JP2012252779A - Heating body, heating method using the same and heating apparatus with heating body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a heating body which is processed easily and available at a low cost, and to provide a heating method using the heating body, and a heating apparatus with the heating body.SOLUTION: A heating body 3 is formed of ceramic 3a and carbon 3b. The carbon 3b absorbs microwaves better than silicon carbide, has a sufficient heat resistant temperature, and is optimum as a heating body for microwave. Meanwhile, the ceramic 3a is heat resistant, has excellent wear resistance, corrosion resistance, and the like, and conducts heat well. Furthermore, the ceramic 3a is processed easily, produced at a low cost when compared with silicon carbide, and is available easily. When the heating body 3 formed of ceramic 3a and carbon 3b is used in place of a conventional heating body formed only of silicon carbide, a heating body 3 that is processed easily and available at a low cost can be materialized.

Description

  The present invention relates to a heating body used for microwave heating, a heating method using the heating body, and a heating apparatus including the heating body.

  In recent years, microwave heating applications have become widespread. Especially, the microwave heating in the state which covered the heat-processing thing with the heat insulation raw material and prevented heat dissipation is efficient, and is used to high temperature (for example, refer patent document 1).

  The characteristics of the heating element used for such a purpose are that it is necessary to efficiently absorb microwaves from a relatively low temperature to a high temperature, and to convert the microwaves to heat. (SiC) is conceivable (see the susceptor of Patent Document 1).

Special table 2008-535172 gazette

  However, as a heating body for heating applications, design freedom, low cost, life resistance, and the like are required, and those made of silicon carbide have a very high hardness and are difficult to process. Therefore, the cost is very high.

  The present invention has been made in view of such circumstances, and provides a heating element that is easy to process, easily available at low cost, a heating method using the heating element, and a heating device including the heating element. The purpose is to do.

In order to achieve such an object, the present invention has the following configuration.
That is, the heating body according to the present invention is a heating body used for microwave heating, and the heating body is formed of ceramic or quartz and carbon or a carbon compound.

  [Operation / Effect] According to the heating body of the present invention, the heating body is formed of ceramic or quartz and carbon or a carbon compound. Depending on the size, carbon (for example, carbon powder, foamed carbon material, sponge-like processed material using carbon, carbon fiber, carbon felt) absorbs microwaves better than silicon carbide and has a heat-resistant temperature. Is sufficient, and is optimal as a microwave heating element. In the case of a carbon compound, the same effect as that of carbon can be obtained. On the other hand, ceramic and quartz have heat resistance, excellent wear resistance, corrosion resistance, etc., and good heat conduction. Ceramics and quartz are easy in processability, cost is lower than that of silicon carbide, and are easily available. Therefore, instead of the conventional heating body formed only of silicon carbide, the heating body formed of ceramic or quartz and carbon or carbon compound is easy to process, low cost and easy to obtain. A simple heating element can be realized.

  The heating method according to the present invention is a heating method using the heating body according to the present invention, and is characterized in that the microwave heating is performed using the heating body.

  [Operation / Effect] According to the heating method of the present invention, by performing microwave heating using the heating body of the present invention, microwaves are efficiently absorbed, heat resistant, wear resistant, Microwave heating can be performed using a heating body that is excellent in corrosivity and heat conduction.

  In the heating method according to the present invention, an example of an object to be heated is an object that transmits without absorbing microwaves. If the object to be heated is an object that absorbs microwaves, microwave heating can be performed without using a heating object, but if the object to be heated is an object that transmits without absorbing microwaves, In this case, microwave heating is performed in a state where the heating body is used. Therefore, even if an object that does not absorb microwaves and passes through is an object to be heated, microwave heating can be performed using the heating body according to the present invention.

  Moreover, there exists powder as an example of a heating target object. Although depending on the substance forming the powder and the particle size of the powder, in the case of a powder, it often passes through without absorbing microwaves, so it is often difficult to heat (when heating is difficult). Even if the hardly heatable powder is an object to be heated, microwave heating can be performed using the heating body according to the present invention. Of course, it is not limited to a form, For example, you may use a lump as a heating target object.

  Moreover, there exists a fluid as an example of a heating target object. Even if an object to be transported like a fluid is an object to be heated, microwave heating can be performed. Of course, it is not limited to a fluid, and the object fixed without being transferred may be the object to be heated.

