JP2013053677A - Combination type heat retention material - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a combination type heat retention material (heat insulation material) which is markedly suitable for temperature retention (heat insulation) of pipe, device or the like in a narrow space in which the pipe, device and the like are intricate, and additionally can exhibit high heat retention (heat insulation) effect despite its compactness according to the request and further can markedly reduce the generation of impurities such as dusts and gas, so called particles.SOLUTION: The combination type heat retention material can be configured such that a plurality of planar heat retention materials having substantially the same rectangular shapes one another, in which the length ratio of a width edge to a length edge is approximately 1 to 2, on front and back surfaces are combined by connecting arbitrary edges of the planar heat retention materials to each other, rectangular shapes of the plurality of heat retention materials are the same or similar to one another and, when the rectangular shapes of the plurality of heat retention materials are similar to one another, the length ratios of corresponding length edge and width edge of a rectangle of large heat retention material to the length edge and width edge of a rectangle of small heat retention material are multiple of 1 to 2 in both.

Description

The present invention relates to a combination type heat insulating material (heat insulating material), and more particularly, a combination type heat insulating material that is preferably used for heat insulating (insulating) pipes and devices in a narrow space where pipes and devices are intricately complicated. Regarding materials.

Conventionally, as a heat insulating material (heat insulating material) used for pipes and devices, for example, a heat insulating material made in advance so as to be compatible with the pipes and devices to be attached, or by performing processing such as cutting on the site and mounting. There has been known a heat insulating material that can be processed so as to be suitable for piping and equipment. However, these heat insulating materials are not suitable for keeping the pipes and devices warm in a narrow space where the pipes and devices are complicated. When maintaining heat in such a narrow space, it is possible to adapt the heat insulating material by cutting it at the site, but mainly use glass wool, rock wool or tape-shaped heat insulating material with a greater degree of freedom. It was. However, in this work, it is necessary to prepare heat insulating materials having a wide variety of shapes and forms in advance, and to use these to appropriately heat complex piping, so that the work is extremely complicated. As a result, a large cost was incurred. On the other hand, it is more costly to measure such a pipe on site and separately produce a heat insulating material suitable for it.

In addition, when a conventional heat insulating material is used for heat insulation in a narrow space where the above-described piping and devices are complicated, the heat insulating material cannot be sufficiently attached to the piping and devices because the space is narrow. In some cases, the desired heat insulation (heat insulation) effect cannot be obtained. In such a case, measures such as keeping a plurality of pipes warm together have been taken. Therefore, in such a narrow place, there is a high need for a heat insulating material that exhibits a high heat insulating effect while being more compact. In addition, in particular, in semiconductor manufacturing apparatuses and the like, it is necessary to suppress the generation of impurities such as dust and gas, so-called particles as much as possible.

Patent Document 1 discloses a sheet-like base material, a heater wire arranged on or near the surface of the base material, a heating unit including a heater cover for storing them, a heat insulating material, and a heat insulating material cover for storing the heat insulating material. The electric heater which has a heat retention part provided with the electric heating heater in which the said heating part is provided with the cut | notch part which can be cut | disconnected is disclosed. If the heat insulating material is provided with a notch that can be cut in the same manner as the electric heater, it is considered that it can sufficiently cope with the heat insulation of the pipe and the device in a narrow space where the pipe and the device are complicated. However, there are also disadvantages such as the presence of an extra notch. In addition, as long as the conventional heat insulating material is used, it cannot be a compact and high heat insulating effect.

JP 2009-199967 A

The present invention is not only remarkably suitable for heat insulation (insulation) of pipes and devices in a narrow space where piping and devices are complicated, but also exhibits a high heat insulation (heat insulation) effect while being compact if desired. Furthermore, the present invention provides a combined heat insulating material (heat insulating material) that can significantly reduce the generation of impurities such as dust and gas, so-called particles.

