JP2013052489A - Machine tool - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a machine tool capable of effectively suppressing thermal deformation amount during processing by a simple configuration and control.SOLUTION: The machine tool includes: a first bed part for supporting a spindle structure 4; a second bed part for supporting a tool mounting structure 8; and a third bed part interconnecting the first and second bed parts and configured by a connecting pipe frame structure. One end of the tool mounting structure 8 is supported between a pair of first upper connecting blocks 68, 70 located on one end side of an upper connecting frame 56 of the connecting pipe frame structure, and one end of the spindle structure 4 is supported between a pair of second upper connecting blocks 72, 74 located on the other end side of the upper connecting frame 56. Thermal deformation correction means 86 are installed in the pair of first upper connecting blocks 68, 70 to correct thermal deformation of the connecting pipe frame structure on the basis of a temperature difference between the first upper connecting blocks 68, 70.

Description

  The present invention relates to a machine tool such as an NC lathe.

  In an NC lathe that is a typical machine tool, the bed main body that supports the main shaft portion and the tool post is generally a cast structure made of cast iron or a sheet metal structure made of steel plate welding. In the field of NC lathes in recent years, in order to improve the rigidity for speeding up moving slides due to the demand for high-speed machining, and for vibration countermeasures and thermal deformation countermeasures associated with the demand for high-precision machining, Reinforcing ribs are provided on the cast structure (or sheet metal structure) of the bed body, or the bed body is made thicker, and the bed body tends to become larger and heavier.

  On the other hand, in the field of NC lathes and the like, there is an increasing demand for downsizing in order to reduce the installation area. To satisfy the conditions for reducing the size and weight of the bed body while ensuring high rigidity. It is a conflict and it is difficult to eliminate all these problems.

  Therefore, as one means for solving such a problem, there has been proposed one in which the bed body is a pipe frame structure (see, for example, Patent Document 1). The bed body of the machine tool connects the first bed portion for supporting the main spindle structure, the second bed portion for supporting the tool mounting structure, and the first bed portion and the second bed portion. And at least the third bed portion is configured with a pipe frame structure (the first to third bed portions are also disclosed with a pipe frame structure). The pipe frame structure of the third bed part is an upper frame in which four upper connection pipes are connected in a rectangular shape with four upper connection blocks, and four lower connection pipes in a rectangular shape with four lower connection blocks. A lower frame connected in shape, a connection pipe connecting each upper connection block of the upper frame and a corresponding lower connection block of the lower connection frame, a pair of upper connection blocks on one end side of the upper frame, and One end portion of the tool mounting structure is supported on an intermediate block-like member provided on the upper connecting pipe that connects the pair of upper connecting blocks, and a pair of upper connecting blocks on the other end side of the upper frame, and these One end portion of the main shaft structure is supported by an intermediate block-like member provided on the upper connecting pipe that connects the pair of upper connecting blocks.

  And in order to correct | amend the distortion by the thermal deformation of a 3rd bed part, in a tool attachment structure side, a pair of heating / cooling means (for example, an upper connection pipe connecting the pair of upper connection blocks on one end side of the upper frame) (Peltier element) is provided (specifically, one heating / cooling means is provided between one connection block and the intermediate block member, and the other is provided between the other connection block and the intermediate block member). In addition, on the main shaft structure side, a pair of heating / cooling means (for example, a Peltier element) is connected to an upper connecting pipe that connects a pair of upper connecting blocks on the other end side of the upper frame. (Specifically, one heating / cooling means is provided between one connecting block and the intermediate block-shaped member, and the other connecting block and intermediate block-shaped member are provided. The other heating and cooling means are provided between).

  Further, in order to suppress the influence of vibration during machining, on the tool mounting structure side, each upper connection block on one end side of the upper frame is provided with vibration means, and on the main spindle structure side, the upper frame Excitation means is provided in each upper connection block on the other end side.

JP 2008-296312 A

  The machine tool described above has the following problems to be improved. First, in order to correct the amount of thermal deformation, a pair of heating / cooling means is provided on the upper connection pipe on the tool mounting structure side, and a pair of heating / cooling means is provided on the upper connection pipe on the spindle structure side, for a total of 4 Since one heating / cooling means is provided, the structure becomes complicated and the control becomes complicated, and further improvement has been desired.

  Secondly, in order to suppress vibration during processing, vibration means are provided in each upper connecting block of the pipe frame structure of the third bed portion. With such a structure, vibration can be sufficiently suppressed. However, further improvements were desired.

  An object of the present invention is to provide a machine tool capable of effectively suppressing the amount of thermal deformation during processing with a simple configuration and control.

  Another object of the present invention is to provide a machine tool capable of machining with high accuracy while suppressing vibration during machining.

According to a first aspect of the present invention, there is provided a machine tool comprising: a spindle structure having a spindle that is rotated in a predetermined direction; a tool attachment structure to which a processing tool is attached; and the spindle structure and the tool attachment structure. A bed structure for supporting the bed structure, a first bed part for supporting the spindle structure, and a second bed part for supporting the tool mounting structure, In a machine tool comprising a third bed part connecting the first bed part and the second bed part, wherein at least the third bed part is constituted by a connection pipe frame structure,
The connection pipe frame structure has an upper connection frame in which four upper connection pipes are connected in a rectangular shape with four upper connection blocks, and four lower connection pipes in a rectangular shape with four lower connection blocks. A connected lower connecting frame; and a connecting pipe that connects each upper connecting block of the upper connecting frame and a corresponding lower connecting block of the lower connecting frame;
One end portion of the tool mounting structure is supported between a pair of first upper connection blocks on one end side of the upper connection frame of the connection pipe frame structure, and one end portion of the main shaft structure is supported by the connection pipe frame structure Are supported between a pair of second upper connecting blocks on the other end side of the upper connection frame,
At least one of the pair of first upper connecting blocks is provided with first thermal deformation correction means for correcting thermal deformation of the third bed portion, and the first thermal deformation correction means The thermal deformation of the third bed portion is corrected based on the temperature difference between the upper connecting blocks.

  In the machine tool according to claim 2 of the present invention, at least one of the pair of second upper connection blocks of the connection pipe frame structure has a second for correcting thermal deformation of the third bed portion. Thermal deformation correction means is provided, and the second thermal deformation correction means corrects thermal deformation of the third bed portion based on a temperature difference between the pair of second upper connecting blocks.

