JP2012215538A - Capacitance type sensor and method for manufacturing the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a capacitance type sensor capable of performing a stable sensor function and excellent in durability and a method for manufacturing the same: in which non-conductive rubber or elastomer is used except in an upper face part of each of movable electrode parts split into a plurality of portions of a sensor for varying capacitance; in which the rubber or elastomer is prevented from being deformed due to repetitive processing while making use of the original characteristic of the rubber or elastomer, a positioning hole is formed in each of the central positions of sensor constituent members including a sensor substrate, displacement on an XY plane in a circumferential direction and the like is prevented, and an output voltage in each of split fixed electrode part areas is prevented from being deviated; and in which the sensor is housed in an inside in a state that the sensor is positioned at a central position of each sensor constituent member and the circumference of a keypad rubber disposed above the upper face of the sensor with an interval therebetween is formed to be a structure integrally fixed by a laser beam, thereby operability is excellent, restoration performance is improved, and an output signal can be detected in a stable state by using changes in capacitance to a force or acceleration change as an output voltage.SOLUTION: A capacitance type sensor is configured in such a manner that a sensor substrate provided with fixed electrode parts circumferentially split into a plurality of portions, a sensor rubber in which a portion except movable electrode parts each provided in a position facing each of the fixed electrode parts is formed of a non-conductive rubber or a non-conductive elastomer, and a keypad rubber disposed above the upper face of the sensor rubber with an interval therebetween are positioned in regard of respective central parts, positioned in respective circumferential directions or on an XY plane in a rectangular direction, and integrally formed.

Description

  The present invention relates to a capacitive force sensor that detects a change in force based on a change in capacitance, a capacitive sensor that detects a change in acceleration based on a change in capacitance, and a method for manufacturing the same. .

  In general, the capacitance type sensor is used as a moving operation unit of a cursor displayed on a display or the like.

Patent Document 1 is disclosed as a conventional capacitive sensor of this type. That is, the scope of claims of Patent Document 1 is as follows. The first strain generating portion made of conductive rubber or elastomer and a metal plate member harder than the first strain generating portion, the second strain forming portion being insert-molded in the first strain generating portion. A strain generating body characterized by having a strain portion. 2. The strain generating body according to claim 1, wherein the second strain generating portion is insert-molded in a flat plate-like input portion of the first strain generating portion. A capacitance type force sensor that detects a change in force based on a change in capacitance, comprising the strain generating body according to claim 1 or 2. is there. It further comprises a detection electrode disposed facing the strain generating body, and an insulating film having a uniform thickness is disposed on the surface of the detection electrode on the strain generating body side. The capacitance type force sensor according to claim 3. A substrate on which the detection electrode is formed; and a case for fixing the strain body at a position facing the detection electrode. The case includes the strain body in a state in which the strain body is accommodated therein. 5. The capacitance type force sensor according to claim 3, wherein the capacitance type force sensor is fixed to the substrate by welding. A substrate on which the detection electrode is formed; and a case for fixing the strain generating body to a position facing the detection electrode. The case is insert-molded on the strain generating body. 5. The capacitive force sensor according to claim 3 or 4, wherein the capacitive force sensor is a capacitive force sensor. In the specification “0036” column of Patent Document 1, “the force sensor 20 includes a case 50 for fixing the strain body 24 at a position facing the detection electrodes 34, 40. In the description of “It is fixed to the substrate 22 by welding in a state where the strain generating body 24 is accommodated in the inside” and the “0038” column, “as in the case 52 shown in FIG. The support portion 26A may be insert-molded in advance ".

Japanese Patent No. 4226643

In the invention of the capacitance type sensor described in Patent Document 1, it is a pressure-sensitive type, senses a change in capacitance, converts it into an analog voltage, converts it into a digital signal, and outputs a change amount.
However, since the first strain generating portion is formed of conductive rubber or elastomer, it is inferior in return performance due to repeated use compared to non-conductive rubber, and the capacitance changes with changes in force or acceleration. Cannot be detected in a stable state, and a stable sensor function cannot be exhibited.

  Further, since the first strain generating portion is made of conductive rubber or elastomer, the first strain generating portion is compressed when pressure is applied to the sensor, compared to rubber such as original silicone rubber or non-conductive elastomer. Although the shape changes, there is a problem in the shape recovery when the pressure to the first strain generating portion is released. Further, when the conductive rubber is used, the shape recovery is weaker than that of a normal silicone rubber or the like. On the other hand, if the carbon content of the conductive material is reduced, the capacitance as the movable electrode cannot be detected. If the carbon content is increased, it becomes difficult to return the movable electrode to the original shape position, and the zero point of the capacitance becomes unstable.

  The sensor rubber shape of Patent Document 1 is a very unstable shape. In particular, the sensor rubber is not shaped to stabilize the Z-axis (perpendicular to the XY plane) dimension. The only part that determines the Z-axis dimension of the sensor rubber is that the bottom outer peripheral corner is trimmed into an R shape. The origin output of the capacitance depends on the amount of crushing of the portion edged into the R shape. The Z-axis direction pressure of the sensor rubber depends on the sensor rubber holding part that extends outward and downward from the outer peripheral surface of the bottom part of the sensor rubber, but this part is also made of conductive rubber, so stable pressing performance And the return performance to the original position is inferior compared to non-conductive rubber or the like.

  Furthermore, the space between the conductive rubber that constitutes the movable electrode on the back surface of the sensor rubber of Patent Document 1 and the substrate pattern that faces the conductive rubber has an inclined space structure with a wedge-shaped cross section when they are in contact with each other. Yes. Along with the deformation of the inclined spatial structure, the capacitance is sensed and a numerical value is output.

However, the present inventor's experiment has revealed that the wedge-shaped inclined space of the cross section does not necessarily have to be occupied by a dielectric made of air. On the other hand, if the inclined space is occupied with air, the influence of the capacitance due to the environmental change of the air is large, which causes a significant change depending on the temperature and humidity. However, in the conventional dielectric, a dielectric material having a constant distance between electrode plates such as paper and glass that are not deformed is interposed between the electrode plates.
In the case of conductive rubber, it has also been found that, by repeatedly operating the keys, the spatial distance between the back surface of the sensor rubber and the substrate pattern is not stable, so that the capacitance cannot be stabilized.

  In the above Patent Document 1, what is important as a capacitance type sensor is that the conductor part of the strain generating body provided at the position facing each detection electrode of the substrate is not positioned and is assembled by positioning both at an accurate position. Although there is no mention about, the positioning of the substrate and the strain generating body is very important in commercializing the sensor. The reason is that each divided capacitance detection area is shifted in each area. When the output voltage is detected due to the capacitance change, the output voltage shifts in each detection electrode area. It means that it cannot play a role. In particular, when the capacitance type sensor is downsized, for example, when the diameter is formed to be 10 mm or less or 10 mm square or less, the alignment between the center portion of the sensor rubber and the substrate and the XY plane becomes more important.

