JP2013011542A - Inspection apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inspection apparatus in which optical characteristics of light from a light source of an inspection object can be accurately inspected, and thus improvement of inspection efficiency can be achieved and also high reliability of inspection can be obtained.SOLUTION: An inspection apparatus is configured to perform taking in light from an LED of an inspection object by a light collection part 2 and optically inspecting the LED by a spectroscope. The light collection part 2 is provided with an opening facing the LED for taking in the light, and also includes a cup-like case 21 in which an optical fiber 4 for outputting the taken-in light to the spectroscope is installed on a base end thereof, and a light adjustment part in which ten annularly-formed shield members 221, which shield a range other than a range including an optical axis from the LED through the opening up to the optical fiber 4, are disposed along the depth direction inside the case 21, thus restricting light which is incident on the opening while skewing relative to the optical axis.

Description

  The present invention relates to an inspection apparatus for inspecting optical characteristics of a light source.

  An LED, which is an example of a light source, is inspected to obtain desired electrical characteristics and optical characteristics after a light emitting element is sealed in a package and manufactured as a light emitting device. Or it is inspected to rank according to the light emission luminance and chromaticity of the LED.

  As an inspection apparatus used for such an inspection, one described in Patent Document 1 is known.

  The electronic component inspection apparatus described in Patent Document 1 performs a performance test at a high temperature while covering each electronic component of the lead frame with a heating element heated to a high temperature, and the heating element is separated from each electronic component. By performing the performance inspection at room temperature, the performance inspection at ordinary temperature and high temperature can be efficiently performed in one stage.

  On the other hand, when optically inspecting LEDs arranged in columns and rows on a rectangular lead frame, the inspection is performed as shown in FIG.

  In the inspection apparatus shown in FIG. 9, a daylighting unit 101 for taking in light from the LED 10 and outputting the taken light to a spectroscope (not shown) is arranged in a row above the LEDs 10 arranged in columns and rows. . The daylighting unit 101 is provided with a case unit 103 in which an optical fiber 102 for transmission to a spectroscope is connected to the base end.

JP 2002-340973 A

  However, if not only the LED 10 to be inspected but also the LEDs 10 other than the inspection object are turned on and the inspection is performed at the same time, the light from the LED 10 to be inspected immediately below is inside the case portion 103 as shown in FIG. In addition, light from LEDs other than those to be inspected enters the case portion 103. Since the light from the LED other than the inspection target is not located immediately below the case portion 103, it travels while reflecting the inner peripheral surface of the case portion 103 and reaches the inside of the optical fiber 102. In this case, it is affected by the light of the LED other than the inspection target that is turned on at the same time as the LED to be inspected, resulting in an erroneous measurement result, which causes erroneous determination.

  For example, only the LED to be inspected is lit and other LEDs are not lit, or the LEDs at a position away from the LED to be inspected so as not to enter the case portion 103 by separating the case portions 103 from each other. In other words, it is possible to prevent light from LEDs other than the inspection target from entering the case portion 103.

  However, in order to inspect all the LEDs arranged in the vertical and horizontal rows as shown in FIG. 9, if the LEDs 10 are turned on only one by one, or the LEDs at positions away from the LEDs to be inspected are inspected. Will be less efficient.

  Therefore, the present invention provides an inspection apparatus capable of improving inspection efficiency and obtaining high inspection reliability by accurately inspecting optical characteristics of light from a light source to be inspected. Objective.

  The inspection apparatus of the present invention is an inspection apparatus for taking in light from a light source to be inspected (hereinafter referred to as an inspection light source) by a daylighting unit and performing an optical inspection of the inspection light source. The cup is provided with an opening for taking light toward the inspection light source, and a cup-shaped case part provided with a light receiving part at the base end for outputting the taken light to the optical measuring device; Two or more shielding members formed in an annular shape for shielding a range other than the range including the optical axis from the inspection light source to the light receiving unit through the opening are disposed along the depth direction in the case unit, And a light adjusting unit that restricts light incident on the opening while being inclined with respect to the optical axis.

  In the present invention, since the first shielding member blocks and the next shielding member can block the progress even after passing through the first shielding member, the optical characteristics of the light from the light source to be inspected can be accurately inspected. Thus, the inspection efficiency can be improved and high inspection reliability can be obtained.

