JP2013053936A - Work measuring apparatus, work carrier table, work measuring method, and method for manufacturing electronic component - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an apparatus and a method capable of preventing generation of damage on an external electrode due to probe depression when measuring electric characteristics of a chip type electronic component while carrying the electronic component.SOLUTION: A work measuring apparatus includes a table base 1 and a carrier table 2 rotatably installed on the table base and including a first layer 2a formed on the opposite side of the table base and a second layer 2b formed the table base 1 side. A plurality of work storage holes 4 for storing respective works W are formed through the first layer and through-holes 9 are formed in the second layer through the second layer correspondingly to the respective work storage holes. A one-side electrode Wa of the work stored in each work storage hole is exposed from the first layer side of the work storage hole and the other-side electrode Wb is abutted on the through-hole of the second layer. A first probe 60 abutting on the one-side external electrode of the work stored in the work storage hole is arranged on the first layer side of the carrier table and a second probe 61 abutting on the through-hole of the second layer is arranged in the table base.

Description

  The present invention relates to a workpiece measuring apparatus and a workpiece conveying device for measuring electrical characteristics by bringing a probe into contact with an external electrode of a workpiece while accommodating and conveying a workpiece such as a chip-type electronic component in a workpiece accommodating hole of a conveying table. The present invention relates to a table, a workpiece measuring method, and an electronic component manufacturing method, and in particular, large damage to the external electrode of the workpiece due to the pressing force of the probe is unlikely to occur, and sufficient electrical contact between the probe and the external electrode of the workpiece is ensured. The present invention relates to a workpiece measuring apparatus, a workpiece transfer table, a workpiece measuring method, and an electronic component manufacturing method.

  Conventionally, while a rectangular parallelepiped workpiece such as a chip-type electronic component is stored and transferred in the workpiece storage hole of the transfer table, the probe is brought into contact with the external electrodes provided at both ends in the longitudinal direction of the workpiece to achieve electrical characteristics. A workpiece measuring apparatus that performs measurement is known. It is also known to use a probe in which a part abutting on an external electrode of a workpiece is formed of a rotatable cylindrical conductor when measuring with a workpiece measuring apparatus.

  A conventional workpiece measuring device has a horizontally installed table base and a circular conveyance table rotatably installed on the table base, and a plurality of workpiece storage holes penetrate the same circumference through the conveyance table. It is provided to line up. A workpiece having a pair of external electrodes at both ends in the longitudinal direction is individually stored in each workpiece storage hole with the upper external electrode exposed from the workpiece storage hole.

  In such a workpiece measuring device, a cylindrical probe which is fixed to the upper side of the conveying table and biased toward the conveying table in the measuring unit when the workpiece is conveyed by intermittently rotating the conveying table and the workpiece reaches the measuring unit. However, they come into contact with the external electrode on the upper side of the work from the upper surface side of the transfer table. At the same time, the probe fixed in the table base in the measurement unit comes into contact with the external electrode on the lower side of the work (see Patent Document 1).

  In this case, the cylindrical probe on the upper side of the transfer table and the probe fixed in the table base are connected to the measuring instrument in advance, and as described above, both probes touch the upper and lower side of the workpiece. As soon as the transport table stops, the electrical characteristics of the workpiece can be measured. According to the workpiece measuring apparatus described above, the measurement time can be shortened as compared with the method in which the probe is moved toward the external electrode of the workpiece and brought into contact after the conveyance table is stopped.

  However, the workpiece measuring apparatus described above has the following problems. The first problem is that the cylindrical probe above the transfer table is urged toward the transfer table immediately before the stop of the transfer table in the measurement unit and immediately after the start of the rotation of the transfer table after measurement. When abutting on the electrode, the table base with which the external electrode on the lower side of the workpiece abuts moves. For this reason, friction is generated between the lower external electrode and the table base due to the pressing force generated by the contact between the cylindrical probe above the transfer table and the upper package of the workpiece. Large damage to the electrode may occur. In particular, when the surface of the external electrode is covered with a metal thin film, the thin film is peeled off by friction, and fillet formation during solder mounting is insufficient, which may lead to mounting failure. In addition, the peeling itself may be defective in appearance.

  The second problem is that the external electrode of the workpiece has a convex rounded shape toward the outside, so that the contact between the probe and the external electrode of the workpiece lacks stability when measuring the electrical characteristics, As a result, the posture of the workpiece is likely to fluctuate during the measurement of the electrical characteristics, and the electrical contact between the probe and the external electrode of the workpiece may be insufficient, which may reduce the measurement accuracy.

JP 2005-514605 A

  The present invention has been made in consideration of such points, and when the probe arranged above the transfer table comes into contact with the external electrode on the upper side of the work, the probe exerts pressure on the external electrode of the work. The external electrode of the workpiece is not damaged significantly, and when measuring the electrical characteristics of the workpiece, the posture of the workpiece can be stabilized and sufficient electrical contact between the probe and the external electrode of the workpiece can be ensured. Workpiece measuring apparatus, workpiece conveyance table, workpiece measurement method, a conveyance table capable of preventing thinning of a target workpiece during electrical characteristics, and these measurement devices and measurement methods An object of the present invention is to provide a method of manufacturing an electronic component using the above.

  The present invention relates to a work table measuring apparatus for measuring electrical characteristics of a workpiece while storing and transporting a workpiece having a negative side external electrode and another side external electrode located on the opposite side of the one side external electrode. And a transport table that is rotatably mounted on the table base and has a first layer opposite to the table base and a second layer on the table base side, and the first layer penetrates the first layer. A plurality of workpiece storage holes are provided for storing workpieces, and conductive through holes are provided through the second layer corresponding to the workpiece storage holes in the second layer. The one-side external electrode is exposed from the first layer side of the workpiece storage hole, and the other-side external electrode is in contact with the second layer through-hole, and the workpiece in the workpiece storage hole is placed on the first layer side of the transfer table. Abuts one external electrode A first probe provided is a work measuring apparatus characterized in that a contact with the second probe in the through holes of the second layer in a table base.

  The present invention is the workpiece measuring apparatus, wherein the first probe has a conductor biased toward the transfer table.

  The present invention is a workpiece measuring apparatus in which the conductor has a rotatable cylindrical shape, and the outer peripheral surface of the conductor is in contact with one side external electrode of the workpiece in the workpiece housing hole.

  The present invention is the workpiece measuring apparatus, wherein the conductor has a flat plate shape, and one surface of the conductor is in contact with one side external electrode of the workpiece in the workpiece housing hole.

  The present invention is a workpiece measuring apparatus characterized in that a through-hole penetrating the conductor is provided inside a portion of the conductor where one external electrode of the workpiece contacts.

