JP2013019865A - Contact type probe, and manufacturing method of the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a contact type probe which is capable of measuring shapes inside minute pores and avoiding interference of bent portions, and a manufacturing method of the same.SOLUTION: The contact type probe 10 used for measuring shapes and the like inside the minute pores having diameters less of 100 μm includes a rod-like stem 11, a chip 12 extending in a crossing direction with respect to the stem 11, and a joining section 13 for joining the chip 12 and the stem 11. A contained angle α between the stem 11 and the chip 12 is 90 degrees or less.

Description

  The present invention relates to a contact-type probe and a method for manufacturing the same, and more particularly to a probe used for measuring a shape or the like in a micropore having a diameter of less than 100 μm.

  2. Description of the Related Art Conventionally, in a manufacturing process of a machine part that requires high accuracy, a shape of a product is measured after processing and a processing result is confirmed. In such shape measurement, for example, a contact type probe is attached to a high-precision coordinate measuring machine, and this probe is brought into contact with the product surface. As a contact probe used for such measurement, a probe having a spherical tip formed at the tip of a rod-like stem is often used (see Patent Document 1).

In recent years, for example, devices for injecting very small liquid particles such as a fuel injection device for an internal combustion engine and an ink jet printer device have been manufactured. These injection nozzles have a hole diameter of less than 100 microns.
In the measurement of such a fine shape, a probe in which the same shape is miniaturized as it is is used (see Patent Document 2).
Moreover, in order to measure the shape in a screw hole, the probe in which the stem was formed in the L shape is also used (refer patent document 3).

JP 2006-201105 A JP 2004-325159 A JP 2007-248295 A

By the way, in the injection nozzle of the fuel injection device or the ink jet printer device described above, a fluid passage or the like may be formed in the back of the nozzle hole, and the nozzle hole may be in an undercut shape. is there.
In such a case, it may be impossible to perform sufficient shape measurement with a probe having a general tip having a spherical shape.

  In FIG. 8, a work 80 has a fine nozzle hole 81 and a cavity 82 communicating therewith. As an example, the nozzle hole 81 has an inner diameter of about 60 μm, and the cavity 82 has a width of about 150 μm and a height of about 80 μm. Between the nozzle hole 81 and the inner wall of the cavity 82, a bell mouth shape 83 that is smoothly continuous with each other is formed, and its cross-sectional radius of curvature is about 40 μm.

As the contact-type probe 89 for measuring the shape of the workpiece 80, for example, a probe having a stem 87 having a diameter of about 30 μm and a tip 87 having a radius of 20 μm is used.
However, the probe 89 can measure the inner surface of the nozzle hole 81 and a part of the bell mouth shape 83. This is because the stem 88 interferes with the nozzle hole 81 even if the tip 87 is to be brought into contact with a portion deeper than this.

As shown in FIG. 9, by increasing the radius of the tip 87, the tip 87 can be sent to the back of the bell mouth shape 83, but the tip 87 is enlarged in order to insert and remove from the nozzle hole 81. In some cases, the inner diameter of the nozzle hole 81 cannot be exceeded and sufficient measurement cannot be performed.
Here, if the probe having the L-shaped stem described in Patent Document 3 is used, it can be expected that the cavity 82 can be measured to the far depth even in the shape of FIG.
However, the probe of Patent Document 3 also has the following problems.

In FIG. 10, an L-shaped probe 89A has a stem 88A bent in an L shape at a bent portion 88B. In the small L-shaped probe 89A, it is desirable that the bent portion 88B is formed by an efficient bending process. The bent portion 88B formed by such a bending process generally protrudes inward, and when the edge 81A of the nozzle hole 81 is angular (the bell mouth shape 83 as shown in FIG. Case).
Further, since the tip 87A is spherical, there is a possibility that the shape such as the corner portion 82A of the cavity 82 cannot be measured sufficiently.

  An object of the present invention is to provide a contact type probe capable of measuring a shape in a minute hole and avoiding interference of a bent portion, and a manufacturing method thereof.

The contact-type probe of the present invention has a rod-shaped stem, a tip extending in a crossing direction with respect to the stem, and a joint portion that joins the tip and the stem, and is provided between the stem and the tip. The sandwiching angle is 90 degrees or less.
In the present invention as described above, by joining the separate stem and the chip, a bent portion or the like that protrudes to the inside of the joint portion does not occur. Since the angle between the stem and the tip is 90 degrees or less, for example, the stem and tip interfere with the nozzle hole even if the edge of the nozzle hole has a perpendicular corner or a bell mouth shape with a small curvature radius. Can be avoided.