The figure which shows the structure of the inspection apparatus which concerns on Embodiment 1 of this invention. A plan view showing LEDs to be inspected that are supported by a lead frame and arranged in columns and rows The perspective view which shows LED which is a light source used as inspection object The figure for demonstrating the structure of the contact block of the inspection apparatus shown in FIG. 1, (A) is a figure which shows an open state, (B) is a figure which shows an energized state 1A and 1B are views for explaining the structure of a daylighting unit of the inspection apparatus shown in FIG. 1, FIG. 1A is a vertical sectional perspective view, FIG. 1B is a front view, and FIG. The figure which shows the use condition of the inspection apparatus shown in FIG. The figure which shows the lighting part and spectrometer of the inspection apparatus which concern on Embodiment 2 of this invention The figure which shows the use condition of the lighting part of the inspection apparatus which concerns on Embodiment 3 of this invention. The figure for demonstrating the conventional inspection apparatus The figure for demonstrating the lighting part of the conventional inspection apparatus

  A first invention of the present application is an inspection device for taking in light from a light source to be inspected by a daylighting unit and performing an optical inspection of the inspection light source, and the daylighting unit emits light toward the inspection light source. An opening for taking in is provided, and a light receiving part that outputs the taken light to the optical measuring device is provided at the base end part, and the light source from the inspection light source to the light receiving part through the opening 2 or more shielding members formed in an annular shape that shield a range other than the range including the optical axis up to and including the optical axis are arranged along the depth direction in the case portion, and light that enters the opening obliquely with respect to the optical axis. An inspection apparatus comprising: a light adjusting unit for limiting.

  According to the first invention, light in a range included in the optical axis emitted from the light source to be inspected can reach the light receiving unit located on the back side of the case unit and can be output to the measuring device. Light from a light source other than the inspection target becomes light that is skewed with respect to the optical axis of the daylighting unit that measures the inspection light source, and is incident on the daylighting unit that measures the inspection light source. Even if it passes through the first shielding member, the next shielding member can block the light that is reflected inside the case part and further proceeds to the back side of the case part, thus preventing erroneous measurement. Can do.

  A second invention of the present application is the inspection apparatus according to the first invention, wherein the shielding member has a larger opening on the back side than the opening side of the case portion.

  According to the second invention, when the light from the light source to be inspected is incident on the light receiving unit, the light to be inspected by the shielding member can be reached without shielding.

  According to a third aspect of the present invention, there is provided the inspection apparatus according to the first or second aspect, further comprising an electrical measurement device that supplies power to the inspection light source to which the daylighting unit is directed and measures the electrical characteristics. It is.

  According to the third invention, the optical characteristics and electrical characteristics of the inspection light source can be measured simultaneously.

  A fourth invention of the present application is characterized in that, in the first or second invention, an electrical measurement device is provided that supplies power to a light source adjacent to an inspection light source to which a daylighting unit is directed and measures electrical characteristics. This is an inspection device.

  According to the fourth invention, even if the light source adjacent to the inspection light source is caused to emit light, it can be shielded by the daylighting unit, so that the electrical characteristics of the adjacent light source are simultaneously measured while measuring the optical characteristics of the inspection light source. be able to.

  A fifth invention of the present application is the inspection light source according to any one of the first to fourth inventions, wherein the plurality of daylighting units are connected in common to the optical measuring device, and the plurality of daylighting units are directed. The inspection apparatus is characterized in that means for selectively emitting light is provided.

  According to the fifth aspect of the invention, since the plurality of daylighting units are exclusively used by selectively emitting the inspection light source, the light from one inspection light source is always input to the optical measurement device. Can be done. Accordingly, since a plurality of daylighting units use the optical measuring device in common, the cost can be suppressed.

(Embodiment 1)
An inspection apparatus according to Embodiment 1 of the present invention will be described with reference to the drawings.

  An inspection apparatus 1 shown in FIG. 1 is an inspection apparatus that inspects the optical characteristics of LEDs 10 arranged in columns and rows on a lead frame F having a rectangular frame shape. In the first embodiment, in the lead frame F, 15 rows of LEDs 10 are arranged in a row in the longitudinal direction and 8 rows in a row in the short direction. Also, as shown in FIG. 2, a large lead frame frame F may be used.

