JP2013006270A - Machining method of plate-like body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a machining method of a plate-like body capable of shortening working hours and improving surface precision in a ground surface and a polished surface.SOLUTION: The method of machining the plate-like body includes: a painting/curing step in which a three-dimensional shape of a rear surface of a plate-like body 1 having unevenness is measured by a shape measuring device based on data, an ultraviolet curing type ink 3 is painted on a protruding part of the rear surface of the plate-like body 1 and a recessed part to have a predetermined thickness so that an upper surface of the applied ink has a constant height across the entire rear surface of the plate-like body 1 painted in a square shape or circular shape when viewed from above to form a plurality of pieces with a predetermined interval S while the ink 3 is cured by an ultraviolet ray radiating device; a step in which, after the prior step, when the plate-like body 1 is secured to a machine platen with its rear surface facing down, only a cured ink part 3 contacts with the upper surface of the machine platen, the plate-like body 1 is secured so as to not even partially contacts with the machine platen, and the surface of the plate-like body 1 is polished or ground; and a step in which, after the prior step, the plate-like body 1 is inverted upside down and secured on the machine platen, and the rear surface of the plate-like body 1 is polished or ground.

Description

  The present invention relates to a method for processing a plate-like body.

  Conventionally, as a processing method of a plate-like body, in Patent Document 1 (Japanese Patent Application Laid-Open No. 2003-260644), the three-dimensional shape of the back side of the plate-like body is measured by a shape measuring device, and data of the three-dimensional shape of the back side of the plate-like body is obtained. Next, based on the obtained three-dimensional shape data of the back surface of the plate-like body, a solid substance is selectively attached to the back surface of the plate-like body so that the back surface of the plate-like body is apparently flat. A method has been proposed in which the back surface of the plate-like body is later held on a surface plate and the surface of the plate-like body is flattened by grinding or polishing means.

This method will be described with reference to FIG.
FIG. 9A is a cross-sectional view of the plate-like body 100 before processing, and the upper surface B serving as the back surface during processing has a concave shape. In this state, the three-dimensional shape of the back surface (upper surface) B of the plate-like body 100 is measured by the shape measuring device, and the data of the three-dimensional shape of the back surface (upper surface) B of the plate-like body 100 is obtained.

Then, based on the measured three-dimensional shape data of the back surface B of the plate-like body 100, the ink 102 is applied from the nozzle 101, and the back surface B of the plate-like body 100 is apparently flat (FIG. 9B). c)).
After application of the ink, the plate-like body 100 is fixed to the surface plate 103 with the front surface T facing up and the back surface B facing down (FIG. 9D). At this time, since the upper surface of the surface plate 103 and the back surface (lower surface) B of the plate-like body 100 are both flat, the plate-like body 100 is not deformed.
Furthermore, one surface (surface T) of the plate-like body 100 in the undeformed state is processed into a flat state. In FIG. 9E, reference numeral 100a indicates a portion of the plate-like body 100 that is removed by processing.

After the grinding, the processed plate-like body 100 is turned upside down and fixed to the surface plate 103, and the opposite surface (back surface B) of the plate-like body 100 is ground (FIG. 9 (f)). In FIG. 9F, reference numeral 100b indicates a portion of the plate-like body 100 that is removed by processing.
Then, by removing the plate-like body 100 whose both surfaces are processed from the surface plate 103, the plate-like body 100 having good flatness and parallelism can be obtained (FIG. 9 (g)).

JP-A-7-109133

By the way, as a means for applying ink in the plate-like body processing method disclosed in Patent Document 1, it is considered preferable to use an ink jet printer.
That is, by applying ink to the back side of the plate-like body using an ink jet printer, solid matter of the ink remains on the back side of the plate-like body after the ink is dried, and a predetermined thickness is formed on the back side of the plate-like body. Solid matter (solidified ink part) can be adhered.

However, when ink is applied to the back side of the plate-like body using an ink jet printer, the ink that dries a large amount of the solvent is dried by the evaporation of the solvent. There has been a technical problem that the volume is reduced and the thickness of the ink deposited on the plate-like body is reduced.
That is, in order to deposit a predetermined thickness of ink on the plate-like body, it is necessary to repeatedly apply the ink many times, which requires a considerable work time, and when the solvent is an organic solvent, A considerable amount of time is required until drying, and as a result, there are technical problems such that the thickness of the ink tends to vary and it is difficult to achieve flatness of the plate-like body.

