the control unit in the control unit 70a provided in 70, comparison unit when the distance d _r1, the difference between d1 [delta] _r1 at 70b, the driving of the predetermined rotation angle of the reflector 20 in a direction corresponding to the positive and negative and the value of [delta] _r1 A signal is sent to the actuator 32b, and the actuator 32b is driven. After execution of the reflector angular position adjustment step (S231), the process proceeds to the reflection surface second imaging step (S201), and the appropriateness of the rotational position after adjustment of the reflector 20 is confirmed.

[Image comparison process]
In the second distance determination step (S206), YES, that is,
| D1 | ≦ | d _r1 |
If it is determined, the process proceeds to the image comparison step (S207). Image comparison step (S207), as shown in FIG. 9 (c), according to the first concave reflecting surface 20c of the LED12 within the X-direction width W ₂₁ of the reflecting surface image P ₂₁ of the first concave reflecting surface 20c This is a step of comparing and determining whether the reflected light image P _r1 is formed. That is, when the width in the X direction of the reflected light image P _r1 is the width W _r1 ,
W ₂₁ > W _r1
And the distances α and β between both ends in the X direction of the reflected light image P _r1 and both sides in the X direction of the reflection surface image P ₂₁ of the first concave reflection surface 20c are:
α> 0, β> 0
When it is determined that the reflected light image P _r1 is formed in the region of the reflecting surface image P ₂₁ of the first concave reflecting surface 20c (YES). If it determines with YES, it will transfer to a reflective surface 3rd confirmation process.

[Reflecting surface third confirmation step]
In the reflection surface third confirmation step (S232), any of the first concave reflection surface 20c, the second concave reflection surface 20b, and the third concave reflection surface 20a is the concave reflection surface on which the previous image comparison step (S207) was executed. Check if it is. A second concave reflective surface switching step of arranging the second concave reflective surface 20b at the reference position when the concave reflective surface on which the previous image comparison step (S207) has been performed is confirmed as the first concave reflective surface 20c. The process proceeds to (S233). In addition, when it is confirmed that the concave reflecting surface on which the previous image comparison step (S207) has been performed is the second concave reflecting surface 20b, the third concave reflecting surface in which the third concave reflecting surface 20a is arranged at the reference position. The process proceeds to the switching step (S234). When the third concave reflecting surface 20a is confirmed, the adjustment of the detection device 100 ends.

That is, in S201 to S232 and S231 to S234 in the above-described one continuous process, as shown in FIG. 9D, the second concave reflective surface having a larger curvature than the first concave reflective surface 20c from the first concave reflective surface 20c. By switching to 20b, the reflected light image P _r2 by the second concave reflecting surface 20b is formed in an elliptical shape spreading in the X direction from the reflected light image P _r1 by the first concave reflecting surface 20c. That is, the light image of the LED 12 is detected with a larger number of pixels, and by using the reflected light image P _r2 , higher detection power than the reflected light image P _r1 can be obtained. Similarly, as shown in FIG. 9E, the second concave reflection surface 20b is switched to the third concave reflection surface 20a having a curvature larger than that of the second concave reflection surface 20b, thereby reflecting the third concave reflection surface 20a. The light image P _r3 is formed in an elliptical shape spreading in the X direction from the reflected light image P _r2 by the second concave reflecting surface 20b. The image of a large third concave reflecting surface 20a of the most curvature, when in the region of the reflecting surface image P _12, in a state where the third concave reflecting surface 20a is arranged in the reference position, the adjustment of the detection device 100 finish. Thus, by using a concave reflecting surface having a large curvature, the number of pixels of a large image, that is, a reflected light image can be increased, and the detection apparatus 100 having high detection power can be obtained. In addition, although the reflector 20 of the detection apparatus 100 according to the present embodiment includes three concave reflecting surfaces having different curvatures, the present invention is not limited to this, and reflected light can be obtained by repeating the above-described reflecting surface switching process. It is only necessary that the image has the maximum number of pixels.

[Reflecting surface fourth confirmation process]
In the image comparison step (S207), the reflected light image P _{r1 from} the first concave reflecting surface 20c, the reflected light image P _{r2 from} the second concave reflecting surface 20b, or the reflected light image P _r3 from the third concave reflecting surface 20a is the first. If it is determined not to have been formed (nO) in the region of the reflecting surface image P ₂₁ 1 concave reflection surface 20c, the process proceeds to a fourth checking step reflecting surface (S208). That shown in FIG. 10 (a), the areas of the reflective surface image P _21, protruding part of the reflected light image Pr, when it is determined in the image comparison step the protruding region Ps is present (S207), the reflection A surface fourth confirmation step (S208) is executed. In this case, similarly to the above-described reflection surface third confirmation step (S232), the concave-shaped reflection surface on which the previous image comparison step (S207) has been executed is the first concave reflection surface 20c, the second concave reflection surface 20b, the second It is confirmed whether the surface is one of the three concave reflecting surfaces 20a.

