JP2013036759A - Tactile sensor element, tactile sensor device, grasping apparatus, and electronic device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a tactile sensor element capable of measuring shear force with a simple structure.SOLUTION: A tactile sensor element 10 comprises: a substrate 11 having a first opening 111A and a second opening 111B; a support film 12 covering the first opening 111A and the second opening 111B; a first detection section 13A located on the support film 12 and above the first opening 111A; a second detection section 13B located on the support film 12 and above the second opening 111B; and an elastic member 16 located on the first detection section 13A and the second detection section 13B. Each of the first detection section 13A and the second detection section 13B has a piezoelectric laminated part 14. The elastic member 16 covers at least the first detection section 13A, the second detection section 13B, and an area of the support film 12 between the first detection section 13A and the second detection section 13B in a plan view from the thickness direction of the substrate 11. A surface of the elastic member 16 is in parallel with a surface of the substrate 11.

Description

  The present invention relates to a tactile sensor element, a tactile sensor device including the tactile sensor element, a gripping device including the tactile sensor device, and an electronic apparatus including the tactile sensor device.

  2. Description of the Related Art Conventionally, a gripping device that grips and lifts an object whose weight or friction coefficient is unknown using a robot arm or the like is known. In such a gripping device, in order to grip the object without damaging the object and without slipping off, the force (positive pressure) acting in the direction perpendicular to the gripping surface and the gripping surface It is necessary to detect forces (shearing forces) acting in the surface direction (shearing direction), and sensors that detect these forces are known (see, for example, Patent Document 1).

  The tactile sensor described in Patent Document 1 has a cantilever structure that extends from an edge of an opening formed in a sensor substrate. The structure includes a flat plate-like sensitive portion, a sensitive portion, and a sensor substrate. And a hinge portion connecting the two. A conductive magnetic film is formed on the sensitive portion of the structure, and a piezoresistive film is formed on the hinge portion, and the conductive magnetic film and the piezoresistive film are electrically connected. In addition, an electrode is provided in the hinge portion, and the hinge portion is bent by pressure, so that a current generated by the piezoresistance of the hinge portion flows from the electrode. In this tactile sensor, a plurality of structures as described above are formed on the sensor substrate, and some of these structures stand up with respect to the sensor substrate and the other part is parallel to the sensor substrate. Is held in. An elastic body is disposed on the sensor substrate, and the upright structure is embedded in the elastic body. The shearing force can be measured by the standing structure, and the positive pressure can be measured by the structure parallel to the substrate surface.

  In order to manufacture such a tactile sensor, a P-type resistance region is formed on the surface of the sensor substrate by a thermal diffusion method or the like, and the conductive magnetic layer is patterned by sputtering. Then, using the conductive magnetic layer as a mask, the impurity layer and the Si layer are removed by ion etching, and further, the conductive magnetic film formed on the surface of the hinge portion is etched. Thereafter, reactive ion etching or the like is performed. An opening for forming the outer shape of the structure is formed. Then, by applying a magnetic field from the back side of the sensor substrate, a part of the plurality of structures is erected to manufacture a tactile sensor.

  Patent Document 2 describes a tactile sensor including a plurality of sensor elements including cantilevers. The cantilever of the tactile sensor of Patent Document 2 is generated due to a difference in lattice constant at the interface between both layers by doping boron into the crystalline silicon film to form a doped layer and a non-doped layer in the crystalline silicon film. The silicon film is formed by utilizing the property that the silicon film is curved when the strain is alleviated.

JP 2006-208248 A JP 2009-294140 A

  By the way, the tactile sensor as described in Patent Document 1 and Patent Document 2 described above has a complicated three-dimensional structure in which a cantilever structure is erected. Also in the production, Patent Document 1 has a complicated manufacturing process such as applying a magnetic field to bend the structure of the cantilever structure, or Patent Document 2 to bend the crystalline silicon film by doping. There is a problem that productivity is bad.

  In view of the above problems, the present invention provides a tactile sensor element capable of measuring a shearing force with a simple configuration, a tactile sensor device including the tactile sensor element, a gripping apparatus including the tactile sensor device, and the An object is to provide an electronic device including a tactile sensor device.

  The tactile sensor element of the present invention includes a substrate having a first opening and a second opening, a support film covering the first opening and the second opening, the support film, and the A first detector disposed above the first opening, a second detector disposed on the support film and above the second opening, the first detector, and An elastic member that is elastically deformed and disposed on the second detection unit, and each of the first detection unit and the second detection unit includes a lower electrode and a piezoelectric body in order from the support film side. And the piezoelectric laminated portion formed by laminating the upper electrode, and the elastic member includes at least the first detection portion, the second detection portion, and the like in a plan view as viewed in the thickness direction of the substrate, and On the support film in the region sandwiched between the first detection unit and the second detection unit There, the surface of the elastic member is characterized by being formed parallel to the substrate surface.

In this invention, when a pressing force is applied to the tactile sensor element from the elastic member side and a shearing force is further applied in the direction along the substrate surface from that state, the elastic member is moved in the direction of the shearing force. Elastically deforms. At this time, the elastic member has a region where a tensile force that is pulled in a direction opposite to the substrate in a cross-sectional view in the substrate thickness direction and a region where a compressive force that is further pushed down toward the substrate is applied. It occurs depending on the direction. Here, when the direction in which the shearing force is applied is the + X direction and the opposite direction is the −X direction, a compressive force is applied to the elastic member region on the + X direction side, and the elastic member region on the −X direction side. In this case, a tensile force is generated.
In the detection unit covered with the elastic member in the region where the tensile force is applied, the tensile force is also applied to the support film, and the support film is about to return to a state where it is not pressed. On the other hand, in another detection unit covered with an elastic member in a region where the compressive force is applied, the compressive force is also applied to the support film, and the support film tends to bend further.
As described above, the displacement direction of the support film of each detection unit is opposite depending on the area of the elastic member, so that the polarity of the polarity of the electrical signal (voltage) output from the piezoelectric laminated portion of each detection unit is reversed. become. The direction of the shearing force can be determined by outputting an electric signal for each detection unit and reading the polarity of the electric signal.

Further, in the present invention, in a plan view as viewed in the thickness direction of the substrate, the elastic members disposed on the first detection unit and the second detection unit are at least the first detection unit and the second detection unit. And a support film in a region sandwiched between the first detection unit and the second detection unit. Therefore, the tensile force or the compressive force accompanying the elastic deformation of the elastic member is easily applied to the detection unit covered with the elastic member. In particular, when a shearing force is applied in the direction of the line segment connecting the first detection unit and the second detection unit, a tensile force or a compressive force is easily applied to the detection unit on the line segment. And the output of the electrical signal increases.
In the tactile sensor element of the present invention, since the surface of the elastic member is formed parallel to the substrate surface, when the elastic member is pressed and a shearing force is applied, the elastic member becomes parallel to the substrate surface. Maintain and become deformed. Therefore, it is possible to prevent a tensile force or a compressive force from being locally applied to the detection unit from the elastic member. In the present invention, when the surface of the elastic member is parallel to the substrate surface, it is not limited to being strictly parallel. A case where the elastic member is formed at an angle that can prevent a tensile force or a compressive force from being locally applied to the detection unit when the elastic member is deformed is also included in parallel. For example, the case where the substrate surface and the surface of the elastic member form an angle of about 10 degrees is also included in the parallel.

Therefore, by providing such a tactile sensor element on the contact surface with which the object comes into contact, the direction of the shearing force applied to the contact surface from the contacted object is determined based on the electrical signal output from the tactile sensor element. it can. Further, the magnitude of the shearing force can be calculated from the magnitude of the electric signal.
Therefore, since the tactile sensor element of the present invention has a configuration in which the support film, the piezoelectric layered portion, and the elastic member are simply stacked on the substrate, the shear force can be measured with a simple configuration.
Furthermore, the tactile sensor element of the present invention does not require a complicated manufacturing process such as processing a part of the configuration by applying a magnetic field, and can be manufactured by a simple method of simply stacking the components. Therefore, the productivity of the tactile sensor element is improved, and the manufacturing cost can be reduced.
For example, in a configuration in which a cantilever-shaped structure is erected, the thickness dimension increases as the structure is erected. However, in the present invention, since the support film, the piezoelectric laminated portion, and the elastic member are laminated on the substrate, an increase in the thickness dimension can be suppressed, and the tactile sensor element can be downsized.

  In the tactile sensor element of the present invention, the center of gravity of the elastic member in a plan view viewed in the thickness direction of the substrate connects the center of gravity of the first opening and the center of gravity of the second opening in the plan view. It is preferable to be located inside a circle whose diameter is a line segment.

  In the present invention, in a plan view viewed in the thickness direction of the substrate, the center of gravity of the elastic member is located inside a circle whose diameter is a line segment connecting the center of gravity of the first opening and the center of gravity of the second opening. doing. Therefore, a straight line passing through the center of gravity of the elastic member and on the first opening across a straight line that does not overlap the line connecting the center of gravity of the first opening and the center of gravity of the second opening A first detector and a second detector on the second opening are located. Then, with respect to the shearing force from the near side to the far side of the straight line, the detection unit is arranged in the elastic member region where the compressive force is applied and the elastic member region where the tensile force is applied, respectively. An electrical signal having a clearly opposite polarity can be extracted. As a result, the measurement accuracy of the shear force of the tactile sensor element is improved.

  In the tactile sensor element of the present invention, the first opening and the second opening are arranged symmetrically with respect to a straight line passing through the center of gravity of the elastic member in a plan view as viewed in the thickness direction of the substrate. It is preferable.

  In this invention, the first opening and the second opening are arranged symmetrically with respect to a straight line passing through the center of gravity of the elastic member in a plan view as viewed in the thickness direction of the substrate. Therefore, the detection units are arranged in a well-balanced manner in the region of the elastic member to which the compressive force is applied and the region of the elastic member to which the tensile force is applied. As a result, the discrimination between the polarity of the electrical signal of the first detection unit and the polarity of the electrical signal of the second detection unit becomes clearer, and the measurement accuracy of the shear force of the tactile sensor element is improved.

  In the tactile sensor element of the present invention, the substrate further includes a third opening and a fourth opening, and the support film further covers the third opening and the fourth opening, A third detection unit disposed on the support film and above the third opening; a fourth detection unit disposed on the support film and above the fourth opening; Each of the third detection unit and the fourth detection unit includes a piezoelectric laminate unit in which a lower electrode, a piezoelectric body, and an upper electrode are laminated in order from the support film side, and the substrate In the plan view as viewed in the thickness direction, the first opening, the second opening, the third opening, and the fourth opening are the center of gravity of the first opening and the first opening. A first line connecting the center of gravity of the second opening, the center of gravity of the third opening, and the fourth The elastic member is disposed so as to intersect with a second line segment that connects the center of gravity of the opening, and the elastic member includes at least the first detection unit, the second detection unit, and the third detection unit in the plan view. A detection unit, a fourth detection unit, and a support film in a quadrangular region whose apexes are the first detection unit, the second detection unit, the third detection unit, and the fourth detection unit. It is preferable that the center of gravity of the elastic member in the plan view is located at the intersection of the first line segment and the second line segment in the plan view.

In the present invention, the first line segment and the second line segment intersect with each other with respect to the four openings of the first opening, the second opening, the third opening, and the fourth opening. Is arranged. The elastic member is located above the predetermined position with respect to the first detection unit, the second detection unit, the third detection unit, and the fourth detection unit formed above the four openings. It is arranged so as to cover these in relation. Therefore, the tensile force or the compressive force accompanying the elastic deformation of the elastic member is easily applied to the four detection units.
Furthermore, the center of gravity of the elastic member in plan view is located at the intersection of the first line segment and the second line segment in plan view. For this reason, the four detection units are arranged at positions at which shear forces in the up / down / left / right and diagonal directions can be detected.
Therefore, in this invention, the multidirectional shear force including the oblique direction can be measured.

