JP2013142613A - Sensor substrate, detector, electronic apparatus and robot - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a sensor substrate 1 capable of suppressing erroneous detection of an external force acted on a detection area S, by a pressure sensor 12 of a neighboring detection area S, so as to detect an acted external force with high accuracy.SOLUTION: A sensor substrate 1 includes a plurality of detection areas with a plurality of pressure sensors 12 arranged therein. The pressure sensor 12 has an elastic layer made of a pressure-sensitive conductive rubber 15. An external force acted on a detection area S can be suppressed from propagating to a neighboring detection area S, through forming a partition wall W between neighboring detection areas S of the elastic layer, using a hard material having larger elasticity modulus than the elastic layer and difficult to deform. As a result, the sensor substrate 1 can be provided in which erroneous detection of the external force acted on the detection area S by a pressure sensor 12 of the neighboring detection area S.

Description

  The present invention relates to a sensor substrate composed of a plurality of pressure sensors, a detection device equipped with the sensor substrate, and an electronic device and a robot equipped with the detection device.

  As a detection device for detecting an external force, a detection device described in Patent Document 1 is known. Application of such a detection apparatus to a touch panel, a tactile sensor of a robot, or the like is being studied.

  The detection device disclosed in Patent Document 1 includes a plurality of displaceable contacts and a pressure-sensitive conductive rubber provided with the plurality of contacts on the surface. When an external force acts on the contact, the region corresponding to the contact of the pressure-sensitive conductive rubber is pressed by the contact and the electric resistance changes. From the electrical resistance of the pressure-sensitive conductive rubber, that is, the output value of the pressure-sensitive element, the displacement of the contact (physical quantity such as load and moment) can be grasped, and by providing a plurality of contacts, it works on the entire contact. It is assumed that the physical quantity, that is, the magnitude, direction and distribution of the external force acting on the detection device can be grasped.

JP 2008-164557 A

  However, the above-described detection device has a problem that when the distance between the contacts is reduced, the displacement of the adjacent contact affects the pressure-sensitive conductive rubber, and the external force acting on the contact is erroneously detected. Specifically, when an external force is applied to the contact, the external force also affects the pressure-sensitive conductive rubber in the region corresponding to the adjacent contact, and the external force is erroneously detected to cause deformation. It was. In other words, there is a problem that it is difficult to reduce the distance between the contacts and to increase the density and size of the external force detection area.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 A sensor substrate according to this application example is a sensor substrate having a plurality of detection regions in which a plurality of pressure sensors are arranged, and includes a first substrate, a second substrate, a first substrate, and a second substrate. And a partition wall provided between at least one of the plurality of detection regions and between adjacent detection regions, and an elastic layer disposed between the first substrate and the second substrate. It is characterized by.

  According to this application example, the external force that has acted on a certain detection region is blocked by the partition formed between the adjacent detection regions, so that propagation outside the detection region is suppressed. Therefore, it is suppressed that the external force which acted on the said detection area is misdetected by the pressure sensor arrange | positioned at the detection area adjacent to the said detection area. Furthermore, even if the interval between a plurality of detection areas is reduced, the external force acting on a detection area is prevented from being propagated outside the detection area by the partition wall, so that detection next to the detection area is possible. False detection by the pressure sensor arranged in the area is suppressed. Accordingly, it is possible to provide a sensor substrate capable of increasing the density of the detection region and detecting with higher accuracy.

  Application Example 2 In the sensor substrate according to the application example described above, the first substrate includes the first electrode, the second substrate includes the second electrode, and the elastic layer includes the first electrode of the first substrate. And the surface of the second substrate on which the second electrode is formed, the first electrode and the second electrode intersect each other, and the pressure sensor is in a region where the first electrode and the second electrode intersect. Preferably it is formed.

  According to this application example, the vertical stripe-shaped first electrode formed on the first substrate and the horizontal stripe-shaped second electrode formed on the second substrate are crossed with the elastic layer interposed therebetween, and pressure is applied in the crossing region. By forming the sensor, it is possible to easily form a plurality of pressure sensors arranged in a matrix and a plurality of inspection regions each composed of a plurality of pressure sensors.

  Application Example 3 In the sensor substrate according to the application example described above, the second substrate has the first electrode and the second electrode, and the elastic layer is the first substrate, and the first electrode and the second electrode of the second substrate. It is preferable that a pressure sensor is formed between the first electrode and the second electrode adjacent to the first electrode.

  According to this application example, the process of forming the first substrate and the second substrate can be simplified by collectively forming the first electrode and the second electrode on the same substrate in the same process. It can be provided at a lower cost.

  Application Example 4 The sensor substrate according to the application example described above is a sensor substrate having a plurality of detection regions on which pressure sensors are arranged, and is adjacent to the substrate, the elastic layer, and the plurality of detection regions provided on the substrate. And a partition wall formed between the matching detection regions.

  According to this application example, the sensor substrate is configured by the minimum components such as one substrate, the elastic layer, and the partition wall, so that the sensor substrate can be formed at a lower cost. Furthermore, since the external force that has acted on a certain detection region is suppressed from being propagated outside the detection region by the partition wall, the external force that has acted on the detection region is arranged in the detection region adjacent to the detection region. False detection by the pressure sensor is suppressed. Therefore, a sensor substrate that can be detected with higher accuracy can be provided at a lower cost.

  Application Example 5 In the sensor substrate according to the application example described above, the substrate has a first electrode and a second electrode, and the elastic layer is formed on a surface of the substrate on which the first electrode and the second electrode are formed. The pressure sensor is preferably formed between the first electrode and the adjacent second electrode.

  According to this application example, by applying an external force to the surface of the elastic layer opposite to the side on which the first electrode and the second electrode are formed, the surface opposite to the side on which the external force acts on the elastic layer (the first electrode and The deformation of the side on which the second electrode is formed can be reduced. Therefore, deformation (mechanical stress) between the first electrode and the second electrode due to external force is reduced, and durability (life) of the first electrode and the second electrode can be improved.

  Application Example 6 In the sensor substrate according to the application example described above, it is preferable that the thickness of the partition wall is smaller than the thickness of the elastic layer.

  According to this application example, since the thickness of the partition wall is smaller than the thickness of the elastic layer, the external force that has acted on a certain detection region acts accurately on the detection region without being inhibited by the partition wall. Further, since the external force is suppressed from being propagated outside the detection area by the partition wall, erroneous detection by the pressure sensor disposed in the detection area adjacent to the detection area is suppressed. Therefore, a sensor substrate that can be detected with higher accuracy can be provided.

  Application Example 7 In the sensor substrate according to the application example described above, it is preferable that the partition wall has a thickness larger than that of the elastic layer and protrudes from the elastic layer.

  According to this application example, the thickness of the partition wall is larger than the thickness of the elastic layer and protrudes from the elastic layer, so that an external force acting on a certain detection region is more strongly transmitted to the outside of the detection region. Can be suppressed.

  Application Example 8 In the sensor substrate described in the application example, it is preferable that the partition wall is continuously formed so as to surround the detection region.

  According to this application example, the partition wall that suppresses the propagation of external force is continuously formed so as to surround the detection region, so that the mechanical strength of the partition wall increases. Therefore, even if a larger external force is applied, the partition wall can be made difficult to break.

  Application Example 9 In the sensor substrate according to the application example described above, it is preferable that the partition wall is made of a material having a larger elastic modulus than the elastic layer.

  According to this application example, the partition wall is made of a hard material having a larger elastic modulus than the elastic layer and is not easily deformed. Therefore, an external force acting on a certain detection region is received by the partition wall, and the outside of the detection region. Propagation is suppressed. Therefore, it can suppress that the external force which acted on the said detection area is misdetected by the pressure sensor arrange | positioned at the detection area adjacent to the said detection area.

  Application Example 10 A sensor substrate according to this application example is a sensor substrate having a plurality of detection regions in which a plurality of pressure sensors are arranged, the substrate on which the first electrode and the second electrode are formed, And an elastic layer formed on the surface on which the first electrode and the second electrode are formed and spaced apart for each detection region and formed in an island shape.

  According to this application example, since the elastic layer is separated for each detection region, the elastic layer in the detection region adjacent to the detection region is not deformed by an external force applied to a certain detection region. Furthermore, even if the interval between the plurality of detection areas is reduced, the elastic layer is separated for each detection area. Therefore, an external force acting on a certain detection area causes the elastic layer in the detection area adjacent to the detection area to move. There is no deformation, and the interval between the detection areas can be made smaller. Accordingly, it is possible to provide a sensor substrate capable of increasing the density of the detection region and detecting with higher accuracy.

  Application Example 11 A sensor substrate according to this application example is a sensor substrate having a plurality of detection regions in which a plurality of pressure sensors are arranged. The sensor substrate includes an elastic layer, and the elastic layer includes a plurality of detection regions. A partition wall is formed between adjacent detection regions.

