JP2012255761A - Dust monitoring method and production apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To monitor the situation of dust in a working room much better even in simple configuration, according to a dust monitoring method and a production apparatus.SOLUTION: In a dust monitoring method, a measuring area dividing step of dividing the inside of a working room 2 into measuring areas 2a, 2b, 2c and 2d, an atmospheric gas moving amount data acquiring step of acquiring air moving amount data in an inlet, an outlet and a boundary surface while trying work, and an atmospheric gas moving amount data storage step of storing the air moving amount data are performed beforehand. When performing work, a floating dust number distribution calculation step of measuring the number of floating dust for each of the measuring areas 2a-2d, estimating the total number of floating dust, respectively, and calculating time-series floating dust number distribution, a dust situation estimation step of calculating move balance of dust with respect to the measuring areas 2a-2d from the time-series floating dust number distribution using the air moving amount data, and estimating the generating amount and depositing amount of dust, and a dust situation notification step of notifying a dust situation are performed.

Description

  The present invention relates to a dust monitoring method and a production apparatus.

Conventionally, in order to work in a clean environment, a clean atmosphere gas is supplied into the work chamber, and dust generated by the work is exhausted from the exhaust port to maintain the cleanliness in the work chamber. It has been broken. Such a work room may be configured as a clean room or a clean booth, or may be incorporated in a part of the production equipment.
Even in such a work room, dust is generated from the movable parts of the machine that performs the work and the assembly parts that are the work object, and dust is introduced from the outside as the work object is carried in and out. Therefore, the amount of dust increases in a specific area in the work chamber or at a specific timing of the work process, and the dust adheres to the work target and becomes a foreign object, which may cause a defect in the work target.
For this reason, various dust detection techniques have been proposed.
For example, Patent Document 1 discloses a detection mechanism for detecting dust and a mechanism for detecting the time when dust is detected as a technique for specifying a dust generation source in a production apparatus that requires cleanliness, such as a semiconductor manufacturing apparatus. The dust sensor provided with a mechanism for recording dust information detected by the detection mechanism is inserted into and passed through the device to be inspected for dust generation inside, and the information obtained by the dust sensor is A dust detection method characterized in that a dust generation state chart in the device to be inspected is created based on which the dust generation location in the device to be inspected can be specified with this chart is described. Yes.
Patent Document 2 describes a technique for identifying a device that generates dust with a production device installed in a clean room. In Patent Document 2, a plurality of sampling tubes are stretched in a unidirectional laminar flow clean room, and the suction port is installed on the floor surface near the device that is a source of dust particles. Then, a particle counter is selectively connected to a plurality of sampling tubes in order, the air is sucked, and the dust particle distribution is measured to identify a device that generates dust.

Japanese Patent No. 2728508 Japanese Patent No. 3470370

However, the conventional dust monitoring method and production apparatus as described above have the following problems.
In the technique described in Patent Document 1, a dust sensor is put into a production apparatus, and a dust generation source is specified by detecting dust attached to the dust sensor. However, when the work to be produced is small, there is a problem that it is difficult to mount the dust sensor on the work.
In addition, when the dust generation source is separated from the dust sensor attachment site and is attached floatingly from the dust generation source, there is a problem that it is difficult to specify the dust generation source.
In the technique described in Patent Document 2, since a unidirectional laminar flow is generated in the clean room, the source of dust generation can be specified from the dust distribution on the floor surface. For example, turbulent clean production There is a problem that the dust source cannot be specified when the movement path of the dust from the dust source changes in a complex manner as in an apparatus or a clean room.
In addition, it may be possible to determine the source of dust generation by measuring the dust distribution at many locations on the dust movement path. In this case, it is necessary to install a large number of dust measuring instruments in the work chamber. Therefore, the configuration of the production apparatus and the clean room becomes complicated, and there is a problem that the space that can be used for production work decreases as the number of dust measuring devices increases.

  The present invention has been made in view of the above problems, and provides a dust monitoring method and a production apparatus that can better monitor the dust situation in a work room even with a simple configuration. Objective.

  In order to solve the above-described problem, the invention according to claim 1 is a dust monitoring method for performing a preset operation in a work chamber to which a clean atmospheric gas is supplied. A measurement region partitioning step for partitioning into a plurality of measurement regions, and a time series of the amount of movement of the atmospheric gas at each interface between the plurality of measurement regions, the inlet, the exhaust port, and the plurality of measurement regions while trying the work At the time of performing the work after performing in advance an atmosphere gas movement amount data acquisition step of acquiring atmospheric gas movement amount data as data and an atmosphere gas movement amount data storage step of storing the atmosphere gas movement amount data Measuring the number of suspended dust for each of the plurality of measurement regions, estimating the total number of suspended dust for each of the plurality of measurement regions, and calculating a time-series suspended dust number distribution calculating step; Using the atmospheric gas movement amount data stored in the atmospheric gas movement amount data step, the dust movement balance of the plurality of measurement areas is calculated from the time-series floating dust number distribution, A method of performing a dust state estimation step of estimating the generation amount and adhesion amount of dust and a dust state notification step of notifying the dust state based on the generation amount and adhesion amount of the dust are provided.

  According to a second aspect of the present invention, in the dust monitoring method according to the first aspect, the floating dust number distribution calculating step, the dust state estimating step, and the dust state notifying step are synchronized with the measurement of the floating dust number. To do it.

  According to a third aspect of the present invention, there is provided a production apparatus that performs a preset operation in a work chamber supplied with a clean atmospheric gas, and the work chamber is divided into a plurality of measurement areas, and the operation is tried in advance. Atmosphere gas storing atmosphere gas movement amount data acquired as time series data of the amount of movement of the atmosphere gas at each interface between the plurality of measurement regions at the inlet and exhaust ports in the working chamber Based on the movement amount data storage unit, the dust measuring device for measuring the number of floating dust for each of the plurality of measurement regions, and the number of floating dust by the dust measuring device, the total number of floating dusts for each of the plurality of measurement regions is calculated. Estimating and calculating the time-series floating dust number distribution calculating unit, and using the ambient gas movement amount data stored in the atmospheric gas movement amount data storage unit, the time-series floating particle number distribution calculation unit. From the dust number distribution, a dust movement balance for the plurality of measurement areas is calculated, a dust state estimation unit for estimating the amount of dust generated and the amount of adhesion in the plurality of measurement areas, and the amount of dust generated and the amount of adhesion And a dust state notification unit for notifying a dust state based on the dust state.

  According to the dust monitoring method and the production apparatus of the present invention, the work chamber is partitioned into a plurality of measurement regions, and the amount of movement of the atmospheric gas at each boundary surface between the plurality of measurement regions in advance and at the inlet and exhaust ports in the work chamber. A simple configuration to estimate the dust situation from the atmospheric dust movement distribution data obtained from the atmospheric dust movement distribution data and the atmospheric gas movement amount data obtained by measuring the floating dust count during work. Even so, there is an effect that the dust situation in the working chamber can be better monitored.

It is a typical front view which shows schematic structure of the production apparatus which concerns on embodiment of this invention. It is a side view of A view and B view in FIG. It is a functional block diagram which shows the function structure of the control unit of the production apparatus which concerns on embodiment of this invention. It is a schematic diagram explaining the atmospheric gas movement amount data of the dust monitoring method according to the embodiment of the present invention. It is a flowchart which shows the process flow of the floating dust number distribution calculation process of the dust monitoring method which concerns on embodiment of this invention, a dust condition estimation process, and a dust condition notification process. It is a flowchart which shows a part process flow of the dust condition estimation process of the dust monitoring method which concerns on embodiment of this invention. It is principle explanatory drawing of the dust condition estimation process of the dust monitoring method which concerns on embodiment of this invention. It is a schematic diagram which shows the numerical example of the dust condition by the dust monitoring method which concerns on embodiment of this invention. It is a typical perspective view which shows the principal part of the production apparatus explaining the 1st modification of the dust monitoring method of embodiment of this invention. It is a typical front view which shows the structure of the principal part of the production apparatus which concerns on the 2nd modification of embodiment of this invention.

Embodiments of the present invention will be described below with reference to the accompanying drawings.
First, a production apparatus according to an embodiment of the present invention will be described.
FIG. 1 is a schematic front view showing a schematic configuration of a production apparatus according to an embodiment of the present invention. Fig.2 (a) is a side view of A view in FIG. FIG. 2B is a side view as seen from B in FIG. FIG. 3 is a functional block diagram showing the functional configuration of the control unit of the production apparatus according to the embodiment of the present invention. FIG. 4 is a schematic diagram for explaining the atmospheric gas movement amount data of the dust monitoring method according to the embodiment of the present invention.

