JP2013111712A - Polishing method and polishing device - Google Patents

Polishing method and polishing device Download PDF

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JP2013111712A
JP2013111712A JP2011260806A JP2011260806A JP2013111712A JP 2013111712 A JP2013111712 A JP 2013111712A JP 2011260806 A JP2011260806 A JP 2011260806A JP 2011260806 A JP2011260806 A JP 2011260806A JP 2013111712 A JP2013111712 A JP 2013111712A
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polishing
crushing
polished
grindstone
abrasive grains
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Tomoki Nakagaki
智貴 中垣
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Mitsuboshi Diamond Industrial Co Ltd
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PROBLEM TO BE SOLVED: To provide a polishing method and a polishing device that can efficiently polish a hard material.SOLUTION: When a member 23 to be polished is polished using a polishing device 10 including a grindstone 14 containing many abrasive grains 16 and a drive portion 17 rotation-driving the grindstone 14, the polishing device is used which includes: a filling-up working member 18 for performing filling-up working of an abrasive surface 15 of the grindstone 14; filling-up working member holding means 20 which holds and fixes the filling-up working member 18 and is provided movably; and a control portion which controls the drive portion 17 and filling-up working member holding means 20. When the member 23 to be polished is polished, the control portion moves the filling-up working member holding means 20 to always press the filling-up working member 18 to the abrasive surface 15, and polishes the member 23 to be polished while performing control so that a blind state of the abrasive grains 16 may be constant.

Description

本発明は、被研磨材料の鏡面加工等の精密研磨を行うことができる研磨方法及び研磨装置に関し、詳しくは、焼結ダイヤモンド(PCD)等の硬質材料からなる素材で形成された砥石の目つぶれ状態を常時コントロールしながら、焼結ダイヤモンド等の硬質材料からなる被研磨材料の鏡面加工等の精密研磨を行うことができる研磨方法及び研磨装置に関する。   The present invention relates to a polishing method and a polishing apparatus capable of performing precision polishing such as mirror finishing of a material to be polished, and more specifically, crushing of a grindstone formed of a material made of a hard material such as sintered diamond (PCD). The present invention relates to a polishing method and a polishing apparatus capable of performing precision polishing such as mirror processing of a material to be polished made of a hard material such as sintered diamond while constantly controlling the state.

従来、PCD等の硬質材料で形成された被研磨部材であるワークの表面を研磨し、鏡のように磨きあげる鏡面加工(「鏡面仕上げ」とも云われる)が行われている。このような鏡面加工を行う理由は、表面を鏡のように仕上げることで見た目が綺麗になるだけでなく、例えばカッターホイールのカッター刃部分を鏡面加工することで、被切断部材の切断面を滑らかにすることができるためである。このような鏡面加工を始めとした研磨を行う研磨装置等に用いられる砥石は、使用し続けると目詰まりや目つぶれ、目こぼれが発生して研磨効率が悪くなる。その際、砥石の結合材の部分を削るドレッシングを行い、新たな砥粒を研磨面に適度に出現させる目立てを行うことで、目つぶれ等の不具合を調整して再び研磨が行えるようにしている。このドレッシングは、砥石の使用状況に応じて定期的に行われている。   Conventionally, mirror surface processing (also referred to as “mirror surface finishing”) is performed in which the surface of a workpiece, which is a member to be polished formed of a hard material such as PCD, is polished and polished like a mirror. The reason for performing such mirror finishing is not only to make the surface look like a mirror, but also to make the cutting surface of the cutter wheel smooth by, for example, mirror finishing the cutter blade part of the cutter wheel. It is because it can be made. A grindstone used in a polishing apparatus or the like that performs polishing such as mirror finishing will cause clogging, clogging, and spilling, resulting in poor polishing efficiency. At that time, dressing that removes the part of the binding material of the grindstone is performed, and new abrasive grains are appropriately made to appear on the polished surface, so that polishing such as clogging can be adjusted and polishing can be performed again. . This dressing is performed regularly according to the use condition of the grindstone.

しかしながら、目立てを行ったばかりの砥石は、砥粒の突出量にばらつきがあり、不均一となっているため、研磨されるワークに傷がつく等によって研磨精度が悪くなるおそれがある。そのため、従来、目立てを行った砥石に対し、砥粒の突出量を整えるために、例えばホワイトストーン等のダミーワークを用いて目つぶしを行い、砥粒の突出量を調整することが行われている。   However, since the grinding stones that have just been sharpened vary in the amount of protrusion of the abrasive grains and are not uniform, there is a risk that the polishing accuracy will deteriorate due to scratches on the workpiece to be polished. Therefore, conventionally, in order to adjust the protrusion amount of the abrasive grains with respect to the sharpened grindstone, for example, crushing is performed using a dummy work such as white stone to adjust the protrusion amount of the abrasive grains. .