  According to this application example, since the partition wall is formed between the adjacent detection regions in the elastic layer of the sensor substrate, the external force acting on a certain detection region is blocked by the partition wall and propagates outside the detection region. Is suppressed. Therefore, it is suppressed that the external force which acted on the said detection area is misdetected by the pressure sensor arrange | positioned at the detection area adjacent to the said detection area. Furthermore, even if the interval between a plurality of detection areas is reduced, the external force acting on a detection area is prevented from being propagated outside the detection area by the partition wall, so that detection next to the detection area is possible. False detection by the pressure sensor arranged in the area is suppressed. Accordingly, it is possible to provide a sensor substrate capable of increasing the density of the detection region and detecting with higher accuracy.

  Application Example 12 In the sensor substrate according to the application example described above, the elastic layer is preferably a pressure-sensitive conductive rubber that is elastically deformed.

  According to this application example, by forming a partition wall between adjacent detection areas, or by separating the elastic layer for each detection area, an external force applied to a detection area is propagated outside the detection area. It is suppressed. Therefore, it can be suppressed that an external force acting on a certain detection region is erroneously detected by a resistance type pressure sensor made of a pressure-sensitive conductive rubber disposed in a detection region adjacent to the detection region.

  Application Example 13 In the sensor substrate according to the application example described above, the elastic layer is preferably a dielectric that elastically deforms.

  According to this application example, an external force applied to a certain detection region is propagated outside the detection region by forming a partition between adjacent detection regions, or by separating the elastic layer for each detection region. It is suppressed. Therefore, it is possible to suppress an external force acting on a certain detection region from being erroneously detected by a capacitance type pressure sensor made of a dielectric disposed in the detection region adjacent to the detection region.

  Application Example 14 A detection device according to this application example is a detection device including the sensor substrate according to the application example described above and an elastic protrusion that is elastically deformed by an external force, and the detection region of the sensor substrate includes a detection region. A plurality of pressure sensors are arranged around the reference point with the center of the reference point as a reference point, and the elastic protrusion is provided on the sensor substrate so that the center of gravity is located at a position overlapping the reference point.

  According to this application example, if the external force acting on the sensor substrate has a force component in the sliding direction (direction parallel to the surface of the sensor substrate), the center of gravity of the elastic protrusion formed on the sensor substrate is shifted from the reference point. Move in the sliding direction. Therefore, the direction and magnitude of the external force acting on the sensor substrate can be detected by a plurality of pressure sensors arranged around the reference point of the detection area.

  Application Example 15 A detection device according to this application example is a detection device including the sensor substrate according to the application example described above and an urging substrate having an elastic protrusion, and the detection region of the sensor substrate includes a detection region. A plurality of pressure sensors are arranged around the reference point with the center of the reference point as a reference point, and the elastic protrusion is elastically deformed while being in contact with the sensor substrate by an external force, with the center of gravity located at a position overlapping the reference point. And

  According to this application example, if the external force acting on the sensor substrate has a force component in the sliding direction (a direction parallel to the surface of the sensor substrate), the center of gravity of the elastic protrusion formed on the biasing substrate deviates from the reference point. Then, it moves in the sliding direction in contact with the sensor substrate. Therefore, the direction and magnitude of the external force acting on the sensor substrate can be detected by a plurality of pressure sensors arranged around the reference point of the detection area.

  [Application Example 16] The detection device according to the application example described above is detected by each pressure sensor arbitrarily combined among pressure values detected by a plurality of pressure sensors due to elastic deformation of the elastic protrusion by an external force. It is preferable to calculate the difference between the pressure values and calculate the direction in which the external force is applied and the magnitude of the external force based on the difference.

  According to this application example, if the external force acting on the sensor substrate has a force component in the sliding direction (direction parallel to the surface of the sensor substrate), the center of gravity of the elastic protrusion is displaced from the reference point and moves in the sliding direction. . Therefore, among the plurality of pressure sensors arranged around the reference point of the detection area, the ratio of overlapping the portion where the center of gravity of the elastic protrusion has moved is relatively large, and each pressure sensor detects a different pressure value. Is done. Specifically, a relatively large pressure value is detected by the pressure sensor at a position overlapping with the center of gravity of the elastic protrusion, and a relatively small pressure value is detected by a pressure sensor at a position not overlapping with the center of gravity of the elastic protrusion. It will be. Therefore, the difference between the pressure values detected by the pressure sensors can be calculated, and the direction and magnitude of the external force acting on the sensor substrate can be obtained based on the difference.

  Application Example 17 An electronic device described in this application example includes the detection device described in the application example.

  According to this application example, since the detection device described in the application example is provided, it is possible to provide an electronic device that can detect the direction and magnitude of the external force with high accuracy. For example, the detection device on a touch pad of information portable terminal, mobile phone, personal computer, video camera monitor, car navigation device, pager, electronic notebook, calculator, word processor, workstation, video phone, POS terminal, digital still camera, etc. It is possible to provide an electronic device that can detect the direction and magnitude of the external force with high accuracy.

  [Application Example 18] A robot described in this application example includes the detection device described in the application example.

  According to this application example, since the detection device described in the application example is provided, it is possible to provide a robot that can detect the direction and magnitude of the external force (gripping force) with high accuracy.

It is a disassembled perspective view which shows the structure of the sensor board | substrate which concerns on embodiment. It is a schematic diagram which shows the relationship between the partition and detection area which concern on embodiment. It is sectional drawing of the partition along the A-A 'line of FIG. 2 is a cross-sectional view taken along the line A-A ′ of FIG. It is sectional drawing which shows the state of the sensor board | substrate produced with the well-known technique to which the external force acted. 10 is a cross-sectional view illustrating a configuration of a sensor substrate according to Modification 1. FIG. It is a figure which shows the structure of the sensor board | substrate which concerns on the modification 2. 10 is a cross-sectional view illustrating a configuration of a sensor substrate according to Modification 3. FIG. 10 is a cross-sectional view illustrating a configuration of a sensor substrate according to Modification 4. FIG. 10 is a cross-sectional view illustrating a configuration of a sensor substrate according to Modification Example 5. FIG. 10 is an exploded perspective view showing a configuration of a sensor substrate according to Modification 6. FIG. 3 is an exploded perspective view showing a configuration of a detection apparatus A. FIG. It is a top view which shows the change of the pressure value by the pressure sensor of the detection apparatus A. It is a figure which shows the coordinate system of the detection area of the detection apparatus A. It is a figure which shows the pressure distribution of the perpendicular direction by the detection area of the detection apparatus A. It is a figure which shows the example of calculation of the slip direction which concerns on the detection apparatus A. 3 is an exploded perspective view showing a configuration of a detection device B. FIG. It is a schematic diagram which shows schematic structure of the portable information terminal which is an example of an electronic device. It is a schematic diagram which shows schematic structure of the robot hand which is an example of a robot.

  Embodiments of the present invention will be described below with reference to the drawings. This embodiment shows one aspect of the present invention, and does not limit the present invention, and can be arbitrarily changed within the scope of the technical idea of the present invention. Moreover, in the following drawings, in order to make each structure easy to understand, an actual structure and a scale, a number, and the like in each structure are different.

(Embodiment)
"Summary of sensor board"
FIG. 1 is an exploded perspective view showing the configuration of the sensor substrate 1 according to the present embodiment. In each drawing including FIG. 1, an XYZ rectangular coordinate system is set, and each configuration will be described with reference to the XYZ rectangular coordinate system. In the XYZ orthogonal coordinate system, the X axis and the Y axis are set in a direction parallel to the first substrate 13 shown in FIG. 1, and the Z axis is set in a direction orthogonal to the first substrate 13. Further, the Z-axis (+) direction is up, the Z-axis (−) direction is down, the X-axis (+) direction is right, and the X-axis (−) direction is left.

  In FIG. 1, a part of the sensor substrate 1 is shown. A symbol P in FIG. 1 indicates a point (reference point) where the center of a detection region S (see FIG. 2) whose details will be described later is located. A broken line in FIG. 1 indicates an outline of the first electrode 14 formed on the lower surface of the first substrate 13.

  As shown in FIG. 1, a first substrate 13, a pressure-sensitive conductive rubber 15 as an example of an “elastic layer”, and a second substrate 17 are laminated on the sensor substrate 1 in order from the top. A first electrode 14 extending in the first direction (Y direction) is formed on the first substrate 13, and a second electrode 16 extending in the second direction (X direction) is formed on the second substrate 17. And a partition wall W are formed. The first substrate 13 is a portion that receives an external force.

  The first substrate 13 and the second substrate 17 are bonded to the pressure-sensitive conductive rubber 15 by thermocompression bonding. Further, the first substrate 13 and the second substrate 17 may be bonded to the pressure-sensitive conductive rubber 15 with an adhesive or an adhesive material. The first electrode 14 and the second electrode 16 intersect with each other with the pressure-sensitive conductive rubber 15 interposed therebetween, and are electrically connected to the pressure-sensitive conductive rubber 15.

  As a material constituting the first substrate 13, a resin film made of polyimide resin is used as a suitable example. As a material constituting the first substrate 13, in addition to the above-described polyimide resin, epoxy resin, acrylic resin, polycarbonate resin, phenol resin, melamine resin, urea resin, FRP (fiber reinforced plastic), PET (polyethylene terephthalate) resin Organic materials such as polyolefin resin and Teflon (registered trademark) resin may be used, and inorganic materials such as silicon resin, glass, and ceramic may be used. Since the first substrate 13 is a portion that receives an external force, the first substrate 13 needs to have flexibility that can be deformed by the external force.