The present inventor has intensively studied what kind of heat insulating material is suitable for keeping the pipes and devices warm in the field and in a simple operation, particularly in a narrow space where the pipes and devices are intricately complicated. If an incision part that can be cut into the heat insulating material is provided as in the electric heater described in Patent Document 1, the efficiency can be improved by appropriately cutting the notch part even in heating and heat insulation of complicated pipes and devices. Can respond well. However, when it is attached to actual pipes and devices, there is an unnecessary cut portion, and there are also problems that require cost and other improvements. Moreover, it was necessary to prepare several types of heat insulating materials depending on the dimensions of the pipes and devices. Therefore, the present inventor uses a plurality of plate-shaped heat insulating materials having a rectangular shape on the two sides of the front and back, which has a predetermined ratio of the short side to the long side of about 1: 2. It has been found that if used in appropriate combination, heat insulation of pipes and devices in a narrow space can be carried out appropriately and simply. Moreover, if this heat insulating material is used, the dimension of a heat insulating material can be changed suitably according to the dimension of piping, an apparatus, etc. Furthermore, in the heat insulating member used for the plate-shaped heat insulating material, if a plurality of chambers isolated or not isolated from each other are provided in the member, air convection in the heat insulating member is significantly limited, and Accordingly, it has been found that the heat retention (heat insulation) effect can be remarkably enhanced. In addition, for example, when heat-insulating piping and devices such as semiconductor manufacturing equipment, if the heat-insulating member and the heat-insulating member cover constituting the plate-shaped heat insulating material are made of a specific material, the temperature is remarkably increased in the semiconductor manufacturing equipment. It has been found that generation of impurities such as dust and gas, which are hated, so-called particles can be greatly reduced, and the present invention has been completed.

That is, the present invention
(1) By connecting the arbitrary sides of a plate-shaped heat insulating material having substantially the same rectangular shape on the front and back surfaces, the ratio of the length of the short side to the long side is about 1: 2. A plurality of heat insulating materials can be configured in combination, and the rectangular shapes of the plurality of heat insulating materials are the same or similar to each other, and the rectangular shapes of the plurality of heat insulating materials are similar to each other. When the ratio of the length of the corresponding long side and short side of the rectangle of the large heat insulating material to the long side and short side of the small heat insulating material rectangle is a multiple of 1 to 2, both are combined heat insulating materials .

As a preferred embodiment,
(2) The plate-shaped heat insulating material includes a heat insulating member and a heat insulating member cover for storing the heat insulating member, and the heat insulating member cover includes a coupling means on each side thereof, thereby connecting arbitrary sides to each other. A combined heat insulating material according to (1) above, which can be combined with a plate-shaped heat insulating material,
(3) The combined heat insulating material according to (2), wherein the coupling means includes a hole provided in the heat insulating member cover and a means that is inserted through the hole and fixes the holes.
(4) The combined heat insulating material according to any one of (1) to (3), wherein the heat insulating member has a plurality of chambers isolated or not isolated from each other in the member,
(5) The heat retaining member is a plate-like member having a plurality of holes penetrating or not penetrating in the thickness direction, and a plurality of hollow pipes are contacted with each other substantially horizontally along the length direction. A combination type heat insulating material according to any one of the above (1) to (4), which is selected from the group consisting of members bundled together or spaced apart, and members obtained by combining these members;
(6) The combined heat insulating material according to (5), wherein the maximum diameter of the plurality of holes and the hollow portions of the plurality of hollow pipes is 2 to 50 mm,
(7) The combined heat insulating material according to (5), wherein a maximum diameter of the plurality of holes and a hollow portion of the plurality of hollow pipes is 5 to 30 mm,
(8) The combined heat insulating material according to any one of (1) to (7), wherein the plate-shaped heat insulating material is formed of a foldable material,
(9) The combined heat insulating material according to any one of (1) to (8), wherein the thickness of the plate-shaped heat insulating material is 3 to 30 mm,
(10) The combined heat insulating material according to any one of (1) to (8), wherein the thickness of the plate-shaped heat insulating material is 3 to 20 mm,
(11) The longest rectangular side of the largest heat insulating material among the plurality of heat insulating materials is 1,800 mm, and the short side is 900 mm, according to any one of (1) to (10) above. Combination heat insulating material,
(12) The combined heat insulating material according to any one of (2) to (11), wherein the heat insulating member is made of aluminum or an aluminum alloy having a honeycomb structure,
(13) The combination type heat insulating material according to any one of (2) to (12), wherein the heat insulating member cover is made of a fluororesin, an aromatic polyamide resin, or a polyphenylenebenzobisoxazole fiber (PBO fiber). Can be mentioned.