  The present invention is a work transfer table for storing and transferring a target work, corresponding to the first layer formed with a plurality of work storage holes and the plurality of work storage holes provided with the first layer. The second layer in which a through hole is formed, and the diameter of the workpiece storage hole is larger than the diameter of the through hole and larger than the cross-sectional area perpendicular to the loading direction of the target workpiece, A diameter of the through hole is formed smaller than a cross-sectional area perpendicular to the loading direction of the target workpiece, and a printed pattern made of a conductor is formed on the inner wall of the through hole. is there.

  The present invention provides a workpiece measuring method using the above-described workpiece measuring apparatus, wherein workpieces are individually stored in the workpiece storage holes provided in the first layer of the transfer table, and one side external electrode of the workpiece is connected to the workpiece. The step of stenciling the workpiece while exposing the other side external electrode to the through hole of the second layer while exposing from the first layer side of the storage hole, and the first probe from the first layer side of the transfer table In contact with one external electrode of the work in the work storage hole, and the second probe is brought into contact with the through hole of the second layer from the table base to measure the electrical characteristics of the work. This is a workpiece measurement method.

  The present invention is a workpiece measuring method in which the first probe has a conductor biased toward the transfer table.

  The present invention is the workpiece measuring method, wherein the conductor has a rotatable cylindrical shape, and the outer peripheral surface of the conductor is in contact with one side external electrode of the workpiece in the workpiece housing hole.

  The present invention is the workpiece measuring method, wherein the conductor has a flat plate shape, and one surface of the conductor is in contact with one side external electrode of the workpiece in the workpiece housing hole.

  In the present invention, the workpiece has a substantially rectangular parallelepiped shape, and has an external electrode on a pair of opposed end faces of the workpiece, and the surface of the external electrode is covered with a metal thin film. Is the method.

The present invention is a workpiece measuring method characterized in that a through-hole penetrating a conductor is provided inside a portion of the conductor where one external electrode of the workpiece contacts.
The present invention is a method for manufacturing an electronic component using the workpiece measuring method described above.

  As described above, according to the present invention, the transfer table is constituted by the first layer on the side opposite to the table base and the second layer on the table base side, and the work storage hole is provided through the first layer. The external electrode of the work in the work storage hole does not contact the table base.

  For this reason, even if the first probe comes into contact with one external electrode of the work and the pressing force is applied to the work while the transfer table is rotating on the table base, the other external electrode of the work and the table base Friction does not work between the two, and no great damage is caused to the external electrode on the other side of the workpiece. In addition, since a through hole is provided in the second layer of the transfer table so as to correspond to the work accommodation hole, the external electrode on the other side of the work comes into contact with the through hole when measuring the electrical characteristics of the work. Posture is stable. For this reason, it is possible to ensure sufficient electrical contact between the second probe and the other external electrode of the workpiece during measurement.

FIG. 1 is a plan view showing a first embodiment of a workpiece measuring apparatus according to the present invention. FIG. 2 is a perspective view of the workpiece. 3 is a side view in the direction of arrow B in FIG. FIG. 4 is a perspective view showing a work accommodation hole in the first embodiment of the present invention. FIG. 5 is a perspective view showing a state in which a workpiece is stored in the workpiece storage hole in the first embodiment of the present invention. 6 is a plan view of FIG. 4 viewed from the direction of arrow X. FIG. 7 is a plan view of FIG. 5 viewed from the direction of arrow X. FIG. FIG. 8 is an explanatory diagram of the operation of the first measurement unit in the first embodiment of the present invention. FIG. 9 is an explanatory diagram of the operation of the first measurement unit in the first embodiment of the present invention. FIG. 10 is a diagram for explaining the operation of the first measurement unit in the first embodiment of the present invention. FIG. 11 is a diagram for explaining the operation of the first measurement unit in the first embodiment of the present invention. FIG. 12 is a diagram for explaining a counterfeit of the first measurement unit according to the first embodiment of the present invention. 13 is an enlarged view of a region F1 in FIG. 14 is an enlarged view of a region GI in FIG. FIG. 15 is an enlarged view of a region H1 in FIG. FIG. 16 is a diagram for explaining the operation of the discharge unit according to the first embodiment of the present invention. FIG. 17 is a diagram for explaining the operation of the discharge unit according to the first embodiment of the present invention. FIG. 18 is an explanatory diagram of the operation of the first measurement unit in the second embodiment of the present invention. FIG. 19 is an explanatory diagram of the operation of the first measurement unit in the third embodiment of the present invention. FIG. 20 is a perspective view of a work storage hole in a comparative example. FIG. 21 is a perspective view of a state in which a workpiece is stored in a workpiece storage hole in a comparative example. FIG. 22 is an explanatory diagram of the operation of the criticality 1 measurement unit in the comparative example. FIG. 23 is a diagram for explaining the operation of the first measurement unit in the comparative example. FIG. 24 is an operation explanatory diagram of the first measurement unit in the comparative example. FIG. 25 is an operation explanatory diagram of the first measurement unit in the comparative example. FIG. 26 is an explanatory diagram of the operation of the first measurement unit in the comparative example. FIG. 27 is an enlarged view of a region F2 in FIG. FIG. 28 is an enlarged view of a region G2 in FIG. FIG. 29 is an enlarged view of a region H2 in FIG. FIG. 30 is a diagram showing a method for manufacturing a capacitor. FIG. 31 is a diagram showing a method for manufacturing a capacitor. FIG. 32 is a diagram showing a method for manufacturing a capacitor. FIG. 33 shows a method for manufacturing a capacitor. FIG. 34 is a flowchart showing a method for manufacturing a capacitor. FIG. 35 is a view showing a modification of the present invention.

First Embodiment of the Present Invention A first embodiment of the present invention will be described with reference to FIGS. A plan view of a workpiece measuring apparatus according to the present invention is shown in FIG.

  The workpiece measuring apparatus 100 includes a table base 1 installed horizontally and a transfer table 2 that is rotatably arranged on the table base 1. The transport table 2 is intermittently rotated clockwise (in the direction of arrow A) around the central shaft 3 by the action of a drive mechanism (not shown). Further, in the vicinity of the outer peripheral portion of the transfer table 2, a plurality of work storage holes 4 for individually storing the work W are formed side by side on the circumference. Further, the supply unit 5, the first measurement unit 6, the second measurement unit 7, and the discharge unit 8 are arranged in this order along the rotation direction of the transport table 2.

  Here, the workpiece | work W is demonstrated using FIG.2 and FIG.3. A perspective view of the workpiece W is shown in FIG. The workpiece W is composed of a chip-type electronic component, and in this embodiment, a multilayer ceramic capacitor is used.

  Multilayer ceramic capacitors, like conventional multilayer ceramic capacitors, are manufactured by producing green chips by a normal printing method or sheet method using paste, firing them, and then printing or transferring external electrodes and firing. Manufactured. Hereinafter, the manufacturing method will be specifically described.

