JP2013075779A - Method for producing filmy glass with film, filmy glass with film, method for producing glass material joined body, and glass material joined body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for producing filmy glass with a film which has a film formed on both sides of filmy glass and is suppressed from warping.SOLUTION: Filmy glass 1 is held perpendicularly to a surface 2a of a target 2 and has both surfaces 1a, 1b of the filmy glass 1 and film-formed while passing over the target 2. Especially, it is preferred that the filmy glass is film-formed by a sputtering method, CVD method, or vacuum deposition method. Further, it is preferred that the filmy glass has both the surface film-formed while circling along a track passing over the target.

Description

  The present invention relates to a method for producing film-like glass with film, film-like glass with film, a method for producing a joined glass material using the same, and a joined glass material.

  Conventionally, there is a desire to form a film on both surfaces of a glass substrate. For example, in Patent Document 1, as a method of forming a film on both surfaces of a substrate, plasmas having the same shape and the same characteristics are generated at symmetrical positions with the substrate as a symmetry plane, and the plasma is generated on the surface of the sputtering target. Describes a method of simultaneously forming films on both sides of a substrate in a state where the sputtering target surface is close to the substrate surface at a distance sufficient to interfere with each other.

JP-A-6-88217

  However, in the method described in Patent Document 1, the thickness may vary between a film formed on one main surface of the substrate and a film formed on the other main surface. For this reason, when the thickness of the substrate is thin, the substrate may be warped.

  The main object of the present invention is to provide a film-formed glass-like glass manufacturing method in which films are formed on both surfaces of a film-like glass and warpage is suppressed.

  In the method for producing a film-like glass with a film according to the present invention, the film-like glass is formed on both surfaces of the film-like glass while passing over the target while being held perpendicular to the surface of the target.

  In the present invention, “vertical” includes substantially vertical. That is, “vertical” includes a case of 90 ° and a case of within a range of 90 ° ± 5 °.

  In the present invention, “film-like glass” refers to glass having a thickness of 300 μm or less.

  In the method for producing a film-form glass according to the present invention, it is preferable to form the film-form glass on both surfaces of the film-form glass while swirling along a trajectory passing over the target.

  In the method for producing film-coated glass according to the present invention, it is preferable to form a film by a sputtering method, a CVD method or a vacuum deposition method.

  The 1st film-like glass with film | membrane which concerns on this invention is manufactured by the manufacturing method of the film-form glass with film | membrane which concerns on this invention.

  The second film-like glass with a film according to the present invention includes a film-like glass, a first film, and a second film. The first film is formed on one main surface of the film-like glass. The second film is formed on the other main surface of the film-like glass. The thickness of the part which opposes through the film-form glass of a 1st and 2nd film | membrane is 90 to 110% of the average thickness of the 1st and 2nd film | membrane in the said opposing part, respectively.

  In the method for producing a glass material joined body according to the present invention, the glass material joined body is obtained by anodically bonding the first or second film-coated glass according to the present invention and a glass material containing an alkali metal oxide. Make it. Here, the first film disposed on one main surface of the film-like glass and the second film disposed on the other main surface are Al, Si, Fe, Ti, Ni, Cr. And a film containing at least one metal selected from the group consisting of Cu, or a film made of ITO, FTO, AZO or IZO.

  Moreover, it is preferable that film-form glass with a film | membrane is further equipped with the 3rd film | membrane formed on one side of film-form glass, and the 1st-3rd film | membrane is formed continuously.

  The glass material joined body according to the present invention includes the first or second film-like glass with a film according to the present invention and a glass material containing an alkali metal oxide. The film-formed glass with glass and the glass material are anodically bonded. Here, the film-like glass with a film is a film containing at least one metal selected from the group consisting of Al, Si, Fe, Ti, Ni, Cr and Cu, or from ITO, FTO, AZO or IZO. It is comprised by the film | membrane which becomes.

  ADVANTAGE OF THE INVENTION According to this invention, the film | membrane is formed on both surfaces of film-form glass, and the manufacturing method of film-form glass with film | membrane with which curvature was suppressed can be provided.

