JP2013079840A - Surface roughness measuring device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a surface roughness measuring device including a measuring unit enabling such miniaturization that a stylus can be inserted to a deep portion in a narrow part, such as a narrow tube.SOLUTION: A surface roughness measuring device 10 comprises: a stylus 120 having a probe 128 for contacting to a material surface 90; a carriage 110 for scanning the stylus 120 in parallel to the material surface 90; a light reflecting member 130 provided in the stylus 120, vertically moved according to vertical movement of the probe 128 and having a reflective surface curved in the direction of the vertical movement; an elongated light guide member 140 having a first edge part 142 fixed to the carriage 110 so that the first edge surface 142 faces the reflective surface of the light reflection member 130, guiding light incident from a second edge surface 144 to the first edge surface 142 to emit the light from the first edge surface 142 and irradiate the reflective surface therewith and guiding the reflected light reflected on the reflective surface and entered into the first edge surface 142 to the second edge surface 144.

Description

  The present invention relates to a stylus type surface roughness measuring apparatus. More specifically, the present invention relates to a surface roughness measuring apparatus that can measure the surface roughness in a narrow region by reducing the size of the measuring portion around the stylus.

  Conventionally, as a device for measuring the surface roughness of an object to be measured, a surface roughness measuring device that measures the surface roughness by scanning the stylus along the measurement surface and detecting the vertical movement of the stylus accompanying the surface irregularities is measured. Are known. That is, the surface roughness measuring apparatus includes a stylus and an apparatus main body that supports the stylus. By moving the stylus in the measurement direction with respect to the apparatus main body, the stylus moves up and down according to the unevenness of the measurement surface. Is converted into an electrical signal, and measurement is performed based on the signal. In this case, the electrical movement of the vertical movement of the stylus is moved along the measurement surface because it is a sensing device such as a differential transformer that moves with the stylus and directly converts the vertical movement of the stylus into an electrical signal. The size of the measuring part composed of the stylus and the differential transformer is relatively large, and therefore it is difficult to measure the surface roughness in a narrow part. (Patent Document 1)

  In recent years, there has been an increasing need to measure the surface roughness of the inner peripheral surface of an elongated tubular member such as a fuel injection part of an engine such as an automobile or a medical catheter. When measuring the surface roughness of the inner peripheral surface of such a thin tube with the conventional surface roughness measuring apparatus as described above, it can be measured only within a range of several mm to several cm from the entrance of the thin tube where the tip of the stylus reaches. The only way to measure the depth of the narrow tube was to cut the thin tube in the axial direction and perform a destructive inspection.

JP 2000-310529 A

  Therefore, an object of the present invention is to provide a surface roughness measuring device including a measuring unit that can be miniaturized so that a stylus can be inserted deeply into a narrow portion such as the inside of a thin tube. Another object of the present invention is to provide a surface roughness measuring device having a configuration capable of stably measuring the surface roughness in a narrow tube.

That is, the present invention
A surface roughness measuring device for measuring the surface roughness of a material surface,
A stylus having a stylus in contact with the material surface;
A carriage that scans the stylus in parallel with the surface of the material so that the stylus moves while contacting the surface of the material and the stylus moves up and down according to the roughness of the surface of the material. ,
A light reflecting member that is provided on the stylus and moves up and down in response to the up and down movement of the stylus, the light reflecting member having a reflecting surface curved in the up and down direction;
A first end surface having a first end surface; and a second end portion having a second end surface opposite to the first end surface, the first end surface facing the reflective surface of the light reflecting member. The first end is an elongated light guide member fixed to the carriage, guides the light incident from the second end surface to the first end surface, and emits the light from the first end surface to irradiate the reflecting surface And a light guide member that guides reflected light that is reflected by the reflecting surface and incident on the first end surface to the second end surface;
A surface roughness measuring device is provided.