  The multilayer ceramic capacitor used in the present embodiment is formed by the following known method. A method for manufacturing the ceramic electronic component C1 according to the embodiment shown in FIG. 30 will be described. FIG. 34 is a flowchart showing the procedure of the method for manufacturing the ceramic electronic component according to the present embodiment. The method for manufacturing a ceramic electronic component according to the present embodiment includes a multilayer body forming step S1, a green chip forming step S2, a firing step S3, an external electrode forming step S4, and an electrical characteristic evaluation step S5. A plurality of the ceramic electronic components C1 described above are formed by these steps S1 to S5. Each step will be described.

  In the laminated body forming step S1, as shown in FIG. 31, a laminated body 110 in which a plurality of ceramic green layers 121 are laminated and a plurality of electrode patterns 117 are provided therein is formed. FIG. 31 shows a cross section of the stacked body 110 perpendicular to the stacking direction. First, the ceramic green layer 121 is formed on the PET film. The ceramic green layer 121 is obtained by applying a ceramic slurry obtained by adding an additive to the main component and further adding and mixing a binder resin (for example, an organic binder resin), a solvent, a plasticizer, and the like on a PET film. Formed by drying. The main component of the ceramic green layer 121 is ceramic raw material particles that become ceramic particles after firing, and is, for example, BaTiO 3. Examples of the additive include MgO, Y2O3, MnO, V2O5, BaSiO3, and CaSiO3.

  Next, a plurality of electrode patterns 117 are formed on the upper surface of the ceramic green layer 121. The electrode pattern 117 is formed by printing an electrode paste on the upper surface of the ceramic green layer 121 and drying it. The electrode paste is a paste-like composition obtained by mixing a binder resin, a solvent, or the like with a metal powder such as Ni, Ag, or Pd. For example, screen printing or the like is used as the printing means.

  A plurality of ceramic green layers 121 on which the electrode patterns 17 are formed are stacked. A plurality of ceramic green layers 121 in which the electrode pattern 117 is not formed are stacked on the upper and lower sides of the plurality of ceramic green layers 121 in which the electrode pattern 117 is formed. Thereby, the laminated body 110 is formed.

  Next, in the green chip forming step S2, the stacked body 110 is cut in a direction parallel to the stacking direction to form a green chip 112 as shown in FIG.

  In the green chip 112 shown in FIG. 33, the two end surfaces 112a and 112b are cut surfaces, and the end portions of the electrode pattern are exposed. The first and second side surfaces 112c and 112d are surfaces perpendicular to the stacking direction, and are surfaces corresponding to the main surfaces 110c and 110d facing each other perpendicular to the stacking direction in the stacked body 110. The third and fourth side surfaces 112e and 112f are cut surfaces.

  Next, in the firing step S3, the binder contained in the ceramic green layer 121 is removed and fired. By firing, the ceramic green layer 121 of the green chip 112 becomes ceramic, the electrode pattern 117 becomes the internal electrode layer 107, and the green chip 112 becomes the chip body 102.

  Next, in the external electrode forming step S4, the first external electrode Wa and the second external electrode Wb are formed on both end faces 102a and 102b of the chip body 102, respectively. Thereby, the internal electrode layer 107 is electrically connected to the first external electrode 103 or the second external electrode 104. The external electrode is obtained by applying a conductive paste to both end faces 102a and 102b of the chip body 102 and baking to form a metal baking electrode layer, and forming a thin film layer so as to cover the metal baking electrode layer. It is done.

  Various metals such as Cu, Ni, Ag, and Pd, alloys thereof, and the like are used as the metal component constituting the metal baking electrode.

  As a method for forming the metal thin film layer, a thin film forming method such as physical vapor deposition such as electroplating, electroless plating, sputtering, or chemical vapor deposition is applied. As the metal component of the metal thin film layer, a metal of Ni, Sn, Cu or an alloy of these metals is used.

  In this embodiment, a plating layer formed by electroplating is used as the thin film layer in consideration of handling properties and simplification of the manufacturing process. In consideration of solderability and bondability with a green chip, Cu is used as a metal constituting the metal baking electrode, Ni plating is applied to the first plating layer so as to cover the metal baking electrode, and the first layer is further formed. Sn plating was used as a second plating layer formed so as to cover. Through the steps described above, a plurality of ceramic electronic components C1 are completed.

  Regarding the ceramic electronic component C1 obtained as described above, the external electrode Wa is a one-side external electrode positioned above the workpiece W, and the external electrode Wb is positioned below the workpiece W and opposite to the one-side external electrode Wa. It becomes the other side external electrode provided.

  Next, in the electrical measurement evaluation step S5, the first probe 60 and the second probe 61 connected to the measuring instrument are brought into contact with the external electrodes Wa and Wb, respectively, as will be described later. The mechanical characteristics.

In this embodiment, the probes 60 and 61 are brought into contact with the external electrodes Wa and Wb to measure the leakage current value of the capacitor. The vertical length L and the horizontal length M of the workpiece W in FIG. 2 are substantially the same.
Examples of the vertical length L, the horizontal length M, and the height N of the work W are 0.3 to 3.2 mm, 0.3 to 3.2 mm, and 0.6 to 2.5 mm, respectively. Conceivable. Here, FIG. 3 shows a side view of the workpiece W viewed from the direction of arrow B in FIG. As described above, since the external electrodes Wa and Wb are formed by applying the conductive paste to both longitudinal ends of the substrate Wx, the external electrodes Wa and Wb are raised from the surface of the substrate Wx.

That is, in FIG. 3, the surface Wa _l and Wa ₂ outer electrodes Wa along the longitudinal direction of the workpiece W is flared outward from the surface Wx ₁ and Wx ₂ respectively base Wx, the longitudinal end of the workpiece W The end surface Wa3 of the external electrode Wa that is positioned has a shape that is rounded in a convex shape toward the outside of the workpiece W. The same applies to the external electrode Wb.

  In FIG. 1, a perspective view of the workpiece measuring apparatus 100 viewed from the direction of arrow C is shown in FIG. The transfer table 2 has a two-layer structure having a first layer 2a on the side opposite to the table base 1 and a second layer 2b on the table base 1 side. The work storage hole 4 is formed through the first layer 2a.

A plan view of FIG. 4 viewed from the direction of arrow X is shown in FIG. As shown in FIGS. 4 and 6, when the transfer table 2 is viewed from above the workpiece storage hole 4 (from the direction of the arrow X in FIG. 4), the circular through hole 9 a faces the workpiece storage hole 4. And formed through the second layer.
The cross-sectional area of the through-hole 9a is set smaller than the work storage hole 4 and smaller than the cross-sectional area (L × W) of the work in the loading direction.
Then, the inner wall of the through hole 9a in an upper surface 2b _l and the lower surface 2b ₂ of the second layer 2b, the printed pattern 9b made of a conductor which connects the inner wall of the circumference and the through-hole 9a of the through hole 9a is formed. The through hole 9a and the printed pattern 9b form a conductive through hole 9 that electrically connects the work storage hole 4 side and the table base 1 side of the second layer 2b. The printed pattern 9b is preferably formed around the through hole 9a, and is preferably formed on the surface of the second layer, the inner wall of the through hole 9a, and the entire periphery. By widening the region where the print pattern 9b is formed, the contact area of the print pattern with the workpiece increases, and electrical connection with the electrodes Wa and Wb can be more reliably ensured. In order to form the printed pattern 9b, the second layer 2b is preferably made of a printed board material such as glass epoxy.