  Alternatively, the object to be heated may be accommodated in a container made of ceramic or quartz for microwave heating. As described above, ceramics and quartz have heat resistance, wear resistance, corrosion resistance, etc., and good heat conduction, so they can be heated against objects to be heated through a container made of ceramic or quartz. Heat can be transferred indirectly and heated.

  Further, by performing microwave heating in a reduced pressure, microwave heating can be efficiently performed in an insulated state. In particular, by reducing the pressure under atmospheric pressure, injecting a reducing gas (for example, nitrogen gas) and performing microwave heating in a reducing atmosphere, heating can be performed in a state where oxidation is prevented.

  Moreover, the heating device according to the present invention is a heating device including the heating body according to the present invention, and includes a heat treatment unit that accommodates a heating object and performs the microwave heating. is there.

  [Operation / Effect] According to the heating device of the present invention, in addition to the heating body according to the present invention, the heating body is provided with a heating processing unit that accommodates the object to be heated and performs microwave heating. Instead of heat, microwave heating can be performed on the heating object accommodated in the heat treatment unit.

  According to the heating body, the heating method using the heating body, and the heating device provided with the heating body according to the present invention, instead of the heating body formed only of the conventional silicon carbide, ceramic or quartz, carbon or carbon compound and By using the heating body formed in (1), it is possible to realize a heating body that is easy to process, easily available at low cost.

BRIEF DESCRIPTION OF THE DRAWINGS Schematic sectional drawing of the heating apparatus which concerns on Example 1, (a) is sectional drawing seen from the front, (b) is sectional drawing seen from the side. (A) is a schematic sectional drawing of the heating apparatus which concerns on Example 2, (b) is a schematic sectional drawing of the heating apparatus which concerns on Example 2 of embodiment different from (a). (A) is a schematic sectional drawing of the heating apparatus which concerns on Example 2 of embodiment different from FIG. 2, (b) is a schematic perspective view of the heating body of (a). (A) is a schematic sectional drawing of the heating apparatus which concerns on Example 2 of embodiment different from FIG. 2 and FIG. 3, (b) is a schematic perspective view of the heating body of (a). (A), (b) is a schematic sectional drawing which concerns on Example 2 of embodiment different from FIGS. 6 is a schematic cross-sectional view of a heating device according to Example 3. FIG. It is a schematic sectional drawing of the heating apparatus which concerns on Example 3 of embodiment different from FIG. 6 is a schematic cross-sectional view of a heating apparatus according to Example 4. FIG.

Embodiment 1 of the present invention will be described below with reference to the drawings.
FIG. 1 is a schematic cross-sectional view of the heating apparatus according to the first embodiment. In the present embodiment 1, including later-described embodiments 2 to 4, a heating object will be described by taking an object that transmits without absorbing microwaves as an example.

  In the first embodiment, as shown in FIG. 1, the heating device includes a furnace body 2 that accommodates the heating object 1 and performs microwave heating, and a heating body 3 that converts microwaves into heat. The furnace body 2 is formed of a heat insulating material and prevents heat dissipation. As shown in the front sectional view of FIG. 1A, the furnace body 2 is provided with a waveguide 4 for transmitting microwaves, and the microwave is supplied into the furnace body 2 through the waveguide 4. To do. The furnace body 2 corresponds to the heat treatment unit in the present invention, and the heating body 3 corresponds to the heating body in the present invention.

  The heating element 3 is formed of a ceramic 3a and carbon 3b. In Example 1, including Examples 2 to 4 described later, carbon 3b is formed of carbon powder, and carbon 3b formed of carbon powder is accommodated in ceramic 3a. The particle size of the carbon powder is preferably in the range of about 300 μm to 1000 μm from the microwave absorption characteristics.

  The heating element 3 may be quartz instead of the ceramic 3a, or both ceramic and quartz may be used. In addition to carbon powder, carbon 3b may absorb microwaves well, such as foamed carbon material, sponge-like processed material using carbon, carbon fiber, carbon felt, or a combination thereof. For example, the form is not particularly limited. Moreover, a carbon compound (for example, silicon carbide powder) may be used instead of carbon 3b, or both carbon and a carbon compound may be used.

  In the first embodiment, the heating element 3 also serves as a heater. In FIG. Moreover, each heating body 3 provided in the lower part also serves as a ceramic roller for transferring the heating object 1 as shown in the sectional view in side view of FIG. That is, each heating element 3 provided in the lower part is a ceramic roller with a heater function. The heating object 1 placed on the heating body 3 (the ceramic roller with a heater function) is rotated by rotating each heating body 3 (the ceramic roller with a heater function) provided in the lower part in the direction of the arrow in FIG. , And transferred in parallel with the direction of the arrow in FIG.

