JP2013088264A - Contact probe - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable rotation retreat of a plunger body even without executing special working of the plunger body and a sleeve body.SOLUTION: A contact probe includes a first plunger body 2 for making one end 20 a contact end 22 projecting outward from one end 10 of the sleeve body 1, a second plunger body 3 for making one end 30 a contact end 32 projecting outward from the other end of the sleeve body 1, and a compression coil spring 4 in which a spring one end 40 is fixed to the first plunger body 2 and the spring other end 41 is fixed to the second plunger body 3 in the sleeve body. The spring one end 40 of a spring 4 is fixed to the first plunger body 2 at a position which is eccentric to a winding central axis y of the spring 4 and is eccentric to a central axis x of the first plunger body 2.

Description

  In this measurement of an inspection object that requires measurement of electrical characteristics, such as an electronic component such as a semiconductor element, an electronic circuit, etc., an electrical signal obtained from the inspection object is transmitted to various measuring instruments. It is related with the improvement of the contact probe used in order to transmit.

  There are contact probes called rotary or turn type. (See Patent Document 1) In this type of contact probe, a plunger is formed with a spiral guide surface by cutting, and a convex portion that contacts the spiral guide surface is formed on a sleeve that houses the plunger, and further built-in. The state in which the contact end side of the plunger protrudes from the sleeve by a certain amount is maintained by the biasing means such as the compressed coil spring. Then, when the contact end of the plunger comes into contact with an inspection target such as a semiconductor element, typically the electrode, with a predetermined load, the plunger moves backward while rotating in the sleeve on the fixed side. It is like that. Such a plunger has an extremely thin round bar shape, and its outer diameter is typically in the range of 0.12 mm to 0.65 mm. Further, the sleeve is configured to have an extremely thin cylindrical tube shape having an inner diameter into which a plunger can be inserted from the other end opposite to the contact end, and the outer diameter is typically 0. 0 mm. 2 mm to 0.8 mm. Therefore, the structure of this type of contact probe is preferably as simple as possible from the viewpoint of facilitating the processing of its component parts.

JP-A-9-281141

  The main problem to be solved by the present invention is that the plunger body can be rotated and retracted as described above without specially processing the plunger body and the sleeve body.

In order to achieve the above object, according to the present invention, the contact probe includes a sleeve body having both ends opened,
A first plunger body having one end as a contact end protruding outward from one end of the sleeve body;
A second plunger body having one end as a contact end protruding outward from the other end of the sleeve body;
A compression coil spring in the sleeve body, with one end of the spring fixed or engaged with the first plunger body and the other end of the spring fixed or engaged with the second plunger body,
Both the first plunger body and the second plunger body can be pushed into the sleeve body while the contact end side is protruded from the sleeve body by a predetermined dimension by the spring and stored in the spring from the reference position. And
The first plunger body is rotatably housed in the sleeve body, and the second plunger body is non-rotatably housed in the sleeve body,
One end of the spring of the spring is in an eccentric position with respect to the center axis of winding of the spring, and is fixed or engaged with the first plunger body at a position eccentric with respect to the central axis of the first plunger body. It was supposed to be.

  When the contact end of the first plunger body at the reference position is brought into contact with the contacted portion of the inspection object with a predetermined load while the sleeve body is fixed, the first plunger body is compressed while compressing the spring. Retraction is allowed. Such a spring moves one end of the spring in such a direction as to circulate around the winding center axis. One end of the spring is at a position eccentric to the winding central axis of the spring, and is fixed or engaged with the first plunger body at a position eccentric to the central axis of the first plunger body. For this reason, the first plunger body corresponding to the movement of one end of the spring is rotated within the sleeve body about the central axis. That is, when the contact end of the first plunger body at the reference position is brought into contact with the electrode of the inspection object with a predetermined load, the first plunger body is rotated and retracted while compressing the spring.

  According to the contact probe of the present invention, the contact end of the first plunger body at the reference position is applied to the contacted portion of the inspection object with a predetermined load without performing special processing on the plunger body and the sleeve body. When the contact is made, the first plunger body can be rotated and retracted.