  In the tactile sensor element of the present invention, the substrate further includes a third opening and a fourth opening, and the support film further covers the third opening and the fourth opening, A third detector disposed on the support film and above the third opening; and a fourth detector disposed on the support film and above the fourth opening. Further, each of the third detection unit and the fourth detection unit includes a piezoelectric stacked unit configured by stacking a lower electrode, a piezoelectric body, and an upper electrode in order from the support film side, and the thickness of the substrate In the plan view seen in the direction, the first opening, the second opening, the third opening, and the fourth opening are the center of gravity of the first opening and the third opening. A third line connecting the center of gravity of the opening, the center of gravity of the second opening and the fourth opening The fourth line connecting the center of gravity is arranged so as to be spaced apart, and the elastic member is at least the first detection unit, the second detection unit, the third detection unit in the plan view, Covers the support film in the quadrangular region whose apexes are the fourth detection unit, the first detection unit, the second detection unit, the third detection unit, and the fourth detection unit. The center of gravity of the elastic member in the plan view is located in the quadrangular region in the plan view, the first detection unit and the third detection unit are electrically connected in series, and the first It is preferable that the second detector and the fourth detector are electrically connected in series.

In the present invention, the third line segment and the fourth line segment are separated from each other with respect to the four openings of the first opening, the second opening, the third opening, and the fourth opening. Has been placed. The elastic member is located above the predetermined position with respect to the first detection unit, the second detection unit, the third detection unit, and the fourth detection unit formed above the four openings. It is arranged so as to cover these in relation. Therefore, the tensile force or the compressive force accompanying the elastic deformation of the elastic member is easily applied to the four detection units.
Furthermore, the first detection unit and the third detection unit are electrically connected in series, and the second detection unit and the fourth detection unit are electrically connected in series. Therefore, the electrical signals output from the first detection unit and the third detection unit and the electrical signals output from the second detection unit and the fourth detection unit are both added values. Therefore, compared with the case where each is output from each detection unit, the electrical signal is increased, and the measurement accuracy of the shear force of the tactile sensor element is improved.

  In the tactile sensor element of the present invention, it is preferable that a rigid layer having a surface parallel to the substrate surface and having a rigidity higher than that of the elastic member is disposed on the surface of the elastic member.

  In this invention, since the rigid layer is disposed on the surface of the elastic member, when a contact object comes into contact with the rigid layer and a shearing force is applied, the shearing force is locally transmitted to the elastic member. Can be prevented. That is, the above-described compressive force or tensile force in the elastic member can be more reliably applied to each detection unit. As a result, the measurement accuracy of the shear force of the tactile sensor element is improved.

  The tactile sensor device of the present invention receives the electrical signal from each of the above-described tactile sensor element of the present invention and the first detection unit and the second detection unit, and based on the polarity of the electrical signal, And a processing unit for detecting a shearing force acting on the elastic member.

  In the present invention, as described above, the tactile sensor element of the present invention can detect a shearing force with a simple configuration. In the tactile sensor device, since the processing unit determines the shearing force acting on the elastic member based on the electric signal for each detection unit, the shearing force can be accurately measured with a simple configuration.

  The tactile sensor device of the present invention receives an electrical signal from each of the first detection unit, the second detection unit, the third detection unit, and the fourth detection unit, and It is preferable to include a processing unit that detects a shearing force acting on the elastic member based on polarity.

  In the present invention, the four detection units are arranged so as to be able to detect multi-directional shear forces, and the processing unit individually receives electrical signals from the four detection units. Therefore, in this invention, the multidirectional shear force including the oblique direction can be accurately measured.

  Further, the tactile sensor device of the present invention receives the electrical signals from the first detection unit and the third detection unit, and the electrical signals from the second detection unit and the fourth detection unit. And a processing unit for detecting a shearing force acting on the elastic member based on the polarity of the electrical signal.

  In the present invention, the detection unit is electrically connected in series, and the processing unit is configured to add the electric signal output from the first detection unit and the third detection unit, the second detection unit, and the fourth detection unit. The addition value of the electrical signal output from the detection unit is individually received. Therefore, in the present invention, the shearing force can be measured more accurately based on the polarity of the electric signal that is increased by the addition.

  The gripping device of the present invention is a gripping device that includes the above-described tactile sensor device of the present invention and grips an object, and grips the object and touches the tactile sensor on a contact surface that contacts the object. At least a pair of grip arms provided with a device, grip detection means for detecting a slip state of the object based on the electrical signal output from the tactile sensor device, and the grip arm based on the slip state Drive control means for controlling the driving of the motor.

In the present invention, as described above, by measuring the shearing force when the object to be grasped is measured by the tactile sensor device, the object is in a state of being slipped off from the grasping arm or being grasped. It is possible to measure whether it is in a state. That is, in the operation of gripping the target object, in a state where the target object is not sufficiently gripped, a shearing force corresponding to the dynamic friction force works, and the shearing force increases as the gripping force increases. On the other hand, when the gripping force is increased and the shearing force corresponding to the static frictional force is detected, the gripping of the object is completed, and the static frictional force is constant even when the gripping force is increased, so the shearing force also changes. do not do. Therefore, for example, by gradually increasing the gripping force of the object and detecting when the shearing force no longer changes, the object can be gripped with a minimum gripping force without damaging the object. Can do.
In addition, as described above, the tactile sensor device that constitutes the gripping device has a configuration in which a plurality of detection units are covered with an elastic member, and can be easily manufactured with a simple configuration. A gripping device using such a tactile sensor device can similarly have a simple configuration and can be easily manufactured.

  An electronic apparatus according to the present invention includes the above-described tactile sensor device according to the present invention.

In this invention, the pressing force and the shearing force when the contact object contacts the contact sensor can be measured by the above-described tactile sensor device. Therefore, the electronic device of the present invention can perform various operations based on accurate information detected by the above-described tactile sensor device, and can achieve high performance.
In addition, as described above, the tactile sensor device included in the electronic device has a configuration in which a plurality of detection units are covered with an elastic member, and has a simple configuration and can be easily manufactured. Similarly, an electronic device using a tactile sensor can have a simple configuration and can be easily manufactured.

The top view which shows the tactile sensor apparatus which concerns on 1st embodiment of this invention. (A) The partial cross section figure which shows the tactile sensor device which concerns on 1st embodiment before a shear force is provided. (B) Partial sectional view showing the tactile sensor device according to the first embodiment in a state where shearing force is applied. The top view which shows arrangement | positioning of the elastic member in planar view of the tactile sensor which concerns on 1st embodiment. The top view which shows the outer peripheral position of the elastic member in planar view of the tactile sensor which concerns on 1st embodiment. The top view which shows the tactile sensor element which concerns on 2nd embodiment. The top view which shows the tactile sensor element which concerns on 3rd embodiment. The apparatus block diagram which shows schematic structure of the holding | gripping apparatus which concerns on 4th embodiment. The figure which shows the relationship between the positive pressure and shear force which act on the tactile sensor in the holding | grip operation | movement of the holding | gripping apparatus which concerns on 4th embodiment. The flowchart which shows the holding | grip operation | movement of the holding | grip apparatus by control of the control apparatus which concerns on 4th embodiment. The timing diagram which shows the transmission timing of the detection signal output from the drive control signal to an arm drive part, and a tactile sensor at the time of holding | grip operation | movement of the holding | gripping apparatus which concerns on 4th embodiment. The top view which shows the tactile sensor apparatus which concerns on 5th embodiment. The block diagram which shows schematic structure of the proximity sensor which concerns on 5th embodiment. The block diagram which shows schematic structure of the iron which concerns on 5th embodiment. The flowchart which shows operation | movement of the iron which concerns on 5th embodiment. The figure which shows schematic structure of the notebook type personal computer which concerns on 6th embodiment. The top view which shows the tactile sensor element which concerns on a reference form. (A) The top view which shows the tactile sensor element which concerns on the deformation | transformation of embodiment. (B) The top view which shows the tactile sensor element which concerns on another deformation | transformation of embodiment.

[First embodiment]
Hereinafter, a tactile sensor according to a first embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is a plan view showing a schematic configuration of a tactile sensor device 1 of the first embodiment. FIG. 2 is a cross-sectional view illustrating a schematic configuration of the tactile sensor element 10, FIG. 2A illustrates a state where no shear force is applied to the tactile sensor element 10, and FIG. A state in which a shearing force is applied to the tactile sensor element 10 is shown.

[1. (Configuration of tactile sensor)
The tactile sensor device 1 includes a tactile sensor element 10 and a processing unit 20 (see FIG. 1).
As shown in FIGS. 1 and 2, the tactile sensor element 10 includes a support film 12, a detection unit 13, an output unit 15, an elastic member 16, and a rigid layer 17 on a substrate 11. The tactile sensor element 10 is a sensor for detecting a positive pressure applied when a contact object comes into contact with the rigid layer 17 and a shearing force.

(1-1. Configuration of substrate)
The substrate 11 is made of, for example, Si and has a thickness dimension of, for example, 200 μm. As shown in FIGS. 1 and 2, a plurality of openings 111 are formed in the substrate 11. Specifically, as shown in FIG. 1, a first opening 111A and a second opening 111B are formed. In a plan view (hereinafter referred to as a sensor plan view) in which the substrate 11 is viewed from the thickness direction of the substrate 11, the elastic member 16 is formed at a position in the vicinity of each side. More specifically, one opening 111 is formed on each of the left and right sides of the center of gravity K of the elastic member 16 in the sensor plan view.

FIG. 3 is a plan view for explaining the positional relationship between the elastic member 16 and the opening 111 and is a state viewed from the same viewpoint as the sensor plan view. In FIG. 3, members and parts other than the elastic member 16 and the opening 111 are omitted.
As shown in FIG. 3, the center of gravity K of the elastic member 16 is located inside a circle C1 whose diameter is a line segment connecting the center of gravity k1 of the first opening 111A and the center of gravity k2 of the second opening 111B. doing.

Further, as shown in FIG. 1, the first opening 111 </ b> A and the second opening 111 </ b> B are arranged symmetrically with respect to a straight line L <b> 1 passing through the center of gravity K of the elastic member 16 in the sensor plan view.
Further, as shown in FIG. 1, the first opening 111A and the second opening 111B are located approximately in the vertical direction of the elastic member 16 in the sensor plan view.

  The opening 111 is formed in a circular shape in the sensor plan view, but may be formed in a polygonal shape, for example. Moreover, although the opening part 111 penetrating the board | substrate 11 thickness direction was illustrated, the concave groove | channel is formed in the surface (upper side in FIG. 2 (A), (B)) of the board | substrate 11 by the etching etc., for example. The opening 111 may be configured. Furthermore, although the structure which forms the support film 12 on the board | substrate 11 was illustrated, the concave groove | channel is formed by the etching etc. from the surface (lower side of FIG. 2) on the opposite side to the elastic member 16 of the board | substrate 11, and a groove bottom part The support film 12 may be used, and the inside of the groove may be the opening 111.

