JP2012215388A - Jig for forming sensitive film and method for forming sensitive film - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a jig for forming a sensitive film, which allows the sensitive film to be easily formed on one excitation electrode alone of a quartz crystal vibration element; and a method for forming a sensitive film, which allows a QCM sensor element with the sensitive film for detecting a predetermined substance to have improved detection accuracy.SOLUTION: A jig for forming a sensitive film which is used for forming the sensitive film on one excitation electrode of a quartz crystal vibration element mounted on a retainer composed of a base part, a leg part, and a fixing part comprises a first jig, a first O-ring, a second O-ring, and a second jig. The first O-ring is mounted on the first jig so as to be inserted between the first jig and a quartz crystal piece of the quartz crystal vibration element. The second O-ring can be mounted on and fixed to the second jig having the mounted quartz crystal vibration element so as to be inserted between the first jig and the second jig. The jig has a structure which allows the one excitation electrode alone of the mounted quarts crystal vibration element is exposed due to a through-groove formed on the first O-ring.

Description

  The present invention relates to a sensitive film forming jig used when a sensitive film is formed on one excitation electrode of a crystal resonator element, and a sensitive film forming method for forming a sensitive film using the sensitive film forming jig.

A quartz resonator element in which a sensitive film is formed on an excitation electrode is used for a quartz crystal microbalance sensor capable of detecting a minute amount, for example, 1 μg.
Here, the quartz crystal microbalance is a QCM sensor.
Further, a crystal vibration element used in a QCM sensor and having a sensitive film formed on an excitation electrode of the crystal vibration element is referred to as a QCM sensor element.
Therefore, the QCM sensor element includes a crystal vibration element and a sensitive film.

The quartz resonator element is composed of a quartz piece, an excitation electrode, and a lead electrode.
The crystal piece uses a crystal member that is a piezoelectric material, and has, for example, a flat plate shape.
For example, two excitation electrodes are paired. One excitation electrode is provided on one main surface of the crystal piece. The other excitation electrode is provided on the other main surface of the crystal piece at a position facing the one excitation electrode.
The crystal resonator element has a characteristic that the crystal piece vibrates at a predetermined frequency when a voltage is applied to the excitation electrode due to the piezoelectric effect and the inverse piezoelectric effect of the crystal piece.

The sensitive film has a property of reacting with a predetermined substance.
The sensitive film is formed by dropping a predetermined liquid material and curing or drying the liquid material.
Here, the sensitive film is formed, for example, by being dropped and cured on one excitation electrode of the crystal resonator element.
The liquid material is composed of, for example, a polymer lipid.

In the QCM sensor element, a sensitive film that reacts with a predetermined substance is formed on one excitation electrode of a crystal resonator element.
Further, when the QCM sensor element is provided in an atmosphere containing a predetermined substance, the predetermined substance reacts with and adheres to the sensitive film formed on one excitation electrode of the crystal vibration element.
For this reason, in the QCM sensor element, when a predetermined substance adheres to one excitation electrode, the frequency at which the crystal piece of the crystal vibrating element vibrates by the weight of the predetermined substance changes, so the crystal piece of the crystal vibrating element vibrates. It is possible to calculate the weight of a predetermined substance that the sensitive film reacts and adheres from the amount of change in frequency.
That is, the QCM sensor element is configured to be able to detect a predetermined substance that reacts with the sensitive film from the amount of change in frequency at which the sensitive film reacts and the quartz piece of the quartz crystal vibrating element vibrates (for example, Patent Documents). 1).

As a sensitive film forming method for forming a sensitive film on one excitation electrode of a crystal resonator element, for example, there is a method of forming a sensitive film using a spin coater device.
Such a sensitive film forming method includes, for example, a mounting process, an arrangement process, a dropping process, and a curing process.

The mounting process is, for example, a process of mounting a crystal resonator element on a sensitive film forming jig.
The sensitive film forming jig includes, for example, a flat plate portion and a column portion.
In addition, when the sensitive film forming jig is directly mounted on the surface of the flat plate portion provided with the column portion and the crystal vibration element is mounted and rotated in the plane on the surface of the flat plate portion provided with the column portion, The center of one main surface of the mounted crystal resonator element can be positioned on the rotation axis of the flat plate portion.

  For example, the placement step is a step of placing a sensitive film forming jig on which a crystal resonator element is mounted on a spin coater device.

The dropping step is, for example, a step of dropping a liquid material before becoming a sensitive film toward one excitation electrode of a quartz crystal vibrating element rotated by a spin coater device.
Further, in the dropping step, since the quartz vibrating element is rotating, the liquid material is in a state of spreading uniformly on the principal surface onto which the quartz piece is dropped. Therefore, when it is dropped on one main surface of the crystal piece, after the dropping step, the liquid material that becomes the sensitive film is dropped on one excitation electrode and one extraction electrode.

  The curing step is a step of forming the sensitive film by curing the dropped liquid material with the sensitive film forming jig removed from the spin coater.

  Therefore, such a sensitive film forming method is arranged in the spin coater device so as to rotate in-plane on one main surface of the crystal piece with the crystal vibrating element mounted on the sensitive film forming jig, The liquid material that becomes the sensitive film is dropped by curing on one main surface of the quartz resonator element while the quartz is rotating, the sensitive film forming jig is removed from the spin coater, and the dropped liquid material is cured. And a sensitive film is formed. At this time, the sensitive film is formed on the entire main surface of one side of the crystal resonator element. That is, the sensitive film is formed on one excitation electrode and the extraction electrode of the crystal resonator element.

The case where a spin coater is used as an example of a method for forming a sensitive film has been described.
As another example, a sensitive film may be formed using a pipette.
Such a sensitive film forming method is used, for example, when a crystal resonator element is held by a holder, and is a liquid material that becomes a sensitive film by curing or drying toward one excitation electrode of the crystal resonator element. Is dropped and cured to form a sensitive film.

JP 2002-243608 A

However, the conventional sensitive film forming jig has a spin coater so that the crystal vibrating element rotates in-plane on one main surface of the crystal piece of the crystal vibrating element on which the sensitive film is formed in a state where the crystal vibrating element is mounted. Since the structure is arranged in the device, when a sensitive film is formed on one excitation electrode formed on one main surface side of the crystal piece, a sensitive film is formed on the entire surface of one main surface of the crystal piece. There is a fear.
For this reason, when a predetermined substance is detected using a QCM sensor element in which a sensitive film is formed using a conventional sensitive film forming jig, the predetermined substance reacts even with the sensitive film formed by one extraction electrode. In other words, there is a possibility that the detection accuracy for detecting a predetermined substance is lowered.

Also, the conventional sensitive film forming jig is equipped with a crystal resonator element so that the other main surface side of the crystal resonator element is in direct contact so that one main surface side of the crystal resonator element on which the sensitive film is formed is exposed. Because of this structure, there is a risk that deposits such as dust may adhere to the other excitation electrode provided on the other main surface of the crystal piece.
For this reason, when a predetermined substance is detected using a QCM sensor element having a sensitive film formed using a conventional sensitive film forming jig, the adhering substance adhering to the other excitation electrode is detected as a change amount. In other words, there is a possibility that the detection accuracy for detecting a predetermined substance is lowered.