FIG. 1 is a cross-sectional view showing a sleeve body constituting a contact probe (first example) according to an embodiment in a cross-section along its length direction. FIG. 2 is a perspective view showing a first plunger body constituting the first example. FIG. 3 is a perspective view showing a second plunger body constituting the first example. FIG. 4 is a cross-sectional view showing the sleeve body constituting the first example in a cross-section at a position where the first plunger body is positioned along the width direction thereof. FIG. 5 is a cross-sectional view showing a sleeve body constituting the contact probe (second example) according to the embodiment along a length direction thereof. FIG. 6 is a perspective view (a view) and a side view (b view) showing a first plunger body constituting the second example. FIG. 7 is a perspective view (a diagram) and a side view (b diagram) showing a second plunger body constituting the second example. FIG. 8 is a perspective view showing a spring constituting the second example. FIG. 9 is a cross-sectional view showing the sleeve body constituting the second example in a cross-section at a position where the first plunger body is positioned along the width direction thereof.

  Hereinafter, typical embodiments of the present invention will be described with reference to FIGS. The contact probe according to this embodiment is used for measuring various kinds of measuring objects such as electronic components such as semiconductor elements and electronic circuits that require measurement of electrical characteristics. It is used to transmit an electrical signal obtained from.

  Such a contact probe is configured by combining a sleeve body 1, a first plunger body 2, a second plunger body 3, and a compression coil spring 4 each made of a conductive material.

  Both ends of the sleeve body 1 are opened. The sleeve body 1 is also called a barrel or the like, and has an elongated cylindrical shape. In the illustrated example, both ends 10 and 11 of the sleeve body 1 are narrowed so that the inner diameter is smaller than other portions.

  The first plunger body 2 has one end 20 as a contact end 22 protruding outward from one end 10 of the sleeve body 1. In the illustrated example, the first plunger body 2 has one end 20 side and the other end 21 side as a small diameter portion 23, and a large diameter that increases the outer diameter between the two small diameter portions 23, 23. The portion 24 is configured as a rod-shaped body having a circular cross section. Between the small diameter portion 23 and the large diameter portion 24, a step surface 25 is formed that circulates the central axis x of the first plunger body 2 and is oriented perpendicular to the central axis x. The outer diameter of the small diameter portion 23 on the one end 20 side is substantially equal to the inner diameter of the open one end 10 of the sleeve body 1, while the outer diameter of the large diameter portion 24 is the inner diameter between both ends 10, 11 of the sleeve body 1. It is almost equal. The first plunger body 2 is in contact with the contact end 22 (not shown) such as an electrode of the inspection object with a predetermined load by the bias of the spring 4 until the contact is made with a predetermined load. The step surface 25 on the end 22 side is positioned at a reference position where it abuts against the opening edge of the one end 10 of the sleeve body 1 from the inside of the sleeve body 1.

  The second plunger body 3 has one end 30 as a contact end 32 protruding outward from the other end 11 of the sleeve body 1. In the illustrated example, the second plunger body 3 has a small diameter portion 33 on one end 30 side and the other end 31 side, and a large diameter that increases the outer diameter between the small diameter portions 33 and 33. The portion 34 is configured as a rod-shaped body. The cross section of the small diameter portion 33 on the other end 31 side and the large diameter portion 34 that are always positioned in the sleeve body in a direction perpendicular to the central axis x of the second plunger body 3 is circular, but the small diameter on the one end 30 side. The cross section of the part 33 in the direction orthogonal to the central axis x is a non-circular plate shape. Between the small diameter portion 33 and the large diameter portion 34, a step surface 35 is formed so as to go around the central axis x of the second plunger body 3 and to be orthogonal to the central axis x. The outer diameter of the large-diameter portion 34 is substantially equal to the inner diameter between both ends 10 and 11 of the sleeve body 1. The second plunger body 3 comes into contact with a contacted body (not shown) that is electrically connected to the measuring instrument side with a predetermined load by the bias of the spring 4. Until this is done, the stepped surface 35 on the contact end 32 side is positioned at the reference position where it abuts against the opening edge of the other end 11 of the sleeve body 1 from the inside of the sleeve body 1.

  The shapes of the contact ends 22 and 32 of the first plunger body 2 and the second plunger body 3 are appropriately adjusted according to the contact location of the inspection object or the properties of the contact body. In the illustrated example, the contact end 22 of the first plunger body 2 has a concave shape that is complementary to a convex non-contact location. When the contact end 22 of the first plunger body 2 is brought into contact with the contacted portion with a predetermined load, the first plunger body 2 is rotated and retracted while compressing the spring 4 as will be described later. Even if there are deposits (oxide film, flux, etc.) on the surface of the contact location, the contact end is appropriately electrically connected to the contact location except for this.

