JP2013018005A - Nitrogen supply device for laser beam machine - Google Patents

Nitrogen supply device for laser beam machine Download PDF

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JP2013018005A
JP2013018005A JP2011150643A JP2011150643A JP2013018005A JP 2013018005 A JP2013018005 A JP 2013018005A JP 2011150643 A JP2011150643 A JP 2011150643A JP 2011150643 A JP2011150643 A JP 2011150643A JP 2013018005 A JP2013018005 A JP 2013018005A
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nitrogen
pressure
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booster
buffer tank
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JP5755061B2 (en
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Sadahiro Yamada
貞弘 山田
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Taiyo Nippon Sanso Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a nitrogen supply device for a laser beam machine capable of effectively utilizing nitrogen stored in a buffer tank, and reducing the size of a PSA device and that of the buffer tank.SOLUTION: The pressure of nitrogen generated by a PSA device 12 is boosted by a first booster machine 13 to store the nitrogen in a buffer tank 14, the nitrogen is supplied to a laser beam machine from a first nitrogen pipeline 15 when the pressure in the buffer tank is high, nitrogen increased in pressure by a second booster machine 19 of a second nitrogen pipeline 17 is supplied to the laser beam machine when the pressure in the buffer tank is low. The changeover of both the pipelines is performed by switchably opening/closing on-off valves 16, 18 respectively arranged on the respective pipelines with a pressure switch 22 for detecting the pressure in the buffer tank.

Description

本発明は、レーザ加工機用窒素供給装置に関し、詳しくは、窒素発生装置で発生させた窒素をあらかじめ設定された比較的高い圧力でレーザ加工機に供給するためのレーザ加工機用窒素供給装置に関する。   The present invention relates to a nitrogen supply device for a laser beam machine, and more particularly to a nitrogen supply device for a laser beam machine for supplying nitrogen generated by a nitrogen generator device to a laser beam machine at a preset relatively high pressure. .

レーザ加工機を使用してステンレス鋼の切断などの加工を行う際には、レーザ加工中のレーザビームの周囲にアシストガスとして不活性ガス、例えば窒素を噴射してステンレス鋼の表面、切断面及び裏面を窒素雰囲気とすることにより、大気中の酸素とステンレス鋼とが反応して焼け焦げなどが発生することを防止するようにしている。   When performing processing such as cutting of stainless steel using a laser processing machine, an inert gas, such as nitrogen, is injected as an assist gas around the laser beam during laser processing, and the surface of the stainless steel, the cut surface and By setting the back surface to be a nitrogen atmosphere, reaction between oxygen in the atmosphere and stainless steel prevents burning and the like from occurring.

アシストガスとして窒素を使用する場合、空気中の窒素を濃縮する窒素発生装置、一般的には、PSA装置を使用して高純度の窒素を製造し、必要に応じて精製装置で窒素中に残存する微量酸素を除去した後、昇圧機にてレーザ加工機に設定された圧力に窒素を昇圧し、昇圧後の高圧の窒素をバッファタンクに貯留し、該バッファタンクからレーザ加工機に窒素を供給するようにしている(例えば、非特許文献1参照。)。   When nitrogen is used as an assist gas, a nitrogen generator that concentrates nitrogen in the air, generally a high-purity nitrogen is produced using a PSA device, and if necessary, it remains in the nitrogen with a purifier. After removing a small amount of oxygen, pressurize the nitrogen to the pressure set in the laser processing machine with a booster, store the high-pressure nitrogen after boosting in the buffer tank, and supply nitrogen to the laser processing machine from the buffer tank (For example, refer nonpatent literature 1.).

エア・ウォーター株式会社、”レーザ加工機用PSA式窒素ガス発生装置”、[online]、エア・ウォーター株式会社、[平成23年6月29日検索]、インターネット<URL:http://www.awi.co.jp/bp/pg/laser.pdf>Air Water Co., “PSA Nitrogen Generator for Laser Processing Machines”, [online], Air Water Co., Ltd. [Search June 29, 2011], Internet <URL: http: // www. awi.co.jp/bp/pg/laser.pdf>

前述のようにバッファタンクからレーザ加工機に窒素を供給する場合、バッファタンク内にはレーザ加工機が要求する窒素の圧力より高い圧力で窒素を貯留しておく必要があり、例えば、レーザ加工機が要求する窒素の圧力が3MPaの場合は、バッファタンク内に5MPa程度の圧力で窒素を貯留する必要があった。この場合、バッファタンクからレーザ加工機に窒素を供給可能なバッファタンク内の圧力は3MPa以上であるから、バッファタンク内の圧力が3MPaに低下するとレーザ加工機に窒素を供給することはできず、バッファタンク内の窒素を有効に利用することはできなかった。   As described above, when nitrogen is supplied from the buffer tank to the laser processing machine, it is necessary to store nitrogen in the buffer tank at a pressure higher than the nitrogen pressure required by the laser processing machine. When the required nitrogen pressure is 3 MPa, it was necessary to store nitrogen in the buffer tank at a pressure of about 5 MPa. In this case, since the pressure in the buffer tank capable of supplying nitrogen from the buffer tank to the laser processing machine is 3 MPa or more, nitrogen cannot be supplied to the laser processing machine when the pressure in the buffer tank decreases to 3 MPa, Nitrogen in the buffer tank could not be used effectively.

