JP2012209940A - High frequency transmission line - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a high frequency transmission line which ensures high slow-wave effect without enlarging the occupied area in the width direction.SOLUTION: The high frequency transmission line is provided with a columnar conductor 5 where ground conductors 3, 4 are arranged at positions separated by a distance D1 in the +x direction from the intersection position CP with a signal conductor 1, and the n-th ground conductor 3 from this side and the n-th ground conductor 4 from this side are short-circuited, a columnar conductor 7 where ground conductors 3, 4 are arranged at positions separated by a distance D2 in the +x direction from the intersection position CP with a signal conductor 1, and the n-th ground conductor 3 from this side and the (n+1)th ground conductor 4 from this side are short-circuited, and the like.

Description

  The present invention relates to a high-frequency transmission line capable of obtaining a high slow wave effect.

A high-frequency transmission line capable of obtaining a slow wave effect is high by periodically providing a conductor plate arranged orthogonal to the signal line without being connected to the signal line of the coplanar waveguide or the microstrip line. A slow wave effect is obtained (see, for example, Patent Documents 1 and 2).
A high-frequency transmission line in which conductor plates are arranged in a plurality of layers has also been proposed (see, for example, Non-Patent Document 1).
In addition, a high-frequency transmission line in which conductor plates are arranged above and below the signal line conductor has been proposed (see, for example, Patent Document 3).

US 6950590 B2 WO 2004/112185 A1 JP 2007-306290 A

Jae Jin Lee, “A Slow-Wave Microstrip Line With a High-Q and a High Dielectric Constant for Millimeter-Wave CMOS Application”, IEEE MTT letters, Vol. 20, No. 7, July 2010.

  Since the conventional high-frequency transmission line is configured as described above, it is necessary to increase the length of the conductor plate in the direction orthogonal to the signal line in order to obtain a high delay effect. For this reason, there has been a problem that it is necessary to enlarge the occupied area in the width direction of the high-frequency transmission line.

  The present invention has been made to solve the above-described problems, and an object thereof is to obtain a high-frequency transmission line capable of obtaining a high delay effect without enlarging the occupied area in the width direction.

  The high-frequency transmission line according to the present invention includes a signal line conductor disposed in the first layer of the insulator and a plurality of lines disposed in the second layer of the insulator and extending in a direction different from the extending direction of the signal line conductor. A plurality of second ground conductor plates arranged on the third layer of the insulator, extending in a direction different from the extending direction of the signal line conductor, and extending substantially parallel to the first ground conductor plate. A ground conductor plate, and in a region between the nth first ground conductor plate and the (n + 1) th first ground conductor plate from the front of the plurality of first ground conductor plates, n from the front of the second ground conductor plate. A portion of the second ground conductor plate is disposed, and the first ground conductor plate and the second ground conductor plate are separated by a first distance in the right direction from the intersection where the signal conductor is intersected. From the front of the nth first ground conductor plate and the plurality of second ground conductor plates from the front of the plurality of first ground conductor plates A plurality of first ground conductors that short-circuit the second ground conductor plate, and a position that is a second distance in the left direction from the intersecting position, the nth from the front of the plurality of first ground conductor plates. A plurality of second ground conductors for short-circuiting the first ground conductor plate and the nth second ground conductor plate from the front of the plurality of second ground conductor plates, and a third distance in the right direction from the intersection position. And a plurality of third grounds that short-circuit the nth second ground conductor plate from the front of the plurality of second ground conductor plates and the (n + 1) th first ground conductor plate from the front of the plurality of first ground conductor plates. From the front of the n-th second ground conductor plate and the plurality of first ground conductor plates from the front of the plurality of second ground conductor plates at a position left by a fourth distance in the left direction from the intersection position. A plurality of fourth ground conductors for short-circuiting the (n + 1) th first ground conductor plate are provided. The first distance and the third distance is different places, or in which portion the distance of the second distance and the fourth different are as are present at least 1 or more.

  According to the present invention, the signal line conductor disposed in the first layer of the insulator and the plurality of first lines disposed in the second layer of the insulator and extending in a direction different from the extending direction of the signal line conductor. The ground conductor plate and the third layer of the insulator at a position opposite to the first layer with respect to the second layer of the insulator, are extended in a direction different from the extension direction of the signal line conductor, and the first ground A plurality of second ground conductor plates extending substantially parallel to the conductor plate, and the nth first ground conductor plate and the (n + 1) th first ground conductor plate from the front of the plurality of first ground conductor plates A part of the nth second ground conductor plate from the front of the second ground conductor plate is disposed in the area between the first ground conductor plate and the second ground conductor plate at a crossing position where the first ground conductor plate and the signal line conductor intersect. N-th first ground conductor plate from the front of the plurality of first ground conductor plates at a position that is a right distance away from the first ground conductor plate, A plurality of first ground conductors that short-circuit the nth second ground conductor plates from the front of the plurality of second ground conductor plates, and a plurality of second ground conductor plates at positions spaced apart from each other by a second distance in the left direction. A plurality of second ground conductors for short-circuiting the nth first ground conductor plate from the front side of the first ground conductor plate and the nth second ground conductor plate from the front side of the plurality of second ground conductor plates; The n + 1st first ground from the front of the nth second ground conductor plate and the plurality of first ground conductor plates from the front of the plurality of second ground conductor plates at a position separated by a third distance in the right direction from A plurality of third ground conductors for short-circuiting the conductor plates, and an nth second ground conductor plate from the front of the plurality of second ground conductor plates at a position that is a fourth distance leftward from the intersection position And the (n + 1) th first ground conductor plate from the front of the plurality of first ground conductor plates A plurality of fourth ground conductors to be entangled are provided, and at least one or more places where the first distance and the third distance are different or where the second distance and the fourth distance are different exist. Therefore, there is an effect that a high delay effect can be obtained without increasing the occupied area in the width direction.

