JP2013143587A - Aerial ultrasonic wave transducer using acoustic matching layer - Google Patents
Aerial ultrasonic wave transducer using acoustic matching layer Download PDFInfo
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本発明は、シリコーンオイルを含む音響整合層の製造方法と、この音響整合層を用いた空中用超音波送受波器に関するものである。 The present invention relates to a method for producing an acoustic matching layer containing silicone oil and an aerial ultrasonic transducer using the acoustic matching layer.
空中用超音波送受波器において音響整合層は、電圧と歪がカップリングした圧電素子と気体との間の音響インピーダンスのマッチングを改善し、超音波の送受信効率を高めるために用いられている。
一般的なセラミック圧電素子を用い、空気中で超音波の送受信を行う場合を考えると、この音響インピーダンスＺの最適値は、約１．１×１０５ｋｇ／ｍ２ｓとなる。このＺを満たす材料には、音速が遅い低密度の固体であることが要求される。
An acoustic matching layer is used in an ultrasonic transducer for air to improve the matching of acoustic impedance between a gas and a piezoelectric element having a voltage and strain coupled with each other, and to increase the transmission / reception efficiency of ultrasonic waves.
Considering the case of transmitting and receiving ultrasonic waves in the air using a general ceramic piezoelectric element, the optimum value of this acoustic impedance Z is about 1.1 × 10 5 kg / m 2 s. A material satisfying this Z is required to be a low-density solid having a low sound velocity.
このため、従来は、金属に比べて音速の遅い樹脂と、低密度の中空体や発泡体とを組み合わせた音響整合層の利用が行われている。 For this reason, conventionally, an acoustic matching layer in which a resin having a slower sound speed than metal and a low-density hollow body or foam is combined has been used.
超音波送受波器の内部には圧電素子に電圧を印加するために導線などによって電気的接触をとっている。このため、超音波送受波器内部に水が入ると、内部の部品の腐食、圧電素子や音響整合層の吸湿による音響特性の変化を生じる恐れがあり、超音波送受波器の防水性を高めることが課題となっている。 The ultrasonic transducer is in electrical contact with a lead wire or the like in order to apply a voltage to the piezoelectric element. For this reason, if water enters the ultrasonic transducer, it may cause corrosion of internal components and change in acoustic characteristics due to moisture absorption by the piezoelectric element and acoustic matching layer, thus improving the waterproofness of the ultrasonic transducer. This is an issue.
音響整合層を有する超音波送受波器においては、超音波の放射面である音響整合層の撥水効果を高めることが防水性を高める上で重要となる。本発明は、前述の課題を解決するために、高い撥水効果を有するシリコーンオイルを音響整合層材料に加えることで音響整合層の撥水効果を高めた。 In an ultrasonic transducer having an acoustic matching layer, it is important to improve the water repellency of the acoustic matching layer, which is the radiation surface of the ultrasonic wave, in order to improve waterproofness. In order to solve the above-mentioned problems, the present invention improves the water repellent effect of the acoustic matching layer by adding silicone oil having a high water repellent effect to the acoustic matching layer material.
本発明の音響整合層は、音響整合層を用いる超音波送受波器が利用されている様々な分野に適用できる。 The acoustic matching layer of the present invention can be applied to various fields where an ultrasonic transducer using the acoustic matching layer is used.
請求項１に記載の第１の発明は、従来の音響整合層の主要材料である熱硬化樹脂と中空体に加え、高い撥水効果を有するシリコーンオイルを加えることで、音響整合層の撥水効果を高める。 According to a first aspect of the present invention, the water repellent property of the acoustic matching layer is obtained by adding a silicone oil having a high water repellency effect to the thermosetting resin and the hollow body, which are the main materials of the conventional acoustic matching layer. Increase the effect.