したがって、レーザ加工機の窒素使用量の変動が大きい場合には、最大窒素使用量に対応させるため、レーザ加工機の平均的な窒素使用量に比べて窒素発生量が多いPSA装置や大容量あるいは複数のバッファタンクを必要とし、窒素供給装置におけるコストアップの要因となっていた。   Therefore, when the fluctuation of the nitrogen usage amount of the laser processing machine is large, in order to correspond to the maximum nitrogen usage amount, a PSA device having a large amount of nitrogen generation compared to the average nitrogen usage amount of the laser processing machine or a large capacity or A plurality of buffer tanks are required, which is a cause of cost increase in the nitrogen supply device.

なお、バッファタンクを設けない場合は、レーザ加工機の最大窒素使用量以上の窒素発生能力を有するPSA装置を設置しなければならず、大幅なコストアップとなる。また、PSA装置の内蔵バッファタンクは、発生する窒素の純度均一化や圧力変動緩和などを主目的とするものであり、高圧の窒素を大量に貯留する機能は備えていない。   If a buffer tank is not provided, a PSA device having a nitrogen generation capacity equal to or greater than the maximum nitrogen usage of the laser processing machine must be installed, resulting in a significant cost increase. Moreover, the built-in buffer tank of the PSA apparatus is mainly intended to make the purity of the generated nitrogen uniform and to reduce pressure fluctuations, and does not have a function of storing a large amount of high-pressure nitrogen.

そこで本発明は、バッファタンク内に貯留した窒素の有効利用を図ることができ、PSA装置やバッファタンクの小型化を図ることができるレーザ加工機用窒素供給装置を提供することを目的としている。   Accordingly, an object of the present invention is to provide a nitrogen supply device for a laser processing machine that can effectively use nitrogen stored in a buffer tank and can reduce the size of a PSA device or a buffer tank.

上記目的を達成するため、本発明のレーザ加工機用窒素供給装置は、窒素を発生させる窒素発生手段と、該窒素発生手段で発生した窒素をあらかじめ設定された貯留圧力に昇圧する昇圧機と、該昇圧機で昇圧した窒素を貯留するバッファタンクと、該バッファタンク内の窒素をレーザ加工機に供給する窒素供給経路とを備えたレーザ加工機用窒素供給装置において、前記昇圧機よりも吐出量が多い第2昇圧機を備えた第2窒素供給経路を前記窒素供給経路に対して並列に設け、前記窒素供給経路に第1開閉弁を、前記第2窒素供給経路における前記第2昇圧機の吸入側に第2開閉弁をそれぞれ設けるとともに、前記バッファタンク内の圧力を検出し、検出した圧力があらかじめ設定された切換圧力以上のときには前記第1開閉弁を開いて前記第2開閉弁を閉じ、検出した圧力が前記切換圧力未満のときには前記第1開閉弁を閉じて前記第2開閉弁を開く圧力スイッチを設けたことを特徴としている。   In order to achieve the above object, a nitrogen supply device for a laser beam machine according to the present invention comprises a nitrogen generating means for generating nitrogen, a booster for increasing the nitrogen generated by the nitrogen generating means to a preset storage pressure, In a nitrogen supply device for a laser processing machine, comprising: a buffer tank for storing nitrogen boosted by the booster; and a nitrogen supply path for supplying nitrogen in the buffer tank to the laser processing machine. A second nitrogen supply path including a second booster having a large amount is provided in parallel with the nitrogen supply path, a first on-off valve is provided in the nitrogen supply path, and the second booster in the second nitrogen supply path is provided. A second on-off valve is provided on the suction side, and the pressure in the buffer tank is detected. When the detected pressure is equal to or higher than a preset switching pressure, the first on-off valve is opened to 2 Close the on-off valve, the detected pressure at the time of less than the switching pressure force is characterized in that a pressure switch for opening the second on-off valve closes the first on-off valve.