  As a material constituting the first electrode 14, copper is used as a preferred example. In order to stabilize the electrical connection with the pressure-sensitive conductive rubber 15, the surface of the first electrode 14 may be plated with gold. The first electrode 14 is formed on the first substrate 13 using a known technique.

The pressure-sensitive conductive rubber 15 is an elastic body in which conductive particles are dispersed in a resin having elasticity. As a suitable example, silicone rubber (silicon elastomer) having carbon particles dispersed therein is used. As the resin having elasticity, in addition to the above-mentioned silicon rubber, natural rubber, acrylic rubber, nitrile rubber, isoprene rubber, urethane rubber, ethylene propylene rubber, chlorosulfonated polyethylene, epichlorohydrin rubber, chloroprene rubber, styrene / butadiene rubber Synthetic rubbers such as butadiene rubber and fluorine rubber are preferred.
The pressure-sensitive conductive rubber 15 is sandwiched between the surface of the first substrate 13 on which the first electrode 14 is formed and the surface of the second substrate 17 on which the second electrode 16 is formed.

In a state where no external force is applied to the pressure-sensitive conductive rubber 15, the conductive particles in the pressure-sensitive conductive rubber 15 are separated from each other and exhibit a very large resistance value of 10 ⁷ Ω or more. When an external force in the compression direction acts on the pressure-sensitive conductive rubber 15, the conductive particles approach each other, the number of conductive particles in contact with each other increases, and a conductive path is formed. Becomes smaller. The pressure-sensitive conductive rubber 15 is deformed by the external force acting on the pressure-sensitive conductive rubber 15 as described above, and the resistance value of the pressure-sensitive conductive rubber 15 changes when the conductive particles come into contact with or separate from each other.

  As a material constituting the second substrate 17, a polycarbonate resin is used as a preferred example. As a material constituting the second substrate 17, in addition to the above-described polycarbonate resin, acrylic resin, epoxy resin, polyimide resin, polycarbonate resin, phenol resin, melamine resin, urea resin, FRP (fiber reinforced plastic), PET (polyethylene) Organic materials such as terephthalate) resin, polyolefin resin, and Teflon (registered trademark) resin may be used, and inorganic materials such as silicon resin, glass, and ceramic may be used.

  As a material constituting the second electrode 16, copper is used as a preferred example. In order to stabilize the electrical connection with the pressure-sensitive conductive rubber 15, the surface of the first electrode 14 may be plated with gold. The second electrode 16 is formed on the second substrate 17 using a known technique.

The partition wall W is formed on at least one of the first substrate 13 and the second substrate 17. In this embodiment, the partition wall W is formed on the second substrate 17 (the surface on the side where the second electrode 16 is formed) after the second electrode 16 is formed. The material constituting the partition wall W is an acrylic resin, and is formed by a photolithography method using a photosensitive acrylic resin. The partition wall W can also be formed by a method such as an inkjet method or a screen printing method.
Details of the partition wall W will be described later.

  Since the second electrode 16 is formed below the partition wall W, even if the first electrode 14 formed on the first substrate 13 approaches the second electrode 16 formed on the second substrate 17 by an external force, The first electrode 14 and the second electrode 16 do not short-circuit.

"Overview of detection area"
FIG. 2 is a schematic diagram showing a relationship between one detection region S and a partition wall W among a plurality of detection regions arranged on the sensor substrate 1, and the same region as FIG. 1 is shown. Specifically, a plurality of detection areas are arranged in a matrix in the X direction and the Y direction on the sensor substrate 1, but in FIGS. 1 and 2, one detection area (detection area S) and the detection area ( A part of the detection area arranged around the detection area S) is shown.
In FIG. 2, the first substrate 13, the first electrode 14, the second electrode 16, and the second substrate 17 are not shown for easy understanding of the relationship between the partition wall W and the detection region S. In FIG. 2, the area surrounded by the broken line is the detection area S, the shaded area is the pressure sensor 12, the two-dot chain line is the outline of the partition wall W arranged inside the pressure-sensitive conductive rubber 15, and the symbol P is the detection. The center (reference point) of the region S is shown.
In the following description, the detection area adjacent to the above-described detection area S is referred to as “adjacent detection area S”. Hereinafter, the outline of the detection region S will be described with reference to FIGS. 1 and 2.

  A plurality of pressure sensors 12 are arranged in the detection region S. As shown in FIG. 2, four pressure sensors 12 are arranged in the inspection region S in this embodiment. Specifically, in the detection region S, four pressure sensors 12 are arranged point-symmetrically around a symbol P (hereinafter referred to as a reference point P), that is, in two directions (X direction and Y direction orthogonal to each other). Are arranged in a matrix with 2 rows and 2 columns.

  The pressure sensor 12 includes a first electrode 14, a pressure-sensitive conductive rubber 15, and a second electrode 16. The pressure sensor 12 is formed in a region where the first electrode 14 extending in the Y direction and the second electrode 16 extending in the X direction intersect. The pressure sensor 12 is a resistance type pressure sensor that utilizes a phenomenon in which the pressure-sensitive conductive rubber 15 is deformed by an external force and the resistance value of the pressure-sensitive conductive rubber 15 changes. A change in the resistance value of the pressure-sensitive conductive rubber 15 is detected by the first electrode 14 and the second electrode 16.

  In FIG. 2, the intersection region (see FIG. 1) between the first electrode 14a and the second electrode 16a is the pressure sensor S1, and the intersection region between the first electrode 14b and the second electrode 16a (see FIG. 1) is the pressure sensor S2. The intersection region (see FIG. 1) between the first electrode 14a and the second electrode 16b is the pressure sensor S3, and the intersection region (see FIG. 1) between the first electrode 14b and the second electrode 16b is the pressure sensor S4. Thus, four pressure sensors S1 to S4 are arranged in the detection region S.

  A pressure sensor S2a, a pressure sensor S1, a pressure sensor S2, and a pressure sensor S1b are arranged in this order from the left side along the line A-A 'in FIG. That is, in the adjacent detection region S, pressure sensors S2a and S1b are arranged.

  In the following description, the pressure sensor may be described with reference numerals 12, S1, S2, S3, S4, S1b, or S2a with different reference numbers for the sake of description.

"Outline of bulkhead"
The partition wall W is formed between adjacent detection regions S among the plurality of detection regions S. As shown in FIG. 2, a partition wall W is formed between the detection region S and the adjacent detection region S, and the detection region S is surrounded by the partition wall W. Specifically, the partition wall W1 is adjacent to the pressure sensor S1 and the pressure sensor S3, the partition wall W2 is adjacent to the pressure sensor S1 and the pressure sensor S2, and the partition wall W3 is adjacent to the pressure sensor S2 and the pressure sensor S4. A partition wall W4 is formed adjacent to the pressure sensor S3 and the pressure sensor S4.

  The partition wall W is made of a hard material that has a larger elastic modulus than the resin (silicon rubber) having elasticity that constitutes the pressure-sensitive conductive rubber 15 and is difficult to deform. As described above, an acrylic resin is used as a material constituting the partition wall W as a suitable example. The material forming the partition wall W may be an organic material such as polycarbonate resin, phenol resin, melamine resin, urea resin, FRP (fiber reinforced plastic), and PET (polyethylene terephthalate) in addition to the acrylic resin. Or inorganic materials, such as glass and a ceramic, may be sufficient. In short, the partition wall W may be a hard material that has a larger elastic modulus than the pressure-sensitive conductive rubber 15 and is not easily deformed.

  The thickness of the partition wall W is smaller than the thickness of the pressure-sensitive conductive rubber 15, and the deformation of the pressure-sensitive conductive rubber 15 in the detection region S is not inhibited by the partition wall W when an external force is applied to the detection region S. Yes. Further, the thickness of the partition wall W and the thickness of the pressure-sensitive conductive rubber 15 may be equal.

  The partition wall W may have a continuous shape such as a lattice shape. By making the partition wall W into a continuous shape like a lattice shape, the mechanical strength of the partition wall W increases, and the partition wall W can be made difficult to break even when a larger external force is applied.

  FIG. 3 is a cross-sectional view of the partition wall W (W1) taken along the line A-A 'of FIG. In the present embodiment, the sectional shape of the partition wall W is substantially rectangular as shown in FIG. The cross-sectional shape of the partition wall W may be a conical shape (FIG. 3B), a trapezoidal shape (FIG. 3C), or a triangular shape (FIG. 3D). Further, as shown in FIG. 3B, by rounding the tip of the partition wall W, the pressure-sensitive conductive rubber 15 can be hardly damaged at the tip of the partition wall W.

"Sensor board condition"
4 is a cross-sectional view of the sensor substrate 1 taken along the line AA ′ in FIG. 1 (the line AA ′ in FIG. 2). 4A shows the state of the sensor substrate 1 when no external force is applied (no load state), and FIG. 4B shows the sensor substrate 1 when the external force in the compression direction (downward) indicated by the arrow is applied. FIG. 4C shows the state of the sensor substrate 1 when an external force in the sliding direction (right direction) is applied in addition to the external force in the compression direction, that is, when an external force in the oblique direction indicated by the arrow is applied. Show.
The sensor substrate 1 is installed on a rigid support (not shown), and the upper surface (first substrate 13) on which an external force acts is deformed.