In the contact probe according to the aspect of the invention, it is preferable that a side surface of the stem in a direction in which the tip extends and a surface of the tip to which the stem is joined extend linearly.
In the present invention, the structure can be simplified and the effect of the included angle of 90 degrees or less can be obtained over the entire length of the stem and the tip.

In the contact-type probe of the present invention, the joint is a welded portion between the tip and the stem, and a groove is formed on the stem on the side opposite to the extending direction of the tip. It is desirable that the portion is formed so as to be biased toward the side on which the groove is formed.
In such this invention, a chip | tip and a stem can be reliably and rapidly joined by using welding. Furthermore, in welding, by performing welding from the groove side, the joint portion by welding can be displaced to the side opposite to the extending direction of the tip. Thereby, it can avoid that a junction part protrudes to the part pinched by a chip | tip and a stem, and can avoid the interference with the nozzle hole of a stem and a chip | tip reliably.

The contact probe manufacturing method of the present invention is a contact probe manufacturing method having a rod-shaped stem, a tip extending in a crossing direction with respect to the stem, and a joint for joining the tip and the stem. A tip end side and a base end side are set to the tip material to be the tip, and a tip end of the stem material to be the stem is brought into contact with a side of the tip end side of the tip material, The tip and the base end side of the tip material are welded from the base end side of the tip material to form a joint.
In the present invention, the above-described contact probe of the present invention can be efficiently and reliably manufactured by joining the separate stem and the tip by welding.
At this time, it is desirable that the angle between the stem and the tip is 90 ° or less before welding.

In the contact probe manufacturing method of the present invention, a groove is formed in advance at the distal end of the stem, the groove is disposed toward the proximal end side of the tip material, and welding is performed from the groove side. It is desirable to do.
In the present invention, when welding is performed from the groove side, the welded joint can be displaced to the side opposite to the extending direction of the tip. Thereby, it can avoid that a junction part protrudes to the part pinched by a chip | tip and a stem, and can avoid the interference with the nozzle hole of a stem and a chip | tip reliably.

In the method for manufacturing a contact type probe according to the present invention, it is preferable that after the welding is performed, the proximal end of the stem material, the distal end side and the proximal end side of the tip material are respectively cut and finished.
At this time, the base end of the stem material and the base end side of the chip material may be finished so as to be a normal end surface, that is, a surface orthogonal to the continuous direction of the material. It is desirable that the tip side of the chip material has a sharp shape so as to be surely able to enter the corner of the measurement target.
As such a pointed shape, both side surfaces and the bottom surface side may be cut obliquely so as to have a pyramid shape, or may be cut into a cone shape. Apart from this, the tip material is cut in a cross section that is greatly inclined in the continuous direction, so that the tip is arcuate but the side shape is sharp. According to such an oblique cross section, the processing can be remarkably simplified as compared with the case of sharpening in a pyramid shape or a conical shape.

In the method for manufacturing a contact probe according to the present invention, the same rod is used as the stem material and the tip material, and after welding, the proximal end of the stem material, the distal end side and the proximal end side of the tip material are After each cutting and finishing, the base end side of the stem material is disposed as the tip material, and the tip end of the new stem material is brought into contact with the base end side of the tip material. The formation of the joint portion may be repeated.
Here, the finished shape for the proximal end of the stem material, the distal end side and the proximal end side of the chip material is as described in the previous section.
In the present invention, the same rod is used as the stem material and the tip material, and the welded stem and tip are separated as a probe, and then moved so that the proximal end side of the stem is sequentially used as the tip of the next probe. As a result, the efficiency of the manufacturing process can be improved, the material cost can be reduced by sharing the material, and the device configuration for supplying the material can be simplified.

The side view which shows 1st Embodiment of this invention. The bottom view which shows the said 1st Embodiment. The side view which shows the deformation | transformation of 2nd Embodiment of this invention. The side view which shows 3rd Embodiment of this invention. The side view which shows the manufacture procedure of the said 3rd Embodiment. The side view which shows the manufacture procedure of the said 3rd Embodiment. The side view which shows the manufacture procedure of the said 3rd Embodiment. Sectional drawing which shows a prior art example. Sectional drawing which shows a prior art example. Sectional drawing which shows a prior art example.