  FIG. 5 shows a state when the workpiece W is stored in the workpiece storage hole 4 shown in FIG.

As shown in FIG. 5, one external electrode Wa of the workpiece W stored in the workpiece storage hole 4 is exposed from the upper surface 2al of the first layer 2a on the opposite side of the table base 1, and the other external electrode Wb. is in contact with the printed pattern 9b constituting the through-hole 9 in the upper surface 2b _l of the second layer 2b. Here, the height of the first layer 2 a, that is, the depth T of the work storage hole 4 is set to be higher than the height N of the work W in order to ensure that the probe is brought into contact with the external electrode Wa from above the transfer table 2. It is set a little smaller. Therefore, the external electrodes Wa of the workpiece W in the workpiece accommodating hole 4 is slightly projects upward from the upper surface 2a _l of the first layer 2a.

  A plan view of FIG. 5 viewed from the direction of arrow X is shown in FIG. As described above, the vertical length L and the horizontal length M of the workpiece W are substantially the same, and the transport table 2 is viewed from above the workpiece storage hole 4 (from the direction of arrow X in FIG. 5). The opening of the workpiece storage hole 4 has a square shape, and the length of one side thereof is set to a value S slightly larger than the vertical length L and the horizontal length M of the workpiece W. That is, there is a slight gap between the inner wall of the work storage hole 4 and the outer periphery of the work W.

  Further, the cross-sectional area of the through hole 9 is set smaller than the work accommodating hole 4 and smaller than the cross-sectional area (L × W) of the work in the loading direction. As shown in FIG. 5, when the work is stored in the storage hole 9, the peripheral edge portion of the through hole and the electrode Wb come into contact with each other, and the work can be stored without falling in the work storage hole 4.

  By the way, as shown in FIGS. 8 to 11, in the first measurement unit 6 of the workpiece measuring apparatus 100, the first probe 60 that contacts the one-side external electrode Wa on the workpiece W above the first layer 2 a of the transfer table 2. And a second probe 61 that contacts the through hole 9 of the second layer 2 b is provided in the table base 1.

  Next, the operation of the present embodiment having such a configuration will be described. In FIG. 1, the work W is individually stored in the work storage hole 4 by the action of the supply unit 5. When the transfer table 2 rotates intermittently in the direction of arrow A to transfer the workpiece W and the workpiece W reaches the first measuring unit 6, the electrical characteristics of the workpiece W are measured.

  This state will be described with reference to FIGS. 8 to 15 which are perspective views of the first measuring unit 6 seen from the direction of the arrow D in FIG. FIG. 8 shows a state in which the workpiece W accommodated in the workpiece accommodation hole 4 is conveyed toward the first measurement unit 6 while the conveyance table 2 rotates intermittently in the direction of arrow A in FIG.

  In FIG. 8, in the first measurement unit 6, an upper probe 60 is disposed as a first probe on the upper side of the transfer table 2, which is the opposite side of the table base 1, and the second probe 60 is disposed in the table base 1. A lower probe 61 is arranged as a probe. The upper probe 60 has a roller 60a having a cylindrical cross section, and the roller 60a is rotatable around an axle 60b supported by an arm 60c. The roller 60a, the axle 60b, and the arm 60c are all made of a conductor, and are electrically connected to each other by a conductive connection mechanism (not shown) and are electrically connected to a measuring instrument that measures electrical characteristics.

  Further, the upper probe 60 is urged toward the surface 2al of the first layer 2a of the transport table 2 by an unillustrated elastic mechanism. Therefore, in FIG. 8, the transport table 2 is moved in the direction of arrow A (in FIG. 1). When the rotation is performed in the direction of arrow A), the cylindrical outer peripheral surface of the roller 60a rotates in the direction of arrow A1 while contacting the surface 2al of the first layer 2a of the transport table 2. The lower probe 61 is electrically connected to a measuring instrument for measuring electrical characteristics by a conductive connection mechanism (not shown). The upper surface of the lower probe 61 is substantially flush with the upper surface 1s of the table base 1. The planar shape located in is formed. FIG. 9 shows a state immediately after the workpiece W reaches the first measuring unit 6 and the transport table 2 stops after the state of FIG.

  As described above, since the electrode Wa of the work W in the work storage hole 4 protrudes slightly upward from the upper surface 2al of the first layer 2a, the cylindrical outer peripheral surface of the roller 60a in FIG. The first electrode 2a is separated from the surface 2al of the second first layer 2a and rides on the external electrode Wa. At this time, since there is a slight gap between the inner wall of the work storage hole 4 and the outer periphery of the work W as described above, the work W is fixed in an inclined posture in the work storage hole 4.

FIG. 13 shows an enlarged view of the region F1 in FIG. 9 at this time. The roller 60a urged toward the surface 2al of the first layer 2a of the transfer table 2 by the rotation of the transfer table 2 in the direction of arrow A is applied to the external electrode Wa of the work W in the work storage hole 4 at a point P1. Ride while touching. At this time, due to the action of the force exerted by the roller 60 a on the external electrode Wa in the horizontal direction, the electrodes Wa and Wb of the work W are lifted on the rotation direction side of the transfer table 2, and the work W is inclined in the work storage hole 4. Fixed. The upper surface 2b ₁ of the second layer 2b of the transfer to the external electrode Wb table 2 abuts at a point Q1.

  In this state, the urging force of the roller 60a generates a vertical pressing force indicated by the vector J1 at the point P1 on the external electrode Wa, and similarly the vertical direction indicated by the vector K1 at the point Q1 on the external electrode Wb. The pressing force is generated. Here, since the contact surface of the roller 60a with respect to the point P1 is the outer peripheral surface of the rotatable cylinder, damage caused to the external electrode Wa due to this contact is extremely small. Further, the contact surface of the upper surface 2bl of the second layer 2b with respect to the point Q1 is the print pattern 9b of the through hole 9, and the electrode Wb and the print pattern 9b are mutually connected even when the transport table 2 is rotated in the direction of arrow A. Since it is in a stationary state, damage caused to the electrode Wb by this contact is also extremely small.

  FIG. 10 shows a state where the conveyance table 2 further rotates in the direction of arrow A from the state of FIG. 9 and stops at the first measuring unit 6. In FIG. 10, the outer peripheral surface of the cylinder of the roller 60 a is in contact with the substantially central portion of the external electrode Wa of the workpiece W, and the external electrode Wb is in contact with the print pattern 9 b of the through hole 9. In this state, the workpiece W takes a substantially upright posture in the workpiece storage hole 4.