  As shown in FIG. 1, the schematic configuration of the production apparatus 1 of the present embodiment includes a work chamber 2 for performing production work, a fan filter unit (hereinafter referred to as FFU) 4, and a particle monitor (hereinafter referred to as P / M). 5 (dust measuring device), an electrical equipment unit 3, a control unit 6, and a display unit 7.

The use of the production apparatus 1 is not particularly limited as long as it is a use for performing a production work in a clean atmosphere and performing a production work for repeating the same procedure by changing the work to be worked.
Here, “production work” means any work or process performed on a workpiece made of a member, part, assembly, or the like that constitutes part or all of the product in order to produce the product. For example, operations and processes such as processing, surface treatment, cleaning, assembly, inspection, measurement, repair, and packing can be listed. In addition, in order to perform these operations and processes, operations of changing the posture and position of the workpiece, sorting, assembling, and rearranging a plurality of workpieces are also included.
The “product” means a finished product produced by the production operation of the production apparatus 1, and the final product supplied to the market may be in a semi-finished product state.
Hereinafter, as an example of the production work of the production apparatus 1, an example in which a part assembling work and a part moving work associated therewith are performed will be described.

As shown in FIGS. 1, 2 (a), (b), the work chamber 2 has a rectangular parallelepiped outer shape, a floor surface portion 2 Y having a rectangular shape in plan view provided on the electrical component 3, and a floor surface portion. Front plate 2F, right side plate 2R, rear side plate 2B, left side plate 2L erected on the four sides of the outer periphery of 2Y, and the top plate covering the upper ends of these front side plate 2F, right side plate 2R, rear side plate 2B, left side plate 2L 2T.
For the front side plate 2F, the right side plate 2R, the rear side plate 2B, the left side plate 2L, and the top plate 2T, an appropriate plate member capable of shielding the atmospheric gas can be adopted. These may all be made of an opaque material, but at least a part of the material is preferably made of a transparent material so that the inside of the working chamber 2 can be observed from the outside.

  The inside of the work chamber 2 is partitioned in advance into a plurality of virtual measurement regions by performing a measurement region partitioning process described later. In the present embodiment, as an example, the measurement area is divided into four rectangular parallelepiped measurement areas 2a, 2b, 2c, and 2d. Hereinafter, for the sake of simplicity, a symbol in which alphabetic subscripts continue in alphabetical order, such as “measurement regions 2a, 2b, 2c, and 2d”, may be abbreviated as “measurement regions 2a to 2d”. Similarly, the abbreviations may also be used for the formula numbers and figure numbers.

The measurement areas 2a to 2d are partitioned by a virtual horizontal plane and a vertical plane passing through the center of the front side plate 2F when the work chamber 2 is viewed in the direction from the front side plate 2F toward the rear side plate 2B (front view direction). There are four virtual areas, the measurement area 2a is set at the upper left, the measurement area 2b is set at the upper right, the measurement area 2c is set at the lower left, and the measurement area 2d is set at the lower right.
In the following, the measurement region 2a, the interface _{S ab} the boundary surface along the vertical direction between the 2b, the measurement region 2b, 2d boundary surface _{S bd} boundary surface along a horizontal direction between the measurement region 2c, 2d between The boundary surface along the vertical direction is referred to as boundary surface S _cd , and the boundary surface along the horizontal direction between the measurement regions 2 a and 2 c is referred to as boundary surface S _ac . The set positions of these boundary surfaces S _ab , S _bd , S _cd , and S _ac are defined by, for example, the height from the floor surface portion 2Y and the horizontal distance from the left side plate 2L. Therefore, a current meter for acquiring the ambient gas movement amount data to be described later, these imaginary boundary surface _{S ab,} S _bd, it is possible to place S _cd, on _{S ac.}

The front plate 2F is a member that forms a side surface on the front side of the work chamber 2 as viewed from the front. Sampling tubes 5a, 5b, and 5c, which will be described later, are positioned at the centers of the measurement regions 2a, 2b, 2c, and 2d. Suction ports 9a, 9b, 9c and 9d for detachably mounting 5d are provided.
When the sampling tubes 5a to 5d are removed, the suction ports 9a to 9d are configured to seal the openings and prevent outflow of atmospheric gas in the work chamber 2.

The right side plate 2 </ b> R is a member that forms a right side surface when the work chamber 2 is viewed from the front.
An opening / closing door 2K that can be opened and closed laterally is provided in the lower half of the right side plate 2R.
The lower end of the opening / closing door 2K is slightly separated from the floor portion 2Y when the opening / closing door 2K is closed. As a result, a right exhaust port 2D (exhaust port) is formed between the lower portion of the right side plate 2R and the floor surface portion 2Y, as shown in FIG. ing.
The open / close door 2K is used to carry in and out workpieces and devices necessary for the production work into and out of the work chamber 2 before and after the production work. In this embodiment, the open / close door 2K is closed during the production work. Yes.

  The rear plate 2B is a member that forms a side surface on the rear surface side of the work chamber 2 as viewed from the front, and covers the entire space between the floor surface portion 2Y and the top plate 2T in this embodiment.

The left side plate 2 </ b> L is a member that forms a left side surface as viewed from the front of the work chamber 2.
As shown in FIG. 2A, a left exhaust port 2C (exhaust port) made of a horizontally long rectangular gap is formed in the lower portion of the left side plate 2L. Although the opening shape and opening area of the right exhaust port 2D may be different, the left exhaust port 2C is formed in the same shape and the same area in this embodiment.

An FFU 4 for supplying clean air (air) as an atmospheric gas into the work chamber 2 is installed in the center of the top of the top plate 2T.
Although the detailed configuration is not shown in particular, the FFU 4 has an intake port provided in the upper portion and a blowout port provided in the lower portion, and a fan and a filter are incorporated between the intake port and the blowout port. . With such a configuration, the outside air is sucked from the air inlet by the rotation of the fan and passed through the filter, so that dust contained in the sucked outside air is removed, and the air purified to a predetermined clean level is It blows out from the outlet.
In the present embodiment, the outlets are provided above the measurement region 2a and above the measurement region 2b, respectively.
Further, as shown in FIGS. 2 (a) and 2 (b), the top plate 2T has a left inlet 2g (inlet) which is an opening penetrating in the plate thickness direction at a position facing the blowout port of these FFUs 4. ), A right inlet 2h (inlet) is provided. Thus, clean air supplied from the FFU 4 is blown out into the measurement regions 2a and 2b through the left inlet 2g and the right inlet 2h, respectively.

In the work chamber 2, various devices for performing production work are provided as necessary. In addition, before the start of the production work, a work that is a work target of the production work is carried in.
For example, in the present embodiment, the work table 11 on which the component 12 that is a workpiece is placed is installed at a position near the front side plate 2F on the floor portion 2Y in the measurement region 2c.
In addition, a work robot 13 is installed for moving the parts 12 and performing assembly work with other parts 12.

The work robot 13 is an articulated robot having a hand portion 13a for gripping and releasing the component 12 at the tip portion, and the base end portion is extended along the facing direction of the front side plate 2F and the rear side plate 2B. Further, the uniaxial stage 14 is supported so as to be able to reciprocate between the front side plate 2F and the rear side plate 2B.
Further, the uniaxial stage 14 includes a right side plate 2R and a left side plate by a pair of uniaxial stages 15 that are horizontally extended and fixed to the inner peripheral surfaces of the front side plate 2F and the rear side plate 2B in the measurement regions 2a and 2b. It is supported so that it can reciprocate between 2L.
Therefore, the base end portion of the work robot 13 is supported so as to be horizontally movable in the measurement areas 2a and 2b where the single-axis stages 14 and 15 are installed.
Further, the hand portion 13a of the work robot 13 can be moved in the range from the vicinity of the floor surface portion 2Y to the base end portion of the work robot 13 according to the degree of freedom of bending of the joint of the work robot 13.

P / M 5 is a dust measuring device that measures the number of floating dust in the work chamber 2, and is disposed outside the work chamber 2.
In the present embodiment, in order to measure the number of suspended dust at four locations corresponding to the measurement regions 2a to 2d, the P / M 5 includes four sampling tubes 5a to 5d, and these sampling tubes 5a to 5d A 4-channel particle monitor that can independently measure the number of suspended dust contained in the sucked air is used.
The configuration of P / M5 is not particularly limited as long as the number of floating dust in the work chamber 2 can be measured with high accuracy. In the present embodiment, an appropriate method can be adopted as long as dust having a particle diameter of 0.5 μm or more can be counted. For example, a particle monitor such as a light scattering method can be suitably employed.
In such P / M5, a certain amount of air is sucked by the sampling tube 5a and the like, and the number of dust contained in the sucked air is counted.
The P / M 5 is electrically connected to the control unit 6, and the measurement value of the number of suspended dust measured by the P / M 5 is output to the control unit 6 sequentially or in response to a request from the control unit 6. It has become.
The measurement period Δt of P / M5 can be set as appropriate in consideration of the expected dust movement speed and the like, but in this embodiment, as an example, a constant period Δt = 1 (s).