  This device detects the vertical movement of the stylus associated with the unevenness of the measurement surface by changing the amount of light reflected by the light reflecting member, and the reflected light is detected as required by an elongated light guide member attached to the carriage. It can be sent to the device. Therefore, the measurement unit including the stylus that moves on the measurement surface and the carriage that supports the stylus can be significantly reduced in size compared to the measurement unit of the above-described conventional apparatus. The surface roughness can be measured by sending it to the back of a narrow place. In addition, since the reflecting surface of the light reflecting member is a curved surface curved in the vertical movement direction of the stylus, the reflection direction changes greatly even with slight vertical movement of the stylus, and the amount of reflected light received changes greatly. Can also be improved.

  The carriage may be configured to slide on the material surface.

  By sliding the carriage that supports the stylus on the surface of the material, the stylus and carriage move together in response to large undulations on the measurement surface and vibration of the measurement device or measurement material. Will be able to offset the movement. That is, the influence of the disturbance can be reduced and the surface roughness can be measured more accurately.

  In addition, a posture holding device may be provided that includes a plurality of skids that are provided at intervals in the front-rear direction of the carriage and that contact the material surface to define the posture of the carriage with respect to the material surface.

  By making the plurality of skids contact the material surface, the stability of the carriage with respect to the measurement surface can be further improved as compared with the case where the carriage is brought into direct contact with the material surface.

  Specifically, the stylus has an elongated support member that is pivotally attached to the carriage and extends from the carriage toward the front of the surface roughness measuring device, and the stylus is provided at a front end portion of the support member. It can be done.

further,
The measurement surface is the inner peripheral surface of the hole;
The surface roughness measuring device measures the surface roughness of the inner peripheral surface of the hole in the axial direction by setting the carriage and the stylus in the hole and moving them in the axial direction of the hole. Device,
The posture holding device is an elastic holding member provided around the carriage, and slides on the inner peripheral surface as the carriage moves in the axial direction while elastically engaging with the inner peripheral surface. In addition, an elastic holding member that holds the posture of the carriage with respect to the inner peripheral surface together with the plurality of skids can be further provided.

  Specifically, the elastic holding member is a spring member, and the spring member is biased between the carriage and the inner peripheral surface so that the plurality of skids are pressed against the inner peripheral surface. Further, it can be arranged on the carriage.

  The apparatus can measure the surface roughness of the inner peripheral surface of a hole such as a thin tube, and in that case, by providing an elastic holding member that elastically engages with the inner peripheral surface of the hole, It is possible to stably hold the posture of the device within the inner peripheral surface without being affected by the change. Further, since the inner surface is held, the surface roughness of the side surface and the upper surface of the inner surface can be measured while the skid is in contact with the side surface and the upper surface of the inner surface.

Preferably, the light guide member is an optical fiber having a length sufficient for the second end surface to be positioned outside the hole during measurement of the inner peripheral surface.
A control unit comprising: a light source of light incident on the second end surface of the optical fiber; and a light receiving element that detects a light intensity of the reflected light that is reflected by the light reflecting unit and returned from the second end surface. The control unit may be disposed outside the hole away from the carriage.

  By using an optical fiber as the light guide member, the length can be easily increased. In addition, since the optical fiber has flexibility, the position of the measurement unit can be relatively freely changed from a position close to the control unit to a position far from the control unit. As a result, it is possible to insert only a measurement part that can be configured to be relatively small into the hole, and to measure the surface roughness of the inner peripheral surface deep in the hole.

  The stylus has an elongated support member that is pivotally attached to the carriage and extends from the carriage toward the front of the surface roughness measuring device, and the stylus is provided at a front end portion of the support member. can do.

  More specifically, one of the support member of the stylus and the carriage has a V-shaped groove, and the other has a protrusion having a sharp edge, and the pivoting of the stylus is The pointed edge and the V-shaped groove can be pivotally engaged with each other.

  With such a configuration, the followability of the stylus to the measurement surface of the stylus can be improved.

  The support member of the stylus is held on the carriage via an elastic member, and the pivoting of the stylus can be performed by elastic deformation of the elastic member.