It is a perspective view which shows the high frequency transmission line by Embodiment 1 of this invention. FIG. 2 is a top transparent view of FIG. 1. It is sectional drawing of the A-A 'surface in FIG. It is sectional drawing of the B-B 'surface in FIG. It is sectional drawing of the C-C 'surface in FIG. It is sectional drawing of the D-D 'surface in FIG. (A) is a top view of the current path of the ground conductor in the conventional high-frequency transmission line shown in FIG. 48, and (b) is a top view of the current path of the ground conductor in the high-frequency transmission line according to Embodiment 1 of the present invention. . It is explanatory drawing which shows the result of the simulation performed in order to confirm an effect. It is a perspective view which shows the high frequency transmission line by Embodiment 2 of this invention. FIG. 10 is a top transparent view of FIG. 9. It is sectional drawing of the A-A 'surface in FIG. It is sectional drawing of the B-B 'surface in FIG. It is sectional drawing of the C-C 'surface in FIG. It is sectional drawing of the D-D 'surface in FIG. It is a current pathway figure of the grounding conductor in the high frequency transmission line by Embodiment 2 of this invention. It is explanatory drawing which shows the result of the simulation performed in order to confirm an effect. It is a perspective view which shows the high frequency transmission line by Embodiment 3 of this invention. FIG. 18 is a top transparent view of FIG. 17. It is sectional drawing of the A-A 'surface in FIG. It is sectional drawing of the B-B 'surface in FIG. It is sectional drawing of the C-C 'surface in FIG. It is a perspective view which shows the high frequency transmission line by Embodiment 4 of this invention. FIG. 23 is a top transparent view of FIG. 22. It is sectional drawing of the A-A 'surface in FIG. It is sectional drawing of the BB 'surface in FIG. FIG. 24 is a cross-sectional view of the C-C ′ plane in FIG. 23. It is sectional drawing of the DD 'surface in FIG. It is a side view of FIG. (A) is a side view of the current path of the ground conductor in the conventional high-frequency transmission line shown in FIG. 48, and (b) is a side view of the current path of the ground conductor in the high-frequency transmission line according to Embodiment 4 of the present invention. . It is a perspective view which shows the high frequency transmission line by Embodiment 5 of this invention. FIG. 31 is a top transparent view of FIG. 30. It is sectional drawing of the A-A 'surface in FIG. It is sectional drawing of the B-B 'surface in FIG. It is sectional drawing of the C-C 'surface in FIG. It is sectional drawing of the D-D 'surface in FIG. It is explanatory drawing which shows that the capacitance component Cs which consists of a signal line conductor and the ground conductor of the + x direction of a signal line conductor becomes large, so that D3 is small with respect to D1. Description showing simulation results of the conventional structure, the high-frequency transmission line according to the first embodiment, the high-frequency transmission line according to the fifth embodiment (part 1), and the slow wave rate of the high-frequency transmission line according to the fifth embodiment (part 2) FIG. It is a perspective view which shows the high frequency transmission line by Embodiment 6 of this invention. FIG. 39 is a top transparent view of FIG. 38. It is sectional drawing of the A-A 'surface in FIG. It is sectional drawing of the B-B 'surface in FIG. It is sectional drawing of the C-C 'surface in FIG. It is sectional drawing of the D-D 'surface in FIG. It is a side view of FIG. (A) is a side view of the current path of the ground conductor in the conventional high-frequency transmission line shown in FIG. 49, and (b) is a side view of the current path of the ground conductor in the sixth embodiment of the present invention. (A) is a center sectional view of the conventional high-frequency transmission line shown in FIG. 49, and (b) is a distributed constant circuit diagram of the conventional high-frequency transmission line shown in FIG. 45 (a). (A) is a central sectional view in the sixth embodiment of the present invention, and (b) is a distributed constant circuit diagram in the sixth embodiment shown in FIG. 45 (b). It is a bird's-eye view of the conventional high frequency transmission line described in FIG. 1. (a) of nonpatent literature 1. It is an overhead view of the conventional high frequency transmission line described in FIG.

Embodiment 1 FIG.
1 is a perspective view showing a high-frequency transmission line according to Embodiment 1 of the present invention, and FIG. 2 is a top transparent view of FIG.
3 is a cross-sectional view of the AA ′ plane in FIG. 2, and FIG. 4 is a cross-sectional view of the BB ′ plane in FIG.
5 is a cross-sectional view of the CC ′ plane in FIG. 2, and FIG. 6 is a cross-sectional view of the DD ′ plane in FIG.

First, the structure of the high-frequency transmission line will be briefly described.
1 to 6, a signal line conductor 2, a ground conductor 3, and the like are disposed inside a dielectric 1 that is an insulator.
The signal line conductor 2 is a line for transmitting a high-frequency signal, and is disposed in the L1 layer (first layer) that is the inner layer of the dielectric 1.
The ground conductor 3 that is the first ground conductor plate is disposed in the L2 layer (second layer) that is the inner layer of the dielectric 1 and extends in a direction different from the extending direction of the signal line conductor 1. N (N is an integer of 2 or more) ground conductors 3 are arranged in the extending direction of the signal line conductor 1.

The ground conductor 4 as the second ground conductor plate is disposed in the L3 layer (third layer) of the dielectric 1 in the opposite direction to the L1 layer with respect to the L2 layer, and extends in a direction different from the extending direction of the signal line conductor 1. And it extends substantially parallel to the ground conductor plate 3.
Although N or N + 1 ground conductors 4 are arranged in the extending direction of the signal line conductor 1 (N + 1 are arranged in the example of FIG. 1), n ( (n = 1, 2,..., N) A part of the nth ground conductor plate 4 in the ground conductor plate 4 is arranged in a region between the nth ground conductor 3 and the (n + 1) th ground conductor 3. Yes.
For example, in the top transparent view of FIG. 2, the lower side is “near” in the drawing.

