JP2013113421A - Flow path specifying member and fluid quantitative delivery apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To attain quantitative discharge by specifying with high accuracy the amount of a fluid supplied to a groove part, to a fixed amount corresponding to the shape of the groove part.SOLUTION: A flow path specifying member 20 including a cylindrical member 4 and a member 2 of round column shape is switched into a first connection state in which a first through-hole group 4α is connected to a groove part 2b, a second connection state in which a second through-hole group 4β is connected to the groove part 2b, and a blocked state in which the groove part 2b is blocked with an inner peripheral surface 4e of the cylindrical member 4 between the first and second connection states by rotating the member 2 of round column shape in the neighborhood of a center axis 10. The fluid filled in the groove part 2b in the first state is discharged from the second through-hole group in the second state, thus discharging the fluid in the amount corresponding to the groove part 2b.

Description

  The present invention relates to a member that defines a fluid path, and a fluid quantitative delivery device that uses the member to regulate the amount of fluid and deliver the fluid quantitatively.

  2. Description of the Related Art Conventionally, in various fields such as a resist coating process in a semiconductor manufacturing process or the like, there is a demand for a member that defines a flow path of a fluid such as a resist and a device that sends out a predetermined amount of fluid.

  For example, Patent Document 1 discloses a device that has a metal valve made of a stainless steel material and quantifies and discharges a liquid. In the apparatus disclosed in Patent Document 1, a valve is disposed in the flow path, and the amount of fluid discharged to the downstream side of the valve is defined by the flow rate of the liquid flowing through the flow path and the opening / closing timing of the valve. .

JP 2006-275133 A

  However, a metal valve made of stainless steel or the like has a relatively low wear resistance, and a metal component generated from the valve may be mixed into the liquid to be discharged as contamination. Further, the discharge amount of the liquid may change due to wear, and the life as a liquid discharge device is relatively short. In addition, the flow rate of the fluid is likely to change depending on, for example, pressure fluctuation due to deterioration of the pump for applying pressure to the fluid, fluctuation in the flow path due to contamination in the flow path, etc. Even if the opening / closing timing is controlled, there is a problem that the liquid cannot be quantified and discharged with sufficiently high accuracy.

  The present invention aims to solve this problem.

  The present invention is a member that defines a fluid flow path, and includes a cylindrical member, and a columnar member that is inserted inside the cylindrical member and has a groove on an outer peripheral surface thereof. The shape member includes a plurality of through holes penetrating between the outer peripheral surface and the inner peripheral surface, and rotating the columnar member around a central axis allows a part of the plurality of through holes to be formed. A first connection state in which the first through-hole group made of and the groove portion are connected, and a second through-hole group made up of a plurality of the through-holes different from the first through-hole group and the groove portion are connected. And a closed state in which the groove is closed by the inner peripheral surface of the cylindrical member between the first connected state and the second connected state. A flow path defining member is provided.

The present invention also includes a rotating unit that rotates the columnar member of the flow path defining member around a central axis to switch to the second connection state through the closed state after the first connection state; In the first connection state, the fluid overflows from the other through-holes of the first through-hole group while fluid flows into the groove from at least one of the through-holes constituting the first through-hole group. A fluid supply means for causing the gas to flow into the groove portion through at least one of the through holes constituting the second through hole group in the second connection state, and by the pressure of the introduced gas A fluid fixed quantity delivery device characterized by comprising fluid discharging means for discharging the fluid in the groove from the other through holes of the second through hole group is also provided.

  In the flow path defining member of the present invention, the first through-hole group composed of a part of the plurality of through-holes and the groove portion are connected by rotating the columnar member around the central axis. The second connection state in which the second through-hole group consisting of a plurality of through holes different from the first through-hole group and the groove portion are connected, the first connection state, and the second connection state Is switched between the closed state in which the groove portion is closed by the inner peripheral surface of the cylindrical member, so that the fluid supplied to the groove portion in the first state is changed to the second through-hole in the second state. Can be drained from a group. The amount of fluid supplied to the groove portion can be a constant amount according to the shape of the groove portion, and from the second through hole group by changing from the first state to the second state through the closed state. The fluid can be discharged in a predetermined amount with a high accuracy.