  As shown in FIG. 4A, the pressure-sensitive conductive rubber 15 of the sensor substrate 1 is not deformed in a no-load state. Further, since the first electrode 14, the second electrode 16 and the partition wall W are thermocompression bonded to the thermoplastic pressure-sensitive conductive rubber 15, they are arranged inside the pressure-sensitive conductive rubber 15.

  As shown in FIG. 4B, when an external force in the compression direction (downward) acts on the detection region S, the pressure-sensitive conductive rubber 15 in the detection region S is deformed in the compression direction. Moreover, since the 1st board | substrate 13 is comprised with the resin film which consists of a polyimide which has flexibility, the 1st board | substrate 13 also deform | transforms in a compression direction with external force. On the other hand, in the adjacent detection region S, the pressure-sensitive conductive rubber 15 of the pressure sensor S2a and the pressure-sensitive conductive rubber 15 of the pressure sensor S1b are not deformed.

  As shown in FIG. 4C, when an external force in an oblique direction is applied to the detection region S, the pressure-sensitive conductive rubber 15 in the detection region S is deformed in a direction (an oblique direction) in which the external force is applied. On the other hand, in the adjacent detection region S, the pressure-sensitive conductive rubber 15 of the pressure sensor S2a and the pressure-sensitive conductive rubber 15 of the pressure sensor S1b are not deformed.

  FIG. 5 illustrates a case where an external force (an external force in an oblique direction) indicated by the same arrow as in FIG. 4C described above is applied to the sensor substrate 2 (sensor substrate 2 on which the partition wall W is not formed) created by a known technique. Indicates the state. Other configurations of the sensor substrate 2 are the same as those of the sensor substrate 1 described above. 5 corresponds to a cross-sectional view taken along the line AA ′ in FIG. 1 (the line AA ′ in FIG. 2), and the sensor substrate 2 is installed on a rigid support (not shown). It is assumed that the upper surface (first substrate 13) on which the external force acts is deformed.

  As shown in FIG. 5, under the condition where the partition wall W is not formed, when an external force in the same direction as that in FIG. 4C (an external force in an oblique direction) acts on the detection region S, the pressure-sensitive conductivity of the adjacent detection region S The rubber 15 is also deformed. Also, when an external force in the same direction as in FIG. 4B (external force in the compression direction) acts on the detection region S, the pressure-sensitive conductive rubber 15 in the adjacent detection region S is similarly deformed (not shown).

  From the above, it can be seen that by forming the partition wall W between the detection region S and the adjacent detection region S, the external force acting on the detection region S is blocked by the partition wall W and is not propagated to the adjacent detection region S. On the other hand, in the case where the partition wall W is not formed, it can be seen that the external force applied to the detection region S is propagated to the adjacent detection region S and deforms the pressure-sensitive conductive rubber 15 in the adjacent detection region S.

  That is, the external force applied to the detection region S is not detected by the pressure sensor 12 in the adjacent detection region S when the partition wall W is formed, but is adjacent to the detection region S when the partition wall W is not formed. It can be seen that the pressure sensor 12 detects (falsely detects).

As described above, according to the sensor substrate 1 according to the present embodiment, the following effects can be obtained.
The partition wall W formed between the detection region S and the adjacent detection region S is made of a hard material having a larger elastic modulus than the pressure-sensitive conductive rubber 15 and hardly deforms. The applied external force is received and the propagation of the external force to the adjacent detection region S is suppressed. Therefore, the external force applied to the detection region S is not erroneously detected by the pressure sensor 12 in the adjacent detection region S.
Furthermore, since the thickness of the partition wall W is smaller than the thickness of the pressure-sensitive conductive rubber 15, the external force that has acted on the detection region S is not hindered by the partition wall W and acts on the detection region S accurately.

  Therefore, the external force acting on the detection region S is not erroneously detected by the pressure sensor 12 in the adjacent detection region S, and can be accurately detected by the pressure sensor 12 in the detection region S.

  Even if the interval between the detection region S and the adjacent detection region S is reduced, the partition wall W exists between the detection region S and the adjacent detection region S. Therefore, the external force acting on the detection region S is caused by the partition wall W. It is blocked and propagated to the adjacent detection area S. Therefore, since the interval between the plurality of detection regions S can be made smaller, the sensor substrate 1 can be made more dense and smaller.

The sensor substrate 1 of the present embodiment is configured by a resistance type pressure sensor 12 that detects an external force from a resistance change of the pressure-sensitive conductive rubber 15. The pressure-sensitive conductive rubber 15 is replaced with an elastic resin (dielectric), and the sensor substrate 1 is an electrostatic pressure that detects an external force from a change in the thickness of the elastic resin (change in electrostatic capacity). You may comprise with a sensor. Examples of such elastic resins include natural rubber, acrylic rubber, nitrile rubber, isoprene rubber, urethane rubber, ethylene propylene rubber, chlorosulfonated polyethylene, epichlorohydrin rubber, chloroprene rubber, styrene / butadiene rubber, and butadiene rubber. And synthetic rubbers such as silicon rubber and fluorine rubber.
The resin having elasticity described above is an example of “an elastically deformable dielectric”.

  Even if the sensor substrate 1 is constituted by a capacitance type pressure sensor made of an elastic resin, the same effect as the sensor substrate 1 constituted by a resistance type pressure sensor 12 made of a pressure sensitive conductive rubber 15 can be obtained. Can do. That is, the external force that has acted on the detection region S is blocked by the partition wall W formed between the detection region S and the adjacent detection region S. Therefore, the external force is erroneously detected by the capacitive pressure sensor 12 in the adjacent detection region S. It can suppress that it is detected.

  Note that the present invention is not limited to the above-described embodiment, and various modifications and improvements can be added to the above-described embodiment. A modification will be described below. Further, in the following description, with reference to the drawing corresponding to FIG. 1 or FIG. 4 (cross-sectional view along the line AA ′ in FIG. 1) in the embodiment, the same components as those in the embodiment are the same. Numbers are assigned, overlapping descriptions are omitted, and differences from the embodiment will be mainly described.

(Modification 1)
FIG. 6 is a cross-sectional view of the sensor substrate 1 according to the first modification. The difference from the embodiment is in the position where the partition wall W is formed. Specifically, the partition wall W according to the embodiment is formed on the second substrate 17 (the surface on the side where the second electrode 16 is formed) disposed on the side opposite to the side on which the external force acts. The partition wall W according to this modification is different in that it is formed on the first substrate 13 (the surface on the side on which the first electrode 14 is formed) disposed on the side on which the external force acts, and other configurations are the embodiments. Is the same.

  In this modification, the same effect as the embodiment can be obtained.

  The partition wall W may be formed on the second substrate 17 as shown in the prevailing form, or may be formed on the first substrate 13 as in this modification, and although not shown, the first substrate 13 and the first substrate The two substrates 17 may be formed at different positions. That is, the partition wall W only needs to be formed on at least one of the first substrate 13 and the second substrate 17.

(Modification 2)
7A and 7B are diagrams showing a schematic configuration of the sensor substrate 1 according to the modification 2. FIG. 7A is a sectional view, and FIG. 7B is a plan view. In FIG. 7B, the four pressure sensors S1 to S4 arranged in the detection region S are illustrated by broken lines. 7A, the broken lines P1, P2 indicate the pressure sensor 12 formed by the first electrode 14 and the second electrode 16, and the two-dot chain line in FIG. Denotes the center (reference point) of the detection region S, and R denotes the resistance of the pressure-sensitive conductive rubber 15 detected by the first electrode 14 and the second electrode 16.

  The main difference from the embodiment is the formation position of the first electrode 14 and the second electrode 16 that form the pressure sensor 12. Specifically, in the embodiment, the first electrode 14 is formed on the first substrate 13, the second electrode 16 is formed on the second substrate 17, and the first electrode 14 and the second electrode 16 intersect in a plane. Thus, the pressure sensor 12 is formed. In this modification, the first electrode 14 and the second electrode 16 are formed on the second substrate 17, and the difference is that the pressure sensor 12 is formed between the first electrode 14 and the second electrode 16 adjacent to the first electrode 14. . That is, the pressure sensor 12 of the embodiment detects the resistance in the longitudinal direction of the pressure-sensitive conductive rubber 15 (the direction perpendicular to the surface of the sensor substrate 1), but the pressure sensor 12 of this modification has the pressure-sensitive conductive rubber 15 The difference is that the resistance in the horizontal direction (direction parallel to the surface of the sensor substrate 1) is detected.

  As shown in FIG. 7A, the first electrode 14 and the second electrode 16 are copper, and are formed on the second substrate 17 at the same time by a process using a known technique. The partition walls W (W1, W3) are formed by forming the first electrode 14 and the second electrode 16 on the second substrate 17 and then forming the second substrate 17 (the first electrode 14 and the first electrode 14) by photolithography using a photosensitive acrylic resin. The surface on which the second electrode 16 is formed). The pressure sensor S1 is formed in a region P1 indicated by a broken line, and the pressure sensor S2 is formed in a region P2 indicated by a broken line.