さらに、本発明のレーザ加工機用窒素供給装置は、前記第2窒素供給経路における前記第2昇圧機と前記第2開閉弁との間に、第3開閉弁を介して外部窒素供給源からの窒素を前記第2窒素供給経路に導入する外部窒素導入経路を設けるとともに、前記圧力スイッチは、前記バッファタンク内の圧力があらかじめ設定された下限圧力未満のときに、前記第3開閉弁を開いて前記第1開閉弁及び前記第2開閉弁を閉じるように形成することができる。また、前記窒素発生手段は、純度99.999%以上の窒素を発生するPSA装置であることが好ましく、前記第2昇圧機が、吸入側圧力があらかじめ設定された運転圧力に到達したときに自動的に運転を開始し、吸入側圧力が前記運転圧力を下回ったときに自動的に停止するものであることが好ましい。   Furthermore, the nitrogen supply device for a laser beam machine according to the present invention is provided from an external nitrogen supply source via a third on-off valve between the second booster and the second on-off valve in the second nitrogen supply path. An external nitrogen introduction path for introducing nitrogen into the second nitrogen supply path is provided, and the pressure switch opens the third on-off valve when the pressure in the buffer tank is lower than a preset lower limit pressure. The first on-off valve and the second on-off valve may be closed. Further, the nitrogen generating means is preferably a PSA device that generates nitrogen having a purity of 99.999% or more, and the second booster automatically operates when the suction side pressure reaches a preset operating pressure. It is preferable that the operation is started automatically and stopped automatically when the suction side pressure falls below the operation pressure.

本発明のレーザ加工機用窒素供給装置によれば、バッファタンク内の圧力が切換圧力以上のときには第1開閉弁を開いて窒素供給経路からバッファタンク内の圧力で窒素をレーザ加工機に供給し、バッファタンク内の圧力が切換圧力未満のときには第2開閉弁を開いて第2昇圧機で昇圧した窒素を第2窒素供給経路からレーザ加工機に供給するので、バッファタンク内の圧力が低くなってもレーザ加工機に窒素を供給することができる。これにより、窒素発生手段で発生させた窒素を無駄なく利用できるとともに、レーザ加工機に供給可能な窒素量が増大するため、窒素使用量の変動が大きなレーザ加工機に窒素を供給するための窒素発生手段や昇圧機、バッファタンクといった機器の小型化を図ることができる。また、同程度の能力の機器を使用した場合は、運転に余裕が生じるので、消費動力の削減を図ることが可能である。   According to the nitrogen supply device for a laser processing machine of the present invention, when the pressure in the buffer tank is equal to or higher than the switching pressure, the first on-off valve is opened to supply nitrogen to the laser processing machine from the nitrogen supply path with the pressure in the buffer tank. When the pressure in the buffer tank is less than the switching pressure, the second on-off valve is opened and nitrogen boosted by the second booster is supplied to the laser processing machine from the second nitrogen supply path, so the pressure in the buffer tank is reduced. However, nitrogen can be supplied to the laser processing machine. As a result, the nitrogen generated by the nitrogen generating means can be used without waste, and the amount of nitrogen that can be supplied to the laser processing machine increases. Equipment such as the generating means, the booster, and the buffer tank can be downsized. In addition, when equipment having the same ability is used, there is a margin in operation, so it is possible to reduce power consumption.

さらに、外部窒素導入経路を設けておくことにより、レーザ加工機の窒素使用量が急激に増大したときなどに、装置外に設けられている窒素ボンベや液化窒素貯槽などからの窒素を第2昇圧機で昇圧してレーザ加工機に供給することができる。また、窒素発生手段として、純度99.999%以上の窒素を発生するPSA装置を使用することにより、窒素中に残存する酸素を除去するための精製装置を設ける必要がなくなり、装置コストを低減することができる。さらに、第2昇圧機として、吸入側圧力の変動に応じて自動的に運転及び停止を行う昇圧機を使用することにより、制御手段を別途設けることなく、圧力スイッチによる各開閉弁の開閉のみで窒素の供給経路を自動的に変更することができる。   Furthermore, by providing an external nitrogen introduction path, when the amount of nitrogen used by the laser processing machine increases rapidly, nitrogen from a nitrogen cylinder or a liquefied nitrogen storage tank provided outside the apparatus is increased by a second pressure. The pressure can be increased by a machine and supplied to a laser processing machine. Further, by using a PSA apparatus that generates nitrogen having a purity of 99.999% or more as the nitrogen generating means, it is not necessary to provide a purifying apparatus for removing oxygen remaining in the nitrogen, thereby reducing the apparatus cost. be able to. Furthermore, by using a booster that automatically operates and stops in response to fluctuations in the suction side pressure as the second booster, it is only necessary to open and close each on-off valve by a pressure switch without providing a separate control means. The nitrogen supply path can be automatically changed.

本発明のレーザ加工機用窒素供給装置の一形態例を示す説明図である。It is explanatory drawing which shows one example of the nitrogen supply apparatus for laser processing machines of this invention.