  Further, in the fluid fixed amount delivery device of the present invention, the rotating means rotates the columnar member of the flow path defining member around the central axis to make the first connection state, and then enters the second connection state through the closed state. Switch. In the first connection state, the fluid supply means overflows the fluid from the other through holes of the first through hole group while allowing the fluid to flow into the groove portion from at least one of the through holes constituting the first through hole group, In the second connection state, the fluid discharge means causes the gas to flow into the groove portion through at least one of the through holes constituting the second through hole group, and the fluid in the groove portion is made to flow by the pressure of the gas that has flowed in. By discharging from the other through-holes of the two through-hole groups, it is possible to regulate the amount of fluid with high accuracy and send it out in a fixed amount.

It is a figure explaining the flow-path definition member 20 which is one Embodiment of the flow-path definition member of this invention, (a) is a front view and side view of the flow-path definition member 20, (b) is the flow-path definition member 20. FIG. 2C is a front view and a side view of the cylindrical member 4 constituting the flow path, and FIG. (A)-(c) has shown the various states in the flow-path definition member 20 shown in FIG. 1, (a) is the 1st connection state, (b) is the obstruction | occlusion state, (c) is the 2nd Connected state. It is a schematic block diagram explaining the apparatus 1 comprised with the flow-path definition member 20 which is an example of embodiment of the fluid fixed amount delivery apparatus of this invention. It is a schematic sectional view explaining the flow path defining member 20, and is a diagram explaining a gap between the inner peripheral surface 4 e of the cylindrical member 4 and the outer peripheral surface 2 a of the columnar member 2, FIG. 5 is an enlarged sectional view showing the inner peripheral surface 4 e of the cylindrical member 4 and the outer peripheral surface 2 a of the columnar member 2.

  An example of an embodiment of a flow path defining member of the present invention and an example of an embodiment of a fluid quantitative delivery device of the present invention will be described with reference to the drawings. 1A and 1B are diagrams illustrating a flow path defining member 20 that is an example of an embodiment of a flow path defining member of the present invention. FIG. 1A is a front view and a side view of the flow path defining member 20, and FIG. FIG. 7C is a front view and a side view of the cylindrical member 4 constituting the flow path defining member 20, and FIG. 7C is a front view and a side view of the columnar member 2 constituting the flow path defining member 20.

  The flow path defining member 20 is a member that defines a fluid flow path, and includes a cylindrical member 4 and a columnar member 2 inserted inside the cylindrical member 4. The columnar member 2 is provided with a groove 2b on the outer peripheral surface 2a. The cylindrical member 4 includes four through holes 4a to 4e penetrating between the outer peripheral surface 4f and the inner peripheral surface 4e.

In the cylindrical member 2, the groove 2 b is provided along the central axis 10. In the cylindrical member 4, the through holes 4a and 4b constituting the first through hole group 4α are arranged along the central axis 10, and the through holes 4c and 4d constituting the second through hole group 4β are arranged. Are arranged along the central axis 10 at positions different from the first through-hole group 4α in the circumferential direction. In the flow path defining member 20 of the present embodiment, the first through-hole group 4α and the second through-hole group 4β are arranged at positions that are line-symmetric with respect to the central axis 10, respectively.

  2A to 2C show various states of the flow path defining member 20 shown in FIG. For example, as shown by an arrow R in the drawing, the flow path defining member 20 rotates the columnar member 2 around the central axis 10 so that the first of the four through holes is composed of the through hole 4a and the through hole 4b. A first connection state in which the through-hole group 4α and the groove 2b are connected; a second connection state in which the second through-hole group 4β including the through-hole 4c and the through-hole 4d and the groove 2b are connected; The closed state in which the groove 2b is closed by the inner peripheral surface 4e of the cylindrical member 4 between the first connected state and the second connected state is switched. 2A shows the first connection state, FIG. 2B shows the closed state, and FIG. 2C shows the second connection state.

  FIG. 3 is a schematic configuration diagram illustrating the fluid fixed amount delivery device 1 that includes the flow path defining member 20 and is an example of an embodiment of the fluid fixed amount delivery device of the present invention. Taking the embodiment shown in FIG. 3 as an example, the flow path defining member 20 and the apparatus 1 will be described in more detail.

  The apparatus 1 rotates the flow path defining member 20 and the columnar member 2 of the flow path defining member 20 around the central axis 10 to sequentially perform a first connection state, a closed state, and a second connection state. Rotating means 12 for switching, fluid supply means 14 for causing the fluid F to flow into the groove 2b from the through hole 4a in the first connection state and overflowing the fluid F from the through hole 4b, and second in the second connection state Fluid discharge means 16 for causing the gas G to flow into the groove 2b through the through-hole 4c constituting the through-hole group and discharging the fluid F in the groove 2b from the through-hole 4d by the pressure of the gas G that has flowed in. I have.