  When it is confirmed that the concave reflecting surface on which the previous image comparison step (S207) has been executed is the third concave reflecting surface 20a, a second concave reflecting surface switching step of arranging the second concave reflecting surface 20b at the reference position ( The process proceeds to S209B). Further, when it is confirmed that the concave-shaped reflective surface on which the previous image comparison step (S207) has been executed is the second concave reflective surface 20b, the first concave reflective surface switching for arranging the first concave reflective surface 20c at the reference position. The process proceeds to step (S209A). However, if the first concave reflecting surface 20c is confirmed, the abnormality determination display step (S241) for performing abnormality determination on a display device (not shown) is performed by determining abnormality because the adjustment of the detection device 100 is difficult, and the detection device 100 Request readjustment and exit.

[First concave reflecting surface switching step, second concave reflecting surface switching step]
A concave reflecting surface that forms a reflected light image Pr that protrudes from the reflecting surface image P _{21 as} shown in FIG. 10 by the first concave reflecting surface switching step (S209A) and the second concave reflecting surface switching step (S209B) described above. A small reflected light image Pr ′ is formed in the X direction by the concave reflecting surface having a smaller curvature, and the protrusion Ps is eliminated. For example, if the reflected light image Pr is formed by the third concave reflecting surface 20a, the reflected light image Pr ′ is formed by switching to the second concave reflecting surface 20b, and the reflected light image Pr is formed by the second concave reflecting surface 20b. If formed, the process switches to the first concave reflecting surface 20c to form the reflected light image Pr '. After the first concave reflection surface switching step (S209A) or the second concave reflection surface switching step (S209B), the process proceeds to the reflection surface third imaging step (S210).

[Reflecting surface third imaging step to third distance determining step, and reflector angle position adjusting step]
The reflective surface third imaging step (S210) to the third distance determining step (S215) and the reflector angle position adjusting step (S221) are the above-described reflective surface second imaging step (S201) to second distance determining step (S206). ) And the reflector angular position adjusting step (S231), and detailed description thereof will be omitted.

  In the third distance determination step, if the distance between the reflected light image center and the concave-shaped reflective surface image center is a value at which the installation angle of the reflector 20 is appropriate, that is, if it is determined as YES, the detection device 100 is adjusted. And the detection operation can be started. As described above, the adjustment method of the detection device 100 according to the present embodiment is performed by the light source unit 10, the reflection unit 40, and the imaging after the detection device 100 is arranged by the convex-shaped reflection surface having a different curvature included in the reflector 20. Even if the imaging device 50 of the light receiving unit 50a with a narrow viewing angle is first displaced by the convex reflecting surface, the light source unit 10 is disposed with a relatively large positional shift between the devices 50. The light from the light source unit 10 can be reliably captured. Then, the distance between the centers of the reflected light image captured only by finely adjusting the rotation amount (rotation angle) of the reflector 20 and the convex-shaped reflective surface image is shortened, and the light source unit is formed at the central part of the convex-shaped reflective surface image. The installation adjustment of the detection apparatus 100 can be performed by forming a reflected light image of 10 lights. Further, the concave reflection surface provided in the reflector 20 can increase the number of pixels that form a reflected light image and obtain the detection device 100 having high detection power.

(Third embodiment)
FIG. 11 is an external view showing a robot apparatus as a third embodiment. As shown in FIG. 11, the robot apparatus 3000 includes a work table 80, a detection apparatus 100 according to the first embodiment disposed at an end of the table 80 on the worker area side (right direction in the figure), and the illustrated figure. When a robot 2000 having a base 2100 and an arm 2200 fixed to a base that is not connected and an object, for example, a human hand M, enters the irradiation area of the emitted light R that is detection light by the detection device 100, the robot 2000 And a safety control unit 200 that generates a signal for restricting the driving of the robot 2000. The safety control unit 200 and the detection device 100 constitute a safety device 1000. Note that the safety control unit 200 in this embodiment includes an image processing device 60 (see FIG. 1).

  In the detection device 100, the light source unit 10 and the reflection unit 40 are arranged so that the emission light R is emitted along a boundary where entry of the operator's hand M on the table 80 is not permitted. The reflection unit 40 is an imaging device. It is adjusted by the adjustment method described in the second embodiment so that the reflected light is directed to 50.

  The robot 2000 includes a base 2100 that is fixed to a base (not shown) and an arm 2200 that is rotatably connected to the base 2100. In this example, the arm 2200 is relative to the first arm 2210 that is rotatably connected to the base 2100, the second arm 2220 that is rotatably connected to the first arm 2210, and the second arm 2220. A third arm 2230 that is rotatably connected to the first arm 2230. A hand portion 2300 having a finger portion capable of gripping a workpiece (not shown) is opposed to an end portion of the third arm 2230 opposite to a portion to which the third arm 2230 is connected to the second arm 2220. It is connected rotatably. In addition, a control unit 2400 that controls driving of the arm 2200 and the hand unit 2300 based on an external command (not shown) is provided.