  In addition, about the heating body 3, it is not necessary to use a heater and a ceramic roller together, You may provide a heater (heating part) and a roller (transfer part) separately. Further, it is not always necessary to provide a heater (heating unit) or a roller (transfer unit).

  The heating object 1 is an object that transmits without absorbing the microwave as described above. As in Examples 2 and 3 to be described later, a powder 5 (for example, an oxide powder or an inorganic powder) is used as a heating object that permeates without absorbing microwaves (see FIG. 2). (See FIG. 5) and may be transported by a roller, or a container (not shown) in which a liquid or gas is sealed as a heating object to be transmitted without absorbing microwaves as in the third embodiment. Each roller may be transported by a roller. The container that houses or seals the object to be heated 1 may be formed of ceramic or quartz as in the second embodiment.

  According to the heating body 3 according to the first embodiment, the heating body is formed of ceramic or quartz and carbon or a carbon compound. Depending on the size, carbon (for example, carbon powder, foamed carbon material, sponge-like processed material using carbon, carbon fiber, carbon felt) absorbs microwaves better than silicon carbide and has a heat-resistant temperature. Is sufficient, and is optimal as a microwave heating element. In the case of a carbon compound, the same effect as that of carbon can be obtained. On the other hand, ceramic and quartz have heat resistance, excellent wear resistance, corrosion resistance, etc., and good heat conduction. Ceramics and quartz are easy in processability, cost is lower than that of silicon carbide, and are easily available. Therefore, by using the heating body 3 formed of ceramic or quartz and carbon or a carbon compound instead of the conventional heating body formed of only silicon carbide, processing is easy and low cost is available. A simple heating body 3 can be realized.

  In addition, according to the heating method according to the first embodiment, by performing microwave heating using the heating body 3 according to the first embodiment, microwaves are efficiently absorbed, heat resistant, and wear resistant. Further, microwave heating can be performed using the heating element 3 that is excellent in corrosion resistance and the like and also has good heat conduction.

  In the first embodiment, the heating object 1 includes an object that transmits without absorbing microwaves. If the object to be heated is an object that absorbs microwaves, microwave heating can be performed without using a heating object. However, as in Example 1, the object to be heated 1 absorbs microwaves. In the case of an object that passes through without being heated, microwave heating is performed in a state where the heating body 3 is used. Therefore, even if the object that transmits without absorbing the microwave is the heating object 1, it is possible to perform microwave heating using the heating body 3 according to the first embodiment.

  Moreover, according to the heating apparatus which concerns on this Example 1, in addition to the heating body 3 which concerns on this Example 1, the heat processing part which accommodates the heating target object 1 and performs a microwave heating (in this Example 1 a furnace) By providing the body 2), the heating body 3 can perform microwave heating on the heating object 1 accommodated in the heat treatment unit (furnace body 2) by changing the microwave to heat.

Next, Embodiment 2 of the present invention will be described with reference to the drawings.
2A is a schematic cross-sectional view of the heating apparatus according to Example 2, and FIG. 2B is a schematic cross-sectional view of the heating apparatus according to Example 2 of the embodiment different from FIG. 2A. FIG. 3A is a schematic cross-sectional view of the heating apparatus according to Example 2 of the embodiment different from FIG. 2, and FIG. 3B is a diagram of the heating body of FIG. FIG. 4A is a schematic perspective view, FIG. 4A is a schematic cross-sectional view of a heating apparatus according to Example 2 of the embodiment different from FIGS. 2 and 3, and FIG. ) Is a schematic perspective view of the heating body, and FIG. 5 is a schematic cross-sectional view according to Example 2 of the embodiment different from FIGS. In the second embodiment, description will be made taking powder as an example of the heating object. In addition, the same code | symbol is attached | subjected about the same structure as Example 1 mentioned above, and the description is abbreviate | omitted.

  Similarly to Example 1 described above, as shown in FIGS. 2 to 5, the heating device accommodates the heating object 1 (powder in the present Example 2) and performs microwave heating, A heating body 3 that converts microwaves into heat and a waveguide 4 that transmits microwaves and supplies the microwaves into the furnace body 2 are provided. In the present Example 2, the powder which is the heating target object 1 is accommodated in the container 5 formed of ceramic, and microwave heating is performed. Examples of the heating object include oxide powder and inorganic powder. The container 5 corresponds to the container in the present invention.

