JP2013036396A - Flow adjusting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a low-cost flow adjusting device in which diaphragm mounting work is performed easily.SOLUTION: In the flow adjusting device including a diaphragm and a case, the diaphragm includes an o ring in its end part and the case includes a recess with which the o ring is engaged in its inner wall. The o ring is engaged with the recess and the diaphragm and the inner wall of the case constitutes a chamber. The case includes a hole for supplying and discharging fluid to and from the chamber.

Description

  The present invention relates to a flow rate adjusting device.

  The flow rate adjusting device is used in various fields. Various types of flow control devices have been proposed. For example, a flow rate adjusting device using a diaphragm has been proposed (Japanese Patent Laid-Open Nos. 10-288160, 2005-54954, 2008-232196, and 2011-90381).

JP-A-10-288160 JP 2005-54954 A JP 2008-232196 A JP 2011-90381 A

  By the way, in the proposed diaphragm type flow control device, the flow control is performed by the deformation of the diaphragm. The force of the motor is used to deform the diaphragm. However, the deformation of the diaphragm by the motor cannot be said to have good responsiveness.

  Therefore, it has been considered that air is supplied and the diaphragm is deformed by the pressure of the air.

  However, it took time to install the diaphragm, and improvement was required.

  Therefore, the problem to be solved by the present invention is to provide a flow rate adjusting device that is easy to mount a diaphragm and is low in cost.

The problem is
A flow rate adjusting device having a diaphragm,
The diaphragm is solved by a flow rate adjusting device including an o-ring portion at an end portion thereof.

The problem is
A flow control device comprising a diaphragm and a case body,
The diaphragm includes an o-ring portion at an end thereof,
The case body includes a recess in the inner wall portion into which the o-ring portion is fitted,
The o-ring portion is fitted into the recess, and a chamber is constituted by the diaphragm and the case body wall.
The case body is solved by a flow rate adjusting device comprising a hole for supplying and discharging fluid to and from the chamber.

The problem is
A flow control device comprising a diaphragm and a case body,
The diaphragm includes an o-ring portion at an end thereof,
The case body includes a recess in the inner wall portion into which the o-ring portion is fitted,
The o-ring portion is fitted into the recess, and a chamber is constituted by the diaphragm and the case body wall.
The case body includes a hole for supplying and discharging fluid to and from the chamber,
This is solved by a flow rate adjusting device comprising a pressing member that presses the o-ring portion fitted in the recess.

  A diaphragm can be easily attached, and a flow control device can be obtained at low cost.

Sectional drawing of the principal part of the flow regulating device which becomes one Embodiment of this invention.

  The present invention is a flow rate adjusting device. In particular, it is a flow rate adjusting device including a diaphragm. Further, it is a flow rate adjusting device including a case body in which a diaphragm is built. The diaphragm includes an o-ring portion at an end thereof. The case body includes a recess in the inner wall portion into which the o-ring portion is fitted. The o-ring portion is fitted into the recess, and a chamber is constituted by the diaphragm and the case body wall. In order to supply / discharge the fluid to / from the chamber, the case body includes, for example, a hole. The flow rate adjusting device preferably includes a pressing member. By this pressing member, the o-ring portion fitted in the recess is pressed. And even if fluid (gas such as liquid or nitrogen gas or air, especially gas) is supplied into the chamber (the diaphragm expands), the o-ring portion does not come out of the recess. Thus, the diaphragm serves its purpose.

  The flow rate adjusting device includes a fluid passage. The fluid passage has a deformable portion that deforms when a force is applied. For example, a tube made of a soft material (or soft resin) such as rubber called silicon rubber. When a force is applied to the tube made of a soft resin, the tube is crushed at the applied position (the cross-sectional area of the tube is reduced). Accordingly, the amount of fluid flowing in the pipe is reduced. When the applied force is released, the tube is restored by the pressure of the fluid flowing in the tube and the restoring force of the tube itself. That is, the cross-sectional area of the tube is increased. Accordingly, the amount of fluid flowing in the pipe increases. That is, the flow rate flowing through the pipe is controlled by the degree of deformation of the pipe. This flow control force is directly or indirectly received from the diaphragm. Therefore, the deformable portion is disposed in the case body. The diaphragm is preferably disposed on both sides of the ridge (the deformable portion). Accordingly, the heel receives force from both sides thereof.