  The LED 10 is supported by the lead frame frame F because the branch lead frame F1 before cutting protrudes from both ends and is connected to the lead frame frame F. As shown in FIG. 3, the LED 10 includes a package 10a in which a recess is formed, a light emitting element 10b mounted in the recess of the package 10a, and a fluorescence that generates wavelength-converted light excited by light from the light emitting element 10b. The resin sealing part 10c which sealed the light emitting element 10b by filling the recessed part with sealing resin containing the body, and the anode terminal 10x and the cathode terminal 10y connected with the anode and cathode of the light emitting element 10b are provided.

  As shown in FIG. 1, the inspection apparatus 1 is provided with a daylighting unit 2 that takes in light by directing a distal end portion 21 x (see FIG. 5) toward the LED 10 to be inspected. An optical fiber 4 is connected to the base end portion 21y (see FIG. 5) of the daylighting section 2 for transmitting the captured light to the spectroscope 3, which is an optical measuring device that measures the optical characteristics of the LED 10. .

  In addition, the inspection device 1 is provided with a contact block 5 that functions as an energizing unit for supplying power to the terminals of each of the arranged LEDs 10 on the back surface side. The contact block 5 is connected to an electrical measuring device 6 that supplies power to the LED 10 and inspects the electrical characteristics of the LED 10.

  4A and 4B, the contact block 5 includes a pair of contacts 52 that supply power to the stage 51 that supports the lead frame F in contact with the anode terminal 10x and the cathode terminal 10y of the LED 10. Are arranged in a matrix corresponding to each LED 10. The pair of contacts 52 is set to an open state (open state) as shown in FIG. 4A or a closed state (energized state) as shown in FIG. Be controlled.

  The electrical measuring device 6 has a function of supplying power to the LED 10 via the contact 52, measuring a current flowing through the LED 10, and outputting it as electrical measurement data.

  Further, the inspection device 1 controls the contact 52 of the contact block 5, determines the optical measurement data measured by the spectroscope 3 based on the inspection standard, or the electrical measurement data measured by the electrical measurement device 6. And a control device 7 is provided.

  Here, the structure of the lighting part 2 is demonstrated in detail based on FIG. 1 and FIG. 5 (A)-(C).

  Two lighting units 2 (lighting units 2 a and 2 b) are arranged along the short direction of the lead frame F and spaced apart. The daylighting unit 2 includes a case portion 21 formed in a cup shape and a light adjusting portion 22 disposed in the case portion 21.

  The case portion 21 is provided with an opening 211 for taking light toward the LED 10 at the distal end portion 21x. The case portion 21 is provided with an attachment member 212 that is attached to the base end portion 21y and functions as a light receiving portion with the end face (incident surface) of the distal end portion of the optical fiber 4 exposed. In the first embodiment, the case portion 21 is formed in a cup shape having the same diameter from the distal end portion to the proximal end portion. The case portion 21 can have a height of about 9 cm and an outer diameter of about 2.5 cm, for example.

  In the light adjusting unit 22, an annular shielding member 221 that shields a range other than a predetermined range including the optical axis H from the LED 10 to be inspected to the end face of the optical fiber 4 through the opening 211 is an opening in the case 21. 211 are arranged at predetermined intervals along the depth direction from 211. In the first embodiment, the shielding member 221 is formed in a disk shape having a through hole in the central portion, and ten sheets are provided. Five of the openings 211 are formed with an opening diameter of about 1 cm, which is a light passage range from the LED 10 to be inspected. It is formed to 3 cm. That is, the shielding member 221 has a larger opening on the back side than the opening side of the case portion 21.

  The operation and use state of the inspection apparatus according to Embodiment 1 of the present invention configured as described above will be described with reference to the drawings.

  As shown in FIG. 1, the control device 7 closes the contact 52 of the contact block 5 corresponding to the LED 10 to be inspected of optical characteristics located immediately below the daylighting units 2 a and 2 b, and applies a predetermined voltage from the electrical measurement device 6. Supply power.

  The LED 10 to be inspected is turned on by this power supply. The electrical measuring device 6 measures the current from the contact 52 that flows when the LED 10 is turned on, and electrical measurement data indicating a forward current or the like is output to the control device 7. And the control apparatus 7 inputs electrical measurement data, and determines whether LED10 is satisfy | filling the specification of an electrical property.