In the conventional method for forming a sensitive film, a sensitive material is formed by dropping and curing a liquid material that becomes a sensitive film on one excitation electrode of a crystal vibrating element mounted on a holding jig using a spoid. It is difficult to drop the liquid material that becomes the sensitive film at a predetermined position, and there is a possibility that the sensitive film cannot be formed at the predetermined position.
For this reason, when a predetermined substance is detected using a QCM sensor element on which a sensitive film is formed, the sensitive film is not formed on one excitation electrode of the quartz-crystal vibrating element, and the detection accuracy for detecting the predetermined substance may be reduced. There is.

In addition, in the conventional method for forming a sensitive film, the crystal resonator element is arranged on a spin coater device so that the crystal resonator element rotates in-plane on one main surface of the crystal resonator element while the crystal resonator element is mounted on a conventional sensitive film forming jig. Since the liquid material before becoming the sensitive film is dropped on one main surface of the crystal resonator while the crystal resonator element is rotating, the liquid material is removed from the spin coater and hardened. There is a concern that a sensitive film may be formed on the entire surface of one main surface of the crystal resonator element.
For this reason, when a predetermined substance is detected using a QCM sensor element on which a sensitive film is formed, the detection accuracy of detecting the predetermined substance because the predetermined substance reacts even with the sensitive film formed on one extraction electrode. May decrease.

Further, in the conventional method for forming a sensitive film, a liquid material that becomes a sensitive film is dropped on one main surface of the crystal resonator, and the dropped liquid material is cured or dried. There is a possibility that the thickness of the formed sensitive film differs depending on the timing.
For this reason, in the conventional method for forming a sensitive film, the variation in the thickness of the sensitive film is increased, which may reduce productivity.

  The present invention improves the detection accuracy of a sensitive film forming jig in which a sensitive film can be easily formed only on one excitation electrode of a quartz vibrating element and a QCM sensor element in which the sensitive film is formed on the quartz vibrating element. An object is to provide a method for forming a sensitive film.

In order to solve the above-described problem, two pairs of fixing portions are extended in the same direction from a predetermined surface of a rectangular parallelepiped base while providing excitation electrodes and extraction electrodes on both main surfaces of a flat plate-like crystal piece. The quartz resonator element mounted on a holder in which two pairs of leg portions are extended in a direction opposite to the fixing portion from a surface of the base portion facing a predetermined one surface on which the fixing portion is extended. A sensitive film forming jig used for forming a sensitive film on the excitation electrode provided on one main surface of a crystal piece, which is a rectangular flat plate,
The first annular groove on one main surface and the first recessed space formed on the inner edge side of the first annular groove and the recessed portion space for the leg portion formed from the first recessed space to the side surface are formed, The bottom surface of the second recess space is formed with a first recess for storing a base portion that can store a part of the base portion of the second recess space and the holder on the bottom surface of the first recess space. The first annular protrusion and the first annular protrusion are formed with a through-hole that is located on the inner edge side of the first annular protrusion and whose opening is the same size as the excitation electrode of the crystal resonator element. Jig,
The outer diameter is larger than the excitation electrode of the crystal resonator element and smaller than the crystal piece of the crystal resonator element, and is disposed at a position in contact with the bottom surface of the second recess space and the first annular convex portion. A first O-ring sandwiched between the crystal piece and the bottom surface of the second recess space, and a cylindrical projection having a flat plate portion and both main surfaces the same size as the bottom surface of the first recess space of the first jig A second base storage space in which a third concave space and a part of the base portion of the holder can be stored on the surface of the cylindrical convex portion facing the surface in contact with the flat plate portion. Formed,
A second jig in which a second annular convex portion having the same size as the excitation electrode of the crystal resonator element is formed on the bottom surface of the third concave space, A second O-ring received in the first annular groove of the first jig and sandwiched between the first jig and the second jig, and the first jig of the first jig When a part of the base of the holder is stored in the recess for storing the base, the excitation electrode of the crystal resonator element is positioned to face the through hole of the through hole, and one of the legs of the holder Part is housed in the recess for the leg,
When a part of the base part of the holder is stored in the second base storage recessed space of the second jig, the second annular convex part comes into contact with the crystal piece of the crystal resonator element. The second annular convex portion is formed, and when the first concave space is fitted into the cylindrical convex portion with the cylindrical convex portion facing the bottom surface side of the first concave space, The annular convex portion and the second annular convex portion are located at positions facing each other.

In order to solve the above-mentioned problem, the first O-ring is mounted so as to be located on the inner edge side of the first annular convex portion at the bottom surface of the second concave space using a sensitive film forming jig. A first O-ring mounting step, and mounting on the first jig while storing a part of the base of the holder in which the crystal resonator element is mounted in the first base storage recess space Arranged so that the excitation electrode of the crystal resonator element is located on the inner edge side of the first O-ring,
A crystal resonator element mounting step of mounting the crystal resonator element so as to be sandwiched between the bottom surface of the second recess space and the crystal piece of the crystal resonator element; and the first annular groove of the first jig A second O-ring mounting step of mounting a second O-ring; and the cylindrical protrusion of the second jig facing the bottom surface of the first recess space of the first jig. A fixing step of fixing the quartz crystal vibration element and the second O-ring between the one jig and the second jig,
A dropping step of dropping a liquid material that becomes a sensitive film by curing or drying in the through hole of the first jig toward the second jig from the first jig, and the dropped liquid material And a sensitive film forming step of forming a sensitive film by curing or drying.

According to such a sensitive film forming jig, it is a first jig in which a through hole having an opening of the same size as the excitation electrode of the crystal resonator element is formed, and the crystal held by the holder When the vibration element is mounted, the first O-ring is sandwiched between the first jig and the crystal piece of the crystal vibration element so that the opening of the through hole and the excitation electrode of the crystal vibration element face each other. Since it has a structure that allows the vibration element to be mounted on the first jig,
Only one excitation electrode of the crystal resonator element held by the holder is exposed through the first jig through-hole.
Therefore, according to such a sensitive film forming jig, when a predetermined substance is detected using the QCM sensor element on which the sensitive film is formed, the sensitive film is formed only on one of the exposed excitation electrodes. Because the sensitive film is not formed on one extraction electrode unlike the conventional sensitive film forming jig, the detection accuracy for detecting a predetermined substance is improved as compared with the case where the conventional sensitive film forming jig is used. be able to.

According to such a sensitive film forming jig, the third concave space is formed on the surface of the cylindrical convex portion which is composed of the flat plate portion and the cylindrical convex portion provided in the flat plate portion and faces the surface in contact with the flat plate portion. A second jig in which a second annular convex portion is formed on the bottom surface of the third concave space, the first annular convex portion of the first jig and the second annular convex portion of the second jig. It is a structure that and are opposed,
When the crystal resonator element mounted on the holder is mounted, the other excitation electrode provided at a position facing one excitation electrode exposed by the through hole is in a state of facing the second jig side. Therefore, the crystal resonator element can be mounted without bringing the excitation electrode into contact with the second jig while the crystal piece of the crystal resonator element is in contact with the second jig.
Therefore, according to such a sensitive film forming jig, when a predetermined substance is detected using a QCM sensor element having a sensitive film formed thereon, a crystal in which no sensitive film is formed as in the conventional sensitive film forming jig. It is possible to prevent foreign matter from adhering to the other excitation electrode of the vibration element, and to improve detection accuracy for detecting a predetermined substance as compared with the case where a conventional sensitive film forming jig is used. Can do.