The support film 12 is formed on the substrate 11 and covers the first opening 111A and the second opening 111B.
Although not shown in the figure, the support film 12 is composed of an SiO ₂ layer formed on the substrate 11 with a thickness of 3 μm, for example, and a ZrO ₂ layer with a thickness of 400 nm stacked on the SiO ₂ layer, for example. It is formed by a two-layer structure. Here, the ZrO ₂ layer is a layer formed in order to prevent peeling of the piezoelectric body 141 described later at the time of firing formation of the detection unit 13 described later. That is, when the piezoelectric body 141 is formed of, for example, PZT (lead zirconate titanate), if the ZrO ₂ layer is not formed during firing, Pb contained in the piezoelectric body 141 diffuses into the SiO ₂ layer. to, lowers the melting point of the SiO ₂ layer, air bubbles on the surface of the SiO ₂ layer is produced, PZT peels by the bubbles. Further, when there is no ZrO ₂ layer, there is a problem that the bending efficiency with respect to the distortion of the piezoelectric body 141 is lowered. On the other hand, when the ZrO ₂ layer is formed on the SiO ₂ layer, it is possible to avoid inconveniences such as peeling of the piezoelectric body 141 and a decrease in bending efficiency.
In the following description, a region of the support film 12 that closes the first opening 111A and the second opening 111B in the sensor plan view as shown in FIG.

(1-2. Configuration of detection unit)
The detection unit 13 is disposed on the support film 12. In the present embodiment, the detection unit 13 includes two detection units, a first detection unit 13A and a second detection unit 13B.
As shown in FIG. 2, the first detection unit 13A is disposed on the membrane 121 and above the first opening 111A, and the second detection unit 13B is on the membrane 121 and the second opening. It is arranged above 111B.
An elastic member 16 is disposed on the first detection unit 13A and the second detection unit 13B. The first detection unit 13 </ b> A and the second detection unit 13 </ b> B are covered with a common elastic member 16.

  As shown in FIG. 2, each detection unit 13 includes a piezoelectric laminate unit 14 configured by laminating a lower electrode 142, a piezoelectric body 141, and an upper electrode 143 in order from the support film 12 side. The piezoelectric laminated portion 14 may be formed in contact with the lower side of the membrane 121.

The piezoelectric body 141 is formed, for example, by forming PZT into a film shape with a thickness dimension of, for example, 500 nm. In the present embodiment, PZT is used as the piezoelectric body 141. However, any material may be used as long as it is a material capable of generating an electric charge due to a change in the stress of the film. Examples of such materials include lead titanate (PbTiO ₃ ), lead zirconate (PbZrO ₃ ), lead lanthanum titanate ((Pb, La) TiO ₃ ), aluminum nitride (AlN), and zinc oxide (ZnO). And polyvinylidene fluoride (PVDF).

  The lower electrode 142 and the upper electrode 143 are electrodes formed across the film thickness direction of the piezoelectric body 141, and the lower electrode 142 is formed on the surface of the piezoelectric body 141 facing the membrane 121 and is in contact with the membrane 121. doing. The upper electrode 143 is formed on the surface opposite to the surface on which the lower electrode 142 of the piezoelectric body 141 is formed.

The lower electrode 142 is a film-like electrode having a thickness dimension of, for example, 200 nm, and is formed on the membrane 121. The lower electrode 142 may be any conductive thin film having conductivity, but in the present embodiment, for example, a laminated structure film of Ti / Ir / Pt / Ti is used.
The upper electrode 143 is a film-like electrode having a thickness dimension of, for example, 50 nm. The upper electrode 143 is formed so as to cover the upper surface of the piezoelectric body 141. Any material may be used for the upper electrode 143 as long as it is a conductive thin film, but in this embodiment, an Ir thin film is used.

The output unit 15 is for taking out and outputting an electrical signal from each detection unit 13 in accordance with the elastic deformation of the elastic member 16. For example, the output unit 15 is disposed on the outer periphery of the substrate 11 for each detection unit 13.
On the support film 12, the electrode wire 142A extending from the outer peripheral portion of the lower electrode 142 is formed. The output unit 15 is formed as a terminal pad, and the electrode line 142A is led out to the terminal pad and connected to the processing unit 20 described later from the terminal pad.
Furthermore, an electrode wire (not shown) extending from the outer periphery of the upper electrode 143 is formed on the support film 12. For example, the electrode wire is led to another terminal pad (not shown) arranged for each detection unit 13 on the outer peripheral portion of the substrate 11, and is connected to the processing unit 20 described later from this other terminal pad. Therefore, in the present embodiment, the output unit includes a pair of terminal pads including the terminal pad for the electrode wire 142 </ b> A and another terminal pad for the electrode wire extending from the outer peripheral portion of the upper electrode 143. A pair of terminal pads is arranged for each of the detection units 13. Therefore, in the tactile sensor element 10, an electric signal is individually taken out from each detection unit 13.

The elastic member 16 is a member that is disposed on the substrate 11 and covers each detection unit 13.
The elastic member 16 is formed in a rectangular parallelepiped shape, and is formed in a quadrangular shape in the sensor plan view. The elastic member 16 has at least the first detection unit 13A, the second detection unit 13B, and the support film 12 in the region sandwiched between the first detection unit 13A and the second detection unit 13B in the sensor plan view. Cover the top. Therefore, the elastic member 16 is not only on the first detection unit 13A and the second detection unit 13B but also on a line segment connecting the first detection unit 13A and the second detection unit 13B in the sensor plan view. Covering.
The surface of the elastic member 16 is formed in parallel with the surface of the substrate 11. The parallelism here is also the same concept as described above.
The elastic member 16 functions as a protective film of the detection unit 13 and transmits a pressing force or shear force applied to the elastic member 16 to the membrane 121 to bend. Then, when the membrane 121 is bent by the bending of the elastic member 16, the detection unit 13 is also bent, and an electric signal corresponding to the amount of bending is output.
In the present embodiment, for example, silicone rubber is used as the elastic member 16, but the elastic member 16 is not limited thereto, and may be formed of other elastic materials such as elastic synthetic resin. Further, the thickness dimension of the elastic member 16 is not particularly limited, but is formed to 300 μm, for example.
The elastic member 16 and the substrate 11 are preferably bonded by an adhesive layer (not shown).

The rigid layer 17 is a layer that covers the surface of the elastic member 16 and has higher rigidity than the elastic member 16. The rigid layer 17 is a layer for preventing the shearing force from being locally transmitted to the elastic member 16 when the contact object comes into contact and is displaced in the shearing direction.
The surface of the rigid layer 17 is formed in parallel with the surface of the substrate 11. The parallelism here is also the same concept as described above.
In the present embodiment, for example, an acrylic plate is used as the rigid layer 17, but the present invention is not limited to this, and the rigid layer 17 may be formed of a material having other rigidity such as a synthetic resin or metal having rigidity. . For example, a rigid layer 17 made of a synthetic resin having rigidity may be formed on the surface of the elastic member 16 by coating.
In addition, the thickness dimension of the rigid layer 17 is not particularly limited, but is, for example, 100 μm.
The elastic member 16 and the rigid layer 17 are preferably bonded by an adhesive layer (not shown) or the like.

The processing unit 20 receives the electrical signal output from each detection unit 13 and detects the pressing force and the shear force applied to the tactile sensor device 1 based on the electrical signal. The processing unit 20 is connected to the pair of terminal pads arranged for each of the detection units 13 as described above, and receives an electrical signal from each of the detection units 13.
The processing unit 20 includes a storage unit 21 and a calculation unit 22.
The storage unit 21 stores an output voltage polarity pattern corresponding to the shearing force direction and the pressing direction, various programs for performing various processes of the calculation unit 22, and the like.
The calculation unit 22 determines the direction of the shearing force based on the received electrical signal (voltage) of each detection unit 13 and the output voltage polarity pattern stored in the storage unit 21.
Here, the calculation unit 22 calculates the shearing force and the pressing force by calculating in advance the relationship between the shearing force and the pressing force with respect to the magnitude of the output voltage and storing the relationship in the storage unit 21. Can do.

(2. Operation of the tactile sensor element)
Next, the operation of the tactile sensor element 10 will be described with reference to the drawings.
In the detection unit 13, when a pressing force is applied to the rigid layer 17 and further a shearing force is applied in a predetermined direction in that state, the elastic member 16 is elastically deformed and the membrane 121 is displaced in the film thickness direction.
FIG. 2 is a diagram illustrating a state in which a contact object is in contact with the tactile sensor element 10 and stress (shearing force) is applied in the direction of the arrow P1, and FIG. 2 (A) is a state before the shearing force is applied. FIG. 2B is a diagram illustrating a state in which the elastic member 16 is deformed by applying a shearing force.

As shown in FIG. 2B, the tactile sensor element 10 has a membrane 121 when a shearing force is applied in the direction from the first detection unit 13A side to the second detection unit 13B side (the direction of the arrow P1). Bends and displaces.
That is, when a shearing force is applied to the rigid layer 17 in the direction of the arrow P1, a compressive force and a tensile force are generated in the elastic member 16. Here, the direction toward the tip of the arrow P1 of the shearing force is the + X direction, and the opposite direction is the -X direction.
The first detection unit 13A side (−X direction side) of the elastic member 16 is extended in the direction of the arrow P1, and is pressed downward by the membrane 121 of the first detection unit 13A with a pressing force. A tensile force is generated from the state to return to a position where no pressing force is applied. That is, the membrane 121 of the first detection unit 13A is displaced in the arrow M1 direction.
Further, the second detection unit 13B side (+ X direction side) of the elastic member 16 is further pressed downward, and a downward compressive force is generated on the membrane 121 of the second detection unit 13B. That is, the membrane 121 of the second detection unit 13B is displaced in the direction of the arrow M2.

When the membrane 121 is displaced in the direction of the arrows M1 and M2 in this way, a potential difference is generated between the surface of the piezoelectric body 141 on the lower electrode 142 side and the surface of the upper electrode 143 side, and the lower electrode 142 and the upper electrode 143 cause a piezoelectric difference. An electric signal (voltage) corresponding to the amount of displacement of the body 141 is output. Here, since the displacement direction of the membrane 121 is reversed between the first detection unit 13A and the second detection unit 13B, the voltage output from the first detection unit 13A and the output from the second detection unit 13B. The applied voltage has a reverse relationship between positive and negative.
Therefore, in the tactile sensor element 10, the magnitude of the shearing force can be detected from the magnitude of the output voltage, and the direction of the shearing force can be detected from the relationship of the polarity of the output voltage. When the shearing force in the direction of the arrow P1 shown in FIG. 2B is released, the voltage output from the first detection unit 13A and the voltage output from the second detection unit 13B are the same when the shearing force is applied. The voltage and positive / negative are reversed.

Further, Table 1 shows the polarity pattern of the output signal of each detector 13 when the direction of the shearing force applied to the tactile sensor element 10 is variously changed.
FIG. 4 is a plan view illustrating the outer peripheral position of the elastic member 16 in the sensor plan view.
Here, as shown in FIG. 4, the outer peripheral positions of the elastic member 16 in the sensor plan view are D1 to D8, and the direction of the shearing force is shown in Table 1. For example, the arrow P1 direction described above corresponds to the right direction, that is, the direction from D1 to D5. The direction from D1 to D5 is expressed as D1⇒D5, and the same applies to other directions.
In Table 1, regarding the output voltage polarity from the detection unit 13, “+” indicates a positive polarity, “−” indicates a negative polarity, and “0” indicates that the output is in a minute amount or not. When a tensile force is generated on the membrane 121 of each detection unit 13, “+” is indicated, and when a compressive force is generated, “−” is indicated.
Table 1 also shows the polarities of the output signals of the detectors 13 when a pressing force is applied to the tactile sensor element 10.

As shown in Table 1, the polarity of the voltage output from each detection unit 13 differs depending on the direction of the shear force, so the processing unit 20 can determine the direction of the shear force based on these polarities.
As shown in Table 1, the output voltage polarity of the D5⇒D1 direction is opposite to that of the D1⇒D5 direction.
When a shearing force in the vertical direction in FIG. 1 is applied as in the D3⇒D7 direction or D7⇒D3 direction, as shown in Table 1, output from the first detection unit 13A and the second detection unit 13B The applied voltage polarity is “0”. This is because the compression force and the tensile force are not generated in the elastic member 16 at a substantially intermediate position in the vertical direction of the elastic member 16 shown in FIG. The same applies to the substantially intermediate position in the left-right direction.