Since the combination type heat insulating material of the present invention is remarkably suitable for heat insulation (insulation) in a narrow space where piping and devices are intricately complicated, heat insulation of the piping and devices in such a narrow space is remarkably simple and inexpensive. Not only can it be implemented, it can easily be adapted to the dimensions of various pipes and devices. Moreover, since it is compact and can exhibit a high heat insulation (heat insulation) effect, an appropriate heat insulation effect can be achieved even in a narrow space where a conventional heat insulation material could not achieve a sufficient heat insulation effect. In addition, the combined heat insulating material of the present invention can be easily made of a material that does not generate so-called particles, and thus is suitable for heat insulation of piping and devices for semiconductor manufacturing apparatuses.

FIG. 1 is a plan view of one embodiment of the combined heat insulating material of the present invention. FIG. 2 is a schematic view showing an example of the fixing means for the combined heat insulating material of the present invention. FIG. 3 is a schematic view showing an embodiment of the combined heat insulating material of the present invention, which includes a heat insulating member and a heat insulating member cover. FIG. 4A is a schematic view showing an example of a heat retaining member having a plurality of chambers (columnar chambers) that are isolated from each other or not isolated from each other. FIG. 4B is a schematic view showing an example of a heat retaining member having a plurality of chambers (columnar and substantially triangular columnar chambers) that are isolated or not isolated from each other. FIG. 4C is a schematic view showing an example of a heat retaining member having a plurality of chambers (honeycomb structure, substantially regular hexagonal columnar chambers) that are isolated or not isolated from each other. FIG. 4D is a schematic view showing an example of a heat retaining member having a plurality of chambers (hexagonal columnar chambers) that are isolated or not isolated from each other. FIG. 4E is a schematic view showing an example of a heat retaining member having a plurality of chambers (pipe-like chambers, which are bundled by bringing pipes into contact with each other) which are isolated or not isolated from each other. FIG. 4 (f) is a schematic view showing an example of a heat retaining member having a plurality of chambers (pipes-like chambers, pipes bundled at intervals) isolated from each other or not isolated from each other. . FIG. 4G is a schematic view showing an example of a heat retaining member having a plurality of chambers (corrugated chambers) that are isolated or not isolated from each other.

A plan view of one embodiment of the combined heat insulating material of the present invention is shown in FIG. 1 shows three types of large, medium and small plate-shaped heat insulating materials (1, 1 ′, 1 ″) constituting the combined heat insulating material (A). Of course, the combined type of the present invention In the heat insulating material (A), the combination of the plate-shaped heat insulating material (1) is arbitrary, and any number of plate-shaped heat insulating materials (1, 1 ′, 1 ″) having a predetermined shape can be combined. Here, the two front and back surfaces of each plate-shaped heat insulating material (1, 1 ′, 1 ″) are the length of the short side (2, 2 ′, 2 ″) and the long side (3, 3 ′, 3 ″). The ratio of the length of the short side (2, 2 ′, 2 ″) and the long side (3, 3 ′, 3 ″) is approximately 1 in this way. By being a pair of rectangles, it is possible to connect and combine the plate-shaped heat insulating materials (1, 1 ′, 1 ″) appropriately and easily. In addition, the rectangular shapes of the plurality of plate-shaped heat insulating materials used for the combination may be the same or similar to each other. As a result, it is possible to appropriately and easily cope with pipes and devices having arbitrary dimensions. Here, when the rectangular shapes of the plurality of plate-shaped heat insulating materials are similar to each other, the long side and the short side of the large heat insulating material corresponding to the long side and the short side of the small heat insulating material correspond to the long side and the short side of the large heat insulating material. It is necessary that the length ratio is a multiple of 1: 2. In FIG. 1, a rectangular plate-shaped heat insulating material (1 ') having an intermediate size with respect to the rectangular long side (3 ") and short side (2") of the smallest plate-shaped heat insulating material (1 "). The ratio of the length of the corresponding long side (3 ′) and short side (2 ′) is 1 to 2 (a multiple of 2), and the rectangular plate-shaped heat insulating material (1 ″) is rectangular. The ratio of the length of the corresponding long side (3) and short side (2) of the rectangle of the largest plate-shaped heat insulating material (1) to the long side (3 ") and the short side (2") are both 1: 4 (a multiple of 2). In addition, the corresponding long length of the rectangular plate-shaped heat insulating material (1) relative to the long side (3 ') and the short side (2') of the medium-sized plate-shaped heat insulating material (1 ') The ratio of the length of the side (3) and the short side (2) is 1 to 2 (a multiple of 2). Although not shown in FIG. 1, if desired, a plate-shaped heat insulating material having a ratio of the corresponding long side and short side of the rectangle of 1: 8, 1:16, 1:32, etc. should be used. You can also. The ratio of the corresponding long side and short side length of the large heat insulating material rectangle to the long side and short side of the small heat insulating material rectangle is preferably 1 to 2 ⁿ . Here, n is an integer greater than or equal to 1, Preferably it is an integer of 1-5, More preferably, it is an integer of 1-3. The combination of the plurality of plate-shaped heat insulating materials is carried out by connecting arbitrary sides of each plate-shaped heat insulating material.

