JP2013013989A - Working fluid circulation device of wire saw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To remove chips mixed in a working fluid in a wire saw, and to supply the chip-removed working fluid to the wire saw.SOLUTION: This working fluid circulation device 1 of the wire saw 2 includes the wire saw 2 for pressing a workpiece 44 to a traveling wire 41 to cut it, a supply tank 6 for supplying the working fluid 8 to the wire saw 2, and a recovery tank 5 of the working fluid 8. The recovery tank 5 comprises a working fluid storage part 12 to which the recovered working fluid 8 is supplied, a tilted part 13 formed at one end of the working fluid storage part 12, an endless chain 18 permitted to go around along both width-direction ends of the recovery tank 5, a plurality of scrapers 23 for scraping the chips 28 deposited on the bottom surface 35 of the working fluid storage part 12 upward above the tilted part 13, an outlet 11 of the chips 28, and a working fluid outlet 7 for making the working fluid 8 of the working fluid storage part 12 overflow to be supplied to the supply tank 6. The supply tank 6 is configured to store the working fluid 8 overflowing from the recovery tank 5 and to supply the stored working fluid to the wire saw 1.

Description

  The present invention relates to a processing machine for circulating a wire saw used in a wire saw. More specifically, the cutting waste is separated from the processing fluid used when cutting a workpiece such as sapphire or silicon with a wire saw using a fixed abrasive wire, and the processing fluid from which the cutting waste has been removed is again used for wire saw processing. The present invention relates to a processing machine for circulating a wire saw.

  Conventionally, a wire row is formed by winding a wire between a plurality of groove rollers, and a wire such as sapphire, silicon, ceramics, etc. is supplied while the wire travels in one direction or reciprocates to supply a working fluid to the wire. A wire saw is known in which a wire is pressed against the wire row and cut.

  In the wire saw, a free abrasive grain type wire saw that cuts a workpiece while supplying a slurry in which abrasive grains such as silicon carbide and diamond are mixed with an oil-based or water-soluble cutting fluid as a working fluid to the vicinity of the cutting portion, and a wire surface. Using a fixed abrasive wire in which abrasive grains such as diamond are fixed by electrodeposition or resin, the workpiece is applied while supplying a cutting fluid such as water-soluble cutting fluid or surfactant added to the vicinity of the cutting part. A fixed abrasive type wire saw for cutting is known.

  In the loose abrasive type and fixed abrasive type wire saw, the workpiece is cut while the machining fluid is supplied to the workpiece cutting unit, and the machining fluid is collected in a collection tank provided in the wire saw, and the collection tank Is again supplied to the wire saw through the supply pump.

  As described above, the machining fluid circulates between the workpiece cutting part of the wire saw and the recovery tank, but the machining fluid used for cutting the workpiece is a piece of work or debris generated at the time of cutting. If the machining fluid mixed with this cutting waste is supplied to the workpiece cutting part, the cutting waste will be caught in the cut part of the workpiece and the machining accuracy will be reduced, or the cutting waste will be visible on the groove roller. The wire may be clogged and the wire may be disconnected.

  In the above-mentioned loose abrasive type wire saw, it is difficult to remove cutting scraps having a grain size equal to or smaller than that of abrasive grains because a slurry in which abrasive grains having a small grain size are mixed with a working fluid is used. . However, in the fixed abrasive grain type wire saw, since abrasive grains are not mixed with the machining fluid, for example, the cutting waste is removed from the machining fluid by passing the machining fluid through a centrifuge (for example, Patent Documents 1 and 2). .

  Also, a tank is provided between the recovery tank and the supply tank, and a filter is provided between the recovery tank and the tank, or a coagulation tank is provided to aggregate the cutting waste and remove the settled cutting waste. (For example, Patent Document 1).

JP 2002-144229 A JP 2010-253621 A

  By the way, in the method using the above-mentioned centrifuge, since the centrifuge is relatively large, there is a problem that the wire saw is enlarged, and a relatively large-capacity pump for feeding the collected processing liquid to the centrifuge. There is a problem that the cost is increased.