According to such a method for forming a sensitive film, the quartz vibrating element is mounted on the sensitive film forming jig in which one excitation electrode of the quartz vibrating element is exposed from the through hole when the quartz vibrating element is mounted. Then, since the sensitive film is formed by dripping and curing the liquid material that becomes the sensitive film by curing or drying from one opening of the through hole toward one excitation electrode of the crystal resonator element,
By dropping the liquid material from the opening of the through hole, the liquid material can be easily dropped at a predetermined position, and the sensitive film can be formed at the predetermined position.
For this reason, when a predetermined substance is detected using a QCM sensor element on which a sensitive film is formed, since the sensitive film is formed only at a predetermined position of the crystal vibrating element, here, one excitation electrode, The detection accuracy for detecting a predetermined substance can be improved as compared with the method for forming a sensitive film.

Further, according to such a method for forming a sensitive film, the crystal vibrating element is mounted on the sensitive film forming jig having a structure in which one excitation electrode of the crystal vibrating element is exposed from the through hole when the crystal vibrating element is mounted. A sensitive film is formed by dripping and curing or drying a liquid material that becomes a sensitive film by curing or drying from one opening of the through-hole toward one excitation electrode of the crystal resonator element. Because
A sensitive film can be formed only on one excitation electrode of the quartz resonator element.
For this reason, when a predetermined substance is detected using a QCM sensor element on which a sensitive film is formed, a sensitive film is not formed on one extraction electrode as in the conventional sensitive film forming method. The detection accuracy for detecting a predetermined substance can be improved as compared with the above.

In addition, according to such a method for forming a sensitive film, when the quartz vibrating element held by the holder is mounted on the jig for forming the sensitive film, a part of the leg of the holder is placed in the recessed space for the leg. Since it is stored, a part of the leg is exposed from the sensitive film forming jig, and the sensitive film can be formed in this state.
For this reason, according to such a method for forming a sensitive film, it is possible to measure while dropping a liquid material that becomes a sensitive film by curing or drying, so that the amount of dripping can be controlled, and as a result, it is formed. The thickness of the sensitive film can be controlled.
Therefore, according to such a sensitive film forming method, variations in the thickness of the sensitive film can be suppressed, and productivity can be improved.

(A) is a top view which shows an example of the QCM sensor element formed with the jig for sensitive film formation which concerns on embodiment of this invention, (b) is a jig for sensitive film formation concerning embodiment of this invention. It is sectional drawing which shows an example of the QCM sensor element formed by. It is a disassembled sectional view which shows an example when the crystal oscillation element currently hold | maintained at the holder is mounted in the sensitive film formation jig which concerns on embodiment of this invention. (A) is a top view which shows an example of the 1st jig of the sensitive film formation jig which concerns on embodiment of this invention, (b) is the 2nd of the sensitive film formation jig which concerns on embodiment of this invention. It is sectional drawing which shows an example of one jig. (A) is a top view which shows an example of the 2nd jig of the sensitive film formation jig which concerns on embodiment of this invention, (b) is the 2nd of the sensitive film formation jig which concerns on embodiment of this invention. It is sectional drawing which shows an example of a 2nd jig. It is sectional drawing which shows an example of the state of the 1st O-ring mounting process of the sensitive film | membrane formation method which concerns on embodiment of this invention. It is sectional drawing which shows an example of the state of the QCM sensor element mounting process of the sensitive film | membrane formation method which concerns on embodiment of this invention. It is sectional drawing which shows an example of the state of the 2nd O-ring mounting process of the sensitive film | membrane formation method which concerns on embodiment of this invention. It is sectional drawing which shows an example of the state of the 2nd jig mounting process of the sensitive film | membrane formation method which concerns on embodiment of this invention. It is sectional drawing which shows an example of the state of the fixing process of the sensitive film | membrane formation method which concerns on embodiment of this invention. (A) is sectional drawing which shows an example of the state before the formation process of the sensitive film formation method which concerns on embodiment of this invention, (b) is the formation process of the sensitive film formation method which concerns on embodiment of this invention. It is sectional drawing which shows an example of a back state.

  Next, the best mode for carrying out the present invention will be described. In each drawing, the state of each component is exaggerated for easy understanding.

First, the QCM sensor element formed by the sensitive film forming jig according to the embodiment of the present invention will be described.
For example, as shown in FIGS. 1A and 1B, the QCM sensor element mainly includes a crystal vibrating element, a holder 120 holding the crystal vibrating element, and a sensitive film K. .

  For example, as shown in FIG. 1B, the crystal resonator element includes a crystal piece 111, an excitation electrode 112, and an extraction electrode 113.

  The crystal piece 111 is made of a crystal member that is a piezoelectric material, and is formed, for example, in a disk-like flat plate shape.

For example, as shown in FIG. 1B, the excitation electrode 112 is a pair of two.
One excitation electrode 112 is provided on one main surface of the crystal piece 111 as shown in FIG.
For example, as shown in FIG. 1B, the other excitation electrode 112 is provided on the other main surface of the crystal piece 111 at a position facing the one excitation electrode 112.

For example, two pairs of extraction electrodes 113 are formed.
As shown in FIG. 1A, one lead electrode 113 has one end connected to one excitation electrode 112 and the other end connected to the end of one main surface of the crystal piece 111. positioned. Therefore, the other end of one extraction electrode and one excitation electrode are electrically connected.
The other lead electrode 113 has one end connected to the other excitation electrode 112 and the other end located at the other end of the crystal piece 111. Therefore, the other end portion of the other lead electrode and the other excitation electrode are electrically connected.

Therefore, the quartz resonator element is provided with one excitation electrode 112 and one lead electrode 113 on one main surface of the plate-shaped crystal piece 111, and the other excitation electrode 112 and one on the other main surface of the crystal piece 111. The other extraction electrode 113 is provided.
Further, the crystal resonator element has a characteristic that the crystal piece 111 vibrates at a predetermined frequency when a voltage is applied to the extraction electrode 113 due to the piezoelectric effect and the inverse piezoelectric effect of the crystal piece 111.

The holder 120 holds the crystal resonator element described above.
Moreover, such a holding tool 120 is comprised from the base 121, the fixing | fixed part 122, and the leg part 123, for example, as shown to Fig.1 (a) and FIG.1 (b).

  The base 121 has, for example, a rectangular parallelepiped shape as shown in FIGS. 1 (a) and 1 (b).

As shown in FIG. 1A, the fixing portion 122 is a pair of two.
Further, the fixing portion 122 is made of a conductive material.
Moreover, the fixing | fixed part 122 is extended in the same direction from the predetermined one surface of the base 121, as shown to Fig.1 (a) and FIG.1 (b).
One fixing portion 122 is fixed and held while being electrically connected to one extraction electrode 113 of the above-described crystal vibrating element by, for example, a conductive adhesive (not shown).
The other fixing portion 122 is fixed and held while being electrically connected to the other extraction electrode 113 of the above-described quartz vibrating element by, for example, a conductive adhesive (not shown).

