JP2013094903A - Cutting tool wheel - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a cutting tool wheel, preventing a worker from installing a cutting tool unit to a wheel base in a wrong direction to reduce the risk of damaging a workpiece or a cutting blade caused by the installation in the wrong direction.SOLUTION: The cutting tool wheel cuts the workpiece by rotating in a fixed direction. The cutting tool wheel includes: the wheel base; and a cutting tool unit which has a cutting tool shank, and a cutting blade disposed at a lower end of the cutting tool shank and capable of working in one direction, and which is detachably mounted to the wheel base. The wheel base has an installation method indication mark for installing the cutting tool unit to the wheel base so that a workable direction of the cutting blade turns to the rotation direction.

Description

  The present invention relates to a bite wheel for cutting a workpiece.

  There are various techniques for realizing light and thin semiconductor devices. As an example, a flip in which a plurality of metal protrusions called bumps having a height of about 10 to 100 μm are formed on the surface of a device formed on a semiconductor wafer, and these bumps are directly bonded to an electrode formed on a wiring board. A mounting technique called chip bonding has been put into practical use.

  The bump formed on the device surface of the semiconductor wafer is formed by a method such as plating or stud bump. For this reason, the heights of the individual bumps are non-uniform, and it is difficult to uniformly bond the plurality of bumps to the electrodes of the wiring board as they are.

  In order to realize high-density wiring, there is an integrated circuit mounting technique in which an anisotropic conductive film (ACF) is sandwiched and bonded between a bump and a wiring board. In the case of this mounting technique, if the height of the bump is insufficient, a bonding failure is caused, so that a certain bump height is required.

  Therefore, it is desired to cut a plurality of bumps formed on the surface of the semiconductor wafer to a desired height. As a method of cutting the bumps to a desired height, a method of scraping the bumps using a cutting tool equipped with a cutting wheel is proposed in, for example, Japanese Patent Application Laid-Open No. 2000-173954.

  The bite wheel includes a wheel base and a bite unit including a cutting blade disposed on the wheel base. The bite wheel and the workpiece are in contact with the workpiece while rotating the bite wheel while the cutting blade is in contact with the workpiece. Cutting is performed by sliding the workpiece.

  In a cutting tool, the spindle normally rotates in the clockwise direction, and a cutting tool wheel to which a cutting tool unit is detachably attached via a mount is attached to the lower end of the spindle. The cutting blade of the bite unit has an inclined surface inclined upward from below from the front surface to the back surface.

  An angle formed by the horizontal plane and the inclined surface is referred to as a clearance angle, and an appropriate clearance angle is set according to the type of workpiece. In the cutting tool, the cutting tool is mounted on the wheel base so that the cutting blade surface faces the rotation direction side (starting side in the processing direction).

Japanese Patent Application Laid-Open No. 2000-173954 JP 2009-172723 A

  When the cutting blade of the bite unit is worn, the operator removes the worn bite unit from the wheel base and attaches a new bite unit to the wheel base. It may be attached to the base. If cutting is performed with the tool unit attached in the wrong direction as described above, the workpiece and the cutting blade may be damaged.

  The present invention has been made in view of the above points, and the object of the present invention is to prevent an operator from attaching the bite unit to the wheel base in the wrong direction, and to install the bite unit in the wrong direction. It is an object of the present invention to provide a bite wheel that can reduce the risk of damaging a workpiece and a cutting blade.

  According to the present invention, a bite wheel that rotates in a certain direction to cut a workpiece, and is a wheel base, a bite shank, and a cutting blade that can be machined in one direction disposed at the lower end of the bite shank. And a bite unit that is detachably attached to the wheel base, and the wheel base attaches the bite unit to the wheel base so that a workable direction of the cutting blade is in a rotation direction. A bite wheel having a mounting method display mark for mounting on a table is provided.

  Preferably, the wheel base includes a bite unit holding block that constitutes a part of the base and includes an insertion hole into which the bite shank of the bite unit is inserted.

  According to the present invention, since the wheel base of the bite wheel has the mounting direction indication mark indicating the mounting direction of the bite unit, the operator mistakes the bite unit mounting direction and the workpiece or the cutting blade Can reduce the risk of damage.

It is a perspective view which shows the whole structure of a cutting tool. It is a bottom side perspective view of a bite wheel concerning an embodiment of the present invention. It is a disassembled perspective view which shows a mode that a bite unit is mounted | worn with a bite unit holding block. It is a side view of the bite unit concerning an embodiment. It is a side view explaining the cutting of the workpiece with a bite wheel. It is a typical top view explaining cutting.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Referring to FIG. 1, a perspective view of a cutting tool 2 equipped with a cutting wheel according to an embodiment of the present invention is shown. Reference numeral 4 denotes a base (housing) of the cutting tool 2, and a column 6 is erected on the rear side of the base 4. A pair of guide rails (only one is shown) 8 extending in the vertical direction is fixed to the column 6.

  A cutting tool unit 10 is mounted along the pair of guide rails 8 so as to be movable in the vertical direction. The cutting tool unit 10 is attached to a moving base 12 whose housing 20 moves in the vertical direction along a pair of guide rails 8.

  The cutting tool unit 10 is detachably mounted on a housing 20, a spindle 22 (see FIG. 4) rotatably accommodated in the housing 20, a mount 24 fixed to the tip of the spindle 22, and the mount 24. And a bite wheel 25. A bite unit 26 is detachably attached to the bite wheel 25.

  The cutting tool unit 10 includes a cutting tool feed mechanism 18 including a ball screw 14 and a pulse motor 16 that move the cutting tool 10 vertically along a pair of guide rails 8. When the pulse motor 16 is pulse-driven, the ball screw 14 rotates and the moving base 12 is moved in the vertical direction.