  Moreover, since the particle size of the cutting waste is fine, the method using the filter must use a filter having a finer filter diameter than the particle size of the abrasive grains fixed to the wire in order to remove the cutting waste. In order to pass the machining fluid through the filter, a hydraulic pressure is required, so that a large-capacity supply pump is required, which leads to an increase in cost and an increase in the size of the apparatus. In addition, there is a problem that the filter is clogged with a large amount of cutting waste and the flow rate of the machining fluid is reduced, the machining accuracy is lowered, and disconnection occurs due to insufficient cooling of the wire. Therefore, when a filter having a large filter diameter is used, there is a problem that the cutting waste passes through the filter and is supplied to the wire, the fixed abrasive grains of the fixed abrasive wire are clogged, and the processing accuracy is lowered.

  Further, the method of depositing and removing the cutting waste in the settling tank is difficult to remove the fixed cutting waste because the cutting waste aggregates and adheres to the bottom of the settling tank, and requires time for cleaning. There's a problem.

  SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a simple and compact wire saw machining fluid circulation device, and also to provide a wire saw machining fluid circulation device that does not require a large-capacity supply pump and can be reduced in cost. is there.

In order to solve the above-mentioned problems, the invention of claim 1 is characterized in that a fixed abrasive wire is wound between a plurality of groove rollers, the wire is unidirectionally moved or reciprocated, and a workpiece is pushed onto the wire between the groove rollers. A wire saw machining fluid circulation device comprising a wire saw adapted to cut, a supply tank for supplying a machining liquid to a wire between groove rollers of the wire saw, and a collection tank for collecting the machining liquid, The recovery tank is provided with a machining fluid reservoir that is supplied with the machining fluid collected from the wire saw, an inclined portion that is provided at one end of the machining fluid reservoir and is inclined upward.
An endless chain provided at both ends in the width direction along the inclined portion from the machining fluid reservoir, and spanned between the endless chains provided from the machining fluid reservoir so as to be able to circulate along the inclined portion. A plurality of scrapers that scrape the cutting waste settled on the bottom surface to the inclined rising end side of the inclined portion by rotating around together with both endless chains while slidingly contacting the bottom surfaces of the machining liquid storage portion and the inclined portion. And a cutting waste discharge port for discharging the cutting waste, and a supernatant of the machining fluid accumulated in the machining fluid storage portion, which are provided on the bottom surface of the inclined portion on the inclined rising end side, and supplied to the supply tank A machining fluid outflow portion, and the supply tank stores the machining fluid that overflows and flows out of the recovery tank and supplies the wire saw to the wire saw. A liquid circulation device.

  According to a second aspect of the present invention, an intermediate tank is provided between the recovery tank and the supply tank, and the cutting waste is settled and separated from the machining liquid supplied from the recovery tank by the intermediate tank. 2. The wire saw machining fluid circulation device according to claim 1, wherein the machining fluid is supplied to the supply tank.

  According to a third aspect of the present invention, at the upper end of the inclined portion, the endless chain is disposed so as to be folded downward, and the scraper scraping surface is directed to the lower discharge port as the endless chain turns. The wire saw machining fluid circulation device according to claim 1, wherein the wire saw machining fluid circulation device is configured to circulate so as to face.

  The cutting waste is separated from the working fluid collected from the wire saw by sedimentation, and the separated cutting waste is discharged while being scraped up with a scraper, and the cutting fluid removed is supplied to the wire saw. Unlike the case where a separator is provided, a large-capacity pump is not required, and the apparatus does not increase in size. Further, since the machining fluid can be supplied to the wire saw only with the supply pump that has been used conventionally, the cutting waste can be removed without increasing the cost.

  Also, since the cutting waste is removed from the working fluid and supplied to the wire saw, the processing accuracy is improved without clogging the fixed abrasive grains of the fixed abrasive wire, and foreign matter is caught in the wire or groove roller. No disconnection occurs.

  In addition, since the supernatant machining fluid from which cutting waste has been removed from the machining fluid is overflowed and supplied to the supply tank, it is processed from the recovery tank to the supply tank via the filter like conventional filter-type cutting waste removal. Since a supply pump for feeding the liquid is not required, the cost can be reduced.

  Even if an intermediate tank is provided between the recovery tank and the supply tank, the processing liquid can be moved by overflow without newly providing a pump between the recovery tank and the intermediate tank and between the intermediate tank and the supply tank. The cutting waste can be removed with higher accuracy.

