JP2013005611A - Alignment stage device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an alignment stage device having a built-in direct drive motor which enables such features as high speed, high responsiveness, and high precision.SOLUTION: A rotary wheel 2 is formed into a cylinder shape which is rotatably engaged with and supported in a hollow hole 10 of a fixed wheel 1 via a bearing 3, and is set to be higher than the fixed wheel 1. A plurality of armature coils 5 are arranged on an inner circumferential surface of the hole 10 of the fixed wheel 1 such that they extend perpendicularly to an end face of the fixed wheel in the circumferential direction. A plurality of field magnets 4 are arranged on a mounting face 38 on an outer circumferential surface 48 of the rotary wheel 2 such that they extend perpendicularly to an end face of the rotary wheel 2 so as to face the armature coils 5. A coil wiring board 11 on which lead wires 18 from the armature coils 5 are wired is arranged on an upper end face 53, which is an end face located on a side opposite to the fixed side of the fixed wheel 1, so as to be at a right angle to the armature coils 5.

Description

  The present invention relates to a cylindrical type alignment stage apparatus incorporating a motor used in various apparatuses such as a semiconductor manufacturing apparatus, an assembling apparatus, a measuring apparatus, and a test apparatus.

  In recent years, alignment stage devices are becoming increasingly versatile in various devices such as semiconductor manufacturing equipment, assembly equipment, test equipment, and measurement equipment, and are small and have high speed, high acceleration / deceleration, high response, high precision, etc. Performance is now required. As a conventional alignment stage device, for example, a device having a built-in permanent magnet motor in which one of an armature coil and a field magnet is disposed on the primary side and the other is disposed on the secondary side is known. .

  In addition, the applicant has developed an alignment stage device that is configured as small as possible in the radial direction, increases the thrust of the turntable, and exhibits performance such as high speed, high response, and high accuracy. did. In the alignment stage device, a field magnet of a motor is arranged on a turntable, and an armature coil of the motor is arranged along a circumferential direction on a plane extending in a radial direction of a press plate fixed to the bed. The outer ring of the bearing that rotatably supports the turntable on the bed is fixed by the bed and the presser plate, and the inner ring is fixed by the turntable and the presser plate. The alignment stage device incorporates a permanent magnet motor composed of a primary armature coil and a secondary field magnet facing each other in the vertical direction, but the armature coil on the primary side of the motor is It consists of a three-phase coreless coil that is flat and wound in a ring, and the field magnets on the secondary side of the motor are each formed in a plate shape, facing the armature coil on the bottom surface of the turntable. Magnetic poles (N poles and S poles) are alternately arranged on a plane and arranged in the vertical direction along the circumferential direction (see, for example, Patent Document 1).

JP 2005-341648 A

  Although the conventional alignment stage device has a configuration in which the outer diameter is kept small, the armature coil is arranged in the maximum space to achieve an increase in thrust. However, in the above alignment stage apparatus, it is difficult to increase the hollow diameter of the hole formed at the center. The above-mentioned alignment stage device is still a large size, even if it is compact, and is constructed so as to be manufactured at a low cost. A large number of magnets constituting the magnet are formed in a rectangular plate shape and are disposed to face each other in the horizontal direction, and are configured to be used as components of a linear motor in another linear motion guide unit. That is, the above alignment stage device requires a large number of armature coils constituting a armature assembly and a large number of magnets constituting a field magnet in order to obtain a thrust force or rotational torque of the turntable. A coil and a magnet are arranged in a circular shape so as to face each other, and the outer diameter is large. Therefore, it has been desired to construct the alignment stage device in a more compact structure and further increase the thrust.

  Further, as described above, the permanent magnet motor in which the armature coil and the field magnet are opposed to each other in the vertical direction on the horizontal plane is used for positioning the magnetic head in the magnetic disk device. It is unsuitable for application to an alignment stage device that mounts a workpiece or the like on a table and angularly positions the workpiece.

  SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems, in which a rotating wheel is rotatably disposed in a hollow hole portion of a fixed ring, and an armature coil coreless is formed on an inner peripheral surface of the hole portion of the fixed ring. A coil is disposed, and a magnet of a field magnet is disposed on the outer peripheral surface of the rotating wheel so as to face the armature coil. In other words, the armature coil and the field magnet are perpendicular to the end surface of the fixed ring. , Opposed in the height direction, the radial thickness of the fixed ring and the rotating ring is made thin, the hollow hole of the rotating ring is made as large as possible to make it lightweight, and the moment of inertia due to the rotation of the rotating ring is reduced. Alignment stage device with a built-in direct drive motor that is small in size and has a high response following high speed and high acceleration / deceleration, and that can achieve positioning of equipment such as workpieces attached to rotating wheels with high accuracy. Is to provide .