  Furthermore, the stylus has an elongated support member having a first end and a second end, and the support member is held at the first and second ends by the carriage via an elastic member, When the elastic member is elastically deformed, the stylus can be moved substantially linearly in the vertical direction.

  Since the stylus is held at two locations, the first end and the second end, stability against disturbances such as vibration is increased, and the arc-shaped movement of the stylus can be suppressed, enabling more accurate measurement. It becomes.

  Furthermore, the plurality of skids can be arranged at intervals in the front-rear direction of the carriage with the stylus in between.

  This arrangement of the skid improves the stability of the carriage, so that the measurement stability can be further improved.

  Preferably, the stylus includes a load adjusting mechanism disposed on the support member, and the load adjusting mechanism adjusts a load on the material surface of the stylus and, when not measuring, the stylus is placed on the material surface. It can be made to be able to be separated from.

  By allowing the load of the stylus to be adjusted, damage to the material surface can be minimized. Further, by preventing the stylus from coming into contact with the material surface during non-measurement, damage to the stylus can be suppressed.

  Specifically, the light reflecting member can be a cylindrical mirror.

More specifically,
The carriage is a thin tube having an inner hole and an outer diameter of 1 mm or less;
The stylus may be arranged such that at least a part of the stylus is located in the inner hole and the stylus is in a position protruding from the front end surface of the capillary tube.

  With such a configuration, the measurement unit including the stylus and the carriage can be made smaller, so that the surface roughness of the inner peripheral surface of a smaller hole can be measured.

  Still further, an elongated rigid member attached to the carriage and having a length sufficient to extend out of the hole during measurement of the surface roughness of the inner peripheral surface, the elongated rigid member comprising: By pushing and pulling, the carriage set in the hole can be driven in the front-rear direction.

  The carriage may further include an ultrasonic vibration element, and the carriage may be driven in the front-rear direction along the inner peripheral surface by ultrasonic vibration of the ultrasonic vibration element.

  Further, the carriage may further include a magnet, and the carriage may be driven in the front-rear direction along the inner peripheral surface by a magnetic field applied from the outside of the hole.

  By providing these mechanisms for driving the carriage in the front-rear direction from the outside of the hole, the carriage can be easily driven and the moving distance of the carriage can be controlled more accurately.

It is a figure showing the whole surface roughness measuring device concerning a 1st embodiment of the present invention. It is the schematic of a control part. It is a 1st figure which shows the change of the reflected light by the vertical motion of a reflective surface. It is a 2nd figure which shows the change of the reflected light by the vertical motion of a reflective surface. It is a 3rd figure which shows the change of the reflected light by the vertical motion of a reflective surface. It is a graph which shows the result of having measured the surface roughness of the test piece. It is side surface sectional drawing of the measurement part of the surface roughness measuring apparatus which concerns on the 2nd Embodiment of this invention. It is a front view of the measurement part of the surface roughness measuring apparatus which concerns on the 2nd Embodiment of this invention. It is a side view of the measurement part of the surface roughness measuring apparatus which concerns on the 3rd Embodiment of this invention. It is a side view of the measurement part of the surface roughness measuring apparatus which concerns on the 4th Embodiment of this invention. It is a side view of the measurement part of the surface roughness measuring apparatus which concerns on the 5th Embodiment of this invention.

  The surface roughness measuring apparatus 10 according to the first embodiment of the present invention is divided into a measuring unit 100 and a control unit 200 as shown in FIG. The measurement unit 100 includes a carriage 110 that is generally cylindrical, and a stylus 120 that is supported by the carriage. A protrusion 112 having a pointed edge 114 is provided at the bottom of the inner peripheral surface of the carriage 110. The stylus 120 has a V-shaped groove 114 that is engaged and supported by the protrusion 112, and an elongated support member 122 that extends in the longitudinal axis direction of the carriage, and a touch provided on a front end portion 126 of the support member 122. Needle 128. The V-shaped groove 114 of the stylus 120 has a larger opening angle than the pointed edge 114 of the protrusion 112 of the carriage 110, and the pointed edge 114 and the top of the groove engage with each other, so that the stylus 120 The stylus 128 can be pivoted with respect to the carriage 110 so that the stylus 128 can move up and down according to the unevenness of the measurement surface 90. The pivotable support of the stylus may be made in other manners such as engaging a protrusion provided on the stylus side with a V-shaped groove provided on the carriage side.