The columnar conductor 5 as the first ground conductor is disposed at a position away from the intersection position CP where the ground conductors 3 and 4 intersect the signal line conductor 1 by a distance D1 (first distance) in the + x direction (right direction). Thus, the nth grounding conductor 3 from the front and the nth grounding conductor 4 from the front are short-circuited.
The columnar conductor 6 which is the second ground conductor is disposed at a position away from the intersection position CP where the ground conductors 3 and 4 intersect the signal line conductor 1 by a distance D1 (second distance) in the −x direction (left direction). Thus, the nth ground conductor 3 from the front and the nth ground conductor 4 from the front are short-circuited.

The columnar conductor 7 which is the third ground conductor is disposed at a position away from the intersection position CP where the ground conductors 3 and 4 intersect the signal line conductor 1 by a distance D2 (third distance) in the + x direction. The nth ground conductor 3 and the n + 1th ground conductor 4 from the front are short-circuited.
The columnar conductor 8 which is the fourth ground conductor is disposed at a position away from the intersection position CP where the ground conductors 3 and 4 intersect the signal line conductor 1 by a distance D2 (fourth distance) in the −x direction. The n-th ground conductor 3 and the (n + 1) -th ground conductor 4 from the front are short-circuited.

Next, the structure of the high-frequency transmission line will be specifically described.
As shown in FIG. 3, the signal line conductor 2 is disposed in the L1 layer that is the inner layer of the dielectric 1, and the ground conductor 4 is disposed in the L3 layer that is the inner layer of the dielectric 1.
In addition, in the L2 layer that is the inner layer of the dielectric 1, the ground conductor 3 is disposed at a position that is separated by a distance D1 in the + x direction from the intersection position CP (the center in the width direction of the signal line conductor 2). The ground conductor 3 is disposed at a position that is separated from the position CP by a distance D1 in the −x direction.
The ground conductor 3 and the ground conductor 4 are electrically connected by the columnar conductors 5 and 6 at a position that is separated from the intersection position CP by the distance D1 in the + x direction and the −x direction.

As shown in FIG. 4, the signal line conductor 2 is disposed in the L1 layer that is the inner layer of the dielectric 1, and the ground conductor 3 is disposed in the L2 layer that is the inner layer of the dielectric 1.
Further, in the L3 layer which is the inner layer of the dielectric 1, the ground conductor 4 is disposed at a position away from the intersection position CP by the distance D1 in the + x direction, and is separated from the intersection position CP by the distance D1 in the −x direction. The ground conductor 4 is arranged at the position.
The ground conductor 3 and the ground conductor 4 are electrically connected by the columnar conductors 5 and 6 at a position that is separated from the intersection position CP by the distance D1 in the + x direction and the −x direction.

As shown in FIG. 5, the signal line conductor 2 is disposed in the L1 layer that is the inner layer of the dielectric 1, and the ground conductor 3 is disposed in the L2 layer that is the inner layer of the dielectric 1.
Further, in the L3 layer which is the inner layer of the dielectric 1, the ground conductor 4 is disposed at a position away from the intersection position CP by the distance D2 in the + x direction, and is separated from the intersection position CP by the distance D2 in the −x direction. The ground conductor 4 is arranged at the position.
The ground conductor 3 and the ground conductor 4 are electrically connected by the columnar conductors 7 and 8 at positions separated from the intersecting position CP by the distance D2 in the + x direction and the −x direction.

As shown in FIG. 6, the signal line conductor 2 is disposed in the L1 layer that is the inner layer of the dielectric 1, and the ground conductor 4 is disposed in the L3 layer that is the inner layer of the dielectric 1.
Further, in the L2 layer which is the inner layer of the dielectric 1, the ground conductor 3 is disposed at a position away from the intersection position CP by the distance D2 in the + x direction, and is separated from the intersection position CP by the distance D2 in the −x direction. The ground conductor 3 is arranged at the position.
The ground conductor 3 and the ground conductor 4 are electrically connected by the columnar conductors 7 and 8 at positions separated from the intersecting position CP by the distance D2 in the + x direction and the −x direction.

Next, the effect of the high frequency transmission line will be described.
48 is an overhead view of a conventional high-frequency transmission line described in FIG. 1. (a) of Non-Patent Document 1. FIG.
7A is a top view of the current path of the ground conductor in the conventional high-frequency transmission line shown in FIG. 48, and FIG. 7B is the current path of the ground conductor in the high-frequency transmission line according to Embodiment 1 of the present invention. It is a top view.
In both cases, the width of the high-frequency transmission line is 2 × D1.
7B corresponds to the portion shown in FIGS. 3 and 4, and the dotted frame F2 corresponds to the portion shown in FIGS.

The current path R1 of the ground conductor in the conventional high-frequency transmission line is a straight line as shown in FIG. 7A. In the first embodiment, as shown in FIG. Since the current path R2 is wave-shaped, it can be made longer than the current path R1 of the ground conductor in the conventional high-frequency transmission line.
Thus, in the first embodiment, the inductance component per unit length can be increased, and most of the capacitance component per unit length is determined by the ground conductor close to the signal line conductor. For example, it becomes equivalent to the conventional high-frequency transmission line described in Non-Patent Document 1. Therefore, since the product of the inductance component and the capacitance component per unit length is increased, the slow wave rate of the high-frequency transmission line is increased.
Therefore, the slow wave effect can be enhanced as compared with the conventional high-frequency transmission line, and the effective relative dielectric constant of the transmission line can be increased.
As a result, in order to obtain a high slow wave effect, it is not necessary to expand the occupied area in the width direction as in the conventional high-frequency transmission line, so that the high-frequency transmission line can be reduced in size.