The present invention has a fixed wheel on the fixed side, a rotating wheel supported rotatably with respect to the fixed wheel, and a motor that drives the rotating wheel to rotate relative to the fixed wheel. An annularly wound three-phase coreless coil constituting the armature coil on the side is disposed on the stationary ring, and a magnet constituting the field magnet on the secondary side of the motor is the armature coil In an alignment stage device comprising magnetic poles alternately arranged opposite to each other, respectively, on the rotating wheel,
The rotating wheel is formed in a cylindrical shape having a hollow hole that is rotatably fitted and supported via a bearing disposed at a fixed side end of the hollow hole portion of the fixed ring. Set high,
The armature coils are arranged on the inner peripheral surface of the hollow hole portion of the fixed ring so as to extend perpendicularly to the end surface of the fixed ring along the circumferential direction, and the magnet is disposed on the outer peripheral surface of the rotating wheel. Respectively, extending perpendicularly to the end face of the rotating wheel, facing the armature coil along the circumferential direction,
The coil wiring board for wiring the lead wire from the armature coil is disposed perpendicularly to the armature coil and extending in the circumferential direction on the end surface on the side opposite to the fixed ring. It is related with the alignment stage apparatus.

  In this alignment stage device, an outer cylindrical convex surface of the armature coil is formed in a shape corresponding to the inner peripheral surface of the hollow hole portion of the fixed ring, and the inner end of the non-fixed side end portion of the fixed ring is formed. A rotation-preventing protrusion is provided that is fitted and positioned in a plurality of recessed grooves that are spaced apart from the peripheral surface.

  Further, the armature coil is formed in a cylindrical concave surface so that the coreless coil is exposed to the magnet of the field magnet and faces the magnet, and an area other than the exposed surface of the coreless coil located on the cylindrical concave surface side is insulated. Molded and covered with highly functional resin. Further, one lead wire of the armature coil is disposed on the rotation preventing projection of the armature coil, and the other lead wire extends from the upper end of the resin of the armature coil. is there. Further, the anti-rotation projection of the armature coil has a semi-circular elongated bar shape with a cross-sectional shape having a length comparable to the arm width of the armature coil. It is.

  Further, the alignment stage device is fitted with a press plate for fixing the outer ring of the bearing to the fixed ring so as to be fitted into an inlay portion on the mounting end surface side of the fixed ring, and the inner ring of the bearing is A presser plate for fixing to the rotating wheel is disposed on the end surface of the rotating wheel, and is positioned and fixed by fixing screws. Further, the bearing is a cross roller bearing in which rollers, which are rolling elements, are arranged in a crossing manner with their axis centers orthogonal to each other.

  The number of coreless coils of the armature coil attached to the fixed ring is 3 × n, and the number of magnets of the field magnet attached to the rotating wheel is 4 × n, and the number of the coreless coils is 12 , The magnet is composed of 16 pieces.

The present invention also includes a fixed wheel on the fixed side, a rotating wheel supported rotatably with respect to the fixed wheel, and a motor that drives the rotating wheel to rotate relative to the fixed wheel,
In the three-phase coreless coil wound in an annular shape constituting the armature coil on the primary side of the motor, the magnet constituting the field magnet on the secondary side of the motor is disposed on the fixed ring, respectively. In the alignment stage device, wherein the magnetic poles are alternately arranged opposite to the armature coils and arranged on the rotating wheels, respectively.
The rotating wheel is formed in a cylindrical shape having a hollow hole that is rotatably fitted and supported via a bearing disposed at a fixed side end portion of the hollow hole portion of the fixed wheel,
The armature coils are respectively disposed on the inner peripheral surface of the hollow hole portion of the fixed ring so as to extend perpendicularly to the end surface of the fixed ring along the circumferential direction.
The flat plate-shaped magnet constituting the field magnet has a polygonal flat mounting surface formed along the circumferential direction of the outer peripheral surface of the rotating wheel, with a gap between the adjacent magnets. The present invention relates to an alignment stage device characterized in that it is arranged so as to extend perpendicular to the end face of a rotating wheel.

  In addition, a ratio d / D of the inner diameter dimension d of the hollow hole of the rotating wheel to the outer diameter dimension D of the fixed ring is set in a range of at least 60% to 75%, and the fixing with respect to the outer diameter dimension D is performed. The dimension ratio h / D of the height dimension h from the mounting surface that is the end surface of the ring to the work mounting surface that is the end surface of the rotating wheel is set to a range of at least 40% to 55%. Further, the dimensional ratio d / D is preferably set in a range of 65% to 70%, and the dimensional ratio h / D is preferably set in a range of 45% to 50%.