As shown in FIG. 7B, in plan view, the first electrode 14 and the second electrode 16 are substantially rectangular and are arranged so as to be substantially parallel. A square indicated by a broken line sandwiched between the first electrode 14 and the second electrode 16 is one pressure sensor 12. That is, the pressure sensor 12 is formed by the first electrode 14 and the second electrode 16 adjacent to the first electrode 14, and measures the electric resistance R of the pressure-sensitive conductive rubber 15.
In this way, four pressure sensors S <b> 1 to S <b> 4 are arranged in the detection region S with point symmetry about the reference point P.
Note that the method of the pressure sensor 12 is not particularly limited, and for example, a capacitance method or the like can be used.

  A wiring portion (not shown) of the pressure sensor 12 is provided in a gap between the detection regions S. When the number of detection regions S increases or when the number of pressure sensors 12 arranged in the detection regions S increases, for example, the resistance of the pressure-sensitive conductive rubber 15 is reduced using a flexible printed circuit board having a multilayer structure. The electrode portions (first electrode 14 and second electrode 16) to be detected and the wiring portion may be formed in separate layers. By using a flexible printed board having a multilayer structure and forming the wiring portion in a separate layer, the pressure sensor 12 arranged in the detection region S or the detection region S can be arranged at a higher density.

  Moreover, although the 1st electrode 14 and the 2nd electrode 16 were alternately arrange | positioned in this modification, you may arrange | position so that the electrode which becomes the same polarity may adjoin with the adjacent pressure sensor 12 in the detection area S. In other words, the first electrode 14, the second electrode 16, the second electrode 16, and the first electrode 14 may be arranged in order from the left side of the electrodes in the region S. In such a configuration, the distance between the pressure sensor S1 and the pressure sensor S2 can be further reduced.

  In this modification, in addition to the effects of the embodiment, the first electrode and the second electrode are formed in a single step in the same process, so the process of forming the first substrate and the second substrate is simplified by one process. The sensor substrate can be provided at a lower cost.

  Furthermore, since the first electrode 14 and the second electrode 16 are formed on the surface (second substrate 17) opposite to the side on which the external force acts (first substrate 13), the first electrode 14 and the second electrode 16 due to the external force are formed. The deformation with the two electrodes 16 can be reduced. Therefore, mechanical stress between the first electrode 14 and the second electrode 16 due to external force is reduced, durability of both electrodes is improved, and the sensor substrate 1 can be extended in life.

  Alternatively, the second substrate 17 having the first electrode 14 and the second electrode 16 may be formed using a flexible printed circuit board having a multilayer structure (hereinafter referred to as an FPC board). Specifically, as the second substrate 17 having the first electrode 14 and the second electrode 16, the electrode portions (first electrode 14 and second electrode 16) for detecting the resistance of the pressure-sensitive conductive rubber 15 and the wiring portion are separately provided. A multi-layer FPC board formed in the above layer may be used. By using such a multi-layer FPC board, the above-described electrode portions (first electrode 14 and second electrode 16) can be formed with a density comparable to that of the electrode portions described in the embodiment.

(Modification 3)
FIG. 8 is a cross-sectional view of the sensor substrate 1 according to the third modification. The difference from the above-described modification 2 is the position where the partition wall W is formed. Specifically, in the second modification, the partition wall W is formed on the second substrate 17 having the first electrode 14 and the second electrode 16, but in this modification, the partition wall W is formed on the first substrate 13. Is different. Other configurations are the same as those of the second modification.

  In this modification, the same effects as those of Modification 2 described above can be obtained.

(Modification 4)
FIG. 9 is a cross-sectional view of the sensor substrate 1 according to the fourth modification. The main differences from the embodiment are the number of parts constituting the sensor substrate 1, the formation position of the first electrode 14 and the second electrode 16 (formation position of the pressure sensor 12), and the state of the surface on which the external force acts And the thickness of the partition wall W.

  In the embodiment, the sensor substrate 1 includes the first substrate 13 having the first electrode 14, the pressure-sensitive conductive rubber 15, and the second substrate 17 having the second electrode 16. This modification is composed of a pressure-sensitive conductive rubber 15 and an electrode substrate 18 having a first electrode 14 and a second electrode 16, and is different in that the number of substrates is one less than that in the embodiment. The electrode substrate 18 is an example of a “substrate”.

  Further, the first electrode 14 and the second electrode 16 are formed on the same substrate (electrode substrate 18), and the pressure sensor 12 is formed between the first electrode 14 and the adjacent second electrode 16, Different from the embodiment. Furthermore, in the embodiment, the external force acts on the first substrate 13, but the present modification is different in that the external force acts on the pressure-sensitive conductive rubber 15. Furthermore, the thickness of the partition wall W in FIG. 9B and FIG. 9C is also different from the embodiment. That is, in the embodiment, the thickness of the partition wall W is smaller than the thickness of the pressure-sensitive conductive rubber 15, but in FIG. 9B, the thickness of the partition wall W is equal to the thickness of the pressure-sensitive conductive rubber 15. In c), the thickness of the partition wall W is larger than the thickness of the pressure-sensitive conductive rubber 15, and the partition wall W protrudes from the pressure-sensitive conductive rubber 15.

  The electrode substrate 18 is a polycarbonate resin. On the electrode substrate 18, the first electrode 14 and the second electrode 16 are collectively formed in the same process, and then the partition wall W is formed by a photolithography method using a photosensitive acrylic resin. The pressure sensor S1 is formed in a region P1 indicated by a broken line, and the pressure sensor S2 is formed in a region P2 indicated by a broken line.

  In the present modification, in addition to the effects of the embodiment, the number of substrates constituting the sensor substrate 1 is one less than that of the embodiment, and the number of steps for forming the first electrode 14 and the second electrode 16 is one less. Therefore, the sensor substrate 1 can be provided at a lower cost.

  Further, as shown in FIG. 9C, since the thickness of the partition wall W is larger than the thickness of the pressure-sensitive conductive rubber 15, the external force that has acted on the detection region S is propagated to the adjacent detection region S. This can be suppressed more strongly.

(Modification 5)
FIG. 10 is a cross-sectional view of the sensor substrate 1 according to the fifth modification. The difference from the above-described modification 4 is that the shape of the pressure-sensitive conductive rubber 15 and the partition wall W do not exist. In the fourth modification, the pressure-sensitive conductive rubber 15 is formed on almost the entire surface of the sensor substrate 1, and a partition wall W is formed between the detection region S and the adjacent detection region S. In the present modification, the pressure-sensitive conductive rubber 15 is separated for each detection region S and is formed in an island shape, and no partition wall W exists between the detection region S and the adjacent detection region S. This point is different from the fourth modification, and other configurations are the same.

  Such pressure-sensitive conductive rubber 15 separated for each detection region can be formed by an ink jet method, a screen printing method, or the like using a conductive paint (silicon resin paste) in which carbon particles are dispersed. Moreover, the pressure sensitive conductive rubber 15 which consists of Teflon (trademark) rubber | gum can also be formed by using the conductive coating comprised by a Teflon (trademark) resin paste.

  In the configuration of this modification, the pressure-sensitive conductive rubber 15 in the detection region S and the pressure-sensitive conductive rubber 15 in the adjacent detection region S are separated from each other, and thus act on the pressure-sensitive conductive rubber 15 in the detection region S. The external force is suppressed from being propagated to the pressure-sensitive conductive rubber 15 in the adjacent detection region S. Therefore, it is possible to prevent the external force acting on the detection region S from being erroneously detected by the pressure sensor 12 in the adjacent detection region S.

(Modification 6)
FIG. 11 is an exploded perspective view showing the configuration of the sensor substrate 1 according to Modification 6. As shown in FIG. The difference from the embodiment is the formation position of the partition wall W. That is, in the embodiment, the partition wall W is formed on the second substrate 17, but in the present modification, the partition wall W is formed inside the pressure-sensitive conductive rubber 15, and other configurations are the same.

  The partition wall W is formed in the pressure-sensitive conductive rubber 15 between adjacent detection regions among the plurality of detection regions, with the lower surface of the pressure-sensitive conductive rubber 15 (the surface opposite to the side on which the external force acts) as a base. Yes. The pressure-sensitive conductive rubber 15 having the partition wall W in such an interior has, for example, weak support with a resin (acrylic resin, silicon resin) and a Teflon (registered trademark) on a support substrate that can easily peel the resin film, for example, the surface. ) Can be used to form the support substrate (not shown). First, partition walls W are formed on a support substrate coated with Teflon (registered trademark) on the surface by a photolithography method using a photosensitive acrylic resin, and then a conductive paint (silicon resin paste) in which carbon particles are dispersed is applied. Apply and cure the conductive paint by heat or light. Next, the pressure-sensitive conductive rubber 15 having the partition walls W inside can be formed by peeling the cured resin film from the support substrate. For example, the peelability of the pressure-sensitive conductive rubber 15 from the support substrate can be improved by thinly applying silicon oil or the like to the above-described support substrate before the partition wall W is formed.