  Further, as described above, the roller 60a, the axle 60b, and the arm 60c are all made of a conductor, and are electrically connected to each other by a conductive connection mechanism (not shown) and electrically connected to a measuring instrument that measures electrical characteristics. Has been. Therefore, in FIG. 10, the external electrode Wa is electrically connected to the measuring instrument via the roller 60a, the axle 60b, and the arm 60c.

  On the other hand, the external electrode Wb contacts the printed pattern 9b on the upper surface 2bl of the second layer 2b of the transport table 2, and the printed pattern 9b contacts the lower probe 61 on the lower surface 2b2 of the second layer 2b. Further, as described above, the lower probe 61 is electrically connected to a measuring instrument for measuring electrical characteristics by a conductive connection mechanism (not shown). For this reason, in FIG. 10, the external electrode Wb is electrically connected to the measuring instrument via the printed pattern 9b and the lower probe 61.

  As described above, the electrical characteristics of the workpiece W are measured by electrically connecting the external electrodes Wa and Wb to the measuring instrument. Here, by using a rotatable roller 60a as the upper probe 60 and urging the roller 60a toward the transfer table 2, the electrical characteristics of the workpiece W immediately after the transfer table 2 is stopped as shown in FIG. Measurement can be performed, and the measurement time can be shortened.

  FIG. 14 shows an enlarged view of the region G1 in FIG. 10 at this time. When the transfer table 2 rotates in the direction of arrow A from the state of FIG. 13 and the roller 60a rides on the external electrode Wa while rotating in the direction of arrow A1, the rotation of the roller 60a in FIG. Due to the action of the force exerted on Wa, the work W is in the upright state in the work storage hole 4 as shown in FIG. Then, when the roller 60a reaches a point Y that is a substantially central position of the external electrode Wa, the rotation of the transport table 2 is stopped. At this time, the external electrode Wb is in contact with the printed pattern 9b at Z1 which is an edge of the through hole 9a of the through hole 9.

  For the sake of simplicity, the notation of Z1 is shown in one place in FIG. 14, but the actual Z1 is not a single point, but the edge of the through hole 9a in the upper surface 2bl of the second layer 2b of the transport table 2. Over the entire circumference. Here, as described above, since the end surface of the external electrode Wb has a convex rounded shape toward the outside of the workpiece W, the workpiece W is in the upright posture in the workpiece storage hole 4. In this case, the circumference Z1 at which the external electrode Wb becomes the edge of the through hole 9a at a position where the point Wb1 that protrudes to the lowest side of the end face of the external electrode Wb slightly enters the inside from the upper side of the through hole 9a. By being abutted on, it is stably held.

  In FIG. 14, the contact between the roller 60a and the external electrode Wa at the point Y is a contact between the outer peripheral surface of the rotatable cylinder and the surface that is rounded convex toward the outside, and therefore is somewhat unstable. On the other hand, the contact between the printed pattern 9b and the external electrode Wb in Z1 is a contact between the circumference that is the edge of the hole and the surface that is rounded toward the outside, so that it is sufficiently stable. Have sex. Therefore, the stability of the contact between the printed pattern 9b and the external electrode Wb compensates for the lack of stability that the contact between the roller 60a and the external electrode Wa has, and the substantially upright posture of the workpiece W illustrated in FIG. It does not fluctuate during measurement.

  At this time, as shown in FIG. 14, since the roller 60a is urged toward the surface 2a1 of the first layer 2a of the transport table 2, the external electrode Wa is indicated by the vector J2 by the urging force at the point Y. A vertical pressing force is generated, and similarly, a pressing force in an oblique direction indicated by a vector K2 is generated at the point Z1 on the external electrode Wb. As described above, since the posture of the workpiece W during measurement does not fluctuate, the electrical contact between the roller 60a and the external electrode Wa of the workpiece W and the electrical contact between the printed pattern 9b and the external electrode Wb are caused by these pressing forces. Are sufficiently secured, and the measurement accuracy of the electrical characteristics is not lowered.

  FIG. 11 shows a state immediately after the measurement of the electrical characteristics is finished in the state of FIG. 10 and the transfer table 2 starts intermittent rotation. In FIG. 11, when the conveyance table 2 starts to rotate in the direction of arrow A, the roller 60a rotates in the direction of arrow A1, and the cylindrical outer peripheral surface is separated from the external electrode Wa and the first layer of the conveyance table 2 is reached. It goes to the surface 2a1 of 2a. At this time, since there is a slight gap between the inner wall of the work storage hole 4 and the outer periphery of the work W as described above, the work W is fixed in an inclined posture in the work storage hole 4.

  FIG. 15 shows an enlarged view of the region H1 in FIG. 11 at this time. The conveyance table 2 rotates in the direction of arrow A, and the roller 60a biased toward the surface 2al of the first layer 2a of the conveyance table 2 contacts the electrode Wa of the workpiece W in the workpiece accommodation hole 4 at a point P2. Heading to the surface 2al of the first layer 2a of the transport table 2 while contacting. At this time, due to the action of the urging force of the roller 60a on the external electrode Wa, the external electrodes Wa and Wb of the work W are lifted on the rotation direction side of the transfer table 2, and the work W is fixed in an inclined posture in the work storage hole 4. Is done. Then, the external electrode Wb and the upper surface 2b1 of the second layer 2b of the transport table 2 abut on the point Q2. In this state, the urging force of the roller 60a generates a vertical pressing force indicated by the vector J3 at the point P2 on the external electrode Wa, and similarly the vertical direction indicated by the vector K3 at the point Q2 on the external electrode Wb. The pressing force is generated. Here, since the contact surface of the roller 60a with respect to the point P2 is the outer peripheral surface of the rotatable cylinder, the damage caused to the external electrode Wa due to this contact is extremely small. Further, the contact surface of the upper surface 2b1 of the second layer 2b with respect to the point Q2 becomes a print pattern 9b of the through hole 9. In this case, even if the transport table 2 is rotated in the direction of the arrow A, the external electrode Wb and the printed pattern 9b are in a stationary state with respect to each other.

  When the transport table 2 further rotates from the state of FIG. 11, the roller 60a is separated from the external electrode Wa of the work W in the work storage hole 4 and rotated in the direction of the arrow A1, as shown in FIG. 2 is in contact with the surface 2al of the first layer 2a. When the roller 60a is separated from the workpiece W, the workpiece W is in a vertical standing posture in the workpiece storage hole 4, and is conveyed toward the second measuring unit 7 in FIG.

  When the workpiece W reaches the second measurement unit 7 in FIG. 1, the transport table 2 stops and measurement is performed on an item date different from the item measured in the first measurement IS6. The measurement item in the second measurement unit 7 may be an electrical characteristic in which measurement is performed by bringing the probe into contact with the external electrodes Wa and Wb in the same manner as the first measurement unit 6. Visual inspection may be performed using. When the measurement in the second measurement unit 7 is completed, the conveyance table 2 starts the fraud rotation, and the workpiece W is conveyed toward the discharge unit 8.