The distal ends of the sampling tubes 5a to 5d are detachably inserted into the measurement regions 2a to 2d through the suction ports 9a to 9d, respectively.
When the measurement of the number of suspended dust in the working chamber 2 is not performed, the sampling tubes 5a to 5d can be pulled out from the suction ports 9a to 9d, and the openings of the suction ports 9a to 9d can be sealed.

The positions of the suction ports 5e of the sampling tubes 5a to 5d in the work chamber 2 are provided at positions where the number of dust floating in the measurement areas 2a to 2d can be accurately estimated from the number of sucked air dust. In general, the center position of the measurement regions 2a to 2d or a position close to the center position is preferable. However, since a suitable arrangement position varies depending on the size of the work chamber 2 and the path of the airflow formed, it is set to a suitable arrangement position by conducting experiments in advance.
In the present embodiment, in each of the measurement regions 2a to 2d, the floating dust number distribution is substantially constant on the center line passing through the suction ports 9a to 9d except for the position very close to the front side plate 2F or the rear side plate 2B. For this reason, the position of each suction port 5e on the center line passing through the suction ports 9a to 9d is set at a position closer to the front plate 2F than the center on the center line so as not to hinder production work.
In the present embodiment, specifically, each of the suction ports 5e is positioned at a position where the opposing distance between the front side plate 2F and the rear side plate 2B is 800 mm and the horizontal distance from the front side plate 2F is 200 mm. It is set.

The electrical component unit 3 supplies power to the production apparatus 1 and controls the operation of the production apparatus 1, and is provided in a lower housing of the work chamber 2. Specifically, the electrical unit 3 is electrically connected to the FFU 4, the work robot 13, the single-axis stages 14 and 15, the P / M 5, and the control unit 6 by wiring (not shown), and passes through an operation unit (not shown). These operation controls can be performed based on the operation input.
The operation control by the electrical component unit 3 is sequence control for executing a sequence operation corresponding to a preset production work.

The control unit 6 monitors the dust situation in the work chamber 2 based on the output from the P / M 5 and notifies the dust situation as necessary. As shown in FIG. It is electrically connected to the electrical unit 3 and the display unit 7.
The functional configuration of the control unit 6 includes a floating dust number distribution calculation unit 21, a storage unit 24 (atmosphere gas movement amount data storage unit), a dust state estimation unit 22, and a dust state notification unit 23.

The floating dust number distribution calculating unit 21 estimates the total floating dust number for each of the measurement regions 2a to 2d based on the measurement value of the floating dust number for each of the measurement regions 2a to 2d by P / M5, and performs time-series floating dust. The number distribution is calculated. A specific calculation method will be described later.
The time-series floating dust number distribution calculated by the floating dust number distribution calculating unit 21 is sent to the dust condition estimating unit 22.

The storage unit 24 stores data necessary for calculation performed in the control unit 6.
The data stored in the storage unit 24 includes the volume V ₁ , V ₂ , V ₃ , V ₄ of the measurement regions 2a to 2d, the measurement period Δt of P / M5, and the air suction amount during the measurement period Δt of P / M5. f and air movement amount data (atmospheric gas movement amount data).
These data are stored by being input in advance through the input unit 8 connected to the control unit 6.
The input unit 8 includes appropriate input means such as a keyboard for manual input and a communication port for transferring data stored in different storage media to the storage unit 24.

Here, the air movement amount data in the present embodiment will be described.
The air movement amount data is time-series data of the air movement amount at each of the boundary surfaces between the inflow port, the exhaust port, and the plurality of measurement regions in the work chamber 2.
In the present embodiment, the time from the start to the end of the production work is divided into N in synchronization with the measurement period Δt of P / M5, and the time sequence {t ₀ ,..., T _n−1 , t _n ,. t _N } (where N is an integer greater than or equal to 2 and n is an integer greater than or equal to 1 and less than or equal to N), the amount of movement of air that moves during time Δt from time t _{n −1} to time t _{n Is} expressed as air movement amount data F _ij (t _n ) (i = 0, 1, 2, 3, 4, 5, j = 0, 1, 2, 3, 4, 5).
Here, the subscript ij is an integer that distinguishes the measurement position and the measurement direction, and means the amount of movement of the air moving from the area i to the area j. The area 0 is the external area of the work chamber 2, and the areas 1 to 4 are The measurement areas 2a to 2d and the area 5 mean the internal areas of the FFU 4 (see FIG. 4).

In the present embodiment, as shown in FIG. 4, for example, there are combinations such as the measurement region 2 a and the measurement region 2 d that do not have a boundary surface, the left inlet 2 g and the right inlet 2 h are only blowing, the left exhaust 2 C, The right exhaust port 2D is exhaust only. Therefore, specifically, the subscript ij is limited to the following combinations.
The air movement amount data F ₅₁ (t _n ) is the movement amount of air flowing into the measurement region 2a from the FFU 4 outside the work chamber 2 through the left inlet 2g. The air movement amount data F ₅₂ (t _n ) is the movement amount of air flowing into the measurement region 2b through the right inflow port 2h.
The air movement amount data F ₁₂ (t _n ) is the movement amount of air flowing from the measurement region 2a to the measurement region 2b through the boundary surface _Sab . The air movement amount data F ₂₁ (t _n ) is a movement amount of air flowing from the measurement region 2b to the measurement region 2a through the boundary surface _Sab .
The air movement amount data F ₁₃ (t _n ) is the amount of movement of air flowing from the measurement region 2a to the measurement region 2c through the boundary surface _Sac . The air movement amount data F ₃₁ (t _n ) is the movement amount of air flowing from the measurement region 2c to the measurement region 2a through the boundary surface _Sac .
The air movement amount data F ₂₄ (t _n ) is a movement amount of air flowing from the measurement region 2b to the measurement region 2d through the boundary surface S _bd . The air movement amount data F ₄₂ (t _n ) is the movement amount of air flowing from the measurement region 2d to the measurement region 2b through the boundary surface S _bd .
The air movement amount data F ₃₄ (t _n ) is the movement amount of air flowing from the measurement region 2c to the measurement region 2d through the boundary surface S _cd . The air movement amount data F ₄₃ (t _n ) is the movement amount of air flowing from the measurement region 2d to the measurement region 2c through the boundary surface S _cd .
The air movement amount data F ₃₀ (t _n ) is a movement amount of air exhausted outside the measurement region 2c through the left exhaust port 2C. The air movement amount data F ₄₀ (t _n ) is a movement amount of air exhausted to the outside of the measurement region 2d through the right exhaust port 2D.
A method for acquiring these air movement amount data will be described later.

The dust state estimation unit 22 uses the air movement amount data F _ij (t _n ) stored in the storage unit 24 to calculate the measurement region 2a from the time-series floating dust number distribution calculated by the floating dust number distribution calculation unit 21. 2b, 2c, and 2d are calculated, and the amount of dust generated and the amount of adhesion in the measurement regions 2a, 2b, 2c, and 2d are estimated. A specific estimation method will be described later.
The amount of dust generated and the amount of adhesion estimated by the dust status estimation unit 22 is sent to the dust status notification unit 23.

The dust status notification unit 23 generates display data to notify the dust status based on the generation amount and the adhesion amount of the dust for each of the measurement regions 2 a to 2 d sent from the dust status estimation unit 22, and displays the data on the display unit 7. To be sent.
As the display data, for example, numerical data of dust generation amount and adhesion amount for each of the measurement areas 2a to 2d, image data obtained by processing these numerical data into a graph, and whether the numerical data exceeds a predetermined allowable value. Examples include character data or image data to be displayed.

  In the present embodiment, the control unit 6 employs a computer including a CPU, a memory, an input / output interface, an external storage device, and the like, and realizes the above arithmetic functions by executing an arithmetic program by the computer. ing.

  The display unit 7 displays the display data sent from the dust state notification unit 23 on the display screen 7a.

Next, the operation of the production apparatus 1 will be described focusing on the dust monitoring method of the present embodiment.
FIG. 5 is a flowchart showing a process flow of a floating dust number distribution calculating step, a dust state estimating step, and a dust state notifying step of the dust monitoring method according to the embodiment of the present invention. FIG. 6 is a flowchart showing a part of the process flow of the dust state estimation process of the dust monitoring method according to the embodiment of the present invention. FIGS. 7A and 7B are explanatory diagrams of the principle of the dust state estimation step of the dust monitoring method according to the embodiment of the present invention. FIGS. 8A, 8 </ b> B, 8 </ b> C, 8 </ b> D, and 8 </ b> E are schematic diagrams illustrating numerical examples of dust conditions by the dust monitoring method according to the embodiment of the present invention.