  Also in the configuration of this modification example, since the partition wall W exists between the detection region S and the adjacent detection region S, the external force acting on the detection region S is blocked by the partition wall W. Propagation is suppressed. Therefore, it is possible to prevent the external force acting on the detection region S from being erroneously detected by the pressure sensor 12 in the adjacent detection region S.

  Furthermore, since it is not necessary to form the partition wall W on the second substrate 17, a commercially available FPC substrate can be used as the second substrate 17 having the second electrode 16. That is, by using a commercially available FPC board as the first board 13 having the first electrode 14 and the second board 17 having the second electrode 16, diversification of parts procurement and cost reduction can be achieved. it can.

  The partition wall W may be formed with the upper surface of the pressure-sensitive conductive rubber 15 (the surface on the side on which the external force acts) as the base. Further, the partition wall W may be formed so as to be enclosed in the pressure-sensitive conductive rubber, instead of being formed using one surface of the pressure-sensitive conductive rubber 15 as a base.

  Alternatively, the first electrode 14 and the second electrode 16 may be formed on the same substrate (for example, the second substrate 17), and the pressure sensor 12 may be formed between the first electrode 14 and the adjacent second electrode 16. good. When the first electrode 14 and the second electrode 16 are formed on the second substrate 17, the first substrate 13 may be omitted.

  Next, a detection apparatus equipped with the sensor substrate 1 according to the above-described embodiment or modification will be described. In the following description, the same components as those in the embodiment are denoted by the same reference numerals, and redundant description is omitted.

(Detection device A)
"Detailed configuration of detection device A"
FIG. 12 is an exploded perspective view showing a schematic configuration of the detection apparatus A on which the sensor substrate 1 is mounted.
As shown in FIG. 12, the detection device A includes a sensor substrate 1, an elastic protrusion 22, and an urging substrate 20. The elastic protrusion 22 is formed on the urging substrate 20, the center of gravity is located at a position overlapping the reference point P, and the elastic protrusion 22 is elastically deformed in a state where the tip portion is in contact with the sensor substrate 1 by an external force.

  Note that the reference point P is a point where the center of the detection region S is located, and the elastic protrusion 22 has a force in a sliding direction (a direction horizontal to the detection device A) is not applied to the elastic protrusion 22. This is the point where the center (center of gravity) is located.

  In the detection region S of the sensor substrate 1, four pressure sensors 12 are arranged point-symmetrically with respect to the reference point P (see FIG. 2). Thereby, since the distance between the reference point P and each pressure sensor 12 becomes equal to each other, the relationship between the deformation of the elastic protrusion 22 and the pressure value detected by each pressure sensor 12 becomes equal to each other. Therefore, it becomes easy to calculate the difference between the pressure values detected by the pressure sensors 12 arbitrarily combined among the pressure values of the pressure sensors 12. A method for calculating the difference between the pressure values will be described later.

  The size of the detection area S (size in plan view) is about 2.8 mm long × 2.8 mm wide. Further, the areas of the four pressure sensors 12 are substantially equal. The interval between adjacent pressure sensors 12 is about 0.1 mm. For this reason, noise is not applied to the pressure value detected by the pressure sensor 12 at the adjacent position due to the influence of disturbance, static electricity, or the like.

  The urging substrate 20 is composed of an urging substrate body 21 and an elastic protrusion 22, and the urging substrate body 21 is a portion that receives an external force. The urging substrate main body 21 and the elastic protrusion 22 are made of silicon rubber and are integrally formed with a mold.

  In addition to the silicon rubber described above, the biasing substrate body 21 can be made of a hard material such as glass, ceramic, acrylic resin, polycarbonate resin, and FRP (fiber reinforced plastic), natural rubber, synthetic rubber, or the like. It can also be comprised with soft materials, such as rubber | gum, Teflon (trademark) resin, and polyolefin resin.

  In addition to the silicon rubber described above, the elastic protrusion 22 is made of natural rubber, acrylic rubber, nitrile rubber, isoprene rubber, urethane rubber, ethylene propylene rubber, chlorosulfonated polyethylene, epichlorohydrin rubber, chloroprene rubber, styrene / butadiene rubber, A synthetic rubber such as butadiene rubber and fluorine rubber can also be used.

  The plurality of elastic protrusions 22 are arranged in a matrix in the X direction and the Y direction on the biasing substrate body 21. The tip of the elastic protrusion 22 has a spherical weight shape and is in contact with the sensor substrate 1 (a plurality of pressure sensors 12 on the sensor substrate 1). The center of gravity of the elastic protrusion 22 is initially arranged at a position overlapping the reference point P. Further, the plurality of elastic body protrusions 22 are spaced apart from each other. For this reason, it is possible to allow deformation in a direction parallel to the surface of the biasing substrate 20 when the elastic protrusion 22 is elastically deformed.

  The size of the elastic protrusion 22 can be arbitrarily set. Here, the diameter of the base of the elastic protrusion 22 (the diameter of the portion where the elastic protrusion 22 contacts the biasing substrate body 21) is about 1.8 mm. The height of the elastic protrusion 22 (the distance in the Z direction of the elastic protrusion 22) is about 2 mm. The spacing between adjacent elastic protrusions 22 is about 2 mm. The durometer hardness (type A, durometer based on ISO7619 (measured value) of the elastic protrusion 22 is about 30.

"Details of external force detection method"
FIG. 13 is a plan view showing a change in pressure value by the pressure sensor 12 according to the detection apparatus A. FIG. In FIG. 13, four pressure sensors 12 (S1 to S4) and elastic protrusions 22 arranged in the detection region S are illustrated. A shaded area 22a surrounded by a solid line in the figure indicates an area where the elastic protrusion 22 is in contact with the detection area S. FIG. 13A shows a state before an external force is applied to the surface of the urging substrate body 21 (a state where no external force is applied), and FIG. 13B shows a direction perpendicular to the surface of the urging substrate body 21 (sliding force). 13 (c) shows a state in which an external force is applied, and FIG. 13 (c) shows a state in which an external force in an oblique direction (with a sliding force) is applied to the surface of the biasing substrate body 21. Further, in FIGS. 13A to 13C, the symbol G indicates the center of gravity (pressure center) of the elastic protrusion 22.
Hereinafter, a method for detecting the direction and magnitude of the external force acting on the reference point P will be described with reference to FIG.

  As shown in FIG. 13A, before an external force is applied to the surface of the urging substrate body 21, the center of gravity G of the elastic protrusion 22 is arranged at a position overlapping the reference point P, and the elastic protrusion 22 is The distance between the detection area S and the urging substrate 20 is kept constant by contacting the detection area S. The pressure value of each pressure sensor 12 at this time is stored in a memory (not shown). The direction and magnitude of the external force acting are obtained based on the pressure value of each pressure sensor 12 stored in the memory.

  As shown in FIG. 13 (b), when an external force in the vertical direction (Z-axis (−) direction) is applied to the surface of the urging substrate body 21, the elastic protrusion 22 has a tip on the surface of the detection region S. In the state of being in contact with a plurality of arranged pressure sensors 12, it is compressed and deformed in the Z direction. As a result, the urging substrate 20 is bent in the −Z direction, and the distance between the detection region S and the urging substrate 20 becomes smaller than when there is no external force. The pressure value of the pressure sensor 12 at this time becomes larger than when there is no external force. The amount of change is substantially the same for each pressure sensor 12.

  As shown in FIG. 13C, when the external force in the oblique direction (the resultant force of the force in the vertical direction and the force in the sliding direction) is applied to the surface of the urging substrate body 21, the elastic protrusion 22 has a tip portion. In a state of being in contact with the plurality of pressure sensors 12 arranged on the surface of the detection region S, the pressure sensor 12 is inclined and compressed and deformed. Thereby, the urging substrate 20 is bent in the −Z direction, and the distance between the detection region S and the urging substrate 20 is smaller than when there is no external force. At this time, the center of gravity G of the elastic protrusion 22 is shifted from the reference point P in the + X direction and the + Y direction. In this case, the overlapping area (contact area) of the tip portion of the elastic protrusion 22 and the four pressure sensors 12 (S1 to S4) is different between the pressure sensors (S1 to S4). Specifically, the overlapping area between the tip of the elastic protrusion 22 and the four pressure sensors 12 is a portion of the four pressure sensors 12 (S1 to S4) arranged in the −X direction and the −Y direction. The area overlapped with the portions arranged in the + X direction and the + Y direction is larger than the area overlapping with.

  The elastic protrusion 22 is biased in deformation by an external force in an oblique direction. That is, the center of gravity G of the elastic protrusion 22 is shifted from the reference point P and moves in the sliding direction (X direction and Y direction). Then, each pressure sensor 12 detects a different pressure value. Specifically, a relatively large pressure value is detected by the pressure sensor 12 at a position overlapping the gravity center G of the elastic protrusion 22, and a relatively small pressure is detected by the pressure sensor 12 at a position not overlapping with the gravity center of the elastic protrusion 22. A value will be detected. And the direction and magnitude | size where the external force acted are calculated | required based on the calculation method of the difference mentioned later.

Next, details of the calculation method for obtaining the direction and magnitude of the external force applied to the detection region S will be described.
14 shows the coordinate system of the detection region S, FIG. 15 shows the external force distribution in the vertical direction by the pressure sensor 12, and FIG. 16 shows an example of calculation of the slip direction by the pressure sensor.