  The stylus 120 is provided with a cylindrical mirror 130 as a light reflecting member 130, and the cylindrical mirror 130 is disposed near the stylus 128 so as to move up and down in accordance with the up and down movement of the stylus 128. The surface roughness measuring apparatus 10 includes an optical fiber 140 as a light guide member 140. The optical fiber 140 has a first end 144 fixed to the carriage 110, and a first end surface that is an end surface of the optical fiber 140. 142 faces the reflecting surface 132 of the cylindrical mirror 130. A second end 148 of the optical fiber 140 having a second end surface 146 on the opposite side of the first end surface 142 extends to the control unit 200 described in detail later.

  The carriage 110 is provided with a plurality of skids 150 at positions spaced apart in the front-rear direction of the carriage 110 at the lower part of the outer peripheral surface thereof, and these skids 150 support the carriage 110 by contacting the measurement surface 90. It has become. In the present embodiment, a pair of skids provided at intervals in the circumferential direction are provided near the front end and the rear end of the carriage (see FIG. 8). The contact surface of the skid 150 with the measurement surface 90 has a sufficiently large curvature compared to the unevenness of the surface roughness to be measured, so that when the skid 150 is slid on the measurement surface 90, the carriage 110 is fine. It moves in parallel with the measurement surface 90 so as to follow the waviness and the bending of the measurement surface without being affected by the unevenness of the surface roughness. Since the entire stylus 120 also moves together with the carriage 110, the stylus 128 that is in contact with the measurement surface 90 scans the measurement surface 90 and mainly follows only the roughness of the surface roughness of the measurement surface 90. 110 moves up and down. At this time, the cylindrical mirror 130 provided on the stylus 120 also moves up and down. The arrangement and number of skids 150 are appropriately changed according to the shape of the surface to be measured.

  The controller 200 of the surface roughness measuring apparatus 10 includes an optical circulator 210 having first, second, and third ports 211, 212, and 213. The optical circulator 210 transmits light traveling from the first port 211 to the second port 212, light traveling from the second port 212 to the third port 213, and light traveling from the third port 213 to the first port 211 with low loss. In addition, light traveling in other directions is transmitted with high loss. That is, light is transmitted in the above-described direction, but is hardly transmitted in other directions. The second end face 146 of the optical fiber 140 is connected to the second port 212 of the optical circulator 210. A laser diode 220 as a light source is connected to the first port 211, and laser light from the laser diode 220 controlled by the laser diode driver 230 passes through the optical circulator 210 from the second end face 146 of the optical fiber 140 to the optical fiber. The light enters the inside 140 and exits from the first end surface 142. As shown in FIG. 3, the first end surface 142 of the optical fiber 140 is a lens surface that collects the emitted light on the reflection surface 132 of the cylindrical mirror 130. In order to form a lens surface, the first end surface 142 may be processed into a lens shape, or another microlens may be fixed to the first end surface 142.