For example, as shown in FIG. 1A, the leg portion 123 is a pair of two.
The leg portion 123 is made of a conductive material.
Moreover, the leg part 123 is extended in the same direction from the surface of the base 121 facing the surface where the fixing | fixed part 122 is extended, as shown to Fig.1 (a) and FIG.1 (b). . Accordingly, the two pairs of leg portions 123 are extended from a predetermined other surface of the silk in the direction opposite to the fixing portion 122.
One leg portion 123 is electrically connected to one fixed portion 122 via a wiring (not shown) inside the base portion 121. Accordingly, one leg 123 is electrically connected to one excitation electrode 112.
The other leg portion 123 is electrically connected to the other fixing portion 123 via a wiring (not shown) inside the base portion 121. Therefore, the other leg 123 is electrically connected to the other excitation electrode 112.

Accordingly, the holder 120 has two pairs of leg portions 123 extending from a predetermined other surface of the base 121 opposite to the predetermined one surface while two pairs of fixing portions 123 are extended from the predetermined one surface of the base 121. It is installed.
In addition, in the holder 120, the one fixing portion 122 and the one leg portion 123 are electrically connected, while the other fixing portion 122 and the other leg portion 123 are electrically connected.
In addition, for example, in the holder 120, one fixing portion 122 is electrically connected to and fixed to one extraction electrode 113 of the crystal resonator element, while the other fixing portion 122 is electrically connected to the other extraction electrode 113 of the crystal resonator element. Connected and fixed,
It has a structure capable of holding a crystal resonator element. At this time, while one excitation electrode 112 of the crystal resonator element and one leg 123 of the holder 120 are electrically connected,
The other excitation electrode 112 of the crystal resonator element and the other leg 123 of the holder 120 are electrically connected.

The sensitive film K has a property of reacting with a predetermined substance and adhering to the predetermined substance.
The sensitive film K is formed by dropping a predetermined liquid material and curing or drying the dropped liquid material.
Here, the sensitive film K is formed, for example, by dripping and curing a liquid material that becomes a sensitive film by being cured to one excitation electrode 112 of the crystal vibrating element.
Here, the case where the sensitive film K is formed only on one excitation electrode 112 of the quartz resonator element is described, but it may be formed on the other excitation electrode 112.

Therefore, in the QCM sensor element, one extraction electrode 113 of the crystal vibration element is connected to one fixing portion 122 of the holder 120, while the other extraction electrode 113 of the crystal vibration element is connected to the other fixing portion 122 of the holder 120. By being connected, the crystal vibrating element 121 is held by the holder 120.
In the QCM sensor element, a sensitive film K that reacts with a predetermined substance and adheres to the predetermined substance is formed on one excitation electrode 112 of the crystal vibration element held by the holder 120.
The QCM sensor element is configured to vibrate when a predetermined substance reacts with the sensitive film K, because the predetermined substance adheres to the sensitive film K and the frequency at which the crystal piece 111 vibrates changes. The amount of the predetermined substance attached can be detected from the amount of change in frequency.

Next, a sensitive film forming jig according to an embodiment of the present invention will be described.
As described above, the sensitive film forming jig according to the embodiment of the present invention is a jig used for forming the sensitive film K on the crystal vibrating element held by the holder 120.

Moreover, the sensitive film forming jig 100 according to the embodiment of the present invention includes a first jig 130, a second jig 140, a first O-ring 150, and a second O-ring 160, as shown in FIG. It has.
Further, as shown in FIG. 2, the sensitive film forming jig 100 according to the embodiment of the present invention has a quartz crystal vibration that is held by the holding tool 120 so that the first O-ring 150 is sandwiched between the first jig 130. The element is mounted, and the second O-ring 160 is mounted on the first jig 130 on which the crystal resonator element is mounted.
After that, the second jig 140 is mounted and can be fixed.

As the first O-ring 150, an annular elastic body is used.
Further, when the first O-ring 150 is sandwiched between a first jig 130 to be described later and the crystal resonator element mounted on the holder 120, the edge on the inner edge side of the surface in contact with the crystal resonator element Is the same size as the excitation electrode 112 of the crystal resonator element.
Therefore, when the first O-ring 150 is sandwiched between a first jig 130 described later and a crystal resonator element mounted on the holder 120, the first O-ring 150 does not contact one excitation electrode 112 of the crystal resonator element, And it is a magnitude | size which contacts one main surface of the crystal piece 111. FIG.
When the first O-ring 150 is fixed between the first jig 130 and the second jig 140 while being sandwiched between the crystal piece 111 of the crystal resonator element and a first jig 130 described later. The airtightness between the crystal resonator element and the first jig 130 is maintained.

As the second O-ring 160, an annular elastic body is used.
Further, the second O-ring 160 can be stored in the first annular groove 131 of the first jig 130 described later when the first jig 130 described later and the second jig 140 described later are fixed. The size is possible.

As shown in FIGS. 2, 3 (a), and 3 (b), the first jig 130 has a rectangular flat plate shape.
Further, as shown in FIGS. 2, 3 (a), and 3 (b), the first jig 130 has an annular groove 131, a first recessed space 132, and a leg recessed space 133 on one main surface. And are formed.
Further, as shown in FIGS. 2, 3 (a) and 3 (b), the first jig 130 has a first base storing recessed space 134 and a second recessed space 134 on the bottom surface of the first recessed space 132. A recessed space 135 is formed.
Further, as shown in FIGS. 2, 3 (a), and 3 (b), the first jig 130 has a second annular groove 136 and a through hole 137 formed on the bottom surface of the second recessed space 135. ing.

As shown in FIG. 3A, the first annular groove 131 is a circular groove when viewed from one main surface side of the first jig 130.
Further, as shown in FIG. 2, when the second jig 140 described later is fixed to the first annular groove 131, the second O-ring 160 can be accommodated in the first annular groove 131. It is a size.

The leg recess space 132 is formed so as to be able to store a part of the leg 123 of the holder 120, and the first base storage recess space 134, which will be described later, has a base 121 of the holder 120. It is formed at a position corresponding to the leg portion 120 of the holder 120 when a part thereof is stored.
Further, when one main surface of the first jig 130 is viewed, the leg recessed space 132 is formed from the first recessed groove 132 to be described later as shown in FIG. Are formed from the first annular groove 131 to the edge of the first jig 130.

As shown in FIGS. 2, 3 (a), and 3 (b), the first recessed space 132 has a circular opening and bottom.
The first recess space 132 has a bottom surface that can accommodate the crystal resonator element and the holder 120 on which the crystal resonator element is mounted. However, at this time, the leg portion 123 of the holder 120 is not included.
As shown in FIGS. 2, 3A and 3B, the first recess space 132 is formed with a first base storage recess space 134 and a second recess space 135 on the bottom surface thereof. Has been.

  The first base storage recessed space 134 has a size capable of storing a part of the base 121 of the holder 120.

The second recess space 135 is formed continuously with the first base storage recess space 134, and the second recess space 135 of the base 121 of the holder 120 that holds the crystal resonator element in the first base storage recess space 134. When a part is accommodated, the size is such that the fixing portion 122 of the holder 120 and the crystal piece 111 of the crystal resonator element can be accommodated.
Moreover, as shown in FIG. 3A, for example, the second recessed space 135 has a rectangular bottom surface.
Further, as shown in FIGS. 2, 3 (a) and 3 (b), the second recessed space 135 has a first annular protruding portion 136 and a through hole 137 formed on the bottom surface thereof.