  Since the alignment stage apparatus according to the present invention is configured as described above, it has a compact outer shape and contributes to space saving compared with a conventional hollow structure stage apparatus having the same hollow diameter. Can do. In other words, this alignment stage device has a rotating ring fitted in a hole of a fixed ring, and an electric machine is installed in a circumferential or annular space between the inner peripheral surface of the fixed ring and the outer peripheral surface of the rotating ring. Since the motor is configured by arranging the child coil and the field magnet in the height direction, a thin motor can be configured in the radial direction, and the entire apparatus can be configured compactly. The number of coreless coils of the child coils and the magnets of the field magnets can be easily adjusted, and the driving force of the motor can be configured as desired. In addition, by enlarging the diameter of the hollow hole of the rotating wheel, the rotating wheel is reduced in weight, the moment of inertia is reduced, and the energy required for the positioning operation of the alignment stage is suppressed. This alignment stage device can improve the effective utilization of the space of the hollow hole of the rotating wheel by enlarging the hollow hole diameter of the rotating wheel as much as possible with respect to the outer diameter dimension of the fixed wheel. In a conventional type of alignment stage device with a hollow structure, piping or the like is passed through the hollow hole. However, in the alignment stage device according to the present invention, in addition to passing the piping through the hollow hole of the rotating wheel, the wiring of the machine or device is passed. It can be used effectively for the measurement of transmitted light.

  In addition, the alignment stage apparatus of the present invention has a structure in which the dimension of the hollow hole is as close as possible to the outer diameter dimension, and can realize a thin-walled and low-section stage apparatus that can utilize the hollow space. By individually molding the armature coil with a highly insulating resin, it is possible to attach the armature coil as it is without interposing an insulating member different from the molding material between the steel fixed ring. Further, the armature coil can be attached to the inner peripheral surface of the fixed ring as it is by forming it in the same R shape as the inner peripheral surface of the fixed ring, that is, a cylindrical surface. In addition, since the gap between the coil and the magnet can be narrower than that of the flat coil, the thrust can be increased. In addition, since the armature coil has a non-rotating projection, positioning when the armature coil is fixed is easy, and the assemblability is improved. Furthermore, although the armature coil is molded with a resin material, the thickness of the resin covering the surface can be reduced. As a result, the distance between the armature coil and the fixed ring that is the coil yoke can be reduced, and at the same time, the distance between the field magnet and the coil yoke can be reduced, and the magnetic flux from the field magnet can be increased. Also, since the coil wiring board is disposed on the end surface of the fixed ring on the side opposite to the mounting surface, it is difficult for Joule heat generated in the armature coil disposed on the inner surface of the fixed ring to be provided on the board. It is possible to prevent malfunction and damage due to heat of other electric circuit components. In addition, since the bearing that rotatably supports the rotating ring on the fixed ring is fixed to the inlay portion of the fixed ring and the rotating ring with a presser plate, the total height of the stage device can be suppressed.

  In addition, as the field magnet, a flat plate magnet of another product can be used, and a motor can be configured with one type of magnet, which is advantageous in terms of management cost. The field magnets are arranged with a small gap between the magnets, that is, in the circumferential direction. As a result, even if the field magnet is displaced when the alignment stage device is operating, Adjacent field magnets are prevented from interfering with each other and falling off the rotating wheel, and dimensional errors and mounting position errors of the field magnets can be absorbed. Furthermore, since the rotating wheel is formed of a polygonal plane, it is easy to dispose the field magnet. A cross roller bearing is incorporated in the alignment stage device. The cross roller bearing is compact but can receive radial load, axial load, and moment at the same time, and the size of the stage device can be reduced.

It is a top view which shows the alignment stage apparatus by this invention. It is a side view which shows the alignment stage apparatus of FIG. It is a bottom view which shows the alignment stage apparatus of FIG. It is a top view which shows the state which removed the shielding board from the alignment stage apparatus of FIG. It is sectional drawing which shows the AA cross section in the alignment stage apparatus of FIG. It is sectional drawing which shows the BB cross section in the alignment stage apparatus of FIG. It is a top view which shows the fixed ring in the alignment stage apparatus of FIG. It is sectional drawing which shows CC cross section in the fixed ring of FIG. It is a bottom view which shows the fixed ring of FIG. It is a top view which shows the rotating wheel in the alignment stage apparatus of FIG. It is a side view which shows the rotating wheel of FIG. It is a bottom view which shows the rotating wheel of FIG. It is a front view which shows the armature coil integrated in the alignment stage apparatus of FIG. It is a side view which shows the armature coil of FIG. It is a top view which shows the armature coil of FIG. It is a perspective view which shows the armature coil of FIG.

