JP2013074360A5 - - Google Patents

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JP2013074360A5
JP2013074360A5 JP2011210189A JP2011210189A JP2013074360A5 JP 2013074360 A5 JP2013074360 A5 JP 2013074360A5 JP 2011210189 A JP2011210189 A JP 2011210189A JP 2011210189 A JP2011210189 A JP 2011210189A JP 2013074360 A5 JP2013074360 A5 JP 2013074360A5
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vibrator
frequency
time
adjusting
shutter
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JP2011210189A
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JP5838691B2 (en
JP2013074360A (en
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Publication of JP2013074360A5 publication Critical patent/JP2013074360A5/ja
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Description

本発明は、上述の課題の少なくとも一部を解決するためになされたものであり、以下の形態または適用例として実現することが可能である。
[適用例1]
本発明の振動子の周波数調整方法は、振動子の共振周波数を調整する周波数調整方法であって、
質量変化手段による前記振動子の質量変化を許容する開状態と、前記質量変化を阻止する閉状態とを切り替えることができるシャッター部と、
前記シャッター部の前記切り替えを制御する制御手段と、を備えているシャッター装置を用意する工程と、
前記振動子と前記質量変化手段との間に、前記シャッター部を配置する工程と、
前記シャッター部を前記開状態として前記振動子の質量変化を開始した後、前記シャッター部を前記閉状態にして前記振動子の共振周波数を調整する周波数調整工程と、
前記周波調整工程における前記閉状態の前に、前記制御手段から前記シャッター部を前記閉状態とする命令が出力された第1時刻と、前記命令を受けて前記シャッター部が前記閉状態となった第2時刻との時間差を求める遅延時間検出工程とを含み、
前記周波数調整工程では、前記制御手段は、前記時間差に基づいて、前記シャッター部を前記閉状態とする命令を出力する時刻を補正することを特徴とする。
これにより、高精度に、振動子の共振周波数を目的の共振周波数に合わせ込むことができる。
SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.
[Application Example 1]
The frequency adjustment method of the vibrator of the present invention is a frequency adjustment method for adjusting the resonance frequency of the vibrator,
A shutter part capable of switching between an open state allowing mass change of the vibrator by a mass changing means and a closed state preventing the mass change;
Preparing a shutter device comprising a control means for controlling the switching of the shutter,
Arranging the shutter portion between the vibrator and the mass changing means;
A frequency adjustment step of adjusting the resonance frequency of the vibrator by making the shutter part in the closed state after starting the mass change of the vibrator with the shutter part in the open state;
Prior to the closed state in the frequency adjustment step, a first time when a command to turn the shutter unit to the closed state is output from the control unit, and the shutter unit is in the closed state in response to the command. wherein the delay time detection step of obtaining the time difference between the second time, and
In the frequency adjustment step, the control means corrects a time for outputting a command to close the shutter unit based on the time difference.
Thereby, the resonance frequency of the vibrator can be adjusted to the target resonance frequency with high accuracy.

[適用例4]
本発明の振動子の周波数調整方法では、前記遅延時間検出工程は、前記第1工程と前記第2工程との間に行われることが好ましい。
これにより、振動子の周波数調整を円滑に行うことができる。
[適用例5]
本発明の振動子の周波数調整方法では、前記第1時刻により前記第1工程が終了することが好ましい。
これにより、シャッター装置の無駄な駆動を防止することができる。
[Application Example 4]
In the vibrator frequency adjusting method of the present invention, it is preferable that the delay time detecting step is performed between the first step and the second step.
As a result, the frequency of the vibrator can be adjusted smoothly.
[Application Example 5]
In the vibrator frequency adjusting method of the present invention, it is preferable that the first step is completed at the first time .
Thereby, useless driving of the shutter device can be prevented.

Claims (7)