Here, FIG. 8 is an explanatory diagram showing the result of a simulation performed to confirm the above-described effect.
FIG. 8 shows the simulation result of the effective relative permittivity of the conventional high frequency transmission line and the simulation result of the effective relative permittivity of the high frequency transmission line according to the first embodiment.
This simulation is a three-dimensional electromagnetic field simulation using a finite element method, in which the dielectric constant of the dielectric 1 is 4.0, the signal line conductor 2, the ground conductors 3 and 4, and the columnar conductors 5 to 8 are conductors, the distance D1. Is 40 [um] and the distance D2 is 10, 20, and 30 [um].
From the simulation results of FIG. 8, it can be seen that the effective relative permittivity of the high-frequency transmission line according to Embodiment 1 is higher than the effective relative permittivity of the conventional high-frequency transmission line, and the improvement of the slow wave effect can be confirmed. .

In the first embodiment, all the columnar conductors 5 and 6 are arranged at a distance D1 from the intersection position CP, and all the columnar conductors 7 and 8 are arranged at a distance D2 from the intersection position CP. Although the ones that are separated are shown, if the arrangement position of at least one or more columnar conductors 7 or columnar conductors 8 is a position that is separated from the intersecting position CP by a distance D2 (the remaining columnar conductors 7 and 8 The arrangement position can be longer than the current path R1 of the ground conductor in the conventional high-frequency transmission line.
Alternatively, if at least one or more columnar conductors 5 or columnar conductors 6 are arranged at a distance D1 from the intersection position CP (the remaining columnar conductors 5 and 6 are arranged at a distance D2 from the intersection position CP). It can be longer than the current path R1 of the ground conductor in the conventional high-frequency transmission line.

In the first embodiment, an example is shown in which the ground conductors 3 and 4 are disposed in the L2 layer and the L3 layer, which are layers below the L1 layer in which the signal line conductor 1 is disposed. The ground conductor 3 (third ground conductor plate) is disposed on the L4 layer (fourth layer), which is a layer above the L1 layer on which the line conductor 1 is disposed, and the L5 layer (the layer above the L4 layer ( The ground conductor 4 (fourth ground conductor plate) may be disposed on the fifth layer.
Alternatively, instead of arranging the ground conductors 3 and 4 in the L2 layer and the L3 layer, the ground conductors 3 and 4 may be arranged in the L4 layer and the L5 layer.

When the ground conductors 3 and 4 are arranged in the L2 layer and the L3 layer and the ground conductors 3 and 4 are arranged in the L4 layer and the L5 layer, the number of the ground conductors 3 arranged in the L4 layer is M. M (M is an integer of 2 or more) may be the same as or different from N, which is the number of ground conductors 3 arranged in the L2 layer. The number of ground conductors 4 arranged in the L5 layer is M or M + 1.
The arrangement position of the columnar conductor 5 that electrically connects the ground conductor 3 arranged in the L4 layer and the ground conductor 4 arranged in the L5 layer is separated from the intersection position CP by a distance D5 (fifth distance) in the + x direction. Although it is the position, this distance D5 may be the same as or different from the distance D1.
In addition, the arrangement position of the columnar conductor 6 that electrically connects the ground conductor 3 arranged in the L4 layer and the ground conductor 4 arranged in the L5 layer is a distance D6 (sixth distance) in the −x direction from the intersection position CP. Although it is a distant position, this distance D6 may be the same as or different from the distance D1.

The arrangement position of the columnar conductor 7 that electrically connects the ground conductor 3 arranged in the L4 layer and the ground conductor 4 arranged in the L5 layer is separated from the intersection position CP by a distance D7 (seventh distance) in the + x direction. Although it is a position, this distance D7 may be the same as or different from the distance D2.
Further, the arrangement position of the columnar conductor 8 that electrically connects the ground conductor 3 arranged in the L4 layer and the ground conductor 4 arranged in the L5 layer is the distance D8 (eighth distance) in the −x direction from the intersection position CP. Although it is a distant position, this distance D8 may be the same as or different from the distance D2.

In the first embodiment, the microstrip line type high-frequency transmission line in which the signal line conductor 2 is arranged in the L1 layer and the ground conductors 3 and 4 are arranged in the L2 layer and the L3 layer is shown. However, other material configurations may be used.
For example, a coplanar waveguide type having a ground conductor in the L1 layer, a suspended line type in which the dielectric 1 is composed of a plurality of materials, a strip line type in which a ground conductor is disposed above the L1 layer, and a signal line conductor A transmission line type in which 2 is arranged on the surface layer of the dielectric 1 may be used.
Moreover, the dielectric 1 should just have insulation, and a part or all of the dielectric 1 may be air.

Embodiment 2. FIG.
In the first embodiment, the arrangement positions of all the columnar conductors 5 and 6 are positions away from the intersection position CP by the distance D1, and the arrangement positions of all the columnar conductors 7 and 8 are the distance D2 from the intersection position CP. Although the distance is shown, the sum of the distance D1 (first distance) related to the columnar conductor 5 and the distance D1 (second distance) related to the columnar conductor 6 and the distance D2 related to the columnar conductor 7 are shown. The high-frequency transmission line may be configured so that (the third distance) and the sum of the distances D2 (fourth distances) related to the columnar conductors 8 are the same. In addition, the location where the sum is the same should just exist at least 1 or more.

9 is a perspective view showing a high-frequency transmission line according to Embodiment 2 of the present invention, and FIG. 10 is a top transparent view of FIG.
11 is a cross-sectional view of the AA ′ plane in FIG. 10, and FIG. 12 is a cross-sectional view of the BB ′ plane in FIG.
13 is a cross-sectional view taken along the line CC ′ in FIG. 10, and FIG. 14 is a cross-sectional view taken along the line DD ′ in FIG.

The structure of the high-frequency transmission line will be specifically described.
As shown in FIG. 11, the signal line conductor 2 is disposed in the L1 layer that is the inner layer of the dielectric 1, and the ground conductor 4 is disposed in the L3 layer that is the inner layer of the dielectric 1.
Further, in the L2 layer which is the inner layer of the dielectric 1, the ground conductor 3 is disposed at a position away from the intersection position CP by the distance D1 in the + x direction, and is separated from the intersection position CP by the distance D2 in the −x direction. The ground conductor 3 is arranged at the position.
The ground conductor 3 and the ground conductor 4 are electrically connected by the columnar conductor 5 at a position separated from the intersection position CP by the distance D1 in the + x direction, and are separated from the intersection position CP by the distance D2 in the −x direction. Are electrically connected by the columnar conductors 8.