  Further, since sapphire, diamond dropped from the fixed abrasive wire, and the like can be reused from the separated cutting waste, it can be recycled when a particularly useful metal is cut.

These are the explanatory views concerning a first embodiment of the present invention. These are top views showing 1st embodiment of the processing-liquid circulating apparatus of the wire saw of this invention. FIG. 3 is a cross-sectional view taken along arrow AA in FIG. 2. [Fig. 3] Fig. 3 is a partially cutaway BB direction cross-sectional view of Fig. 2. These are explanatory drawings concerning a second embodiment of the present invention. These are top views showing 2nd embodiment of the processing fluid circulation apparatus of the wire saw of this invention. These are explanatory drawings which concern on 3rd embodiment of this invention.

Hereinafter, embodiments of the present invention will be described with reference to FIGS. 1 to 7.
1 to 4 show a first embodiment of the present invention. FIG. 1 is an explanatory diagram of a wire saw machining fluid circulation device of the present invention. FIG. 2 is a wire saw machining fluid circulation of the present invention. FIG. 3 is a plan view of the apparatus, FIG. 3 is a cross-sectional view as seen from the direction AA in FIG. 1, and FIG. 4 is a cross-sectional view as seen from the direction BB in FIG.

  As shown in FIG. 1, the wire saw 2 is provided with a plurality of groove rollers 40 in which a large number of grooves are engraved. Abrasive grains such as diamond, alumina, and boron by electrodeposition, resin, or the like between the plurality of groove rollers 40. The wire 41 to which the wire is fixed is wound to form a wire row. The wire 41 travels in one direction or reciprocates between a supply side and a collection side reel (not shown) via an appropriate tension mechanism (not shown).

  A work 44 such as sapphire, silicon carbide, or silicon is bonded and fixed to the processing table 43 via a dummy member such as ceramic or carbon so as to face the wire row. The processing table 43 is moved up and down by a lifting motor 45 via an appropriate lifting mechanism, and the work 44 is pressed against the wires 41 of the wire row.

  Further, a machining fluid nozzle 42 is provided in the vicinity of the wire row, and machining of water (a surfactant added as appropriate), water-soluble cutting fluid, oil-based cutting fluid, etc., to the wire 41 of the wire row. Liquid 8 is supplied. The machining liquid 8 can be appropriately selected according to the workpiece 44 to be cut and the wire 41 to be used. The machining liquid 8 is supplied by the machining liquid 8 stored in the supply tank 6 being sent out by a supply pump 30. A temperature adjustment coil 32 is provided in the supply tank 6, and the machining liquid 8 stored in the supply tank 6 is cooled by passing an appropriate cooling liquid from the temperature controller 33.

  Below the cutting portion of the workpiece 44, a machining fluid receiver 46 is provided for collecting and collecting the machining fluid 8. The collected machining fluid 8 is discharged from the wire saw 2 through the machining fluid discharge pipe 3. It has become. The machining liquid 8 is discharged from the wire saw 2 and poured into a recovery port 10 of a recovery tank 5 provided adjacent to the wire saw 2.

  Next, based on FIG. 2 thru | or FIG. 4, the processing liquid circulation apparatus in the wire saw of this invention is demonstrated.

  The machining fluid circulation device 1 is provided adjacent to the wire saw 2, the collection tank 5 into which the machining fluid 8 discharged from the wire saw 2 is poured, and the supernatant of the machining fluid 8 from which the cutting waste 28 has been removed in the collection tank 5. And a supply tank 6 for storing the machining fluid 8 flowing out from the machining fluid outlet 7 and supplying it to the workpiece cutting portion of the wire saw 2.

  As shown in FIGS. 3 and 4, the recovery tank 5 is formed in a rectangular cylindrical shape, and is connected to one end in the longitudinal direction of the machining liquid reservoir 12 provided flat and the machining liquid reservoir 12. 3 and the inclined portion 13 formed in an upwardly inclined manner in FIG. 3 and the inclined portion 13 of the machining liquid storage portion 12 are constituted by a machining fluid outflow portion 7 provided adjacent to the other end.