Since the production apparatus 1 is configured as described above, the dust monitoring method of the present embodiment can be performed while performing production work in the work chamber 2.
The dust monitoring method according to the present embodiment performs a measurement operation, a measurement area partitioning step, an atmospheric gas movement amount data acquisition step, and an atmospheric gas movement amount data storage step in advance, and a floating dust number distribution calculation step when performing a production operation. , A dust state estimation step, and a dust state notification step.

First, in the measurement region partitioning step, the work chamber 2 is partitioned into a plurality of measurement regions.
The measurement region is a virtual region, and the size and the number of regions of the measurement region are not particularly limited as long as the air flow rate can be measured at the boundary surface of the measurement region.
For example, you may set the some measurement area | region which divided the inside of the working room 2 equally, and you may set the some measurement area divided | segmented unevenly.
Further, in the dust monitoring method of the present embodiment, the amount of dust generated and the amount of adhesion is estimated for each of the plurality of measurement regions, and the dust situation is monitored. Therefore, the measurement region is a region where dust generation is expected or dust It is preferable to set in accordance with the region where the adsorption of is problematic. For example, it is more useful to monitor the dust by assigning each of the movable region placement area that causes dust generation and the work placement area for which dust adsorption is desired to be prevented.

In this embodiment, the measurement areas 2a to 2d are divided into four measurement areas.
The measurement area 2a is an area where the work robot 13 which is a movable part stays most during the production work.
Further, the measurement area 2c is an area in which the parts 12 that are workpieces are mainly arranged during the production work.

When the measurement region 2 a to 2 d are partitioned, the volume _V 1 of the measurement area _{2a~2d, V 2, V 3,} V 4 are determined. In this step, these numerical values are stored in the storage unit 24 through the input unit 8.
Thus, the measurement region partitioning process is completed.

Next, an atmospheric gas movement amount data acquisition step is performed.
This step is a step of acquiring the air movement amount data F _ij (t _n ) (n = 1,..., N) described above while trying production work.

In this step, first, the velocimeter (not shown) is connected to each boundary of areas 0 to 5, the left inlet 2 g, the right inlet 2 h, the boundary surfaces S _ab , S _ac , S _bd , S _cd , left exhaust. It arrange | positions at the opening 2C and the right exhaust port 2D (Hereinafter, when these are named generically, they may be called boundary surface _Sab etc.).
Next, in the work chamber 2, air is supplied from the FFU 4 under the same conditions as the production work, and the production work is tried.
At this time, the trial production work may be the same work as the regular production work, or may be a simulated production work for obtaining the air movement amount data F _ij (t _n ). In the case of simulated production work, for example, the work that does not affect the time-series change of the air movement amount is changed or omitted, or the part 12 is the same as the regular part 12 but has the same shape and different material. Also good.

Air movement amount data is obtained by placing an anemometer on the boundary surface, measuring the flow velocity of air passing through that location during a production work trial, and multiplying this average flow velocity by the area of the boundary surface to convert it to an average flow rate. To do. In addition, it is preferable to measure the flow velocity at a plurality of points in the boundary surface where the boundary surface is wide or where airflow from both directions is assumed.
The air movement amount data F _ij (t _n ) flowing from the area i to the area j between the times t _n−1 and t _n is _expressed by the following equation (1), _where U _ij (t _n ) is the average air flow rate at the same time. ).

F _ij (t _n ) = U _ij (t _n ) · Δt (1)

This is the end of the atmospheric gas movement amount data acquisition process.
In this embodiment, the air suction amount f per measurement period Δt sucked by the P / M 5 when measuring the number of suspended dust by the P / M 5 is compared with the air blowing amount from the FFU 4 per measurement period Δt. Trace amount. For this reason, it is not necessary to measure the air movement amount data by P / M 5 in the trial of the production work in this process.
However, if the air suction amount f by P / M5 is not negligible with respect to the air blowing amount from the FFU 4, the number of floating dusts by P / M5 is also measured in this step. In this case, since air is sucked into the P / M 5 as in the case of regular production work, net air movement amount data can be acquired.

Next, an atmosphere gas movement amount data storage step is performed.
This step is a step of storing the air movement amount data F _ij (t _n ) in the storage unit 24 of the control unit 6.
For example, the output of the velocimeter is taken into an appropriate data processing personal computer, the calculation for calculating the air movement amount data F _ij (t _n ) is performed based on the above formula (1), and the calculation result is stored in the array. . In this case, the data processing personal computer is connected to the communication port provided in the input unit 8 of the control unit 6, and the air movement amount data F _ij (t _n ) in the personal computer is transferred to the storage unit 24 for storage. Can be made.
In addition, the flow rate calculation unit that acquires flow rate measurement data from a flowmeter connected to the input unit 8 in advance in the control unit 6 and calculates the flow rate, and the air movement amount from the air flow rate calculated by the flow rate calculation unit a ambient gas movement amount calculating section for performing calculation for calculating the data F _{ij (t n),} and stores the air movement amount data F _ij calculated in ambient gas movement amount calculating section _{(t n)} in the storage unit 24 It is good also as a structure.
This is the end of the atmosphere gas movement amount data storage process.

The measurement region partitioning step, the atmospheric gas movement amount data acquisition step, and the atmospheric gas movement amount data storage step described above may be performed at least once before performing certain production operations using the production apparatus 1.
For this reason, when the atmospheric gas movement amount data storage step is completed, the current meter is removed from the work chamber 2. Further, when the sampling tubes 5a to 5d are removed, they are inserted into the suction ports 9a to 9d, respectively.

  Next, the parts required for the production work such as the parts 12 are carried into the work chamber 2, the FFU 4 is operated, and the sequence control of the production work is started by the electrical equipment unit 3. Along with the start of this production work, a floating dust number distribution calculating step, a dust state estimating step, and a dust state notifying step are performed according to the flow shown in FIG.

First, a floating dust number distribution calculating step is performed.
This step is a step of measuring the number of suspended dust for each of the measurement regions 2a to 2d, estimating the total number of suspended dust for each of the measurement regions 2a to 2d, and calculating the time-series suspended dust number distribution. Steps S1 to S4 to be described correspond. In the present embodiment, since the number of suspended dust in the FFU 4 is a very low value and constant, an example in which measurement in time series is not performed will be described. However, when the variation in the number of floating dust in the FFU 4 affects the number of floating dust in the measurement regions 2a to 2d, the time series measurement of the number of floating dust in the FFU 4 may be performed.
In the following description, the measurement areas 2a, 2b, 2c, and 2d may be referred to as areas 1, 2, 3, and 4, respectively, so that the correspondence with the subscripts of the mathematical formula can be easily understood.

In step S 1, at time t = 0, the electrical equipment unit 3 starts sequence control of the production apparatus 1 and sends a control signal for starting production work and measurement by the P / M 5 to the P / M 5 and the control unit 6. Further, the counter n is initialized to n = 0 in the floating dust number distribution calculation unit 21. That is, t ₀ = 0.
P / M5 starts a measurement operation in response to a control signal from electrical component 3, sucks air from measurement regions 2a to 2d through sampling tubes 5a to 5d, and has a particle diameter of 0.5 μm contained in the sucked air. The number of fine particles described above is counted (counted) every preset measurement period Δt.

In step S2, the count value of dust counted at time t _n for each of the measurement areas 2a, 2b, 2c, and 2d by the measurement of P / M5 by the floating dust number distribution calculation unit 21 based on the control signal from the electrical component unit 3 In this step, C _m (t _n ) (where m = 1, 2, 3, 4) is acquired. Here, the subscript m indicates the count value of the areas 1, 2, 3, and 4 (hereinafter, the subscript m of other variables is the same).

Next, in step S _< b _> 3, the floating dust number distribution calculation unit 21 calculates the floating dust number E _m (t _n ) (total floating dust number for each of a plurality of measurement regions) estimated to float in the areas 1 to 4.
In the present embodiment, the floating dust count E _m (t _n ) is calculated by the following equation (2) under the assumption that the concentration of the floating dust count is constant in each area.
Here, the term (-1) in the formula is provided in consideration of the removal of dust contained in the air sucked by the P / M 5 from the area m.

Next, in step S _< b _> 4, the floating dust number distribution calculation unit 21 sends the floating dust number E _m (t _n ) to the storage unit 24 and stores it in an array prepared in the storage unit 24. Thereby, the number of floating dusts E _m (t _n ) is stored.
Thus, since the number of floating dusts E _m (t _n ) in the areas 1 to 4 at the time t _n is estimated, the floating dust number distribution for each area in the work chamber 2 is calculated. That, t = t Dust number distribution calculating step of _n is completed.