  Further, in Patent Document 1, since the case 50 in which the strain generating body 24 is housed is fixed to the substrate 22 by welding, positioning and fixing to the substrate is difficult, and welding work is performed. For this reason, there is a problem that it is not suitable for mass production because it is necessary to weld each welding spot in a spot manner.

  In addition, the major disadvantage of the above-mentioned Patent Document 1 is that the keypad rubber and / or key top that presses the strain generating body above the strain generating body is mounted by a set maker, so that the key pad rubber and / or When installing the key top, it is necessary to always install it at a certain distance from the strain body. However, when installing as a retrofit, the set maker may attach the key top rubber too close to the strain body. Arise. In this case, a sensor operation trouble occurs. On the other hand, if the space between the strain-generating body and the keypad rubber is too large, the sensor will not operate immediately even if the operating part such as the key top is pressed, causing a deviation between the sensor operation instruction and the operation based on the sensor instruction. This means that the original function cannot be achieved and the sensor is poor in operability.

  The object of the present invention is that the operability and operation as a capacitance type sensor is good, and in order to accurately detect each divided capacitance, the sensor substrate can be fixed even if each movable electrode portion is pressed. Keypad so that the output voltage is evenly obtained at the same location in each fixed electrode area so as not to cause an error due to the displacement of the output voltage in each fixed electrode area divided when detecting the output voltage at the electrode section It is an object to provide a capacitance type sensor assembled as an integrated finished product including the same and a manufacturing method thereof.

  Another object of the present invention is to use non-conductive rubber or elastomer except for the upper surface of each movable electrode section divided into a plurality of sensors that change capacitance, and take advantage of the inherent characteristics of rubber or elastomer. While preventing deformation of rubber or elastomer during repeated operations, positioning holes are formed at the center positions of the sensor components including the sensor substrate, and displacement on the XY plane such as in the circumferential direction is prevented and divided. The output voltage is not shifted in each fixed electrode section, and the sensor is housed in the state of being positioned at the center position of each sensor component, and is disposed at a distance from the upper surface of the sensor. By forming the structure of the keypad rubber bar so that the periphery of the keypad rubber bar is fixed integrally with the laser beam, the operability is improved and the rubber return performance is improved. Capacitance type that can detect output signals in a stable state with the output voltage as a change in capacitance due to force or acceleration change, exhibits stable sensor function, and has excellent durability It is to provide a sensor and a manufacturing method thereof.

  Furthermore, an object of the present invention is to provide a conductive film by printing, sputtering, etc. on each movable electrode section divided into a plurality along a plane such as a circumferential direction in a sensor rubber made of non-conductive rubber or non-conductive elastomer. Or a base portion of a sensor rubber holding portion made of the same material as the non-conductive rubber or non-conductive elastomer extending outward from the outer peripheral edge of each of the divided movable electrode portions. A reinforcing metal plate integrally formed on the base portion of the sensor rubber holding portion in contact with the substrate forms an extending portion that extends outward, and the extending portion is positioned on the substrate to position the laser beam. To provide a capacitance type sensor capable of stably detecting a change in capacitance with repeated use of the sensor and accurately detecting the change, and a method for manufacturing the same. Located in.

  An object of the present invention is to provide a sensor rubber in which the conductive material is blended and a keypad rubber that is disposed above the upper surface of the sensor rubber even when the sensor rubber is a conductive rubber or a conductive elastomer. Are integrated together in a state where they are aligned at the center and the peripheral portion, the shape recovery of the sensor rubber when the pressure on the keypad rubber is released quickly returns, and the keypad rubber allows the interval to be restored. As a capacitive sensor, the cover is protected and formed integrally in a state where the central portions of the keypad rubber and the sensor rubber are positioned and positioned on the circumferential direction or the rectangular XY plane. It has good operability and operational life, and can accurately detect each of the divided capacitances. It is intended. Further, a reinforcing metal plate extending outward from the base portion of the sensor rubber, a reinforcing metal plate provided at a peripheral portion of the keypad rubber disposed at a distance above the top surface of the sensor rubber, and a reinforcing metal plate Integrated with a laser beam in a state where the center part and the peripheral part are aligned on the XY plane with a sensor board made of a hard material that does not have a metal plate or a reinforcing metal plate provided on the back side of the flexible sensor board. An object of the present invention is to obtain a high-accuracy capacitive sensor by adopting a structure.

  The capacitance type sensor according to the present invention includes a sensor substrate having a fixed electrode portion divided into a plurality of portions in the circumferential direction, and a portion excluding a movable electrode portion provided at a position facing each of the fixed electrode portions. A sensor rubber formed of non-conductive rubber or non-conductive elastomer, and a keypad rubber disposed above and spaced from the upper surface of the sensor rubber is positioned at each central portion and in each circumferential direction or rectangular shape. It is characterized by being integrally formed by positioning on the XY plane in the direction.

  An electrostatic capacitance sensor according to the present invention is a sensor rubber having a movable electrode portion at a position facing a fixed electrode portion divided into a plurality along the same circumferential direction on the sensor substrate, The parts excluding the movable electrode part are made of non-conductive rubber or non-conductive elastomer, and the movable electrode part is integrally formed with a conductive film or a conductive mesh layer that flexibly deforms and expands and corresponds to each movable electrode part A reinforcing metal plate that is exposed on the upper surface of the sensor rubber in the area to be formed is formed integrally with the sensor rubber, and the base of the sensor rubber holding portion of the same material extending outward from the outer peripheral edge of the sensor rubber is connected to the sensor substrate. A reinforcing metal plate having a thickness smaller than the thickness of the base portion is formed on the base portion of the sensor rubber holding portion so as to extend outward from the base portion, and is integrally formed. The keypad rubber that is housed in the server rubber and provided at a distance from the upper surface of the sensor rubber is positioned at the center through the positioning holes in the center and the reinforcing metal plate provided at the periphery of the keypad rubber A plurality of peripheral or corner portions are integrally fixed on the substrate by a laser beam in a state where the sensor rubber is positioned at a plurality of locations.

  The capacitance type sensor according to the present invention is the same as that in claim 1, at the position facing the fixed electrode portion divided into a plurality along the circumferential direction on the sensor substrate made of a rigid or flexible resin material. A sensor rubber having a movable electrode portion divided into two, wherein a portion of the sensor rubber excluding the movable electrode portion is formed of a non-conductive rubber or a non-conductive elastomer, and the non-conductive rubber or the non-conductive elastomer Is formed integrally with a conductive mesh layer 6b that is formed into a conductive film 6a or is flexibly deformed and stretched in an area divided into a plurality along the circumferential direction of the movable electrode part facing each fixed electrode part. Is a flexible sensor substrate, a circular metal reinforcing plate is further fixed to the back surface of the sensor substrate, and the periphery of the circular metal reinforcing plate is attached to the sensor. Starting up to a thickness equivalent to the substrate, and further forming an extending portion in the lateral direction, the extending portion, the sensor substrate, and the reinforcing metal plates of the sensor rubber and keypad rubber are integrally fixed by a laser beam. Features.