  Embodiments of an alignment stage apparatus according to the present invention will be described below with reference to the drawings. This alignment stage apparatus is configured as a cylindrical alignment stage apparatus as a whole by changing the motor's configuration direction with respect to the alignment stage apparatus disclosed in Japanese Patent No. 45862626 of the applicant of the present application. The inner diameter d of the hollow hole of the rotating wheel 2 is enlarged as much as possible with respect to the outer diameter D of the fixed ring 1 to reduce the weight of the device itself, and is configured as a high-speed, high-response, high-precision device. It is. This alignment stage device includes a coreless coil that constitutes a thin fixed ring 1, a thin rotating wheel 2, and a thin armature coil 5 in order to increase the inner diameter dimension d of the hollow hole 7 of the rotating wheel 2 as much as possible. The primary armature coil 5 disposed on the stationary wheel 1 to which current is supplied through the motor line 52 and the secondary field magnet 4 disposed on the rotating wheel 2 are connected to the stationary wheel 1. In addition, a permanent-magnet motor that is installed in the height direction perpendicular to the end face of the rotating wheel 2 is built in, and the direct-drive type device has a larger hollow diameter of the rotating wheel 2 than the outer diameter D of the fixed wheel 1. It is configured. That is, this alignment stage device expands the inner diameter dimension d of the hollow hole 7 of the rotating wheel 2 as much as possible with respect to the outer diameter dimension D of the fixed ring 1 as compared with the conventional one, so that the space of the hollow hole 7 portion is increased. It is to provide a direct drive type alignment stage apparatus that can effectively utilize the above. Therefore, the inner diameter dimension d of the hollow hole 7 of the rotating wheel 2 is made as large as possible, while the configuration of the alignment stage apparatus is suppressed.

  This alignment stage device is used by being attached to various bases such as various devices and movable tables, for example, and can realize a motion including the θ direction. This alignment stage device has a permanent magnet type motor that drives the rotating wheel 2 relative to the fixed wheel 1, the rotating wheel 2, and the fixed wheel 1, and FIGS. Appearance is shown. FIG. 4 shows a state in which the various parts shown in FIG. 1, that is, the shielding plate 6, the sensor 14 before the origin, and the limit sensors 15 and 16 are removed. 5 and 6 are sectional views of the alignment stage apparatus. 7 to 9 show the fixed wheel 1, FIGS. 10 to 12 show the rotating wheel 2, and FIGS. 13 to 16 show the armature coil 5. . In this alignment stage device, in particular, a rotating wheel 2 is a cylinder in which a rotating wheel 2 is rotatably fitted and supported via a bearing 3 (FIG. 5) disposed at a fixed end of a hollow circular hole 10 of a fixed wheel 1. It is formed in a shape, and the rotating wheel 2 is set higher than the height of the fixed wheel 1. Furthermore, a plurality of armature coils 5 are arranged along the circumferential direction on the inner peripheral surface of the hole 10 of the fixed ring 1. Further, the magnet 4M of the field magnet 4 is disposed on the flat mounting surface 38 of the outer peripheral surface 48 of the rotating wheel 2 so as to face the armature coil 5 with a gap C therebetween. Specifically, the flat magnets 4M constituting the field magnet 4 are respectively arranged between adjacent magnets 4M on a polygonal flat mounting surface 38 formed along the circumferential direction of the outer peripheral surface 48 of the rotating wheel 2. The gap C is arranged so as to extend perpendicularly to the solid-side end face of the rotating wheel 2 while maintaining the gap C. Further, the outer peripheral surface 48 of the rotating wheel 2 is provided with an abutting portion 37 formed of a flange portion, and the magnet 4M has an outer peripheral surface of the rotating wheel 2 in a state where the upper surface of the magnet 4M abuts the lower surface of the abutting portion 37. The mounting surfaces 38 of 48 are spaced from each other by a gap C and positioned. Further, the coil wiring board 11 for wiring the lead wire 18 from the armature coil 5 is disposed on the upper end surface 53 which is the end surface on the side opposite to the fixed ring 1 in a direction perpendicular to the armature coil 5. .

  In this alignment stage apparatus, as shown in FIGS. 1 and 2, a device such as a workpiece to be positioned (not shown) is used for fixing a workpiece provided on a workpiece mounting surface 54 which is an upper end surface of the rotating wheel 2. It is fixed above the rotating wheel 2 through the screw hole 24. As shown in FIGS. 3 and 5, the rotating wheel 2 is rotatably attached to the rotating wheel 1 via a bearing 3. Further, the fixed ring 1 is fixed to a machine base such as a base with a screw through a fixing screw hole 29 provided in an attachment surface 56 which is an end surface on the fixed side which is a lower end surface thereof. The bearing 3 is fixed by presser plates 25 and 26. The holding plates 25 and 26 are fitted so as to be fitted into the inlay portion 33 (FIG. 8) of the fixed ring 1 on the lower surface side of the apparatus, and the fixing screws 27 and 28 are formed on the fixed ring 1 and the rotating ring 2. The outer ring 12 of the bearing 3 is attached to the fixed ring 1, the inner ring 13 is attached to the rotating wheel 2, and the fixed ring 1 is positioned and fixed to the outer ring 12 by being screwed into the presser plate fixing screw hole 34. ing. In addition, the coreless coil 5C of the armature coil 5 is disposed along the inner peripheral surface of the hole 10 in the fixed ring 1, and the field along the mounting surface 38 of the outer peripheral surface 48 is provided in the rotating wheel 2. The magnets 4M of the magnet magnet 4 are respectively disposed, and in this state, the rotating wheel 2 is fitted and disposed in the fixed wheel 1, and the rotating wheel 2 is rotatably supported by the fixed wheel 1 via the bearing 3. Reference numeral 35 in FIG. 5 denotes a read head block.