As shown in FIG. 12, the signal line conductor 2 is disposed in the L1 layer that is the inner layer of the dielectric 1, and the ground conductor 3 is disposed in the L2 layer that is the inner layer of the dielectric 1.
Further, in the L3 layer which is the inner layer of the dielectric 1, the ground conductor 4 is disposed at a position away from the intersection position CP by the distance D1 in the + x direction, and is separated from the intersection position CP by the distance D2 in the −x direction. The ground conductor 4 is arranged at the position.
The ground conductor 3 and the ground conductor 4 are electrically connected by the columnar conductor 5 at a position separated from the intersection position CP by the distance D1 in the + x direction, and are separated from the intersection position CP by the distance D2 in the −x direction. Are electrically connected by the columnar conductors 8.

As shown in FIG. 13, the signal line conductor 2 is disposed in the L1 layer that is the inner layer of the dielectric 1, and the ground conductor 3 is disposed in the L2 layer that is the inner layer of the dielectric 1.
Further, in the L3 layer which is the inner layer of the dielectric 1, the ground conductor 4 is disposed at a position away from the intersection position CP by the distance D2 in the + x direction, and is separated from the intersection position CP by the distance D1 in the −x direction. The ground conductor 4 is arranged at the position.
The ground conductor 3 and the ground conductor 4 are electrically connected by the columnar conductor 7 at a position separated from the intersection position CP by the distance D2 in the + x direction, and are separated from the intersection position CP by the distance D1 in the −x direction. Are electrically connected by the columnar conductors 6.

As shown in FIG. 14, the signal line conductor 2 is disposed in the L1 layer that is the inner layer of the dielectric 1, and the ground conductor 4 is disposed in the L3 layer that is the inner layer of the dielectric 1.
Further, in the L2 layer which is the inner layer of the dielectric 1, the ground conductor 3 is disposed at a position away from the intersection position CP by the distance D2 in the + x direction, and is separated from the intersection position CP by the distance D1 in the −x direction. The ground conductor 3 is arranged at the position.
The ground conductor 3 and the ground conductor 4 are electrically connected by the columnar conductor 7 at a position separated from the intersection position CP by the distance D2 in the + x direction, and are separated from the intersection position CP by the distance D1 in the −x direction. Are electrically connected by the columnar conductors 6.

Next, the effect of the high frequency transmission line will be described.
FIG. 15 is a current path diagram of a ground conductor in a high-frequency transmission line according to Embodiment 2 of the present invention.
The width of this high-frequency transmission line is 2 × D1.
The dotted line frame F3 in FIG. 15 corresponds to the part shown in FIGS. 11 and 12, and the dotted line frame F4 corresponds to the part shown in FIGS.

The current path R1 of the ground conductor in the conventional high-frequency transmission line is linear as shown in FIG. 7 (a). In the second embodiment, as shown in FIG. 15, the current path R3 of the ground conductor is shown. Can be made longer than the current path R1 of the ground conductor in the conventional high-frequency transmission line.
As described above, in the second embodiment, the inductance component per unit length can be increased, and most of the capacitance component per unit length is determined by the ground conductor close to the signal line conductor. For example, it becomes equivalent to the conventional high-frequency transmission line described in Non-Patent Document 1. Therefore, since the product of the inductance component and the capacitance component per unit length is increased, the slow wave rate of the high-frequency transmission line is increased.
In the first embodiment, the impedances of the dotted frame F1 and the dotted frame F2 shown in FIG. 7B are discontinuous. In the second embodiment, the dotted frame F3 and the dotted frame are used. The impedance at F4 is continuous.
Therefore, similarly to the first embodiment, the slow wave effect can be enhanced as compared with the conventional high-frequency transmission line, and the matching can be broadened in each cross section of the high-frequency transmission line as compared with the first embodiment. it can.
As a result, for example, matching with a 50Ω line can be achieved, and insertion loss can be reduced.

Here, FIG. 16 is an explanatory diagram showing the result of a simulation performed to confirm the above-described effect.
FIG. 16 shows the simulation result of the insertion loss when the 50Ω line is connected before and after the high frequency transmission line of the first embodiment, and the 50Ω line is connected before and after the high frequency transmission line of the second embodiment. The simulation result of the insertion loss at the time is shown.
This simulation is a three-dimensional electromagnetic field simulation using a finite element method, in which the dielectric constant of the dielectric 1 is 4.0, the signal line conductor 2, the ground conductors 3 and 4, and the columnar conductors 5 to 8 are conductors, the distance D1. Is 40 [um] and the distance D2 is 10, 20, and 30 [um].
From the simulation results of FIG. 16, it can be seen that the high-frequency transmission line according to the second embodiment has better reflection characteristics and pass characteristics than the high-frequency transmission line according to the first embodiment, confirming a reduction in insertion loss. can do.

Embodiment 3 FIG.
17 is a perspective view showing a high-frequency transmission line according to Embodiment 3 of the present invention, and FIG. 18 is a top transparent view of FIG.
19 is a cross-sectional view taken along the line AA ′ in FIG. 18, and FIG. 20 is a cross-sectional view taken along the line BB ′ in FIG.
FIG. 21 is a cross-sectional view of the CC ′ plane in FIG.

First, the structure of the high-frequency transmission line will be briefly described.
17 to 21, the same reference numerals as those in FIGS.
The ground conductor 11 that is the first ground conductor plate is disposed in the L2 layer (second layer) that is the inner layer of the dielectric 1 and extends in a direction different from the extending direction of the signal line conductor 1. Note that N (N is an integer of 2 or more) ground conductors 11 are arranged in the extending direction of the signal line conductor 1.