  In the discharge unit 8 in FIG. 1, the work W is discharged from the work storage hole 4 by the injection of compressed air and stored in a storage container (not shown). This will be described with reference to FIGS. 16 and 17 are perspective views of the discharge unit 8 seen from the direction of arrow E in FIG. 1. In FIG. 16, the work W in the work storage hole 4 reaches the discharge unit 8, and the transfer table 2 stops. doing. In the discharge unit 8, a discharge pipe 81 is installed immediately above the work storage hole 4, and an injection nozzle 82 is installed through the table base 1 immediately below the work storage hole 4. The discharge pipe 81 is connected to a storage container (not shown), and the injection nozzle 82 is connected to a compressed air source (not shown). When the transport table 2 stops in the discharge unit 8, the injection nozzle 82, the through hole 9a, the work storage hole 4, and the discharge pipe 81 are arranged in a straight line. In this state, when compressed air is ejected from the compressed air source in the direction of arrow V in FIG. 17, the compressed air hits the workpiece W in the workpiece storage hole 4 via the injection nozzle 82 and the through hole 9a, and the workpiece W Is sent into the discharge pipe 81 by the action of compressed air and stored in the storage container. In this way, by forming the through hole 9a in the second layer 2b facing the workpiece storage hole 4, the workpiece W can be easily discharged by compressed air ejection at the discharge portion 8.

Modification of First Embodiment FIG. 35 shows a modification of the first embodiment. The modification shown in FIG. 35 relates to the transfer table 2 shown in FIGS. 1 to 17 and is provided with a concave step 2A in the peripheral portion of the work storage hole 4. Other configurations are the same as those of the first embodiment shown in FIGS.
In the modification shown in FIG. 35, the same parts as those in the first embodiment shown in FIGS. 1 to 17 are denoted by the same reference numerals, and detailed description thereof is omitted.
As shown in FIG. 35, when the probe comes into contact with the external electrode Wa, the effect of alleviating the impact at the time of contact occurs in the concave portion, so that damage to the external electrode Wa can be reduced more effectively. Become.

Comparative Example of the Invention Next, a workpiece measuring device as a comparative example for the embodiment of the present invention will be described with reference to FIGS.

  FIG. 20 is a diagram showing the transfer table 2 and the work storage hole 4 according to a comparative example, and corresponds to FIG.

  In FIG. 20, the transfer table 2 is composed of a single table base 20, and the work storage hole 4 is formed through the table base 20. FIG. 21 shows a state when the workpiece W is stored in the workpiece storage hole 4 shown in FIG.

  The external electrode Wa of the work W stored in the work storage hole 4 is exposed from the upper surface 20 sl of the table base 20 on the opposite side of the table base 1, and the external electrode Wb is in contact with the upper surface 1 s of the table base 1. . The external electrode Wa of the work W in the work storage hole 4 protrudes slightly upward from the upper surface 20 s 1 of the table base 20.

  In the comparative example, the manner in which the workpiece W reaches the first measuring unit 6 in FIG. 1 and the electrical characteristics of the workpiece W are measured will be described with reference to FIGS. In FIG. 22, an upper probe 60 is disposed above the table base 20 in the first measurement unit 6, and a lower probe 61 is disposed in the table base 1. FIG. 23 shows a state immediately after the workpiece W reaches the first measurement unit 6 and the table base 20 stops after the state of FIG.

  In FIG. 23, the cylindrical outer peripheral surface of the roller 60a is separated from the surface 20sl of the table base 20 and rides on the external electrode Wa. At this time, the workpiece W is fixed in an inclined posture in the workpiece storage hole 4. FIG. 27 shows an enlarged view of the region F2 in FIG. 23 at this time.

  In FIG. 27, the roller 60a rides on the external electrode Wa of the work W in the work storage hole 4 while abutting at the point P3. At this time, due to the action of the force that the roller 60a exerts on the external electrode Wa in the horizontal direction, the external electrodes Wa and Wb of the work W are lifted on the rotational direction side of the table base 20, and the work W is inclined in the work storage hole 4. Fixed. Then, the external electrode Wb and the upper surface 1s of the table base 1 abut at the point Q3.

  In this state, the urging force of the roller 60a generates a vertical pressing force indicated by the vector J10 at the point P3 on the external electrode Wa, and similarly the vertical direction indicated by the vector K10 at the point Q3 on the external electrode Wb. The pressing force is generated. Here, since the contact surface of the roller 60a with respect to the point P3 is the outer peripheral surface of the rotatable cylinder, damage caused to the external electrode Wa due to this contact is extremely small.

  On the other hand, the contact surface with respect to the point Q3 is composed of the upper surface 1s of the table base 1, and the table base 20 is rotated in the direction of the arrow A. For this reason, the external electrode Wb of the workpiece w fixed in the workpiece storage hole 4 in an inclined posture remains in a state where the vertical pressing force indicated by the vector K10 is received from the upper surface 1s of the table base 1 at the point Q3. Move in the direction of arrow A. As a result, friction is generated between the external electrode Wb and the upper surface 1s of the table base 1, and the external electrode Wb is greatly damaged by this friction.

  FIG. 24 shows a state in which the table base 20 further rotates in the direction of arrow A from the state of FIG. In FIG. 24, the outer peripheral surface of the cylinder of the roller 60 a is in contact with the substantially central portion of the external electrode Wa of the work W pole, the external electrode Wb is in contact with the lower probe 61, and the work W is substantially upright in the work storage hole 4. Become posture. The external electrode Wa is electrically connected to the measuring instrument via the roller 60a, the axle 60b, and the arm 60c, and the electrode Wb is electrically connected to the measuring instrument via the lower probe 61. A measurement of the electrical properties of W is performed.

  FIG. 28 shows an enlarged view of the region G2 in FIG. 24 at this time. 27, when the table base 20 rotates in the direction of arrow A and the roller 60a rides on the external electrode Wa while rotating in the direction of arrow AI, the rotation of the roller 60a in FIG. Due to the action of the force exerted on the electrode Wa, the workpiece W becomes substantially upright in the workpiece storage hole 4 as shown in FIG.

  Then, when the roller 60a reaches a point Y that is approximately the center position of the external electrode Wa, the rotation of the table base 20 is stopped. At this time, the external electrode Wb is in contact with the lower probe 61. Here, since the end surfaces of the external electrodes Wa and Wb are convexly rounded toward the outside of the workpiece W, the roller 60a and the external electrode Wa at the point Y rotate. Since it is in contact with the outer peripheral surface of the free cylinder and the convexly rounded surface toward the outside, it lacks stability. Similarly, the lower probe 61 and the electrode Wb at the point Z2 are in contact with a horizontal surface and a convexly rounded surface, and therefore lack stability.