Here, the determination of the shearing force direction in the processing unit 20 will be described with an example.
When a positive polarity voltage is output from the first detection unit 13A, a negative polarity voltage is output from the second detection unit 13B, and a small amount of voltage is output from the detection unit 13B and the detection unit 13D, processing is performed. The calculation unit 22 of the unit 20 determines the direction of the shearing force based on the polarities of these input electrical signals and the output voltage polarity pattern stored in the storage unit 21. In this example, it can be determined from Table 1 of the output voltage polarity pattern that shear force is applied in the direction D1⇒D5, that is, in the direction of the arrow P1.

  When a pressing force is applied to the tactile sensor element 10, the membrane 121 of each detection unit 13 bends downward, so that the polarity of the output voltage is negative. Therefore, when it becomes such an output voltage polarity pattern, the process part 20 can determine with the pressing force having been provided.

[Operational effects of the first embodiment]
The tactile sensor device 1 includes a tactile sensor element 10 and a processing unit 20, and the tactile sensor element 10 includes a first detection unit 13A and a second detection unit 13B, and each detection unit 13 includes a piezoelectric laminate. The unit 14 is provided.
When the elastic member 16 covering each detection unit 13 is elastically deformed in the direction of the shearing force, each membrane 121 of each detection unit 13 is displaced upward or downward depending on the position of each detection unit 13 with respect to the elastic member 16. To do. And the electrical signal (voltage) according to the displacement amount of each membrane 121 is output, The polarity differs according to the position of each detection part 13 with respect to the direction of a shear force. The processing unit 20 can determine the direction of the shearing force and calculate the magnitude of the shearing force based on the electrical signal of each detection unit 13 received via the output unit 15. Also, when the elastic member 16 is pressed, each membrane 121 of each detection unit 13 is displaced downward. The processing unit 20 can determine the application of the pressing force and can calculate the magnitude of the pressing force based on the electrical signal of each detection unit 13 at that time.
Therefore, according to the present embodiment, it is possible to provide the tactile sensor device 1 that can measure the pressing force and the shearing force while having a simpler structure as compared with the complicated three-dimensional structure as in the related art.

  In the first embodiment, in the sensor plan view, the elastic member 16 includes at least the first detection unit 13A, the second detection unit 13B, and the first detection unit 13A and the second detection unit 13B. Cover the support membrane in the area to be sandwiched. Therefore, the tensile force or the compressive force accompanying the elastic deformation of the elastic member 16 is easily applied to the detection unit covered with the elastic member 16. In particular, when a shearing force is applied in the direction of a line segment connecting the center of gravity of the first opening 111A and the second opening 111B, a tensile force or a compressive force is easily applied to the detection unit on the line segment. As a result, the displacement of the membrane 121 increases and the output value of the electrical signal increases. As a result, the measurement accuracy of the shear force of the tactile sensor device 1 is improved.

  In the first embodiment, the center of gravity K of the elastic member 16 is located inside a circle C1 whose diameter is a line segment connecting the center of gravity k1 of the first opening 111A and the center of gravity k2 of the second opening 111B. To position. A straight line L1 passing through the center of gravity K of the elastic member 16 does not overlap with a line segment connecting the center of gravity k1 and the center of gravity k2. The first detector 13A and the second detector 13B are located across the straight line L1. Then, each detection unit 13 is located in the region of the elastic member 16 to which the compressive force is applied and the region of the elastic member 16 to which the tensile force is applied with respect to the shearing force in the direction of the arrow P1 from one side to the other side across the straight line L1. Each will be placed. As a result, it is possible to extract an electric signal having a clearer polarity with the opposite sign. Therefore, the measurement accuracy of the shear force of the touch sensor device 1 is improved.

  Further, in the sensor plan view, the first detection unit 13A and the second detection unit 13B are arranged in line symmetry with respect to a straight line L1 passing through the center of gravity K of the elastic member 16. Therefore, each detection part 13 is arrange | positioned with sufficient balance in the area | region of the elastic member 16 to which a compressive force is applied, and the area | region of the elastic member 16 to which a tensile force is applied. As a result, the determination of the polarity of the electric signal becomes clearer, and the measurement accuracy of the shear force of the tactile sensor device 1 is improved.

  In the first embodiment, since the rigid layer 17 is disposed on the surface of the elastic member 16, when a contact object comes into contact with the rigid layer 17 and a shearing force is applied, the shearing force is applied to the elastic member 16. Local transmission can be prevented. That is, the above-described compressive force or tensile force in the elastic member 16 can be more reliably applied to each detection unit 13. As a result, the measurement accuracy of the shear force of the tactile sensor device 1 is improved.

[Second Embodiment]
Next, a tactile sensor device 1A according to a second embodiment of the present invention will be described.
FIG. 5 is a plan view showing a tactile sensor device 1A according to the second embodiment.
In the description of the second and subsequent embodiments, the same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted or simplified.
A tactile sensor device 1A according to the second embodiment includes a tactile sensor element 10A. The tactile sensor element 10A includes a first detection unit 13A and a second detection unit 13B, as well as a third detection unit 13C and It differs from the tactile sensor element 10 of the first embodiment in that it includes a fourth detection unit 13D.

  As shown in FIG. 5, the substrate 11 of the touch sensor element 10A further includes a third opening 111C and a fourth opening 111D. The four openings 111 are formed at positions near each side of the elastic member 16 in the sensor plan view. More specifically, in the sensor plan view, as shown in FIG. 5, with respect to the center of gravity K of the elastic member 16, the first opening 111A on the left side, the second opening 111B on the right side, and the lower side In addition, a third opening 111C is formed, and a fourth opening 111D is formed on the upper side. Then, in the sensor plan view, the first line segment connecting the center of gravity of the first opening 111A and the center of gravity of the second opening 111B, the center of gravity of the third opening 111C, and the center of gravity of the fourth opening 111D. The second line to connect intersects.

In the second embodiment, the openings 111 are arranged symmetrically with respect to the straight line L1 or the straight line L2 passing through the center of gravity K of the elastic member 16 in the sensor plan view. Specifically, as shown in FIG. 5, the first opening 111A and the second opening 111B are arranged symmetrically with respect to the straight line L2, and the third opening 111C and the fourth opening are arranged. 111D is arranged symmetrically with respect to the straight line L3.
In the second embodiment, the support film 12 is formed on the substrate 11 and covers the four openings 111. Similarly to the first embodiment, as shown in FIG. 5, a region that closes the four openings 111 is referred to as a membrane 121.

In the second embodiment, the detection unit 13 includes the first detection unit 13A, the second detection unit 13B, the third detection unit 13C, and the fourth detection unit 13D as described above. These four detection units 13 are arranged in an inner region of the opening 111 in the sensor plan view. Each detection unit 13 is covered with a common elastic member 16.
Here, the first detector 13A is arranged at a position corresponding to the first opening 111A, the second detector 13B is arranged at a position corresponding to the second opening 111B, and the third The detection unit 13C is disposed at a position corresponding to the third opening 111C, and the fourth detection unit 13D is disposed at a position corresponding to the fourth opening 111D.
Each of the four detection units 13 includes the same piezoelectric laminate unit 14 as in the first embodiment.
The output unit 15 in the second embodiment is installed for each of the four detection units 13.

The elastic member 16 of the second embodiment includes at least the first detection unit 13A, the second detection unit 13B, the third detection unit 13C, the fourth detection unit 13D, and the first detection in the sensor plan view. Covering the support film 12 in the quadrangular region having the part 13A, the second detection part 13B, the third detection part 13C, and the fourth detection part 13D as vertices.
Furthermore, the center of gravity K of the elastic member 16 is located at the intersection of the first line segment and the second line segment.
A rigid layer 17 is formed on the surface of the elastic member 16.

Next, the operation of the touch sensor element 10A in the second embodiment will be described.
In the second embodiment, the direction from the first detection unit 13A side to the second detection unit 13B side corresponds to the direction of the arrow P1 in the first embodiment, and when a shearing force in this direction is applied, It operates similarly to one embodiment.
The third detection unit 13C and the fourth detection unit 13D are located near the middle of the elastic member 16 in the direction from the first detection unit 13A side to the second detection unit 13B side. In such a position, even if a shearing force is applied in the direction, almost no compressive force and tensile force are generated in the elastic member 16. For this reason, the membranes 121 of the third detection unit 13C and the fourth detection unit 13D are hardly displaced, and the voltage output from the third detection unit 13C and the voltage output from the fourth detection unit 13D are as follows. Trace amount or not output. Even if a very small voltage output is obtained, the voltage polarities output from the third detection unit 13C and the fourth detection unit 13D are the same.

  In addition, when a shearing force is applied from the third detection unit 13C side to the fourth detection unit 13D side in the sensor plan view, the tactile sensor element 10A can detect the magnitude and direction of the shearing force. . In this case, the voltage output from the third detection unit 13C and the fourth detection unit 13D are the same as in the case of applying the shearing force in the direction from the first detection unit 13A side to the second detection unit 13B side. The output voltage has a reverse relationship between positive and negative. On the other hand, since the first detection unit 13A and the second detection unit 13B are located in the vicinity of the middle of the elastic member 16 in the shear direction in this case, the voltage output from the first detection unit 13A and the second detection The voltage output from the unit 13B is very small or not output.

  Further, Table 2 shows the polarity pattern of the output signal of each detector 13 when the direction of the shearing force applied to the tactile sensor element 10A is variously changed. The direction of the shear force in Table 2 is also based on FIG.

  As shown in Table 2, also in the tactile sensor element 10A, the polarity of the voltage output from each detection unit 13 differs according to the shearing force direction. Therefore, the processing unit 20 can determine the shearing force direction based on the polarities of these voltages. In particular, in the tactile sensor element 10 </ b> A, each detection unit 13 is installed one by one on the upper, lower, left, and right sides with respect to the center of gravity K of the elastic member 16 in the sensor plan view. Therefore, even when a shearing force is applied in an oblique direction, the processing unit 20 can determine the direction of the shearing force from the polarity relationship as shown in Table 2.

The determination of the shearing force direction by the processing unit 20 in the second embodiment is different from the first embodiment in that it is based on the outputs from the four detection units 13.
A positive polarity voltage is output from the first detection unit 13A, a negative polarity voltage is output from the second detection unit 13B, and a small amount of voltage is output from the third detection unit 13C and the fourth detection unit 13D. When output, the calculation unit 22 of the processing unit 20 determines the direction of the shearing force based on the polarities of these input electrical signals and the output voltage polarity pattern stored in the storage unit 21. In the case of this example, it can be determined from Table 1 of the output voltage polarity pattern that shear force in the direction D1⇒D5 is applied to the tactile sensor element 10A.
As another example, a positive polarity voltage is output from the first detection unit 13A and the third detection unit 13C, and a negative polarity voltage is output from the second detection unit 13B and the fourth detection unit 13D. Think in case. In this case, from Table 2 of the output voltage polarity pattern, it can be determined that a shearing force in the D2⇒D6 direction, that is, the upper right direction in the sensor plan view of FIG. 5 is applied to the tactile sensor element 10A.

  When a pressing force is applied to the tactile sensor element 10A, the membrane 121 of each detection unit 13 bends downward, so that the polarity of the output voltage is negative. Therefore, when it becomes such an output voltage polarity pattern, the process part 20 can determine with the pressing force having been provided.