  The detection principle of the vertical movement of the stylus 128 of the present invention will be described with reference to FIGS. FIG. 3 shows a state where the top of the arc-shaped reflecting surface 132 of the cylindrical mirror 130 is located in front of the first end surface 142 of the optical fiber 140. At this time, since the reflecting surface 132 at the position where the irradiation light 134 condensed on the reflecting surface 132 hits is substantially parallel to the first end portion 144, most of the reflected light 136 reflected by the reflecting surface 132 is almost completely reflected. Returning to the first end face 142 of the optical fiber 140 again, the optical fiber 140 is guided into the optical fiber 140. Next, when the stylus 128 is lowered according to the roughness of the surface roughness, the reflecting surface 132 of the cylindrical mirror 130 is lowered accordingly, and the state shown in FIG. 4 is obtained. At this time, since the top of the cylindrical mirror 130 is slightly shifted from the front of the first end surface 142 of the optical fiber 140, the reflection surface 132 at the position where the irradiation light 134 is collected is located with respect to the first end surface 142 of the optical fiber 140. Has a slope. Therefore, the irradiation light 134 is reflected toward the upper region as viewed in the drawing. As a result, a part of the reflected light 136 travels to a position deviating from the first end surface 142, and the amount of light returning to the first end surface 142 is smaller than that in the state of FIG. When the stylus 128 and the cylindrical mirror 130 are further lowered to a state as shown in FIG. 5, the reflected light 136 is further reflected upward, and the reflected light 136 incident on the first end face 142 of the optical fiber 140 is reflected. The amount of light is further reduced. As described above, the cylindrical mirror 130 moves up and down with respect to the optical fiber 140 as the stylus 128 moves up and down, so that the reflection surface 132 at the position where the irradiation light 134 from the first end surface 142 of the optical fiber 140 is irradiated. The inclination angle changes, and the direction in which the irradiation light 134 is reflected changes. If it does so, it will return to the 1st end surface 142 of the optical fiber 140 again, and the light quantity which enters into the optical fiber 140 will change. Thus, since the reflecting surface 132 is a curved surface that is bent in the vertical movement direction, a large amount of light can be changed with a slight vertical movement, so that highly sensitive measurement can be realized. In the present embodiment, the cylindrical mirror 130 having an arcuate curved surface is used. However, a mirror having a curved reflecting surface 132 other than an arc such as a parabola may be used, or a concave mirror may be used.

  The reflected light 136 incident from the first end face 142 passes through the optical fiber 140 to reach the second end face 146 and is guided from the second port 212 of the optical circulator 210 to the third port 213. A photodiode 240 is connected to the third port 213 of the optical circulator 210 as the light receiving element 240 for measuring the amount of light. Based on the amount of light measured by the photodiode 240, the magnitude of the vertical movement of the stylus 128 is obtained. The photodiode 240 outputs a current corresponding to the amount of light irradiated. This current is converted into a voltage output by the current / voltage converter 250 and further converted into a digital value by the A / D converter 260. The signal converted into the digital value is input to the computer 270, and a predetermined calculation is performed in the computer 270 to obtain the magnitude of the vertical movement of the stylus 128 and the surface roughness. In this embodiment, the laser diode 220 is used as the light source, but other light sources such as LEDs may be used, and other light receiving elements may be used.

  FIG. 6 shows a measurement result when the surface roughness of the measurement specimen having 4 μm irregularities formed periodically is measured by the surface roughness measuring apparatus 10 according to the present embodiment configured as described above. An output change of about 0.23 V was obtained with respect to the unevenness of 4 μm. In the measurement experiment of the surface roughness measuring apparatus 10 of the present embodiment, the measurement data is finally converted into measurement data due to the influence of environmental noise such as temperature change and air fluctuation, mechanical noise such as vibration, and electrical noise from a circuit. Since the appearing noise was about 5 mV, the measurement accuracy is about 87 nm. This measurement accuracy can be improved by reducing noise by various noise countermeasures, but can also be improved by structural improvements such as reducing the curvature of the cylindrical mirror 130.

  In the surface roughness measuring apparatus 10 according to the present invention, the measuring unit 100 and the control unit 200 are separated as described above, and the optical fiber 140 is connected to the optical fiber 140 by, for example, a coil. It is possible to displace the measuring unit 100 from a position close to the control unit 200 to a position separated by several meters or more, for example, by extending the shape as necessary. Thus, by separating the measurement unit 100 from the control unit 200 that includes a light source, a control circuit, and the like and becomes relatively large, it becomes possible to insert only a relatively small measurement unit 100 into a narrow space. It is possible to measure the surface roughness of a narrow region such as a thin tube. For example, in this embodiment, the carriage 110 is formed of a thin tube (microcapillary) having a diameter of 1 mm or less so that the surface roughness of the inner peripheral surface of the elongated hole 92 having a diameter of 1 mm can be measured. However, when it becomes small in this way, the weight of the measurement unit 100 becomes very light, and it becomes difficult to maintain a stable posture with only its own weight with respect to the measurement surface 90, so that such instability of the posture is reduced. A mechanism to do this is required.