It is a schematic plan view for demonstrating the manufacturing process of the film-form glass with a film concerning 1st Embodiment. It is a typical side view at the time of seeing from the direction of arrow II of FIG. It is a typical side view at the time of seeing from the direction of arrow III of FIG. It is a schematic sectional drawing of the film-form glass with a film | membrane manufactured in 1st Embodiment. It is a schematic sectional drawing of the film-form glass with a film | membrane manufactured in 1st Embodiment. It is a schematic sectional drawing of the glass material joined body manufactured in a 1st embodiment. It is a schematic sectional drawing of the film-form glass with a film in 2nd Embodiment. It is a schematic plan view for demonstrating the manufacturing process of the film-form glass with a film concerning 3rd Embodiment. It is a schematic plan view for demonstrating the manufacturing process of the film-form glass with a film concerning 4th Embodiment.

  Hereinafter, an example of the preferable form which implemented this invention is demonstrated. However, the following embodiment is merely an example. The present invention is not limited to the following embodiments.

  Moreover, in each drawing referred in embodiment etc., the member which has the substantially same function shall be referred with the same code | symbol. The drawings referred to in the embodiments and the like are schematically described, and the ratio of the dimensions of the objects drawn in the drawings may be different from the ratio of the dimensions of the actual objects. The dimensional ratio of the object may be different between the drawings. The specific dimensional ratio of the object should be determined in consideration of the following description.

(First embodiment)
In the present embodiment, a method for producing the film-formed glass 8 shown in FIGS. 4 and 5 will be described.

  FIG. 1 is a schematic plan view for explaining a manufacturing process of a film-formed glass according to the first embodiment. FIG. 2 is a schematic side view when viewed from the direction of arrow II in FIG. 3 is a schematic side view when viewed from the direction of arrow III in FIG. In FIG. 1 and FIG. 2, drawing of the holder 3 is omitted.

  First, the film-like glass 1 shown in FIG. 1 is prepared. The film-like glass 1 is a glass film having first and second main surfaces 1a and 1b facing each other. The thickness of the film-like glass 1 is 300 μm or less. Preferably it is 100 micrometers or less, More preferably, it is 50 micrometers or less. The planar shape of the film-like glass 1 is not particularly limited. For example, the glass film 1 may be a glass ribbon having a thickness of 300 μm or less.

  The constituent material of the film-like glass 1 is not particularly limited as long as it is glass. The film-like glass 1 can be composed of, for example, silicate glass, borate glass, borosilicate glass, phosphate glass, borophosphate glass, or the like. The film-like glass 1 may or may not contain an alkali metal component such as a sodium component or a potassium component.

  Next, the films | membranes 4 and 5 (refer FIG.4 and FIG.5) are formed simultaneously on both the 1st and 2nd main surfaces 1a and 1b of the film-form glass 1. FIG. Thereby, the film-form glass 8 with the films | membranes 4 and 5 formed on each of the 1st and 2nd main surfaces 1a and 1b can be obtained.

  Next, the details of the method of forming the films 4 and 5 in this embodiment will be described. First, as shown in FIG. 3, the film-like glass 1 is set in a holder 3 to be held perpendicular to the surface 2 a of the target 2 as shown in FIG. 2. In this state, films 4 and 5 are formed by performing film formation on both surfaces 1 a and 1 b of the film-like glass 1 while passing the film-like glass 1 together with the holder 3 over the target 2.

  Specifically, as shown in FIG. 1, both sides of the film-like glass 1 are passed through the target 2 a plurality of times while turning the film-like glass 1 along the trajectory o passing over the target 2. Film formation is performed on 1a and 1b. During film formation, both surfaces 1a and 1b of the film-like glass 1 are always held so as to face the center of the track o.

  The trajectory o may be a circular trajectory, an elliptical trajectory, an elliptical trajectory, or the like.

  The method for forming the films 4 and 5 is not particularly limited. The films 4 and 5 can be formed by, for example, a sputtering method, a CVD (Chemical Vapor Deposition) method, a vacuum deposition method, or the like.

  The kind of film | membrane 4 and 5 can be suitably selected according to the film-form glass 8 to be obtained. The films 4 and 5 are, for example, conductive films such as a film containing at least one metal selected from the group consisting of Al, Si, Fe, Ti, Ni, Cr and Cu, or a film made of ITO, FTO, AZO or IZO. It may be a membrane. The films 4 and 5 may be dielectric films, and may be filter films, light reflection films, heat ray reflection films, and the like, for example.