Next, in step S5, it is determined whether the counter n is 0 or not.
If the counter n is 0, the process proceeds to step S6.
If the counter n is not 0, the process proceeds to step S9.

In step S6, a dust state notification process is performed.
This step is a step of notifying the dust state based on the amount of dust generated and the amount of adhesion for each of the measurement regions 2a to 2d.
However, in the case of n = 0, since it is an initial state, the generation amount and the adhesion amount of dust are zero. For this reason, the dust state notification unit 23 generates display data using the floating dust count E _m (t ₀ ) calculated by the floating dust count distribution calculation unit 21 and sends the display data to the display unit 7.
Thereby, the dust state notification process in the case of n = 0 is completed.
The dust state notifying step when n is 1 or more will be described after the dust state estimating step (steps S9 to S11) is described.
In either case, when step S6 ends, the process proceeds to step S7.

Next, in step S7, the counter n is updated by n = n + 1 in the floating dust number distribution calculation unit 21.
Next, in step S8, the control unit 6 determines whether or not an interrupt generated by the electrical component unit 3 has occurred through an operation unit (not shown) of the production apparatus 1. Examples of the interrupt generated by the electrical component unit 3 include an interrupt that accompanies the end of the production work, or an interrupt that the operator decides to interrupt the work depending on the dust situation.
If an interrupt occurs, the operation of the control unit 6 is terminated.

If no interrupt has occurred, the process proceeds to step S1 and steps S1 to S6 are repeated.
For example, as a result of performing Steps S1 to S4 with n = 1, the count value C _m (t ₁ ) is acquired in Step S2, the number of floating dust E _m (t ₁ ) is calculated in Step S3, and in Step S4 The floating dust count E _m (t ₁ ) is stored in the storage unit 24. Here, t ₁ = t ₀ + Δt. In the present embodiment, t _n = n · Δt.
Next, in step S5, since n is 1 or more, steps S9 to S11 constituting the dust state estimation step are performed during step S6.

The dust state estimation step uses the air movement amount data F _ij (t _n ) stored in the storage unit 24 in the atmospheric gas movement amount data step and uses the time series floating dust count calculated in the floating dust number distribution calculation step. This is a step of calculating the movement balance of dust with respect to the measurement regions 2a to 2d from the distribution and estimating the amount of dust generated and the amount of adhesion in the measurement regions 2a to 2d.
In the present embodiment, the dust state estimation unit 22 sequentially performs steps S9 to S11 described below.

First, in step S9, the dust state estimation unit 22 uses the air movement amount data F _ij (t _n ) and the number of floating dusts E _m (t _n-1 ) to estimate the number of floating dusts at time t _n . E ′ _m (t _n ) is calculated. The predicted value E ′ _m (t _n ) of the floating dust is a predicted value of the number of floating dust when it is assumed that only the movement of the floating dust occurs between the areas from the time t _n−1 to the time t _n. is there. In other words, this is a predicted value of the number of floating dust when no dust generation occurs in the area m and no dust adheres to the members in the area m. Here, it is assumed that the floating dust will not disappear.
For details of this step, steps S20 to S22 are sequentially performed as shown in FIG.

First, in step S20, the dust state estimation unit 22 reads the air movement amount data F _ij (t _n ) stored in the storage unit 24.
Next, in step S _< b _> 21, the dust state estimation unit 22 reads the number of floating dust E _m (t _n−1 ) stored in the storage unit 24.

The next step S22 is a step in which the dust state estimation unit 22 calculates the predicted number of floating dust E ′ _m (t _n ).
Since the floating dust number distribution calculated in the floating dust number distribution calculating step is based on the count value C _m (t _n ) measured by P / M5, the actual distribution of the floating dust number at each time t _n is shown. Yes.
However, since dust also moves with the movement of air in the work chamber 2, for example, an area where dust is generated or an area where dust is attached is determined only by information on the distribution of the number of floating dust. It ’s difficult.
The present inventor conceived of estimating the dust situation including generation and adhesion of dust in consideration of air movement in the measurement regions 2a to 2d in addition to the number of suspended dust in each of the measurement regions 2a to 2d. The present invention has been reached.

First, the estimation principle of the dust situation in this step will be described.
Dust may move due to free fall depending on the specific gravity and size, but it is considered that dust of about 10 μm or less distributed in the working chamber 2 with high cleanliness moves almost the same as the air in the working chamber 2. It is done.
The number of dust that moves beyond the boundary surface S _ab or the like with the movement of air is called the number of moving dust, and the number of moving dust that floated in area i at time t _n−1 and moved to area j at time t _n is M _ij. It will be expressed as (t _n ). Here, M ₅₁ (t _n ) and M ₅₂ (t _n ) are the numbers of moving dust moving to the areas 1 and 2 through the left inlet 2g and the right inlet 2h, respectively.
Moving dust number _M ij _{(t n),} since become dust number that moves with the area movement amount _F ij _{(t n),} using the ratio of the area displacement amount _F ij to volume _{V i (t n)} of the areas i Is expressed as the following equation (3).
However, in the following formula (3), subscripts i and j take values of 0 to 5, and combinations of subscripts ij are 12, 21, 13, 31, 24, 42, 34, 43, 30, 40, 51 , 52.
In the following formula (3), when i = 5, E ₅ (t _n−1 ) and V ₅ indicate the number of floating dust in the FFU 4 and the volume of the FFU 4, respectively. In this embodiment, since the number of floating dust in the FFU 4 is constant regardless of time, E ₅ (t _n−1 ) / V ₅ representing the dust concentration takes a constant value ρ regardless of t _n−1. . In the case of measuring the time-series data of the number of floating dust in FFU4 may be replaced E 5 a _{(t n-1)} in the time-series data.

For this reason, the predicted number of floating dust E ′ _m (t _n ) is obtained as the following equations (8a) to (8d) by calculating the movement balance of each of the areas 1 to 4.

  Thus, step S22 is completed and step S9 is completed.

Next, in step S _< b _> 10 illustrated in FIG. 5, the dust state estimation unit 22 reads the number of floating dusts E _m (t _n ) from the storage unit 24.

Next, in step S11, the predicted number of floating dust E ′ _m (t _n ) calculated in step S9 is compared with the number of floating dust E _m (t _n ), and the number of generated dust H _m (t _n ). And the number of adhering dusts L _m (t _n ) are calculated.
Here, how to calculate the generated dust count H _m (t _n ) and the adhering dust count L _m (t _n ) will be described using an example of the measurement region 2d (area 4).
FIGS. 7A and 7B schematically show dust conditions at times t _n−1 and t _n in the area 4, respectively.
As shown in FIG. 7A, at the time t _n−1 , the dust p floats in the area 4 by E ₄ (t _n−1 ).
On the other hand, the increase / decrease in the number of floating dust that may occur in the area 4 by the time t _n is that if no dust is generated and does not adhere in the area 4, it moves to the adjacent areas 2, 3, 0. Decrease in the number of dust (M ₄₂ (t _n ), M ₄₃ (t _n ), M ₄₀ (t _n )) and an increase in the number of dust due to movement from the adjacent areas 2 and 3 (M ₂₄ (t _n )) , M ₃₄ (t _n )), E ₄ (t _n ) matches E ′ ₄ (t _n ).
Therefore, in the present embodiment, the difference between E ₄ (t _n ) and E ′ ₄ (t _n ) increases due to the generation of dust in the area 4 (H ₄ (t _n )), or the difference in the area 4 A reduction (L ₄ (t _n )) due to dust adhering to the member is estimated.
According to experience, the occurrence of dust often appears momentarily as a sudden increase, and the adhesion of dust tends to appear after a certain time lag, so that it is difficult to overlap on the time axis. Therefore, there is no operational problem with this estimation.
In the present embodiment, even area 1-3, and the same idea, the floating dust number _E m _{(t n)} and the number of generated dust in the area m the difference between the floating dust number expected value _{E 'm (t n) H} m (T _n ) or the number of adhering dust L _m (t _n ), the generated dust number H _m (t _n ) or the adhering dust number L _m (t _n ) according to the following equations (9a) and (9b) Is calculated.

The dust state estimation unit 22 sends the calculated generated dust count H _m (t _n ) or the attached dust count L _m (t _n ) to the dust status notification unit 23 together with the floating dust count E _m (t _n ).
Above, step S11 and a dust condition estimation process are complete | finished.