  Further, in this alignment stage apparatus, when the outer diameter dimension of the fixed ring 1 is D and the inner diameter dimension of the hollow hole 7 that is a through hole of the rotating ring 2 is d, the dimension ratio d / D is 60% to 75%. The range is set, and preferably, the range is set to 65% to 70%. For example, if the dimensional ratio d / D is 60% or less, the thickness of the useless part increases, the weight is lost, the moment of inertia of the rotating wheel 2 increases, and it cannot follow high speed and high acceleration / deceleration and is fixed. The positioning response of the rotating wheel 2 with respect to the wheel 1 is deteriorated. In addition, when the dimensional ratio d / D is 75% or more, the thickness of the fixed wheel 1 and the rotating wheel 2 becomes too thin, the rigidity is insufficient, the strength is insufficient, and the smooth rotating motion of the rotating wheel 2 is hindered. Will come. That is, in this alignment stage apparatus, 75% of the dimensional ratio d / D is the upper limit of the practical specification, and in the case of a large hollow diameter specification with the dimensional ratio d / D of 75% or more, for example, the outside of the fixed ring 1 When the diameter D is φ150 mm and the inner diameter d of the rotating wheel 2 is 115 mm, the total thickness of the rotating wheel 2 and the fixed wheel 1 excluding the motor portion can be obtained when a certain thrust is obtained. The thickness is about 5mm, which is thought to be close to the practical limit. The dimension ratio h / D of the height dimension h from the fixed mounting surface 56 of the fixed ring 1 to the workpiece mounting surface 54 of the rotating wheel 2 with respect to the outer diameter D of the fixed ring 1 is the dimension ratio d / D described above. In the case of a structure that maintains a range and obtains a certain amount of thrust, it is set within a range of 40% to 55%, and preferably within a range of 45% to 50%. Is.

  In this alignment stage device, by forming the hollow hole 7 of the rotating wheel 2 as large as possible, the mass of the rotating wheel 2 can be reduced and the moment of inertia of the movable part of the rotating wheel 2 can be reduced. The required torque at the time of acceleration / deceleration of the rotating wheel 2 can be reduced when the motor is driven. The torque required for accelerating the rotating wheel 2 that is the moving part includes torque due to the rotational resistance of the rotating wheel 2 and torque required for acceleration of the rotating wheel 2, and the rotation of the moving part by reducing the moment of inertia of the moving part. The torque required to accelerate the wheel 2 is also reduced. Therefore, in this alignment stage device, the torque required for driving the rotating wheel 2 can be configured to be small, so that even a motor with a small maximum torque can reach the maximum speed in a short acceleration time. As a result, it is possible to follow an operation pattern command accompanied by sudden acceleration and sudden stop of the rotating wheel 2, and the response can be improved and a high tact operation can be performed. When the hollow hole 7 of the rotating wheel 2 is extremely enlarged and thinned, the rotating wheel 2 of the movable part and the fixed ring 1 on the fixed side are thinned, resulting in insufficient mechanical rigidity, high speed, This will hinder the positioning operation in high acceleration / deceleration operation. Further, the hollow hole 7 of the rotating wheel 2 can pass or install a large-sized device, and can effectively use the space. For example, a device such as a thick cable can be passed from the device. Further, in this alignment stage device, since the hollow hole 7 of the rotating wheel 2 can be configured to be large, the range through which the light source can be transmitted can be increased, and it can be used for transmitted light measurement that transmits light from the lower surface side. , A wider area can be inspected.

  In this alignment stage apparatus, the motor is configured as a direct drive type motor that directly drives the rotating wheel 2. The motor is composed of a coreless coil 5C of the armature coil 5 on the primary side and a magnet 4M constituting the field magnet 4 on the secondary side. The armature coil 5 on the primary side of the motor is composed of a three-phase coreless coil 5C which is flat and wound in an annular shape. The field magnet 4 on the secondary side of the motor is composed of a magnet 4M formed in a flat plate shape. In the motor, the armature coil 5 is disposed on the inner peripheral surface of the hole 10 of the fixed ring 1 and the magnet 4M of the field magnet 4 is disposed on the outer peripheral surface 48 of the rotating wheel 2 so as to face each other. Thus, a permanent magnet motor is configured. The configuration of the motor can cancel the attractive force of the magnet 4M and reduce the load applied to the bearing 3. Since the field magnet 4 is disposed on the rotating wheel 2, the motor has a structure that eliminates the need for electrical wiring to the rotating wheel 2. In this alignment stage device, the motor is composed of three armature coils 5 and four field magnets 4 to form one set, and a total of four sets are arranged, and the coreless coil 5C of the armature coil 5 is arranged. Twelve magnets and 16 magnets 4M of the field magnet 4 are configured. In this alignment stage device, the rotating wheel 2 is made of a steel magnetic material that becomes a magnetic circuit portion as a magnet yoke.