[Effects of Second Embodiment]
The second embodiment has the following effects in addition to the effects described in the first embodiment.
In the second embodiment, the first line segment connecting the center of gravity of the first opening 111A and the center of gravity of the second opening 111B and the center of gravity of the third opening 111C and the fourth opening in the sensor plan view. Four sensors are arranged so that the second line connecting the center of gravity of 111D intersects. The elastic member 16 covers the four detection units and the support film 12 in the quadrangular region having the four detection units as apexes. Further, the center of gravity K of the elastic member 16 in the sensor plan view is located at the intersection of the first line segment and the second line segment in the sensor plan view.
Therefore, the tensile force or the compressive force accompanying the elastic deformation of the elastic member 16 is easily applied to the four detection units 13. Further, based on the output voltage polarity pattern as shown in Table 2, it is possible to measure the shearing force in the oblique direction in addition to the vertical direction and the horizontal direction.
Therefore, according to the second embodiment, the applied triaxial force can be detected. Here, the forces in the three axial directions are the pressing force on the tactile sensor device and the shearing force in the direction of the substrate 11 surface of the tactile sensor device.

[Third embodiment]
Next, a tactile sensor element according to a third embodiment of the present invention will be described.
FIG. 6 is a plan view showing a tactile sensor element 10B according to the third embodiment.
The tactile sensor element 10B according to the third embodiment is different from the tactile sensor element of the above embodiment in that the detection units 13 are electrically connected in series. A tactile sensor device is configured by connecting the tactile sensor element 10B to the processing unit 20 described above.

  As shown in FIG. 6, the substrate 11 of the tactile sensor element 10B includes a first opening 111A, a second opening 111B, a third opening 111C, and a fourth opening 111D. As shown in FIG. 6, the four openings 111 have a first opening 111A on the lower left side, a second opening 111B on the lower right side, and a third opening 111C on the upper left side in the sensor plan view. A fourth opening 111D is formed on the upper right side. Then, in sensor plan view, the third line segment connecting the center of gravity of the first opening 111A and the third opening 111C, and the center of gravity of the second opening 111B and the center of gravity of the fourth opening 111D are connected. The fourth line segment is separated.

In the third embodiment, as shown in FIG. 6, the first opening 111 </ b> A and the second opening 111 </ b> B are arranged symmetrically with respect to the straight line L <b> 4 in the sensor plan view, and the third opening 111C and the fourth opening 111D are arranged in line symmetry with respect to the straight line L4.
In the third embodiment, the support film 12 covers the four openings 111. Similarly to the above embodiment, as shown in FIG. 6, a region that closes the four openings 111 is referred to as a membrane 121.

As shown in FIG. 6, the tactile sensor element 10B includes a first detection unit 13A, a second detection unit 13B, a third detection unit 13C, and a fourth detection unit 13D. Each of the four detection units 13 includes the same piezoelectric laminate unit 14 as in the first embodiment.
In the third embodiment, the first detection unit 13A and the third detection unit 13C are electrically connected in series, and the second detection unit 13B and the fourth detection unit 13D are electrically connected in series. It is connected to the. As shown in FIG. 6, such electrical connection is made by connecting the detectors 13 to each other with an electrode wire 142A.
The first detection unit 13A and the second detection unit 13B are connected to the output unit 15, respectively. The output unit 15 is connected to the processing unit 20 (not shown). Also in the third embodiment, the output unit 15 corresponds to the lower electrode of the piezoelectric laminate unit 14, and the output unit corresponding to the upper electrode is not shown in the same manner as in the first embodiment.
Each output unit 15 is connected to a processing unit (not shown) similar to the processing unit 20 of the above embodiment.

The elastic member 16 of the third embodiment includes at least the first detection unit 13A, the second detection unit 13B, the third detection unit 13C, the fourth detection unit 13D, and the first detection in the sensor plan view. Covering the support film 12 in the quadrangular region having the part 13A, the second detection part 13B, the third detection part 13C, and the fourth detection part 13D as vertices.
The center of gravity K of the elastic member 16 in the sensor plan view is located in the quadrangular region in the sensor plan view.
A rigid layer 17 is formed on the surface of the elastic member 16.

Next, the operation of the touch sensor element 10B in the third embodiment will be described.
First, the direction from the first detection unit 13A toward the second detection unit 13B, that is, the case of the shearing force in the direction of the arrow P2 in FIG. 6 will be described. In the case of the shearing force in the direction of the arrow P2, the first detection unit 13A and the third detection unit 13C generate an electric signal having a positive polarity, and the second detection unit 13B and the fourth detection unit 13D are negative. An electrical signal of the polarity is generated. Then, the electrical signals of the first detection unit 13A and the third detection unit 13C are added and output from one output unit 15, and the electrical signals of the second detection unit 13B and the fourth detection unit 13D are Addition and output from the other output unit 15.

  On the other hand, the shearing force applied in the direction from the first detection unit 13A to the third detection unit 13C or in the opposite direction (the vertical direction in FIG. 6) is difficult to detect. In this case, the first detection unit 13A and the second detection unit 13B on the lower side in FIG. 6 generate a positive polarity electrical signal, and the upper third detection unit 13C and the fourth detection unit 13D on the upper side. A negative polarity electrical signal is generated. Here, as described above, since the detection unit 13 is electrically connected, the electrical signals of the first detection unit 13A and the third detection unit 13C are added to be a minute amount or detected. Not. Similarly, the electrical signals of the second detection unit 13B and the fourth detection unit 13D are also minute or not detected as a result of the addition.

[Operational effects of the third embodiment]
In addition to the effects described in the first embodiment, the third embodiment has the following effects.
In the third embodiment, since the detection units 13 of the tactile sensor element 10B are electrically connected in series two by two as described above, the electrical signals output from the detection units 13 are added to output the output unit. 15 can be output. Therefore, compared with the case where an electric signal is output from each detection unit 13 one by one, the electric signal becomes larger and the measurement accuracy of the shearing force is improved.

[Fourth embodiment]
Next, as an application example of the device using the touch sensor device 1 described above, a gripping device including the touch sensor device 1 will be described with reference to the drawings.

FIG. 7 is an apparatus block diagram showing a schematic configuration of a gripping apparatus according to a fourth embodiment of the present invention.
In FIG. 7, the gripping device 50 is a device that includes at least a pair of gripping arms 51 and grips the gripping target object Z by the gripping arms 51. The gripping device 50 is a device that grips and lifts an object conveyed by a belt conveyor or the like, for example, in a manufacturing factory that manufactures products. The gripping device 50 includes the gripping arm 51, an arm driving unit 52 that drives the gripping arm 51, and a control device 54 that controls the driving of the arm driving unit 52.

  Each of the pair of gripping arms 51 includes a gripping surface 53 that is a contact surface at the tip, and grips and lifts the gripping object Z by gripping the gripping surface 53 against the gripping object Z. Here, in the present embodiment, a configuration in which a pair of gripping arms 51 is provided is illustrated, but the present invention is not limited to this. For example, a configuration in which the gripping target object Z is gripped by three-point support by the three gripping arms 51 is used. Also good.

  The grip surface 53 provided on the grip arm 51 is provided with the tactile sensor device 1 described in the first embodiment on the surface, and the rigid layer 17 of the tactile sensor device 1 is exposed. The gripping arm 51 grips the gripping target object Z by bringing the rigid layer 17 into contact with the gripping target object Z and applying a predetermined pressure (positive pressure) to the gripping target object Z. In such a gripping arm 51, the tactile sensor device 1 provided on the gripping surface 53 causes a positive pressure applied to the gripping target Z and shearing that the gripping target Z tends to slide down from the gripping surface 53 when gripped. The force is detected, and an electric signal corresponding to the positive pressure or shear force is output to the control device 54. Specifically, the processing unit 20 of the tactile sensor device 1 receives an electrical signal output from each detection unit 13, and the calculation unit 22 calculates a positive pressure and a shearing force. The processing unit 20 outputs the calculation result to the control device 54 as a shear force detection signal and a positive pressure detection signal.

The arm drive unit 52 is a device that moves the pair of gripping arms 51 in a direction toward or away from each other. The arm driving unit 52 includes a holding member 55 that holds the gripping arm 51 movably, a drive source 56 that generates a driving force that moves the gripping arm 51, and a driving force of the driving source that is transmitted to the gripping arm 51. A drive transmission unit 57 is provided.
The holding member 55 includes, for example, a guide groove along the moving direction of the grip arm 51, and holds the grip arm 51 in a movable manner by holding the grip arm 51 in the guide groove. The holding member 55 is provided so as to be movable in the vertical direction.
The drive source 56 is, for example, a drive motor, and generates a driving force in accordance with a drive control signal input from the control device 54.
The drive transmission unit 57 is configured by, for example, a plurality of gears, transmits the driving force generated by the drive source 56 to the grip arm 51 and the holding member 55, and moves the grip arm 51 and the holding member 55.
In the present embodiment, the above configuration is shown as an example, but the present invention is not limited to this. That is, the configuration is not limited to the configuration in which the grip arm 51 is moved along the guide groove of the holding member 55, and the configuration may be such that the grip arm is rotatably held. The drive source 56 is not limited to a drive motor, and may be configured to be driven by, for example, a hydraulic pump. The drive transmission unit 57 is not limited to a configuration in which a drive force is transmitted by a gear, but is transmitted by a belt or a chain. It is good also as a structure provided with the piston driven by a structure, hydraulic pressure, etc.

The control device 54 is connected to the tactile sensor device 1 provided on the gripping surface 53 of the gripping arm 51 and the arm driving unit 52, and controls the entire gripping operation of the gripping object Z in the gripping device 50.
Specifically, as shown in FIG. 7, the control device 54 is connected to the arm driving unit 52 and the tactile sensor device 1 and controls the entire operation of the gripping device 50. The control device 54 includes a signal detection unit 541 that reads a shearing force detection signal and a positive pressure detection signal input from the tactile sensor device 1, a grip detection unit 542 that detects a slipping state of the grip target Z, and an arm driving unit. 52 is provided with drive control means 543 for outputting a drive control signal for controlling the drive of the gripping arm 51. Moreover, as this control apparatus 54, general purpose computers, such as a personal computer, can also be used, for example, it is good also as a structure provided with the display apparatus etc. which display input devices, such as a keyboard, and the holding state of the holding object Z, for example.
The signal detection unit 541, the grip detection unit 542, and the drive control unit 543 may be stored in a storage unit such as a memory as a program, and may be appropriately read and executed by an arithmetic circuit such as a CPU. For example, it may be constituted by an integrated circuit such as an IC and perform predetermined processing on the input electric signal.

  The signal detection unit 541 is connected to the tactile sensor device 1 and acquires a positive pressure detection signal, a shear force detection signal, and the like input from the tactile sensor device 1. The detection signal recognized by the signal detection unit 541 is output to and stored in a storage unit such as a memory (not shown), and is output to the grip detection unit 542.

The grip detection unit 542 determines whether or not the grip target Z is gripped by the grip arm 51 based on the shearing force detection signal.
Here, FIG. 8 shows a diagram showing the relationship between the positive pressure and the shearing force acting on the tactile sensor in the gripping operation of the gripping device 50.
In FIG. 8, until the positive pressure reaches a predetermined value, the shear force increases as the positive pressure increases. This state is a state in which a dynamic friction force is acting between the gripping object Z and the gripping surface 53, and the gripping detection means 542 is a slipping state in which the gripping target object Z slides down from the gripping surface 53. It is determined that gripping is incomplete. On the other hand, when the positive pressure exceeds a predetermined value, the shear force does not increase even if the positive pressure is increased. This state is a state in which a static friction force is acting between the gripping object Z and the gripping surface 53, and the gripping detection means 542 is in a gripping state in which the gripping object Z is gripped by the gripping surface 53. to decide.
Specifically, when the value of the shearing force detection signal exceeds a predetermined threshold corresponding to the static friction force, it is determined that the gripping has been completed.