According to a third aspect of the present invention, there is provided a machine tool including a main spindle structure having a main spindle that is rotated in a predetermined direction, a tool attachment structure to which a processing tool is attached, and the main spindle structure and the tool attachment structure. A bed structure for supporting a body, the bed structure having a first bed part for supporting the spindle structure and a second bed part for supporting the tool mounting structure. And a machine tool comprising a third bed part connecting the first bed part and the second bed part, wherein at least the third bed part is configured by a connection pipe frame structure,
The connection pipe frame structure has an upper connection frame in which four upper connection pipes are connected in a rectangular shape with four upper connection blocks, and four lower connection pipes in a rectangular shape with four lower connection blocks. A connected lower connecting frame; and a connecting pipe that connects each upper connecting block of the upper connecting frame and a corresponding lower connecting block of the lower connecting frame;
One end portion of the tool mounting structure is supported between a pair of first upper connection blocks on one end side of the upper connection frame of the connection pipe frame structure, and one end portion of the main shaft structure is supported by the connection pipe frame structure Are supported between a pair of second upper connecting blocks on the other end side of the upper connection frame,
Between the upper connection frame and the lower connection frame of the connection pipe frame structure, there is a relative relationship between the pair of first upper connection blocks and the pair of second upper connection blocks of the upper connection frame. It is characterized in that vibration suppressing means for suppressing vibration is interposed.

  Further, in the machine tool according to claim 4 of the present invention, the vibration suppressing means is composed of an excitation control unit for applying vibration, and the excitation control unit is connected to the upper connection of the connection pipe frame structure. Between the first upper connection block of the frame and the lower connection block on the main shaft structure side of the lower connection frame, or the second upper connection block of the upper connection frame and the lower connection frame of the connection pipe frame structure It is interposed between the lower connection block on the tool mounting structure side.

  In the machine tool according to claim 5 of the present invention, each of the pair of first upper connecting blocks of the connection pipe frame structure has a thermal deformation correction for correcting thermal deformation of the third bed portion. Means for correcting the thermal deformation of the third bed portion based on a temperature difference between the pair of first upper connecting blocks.

  In the machine tool according to claim 6 of the present invention, the tool mounting structure is a pair of first connection blocks of the pair of upper connection blocks of the upper connection frame and the pair of lower connection frames of the connection pipe frame structure. The pair of first upper connection blocks and the pair of lower connection blocks of the third bed portion constitute the second bed portion, which are attached between the blocks.

  Further, in the machine tool according to claim 7 of the present invention, the second bed portion is configured by a support pipe frame structure, and the support pipe frame structure is connected to the one end side of the connection frame structure, The tool mounting structure is supported between a pair of upper connection blocks of the upper support frame of the support pipe frame structure and a pair of upper connection blocks of the upper connection frame of the connection pipe frame structure. And

  According to the machine tool of the first aspect of the present invention, the main shaft structure is supported by the first bed part, the tool mounting structure is supported by the second bed part, and the first bed part and the second bed part are Connected via the third bed, at least the third bed portion is composed of a connection pipe frame structure, and one end portion of the tool mounting structure is a pair of first upper portions on one end side of the upper connection frame of the connection pipe frame structure. Since one end portion of the main shaft structure is supported between the connection blocks and is supported between a pair of second upper connection blocks on the other end side of the upper connection frame of the connection pipe frame structure, the tool mounting structure and the main shaft are supported. The structure is attached via this connecting pipe frame structure. In such a structure, at least one of the pair of first upper connection blocks is provided with a first thermal deformation correction unit, and the first thermal deformation correction unit is based on a temperature difference between the pair of first upper connection blocks. Since the thermal deformation of the third bed portion is corrected, the thermal deformation on the tool mounting structure side in the third bed portion is corrected with a simple configuration and control, thereby suppressing the thermal deformation of the connecting pipe frame structure (in other words, Then, the relative displacement due to thermal deformation between the tool mounting structure and the main shaft structure can be reduced), and as a result, the influence of the thermal deformation can be reduced and the workpiece can be processed with high accuracy.

  According to the machine tool of the second aspect of the present invention, at least one of the pair of second upper connecting blocks of the connection pipe frame structure is provided with the second thermal deformation correction means, and these second thermal deformation correction means. Since the thermal deformation of the third bed portion is corrected based on the temperature difference between the pair of second upper connecting blocks, the thermal deformation on the main shaft structure side in the third bed portion is also corrected with a simple configuration and control, Thereby, the thermal deformation of the connection pipe frame structure can be suppressed more effectively.

  According to the machine tool of the third aspect of the present invention, the main shaft structure is supported by the first bed portion, the tool mounting structure is supported by the second bed portion, and the first bed portion and the second bed are supported. The parts are connected via a third bed, at least the third bed part is composed of a connection pipe frame structure, and one end part of the tool mounting structure is a pair of second connection parts on one end side of the upper connection frame of the connection pipe frame structure. 1 is supported between the upper connecting blocks, and one end of the main shaft structure is supported between a pair of second upper connecting blocks on the other end side of the upper connecting frame of the connecting pipe frame structure. And the main shaft structure is attached via this connecting pipe frame structure. In such a structure, since the vibration suppressing means is interposed between the upper connection frame and the lower connection pipe frame of the connection pipe frame structure, the relative vibration generated during processing (that is, a pair of upper connection frames) The relative vibration between the first upper connecting blocks and the pair of second upper connecting blocks) can be suppressed by the vibration suppressing means, and as a result, the influence of vibration is reduced and the workpiece is processed with high accuracy. be able to.

  According to the machine tool of the fourth aspect of the present invention, the vibration suppressing means includes the vibration control unit, and the vibration control unit is connected to the first upper connection frame of the upper connection frame of the connection pipe frame structure. Since it is interposed between the block and the lower connection block on the main shaft structure side in the lower connection frame, the above-described relative vibration generated during processing can be more effectively suppressed. Depending on the generated vibration, this vibration control unit may be interposed between the second upper connecting block of the upper connecting frame of the connecting pipe frame structure and the lower connecting block of the lower connecting frame on the tool mounting structure side. it can.

  According to the machine tool of the fifth aspect of the present invention, each of the pair of first upper connecting blocks of the connection pipe frame structure is provided with the thermal deformation correction means, and the thermal deformation correction means is the pair of first Since the thermal deformation of the third bed part is corrected based on the temperature difference of the upper connecting block, vibration generated during processing can be suppressed, and distortion due to thermal deformation during processing can also be suppressed. Higher precision machining of objects is possible.

  According to the machine tool of the sixth aspect of the present invention, the tool mounting structure is provided between the pair of upper connection blocks of the upper connection frame of the connection pipe frame structure and the pair of first connection blocks of the lower connection frame. Can be conveniently applied to a configuration in which the machine tool is attached, and thereby the machine tool can be reduced in size.

  According to the machine tool of the seventh aspect of the present invention, the second bed portion is constituted by a support pipe frame structure, and the support pipe frame structure is connected to one end side of the connection frame structure. Can be applied conveniently.