  The fluid fixed amount delivery device 1 of this example is provided in a resist coating device used in a semiconductor manufacturing system (not shown), for example, and the fluid F discharged by the fluid discharge means 16 is supplied to a resist discharge nozzle 19 provided in the semiconductor manufacturing system. Sent. In this example, a resist solution used in the semiconductor manufacturing process is used as the fluid F.

  The fluid supply means 14 includes a chemical tank (not shown) and a compressed air supply mechanism including a so-called known compressor. The fluid supply means 14 applies pressure to the fluid F stored in the chemical tank by the compressed air supply mechanism, and supplies the fluid F to the flow path defining member 20 by the applied pressure. The flow path defining member 20 and the fluid supply means 14 are connected via a pipe 6a connected to the through hole 4a and a pipe 6b connected to the through hole 4b. In the first state shown in FIG. 2A, the fluid supply means 14 causes the fluid F to overflow from the through hole 4b while allowing the fluid F to flow from the through hole 4a into the groove 2b via the pipe 6a. In the present embodiment, the fluid F overflowed from the through hole 4b is returned to the chemical tank of the fluid supply means 14 through the pipe 6b.

The fluid discharge means 16 includes a compressed air supply mechanism (not shown) provided with a so-called known compressor, and supplies the compressed gas G to the flow path defining member 20. The flow path defining member 20 and the fluid discharge means 16 are connected via a pipe 6c connected to the through hole 4c. In the second state shown in FIG. The gas G is caused to flow into the groove portion 12, and the fluid F in the groove portion 2b is discharged from the through hole 4d by the pressure of the gas G that has flowed in. The through hole 6d is connected to the discharge nozzle 19 through a pipe 6d connected to the through hole 4d. The pipes 6a, 6b, 6c, and 6d are joined to the through holes 4a, 4b, 4c, and 4d by a joining member (not shown) so as to maintain high sealing performance. Examples of the joining member include a metal brazing material and a heat-resistant resin.

  In the fluid fixed amount delivery device 1, the columnar member 2 is rotated (R) around the central axis 10 by the rotating means 12 to switch between the first connection state, the closed state, and the second connection state. A predetermined amount of fluid F corresponding to the volume of the groove 2 b and the number of rotations can be delivered toward the discharge nozzle 19.

  Each part of the fluid fixed amount delivery device 1 is connected to a control unit provided in the resist coating device, and the magnitude of the pressure applied to the fluid F in the fluid supply means 14 and the pressure applied to the gas G in the fluid discharge means 16 are as follows. The size, the rotation speed and the rotation timing of the cylindrical member 2 by the rotating means 12 are controlled by this control unit (not shown).

  When a predetermined amount of fluid F is sent to the discharge nozzle 19 in the fluid fixed amount delivery device 1, first, the first connection state shown in FIG. 2A is established, and the fluid F flows from the through hole 4a to the groove 2b. The fluid F overflows from the through hole 4b.

  Next, the columnar member 2 is rotated by the rotating means 12, and the closed state shown in FIG. In the closed state, the groove 2b is closed by the inner peripheral surface 4e of the cylindrical member 4, and the fluid F filled in the groove 2b through the first connection state is the inner peripheral surface 4e of the cylindrical member 4 and the groove 2b. It moves with the rotation of the cylindrical member 2 while maintaining the state accumulated in the space formed by. In the flow path defining member 20, the volume of the space formed by the groove 2b of the cylindrical member 2 and the inner peripheral surface 4e of the cylindrical member 4 is constant, and the same amount of fluid F as the volume of the groove 2b is generated along with the rotation. Move.

  Next, the cylindrical member 2 is further rotated by the rotating means 12 to be in the second connection state shown in FIG. In the second connection state, the gas G flows into the groove 2b through the through-hole 4c constituting the second through-hole group, and the fluid F in the groove 2b flows from the through-hole 4d by the pressure of the gas G that flows in. Discharged. In this example, while the columnar member 2 is rotated 180 degrees by the rotating means 12, the second connection state is obtained by going through a series of states from the first connection state to the second connection state through the closed state. The fluid F having the same volume as that of the groove 12b can be delivered toward the discharge nozzle 19. By controlling the operation of the rotating means 12 of the apparatus 1 and adjusting the number of rotations of the columnar member 2 to a predetermined number of rotations, a predetermined amount (predetermined volume) of fluid F according to the volume and the number of rotations of the groove 12b. Can be delivered to the discharge nozzle 19.