  The drive control unit 543 controls the operation of the arm drive unit 52 based on the electrical signal detected by the grip detection unit 542.

Next, operation | movement of the control apparatus 54 is demonstrated based on drawing.
FIG. 9 is a flowchart showing the gripping operation of the gripping device 50 under the control of the control device 54. FIG. 10 is a timing diagram illustrating the transmission timing of the drive control signal to the arm drive unit 52 and the detection signal output from the touch sensor device 1 during the gripping operation of the gripping device 50.

  In order to grip the object Z to be gripped by the gripping device 50, first, the drive control means 543 of the control device 54 outputs a drive control signal to the arm driving unit 52 to move the gripping arms 51 in the direction of approaching each other. (Gripping operation) Thereby, the gripping surface 53 of the gripping arm 51 comes close to the gripping object Z (FIG. 9: Step S11).

  Next, the grip detection unit 542 of the control device 54 determines whether or not the gripping object Z is in contact with the gripping surface 53 (FIG. 9: Step S12). Specifically, the control device 54 determines whether or not an input of a positive pressure detection signal is detected by the signal detection unit 541. Here, when the positive pressure detection signal is not detected, it is determined that the gripping surface 53 is not in contact with the gripping object Z, and the drive control unit 543 continues step S11 and outputs a drive control signal, The grip arm 51 is further driven.

On the other hand, when the gripping surface 53 comes into contact with the gripping object Z (FIG. 10: timing T1), the elastic member 16 of the tactile sensor device 1 is distorted, and positive pressure detection corresponding to the positive pressure calculated based on the strain amount. A signal is output.
When the grip detection unit 542 detects a positive pressure detection signal, the drive control unit 543 stops the proximity movement of the grip arm 51 (press on the gripping object Z) (FIG. 9: Step S13, FIG. 10: Timing T2). ). Further, the drive control means 543 outputs a drive control signal to the arm drive unit 52 to perform an operation (lifting fine operation) for lifting the grip arm 51 upward (FIG. 9: step S14, FIG. 10: timings T2 to T3). ).

Here, when lifting the grasped object Z, the elastic member 16 is distorted in the shearing direction by the shearing force, and the tactile sensor device 1 calculates a shearing force corresponding to the amount of strain, and the shearing force corresponding to the shearing force is calculated. A detection signal is output.
The grip detection unit 542 determines whether or not there is a slip based on the shearing force detection signal input to the signal detection unit 541 (step S15).

At this time, if the grip detection unit 542 determines that there is a slip, the drive control unit 543 controls the arm driving unit 52 to push the grip arm 51 in the direction of pressing the grip surface 53 against the grip target Z. It is moved to increase the gripping force (positive pressure) (FIG. 9: Step S16).
That is, the control device 54 causes the drive control unit 543 to perform a gripping operation at timing T3 in FIG. 10 to increase the positive pressure on the gripping target Z, and the signal detection unit 541 again performs the tactile sensor device 1. The shearing force detection signal output from is detected. When the slip detection operation (timing T2 to T6) as described above is repeated and the shear force detection signal becomes equal to or greater than the predetermined threshold A1 (timing T6), there is no slip, that is, gripping is completed in step S15. The slip detection operation is stopped.

[Effects of the fourth embodiment]
The gripping device 50 according to the fourth embodiment as described above includes the tactile sensor device 1 according to the first embodiment. As described above, the tactile sensor device 1 can detect the shearing force and the positive pressure even with a simple structure. Therefore, the gripping device 50 can detect the shearing force detection signal and the positive pressure. Based on the signal, an accurate gripping operation can be performed.

  Although the tactile sensor device 1 is used in the fourth embodiment, the tactile sensor device 1A may be used instead. As described above, the tactile sensor device 1 </ b> A can detect not only the vertical direction but also the shearing force in the horizontal direction and the diagonal direction in the sensor plan view. Therefore, when the tactile sensor device 1A is used, not only the shearing force when lifting the gripping object Z, but also the shearing force in the transport direction when gripping the object transported on the belt conveyor, for example. Can also be measured.

[Fifth embodiment]
In the fourth embodiment, the gripping device provided with the tactile sensor device 1 is exemplified, but the present invention is not limited to this.
In the fifth embodiment, an iron will be described based on the drawings as another application example of the device using the tactile sensor device 1.
Here, in 5th embodiment, the iron 60 provided with schematic structure as shown in FIG. 13 uses the tactile sensor apparatus 1B provided with the proximity sensor 70 (refer FIG. 11) which detects the distance with a contact thing.

FIG. 11 is a plan view showing a schematic configuration of the touch sensor device 1B.
The tactile sensor device 1B has a configuration in which the tactile sensor device 1A described in the second embodiment further includes a proximity sensor 70. The proximity sensor 70 is installed on the substrate 11 and includes a proximity detection ultrasonic element 71 and a control unit 80.
As shown in FIG. 11, the proximity detecting ultrasonic element 71 is disposed in an opening 711 formed in the substrate 11, a support film 72 (membrane 721) closing the opening 711, and an inner region of the membrane 721. And a piezoelectric laminated portion 73 to be formed. Similar to the piezoelectric laminate portion 14 of the first embodiment described above, the piezoelectric laminate portion 73 includes a piezoelectric body, and a lower electrode and an upper electrode that are disposed with the piezoelectric body interposed therebetween.
The elastic member 16 is not formed on the proximity detecting ultrasonic element 71. Accordingly, when an AC voltage is applied to the proximity detecting ultrasonic element 71, the ultrasonic wave is transmitted by propagating air directly above the tactile sensor device 1B. Specifically, when an AC voltage is applied from the control unit 80 (see FIG. 12) between the lower electrode and the upper electrode of the piezoelectric laminate unit 73, the piezoelectric body expands and contracts according to the applied voltage. As a result, the membrane 721 vibrates and ultrasonic waves are transmitted to the contact object side.
When a contact object approaches immediately above the touch sensor device 1B, the ultrasonic wave transmitted from the proximity detection ultrasonic element 71 is reflected by the contact object and received by the proximity detection ultrasonic element 71.

  FIG. 12 is a block diagram illustrating a schematic configuration of the control unit 80 in the tactile sensor device 1B. As shown in FIG. 12, the control unit 80 includes a transmission / reception switching circuit 81, a transmission / reception switching control unit 82, an ultrasonic signal transmission circuit 83, a time measurement unit 84, a storage unit 85, an arithmetic processing unit 86, It has.

The transmission / reception switching circuit 81 is a switching circuit that switches a connection state based on a mode switching signal input from the transmission / reception switching control unit 82.
Specifically, when a control signal for switching to the ultrasonic transmission mode is input from the transmission / reception switching control unit 82, the transmission / reception switching circuit 81 uses the drive signal input from the ultrasonic signal transmission circuit 83 as a tactile sensor device. It switches to the switching state which can be output to the ultrasonic element 71 for proximity detection of 1B.
On the other hand, when a control signal for switching to the ultrasonic reception mode is input from the transmission / reception switching control unit 82, the transmission / reception switching circuit 81 converts the reception signal input from the proximity detection ultrasonic element 71 of the tactile sensor device 1B to the time. It switches to the switching state which can be output to the measurement part 84. FIG.

The transmission / reception switching control unit 82 switches between an ultrasonic transmission mode in which ultrasonic waves are transmitted from the proximity detection ultrasonic element 71 and an ultrasonic reception mode in which ultrasonic waves are received by the proximity detection ultrasonic element 71.
Specifically, for example, when the iron 60 is turned on and the tactile sensor device 1B is turned on, the transmission / reception switching control unit 82 first performs a process of switching to the ultrasonic transmission mode.
In this processing, the transmission / reception switching control unit 82 outputs a control signal for switching to the ultrasonic transmission mode to the transmission / reception switching circuit 81, and outputs a control signal for outputting a drive signal from the ultrasonic signal transmission circuit 83.
The transmission / reception switching control unit 82 monitors the time measured by a timer (not shown), and performs a process of switching from the ultrasonic transmission mode to the ultrasonic reception mode after a predetermined transmission time has elapsed. Here, the transmission time may be set to about the time for which a burst wave of, for example, 1 to 2 frequencies is transmitted from the proximity detecting ultrasonic element 71.
In the ultrasonic reception mode, the transmission / reception switching control unit 82 outputs a control signal for switching to the ultrasonic reception mode to the transmission / reception switching circuit 81, and the transmission / reception switching circuit 81 is input from the proximity detection ultrasonic element 71. The received signal is switched to a connection state that can be input to the time measuring unit 84.

  When a control signal for outputting a drive signal is input from the transmission / reception switching control unit 82 in the transmission mode, the ultrasonic signal transmission circuit 83 drives a drive signal (drive pulse) for driving the proximity detection ultrasonic element 71. ) To the transmission / reception switching circuit 81.

The time measuring unit 84 monitors the time measured by the time measuring unit and measures the time until the ultrasonic wave is received.
Specifically, the time measurement unit 84 performs the ultrasonic transmission timing when the transmission / reception switching control unit 82 performs the process of switching to the ultrasonic transmission mode, that is, the time from when the ultrasonic wave is transmitted from the proximity detection ultrasonic element 71. Count.
The transmission / reception switching control unit 82 resets the time counted by the time measuring unit at the ultrasonic wave transmission timing. Then, the transmission / reception switching control unit 82 performs a process of switching to the ultrasonic wave reception mode, and a reception signal corresponding to the reflected ultrasonic wave received by the proximity detection ultrasonic element 71 is input from the transmission / reception switching circuit 81 to the time measurement unit 84. Then, the time measuring unit 84 acquires the time (TOF data: Time Of Flight data) at the input timing. The acquired TOF data is input to the arithmetic processing unit 86.

The storage unit 85 stores various programs and various data for performing various processes of the arithmetic processing unit 86.
Specifically, the storage unit 85 stores sound speeds in the air, various programs executed by the arithmetic processing unit 86, and the like. Moreover, it is good also as a structure etc. which the various data calculated by the arithmetic process part 86 are memorize | stored.

The arithmetic processing unit 86 includes a distance calculation unit 861.
The distance calculation unit 861 calculates the distance between the tactile sensor device 1B and the contact object when the time measurement unit 84 acquires the TOF data based on the reception signal output from the proximity detection ultrasonic element 71. . Specifically, the time measurement unit 84 calculates the distance between the tactile sensor device 1B and the contact object based on the acquired TOF data and the sound velocity in the air read from the storage unit 85.

FIG. 13 is a block diagram showing a schematic configuration of the iron of the present embodiment.
As shown in FIG. 13, the iron 60 includes a heater 61, a base portion 62, a temperature sensor 63 provided on the base portion 62, a tactile sensor device 1 </ b> B provided on the base portion 62, and a heater drive circuit 64. It is equipped with. The heater drive circuit 64 of the iron 60 controls the voltage applied to the heater 61 based on the signals from the temperature sensor 63 and the tactile sensor device 1B, and heats the base portion 62 to an optimum temperature for the target fabric.

The heater 61 generates heat by the voltage applied from the heater drive circuit 64 and heats the base portion 62.
The base portion 62 is a portion that comes into contact with the target fabric and stretches the wrinkles of the target fabric, and is heated by the heater 61. And as shown in FIG. 13, the tactile sensor device 1B is provided in a part of this base part 62, and the rigid layer 17 of the tactile sensor device 1B is exposed so as to be in contact with the target fabric.
The base unit 62 is provided with a temperature sensor 63, and this temperature sensor 63 detects the temperature of the base unit 62 and outputs it to the heater drive circuit 64.