  About the container 5, like the heating body 3 of the above-mentioned Example 1, quartz may be used instead of ceramic, and both ceramic and quartz may be used. Moreover, as the heating target 1 accommodated in the container 5, it is not limited to powder like this Example 2, A liquid and gas may be a heating target like Example 3 mentioned later. . Or you may seal a heating target object in the container 5 formed with ceramic or quartz. Even when the object to be heated 1 is powder, it is preferable to cover the powder by covering the container 5.

  In the case of the embodiment of FIG. 2A, the heating element 3 is formed of a tubular ceramic 3a (ceramic tube) and carbon 3b, and the carbon 3b is accommodated in the ceramic 3a. A plurality of heating elements 3 are inserted into the powder accommodated in the container 5. Also in this embodiment, instead of the tubular ceramic 3a (ceramic tube), tubular quartz (glass tube) may be used, or both ceramic and quartz may be used. The carbon 3b is not particularly limited, such as carbon powder, foamed carbon material, sponge-like processed material using carbon, carbon fiber, carbon felt, or a combination thereof. Moreover, a carbon compound (for example, silicon carbide powder) may be used instead of carbon 3b, or both carbon and a carbon compound may be used.

  As a further application, in the case of the embodiment of FIG. 2 (b), the heating body 3 is formed by a stirring rod, and the heating body 3 of the stirring rod is rotated in the direction of the arrow in FIG. By moving up and down in this direction, microwave heating is performed while stirring the powder contained in the container 5. Also in this embodiment, the heating element 3 is formed of the ceramic 3a and the carbon 3b. The form of the heating element 3 and the substance forming it are not particularly limited as described in FIG.

  As a further application, in the case of the embodiment of FIG. 3, a plurality of heating bodies 3 are inserted into the powder accommodated in the container 5 as in the embodiment of FIG. As shown in the cross-sectional view of FIG. 3A, each heating element 3 is formed of a ceramic 3a and carbon 3b, and the carbon 3b is accommodated in the ceramic 3a. Each heating element 3 is horizontally supported by a prismatic support member 6 as shown in the perspective view of FIG. The support member 6 may be ceramic, quartz, or a combination thereof as in the case of the container 5 or may be other than ceramic or quartz. Instead of the prismatic support member 6, a plate-like support member may be used, and the support member may horizontally support each heating element 3. Further, the container 5 may also serve as the support member 6, and the container 5 may horizontally support each heating element 3. The form of the heating element 3 and the substance forming it are not particularly limited as described in FIG.

  As a further application, in the case of the embodiment of FIG. 4, a plurality of heating bodies 3 are inserted into the powder accommodated in the container 5, as in the embodiments of FIG. 2A and FIG. 3. As shown in the sectional view of FIG. 4A, each heating element 3 is formed of a ceramic 3a and carbon 3b, and the carbon 3b is accommodated in the ceramic 3a. As shown in the perspective view of FIG. 4B, each heating element 3 is formed in a plate shape and is supported by being suspended on a prismatic support member 6. A handle 6a may be provided. Moreover, the support member 6 may also serve as the lid of the container 5 that seals the heating object 1 (powder in the present embodiment 2), and the lid of the container 5 may suspend and support each heating body 3. The form of the heating element 3 and the substance forming it are not particularly limited as described in FIG. Further, the substance forming the support member 6 is not particularly limited as described in FIG.

  As a further application, in the case of the embodiment of FIG. 5 (a), the container 5 also serves as the heating element 3 and has a double structure made of ceramic, and the double structure container 5a made of these ceramics, The heating element 3 is formed by accommodating carbon 3b between 5b. The powder is accommodated in the inner container 5a. The container 5 that also serves as the heating element 3 may be quartz instead of ceramic, or both ceramic and quartz may be used. Further, the inner container 5a may be formed of ceramic, and the outer container 5b may be formed of quartz. Conversely, the inner container 5a may be formed of quartz, and the outer container 5b may be formed of ceramic. .

  As a further application, in the case of the embodiment of FIG. 5B, in the embodiment of FIG. 2A, a plurality of heating elements 3 are inserted into the powder housed in the container 5, whereas The container 5 is simplified by inserting only one heating element 3. The form of the heating element 3 and the substance forming it are not particularly limited as described in FIG.