There is no particular limitation on the method of connecting the plate-shaped heat insulating materials (1, 1 ′, 1 ″) shown in FIG. 1. For example, each of the plate-shaped heat insulating materials (1, 1 ′, 1 ″) This can be achieved by installing coupling means on the sides and connecting arbitrary sides of each plate-shaped heat insulating material (1, 1 ′, 1 ″). The coupling means is shown in FIG. Thus, for example, a hole (4, 4 ′, 4 ″) is appropriately provided on each side, and fixing means for inserting the hole (4, 4 ′, 4 ″), for example, a pin, a split pin, a butterfly The holes (4, 4 ′, 4 ″) can be fixed to each other with screws, rivets, strings, or the like. Alternatively, the strings can be attached to each side, and the strings can be joined together. FIG. 2 shows an example of fixing means, in which the holes (4, 4 ′) provided on each side of the plate-shaped heat insulating material (1, 1 ′) are fixed by the pins (5), And the schematic of a pin (5) is shown. By inserting the pins (5) into the holes (4, 4 ') in this way, the plate-shaped heat insulating materials (1, 1') can be connected with one touch. In the plate-shaped heat insulating material (1, 1 ′, 1 ″) shown in FIG. 1, the holes (4, 4 ′, 4 ″) are formed by the plate-shaped heat insulating materials (1, 1 ′, 1 ″). Of course, it is arranged so that it can be combined and combined efficiently.Of course, holes (4, 4 ', 4 ″) can also be provided. As shown in FIG. 1, it is preferable to provide holes (4, 4 ′, 4 ″), which can reduce the number of holes (4, 4 ′, 4 ″) as much as possible, thereby reducing costs. Can be planned. In actual use, when the plate-shaped heat insulating materials (1, 1 ′, 1 ″) are joined to each other, they are used with the front and back surfaces of the plate-shaped heat insulating materials reversed, or rotated 180 degrees. The plate-like heat insulating material (1, 1 ′, 1 ″) shown in FIG. 1 is cut into a half of its long side. A line (9, 9 ′, 9 ″) can also be provided. When the pipes and the apparatus are kept warm, they can be cut from the cut line (9, 9 ′, 9 ″) as necessary.