  The thickness of the films | membranes 4 and 5 can be suitably selected according to the film-like glass 8 with the film to be obtained. The thickness of the films 4 and 5 is, for example, about 5 nm to 200 nm. In the case of a dielectric multilayer film that requires optical characteristics, the thickness may be about several μm to 10 μm.

  The film-like glass 8 produced in the present embodiment includes the film-like glass 1, the first film 4 formed on the first main surface 1 a of the film-like glass 1, and the film-like glass 1. And a second film 5 formed on the second main surface 1b. In the present embodiment, films 4 and 5 made of the same material are formed on both main surfaces 1a and 1b while passing over the target 2 while the film-like glass 1 is held perpendicular to the surface 2a of the target 2. Is deposited. Therefore, the first film 4 and the second film 5 made of the same material can be simultaneously formed with a small thickness difference. More specifically, the thicknesses of the first and second films 4 and 5 that are made of the same material and face each other through the film-like glass 1 of the first and second films 4 and 5 that are formed at the same time are respectively set. 90% to 110% of the average thickness of the portions facing each other through the film-like glass 1. Accordingly, it is possible to obtain the film-formed glass 8 in which the warpage is suppressed. From the viewpoint of suppressing warpage more effectively, the thicknesses of the first and second films 4 and 5 facing each other through the film-like glass 1 are set to be different from those of the first and second films 4 and 5, respectively. It is more preferable to set it as 95%-105% of the average thickness of the part which opposes through the film-form glass 1, and it is further more preferable to set it as 98%-102%.

  Warpage tends to occur when the thickness of the film-like glass 1 is small. Therefore, the technique of the present embodiment that can suppress warping is particularly effective when the thickness of the film-like glass 1 is 300 μm or less.

  In addition, if the thickness difference of the part which opposes through the film-like glass 1 of the films | membranes 4 and 5 is suppressed, even if thickness differs in each of the films | membranes 4 and 5, film-like film-like glass 8 The warpage is not greatly affected.

  Moreover, in the film-form glass 8 manufactured with the manufacturing method of this embodiment, it forms into a film also on at least one of the side surfaces 1c and 1d of the film-form glass 1 as FIG. 5 shows. That is, the film-like glass 8 with a film further includes films 6 and 7 formed on at least one of the side surfaces 1c and 1d of the film-like glass 1. Specifically, in this embodiment, the film is also formed on both the side surfaces 1c and 1d of the film-like glass 1. That is, the film-like glass 8 with film is a third film 6 formed on the first side 1c of the film-like glass 1 and a second film 1d formed on the second side 1d of the film-like glass 1. 4 film 7 is further provided. The films 4 to 7 are formed continuously. Therefore, for example, when the films 4 to 7 are made of a conductive material, the film-formed glass 8 is a member having conductivity on the surface. Such film-coated glassy glass 8 can be used as an electrode, for example.

  Moreover, the film-form glass 8 with a film | membrane can also be anodic-bonded with insulating materials, such as a glass material, for example. For example, as shown in FIG. 6, a first glass material 9 or a second glass material 10 containing an alkali metal oxide such as a sodium component or a potassium component is used as a film 4 or a film made of a conductor material or a semiconductor material, respectively. In the state of being arranged so as to be in contact with 5, the film-formed glass glass 8 and the glass materials 9 and 10 were anodically bonded by applying a voltage with the films 4 and 5 as the anode and the glass materials 9 and 10 as the cathode. The glass material joined body 11 can be manufactured. In the film-like glass 8 with film, since the film 6 formed continuously with the films 4 and 5 is formed on the side surface 1c, it is possible to easily apply a voltage to the films 4 and 5. it can.

  When the film-formed glass 8 and the glass materials 9 and 10 are anodically bonded, the films 4 and 5 are easy to adhere to the glass materials 9 and 10 and are easily conductively bonded to the glass materials 9 and 10. It is preferably a body material or a semiconductor material. Specifically, the films 4 and 5 are, for example, a film containing at least one metal selected from the group consisting of Al, Si, Fe, Ti, Ni, Cr and Cu, or ITO, FTO, AZO or IZO. It is preferable that it is a film | membrane which becomes. From the viewpoint of more preferably anodic bonding, the films 4 and 5 are preferably films containing at least one metal selected from the group consisting of Al, Si, Fe, Ti, Ni, Cr and Cu. On the other hand, when translucency is required, the films 4 and 5 are preferably films made of ITO, FTO, AZO, or IZO.