本形態例に示すレーザ加工機用窒素供給装置は、原料空気圧縮機11で圧縮した空気を原料として窒素を発生させる窒素発生手段であるPSA装置(圧力変動吸着式窒素発生装置)12と、該PSA装置12で発生した窒素をあらかじめ設定された貯留圧力に昇圧する昇圧機(第1昇圧機)13と、該第1昇圧機13で昇圧した窒素を貯留するバッファタンク14と、該バッファタンク14内の窒素をレーザ加工機(図示せず)に供給する窒素供給経路(第1窒素供給経路)15と、該第1窒素供給経路15に設けられた第1開閉弁16と、前記第1窒素供給経路15の前記第1開閉弁16より上流側から分岐して第1窒素供給経路15に対して並列に設けられた第2窒素供給経路17と、該第2窒素供給経路17に設けられた第2開閉弁18及び該第2開閉弁18の下流側に設けられた第2昇圧機19とを備えている。   The nitrogen supply device for a laser beam machine shown in the present embodiment includes a PSA device (pressure fluctuation adsorption type nitrogen generator) 12 which is a nitrogen generating means for generating nitrogen using the air compressed by the raw material air compressor 11 as a raw material, A booster (first booster) 13 for boosting nitrogen generated in the PSA device 12 to a preset storage pressure, a buffer tank 14 for storing nitrogen boosted by the first booster 13, and the buffer tank 14 A nitrogen supply path (first nitrogen supply path) 15 for supplying nitrogen in the laser processing machine (not shown), a first on-off valve 16 provided in the first nitrogen supply path 15, and the first nitrogen A second nitrogen supply path 17 branched from the upstream side of the first on-off valve 16 of the supply path 15 and provided in parallel to the first nitrogen supply path 15, and provided in the second nitrogen supply path 17 Second on-off valve 1 And a second booster 19 provided on the downstream side of the second on-off valve 18.

さらに、本形態例に示すレーザ加工機用窒素供給装置には、第2窒素供給経路17における第2開閉弁18と第2昇圧機19との間に接続した外部窒素導入経路20と、該外部窒素導入経路20に設けられた第3開閉弁21とを備えている。また、前記第1開閉弁16、第2開閉弁18及び第3開閉弁21の開閉操作を、前記バッファタンク14内の圧力に応じて行う圧力スイッチ(PS)22が設けられており、レーザ加工機用窒素供給装置とレーザ加工機とを接続する窒素供給用配管23には、レーザ加工機への供給圧力をあらかじめ設定された圧力に調節するための減圧弁24が設けられている。   Further, the laser processing machine nitrogen supply apparatus shown in the present embodiment includes an external nitrogen introduction path 20 connected between the second on-off valve 18 and the second booster 19 in the second nitrogen supply path 17, and the external And a third on-off valve 21 provided in the nitrogen introduction path 20. In addition, a pressure switch (PS) 22 is provided to open and close the first on-off valve 16, the second on-off valve 18, and the third on-off valve 21 according to the pressure in the buffer tank 14, and laser processing is provided. A nitrogen supply pipe 23 that connects the machine nitrogen supply device and the laser processing machine is provided with a pressure reducing valve 24 for adjusting the supply pressure to the laser processing machine to a preset pressure.

圧力スイッチ22は、バッファタンク14内の圧力を検出し、検出した圧力があらかじめ設定された切換圧力以上のときには第1開閉弁16を開、第2開閉弁18及び第3開閉弁21を閉とし、検出した圧力が前記切換圧力未満で、かつ、あらかじめ設定された下限圧力以上のときには第2開閉弁18を開、第1開閉弁16及び第3開閉弁21を閉とし、検出した圧力が前記下限圧力未満のときには第3開閉弁21を開、第1開閉弁16及び第2開閉弁18を閉とするように設定されている。   The pressure switch 22 detects the pressure in the buffer tank 14 and opens the first on-off valve 16 and closes the second on-off valve 18 and the third on-off valve 21 when the detected pressure is equal to or higher than a preset switching pressure. When the detected pressure is less than the switching pressure and not less than a preset lower limit pressure, the second on-off valve 18 is opened, the first on-off valve 16 and the third on-off valve 21 are closed, and the detected pressure is When the pressure is less than the lower limit pressure, the third on-off valve 21 is opened and the first on-off valve 16 and the second on-off valve 18 are closed.

PSA装置12は、吸着剤を充填した吸着筒の圧力を変動させることによって空気中の窒素を濃縮する周知のPSA装置を使用することができ、好ましくは、吸着剤の種類や運転条件を適宜選択することによって純度99.999%以上の窒素を発生することができるPSA装置を使用する。PSA装置12で発生した窒素中の酸素残量が多い場合は、必要に応じて精製装置を付加することにより、酸素を除去して窒素純度を上げることができる。   As the PSA device 12, a well-known PSA device that concentrates nitrogen in the air by changing the pressure of the adsorption cylinder filled with the adsorbent can be used. Preferably, the type and operating conditions of the adsorbent are appropriately selected. Thus, a PSA apparatus capable of generating nitrogen having a purity of 99.999% or more is used. When the amount of oxygen remaining in the nitrogen generated in the PSA device 12 is large, it is possible to remove the oxygen and increase the nitrogen purity by adding a purification device as necessary.