The heater drive circuit 64 is connected to the tactile sensor device 1B, the temperature sensor 63, and the heater 61, and controls the voltage applied to the heater 61 based on signals from the tactile sensor device 1 and the temperature sensor 63. As shown in FIG. 13, the heater drive circuit 64 includes a memory 641 as a storage unit, a signal detection unit 642, a fabric determination unit 643, and a temperature control unit 644.
The heater drive circuit 64 is configured, for example, as a computer having a calculation circuit such as a CPU or a storage circuit, and the fabric determination unit 643 and the temperature control unit 644 function as software executed by calculation processing by the calculation circuit. It is good also as a structure to be. For example, the heater driving circuit 64 may be configured by an integrated circuit such as an IC, and may perform a predetermined process on the input electric signal.

The memory 641 stores stress-roughness value data that is correlation data. The stress-roughness value data is data in which the roughness value of the target fabric is recorded according to the stress detected by the tactile sensor device 1B. For example, the roughness value corresponding to the shearing force is Recorded for each positive pressure.
The memory 641 may store roughness-temperature data in which the optimum temperature of the base unit 62 corresponding to the roughness value is recorded.

The signal detection unit 642 is connected to the tactile sensor device 1B, and acquires a positive pressure detection signal, a shear force detection signal, and the like input from the tactile sensor device 1B. Specifically, the processing unit 20 of the tactile sensor device 1B receives the electrical signal output from each detection unit 13, calculates the positive pressure and shear force by the calculation means, and calculates the calculation result as the shear force. It outputs to the signal detection part 642 as a detection signal and a positive pressure detection signal.
The detection signal detected by the signal detection unit 642 is output and stored in the memory 641 and also output to the fabric discrimination unit 643.

The fabric discrimination unit 643 discriminates the type of the target fabric based on the shearing force and positive pressure input from the signal detection unit 642 and the stress-roughness value data stored in the memory 641.
For example, in this embodiment, the roughness corresponding to the shearing force is stored for each positive pressure as the stress-roughness value data. In this case, the fabric discriminating unit 643 reads out the stress-roughness value data corresponding to the positive pressure from the memory 641 and acquires the roughness value corresponding to the shearing force from the stress-roughness value data.
Then, the fabric discrimination unit 643 outputs the acquired roughness value to the temperature control unit 644.

The temperature control unit 644 controls the voltage applied to the heater 61 based on the roughness value input from the fabric determination unit 643 and the temperature of the base unit 62 detected by the temperature sensor 63.
Specifically, the temperature control unit 644 reads roughness-temperature data from the memory 641 and acquires the optimum temperature of the base unit 62 according to the roughness value input from the fabric determination unit 643. Then, the temperature control unit 644 calculates an applied voltage value to the heater 61 necessary for setting the base unit 62 to the optimum temperature from the difference value between the detected temperature and the optimum temperature input from the temperature sensor 63. Apply to heater 61.

[Operation of iron]
Next, the operation of the iron 60 as described above will be described.
FIG. 14 is a flowchart showing the operation of the iron of the fifth embodiment.
When power is supplied to the iron 60 by the user, the proximity detecting ultrasonic element 71 of the proximity sensor 70 is driven. When the TOF data based on the reception signal output from the proximity detection ultrasonic element 71 is acquired in the time measurement unit 84, the distance calculation unit 861 determines the target based on the sound velocity in the air read from the storage unit 85. The distance between the fabric and the touch sensor device 1B (base portion 62) is calculated. When the distance between the target fabric and the base portion 62 falls within a preset distance, the touch sensor device 1B shifts to the drive mode (step S21). In the drive mode, the processing unit 20 is in a state where the electric signal output from each detection unit 13 can be processed.

  Thereafter, the heater drive circuit 64 of the iron 60 determines whether or not the target fabric has contacted the base portion 62 (step S22). Specifically, the heater drive circuit 64 determines whether or not the signal detection unit 642 detects the input of a positive pressure detection signal. Here, when the positive pressure detection signal is not detected, it is determined that the target fabric is not in contact with the base portion 62. In this case, the heater drive circuit 64 continues step S22 and continues the contact determination process between the target fabric and the base portion 62.

In step S22, when the signal detection unit 642 detects the input of the positive pressure detection signal, the input of the shear force detection signal is further detected to determine whether or not the magnitude of the shear force is greater than zero ( Step S23).
That is, since the magnitude of the positive pressure changes depending on the strength with which the user presses the iron 60 against the target fabric, the type of the target fabric cannot be determined only by the positive pressure. Therefore, when the magnitude of the shearing force is 0, the process of step S23 is continued.
On the other hand, when the magnitude of the shearing force detected by the shearing force detection signal is greater than 0 in step S23, the fabric determination unit 643 reads the stress-roughness value data corresponding to the positive pressure from the memory 641, and shears. A roughness value corresponding to the force is acquired (step S24).

Thereafter, the temperature control unit 644 reads the roughness-temperature data from the memory 641, acquires the temperature corresponding to the roughness value acquired in step S24, and sets it as the optimum temperature (step S25).
Furthermore, the temperature control unit 644 applies the difference between the detected temperature detected by the temperature sensor 63 and the optimum temperature set in step S25 to the heater 61 necessary for setting the base unit 62 to the optimum temperature. An applied voltage value is calculated, and the voltage value is applied to the heater 61 (step S26).
Thereby, the iron 60 can automatically set the temperature of the base portion 62 according to the type of the target fabric.

(Operational effects of the fifth embodiment)
The iron 60 of the fifth embodiment as described above includes the touch sensor device 1B described above, and the touch sensor device 1B includes the configuration of the touch sensor device 1A of the second embodiment. As described above, the tactile sensor device 1A can detect the shearing force and the positive pressure even with a simple structure. Therefore, even in the iron 60, the positive pressure and the pressure when the target fabric comes into contact with the base portion 62 are detected. Shear force can be detected.

  And the heater drive circuit 64 of the iron 60 can discriminate the roughness of the target fabric corresponding to the detected positive pressure and shearing force by the fabric discriminating unit 643. Therefore, the type of the target fabric can be determined from the determined roughness of the target fabric, and the temperature control unit 644 can set the temperature of the base unit 62 corresponding to the type of the fabric. Therefore, in the iron 60, the temperature of the base part 62 can be automatically set corresponding to the fabric, and the complicated work of changing the temperature setting according to the type of the target fabric can be omitted.

In the fifth embodiment, an example in which the stress-roughness data in which the roughness value corresponding to the positive pressure and the shearing force is recorded is stored in the memory 641 is described. However, for example, the positive pressure and the shearing force are stored. The memory 641 may be configured to store the stress-fabric type data in which the type of the target fabric corresponding to the data is recorded. In this case, the fabric determination unit 643 directly determines the type of the target fabric according to the positive pressure and the shearing force, and the temperature control unit 644 acquires a temperature corresponding to the determined type of fabric.
Further, as the correlation data, stress-temperature data in which the optimum temperature of the base portion 62 corresponding to the positive pressure and the shearing force is stored may be stored. In this case, it is necessary to store the roughness-temperature data. Thus, it is possible to provide the iron 60 capable of automatically setting the temperature of the base portion 62 with a smaller amount of data.

  Further, in the iron 60, an example in which the temperature of the base portion 62 is automatically set by the heater driving circuit 64 has been shown. However, for example, an automatic mode in which the temperature of the base portion 62 is automatically set and a temperature is set manually. The manual mode may be switched as appropriate.

[Sixth embodiment]
Next, as a sixth embodiment of the present invention, an electronic apparatus provided with the tactile sensor as described above will be described. In the sixth embodiment, a notebook personal computer 90 as an electronic device is illustrated.

FIG. 15 is a perspective view schematically showing the configuration of the notebook computer 90 of the sixth embodiment.
In FIG. 15, the notebook personal computer 90 includes an apparatus main body 91, a display unit 92, a first input unit 93, and a second input unit 94.
The display unit 92 is composed of, for example, a liquid crystal panel or an organic panel, and is connected to an unillustrated calculation control unit housed in the apparatus main body 91. The calculation control unit displays various operation images and other information. It is configured to display.

The first input unit 93 includes a keyboard, a numeric keypad, and the like.
The second input unit 94 is provided at a position closer to the front side than the first input unit 93, and the above-described tactile sensor device 1 is used for the second input unit 94. As shown in FIG. 15, the surface of the rigid layer 17 of the tactile sensor device 1 is exposed on the surface of the second input unit 94, and the user moves his / her finger on the surface of the rigid layer 17. When a touch pen or the like is moved, shearing force or positive pressure is generated by these movements. By detecting the shearing force and the positive pressure with the tactile sensor device 1, it is possible to detect the contact position coordinates and the moving direction of the user's finger or touch pen and output them as electrical signals. And based on the output electric signal, the content of the input operation which a user desires can be recognized correctly, and the operativity of the notebook type personal computer 90 can be improved.

[Reference form]
Next, the tactile sensor element according to the reference embodiment will be described.
FIG. 16 is a plan view showing a tactile sensor element 10C according to the present embodiment.

  A tactile sensor element 10C according to the present embodiment has a configuration combining the configuration of the second embodiment and the configuration of the third embodiment. Specifically, the first detection unit 13A, the second detection unit 13B, the third detection unit 13C, and the fourth detection unit 13D in the third embodiment include the four detection units 13 and the detection unit 15. A set of blocks is regarded as one block, and four blocks are arranged in this embodiment. This is shown as detector block B1, B2, B3, B4 in FIG. These detection unit blocks B1, B2, B3, B4 are arranged in the first detection unit 13A, the second detection unit 13B, the third detection unit 13C, and the fourth detection unit 13D in the second embodiment. What is arranged in the relationship corresponds to the tactile sensor element 10C of the present embodiment.

In the tactile sensor element 10 </ b> C, each detection unit 13 constituting each detection unit block B <b> 1 to B <b> 4 is covered with an elastic member 16, and a rigid layer 17 is provided on the surface of the elastic member 16.
In the present embodiment, the detection unit blocks B1 to B4 are arranged on the upper, lower, left, and right sides with respect to the center of gravity K of the elastic member 16 in the sensor plan view.
Moreover, in this reference form, each detection part 13 which comprises each detection part block B1-B4 is installed in line symmetry with respect to the straight lines L5 and L6 which pass through the gravity center K of the elastic member 16 in sensor planar view. . As shown in FIG. 16, the first detection unit 13A and the second detection unit 13B constituting each of the detection unit blocks B1 to B4 are arranged symmetrically with respect to the straight line L5 or the straight line L6, and the third detection is performed. The part 13C and the fourth detection part 13D are arranged symmetrically with respect to the straight line L5 or the straight line L6. The straight line L5 and the straight line L6 are orthogonal.

Each detection part 13 which comprises each detection part block B1-B4 is connected to the output part 15 similarly to the said 3rd embodiment, and the added electrical signal is output by the output part 15. FIG. The output unit 15 is connected to the processing unit 20 (not shown). In the present embodiment, the output unit 15 corresponds to the lower electrode of the piezoelectric laminate unit 14, and the output unit corresponding to the upper electrode is not shown in the same manner as in the first embodiment.
Each output unit 15 is connected to a processing unit (not shown) similar to the processing unit 20 of the above embodiment.

In the tactile sensor element 10C, when a shearing force is applied to the elastic member 16 in a direction along the straight line L5, an electric signal output from the detection unit 13 configuring the detection unit block B1 and the detection unit block B2 are configured. The polarity of the electrical signal with respect to the electrical signal output from the detector 13 is opposite. At this time, the detection unit block B3 and the detection unit block B4 are located in the vicinity of the middle in the direction of the straight line L5 of the elastic member 16, so that the electrical signal is very small.
In addition, in the tactile sensor element 10C, when a shearing force is applied to the elastic member 16 in the direction of the straight line L6, the electrical signal output from the detection unit 13 configuring the detection unit block B3 and the detection unit block B4 are configured. The polarity of the electrical signal output from the detection unit 13 has the opposite sign. At this time, the detection unit block B1 and the detection unit block B2 are located in the vicinity of the middle in the direction of the straight line L6 of the elastic member 16, so that the electrical signal is very small.