It is preferable that the heat insulating material includes a heat insulating member and a heat insulating member cover for storing the heat insulating member. Here, the heat insulation (heat insulation) member is generally referred to as a heat insulation (heat insulation) material, and mainly achieves heat insulation (heat insulation) of pipes and devices. The heat insulating member cover covers the heat insulating (heat insulating) member. Of course, the heat retaining member cover may be able to achieve heat retaining (heat insulation) of the pipes and devices, like the heat retaining material. In the present invention, the heat retaining member is not only one that is completely stored in a so-called bag-shaped heat retaining member cover, but only one of the front and back surfaces or the front and back surfaces is covered with the heat retaining member cover. Including things. Of course, the heat insulating material of the present invention can be constituted by only the heat insulating member without using the heat insulating member cover. When using the heat insulating member cover, it is preferable that the heat insulating member cover is provided with a coupling means on each side thereof, thereby connecting arbitrary sides and combining plate-shaped heat insulating materials. it can. FIG. 3 is a schematic view showing an embodiment of the combined heat insulating material of the present invention, which includes a heat insulating member and a heat insulating member cover. In FIG. 3, the top is a plan view and the bottom is a cross-sectional view along the line aa. The heat retaining member (10) is completely stored in the heat retaining member cover (11). Moreover, as shown in FIG. 3, it is preferable that the heat insulating member cover (11) is formed so as to protrude at the bottom of the heat insulating material. Thereby, the coupling | bonding between several combination type heat insulating materials can be implemented easily and simply. Moreover, in the illustrated heat insulating member cover (11), the whole heat insulating material can be easily bent to the surface side where the heat insulating member cover protrudes.

In the present invention, the size of the plate-shaped heat insulating material can be appropriately selected depending on the piping and device to be kept warm. Preferably, the longest rectangular side of the largest plate-shaped heat insulating material among the plurality of plate-shaped heat insulating materials is 1,600 to 2,000 mm, and the short side is 800 to 1,000 mm, more preferably. The long side of the rectangular shape of the largest plate-shaped heat insulating material is 1,750 to 1,850 mm, the short side is 875 to 925 mm, and most preferably, the long side of the rectangular shape of the largest plate-shaped heat insulating material is It is about 1,800 mm and the short side is about 900 mm. If the above upper limit is exceeded, handling in the work becomes troublesome and the response to a narrow space may be deteriorated. If the temperature is less than the above lower limit, it may be necessary to combine a large number of plate-shaped heat insulating materials at the time of heat retention, and the operation becomes complicated. By making the above-mentioned particularly preferable dimensions, both work and economy are good. Further, the thickness of the plate-shaped heat insulating material is preferably 3 to 30 mm, more preferably 3 to 20 mm. If the above upper limit is exceeded, for example, it may not be easy to bend when it is installed in a pipe or the like, and if it is less than the above lower limit, a sufficient heat retaining effect may not be achieved. Here, the heat insulating member constituting the plate-shaped heat insulating material depends on various conditions of the pipe and the device to be kept warm, for example, the temperature of the pipe and the device, the degree of heat insulation, the contents of the pipe and the device, the use environment, etc. The material, shape, and the like may be selected as long as they can form a plate shape, and when stored in a heat retaining member cover, the plate shape as a whole can be formed. If there is no particular limitation. For example, metal such as paper, wood, aluminum or aluminum alloy (for example, JIA A 6063T1), ceramic such as alumina, silica alumina, silicon, glass, synthetic resin, etc., and the shape is not particularly limited. , Fiber, felt, mat, sponge, tubular, honeycomb, paper and the like. Similarly, the heat insulation member cover is also appropriately selected depending on various conditions of the pipes and devices to be kept warm, for example, the temperature of the pipes and devices, the degree of heat insulation, the contents of the pipes and devices, the use environment, etc. The material, shape, etc. are arbitrary. For example, fluorine resin fiber, polyamide fiber containing aromatic polyamide resin, polyphenylene benzobisoxazole fiber (PBO fiber), synthetic fiber such as polyester fiber, inorganic fiber such as glass fiber, metal fiber, carbon fiber, natural rubber and various kinds of fibers A synthetic rubber, vinyl fiber or the like molded into a cloth shape can be used. The plate-shaped heat insulating material, and the heat insulating member and the heat insulating member cover for storing the heat insulating material are arbitrarily selected from these materials and shapes, but are preferably bendable materials and shapes. Thereby, it can respond | correspond favorably to piping, an apparatus, etc.