As shown in FIG. 14, a plurality of pressure sensors S <b> 1 to S <b> 4 are arranged in a total of four rows and two columns per detection region S. Here, when the pressure values (detected values) detected by the pressure sensors S1 to S4 are P _S1 , P _S2 , P _S3 , and P _S4 , the X direction component Fx of the external force (X of the in-plane direction components of the external force) The ratio of the component force acting in the direction) is expressed by the following formula (1).

  Further, the Y direction component Fy of the external force (the ratio of the component force acting in the Y direction among the in-plane direction components of the external force) is expressed by the following equation (2).

  Further, the Z direction component Fz of the external force (vertical direction component of the external force) is expressed by the following equation (3).

  As shown in Expression (1), in the X direction component Fx of the external force, the values detected by the pressure sensors S2 and S4 arranged in the + X direction among the pressure values detected by the four pressure sensors S1 to S4. And the values detected by the pressure sensors S1 and S3 arranged in the −X direction are combined. As described above, the X direction component of the external force is based on the difference between the pressure value obtained by the combination of the pressure sensors S2 and S4 arranged in the + X direction and the pressure value obtained by the combination of the pressure sensors S1 and S3 arranged in the -X direction. Desired.

  As shown in Expression (2), in the Y direction component Fy of the external force, the values detected by the pressure sensors S1 and S2 arranged in the + Y direction among the pressure values detected by the four pressure sensors S1 to S4. Are combined, and the values detected by the pressure sensors S3 and S4 arranged in the -Y direction are combined. Thus, the Y direction component of the external force is based on the difference between the pressure value obtained by the combination of the pressure sensors S1 and S2 arranged in the + Y direction and the pressure value obtained by the combination of the pressure sensors S3 and S4 arranged in the -Y direction. Desired.

  As shown in Expression (3), the Z-direction component Fz of the external force is obtained as a resultant force obtained by adding the pressure values of the four pressure sensors S1 to S4. However, the Z direction component Fz of the external force tends to be detected with a larger detection value than the X direction component Fx of the external force and the Y direction component Fy (component force) of the external force. For example, when a hard material is used as the material of the elastic protrusion 22 or the shape of the tip is sharpened, the detection sensitivity of the Z-direction component Fz of the external force increases. However, if a hard material is used as the material of the elastic protrusions 22, the elastic protrusions 22 are difficult to deform, and the detected value of the external force in the in-plane direction becomes small. Further, when the shape of the tip of the elastic protrusion 22 is sharpened, a strong sensitivity (discomfort) may be given to the touch feeling when the contact surface is touched with a finger. For this reason, in order to align the detected value of the Z direction component Fz of the external force with the detected value of the X direction component Fx and the Y direction component Fy of the external force, detection is performed with a correction coefficient determined by the material and shape of the elastic protrusion 22. It is necessary to correct the value appropriately.

  As shown in FIG. 15, a case is considered where the upper left position of the detection surface of the detection apparatus A (the surface on which the elastic protrusion 22 of the biasing substrate body 21 is not formed) is pushed diagonally with a finger. In the detection device A, detection areas S are arranged in a matrix of 15 rows × 15 columns (225 in total). That is, a rectangular grid surrounded by a solid line in FIG. 15 is a detection area S, and each detection area S includes four pressure sensors S1 to S4 (not shown) in two rows and two columns.

  At this time, the pressure in the vertical direction of the external force (voltage converted value of the pressure) is the largest at the center of the portion where the external force is applied (about 90 to 120 mV). Further, the vertical pressure of the external force decreases in the order of the peripheral portion (about 60 to 90 mV) and the outermost peripheral portion (about 30 to 60 mV) next to the central portion. Moreover, the area | region which is not pressed with the finger | toe is about 0-30 mV.

  As shown in FIG. 16, a method for calculating an in-plane direction component (sliding direction) of an external force when the position left upper than the center of the detection surface of the detection apparatus A is obliquely pushed with a finger will be considered. It is assumed that the finger pressing force (external force) acts on the detection region S of the portion arranged in 3 rows × 3 columns in the detection region S arranged in 15 rows × 15 columns.

FIG. 16A shows the total value (P _S1 + P _S2 + P _S3 + P _S4 ) of the detection values of the four pressure sensors S1 to S4 in the detection region S where an external force is applied. FIG. 16B shows the detection values (P _S1 , P _S2 , P _S3 , P _S4 ) of the four pressure sensors S1 to S4 in the detection area S described above for each detection area S. Moreover, the solid line of FIG.16 (b) has shown the boundary of the detection area S, and the broken line has shown the boundary of pressure sensor S1-S4. FIG. 16C shows the layout and coordinate system of the four pressure sensors S1 to S4 arranged in the detection region S surrounded by the broken line Q in FIG. Moreover, as shown in FIG.16 (c), the detected value of pressure sensor S1- _S4 becomes _PS1 -PS4. The four pressure sensors S1 to S4 in the other detection regions S in FIG. 16B also have the same layout and coordinate system as in FIG. FIG. 16D shows, for each detection region S, the X-direction component Fx of the external force and the Y-direction component Fy of the external force obtained by the above-described equations (1) and (2).

  The direction in which the external force acts is, for example, a method of obtaining an average value of nine calculation results shown in FIG. 16D, for example, a maximum value (for example, a detection value larger than a predetermined threshold value) among the nine calculation results. It can be obtained using a method for obtaining it. Here, the nine calculation results shown in FIG. 16D are averaged to obtain the X direction component Fx of the external force and the Y direction component Fy of the external force. The external force is about 123 ° counterclockwise with respect to the + X direction. It can be seen that it is acting in the direction of.

  In this way, each detection region S arranged in 3 rows × 3 columns has four pressure sensors S1 to S4, and among the detection values detected by the pressure sensors S1 to S4, The difference between the detection values of the pressure sensors S1 to S4 arbitrarily combined is calculated, and the direction and magnitude in which the external force is applied are calculated based on the difference.

As described above, according to the detection apparatus A, the following effects can be obtained.
Since the detection apparatus A includes the sensor substrate 1 and the partition wall W is formed around each detection region S of the sensor substrate 1, the external force that has acted on the detection region S is propagated to the adjacent detection region S. Is suppressed. Therefore, erroneous detection of the external force acting on the detection region S by the pressure sensor 12 in the adjacent detection region S is suppressed. Therefore, it is possible to provide the detection device A that can detect the magnitude of the applied external force with high accuracy.

  The detection device A may be deformed in a sliding direction (a direction horizontal to the detection device A) in a state where the tip of the elastic protrusion 22 formed on the biasing substrate 20 is in contact with the detection region S (sensor substrate 1). Since it is possible, the direction and magnitude of the applied external force can be detected with high accuracy.

  Specifically, when an external force is applied to the surface of the urging substrate 20, the elastic protrusion 22 is compressed and deformed in a state in which the distal end portion is in contact with the plurality of pressure sensors 12 arranged in the detection region S (sensor substrate 1). To do. At this time, when there is a sliding force component in a predetermined direction in the surface, the elastic protrusion 22 is biased in deformation. That is, the center of gravity G of the elastic protrusion 22 is shifted from the reference point P and moves in a predetermined direction (sliding direction). As a result, the ratio of the plurality of pressure sensors 12 overlapping the portion where the center of gravity G of the elastic protrusion 22 has moved relatively increases. That is, different pressure values are detected by the pressure sensors S1 to S4. Specifically, a relatively large pressure value is detected by the pressure sensor 12 at a position overlapping the gravity center G of the elastic protrusion 22, and a relatively small pressure is detected by the pressure sensor 12 at a position not overlapping with the gravity center of the elastic protrusion 22. A value will be detected. Therefore, the difference between the pressure values detected by the pressure sensors S1 to S4 can be calculated, and the direction in which the external force is applied can be obtained based on the difference. Therefore, it is possible to provide the detection device A that can detect the direction and magnitude of the applied external force with high accuracy.

(Detection device B)
Next, the detection apparatus B on which the sensor substrate 1 shown in FIG. 17 is mounted will be described. In the following description, differences from the above-described detection apparatus A will be mainly described, and description overlapping with the detection apparatus A will be omitted.
FIG. 17 is an exploded perspective view showing a schematic configuration of the detection apparatus B. FIG. In FIG. 17, the symbol P indicates the center (reference point) of the detection region, and the symbol G indicates the center of gravity (pressure center) of the elastic protrusion 22.

  As shown in FIG. 17, the detection device B includes a sensor substrate 1 and an elastic protrusion 22. In the detection region S, four pressure sensors 12 are arranged symmetrically with respect to the reference point P (see FIG. 2).

  The difference from the detection device A described above is that there is no urging substrate 20 and the formation position of the elastic protrusion 22. Specifically, the detection device A is formed of the sensor substrate 1, the elastic protrusion 22, and the biasing substrate 20, but the detection device B does not have the biasing substrate 20, and the elastic protrusion 22 is formed on the sensor substrate 1. The difference is that the first substrate 13 is formed on the surface opposite to the side in contact with the pressure-sensitive conductive rubber (elastic body) 15. Further, the surface of the first substrate 13 on which the elastic protrusions 22 are formed is a portion that receives an external force.