Next, the dust state notifying process in step S6 when n ≧ 1 will be described.
The dust status notification unit 23 displays the generated dust count H _m (t _n ) or the adhering dust count L _m (t _n ) sent from the dust status estimation unit 22 by using the floating dust count E _m (t _n ). Data is generated and sent to the display unit 7.
Thereby, in this embodiment, the dust state including the generated dust count H _m (t _n ), the attached dust count L _m (t _n ), and the floating dust count E _m (t _n ) is displayed on the display unit 7. Therefore the operator of the production apparatus 1 can know the dust situation at time t _n. For example, it is possible to know the measurement region where dust generation is estimated to occur and the degree of occurrence thereof, and the measurement region where dust adhesion is estimated to occur and the degree of occurrence thereof. Therefore, the operator can determine whether there is a possibility of affecting production from this dust situation.
With the above, step S6 and the dust state notification process when n ≧ 1 are completed.
Next, by performing steps S7 and S8, the floating dust number distribution calculating step, the dust state estimating step, and the dust state notifying step are repeated every measurement cycle Δt in the same manner as described above. Dust monitoring can be performed in substantially real time.

Here, the effect | action of the dust monitoring method of this embodiment is demonstrated based on the numerical example shown to Fig.8 (a)-(e). This numerical example is shown only for the case of t = t ₀ , t ₁ , t ₂ for simplicity. 8A to 8D represent the measurement regions 2a, 2b, 2c, and 2d (areas 1, 2, 3, and 4), and FIG. 8E illustrates the display screen of the display unit 7. The example of a display in 7a is shown.

First, the measurement region partitioning process described above is performed. In this numerical example, it is assumed that the volume V _m is a constant value V and the air suction amount f is also constant in each area m. Specifically, it is assumed that {(V _m / f) −1} = 100.
Next, the atmospheric gas movement amount data acquisition step described above is performed to acquire the air movement amount F _ij (t), the atmospheric gas movement amount data storage step is performed, and the air movement amount F _ij is stored in the storage unit 24. Store (t).
In the present embodiment, the blowout amount of the FFU 4 and the exhaust amount from the left exhaust port 2C and the right exhaust port 2D are constant throughout the production work. Therefore, F ₅₁ (t), F ₅₂ (t), F ₃₀ (t), and F ₄₀ (t) each take a constant value. For example, when expressed using the volume V of each area, the following formulas (10a) to (10d) were obtained (see FIG. 8 (c) describing the percentage with respect to V).

F ₅₁ (t ₁ ) = F ₅₁ (t ₂ ) = 0.1 × V (10a)
F ₅₂ (t ₁ ) = F ₅₂ (t ₂ ) = 0.1 × V (10b)
F ₃₀ (t ₁ ) = F ₃₀ (t ₂ ) = 0.1 × V (10c)
F ₄₀ (t ₁ ) = F ₄₀ (t ₂ ) = 0.1 × V (10d)

On the other hand, the air movement amount F _ij (t) between the boundary surfaces of the areas 1 to 4 changes with time according to the operation of the work robot 13 and the movement of the parts 12 in the production work. For this reason, a turbulent flow is generated in the work chamber 2.
For example, at times t _{0 to} t ₁ , the amount of air movement F _ij (t) between the boundary surfaces of areas 1 to 4 is as shown in the following equations (11a) to (11c) (see FIG. 8C). ,). Note that the air movement amount F _ij (t) not described is 0 (the same _applies hereinafter).

F ₁₂ (t ₁ ) = 0.1 × V (11a)
F ₂₄ (t ₁ ) = 0.2 × V (11b)
F ₄₃ (t ₁ ) = 0.1 × V (11c)

  The flow of air that sequentially moves in the areas 1, 2, 4, and 3 bypassing the boundary surface of the areas 1 and 3 is affected by the operation of the work robot 13 disposed between the areas 1 and 3, for example. It is thought that this occurred because the air movement stopped.

Further, at times t _{1 to} t ₂ , the amount of air movement F _ij (t) between the boundary surfaces of areas 1 to 4 was as shown in the following equations (12a) to (12c) (see FIG. 8C). ).

F ₁₃ (t ₂ ) = 0.2 × V (12a)
F ₃₁ (t ₂ ) = 0.1 × V (12b)
F ₂₄ (t ₂ ) = 0.1 × V (12c)

  Such an airflow is considered to be generated by stopping the air movement between the areas 2 and 4 as a result of the vertical airflow being induced between the areas 1 and 3 in accordance with the operation of the work robot 13. It is done.

Next, steps S1 and S2 in FIG. 5 are performed. As a result, the count value C _m (t ₀ ) at time t ₀ was as shown in the following formulas (13a) to (13d) (see FIG. 8A).

C ₁ (t ₀ ) = 40 (13a)
C ₂ (t ₀ ) = 30 (13b)
C ₃ (t ₀ ) = 10 (13c)
C ₄ (t ₀ ) = 20 (13d)

The floating dust count E _m (t ₀ ) calculated in step S3 was as shown in the following equations (14a) to (14d) (see FIG. 8B).

E ₁ (t ₀ ) = 4000 (14a)
E ₂ (t ₀ ) = 3000 (14b)
E ₃ (t ₀ ) = 1000 (14c)
E ₄ (t ₀ ) = 2000 (14d)

Next, when steps S3 to S5 are performed, since n = 0, steps S6 to S8 are performed and the counter n is updated to n = 1. In step S6, the suspended dust count E _m (t ₀ ) is displayed on the display screen 7a. For example, as shown in FIG. 8E, it is displayed as numerical data in a rectangle corresponding to the measurement regions 2a to 2d.
Then, at time _{t 1} after the measuring period Delta] t, step S1~S4 is executed. The floating dust count E _m (t ₁ ) calculated in step S3 was as shown in the following formulas (15a) to (15d) (see FIG. 8B).

E ₁ (t ₁ ) = 5000 (15a)
E ₂ (t ₁ ) = 2800 (15b)
E ₃ (t ₁ ) = 1100 (15c)
E ₄ (t ₁ ) = 2200 (15d)

Next, in step S5, since n = 1, the process proceeds to step S9, and steps S20 to S22 in FIG. 6 are performed to calculate the floating dust number predicted value E ′ _m (t ₁ ). That is, the numerical values of the above formulas (14a) to (14d), (10a) to (10d), (11a) to (11c), (12a) to (12c) are changed to the above formulas (3) to (7), ( 8a) to (8d) are substituted. However, it is assumed that the air flowing from the FFU 4 does not include dust, and ρ = 0.
As a result, the predicted number of floating dust E ′ _m (t ₁ ) was as shown in the following equations (16a) to (16d) (see FIG. 8B).

E ′ ₁ (t ₁ ) = 3600 (16a)
E ′ ₂ (t ₁ ) = 2800 (16b)
E ′ ₃ (t ₁ ) = 1100 (16c)
E ′ ₄ (t ₁ ) = 2200 (16d)

Next, after step S10 of FIG. 5 is performed, step S11 is performed.
When the above formulas (15a) to (15d) and the above formulas (16a) to (16d) are compared, in area 1, E ₁ (t ₁ )> E ′ ₁ (t ₁ ), so that the above formula (9a ), And in areas 2 to 4, since E _k (t ₁ ) = E ′ _k (t ₁ ) (where k = 2, 3, 4), generation and adhesion of dust is Presumed not. Therefore, the generated dust number H _m (t ₁ ) and the adhering dust number L _m (t ₁ ) are calculated as in the following equations (17a) to (17c).

H ₁ (t ₁ ) = 5000-3600 = 1400 (17a)
H _k (t ₁ ) = 0 (k = 2, 3, 4) (17b)
L _m (t ₁ ) = 0 (m = 1, 2, 3, 4) (17c)

Next, in step S6, the number of floating dusts E _m (t ₁ ) and the number of generated dusts H _m (t based on the above formulas (15a) to (15d) and formulas (17a) to (17c) as dust conditions. ₁ ) The number of adhered dust L _m (t ₁ ) is displayed on the display screen 7 a of the display unit 7.
For example, as shown in FIG. 8E, it is displayed as numerical data in a rectangle corresponding to the measurement regions 2a to 2d.
Thus, the operator of the production apparatus 1, the time t ₁ the current measurement region attached at any of the measurement region generation has occurred in the dust in 2a does not occur, knowing estimated that the results are obtained with Can do.
For this reason, the operator, or to guess the cause of the dust generated from work from time t ₀ in the measurement area 2a of t _1, taking into account the impact on the production it is possible to think or how to support.

If only by the change in the number of airborne dust regardless of the dust monitoring method of the present embodiment, occurrence of dust, when estimating the deposition, for example, between times t ₀ ~t _1, increase in the number of dust measurement area 2a in 1000 Therefore, the generation of dust is underestimated as compared to the present embodiment.
Also, in the measurement areas 2c and 2d, the number of floating dusts is increased by 100 and 200, respectively. Therefore, it is assumed that at least one of the measurement areas 2a, 2c, and 2d has a cause of dust generation. This hinders the pursuit of prompt and accurate cause.
On the other hand, in the present embodiment, it is possible to immediately cope with the cause in the measurement region 2a without underestimating the generation of dust in the measurement region 2a.