[First Embodiment]
1 and 2 show a first embodiment of the present invention.
1 and 2, a contact probe 10 is a fine probe for measuring the shape of a fine nozzle hole having an inner diameter of about several tens of μm and the inner surface of a cavity extending in the depth thereof.
The contact probe 10 includes a rod-shaped stem 11, a tip 12 extending in a crossing direction with respect to the stem 11, and a joint portion 13 that joins the tip 12 and the stem 11.

The stem 11 is formed of a round bar having an outer diameter of about 30 μm, and has an appropriate length used for measurement.
As the material of the stem 11, the same metal material as that of the existing contact probe is used. The chip 12 is connected to the end surface 111 of the stem 11.

The tip 12 uses a rectangular parallelepiped block having a total length of about 70 μm, a width of about 30 μm (same as the outer diameter of the stem 11), and a thickness of about 15 μm, and its both sides and lower surface are cut obliquely to sharpen the tip 121. It is a thing.
As the material of the chip 12, the same material as that of the stem 11 is used. For cutting to form a fine tip 121 in the chip 12, for example, electric discharge machining or laser cutting is used.
In the chip 12, the above-mentioned distal end 121 is the distal end side, and the opposite side is the proximal end side.

The joint portion 13 joins the end surface 111 of the stem 11 described above to the proximal end of the upper surface 122 of the chip 12. As the joint portion 13, welding between the stem 11 and the tip 12 can be used.
The joint portion 13 is formed so that the sandwiching angle α between the stem 11 and the chip 12 is 90 degrees. For this purpose, the end surface 111 of the stem 11 is formed so as to be perpendicular to the axis thereof, and the upper surface 122 of the tip 12 is formed flat, and the two are welded in close contact with each other, The sandwich angle α can be 90 degrees.

In order to appropriately weld the joint portion 13, the end surface 111 of the stem 11 is cut obliquely on the side corresponding to the proximal end side of the tip 12, thereby forming a groove 112 for welding. The groove 112 is formed to have a smaller area ratio than the end surface 111, and the area of the end surface 111 for defining the above-described sandwich angle α is secured.
After welding the joint portion 13, it is desirable to cut the proximal end of the stem 11 to finish the end face, and finish the end faces on the distal end side and the proximal end side of the tip 12.

In such an embodiment, by bending the stem 11 and the chip 12 separately, a bent portion or the like that protrudes to the inside of the joint portion 13 does not occur. Since the sandwich angle between the stem 11 and the tip 12 is 90 degrees, for example, the stem 11 and the tip 12 are connected to the nozzle even if the edge of the nozzle hole has a right-angle cross section or a bell mouth shape with a small curvature radius. Interference with the hole can be avoided.
Further, since the side surface of the stem 11 in the direction in which the chip 12 extends and the upper surface 122 to which the stem 11 of the chip 12 is joined extend linearly, the structure can be simplified and the sandwiching angle α is 90 degrees. Is obtained over the entire length of the stem 11 and the tip 12.

  Since welding is used as the joint portion 13, the stem 11 and the tip 12 can be firmly joined. At this time, since the groove 112 is formed, welding can be performed easily and reliably. Since the groove 112 is formed on the base end side, that is, on the side opposite to the tip 121, the joint portion 13 by welding is connected to the base end side of the tip 12. Can be displaced. This prevents the welding material of the joint 13 from approaching the tip side, that is, the portion sandwiched between the tip 12 and the stem 11, and ensures avoidance of interference between the stem 11 and the tip 12 and the nozzle hole to be measured. Can be.

[Second Embodiment]
FIG. 3 shows a second embodiment of the present invention.
In FIG. 3, the contact probe 10 </ b> A of the present embodiment basically has the same configuration as that of the first embodiment described above. For this reason, description of common parts is omitted, and different parts are described below.

A groove 112A is formed on the end surface of the stem 11 over the entire surface.
On the upper surface 122 of the chip 12, a groove 122 </ b> A is formed in a region facing the stem 11.
The joint 13A is formed by welding between the groove 112A and the groove 122A.

  In the present embodiment, the stem 11 and the tip 12 are not in contact with each other during welding, and it is necessary to separately angle each other. For this reason, the stem 11 and the tip 12 are arranged at a predetermined sandwich angle α by a separate jig, and welding is performed between both the grooves 112A and the grooves 122A in this state, thereby forming the joint portion 13A. .

  According to the present embodiment, the same effects as those of the first embodiment described above can be obtained, and the arrangement of the stem 11 and the tip 12 during welding can be finely adjusted to The sandwich angle α can be set to an arbitrary angle.