  The flow path defining member 20 will be further described. 4 and 5 are schematic cross-sectional views illustrating the flow path defining member 20. In FIG. 4, it is a figure explaining the clearance gap between the inner peripheral surface 4e of the cylindrical member 4, and the outer peripheral surface 2a of the columnar member 2, and the change of the diameter of the columnar member 2 along the direction of the central axis 10 is shown. Shown exaggerated than the actual. FIG. 5 shows an enlarged view of the inner peripheral surface 4 e of the cylindrical member 4 and the outer peripheral surface 2 a of the columnar member 2.

  As shown in FIG. 4, the gap between the inner peripheral surface 4e of the cylindrical member 4 and the portion other than the groove 2b of the outer peripheral surface 2a of the columnar member 2 is such that the end side along the central axis 10 is in the axial direction. For example, the gap B on the end side is 5 μm, and the gap A at the center is 3 μm. The larger the gap between the inner peripheral surface 4e of the cylindrical member 4 and the outer peripheral surface 2a of the cylindrical member 2, the smaller the rotational resistance of the cylindrical member 2. That is, it can be smoothly rotated with a relatively small force. On the other hand, the smaller the gap between the inner peripheral surface 4e of the cylindrical member 4 and the outer peripheral surface 2a of the cylindrical member 2, the higher the sealing performance of the fluid F. That is, the narrower the gap, the smaller the amount of fluid that leaks from the gap. In the flow path defining member 20, the cylindrical member 2 is rotated by making the clearance at the central portion relatively small, sufficiently sealing the fluid F, and making the clearance at the end portion in the axial direction relatively large. The resistance (rotational resistance) at the time is relatively small.

  In order to make the sealing performance relatively high and relatively reduce the leakage amount of the fluid F from the gap between the cylindrical member 2 and the cylindrical member 4, the cylindrical member 2 and the cylindrical member 4 in a portion other than the groove 2b. Is preferably 6 μm or less. According to the flow path defining member 20 of this example, the cylindrical member 2 and the cylindrical member 4 are not used without using a sealing mechanism (sealing tape for preventing leakage or a resin material for preventing leakage) for sealing the fluid. The flow path defining member 20 with relatively few leakages of the fluid F is constituted by only these two members.

  In the flow path defining member 20, both the columnar member 2 and the cylindrical member 4 are preferably formed of zirconia or zirconia reinforced alumina (ZTA). Zirconia and ZTA have relatively high wear resistance, and the degree of wear when the two members are in sliding contact between the outer peripheral surface 2a of the cylindrical member 2 and the inner peripheral surface 4e of the cylindrical member 4 is high. Relatively few. The flow path defining member 20 has high wear resistance and can deliver a constant amount of fluid that is stable over a long period of time. At least one of the columnar member 2 and the cylindrical member 4 only needs to be made of a material mainly composed of zirconia or zirconia reinforced alumina. “Containing zirconia as a main component” means, for example, that it contains 60% by mass or more of zirconia.

  As shown in FIG. 5, the outer peripheral surface 2a of the cylindrical member 2 has a grinding streak continuous along the circumferential direction, and the inner peripheral surface 4e of the cylindrical member 4 has a grinding streak as well. ing. For example, in the case of the cylindrical member 2, such a grinding trace is a so-called outer peripheral surface that is obtained by rotating the cylindrical member 2 around the central axis and bringing the grinding member into contact with the outer peripheral surface 2 a. The outer peripheral surface 2a is ground by a honing process to form a grinding streak. The grinding striations of the cylindrical member 4 are formed by a so-called inner peripheral surface honing process in which a grinding member is brought into contact with the inner peripheral surface 4e of the cylindrical member 4.

  A general ceramic material has a relatively small fracture toughness value compared to, for example, a metal or the like, but zirconia and ZTA have a relatively large fracture toughness value among ceramics. For this reason, when zirconia is ground, there are relatively few surface defects (such as voids) after grinding, and the surface tends to be a mirror surface. On the other hand, since zirconia and zirconia reinforced alumina have a relatively large fracture toughness value among ceramics, plastic flow type grinding streaks are likely to occur on the ground surface. That is, on the outer peripheral surface of the cylindrical member 2 formed by grinding, relatively long and fine concave portions and convex portions exist along the circumferential direction of the cylindrical member 2. The inner peripheral surface 4e of the cylindrical member 4 is also formed by so-called inner peripheral surface honing. Also on this inner peripheral surface 4e, grinding streaks extending relatively long along the circumferential direction are generated.