  Moreover, in the processing method of the plate-shaped body shown in Patent Document 1, the three-dimensional shape of the back surface of the plate-shaped body is measured by a shape measuring device, and the three-dimensional shape data of the back surface of the plate-shaped body is obtained. Yes. At that time, it is not possible to measure fine waviness or in-plane variation of surface roughness, and this greatly affects the flatness after surface grinding and polishing, and it is difficult to obtain good flatness was there.

  Furthermore, in the processing method of the plate-shaped body disclosed in Patent Document 1, ink is applied to the concave portion on the back surface of the plate-shaped body to form a flat surface, and this flat surface is placed on a surface plate, The body surface (upper surface) is ground. At that time, the grinding liquid may stay between the platen and the solidified ink part, and may be ground in a state where a part of the plate body is lifted from the platen. There was a technical problem of getting worse.

Moreover, in the processing method of the plate-shaped body shown in Patent Document 1, a flat surface is formed by selectively applying ink to the recesses on the back surface of the plate-shaped body. Ink is not applied to the outer peripheral edge Ba (see FIG. 9C), which is the highest part of the outer periphery.
For this reason, when the plate is fixed to a surface plate with the back side down and ground, there are two materials (solidified ink and plate) on the back side (bottom surface) of the plate. It comes into contact with the upper surface of the board 7. Therefore, during grinding or polishing, the friction coefficient of the two is different, so that the contact state between the two platens is different, and the displacement of the plate-like body when processing pressure is applied is different, so that the grinding liquid enters. Since the states are different, there is a technical problem that the surface accuracy of the ground surface and the polished surface is deteriorated.
In addition, there has been a technical problem that a portion of the plate-like body that is in direct contact with the surface plate is highly likely to be scratched due to contact with the surface plate.

  The present invention has been made to solve the above technical problem, and provides a processing method of a plate-like body that can shorten the working time and can improve the surface accuracy of a grinding surface and a polishing surface. It is the purpose.

  The processing method of the plate-shaped body according to the present invention made to solve the above-mentioned problem is to measure the three-dimensional shape of the back surface of the plate-shaped body with unevenness with a shape measuring device, and to form the three-dimensional shape of the back surface of the plate-shaped body. And after the step, based on the data of the three-dimensional shape, the upper surface of the applied ultraviolet curable ink is applied not only to the concave portion on the back surface of the plate-like body but also to the convex portion. Inkjet ink that has a predetermined thickness and is applied in a rectangular shape in a plan view or a circular shape in a plan view so that the entire back surface has a constant height, and is formed at a predetermined interval. A coating and solidifying step of solidifying the ultraviolet curable ink by an ultraviolet irradiation device while applying the ultraviolet curable ink by a printer; Solidified on top of The plate part is in contact only, the plate-like body is fixed so as not to partially contact the surface plate, the step of polishing or grinding the surface of the plate-like body, and after the step, the plate-like body is turned upside down, It includes a step of fixing to a surface plate and polishing or grinding the back surface of the plate-like body.

  As described above, in the processing method of the plate-like body according to the present invention, the ultraviolet curable ink is applied by an ink jet printer, and the ultraviolet curable ink is solidified by an ultraviolet irradiation device (ultraviolet light). In addition, the ink volume can be reduced, the number of ink overcoats can be reduced, the working time can be shortened, and a solid material (solidified to a predetermined thickness on the back of the plate-like body). Ink portion) can be attached with high dimensional accuracy.

In particular, in the step of applying ultraviolet curable ink by an inkjet printer, a plurality of ultraviolet curable inks having a predetermined thickness and applied in a rectangular shape in plan view or a circular shape in plan view are provided at predetermined intervals. Since they are formed individually, the grinding liquid flows between the solid band-like ink portions in plan view, and the retention of the grinding liquid between the platen and the plate-like body is suppressed. As a result, since the entire plate-like body is placed on the surface plate, good surface accuracy can be obtained.
Furthermore, since only the solidified ultraviolet curable ink is in contact with the surface plate, and the plate-like body itself is not in partial contact with the surface plate, good surface accuracy can be obtained. Further, since the plate-like body does not directly contact the surface plate, it is possible to suppress scratches and the like due to contact with the surface plate.