  The heating element 3 according to the second embodiment is formed of ceramic or quartz and carbon or a carbon compound instead of the conventional heating element formed of only silicon carbide, as in the first embodiment. By using the heated body 3, it is possible to realize a heated body 3 that is easy to process, easily available at low cost.

  Moreover, according to the heating method according to the second embodiment, similarly to the first embodiment described above, the microwave is efficiently absorbed by performing the microwave heating using the heating body 3 according to the second embodiment. Further, microwave heating can be performed using the heating element 3 that has heat resistance, excellent wear resistance, corrosion resistance, and the like and excellent heat conduction.

  In the second embodiment, as in the first embodiment, there is an object (powder in the second embodiment) that does not absorb microwaves as the heating object 1. If the object to be heated is an object that absorbs microwaves, microwave heating can be performed without using a heating object. However, as in Example 2, the object to be heated 1 absorbs microwaves. In the case of an object (powder) that passes through without being heated, microwave heating is performed in a state where the heating body 3 is used. Therefore, even if the object (powder) that transmits without absorbing the microwave is the heating object 1, it is possible to perform microwave heating using the heating body 3 according to the second embodiment.

  In Example 2, there is powder as the heating object 1. Depending on the substance that forms the powder (in this embodiment, oxide powder or inorganic powder) and the particle size of the powder, in the case of powder, it must pass through without absorbing microwaves. In many cases, it is difficult to heat (when heating is difficult). The hardly heatable powder is the object to be heated 1, and microwave heating can be performed using the heating body 3 according to the second embodiment. Of course, it is not limited to a form, For example, you may use a lump as a heating target object.

  An example of a material that is difficult to heat is titanium oxide, and the dielectric constant and dielectric loss tangent of titanium oxide are as shown in Table 1 below. Examples of heatable materials include water and carbon powder, and the dielectric constant and dielectric loss tangent of water and carbon powder are shown in Table 1 below.

  The higher the dielectric constant and dielectric loss tangent, the better the microwave absorption rate. In the case of carbon powder, it has an absorptivity effect close to water and withstands high temperatures (1000 degrees).

  In the second embodiment, the object 1 to be heated (powder in the second embodiment) is accommodated in a container 5 made of ceramic or quartz, and microwave heating is performed. As described above, ceramic and quartz have heat resistance, excellent wear resistance, corrosion resistance, and the like, and good heat conduction. Therefore, the object 1 to be heated is passed through the container 5 made of ceramic or quartz. Heat can be indirectly transmitted to (powder) and heated.

  Moreover, according to the heating apparatus which concerns on this Example 2, in addition to the heating body 3 which concerns on this Example 2, the heat processing part which accommodates the heating target object 1 and performs a microwave heating (in this Example 2 a furnace) By providing the body 2), the heating body 3 can perform microwave heating on the heating object 1 accommodated in the heat treatment unit (furnace body 2) by changing the microwave to heat.

Next, Embodiment 3 of the present invention will be described with reference to the drawings.
6 is a schematic cross-sectional view of the heating device according to Example 3, and FIG. 7 is a schematic cross-sectional view of the heating device according to Example 3 of the embodiment different from FIG. In the third embodiment, a fluid (for example, the powder, liquid, or gas of the second embodiment described above) will be described as an example of the heating object. In addition, about the same structure as Example 1, 2 mentioned above, the same code | symbol is attached | subjected and the description is abbreviate | omitted.

  As in the first and second embodiments described above, the heating device includes a furnace body 2, a heating body 3, and a waveguide 4 as shown in FIGS. As described above, in this third embodiment, a fluid is used as the heating object 1 (not shown in FIGS. 6 and 7), and the fluid, for example, the powder, liquid, or gas of the above-described second embodiment is used. .

  In the case of the embodiment of FIG. 6, a furnace body 2 of a cylindrical rotary furnace (that is, a rotary kiln) is employed. In addition to the waveguide 4, the furnace body 2 is provided with an inlet 2 a through which a fluid flows, and the fluid flows into the furnace body 2 through the inlet 2 a to perform microwave heating. In addition, the furnace body 2 is provided with an outlet 2b through which the fluid flows out, and the fluid after microwave heating flows out through the outlet 2b. The furnace body 2 of the rotary furnace is also formed of a heat insulating material as in the first and second embodiments, and prevents heat dissipation.