The ground conductor 12, which is the first ground conductor, is arranged at a position away from the intersection position CP where the ground conductor 11 intersects the signal line conductor 1 by a distance D1 (first distance) in the + x direction. The ground conductor 11 and the even-numbered ground conductor 11 are short-circuited.
For example, in the upper surface transmission diagram of FIG. 18, the lower side is “front” in the figure, and the lowermost ground conductor 11 is the first ground conductor 11.
The ground conductor 13 which is the second ground conductor is disposed at a position away from the intersection position CP where the ground conductor 11 intersects the signal line conductor 1 by a distance D1 (second distance) in the −x direction, and is odd from the front. The even-numbered ground conductor 11 and the even-numbered ground conductor 11 are short-circuited.

The ground conductor 14 which is the third ground conductor is arranged at a position away from the intersection position CP where the ground conductor 11 intersects the signal line conductor 1 by a distance D2 (third distance) in the + x direction, and is even-numbered from the front. The ground conductor 11 and the odd-numbered ground conductor 11 are short-circuited.
The ground conductor 15 as the fourth ground conductor is disposed at a position away from the intersection position CP where the ground conductor 11 intersects the signal line conductor 1 by a distance D2 (fourth distance) in the −x direction, and is even from the front. The first ground conductor 11 and the odd-numbered ground conductor 11 are short-circuited.

Next, the structure of the high-frequency transmission line will be specifically described.
As shown in FIG. 19, the signal line conductor 2 is disposed in the L1 layer that is the inner layer of the dielectric 1, and the ground conductor 11 having a length of 2 × D1 is disposed in the L2 layer that is the inner layer of the dielectric 1. Is arranged.
As shown in FIG. 20, the signal line conductor 2 is arranged in the L1 layer that is the inner layer of the dielectric 1, and the distance D1 in the + x direction from the intersection position CP is placed in the L2 layer that is the inner layer of the dielectric 1. The ground conductor 12 is disposed at a position separated by a distance D1, and the ground conductor 13 is disposed at a position separated from the intersection position CP by a distance D1 in the −x direction.

As shown in FIG. 21, the signal line conductor 2 is disposed in the L1 layer that is the inner layer of the dielectric 1, and the distance D2 in the + x direction from the intersection position CP is disposed in the L2 layer that is the inner layer of the dielectric 1. The ground conductor 14 is disposed at a position separated by a distance D2, and the ground conductor 15 is disposed at a position separated from the intersection position CP by a distance D2 in the −x direction.
As a result, the odd-numbered ground conductors 11 and the even-numbered ground conductors 11 from the front are electrically connected by the ground conductors 12 and 13 at positions separated by the distance D1 in the + x direction and the −x direction from the intersection position CP. Has been.
Further, the even-numbered ground conductors 11 and the odd-numbered ground conductors 11 from the front are electrically connected by the ground conductors 14 and 15 at positions separated from the intersection position CP by the distance D2 in the + x direction and the −x direction. ing.

Next, the effect of the high frequency transmission line will be described.
In the first and second embodiments, the ground conductors 3 and 4 are arranged in two layers (L2 layer and L3 layer), and the ground conductor 3 and the ground conductor 4 are electrically connected via the columnar conductors 5 to 8. In the third embodiment, a plurality of ground conductors 11 are arranged in one layer, and each ground conductor 11 is electrically connected via the ground conductors 12 to 15 in the same layer. It is different in that it is connected.
The effect of the third embodiment is the same as the effect of the first embodiment, but the structure can be simplified because the ground conductor 11 need only be arranged in one layer.

In the third embodiment, all the ground conductors 12 and 13 are arranged at a distance D1 from the intersection position CP, and all the ground conductors 14 and 15 are arranged at a distance D2 from the intersection position CP. Although it is shown that it is a distant position, if the disposition position of at least one or more ground conductors 14 or 15 is away from the intersection position CP by a distance D2 (the remaining ground conductors 14 and 15) The arrangement position can be longer than the current path R1 of the ground conductor in the conventional high-frequency transmission line.
Alternatively, if the arrangement position of at least one or more ground conductors 12 or 13 is separated from the intersection position CP by a distance D1 (the arrangement positions of the remaining ground conductors 12 and 13 are the distance D1 from the intersection position CP). It can be longer than the current path R1 of the ground conductor in the conventional high-frequency transmission line.

In the first embodiment, an example is shown in which the ground conductor 11 is disposed in the L2 layer, which is a layer below the L1 layer in which the signal line conductor 1 is disposed. The ground conductor 11 (second ground conductor plate) may be disposed on the L3 layer (third layer), which is a layer above the L1 layer.
Alternatively, instead of arranging the ground conductor 11 in the L2 layer, the ground conductor 11 may be arranged in the L3 layer.

When the ground conductor 11 is arranged in the L2 layer and the ground conductor 11 is arranged in the L3 layer, the number of the ground conductors 11 arranged in the L3 layer is M, but this M (M is an integer of 2 or more). May be the same as or different from N, which is the number of ground conductors 11 arranged in the L2 layer.
The arrangement position of the ground conductor 12 that electrically connects the odd-numbered ground conductors 11 and the even-numbered ground conductors 11 from the front is a position away from the intersection position CP by a distance D5 (fifth distance) in the + x direction. However, the distance D5 may be the same as or different from the distance D1.
Further, the arrangement position of the ground conductor 13 that electrically connects the odd-numbered ground conductors 11 and the even-numbered ground conductors 11 from the front is away from the intersection position CP by the distance D6 (sixth distance) in the −x direction. The distance D6 may be the same as or different from the distance D1.

The arrangement position of the ground conductor 14 that electrically connects the even-numbered ground conductor 11 and the odd-numbered ground conductor 11 from the front is a position that is separated from the intersection position CP by the distance D7 (seventh distance) in the + x direction. However, the distance D7 may be the same as or different from the distance D2.
Further, the arrangement position of the ground conductor 15 that electrically connects the even-numbered ground conductor 11 and the odd-numbered ground conductor 11 from the front is separated by a distance D8 (eighth distance) in the −x direction from the intersection position CP. This distance D7 may be the same as or different from the distance D2.