  Next, measurement of optical characteristics will be described. Since there are a plurality of LEDs 10 to be inspected, they are referred to as LEDs x1 and x2.

  As shown in FIG. 6, directly above light G1, which is light in the directly upward direction, is incident on one of the daylighting portions 2a in the same direction as the optical axis H from the LED x1 located immediately below it. Similarly, directly above light G2 which is light in the directly upward direction from the LED x2 located immediately below the other daylighting portion 2b is incident. However, not only the LED x1 but also the light emitted obliquely upward from the LED x2 enters one of the daylighting portions 2a. In addition, light emitted obliquely upward from the LED x1 as well as the LED x2 enters the other daylighting portion 2b. That is, the light from the LEDs x1 and x2 is incident on the daylighting unit 2 that measures the LEDs x1 and x2 other than the inspection target as light that is skewed with respect to the directly above lights G1 and G2.

  However, since the shielding member 221 is provided on the inner surface of the case portion 21 of the daylighting portions 2a and 2b, for example, light from the LED x2 indicated by the optical path K1 is emitted from the opening portion of one daylighting portion 2a. After being incident on 21, the light is reflected on the fourth stage shielding member 221, the inner side surface of the case portion 21, and the rear side surface of the third stage shielding member 221, and is attenuated while reaching the eighth stage shielding member 221. By going, it can prevent entering into the front end surface of the optical fiber 4 which is a light-receiving part.

  The light from the LED x2 indicated by the optical path K2 enters the case portion 21 through the opening of one of the daylighting portions 2a, and then the second-stage shielding member 221, the inner surface of the case portion 21, and the first-stage shielding. Reflected on the back side surface of the member 221, then reflected on the fourth stage shielding member 221, the inner side surface of the case portion 21, and the back side surface of the third stage shielding member 221, and then the sixth and fifth stages By being attenuated while reflecting between the shielding member 221 and the 9th and 8th shielding members 221, it is prevented from entering the front end surface of the optical fiber 4.

  The light incident on the optical fiber 4 is measured for luminance, spectrum, and the like by the spectroscope 3 and output from the spectroscope 3 as optical measurement data. The control device 7 determines whether or not the standard is satisfied based on the optical measurement data, and ranks the LEDs 10 (x1, x2) according to luminance and chromaticity.

  When the inspection of the electrical characteristics and optical characteristics of the LED 10 to be inspected is completed, the control device 7 moves the daylighting units 2a and 2b to a position immediately above the next LED 10 to be inspected by a driving unit (not shown). Specifically, the control device 7 first moves the LED 10 in the X direction (see FIG. 1) and continues the inspection. When all the LEDs 10 in the X direction are completed, the daylighting units 2a and 2b are returned to their original positions and moved by one line in the Y direction. Then, when all of the Y direction is completed, the inspection is completed.

  In this way, only the light from the LED x1 is incident on the optical fiber 4 of the daylighting unit 2a, and only the light from the LED x2 is incident on the optical fiber 4 of the daylighting unit 2b, so that the LED x1 and the LED x2 are turned on simultaneously. However, it can avoid that the light from LED other than a test object injects into the optical fiber 4. FIG. Therefore, since the inspection apparatus 1 can accurately inspect the optical characteristics of the light from the light source to be inspected, the inspection efficiency can be improved and high inspection reliability can be obtained.

  Further, by narrowing the light with the shielding member 221 on the opening 211 side, high-precision inspection is possible without making the inspection environment around the inspection apparatus 1 have a dark room structure.

  In addition, since the shielding member 221 has a larger opening on the back side than the opening side of the case portion 21, when light from the LED to be inspected enters the optical fiber 4, the shielding member 221 is The light to be inspected is not shielded.

  On the contrary, if the opening of the shielding member 221 on the back side is smaller than the shielding member 221 on the opening 211 side, a part of the light reaches the optical fiber 4 while being shielded by the shielding member 221. It becomes impossible to accurately measure the light emitted from the target LED. Therefore, since the opening of the shielding member 221 is formed larger on the back side than the opening side of the case part 21, the accuracy of the optical characteristics can be further improved.