  The capacitive sensor according to the present invention is the capacitive sensor according to claim 1, wherein the back surface formed of a non-conductive rubber or a non-conductive elastomer in a portion corresponding to each movable electrode portion facing each fixed electrode portion on the sensor substrate is a cross-section. A wedge-shaped convex portion which is formed on a wedge-shaped convex portion inclined obliquely downward, and a movable electrode portion of a conductive mesh layer which is deformed and stretched flexibly is formed on the surface of the wedge-shaped convex portion, and the wedge-shaped convex portion is inclined obliquely And a space is formed between the fixed electrode portions.

  In the capacitive sensor according to the present invention, in claim 1, the space formed between each fixed electrode portion on the sensor substrate and the movable electrode portion at a position facing each fixed electrode portion, It is characterized in that it is filled with a dielectric material of a gel-like flexible material that maintains the shape recovery accompanying the pressing of the sensor rubber.

  According to a first aspect of the present invention, there is provided a capacitive sensor according to the first aspect, wherein a reinforcing metal plate extending outward from a base portion of the sensor rubber and a keypad rubber disposed at a distance above the top surface of the sensor rubber. The reinforcing metal plate provided on the peripheral edge of the substrate and the reinforcing metal plate provided on the back surface of the sensor substrate made of a hard material or the flexible sensor substrate are integrated by a laser beam.

  The capacitance type sensor according to the present invention includes a sensor rubber having a movable electrode made of conductive rubber or conductive elastomer, a keypad rubber disposed above the sensor rubber with a gap from the upper surface, and the movable sensor. A sensor substrate made of a hard material provided with a fixed electrode at a position corresponding to the electrode and not provided with a reinforcing metal plate on the back surface, or a flexible sensor substrate provided with a reinforcing metal plate on the back surface is provided at each central portion. Positioning by holes and positioning in each circumferential direction or rectangular XY plane are integrally formed, and a reinforcing metal plate appearing on the upper surface of the sensor rubber is formed integrally with the sensor rubber, and the sensor The base part of the sensor rubber holding part made of the same material extending outward from the outer peripheral edge of the rubber comes into contact with the sensor substrate and is on the base part of the sensor rubber holding part. A keypad rubber that is integrally formed by extending a reinforcing metal plate that is thinner than the thickness of the portion outward from the base, and that houses the sensor rubber inside and is spaced from the upper surface of the sensor rubber is a central portion With the positioning of the central portion through each of the positioning holes and the reinforcing metal plate provided at the periphery of the keypad rubber positioned at a plurality of positions of the sensor rubber, a plurality of peripheral edges or corners are formed on the substrate by a laser beam. It is characterized by being fixed integrally.

  The method for manufacturing a capacitance sensor according to the present invention accommodates a flexible sensor substrate having a positioning hole in the center, has a fixing flange on the periphery, and has a positioning hole in the center. The portion except for the reinforcing metal plate and the plurality of movable electrode portions formed at positions facing the fixed electrode portions divided into a plurality along the same circumferential direction on the surface of the sensor substrate is non-conductive silicone. The sensor rubber is made of rubber or non-conductive thermoplastic elastomer material, and the sensor rubber holding part of the same material that extends outward from the outer periphery of the sensor rubber is provided for reinforcement on the top surface of the center part of the sensor rubber. A metal plate and a reinforcing metal plate extending outward at the base of the sensor holding portion, and each movable electrode portion is formed of a conductive film or a stretchable conductive mesh layer; and A sensor rubber with a positioning hole in the center and a space above the top surface of the sensor rubber, spaced from the top surface, made of the same material as the sensor rubber, and on the top surface at the center of the keypad rubber A keypad rubber provided with a reinforcing metal plate and provided with a reinforcing metal plate extending outward at a base portion of the holding portion of the keypad rubber and having a positioning hole formed in the central portion is provided at each central portion. The positioning holes are made to coincide with each other and the reinforcing metal plates in the peripheral portion are overlapped with each other and fixed together with a laser beam.

  A capacitance type sensor according to the present invention includes a sensor substrate having a plurality of fixed electrode portions, movable electrode portions at positions facing the respective fixed electrode portions, and above the sensor substrate. The sensor rubber to be placed and the keypad rubber to be placed above the sensor rubber at an interval are aligned with the positioning holes in the center and the peripheral part is also formed integrally with the laser beam. Operability and operation as a capacitive sensor are good, and each electrostatic capacity divided into a plurality of parts can be accurately detected at each location. In addition, since the positioning at the center and the peripheral part is made accurate, no matter which position of each movable electrode part is pressed, output is performed in each fixed electrode area divided when the output voltage is detected by the fixed electrode part of the sensor substrate. An error due to voltage misalignment does not occur, and an output voltage can be obtained uniformly at the same location in each fixed electrode area.

  The capacitance type sensor according to the present invention is formed by forming a portion excluding the movable electrode portion with a non-conductive rubber or elastomer, and with a non-conductive rubber or elastomer for repeated operations of compression, contraction, and restoration of the original shape. Together with the formation on the top surface of the rubber corresponding to the movable electrode portion of the sensor rubber, it can withstand repeated use sufficiently, and the sensor rubber can be restored to its original shape with respect to repeated operation. In addition, deformation of the sensor rubber can be prevented against repeated use. In addition, the return performance of the sensor rubber can be improved, and a change in capacitance with respect to a change in force or acceleration can be detected in a stable state.

  A capacitance type sensor according to the present invention includes a reinforcing metal plate that appears on the top surface of the portion corresponding to the movable electrode portion of the sensor rubber, a sensor rubber holding portion that extends from the outer peripheral edge of the sensor rubber, and the sensor The reinforcing metal plate of the rubber holding part and the movable electrode part are integrally formed in the same mold and the positioning hole is formed in the center part, so that the tension is uniformly applied in any direction in 360 degrees. Can do. In addition, since the bottom surface of the sensor rubber and the bottom surface of the reinforcing metal plate are formed integrally, the sensor is used when the reinforcing metal plate is laser beam welded to the metal portion of the substrate or the reinforcing metal plate in which the positioning hole is formed in the central portion. The bottom of the rubber plate is not displaced and the bottom surface of the reinforcing metal plate is stably installed on the substrate or the reinforcing metal plate.

  Furthermore, since the conventional sensor rubber and the reinforcing metal plate are assembled after being manufactured separately, the positioning accuracy during assembly is not good, whereas in the present invention, a part of the outer peripheral edge of the sensor rubber protrudes outward. Since the base portion of the sensor rubber holding portion and the reinforcing metal plate are fixed together by integral molding, the positioning accuracy of the sensor rubber and the reinforcing metal plate is remarkably improved, and the sensor rubber is 360 on the sensor substrate. Displacement in the direction of degrees was resolved.