In the third embodiment, all the ground conductors 12 and 13 are arranged at a distance D1 from the intersection position CP, and all the ground conductors 14 and 15 are arranged at a distance D2 from the intersection position CP. Although it is shown that it is a separated position, the arrangement position of the ground conductor 13 is a position away from the intersection position CP by the distance D2, and the arrangement position of the ground conductor 15 is separated from the intersection position CP by the distance D1. It may be the position.
Alternatively, the arrangement position of the ground conductor 12 may be a position away from the intersection position CP by a distance D2, and the arrangement position of the ground conductor 14 may be a position away from the intersection position CP by a distance D1.

  In the first to third embodiments, the example in which the distance D1 is greater than the distance D2 has been described. However, the distance D1 may be not less than half and not more than twice the distance D2. It should be noted that there should be at least one location where the distance D1 is not less than half and not more than twice the distance D2.

Embodiment 4 FIG.
FIG. 22 is a perspective view showing a high-frequency transmission line according to Embodiment 4 of the present invention.
23 is a top transparent view of FIG. 22, FIG. 24 is a sectional view of the AA ′ plane in FIG. 23, FIG. 25 is a sectional view of the BB ′ plane in FIG. 23, and FIG. 27 is a sectional view taken along the line DD ′ in FIG. 23, and FIG. 28 is a side view of FIG.

The structure of the high-frequency transmission line will be specifically described.
As shown in FIG. 24, the signal line conductor 101 is disposed on the inner layer L1 of the dielectric 301, and the ground conductor 202 is disposed on the inner layer L3 of the dielectric 301.
As shown in FIG. 25, the signal line conductor 101 is disposed in the inner layer L1 layer of the dielectric 301, the ground conductor 201 is disposed in the inner layer L2 layer of the dielectric 301, and the ground conductor 202 is disposed in the inner layer L3 layer of the dielectric 301. The ground conductor 201 and the ground conductor 202 are electrically connected via one or a plurality of columnar conductors 211.

As shown in FIG. 26, the signal line conductor 101 is disposed on the inner layer L1 of the dielectric 301, and the ground conductor 201 is disposed on the inner layer L2 of the dielectric 301.
As shown in FIG. 27, the signal line conductor 101 is disposed in the inner layer L1 layer of the dielectric 301, the ground conductor 201 is disposed in the inner layer L2 layer of the dielectric 301, and the ground conductor 202 is disposed in the inner layer L3 layer of the dielectric 301. The ground conductor 201 and the ground conductor 202 are electrically connected via one or a plurality of columnar conductors 211.

Next, the effect of the high frequency transmission line will be described.
FIG. 29 (a) is a side view of the current path of the ground conductor in the conventional high-frequency transmission line shown in FIG. 48, and FIG. 29 (b) is the current path of the ground conductor in the high-frequency transmission line according to Embodiment 4 of the present invention. It is a side view.
The current paths I1 and I1 ′ of the ground conductor in the conventional high-frequency transmission line are linear as shown in FIG. 29 (a). In the fourth embodiment, as shown in FIG. 29 (b), Since the current path I2 of the ground conductor has a wave shape, it can be made longer than the current paths I1 and I1 ′ of the ground conductor in the conventional high-frequency transmission line.

Thus, in the fourth embodiment, the inductance component per unit length can be increased, and most of the capacitance component per unit length is determined by the ground conductor close to the signal line conductor. For example, it becomes equivalent to the conventional high-frequency transmission line described in Non-Patent Document 1. Therefore, since the product of the inductance component and the capacitance component per unit length is increased, the slow wave rate of the high-frequency transmission line is increased.
Therefore, the slow wave effect can be enhanced as compared with the conventional high-frequency transmission line.
As a result, in order to obtain a high slow wave effect, it is not necessary to expand the occupied area in the width direction as in the conventional high-frequency transmission line, so that the high-frequency transmission line can be reduced in size.

Embodiment 5 FIG.
30 is a perspective view showing a high-frequency transmission line according to Embodiment 5 of the present invention.
31 is a top transparent view of FIG. 30, FIG. 32 is a sectional view of the AA ′ plane in FIG. 31, FIG. 33 is a sectional view of the BB ′ plane in FIG. 31, and FIG. FIG. 35 is a sectional view taken along the line DD ′ in FIG.

The structure of the high-frequency transmission line will be specifically described.
As shown in FIG. 32, the signal line conductor 101 is disposed in the inner layer L1 of the dielectric 301, and the ground conductor 202 is disposed in the inner layer L3 of the dielectric 301.
A ground conductor 203 is disposed at a distance D1 in the + x direction from the center plane CP on the inner layer L1 of the dielectric 301, and a ground conductor 203 is disposed at a distance D2 from the center plane CP in the -x direction on the inner layer L1 of the dielectric 301. The ground conductor 201 is disposed on the inner layer L2 of the dielectric 301 at a distance D1 from the center plane CP in the + x direction, and is grounded on the inner layer L2 layer of the dielectric 301 at a distance D2 from the center plane CP in the −x direction. A conductor 201 is disposed.
Further, the ground conductor 201 and the ground conductor 203 positioned in the + x direction from the center plane CP are electrically connected via one or a plurality of columnar conductors 211a, and the ground conductor 201 positioned in the − direction from the center plane CP and the ground are connected. The conductor 203 is electrically connected via one or a plurality of columnar conductors 212a, and the ground conductor 203 and the ground conductor 202 located in the + x direction from the center plane CP are electrically connected via one or a plurality of columnar conductors 211b. The ground conductor 203 and the ground conductor 202 located in the − direction from the center plane CP are electrically connected via one or more columnar conductors 212b.