  Hereinafter, other examples of preferred embodiments of the present invention will be described. In the following description, members having substantially the same functions as those of the first embodiment are referred to by the same reference numerals, and description thereof is omitted.

(Second Embodiment)
FIG. 7 is a schematic cross-sectional view of a film-form glass with a film according to the second embodiment. In 1st Embodiment, the example formed into a film also on both the side surfaces 1c and 1d of the film-form glass 1 was demonstrated. However, the present invention is not limited to this. For example, as shown in FIG. 7, the film 6 may be formed only on the side surface 1c facing the target 2 side among the side surfaces 1c and 1d. In addition, a film may not be formed on the side surfaces 1c and 1d by applying a mask or the like. Even in these cases, it is possible to obtain the film-form glass 8 with the warpage suppressed.

(Third and fourth embodiments)
FIG. 8 is a schematic plan view for explaining the manufacturing process of the film-formed glass according to the third embodiment. FIG. 9 is a schematic plan view for explaining the manufacturing process of the film-formed glass according to the fourth embodiment.

  In the first embodiment, an example in which one film-like glass 1 is swung on the track o has been described. However, as shown in FIGS. 8 and 9, a plurality of film-like glasses arranged at intervals from each other. The glass 1 may be formed on the main surfaces 1a and 1b of the plurality of film-like glasses 1 in the same process while turning on the track o. By doing so, the manufacturing efficiency of the film-form film-like glass 8 can be improved.

  Further, as shown in FIG. 9, a plurality of targets 2 may be arranged under the trajectory o. In this case, the composition of the plurality of targets 2 may be the same as or different from each other. By arranging a plurality of targets 2 having different compositions, a laminated film can be formed on the main surfaces 1a and 1b.

DESCRIPTION OF SYMBOLS 1 ... Film-like glass 1a ... 1st main surface 1b ... 2nd main surface 1c ... 1st side surface 1d ... 2nd side surface 2 ... Target 2a ... Target surface 3 ... Holder 4 ... 1st film | membrane 5 ... 2nd film | membrane 6 ... 3rd film | membrane 7 ... 4th film | membrane 8 ... Film-like glass 9 with a film | membrane ... 1st glass material 10 ... 2nd glass material 11 ... Glass material joined body

Claims (8)

  The manufacturing method of film-form glass with a film | membrane formed into a film on both surfaces of the said film-form glass, letting the film-form glass pass on the said target in the state hold | maintained perpendicular | vertical with respect to the surface of the target.   The manufacturing method of the film-form glass with a film | membrane of Claim 1 formed into a film on both surfaces of the said film-form glass, turning the said film-form glass along the track | orbit which passes on the said target.   The manufacturing method of the film-form glass with a film | membrane of Claim 1 or 2 which forms into a film by sputtering method, CVD method, or a vacuum evaporation method.   The film-form glass with the film | membrane manufactured by the manufacturing method as described in any one of Claims 1-3. Film glass,
A first film formed on one main surface of the film-like glass;
A second film formed on the other main surface of the film-like glass;
With
The thicknesses of the portions of the first and second films facing each other through the film-like glass are 90% to 110% of the average thickness of the first and second films in the facing portions, respectively. Film-like glass with film. It is a manufacturing method of a glass material joined body which produces a glass material joined body by anodic bonding the film-like glass with a film according to claim 4 or 5, and a glass material containing an alkali metal oxide,
The first film disposed on one main surface of the film-like glass and the second film disposed on the other main surface are Al, Si, Fe, Ti, Ni, Cr and Cu. A method for producing a joined glass material, comprising a film containing at least one metal selected from the group consisting of, or a film made of ITO, FTO, AZO or IZO. The film-like glass with film further comprises a third film formed on one side of the film-like glass,
The manufacturing method of the glass-material joined body of Claim 6 with which the said 1st-3rd film | membrane is formed continuously. A film-like glass with a film according to claim 4 or 5,
A glass material containing an alkali metal oxide;
With
The film-like glass with film and the glass material are anodically bonded, a glass material joined body,
The film of film-like glass with a film is composed of a film containing at least one metal selected from the group consisting of Al, Si, Fe, Ti, Ni, Cr and Cu, or a film consisting of ITO, FTO, AZO or IZO. A glass material joined body.

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