Here, if the operator looks at the situation because the number of adhered dust particles is estimated to be 0, for example, an interruption for stopping the production apparatus 1 does not occur, so the process returns to step S1 in FIG. The same is repeated.
As a result, at time t ₂ , the number of suspended dust E _m (t ₂ ), the predicted number of suspended dust E ′ _m (t ₂ ), the number of generated dust H _m (t ₂ ), and the number of adhered dust L _m (t _2). ) Is calculated. Further, as shown in FIG. 8E, the numerical value displayed on the display screen 7a is updated.
At time t ₂ , the generated dust count H _m (t ₂ ) and the adhering dust count L _m (t ₂ ) are H ₁ (t ₂ ) = 10, H ₂ (t ₂ ) = 20, and L ₃ (t ₂ ). = 10, L ₄ (t ₂ ) = 460, others are estimated to be 0.

As a result, the operator knows that the number of generated dusts is greatly reduced, and the amount of dust attached is very slight in the measurement region 2c and slightly more in the measurement region 2d.
Therefore, for example, between time t ₁ ~t _2, when the component 12 is a workpiece is in the measurement region 2c, the influence of dust adhering, it is determined that less, to make a decision such as to continue the production work Can do.
Any estimation result of the time t _2, the order in the present embodiment considers the air movement amount, simply different developmental dust number and the floating dust number of changes in each measurement region, that number of adhered dust is estimated I understand.
As described above, in the present embodiment, since the air movement amount data is acquired in advance for each measurement period Δt in synchronization with the measurement of the number of suspended dust, the airflow changes according to the production work as in this numerical example. Thus, when the air movement amount changes with time, it is possible to perform a more reliable estimation following the change in the airflow.

According to the dust monitoring method of the present embodiment, the work chamber 2 is partitioned into measurement areas 2a to 2d, and the left inlet 2g, the right inlet 2h, the left exhaust port 2C, the right exhaust port 2D, And the air movement amount data on the boundary surfaces S _ab , S _bc , S _ac , S _cd , and the floating dust number distribution and the air movement amount data obtained by measuring the number of floating dust during the production operation by the production apparatus 1, From the above, the dust situation is estimated.
Therefore, the measured value of the number of suspended dust for each of the measurement areas 2a to 2d can be monitored in substantially real time for each measurement period Δt of the number of suspended dust by P / M5, and in synchronization with this, the measurement areas 2a to 2d are monitored. The number of generated dust and the number of adhering dust every 2d can be monitored. Therefore, it is possible to better monitor the dust situation in the working chamber 2 as compared with the case where only the increase / decrease in the number of floating dust in each measurement region is monitored without considering the air movement amount.
In order to measure the number of airborne dust in consideration of the amount of air movement, it may be possible to arrange more suction points 5e on the boundary surface _Sab of the measurement area corresponding to the air flow path and provide more measurement points. More channels of P / M5 are required, and the calculation processing of measured values is complicated. In addition, as a result of a large number of sampling tubes being inserted into the work chamber 2, production work in the work chamber 2 is hindered.
However, according to the present embodiment, the air movement amount data is acquired in advance by trying the production work, so that it is possible to estimate a likely dust situation even with a simpler configuration. Moreover, since the space in the work chamber 2 can be widely used, production work can be performed smoothly, and the work chamber 2 can be downsized.

[First Modification]
Next, a dust measurement method according to a first modification of the present embodiment will be described.
FIG. 9 is a schematic perspective view showing a main part of a production apparatus for explaining a first modification of the dust monitoring method according to the embodiment of the present invention.

In the description of the above embodiment, the example in the case where the work chamber 2 is partitioned into four measurement regions 2a to 2d has been described. However, the number of partitions can be changed as appropriate.
For example, FIG. 9 shows a configuration of a main part of the production apparatus 1A that can divide the work chamber 2 into eight.
The production apparatus 1A includes suction ports 9A, 9B, 9C, and 9D having the same configuration as the suction ports 9a to 9d at positions facing the suction ports 9a to 9d in the rear side plate 2B of the production apparatus 1 of the above embodiment. And a sampling tube (not shown) can be inserted therein. Further, although not particularly illustrated, the production apparatus 1A includes an 8-channel P / M instead of the 4-channel P / M 5 of the above embodiment.

  In the measurement area dividing step of this modification, the measurement areas 2a, 2b, 2c, and 2d of the above embodiment are divided into eight equal parts by dividing each of the rear side plate 2B and the front side plate 2F into two equal parts. . As a result, the measurement region 2a is divided into two regions, the measurement regions 20a and 21a, from the front plate 2F side. Similarly, the measurement region 2b is the measurement regions 20b and 21b, and the measurement region 2c is the measurement regions 20c and 21c. The measurement area 2d is divided into measurement areas 20d and 21d, respectively.

  According to such a production apparatus 1A, in the atmospheric gas movement amount data acquisition step, an unillustrated inlet corresponding to the measurement regions 20a, 21a, 20b, and 21b, a left exhaust port 2C, and a right exhaust port 2D (not illustrated). ) And a flow velocity measurement by arranging an anemometer (not shown) on each boundary surface between the measurement regions 20a to 20d and 21a to 21d, and the dust situation can be monitored in the same manner as in the above embodiment. .

[Second Modification]
Next, a production apparatus that performs the dust measurement method according to the second modification of the present embodiment will be described.
FIG. 10 is a schematic front view showing the configuration of the main part of the production apparatus according to the second modification of the embodiment of the present invention.

  As shown in FIG. 10, the production apparatus 1B according to the present modification includes a central working chamber 32, a left working chamber 33, and a right working chamber 34 instead of the working chamber 2 of the above embodiment. The interior is divided into six measurement areas so that the dust monitoring method of this embodiment can be performed. Further, instead of P / M5, a 6-channel P / M (not shown) capable of measuring the number of suspended dust in the six measurement regions is provided. Hereinafter, a description will be given focusing on differences from the above embodiment.

The central work chamber 32 includes a front plate 32F, a left plate 32L, and a right plate 32R instead of the front plate 2F, the left plate 2L, and the right plate 2R of the work chamber 2.
The front plate 32F is obtained by adding a central exhaust port 32C, which is a horizontally long rectangular opening, to the lower end of the front plate 2F.
The left side plate 32L and the right side plate 32R are provided with opening / closing doors 35 and 36 whose opening / closing is controlled by the electrical component 3 on the lower half of the left side plate 2L and the right side plate 2R, respectively.
For this reason, the central work chamber 32 has a rectangular parallelepiped outer shape in which only the left exhaust port 32C is opened when the open / close doors 35 and 36 are closed, and a work space having the same volume as the work chamber 2 is provided therein. Is formed.
In the present modification, the inside of the central working chamber 32 is partitioned into measurement regions 2a to 2d as in the above embodiment.

The left work chamber 33 is disposed adjacent to the side of the left side plate 32L with the open / close door 35 interposed therebetween, and the internal volume of the left work chamber 33 is the same as that of the measurement region 2c by the open / close door 35, the housing 33A, and the floor surface portion 2Y. It is surrounded by a rectangular parallelepiped.
A left exhaust port 2 </ b> C is provided at a lower end portion on the side facing the open / close door 35 in the housing 33 </ b> A. An FFU 4L having the same configuration as that of the FFU 4 is installed on the upper portion of the housing 33A, and clean air supplied from the FFU 4L is introduced through an inflow port (not shown).
In this modification, the inside of the left working chamber 33 is partitioned into one measurement region 33a. For this reason, the open / close door 35 forms a boundary surface between the measurement regions 33a and 2c.

The right working chamber 34 is disposed adjacent to the side of the right side plate 32R across the opening / closing door 36, and the internal volume of the right working chamber 34 is the same as that of the measurement region 2d by the opening / closing door 36, the housing 34A, and the floor surface portion 2Y. It is surrounded by a rectangular parallelepiped.
A right exhaust port 2 </ b> D is provided at a lower end portion on the side facing the open / close door 36 in the housing 34 </ b> A. An FFU 4R having the same configuration as that of the FFU 4 is installed on the upper part of the housing 34A, and clean air supplied from the FFU 4R is introduced through an inflow port (not shown).
In the present modification, the inside of the right working chamber 34 is partitioned into one measurement region 34a. For this reason, the open / close door 36 constitutes a boundary surface between the measurement regions 34a and 2d.