  This alignment stage device is configured as a stage that can swing and rotate within a predetermined range of a predetermined angle θ and can be positioned with respect to a workpiece or the like installed on the rotating wheel 2. In this embodiment, the predetermined angle θ is set to 260 °. As a specific example of this alignment stage apparatus, the outer diameter D of the outer peripheral surface of the fixed ring 1 is φ150 mm, and the inner diameter d of the inner peripheral surface of the hollow hole 7 of the rotating wheel 2 is φ100 mm. , The height dimension h from the fixed mounting surface 56 of the fixed wheel 1 constituting the height of the device to the work mounting surface 54 of the rotating wheel 2 is 67 mm, and the dimensional ratio h / D is about 45%. , The total weight is set to 3.5kg. As shown in FIG. 5, the bearing 3 includes an outer ring 12 attached to the fixed ring 1, an inner ring 13 attached to the rotating wheel 2, and a roller 31 which is a rolling element disposed between the outer ring 12 and the inner ring 13. It is comprised from the cross-roller bearing by which the axial center of the roller 31 is alternately orthogonally crossed and arrange | positioned at cross shape. Therefore, in this alignment stage device, the rotating wheel 2 can be rotatably supported by the bearing 3 on the lower end portion of the fixed ring 1, and the armature coil 5 is thin on the inner peripheral surface which is the hole 10 of the fixed ring 1. The thin field magnet 4 is disposed on the outer peripheral surface 48 of the rotating wheel 2 so that the entire structure can be made compact. The lower ends of the fixed wheel 1 and the rotating wheel 2 can be relatively rotated by the bearing 3. The total height is also compact.

  An example of the armature coil 5 is shown in FIGS. In the armature coil 5, the coreless coil 5 </ b> C is individually molded with a resin 49. The outer surface of the armature coil 5 is formed in an R shape corresponding to the inner peripheral shape of the fixed ring 1, that is, a convex curved surface G of the cylindrical convex surface 41, and the inner surface of the armature coil 5 is similarly R shape or cylindrical. It is formed in the concave curved surface F of the concave surface 40, and is formed of the resin 49 so that the thickness is substantially equal throughout. In the armature coil 5, a concave curved surface F, which is a cylindrical concave surface on the rotating wheel 2 side, is formed into a curved surface with a curvature R62.5, for example, and a coreless coil 5C having a coreless portion 45 is formed on the concave curved surface F. It is exposed to the 4 side and the distance between the field magnet 4 and the magnet 4M is made as narrow as possible, contributing to the thin structure of the entire apparatus. The other five surfaces on the field magnet 4 side of the coreless coil 5C of the armature coil 5, the upper surface 42, the lower surface 43, both side surfaces 44, and the convex curved surface G of the cylindrical convex surface have a thickness t2 of about 0.5 mm. The inner diameter side portion of the coil is made of a molding material, that is, a resin 49. As the molding material of the armature coil 5, a highly insulating resin 49 is selected, and an insulating member other than the molding material is interposed between the armature coil 5 and the fixed ring 1 when the armature coil 5 is assembled to the fixed ring 1. There is no need, and the assembly can be achieved simply by arranging the armature coil 5 on the inner peripheral surface of the hole 10 of the fixed ring 1.

  An anti-rotation projection 39 is provided on the upper portion of the cylindrical convex surface G, which is a convex curved surface on the fixed ring 1 side of the armature coil 5, and the anti-rotation projection 39 is formed on the inner peripheral surface of the fixed ring 1. The armature coil 5 can perform the functions of positioning and detent with the inner peripheral surface 10 of the fixed ring 1 by being inserted into the recessed grooves 50 formed to be spaced apart in the circumferential direction 10. . The resin tube 51 of the armature coil 5 covers the lead wire 18 and plays a role of guiding the lead wire 18 when the armature coil 5 is molded. The anti-rotation projection 39 of the armature coil 5 is located at the center position in the width direction of the armature coil 5, has an elongated rod-like shape and a substantially semicircular cross-section, and its length is the armature coil It is formed to the same extent as the width dimension of the arm 5. Further, the armature coil 5 has two outlets of the lead wire 18 on the upper end surface of the armature coil 5, one of which is disposed on the rotation-preventing projection 39 of the armature coil 5 and the other one. One is arranged on the left side when viewed from the inner concave curved surface F side not covered with the molding material. The armature coil 5 is attached to the inner peripheral surface of the hole 10 of the fixed ring 1 so that the rotation-preventing protrusion 39 is on the coil wiring board 11 side. The rotation preventing projection 39 of the armature coil 5 is provided on the coil wiring board 11 side. The coil wiring substrate 11 is formed in a substantially C-shaped flat plate shape having a thickness t1 of 1 mm. Two coil wiring substrates 11 are disposed on the upper end surface 53 on the side opposite to the mounting surface of the fixed ring 1 of the alignment stage device.