The second annular protrusion 136 is shown in FIG. 3A when one main surface of the first jig 130 is viewed from the one main surface of the first jig 130 toward the other main surface. As described above, the edge on the inner edge side and the edge on the outer edge side have a concentric circular shape.
Further, the second annular convex portion 136 has a larger inner edge side size than the excitation electrode 112 of the crystal resonator element. In addition, the second annular convex portion 136 has an inner edge side having the same size as the outer edge side edge of the first O-ring 150.
In addition, the second annular convex portion 136 excites the crystal resonator element when a part of the base 121 of the holder 120 holding the crystal resonator element is stored in the first base storing recess space 134. The electrode 112 is formed so as to be located closer to the inner edge than the inner edge.

The through hole 137 is formed from the bottom surface of the second recess space 135 toward the surface facing the second recess space 135. Therefore, the through hole 137 is formed from the bottom surface of the second recessed space 135 toward the other main surface of the first jig 130.
The through-hole 137 is formed on the bottom surface of the second recess space 135 and on the inner side of the inner edge side edge of the first annular protrusion 136.
In addition, when the through-hole 137 accommodates a part of the base 121 of the holder 120 that holds the crystal resonator element in the first base storage recess space 134, the opening portion has the excitation electrode 112 of the crystal resonator element. It is formed in the position which opposes.

The first jig 130 has a structure in which the first O-ring 150 can be mounted on the bottom surface of the second concave space 135 and in contact with the inner edge side surface of the first annular convex portion 136. ing.
Further, in the first jig 130, when a part of the base 121 of the holder 120 in which the crystal vibrating element is held in the first base storage recess space 134 is stored, the first jig 130 is held in the leg recess space 133. The leg portion 123 of the tool 120 can be stored.
Further, when the first jig 130 stores a part of the base 121 of the holder 120 holding the crystal resonator element in the first base storage recess space 134, the first jig 130 and the crystal piece 111 of the crystal resonator element and the first piece 130. One annular convex portion 136 is brought into contact with each other, and the excitation electrode 112 of the crystal resonator element is positioned at a position facing the opening portion of the through hole 137.
Further, when the first jig 130 stores a part of the base 121 of the holder 120 holding the crystal resonator element in the first base storage recessed space 134, the first O-ring 160 is mounted. As a result, the first O-ring 160 can be sandwiched between the bottom surface of the second recess space 135 and the crystal piece 111 of the crystal resonator element.

As shown in FIGS. 2, 4 (a), and 4 (b), the second jig 140 is a flat plate portion 141 and a columnar convex portion 142 provided at the center of one main surface of the flat plate portion 141. And is composed mainly of.
Further, the second jig 140 can accommodate the cylindrical convex portion 142 in the first concave space 132 when the cylindrical convex portion 142 is directed to the first concave space 132 side of the first jig 130. It is a size. Accordingly, the second jig 140 has such a size that the cylindrical convex portion 142 can fit into the first concave space 132 of the first jig 130.
The second jig 140 has a second base portion at a position facing the first base housing recessed space 134 when the cylindrical convex portion 142 faces the first recessed space 132 side of the first jig 130. A storage recess space 145 (145a, 145b) is formed.

The flat plate part 141 is provided in a rectangular flat plate shape, for example.
Moreover, the size of the main surface of the flat plate portion 141 is the same as the size of the main surface of the first jig 130.

Further, the flat plate portion 141 is, for example, a surface in contact with a columnar convex portion 142 to be described later, and a second base storage recess space 145 at a position facing the first base storage recess space 134 of the first jig 130. Part 145a is formed.
In addition, although the case where a part 145a of the second base storage recessed space 145 is formed in the flat plate portion 141 is described here, when the sensitive film forming jig according to the embodiment of the present invention is used. If the base 121 of the holder 120 can be housed in the space formed by the first base housing recessed space 134 and the second base housing recessed space 145 of the first jig 130, a cylinder which will be described later. You may form only in the convex part 142. FIG.

The cylindrical convex portion 142 has both main surfaces in a cylindrical shape, and both main surfaces have the same size as the bottom surface of the first concave space 132 of the first jig 130.
Further, the cylindrical convex portion 142 is provided on one main surface of the flat plate portion 141.
Further, the cylindrical convex portion 142 has a portion 145b of the second base storage concave space 145 and a third concave space 143 formed on the surface of the cylindrical convex portion 142 that opposes the surface that contacts the flat plate portion 141. .
The cylindrical convex portion 142 has a second annular convex portion 144 formed on the bottom surface of the third concave space 143.

A portion 145b of the second base storage recessed space 145 is formed when the cylindrical protrusion 142 of the second jig 140 faces the surface of the first jig 130 facing the first recess space 131. It is formed at a position facing the storage recess space 134.
Further, a part 145 b of the second base recess space 145 is a part of the part 145 a of the second base storage recess space 145 formed in the flat plate part 141, and the second base recess space 145. Is forming. At this time, the second base recess space 145 has a structure in which the base 121 of the holder 120 can be stored.

When the third recess space 143 accommodates a part of the base 121 of the holder 120 holding the crystal resonator element in the second base storage recess space 145, the third recess space 143 and the fixing portion 122 of the holder 120 and the crystal The size is such that the crystal element 111 of the vibration element can be accommodated.
Moreover, as shown in FIG. 4A, for example, the third recess space 143 has a rectangular bottom surface.

The second annular convex portion 144 is formed on the bottom surface of the third concave space 143 as shown in FIGS. 2, 4 (a), and 4 (b).
In addition, the second annular convex portion 144 is a surface facing the surface in contact with the bottom surface of the third concave space 143 when a part of the base 121 of the holding tool 120 is stored in the second base storing concave space 145. Is formed at a position in contact with the crystal piece 111 of the crystal resonator element. At this time, the excitation electrode 112 of the crystal resonator element is not in contact with the second annular convex portion 144.
In addition, when the second annular convex portion 144 accommodates a part of the base 121 of the holder 120 in the second base accommodating concave space 145, the second annular convex portion 144 is crystallized from the inner edge side of the second annular convex portion 144. The excitation electrode 112 of the vibration element is formed so as to be located on the inner edge side.
Further, as shown in FIG. 4A, the second annular convex portion 144 has an inner edge side edge and an outer edge side when the cylindrical convex portion 142 is viewed from the cylindrical convex portion 142 in a direction toward the flat plate portion 141. Concentric with the edge.
Further, the second annular convex portion 144 has a surface opposite to the surface in contact with the third concave space 143 when the first jig 130 and the second jig 140 are fixed. It is located in the position which opposes the annular convex part 136 of this.
Therefore, the second annular convex portion 144 has the same size as the excitation electrode 112 of the crystal resonator element in the size of the inner edge side.