  The machining fluid reservoir 12 is provided with an opening 10 above it, and the machining fluid discharge pipe 3 of the wire saw 2 is located on the opening 10, and the machining fluid discharged from the machining fluid discharge pipe 3. 8 is poured into the machining fluid reservoir 12.

  Further, a foreign matter recovery net 15 is provided directly below the opening 10 so as to be supported by the bracket, so that relatively large foreign matters (such as fragments of the work 44) mixed in the machining fluid 8 are removed. The foreign matter collection net 15 can have an appropriate mesh diameter according to the workpiece 44 to be processed, for example, about 0.5 mm.

  Further, the machining fluid reservoir 12 stores the machining fluid 8 collected from the wire saw 2 on its bottom surface 35. When a certain amount or more of the machining fluid 8 is poured, the machining fluid outlet 7 It overflows and flows out. Further, as will be described later, the machining fluid storage unit 12 stores the machining fluid 8 for a predetermined time and sinks the cutting waste 28 mixed in the machining fluid 8.

  In addition, an inclined portion 13 provided in an upwardly inclined state on the other end side of the machining fluid outflow portion 7 is connected to the machining fluid storage portion 12. A shaft 19 is pivotally supported on both side walls of the inclined portion 13 along the width direction of the inclined rising end of the inclined portion 13. A driven pulley 26 is connected to one end of the shaft 19, and a driving pulley 25 connected to the shaft of the driving motor 14 via a belt 29 is connected to the driven pulley 26 to drive the driving motor 14. As a result, the shaft 19 rotates. Sprockets 20 are fixed to both ends of the shaft 19 and are rotated by the driving motor 14.

  A shaft 16 is provided along the width direction at the end of the machining fluid reservoir 12 on the side of the machining fluid outlet 7, and is supported on both side walls of the machining fluid reservoir 12. Sprockets 17 are provided at both ends of the shaft 16, and endless chains 18 are stretched between the sprockets 17, 17 and the sprockets 20, 20.

  Further, upper guide rails 21 and 21 and lower guide rails 22 and 22 are provided above and below both ends in the width direction along the machining liquid storage portion 12 and the inclined portion 13, and the upper and lower guide rails 21 and 22 are provided. The endless chain 18 circulates along the line 22. The lower guide rails 22 and 22 are provided with a certain distance from the bottom surface 35 along the machining fluid reservoir 12 and the inclined part 13, and the endless chain 18 travels with a certain distance from the bottom surface. It is like that. The endless chain 18 is supported by a roller on a connecting shaft of the chain so as to smoothly circulate along the guide rails 21 and 22. The endless chain 18 and the sprockets 17 and 20 are preferably sealed appropriately so that the machining liquid 8 does not enter.

  Between the both endless chains 18, 18, a plurality of scrapers 23 are provided at predetermined intervals along the width direction of the machining liquid storage portion 12, and both end portions of the scraper 23 are connected to both endless chains via brackets 24. 18 and 18 are fixed. The tip portion 23a of the scraper 23 is provided with mesh-like irregularities or brushes. When the scraper 23 runs on the bottom surface 35 of the collection tank 5, the bottom surface 35 and the tip portion 23a are in sliding contact with each other. The scraps 28 collected on the bottom surface of the liquid storage part 12 are scraped up toward the upper end side of the inclined part 13. The endless chain 18 circulates clockwise as indicated by an arrow in FIG.

  On the bottom surface 35 on the inclined rising end side of the inclined portion 13, the cutting waste discharging portion 11 is provided, and the cutting waste 28 scraped up by the scraper 23 is discharged. A cutting waste collection box 27 is provided below the cutting waste discharging portion 11 to collect the cutting waste 28.

  The machining liquid outflow portion 7 communicates with the supply tank 6 as shown in FIG. 2, and the machining liquid 8 overflowed from the recovery tank 5 flows into the supply tank 6. In addition, a fixed-height dam plate is provided between the machining liquid outflow portion 7 and the collection tank 5 so that the machining liquid 8 stays in the collection tank 5 for a predetermined time and the cutting waste 28 is allowed to settle. However, in order to secure as much settling time of as much cutting waste 28 as possible in the collection tank 5, a shutter that automatically opens and closes instead of the barrier plate, or an appropriate mechanism that moves the barrier plate up and down is provided. Also good.