このような例として、下記特許文献1には、ワークの加工不良を確実に防止する研削方法の発明が開示されている。下記特許文献1に記載の発明では、一対の砥石間にワークを挿入配置して、ワークに対して砥石を回転接触させながらワークを研削する研削方法において、ワークに代えてワークと同一形状のダミーワークを両砥石間に挿入配置し、そのダミーワークを回転させながら、ダミーワークに対して両砥石の研削作用面を回転接触させて、砥石の研削作用面をドレッシングするようにしている。そして、このような構成を有することにより、下記特許文献1に記載の発明によれば、ワークに換わるダミーワークに対して上下砥石の研削作用面が回転接触されることにより、両砥石の研削作用面がドレッシングされるため、上下砥石における各砥石セグメントの砥粒の目立てを確実に均一化することができるので、上下砥石をドレッシングした後に、正規のワークを研削加工しても、ワークの加工不良を防止することができ、ワークを無駄に研削することがないとされている。   As such an example, Patent Document 1 below discloses an invention of a grinding method that reliably prevents a workpiece from being processed poorly. In the invention described in Patent Document 1 below, in a grinding method in which a workpiece is inserted and arranged between a pair of grindstones and the workpiece is ground while rotating the grindstone against the workpiece, a dummy having the same shape as the workpiece is used instead of the workpiece. The workpiece is inserted and disposed between the two grindstones, and while rotating the dummy workpiece, the grinding action surfaces of the two grindstones are brought into rotational contact with the dummy workpiece to dress the grinding action surface of the grindstone. And by having such a structure, according to invention of following patent document 1, when the grinding action surface of an upper and lower whetstone is rotationally contacted with the dummy workpiece | work replaced with a workpiece | work, the grinding action of both whetstones is carried out. Since the surface is dressed, the sharpness of the abrasive grains of each wheel segment in the upper and lower wheels can be made uniform, so even if the regular workpiece is ground after dressing the upper and lower wheels, the workpiece will not work correctly It is possible to prevent the workpiece from being ground unnecessarily.

また、下記特許文献2には、砥石車のドレッシング装置及びドレッシング方法に関する発明が開示されている。下記特許文献2に記載の発明では、ドレッシング部材を有するドレッシング工具と、このドレッシング部材が砥石車の砥石面に沿ってその砥石面の移動方向と異なる方向に移動するようにドレッシング工具を駆動する駆動手段とを備えた砥石車のドレッシング装置において、ドレッシング部材は、砥石面に摺接する目立て砥石と、砥石面に摺接する鋼材とを備えたものである。そして、このような構成を有することで、下記特許文献2に記載の発明によれば、ドレッシング工具を駆動手段により所定回数回転させるのみで、砥石車の目立てと目潰しとを略並行して行うことができるので、従来の目立て処理のみのドレッシングに要する時間と略同じ時間で目潰し処理まで完了させることができ、ワーク研削効率を向上させることができるとしている。   Patent Document 2 below discloses an invention related to a dressing device and a dressing method for a grinding wheel. In the invention described in Patent Document 2 below, a dressing tool having a dressing member, and a drive for driving the dressing tool so that the dressing member moves along the grinding wheel surface of the grinding wheel in a direction different from the moving direction of the grinding wheel surface. In the grinding wheel dressing apparatus comprising the means, the dressing member includes a sharpening grindstone that is in sliding contact with the grindstone surface and a steel material that is in sliding contact with the grindstone surface. And by having such a structure, according to the invention described in Patent Document 2 below, the grinding wheel is sharpened and crushed approximately in parallel only by rotating the dressing tool a predetermined number of times by the driving means. Therefore, the crushing process can be completed in substantially the same time as the time required for dressing only with the conventional sharpening process, and the workpiece grinding efficiency can be improved.

特開2000−006019号公報JP 2000-006019 A 特開2005−081443号公報JP 2005-084443 A

上記特許文献1の発明によれば、砥粒の目立てを確実に均一化することができ、また、上記特許文献2の発明によれば、目立てと目潰しとを略並行して行うことができるようになる。しかしながら、これらの処理は、定期的に行われるものであり、ワークの研磨中に砥石の表面が不規則になったような場合では、その表面が不規則な状態の砥石で研磨がされることになる。また、研磨されるワークが、PCD等の硬質の部材である場合では、特に砥石に不具合が生じるおそれが大きくなる。   According to the invention of Patent Document 1, the sharpening of abrasive grains can be made uniform, and according to the invention of Patent Document 2, sharpening and crushing can be performed substantially in parallel. become. However, these treatments are performed periodically, and if the surface of the grindstone becomes irregular during the polishing of the workpiece, the surface is polished with an irregular grindstone. become. In addition, when the workpiece to be polished is a hard member such as PCD, there is a greater risk of a problem with the grindstone.