  The alignment stage apparatus includes an optical encoder including a non-contact reading head 20, and the optical encoder includes an optical scale 8 made of a reflective tape that is bonded and fixed to the outer peripheral surface 48 of the rotating wheel 2. The rotation angle of the rotating wheel 2 is detected by the reading head 20 screwed to the upper end surface 53 of the fixed wheel 1 through the block 35 disposed opposite thereto, and the detection signal is The signal is input to a controller (not shown) through the encoder line 19. The read head 20 incorporates a magnetic sensor for detecting the origin, and a magnet bonded and fixed to the origin mark 9 fixed to the origin mark mounting recess 36 of the work mounting surface 54 of the rotating wheel 2 is provided above the magnetic sensor. The origin signal is output by passing through.

  An annular step 55 is provided on the work mounting surface side of the outer peripheral surface 48 of the rotating wheel 2. A transparent hollow disk is fitted into the annular step 55 of the rotating wheel 2, and the hollow disk is provided with several holes on the inner diameter side, and a fixing tool 23 having a wedge-shaped protrusion is inserted. It is. The wedge portion of the fixture 23 is inserted into the hole of the hollow disk so that the hollow disk rotates with respect to the rotating wheel 2 and functions to suppress lifting. The hollow disk is fixed to the rotating wheel 2 by screwing and fixing to the rotating wheel 2 with the fixing tool 23. The hollow disk constitutes the shielding plate 6 by applying a shielding seal 30. The shielding plate 6 can easily change the detection position of the sensor by changing the shape of the shielding seal 30.

  In this alignment stage device, the bracket 46 fixed to the fixed wheel 1 is used as a transmission type photo sensor as the limit sensor 15 in the clockwise direction, the limit sensor 16 in the counterclockwise direction, and the sensor 14 before the origin. A sensor is attached. These sensors 14 to 16 are connected to a controller (not shown) through a sensor line 17. The limit sensors 15 and 16 on the fixed wheel 1 side are configured to detect the shielding plate 6 on the rotating wheel 2 side and output a limit signal. The pre-origin sensor 14 has the same structure as the limit sensors 15 and 16. The photosensors are arranged with their positions shifted in the radial direction, and the detection positions of the sensors can be individually adjusted by configuring a plurality of shielding plates 6 concentrically.

  The fixed wheel 1 has a mechanical stopper 21 that stops a rotating wheel 2 that is made of a resin block and swings in a clockwise direction, and a mechanical stopper 22 that stops the rotating wheel 2 that swings in a counterclockwise direction. It is fixed. Further, on the outer peripheral surface 48 of the rotating wheel 2, a rotating wheel side mechanical stopper 32 that is in contact with the mechanical stoppers 21 and 22 and restricts the swing range of the rotating wheel 2 is attached. The mechanical stoppers 21 and 22 are provided on the fixed wheel 1 in order to restrict the rotation range of the rotating wheel 2 as shown in FIGS. The mechanical stoppers 21 and 22 are set at positions where the rotation range of the rotating wheel 2, that is, the operation angle is in the range of 280 °. The rotating wheel side mechanical stopper 32 has a urethane coating on the head for the purpose of absorbing shock. The rotating range of the rotating wheel 2 is regulated by bringing the rotating wheel side mechanical stopper 32 fixed to the rotating wheel 2 into contact with the mechanical stoppers 21 and 22 of the fixed wheel 1.

  The alignment stage apparatus according to the present invention can be used by being incorporated in various apparatuses such as a semiconductor manufacturing apparatus, various assembling apparatuses, measuring apparatuses, test apparatuses, positioning tables, slide tables and the like operated in an area such as a clean room and a test laboratory. is there.

DESCRIPTION OF SYMBOLS 1 Fixed ring 2 Rotating ring 3 Bearing 4 Field magnet 4M Magnet 5 Armature coil 5C Coreless coil 7 Hollow hole 10 Hollow hole part 11 Coil wiring board 12 Outer ring 13 Inner ring 18 Lead wire 25, 26 Press plate 27, 28 Press plate Fixing screw 31 Roller (rolling element)
33 Inlay portion 40 Concave surface 41 Convex surface 48 Peripheral surface 49 Resin 50 Concave groove 54 Workpiece mounting surface 56 Mounting surface C Clearance D Outer diameter of fixed wheel d Inner diameter of rotating wheel h Workpiece mounting surface of rotating wheel from fixed wheel mounting surface Height G convex surface F concave surface

Claims (11)