Therefore, in the second jig 140, when a part of the base 121 of the holder 120 is stored in the second base storage recess space 145, the second annular projection 144 and the excitation electrode 112 of the crystal resonator element are in contact with each other. In this state, the excitation electrode 112 can be mounted so as to be positioned on the inner edge side of the second annular convex portion 144.
Moreover, since the 2nd jig 140 can fit now the cylindrical convex part 142 and the 1st recessed part space 132 of the 1st jig 130, the cylindrical convex part 142 is made into the 1st recessed part space. By storing in 132, it can be easily arranged at a predetermined position.

Although the sensitive film forming jig 100 according to the embodiment of the present invention is not particularly illustrated, the first jig 130 and the second jig 140 can be fixed.
For example, in the sensitive film forming jig 100 according to the embodiment of the present invention, screw through holes (not shown) are formed in the first jig 130 and the second jig 140. The surface forming the edge of the screw through hole is threaded, and the first jig 130 and the second jig 140 can be fixed by a fixing screw (not shown). Yes. At this time, the screw head of the fixing screw does not protrude from the surface of the second jig 140 facing the surface in contact with the second jig 140.

In addition, the sensitive film forming jig 100 according to the embodiment of the present invention has the first O mounted on the first jig 130 when the sensitive film K is formed on the crystal vibrating element held by the holder 120. While the ring 150 is sandwiched between the bottom surface of the second recessed space 135 of the first jig 130 and the crystal piece 111 of the crystal resonator element without contacting the excitation electrode 112 of the crystal resonator element, the second jig 140 and the crystal resonator The second O-ring 160 is sandwiched between the first jig 130 and the second jig 140 so that the excitation electrode 112 of the element does not come into contact.
At this time, one excitation electrode 112 of the crystal resonator element is exposed from the through hole 137 of the first jig 130.

According to the sensitive film forming jig 100 according to the embodiment of the present invention, the first jig 130 in which the through hole 137 having the opening of the same size as the excitation electrode 112 of the crystal resonator element is formed. When the crystal resonator element held by the holder 120 is mounted, the first O-ring 150 is sandwiched between the first jig 130 and the crystal piece 111 of the crystal resonator element, and the opening of the through hole 137 Since the crystal resonator element can be mounted on the first jig 130 so that the excitation electrode 112 of the crystal resonator element faces,
Only one excitation electrode 112 of the crystal resonator element held by the holder 120 through the through hole 137 of the first jig 130 can be exposed.
For this reason, according to the sensitive film forming jig 100 according to the embodiment of the present invention, when a predetermined substance is detected using the QCM sensor element on which the sensitive film K is formed, one of the exposed excitations is detected. Since the sensitive film K can be formed only on the electrode 112 and the sensitive film K is not formed on the one extraction electrode 113 unlike the conventional sensitive film forming jig, it is compared with the case where the conventional sensitive film forming jig is used. Thus, the detection accuracy for detecting a predetermined substance can be improved.

According to the sensitive film forming jig 100 according to the embodiment of the present invention, the cylindrical convexity that is composed of the flat plate portion 141 and the cylindrical convex portion 142 provided in the flat plate portion 141 and faces the surface in contact with the flat plate portion 141. A second jig 140 in which a third concave space 143 is formed on the surface of the portion 142 and a second annular convex portion 144 is formed on the bottom surface of the third concave space 143, The first annular protrusion 136 and the second annular protrusion 144 of the second jig 140 are positioned to face each other.
When the crystal resonator element mounted on the holder 120 is mounted, the other excitation electrode 112 provided at a position facing one excitation electrode 112 exposed by the through hole 137 faces the second jig 140 side. Therefore, the crystal resonator element can be mounted without bringing the excitation electrode 112 into contact with the second jig 140 while the crystal piece 111 of the crystal resonator element is in contact with the second jig 140.
Therefore, according to the sensitive film forming jig 100 according to the embodiment of the present invention, when a predetermined substance is detected using the QCM sensor element on which the sensitive film K is formed, the conventional sensitive film forming jig is used. Thus, it is possible to prevent the attachment of dust or the like to the other excitation electrode of the quartz resonator element in which the sensitive film K is not formed, as compared with the case where a conventional sensitive film forming jig is used. The detection accuracy for detecting a substance can be improved.

  In addition, according to the sensitive film forming jig 100 according to the embodiment of the present invention, when a part of the base 121 of the holder 120 is stored in the first base storage recess space 134, the opening of the through hole 137 is a quartz crystal. A through-hole 137 is formed so as to face the excitation electrode 112 of the vibration element, and when a part of the base 121 of the holder 120 is stored in the second base storage recess space 134, the second annular protrusion A second annular projection 144 is formed so that 144 does not come into contact with the excitation electrode 112 of the crystal resonator element, and the second jig 140 is moved so that the cylindrical projection 142 faces the bottom surface side of the first recess space 132. When fitted into one jig, the opening of the first base storage recess space 134 and the opening of the second base storage recess space 145 are positioned so as to face each other. Holding tool being held The base 120 of 20 easily can be mounted on the first jig 130, the second jig 140 to the first jig 130 crystal vibrating element is mounted can be easily mounted.

Next, a method for forming a sensitive film according to an embodiment of the present invention will be described.
In the sensitive film forming method according to the embodiment of the present invention, the above-described sensitive film forming jig 100 (see FIG. 2) is used.

  The method for forming a sensitive film according to the embodiment of the present invention includes a first O-ring mounting process, a crystal vibrating element mounting process, a second O-ring mounting process, a fixing process, a dropping process, and a curing process.

(First O-ring mounting process)
In the first O-ring mounting step, as shown in FIG. 5, the first O-ring 150 is positioned at the bottom surface of the second concave space 135 and on the inner edge side of the first annular convex portion 136. Is a process of mounting.

  As described above, the first jig 130 is formed in a rectangular flat plate shape, and has a first annular groove 131, a first recess space 132, and a leg recess space 133 (FIG. 3) on one main surface. (See (a)) is formed. Further, the first jig 130 has a first base storage recess space 134 and a second recess space 135 formed on the bottom surface of the first recess space 132. The first jig 130 has a first annular convex portion 136 and a through hole 137 formed on the bottom surface of the second concave space.

  As described above, the first O-ring 150 has an annular shape, and when it is sandwiched between the first jig 130 and the crystal resonator element mounted on the holder 120 in the fixing process described later, The shape of the edge portion on the inner edge side of the surface in contact with the element is the same size as the excitation electrode 112 of the crystal resonator element. Therefore, when the first O-ring 150 is sandwiched between a first jig 130 (to be described later) and a crystal resonator element mounted on the holder 120, the first O-ring 150 does not contact one excitation electrode 112 of the crystal resonator element, And it is a magnitude | size which contacts one main surface of the crystal piece 111. FIG.

(Quartz crystal element mounting process)
In the crystal resonator element mounting step, as shown in FIG. 6, a part of the base 121 of the holder 120 on which the crystal resonator element is mounted is stored in the first base storage recess space 134. The excitation electrode 112 of the crystal resonator element is disposed on the inner edge side of the first O-ring 150 mounted on the first jig 130, and the bottom surface of the second recess space 135 and the crystal In this step, the crystal resonator element is mounted so as to be sandwiched between the crystal pieces 111 of the resonator element. In FIG. 6, the first O-ring 150 shows a state in which it is sandwiched between the crystal piece 111 of the crystal resonator element and the first jig 130.