なお、一般に、PCD素材を鏡面加工する際には、砥石側が目つぶれしていると鏡面加工に効果がある。すなわち、砥石を用いて研磨を継続すると、被研磨部材の表面が平滑になるにつれて砥石の砥粒は次第に目つまりや目つぶれを起し、その結果、砥石の切れ味は落ちるが磨き効果が良好に発揮されるようになる。しかし、砥石の目つぶれ状態を一定にコントロールすることは困難であるため、従来の鏡面加工では、研磨面のドレッシングを行わずに乾式研磨で数十時間も連続して目つぶれをおこしながら鏡面加工を行っているので、作業効率が非常に悪くなっている。   In general, when the PCD material is mirror-finished, if the grindstone side is clogged, the mirror-finishing is effective. That is, if polishing is continued using a grindstone, as the surface of the member to be polished becomes smooth, the abrasive grains of the grindstone gradually become clogged or clogged. As a result, the sharpness of the grindstone is reduced but the polishing effect is improved. It comes to be demonstrated. However, since it is difficult to control the crushing state of the grindstone to a certain level, the conventional mirror surface processing does not perform dressing of the polishing surface, and the mirror surface processing is performed while continuously crushing for several tens of hours by dry polishing. As a result, work efficiency is very poor.

発明者は、上述の従来技術の問題点を解決すべく種々実験を繰り返した結果、砥石の研磨面の砥粒の目つぶれ状態を連続的にコントロールして鏡面加工に最適な目つぶれ状態を維持することにより、従来に比べて優れた鏡面加工をすることが可能となることを見出し、本発明を完成するに至ったのである。   As a result of repeating various experiments to solve the above-mentioned problems of the prior art, the inventor continuously controls the crushing state of the abrasive grains on the grinding surface of the grindstone to maintain the optimum crushing state for mirror finishing. As a result, it has been found that it is possible to perform mirror finishing superior to that of the prior art, and the present invention has been completed.

すなわち、本発明の目的は、砥石の研磨面に対して常時ドレッシングを行うことにより、砥石の目つぶれ状態を一定にコントロールして被研磨材料の鏡面加工等の精密研磨を行うことができる研磨方法及び研磨装置を提供することにある。   That is, an object of the present invention is to provide a polishing method capable of carrying out precise polishing such as mirror processing of a material to be polished by constantly performing dressing on the polishing surface of the grindstone to control the crushing state of the grindstone to be constant. And providing a polishing apparatus.

上記目的を達成するため、本発明の研磨方法は、多数の砥粒を含有する砥石を回転駆動させて被研磨部材を研磨する研磨方法において、
前記被研磨部材を研磨する際に、前記砥石の研磨面に常時目つぶし部材を当接させて前記砥粒の目つぶれの状態が一定になるように制御しながら研磨することを特徴とする。
In order to achieve the above object, the polishing method of the present invention is a polishing method for polishing a member to be polished by rotationally driving a grindstone containing a large number of abrasive grains.
When the member to be polished is polished, polishing is performed while a crushing member is always brought into contact with the polishing surface of the grindstone, and the crushing state of the abrasive grains is controlled to be constant.

従来の研磨方法によって硬質材料からなる被研磨部材を研磨すると、研磨面の磨耗が進み研磨面が不均一な状態となるため、この研磨面で研磨を進めると被研磨部材の研磨精度が悪くなるおそれがある。本発明の研磨方法によれば、目つぶし部材を設け、この目つぶし部材の移動を制御し砥石の研磨面に押し当てることで、研磨中にできた研磨面の不均一な部分を目つぶし部材で常時目つぶしを行い、常に平坦な状態に調整することができるので、被研磨部材に対して優れた研磨ができるようになる。なお、本発明を適用し得る硬質材料からなる被研磨部材としては、焼結ダイヤモンド、天然ダイヤモンド、合成単結晶ダイヤモンド又は合成多結晶ダイヤモンド、炭化ケイ素(SiC)、アルミナ(Al)、ジルコニア(ZrO)、窒化ケイ素(Si)、立方晶窒化硼素(CBN)、サイアロン(Si−Al)等の超硬セラミックス、炭化タングステン(WC)等の超硬金属、サーメット等が挙げられる。 When a member to be polished made of a hard material is polished by a conventional polishing method, the polishing surface is worn and the polishing surface becomes non-uniform, and if the polishing is advanced on this polishing surface, the polishing accuracy of the member to be polished deteriorates. There is a fear. According to the polishing method of the present invention, the crushing member is provided, and the movement of the crushing member is controlled and pressed against the polishing surface of the grindstone so that the uneven portion of the polishing surface formed during polishing is always clogged with the crushing member. Since it can always be adjusted to a flat state, the member to be polished can be polished excellently. In addition, as a member to be polished made of a hard material to which the present invention can be applied, sintered diamond, natural diamond, synthetic single crystal diamond or synthetic polycrystalline diamond, silicon carbide (SiC), alumina (Al 2 O 3 ), zirconia (ZrO 2 ), silicon nitride (Si 3 N 4 ), cubic boron nitride (CBN), cemented carbide such as sialon (Si 3 N 4 —Al 2 O 3 ), and cemented carbide such as tungsten carbide (WC) , Cermet and the like.