PSA装置12及び第1昇圧機13は、レーザ加工機が要求する窒素使用量に応じた能力のものが用いられ、通常は、レーザ加工機の稼働時間内における平均使用量を賄える能力を有するものが選定される。また、バッファタンク14は、レーザ加工機における窒素使用量の変動状態に応じた容積のものが用いられ、通常は上限圧力が5MPa以下に設定され、大量の窒素を貯留する必要があるときには、複数のバッファタンクを設置することができる。   The PSA device 12 and the first booster 13 are used in accordance with the amount of nitrogen required by the laser processing machine, and usually have the ability to cover the average usage during the operating time of the laser processing machine. Is selected. The buffer tank 14 has a capacity corresponding to the fluctuation state of the amount of nitrogen used in the laser processing machine. Normally, the upper limit pressure is set to 5 MPa or less, and when a large amount of nitrogen needs to be stored, a plurality of buffer tanks 14 are used. Buffer tanks can be installed.

第2昇圧機19は、レーザ加工機における最大窒素使用量に対応した吐出量を有するものが用いられており、通常は、窒素の平均使用量に対応した第1昇圧機13の吐出量に対して2倍程度の吐出量を有する昇圧機が第2昇圧機19として用いられる。また、第1昇圧機13の吐出圧は、バッファタンク14の上限圧力以上、第2昇圧機19の吐出圧は、レーザ加工機への供給圧力以上の能力を有していればよい。さらに、第2昇圧機19には、吸入側圧力があらかじめ設定された運転圧力に到達したときに自動的に運転を開始し、吸入側圧力が前記運転圧力を下回ったときに自動的に停止あるいはアイドリング状態となる昇圧機を用いることが好ましい。   The second booster 19 has a discharge amount corresponding to the maximum amount of nitrogen used in the laser processing machine, and normally, with respect to the discharge amount of the first booster 13 corresponding to the average use amount of nitrogen. A booster having a discharge amount about twice as high is used as the second booster 19. Moreover, the discharge pressure of the 1st pressure | voltage riser 13 should just have the capability more than the upper limit pressure of the buffer tank 14, and the discharge pressure of the 2nd pressure | voltage riser 19 should be more than the supply pressure to a laser processing machine. Further, the second booster 19 automatically starts operation when the suction side pressure reaches a preset operation pressure, and automatically stops when the suction side pressure falls below the operation pressure. It is preferable to use a booster that is in an idling state.

各開閉弁16,18,21には、圧力スイッチ22からの信号で開閉作動可能な周知の電動弁や空圧弁を使用することができる。また、外部窒素導入経路20には、高圧窒素ガスを充填したボンベや液化窒素貯槽などの適宜な窒素供給源を接続しておくことができる。   As each on-off valve 16, 18, 21, a known electric valve or pneumatic valve that can be opened / closed by a signal from the pressure switch 22 can be used. Also, an appropriate nitrogen supply source such as a cylinder filled with high-pressure nitrogen gas or a liquefied nitrogen storage tank can be connected to the external nitrogen introduction path 20.

このように形成されたレーザ加工機用窒素供給装置を使用してレーザ加工機に窒素を供給する運転状態を以下に説明する。なお、ここでは、レーザ加工機への窒素供給圧力は3MPa、バッファタンク14の上限圧力は5MPa、圧力スイッチ22に設定した切換圧力は3.5MPa、下限圧力は1MPaとする。   An operation state in which nitrogen is supplied to the laser beam machine using the thus formed nitrogen supply device for the laser beam machine will be described below. Here, the nitrogen supply pressure to the laser processing machine is 3 MPa, the upper limit pressure of the buffer tank 14 is 5 MPa, the switching pressure set in the pressure switch 22 is 3.5 MPa, and the lower limit pressure is 1 MPa.

まず、準備段階としてPSA装置12及び第1昇圧機13の運転を開始し、バッファタンク14内に昇圧した窒素を充填する。バッファタンク14内の圧力が上限圧力、例えば5MPaに達すると、第1昇圧機13がアイドリング状態となり、第1昇圧機13の吸入側圧力、即ちPSA装置12の出口側圧力が上昇することによってPSA装置12の原料空気圧縮機11もアイドリング状態となって待機状態となる。この待機状態では、前記圧力スイッチ22の検出圧力が前記切換圧力以上であるから、第1開閉弁16は開状態で、第2開閉弁18及び第3開閉弁21は共に閉状態となっている。   First, as a preparation stage, the operation of the PSA device 12 and the first booster 13 is started, and the buffer tank 14 is filled with the pressurized nitrogen. When the pressure in the buffer tank 14 reaches an upper limit pressure, for example, 5 MPa, the first booster 13 enters an idling state, and the suction side pressure of the first booster 13, that is, the outlet side pressure of the PSA device 12 increases, thereby causing PSA. The raw material air compressor 11 of the apparatus 12 is also in an idling state and is in a standby state. In this standby state, since the detected pressure of the pressure switch 22 is equal to or higher than the switching pressure, the first on-off valve 16 is in the open state, and the second on-off valve 18 and the third on-off valve 21 are both in the closed state. .