Thus, in the production apparatus 1B, the left working chamber 33, the central working chamber 32, and the right working chamber 34 are adjacent to each other in this order, and when the opening and closing doors 35 and 36 are opened, these interiors communicate with each other to form one working chamber. be able to. In addition, by opening and closing the opening and closing doors 35 and 36 as appropriate, a maximum of three independent working chambers that do not move air between each other can be formed.
For this reason, for example, the left work chamber 33 is used as a work standby chamber that also serves as a work carry-in section, the central work chamber 32 is used as a work chamber that performs main production work on the work, and the right work chamber 34 is used as a work for which production work has been completed. It is possible to provide a work waiting room that also serves as an unloading unit.
At that time, the left working chamber 33, the central working chamber 32, and the right working chamber 34 are provided with FFUs 4L, 4 and 4R, respectively, and can be kept in a clean atmosphere independently. Therefore, the opening and closing doors 35 and 36 are appropriately opened and closed. By controlling, continuous production work can be performed on a plurality of workpieces without reducing the cleanliness in the central working chamber 32 accompanying the loading and unloading of workpieces.

In the dust monitoring method of this modification, the inside of the left working chamber 33 and the right working chamber 34 is set as measurement areas 33a and 34a, respectively, and the inside of the central working chamber 32 is divided into measurement areas 2a to 2d. Is divided into six measurement areas to perform dust monitoring.
Compared with the above embodiment, the present modification is that the measurement area is increased by two, the opening and closing doors 35 and 36 are added as boundary surfaces, and the left exhaust port 32C is provided at the lower end of the front side plate 32F as an exhaust port. The only difference is the addition, and the dust situation can be monitored in substantially the same manner as in the above embodiment.

In the production apparatus 1 </ b> B, a transiently large amount of air movement between the left working chamber 33, the right working chamber 34, and the central working chamber 32, which easily contains external dust, when the opening / closing doors 35 and 36 are opened. May occur and the dust situation in the working chamber may change suddenly.
Such a transient phenomenon includes turbulent flow, which makes it difficult to predict airflow and dust movement. For this reason, in such a dust monitoring method that does not take into account the amount of air movement, it is difficult to identify a dust generation source and predict changes in the dust situation.
On the other hand, in this modification, such a change in the amount of air movement is acquired in advance by trial of production work, so the dust situation can be accurately estimated and notified from the distribution of the number of floating dust. For this reason, it is possible to better monitor the dust situation.

In the above description, the dust monitoring method of the present invention is described as an example in the case of applying to the working chamber of the production apparatus. However, the working chamber is not limited to the working chamber of the production apparatus. For example, it may be a working room formed inside a clean room or a clean booth.
In addition, the work performed in the work chamber is not limited to the production work as long as the work includes an operation that may generate dust or move by the movable body. The work may be a work performed by a mechanical device or a work performed manually.

In the above description, the example of displaying the number of floating dust, the number of generated dust, and the number of adhering dust, which is the dust status, is displayed on the display unit and notified, but the notification of the dust status in the dust status notification process is described. Is not limited to numerical notifications.
For example, when an allowable value is provided for the generation and adhesion of dust, a determination as to whether the allowable value is exceeded or the allowable value is exceeded, a warning message, or the like may be notified as the dust status.
Furthermore, a control signal for an operation to be performed by the production apparatus may be automatically transmitted together with the determination of the dust situation. For example, when the number of generated dust exceeds an allowable value, a warning signal may be sent and a control signal for stopping the operation of the production apparatus 1 may be sent to the electrical equipment section 3.

  In the above description, the example in which the measurement cycle Δt of the dust measuring device is constant has been described. However, the measurement cycle Δt may be changed during the monitoring period. For example, the measurement period Δt may be lengthened during a period in which there is no problem in dust monitoring, such as a period in which the dust situation is difficult to change or a period in which a steady flow is likely to be formed, depending on the content of the work.

In the above description, the floating dust number distribution calculating step, the dust state estimating step, and the dust state notifying step are described in an example in which they are performed in synchronization with all measurements of the floating dust number. When the measurement cycle of the number is short or when it is known that the change in the number of suspended dust is small compared to the measurement cycle, the timing of performing the suspended dust number distribution calculating step, the dust state estimating step, and the dust state notifying step May be synchronized so as to match the timing of an integral multiple of the measurement period.
In addition, when it is known that the change in the dust situation is not severe, the timing to notify the dust situation is strictly synchronized with the measurement timing of the suspended dust count if there is a temporal relationship. It does not have to be.

  Further, in the above description, an example in which the atmospheric gas is air (air) has been described. However, depending on the necessity of the work, a gas other than air, for example, an inert gas such as Ar gas or nitrogen gas may be used. May be.

  Moreover, all the components described in the above embodiment and each modification can be implemented by appropriately combining or deleting within the scope of the technical idea of the present invention.

1, 1A, 1B Production equipment 2 Work chambers 2a, 2b, 2c, 2d, 20a, 20b, 20c, 20d, 21a, 21b, 21c, 21d, 33a, 34a Measurement area 2g Left inlet (inlet)
2h Right inlet (inlet)
2C Left exhaust (exhaust)
2D Right exhaust port (exhaust port)
3 Electric parts 4, 4L, 4R Fan filter unit (FFU)
5 Particle Monitor (P / M, dust measuring device)
5a, 5b, 5c, 5d Sampling tube 6 Control unit 7 Display unit 7a Display screen 12 Parts 13 Work robot 14, 15 Single-axis stage 21 Dust count distribution calculation unit 22 Dust status estimation unit 23 Dust status notification unit 24 Storage unit ( Atmospheric gas transfer data storage unit)
32 Central work room (work room)
33 Left work room (work room)
34 Right work room (work room)
E _m , E ₁ , E ₂ , E ₃ , E ₄ Number of suspended dust (total number of suspended dust per multiple measurement areas)
E ′ _m Predicted number of floating dust f Air suction amount F _ij , F ₅₁ , F ₅₂ , F ₁₂ , F ₂₁ , F ₁₃ , F ₃₁ , F ₂₄ , F ₄₂ , F ₃₄ , F ₄₃ , F ₃₀ , F ₄₀ Air movement amount data H _m , H ₁ , H ₂ Number of generated dust (Dust generation amount)
L _m , L ₁ , L ₂ Number of attached dust (amount of dust attached)
S _ab , S _ac , S _bd , S _cd interface

Claims (3)

A dust monitoring method when performing a preset operation in a working chamber supplied with a clean atmospheric gas,
A measurement area dividing step for dividing the working chamber into a plurality of measurement areas;
An atmosphere for acquiring atmosphere gas movement amount data, which is time series data of the amount of movement of the atmosphere gas at each boundary surface between the plurality of measurement regions, at the inlet, the exhaust port, and the plurality of measurement regions in the work chamber while trying the work. Gas transfer data acquisition process;
An atmospheric gas movement amount data storage step for storing the atmospheric gas movement amount data;
After performing in advance,
When performing the above work,
Measuring the number of suspended dust for each of the plurality of measurement areas, estimating the total number of suspended dust for each of the plurality of measurement areas, and calculating the number of suspended dust numbers in a time series;
Using the atmospheric gas movement amount data stored in the atmospheric gas movement amount data step, the movement balance of dust with respect to the plurality of measurement regions is calculated from the time-series floating dust number distribution, and the plurality of measurement regions A dust condition estimation step for estimating the amount of dust generated and the amount of adhesion;
A dust status notification step of notifying the dust status based on the amount of dust generated and the amount of adhesion;
Dust monitoring method characterized by performing. 2. The dust monitoring method according to claim 1, wherein the floating dust number distribution calculating step, the dust state estimating step, and the dust state notifying step are performed in synchronization with the measurement of the floating dust number. A production apparatus for performing a preset operation in a working chamber supplied with a clean atmospheric gas,
When the work chamber is divided into a plurality of measurement areas and the work is tried in advance, the amount of movement of the atmospheric gas at each interface between the plurality of measurement areas, the inlet and the exhaust port in the work chamber, An atmospheric gas movement amount data storage unit for storing atmospheric gas movement amount data acquired as time-series data;
A dust measuring device for measuring the number of suspended dust for each of the plurality of measurement regions;
Based on the number of floating dust by the dust measuring device, estimating the total number of floating dust for each of the plurality of measurement areas, to calculate a time-series floating dust number distribution calculating unit,
Using the atmosphere gas movement amount data stored in the atmosphere gas movement amount data storage unit, the dust movement balance of the plurality of measurement areas is calculated from the time-series floating dust number distribution, and the plurality of measurement areas is calculated. A dust state estimation unit for estimating the amount of dust generated and attached in
A dust status notification unit for notifying the dust status based on the amount of dust generated and the amount of adhesion;
A production apparatus comprising:

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