  The surface roughness measuring device 20 according to the second embodiment shown in FIGS. 7 and 8 is provided with an elastic holding member 160 on the upper part of the carriage 110 in order to stabilize the measurement in the elongated hole 92 in particular. Yes. The elastic holding member 160 is set so as to be slidably engaged with the upper surface of the hole 92 to be measured and compressed between the carriage 110 and the upper surface of the hole 92, and thereby attached to the lower portion of the carriage 110. The applied skid 150 is pressed against the inner peripheral surface 94 of the hole 92. With the posture holding device including the elastic holding member 160 and the skid 150, the carriage 110 is supported in the hole 92 from at least three directions as shown in FIG. In particular. The elastic holding member 160 is in contact with the elastic member 162 for absorbing the change in the size of the hole 92 and generating an urging force, and the inner peripheral surface 94 of the hole 92, and moves relative to the inner peripheral surface 94 when the carriage 110 moves. And a sliding member 164 that slides. The elastic member 162 can be composed of, for example, a spring member 162, and the sliding member 164 can be composed of a low friction material such as polytetrafluoroethylene.

  In the second embodiment shown in FIGS. 7 and 8, the measurement unit 100 is moved in the axial direction of the inner peripheral surface 94 of the round hole 92 to measure the surface roughness in the axial direction of the lower surface of the inner peripheral surface. However, the measuring unit 100 is rotated by a predetermined angle to measure the surface roughness in the axial direction of the side surface and the upper surface of the inner peripheral surface 94, or the measuring unit 100 is rotated once to rotate the inner circumference. It is also possible to measure the surface roughness in the circumferential direction of the surface.

  The support member 122 of the stylus 120 is provided with a load adjusting mechanism (not shown) so that the load on the material surface of the stylus 128 can be adjusted. Thereby, for example, in the case of a measurement target that does not want to leave a scratch due to the stylus 128 on the surface of the material, the load is set small, or when the upper surface of the hole is measured by rotating the measurement unit, For example, the contact pressure of the stylus can be controlled appropriately, and the load can be selected according to the measurement object and measurement state. In addition, this load adjustment mechanism can also bring the stylus 128 away from the surface of the material so as to be in a non-contact state. For example, when the surface deep inside the elongated hole 92 is to be measured, By moving the stylus away from the material surface while moving 100, unnecessary stylus 128 damage and material surface damage can be prevented. The load adjustment mechanism can be realized by various configurations, for example, a coil spring or a voice coil.

  When measuring the surface roughness in the elongated hole 92, it is necessary to drive the measurement unit 100 including the carriage 110 from the outside of the hole 92 in the front-rear direction. Driving in the front-rear direction can be performed by pushing and pulling the optical fiber 140 extending from the measurement unit 100 to the control unit 200. However, since the optical fiber 140 does not necessarily have high rigidity, it is desirable to provide another mechanism. As an example, an elongated rigid member such as a metal wire is attached to the carriage 110 so as to extend to the outside of the hole 92, and the portion extending to the outside is pushed and pulled to move the measuring unit 100 in the front-rear direction. It can be made to drive with.

  As another example of the driving mechanism in the front-rear direction, an ultrasonic vibration element is provided in the carriage 110 or the skid 150, and the contact point with the measurement surface 90 of the skid 150 is microscopically as in the case of an ultrasonic motor. The measuring unit 100 can also be driven by the frictional force between the skid 150 and the measuring surface 90 by generating an elliptical motion.