The perspective view which shows 1st Embodiment of the machine tool according to this invention. The fragmentary perspective view which shows the tool attachment structure side of the machine tool of FIG. Sectional drawing which shows the vibration control unit in the machine tool of FIG. The simplified diagram which shows typically the upper connection frame of the connection pipe frame structure in the machine tool of FIG. 1, and a structure relevant to this. The block diagram which shows the control system of the machine tool of FIG. The simplified explanatory view for explaining the thermal deformation correction of the connection pipe frame structure in the machine tool of FIG. 6 is a flowchart showing control of thermal deformation amount correction by the control system of FIG. 6 is a flowchart showing vibration suppression control by the control system of FIG. 5. FIG. 9A is a diagram illustrating a detection signal of the first acceleration sensor, FIG. 9B is a diagram illustrating a detection signal of the second acceleration sensor, and FIG. 9C is a diagram illustrating the first and second acceleration sensors. It is a figure which shows the acceleration difference signal based on the detection signal of a 2nd acceleration sensor, and FIG.9 (d) is a figure which shows the vibration control signal for performing vibration control of a vibration control unit. FIG. 6 is a simplified explanatory diagram for explaining vibration suppression control (suppression of relative vibration to the left side) by the control system of FIG. 5. FIG. 6 is a simplified explanatory diagram for explaining vibration suppression control (suppression of relative vibration to the right side) by the control system of FIG. 5. The simplification figure which shows the other example of the thermal deformation correction | amendment in a connection pipe frame structure. FIG. 13 is a simplified explanatory diagram for explaining thermal deformation correction in another example of thermal deformation correction in FIG. 12. The perspective view which shows 2nd Embodiment of the machine tool according to this invention.

  Hereinafter, an embodiment of a machine tool according to the present invention will be described with reference to the accompanying drawings. First, the machine tool according to the first embodiment will be described with reference to FIGS.

  In FIG. 1, an NC lathe as an example of a machine tool includes a bed structure 2 installed on a factory floor or the like, and the bed structure 2 supports a main shaft structure 4 in a first bed portion. 6, a second bed part 10 for supporting the tool mounting structure 8, and a third bed part 12 connecting the first bed part 6 and the second bed part 10. In this embodiment, the first and third bed portions 6 and 12 are constituted by a support pipe frame structure 14 and a connection pipe frame structure 16 in which a plurality of connection pipes are connected using a plurality of connection blocks, and the second bed. 10 is constituted by a part of the connection pipe frame structure 16 of the third bed portion 12. Although it is important that at least the third bed portion 12 is composed of the connection pipe frame structure 16, a block-like support structure may be adopted for the first bed portion 6. The connection pipe frame structure 16 of the third bed portion 12 will be described later.

  The main shaft structure 4 is attached to the upper surface of the first bed portion 6 (supporting pipe frame structure 14) of the bed structure 2 as described later. The main shaft structure 4 includes a main shaft support portion 18 attached to the first bed portion 6 and a main shaft portion 20 including a main shaft (not shown). A concave portion 22 is provided in the central portion of the main shaft support portion 18 in the left-right direction (the direction from the lower right to the upper left in FIG. 1). Protruding. The main shaft portion 20 is disposed so that the lower portion thereof is accommodated in the concave portion 22 of the main shaft support portion 18, and is supported by the main shaft support portion 18 via the first slide mechanism 28 so as to be movable in the Z-axis direction (see FIG. 2). Has been.

  In this embodiment, the first slide mechanism 28 includes a right guide member 30 and a left guide member 32, and the right guide member 30 and the left guide member 32 are the upper end portions of the right side portion 24 and the left side portion 26 of the main shaft support portion 18. In addition, a pair of support blocks 34 are provided on the right side and the left side of the main shaft portion 20 with a gap in a first direction (that is, the axial direction of the main shaft) that is a direction from the lower left to the upper right in FIG. 1 (only the one provided on the right side of the main shaft portion 20 is shown in FIG. 1), and the support block 34 is movably mounted on the right guide member 30 and the left guide member 32. Is supported by the spindle support 18 so as to be movable in the first direction, that is, in the Z-axis direction, and is reciprocated in the Z-axis direction by a first drive source (not shown) such as an electric motor.

  A main shaft (not shown) is rotatably supported by the main shaft portion 20, and chuck means 36 is attached to the main shaft, and a workpiece to be processed is detachably attached to the chuck means 36. In addition, a driving source (not shown) such as an electric motor is drivingly connected to the main shaft, and the main shaft (the chuck means 36 and the workpiece integrally therewith) is rotationally driven in a predetermined direction by the action of the driving source. .

  The tool attachment structure 8 is attached to the second bed portion 10 as will be described later. The tool mounting structure 8 includes a support base 38 and a slide member 42 including a tool mounting base 40. The support base 38 is composed of a rectangular thin block member, and a slide member 42 is supported on the support base 38 via a second slide mechanism 44 so as to be movable in the X-axis direction (see FIG. 2).

  In this embodiment, the second slide mechanism 44 includes guide members 46 and 48, and the guide members 46 and 48 are disposed on the support base 38 at intervals in the vertical direction. Corresponding to the guide members 46 and 48, a pair of support blocks 50 and 52 are provided at intervals in the second direction (see FIG. 2). 48, so that the slide member 42 is movably attached to the support base 38 in the second direction (ie, from the lower right to the upper left in FIG. 1 and in the X axis direction in FIG. 2). It is supported and reciprocated in the X-axis direction by a second drive source 54 such as an electric motor.

  The tool mounting base 40 functions as a tool rest and is attached to the upper end portion of the slide member 42. A machining tool (not shown) for machining a workpiece is attached to the tool mount 40, and the workpiece attached to the chuck means 36 on the main spindle structure 4 side is used as required by the machining tool. Processed.

  Next, with reference to FIG. 2 and FIG. 3 together with FIG. 1, the third bed portion 12 of the bed structure 2, that is, the connection pipe frame structure 16 and the related configuration will be described. The illustrated connection pipe frame structure 16 includes an upper connection frame 56 and a lower connection frame 58 that are spaced apart in the vertical direction. The upper connection frame 56 and the lower connection frame 58 have substantially the same configuration, and the upper connection frame 56 will be described below. The upper connection frame 56 includes four upper connection pipes 60, 62, 64, 66 as shown in a simplified manner in FIG. 4, and the four upper connection pipes 60, 62, 64, 66 have four pieces. A rectangular upper connection frame 56 is configured by being connected to the upper connection blocks 68, 70, 72, and 74 using bolts, nuts, adhesives, and the like. For example, both ends of the upper connection pipe 60 are connected to the upper connection blocks 68 and 70 (constituting the first upper connection block) on the tool attachment structure 8 side, and both ends of the upper connection pipe 62 are connected to the upper connection block. The upper connection pipe 64 is connected to the upper connection blocks 72 and 74 (constituting the second upper connection block) on the main shaft structure 4 side, and both ends of the remaining upper connection pipe 66 are connected to each other. The upper connection blocks 70 and 74 are connected.

  The lower connection frame 58 is not shown in the figure, but is composed of four lower connection pipes connected to the four lower connection blocks in a rectangular shape using bolts, nuts, adhesives, and the like. The pair of lower connection blocks on the tool mounting structure 8 side constitutes a first lower connection block, and the pair of lower connection blocks on the main shaft structure 4 side constitutes a second lower connection block. The four upper connection blocks 68, 70, 72, 74 of the upper connection frame 56 and the four lower connection blocks of the lower connection frame 58 are connected by four connection pipes 75.