レーザ加工機が稼働して窒素の使用を開始すると、バッファタンク14内に貯留された高圧の窒素が、第1開閉弁16を経て第1窒素供給経路15を通り、配管23の減圧弁24で圧力を3MPaに調節されてレーザ加工機に供給される。レーザ加工機への窒素の供給に伴い、バッファタンク14内の圧力が低下していくと、第1昇圧機13及び原料空気圧縮機11がアイドリング状態から運転状態となり、PSA装置12から発生する窒素の純度が規定値以上になると第1昇圧機13で昇圧した窒素がバッファタンク14内に導入される。レーザ加工機の窒素使用量が比較的少ない場合は、PSA装置12で発生し、第1昇圧機13で昇圧され、バッファタンク14内に導入された高圧の窒素が第1窒素供給経路15を通ってレーザ加工機に供給される運転状態と、前述の待機状態とが繰り返される。   When the laser processing machine is operated and the use of nitrogen is started, high-pressure nitrogen stored in the buffer tank 14 passes through the first open / close valve 16 and the first nitrogen supply path 15, and then the pressure reduction valve 24 of the pipe 23. The pressure is adjusted to 3 MPa and supplied to the laser processing machine. When the pressure in the buffer tank 14 decreases with the supply of nitrogen to the laser processing machine, the first booster 13 and the raw material air compressor 11 are changed from the idling state to the operating state, and the nitrogen generated from the PSA device 12 When the purity of the gas reaches a specified value or higher, nitrogen boosted by the first booster 13 is introduced into the buffer tank 14. When the amount of nitrogen used by the laser processing machine is relatively small, high-pressure nitrogen generated in the PSA device 12, boosted by the first booster 13, and introduced into the buffer tank 14 passes through the first nitrogen supply path 15. Then, the operation state supplied to the laser processing machine and the standby state described above are repeated.

レーザ加工機における窒素使用量が増大してバッファタンク14内に貯留された窒素の圧力が前記切換圧力の3.5MPa未満に低下すると、圧力低下を検出した前記圧力スイッチ22が作動することによって第1開閉弁16が開状態から閉状態に、第2開閉弁18が閉状態から開状態になり、バッファタンク14内の窒素が第2窒素供給経路17を通って第2昇圧機19によって3MPa以上に昇圧された後、配管23の減圧弁24で圧力を3MPaに調節されてからレーザ加工機に供給される。   When the amount of nitrogen used in the laser processing machine increases and the pressure of nitrogen stored in the buffer tank 14 drops below the switching pressure of less than 3.5 MPa, the pressure switch 22 that detects the pressure drop is actuated to activate the first pressure switch 22. The first on-off valve 16 changes from the open state to the closed state, the second on-off valve 18 changes from the closed state to the open state, and the nitrogen in the buffer tank 14 passes through the second nitrogen supply path 17 by the second booster 19 to 3 MPa or more. Then, the pressure is adjusted to 3 MPa by the pressure reducing valve 24 of the pipe 23 and then supplied to the laser processing machine.

第2窒素供給経路17から窒素を供給している状態が長く継続し、バッファタンク14内の圧力が下限圧力の1MPa未満まで低下すると、圧力スイッチ22によって第2開閉弁18が閉状態に、第3開閉弁21が開状態に切り替えられ、装置外部に設けられている窒素供給源からの窒素が外部窒素導入経路20を通って第2昇圧機19の吸入側に導入され、第2昇圧機19で昇圧されてからレーザ加工機に供給される。   When the state of supplying nitrogen from the second nitrogen supply path 17 continues for a long time and the pressure in the buffer tank 14 decreases to less than 1 MPa, which is the lower limit pressure, the second on-off valve 18 is closed by the pressure switch 22. 3 The on-off valve 21 is switched to the open state, and nitrogen from a nitrogen supply source provided outside the apparatus is introduced into the suction side of the second booster 19 through the external nitrogen introduction path 20, and the second booster 19 After the pressure is increased, the laser beam is supplied to the laser processing machine.

外部窒素導入経路20から窒素を導入している間は、バッファタンク14内の窒素は消費されないので、PSA装置12で発生した窒素が第1昇圧機13で昇圧されてバッファタンク14内に導入されることにより、バッファタンク14内の圧力は次第に上昇する。バッファタンク14内の圧力が前記下限圧力以上になると、第3開閉弁21が閉状態、第2開閉弁18が開状態となり、バッファタンク14内の窒素が第2窒素供給経路17、第2昇圧機19を通ってレーザ加工機に供給される状態となる。   Since nitrogen in the buffer tank 14 is not consumed while nitrogen is introduced from the external nitrogen introduction path 20, nitrogen generated in the PSA device 12 is boosted by the first booster 13 and introduced into the buffer tank 14. As a result, the pressure in the buffer tank 14 gradually increases. When the pressure in the buffer tank 14 becomes equal to or higher than the lower limit pressure, the third on-off valve 21 is closed and the second on-off valve 18 is opened, and the nitrogen in the buffer tank 14 is supplied to the second nitrogen supply path 17 and the second pressure increase. The machine 19 is supplied to the laser processing machine through the machine 19.