  A chuck table mechanism 28 having a chuck table 30 is disposed at an intermediate portion of the base 4, and the chuck table mechanism 28 is moved in the Y-axis direction by a chuck table moving mechanism (not shown). Reference numeral 33 denotes a bellows, which covers the chuck table mechanism 28.

  The front side portion of the base 4 includes a first wafer cassette 32, a second wafer cassette 34, a wafer transfer robot 36, a positioning mechanism 38 having a plurality of positioning pins 40, and a wafer loading mechanism (loading arm). 42, a wafer carry-out mechanism (unloading arm) 44, and a spinner cleaning unit 46 are disposed.

  Further, a cleaning water spray nozzle 48 for cleaning the chuck table 30 is provided at the approximate center of the base 4. The cleaning water spray nozzle 48 sprays cleaning water toward the chuck table 30 in a state where the chuck table 30 is positioned in the wafer loading / unloading area on the front side of the apparatus.

  Referring to FIG. 2, a bottom perspective view of the bite wheel 25 according to the embodiment of the present invention is shown. Reference numeral 50 denotes a wheel base of the bite wheel 25, and two mounting notches 52 and 54 are formed at positions 180 degrees apart in the circumferential direction.

  A bite unit holding block 56 is detachably mounted on the mounting notch 52 with two screws 58. Similarly, a balance weight holding block 60 is detachably mounted on the mounting notch 54.

  As best shown in FIG. 3, the cutting tool unit 64 includes a rectangular parallelepiped shank (cutting shank) 66 and a cutting blade 68 fixed to the lower end (tip) of the shank 66. The cutting blade 68 is made of, for example, a single crystal diamond.

  The tool unit holding block 56 has an insertion hole 62 for inserting the shank 66 of the tool unit 64 and two through holes 57 into which screws 58 are inserted in order to attach the tool unit holding block 56 to the wheel base 50. Then, three screw holes 71 for fixing the shank 66 of the bite unit 64 inserted into the insertion hole 62 with the screws 70 are formed.

  Mounting for mounting the tool unit 64 on the wheel base 50 on the back surface 56a of the tool unit holding block 56 so that the workable direction of the cutting blade 68 is directed to the rotation direction of the tool wheel 25 (the leading direction in the cutting direction). Direction indication marks 72 are formed. The mounting direction display mark 72 may be a character such as “FRONT” instead of an arrow.

  Referring to FIG. 4, an enlarged side view of the bite unit 64 is shown. The cutting blade 68 of the bite unit 64 is fixed to one surface of the lower end portion of the shank 66 by brazing or the like. The cutting blade 68 has an inclined surface 69 from the front surface 68a inclined upward from the lowermost end of the front surface 68a to the back surface 68b.

  An angle θ formed by the surface (horizontal plane) of the workpiece 11 held on the chuck table 30 and the inclined surface 69 is referred to as a clearance angle, and the clearance angle θ is, for example, 5 ° to 45 ° depending on the type of workpiece. Set within range.

  An arrow A indicates a workable direction. In the bite wheel 25 of this embodiment, the shank 66 is fixed to the bite unit holding portion lock 56 so that the cutting blade 68 fixed to the shank 66 faces the mounting direction display mark 72 shown in FIG. Attach to.

  Referring to FIG. 2 again, a balance weight (counter balance) 74 having the same shape and weight as the shank 66 of the bite unit 64 is detachably attached to the balance weight holding block 60 by screws (not shown). Since the weight of the cutting blade 68 is very small, the balance weight 74 is approximately the same as the weight of the bite unit 64 and acts as a counterbalance.

  Next, with reference to FIG.5 and FIG.6, the cutting method of the workpiece 11 by the bite wheel 25 is demonstrated. While rotating the spindle 22 in the direction of arrow R at about 2000 rpm, the tool wheel feed mechanism 18 is driven to cut the cutting blade 68 of the tool unit 64 into the workpiece 11 to a predetermined depth, and the chuck table 30 is shown in FIG. The workpiece 11 is turned while being moved in the arrow Y direction at a feed rate of 1 mm / s.

  During this turning process, the chuck table 30 is processed and fed in the Y-axis direction without rotating. In FIG. 6, reference numeral 76 denotes a rotation path of the cutting blade 68, and the cutting blade 68 is fixed to the shank 66 so as to face the rotation direction side (cutting direction leading side).

  In the bite wheel 25 of the present embodiment, since the wheel base 50 of the bite wheel 25 has the mounting direction display mark 72 indicating the mounting direction of the bite unit 64, the operator mistakes the direction of the bite unit 64 and the bite unit The possibility of damaging the work piece and / or the cutting blade 68 by attaching 64 to the wheel base 50 can be reduced.

2 Bite cutting device 10 Bite cutting unit 25 Bite wheel 56 Bite unit holding block 64 Bite unit 66 Shank 68 Cutting blade 72 Mounting direction indication mark 74 Balance weight

Claims (2)

A bite wheel that rotates in a certain direction to cut a workpiece,
A wheel base,
A bite shank, and a cutting tool disposed in a lower end of the bite shank and capable of working in one direction, and a bite unit detachably attached to the wheel base,
The wheel base has a mounting method display mark for mounting the tool unit on the wheel base so that a workable direction of the cutting blade is in a rotation direction.   2. The bite wheel according to claim 1, wherein the wheel base includes a bite unit holding block that constitutes a part of the base and includes an insertion hole into which the bite shank of the bite unit is inserted. .

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