振動子の共振周波数を調整する周波数調整方法であって、
質量変化手段による前記振動子の質量変化を許容する開状態と、前記質量変化を阻止する閉状態とを切り替えることができるシャッター部と、
前記シャッター部の前記切り替えを制御する制御手段と、を備えているシャッター装置を用意する工程と、
前記振動子と前記質量変化手段との間に、前記シャッター部を配置する工程と、
前記シャッター部を前記開状態として前記振動子の質量変化を開始した後、前記シャッター部を前記閉状態にして前記振動子の共振周波数を調整する周波数調整工程と、
前記周波調整工程における前記閉状態の前に、前記制御手段から前記シャッター部を前記閉状態とする命令が出力された第1時刻と、前記命令を受けて前記シャッター部が前記閉状態となった第2時刻との時間差を求める遅延時間検出工程とを含み、
前記周波数調整工程では、前記制御手段は、前記時間差に基づいて、前記シャッター部を前記閉状態とする命令を出力する時刻を補正することを特徴とする振動子の周波数調整方法。
A frequency adjustment method for adjusting a resonance frequency of a vibrator,
A shutter part capable of switching between an open state allowing mass change of the vibrator by a mass changing means and a closed state preventing the mass change;
Preparing a shutter device comprising a control means for controlling the switching of the shutter,
Arranging the shutter portion between the vibrator and the mass changing means;
A frequency adjustment step of adjusting the resonance frequency of the vibrator by making the shutter part in the closed state after starting the mass change of the vibrator with the shutter part in the open state;
Prior to the closed state in the frequency adjustment step, a first time when a command to turn the shutter unit to the closed state is output from the control unit, and the shutter unit is in the closed state in response to the command. wherein the delay time detection step of obtaining the time difference between the second time, and
In the frequency adjustment step, the control means corrects a time for outputting a command to set the shutter unit in the closed state based on the time difference.
前記遅延時間検出工程では、前記質量変化手段によって前記振動子の質量を変化させている状態において、前記第1時刻における前記振動子の共振周波数と前記第2時刻における振動子の共振周波数の差と、前記振動子の単位時間当たりの共振周波数変化量とに基づいて前記時間差を求める請求項1に記載の振動子の周波数調整方法。   In the delay time detecting step, in a state where the mass of the vibrator is changed by the mass changing means, the difference between the resonance frequency of the vibrator at the first time and the resonance frequency of the vibrator at the second time 2. The method of adjusting a frequency of a vibrator according to claim 1, wherein the time difference is obtained based on a resonance frequency change amount per unit time of the vibrator. 前記周波数調整工程には、第1の周波数調整工程である第1工程と第2の周波数調整工程である第2工程とがあって、前記第1工程の後に前記第2工程があって、前記第2工程の単位時間当たりの共振周波数変化量が前記第1工程よりも小さいことを特徴とする請求項1または2に記載の振動子の周波数調整方法。   The frequency adjustment step includes a first step that is a first frequency adjustment step and a second step that is a second frequency adjustment step, and the second step after the first step, The method for adjusting a frequency of a vibrator according to claim 1 or 2, wherein the amount of change in resonance frequency per unit time in the second step is smaller than that in the first step. 前記遅延時間検出工程は、前記第1工程と前記第2工程との間に行われる請求項3に記載の振動子の周波数調整方法。   The method for adjusting a frequency of a vibrator according to claim 3, wherein the delay time detection step is performed between the first step and the second step. 前記第1時刻により前記第1工程が終了する請求項4に記載の振動子の周波数調整方法。 The method of adjusting a frequency of a vibrator according to claim 4, wherein the first step is ended by the first time . 前記遅延時間検出工程は、前記第1工程および前記第2工程の少なくとも一方の工程の途中で、前記シャッター部を閉状態へ切り替えて、前記時間差を求める請求項3に記載の振動子の周波数調整方法。   4. The frequency adjustment of the vibrator according to claim 3, wherein in the delay time detection step, the time difference is obtained by switching the shutter unit to a closed state in the middle of at least one of the first step and the second step. Method. 前記周波数調整工程は、時系列をもって順番にm個(ただしmは、2以上の自然数)の前記振動子の共振周波数を調整する工程であって、n個目(ただしnは、2以上かつm以下の自然数)の前記振動子の共振周波数を調整するとした場合、前記遅延時間検出工程は、n−1個目の振動子の共振周波数の調整を行う工程と、前記周波数調整工程との間に行われる請求項1または2に記載の振動子の周波数調整方法。   The frequency adjusting step is a step of adjusting the resonance frequency of the m pieces of oscillators (where m is a natural number of 2 or more) sequentially in time series, and the nth (where n is 2 or more and m When the resonance frequency of the vibrator of the following natural number) is adjusted, the delay time detection step is performed between the step of adjusting the resonance frequency of the (n−1) th vibrator and the frequency adjustment step. The frequency adjustment method of the vibrator according to claim 1 or 2, wherein the method is performed.
JP2011210189A 2011-09-27 2011-09-27 Frequency adjustment method for vibrator Expired - Fee Related JP5838691B2 (en)

Priority Applications (1)

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JP2011210189A JP5838691B2 (en) 2011-09-27 2011-09-27 Frequency adjustment method for vibrator

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JP2013074360A5 true JP2013074360A5 (en) 2014-09-25
JP5838691B2 JP5838691B2 (en) 2016-01-06

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JP2019121944A (en) 2018-01-09 2019-07-22 セイコーエプソン株式会社 Vibration device, circuit arrangement, manufacturing method of the vibration device, electronic apparatus, and moving body

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JPH04111512A (en) * 1990-08-30 1992-04-13 Nippon Dempa Kogyo Co Ltd Oscillatory shutter mechanism and vapor deposition frequency adjusting device provided with the same
JPH11234072A (en) * 1998-02-13 1999-08-27 Murata Mfg Co Ltd Frequency adjusting method for piezoelectric resonator
JP2003174585A (en) * 2001-12-07 2003-06-20 Olympus Optical Co Ltd Image pickup device
JP4003491B2 (en) * 2002-03-13 2007-11-07 セイコーエプソン株式会社 Method and apparatus for adjusting frequency characteristics of piezoelectric element
JP4473289B2 (en) * 2007-05-25 2010-06-02 株式会社昭和真空 Resonance frequency adjusting device and resonance frequency adjusting method of piezoelectric resonator by ion etching

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