請求項２に記載の第２の発明は、第１の発明の音響整合層に硬化させるために、次の２工程を用いたことである。１工程目は、音響整合層の各材料を均一に分散するように攪拌し、均質な混合物を作製する工程である。
２工程目は、この混合物を熱硬化させる工程である。この２工程目の熱硬化における温度条件は、一定でも、複数の異なる温度条件で行ってもよい。
The second invention described in claim 2 is that the following two steps are used in order to cure the acoustic matching layer of the first invention. The first step is a step in which the materials of the acoustic matching layer are stirred so as to be uniformly dispersed to produce a homogeneous mixture.
The second step is a step of thermosetting this mixture. The temperature condition in the second step of thermosetting may be constant or a plurality of different temperature conditions.
請求項３に記載の第３の発明は、音響整合層の表面近傍のシリコーンオイルを硬化させ、音響整合層内部に含まれるシリコーンオイルの外部への拡散を抑制する。これにより、音響整合層内部のシリコーンオイルの含有率を長期にわたり安定させることが可能となり、高い撥水効果を保持できる。 According to a third aspect of the present invention, the silicone oil in the vicinity of the surface of the acoustic matching layer is cured to suppress the diffusion of the silicone oil contained in the acoustic matching layer to the outside. Thereby, it becomes possible to stabilize the content rate of the silicone oil inside the acoustic matching layer for a long period of time, and a high water-repellent effect can be maintained.
請求項４に記載の第４の発明は、第３の発明におけるシリコーンの硬化膜の形成手法として、請求項１に記載の音響整合層の表面に硬化剤を塗布あるいは散布する手法を用い、音響整合層表面近傍に存在するシリコーンオイルを硬化させたことである。この手法は、音響整合層表面近傍における硬化反応を用いているため、音響整合層自体の音響特性への影響を抑えることが可能となる。 According to a fourth aspect of the present invention, a method for applying or dispersing a curing agent to the surface of the acoustic matching layer according to the first aspect is used as a method for forming a cured silicone film according to the third aspect. This is because the silicone oil existing in the vicinity of the matching layer surface is cured. Since this method uses a curing reaction in the vicinity of the surface of the acoustic matching layer, it is possible to suppress the influence on the acoustic characteristics of the acoustic matching layer itself.
請求項５に記載の第５の発明は、第１から第４の発明のいずれか一つの発明の音響整合層用を超音波送受波器に用いることで、高い防水性を超音波送受波器に付与することができる。 According to a fifth aspect of the present invention, the acoustic matching layer according to any one of the first to fourth aspects is used for an ultrasonic wave transmitter / receiver so that high waterproofness is achieved. Can be granted.
使用した音響整合層の材料には、シリコーンオイルと、熱硬化樹脂の中で耐水性や耐薬品性に優れるエポキシ樹脂と、平均直径が超音波波長の１０分の１以下の樹脂中空体とを用いた。 The materials of the acoustic matching layer used were silicone oil, an epoxy resin excellent in water resistance and chemical resistance among thermosetting resins, and a resin hollow body having an average diameter of 1/10 or less of the ultrasonic wavelength. Using.
しかし、ここではエポキシ樹脂にこだわるものではなく、目的が達せられれば他の熱硬化樹脂を用いても差し支えない。 However, the epoxy resin is not particular here, and other thermosetting resins may be used if the purpose is achieved.
また、中空体に関しても、樹脂からなる中空体にこだわるものでなく、目的が達せられればシリカからなる中空体を用いても差し支えない。 Further, the hollow body is not limited to the hollow body made of resin, and a hollow body made of silica may be used if the purpose is achieved.
上記の音響整合層の材料の配分の内、シリコーンオイルの質量をエポキシ樹脂の質量の４０％以下とし、中空体の量を音響整合層の密度が０．３〜０．６［ｇ／ｃｍ３］となるようにした。 Among the material distribution of the acoustic matching layer, the mass of the silicone oil is 40% or less of the mass of the epoxy resin, and the density of the acoustic matching layer is 0.3 to 0.6 [g / cm 3. It was made to become.