レーザ加工機の窒素使用量が減少し、PSA装置12から第1昇圧機13を経てバッファタンク14内に導入される窒素量がレーザ加工機への窒素供給量を上回るとバッファタンク14内の圧力が次第に上昇し、前記切換圧力以上に上昇すると、圧力スイッチ22によって第1開閉弁16が開状態に、第2開閉弁18が閉状態に切り替えられ、バッファタンク14から第1窒素供給経路15を通ってレーザ加工機に窒素が供給される。また、第2開閉弁18が閉じることによって第2昇圧機19は運転を停止、あるいは、アイドリング状態となる。   When the amount of nitrogen used in the laser processing machine decreases and the amount of nitrogen introduced into the buffer tank 14 from the PSA device 12 via the first booster 13 exceeds the amount of nitrogen supplied to the laser processing machine, the pressure in the buffer tank 14 Gradually rises above the switching pressure, the pressure switch 22 switches the first on-off valve 16 to the open state and the second on-off valve 18 to the closed state. Through this, nitrogen is supplied to the laser processing machine. Further, when the second on-off valve 18 is closed, the second booster 19 stops operating or enters an idling state.

このように、バッファタンク14内の圧力が低下して第1窒素供給経路15からの窒素供給が困難になったときに、窒素供給を第1窒素供給経路15から第2窒素供給経路17に切り替えて第2昇圧機19で昇圧した窒素をレーザ加工機に供給することにより、バッファタンク14内の窒素を有効に利用することができる。これにより、PSA装置12で発生させた窒素を無駄なく利用できるとともに、レーザ加工機に供給可能な窒素量が増大するため、窒素使用量の変動が大きなレーザ加工機に対しても安定した状態で窒素を供給することができる。   In this way, when the pressure in the buffer tank 14 decreases and it becomes difficult to supply nitrogen from the first nitrogen supply path 15, the nitrogen supply is switched from the first nitrogen supply path 15 to the second nitrogen supply path 17. By supplying nitrogen boosted by the second booster 19 to the laser processing machine, nitrogen in the buffer tank 14 can be used effectively. As a result, the nitrogen generated in the PSA device 12 can be used without waste, and the amount of nitrogen that can be supplied to the laser processing machine increases. Nitrogen can be supplied.

さらに、外部窒素導入経路20を設けておくことにより、装置外に設けられている窒素供給源から窒素を導入し、第2昇圧機19で昇圧してレーザ加工機に供給することができるので、レーザ加工機の窒素使用量が急激に増大した場合にも対応することができる。また、純度99.999%以上の窒素を発生するPSA装置12を用いることにより、窒素中に残存する酸素を除去するための精製装置を設ける必要がなくなり、装置コストやランニングコストの低減を図ることができる。さらに、第2昇圧機19として、吸入側圧力の変動に応じて自動的に運転及び停止を行う昇圧機を使用することにより、制御手段を別途設けることなく、圧力スイッチ22による各開閉弁16,18,21の開閉のみの操作で第2昇圧機19の運転や停止を自動的に行うことができる。   Furthermore, by providing the external nitrogen introduction path 20, nitrogen can be introduced from a nitrogen supply source provided outside the apparatus, and can be boosted by the second booster 19 and supplied to the laser processing machine. It is also possible to cope with a case where the amount of nitrogen used in the laser processing machine increases rapidly. Further, by using the PSA device 12 that generates nitrogen having a purity of 99.999% or more, it is not necessary to provide a purification device for removing oxygen remaining in the nitrogen, thereby reducing the device cost and running cost. Can do. Further, by using a booster that automatically operates and stops in response to fluctuations in the suction side pressure as the second booster 19, each on-off valve 16 by the pressure switch 22, The second booster 19 can be automatically operated and stopped only by opening and closing the valves 18 and 21.

なお、外部窒素導入経路は、必要に応じて設ければよく、PSA装置などの窒素発生手段で発生した窒素中に残存する酸素が多い場合は、酸素を除去する精製装置を設けることができる。また、バッファタンク内の圧力やレーザ加工機への窒素供給量に基づいて窒素発生手段、各昇圧機、各開閉弁を集中的に制御、監視する制御手段を設けることもできる。   Note that the external nitrogen introduction path may be provided as necessary, and when there is a large amount of oxygen remaining in nitrogen generated by a nitrogen generating means such as a PSA apparatus, a purification apparatus for removing oxygen can be provided. Further, it is possible to provide a control means for centrally controlling and monitoring the nitrogen generating means, each booster, and each on-off valve based on the pressure in the buffer tank and the amount of nitrogen supplied to the laser processing machine.