The crystal resonator element is held by the holder 120.
As described above, the crystal resonator element includes one excitation electrode 112 and one extraction electrode 113 (see FIG. 1A) on one main surface of the plate-shaped crystal piece 111, while the crystal piece 111 includes The other excitation electrode 112 and the other extraction electrode 113 are provided on the other main surface.
Further, the crystal resonator element has a characteristic that the crystal piece 111 vibrates at a predetermined frequency when a voltage is applied to the extraction electrode 113 due to the piezoelectric effect and the inverse piezoelectric effect of the crystal piece 111.

As described above, the holder 120 has a pair of two leg portions from the other predetermined surface of the base 121 facing the predetermined surface while the two fixing portions 123 are extended from the predetermined surface of the base 121. 123 is extended.
In addition, in the holder 120, the one fixing portion 122 and the one leg portion 123 are electrically connected, while the other fixing portion 122 and the other leg portion 123 are electrically connected.
In addition, for example, in the holder 120, one fixing portion 122 is electrically connected to and fixed to one extraction electrode 113 of the crystal resonator element, while the other fixing portion 122 is electrically connected to the other extraction electrode 113 of the crystal resonator element. By being connected and fixed to each other, it is possible to hold the crystal resonator element. At this time, one excitation electrode 112 of the crystal resonator element and one leg 123 of the holder 120 are electrically connected, while the other excitation electrode 112 of the crystal resonator element and the other leg 123 of the holder 120 are connected. And are electrically connected.

When the first jig 130 stores a part of the base 121 of the holder 120 in which the crystal resonator element is held in the first base storage recessed space 134, the first jig 130 stores the leg 120 in the recess 120 for leg. The leg portion 123 can be stored.
Further, when the first jig 130 stores a part of the base 121 of the holder 120 holding the crystal resonator element in the first base storage recess space 134, the first jig 130 and the crystal piece 111 of the crystal resonator element and the first piece 130. One annular convex part 136 is brought into contact with each other, and the excitation electrode 111 of the crystal resonator element is located at a position facing the opening part of the through hole 137.

  Accordingly, in the crystal resonator element mounting step, a part of the base 121 of the holder 120 holding the crystal resonator element is stored in the first base housing recess space 134 and the first O-ring 150 is replaced with the crystal resonator element. Between the quartz piece 111 and the bottom surface of the second recess space 135, and the bottom surface of the second recess space 135 so that the excitation electrode 112 of the crystal resonator element faces the opening of the through hole 137. A crystal resonator element is mounted on the first jig 130 on which the first O-ring 150 is mounted at a position in contact with the inner edge side surface of the annular convex portion 136.

(Second O-ring mounting process)
The second O-ring mounting step is a step of mounting the second O-ring 150 in the first annular groove 131 of the first jig 130.
In the second O-ring mounting process, the second O-ring 160 is mounted in the first annular groove 131 of the first jig 130 on which the first O-ring 150 and the crystal resonator element are mounted.

(Fixing process)
The fixing step includes the first jig 130 and the second jig 140 in a state where the cylindrical convex portion 142 of the second jig 140 faces the bottom surface side of the first concave space 132 of the first jig 130. In this step, the crystal element and the second O-ring 150 are sandwiched and fixed by the jig 140.

  As described above, when the second jig 140 accommodates a part of the base 121 of the holder 120 in the second base storage recess space 145, the second annular projection 144 and the excitation electrode of the crystal resonator element The structure is such that the excitation electrode 112 can be mounted on the inner edge side of the second annular convex portion 144 in a state where the 112 does not contact.

The second jig 140 has a structure that can be fixed to the first jig 130, although not particularly shown.
For example, a screw through hole (not shown) is formed in the first jig 130 and the second jig 140, and the surface forming the edge of the screw through hole of the second jig 130 is threaded. The first jig 130 and the second jig 140 can be fixed by a fixing screw (not shown). At this time, the screw head of the fixing screw does not protrude from the surface of the second jig facing the surface in contact with the second jig.

In the fixing process, the cylindrical jig of the second jig 140 is placed on the first jig 120 on which the first O-ring 150 and the crystal vibrating element held by the holder 120 and the second O-ring 160 are mounted. The second jig 140 is mounted so that the portion 142 faces the first concave space 132 side of the first jig 130, and the first jig 130 and the second jig 140 are fixed.
At this time, one excitation electrode 112 of the crystal resonator element is exposed from the through hole 137 of the first jig 130.

(Drip process)
The dropping step is a step of dropping a liquid material that becomes the sensitive film K by curing or drying the through hole 137 of the first jig 130 toward the second jig 140 from the first jig 130. It is.
Here, as described above, the case where the sensitive film K is formed by dripping a predetermined liquid material and curing is described as an example, and thus the case where the sensitive film K is formed by curing the predetermined material is taken as an example. explain.
As described above, the first jig 130 on which the first O-ring 150, the second O-ring 160, and the crystal vibrating element held by the holder 120 are mounted is fixed to the second jig 140. In this state, one excitation electrode 112 of the crystal resonator element is exposed from the through hole 137 of the first jig 130.
Therefore, in the dropping step, the liquid material that becomes the sensitive film K is dropped by being cured on one excitation electrode 112 of the quartz-crystal vibrating element exposed from the through hole 137 of the first jig 130.
At this time, since the first O-ring 150 is located between the bottom surface of the second recessed space 135 of the first jig 130 and the crystal piece 111 of the crystal resonator element, Even if the liquid material is dropped, the liquid material is not dropped on the extraction electrode 113 (see FIG. 1A) that is not exposed.

In the dropping step, as described above, one leg portion 123 and one excitation electrode 112 of the crystal resonator element are electrically connected, and the other leg portion 123 and the other excitation electrode 112 of the crystal resonator element are connected to each other. Are electrically connected, and by measuring the leg portion 123 of the holder 120 exposed from the sensitive film forming jig 100, the liquid material that becomes the sensitive film K by being cured is dropped. It is possible to measure the frequency of the crystal piece 111 of the crystal resonator element and the crystal impedance of the crystal resonator element in real time.
When the liquid material that becomes the sensitive film K is dropped by being cured, the liquid material is dropped on the one excitation electrode 112, and the frequency of the crystal piece 111 of the crystal resonator element is equivalent to the dropped liquid material. And the crystal impedance of the crystal resonator element changes.
Therefore, in the dropping step, the amount of the liquid material that becomes the sensitive film K by being cured can be easily controlled, and the thickness of the sensitive film K formed by curing can be controlled. .
That is, in the dropping step, it is possible to easily control the amount of the sensitive film K before being cured, so that variations in the thickness of the sensitive film K can be suppressed.

(Sensitive film formation process)
The sensitive film forming step is a step of forming a sensitive film by curing or drying the dropped liquid material.

According to the sensitive film forming method according to the embodiment of the present invention, the sensitive film is configured such that one excitation electrode 112 of the crystal resonator element is exposed from the through hole 137 when the crystal resonator element is mounted. A crystal vibrating element is mounted on the forming jig 100, and a liquid material that becomes the sensitive film K is dropped and cured by curing from one opening of the through hole 137 toward one excitation electrode 112 of the crystal vibrating element. Since the sensitive film K is formed, the liquid material that becomes the sensitive film K when cured can be easily dropped at a predetermined position by dropping from the opening of the through hole 137. It can be formed at a predetermined position.
For this reason, when a predetermined substance is detected using the QCM sensor element on which the sensitive film K is formed, the sensitive film K is formed only at a predetermined position of the crystal vibrating element, here, one excitation electrode 112. Therefore, the detection accuracy for detecting a predetermined substance can be improved as compared with the conventional method for forming a sensitive film.