  In the present invention, the dielectric material of the gel-like softening agent that maintains the shape recovery of the sensor rubber is integrally formed in the space between the movable electrode portion formed on the surface of the convex portion inclined obliquely and the fixed electrode portion facing the movable electrode portion. Since it is formed, the shape recovery of the sensor rubber is maintained in combination with the reinforcing metal plate of the sensor rubber hitting portion.

  In the present invention, the reinforcing metal plate for protecting the sensor rubber holding portion is formed integrally with the sensor rubber, so the bottom surface of the sensor rubber, the base bottom surface of the sensor rubber holding portion, and the reinforcing metal plate are formed on the same surface during laser beam welding. Therefore, when the sensor rubber is fixed to the sensor substrate or the reinforcing metal plate, the assembly accuracy is greatly improved, contributing to the stability of the sensor output.

  In particular, the reinforcing rubber plate is integrally formed on the base of the sensor rubber holding portion by projecting a part of the outer peripheral bottom of the sensor rubber to the outside, so that the sensor rubber is in the XY plane with respect to the sensor substrate. The deviation and the deviation in the direction of rotation on the XY plane are eliminated, contributing to the stability of the sensor output.

Further, according to the present invention, even if the sensor rubber is a conductive rubber or a conductive elastomer, a sensor rubber blended with the conductive material and a keypad rubber disposed above the upper surface of the sensor rubber with a space therebetween. When the pressure on the keypad rubber is released by combining them together, the shape recovery of the sensor rubber quickly returns, and there is a complementary action by covering by installing the keypad rubber at a predetermined distance. It is demonstrated and the shape recovery performance of the sensor rubber by repeated use can be improved.
In addition, the center of the keypad rubber and sensor rubber and the positioning in the circumferential direction or on the rectangular XY plane are integrally formed to improve the operability and operation as a capacitive sensor. Each capacitance divided into a plurality of parts can be accurately detected. Furthermore, a reinforcing metal plate extending outward from the base portion of the sensor rubber, a reinforcing metal plate provided at a peripheral portion of the keypad rubber disposed at a distance above the top surface of the sensor rubber, and reinforcement A highly accurate electrostatic capacity sensor can be obtained by fixing a sensor substrate made of a hard material not having a metal plate or a reinforcing metal plate provided on the back surface of a flexible sensor substrate by laser beam.

It is an enlarged plan view when a rectangular sensor having a length of 8 mm in length and width, respectively, showing an embodiment of the present invention is seen through. It is an expansion disassembled perspective view of the sensor shown in FIG. 1 which shows one Example of this invention. It is an expansion perspective view at the time of seeing perspectively the sensor shown in FIG. 1 which shows one Example of this invention. It is an AA line expanded sectional view of Drawing 1 showing one example of the present invention. FIG. 2 is an enlarged cross-sectional view taken along line BB in FIG. 1 showing an embodiment of the present invention. It is an expansion perspective view which shows the surface of the keypad rubber installed in the square sensor whose length and width are each 8 mm which shows one Example of this invention. It is an expansion perspective view which shows the back surface of the keypad rubber installed in the square sensor board | substrate of length of 8 mm in length and width which shows one Example of this invention. FIG. 3 is an enlarged cross-sectional view of a keypad rubber installed on a square sensor substrate having a length of 8 mm each in the vertical and horizontal directions according to an embodiment of the present invention. It is an expansion perspective view which shows the surface of the sensor rubber used as a square sensor whose length and width are 8 mm each which shows one Example of this invention. It is an expansion perspective view which shows the back surface of the sensor rubber used as a square sensor whose length and width are each 8 mm which shows one Example of this invention. 1 is an enlarged cross-sectional view of a keypad rubber used as a square sensor having a length of 8 mm each in length and width according to an embodiment of the present invention. It is a schematic perspective view which shows the surface in case the printed wiring board used as a square sensor whose length and width are each 8 mm in length which shows one Example of this invention is a flexible printed wiring board. It is a schematic perspective view which shows the back surface in case the printed wiring board used as a square sensor whose length and width which respectively show one Example of this invention is 8 mm in length is a flexible printed wiring board. It is an expanded sectional view of the printed wiring board which attaches the square sensor whose length and width are each 8 mm which shows one Example of this invention. It is an expansion perspective view which shows the metal plate for reinforcement which hold | maintains the flexible printed wiring board of the square sensor whose length and width are each 8 mm which is one Example of this invention from the surface. It is an expansion perspective view which shows the back side of the metal plate for reinforcement which hold | maintains the flexible printed wiring board of the square sensor whose length and width are 8 mm each which are one Example of this invention from the back surface. FIG. 15 is an enlarged front view of FIG. 14. It is an expanded sectional view showing other examples of the present invention. It is an expanded sectional view showing the case where a movable film or a conductive mesh layer is formed in the movable electrode part of the sensor rubber concerning the present invention. It is an expanded sectional view which shows the case where the dielectric material of a gel-like softening agent is formed in the movable electrode part of the sensor rubber which concerns on this invention. It is an expansion exploded perspective view showing the case where the sensor concerning the present invention is applied to a flexible sensor substrate. It is an expanded sectional view which shows the state which assembled the state which assembled FIG. 20 integrally. FIG. 6 is an enlarged cross-sectional view of an integral structure type capacitive sensor showing another embodiment of the present invention and showing a case where a sensor rubber is made of a conductive rubber or a conductive elastomer on a sensor substrate made of a hard material. FIG. 6 is an enlarged cross-sectional view of an integral structure type capacitive sensor showing another embodiment of the present invention and showing a case where the sensor rubber is made of conductive rubber or conductive elastomer and includes a key top. FIG. 5 is an enlarged cross-sectional view of a monolithic capacitive sensor showing another embodiment of the present invention and showing a case where a sensor rubber is made of a conductive rubber or a conductive elastomer with a flexible sensor substrate. Another embodiment of the present invention, an enlarged cross-sectional view of a monolithic capacitive sensor showing a case where a flexible sensor substrate, the sensor rubber is made of conductive rubber or conductive elastomer, and has a key top It is.