(Embodiment 2)
An inspection apparatus according to Embodiment 2 of the present invention will be described with reference to FIG. In FIG. 7, the same components as those in FIG.

  In the first embodiment, the spectroscope 3 is connected to each of the two daylighting units 2a and 2b. However, the two daylighting units 2a and 2b can use the single spectroscope 3 in common. . When one spectroscope 3 is used in common by the two daylighting units 2, the control device 7 selectively energizes the contact 52 of the contact block 5 corresponding to the daylighting unit 2 on the measurement side. In this way, if the control device 7 and the contact block 5 are made to function as means for selectively emitting the LED to be inspected and the plurality of daylighting units 2 are exclusively used, two or more daylighting units 2 can be obtained. Even if it is used, only one spectrometer 3 is required. By doing so, the cost can be reduced because only one spectrometer 3 is required. Further, even if a plurality of lighting units 2 are used exclusively, such as inspecting with one daylighting unit 2a and inspecting with the other daylighting unit 2b, the time required for the inspection remains ON / OFF. Since the time is about, the influence on the inspection time is small as compared with the case where the inspection is simultaneously performed by the two daylighting units 2.

(Embodiment 3)
An inspection apparatus according to Embodiment 3 of the present invention will be described with reference to FIG. In FIG. 8, the same components as those in FIG.

  The inspection apparatus shown in FIG. 8 has the same configuration except that the outer diameter of the case portion 21 of the daylighting portions 2c and 2d is smaller than that of the daylighting portions 2a and 2b shown in FIG.

  The daylighting portions 2c and 2d are formed adjacent to each other so that the outer diameter of each case portion 21 is about 5 to 6 mm. In the position shown in FIG. 8, the daylighting unit 2c can inspect the LEDx1 directly below, and the daylighting unit 2d can inspect the LEDx3 directly below. LEDx1 and LEDx3 are located on both sides of one LEDx4.

  Since the daylighting parts 2c and 2d according to the third embodiment are formed narrower than the daylighting parts 2a and 2b according to the first embodiment (see FIG. 6), the LEDs x1 and x3 to be inspected and the LED x4 located therebetween are The LEDs x1 and x3 to be inspected simultaneously and the LED x4 adjacent to the LED x1 and the LED x5 adjacent to the LED x3 are simultaneously turned on, and light from the LEDs x4 and x5 that are not to be inspected enter the daylighting portions 2c and 2d. However, it attenuates as it is repeatedly reflected on the shielding member 221 and the inner side surface of the case portion 21, and is prevented from entering the front end surface of the optical fiber 4, which is a light receiving portion located at the back of the case portion 21. be able to.

  As described above, the outer diameter of the case portion is set in accordance with the arrangement interval of the LEDs to be inspected like the daylighting portions 2c and 2d, so that the LEDs x4 adjacent to the inspected LEDs x1 and x3 are turned on. Also, it is possible to accurately measure the optical characteristics of the LEDs x1 and x3 to be inspected. Therefore, also in the inspection apparatus according to the third embodiment, it is possible to improve inspection efficiency and obtain high inspection reliability.

  Since the LEDs x4 and LEDx5 adjacent to the inspected LEDs x1 and x3 can be turned on simultaneously, for example, the electrical characteristics of the LEDs x4 and LEDx5 can be measured while measuring the optical characteristics of the LEDs x1 and x3.

  When measuring the electrical characteristics of the LEDs x4 and LEDx5 while measuring the optical characteristics of the LEDs x1 and x3, first, the control device 7 shown in FIG. 1 has the contact block 5 corresponding to the LEDs x1 and x3 to be inspected of the optical characteristics. The contact 52 is closed, and a power of a predetermined voltage is supplied from the electrical measuring device 6. In addition, the control device 7 closes the contact 52 of the contact block 5 corresponding to the LEDs x4 and x5 to be inspected for electrical characteristics, and supplies power from the electrical measurement device 6 with a predetermined voltage.

  By supplying this power, the LEDs x1 and x3 to be inspected are turned on, and the LEDs x4 and x5 are also turned on.

  The light from the LEDs x1 and x3 incident on the optical fibers 4 of the respective daylighting units 2c and 2d is measured for luminance, spectrum, and the like by the spectroscope 3, and is output from the spectroscope 3 as optical measurement data. The control device 7 determines whether or not the standard is satisfied based on the optical measurement data, and ranks the LEDs x1 and x3 according to the luminance and chromaticity.