[Third Embodiment]
4 to 7 show a third embodiment of the present invention.
In FIG. 4, a contact probe 30 is a fine probe for measuring the shape of a fine nozzle hole having an inner diameter of several tens of μm and the inner surface of a cavity extending in the back thereof.
The contact probe 30 includes a rod-shaped stem 31, a tip 32 extending in the crossing direction with respect to the stem 31, and a joint portion 33 that joins the tip 32 and the stem 31.

The stem 31 is formed of a round bar having an outer diameter of about 30 μm, and is formed to have an appropriate length used for measurement.
As the material of the stem 31, the same metal material as that of the existing contact type is used. A chip 32 is connected to the end surface 311 of the stem 31.

The tip 32 is formed of a round bar having the same outer diameter as the stem 31 and about 30 μm. The tip 32 is set with a distal end side and a proximal end side.
An end surface 323 on the tip side of the chip 32 is formed obliquely with respect to the axial direction of the chip 32, and the tip 321 has an arc shape when viewed from the plane, but has a sharp shape when viewed from the side surface.
The end face 324 on the base end side of the chip 32 is formed in a direction orthogonal to the axial direction of the chip 32.

  For example, electric discharge machining or laser fusing is used for forming the end faces 323 and 324 of the chip 32 and cutting and finishing the end face 311 of the stem 31 described above. In the following description, when cutting the tip 32 and the stem 31, etc., similar electric discharge machining or laser fusing is used.

The joint portion 33 joins the end surface 311 of the stem 31 described above to the proximal end on the upper surface of the chip 32. As the joint portion 33, welding between the stem 31 and the tip 32 can be used.
The joint portion 33 is formed such that the sandwich angle α between the stem 31 and the chip 32 is 90 degrees.

In forming the joint portion 33, the end surface 311 of the stem 31 is obliquely cut off from the proximal end side of the tip 32, thereby forming a groove 312 for welding.
The welding is performed from the groove 312 side to the end surface 311 and the upper surface of the tip 32. Since the upper surface of the chip 32 is a cylindrical surface and does not come into close contact with the end surface 311, the stem 31 and the chip 32 are held with a separate jig and held at a state where the angle α is 90 degrees. The joint 33 is formed by performing welding.

More specifically, the stem 31 and the chip 32 are joined by the following procedure.
In FIG. 5, an end surface 311 and a groove 312 are formed at the distal end of the material to be the stem 31, and the distal end is brought close to the upper surface on the proximal end side of the material to be the chip 32.
At this time, the material that becomes the stem 31 is a bar that continues upward in the figure, and the material that becomes the chip 32 may be a bar that continues to the right in the figure.

In FIG. 6, the tip of the material that will become the stem 31 and the base end side of the material that will become the tip 32 are held by a jig and adjusted so that the sandwiching angle α between them is 90 degrees. Then, welding is performed from the side of the groove 312 on the stem 31 side, and the joining portion 33 is formed between the end surface 311 and the groove 312 and the upper surface on the tip 32 side.
At this time, the welding material of the joint portion 33 enters from the groove 312 side to the end surface 311, but does not reach the corner 331 sandwiched between the stem 31 and the tip 32.

When the joint 33 is welded, the tip end side of the material of the tip 32 is cut obliquely to form the end face 323, and the surface is finished. Further, the base end side of the material of the chip 32 is cut at right angles to the axial direction to form the end face 324, and the surface is finished. Further, the base end of the material of the stem 31 is cut to form an end face 314, and the surface is finished.
These cutting and finishing are sequentially performed by the same electric discharge machining wire 34.
Through the above steps, the contact probe 30 shown in FIG. 4 is obtained.

Note that the stem 31 of the contact probe 30 cut out in FIG. 6 is formed with a margin more than the length of the tip 32 for the next process.
In FIG. 7, the contact probe 30 obtained in the process of FIG. 6 is rotated 90 degrees, and the proximal end side of the stem 31 is disposed as the material of the tip 32.
In this state, the contact type probe 30 is sequentially manufactured by repeating the steps shown in FIGS. 5 to 6 described above.

In the present invention, since the same bar is used as the material of the stem 31 and the material of the chip 32, the material cost can be reduced by sharing the material, and the configuration of the apparatus for supplying the material can be simplified. it can.
In particular, after cutting the welded stem 31 and tip 32 as the contact probe 30, they are moved, and the base end side of the stem 31 is sequentially used as the tip 32 of the next probe, thereby improving the efficiency of the manufacturing process. In addition, the apparatus for supplying the rod-shaped material can be completed with one system on the stem 31 side.