また、本発明の研磨方法においては、前記目つぶし部材として、前記被研磨部材と同組成の材料からなるものを用いることが好ましい。   In the polishing method of the present invention, it is preferable to use a material made of a material having the same composition as the member to be polished as the crushing member.

本発明によれば、目つぶし部材の材料と被研磨部材の材料を同組成とすることで、砥石の研磨面の砥粒の目つぶれ状態を連続的にコントロールし、鏡面加工に最適な目つぶれ状態を維持して目つぶしを効率よく行うことができ、優れた研磨を行うことができる。   According to the present invention, the material of the crushing member and the material of the member to be polished have the same composition, so that the crushing state of the abrasive grains on the grinding surface of the grindstone is continuously controlled, and the crushing state optimal for mirror finishing Thus, the crushing can be performed efficiently and excellent polishing can be performed.

また、本発明の研磨方法においては、前記被研磨部材及び目つぶし部材として、焼結ダイヤモンドを含むものを用いることが好ましい。   In the polishing method of the present invention, it is preferable to use a member containing sintered diamond as the member to be polished and the crushing member.

本発明によれば、被研磨部材に非常に硬度の高い焼結ダイヤモンドを用いた場合でも、目つぶし部材として被研磨部材と同じ焼結ダイヤモンドを用いることで、効率よく目立てをつぶすことができ、効率よく目つぶし状態を一定にすることができる。   According to the present invention, even when sintered diamond having a very high hardness is used for the member to be polished, the conspicuousness can be crushed efficiently by using the same sintered diamond as the member to be polished as the crushing member. It is possible to keep the crushing state constant.

また、本発明の研磨方法においては、前記目つぶし部材の当接圧力を送り速度を1.5〜5μm/secとすることが好ましい。   In the polishing method of the present invention, it is preferable that the contact pressure of the crushing member is a feed rate of 1.5 to 5 μm / sec.

本発明によれば、送り速度を1.5〜5μm/secの範囲で目つぶし部材を制御して押圧することで、より一定に目立てを目つぶしすることができ、砥石を平坦にすることができるようになる。   According to the present invention, by controlling and pressing the crushing member at a feed rate in the range of 1.5 to 5 μm / sec, it is possible to crush the setting more uniformly and to make the grindstone flat. become.

また、本発明の研磨装置においては、多数の砥粒を含有する砥石と、前記砥石を回転駆動させる駆動部とを備える研磨装置において、
前記研磨装置は、前記砥石車の研磨面の目つぶしを行う目つぶし部材と、
前記目つぶし部材を保持固定し、移動可能に備えられた目つぶし部材保持手段と、
前記駆動部及び前記目つぶし部材保持手段を制御する制御部を備え、
前記制御部は、前記被研磨部材の研磨の際に、前記目つぶし部材保持手段を移動させ前記目つぶし部材を前記研磨面に押し当て、前記砥粒の目つぶれの状態が一定になるように制御しながら前記被研磨部材を研磨するように制御することを特徴とする。
Further, in the polishing apparatus of the present invention, in a polishing apparatus comprising a grindstone containing a large number of abrasive grains, and a drive unit that rotationally drives the grindstone,
The polishing apparatus includes a crushing member that crushes the polishing surface of the grinding wheel,
Holding and fixing the crushing member, the crushing member holding means provided movably,
A control unit for controlling the driving unit and the crushing member holding means;
When the polishing member is polished, the control unit moves the crushing member holding means to press the crushing member against the polishing surface, and controls the crushing state of the abrasive grains to be constant. However, the member to be polished is controlled to be polished.

本発明の研磨装置によれば、目つぶし部材が備えられており、この目つぶし部材の移動が制御され砥石の研磨面に押し当てられることで、研磨中にできた研磨面の不均一な部分を目つぶし部材で一定に目つぶしが行われ、常に砥石の研磨面が平坦な状態に調整されるので、被研磨部材に対して優れた精密研磨ができるようになる。   According to the polishing apparatus of the present invention, the crushing member is provided, and the movement of the crushing member is controlled and pressed against the polishing surface of the grindstone, thereby crushing the uneven portion of the polishing surface formed during polishing. The member is crushed uniformly and the grinding surface of the grindstone is always adjusted to a flat state, so that excellent precision polishing can be performed on the member to be polished.