  A rotary shaft 7a of a screw mechanism 7 is inserted into the furnace body 2, and the screw mechanism 7 is made of ceramic. The screw mechanism 7 also serves as the heating body 3, and includes a rotating shaft 7 a that rotates and stirs the fluid in the furnace body 2 in the direction of the arrow in FIG. 6, and a plurality of heating bodies 3 that are supported by the rotating shaft 7 a. Is formed. The heating element 3 is formed of a ceramic 3a and carbon 3b, and the carbon 3b is accommodated in the ceramic 3a. The rotating shaft 7a is not necessarily formed of ceramic. The form of the heating element 3 and the substance forming it are not particularly limited as described in Examples 1 and 2.

  Note that the furnace body 2 has an opening at each end in order to insert the rotating shaft 7a into the furnace body 2. Therefore, powder or liquid is preferable as the fluid. A gas may be used as the fluid if the end is sealed or the end is used as an inlet or outlet.

  As a further application, in the case of the embodiment of FIG. 7, the heating element 3 is formed of a tubular ceramic 3a (ceramic tube) and carbon 3b. The tube-shaped ceramic 3a (ceramic tube) is used both as an inlet for flowing fluid and an outlet for flowing fluid outside the furnace body 2. In the furnace body 2, the tube-shaped ceramic 3a (ceramic tube) is used. ) Is surrounded by carbon 3b. The form of the heating body 3 and the substance forming it are not particularly limited.

  The furnace body 2 has a double structure, and the inner furnace body 2 is formed of a heat insulating material 2A and is in contact with the carbon 3b. The fluid is flowed into the furnace body 2 through the inlet and microwave heating is performed, and the fluid after microwave heating is discharged through the outlet. The outer furnace body 2 is not particularly limited. Like the inner furnace body 2, the outer furnace body 2 may be formed of a heat insulating material, or the furnace body 2 may be integrally formed only of the heat insulating material. In FIG. 7, unlike FIG. 6, since the end of the furnace body 2 is not open, a gas may be used as the fluid. Therefore, powder, liquid, or gas is used as the fluid.

  According to the heating body 3 according to the third embodiment, in the same manner as in the first and second embodiments described above, instead of a heating body formed of only conventional silicon carbide, ceramic or quartz and carbon or a carbon compound are used. By using the formed heating element 3, it is possible to realize the heating element 3 that is easy to process, is easily available at low cost.

  Further, according to the heating method according to the third embodiment, similarly to the first and second embodiments described above, the microwave is efficiently used by performing the microwave heating using the heating body 3 according to the third embodiment. Microwave heating can be performed using the heating element 3 that absorbs, has heat resistance, is excellent in wear resistance, corrosion resistance, etc., and has good heat conduction.

  In the third embodiment, as in the first and second embodiments, there is an object (fluid in the third embodiment) as the heating object 1 that does not absorb microwaves and passes therethrough. If the object to be heated is an object that absorbs microwaves, microwave heating can be performed without using a heating object. However, as in Example 3, the object to be heated 1 absorbs microwaves. In the case of an object (fluid) that passes through without being heated, microwave heating is performed in a state where the heating element 3 is used. Therefore, even if an object (fluid) that passes through without absorbing microwaves is the heating object 1, it is possible to perform microwave heating using the heating body 3 according to the third embodiment.

  In the third embodiment, there is a fluid as the heating object 1. Even if the object transferred like a fluid is the heating object 1, microwave heating can be performed. Of course, it is not limited to a fluid, and the object fixed without being transferred may be the object to be heated.

  Moreover, according to the heating apparatus which concerns on this Example 3, in addition to the heating body 3 which concerns on this Example 3, the heat processing part which accommodates the heating target object 1 and performs a microwave heating (in this Example 3 a furnace) By providing the body 2), the heating body 3 can perform microwave heating on the heating object 1 accommodated in the heat treatment unit (furnace body 2) by changing the microwave to heat.

Next, Embodiment 4 of the present invention will be described with reference to the drawings.
FIG. 8 is a schematic cross-sectional view of the heating apparatus according to the fourth embodiment. In the fourth embodiment, as in the above-described first working example 1, an explanation will be given by taking an object that does not absorb microwaves as a heating object as an example to be heated. In addition, about the same structure as Examples 1-3 mentioned above, the same code | symbol is attached | subjected and the description is abbreviate | omitted.