  A temperature adjustment coil 32 for cooling the machining liquid 8 is provided in the supply tank 6, and the temperature adjustment coil 32 is connected to a temperature controller 33. The supply tank 6 is provided with a supply pump 30, and the machining liquid supply hose 4 is connected to the machining liquid supply port 31 of the supply pump 30. The machining fluid supply hose 4 is connected to the wire saw 2 and supplies the machining fluid 8 stored in the supply tank 6 to the workpiece cutting portion of the wire saw 2. In the present embodiment, the collection tank 5 ensures the settling time of the cutting waste 28 and also ensures a sufficient capacity of the machining liquid 8 stored in the supply tank 6 in order to supply a sufficient machining liquid 8 to the wire saw 2. It is preferable to do so.

  The above is the configuration of the machining fluid circulation device for the wire saw according to the first embodiment of the present invention. Next, the operation of the machining fluid circulation device will be described with reference to FIG.

  The wire saw 2 is supplied with clean machining fluid 8 from the supply tank 6 by the supply pump 30 and is supplied from the machining fluid nozzle 42 to the wire row of the workpiece cutting unit. At this time, the temperature of the supplied machining fluid 8 depends on the size of the workpiece 44 to be machined, the type of the machining fluid 8 to be used, etc., but a temperature around 25 ° C. is supplied. In the wire saw 2, the fixed abrasive wire 41 travels in one direction or reciprocates, and the workpiece 44 is pressed against the wire row and cut into a plurality of wafers.

  The machining fluid 8 subjected to the above-described cutting falls to the machining fluid receptacle 46 and is collected and discharged from the machining fluid discharge pipe 3. The discharged machining fluid 8 depends on the flow rate of the machining fluid 8 from the supply tank 6 and the material and size of the workpiece 44, but is about 25 to 30 ° C.

  The discharged machining liquid 8 is poured into the collection tank 5 through the collection port 10, and relatively large foreign matters are removed by the foreign matter collection net 15, and then stored in the machining liquid storage unit 12. After a predetermined time (can be set arbitrarily), the cutting waste 28 mixed with the workpiece 8 settles on the bottom surface 35 of the machining liquid reservoir 12.

  Next, the endless chain 18 is driven in the direction of the arrow by the drive motor 14, so that the tip end portion 23 a of the scraper 23 is in sliding contact with the bottom surface 35 of the machining liquid storage portion 12 and is directed toward the upper end of the inclined portion 13. It circulates and scrapes the scraps 28 sequentially toward the scrap outlet 11. At this time, the machining liquid 8 scraped up together with the cutting waste by the scraper 23 flows down along the bottom surface 35 of the inclined portion 13, and only the cutting waste 28 is discharged from the cutting waste discharge port 11 to the cutting waste collection box 27. The scraper 23 is inverted upward by the sprocket 20 of the inclined portion 13, and goes around to the working fluid storage portion 12 again. The turning of the scraper 23 is stopped after a predetermined time (can be set arbitrarily). What is necessary is just to set suitably the settling time of the above-mentioned process liquid 8, and the operation time of the scraper 23 according to the material of the workpiece | work 44, a magnitude | size, etc. to process.

  When the machining fluid 8 stored in the machining fluid reservoir 12 and from which the cutting waste 28 has been removed is accumulated in a certain amount of the machining fluid reservoir 12, it overflows into the machining fluid outlet 7, and the machining fluid 8 that has flowed out is It flows into the supply tank 6.

  The machining fluid 8 stored in the supply tank 6 is cooled by the temperature controller 33, is brought to a predetermined temperature again, and is supplied to the wire saw 2 by the supply pump 30. The machining liquid 8 is supplied from the machining liquid nozzle 42 of the wire saw 2 to the workpiece cutting unit through the pipe 34. By repeating the above operation, the cutting waste 28 is removed in the collection tank 5 while circulating the machining liquid 8 between the collection tank 5, the supply tank 6, and the wire saw 2, and the clean machining liquid 8 is supplied to the wire saw 2 To supply. Therefore, the machining liquid 8 can be cleaned without newly providing a supply pump, and can be circulated to the wire saw 2 to supply the machining liquid 8.