  Further, the processing method of the plate-like body according to the present invention made to solve the above-mentioned problem is to measure the three-dimensional shape of the back surface of the uneven plate-like body with a shape measuring device, and to obtain the tertiary of the plate-like body back surface. A step of obtaining original shape data, and after the step, based on the data of the three-dimensional shape, the upper surface of the ultraviolet curable ink applied and applied not only to the concave portion of the back surface of the plate-like body but also to the convex portion Is a belt-shaped ultraviolet curable ink having a predetermined thickness and applied from one end to the other end of the plate-like body so as to have a constant height over the entire back surface of the plate-like body, A coating and solidifying step of solidifying the ultraviolet curable ink by an ultraviolet irradiation device while applying an ultraviolet curable ink by an ink jet printer so that a plurality of lines are formed in parallel at a predetermined interval, and a plate-like body after the step On the surface with the back side down When the surface is fixed, only the solidified ink portion is in contact with the upper surface of the surface plate, and the plate body is fixed so that it does not partially contact the surface plate, and the surface of the plate body is polished or ground; and Thereafter, the plate-like body is turned upside down and fixed to a surface plate, and the back surface of the plate-like body is polished or ground.

  As described above, in the processing method of the plate-like body according to the present invention, the ultraviolet curable ink is applied by an ink jet printer, and the ultraviolet curable ink is solidified by an ultraviolet irradiation device (ultraviolet light). In addition, the ink volume can be reduced, the number of ink overcoats can be reduced, the working time can be shortened, and a solid material (solidified to a predetermined thickness on the back of the plate-like body). Ink portion) can be attached with high dimensional accuracy.

In particular, in the step of applying the ultraviolet curable ink by an inkjet printer, the band-shaped ultraviolet curable ink having a predetermined thickness and applied from one end part to the other end part of the plate-like body, Since a plurality of lines are formed in parallel at a predetermined interval, the grinding fluid flows between the solid band-like ink portions in plan view, and the stay between the platen and the plate-like body is suppressed.
As a result, the floating of the plate-like body is suppressed, and the entire surface of the plate-like body is placed on the surface plate, so that good surface accuracy can be obtained.
Further, since only the solidified ultraviolet curable ink is in contact with the surface plate and the plate-like body itself is not in partial contact with the surface plate, good surface accuracy can be obtained. Further, since the plate-like body does not directly contact the surface plate, it is possible to suppress scratches and the like due to contact with the surface plate.

Here, in the step of polishing or grinding the surface of the plate-like body, it is desirable that the surface of the plate-like body is ground or polished by rotating the grindstone and moving it in the extending direction of the solidified ink portion in the band shape.
In this way, since the grindstone moves in the extending direction of the band-like solidified ink portion, the surface of the plate-like body can be ground or ground while suppressing the bending (deformation) of the plate-like body, and a good surface Accuracy can be obtained.

  According to the present invention, it is possible to obtain a processing method of a plate-like body that can shorten the working time and can improve the surface accuracy of a ground surface or a polished surface.

FIG. 1 is a diagram showing the shape of a plate-like body in one embodiment according to the present invention. FIG. 2 is a diagram showing a coating process of ultraviolet curable ink in one embodiment according to the present invention. FIGS. 3A and 3B are diagrams illustrating a back surface grinding process according to an embodiment of the present invention, in which FIG. 3A is a side view and FIG. 3B is a plan view. 4A and 4B are diagrams illustrating a surface grinding process according to an embodiment of the present invention, in which FIG. 4A is a side view and FIG. 4B is a plan view. FIG. 5 is a diagram showing the shape of the plate-like body after grinding in one embodiment according to the present invention. FIG. 6 is a side view showing a modification of the application process of the ultraviolet curable ink. FIG. 7 is a plan view of a modification of the application process of the ultraviolet curable ink. FIG. 8 is a side view showing a pre-process for shape measurement. FIG. 9 is a diagram showing a conventional plate-like body processing method.

  An embodiment according to the present invention will be described with reference to FIGS. The plate-like body processing apparatus according to the present invention includes a shape measuring device that measures the three-dimensional shape of the back surface of the plate-like body, an ink jet printer that applies ink to the back surface of the plate-like body, and a plate-like shape. It comprises a surface plate for holding the body and a processing means for grinding or polishing the surface of the plate-like body.