音響整合層を作製するための熱硬化反応は、上記の材料の密度分布が均一になるように攪拌した混合物を、乾燥炉を用いて７０〜１００℃の温度範囲で加熱することで行った。仮に、前記の熱硬化反応を加熱初期から１００℃以上の環境で行った場合、エポキシ樹脂の熱硬化反応が急激に進み、生じる反応熱により混合物内部が高温となり、混合物が膨張するため、音響整合層内部に空洞が生じる原因となる。 The thermosetting reaction for producing an acoustic matching layer was performed by heating the mixture stirred so that the density distribution of said material became uniform in a temperature range of 70-100 degreeC using a drying furnace. If the thermosetting reaction is performed in an environment of 100 ° C. or higher from the beginning of heating, the thermosetting reaction of the epoxy resin proceeds rapidly, and the resulting reaction heat becomes a high temperature and the mixture expands. Causes cavities inside the layer.
ただし、熱硬化反応を行う温度条件は、用いる樹脂ごとに反応熱が異なることと、前述の混合物の体積に対する表面積の割合を増やすことで放熱効率が高まり音響整合層内部の空洞化を抑制できるため、目的が達せられれば異なる温度条件で行っても差し支えない。 However, the temperature condition for performing the thermosetting reaction is that the heat of reaction varies depending on the resin used, and the heat dissipation efficiency is increased by suppressing the voiding inside the acoustic matching layer by increasing the ratio of the surface area to the volume of the aforementioned mixture. If the purpose is achieved, it may be performed under different temperature conditions.
製造した音響整合層表面にシリコーンの硬化膜を形成する場合には、シリコーンの硬化に適した量と濃度の硬化剤を音響整合層表面に塗布あるいは散布し、音響整合層表面近傍のシリコーンを硬化させる。 When forming a cured silicone film on the surface of the manufactured acoustic matching layer, apply or spray a curing agent in an amount and concentration suitable for curing the silicone on the acoustic matching layer surface to cure the silicone in the vicinity of the acoustic matching layer surface. Let
図１は本発明の超音波送受波器の実施の形態に関わる超音波送受波器の構成を示す概略図を表す。図１を参照して、圧電素子２は、ＰＺＴ系のセラミックからなる。この超音波送受波器を構成するために、下記の３つの工程を行う。 FIG. 1 is a schematic diagram showing the configuration of an ultrasonic transducer according to an embodiment of the ultrasonic transducer of the present invention. Referring to FIG. 1, the piezoelectric element 2 is made of PZT ceramic. In order to configure this ultrasonic transducer, the following three steps are performed.
第１工程は、本発明の音響整合層１に圧電素子２を貼り合わせた後、これを両端に開口を有する筒状ケース５の一端に固定したユニモルフ振動子を構成する。
ここで、音響整合層１と圧電素子２の間の接着と、音響整合層１と筒状ケース５の間の接着には、熱硬化型のエポキシ樹脂を用い、乾燥炉内で１００℃で１時間加熱することで行った。
The first step forms a unimorph vibrator in which the piezoelectric element 2 is bonded to the acoustic matching layer 1 of the present invention and then fixed to one end of a
Here, for the adhesion between the acoustic matching layer 1 and the piezoelectric element 2 and the adhesion between the acoustic matching layer 1 and the
第２工程は、圧電素子２に電圧を印加するためのリードを、圧電素子２と音響整合層１の接着面側から一部折り返した電極に入出力リード６ｂ、接着面の反対の面に入出力リード６ａを半田付け等をして取り出す。 In the second step, a lead for applying a voltage to the piezoelectric element 2 is inserted into an electrode partly folded from the bonding surface side of the piezoelectric element 2 and the acoustic matching layer 1 on the input / output lead 6b and the surface opposite to the bonding surface. The output lead 6a is taken out by soldering or the like.
第３工程は、圧電素子２の上面に発泡シリコン等から成る吸音材３を載置して、その上からシリコン材、ウレタン材等から成る封止剤４を有底筒状ケース５内部に充填し構成する。
In the third step, the sound absorbing material 3 made of foamed silicon or the like is placed on the upper surface of the piezoelectric element 2, and the sealing agent 4 made of silicon material, urethane material or the like is filled inside the bottomed
上記の３つの工程により、ユニモルフ振動子の振動によって超音波の送受信を行う超音波送受波器となる。 By the above three steps, an ultrasonic transducer that transmits and receives ultrasonic waves by vibration of the unimorph vibrator is obtained.
