JP2013037552A5 - - Google Patents

Download PDF

Info

Publication number
JP2013037552A5
JP2013037552A5 JP2011173433A JP2011173433A JP2013037552A5 JP 2013037552 A5 JP2013037552 A5 JP 2013037552A5 JP 2011173433 A JP2011173433 A JP 2011173433A JP 2011173433 A JP2011173433 A JP 2011173433A JP 2013037552 A5 JP2013037552 A5 JP 2013037552A5
Authority
JP
Japan
Prior art keywords
fluid passage
flow rate
deformable portion
chamber
control device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011173433A
Other languages
English (en)
Japanese (ja)
Other versions
JP5723241B2 (ja
JP2013037552A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2011173433A priority Critical patent/JP5723241B2/ja
Priority claimed from JP2011173433A external-priority patent/JP5723241B2/ja
Publication of JP2013037552A publication Critical patent/JP2013037552A/ja
Publication of JP2013037552A5 publication Critical patent/JP2013037552A5/ja
Application granted granted Critical
Publication of JP5723241B2 publication Critical patent/JP5723241B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2011173433A 2011-08-08 2011-08-08 流量制御装置および流量制御方法 Active JP5723241B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011173433A JP5723241B2 (ja) 2011-08-08 2011-08-08 流量制御装置および流量制御方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011173433A JP5723241B2 (ja) 2011-08-08 2011-08-08 流量制御装置および流量制御方法

Publications (3)

Publication Number Publication Date
JP2013037552A JP2013037552A (ja) 2013-02-21
JP2013037552A5 true JP2013037552A5 (ru) 2014-04-17
JP5723241B2 JP5723241B2 (ja) 2015-05-27

Family

ID=47887111

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011173433A Active JP5723241B2 (ja) 2011-08-08 2011-08-08 流量制御装置および流量制御方法

Country Status (1)

Country Link
JP (1) JP5723241B2 (ru)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IL262070A (en) * 2018-10-02 2020-04-30 Dvash Eli Device and method for adjustable regulation of liquid or gas flow
JP2022181631A (ja) * 2021-05-26 2022-12-08 東京エレクトロン株式会社 流体の流れを制御する装置、断面形状可変流路の製造方法、基板を処理する装置及び流体の流れを制御する方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5530511A (en) * 1978-08-23 1980-03-04 Nisshin Steel Co Ltd Hydraulic control element
JP2936691B2 (ja) * 1990-10-15 1999-08-23 ソニー株式会社 バルブ
US5441231A (en) * 1994-05-17 1995-08-15 Payne; Barrett M. M. Valve closing actuator
JP3626277B2 (ja) * 1995-05-10 2005-03-02 大成ラミック株式会社 流量制御弁
JPH11230380A (ja) * 1998-02-17 1999-08-27 Hitachi Plant Eng & Constr Co Ltd 風量調整ダンパ
US6102361A (en) * 1999-03-05 2000-08-15 Riikonen; Esko A. Fluidic pinch valve system
JP2001355748A (ja) * 2000-06-14 2001-12-26 Surpass Kogyo Kk 流量調整弁
JP5767793B2 (ja) * 2010-08-31 2015-08-19 株式会社エー・シー・イー 排気圧力／流量コントローラ

Similar Documents

Publication Publication Date Title
WO2011159523A3 (en) Method and apparatus for use with an inflow control device
JP2016094962A5 (ru)
JP2018524529A5 (ru)
JP2015523503A5 (ru)
WO2013135725A3 (en) Blowout preventer assembly
GB2502214A (en) Valve arrangement for a production pipe
JP2013210095A5 (ru)
WO2012048853A8 (en) Fluid actuator for influencing the flow along a flow surface, as well as blow-out device and flow body comprising a like fluid actuator
CL2013000814A1 (es) Dispositivo de nebulizacion caliente que utiliza un liquido, posee un ensamble para producir un flujo de gas caliente presurizado que tiene en particular una salida de gas caliente, una tuberia de expulsion, una primera fuente de liquido, medios para inyectar en la tuberia un flujo de liquido que posee un dispositivo de venturi con una area de seccion transversal estrecha; proceso de nebulizacion.
MX362638B (es) Sistema y método para reducir presión de neumáticos.
DE502007004919D1 (de) Vorgesteuertes druckbegrenzungsventil
MX2018005112A (es) Valvula de control de fluido.
WO2015188039A3 (en) Fluid regulator having a biased pressure sense tube
WO2013134642A3 (en) Venturi valve and control system
WO2016100002A3 (en) System and method for controlling flow in a well production system
WO2015095516A3 (en) Self-regulating pressure throttle
JP2015223587A5 (ru)
GB2490286A (en) Apparatus and method for valve actuation
JP2013037552A5 (ru)
GB2521956A (en) Subterranean well tools with directionally controlling flow layer
WO2015114055A3 (en) Flow control device
SA518392015B1 (ar) صمام تحكم له وظيفة إمداد مائع فى إتجاه عكسى
WO2009114186A3 (en) Method and apparatus for thermally activated sprinklers
JP2018026137A5 (ru)
WO2013021164A3 (en) Tool temperature control