  Then, the electrical measuring device 6 measures the current from the contact 52 flowing when the LEDs x4 and x5 are turned on, and electrical measurement data indicating the forward current and the like is output to the control device 7. And the control apparatus 7 inputs electrical measurement data, and determines whether LEDx4 and x5 satisfy the specification of an electrical property.

  In this way, while measuring the optical characteristics of the LED to be inspected, the electrical characteristics can be measured simultaneously even if the LED adjacent to the LED is lit.

  In the third embodiment, the description has been made based on the daylighting units 2c and 2d whose inspection targets are the LEDx1 and the LEDx3 sandwiching the central LEDx4 out of the three, but when the outer diameter of the daylighting unit is thinner, Adjacent LEDs x1 and x4 can be used as light sources to be inspected.

  In such a case, if there are two spectrometers 3 shown in FIG. 1, the optical characteristics of the LEDs x1 and x4 may be measured simultaneously. However, for example, as shown in FIG. 7, there are two daylighting units, but if there is only one spectroscope 3, while measuring the optical characteristics of one LED, measure the electrical characteristics of the other LED, Next, while measuring the electrical characteristics of one LED, the optical characteristics of the other LED may be measured. By doing so, optical characteristics and electrical characteristics can be measured alternately without moving the daylighting unit.

  As described above, in the inspection apparatus according to the embodiment of the present invention, the LED is described as an example of the light source to be inspected. However, the light source is not limited to the LED, and any light source that emits light and requires measurement of optical characteristics as an inspection can be applied.

  In the present embodiment, ten shielding members 221 are provided in the case portion 21, but the number of shielding members 221 is the amount of light from the LEDs 10 other than the inspection target with respect to the optical axis H of the inspection target LEDs 10. It can be determined according to the skew angle.

  The present invention can accurately inspect the optical characteristics of light from the light source to be inspected, thereby improving the inspection efficiency and obtaining high inspection reliability, so that the optical characteristics of the light source can be inspected. It is suitable for the inspection apparatus for doing.

DESCRIPTION OF SYMBOLS 1 Inspection apparatus 2,2a, 2b, 2c, 2d Daylighting part 3 Spectroscope 4 Optical fiber 5 Contact block 6 Electrical measuring apparatus 7 Control apparatus 10 LED
DESCRIPTION OF SYMBOLS 10a Package 10b Light emitting element 10c Resin sealing part 10x Anode terminal 10y Cathode terminal 21 Case part 21x Tip part 21y Base end part 22 Light adjustment part 51 Stage 52 Contact 211 Opening part 212 Mounting member 221 Shielding member H Optical axis F Lead frame frame F1 branch lead frame G1, G2 Light directly above K1, K2 Optical path x1, x2, x3, x4, x5 LED

Claims (5)

An inspection apparatus for taking in light from a light source to be inspected (hereinafter referred to as an inspection light source) by a daylighting unit and performing an optical inspection of the inspection light source,
The daylighting unit is
An opening for taking light toward the inspection light source is provided, and a cup-shaped case part having a light receiving part for outputting the taken light to the optical measuring device at the base end part;
Two or more shielding members formed in an annular shape that shield a range other than the range including the optical axis from the inspection light source to the light receiving unit through the opening are disposed along the depth direction in the case unit, and the light An inspection apparatus comprising: a light adjusting unit configured to limit light incident on the opening while being inclined with respect to an axis. The inspection apparatus according to claim 1, wherein the shielding member is formed such that an opening on a back side is larger than an opening side of the case part. The inspection apparatus according to claim 1, further comprising an electrical measurement device that supplies power to the inspection light source to which the daylighting unit is directed and measures electrical characteristics. The inspection apparatus according to claim 1, further comprising an electrical measuring device that supplies electric power to a light source adjacent to the inspection light source to which the daylighting unit is directed and measures electrical characteristics. A plurality of daylighting units are commonly connected to the optical measuring device,
The inspection apparatus according to any one of claims 1 to 4, further comprising means for selectively emitting light from an inspection light source to which the plurality of arranged daylighting units are directed.

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