  In this embodiment, as is understood from FIGS. 1 and 2, the support base 38 of the tool mounting structure 8 has one end portion (the upper end portion in this embodiment) of the connection pipe frame structure 16 connected to the upper connection frame 56. The other end (in this embodiment, the lower end) is supported and fixed to the pair of first lower connection blocks of the lower connection frame 58, and accordingly, the first upper connection blocks 68 and 70 are supported. The pair of upper connecting blocks 68 and 70 and the pair of lower connecting blocks of the three bed parts 12 (connection pipe frame structure 16) constitute the second bed part 10.

  Further, the support pipe frame structure 14 of the first bed portion 6 has substantially the same configuration as the connection pipe frame structure 16 of the third bed portion 12, and is not given a reference number. The four upper connection pipes are configured to be connected to the four upper connection blocks in a rectangular shape using bolts, nuts, adhesives, and the like, and the lower support frame 78 includes four lower connection pipes. Is connected to the four lower connecting blocks in a rectangular shape using bolts, nuts, adhesives, etc., and the upper connecting block of the upper support frame 76 and the lower connecting block of the lower support frame 78 are connected by a connection pipe. Has been.

  As understood from FIGS. 1 and 2, a part of the first bed 6 (specifically, a pair of upper connecting blocks on the tool mounting structure 8 side of the upper support frame 76 and a tool mounting structure on the lower support frame 78) A pair of lower connecting blocks on the body 8 side and members related thereto constitute a part of the connection pipe frame structure 16 of the third bed portion 12. One end of the main shaft structure 4 is a pair of upper connection blocks (in other words, the connection pipe frame structure 16) on the tool mounting structure 8 side in the upper support frame 76 of the first bed 6 (support pipe frame structure 14). The upper connection frame 56 is supported and fixed to a pair of second upper connection blocks 72 and 74, and the other end is the tool attachment structure 8 in the upper support frame 76 of the first bed 6 (support pipe frame structure 14). It is supported and fixed to a pair of upper connecting blocks on the opposite side to the side.

  In this embodiment, the first bed portion 6 of the bed structure 2 includes a lower support pipe frame structure 80 disposed below the support pipe frame structure 14 described above, and the third bed portion 12 includes The lower support pipe frame structure 80 and the lower connection pipe frame structure 82 are attached to the installation base body 84. The lower connection pipe frame structure 82 is disposed below the connection pipe frame structure 16. Note that the lower pipe frame structure 80 and the lower connection pipe frame structure 82 may be omitted.

  In this embodiment, in relation to the connection pipe frame structure 16, there is a thermal deformation correction means 86 (which constitutes the first thermal deformation correction means) for correcting thermal deformation of the bed structure 2, particularly the third bed portion 12. Is provided. Referring to FIGS. 4 and 5, the thermal deformation correction means 86 is composed of a thermoelectric conversion element (for example, a Peltier element) as a heating / cooling means for correcting thermal deformation by heating / cooling. One Peltier element, that is, the first Peltier element 88a is attached to one first upper connecting block 68 in the upper connection frame 56 of the connection pipe frame structure 16, and the other Peltier element, that is, the second Peltier element 88b The upper connection frame 56 is attached to the other first upper connection block 70. In this embodiment, the thermal deformation correction is performed by two Peltier elements (that is, the first and second Peltier elements 88a and 88b) as described later, but either one of these Peltier elements can be omitted. .

  In relation to the first and second Peltier elements 88a and 88b, the first and second temperature sensors 90 and 92 are connected to the pair of first upper connection blocks 68 and 70 in the upper connection frame 56 of the connection pipe frame structure 16. Is provided. The first temperature sensor 90 is provided in one first upper connection block 68 of the upper connection frame 56 and detects the temperature of one upper connection block 68. The second temperature sensor 92 is provided in the other first upper connection block 70 of the upper connection frame 56 and detects the temperature of the other upper connection block 70. Detection signals from the first and second temperature sensors 90 and 92 are sent to a controller 94 for controlling the machine tool.

  In the machine tool of this form, in association with the connection pipe frame structure 16, vibration suppressing means 96 for suppressing vibration of the bed structure 2 (particularly, the third bed portion 12) is disposed. 2 and 3, the illustrated vibration suppressing means 96 includes an excitation control unit 98 that applies vibration so as to cancel generated vibration. The excitation control unit 98 is connected to the connection pipe frame structure 16. It is interposed between the upper connection frame 56 and the lower connection frame 58.

  The illustrated vibration control unit 98 includes a unit main body 100, a piezoelectric element 102 is incorporated in one end of the unit main body 100, and a fluid storage chamber 104 is defined in the other end, and the working fluid is contained in the fluid storage chamber 104. Is filled. The cross-sectional area on one end side (the side on which the piezoelectric element 102 acts) of the fluid storage chamber 104 is smaller than the cross-sectional area on the other end side (output rod 106 side) of the fluid storage chamber 104, for example, 1/2 to 1/6. By setting in this way, the output of the piezoelectric element 102 can be amplified 2 to 6 times and act on the output rod 106.

  In the illustrated form, the vibration control units 98 are provided on the left and right sides of the connection pipe frame structure 16. The right vibration control unit, that is, the first vibration control unit 98a (which includes the first piezoelectric element 102a) has an output rod 106a whose main shaft structure 4 in the lower connection frame 58 of the connection pipe frame structure 16. The lower connecting block 105 (see FIGS. 2, 10, and 11) is pivotally connected via a connecting bolt, and the connecting portion 108 a on the unit body 100 side is connected to the upper connecting frame 56 of the connecting pipe frame structure 16. It is connected to the upper connection block 68 on the tool mounting structure 8 side through a mounting bolt so as to be rotatable. Further, the left vibration control unit, that is, the second vibration control unit 98b (which includes the first piezoelectric element 102b) has an output rod 106b whose main shaft structure is in the lower connection frame 58 of the connection pipe frame structure 16. The lower connecting block 107 on the body 4 side (see FIGS. 2, 10, and 11) is pivotally connected via a connecting bolt, and the connecting portion 108 b on the unit body 100 side is connected to the upper connecting frame of the connecting pipe frame structure 16. 56 is connected to the upper connection block 70 on the tool mounting structure 8 side through a mounting bolt so as to be rotatable.

  Since it is configured in this manner, the first and second vibration control units 98a and 98b are parallel to each other diagonally upward and laterally from the main spindle structure 4 side to the tool mounting structure 8 side. It is arranged like this. Since the vibration of the third bed portion 12 (connection pipe frame structure 16) that occurs during processing occurs as a torsional vibration in the left-right direction, the first and second vibration control units 98a and 98b are arranged in this way. Therefore, the generated torsional vibration can be effectively suppressed as described later.