  Since the roller 60a is urged toward the upper surface 20sl of the table base 20, a vertical pressing force indicated by a vector J20 is generated at the point Y by the urging force at the point Y. Similarly, the external electrode wa In Wb, a vertical pressing force pole indicated by a vector K20 is generated at the point Z2.

  As described above, when the external electrodes Wa and Wb come into contact with each other in a state where the pressing force is generated, the posture of the workpiece W being measured may vary. In that case, the roller 60a and the external electrode Wa of the workpiece W may not be in sufficient electrical contact, or the lower probe 61 and the external electrode Wb may not be in sufficient electrical contact. In this case, measurement of electrical characteristics may be performed. Accuracy is reduced.

  FIG. 25 shows a state immediately after the measurement of the electrical characteristics is finished in the state of FIG. 24 and the table base 20 starts the fraud rotation. In FIG. 24, when the table base 20 starts to rotate in the direction of arrow A, the cylindrical outer peripheral surface of the roller 60a moves away from the external electrode Wa toward the upper surface 20sl of the table base 20. At this time, the workpiece W is fixed in an inclined posture in the workpiece storage hole 4.

  FIG. 29 shows an enlarged view of the region H2 in FIG. 25 at this time. In FIG. 29, the roller 60a moves toward the upper surface 20sl of the table base 20 while contacting the external electrode Wa of the work W in the work storage hole 4 at a point P4. At this time, due to the action of the urging force of the roller 60 a on the external electrode Wa, the external electrodes Wa and Wb of the work W are lifted on the rotation direction side of the table base 20, and the work W is inclined in the work storage hole 4. Fixed. Then, the external electrode Wb and the upper surface 1s of the table base 1 abut on the point Q4. At this time, the urging force of the roller 60a generates a vertical pressing force indicated by the vector J30 at the point P4 on the external electrode Wa. Similarly, the vertical pressing indicated by the vector K30 at the point Q4 on the external electrode Wb. A pressing force is generated. Here, since the contact surface of the roller 60a with respect to the point P4 is the outer peripheral surface of the rotatable cylinder, damage caused to the external electrode Wa due to this contact is extremely small.

  On the other hand, the contact surface of the external electrode Wb at the point Q4 is the upper surface 1s of the table base 1, and the table base 20 is rotated in the direction of arrow A. For this reason, the external electrode Wb of the work W fixed in an inclined posture in the work storage hole 4 remains in a state where the vertical pressing force indicated by the vector K30 is received from the upper surface 1s of the table base 1 at the point Q4. Move in the direction of arrow A. As a result, friction is generated between the external electrode Wb and the upper surface 1s of the table base 1, and the external electrode Wb is greatly damaged by this friction.

  When the table base 20 further rotates from the state of FIG. 25, as shown in FIG. 26, the roller 60a moves away from the external electrode Wa of the work W in the work storage hole 4 and rotates in the direction of the arrow A1. 20 is in contact with the upper surface 20s1. When the roller 60a is separated from the workpiece W, the workpiece W is in a vertical standing posture in the workpiece storage hole 4, and is conveyed toward the second measuring unit 7 in FIG.

  As described above, in the workpiece measuring apparatus according to the comparative example, the transfer table 2 is composed of one layer of the table base electrode 20, so the workpiece W stored in the workpiece storage hole 4 reaches the first measuring unit 6 and reaches the table base. Immediately before the stop 20 and immediately after the table base 20 starts to rotate in order to transport the workpiece W for which measurement has been completed in the first measuring unit 6, the workpiece W in the workpiece storage hole 4 receives from the roller 60a. Due to the pressure, the external electrode Wb in contact with the table base 1 among the external electrodes of the workpiece W is greatly damaged. Further, when the electrical characteristics of the workpiece W are measured in the state where the transfer table 2 is stopped in the first measuring unit 6, the posture of the workpiece W is likely to fluctuate, so that the electrical contact between the probe and the external electrode of the workpiece is not good. In some cases, the measurement accuracy of electrical characteristics may be reduced.

  On the other hand, according to the present invention, as described above, the transfer table 2 includes the first layer 2a on the side opposite to the table base 1 and the second layer 2b on the table base side, and penetrates the first layer 2a. Since the work storage hole 4 is provided, the other external electrode Wb of the work W in the work storage hole 4 does not come into contact with the table base 1. For this reason, even if the first probe 60 abuts against one side external electrode Wa of the workpiece W while the transfer table 2 is rotating on the table base 1, the other side of the workpiece W is not affected. Friction does not work between the external electrode Wb and the table base 1, and no major damage occurs on the other external electrode Wb of the workpiece W. Further, since the through hole 9 is provided in the second layer 2b of the transfer table 2 so as to correspond to the work storage hole 4, the other external electrode Wb on the other side of the work W passes through when the electrical characteristics of the work W are measured. The posture of the workpiece W is stabilized by coming into contact with the hole 9. For this reason, it is possible to ensure sufficient electrical contact between the second probe 61 and the other external electrode Wb of the workpiece W during measurement.

The defect occurrence rate of the plating layer in Embodiments 1 and 4 of the present invention and the comparative example was evaluated.
As a method for evaluating the defect occurrence rate of the plating layer, a determination was made based on the reject rate of the fillet when solder-mounted on the substrate.

(Evaluation of fillet rejection rate)
100 target samples are solder mounted on the substrate, and the state of the rise of the fillet on each end face is confirmed. At this time, a case where the height of the fillet rising at each end face is ½ or less of the height of the external electrode and the fillet depression is １ ／ or more in the width direction is regarded as unacceptable, and the others are regarded as acceptable. It was judged.
When plating peeling occurs, it has been confirmed that fillet formation at the time of solder mounting becomes insufficient. Therefore, the presence or absence of plating peeling can be evaluated by evaluating the fillet rejection rate.
In Comparative Example 1, it was confirmed that the fillet rejection rate was as high as 3.25%. This is because, as described above, the plating layer of the external electrode Wb is greatly damaged by the friction generated between the external electrode Wb and the upper surface 1s of the table base 1.
In Embodiment 1, it was confirmed that the fillet rejection rate was 0.50%, which can be greatly reduced as compared with the comparative example. Furthermore, in Embodiment 4, the fillet rejection rate was 0%, and it was confirmed that it was effective against plating peeling.

  Also in the case where the present invention is applied to the case where the external electrode in which the metal plating layer is not formed is used, an advantageous effect against damage to the external electrode can be obtained.

  In particular, the present invention is effective when a metal electrode covered with a thin film layer such as a plating film is used as the external electrode. The reason is that the thin film layer itself is weak against friction with the contact with the probe or the table, so that it is more than in the measurement process of an electronic component having only an external electrode of a metal electrode not covered with the thin film layer. A remarkable effect appears.

