JP2013000939A - 真空チャンバの真空度制御機構、これを備えた接合装置、真空チャンバの真空度制御方法、及び接合装置の真空度制御方法 - Google Patents

真空チャンバの真空度制御機構、これを備えた接合装置、真空チャンバの真空度制御方法、及び接合装置の真空度制御方法 Download PDF

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Publication number
JP2013000939A
JP2013000939A JP2011132374A JP2011132374A JP2013000939A JP 2013000939 A JP2013000939 A JP 2013000939A JP 2011132374 A JP2011132374 A JP 2011132374A JP 2011132374 A JP2011132374 A JP 2011132374A JP 2013000939 A JP2013000939 A JP 2013000939A
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JP
Japan
Prior art keywords
vacuum
vacuum chamber
flow rate
pressure value
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2011132374A
Other languages
English (en)
Japanese (ja)
Inventor
Shuhei Wada
周平 和田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP2011132374A priority Critical patent/JP2013000939A/ja
Priority to KR1020120049044A priority patent/KR20120138632A/ko
Priority to CN2012101475085A priority patent/CN102848695A/zh
Publication of JP2013000939A publication Critical patent/JP2013000939A/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/14—Preventing or minimising gas access, or using protective gases or vacuum during welding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/02—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
    • B23K20/023—Thermo-compression bonding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/58—Measuring, controlling or regulating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
    • B65D81/18—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient
    • B65D81/20—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas
    • B65D81/2007—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas under vacuum
    • B65D81/2038—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas under vacuum with means for establishing or improving vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/56—Compression moulding under special conditions, e.g. vacuum
    • B29C2043/561—Compression moulding under special conditions, e.g. vacuum under vacuum conditions
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S29/00—Metal working
    • Y10S29/044—Vacuum

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Pressure Welding/Diffusion-Bonding (AREA)
  • Control Of Fluid Pressure (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)
JP2011132374A 2011-06-14 2011-06-14 真空チャンバの真空度制御機構、これを備えた接合装置、真空チャンバの真空度制御方法、及び接合装置の真空度制御方法 Pending JP2013000939A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2011132374A JP2013000939A (ja) 2011-06-14 2011-06-14 真空チャンバの真空度制御機構、これを備えた接合装置、真空チャンバの真空度制御方法、及び接合装置の真空度制御方法
KR1020120049044A KR20120138632A (ko) 2011-06-14 2012-05-09 진공 챔버의 진공도 제어 기구, 이것을 포함한 접합장치, 진공 챔버의 진공도 제어방법, 및 접합장치의 진공도 제어방법
CN2012101475085A CN102848695A (zh) 2011-06-14 2012-05-11 真空室的真空度控制机构、包括该机构的接合装置、真空室及接合装置的真空度控制方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011132374A JP2013000939A (ja) 2011-06-14 2011-06-14 真空チャンバの真空度制御機構、これを備えた接合装置、真空チャンバの真空度制御方法、及び接合装置の真空度制御方法

Publications (1)

Publication Number Publication Date
JP2013000939A true JP2013000939A (ja) 2013-01-07

Family

ID=47395854

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011132374A Pending JP2013000939A (ja) 2011-06-14 2011-06-14 真空チャンバの真空度制御機構、これを備えた接合装置、真空チャンバの真空度制御方法、及び接合装置の真空度制御方法

Country Status (3)

Country Link
JP (1) JP2013000939A (zh)
KR (1) KR20120138632A (zh)
CN (1) CN102848695A (zh)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104002541A (zh) * 2013-02-25 2014-08-27 全研科技有限公司 真空加工贴合机构以及真空贴合的方法
JP2016215108A (ja) * 2015-05-19 2016-12-22 凸版印刷株式会社 ダイコート装置
CN110667224A (zh) * 2019-10-21 2020-01-10 深圳市北鼎自动化科技有限公司 一种智能一体贴合机
US11318858B2 (en) 2018-10-17 2022-05-03 Hangzhou Power Supply Company Of State Grid Zhejiang Electric Power Intelligent electric-vehicle charging station
CN114791332A (zh) * 2022-04-06 2022-07-26 安徽蓝格利通新材应用股份有限公司 一种真空绝热板自动检测装置

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6149827B2 (ja) 2014-09-02 2017-06-21 千住金属工業株式会社 真空処理装置、その制御方法、真空はんだ処理装置及びその制御方法
CN107741436A (zh) * 2017-09-04 2018-02-27 上海海事大学 水浴逆真空测量vip内部不同真空度下的导热系数的方法
CN109108453A (zh) * 2018-10-09 2019-01-01 北京航空航天大学 一种镍基高温合金通道结构高效扩散焊的方法
CN111026176B (zh) * 2019-12-19 2022-12-09 北京航天益森风洞工程技术有限公司 一种高精度自适应的真空度控制系统

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10156853A (ja) * 1996-11-29 1998-06-16 Meiki Co Ltd 真空多段積層装置
JP2009164457A (ja) * 2008-01-09 2009-07-23 Mitsubishi Heavy Ind Ltd 圧力制御装置および圧力制御方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101249739B (zh) * 2008-03-31 2010-06-09 刘苏海 一种夹层板材成型机
JP5004189B2 (ja) * 2008-06-13 2012-08-22 株式会社名機製作所 真空チャンバの真空度制御機構及び真空度制御方法
JP2010167774A (ja) * 2008-12-26 2010-08-05 Yamaha Motor Co Ltd 真空成形機および真空成形品の製造方法
JP4815538B2 (ja) * 2010-01-15 2011-11-16 シーケーディ株式会社 真空制御システムおよび真空制御方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10156853A (ja) * 1996-11-29 1998-06-16 Meiki Co Ltd 真空多段積層装置
JP2009164457A (ja) * 2008-01-09 2009-07-23 Mitsubishi Heavy Ind Ltd 圧力制御装置および圧力制御方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104002541A (zh) * 2013-02-25 2014-08-27 全研科技有限公司 真空加工贴合机构以及真空贴合的方法
JP2016215108A (ja) * 2015-05-19 2016-12-22 凸版印刷株式会社 ダイコート装置
US11318858B2 (en) 2018-10-17 2022-05-03 Hangzhou Power Supply Company Of State Grid Zhejiang Electric Power Intelligent electric-vehicle charging station
CN110667224A (zh) * 2019-10-21 2020-01-10 深圳市北鼎自动化科技有限公司 一种智能一体贴合机
CN110667224B (zh) * 2019-10-21 2024-03-22 贾丽 一种智能一体贴合机
CN114791332A (zh) * 2022-04-06 2022-07-26 安徽蓝格利通新材应用股份有限公司 一种真空绝热板自动检测装置
CN114791332B (zh) * 2022-04-06 2023-09-15 安徽蓝格利通新材应用股份有限公司 一种真空绝热板自动检测装置

Also Published As

Publication number Publication date
CN102848695A (zh) 2013-01-02
KR20120138632A (ko) 2012-12-26

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