また、本発明の研磨装置においては、前記被研磨部材と、前記目つぶし部材として、焼結ダイヤモンドを含むものを使用することができる。   Further, in the polishing apparatus of the present invention, a member containing sintered diamond can be used as the member to be polished and the crushing member.

本発明によれば、被研磨部材が高硬度の焼結ダイヤモンドであっても、目つぶし部材の材質を被研磨部材と同じ焼結ダイヤモンドを含むものを用いることで砥石の研磨面の砥粒の目つぶれ状態を連続的にコントロールし、鏡面加工に最適な目つぶれ状態を維持して効率よく目つぶしを一定に行うことができる。   According to the present invention, even if the member to be polished is high-hardness sintered diamond, the material of the crushing member includes the same sintered diamond as that of the member to be polished, so that the abrasive grains on the polishing surface of the grindstone can be obtained. The crushing state can be continuously controlled, and the crushing state optimal for mirror finishing can be maintained and the crushing can be performed efficiently and uniformly.

実施形態の研磨方法を実施する研磨装置の斜視図である。It is a perspective view of the polish device which enforces the polish method of an embodiment. 図1の研磨装置を用いた研磨方法を説明する模式図である。It is a schematic diagram explaining the grinding | polishing method using the grinding | polishing apparatus of FIG. 図3Aは研磨面の拡大図であり、図3Bは研磨面に目つぶし部材を押圧している状態の拡大図であり、図3Cは研磨面の砥粒が目つぶしされた状態を示す拡大図である。3A is an enlarged view of the polishing surface, FIG. 3B is an enlarged view of a state in which a crushing member is pressed against the polishing surface, and FIG. 3C is an enlarged view showing a state in which abrasive grains on the polishing surface are crushed. . 他の研磨装置の例を表わした模式図である。It is the schematic diagram showing the example of the other grinding | polishing apparatus. 図5A〜図5Hは研磨装置に用いられる砥石車の例を示した図である。5A to 5H are diagrams showing examples of a grinding wheel used in a polishing apparatus.

以下、本発明の実施形態を図面を用いて説明する。ただし、以下に示す実施形態は、本発明の技術思想を具体化するための研磨方法及び研磨装置の一例を示すものであって、本発明をこの研磨方法及び研磨装置に特定することを意図するものではなく、本発明は特許請求の範囲に含まれるその他の実施形態のものにも等しく適用し得るものである。また、以下に示す図面においては、各構成をわかりやすく視認できるようにするため、各構成部分毎に適宜縮尺を異ならせており、必ずしも実際の寸法ないし角度のとおり図示されているものではない。   Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, the embodiment described below shows an example of a polishing method and a polishing apparatus for embodying the technical idea of the present invention, and the present invention is intended to specify the polishing method and the polishing apparatus. Rather, the invention is equally applicable to other embodiments within the scope of the claims. Further, in the drawings shown below, in order to make it easy to understand each component, the scale of each component is appropriately changed, and it is not necessarily shown according to actual dimensions or angles.

まず、図1を参照して、実施形態の研磨装置10について説明する。研磨装置10は、ワーク23を研磨する砥石車14と、砥石車14を駆動する駆動部としての電動機17と、砥石車14の研磨面15の目つぶしを行う目つぶし部材18と、この目つぶし部材18が保持固定され移動される目つぶし部材保持手段20と、電動機17及び目つぶし部材保持手段20を制御する制御部(不図示)と、これらを備えた装置本体11とで構成されている。   First, a polishing apparatus 10 according to an embodiment will be described with reference to FIG. The polishing apparatus 10 includes a grinding wheel 14 that polishes a workpiece 23, an electric motor 17 that drives the grinding wheel 14, a crushing member 18 that crushes the polishing surface 15 of the grinding wheel 14, and the crushing member 18 includes The crushing member holding means 20 which is held and fixed and moved, a control unit (not shown) for controlling the electric motor 17 and the crushing member holding means 20, and the apparatus main body 11 provided with them.

砥石車14は、酸化アルミニウム、炭化ケイ素、立方晶窒化ホウ素(CBN)、ダイヤモンドなどの極めて高硬度で微小粒子である砥粒16を、結合材と混合して所定の直径及び所定の幅を有する円筒状に成形したものであり、砥粒16と結合材との間には多数の気孔が形成されている。砥粒16はワーク23の部材に応じて適宜選択される。なお、本実施形態では、ワークとして焼結ダイヤモンドからなるものを用い、砥粒としては、焼結ダイヤモンドを用いている。   The grinding wheel 14 has a predetermined diameter and a predetermined width by mixing abrasive particles 16 that are extremely hard and fine particles such as aluminum oxide, silicon carbide, cubic boron nitride (CBN), and diamond with a binder. A large number of pores are formed between the abrasive grains 16 and the binder. The abrasive grains 16 are appropriately selected according to the member of the work 23. In the present embodiment, a workpiece made of sintered diamond is used, and sintered diamond is used as the abrasive.