  In the flow path defining member 20, grinding striations are formed on the outer peripheral surface 2 a of the columnar member 2 and the inner peripheral surface 4 e of the cylindrical member 4, respectively. For this reason, even when a force is applied so that the outer peripheral surface 2a of the columnar member 2 and the inner peripheral surface 4e of the cylindrical member 4 approach each other, the convex portion of the grinding strip first comes into contact with the grinding strip. The entire concave portion of the trace is difficult to adhere. For this reason, when viewed microscopically, an appropriate clearance is maintained between the outer peripheral surface 2a of the cylindrical member 2 and the inner peripheral surface 4e of the cylindrical member 4, and the rotational resistance of the cylindrical member 2 is relatively low. Kept in a state. Further, since the grinding striations are respectively formed on the outer peripheral surface 2 a of the cylindrical member 2 and the inner peripheral surface 4 e of the cylindrical member 4, the surface area of the outer peripheral surface 2 a of the cylindrical member 2 and the cylindrical member 4. The surface area of the inner peripheral surface 4e is relatively large. That is, in the gap (clearance) between the cylindrical member 2 and the cylindrical member 4, the surface area with which the fluid F contacts is relatively large compared to the distance between the cylindrical member 2 and the cylindrical member 4. For this reason, the surface tension which generate | occur | produces in the fluid F which entered this clearance gap is large, and the leakage of the fluid F from this clearance gap is suppressed.

In addition, if the average length RSm of the contour curve element of the outer peripheral surface 2a of the columnar member 2 is 5 μm or more, the liquid sealing property can be made relatively high. Further, if the average length RSm of the contour curve element of the outer peripheral surface 2a of the cylindrical member 2 is set to 8 μm or less, the amount of contamination caused by the contact between the cylindrical member 4 and the cylindrical member 2 is relatively small. Can be reduced. The average length (RSm) of the contour curve element is a value based on JIS B0601-2001. For the measurement of the average length (RSm) of the contour curve element, for example, using a surface roughness measuring device Surfcorder SE-2300, Kosaka Laboratory Ltd., a cut-off value of 0.08 mm with a reference length of 0.4 mm is used. And it is sufficient. In addition, the average length (RSm) of the contour curve element is JIS
Any value may be used as long as it conforms to B0601-2001, and the value may not be a value using the measuring device.

  In addition, that the grinding striations are formed on the outer peripheral surface of the shaft member and the inner peripheral surface of the outer member means that the average length (RSm) of the contour curve element is 4 μm or more.

  In the flow path defining member 20, when at least one of the columnar member 2 or the cylindrical member 4 is made of zirconia or zirconia reinforced alumina, it is preferable that the monoclinic crystal ratio in the zirconia crystal phase is 5 mol% or less. . The monoclinic crystal ratio can be calculated by analyzing the crystal structure by X-ray diffraction of the outer peripheral surface 2a of the cylindrical member 2. For the analysis of the crystal structure by X-ray diffraction, for example, PW3050 manufactured by Spectris Co., Ltd. may be used, and measurement may be performed at 50 mA with an X-ray output of 40 kV under the measurement condition 2θ = 26 ° to 36 °.

  For example, zirconia is known to undergo a phase transformation due to processing stress. For example, a tetragonal crystal undergoes a phase transformation due to stress and changes to a monoclinic crystal, but this causes volume expansion, and a deteriorated layer may be formed on the surface. Or a fracture alteration layer may be formed by processing. On the surface on which the fracture-affected layer is formed by processing, the zirconia crystals on the surface are relatively easy to degranulate.

  If the monoclinic crystal ratio of the zirconia crystal phase of the outer peripheral surface 2a of the cylindrical member 2 is 5 mol% or less, the zirconia particles that adhere to the surface of the outer peripheral surface 2a through physical processing such as honing processing can be prevented. It can be kept relatively low. By setting the monoclinic crystal ratio of the zirconia crystal phase on the outer peripheral surface 2a of the cylindrical member 2 to 5 mol% or less, the zirconia crystal on the surface can be relatively free from degranulation. If the monoclinic crystal ratio of the zirconia crystal phase on the outer peripheral surface 2a of the cylindrical member 2 is 5 mol% or less, contamination mixed into the discharged fluid F can be suppressed to a relatively low level.