FIG. 1 is an enlarged plan view of an embodiment of the present invention when a sensor having a length of 8 mm and a length of 8 mm is seen through. That is, the drawing shows a state in which the flexible sensor substrate 1a, the sensor rubber 3 disposed thereon, and the keypad rubber 14 disposed on the sensor rubber 3 are integrally incorporated.
Reference numeral 1 denotes a sensor substrate. In the present embodiment, a case where a flexible sensor substrate (Flexible PWB) 1a is employed as the sensor substrate 1 is shown. This flexible sensor substrate 1a is a wiring substrate having a thin copper foil wiring pattern on a base made of a film such as thin polyimide or polyester (see FIGS. 1 to 4). When the flexible sensor substrate 1a is employed, as shown in FIGS. 3 and 4, the substrate 1a is stabilized on the back surface of the flexible sensor substrate 1a via an adhesive 1b or a double-sided adhesive tape (see FIGS. 20 to 21). Reinforcing metal plate 2 such as a stainless steel plate is used. As shown in FIGS. 14-16, each corner which is the periphery of the reinforcing metal plate 2 forms a flat rising portion 2a which rises from the vicinity of the end portion of the flexible sensor substrate 1a by an amount corresponding to the thickness of the substrate 1a. Then, the protruding portion 2b is formed upward from the edge of the rising portion 2a. A notch 4c at the end of a reinforcing metal plate 4b formed at the peripheral portion of the sensor rubber 3 to be described later and a reinforcing metal plate 8 formed at the peripheral portion of the keypad rubber 14 on each inner surface of the protruding portion 2b. Since the notch portions 8b at the ends are in contact with each other, positioning is performed with the rising portion 2a of the reinforcing metal plate 2, the end portion of the reinforcing metal plate 4b, and the end portion of the reinforcing metal plate 8 being overlapped, and the laser beam. By fixing by, circumferential displacement is reliably prevented. Also, compared to conventional welding operations, welding is instantaneously performed with a laser beam (beam) in a positioned state, and the workability is excellent in accuracy and speed.
In this example, the case where the flexible sensor substrate 1a is employed is shown, but a hard normal sensor substrate 1 is applied depending on the application. When the hard normal sensor substrate 1 is employed, the reinforcing metal plate 2 such as a stainless steel plate is not necessarily provided on the back surface of the substrate, but may be provided for integrated storage.

  Reference numeral 3 denotes a sensor rubber fixed on the sensor substrate 1 and includes movable electrode portions 5 at upper positions corresponding to the four fixed electrode portions 1c divided on the sensor substrate 1, respectively. In this example, the case of dividing into four is shown, but the number of divisions can be appropriately increased or decreased depending on the application. A CV converter (not shown) that changes the change in capacitance detected by the sensor rubber 3 to a voltage, is electrically connected to the fixed electrode portion 1c facing the sensor rubber 3, and the CV converter is an A / A converter. It is connected to a D converter (analog / digital converter) (not shown), and a numerical value is output to the outside.

The sensor rubber 3 constituting the capacitive sensor according to the present invention is formed of a non-conductive rubber such as silicone rubber or a non-conductive elastomer such as ethylene vinyl acetate elastomer, and is arranged in the same circumferential direction on the sensor substrate 1. The movable electrode portion 5 is divided into four pieces in the same circumferential direction at positions facing the fixed electrode portion 1c divided into a plurality of portions along the line (in this example, the case of four divisions is divided into divisions or the like depending on the application). Divide and form.
A circular reinforcing metal plate 4a provided on the top surface of the central portion of the sensor rubber 3, a reinforcing metal plate 4 on which the upper surface of the sensor rubber 3 at a position corresponding to the movable electrode portion 5 of the sensor rubber 3 is exposed, and a sensor rubber The reinforcing metal plate 4b provided on the upper surface of the base portion 7a of the holding portion 7 and bent downward from the end portion of the base portion 7a and extending outward is filled in the same mold (not shown), respectively. The material of conductive rubber or non-conductive elastomer is loaded into the mold, and the conductive material of the movable electrode portion 5 is loaded into the corresponding portion, and the whole is integrally molded in the mold (see FIG. 19). ). The reinforcing metal plate 4b may be flat without bending the end as shown in FIG.

  A conductive film 6 or a conductive mesh layer 6a that is flexibly deformed and stretched is formed on the movable electrode part 5 divided into four parts facing the fixed electrode part 1c. The conductive film 6 is integrally formed with the non-conductive rubber or non-conductive elastomer in the same mold, but in consideration of adhesiveness, for example, silicone rubber, which is the same material that is melt-bonded to the silicone rubber, is filled with carbon. To form conductivity. For the conductive mesh layer 6a, a stretchable material is selected, and a material having good adhesion to the nonconductive rubber or the nonconductive elastomer is selected.

  3 and 4, the reinforcing metal plate 8 located on the base portion 17a of the keypad rubber 14, the reinforcing metal plate 4b located on the base portion 7a of the sensor rubber 3, and the reinforcing metal plate 2 In a state in which the flexible sensor substrate 1a is interposed between the rising portion 2a and the positioning hole 16 (in this example, the diameter of the hole diameter is 0.5 mm) in the center, the sensor component member In order to position each central portion of the metal plate and to prevent the displacement in the same circumferential direction, a through hole (not shown) drilled in each of the reinforcing metal plates 8, 4b and the sensor substrate 1 is provided as a jig (not shown). The circumferential displacement of the sensor constituent member is eliminated in a state where the sensor constituent member is inserted into a pin (not shown). By positioning and fixing the peripheral edges of the reinforcing metal plates 8 and 4b and the sensor substrate 1 with a laser beam, even if a force acts in the circumferential direction and the radial direction during the operation of the sensor rubber 3 provided with the movable electrode portion 5, the position shifts. It operates accurately and reliably. In the figure, reference numeral 17 denotes a keypad rubber holder.

8 and 9 are enlarged perspective views showing the front surface and the back surface of the sensor rubber 3 used as a square-shaped sensor having a length and width of 8 mm, respectively, according to an embodiment of the present invention.
Although it is explanatory drawing which shows the outline of the sensor rubber 3 provided facing when the sensor board | substrate 1 is divided | segmented into the pattern of four fixed electrode parts 1c along the same circumferential direction on a board | substrate, it is not necessarily limited to four patterns. For example, eight patterns or other numbers of patterns can be divided according to the application. As shown in FIG. 9, in this example, the left and right arc-shaped areas are X _- sensing patterns 9, the left and right arc-shaped areas are X ₊ sensing patterns 10, and the upper and lower upper arc-shaped areas are Y _+. The sensing pattern 11, the upper and lower circular arc-shaped areas indicate the Y ₋ sensing pattern 12, and the area indicates the Z sensing pattern, that is, the Z-axis direction sensing pattern 13.

The sensor rubber 3 is formed by simultaneously molding a rubber upper surface 4 corresponding to the movable electrode portion 5, a reinforcing metal plate 4 b on the upper surface of the sensor rubber holding portion 7, and a nonconductive rubber or a nonconductive elastomer material in a mold. It is formed. For example, when X _{+ of the} sensor rubber 3 is pressed, the X output becomes +. X _- When is pressed, X output - to become. When Y ₊ is pressed, the Y output becomes +. Y _- when is pressed, Y output - to become. The Z output becomes + no matter which direction is pressed.