  The compression coil spring 4 is located in the sleeve body 1 so that one end of the spring 40 is fixed or engaged with the first plunger body 2 and the other end 41 of the spring is fixed or engaged with the second plunger body 3. Yes. In the example shown in FIG. 1, the spring one end 40 of the compression coil spring 4 is fixed to the large diameter portion 24 of the first plunger body 2, and the spring other end 41 is fixed to the large diameter portion 34 of the second plunger body 3. It is fixed. In the example shown in FIG. 5, the spring one end 40 of the compression coil spring 4 is engaged with the large diameter portion 24 of the first plunger body 2, and the spring other end 41 is the large diameter of the second plunger body 3. The portion 34 is engaged.

  In this embodiment, the spring one end 40 and the spring other end 41 of the spring 4 are both in an eccentric position with respect to the winding center axis y of the spring 4. In the example shown in FIG. 1, the spring end 40 of the compression coil spring 4 is positioned on a virtual spiral following the winding portion 42 of the spring 4 so as to be parallel to the winding center axis y from the terminal 40 ′. The other end 41 of the compression coil spring 4 is drawn from the other end 41 ′ located on the virtual spiral following the winding portion 42 of the spring 4. It is constituted by a drawer portion 41a that is drawn out so as to be parallel to y. Further, in the example shown in FIG. 5, the spring end 40 of the compression coil spring 4 is located on the virtual spiral following the winding portion 42 of the spring 4 from the one end 40 ′ toward the winding center axis y. The other end 41 of the compression coil spring 4 is formed by an extension 40b protruding inward, and the winding center axis y from the other end 41 'positioned on a virtual spiral following the winding 42 of the spring 4 is formed. It is comprised by the extension part 41b which protrudes inward toward.

  In this embodiment, the inner diameter of the winding portion 42 of the spring 4 and the outside of the small-diameter portion 23 that is always located in the sleeve body 1 in the first plunger body 2 and the second plunger body 3. The diameter is substantially equal. Then, the small diameter portion 23 that is always positioned in the sleeve body 1 in the first plunger body 2 is inserted into the winding portion 42 of the spring 4 from the spring one end 40 side, and the sleeve body in the second plunger body 3. 1 is inserted into the winding portion 42 of the spring 4 from the other end 41 side of the spring 4 and elastically deformed between the first plunger body 2 and the second plunger body 3. In this state, the spring 4 is interposed.

  The first plunger body 2 and the second plunger body 3 are both protruded from the sleeve body 1 by a predetermined dimension by the spring 4 by the spring 4 interposed in this way. From the reference position, the spring 4 can be pushed into the sleeve body 1 while being accumulated.

  The spring end 40 of the spring 4 is fixed or engaged with the first plunger body 2 at a position eccentric with respect to the central axis x of the first plunger body 2. In this embodiment, the spring other end 41 of the spring 4 is also fixed or engaged with the second plunger body 3 at a position eccentric with respect to the central axis x of the second plunger body 3. Yes.

  Specifically, in the example shown in FIG. 1, the large-diameter portion 24 in the first plunger body 2 has a groove 24 a that is parallel to the central axis x of the first plunger body 2, A groove 24a having a groove end opened at the stepped surface 25 is formed. By inserting the spring end 40 of the spring 4 into the groove 24a, the spring end 40 of the spring 4 is moved to the central axis of the first plunger body 2. It is fixed at a position eccentric with respect to x. Further, in the example shown in FIG. 1, the large-diameter portion 34 of the second plunger body 3 is also provided with a groove 34a parallel to the central axis x of the second plunger body 3, Is formed in the step surface 25, and the other end 41 of the spring 4 is inserted into the groove 34a so that the other end 41 of the spring 4 is the center of the second plunger body 3. It is fixed at a position eccentric with respect to the axis x.

  Further, in the example shown in FIG. 5, the spring 4 is inserted into the recess 24 b formed in the step surface 25 on the small diameter portion 23 side which is always located in the sleeve body 1 in the first plunger body 2. One end 40 of the spring is inserted. The recess 24b is formed by cutting an edge portion of the step surface 25 so as to be along a part of a virtual spiral around the central axis x of the first plunger body 2, and the deepest portion includes the above-described recess 24b. A hole 24c is formed for drilling toward the central axis x. Then, the extension portion 40b which becomes the spring end 40 of the spring 4 is accommodated in the blind hole 24c so that the spring end 40 is engaged with a position eccentric with respect to the central axis x of the first plunger body 2. In the example shown in FIG. 5, the spring 4 is inserted into the recess 34 b formed in the step surface 35 on the small diameter portion 33 side that is always located in the sleeve body 1 of the second plunger body 3. The other end 41 of the spring is inserted. The recess 34b is formed by cutting the edge of the stepped surface 35 so as to be along a part of a virtual spiral around the central axis x ′ of the second plunger body 3, and at the deepest portion thereof. A hole 34c is formed for drilling toward the central axis x '. Then, the extension 41b which becomes the spring other end 41 of the spring 4 is placed in the blind hole 34c so that the other end 41 of the spring is engaged with a position eccentric with respect to the central axis x 'of the second plunger body 3. ing.