  Note that the arrangement of the pair of vibration control units 98a and 98b is such that the output rod 106a of the first vibration control unit 98a is connected to the tool attachment structure 8 in the lower connection frame 58 of the connection pipe frame structure 16 depending on the generated vibration mode. The connecting portion 108a on the unit main body 100 side is connected to the lower connecting block (on the right side) on the side by means of a connecting bolt so that the connecting portion 108a on the unit main body 100 side is connected to the upper connecting frame 56 on the main shaft structure 4 side. The block 72 is pivotably coupled via a mounting bolt, and the output rod 106b of the second vibration control unit 98b is coupled to the lower coupling block 58 on the tool mounting structure 8 side of the lower coupling frame 58 of the coupling pipe frame structure 16 (left side). 1), and a connecting part 1 on the unit main body 100 side. 8b is connected to the upper connection block 74 of the upper connection frame 56 of the connection pipe frame structure 16 on the main shaft structure 4 side through a mounting bolt so that the first and second vibration control units 98a and 98b are attached to the tool. You may make it arrange | position so that it may become mutually parallel in diagonally upward and the left-right direction toward the main shaft structure 4 side from the structure 8 side. In addition, although the vibration control units 98a and 98b are provided on the left and right sides of the connection pipe frame structure 16, two are not necessarily required, and one of the left and right vibration control units 98a and 98b may be omitted. A desired vibration suppressing effect can be obtained.

  In relation to the first and second vibration control units 98a and 98b, first and second acceleration sensors 110 and 112 are provided (see FIG. 2). The first acceleration sensor 110 is disposed on the main shaft portion 20 of the main shaft structure 4, and detects acceleration in the X-axis direction (see FIG. 2) due to vibration generated in the main shaft portion 20 (in other words, a workpiece). The second acceleration sensor 112 is disposed on the tool mounting base 40 of the tool mounting structure 8, and the acceleration in the X-axis direction (see FIG. 2) due to vibration generated in the tool mounting base 40 (in other words, a processing tool) is measured. Detect. Detection signals from the first and second acceleration sensors 110 and 112 are sent to the controller 94.

  Next, the control system of the machine tool will be described mainly with reference to FIG. 5. A controller 94 including a microprocessor or the like includes a first control unit 122 for performing correction control of thermal deformation, and vibration. And a second control unit 124 for suppression control. The first control unit 122 includes a temperature difference calculation unit 126, a heating signal generation unit 128, a cooling signal generation unit 130, and a memory unit 140. The temperature difference calculating means 126 calculates a temperature difference (T2−T1) with respect to the detected temperature (T1) of the first temperature sensor 90 with reference to the detected temperature (T2) of the second temperature sensor 92 on the reference temperature side, for example. The heating signal generator 122 generates a heating signal based on the detected temperature difference, and the cooling signal generator 124 generates a cooling signal based on the detected temperature difference. In the memory means 140, a map indicating the relationship between the temperature difference (T2-T1) between the detected temperatures and the supply time of the power supplied to the first and second Peltier elements 88a and 88b is registered.

  In general, the Peltier element has a larger heat generation (or cooling) effect as the amount of power flowing in a predetermined direction (or the direction opposite to the predetermined direction) increases. For this reason, the above-described map has a relationship in which the supply power supplied increases as the temperature difference between the detected temperatures increases. In this embodiment, the ratio of the supply time in one cycle of power supply increases. Data (temperature difference-supply ratio map) is registered.

  The second control unit 124 includes an acceleration difference calculation unit 142, a speed component calculation unit 144, a displacement component calculation unit 145, a control signal synthesis unit 146, an expansion signal generation unit 148, a contraction signal generation unit 150, and a memory unit 152. It is out. The acceleration difference calculation means 142 is an acceleration difference (α1−α2) (in other words, the main shaft structure 4 with respect to the detected acceleration (α2) of the second acceleration sensor 112 with reference to the detected acceleration (α1) of the first acceleration sensor 110. Relative acceleration of the tool mounting structure 8 with respect to), the speed component calculating means 144 calculates the speed component based on the acceleration difference (α2−α1) by the acceleration difference calculating means 142, and the displacement component calculating means 145 A displacement component is calculated based on the velocity component by the velocity component calculation unit 144, and the control signal synthesis unit 146 generates a control signal based on the velocity component by the velocity component calculation unit 144 and the displacement component by the displacement component calculation unit 145, The expansion signal generation means 148 generates an expansion signal based on this control signal, and the main contraction signal generation means 150 generates a contraction signal based on this control signal. It is formed. The memory 152 stores a map indicating the relationship between the relative displacement and relative speed based on the acceleration difference (α2−α1) of the detected acceleration and the magnitude of the voltage applied to the first and second piezoelectric elements 102a and 102b. Yes.

  In general, a piezoelectric element expands (or contracts) when a positive voltage (or negative voltage) is applied, and the amount of expansion (or contraction) increases as the applied voltage increases. For this reason, the above-mentioned map is registered with data (speed / displacement-voltage map) in which the applied voltage increases as the relative velocity and relative displacement calculated from the acceleration difference of the detected acceleration increases. Yes.

  Next, mainly with reference to FIGS. 4 to 7, the correction control of the thermal deformation amount by the thermal deformation correction means 86 will be described. When the correction control of the thermal deformation amount is started, the process proceeds from step S1 to step S2, and the first temperature sensor 90 detects the temperature of one of the first upper connection blocks 68 of the connection pipe frame structure 16, and the second temperature sensor 92. Detects the temperature of the other first upper connecting block 70 of the connection pipe frame structure 16, and the detection signals from the first and second temperature sensors 90 and 92 are sent to the controller 94. When the detection signal is sent in this way, the process proceeds to step S3, and the temperature difference calculation means 126 of the first control unit 94 performs the first operation based on the detection temperature (second detection temperature) of the second temperature sensor 92. A temperature difference (T2-T1) from the detected temperature (first detected temperature) of the temperature sensor 90 is calculated.

  If the temperature difference is a negative value (in other words, the first detected temperature> the second detected temperature), the process proceeds from step S4 to step S5, and the heating signal generating means 128 is based on the detected temperature difference. The heating signal is generated, the heating signal is sent to the second Peltier element 88b, the second Peltier element 88b is heated, and the heat from the second Peltier element 88b is connected to the upper via the first upper connecting block 70. It is transmitted to the pipe 60. In addition, the cooling signal generation unit 130 generates a cooling signal based on the detected temperature difference, the cooling signal is supplied to the first Peltier element 88a, the first Peltier element 88a is cooled, and the first Peltier element 88a. Is transmitted to the upper connection pipe 60 through the first upper connection block 68.

  For example, as shown in FIG. 6, when the drive source 54 of the tool mounting structure 8 is disposed on one first upper connection block 68 side, the heat from the drive source 54 is transferred to the other first upper connection block 68. It is easier to transmit to one first upper connecting block 68 than the block 70, and the temperature of one first upper connecting block 68 tends to be higher than the temperature of the other first upper connecting block 70. In this case, one end side of the upper connection pipe 60 (side connected to the first upper connection block 68) has a larger thermal expansion than the other end side (side connected to the other first upper connection pipe 70). The center axis P2 of the tool mounting structure 8 is somewhat displaced toward the first upper connecting block 68 with respect to the center axis P1 of the main shaft structure 4, and this causes the machining of the workpiece. Accuracy is reduced.