An electric machine having a fixed wheel on the fixed side, a rotating wheel supported rotatably with respect to the fixed wheel, and a motor that drives the rotating wheel to rotate relative to the fixed wheel. In the three-phase coreless coil wound in an annular shape constituting the child coil, the magnet constituting the field magnet formed on the secondary side of the motor is opposed to the armature coil. In an alignment stage apparatus comprising magnetic poles arranged alternately on the rotating wheel,
The rotating wheel is formed in a cylindrical shape having a hollow hole that is rotatably fitted and supported via a bearing disposed at a fixed side end of the hollow hole portion of the fixed ring. Set high,
The armature coils are arranged on the inner peripheral surface of the hollow hole portion of the fixed ring so as to extend perpendicularly to the end surface of the fixed ring along the circumferential direction, and the magnet is disposed on the outer peripheral surface of the rotating wheel. Respectively, extending perpendicularly to the end face of the rotating wheel, facing the armature coil along the circumferential direction,
The coil wiring board for wiring the lead wire from the armature coil is disposed perpendicularly to the armature coil and extending in the circumferential direction on the end surface on the side opposite to the fixed ring. Alignment stage device.   An outer cylindrical convex surface of the armature coil is formed in a shape corresponding to the inner peripheral surface of the hollow hole portion of the fixed ring, and is spaced from the inner peripheral surface of the fixed ring on the side opposite to the fixed side. The alignment stage apparatus according to claim 1, further comprising a rotation-preventing protrusion that is fitted and positioned in each of the plurality of recessed grooves formed.   The armature coil is formed in a cylindrical concave surface so that the coreless coil is exposed and opposed to the magnet of the field magnet, and an area other than the exposed surface of the coreless coil located on the cylindrical concave surface side is insulative. The alignment stage apparatus according to claim 1, wherein the alignment stage apparatus is molded and covered with a high resin.   The lead-out projection of the armature coil is provided with one lead wire of the armature coil, and the other lead wire extends from an upper end of the resin of the armature coil. The alignment stage apparatus according to claim 3.   The anti-rotation protrusion of the armature coil has a semi-circular and elongated rod shape in cross section, and the length thereof is approximately the same as the width of the arm of the armature coil. The alignment stage apparatus according to any one of claims 2 to 4.   A presser plate for fixing an inner ring of the bearing to the rotating ring by fitting a presser plate for fixing the outer ring of the bearing to the fixed ring so as to be fitted into an inlay portion on the mounting end surface side of the fixed ring. The alignment stage apparatus according to claim 1, wherein a plate is disposed on an end surface of the rotating wheel and is positioned and fixed by a fixing screw.   The alignment according to any one of claims 1 to 6, wherein the bearing is a cross roller bearing in which rollers, which are rolling elements, are arranged in an intersecting manner with their axis centers alternately orthogonal to each other. Stage device.   The number of coreless coils of the armature coil attached to the fixed ring is 3 × n, and the number of magnets of the field magnet attached to the rotating wheel is 4 × n, and the number of the coreless coils is 12 The alignment stage apparatus according to claim 1, wherein the magnet is composed of 16 pieces. A fixed wheel on the fixed side, a rotating wheel supported rotatably with respect to the fixed wheel, and a motor that drives the rotating wheel to rotate relative to the fixed wheel;
In the three-phase coreless coil wound in an annular shape constituting the armature coil on the primary side of the motor, the magnet constituting the field magnet on the secondary side of the motor is disposed on the fixed ring, respectively. In the alignment stage device, wherein the magnetic poles are alternately arranged opposite to the armature coils and arranged on the rotating wheels, respectively.
The rotating wheel is formed in a cylindrical shape having a hollow hole that is rotatably fitted and supported via a bearing disposed at a fixed side end portion of the hollow hole portion of the fixed wheel,
The armature coils are respectively disposed on the inner peripheral surface of the hollow hole portion of the fixed ring so as to extend perpendicularly to the end surface of the fixed ring along the circumferential direction.
The flat plate-shaped magnet constituting the field magnet has a polygonal flat mounting surface formed along the circumferential direction of the outer peripheral surface of the rotating wheel, with a gap between the adjacent magnets. An alignment stage device, wherein the alignment stage device is disposed so as to extend perpendicularly to an end face of the rotating wheel. The dimension ratio d / D of the inner diameter dimension d of the hollow hole of the rotating wheel to the outer diameter dimension D of the fixed ring is set in a range of at least 60% to 75%, and The dimension ratio h / D of the height dimension h from the mounting surface that is the end surface to the work mounting surface that is the end surface of the rotating wheel is set in a range of at least 40% to 55%. Item 10. The alignment stage device according to any one of Items 1 to 9. 11. The alignment according to claim 10, wherein the dimension ratio d / D is set in a range of 65% to 70%, and the dimension ratio h / D is set in a range of 45% to 50%. Stage device.

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