  The first plunger body 2 is housed in the sleeve body 1 so as to be rotatable, and the second plunger body 3 is housed in the sleeve body 2 in a non-rotatable manner. In this embodiment, the cross-sectional shape of the small diameter portion 23 on the one end 20 side of the first plunger body 2 is circular, and the opening of the one end 10 of the sleeve body 1 has the cross-sectional shape of this small diameter portion 23. It has a circular shape. On the other hand, the cross-sectional shape of the small diameter portion 33 on the one end 30 side of the second plunger body 3 is non-circular as described above, and the opening of the other end 11 of the sleeve body 1 is complementary to the cross-sectional shape of the small diameter portion 33. When the contact end 32 of the second plunger body 3 is brought into contact with the contacted body with a predetermined load, the second plunger body 3 is retracted but does not rotate. Yes.

  When the sleeve body 1 is fixed and the contact end 22 of the first plunger body 2 at the reference position is brought into contact with the contacted portion of the object to be inspected with a predetermined load, the spring 4 is compressed while the first end is compressed. Retraction of the plunger body 2 is allowed. Typically, the sleeve body 1 is inserted into a through-hole formed in a base made of an insulating material (not shown) and is held and fixed to the base. Typically, such a base is formed with a plurality of through holes at a pitch of 0.3 mm to 0.4 mm so as to match the arrangement of the electrodes of the object to be inspected, and one contact probe is provided for each through hole. It is attached. The spring 4 moves the one end 40 of the spring in a direction around the winding central axis y by the compression. The spring end 40 is fixed to the first plunger body 2 at a position eccentric to the winding central axis y of the spring 4 and at a position eccentric to the central axis x of the first plunger body 2. Alternatively, since the spring end 40 is engaged, the first plunger body 2 is rotated within the sleeve body 1 about the central axis x. (In FIGS. 4 and 9, the direction of this rotation is indicated by an arrow.) That is, when the contact end 22 of the first plunger body 2 at the reference position is brought into contact with the contacted portion of the inspection object with a predetermined load. The first plunger body 2 is rotated and retracted while compressing the spring 4. Further, the first plunger body 2 and the sleeve body 1 are pressed against the sleeve body 1 by the action of the spring 4 on the side facing the fixed or engaged position with the one end 40 of the spring. And the second plunger body 3 is pressed against the sleeve body 1 by the action of the spring 4 on the side facing the fixed or engaged position with the other end 41 of the spring. Therefore, the first plunger body 3 and the sleeve body 1 are always appropriately electrically connected. Thus, the first plunger body 2 and the second plunger body 3 are always properly electrically connected via the sleeve body 1.

DESCRIPTION OF SYMBOLS 1 Sleeve body 2 1st plunger body 20 One end 22 Contact end 3 Second plunger body 30 One end 32 Contact end 4 Compression coil spring 40 Spring one end 41 Spring other end x Center axis y Winding center axis

Claims (1)

A sleeve body with both ends open,
A first plunger body having one end as a contact end protruding outward from one end of the sleeve body;
A second plunger body having one end as a contact end protruding outward from the other end of the sleeve body;
A compression coil spring in the sleeve body, with one end of the spring fixed or engaged with the first plunger body and the other end of the spring fixed or engaged with the second plunger body,
Both the first plunger body and the second plunger body can be pushed into the sleeve body while the contact end side is protruded from the sleeve body by a predetermined dimension by the spring and stored in the spring from the reference position. And
The first plunger body is rotatably housed in the sleeve body, and the second plunger body is non-rotatably housed in the sleeve body,
One end of the spring of the spring is in an eccentric position with respect to the center axis of winding of the spring, and is fixed or engaged with the first plunger body at a position eccentric with respect to the central axis of the first plunger body. A contact probe characterized by that.

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