  In such a case, as described above, the heating signal from the heating signal generating unit 128 is supplied to the second Peltier element 88b to heat the first upper connecting block 70 and the cooling from the cooling signal generating unit 130. The signal is sent to the first Peltier element 88a, the first Peltier element 88a is cooled, and the temperature difference between the pair of first upper connecting blocks 68 and 70 is controlled. Accordingly, one end side of the upper connection pipe 60 is somewhat contracted, while the other end side is somewhat expanded. Thus, by performing correction control of the amount of thermal deformation, the central axis P2 of the tool mounting structure 8 is the main shaft structure. It returns to the direction of eliminating the deviation toward the center axis P1 of the body 4, and thus it is possible to process the workpiece with high accuracy while suppressing the influence of thermal deformation.

  On the other hand, if this temperature difference is a positive value (in other words, second detection temperature> first detection temperature), the process proceeds from step S4 to step S7 to step S8, and the heating signal generation means 128 detects this detection. A heating signal is generated based on the temperature difference, the heating signal is sent to the first Peltier element 88a, the first Peltier element 88a is heated, and the heat from the first Peltier element 88a is one of the first upper connecting blocks. It is transmitted to the upper connecting pipe 60 via 68. The cooling signal generation means 130 generates a cooling signal based on the detected temperature difference, and the cooling signal is sent to the second Peltier element 88b, the second Peltier element 88b is cooled, and the second Peltier element 88b. Is transmitted to the upper connection pipe 60 via the other first upper connection block 70. Accordingly, the temperature of the pair of first upper connection blocks 68 and 70 is controlled to be equal by the first and second Beltier elements 88a and 88b, whereby one end side of the upper connection pipe 60 is somewhat expanded. The other end side is somewhat shrunk and corrected so that the deviation between the central axis P1 of the main spindle structure 4 and the central axis P2 of the tool mounting structure 8 is eliminated.

  If this temperature difference is zero (in other words, the second detected temperature = the first detected temperature), the heating signal generating means 128 does not generate a heating signal, and the cooling signal generating means. 130 does not generate a cooling signal, and proceeds from step S4 to step S6 through step S7. The above-described thermal deformation correction control is performed until the control is completed.

  In this embodiment, the temperature of the pair of upper connecting blocks 68 and 70 (the first and second detection temperatures of the first and second temperature sensors 90 and 92) becomes equal (in other words, the first and second detection temperatures). For example, the temperature of one upper connection block 68 (the first detected temperature of the first temperature sensor 90) is the same as that of the other first upper connection block 70. It is configured to be higher (or lower) than the temperature (second detection temperature of the second temperature sensor 92) (in other words, the temperature difference between the first and second detection temperatures is the predetermined temperature difference). Also good.

  Further, instead of these controls, the temperature difference between the temperatures of the pair of upper connecting blocks 68 and 70 (the first and second detected temperatures of the first and second temperature sensors 90 and 92) is within the allowable temperature range. You may comprise. In this case, for example, when the temperature difference from the first temperature sensor based on the temperature detected by the second temperature sensor 92 is within the allowable temperature range, the heating signal generator 128 does not generate a heating signal, and the cooling signal The generation means 130 does not generate a cooling signal, and in FIG. 7, the process proceeds from step S4 to step S7 to step S6, but this temperature difference is lower than the allowable temperature range (that is, the first temperature sensor 90). When the detected temperature is higher than the detected temperature of the second temperature sensor 92 beyond the allowable temperature range), the cooling signal generating unit 130 generates a cooling signal based on the detected temperature difference, and the cooling signal is the first temperature signal. The heating signal generation means 128 generates a heating signal based on the detected temperature difference, and the heating signal is supplied to the second Peltier element 8a. 7, the process proceeds from step S4 to step S5 in FIG. 7, and this temperature difference is higher than the allowable temperature range (that is, the detected temperature of the second temperature sensor 92 is the detected temperature of the first temperature sensor 90). The cooling signal generated by the cooling signal generating means 130 is sent to the second Peltier element 88b, and the heating signal generated by the heating signal generating means 128 is The first Peltier element 88a is fed, and in FIG. 7, the process proceeds from step S4 to step S7 to step S8.

  Next, vibration suppression control by the vibration suppression means 96 will be described mainly with reference to FIGS. 8 to 11 together with FIGS. When vibration suppression control is started, the process proceeds from step S11 to step S12, where the first acceleration sensor 110 is in the X-axis direction (FIGS. 2, 10, and 11) on the main shaft structure 4 side (specifically, main shaft portion 20). The second acceleration sensor 112 detects the acceleration in the X-axis direction on the tool mounting structure 8 side (specifically, the tool mounting base 40), and the first and second acceleration sensors 110 are detected. , 112 are sent to the controller 94.

  When the detection signal is thus sent, the process proceeds to step S13, where the acceleration difference calculation means 142 of the second control unit 124 uses the second acceleration sensor based on the first detected acceleration (α1) of the first acceleration sensor 110. An acceleration difference from the second acceleration value (α2) of 112 is calculated. For example, the waveform of the first detected acceleration (α1) of the first acceleration sensor 110 is as shown in FIG. 9A, and the waveform of the second detected acceleration (α2) of the second acceleration sensor 112 is shown in FIG. 9B. As shown in FIG. 9C, the waveform of the acceleration difference (α1-α2) by the acceleration difference calculation means 142 is the same as that of FIG. 9A and the waveform of FIG. 9B (inverted waveform). ) And the combined waveform.

  In step S14, the speed component calculation unit 144 calculates a relative speed component based on the calculated acceleration difference (α1-α2) of the acceleration difference calculation unit 142. The speed component by the speed component calculating means 114 is calculated by integrating the calculated acceleration difference, and the calculated relative speed component waveform is, for example, as shown in FIG. Thereafter, the displacement component calculating means 145 calculates the relative displacement by integrating the relative velocity component (step S15), and the calculated relative displacement is as shown in FIG. 9 (e), for example.

  Thereafter, the process proceeds to step S16, where the control signal synthesizing unit 146 is based on the acceleration difference calculated by the acceleration difference calculating unit 142 and the relative speed component calculated by the speed component calculating unit 114, and the vibration suppressing unit 96 (excitation control unit 98). ) Is generated. At this time, the calculated relative displacement is multiplied by a weighting coefficient (Kd), the calculated relative velocity component is multiplied by a weighting coefficient (Kv), and these are added to generate a control signal. For example, assuming that the waveform of the relative velocity component is as shown in FIG. 9D and the waveform of the relative displacement is as shown in FIG. 9E, the control signal synthesis unit 146 weights the waveform of this relative velocity. The coefficient (Kv) is multiplied, and the waveform of the relative displacement is combined by being multiplied by the weighting coefficient (Kd), thus generating a control signal.

  Next, the process proceeds to step S17, where the expansion signal generation means 148 generates an expansion signal based on this control signal, and this expansion signal is sent to the first vibration control unit 98a (or the second vibration control unit 98b). Then, the first piezoelectric element 102a (or the second piezoelectric element 102b) is expanded by the expansion signal. The contraction signal generation means 150 generates a contraction signal based on the control signal, and the contraction signal is sent to the second vibration control unit 98b (or the first vibration control unit 98a). The second piezoelectric element 102b (or the first piezoelectric element 102a) is contracted. Such control is performed until the vibration suppression control ends.