Second Embodiment of the Present Invention Next, a second embodiment of the present invention is shown in FIG. In the second embodiment shown in FIG. 18, a flat plate probe 62 made of a conductive material is disposed instead of the upper probe 60 of the first measurement unit 6 in FIG. 1. Other configurations are substantially the same as those of the first embodiment shown in FIGS. In the second embodiment shown in FIG. 18, the same parts as those in the first embodiment shown in FIGS. 1 to 17 are denoted by the same reference numerals, and detailed description thereof is omitted. In FIG. 18, since the flat probe 62 has elasticity, it is urged toward the surface 2al of the first layer 2a of the transfer table 2 by its action, and the surface of the workpiece W that contacts the external electrode Wa becomes a flat surface. ing.

Third Embodiment of the Present Invention FIG. 19 shows a third embodiment of the present invention. In the third embodiment shown in FIG. 19, a probe through hole 62 a similar to the through hole 9 is provided inside the portion where the flat probe 62 in FIG. 18 contacts the external electrode Wa of the workpiece W. . Other configurations are substantially the same as those of the first embodiment shown in FIGS. In the third embodiment shown in FIG. 19, the same parts as those in the first embodiment shown in FIGS. 1 to 17 and the second embodiment shown in FIG. I will omit the explanation. As shown in FIG. 19, the probe through-hole 62a exerts the same action on the external electrode Wa as the through-hole 9a and the printed pattern 9b constituting the through-hole 9 exert on the external electrode Wb. It is possible to further stabilize the contact between the flat probe 62 and the external electrode Wa when measuring the characteristic.

In each of the above embodiments, the workpiece measuring apparatus 100 has two measuring units including the first measuring unit 6 and the second measuring unit 7 as measuring units, but the number of measuring units is two. It is not limited.
In each of the above embodiments, the rotation direction of the transfer table 2 is clockwise, but the transfer table 2 may be rotated counterclockwise.

  In each of the above embodiments, the discharge means in the discharge unit 8 has the injection nozzle 82 provided through the table base 1. As the discharge means, for example, the suction nozzle installed above the transport table 2. The workpiece W in the workpiece storage hole 4 may be sucked by vacuum suction by this suction nozzle.

  Moreover, in each said embodiment, although the conveyance table 2 is installed horizontally, you may install a conveyance table vertically or incline.

  In each of the above embodiments, a ceramic capacitor is used as an example. However, the present invention is not necessarily limited to a ceramic capacitor, and the same applies to electronic components other than ceramic capacitors, for example, electronic components such as multilayer inductors, resistor elements, varistors, and chip thermistors. It is applicable to. For example, when the workpiece W is a resistance element, the electronic element in the substrate Wx is made of a resistor, and the resistance value is measured by bringing the probes 60 and 61 into contact with the external electrodes Wa and Wb.

DESCRIPTION OF SYMBOLS 1 Table base 2 Conveyance table 2a 1st layer 2b 2nd layer 3 Center axis 4 Work accommodation hole 5 Supply part 6 1st measurement part 7 2nd measurement part 8 Discharge part 9 Through hole 9a Through hole 9b Print pattern 20 Table base body 60 Upper probe 60a Roller 60b Axle 60c Arm 61 Lower probe 62 Flat probe 62a Probe through hole 100 Work measuring device W Work Wa One side external electrode Wb Other side external electrode

Claims (13)

In the workpiece measuring device for measuring the electrical characteristics of the workpiece while storing and transporting the workpiece having the one-side external electrode and the other-side external electrode located on the opposite side of the one-side external electrode,
Table base,
A transport table that is rotatably mounted on the table base and has a first layer opposite to the table base and a second layer on the table base side;
A plurality of work storage holes are provided in the first layer to store the work through the first layer,
Corresponding to each workpiece storage hole in the second layer, a conductive through hole is provided through the second layer,
The one side external electrode of the work housed in the work housing hole is exposed from the first layer side of the work housing hole, and the other side external electrode is in contact with the through hole of the second layer,
Provided on the first layer side of the transfer table is a first probe that comes into contact with one external electrode of the work in the work storage hole, and provided a second probe in the table base that comes in contact with the second layer through-hole. A workpiece measuring device characterized by   The workpiece measuring apparatus according to claim 1, wherein the first probe has a conductor biased toward the transfer table.   3. The workpiece measuring apparatus according to claim 2, wherein the conductor has a rotatable cylindrical shape, and an outer peripheral surface of the conductor is in contact with one side external electrode of the workpiece in the workpiece housing hole.   3. The workpiece measuring apparatus according to claim 2, wherein the conductor has a flat plate shape, and one surface of the conductor is in contact with one side external electrode of the workpiece in the workpiece housing hole.   5. The workpiece measuring apparatus according to claim 4, wherein a through-hole penetrating the conductor is provided inside a portion of the conductor that contacts one side external electrode of the workpiece. A workpiece transfer table for storing and transferring a target workpiece,
A first layer in which a plurality of workpiece storage holes are formed;
Corresponding to the plurality of work storage holes provided with the first layer, and having a second layer in which conductive through holes are formed,
The diameter of the workpiece storage hole is larger than the diameter of the through hole and larger than the cross-sectional area perpendicular to the loading direction of the target workpiece,
The diameter of the through hole is formed smaller than the cross-sectional area perpendicular to the loading direction of the target workpiece,
A work transfer table, wherein a printed pattern made of a conductor is formed on an inner wall of the through hole. In the workpiece | work measuring method using the workpiece | work measuring apparatus of Claim 1,
A workpiece is individually stored in each workpiece storage hole provided in the first layer of the transfer table, and one side external electrode of the workpiece is exposed from the first layer side of the workpiece storage hole, and the other side external electrode is second A process of conveying a workpiece while contacting the through hole of the layer;
The first probe from the first layer side of the transfer table is brought into contact with the one-side external electrode of the work in the work storage hole, and the second probe is brought into contact with the through hole of the second layer from within the table base. A workpiece measuring method, characterized by measuring an electrical characteristic of a workpiece.   The work measuring method according to claim 7, wherein the first probe has a conductor biased toward the transfer table.   9. The workpiece measuring method according to claim 8, wherein the conductor has a rotatable cylindrical shape, and the outer peripheral surface of the conductor is in contact with one side external electrode of the workpiece in the workpiece housing hole.   9. The workpiece measuring method according to claim 8, wherein the conductor has a flat plate shape, and one surface of the conductor is in contact with one side external electrode of the workpiece in the workpiece housing hole.   The work measuring method according to claim 10, wherein a through hole penetrating the conductor is provided inside a portion of the conductor where the one-side external electrode of the work contacts. The workpiece has a substantially rectangular parallelepiped shape,
An external electrode on a pair of opposed end faces of the workpiece;
The work measuring method according to claim 7, wherein a surface of the external electrode is covered with a metal thin film.   The manufacturing method of the electronic component using the workpiece | work measuring method of Claim 7.

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