  As the plate shape measuring apparatus, UV curable ink is attached so that the data of the three-dimensional shape of the back surface of the plate-like body is obtained, and the back surface of the plate-like body is flattened according to the three-dimensional shape. For example, a shape measuring device using a laser oblique incidence interference fringe analysis or a shape measuring device that scans and measures a displacement sensor head can be used.

Moreover, conventionally known grinding and polishing apparatuses can be used as processing means for grinding or polishing. For example, infeed grinding with a cup grindstone, traverse grinding with a straight grindstone, grinding using a diamond grindstone or a disk tool (pellet surface plate) in which pellets are embedded, buffing, and the like can be applied.
In addition, as a method for holding the back surface of the plate-like body on the surface plate, a conventionally known holding means can be used. For example, a vacuum chucking method using a porous chuck, or water is applied on a flat surface plate. For example, a method of holding by the above can be suitably used.

  Further, as the ink jet printer, a conventionally known ink jet printer can be used. In particular, the head unit that ejects ink may be configured to be movable (scanning) and may eject ink to an arbitrary position on the back surface of the plate-like body. Further, it is preferable that an ultraviolet irradiation device for solidifying the ultraviolet curable ink is attached to the head portion so that the ink discharged from the head portion is solidified.

  In particular, an ink jet printer that can vary the discharge amount per unit time by a piezoelectric element is preferable. When such a configuration is provided, the number of times of overcoating can be reduced to shorten the work time, and the back surface of the plate-like body can be apparently flattened with higher accuracy.

  Further, ultraviolet curable ink is used as the ink applied to the plate-like body. This ultraviolet curable ink is usually composed of monomers, oligomers, ultraviolet absorbers (polymerization initiators) and various additives (stabilizers, fillers, pigments, etc.) that are cured by irradiation with ultraviolet rays having a wavelength of about 250 nm to 365 nm. is there.

  As described above, since the ultraviolet curable ink does not contain a large amount of solvent as in the case of water-based and oil-based inks, the thickness of the ink deposited on the plate (solidified ink) when the ink is solidified. The adverse effect of thinning can be suppressed. As a result, the number of times of overcoating can be reduced, and the working time can be shortened. Moreover, the ultraviolet curable ink is preferable because the volume deformation is small even after the ink is solidified. Further, the ultraviolet curable ink can be quickly solidified by irradiating with ultraviolet rays, and the working time can be shortened.

  Moreover, it is preferable that the shape of the ink droplet does not change much when applied to the back surface of the plate-like body. In other words, in the case of flattening (leveling) by gravity such as water, even if droplets are applied to a predetermined part thicker than other parts in order to make the back of the plate-like body apparently flat, This is because the effect is diminished.

Next, the processing method of the plate-shaped object concerning embodiment of this invention is demonstrated.
First, as shown in FIG. 1, the three-dimensional shape of the back surface B of the plate-like body 1 is measured by a shape measuring device in advance to obtain the three-dimensional shape data of the back surface of the plate-like body.
Next, based on the three-dimensional shape data of the back surface B of the plate-like body 1 obtained by the shape measuring device as shown in FIG. The ultraviolet curable ink is applied to the back surface B of the body 1 by an ink jet printer.

At this time, the head unit 2 that ejects ink of the ink jet printer moves from the upper end to the lower end of the plate-like body 1 in FIG. 2A while ejecting ultraviolet curable ink, and then moves rightward at the lower end. And move again from the lower end to the upper end.
Then, the head unit 2 moves from the right end side to the left end side of the plate-like body 1 by repeating this while discharging the ultraviolet curable ink.

The ultraviolet curable ink portions 3a, 3b, 3c,... 3n discharged from the head portion 2 have a belt-like shape in plan view having a predetermined thickness and width, as shown in FIGS. A plurality of coatings are formed with a predetermined interval S.
It is preferable that the distance S and the width of the belt-like shape are constant, and the ratio of the total area S1 of the gap portion and the total area S2 of the belt-like shape portion is S1: S2 = 50: More preferably, it is 50-30: 70.
At this time, the ultraviolet curable ink portions 3a, 3b, 3c,... 3n are solidified by an ultraviolet irradiation device (not shown) provided in the head portion 2. That is, the head portion 2 is configured to move while applying and solidifying the band-like ultraviolet curable ink portions 3 a, 3 b, 3 c... 3 n to the back surface 1 of the plate-like body 1.