For example, the output when pressing the Y ₊ arc-shaped area is the same principle as that of the seesaw key, and the Y ₋ portion hardly sinks. X ₊ and X ₋ parts sink slightly. X ₊ parts and X _- output when pressing the boundary portion, X _+, Y _- sinks about half. The X ₋ and Y ₊ parts hardly sink.
Considering the mechanistic action of the XY output, it can be seen which part is pressed by the canceling output of the X and Y axes. For example, when the center of the Y ₊ portion is pressed, the cancellation is 0 (X axis) at X ₊ +20, X ₋ −20. The offset is +45 (Y axis) at Y ₊ +50, Y ₋ −5. On the other hand, when the boundary between the X ₊ arcuate area and the X ₋ arcuate area is pressed, the offset is +25 (X axis) at X ₊ +35 and X ₋ −10. When Y ₊ +10, Y ₋ −35, the offset is −25 (Y axis).

Since all Z outputs are + outputs, the output is the sum of all directions. The Z detection sensor rubber shape of each place is a mountain shape with the XY axis direction as the center. This is to ensure that the total amount of sensor rubber crushing is the same no matter which direction is pressed with the same force (the center pressure can also be detected by the soft side). For example, when the A part is pressed, the total of X ₊ part +15, X ₋ part +15, Y ₊ part +25, Y ₋ part +5 is +60 (Z axis). On the other hand, when the B part is pressed, the total is +60 (Z-axis) in X ₊ part +20, X ₋ part +10, Y ₊ part +10, Y ₋ part +20.

8 and 9 are perspective views showing the front and back surfaces of the sensor rubber 3, respectively.
A pre-processed reinforcing metal plate 4 such as stainless steel and a reinforcing metal plate 4b are loaded into the mold and integrally molded together with the non-conductive member of the sensor rubber 3. That is, the reinforcing metal plate 4b is provided on the base portion 7a of the sensor rubber holding portion 7 formed of the same material on the outer peripheral edge portion of the sensor rubber 3 made of non-conductive rubber or non-conductive elastomer such as silicone rubber, And it projects horizontally outside the base portion 7a.

FIG. 9 is a perspective view showing the back surface of the sensor rubber 3, and shows a state before the movable electrode portion is formed on the front surface.
The sensor rubber 3 includes a sensor rubber holding portion 7 that extends outward and downward from an outer peripheral edge thereof, and a base portion 7 a that supports the sensor rubber holding portion 7. A reinforcing metal plate 4b having a substantially rectangular outer shape is formed on the base portion 7a of the sensor rubber holding portion 7, and each corner thereof has a cutout portion 4c. The end face of the notch 4c is in contact with the inner surface of the protruding portion 2b provided at the corner of the reinforcing metal plate 2 fixed to the back surface of the sensor substrate 1 to restrict circumferential displacement during assembly ( (See FIGS. 1, 2a, 2b, 20, and 21).
The center portion of the sensor rubber 3 is used as a confirmation key or the like.
The sensor rubber 3 may not be integrated with the confirmation key (not shown) but may be a sensor key 3 used alone. The sensor rubber 3 is formed of a non-conductive rubber such as silicone rubber or a non-conductive elastomer, and minimizes permanent distortion caused by repeated tapping.

  Since the sensor rubber 3, the reinforcing metal plate 4 formed on the top surface of the central portion of the sensor rubber 3, and the reinforcing metal plate 4b formed on the base portion 7a of the sensor rubber holding portion 7 are integrally formed, the sensor When the rubber 3 is installed on the sensor substrate 2, the sensor rubber 3 is rotated in the circumferential direction on the sensor substrate 1 by welding the reinforcing metal plate 4 b to the metal portion on the sensor substrate 1 with a laser beam. It is prevented from shifting.

The sensor rubber 3 is compressed against the pressure from above with a finger or the like and changes its shape, but it is important to restore the shape when the pressure is released. The conventional conductive rubber has a weak shape recovery compared to a normal non-conductive silicone rubber. However, if the conductive rubber content in the silicone rubber is small, the electrostatic capacity cannot be detected. Conversely, if the carbon content is increased, the zero point becomes unstable because it is difficult to recover the shape.
Conventional conductive silicone has a high altitude of 70 degrees or higher, but in this example, non-conductive silicone rubber such as Toray SE4706U (59 degrees), Toray SE4705U (51 degrees), Shin-Etsu KE-961T-U (62 degrees), etc. Use materials.
A non-conductive silicone rubber having a lower hardness than the conductive silicone rubber is employed. The back surface of the sensor rubber 3 formed of non-conductive silicone rubber is formed of a non-conductive silicone rubber and a conductive film 6 or a conductive mesh layer 6a such as a conductive silicone rubber film sheet having good adhesion.

  The conductive film 6 or the conductive mesh layer 6 a that becomes the movable electrode portion 5 formed on the back surface of the sensor rubber 3 is formed at a position facing the fixed electrode portion 1 c on the upper surface of the sensor substrate 1. A protrusion having a wedge-shaped cross section is formed on the back surface of the sensor rubber 3, and a space is formed between the two conductor portions. Further, since the bottom surface of the outer peripheral portion of the reinforcing metal plate 8 on the PL surface of the sensor substrate 2 and the bottom surface of the base portion 7a of the sensor rubber holding portion 7 are formed flat in the mold, if laser beam welding is used, The pressure bonding accuracy with the pattern of the sensor substrate 1 is remarkably improved. Further, since the sensor rubber holding part 7 and the reinforcing metal plate 4b are integrally formed, only the sensor rubber 3 and the sensor rubber holding part 7 are attached to the sensor board 2 in the circumferential direction or the front-rear direction after attaching to the sensor substrate 2 as in the past. The phenomenon of moving is eliminated.

  The sensor rubber 3 is made of a non-conductive rubber such as silicone rubber or a non-conductive elastomer, and has a structure in which the permanent deformation of the sensor rubber 3 is minimized as much as possible when it is repeatedly hit. The conductive film 6 is formed of a conductive printing urethane rubber sheet, a conductive silicone rubber sheet, or the like.

Formation of the conductive mesh layer 6a such as a metal mesh to be the movable electrode portion 5 on the back surface of the sensor rubber 3 is loaded together with the sensor rubber 3 in the same mold. The formation of the conductive mesh layer 6a is obtained by employing a stretchable net or the like infiltrated with conductive ink (not shown).
Thus, the formation of the movable electrode portion 5 in which the conductive mesh layer 6a is inserted is excellent in followability at the time of molding, and it is possible to compensate for the tear strength, which is also a drawback of silicone rubber. That is, by adopting a metal mesh or the like, the elongation in the planar direction can be restricted, and the position of the sensor portion that is a movable electrode is stabilized. In selecting the non-conductive silicone rubber forming the sensor rubber 3, it is important to select a silicone rubber of a grade having a small permanent set.