  For example, as shown in FIG. 10, when relative vibration is generated on the first upper connecting block 70 side so that the center axis P2 of the tool mounting structure 8 is inclined to the right side, a contraction signal is sent to the first excitation control unit 98a. A contraction signal is sent from the generating means 150, and the first piezoelectric element 102a (that is, the first vibration control unit 98a) is contracted based on the contraction signal, whereby the lower connection frame in the connection pipe frame structure 16 is contracted. 58, the distance between the lower connection block 105 of the upper connection frame 56 and the upper connection block 68 of the upper connection frame 56 is corrected to the contraction side, and the expansion signal from the expansion signal generation means 148 is sent to the second vibration control unit 98b. Based on the expansion signal, the second piezoelectric element 102b (that is, the second vibration control unit 102b) is expanded, and thereby the connection pipe frame structure 16 is expanded. Distance between the coupling block 70 on the lower coupling block 107 and the upper connection frame 56 of the lower connection frame 58 is modified to extend side that. Accordingly, the force for returning the tool mounting structure 8 to the original state (the state indicated by the one-dot chain line in FIG. 10) on the connection pipe frame structure 16 by the first and second vibration control units 98a, 98b, that is, the connection pipe frame structure. The force which cancels the relative vibration produced | generated in 16 acts, and it becomes possible to suppress the relative vibration produced in the connection pipe frame structure 16, and to process a workpiece with high precision.

  Contrary to the above, as shown in FIG. 11, when relative vibration occurs on the first upper connecting block 68 side so that the central axis P2 of the tool mounting structure 8 is inclined to the left side, the first vibration is applied. The expansion signal from the expansion signal generating means 148 is sent to the control unit 98a, and the first piezoelectric element 102a (that is, the first vibration control unit 98a) is expanded based on the expansion signal, and thereby the connection pipe frame. In the structure 16, the distance between the lower connection block 105 of the lower connection frame 58 and the upper connection block 68 of the upper connection frame 56 is corrected to the extending side, and the contraction signal from the contraction signal generating means 150 is sent to the second vibration control unit 98b. And the second piezoelectric element 102b (that is, the second excitation control unit 102b) is contracted based on the contraction signal, and thereby the connection pipe frame is contracted. Distance between the coupling block 70 on the lower coupling block 107 and the upper connection frame 56 of the lower connecting frame 58 in the structure 16 is modified to contraction side. Accordingly, at this time, the force for returning the tool mounting structure 8 to the original state (indicated by the one-dot chain line in FIG. 11) on the connection pipe frame structure 16 by the first and second vibration control units 98a and 98b, A force that cancels the relative vibration generated in the connection pipe frame structure 16 acts, and thus the relative vibration generated in the connection pipe frame structure 16 can be suppressed.

  In the above-described embodiment, the first upper connecting blocks 68 and 70 (that is, the pair of upper connecting blocks on the tool mounting structure 8 side) of the connection pipe frame structure 16 are provided with the thermal deformation correcting means 86 (first and second Peltier elements). 88a and 88b), the second upper connecting blocks 72 and 74 of the connection pipe frame structure 16 may also be provided with thermal deformation correction means (which constitutes the second thermal deformation correction means). In the following embodiments, substantially the same members as those in the above-described embodiments are denoted by the same reference numerals, and description thereof is omitted.

  12 and 13, in this embodiment, in addition to the first upper deformation blocks 86 and 70 being provided with the first thermal deformation correction means 86, the second upper connection blocks 72 and 74 have the second thermal deformation correction. Means 202 are provided. Similar to the first thermal deformation correction means 86, the second thermal deformation correction means 202 is composed of a thermoelectric conversion element (for example, a Peltier element), and one Peltier element, that is, a third Peltier element 204a is on the second upper side. The other Peltier element, that is, the fourth Peltier element 204 b is provided in the other second upper connection block 74.

  Further, in relation to the third and fourth Peltier elements 204a and 204b, the third and fourth Peltier elements 72a and 74b are connected to the third and fourth Peltier elements 88a and 88b in the same manner as the first and second Peltier elements 88a and 88b described above. Temperature sensors 206 and 208 are provided. The third temperature sensor 206 is provided in one second upper connection block 72 and detects the temperature of the second upper connection block 72. The fourth temperature sensor 208 is provided in the other second upper connection block 74 and detects the temperature of the second upper connection block 74.

  In this embodiment, thermal deformation correction control in the connection pipe 60 on the tool mounting structure 8 side of the upper connection frame 56 of the connection pipe frame structure 16 is controlled by the first control system 210, and the control by the first control system 210 is performed. As described above, the temperature difference between the first upper connecting blocks 68 and 70 (that is, the temperature difference between the first and second detected temperatures of the first and second temperature sensors 90 and 92) is zero. Thus, the first and second Peltier elements 88a and 88b are controlled. The thermal deformation correction control in the connection pipe 64 on the main shaft structure 4 side of the upper connection frame 56 of the connection pipe frame structure 16 is controlled by the second control system 212, and the control by the second control system 212 is Similarly to the first control system 210, the temperature difference between the second upper connection blocks 72 and 74 (that is, the temperature difference between the third and fourth detected temperatures of the third and fourth temperature sensors 206 and 208) is zero. Thus, the third and fourth Peltier elements 204a and 204b are controlled. Other configurations in this form may be substantially the same as those in the above-described embodiment.

  In this embodiment, on the tool mounting structure 8 side of the connection pipe frame structure 16, heat deformation due to heat mainly from the second drive source 54 can be corrected by the first control system 210, and the main shaft structure On the body 4 side, the thermal deformation due to heat from the drive source 214 of the main shaft structure 4 is mainly corrected by the second control system 212. Therefore, with a relatively simple configuration and relatively simple control, Thermal correction of the connecting pipe frame structure 16 can be performed more effectively.

  In the above-described embodiment, the tool mounting structure 8 is divided into a pair of upper connection blocks 68 and 70 of the upper connection frame 56 of the connection pipe frame structure 16 and a pair of lower connection blocks of the lower connection frame 58 (the tool mounting structure 8. A part of the third bed portion 12 attached to the lower connecting block on the side functions as the second bed portion 10 for supporting the tool attachment structure 8, but instead of such a configuration, You may make it the 2 bed part 10 become the structure similar to the 1st bed part 8. FIG.

  In FIG. 14 which shows 2nd Embodiment of a machine tool, in this form, 2A of bed structures are the 1st bed part 6 for supporting the main shaft structure 4, and the tool attachment structure 8 for supporting A second bed part 10 and a third bed part 12 connecting the first bed part 6 and the second bed part 10 are provided. The first bed portion 6 and the third bed portion 12 have substantially the same configuration as described above, and include a support pipe frame structure 14A and a connection pipe frame structure 16A. The second bed portion 10 is composed of a second support pipe frame structure 220 that is substantially similar in configuration to the connection pipe frame structure 16A, and the second support pipe frame structure 220 is one end of the connection pipe frame structure 16A. Connected to the side.