  The shape of the elastic protrusion 22 is substantially hemispherical, and the tip of the elastic protrusion 22 is formed on the sensor substrate 1 (first substrate 13) facing the side on which the external force acts. The center of gravity G of the elastic protrusion 22 is located at a position overlapping the reference point P. When an external force acts on the surface of the first substrate 13 on which the elastic protrusion 22 is formed and the external force has a force component in the sliding direction (a direction horizontal to the detection device B), the center of gravity G of the elastic protrusion 22 Shifts from the reference point P and moves in a direction (sliding direction) in which an external force acts. Then, a relatively large pressure value is detected by the pressure sensor 12 at a position that overlaps the center of gravity G of the elastic protrusion 22 among the plurality of pressure sensors 12, and a relative value is detected by the pressure sensor 12 at a position that does not overlap with the center of gravity of the elastic protrusion 22. Therefore, a small pressure value is detected. Therefore, the difference between the pressure values detected by each pressure sensor 12 can be calculated, and the direction and magnitude in which the external force is applied can be obtained based on the difference.

As described above, according to the detection apparatus B, in addition to the effects of the detection apparatus A, the following effects can be obtained.
Since the substantially hemispherical elastic protrusion 22 is formed on the sensor substrate 1, even if a sliding force is applied, the horizontal position of the contact surface between the sensor substrate 1 and the elastic protrusion 22 is displaced. Hateful. Specifically, after the force in the sliding direction is unloaded, it is necessary to return the position of the center of gravity G of the elastic protrusion 22 to the original position (position overlapping the reference point P). At this time, since the elastic protrusion 22 is formed on the sensor substrate 1, the position of the center of gravity G of the elastic protrusion 22 and the position of the reference point P are less likely to be shifted. Therefore, it is possible to provide a detection device that can detect the direction and magnitude of the external force applied more stably.

  Furthermore, by eliminating the urging substrate 20, it is possible to provide a detection device that can detect the direction and magnitude of the external force applied at a lower cost.

Further, the urging substrate 20 indicated by the broken line in FIG. That is, the detection device B may be configured by the sensor substrate 1, the elastic protrusion 22, and the biasing substrate 20.
Next, an electronic device (FIG. 18) and a robot (FIG. 19) equipped with the above-described detection device A or detection device B will be described.

(Electronics)
FIG. 18 is a schematic diagram showing a schematic configuration of a personal digital assistant (PDA) 2000 as an electronic apparatus equipped with the detection device A or the detection device B described above. The portable information terminal 2000 includes a plurality of operation buttons 2002, a power switch 2003, and a liquid crystal panel 2001 on which the detection device A or the detection device B described above is mounted as a display unit. When the power switch 2003 is operated, a menu button (not shown) is displayed on the liquid crystal panel 2001. For example, when a menu button is touched with a finger, a phone book is displayed or a phone number is displayed.

  According to such an electronic device, since the above-described detection device A or detection device B is provided, an electronic device capable of detecting the direction and magnitude of the external force with high accuracy can be provided.

  In addition to information portable terminals, electronic devices include, for example, cellular phones, personal computers, video camera monitors, car navigation devices, pagers, electronic notebooks, calculators, word processors, workstations, videophones, POS terminals, digital stills. Examples of the device include a touch panel such as a camera. The above-described detection device A or detection device B can also be mounted on these electronic devices.

(robot)
FIG. 19 is a schematic diagram showing a schematic configuration of a robot hand 3000 as a robot equipped with the detection device A or the detection device B described above. As shown in FIG. 19A, the robot hand 3000 includes a main body 3003, a pair of arms 3002, and a grip 3001 on which the detection device A or the detection device B is mounted. For example, when a drive signal is transmitted to the arm unit 3002 by a control device such as a remote controller, the pair of arm units 3002 open and close.

  As shown in FIG. 19B, consider a case where a robot hand 3000 holds an object 3010 such as a cup. At this time, the force acting on the object 3010 is detected as a pressure by the grip portion 3001. Since the robot hand 3000 includes the detection device A or the detection device B described above as the grip portion 3001, the force in the direction of sliding with gravity Mg in addition to the force in the direction perpendicular to the surface (contact surface) of the object 3010 ( It is possible to detect the component of the sliding force. For example, it can be held while adjusting the force according to the texture of the object 3010 so as not to deform a soft object or drop a slippery object.

  According to this robot, since the detection device A or the detection device B described above is provided, a robot capable of detecting the direction and magnitude of the external force (gripping force) with high accuracy can be provided.

  DESCRIPTION OF SYMBOLS 1,2 ... Sensor board | substrate, 12, S1, S2, S3, S4, S1b, S2a ... Pressure sensor, 13 ... 1st board | substrate, 14, 14a, 14b ... 1st electrode, 15 ... Pressure-sensitive conductive rubber, 16 and 16a , 16b ... second electrode, 17 ... second substrate, 18 ... electrode substrate, 20 ... urging substrate, 22 ... elastic projection, W, W1, W2, W3, W4 ... partition wall, S ... detection region, P ... reference Point, G: center of gravity of elastic protrusion 22, A, B: detection device, 2000: portable information terminal, 3000: robot hand.

Claims (18)

A sensor substrate having a plurality of detection regions in which a plurality of pressure sensors are arranged,
A first substrate;
A second substrate;
An elastic layer disposed between the first substrate and the second substrate;
A partition wall provided between at least one of the plurality of detection regions, the partition wall being provided on at least one of the first substrate and the second substrate;
A sensor substrate comprising: The first substrate has a first electrode;
The second substrate has a second electrode;
The elastic layer is sandwiched between a surface of the first substrate on which the first electrode is formed and a surface of the second substrate on which the second electrode is formed,
2. The pressure sensor according to claim 1, wherein the first electrode and the second electrode intersect with each other, and the pressure sensor is formed in a region where the first electrode and the second electrode intersect. Sensor board. The second substrate has a first electrode and a second electrode,
The elastic layer is sandwiched between the first substrate and the surface on which the first electrode and the second electrode of the second substrate are formed,
The sensor substrate according to claim 1, wherein the pressure sensor is formed between the first electrode and the second electrode adjacent to the first electrode. A sensor substrate having a plurality of detection regions in which a plurality of pressure sensors are arranged,
A substrate,
An elastic layer;
A partition provided on the substrate and formed between adjacent detection regions of the plurality of detection regions,
A sensor substrate comprising: The substrate has a first electrode and a second electrode,
The elastic layer is formed on a surface of the substrate on which the first electrode and the second electrode are formed,
The sensor substrate according to claim 4, wherein the pressure sensor is formed between the first electrode and the second electrode adjacent to the first electrode.   The sensor substrate according to claim 1, wherein a thickness of the partition wall is smaller than a thickness of the elastic layer.   The sensor substrate according to claim 4 or 5, wherein a thickness of the partition wall is larger than a thickness of the elastic layer and protrudes from the elastic layer.   The sensor substrate according to claim 1, wherein the partition wall is continuously formed so as to surround the detection region.   9. The sensor substrate according to claim 1, wherein the partition wall is made of a material having a larger elastic modulus than the elastic layer. A sensor substrate having a plurality of detection regions in which a plurality of pressure sensors are arranged,
A substrate on which a first electrode and a second electrode are formed;
An elastic layer formed on the surface of the substrate on which the first electrode and the second electrode are formed, spaced apart for each detection region, and formed in an island shape;
A sensor substrate comprising: A sensor substrate having a plurality of detection regions in which a plurality of pressure sensors are arranged,
The sensor substrate includes an elastic layer,
In the elastic layer, a partition wall is formed between adjacent detection regions among the plurality of detection regions.   The sensor substrate according to claim 1, wherein the elastic layer is a pressure-sensitive conductive rubber that is elastically deformed.   The sensor substrate according to claim 1, wherein the elastic layer is a dielectric that is elastically deformed. A detection device comprising the sensor substrate according to any one of claims 1 to 13 and an elastic protrusion that is elastically deformed by an external force,
In the detection area of the sensor substrate, with the center of the detection area as a reference point, a plurality of the pressure sensors are arranged around the reference point,
The detection device, wherein the elastic protrusion is provided on the sensor substrate such that a center of gravity is located at a position overlapping the reference point. A detection device comprising the sensor substrate according to any one of claims 1 to 13 and a biasing substrate having an elastic protrusion,
In the detection area of the sensor substrate, with the center of the detection area as a reference point, a plurality of the pressure sensors are arranged around the reference point,
The detecting device according to claim 1, wherein the elastic protrusion is elastically deformed in a state where the center of gravity is located at a position overlapping the reference point and is in contact with the sensor substrate by an external force.   The detection device calculates a difference between the pressure values detected by the pressure sensors arbitrarily combined among the pressure values detected by the plurality of pressure sensors as the elastic protrusions are elastically deformed by the external force. The detection device according to claim 14, wherein the direction in which the external force is applied and the magnitude of the external force are calculated based on the difference.   An electronic apparatus comprising the detection device according to claim 14.   A robot comprising the detection device according to any one of claims 14 to 16.

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