砥石車14は、中央に貫通孔が形成され、駆動部としての電動機17とシャフトにより結合されており、電動機17の回転で砥石車14が回転駆動されるようになっている。   The grinding wheel 14 is formed with a through hole in the center, and is coupled to a motor 17 as a drive unit by a shaft. The grinding wheel 14 is driven to rotate by the rotation of the motor 17.

装置本体11はこの砥石車14や電動機17を備える部分であり、砥石車14は研磨に使用される部分以外は装置本体11の砥石覆い11aにより覆われている。この砥石覆い11aには、研磨時に発生したクズをよけるクズよけ板12や、研磨されるワーク23を支持する刃物受け13等が設けられている。   The apparatus main body 11 is a part including the grinding wheel 14 and the electric motor 17, and the grinding wheel 14 is covered with a grindstone cover 11 a of the apparatus main body 11 except for a part used for polishing. The grindstone cover 11a is provided with a scraping plate 12 that prevents scraps generated during polishing, a blade receiver 13 that supports the workpiece 23 to be polished, and the like.

また、装置本体11には、目つぶし部材18とこの目つぶし部材18を移動自在に保持固定するための目つぶし部材保持手段20とが設けられている。この目つぶし部材保持手段20は、ワーク23の研磨中に、砥石車14の研磨面15に目つぶし部材18を一定の押圧力で押し付けるものである。   Further, the apparatus main body 11 is provided with a crushing member 18 and a crushing member holding means 20 for holding and fixing the crushing member 18 movably. The crushing member holding means 20 presses the crushing member 18 against the polishing surface 15 of the grinding wheel 14 with a constant pressing force during polishing of the work 23.

目つぶし部材18は、研磨面15に押圧される所定面積の目つぶし面19を有し、立方体形状に成形されている。目つぶし面19は、砥石車14の砥粒16の目つぶしを行える硬度を有し、ワーク23の硬度と同じか又はより硬質の部材で形成されている。例えば、ワーク23が焼結ダイヤモンドで形成されているならば、目つぶし部材18として目つぶし面19が焼結ダイヤモンドで形成されているものを用い得る。なお、適用し得るワークの部材としては、焼結ダイヤモンドの他、天然ダイヤモンド、合成単結晶ダイヤモンド又は合成多結晶ダイヤモンド、炭化ケイ素(SiC)、アルミナ(Al)、ジルコニア(ZrO)、窒化ケイ素(Si)、立方晶窒化硼素(CBN)、サイアロン(Si−Al)等の超硬セラミックス、炭化タングステン(WC)等の超硬金属、サーメット等が挙げられる。目つぶし部材18は、全てが同じ材質で形成されていてもよいが、研磨面15に押圧される目つぶし面19のみを硬質の部材で形成するようにしてもよい。 The crushing member 18 has a crushing surface 19 having a predetermined area pressed against the polishing surface 15 and is formed in a cubic shape. The crushing surface 19 has a hardness capable of crushing the abrasive grains 16 of the grinding wheel 14 and is formed of a member that is the same as or harder than the hardness of the workpiece 23. For example, if the workpiece 23 is formed of sintered diamond, the crushing member 18 having the crushing surface 19 formed of sintered diamond can be used. In addition, as a workpiece member that can be applied, in addition to sintered diamond, natural diamond, synthetic single crystal diamond or synthetic polycrystalline diamond, silicon carbide (SiC), alumina (Al 2 O 3 ), zirconia (ZrO 2 ), Examples include carbide ceramics such as silicon nitride (Si 3 N 4 ), cubic boron nitride (CBN), and sialon (Si 3 N 4 —Al 2 O 3 ), carbide metals such as tungsten carbide (WC), and cermets. It is done. All of the crushing members 18 may be formed of the same material, but only the crushing surface 19 pressed against the polishing surface 15 may be formed of a hard member.

また、目つぶし部材保持手段20は、目つぶし部材18が保持及び固定される保持固定部21と、この保持固定部21に接続され、この保持固定部21を自在に移動できるアーム部22とで構成されている。このアーム部22は、装置本体11に装着され、後述する制御部の信号により駆動されて保持固定部21及び目つぶし部材18を所定位置に移動させることができるものである。   The crushing member holding means 20 includes a holding / fixing portion 21 that holds and fixes the crushing member 18, and an arm portion 22 that is connected to the holding / fixing portion 21 and can freely move the holding / fixing portion 21. ing. The arm unit 22 is attached to the apparatus main body 11 and is driven by a signal from a control unit described later to move the holding and fixing unit 21 and the crushing member 18 to a predetermined position.