  The wire saw machining fluid circulating apparatus according to the first embodiment has been described above. Next, the second embodiment will be described below.

  As shown in FIGS. 5 and 6, in the second embodiment, an intermediate tank 50 is provided between the collection tank 5 and the supply tank 6, and the rest is the same as in the first embodiment. Since there are, the description of the same part is omitted.

  The machining fluid 8 from which the cutting waste 28 has been removed in the recovery tank 5 overflows from the machining fluid reservoir 12 and is supplied to the intermediate tank 50 through the machining fluid outlet 7. A small amount of cutting waste 28 that cannot be completely removed in the recovery tank 5 is settled and separated from the working liquid 8 while it remains in the intermediate tank 50. In addition, a barrier plate is provided between the intermediate tank 50 and the supply tank 6 so as to overflow when a certain amount of the processing liquid 8 accumulates. If an appropriate mechanism for automatically raising and lowering the weir plate is provided, the residence time of the machining liquid 8 in the intermediate tank 50 can be secured, and the cutting waste 28 can be removed more accurately.

  The machining liquid 8 stored in the intermediate tank 50 and from which the cutting waste 28 is settled and separated overflows when a certain amount of the machining liquid 8 is accumulated in the intermediate tank 50, and the supernatant is supplied to the supply tank 6 through the machining liquid outflow portion 51. Therefore, the machining liquid 8 can be cleaned simply by providing only one supply pump 30 in the supply tank 6.

  When the intermediate tank 50 is provided in this way, the machining liquid 8 can be further purified and the amount of the machining liquid in the supply tank 6 can be stabilized, so that the machining liquid to the wire saw 2 can be stably supplied. In addition, since the machining liquid 8 can be naturally cooled while it stays in the intermediate tank 50, the machining liquid 8 that is more clean and stable in temperature can be supplied to the wire saw 2, and the machining accuracy of the workpiece 44 is improved. . If necessary, the temperature adjusting coil 32 may be provided in the intermediate tank 50 for cooling.

  In the present embodiment, the machining liquid 8 is supplied from the intermediate tank 50 to the supply tank 6 by overflow. Instead, a supply pump is provided in the intermediate tank 50, and the machining liquid 8 delivered by the supply pump is provided. May be supplied to the supply tank 6 after being filtered by a filter. By doing so, the cost of the supply pump increases, but the machining fluid 8 can be cleaned with higher accuracy, and the machining fluid 8 after removing most of the cutting waste 28 is filtered with a filter, so the filter is clogged. Does not happen.

  Further, oil mist may be sprayed so that the machining fluid 8 and the cutting waste 28 do not enter the bearing portion of the wire saw 2, and this oil may be mixed into the machining fluid 8. When water or a water-soluble cutting fluid is used as the machining fluid 8, the oil is mixed with the machining fluid 8, and the machining fluid 8 deteriorates. Therefore, an oil component is present between the intermediate tank 50 and the supply tank 6. If the filter etc. which adsorb | suck are provided, the impurity of the process liquid 8 can be removed and the deterioration of the process liquid 8 can be prevented.

  The above is the second embodiment, and the third embodiment will be described below. Also in the third embodiment, description of the same parts as those in the first and second embodiments is omitted.

  As shown in FIG. 7, in the third embodiment, the surface of the scraper 23 that scrapes up the cutting waste 28 in the vicinity of the cutting waste discharge port 11 that discharges the cutting waste 28 faces downward, and the cutting waste 28 is discharged more. It is configured so that it can be easily done. This is because the cutting swarf 28 settled and separated from the machining fluid 8 of the wire saw 2 has a fine particle size and contains the machining fluid 8 in a sludge shape, so that the cutting adhered to the scraper 23 only by scraping. This is because it is difficult to remove the waste 28.

  A sprocket 52 is provided below the sprocket 20 provided on the inclined rising end side of the inclined portion 13, and a sprocket 53 is provided below the sprocket 52. The endless chain 18 that has circulated on the lower side of the inclined portion 13 is folded vertically downward by the sprocket 52. The folded endless chain 18 is further folded upward toward the sprocket 20 by the sprocket 53.