  As in Embodiments 1 to 3 described above, the heating apparatus includes a furnace body 2, a heating body 3, and a waveguide 4 as shown in FIG. In the fourth embodiment, a pump 8 is provided to reduce the pressure inside the furnace body 2. Further, an injection pipe 9 for injecting a reducing gas is provided. The reducing gas is not particularly limited as long as it is a gas that prevents oxidation (for example, a rare gas) as exemplified by nitrogen gas. In addition, it is not limited to a reducing gas as long as microwave heating (positive oxidation, chemical reaction while heating under a reaction gas) is performed except for the purpose of preventing oxidation.

  The heating element 3 is formed of a ceramic 3a and carbon 3b, and the carbon 3b is accommodated in the ceramic 3a. About the form of the heating body 3, and the substance which forms it, as described in Examples 1-3, it is not specifically limited. In FIG. 8, the furnace body 2 of FIG. 1 according to the first embodiment described above has been described as an example. However, the furnace body 2 of FIGS. May be.

  According to the heating element 3 according to the fourth embodiment, as in the first to third embodiments described above, instead of the conventional heating element formed only of silicon carbide, ceramic or quartz and carbon or a carbon compound are used. By using the formed heating element 3, it is possible to realize the heating element 3 that is easy to process, is easily available at low cost.

  Moreover, according to the heating method which concerns on this Example 4, similarly to Examples 1-3 mentioned above, a microwave is efficiently performed by performing microwave heating using the heating body 3 which concerns on this Example 4. Microwave heating can be performed using the heating element 3 that absorbs, has heat resistance, is excellent in wear resistance, corrosion resistance, etc., and has good heat conduction.

  In the fourth embodiment, as in the first to third embodiments described above, the heating object 1 includes an object that transmits without absorbing microwaves. If the object to be heated is an object that absorbs microwaves, microwave heating can be performed without using a heating object, but the object to be heated 1 absorbs microwaves as in the fourth embodiment. In the case of an object that passes through without being heated, microwave heating is performed in a state where the heating body 3 is used. Therefore, even if the object that transmits without absorbing the microwave is the heating object 1, it is possible to perform microwave heating using the heating body 3 according to the fourth embodiment.

  Moreover, in the present Example 4, by performing microwave heating in reduced pressure, microwave heating can be performed efficiently in a thermally insulated state. In particular, by reducing the pressure under atmospheric pressure, injecting a reducing gas (for example, nitrogen gas) and performing microwave heating in a reducing atmosphere, heating can be performed in a state where oxidation is prevented.

  Moreover, according to the heating apparatus which concerns on this Example 4, besides the heating body 3 which concerns on this Example 4, the heat processing part which accommodates the heating target object 1 and performs a microwave heating (in this Example 4 a furnace) By providing the body 2), the heating body 3 can perform microwave heating on the heating object 1 accommodated in the heat treatment unit (furnace body 2) by changing the microwave to heat.

  The present invention is not limited to the above embodiment, and can be modified as follows.

  (1) In the above-described first embodiment, the heater and the ceramic roller house carbon inside, but carbon or a carbon compound may be provided outside as shown in FIG.

  (2) Each Example 2-4 may be provided with the heater and ceramic roller of Example 1 mentioned above. Moreover, the heating body of each Example 2-4 may also serve as a heater or a ceramic roller.

DESCRIPTION OF SYMBOLS 1 ... Heating object 2 ... Furnace body 3 ... Heating body 3a ... Ceramic 3b ... Carbon 5 ... Container

Claims (8)

A heating element used for microwave heating,
The heating body is formed of ceramic or quartz and carbon or a carbon compound. A heating method using the heating body according to claim 1,
A heating method, wherein the microwave heating is performed using the heating body. The heating method according to claim 2, wherein
A heating method characterized by using an object that does not absorb the microwave and transmits the object as a heating object. In the heating method of Claim 2 or Claim 3,
A heating method characterized by using powder as a heating object. In the heating method in any one of Claims 2-4,
A heating method characterized by using a fluid as a heating object. In the heating method in any one of Claims 2-5,
A heating method, wherein a heating object is accommodated in a container made of ceramic or quartz and the microwave heating is performed. In the heating method in any one of Claims 2-6,
A heating method comprising performing the microwave heating in a reduced pressure. A heating device comprising the heating body according to claim 1,
A heating apparatus comprising a heat treatment unit that accommodates an object to be heated and performs the microwave heating.

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