JP2013074360A5 - - Google Patents
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- JP2013074360A5 JP2013074360A5 JP2011210189A JP2011210189A JP2013074360A5 JP 2013074360 A5 JP2013074360 A5 JP 2013074360A5 JP 2011210189 A JP2011210189 A JP 2011210189A JP 2011210189 A JP2011210189 A JP 2011210189A JP 2013074360 A5 JP2013074360 A5 JP 2013074360A5
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- Prior art keywords
- vibrator
- frequency
- time
- adjusting
- shutter
- Prior art date
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Description
本発明は、上述の課題の少なくとも一部を解決するためになされたものであり、以下の形態または適用例として実現することが可能である。
[適用例1]
本発明の振動子の周波数調整方法は、振動子の共振周波数を調整する周波数調整方法であって、
質量変化手段による前記振動子の質量変化を許容する開状態と、前記質量変化を阻止する閉状態とを切り替えることができるシャッター部と、
前記シャッター部の前記切り替えを制御する制御手段と、を備えているシャッター装置を用意する工程と、
前記振動子と前記質量変化手段との間に、前記シャッター部を配置する工程と、
前記シャッター部を前記開状態として前記振動子の質量変化を開始した後、前記シャッター部を前記閉状態にして前記振動子の共振周波数を調整する周波数調整工程と、
前記周波調整工程における前記閉状態の前に、前記制御手段から前記シャッター部を前記閉状態とする命令が出力された第1時刻と、前記命令を受けて前記シャッター部が前記閉状態となった第2時刻との時間差を求める遅延時間検出工程と、を含み、
前記周波数調整工程では、前記制御手段は、前記時間差に基づいて、前記シャッター部を前記閉状態とする命令を出力する時刻を補正することを特徴とする。
これにより、高精度に、振動子の共振周波数を目的の共振周波数に合わせ込むことができる。
SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.
[Application Example 1]
The frequency adjustment method of the vibrator of the present invention is a frequency adjustment method for adjusting the resonance frequency of the vibrator,
A shutter part capable of switching between an open state allowing mass change of the vibrator by a mass changing means and a closed state preventing the mass change;
Preparing a shutter device comprising a control means for controlling the switching of the shutter,
Arranging the shutter portion between the vibrator and the mass changing means;
A frequency adjustment step of adjusting the resonance frequency of the vibrator by making the shutter part in the closed state after starting the mass change of the vibrator with the shutter part in the open state;
Prior to the closed state in the frequency adjustment step, a first time when a command to turn the shutter unit to the closed state is output from the control unit, and the shutter unit is in the closed state in response to the command. wherein the delay time detection step of obtaining the time difference between the second time, and
In the frequency adjustment step, the control means corrects a time for outputting a command to close the shutter unit based on the time difference.
Thereby, the resonance frequency of the vibrator can be adjusted to the target resonance frequency with high accuracy.
[適用例4]
本発明の振動子の周波数調整方法では、前記遅延時間検出工程は、前記第1工程と前記第2工程との間に行われることが好ましい。
これにより、振動子の周波数調整を円滑に行うことができる。
[適用例5]
本発明の振動子の周波数調整方法では、前記第1時刻により前記第1工程が終了することが好ましい。
これにより、シャッター装置の無駄な駆動を防止することができる。
[Application Example 4]
In the vibrator frequency adjusting method of the present invention, it is preferable that the delay time detecting step is performed between the first step and the second step.
As a result, the frequency of the vibrator can be adjusted smoothly.
[Application Example 5]
In the vibrator frequency adjusting method of the present invention, it is preferable that the first step is completed at the first time .
Thereby, useless driving of the shutter device can be prevented.
Claims (7)
質量変化手段による前記振動子の質量変化を許容する開状態と、前記質量変化を阻止する閉状態とを切り替えることができるシャッター部と、
前記シャッター部の前記切り替えを制御する制御手段と、を備えているシャッター装置を用意する工程と、
前記振動子と前記質量変化手段との間に、前記シャッター部を配置する工程と、
前記シャッター部を前記開状態として前記振動子の質量変化を開始した後、前記シャッター部を前記閉状態にして前記振動子の共振周波数を調整する周波数調整工程と、
前記周波調整工程における前記閉状態の前に、前記制御手段から前記シャッター部を前記閉状態とする命令が出力された第1時刻と、前記命令を受けて前記シャッター部が前記閉状態となった第2時刻との時間差を求める遅延時間検出工程と、を含み、
前記周波数調整工程では、前記制御手段は、前記時間差に基づいて、前記シャッター部を前記閉状態とする命令を出力する時刻を補正することを特徴とする振動子の周波数調整方法。 A frequency adjustment method for adjusting a resonance frequency of a vibrator,
A shutter part capable of switching between an open state allowing mass change of the vibrator by a mass changing means and a closed state preventing the mass change;
Preparing a shutter device comprising a control means for controlling the switching of the shutter,
Arranging the shutter portion between the vibrator and the mass changing means;
A frequency adjustment step of adjusting the resonance frequency of the vibrator by making the shutter part in the closed state after starting the mass change of the vibrator with the shutter part in the open state;
Prior to the closed state in the frequency adjustment step, a first time when a command to turn the shutter unit to the closed state is output from the control unit, and the shutter unit is in the closed state in response to the command. wherein the delay time detection step of obtaining the time difference between the second time, and
In the frequency adjustment step, the control means corrects a time for outputting a command to set the shutter unit in the closed state based on the time difference.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011210189A JP5838691B2 (en) | 2011-09-27 | 2011-09-27 | Frequency adjustment method for vibrator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011210189A JP5838691B2 (en) | 2011-09-27 | 2011-09-27 | Frequency adjustment method for vibrator |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2013074360A JP2013074360A (en) | 2013-04-22 |
JP2013074360A5 true JP2013074360A5 (en) | 2014-09-25 |
JP5838691B2 JP5838691B2 (en) | 2016-01-06 |
Family
ID=48478531
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011210189A Expired - Fee Related JP5838691B2 (en) | 2011-09-27 | 2011-09-27 | Frequency adjustment method for vibrator |
Country Status (1)
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JP (1) | JP5838691B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019121944A (en) | 2018-01-09 | 2019-07-22 | セイコーエプソン株式会社 | Vibration device, circuit arrangement, manufacturing method of the vibration device, electronic apparatus, and moving body |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04111512A (en) * | 1990-08-30 | 1992-04-13 | Nippon Dempa Kogyo Co Ltd | Oscillatory shutter mechanism and vapor deposition frequency adjusting device provided with the same |
JPH11234072A (en) * | 1998-02-13 | 1999-08-27 | Murata Mfg Co Ltd | Frequency adjusting method for piezoelectric resonator |
JP2003174585A (en) * | 2001-12-07 | 2003-06-20 | Olympus Optical Co Ltd | Image pickup device |
JP4003491B2 (en) * | 2002-03-13 | 2007-11-07 | セイコーエプソン株式会社 | Method and apparatus for adjusting frequency characteristics of piezoelectric element |
JP4473289B2 (en) * | 2007-05-25 | 2010-06-02 | 株式会社昭和真空 | Resonance frequency adjusting device and resonance frequency adjusting method of piezoelectric resonator by ion etching |
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2011
- 2011-09-27 JP JP2011210189A patent/JP5838691B2/en not_active Expired - Fee Related
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