  The flow rate adjusting device preferably includes a spacer having a convex portion. The spacer is disposed between the diaphragm and the fluid passage so that the convex portion contacts the deformable portion. As a result, force is applied to the deformable portion in a pinpoint manner. Therefore, deformation of the fluid passage (deformable portion) is effective. That is, the flow rate control is effectively performed.

  Hereinafter, the present invention will be described more specifically. However, the present invention is not limited to the following specific embodiments.

  FIG. 1 is a cross-sectional view of a main part of a flow rate adjusting device according to an embodiment of the present invention.

  In the figure, reference numerals 1a and 1b denote case halves. The case body 1 is configured by combining the case half body 1a and the case half body 1b. Holes having a semicircular cross section are formed in the left and right side portions of the case halves 1a and 1b. And the pipe | tube 2a, 2b which consists of hard materials is arrange | positioned at the hole of the cross-section circular shape formed when the case half 1a and the case half 1b are united and the case body 1 is comprised.

  A tube 3 made of, for example, silicon rubber is connected between the tube 2a and the tube 2b. The tube 3 is disposed inside the case body 1.

  4, 5, 6, and 7 are holes. The holes 4 and 5 are provided on the upper surface of the case half 1a. The holes 6 and 7 are provided in the lower surface portion of the case half 1b. As indicated by the arrows, air is supplied into the case body 1 through the holes 4 and 6. Further, as indicated by the arrows, the air in the case body 1 is discharged through the holes 5 and 7. In FIG. 1, an air supply device and an exhaust device are omitted.

  Reference numeral 8 denotes a substantially circular (substantially circular in plan view) concave groove formed on the inner surface side of the upper surface of the case half 1a. Reference numeral 9 denotes a film (diaphragm). An o-ring portion 9 a is integrally provided on the periphery of the membrane (diaphragm) 9 over the entire circumference. An o-ring portion 9 a of the film 9 is fitted in the concave groove 8. A chamber 10 is constituted by the film 9 and the upper surface of the case half 1a.

  Reference numeral 11 denotes a substantially circular (substantially circular in a plan view) concave groove provided on the inner surface side of the lower surface portion of the case half 1b. Reference numeral 12 denotes a film (diaphragm). An o-ring portion 12 a is integrally provided around the periphery of the membrane (diaphragm) 12 over the entire circumference. The o-ring portion 12 a of the film 12 is fitted in the concave groove 11. A chamber 13 is constituted by the membrane 12 and the lower surface of the case half 1b.

  14 and 15 are spacers. The spacers 14 and 15 have substantially frustoconical convex portions 16 and 17 on one surface side. The spacers 14 and 15 are disposed between the membranes 9 and 12 and the tube 3. The arrangement of the spacers 14 and 15 is as follows. The flat surfaces of the spacers 14 and 15 are in contact with the films 9 and 12. The convex portions 16 and 17 abut on the tube 3.

  Reference numerals 18 and 19 denote clamping rings for preventing the pipe 3 from falling off.

  Reference numerals 20 and 21 denote ring-shaped collars for preventing the o-ring portions 9a and 12a of the films 9 and 12 from being detached. That is, since the end surfaces of the collars 20 and 21 press the o-ring portions 9a and 12a, even if air is supplied into the chambers 10 and 13 and the membranes (diaphragms) 9 and 12 expand, the o-ring portion 9a. , 12a cannot be removed from the concave grooves 8, 11.

  The flow rate adjusting device having the above-described configuration is assembled as follows. O-ring portions 9a and 12a provided integrally at the end portions of the membranes (diaphragms) 9 and 12 are fitted into substantially circular concave grooves 8 and 11 formed in the case halves 1a and 1b. Since the o-ring portions 9a and 12a are firmly fitted in the concave grooves 8 and 11, the airtightness of the chambers 10 and 13 is high. That is, due to the fitting relationship between the o-ring portions 9a and 12a and the concave grooves 8 and 11, the chambers 10 and 13 are formed in a closed space with high airtightness except for the holes 4, 5, 6, and 7. Further, a tube 3 made of silicon rubber is connected to the tubes 2a and 2b. Then, the sandwiching rings 18 and 19 are fitted. Further, the collars 20 and 21 are inserted and arranged at desired positions of the holding rings 18 and 19. Thus, the fluid passage is assembled. Thereafter, the assembled fluid passage is disposed between the case half 1a to which the membrane (diaphragm) 9 is attached and the case half 1b to which the membrane (diaphragm) 12 is attached. It is firmly integrated. Thereby, the assembly of the flow rate adjusting device is completed. It is very easy to assemble and its manufacturing cost is low. Particularly, the workability of the membranes (diaphragms) 9 and 12 is good, and the membranes (diaphragms) 9 and 12 are easily attached with high airtightness.