  Furthermore, in the present embodiment, the same effect as that of the first embodiment described above can be obtained, but redundant description is omitted for the sake of simplicity. At this time, the stem 11, the chip 12, and the joint 13 in the first embodiment correspond to the stem 31, the chip 32, and the joint 33 in the present embodiment, respectively.

[Other Embodiments]
The present invention is not limited to the above-described embodiments, and modifications and the like within the scope that can achieve the object of the present invention are included in the present invention.
In the embodiment, the sandwiching angle α is 90 degrees, but the sandwiching angle α may be 90 degrees or less. However, it is desirable that the form suitable for the measurement of the cavity in the nozzle hole is 90 degrees or less and 70 degrees or more.
If the sandwiching angle α is greater than 90 degrees, the protruding corner portion of the nozzle hole may interfere during measurement in the cavity. If the angle is less than 70 degrees, the height of the tip (the length in the axial direction of the stem) increases, and the nozzle holes or cavities that can be introduced are limited.

In the joint portions 13 and 33, the grooves 112, 112A, 122A, and 312 may be omitted as appropriate. Even in this case, the welding is preferably performed from the side of the stems 11 and 31 from the base end side of the tips 12 and 32, that is, the side opposite to the tip ends 121 and 321.
As the joint portions 13 and 33, brazing or an adhesive can be used in addition to welding.

In the first embodiment and the second embodiment, the stem 11 may be a square bar. The chip 12 may be a round bar. In this case, in order to join the end surfaces of the stem 11, it is desirable to cut out a flat surface on the upper surface side in advance.
In the third embodiment, it is not indispensable to use a part of the stem 31 of the contact probe 30 formed in advance as the chip 32 in the next process. The material of the stem 31 and the material of the chip 32 are introduced respectively. Each time the joint portion 33 can be formed, it may be separated into a product.

In each of the above-described embodiments, the stems 11 and 31 and the chips 12 and 32 are separately provided and integrated by welding or the like, but the contact of each embodiment is performed by other methods. The expression probes 10, 10A, 30 may be manufactured.
For example, instead of welding, brazing and an adhesive may be employed. If a completely perpendicular corner can be formed, the tip end of the stem 11, 31 is bent and the tip is sharpened. It may be 32.

10, 10A, 30 ... contact type probe 11, 31 ... stem 111, 311, 314, 323, 324 ... end face 112, 112A, 122A, 312 ... groove 12, 32 ... tip 121, 321 ... tip 13, 13A ... bonding Part 32 ... Chip 33 ... Junction part α ... An angle between the stem and the chip

Claims (7)

  It has a rod-shaped stem, a tip extending in a crossing direction with respect to the stem, and a joint portion for joining the tip and the stem, and a sandwich angle between the stem and the tip is 90 degrees or less. A contact probe characterized by the above. The contact probe according to claim 1,
The contact probe according to claim 1, wherein a side surface of the stem in a direction in which the tip extends and a surface to which the stem of the tip is joined extend linearly. The contact probe according to claim 1 or 2,
The joint is a welded portion between the tip and the stem, and a groove is formed on an end of the stem opposite to the extending direction of the tip, and the groove is formed on the welded portion. A contact probe characterized in that it is formed to be biased toward the side. A method of manufacturing a contact-type probe having a rod-shaped stem, a tip extending in a crossing direction with respect to the stem, and a joint for joining the tip and the stem,
Set the tip side and the base end side to the chip material to be the chip,
Abutting the tip of the stem material to be the stem from the side of the base end side of the chip material;
A method of manufacturing a contact-type probe, comprising welding a tip end of the stem material and a base end side of the tip material from the base end side of the tip material to form a joint portion. In the manufacturing method of the contact type probe according to claim 4,
Producing a contact probe characterized in that a groove is formed in advance at the tip of the stem, the groove is arranged toward the base end side of the tip material, and welding is performed from the groove side. Method. In the manufacturing method of the contact-type probe according to claim 4 or 5,
After the welding is performed, a proximal probe of the stem material, a distal end side and a proximal end side of the tip material are cut and finished, respectively. In the manufacturing method of the contact-type probe according to claim 4 or 5,
Using the same bar as the stem material and the tip material,
After the welding, the base end of the stem material, the tip end side and the base end side of the tip material are respectively cut and finished, and then the base end side of the stem material is disposed as the tip material. Abutting the tip of the new stem material on the base end side of the material,
Thereafter, the method of manufacturing a contact probe is characterized by repeating the formation of the joint by welding.

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