When the flow path regulating member 20 includes a zirconia-containing crystal phase, both the cylindrical member 2 and the cylindrical member 4 are zirconia, which is partially stabilized zirconia using Y ₂ O ₃ as a sintering aid. preferable. In this case, both the cylindrical member 2 and the cylindrical member 4 preferably have a Y ₂ O ₃ content of ₂ to 6 mol%. When the content of Y ₂ O ₃ is in the range of ₂ to 6 mol%, the phase transformation from tetragonal to monoclinic crystal becomes difficult, and the sliding contact surface can exhibit relatively high wear resistance and corrosion resistance. The flow path defining member 20 made of Y ₂ O ₃ -containing zirconia has relatively high wear resistance, and the amount of contamination mixed into the fluid F is also relatively small. In order to further increase the wear resistance and corrosion resistance, it is more preferable to set the content of Y ₂ O ₃ in the range of ₂ to 4 mol%.

As mentioned above, although an example of embodiment of this invention was demonstrated, this invention is not specifically limited to said example. For example, the fluid quantitative delivery device of the present invention is not limited to the resist coating device described above, and can be used in various devices such as a semiconductor manufacturing device, various analysis devices, and medical equipment. The type of fluid that defines the flow path with the flow path defining member is not particularly limited. For example, various chemicals such as an acidic solution and an alkaline solution, blood, and the like may be used. Moreover, the arrangement | positioning position of the through-hole in a flow-path definition member, the shape of a groove part, etc. are not specifically limited. The plurality of through-holes constituting the first through-hole group and the plurality of through-holes constituting the second through-hole group are arranged to be inclined with respect to the central axis of the cylindrical member, and the groove member is similarly You may arrange inclining with respect to a central axis. The arrangement positions of the first through hole group and the second through hole group are not particularly limited. For example, the first through-hole groups and the second through-hole groups may be alternately arranged at positions separated by a predetermined angle around the central axis. For example, when the predetermined angle is 90 °, there are two first through-hole groups and two second through-hole groups, but the number of first through-hole groups and second through-hole groups is not limited. . The present invention is not limited to the above-described embodiments, and various improvements and modifications may be made without departing from the scope of the present invention.

DESCRIPTION OF SYMBOLS 1 Fluid fixed quantity delivery apparatus 2 Cylindrical member 2a Outer peripheral surface 2b Groove part 4 Cylindrical member 4a-4e Through-hole 4f Outer peripheral surface 4e Inner peripheral surface 4 (alpha) 1st through-hole group 4 (beta) 2nd through-hole group 10 Central axis 12 Rotating means 14 Fluid Supply means 16 Fluid discharge means 20 Flow path defining member F Fluid

Claims (5)

A member for defining a fluid flow path,
A cylindrical member, and a columnar member inserted inside the cylindrical member and provided with a groove on the outer peripheral surface;
The cylindrical member includes a plurality of through holes penetrating between the outer peripheral surface and the inner peripheral surface,
By rotating the cylindrical member around the central axis,
A first connection state in which the first through-hole group consisting of a part of the plurality of through-holes and the groove portion are connected;
A second connection state in which the second through hole group consisting of a plurality of the through holes different from the first through hole group and the groove portion are connected;
A flow path defining member that is switched between a closed state in which the groove is closed by an inner peripheral surface of the cylindrical member between the first connected state and the second connected state. . The groove is provided along the axial direction;
The plurality of through-holes constituting the first through-hole group are arranged along the axial direction,
The plurality of through-holes constituting the second through-hole group are arranged along the axial direction at positions different from the first through-hole group in the circumferential direction. The flow path regulating member.   The gap between the inner peripheral surface of the cylindrical member and the portion other than the groove portion on the outer peripheral surface of the columnar member is larger on the end side than the central portion in the axial direction. Or the flow path regulating member according to 2.   The flow path defining member according to claim 1, wherein the cylindrical member and the columnar member are mainly composed of zirconia. The flow path defining member according to any one of claims 1 to 4,
Rotating means for rotating the columnar member of the flow path defining member around a central axis to switch to the second connection state through the closed state after the first connection state;
In the first connection state, the fluid overflows from the other through-holes of the first through-hole group while fluid flows into the groove from at least one of the through-holes constituting the first through-hole group. Fluid supply means for causing
In the second connection state, a gas is caused to flow into the groove portion through at least one of the through holes constituting the second through hole group, and the fluid in the groove portion is caused by the pressure of the introduced gas. Fluid dispensing means for discharging the fluid from the other through-holes in the second through-hole group.

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