Next, the operation (flow rate control method) of the flow rate adjusting apparatus having the above configuration will be described.
Air is blown into the chambers 10 and 13 through the holes 4 and 6 by an air supply device (not shown). For example, air from the first compressor is blown into the chamber 10 through the hole 4, and air from the second compressor is blown into the chamber 13 through the hole 6. The blown air is discharged (discharged) to the outside through the holes 5 and 7. When {(air supply amount) − (air release amount)}> 0, the films 9 and 12 constituting the chambers 10 and 13 swell. When {(air supply amount) − (air release amount)} ≦ 0, the films 9 and 12 constituting the chambers 10 and 13 do not swell. When the membranes 9 and 12 swell, the spacers 14 and 15 press the heel 3. In particular, the convex portions 16 and 17 press the wall surface of the tube 3. The wall surface of the tube 3 is recessed in the vertical direction in FIG. Therefore, the amount of fluid flowing through the tub 3 is reduced. When the amount of air blown into the chambers 10 and 13 through the holes 4 and 6 decreases, the expansion pressure of the membranes 9 and 12 decreases. Along with this, the force with which the convex portions 16 and 17 press the wall surface of the tube 3 decreases. If it does so, the cross-sectional area of the collar 3 will become large with the restoring force of the pipe | tube 3 itself, or the pressure of the fluid which flows through the inside of the collar 3. FIG. Therefore, the amount of fluid flowing in the tub 3 increases. As described above, the flow rate of the fluid is controlled.

  In the above embodiment, a plurality of (for example, two) films 9 and 12 are used. Here, it is assumed that the pressure P is applied to the chambers 10 and 13. Due to this pressure P, the membranes 9 and 12 are similarly deformed. If the cross-sectional area of the heel 3 is reduced by S due to the deformation of the film 9, the cross-sectional area of the heel 3 is reduced by S due to the deformation of the film 12. Therefore, the cross-sectional area decreases by 2S in total. On the other hand, consider a case where there is no film 12, that is, a single film. Assuming that the pressure P is applied to the chamber 10, the cross-sectional area reduction amount of the ridge 3 is S. Therefore, if the cross-sectional area reduction amount is to be 2S, a film whose area is twice as large is required. This means that the case body becomes larger accordingly. That is, the flow control device is increased in size. In other words, the flow control device of the above embodiment can be downsized. Furthermore, when the film is twice as large, this means that the chamber 10 becomes larger. By the way, when the chamber is small, the fluctuation (expansion) of the film is remarkable even if the amount of air supplied into the chamber is small. This means that the film deformation speed, that is, the response speed is high. Conversely, when the chamber is large, the pressure fluctuation is small even if a large amount of air is sent into the chamber. This means that the film deformation speed, that is, the response speed is slow. Therefore, the technology of the above embodiment has a fast response speed of flow rate control. Quick response is possible.

  The installation location of the present apparatus is the location where the flow rate adjusting device has been installed or the location where the flow rate control method has been implemented. For example, it is incorporated like the apparatus shown in FIG. 1 of Japanese Patent Application Laid-Open No. 2010-26576.

DESCRIPTION OF SYMBOLS 1 Case body 1a, 1b Case half body 3 Silicon rubber pipes 4, 5, 6, 7 Hole 8, 11 Concave groove (concave part)
9,12 Membrane (diaphragm)
9a, 12a o-ring part 10, 13 chamber 14, 15 spacer 16, 17 convex part 20, 21 collar (pressing member)

Claims (3)

A flow rate adjusting device having a diaphragm,
The diaphragm is provided with an o-ring part at an end thereof. A flow control device comprising a diaphragm and a case body,
The diaphragm includes an o-ring portion at an end thereof,
The case body includes a recess in the inner wall portion into which the o-ring portion is fitted,
The o-ring portion is fitted into the recess, and a chamber is constituted by the diaphragm and the case body wall.
The case body includes a hole for supplying and discharging fluid to and from the chamber. 3. The flow rate adjusting device according to claim 2, further comprising a pressing member that presses the o-ring portion fitted in the recess.

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