It is preferable that the heat insulating member constituting the plate-shaped heat insulating material in the combined heat insulating material of the present invention has a plurality of chambers which are isolated or not isolated from each other in the member. By having the chamber, the air trapped therein effectively exhibits a heat retaining effect. The plurality of chambers are preferably isolated from one another. Thereby, the convection of the air between several chambers is restrict | limited, Thereby, the more effective heat retention effect can be achieved. The plurality of chambers may not be isolated from each other, but it is preferable that the air flow between the chambers is restricted as much as possible. Further, it is more preferable that each chamber is reduced in pressure or vacuum.

4A to 4G are schematic views illustrating a heat retaining member having a plurality of chambers that are isolated from each other or are not isolated from each other. 4A to 4G, the top is a plan view and the bottom is an AA cross-sectional view. FIG. 4 (a) shows a substantially circular hole penetrating from the front surface to the back surface of the plate-shaped heat retaining member (6). Of course, the shape of the hole is not limited to a substantially circular shape, but may be an elliptical shape, an oval shape, a polygonal shape such as a triangle, a quadrilateral, or any other shape. The hole does not necessarily have to penetrate from the front surface to the back surface, and it is sufficient that a plurality of chambers (7) isolated or not isolated from each other are formed. The hole can be produced by mechanically drilling the plate-like heat retaining member (6) with, for example, a punch. The material of the plate-shaped heat retaining member (6) is preferably ceramic (for example, ceramic paper), aluminum, or an aluminum alloy (for example, JIA A 6063T1). For example, if synthetic resin is used as the material, for example, a sponge-like or mat-like member is used, there are innumerable holes in the plate-like heat retaining member (6). (7) It is difficult to completely isolate each other. However, since it is possible to prevent air convection in the plurality of chambers (7) as much as possible, a good heat retaining effect can be exhibited. In addition, when a synthetic resin is used, processing such as drilling is easy. FIG. 4B shows a case where a substantially circular hole penetrates from the front surface to the back surface of the plate-like heat retaining member 6 as in FIG. The plate-shaped heat retaining member (6) is a stack of a plurality of tubular objects bundled horizontally in the length direction, and then the length direction of the tubular material according to the thickness of the heat retaining member (6). It was produced by cutting along a plane perpendicular to the surface. Therefore, a plurality of small chambers (7) each having a substantially triangular shape formed in contact with each tubular object are also provided at the same time. The plate-like heat retaining member (6) can be easily and inexpensively manufactured by extrusion molding. As the material of the plate-shaped heat retaining member (6), for example, those produced by using a metal such as aluminum or aluminum alloy (for example, JIA A 6063T1) have good airtightness between the chambers. A plurality of chambers can be formed that are almost completely isolated from one another. FIG. 4 (c) shows a so-called honeycomb structure in which substantially regular hexagonal holes penetrate from the front surface to the back surface of the plate-shaped heat retaining member (6). The plate-like heat retaining member (6) can be manufactured by a normal honeycomb manufacturing method. For example, an adhesive is applied to a surface of a thin plate of a predetermined material at a predetermined interval, and a plurality of these are stacked and then pressed to adhere to each other. Then, the thin plate is made to match the thickness of the heat retaining member (6). It was produced by cutting along a plane perpendicular to the plane. Therefore, it can be manufactured easily and inexpensively as in (b). The material of the plate-shaped heat retaining member (6) is preferably a metal such as aluminum or an aluminum alloy (for example, JIA A 6063T1). If this material is used, the airtightness between the chambers is good, and a plurality of chambers that are almost completely isolated from each other can be formed as described above. In addition, the plate-shaped heat retaining member (6) having the honeycomb structure can be used while the hexagonal portion is contracted without being greatly opened so as to become a regular hexagon as shown in FIG. 4 (d). Of course, the degree of opening of the hexagonal portion is not limited to the state shown in FIG. 4D, and can be arbitrarily adjusted. Thereby, the plate-shaped heat retaining member (6) can be easily bent in the direction of the arrow in FIG. 4 (d). The plate-shaped heat retaining member (6) shown in FIG. 4 (e) is a bundle of a plurality of hollow pipes brought into contact with each other substantially horizontally along the length direction thereof. A plurality of chambers (7) isolated or not isolated from each other exist along the length of the hollow pipe. As the material of the plate-shaped heat retaining member (6), for example, a material produced using a metal such as aluminum or an aluminum alloy (for example, JIA A 6063T1) has good airtightness between the chambers and is almost completely A plurality of chambers isolated from each other can be formed. The plate-shaped heat retaining member (6) shown in FIG. 4 (f) is provided with grooves (12) at predetermined intervals on the flat plate (13), and a hollow pipe (8) is fitted into the groove (12). It is complicated. In this aspect, the hollow pipes (8) are not in contact with each other, and are bundled at a predetermined interval through the groove (12) existing in the flat plate (13). As the hollow pipe (8), one pipe may be used continuously as shown in FIG. 4 (f), or it is divided in the middle of every groove or every plurality of grooves. A plurality of pipes may be used. The longer the hollow pipe (8) is, the better, from the viewpoint of the heat retaining effect. Moreover, as shown in FIG. 4 (f), it is preferable that the hollow pipe (8) protrudes from the upper part of the groove (12) provided at a predetermined interval on the flat plate (13). Thus, when the plate-shaped heat retaining member (6) is stored in the heat retaining member cover (11) (shown by a broken line for convenience), the heat retaining member cover (11), the hollow pipe (8), and the flat plate An air gap, that is, an isolated or non-isolated chamber (7) is formed between (13) and a further heat retaining effect can be achieved. The material of the flat plate (13) and the hollow pipe (8) is not particularly limited, but the flat plate (13) is made using a metal such as aluminum or an aluminum alloy (for example, JIA A 6063T1). Moreover, it is preferable that the hollow pipe (8) is made of a sleeve knitted with glass fiber or impregnated with silicon. The plate-shaped heat retaining member (6) shown in FIG. 4 (g) is prepared by, for example, stacking a plurality of corrugated cardboard sheets and then cutting to a thickness of the plate-shaped heat retaining member (6). Can do. As the material, in addition to paper such as corrugated cardboard, metal such as ceramic (for example, ceramic paper), aluminum or aluminum alloy (for example, JIA A 6063T1) can also be used. In the present invention, a plurality of various heat retaining members as described above can be used in an overlapping manner. For the superposition, the same type of heat insulating members may be used, or different types of heat insulating members may be used. Here, the maximum diameter of the holes constituting the plurality of chambers is preferably 2 to 50 mm, more preferably 5 to 30 mm. If the upper limit is exceeded, a high heat retention effect may not be achieved, and if it is less than the lower limit, the production of a plurality of chambers becomes complicated, resulting in high costs.