また、装置本体11には、図示省略したが、電動機17の回転数及び目つぶし部材保持手段20の移動を制御する制御部が設けられている。この制御は、あらかじめプログラムされていてもよく、また、作業時毎に入力するようにしてもよい。なお、本実施形態では、目つぶし部材18は、砥石覆い11aの開口部11bから出し入れされ目つぶし部材18を砥石車14の研磨面に押圧するような構成となっている。   Although not shown, the apparatus main body 11 is provided with a control unit that controls the rotation speed of the electric motor 17 and the movement of the crushing member holding means 20. This control may be programmed in advance or may be input at every work. In the present embodiment, the crushing member 18 is configured to be put in and out of the opening 11b of the grindstone cover 11a and press the crushing member 18 against the polishing surface of the grinding wheel 14.

次に、図2、図3を参照して、本実施形態にかかる研磨装置10を用いた研磨方法について説明する。なお、図2では、装置本体11の砥石覆い11aを除いた状態を示している。研磨面15は図3Aに示すように砥粒16が研磨面15から突出し、先端が鋭く尖った状態となっている。そして、本実施形態では、この研磨面15の砥粒16を一定にし研磨をするのに最適な状態に目つぶしがされる。すなわち、研磨の際は、図1に示すように、回転する砥石車14にワーク23を押し付け研磨が行われるが、このとき、本実施形態では、砥石車14には図2、図3Bに示すように、研磨面15に目つぶし部材18が目つぶし部材保持手段20により押圧され、研磨面15の突出した砥粒16が常に目つぶしされている状態となっている。なお、図3Cは、目つぶし部材18を研磨面15から離した状態を示している。そして、この押圧は、装置本体11に設けられた制御部により制御され、砥石車14の砥粒16の目つぶれ状態が一定となるように、目つぶし部材保持部のアーム部を調整し、研磨面に目つぶし部材を押圧する押圧力を制御している。   Next, with reference to FIGS. 2 and 3, a polishing method using the polishing apparatus 10 according to the present embodiment will be described. 2 shows a state in which the grindstone cover 11a of the apparatus main body 11 is removed. As shown in FIG. 3A, the polishing surface 15 is in a state where the abrasive grains 16 protrude from the polishing surface 15 and the tip is sharply pointed. In this embodiment, the abrasive grains 16 on the polishing surface 15 are made constant and crushed to an optimum state for polishing. That is, when polishing, as shown in FIG. 1, the workpiece 23 is pressed against the rotating grinding wheel 14 to perform polishing. In this embodiment, the grinding wheel 14 is shown in FIGS. 2 and 3B. As described above, the crushing member 18 is pressed against the polishing surface 15 by the crushing member holding means 20, and the abrasive grains 16 protruding from the polishing surface 15 are always clogged. FIG. 3C shows a state in which the crushing member 18 is separated from the polishing surface 15. And this press is controlled by the control part provided in the apparatus main body 11, and the arm part of the crushing member holding part is adjusted so that the crushing state of the abrasive grains 16 of the grinding wheel 14 becomes constant, and the polishing surface The pressing force for pressing the crushing member is controlled.

このようにすることで、研磨中にできた研磨面の不均一な部分を目つぶし部材で目つぶれを起こし、常に平坦な状態に調整することができるので、被研磨部材に対して優れた研磨ができるようになるとともに、優れた鏡面加工等の精密研磨もできるようになる。なお、目つぶし部材の送り速度を1.5〜5μm/secの範囲に制御することで、より優れた研磨を行うことができる。   By doing in this way, the non-uniform portion of the polished surface formed during polishing can be crushed by the crushing member and can always be adjusted to a flat state, so that excellent polishing can be performed on the member to be polished. It becomes possible to perform precision polishing such as excellent mirror finish. In addition, more excellent polishing can be performed by controlling the feed speed of the crushing member in the range of 1.5 to 5 μm / sec.