11…原料空気圧縮機、12…PSA装置、13…第1昇圧機、14…バッファタンク、15…第1窒素供給経路、16…第1開閉弁、17…第2窒素供給経路、18…第2開閉弁、19…第2昇圧機、20…外部窒素導入経路、21…第3開閉弁、22…圧力スイッチ、23…窒素供給用配管、24…減圧弁   DESCRIPTION OF SYMBOLS 11 ... Raw material air compressor, 12 ... PSA apparatus, 13 ... 1st pressure | voltage riser, 14 ... Buffer tank, 15 ... 1st nitrogen supply path, 16 ... 1st on-off valve, 17 ... 2nd nitrogen supply path, 18 ... 1st 2 on-off valve, 19 ... second booster, 20 ... external nitrogen introduction path, 21 ... third on-off valve, 22 ... pressure switch, 23 ... nitrogen supply pipe, 24 ... pressure reducing valve

Claims (4)

窒素を発生させる窒素発生手段と、該窒素発生手段で発生した窒素をあらかじめ設定された貯留圧力に昇圧する昇圧機と、該昇圧機で昇圧した窒素を貯留するバッファタンクと、該バッファタンク内の窒素をレーザ加工機に供給する窒素供給経路とを備えたレーザ加工機用窒素供給装置において、前記昇圧機よりも吐出量が多い第2昇圧機を備えた第2窒素供給経路を前記窒素供給経路に対して並列に設け、前記窒素供給経路に第1開閉弁を、前記第2窒素供給経路における前記第2昇圧機の吸入側に第2開閉弁をそれぞれ設けるとともに、前記バッファタンク内の圧力を検出し、検出した圧力があらかじめ設定された切換圧力以上のときには前記第1開閉弁を開いて前記第2開閉弁を閉じ、検出した圧力が前記切換圧力未満のときには前記第1開閉弁を閉じて前記第2開閉弁を開く圧力スイッチを設けたことを特徴とするレーザ加工機用窒素供給装置。   Nitrogen generating means for generating nitrogen, a booster for boosting nitrogen generated by the nitrogen generating means to a preset storage pressure, a buffer tank for storing nitrogen boosted by the booster, and in the buffer tank In a nitrogen supply apparatus for a laser processing machine comprising a nitrogen supply path for supplying nitrogen to a laser processing machine, the second nitrogen supply path provided with a second booster having a larger discharge amount than the booster is used as the nitrogen supply path. And a second on-off valve on the suction side of the second booster in the second nitrogen supply path, and a pressure in the buffer tank. When the detected pressure is equal to or higher than a preset switching pressure, the first on-off valve is opened and the second on-off valve is closed. When the detected pressure is less than the switching pressure, the first on-off valve is closed. Laser processing machine for the nitrogen supply device according to claim 1 Close off valve to the provision of the pressure switch for opening the second on-off valve. 前記第2窒素供給経路における前記第2昇圧機と前記第2開閉弁との間に、第3開閉弁を介して外部窒素供給源からの窒素を前記第2窒素供給経路に導入する外部窒素導入経路を設けるとともに、前記圧力スイッチは、前記バッファタンク内の圧力があらかじめ設定された下限圧力未満のときに、前記第3開閉弁を開いて前記第1開閉弁及び前記第2開閉弁を閉じることを特徴とする請求項1記載のレーザ加工機用窒素供給装置。   External nitrogen introduction for introducing nitrogen from an external nitrogen supply source into the second nitrogen supply path via a third on-off valve between the second booster and the second on-off valve in the second nitrogen supply path A path is provided, and the pressure switch opens the third on-off valve and closes the first on-off valve and the second on-off valve when the pressure in the buffer tank is lower than a preset lower limit pressure. The nitrogen supply device for a laser beam machine according to claim 1. 前記窒素発生手段は、純度99.999%以上の窒素を発生するPSA装置であることを特徴とする請求項1又は2記載のレーザ加工機用窒素供給装置。   The nitrogen supply device for a laser beam machine according to claim 1 or 2, wherein the nitrogen generation means is a PSA device that generates nitrogen having a purity of 99.999% or more. 前記第2昇圧機は、吸入側圧力があらかじめ設定された運転圧力に到達したときに自動的に運転を開始し、吸入側圧力が前記運転圧力を下回ったときに自動的に停止することを特徴とする請求項1乃至3のいずれか1項記載のレーザ加工機用窒素供給装置。   The second booster starts automatically when the suction side pressure reaches a preset operating pressure, and automatically stops when the suction side pressure falls below the operating pressure. The nitrogen supply device for a laser beam machine according to any one of claims 1 to 3.
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