  A space portion of the sensor rubber 3 formed between the movable electrode portion 5 formed on the back surface of the sensor rubber 3 and the fixed electrode portion 1c is opposed to the fixed electrode portion 1c on the sensor substrate 1 and the fixed electrode portion 1c. The space does not have to be air because the change in capacitance existing in the wedge-shaped space formed between the movable electrode portion 5 and the movable electrode portion 5 is sensed and a numerical value is output. On the other hand, in the case of air, since the influence of the electrostatic capacitance due to environmental changes is large, it changes significantly depending on temperature and humidity. Further, in the conventional structure, the distance (space) from the pattern of the sensor substrate 1 is not stable. In consideration of the above-described problems, the present invention has a structure in which a space for sensing electrostatic capacitance is filled with a dielectric material of a gel-like softening agent and is not easily influenced by environmental changes. In addition, by filling the space with a dielectric material of gel softener, the dimensional accuracy accompanying shape recovery can be improved and the stability of numerical output for detecting changes in capacitance can be ensured. As a result, the quality of the sensor rubber 3 is also improved. It can be improved significantly. The gel-like softening agent, which is a dielectric used in the present invention, contracts against pressurization, and when the pressurization is stopped, the gel-like softening agent returns to its original shape. By forming a filling portion (not shown) with a soft agent in the space between the back surface of the sensor rubber 3 and the pattern of the sensor substrate 1, the ground contact surface can be enlarged to improve the stability of shape recovery. In addition, variations in capacitance output due to environmental changes can be suppressed. As the dielectric material of the gel-like softening agent, for example, a softening agent that easily contracts and returns to its original shape, such as silicone gel, urethane gel, and elastomer gel, is selected.

  FIGS. 11 to 13 show a wiring board applied to a square sensor having a vertical and horizontal length of 8 mm. The substrate configuration when the wiring board of FIG. 13 is the sensor board 1 having a thickness of 0.2 mm will be described sequentially from the top. A foil pattern 1b, a polyimide film 1c having a thickness of 25 μm, a copper foil pattern 1d having a thickness of 37.5 μm, a polyimide film 1e having a thickness of 50 μm, and a weak adhesive tape 1f having a thickness of 50 μm are shown.

  14 to 16 are enlarged perspective views showing a reinforcing metal plate for holding a flexible printed wiring board. Although the center positioning hole 16 is formed to be 0.5 mm, it is not limited to this value. FIG. 17 is a schematic enlarged sectional view showing a state in which the sensor substrate 1, the sensor rubber 3, and the keypad rubber 14 are assembled together. 18 to 19 are enlarged cross-sectional views showing aspects of the movable electrode portion 5 of the sensor rubber 3.

FIG. 5 is an enlarged perspective view showing the surface of a keypad rubber installed on a square sensor having a length and width of 8 mm each showing an embodiment of the present invention, and FIG. 6 is a vertical view showing an embodiment of the present invention. FIG. 4 is an enlarged perspective view showing a back surface of a keypad rubber installed on a square sensor substrate having a side length of 8 mm.
A reinforcing metal plate 8 having a substantially rectangular outer shape is formed on the base portion 17a of the keypad rubber holding portion 17, and each corner thereof has a notch portion 8b. The end face of the notch 8b is in contact with the inner surface of the protruding portion 2b provided at the corner of the reinforcing metal plate 2 fixed to the back surface of the sensor substrate 1 so that the displacement in the circumferential direction during assembly is restricted ( (See FIGS. 1, 2a, 2b, and 21).

FIG. 22 shows another embodiment of the present invention, and is an enlarged cross-sectional view of a monolithic capacitive sensor showing a case where a sensor rubber is made of a hard material and the sensor rubber is made of a conductive rubber or a conductive elastomer. is there. FIG. 23 shows another embodiment of the present invention, and is an enlarged cross-sectional view of a monolithic capacitive sensor showing a case where the sensor rubber 3a is made of conductive rubber or conductive elastomer and includes a key top 15. is there.
22 and 23 both show the case where the sensor rubber 3a is made of a conductive rubber or a conductive elastomer. However, the deterioration of the return performance due to repeated use of the sensor rubber 3a is caused by the sensor rubber containing the conductive material. 3a and the keypad rubber 14 disposed above and spaced apart from the upper surface of the sensor rubber 3a are combined together so that the shape of the sensor rubber can be quickly restored when the pressure on the keypad rubber 3a is released. In addition, the complementary action by the covering when the keypad rubber 3a is installed at a predetermined distance is exhibited, and the shape returning performance of the sensor rubber 3a by repeated use can be improved. Other configurations in FIGS. 22 and 23 are not different from the configurations described in the above-described embodiment for carrying out the invention.

FIG. 24 shows another embodiment of the present invention, and is an enlarged cross-sectional view of a monolithic capacitive sensor using a flexible sensor substrate and showing that the sensor rubber is made of conductive rubber or conductive elastomer. is there. FIG. 25 shows another embodiment of the present invention, in which a flexible sensor substrate is used, the sensor rubber is made of conductive rubber or conductive elastomer, and has a key top. It is an expanded sectional view of a sensor.
24 and 25 both show the case where the sensor rubber 3a is made of a conductive rubber or a conductive elastomer. However, the decrease in the return performance due to repeated use of the sensor rubber 3a is a sensor rubber containing a conductive material. 3a and the keypad rubber 14 disposed above and spaced apart from the upper surface of the sensor rubber 3a are combined together so that the shape of the sensor rubber 3a can be quickly restored when the pressure on the keypad rubber 14 is released. It is restored and the complementing effect by the covering by being installed at a predetermined distance by the keypad rubber 14 is exhibited, and the shape returning performance of the sensor rubber 14 by repeated use can be improved. The other configurations in FIGS. 24 and 25 are not different from the configurations described in the above-described embodiment for carrying out the invention.

  The capacitive sensor and the manufacturing method thereof according to the present invention can be applied to sensors in various industrial fields. It can be used as a capacitive sensor according to various applications such as a force sensor that detects a change in force based on a change in capacitance and an acceleration sensor that detects a change in acceleration based on a change in capacitance.