１ 音響整合層
２ 圧電素子
３ 吸音材
４ 封止材
５ 両端に開口を有する筒状ケース
６ａ 入出力リード
６ｂ 入出力リード
DESCRIPTION OF SYMBOLS 1 Acoustic matching layer 2 Piezoelectric element 3 Sound absorbing material 4
Claims (5)
超音波の伝播損失を抑えて送受信効率を高めるために気体と圧電素子との間に挟み音響インピーダンスのマッチングを行う音響整合層において、
樹脂またはシリカからなる中空体と、
熱硬化樹脂と、
シリコーンオイルと
を主成分とした音響整合層。 In an ultrasonic transducer that transmits and receives ultrasonic waves via gas,
In an acoustic matching layer that performs acoustic impedance matching between a gas and a piezoelectric element to suppress transmission loss of ultrasonic waves and increase transmission / reception efficiency,
A hollow body made of resin or silica;
Thermosetting resin;
An acoustic matching layer composed mainly of silicone oil.
前述シリコーンオイルと
前述熱硬化樹脂と、を混ぜて、
加熱によって硬化させたことを特徴とする請求項１に記載の音響整合層。 Mix the hollow body, the silicone oil and the thermosetting resin,
The acoustic matching layer according to claim 1, which is cured by heating.
シリコーンオイルの硬化剤を塗布あるいは散布して、
音響整合層表面近傍のシリコーンオイルを硬化させることで前述シリコーンの硬化膜を形成したことを特徴とする請求項３に記載の音響整合層。
On the surface of the acoustic matching layer,
Apply or spray a silicone oil curing agent,
The acoustic matching layer according to claim 3, wherein the silicone cured film is formed by curing silicone oil in the vicinity of the surface of the acoustic matching layer.
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| JPS59171296A (en) * | 1983-03-17 | 1984-09-27 | Matsushita Electric Ind Co Ltd | Ultrasonic wave transducer |
| JPH03264000A (en) * | 1990-03-13 | 1991-11-25 | Nippon Ceramic Co Ltd | Ultrasonic sensor |
| JPH0865795A (en) * | 1994-08-22 | 1996-03-08 | Toyota Motor Corp | Ultrasonic sensor |
| JPH0987347A (en) * | 1995-09-26 | 1997-03-31 | Showa Denko Kk | Resin composition and its molding material |
| JP2002135894A (en) * | 2000-10-26 | 2002-05-10 | Murata Mfg Co Ltd | Ultrasonic sensor and electronic device using it |
| JP2004305339A (en) * | 2003-04-04 | 2004-11-04 | Ge Medical Systems Global Technology Co Llc | Ultrasonic probe, manufacturing method of ultrasonic probe, and maintenance method for ultrasonic probe |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59171296A (en) * | 1983-03-17 | 1984-09-27 | Matsushita Electric Ind Co Ltd | Ultrasonic wave transducer |
| JPH03264000A (en) * | 1990-03-13 | 1991-11-25 | Nippon Ceramic Co Ltd | Ultrasonic sensor |
| JPH0865795A (en) * | 1994-08-22 | 1996-03-08 | Toyota Motor Corp | Ultrasonic sensor |
| JPH0987347A (en) * | 1995-09-26 | 1997-03-31 | Showa Denko Kk | Resin composition and its molding material |
| JP2002135894A (en) * | 2000-10-26 | 2002-05-10 | Murata Mfg Co Ltd | Ultrasonic sensor and electronic device using it |
| JP2004305339A (en) * | 2003-04-04 | 2004-11-04 | Ge Medical Systems Global Technology Co Llc | Ultrasonic probe, manufacturing method of ultrasonic probe, and maintenance method for ultrasonic probe |
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