In the robot apparatus 3000, when the hand M enters the area where the hand M of the safety apparatus 1000 is not allowed to enter, that is, the area on the robot 2000 side from the output light R having the output light R shown in FIG. As shown in FIG. 12, the reflected light image corresponding to the emitted light R blocked by the hand M is P _d1 having low brightness or P _d2 where no reflected image is formed. The detection apparatus 100 compares the P _d1 and P _d2 with the reflected light image Pr of the emitted light R that is not blocked by the object, or calculates the amount of change in image brightness of the entire reflected light to detect the hand M that is the object. . As a method of calculating the brightness and the like from the reflected light images Pr, P _d1 and P _d2 shown in FIG. 12, pixel data constituting the reflected light images Pr, P _d1 and P _d2 are binarized, for example, The total number of white pixels in a predetermined image area or the ratio between the total number of white pixels and the total number of black pixels can be calculated to calculate brightness or a change in brightness. Here, the predetermined image region is a region that is divided so that one Pr can be accommodated and does not overlap another adjacent Pr, and the shape of the region corresponding to each Pr is equal. Besides the binarization, the brightness of Pr, P _d1 , and P _d2 can be calculated by integrating the pixel data of a predetermined image area as it is. By not binarizing, it is possible to detect minute changes and detect objects more quickly.

  When the hand M is detected by the detection device 100, the safety control unit 200 instructs the control unit 2400 of the robot 2000 to start executing the avoidance action based on the detection data of the intrusion of the object, and the arm 2200 Perform avoidance actions. Here, the avoidance action may be an emergency stop, for example, or may be the movement of the hand unit 2300 far away from the detected entry position of the hand M.

  In the robot apparatus 3000 according to the present embodiment, the safety apparatus 1000 includes one detection apparatus 100, but a plurality of detection apparatuses 100 may be included. For example, in the present embodiment, when a work area is provided in another direction in addition to the entry of the hand M from one direction, the detection device may be disposed at a position corresponding to the work area.

  The safety device 1000 provided with the detection device 100 according to the third embodiment and the robot device 3000 provided with the safety device 1000 can change the optical axis of the emitted light R, which is detection light, even if the detection device 100 is not strictly installed. Adjustment to be accurately directed to the imaging device 50 via the reflection unit 40 can be easily performed. Therefore, the detection device 100 that can be easily installed and adjusted can reliably detect an operation exceeding the operation region due to the intrusion of the human body or the robot 2000 running out of control, and can safely instruct the robot 2000 to perform a danger avoidance operation. By providing 1000, a robot apparatus 3000 that is safe and has high work efficiency can be obtained.

  DESCRIPTION OF SYMBOLS 10 ... Light source part, 20 ... Reflector, 30 ... Drive apparatus, 40 ... Reflection part, 50 ... Imaging part, 60 ... Image processing apparatus, 70 Control apparatus ..., 100 ... Detection apparatus.

Claims (7)

A light source unit;
A reflection part comprising a reflection surface for reflecting light emitted from the light source part;
An imaging unit for imaging reflected light from the reflecting surface;
An image processing unit that forms an image of the reflected light from an image signal from the imaging unit and calculates a pixel area or a light amount of the image;
The reflective portion includes one or more concave-shaped reflective surfaces and one or more convex-shaped reflective surfaces, and includes a driving device in which the reflective surface is the concave-shaped reflective surface or the convex-shaped reflective surface.
A detection device characterized by that. The reflection portion includes a plurality of the concave shape reflection surfaces,
The plurality of concave reflecting surfaces have different focal lengths,
The detection apparatus according to claim 1. The light source unit includes a plurality of light emitting units arranged linearly,
The detection apparatus according to claim 1 or 2, wherein The detection device according to any one of claims 1 to 3,
Control comprising: a determination unit that determines the presence / absence of an object on the emission optical path from the pixel area or the light amount calculated by the image processing unit; and a control unit that controls driving of the apparatus according to a determination result of the determination unit An apparatus,
A safety device characterized by that.   A robot apparatus comprising the safety device according to claim 4. A convex reflection surface image acquisition step in which the reflection surface of the reflection portion is a convex shape reflection surface, and a convex reflection surface image of the convex shape reflection surface is acquired by the imaging unit;
A convex reflected light image obtaining step of obtaining a reflected light image of the reflected light obtained by reflecting the emitted light from the light source part by the convex shape reflective surface by the imaging unit;
An image center distance calculation step for calculating a distance between image centers of the center of the convex reflection surface image and the center of the convex reflection light image;
A comparison step of comparing the center-to-center distance between the images and the center-to-center distance threshold;
When the comparison result of the comparison step is that the image center distance is within the image center distance threshold, the reflection surface switching step in which the reflection surface is a concave reflection surface;
A concave reflection light image acquisition step of acquiring a concave reflection light image reflected by the concave reflection surface by the imaging unit,
A method for adjusting a detection device. The reflection unit includes a plurality of concave-shaped reflection surfaces having different focal lengths, and the concave reflection image acquisition step includes:
A determination step of determining whether the concave reflection light image is formed in an image region of the concave reflection surface image of the concave shape reflection surface;
When the determination result of the determination step determines that the concave reflection light image is formed beyond the image area, the concave reflection surface switching is performed to switch to the concave reflection surface having a longer focal length than the concave reflection surface. Including a process,
The method for adjusting a detection apparatus according to claim 6.

Images