  As understood from FIG. 14, in this embodiment, the support pipe frame structure 14 </ b> A, the connection pipe frame structure 16 </ b> A, and the second support pipe frame structure 220 are configured in one vertical stage. Further, a part of the second support pipe frame structure 220 on the main shaft structure 4 side constitutes a part of the connection pipe frame structure 16A on the tool attachment structure 8 side, and the tool attachment support structure 8 is , A pair of first upper connection blocks 70 (only the first upper connection block 70 is shown in FIG. 14) of the upper frame 56 of the connection pipe frame structure 16A and a pair of upper support frames 222 of the second support pipe frame structure 220. It is supported and fixed to the connecting blocks 224 and 226. The control of thermal deformation correction and the control of vibration suppression in the present invention can be similarly applied to a machine tool including such a bed structure 2A.

  As mentioned above, although embodiment of the machine tool according to this invention was described, this invention is not limited to these embodiment, A various deformation | transformation thru | or correction | amendment are possible without deviating from the scope of this invention.

  For example, in the above-described embodiment, the first acceleration sensor is provided on the main spindle structure side, the second acceleration sensor is provided on the tool mounting structure side, the relative speed and the displacement are calculated using the detected acceleration of these acceleration sensors, and the relative A control signal is generated by multiplying the speed and displacement by a weighting factor. Instead of such control, for example, a first displacement meter for measuring the displacement in the X direction is provided on the main spindle structure side, and a tool mounting structure is provided. A second displacement meter that measures the displacement in the X-axis direction is provided on the body side, the relative displacement is calculated from the measured displacement of the first and second displacement meters, and the relative velocity is calculated by differentiating these measured displacements. Relative vibration can be suppressed even if a control signal is generated by multiplying the relative velocity and the relative displacement by a weighting factor, and the pair of excitation control units are controlled using the control signal.

  Further, for example, in the above-described embodiment, both thermal deformation correction control and vibration suppression control are applied to one machine tool, but it is not necessary to apply both of them in combination, and thermal deformation correction is not necessary. Control or vibration suppression control can be applied alone.

2,2A Bed structure 4 Main shaft structure 6 First bed part 8 Tool mounting structure 10 Second bed part 12 Third bed part 14, 14A Support pipe frame structure 16, 16A Connection pipe frame structure 56 Upper connection frame 58 Lower Connection frame 68, 70 First upper connection block 72, 74 Second upper connection block 86 Thermal deformation correction means 88a, 88b Peltier element 96 Vibration suppression means 98, 98a, 98b Excitation control unit 102a, 102b Piezoelectric element 210 First control System 212 Second control system 220 Second support pipe frame structure

Claims (7)

A spindle structure having a spindle rotated in a predetermined direction, a tool attachment structure to which a machining tool is attached, and a bed structure for supporting the spindle structure and the tool attachment structure, The bed structure includes a first bed part for supporting the spindle structure, a second bed part for supporting the tool mounting structure, the first bed part, and the second bed part. A machine tool including a third bed portion to be connected, at least the third bed portion having a connection pipe frame structure;
The connection pipe frame structure has an upper connection frame in which four upper connection pipes are connected in a rectangular shape with four upper connection blocks, and four lower connection pipes in a rectangular shape with four lower connection blocks. A connected lower connecting frame; and a connecting pipe that connects each upper connecting block of the upper connecting frame and a corresponding lower connecting block of the lower connecting frame;
One end portion of the tool mounting structure is supported between a pair of first upper connection blocks on one end side of the upper connection frame of the connection pipe frame structure, and one end portion of the main shaft structure is supported by the connection pipe frame structure Are supported between a pair of second upper connecting blocks on the other end side of the upper connection frame,
At least one of the pair of first upper connecting blocks is provided with first thermal deformation correction means for correcting thermal deformation of the third bed portion, and the first thermal deformation correction means 1. A machine tool that corrects thermal deformation of the third bed portion based on a temperature difference between the upper connecting blocks.   At least one of the pair of second upper connection blocks of the connection pipe frame structure is provided with second thermal deformation correction means for correcting thermal deformation of the third bed portion, and the second thermal deformation correction means. The machine tool according to claim 1, wherein the thermal deformation of the third bed portion is corrected based on a temperature difference between the pair of second upper connecting blocks. A spindle structure having a spindle rotated in a predetermined direction, a tool attachment structure to which a machining tool is attached, and a bed structure for supporting the spindle structure and the tool attachment structure, The bed structure includes a first bed part for supporting the spindle structure, a second bed part for supporting the tool mounting structure, the first bed part, and the second bed part. A machine tool including a third bed portion to be connected, at least the third bed portion having a connection pipe frame structure;
The connection pipe frame structure has an upper connection frame in which four upper connection pipes are connected in a rectangular shape with four upper connection blocks, and four lower connection pipes in a rectangular shape with four lower connection blocks. A connected lower connecting frame; and a connecting pipe that connects each upper connecting block of the upper connecting frame and a corresponding lower connecting block of the lower connecting frame;
One end portion of the tool mounting structure is supported between a pair of first upper connection blocks on one end side of the upper connection frame of the connection pipe frame structure, and one end portion of the main shaft structure is supported by the connection pipe frame structure Are supported between a pair of second upper connecting blocks on the other end side of the upper connection frame,
Between the upper connection frame and the lower connection frame of the connection pipe frame structure, there is a relative relationship between the pair of first upper connection blocks and the pair of second upper connection blocks of the upper connection frame. A machine tool comprising vibration suppression means for suppressing vibrations.   The vibration suppressing means includes a vibration control unit for applying vibration, and the vibration control unit includes the first upper connection block of the upper connection frame and the main shaft of the lower connection frame of the connection pipe frame structure. Interposed between the lower connection block on the structure side or between the second upper connection block of the upper connection frame of the connection pipe frame structure and the lower connection block on the tool attachment structure side of the lower connection frame. The machine tool according to claim 3.   Each of the pair of first upper connection blocks of the connection pipe frame structure is provided with a thermal deformation correction means for correcting thermal deformation of the third bed portion, and the thermal deformation correction means is The machine tool according to claim 3 or 4, wherein thermal deformation of the third bed portion is corrected based on a temperature difference of the first upper connecting block.   The tool attachment structure is attached between the pair of upper connection blocks of the upper connection frame and the pair of first connection blocks of the lower connection frame of the connection pipe frame structure, The machine tool according to any one of claims 1 to 5, wherein the pair of first upper connecting blocks and the pair of lower connecting blocks constitute the second bed portion. The second bed portion includes a support pipe frame structure, the support pipe frame structure is connected to the one end side of the connection frame structure, and the tool mounting structure is an upper support frame of the support pipe frame structure. 6. The machine tool according to claim 1, wherein the machine tool is supported between the pair of upper connection blocks and the pair of upper connection blocks of the upper connection frame of the connection pipe frame structure. .

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