なお、本実施形態では、縦回転の砥石車に目つぶし部材を設けた例を示したが、これに限らず、図4に示すように、横回転の砥石車に目つぶし部材を設けるようにしてもよい。さらに、目つぶし部材は図5A〜図5Hに示すような様々な形状の砥石車14A〜14Hに設けることができ、これらの研磨面15に目つぶし部材18を設けるようにすることで、本実施形態と同様の効果を奏することができるようになる。なお、図5Aは平型、図5Bはリング型、図5Cは片へこみ形、図5Dはストレートカップ形、図5Eは両へこみ形、図5Fはテーパカップ形、図5Gはさら形、図5Hはのこ用さら形である。また、目つぶし部材も立方体形状だけでなく、使用する研磨車の形状や使用者の使い勝手により、任意の形状に変更することもできる。   In the present embodiment, the example in which the crushing member is provided on the longitudinally rotating grinding wheel has been shown. However, the present invention is not limited thereto, and as shown in FIG. 4, the crushing member may be provided on the laterally rotating grinding wheel. Good. Further, the crushing member can be provided on grinding wheels 14A to 14H having various shapes as shown in FIGS. 5A to 5H, and the crushing member 18 is provided on these polishing surfaces 15, thereby enabling the present embodiment and Similar effects can be achieved. 5A is a flat type, FIG. 5B is a ring type, FIG. 5C is a single dent type, FIG. 5D is a straight cup type, FIG. 5E is a double dent type, FIG. 5F is a tapered cup type, FIG. 5G is a flat type, FIG. It is a flat type for mushrooms. Further, the crushing member is not limited to a cubic shape, but can be changed to any shape depending on the shape of the grinding wheel used and the convenience of the user.

10:研磨装置 11:装置本体 11a:砥石覆い 11b:開口部 12:クズよけ板 13:刃物受け 14:砥石車 15:研磨面 16:砥粒 17:電動機(駆動部) 18:目つぶし部材 19:目つぶし面 20:目つぶし部材保持手段 21:保持固定部 22:アーム部 23:ワーク DESCRIPTION OF SYMBOLS 10: Polishing apparatus 11: Apparatus main body 11a: Grinding wheel cover 11b: Opening part 12: Scrap board 13: Blade holder 14: Grinding wheel 15: Polishing surface 16: Abrasive grain 17: Electric motor (drive part) 18: Closing member 19 : Crushing surface 20: crushing member holding means 21: holding and fixing part 22: arm part 23: work

Claims (6)

多数の砥粒を含有する砥石を回転駆動させて被研磨部材を研磨する研磨方法において、
前記被研磨部材を研磨する際に、前記砥石の研磨面に常時目つぶし部材を当接させて前記砥粒の目つぶれの状態が一定になるように制御しながら研磨することを特徴とする研磨方法。
In a polishing method for polishing a member to be polished by rotationally driving a grindstone containing a large number of abrasive grains,
When polishing the member to be polished, a polishing method is characterized in that the polishing member is always brought into contact with the polishing surface of the grindstone and polishing is performed while controlling the state of the crushing of the abrasive grains to be constant. .
前記目つぶし部材として、前記被研磨部材と同組成の材料からなるものを用いることを特徴とする請求項1に記載の研磨方法。   The polishing method according to claim 1, wherein the crushing member is made of a material having the same composition as the member to be polished. 前記被研磨部材及び目つぶし部材として、焼結ダイヤモンドを含むものを用いることを特徴とする請求項2に記載の研磨方法。   The polishing method according to claim 2, wherein a member containing sintered diamond is used as the member to be polished and the crushing member. 前記目つぶし部材の送り速度を1.5〜5μm/secとしたことを特徴とする請求項3に記載の研磨方法。   The polishing method according to claim 3, wherein a feed speed of the crushing member is 1.5 to 5 μm / sec. 多数の砥粒を含有する砥石と、前記砥石を回転駆動させる駆動部とを備える研磨装置において、
前記研磨装置は、前記砥石車の研磨面の目つぶしを行う目つぶし部材と、
前記目つぶし部材を保持固定し、移動可能に備えられた目つぶし部材保持手段と、
前記駆動部及び前記目つぶし部材保持手段を制御する制御部を備え、
前記制御部は、前記被研磨部材の研磨の際に、前記目つぶし部材保持手段を移動させ前記目つぶし部材を前記研磨面に押し当て、前記砥粒の目つぶれの状態が一定になるように制御しながら前記被研磨部材を研磨するように制御することを特徴とする研磨装置。
In a polishing apparatus comprising a grindstone containing a large number of abrasive grains and a drive unit that rotationally drives the grindstone,
The polishing apparatus includes a crushing member that crushes the polishing surface of the grinding wheel,
Holding and fixing the crushing member, the crushing member holding means provided movably,
A control unit for controlling the driving unit and the crushing member holding means;
When the polishing member is polished, the control unit moves the crushing member holding means to press the crushing member against the polishing surface, and controls the crushing state of the abrasive grains to be constant. The polishing apparatus is controlled so as to polish the member to be polished.
前記被研磨部材と、前記目つぶし部材として、焼結ダイヤモンドを含むものを使用することを特徴とする請求項5に記載の研磨装置。   6. The polishing apparatus according to claim 5, wherein a member containing sintered diamond is used as the member to be polished and the crushing member.
JP2011260806A 2011-11-29 2011-11-29 Polishing method and polishing device Pending JP2013111712A (en)

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