  This ultraviolet curable ink is applied not only to the concave portion of the back surface B of the plate-like body 1 but also to the convex portion, and the upper surface of the applied ultraviolet curable ink has a constant height over the entire back surface of the plate-like body 1. It is applied as follows. That is, as will be described later, when the plate-like body 1 is fixed to the surface plate 3 with the front surface T facing up and the back surface B facing down, solidified belt-like ink portions 3a, 3b, 3c. Ink is applied so that only 3n is in contact and the plate 1 is not in contact with the surface plate 3 partially.

Here, when the ink portion having a predetermined thickness cannot be formed by a single scan of the head portion 2, that is, the entire surface of the plate-like body is coated with 3a1, 3b1, 3c1,. As for the area where the ink is curable, the head part 2 discharges the ultraviolet curable ink and repeats scanning again, overcoats the ink parts 3a1, 3b1, 3c1,. With respect to the above, re-coating is performed again, and finally, the height of the upper surface of the ink after application is made constant over the entire back surface of the plate-like body.
In addition, as shown in FIG. 6, the case where the strip | belt-shaped ultraviolet curable ink part 3n is formed by the overcoat 3n1-3n5 is shown. Further, whether or not the concave portion is present can be determined from the data of the three-dimensional shape and the thickness data of the ink portion applied by one scan.

After the ink application, as shown in FIG. 3, the plate 1 is fixed to the surface plate 4 with the front surface T facing up and the back surface B facing down. Thus, the solidified ultraviolet curable ink portions 3 a to 3 n exist on the back surface B (lower surface) of the plate-like body, and are in contact with the upper surface of the surface plate 4.
At this time, since both the upper surface of the surface plate 4 and the back surface B (lower surface) of the plate-like body 1 are flat, the plate-like body 1 is not deformed.

  Further, as shown in FIG. 3, while rotating the grindstone 5, it is moved in the extending direction of the band-shaped ink portions 3 a to 3 n in a plan view, and one surface (surface T) of the plate-like body 1 in the undeformed state. Is processed into a flat state. Thus, since the grindstone 5 moves in the extending direction of the band-shaped solidified ink portions 3a to 3n, the bending (deformation) of the plate-like body 1 is suppressed and the surface of the plate-like body 1 is ground or ground. And good surface accuracy can be obtained.

  In FIG. 3, reference numeral 6 denotes a grinding fluid supply nozzle for supplying a grinding fluid. The grinding fluid supplied from the grinding fluid supply nozzle 6 is supplied to the surface to be ground (surface T) of the plate-like body 1 and then flows onto the surface plate 4. And the grinding fluid which flows on the surface plate 4 flows through the clearance gap S between the strip-shaped ink parts 3a-3n, the stay between the surface plate 4 and the ink parts 3a-3n is suppressed, and the plate-shaped body 1 Therefore, the surface accuracy of the ground surface (surface T) can be improved.

Further, solidified ink portions 3 a to 3 n exist on the back surface B (lower surface) of the plate-like body 1, and the solidified ink portions are in contact with the upper surface of the surface plate 7. Therefore, unlike the conventional case, there is no portion having a different friction coefficient at the time of grinding, so that it can be in constant contact with the surface plate at the time of grinding or polishing, and the plate-like body when processing pressure is applied Since the displacement amount and the infiltration state of the grinding fluid can be made constant, uniform and good surface accuracy can be obtained.
In addition, in Fig.3 (a), the code | symbol 1a shows the part removed by processing among the plate-shaped objects 1. FIG.

After the grinding, as shown in FIG. 4, the processed plate 1 is turned upside down and fixed to the surface plate 4, and the opposite surface (back surface B) of the plate 1 is ground. Also in this grinding, while the grindstone 5 is rotated, it is moved in the extending direction of the band-shaped ink portions 3a to 3n, and the one surface (back surface B) of the undeformed plate-like body 1 is processed into a flat state. . In addition, in FIG. 4, the code | symbol 1b shows the part removed by processing among the plate-shaped objects 1. FIG.
Then, as shown in FIG. 5, by removing the plate-like body 1 processed on both sides from the surface plate 4, it is possible to obtain the plate-like body 1 with good flatness and parallelism.