  In this reference embodiment, each detection unit 13 constituting each detection unit block B1 to B4 is not installed on a straight line L5 or a straight line L6 that passes through the center of gravity K. However, as shown in FIG. 16, in the sensor plan view, the second detection unit 13B and the fourth detection unit 13D are arranged on a straight line L7 parallel to the straight line L5. Further, on both sides of the intermediate position S of the straight line L7, the second detection unit 13B and the fourth detection unit 13D of the detection unit block B1, and the second detection unit 13B and the fourth detection unit 13D of the detection unit block B2 are provided. Are installed. Even in this case, if a tensile force is applied on the detection unit block B1 side of the elastic member 16 to the shearing force in the direction of the straight line L7, a compression force is applied on the detection unit block B2 side. For this reason, electrical signals having opposite polarities are output from the detection unit 13 configuring the detection unit block B1 and the detection unit 13 configuring the detection unit block B2. The same applies to the relationship between the detection unit block B3 and the detection unit block B4.

[Effects of reference form]
In the tactile sensor element 10C, even when a shearing force in the direction of the straight line L5 and a shearing force in the direction of the straight line L6 are applied, the electrical signals whose polarity signs are reversed from the respective detection units 13 constituting the detection unit blocks B1 to B4. Can be output. Therefore, the processing unit can detect the shearing forces in the vertical, horizontal, and diagonal directions based on the output voltage polarity pattern as in the first embodiment. That is, the tactile sensor element 10C can measure a force in three axial directions.
Further, in the tactile sensor element 10C, the detection units 13 constituting the detection unit blocks B1 to B4 are electrically connected in series. Therefore, the tactile sensor element 10C can increase the output electrical signal and improve the measurement accuracy, like the tactile sensor element 10B of the third embodiment described above.

[Other Embodiments]
In addition, this invention is not limited to the above-mentioned embodiment, The deformation | transformation in the range which can achieve the objective of this invention, improvement, etc. are included in this invention.

  In the above-described embodiment, the configuration in which the rigid layer 17 is disposed on the surface of the elastic member 16 of the tactile sensor device 1 has been described. However, a configuration in which the rigid layer 17 is not disposed may be employed.

In the above-described embodiment, the elastic member 16 has been described by taking a rectangular shape as an example in the sensor plan view, but is not limited thereto. For example, the elastic member 16 may have a circular shape, an elliptical shape, or other polygonal shape in the sensor plan view.
The example at the time of setting it as the circular-shaped elastic member 16B is given. In the above-described embodiment, the example in which the detection unit 13 is arranged at an even number has been described. For example, like the tactile sensor element 10D shown in FIG. 17A, three detection units 13 may be provided and covered with the elastic member 16B. At this time, it is preferable that the detectors 13 are connected to each other so as to form a triangle. With such a configuration, multidirectional shear forces can be detected.
As another example, a configuration may be adopted in which a circular elastic member 16B is provided and a plurality of detectors 13 are arranged along the circumference thereof, like a tactile sensor element 10E shown in FIG. . With such a configuration, multidirectional shear forces can be detected.

  Further, the support film covering the opening may be a support film in a form separated between the openings. For example, the support film that covers the first opening and the support film that covers the second opening may not be continuous. However, in this case, the elastic member 16 is disposed on the substrate in a region where the support film is not formed and continuously covers a region sandwiched between the first opening and the second opening.

  Further, in the case where the direction of the shearing force to be detected is determined in advance and the direction is only one direction, the tactile sensor element 10A that can detect in the three-axis directions as in the first embodiment described above may be used. Good. For example, using the tactile sensor elements 10 and 10B that can be satisfactorily detected in a specific direction as in the above-described third embodiment, the direction of the shear force and the detectable direction of the tactile sensor elements 10 and 10B are combined. The above-described gripping device may be incorporated.

  Furthermore, in the fourth embodiment, the configuration in which a pair of gripping arms 51 is provided is illustrated as the gripping device 50. However, the gripping target object Z is gripped by moving three or more gripping arms in the direction of approaching and separating from each other. It is good also as a structure. Moreover, it is good also as a structure etc. which are provided with the drive arm driven by an arm drive part, and the fixed arm or fixed wall which is not driven, and moves a drive arm to the fixed arm (fixed wall) side.

  In the fifth embodiment, the fabric discrimination unit 643 that discriminates the type of fabric (roughness value) based on the stress-roughness value data stored in the memory 641 is exemplified as the contact object discrimination unit. Not limited to this. For example, the touch sensor devices 1, 1 </ b> A, and 1 </ b> B may be provided in the bread manufacturing device and provided with a contact object determination unit that determines the softness (kneading state) of the bread dough. In this case, the contact part determination part stores in the memory the relationship data between the stress applied to the bread dough and the optimum elastic force against the stress. Then, the contact object determination unit determines that the kneading state is optimal if the positive pressure or shearing force detected by the tactile sensor devices 1, 1A, 1B is within a predetermined threshold value centered on the optimal elastic force. . In the bread manufacturing apparatus having such a configuration, the kneaded state of the dough can be kept constant, and a stable quality dough can be manufactured.

  In addition, the piezoelectric laminated portion 14 and the piezoelectric laminated portion 73 described above are exemplified by the configuration including the piezoelectric body on the film, the lower electrode, and the upper electrode. However, the configuration is not limited to the film shape. It may be used.

  Further, although the electronic device described in the above embodiment has been described using a notebook personal computer as an example, it is not limited thereto. For example, the tactile sensor of the present invention can be applied as an input device in a PDA (Personal Data Assistance), a portable game machine, a mobile phone, a personal computer, an electronic dictionary, or the like.

  The tactile sensor elements 10A, 10B, 10C, 10D, and 10E described above are not limited to the examples described in the above description, and can be applied to other forms.

  Although the best configuration for carrying out the present invention has been specifically described above, the present invention is not limited to this. That is, the present invention has been illustrated and described primarily with respect to particular embodiments, but the present invention is not limited to the embodiments described above without departing from the scope of the technical idea and object of the present invention. Various modifications and improvements can be made by a trader.

  DESCRIPTION OF SYMBOLS 1,1A, 1B ... Tactile sensor device, 10, 10A-10E ... Tactile sensor element, 11 ... Substrate, 12 ... Support film, 13, 13A-13D ... Detection part, 14 ... Piezoelectric lamination part, 15 ... Output part, 16 , 16B ... elastic member, 17 ... rigid layer, 20 ... processing unit, 50 ... gripping device, 51 ... gripping arm, 90 ... notebook computer (electronic device), 111, 111A to 111D ... opening, 542 ... gripping detection means 543: Drive control means, Z: gripping object.

Claims (11)

A substrate having a first opening and a second opening;
A support film covering the first opening and the second opening;
A first detector disposed on the support membrane and above the first opening;
A second detection unit disposed on the support film and above the second opening;
An elastic member that is elastically deformed and disposed on the first detection unit and the second detection unit,
Each of the first detection unit and the second detection unit includes a piezoelectric stacked unit configured by stacking a lower electrode, a piezoelectric body, and an upper electrode in order from the support film side,
The elastic member is sandwiched between at least the first detection unit, the second detection unit, and the first detection unit and the second detection unit in a plan view as viewed in the thickness direction of the substrate. Covering the support membrane in the area
The surface of the elastic member is formed in parallel with the substrate surface. The tactile sensor element according to claim 1,
The center of gravity of the elastic member in plan view as viewed in the thickness direction of the substrate is a circle whose diameter is a line segment connecting the center of gravity of the first opening and the center of gravity of the second opening in plan view. A tactile sensor element characterized by being located inside. The tactile sensor element according to claim 1 or 2,
The first opening and the second opening are arranged in line symmetry with respect to a straight line passing through the center of gravity of the elastic member in a plan view as viewed in the thickness direction of the substrate. Sensor element. In the tactile sensor element according to any one of claims 1 to 3,
The substrate further has a third opening and a fourth opening,
The support film further covers the third opening and the fourth opening,
A third detector disposed on the support membrane and above the third opening;
A fourth detector disposed on the support membrane and above the fourth opening, and
Each of the third detection unit and the fourth detection unit includes a piezoelectric laminate unit configured by laminating a lower electrode, a piezoelectric body, and an upper electrode in order from the support film side,
In a plan view as viewed in the thickness direction of the substrate, the first opening, the second opening, the third opening, and the fourth opening are the center of gravity of the first opening and The first line connecting the center of gravity of the second opening and the second line connecting the center of gravity of the third opening and the center of the fourth opening are arranged to intersect,
The elastic member includes at least the first detection unit, the second detection unit, the third detection unit, the fourth detection unit, and the first detection unit and the first detection unit in the plan view. Covering the support film of the quadrangular region having the second detector, the third detector, and the fourth detector as vertices,
The tactile sensor element according to claim 1, wherein a center of gravity of the elastic member in the plan view is located at an intersection of the first line segment and the second line segment in the plan view. In the tactile sensor element according to any one of claims 1 to 3,
The substrate further has a third opening and a fourth opening,
The support film further covers the third opening and the fourth opening,
A third detector disposed on the support membrane and above the third opening;
A fourth detector disposed on the support membrane and above the fourth opening, and
Each of the third detection unit and the fourth detection unit includes a piezoelectric stacked unit configured by stacking a lower electrode, a piezoelectric body, and an upper electrode in order from the support film side,
In a plan view as viewed in the thickness direction of the substrate, the first opening, the second opening, the third opening, and the fourth opening are the center of gravity of the first opening and The third line connecting the center of gravity of the third opening and the fourth line connecting the center of gravity of the second opening and the center of gravity of the fourth opening are arranged so as to be separated from each other.
The elastic member includes at least the first detection unit, the second detection unit, the third detection unit, the fourth detection unit, and the first detection unit and the first detection unit in the plan view. Covering the support film of the quadrangular region having the second detector, the third detector, and the fourth detector as vertices,
The center of gravity of the elastic member in the plan view is located in the quadrangular region in the plan view,
The first detection unit and the third detection unit are electrically connected in series, and the second detection unit and the fourth detection unit are electrically connected in series. Characteristic tactile sensor element. In the tactile sensor element according to any one of claims 1 to 5,
A tactile sensor element having a surface parallel to the substrate surface on the surface of the elastic member, and a rigid layer having rigidity higher than that of the elastic member. A tactile sensor element according to any one of claims 1 to 3,
A processing unit that receives an electrical signal from each of the first detection unit and the second detection unit and detects a shearing force acting on the elastic member based on the polarity of the electrical signal. A tactile sensor device. A tactile sensor element according to claim 4,
An electric signal is received from each of the first detection unit, the second detection unit, the third detection unit, and the fourth detection unit, and acts on the elastic member based on the polarity of the electric signal. A tactile sensor device, comprising: a processing unit configured to detect a shearing force. A tactile sensor element according to claim 5;
Based on the polarity of the electrical signal by receiving the electrical signal from the first detection unit and the third detection unit, and the electrical signal from the second detection unit and the fourth detection unit, A tactile sensor device comprising: a processing unit that detects a shearing force acting on the elastic member. A gripping device comprising the tactile sensor device according to any one of claims 7 to 9, and gripping an object,
At least a pair of gripping arms that grips the object and is provided with the tactile sensor device on a contact surface that contacts the object;
Grip detection means for detecting a slip state of the object based on the electrical signal output from the tactile sensor device;
Drive control means for controlling the drive of the gripping arm based on the sliding state;
A gripping device comprising:   An electronic apparatus comprising the tactile sensor device according to any one of claims 7 to 9.