In order to improve the isolation between a plurality of chambers, for example, in the case of the heat insulating member shown in FIG. 4A, these heat insulating members are made of a plate-like material made of the same or different material having no holes. It can also be attached to the front and back surfaces of the heat retaining member. In this case, the heat retaining member attached to the front and back surfaces can function as a heat retaining member cover. Of course, the same applies to the other heat retaining members shown in FIG. Preferably, these heat retaining members are housed in a heat retaining member cover. As described above, the heat retaining member may be completely stored in a so-called bag-shaped heat retaining member cover, or only one of the front and back surfaces or the front and back surfaces is covered with the heat retaining member cover. Also good. The plurality of chambers existing in the heat insulating member can be effectively isolated by the heat insulating member cover. For example, in the heat retaining member shown in FIGS. 4 (c) and (d), the heat retaining member is completely stored in a bag-shaped heat retaining member cover, which is installed in a pipe and a device. When fixed, the bag-shaped heat insulating member cover is brought into close contact with the heat insulating member, and the plurality of chambers can be effectively isolated. Of course, multiple rooms need not be completely isolated. Thereby, the convection of the air between each chamber can be restrict | limited and the very favorable heat retention effect can be exhibited.

The combined heat insulating material of the present invention is particularly suitable for heat insulation of pipes and devices in a semiconductor manufacturing apparatus. Aluminum or aluminum alloy having a honeycomb structure (for example, JIA A 6063T1) is used as the heat retaining member, and fluororesin, aromatic nylon or polyphenylenebenzobisoxazole fiber (PBO fiber) is used as the heat retaining member cover. It is preferable. Thereby, generation | occurrence | production of impurities, such as dust and gas remarkably disliked with a semiconductor manufacturing apparatus etc., and what is called a particle can be reduced significantly.