  As yet another example, a permanent magnet may be installed on the carriage 110, and a magnetic field may be applied from the outside of the outer peripheral surface of the hole 92 to drive the measuring unit 100 with a magnetic force.

  The surface roughness measuring apparatus 30 according to the third embodiment shown in FIG. 9 includes two members, a lower carriage 310 having a semi-cylindrical carriage and an upper carriage 311 attached on the lower carriage. The optical fiber 340 is gripped and fixed between them. The stylus 320 is configured such that the base end of the support member 322 is held by the carriage via the elastic member 326. In the present embodiment, a plate spring is used as the elastic member 326, but other configurations may be used as long as the stylus can be pivotally held with respect to the carriage.

  In the surface roughness measuring device 40 according to the fourth embodiment shown in FIG. 10, the upper carriage 411 extends further forward than the front end of the stylus 420 with respect to the third embodiment described above, and the skid 450 differs in that 450 is arranged at the front and back positions with the stylus 420 interposed therebetween. However, the stylus 420 may be held by the tip edge and the V-shaped groove as in the first and second embodiments instead of being held by the elastic member 426.

  In the surface roughness measuring apparatus 50 according to the fifth embodiment shown in FIG. 11, the stylus 520 has a lower carriage at the first end 523 and the second end 524 of the support member 522 via the elastic member 526. It is held by 510 and is supported at both ends. The stylus 528 is disposed substantially at the center in the front-rear direction below the support member 522, and the cylindrical mirror 530 is disposed substantially immediately above the stylus 528. With such a configuration, compared to the case where the stylus is cantilevered as in the above-described embodiment, the stylus can be moved up and down linearly while suppressing the arcuate movement of the stylus. .

  As mentioned above, although embodiment of the measuring apparatus of this invention was described, this invention is not limited to this. For example, the carriage is not limited to a narrow tube (microcapillary), and may be various shapes as long as it supports the stylus so that it can move up and down and supports the light guide member. Further, the holding of the stylus is not limited to the structure shown in the embodiment, and may be of any mechanism as long as the stylus stylus can move up and down, for example, rotatably held by a bearing. .

10, 20, 30, 40, 50 Surface roughness measuring device 90 Measuring surface 92 Hole 94 Inner peripheral surface 100 Measuring unit 110 Carriage 112 Projection 114 Pointed edge 120, 320, 420, 520 Stylus 122, 322, 522 Support member 114 V-shaped groove 126 Front end portion 128, 528 Stylus 130 Light reflecting member, cylindrical mirror 132 Reflecting surface 134 Irradiation light 136 Reflected light 140 Light guiding member, optical fiber 142 First end surface 142 First end portion 144 Second end surface 146 First Two ends 150, 350, 450 Skid 160 Elastic holding member 162 Elastic member, spring member 164 Sliding member 200 Control unit 210 Optical circulator 211 First port 212 Second port 213 Third port 220 Laser diode 230 Laser diode driver 240 Pho Diode 250 current / voltage converter 260 A / D converter 270 Computer 310, 510 lower carriage 311, 411 upper carriage 326,426,526 elastic member, leaf spring 523 first end 524 second end

Claims (17)