In addition, in the said embodiment, although the case where the plate-shaped object was ground was demonstrated, you may use this invention for grinding | polishing. Further, although the strip-shaped ink portions 3a to 3n are formed, as shown in FIG. 7, a plurality of ink portions 3a to 3n having a predetermined thickness and having a rectangular shape in plan view may be formed. In addition, although not shown, a plurality of circular ink portions may be formed in a plan view. In addition, using an inkjet printer, the ultraviolet curable ink is applied by irradiating ultraviolet rays while applying the ultraviolet curable ink. Although the case of solidifying has been described, ultraviolet light may be irradiated from an ultraviolet irradiation device after a predetermined time has elapsed after application. For example, the ink may be applied to the entire surface of the plate 1 and then irradiated with ultraviolet rays.

  In addition, as a pre-process for measuring the three-dimensional shape of the back surface of the plate-like body with a shape measuring device and obtaining the three-dimensional shape data of the back surface of the plate-like body, UV curable ink is applied to the entire back surface of the plate-like body. After the application, the ultraviolet curable ink may be solidified by an ultraviolet irradiation device. That is, as shown in FIG. 8, the ultraviolet curable ink 3A is applied to the entire back surface B of the plate-like body 1 using an ink jet printer, and then the ink is solidified by an ultraviolet irradiation device, whereby the surface of the plate-like body ( The ink surface 3B) becomes smooth. Therefore, fine waviness and in-plane variations in surface roughness can be minimized by applying the ink.

  And the three-dimensional data which does not have those influences can be obtained by measuring the said surface. After this, UV curable ink is applied based on the three-dimensional data, further solidified, and subjected to surface grinding and polishing, so that a flat surface that is not affected by in-plane variations in fine waviness and surface roughness is obtained. Can be obtained.

DESCRIPTION OF SYMBOLS 1 Plate-like body 2 Head part 3a-3n (ultraviolet curable type) Ink part 3n1-3n5 The ultraviolet curable ink part 4 coated repeatedly 4 Surface plate 5 Grinding stone 6 Grinding liquid supply nozzle B Plate-like body back surface T Plate-like body surface S Gap

Claims (2)

Measuring the three-dimensional shape of the back surface of the uneven plate-like body with a shape measuring device and obtaining the three-dimensional shape data of the back surface of the plate-like body;
After the step, based on the data of the three-dimensional shape, it is applied not only to the concave portion on the back surface of the plate-like body but also to the convex portion, and the upper surface of the applied ultraviolet curable ink is constant over the entire back surface of the plate-like body. UV curable ink is applied by an inkjet printer so as to have a predetermined thickness and is applied in a rectangular shape in a plan view or a circular shape in a plan view and formed in a plurality at predetermined intervals. An application solidification step of solidifying the ultraviolet curable ink with an ultraviolet irradiation device while applying,
After the above process, when the plate is fixed to the surface plate with the back side down, only the solidified ink part is in contact with the upper surface of the surface plate, and the plate is fixed so that it does not partially contact the surface plate. And polishing or grinding the plate-like body surface;
After the said process, a plate-shaped object is turned upside down, it fixes to a surface plate, The process of grinding | polishing or grinding the back surface of a plate-shaped object is included, The processing method of a plate-shaped object characterized by the above-mentioned. Measuring the three-dimensional shape of the back surface of the uneven plate-like body with a shape measuring device and obtaining the three-dimensional shape data of the back surface of the plate-like body;
After the step, based on the data of the three-dimensional shape, it is applied not only to the concave portion on the back surface of the plate-like body but also to the convex portion, and the upper surface of the applied ultraviolet curable ink is constant over the entire back surface of the plate-like body. A plurality of strips of UV curable ink having a predetermined thickness and applied from one end to the other end of the plate-like body in a plan view in parallel with a predetermined interval. An application solidifying step of solidifying the ultraviolet curable ink by an ultraviolet irradiation device while applying the ultraviolet curable ink by an inkjet printer as formed;
After the above process, when the plate is fixed to the surface plate with the back side down, only the solidified ink part is in contact with the upper surface of the surface plate, and the plate is fixed so that it does not partially contact the surface plate. And polishing or grinding the plate-like body surface;
After the said process, a plate-shaped object is turned upside down, it fixes to a surface plate, The process of grinding | polishing or grinding the back surface of a plate-shaped object is included, The processing method of a plate-shaped object characterized by the above-mentioned.

Images