DESCRIPTION OF SYMBOLS 1 Sensor substrate 1a Flexible sensor substrate 1b Adhesive 1c Fixed electrode part 1d Polyimide film 1e Copper foil pattern 1f Polyimide film 1g Copper foil pattern 1h Polyimide film 2 Reinforcing metal plate 2a Standing part 2b Protruding part 3 Sensor rubber 3a Conductive material Sensor rubber 4 made of reinforcing metal plate 4a reinforcing metal plate 4b reinforcing metal plate 4c cutout portion 5 movable electrode portion 6 conductive film 6a conductive mesh layer 6b dielectric material 7 of gel-like gel softener sensor rubber holding portion 7a The base 8 metal reinforcement plate 8a metal reinforcement plate 8b notch 9 X _- sensing patterns 10 X ₊ sensing patterns 11 Y ₊ sensing patterns 12 Y _- sensing patterns 13 Z-axis direction sensing patterns 14 keypad rubber 15 Key top 16 Positioning hole 17 Keypad rubber retention 17a base

Claims (8)

  A portion of the sensor substrate having a fixed electrode portion divided into a plurality in the circumferential direction and a portion excluding the movable electrode portion provided at a position facing each fixed electrode portion is made of a nonconductive rubber or a nonconductive elastomer. The formed sensor rubber and the keypad rubber arranged above the upper surface of the sensor rubber at a distance from each other are positioned on the XY plane in each circumferential direction or in the circumferential direction or in the rectangular direction. Capacitance type sensor characterized in that it is formed.   A sensor rubber provided with a movable electrode portion at a position facing a fixed electrode portion divided into a plurality along the same circumferential direction on the sensor substrate, the portion excluding the movable electrode portion of the sensor rubber being non-conductive Made of rubber or non-conductive elastomer, the movable electrode part is formed integrally with a conductive film or a conductive mesh layer that flexibly deforms and expands, and reinforcement that appears on the upper surface of the sensor rubber in the area corresponding to each movable electrode part A metal plate is integrally formed with the sensor rubber, and the base portion of the sensor rubber holding portion of the same material extending outward from the outer peripheral edge portion of the sensor rubber is in contact with the sensor substrate and is on the base portion of the sensor rubber holding portion. A reinforcing metal plate having a thickness smaller than the thickness of the base portion is extended outwardly from the base portion and integrally formed, and the sensor rubber is housed in the inner portion of the sensor. -The keypad rubber provided at a distance from the upper surface of the rubber is in a state where the center metal positioning and reinforcing metal plates provided on the periphery of the keypad rubber are positioned at a plurality of locations of the sensor rubber through the positioning holes in the central portion. The electrostatic capacitance sensor according to claim 1, wherein a plurality of peripheral or corner portions are integrally fixed on the substrate by a laser beam.   2. The sensor according to claim 1, comprising a movable electrode portion divided into the same number at a position facing the fixed electrode portion divided into a plurality along the circumferential direction on the sensor substrate made of a rigid or flexible resin material. A portion of the sensor rubber excluding the movable electrode portion is formed of a non-conductive rubber or a non-conductive elastomer, and the non-conductive rubber or the non-conductive elastomer is a movable electrode portion facing each fixed electrode portion. In the case where the conductive mesh layer 6b, which is formed into the conductive film 6a or is flexibly deformed and stretched, is integrally formed in an area divided into a plurality along the circumferential direction, and the sensor substrate is a flexible sensor substrate, A circular metal reinforcing plate is fixed to the back surface of the sensor substrate, and the peripheral edge of the circular metal reinforcing plate is raised to the thickness equivalent to the sensor substrate. The extension part is formed in a direction, and the extension part, the sensor substrate, and the reinforcing metal plates of the sensor rubber and the keypad rubber are integrally fixed by a laser beam. Capacitive sensor.   2. The back surface formed of a non-conductive rubber or a non-conductive elastomer corresponding to each movable electrode portion facing each fixed electrode portion on the sensor substrate is formed on a wedge-shaped convex portion inclined obliquely downward in cross section. The movable electrode portion of the conductive mesh layer that is deformed and stretched flexibly is formed on the surface of the wedge-shaped convex portion, and a space is formed between the wedge-shaped convex portion and the fixed electrode portion inclined obliquely in the cross section. The capacitive sensor according to claim 1, 2, or 3.   2. The shape return accompanying the pressing of the sensor rubber is maintained in a space formed between each fixed electrode portion on the sensor substrate and the movable electrode portion at a position facing each fixed electrode portion. 5. The electrostatic capacitance sensor according to claim 1, 2, 3 or 4, which is filled with a dielectric material of a gel-like soft material.   In Claim 1, a reinforcing metal plate extending outward from the base portion of the sensor rubber, and a reinforcing metal plate provided at the peripheral portion of the keypad rubber disposed at an interval above the top surface of the sensor rubber, 6. The electrostatic capacitance type according to claim 1, 2, 3, 4, or 5, wherein a reinforcing metal plate provided on a back surface of a sensor substrate made of a hard material or a flexible sensor substrate is integrated with a laser beam. sensor.   A sensor rubber having a movable electrode made of conductive rubber or conductive elastomer, a keypad rubber disposed above the sensor rubber with a gap from the upper surface, and a fixed electrode at a position corresponding to the movable electrode A sensor substrate made of a hard material not provided with a reinforcing metal plate on the back surface or a flexible sensor substrate provided with a reinforcing metal plate on the back surface is positioned by a through hole provided in each central portion and each circumferential direction or rectangular shape Positioning on the XY plane is integrally formed, and a reinforcing metal plate that appears on the upper surface of the sensor rubber is formed integrally with the sensor rubber, and extends outward from the outer peripheral edge of the sensor rubber. The base part of the sensor rubber holding part made of the same material is in contact with the sensor substrate, and a reinforcing metal plate thinner than the thickness of the base part is formed on the base part of the sensor rubber holding part. A keypad rubber that extends outward from the base and is integrally formed, accommodates the sensor rubber inside, and is spaced apart from the upper surface of the sensor rubber. Positioning and reinforcing metal plates provided on the periphery of the keypad rubber are positioned at a plurality of locations of the sensor rubber, and a plurality of peripheral or corner portions are integrally fixed on the substrate by a laser beam. Capacitive sensor. A reinforcing metal plate that houses a flexible sensor substrate with a positioning hole in the center, has a fixing flange on the periphery, and has a positioning hole in the center,
The portion excluding the plurality of divided movable electrode portions formed at positions opposed to the plurality of fixed electrode portions divided along the same circumferential direction on the surface of the sensor substrate is non-conductive silicone rubber or non-conductive thermoplastic. The sensor rubber is formed of an elastomer material, and includes a sensor rubber holding portion made of the same material extending outward from the outer peripheral edge of the sensor rubber. The reinforcing metal plate and the sensor holding portion are arranged on the top surface of the center portion of the sensor rubber. A sensor rubber provided with a reinforcing metal plate extending outwardly at the base of each of the above, and each movable electrode portion is formed of a conductive film or a stretchable conductive mesh layer, and a positioning hole is formed in the center portion;
The sensor rubber is disposed above the top surface of the sensor rubber at a distance from the top, is formed of the same material as the sensor rubber, is provided with a reinforcing metal plate on the top surface at the center of the keypad rubber, and the keypad rubber holding portion A keypad rubber provided with a reinforcing metal plate extending outward at the base and having a positioning hole in the center,
A method for manufacturing a capacitive sensor, characterized in that a positioning hole is made to coincide with each central portion and the reinforcing metal plates in the peripheral portion are overlapped and fixed together with a laser beam.