A surface roughness measuring device for measuring the surface roughness of a material surface,
A stylus having a stylus in contact with the material surface;
A carriage that scans the stylus in parallel with the surface of the material so that the stylus moves while contacting the surface of the material and the stylus moves up and down according to the roughness of the surface of the material. ,
A light reflecting member that is provided on the stylus and moves up and down in response to the up and down movement of the stylus, the light reflecting member having a reflecting surface curved in the up and down direction;
A first end surface having a first end surface; and a second end portion having a second end surface opposite to the first end surface, the first end surface facing the reflective surface of the light reflecting member. The first end is an elongated light guide member fixed to the carriage, guides the light incident from the second end surface to the first end surface, and emits the light from the first end surface to irradiate the reflecting surface And a light guide member that guides reflected light that is reflected by the reflecting surface and incident on the first end surface to the second end surface;
A surface roughness measuring device comprising:   The measuring apparatus according to claim 1, wherein the carriage is configured to slide on the material surface.   3. The surface according to claim 1, further comprising a posture holding device that includes a plurality of skids that are provided at intervals in the front-rear direction of the carriage and that contact the material surface to define a posture of the carriage with respect to the material surface. Roughness measuring device. The measurement surface is the inner peripheral surface of the hole;
The surface roughness measuring device measures the surface roughness of the inner peripheral surface of the hole in the axial direction by setting the carriage and the stylus in the hole and moving them in the axial direction of the hole. Device,
The posture holding device is an elastic holding member provided around the carriage, and slides on the inner peripheral surface as the carriage moves in the axial direction while elastically engaging with the inner peripheral surface. The surface roughness measuring device according to claim 3, further comprising an elastic holding member that holds the posture of the carriage with respect to the inner peripheral surface together with the plurality of skids.   The elastic holding member is a spring member, and the spring member is urged between the carriage and the inner peripheral surface, whereby the plurality of skids are pressed against the inner peripheral surface. The surface roughness measuring device according to claim 4, which is arranged. The light guide member is an optical fiber having a length sufficient for the second end surface to be positioned outside the hole during measurement of the inner peripheral surface;
A control unit comprising: a light source of light incident on the second end surface of the optical fiber; and a light receiving element that detects a light intensity of the reflected light that is reflected by the light reflecting unit and returned from the second end surface. The surface roughness measuring device according to claim 4, further comprising: a control unit, the control unit being arranged outside the hole apart from the carriage.   The stylus has an elongated support member that is pivotally attached to the carriage and extends from the carriage toward the front of the surface roughness measuring device, and the stylus is provided at a front end portion of the support member. The surface roughness measuring apparatus according to any one of 1 to 6. One of the support member and the carriage of the stylus has a V-shaped groove, and the other has a protrusion with a sharp edge,
The surface roughness measuring device according to claim 7, wherein the pivoting of the stylus is performed by pivotally engaging the tip edge and the V-shaped groove.   The surface roughness measuring device according to claim 7, wherein the support member of the stylus is held by the carriage via an elastic member, and the pivoting of the stylus is performed by elastic deformation of the elastic member.   The stylus has an elongated support member having a first end and a second end, and the support member is held by the carriage via an elastic member at the first and second ends, the elastic member The surface roughness measuring device according to any one of claims 1 to 6, wherein the stylus is made to move substantially linearly in the up-down direction by elastically deforming.   The surface roughness measuring device according to any one of claims 3 to 6, wherein the plurality of skids are arranged at intervals in the front-rear direction of the carriage with the stylus interposed therebetween.   The stylus includes a load adjusting mechanism disposed on the support member, and the load adjusting mechanism adjusts the load on the material surface of the stylus and separates the stylus from the material surface when not measuring. The surface roughness measuring device according to claim 7, wherein the surface roughness measuring device is configured to be capable of performing the above.   The surface roughness measuring apparatus according to claim 1, wherein the light reflecting member is a cylindrical mirror. The carriage is a thin tube having an inner hole and an outer diameter of 1 mm or less;
The stylus is arranged such that at least a part of the stylus is located in the inner hole and the stylus is in a position protruding from the front end surface of the capillary tube. The surface roughness measuring apparatus as described.   An elongate rigid member attached to the carriage and having a length sufficient to extend out of the hole during measurement of the surface roughness of the inner peripheral surface, and pushes and pulls the elongate rigid member The surface roughness measuring device according to claim 4, wherein the carriage set in the hole is driven in the front-rear direction.   The carriage further includes an ultrasonic vibration element, and the carriage is driven in the front-rear direction along the inner peripheral surface by ultrasonic vibration of the ultrasonic vibration element. The surface roughness measuring apparatus according to any one of the above.   The carriage further includes a magnet, and the carriage is driven in the front-rear direction along the inner peripheral surface by a magnetic field applied from the outside of the hole. The surface roughness measuring apparatus according to 1.

Images