  By doing as described above, the scraper 23 rakes up the cutting waste 28 and discharges the cutting waste 28 from the cutting waste discharge port 11 when it goes around the bottom surface 35 side of the inclined portion 13, and further adheres to the scraper 23. Then, the scraps 28 remaining in the scraper 23 are inverted so that the scraped surface side of the scrapers 23 is turned downward, so that the scraps remaining on the scraper 23 can be completely dropped into the scrap collection box 27. it can. Note that the scraper 23 may be vibrated when the scraping surface side of the scraper 23 faces downward, or the scraper 23 may be impacted to promote the fall of the cutting waste 28.

Since other parts are the same as those in the first and second embodiments, description thereof will be omitted.
The above is the embodiment of the wire saw machining fluid circulation device of the present invention, but the present invention is not limited to this, and various modifications are possible within the scope of the present invention. For example, various belts can be used instead of the endless chain, or a temperature controller can be provided in the intermediate tank 50 as necessary. Further, in the embodiment of the present invention, the scraper 23 of the collection tank 5 is intermittently driven, but may be driven continuously. Further, the number and shape of the scrapers 23 can be changed as appropriate.

DESCRIPTION OF SYMBOLS 1 Processing liquid circulation apparatus 2 Wire saw 3 Processing liquid discharge pipe 4 Processing liquid supply hose 5 Recovery tank 6 Supply tank 7 Processing liquid outflow part 8 Processing liquid 9 Liquid level 10 Recovery port 11 Cutting waste discharge port 12 Processing liquid storage part 13 Inclination part 14 drive motor 15 foreign matter collection net 16 shaft 17 sprocket 18 chain 19 shaft 20 sprocket 21 upper guide rail 22 lower guide rail 23 scraper 23a tip 24 bracket 25 drive pulley 26 driven pulley 27 cutting waste collection box 28 cutting waste 29 belt 30 Supply pump 31 Processing fluid supply port 32 Temperature control coil 33 Temperature controller 34 Piping 35 Bottom surface 40 Work roller 41 Fixed abrasive wire 42 Processing fluid nozzle 43 Processing table 44 Work 45 Lifting motor 46 Processing fluid receiver 50 Intermediate tank 51 Processing fluid outflow Part 52 Sprocket 53 sprocket

Claims (3)

A wire saw in which a fixed abrasive wire is wound between a plurality of groove rollers, the wire is unidirectionally moved or reciprocated, and a workpiece is pressed against the wire between the groove rollers to cut the wire saw, and a groove of the wire saw A wire saw machining fluid circulation device comprising a supply tank for supplying machining fluid to a wire between rollers, and a recovery tank for collecting the machining fluid,
The collection tank is
A machining fluid reservoir to which machining fluid recovered from the wire saw is supplied;
An inclined portion that is provided at one end of the machining liquid storage portion and is inclined upward.
An endless chain provided at both ends in the width direction along the inclined portion from the machining fluid reservoir, and provided so as to be able to circulate along the inclined portion from the machining fluid reservoir,
The swarf rising end of the inclined portion is suspended between the endless chains, and circulates with the endless chains while slidingly contacting the bottom surfaces of the machining fluid storage portion and the inclined portion, and settles on the bottom surface. With multiple scrapers scraping to the side,
Provided on the bottom surface of the inclined portion on the inclined rising end side, cutting waste discharge port for discharging the cutting waste,
A machining fluid outflow portion that overflows the supernatant of the machining fluid accumulated in the machining fluid reservoir and supplies it to the supply tank,
A wire saw machining fluid circulation device characterized in that the supply tank is configured to store the machining fluid that overflows and flows out from the recovery tank and to supply the machining fluid to the wire saw. An intermediate tank is provided between the recovery tank and the supply tank,
2. The cutting waste is settled and separated from the machining fluid supplied from the recovery tank in the intermediate layer, and the machining fluid from which the cutting waste is separated is supplied to the supply tank. Wire saw machining fluid circulation device.   The endless chain is arranged so as to be folded downward at the upper end of the inclined portion, and the scraper scraping surface is turned so that it faces the direction of the lower discharge port as the endless chain turns. The working fluid circulating apparatus for a wire saw according to any one of claims 1 and 2.

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