If the combination type heat insulating material of the present invention is used, it is possible to efficiently insulate (insulate) various types of piping and devices in various facilities, for example, manufacturing facilities. During the heat insulation of the pipe, the elbow part can also be kept warm using the combined heat insulating material, but for the fixed elbow part, for example, a heat insulating material is prepared according to its shape and dimensions in advance, This can also be used. Of course, the combined heat insulating material of the present invention is not limited to heat insulation of piping and devices of various facilities, and can be applied to any case where heat insulation (heat insulation) is required. For example, if a frame structure of a room is prepared in advance and the combination type heat insulating material of the present invention is installed around the frame structure, a heat insulation room that is thermally isolated from the surrounding environment can be formed.

The combined heat insulating material of the present invention is remarkably suitable for heat insulation (insulation) of pipes and devices in a narrow space where piping and devices are intricately complicated, and has a high heat insulation (heat insulation) effect while being compact. Can demonstrate. Therefore, it is expected to be used greatly in a narrow space such as piping and devices of various devices. In addition, since it can be easily manufactured with a material that does not generate so-called particles, it is expected to be used for heat insulation of piping and devices of semiconductor manufacturing apparatuses and the like.

A Combination type heat insulating material 1, 1 ', 1 "Plate-shaped heat insulating material 2, 2', 2" Rectangular short side 3, 3 ', 3 "plate-shaped heat insulating material constituting the front and back surfaces of the plate-shaped heat insulating material Rectangular long side 4, 4 ', 4 "constituting the front and back surfaces of the material 5 Hole for connecting the plate-shaped heat insulating materials 5 Pin 6 for connecting the plate-shaped heat insulating materials to each other Heat insulating member 7 Isolated from each other A plurality of chambers 8 that are not isolated from each other 8 Hollow pipes 9, 9 ′, 9 ″ score line 10 heat insulation member 11 heat insulation member cover 12 groove 13 flat plate

Claims (8)

Combining a plurality of plate-shaped heat insulating materials having the same rectangular shape on the front and back surfaces, the ratio of the length of the short side to the long side is about 1: 2, by connecting the arbitrary sides to each other. When the rectangular shapes of the plurality of heat insulating materials are the same or similar to each other, and the rectangular shapes of the plurality of heat insulating materials are similar to each other, they are small. A combination type heat insulating material in which the ratio of the corresponding long side and short side length of the large heat insulating material rectangle to the rectangular long side and short side of the heat insulating material is a multiple of 1: 2. The plate-shaped heat insulating material includes a heat insulating member and a heat insulating member cover for storing the heat insulating member, and the heat insulating member cover includes a coupling means on each side thereof, thereby connecting arbitrary sides, The combined heat insulating material according to claim 1, wherein a plate-shaped heat insulating material can be combined. The combined heat insulating material according to claim 1 or 2, wherein the heat insulating member has a plurality of chambers isolated or not isolated from each other in the member. The heat retaining member is a plate-like member having a plurality of holes penetrating and / or not penetrating in the thickness direction, and a plurality of hollow pipes are brought into contact with each other substantially horizontally along the length direction. The combined heat insulating material according to any one of claims 1 to 3, which is selected from the group consisting of a member bundled with a gap between them or a member obtained by combining these members. The combined heat insulating material according to claim 4, wherein a maximum diameter of the plurality of holes and a hollow portion of the plurality of hollow pipes is 2 to 50 mm. The combined heat insulating material according to any one of claims 1 to 5, wherein the plate-shaped heat insulating material is made of a foldable material. The combination type heat insulating material according to any one of claims 1 to 6, wherein the plate-shaped heat insulating material has a thickness of 3 to 30 mm. The heat insulating member is made of aluminum or an aluminum alloy having a honeycomb structure, and the heat insulating member cover is made of fluororesin, aromatic nylon or polyphenylene benzobisoxazole fiber (PBO fiber). Combination type heat insulating material as described in one.

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