Further, according to the sensitive film forming method according to the embodiment of the present invention, one excitation electrode 112 of the crystal resonator element is exposed from the through hole 137 when the crystal resonator element is mounted. A quartz vibrating element is mounted on the sensitive film forming jig 100, and a liquid material that becomes the sensitive film K is dropped and cured from one opening of the through-hole 137 toward one excitation electrode 112 of the quartz vibrating element. As a result, the sensitive film K is formed, so that the sensitive film K can be formed only on one excitation electrode 112 of the crystal resonator element.
For this reason, when a predetermined substance is detected using a QCM sensor element on which a sensitive film is formed, the sensitive film K is not formed on one extraction electrode 113 as in the conventional sensitive film forming method. The detection accuracy for detecting a predetermined substance can be improved as compared with the formation method.

In addition, according to the method for forming a sensitive film according to the embodiment of the present invention, when the crystal vibrating element held by the holding tool 120 is mounted on the sensitive film forming jig 100, the leg portion 123 of the holding tool 120 is used. Since a part of the leg part 123 is accommodated in the recess part 133 for the leg part, a part of the leg part 123 is exposed from the jig 100 for forming the sensitive film, and the sensitive film K is formed in this state. Can do.
For this reason, according to such a method for forming a sensitive film according to the embodiment of the present invention, the liquid material that becomes the sensitive film K can be measured while being dropped by being cured. As a result, the thickness of the formed sensitive film K can be controlled.
Therefore, according to the method for forming a sensitive film according to the embodiment of the present invention, variations in the thickness of the sensitive film K can be suppressed and productivity can be improved.

  In addition, although the case where the second annular convex portion of the second jig and the crystal piece of the crystal vibrating element are in direct contact with each other has been described, for example, the second annular convex portion and the crystal piece of the crystal vibrating element An annular cushioning member may be disposed between the two. At this time, the annular buffer member has a structure that does not contact the other excitation electrode of the crystal resonator element.

  Moreover, although the case where the 2nd jig and the 1st jig are being fixed with the screw is explained, if the 1st jig and the 2nd jig can be fixed, for example, using a clip It may be fixed.

  Moreover, although the case where the second jig and the first jig are fixed by screws is described, if the first jig and the second jig can be fixed, for example, the first jig You may fix by gravity concerning.

  Moreover, although the jig which forms a sensitive film | membrane in the hold | maintained crystal vibration element is demonstrated, you may connect two or more so that a several crystal vibration element can be formed simultaneously, for example.

  Moreover, although the case where the sensitive film is formed by dropping a predetermined liquid material and curing is described, the sensitive film may be formed by dripping and drying another predetermined liquid material. .

DESCRIPTION OF SYMBOLS 110 Quartz vibration element 111 Quartz piece 112 Excitation electrode 113 Extraction electrode 120 Holder 121 Base part 122 Fixing part 123 Leg part K Sensing film 130 First jig 131 First annular groove 132 First recessed part space 133 Recessed part space for leg parts 134 1st base storage recessed space 135 2nd recessed space 136 1st cyclic | annular convex part 137 Through-hole 140 2nd jig 141 Flat plate part 142 Cylindrical convex part 143 3rd recessed part space 144 2nd cyclic | annular convex part 145 Second base storage recessed space 150 First O-ring 160 Second O-ring

Claims (2)

While the excitation electrode and the extraction electrode are provided on both main surfaces of the flat crystal piece, two pairs of fixing portions are extended in the same direction from a predetermined surface of the rectangular parallelepiped base, and the fixing portions are extended. One main surface of the crystal piece of the crystal resonator element mounted on a holder in which two pairs of leg portions extend in a direction opposite to the fixed portion from the surface of the base portion facing a predetermined one surface A sensitive film forming jig used when forming a sensitive film on the excitation electrode provided in
It is a rectangular flat plate, and is formed on one main surface from the first annular groove to the inner edge side of the first annular groove and from the first concave space to the side surface. A recessed space for a leg portion is formed, and a first recessed space for storing a base portion capable of storing a part of the second recessed space and the base portion of the holder is formed on a bottom surface of the first recessed space. The opening is located on the bottom surface of the second recess space on the inner edge side of the first annular protrusion and the first annular protrusion, and the opening is the same size as the excitation electrode of the crystal resonator element. A first jig in which a through hole is formed;
The outer diameter is larger than the excitation electrode of the crystal resonator element and smaller than the crystal piece of the crystal resonator element, and is disposed at a position in contact with the bottom surface of the second recess space and the first annular convex portion. A first O-ring sandwiched between a crystal piece and the bottom surface of the second recess space;
The flat plate portion and the two main surfaces are formed of a cylindrical convex portion having the same size as the bottom surface of the first concave space of the first jig, and on the surface of the cylindrical convex portion facing the surface in contact with the flat plate portion. A second base storage space capable of storing a part of the third recess space and the base of the holder is formed, and the size of the edge on the inner edge side is formed on the bottom surface of the third recess space. A second jig on which a second annular convex portion having the same size as the excitation electrode of the crystal resonator element is formed;
A second O-ring received in the first annular groove of the first jig and sandwiched between the first jig and the second jig;
With
When storing a part of the base portion of the holder in the first base storage recessed space of the first jig,
The excitation electrode of the crystal resonator element is positioned to face the through hole of the through hole,
A part of the leg part of the holder is housed in the recessed part space for the leg part,
When a part of the base part of the holder is stored in the second base storage recessed space of the second jig, the second annular convex part comes into contact with the crystal piece of the crystal resonator element. The second annular projection is formed on the
When the first concave space is fitted into the cylindrical convex portion with the cylindrical convex portion facing the bottom surface side of the first concave space, the first annular convex portion and the second annular convex portion are A jig for forming a sensitive film, characterized in that it is located at an opposing position. Using the sensitive film forming jig according to claim 1,
A first O-ring mounting step of mounting the first O-ring so as to be located on the inner edge side of the first annular convex portion at the bottom surface of the second concave space;
Inside the first O-ring mounted on the first jig while storing a part of the base of the holder on which the crystal resonator element is mounted in the concave space for storing the first base A crystal resonator element that is arranged so that the excitation electrode of the crystal resonator element is positioned on the edge side and is mounted between the bottom surface of the second recess space and the crystal piece of the crystal resonator element. Mounting process;
A second O-ring mounting step of mounting the second O-ring in the first annular groove of the first jig;
In the state where the cylindrical convex portion of the second jig is directed to the bottom surface side of the first concave space of the first jig, the crystal vibrating element and the first jig and the second jig A fixing step of fixing while sandwiching the second O-ring;
A dropping step of dropping a liquid material that becomes a sensitive film by curing or drying the through hole of the first jig toward the second jig from the first jig;
A sensitive film forming step of curing or drying the dropped liquid material to form a sensitive film;
A method for forming a sensitive film, comprising:

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