As shown in FIG. 33, the signal line conductor 101 is disposed in the inner layer L1 layer of the dielectric 301, and the ground conductor 202 is disposed in the inner layer L3 layer of the dielectric 301.
A ground conductor 203 is disposed at a distance D1 in the + x direction from the center plane CP on the inner layer L1 of the dielectric 301, and a ground conductor 203 is disposed at a distance D2 from the center plane CP in the -x direction on the inner layer L1 of the dielectric 301. The ground conductor 202 is disposed on the inner layer L3 of the dielectric 301 at a distance of D1 from the center plane CP in the + x direction, and is grounded on the inner layer L3 of the dielectric 301 at a distance of D2 from the center plane CP in the −x direction. A conductor 202 is disposed.
Further, the ground conductor 201 and the ground conductor 203 positioned in the + x direction from the center plane CP are electrically connected via one or a plurality of columnar conductors 211a, and the ground conductor 201 positioned in the − direction from the center plane CP and the ground are connected. The conductor 203 is electrically connected via one or a plurality of columnar conductors 212a, and the ground conductor 203 and the ground conductor 202 located in the + x direction from the center plane CP are electrically connected via one or a plurality of columnar conductors 211b. The ground conductor 203 and the ground conductor 202 located in the − direction from the center plane CP are electrically connected via one or more columnar conductors 212b.

As shown in FIG. 34, the signal line conductor 101 is disposed in the inner layer L1 layer of the dielectric 301, and the ground conductor 202 is disposed in the inner layer L3 layer of the dielectric 301.
The ground conductor 203 is disposed at a distance D3 in the + x direction from the center plane CP on the inner layer L1 of the dielectric 301, and the ground conductor 203 is disposed at a distance D4 from the center plane CP in the −x direction on the inner layer L1 of the dielectric 301. The ground conductor 202 is disposed on the inner layer L3 of the dielectric 301 at a distance of D3 from the center plane CP in the + x direction, and is grounded on the inner layer L3 of the dielectric 301 at a distance of D4 from the center plane CP in the −x direction. A conductor 202 is disposed.
Further, the ground conductor 201 and the ground conductor 203 located in the + x direction from the center plane CP are electrically connected via one or a plurality of columnar conductors 213a, and the ground conductor 201 located in the − direction from the center plane CP and the ground The conductor 203 is electrically connected via one or more columnar conductors 214a, and the ground conductor 203 and the ground conductor 202 located in the + x direction from the center plane CP are electrically connected via one or more columnar conductors 213b. The ground conductor 203 and the ground conductor 202 located in the − direction from the center plane CP are electrically connected via one or a plurality of columnar conductors 214b.

As shown in FIG. 35, the signal line conductor 101 is disposed in the inner layer L1 layer of the dielectric 301, and the ground conductor 202 is disposed in the inner layer L3 layer of the dielectric 301.
The ground conductor 203 is disposed at a distance D3 in the + x direction from the center plane CP on the inner layer L1 of the dielectric 301, and the ground conductor 203 is disposed at a distance D4 from the center plane CP in the −x direction on the inner layer L1 of the dielectric 301. The ground conductor 201 is disposed on the inner layer L2 of the dielectric 301 at a distance of D3 from the center plane CP in the + x direction, and is grounded on the inner layer L2 of the dielectric 301 at a distance of D4 in the −x direction from the center plane CP. A conductor 201 is disposed.
Further, the ground conductor 201 and the ground conductor 203 located in the + x direction from the center plane CP are electrically connected via one or a plurality of columnar conductors 213a, and the ground conductor 201 located in the − direction from the center plane CP and the ground The conductor 203 is electrically connected via one or more columnar conductors 214a, and the ground conductor 203 and the ground conductor 202 located in the + x direction from the center plane CP are electrically connected via one or more columnar conductors 213b. The ground conductor 203 and the ground conductor 202 located in the − direction from the center plane CP are electrically connected via one or a plurality of columnar conductors 214b.

Here, in FIGS. 32 to 35, D1 = D2, D3 = D4, and D1> D3, and the cross sections of FIGS. 32 to 35 are periodically arranged.
Next, the effect of the high frequency transmission line will be described.
In the first embodiment, the case where the two-layer ground conductor is positioned below the signal line conductor is described. However, in the fifth embodiment, the two-layer ground conductor is disposed above and below the signal line conductor. The case where each is located is demonstrated.

Due to the above structure, among the current paths of the fifth embodiment, the path viewed from the top is the same as the current path shown in FIG. 7B of the first embodiment.
In addition, among the current paths of the fifth embodiment, the path viewed from the side surface is the same as the current path shown in FIG. 29B of the fourth embodiment, and the distance between adjacent layers is constant. In this fifth embodiment, the distance between the L2 layer and the L3 layer in the fifth embodiment is longer than the distance between the L2 layer and the L3 layer in the first embodiment. The inductance component per unit length becomes larger.

Further, since the ground conductor of the fifth embodiment can be brought closer to the signal line conductor as compared with the ground conductor of the first embodiment, the capacitance component per unit length is increased. Furthermore, as shown in FIG. 36, as D3 is smaller than D1, the capacitance component Cs composed of the signal line conductor and the ground conductor in the ± x direction of the signal line conductor increases.
Therefore, since the product of the inductance component and the capacitance component per unit length is increased, the slow wave rate of the high-frequency transmission line is increased.
Therefore, the slow wave effect can be enhanced as compared with the conventional high-frequency transmission line.
As a result, in order to obtain a high slow wave effect, it is not necessary to expand the occupied area in the width direction as in the conventional high-frequency transmission line, so that the high-frequency transmission line can be reduced in size.

In order to confirm the above effect, a simulation is performed, and FIG. 37 is an explanatory diagram showing a simulation result.
FIG. 37 shows a simulation result of the conventional structure, the high-frequency transmission line according to the first embodiment, the high-frequency transmission line according to the fifth embodiment (part 1), and the slow wave rate of the high-frequency transmission line according to the fifth embodiment (part 2). Is shown. The finite element method is used for the simulation.
The relative permittivity of the dielectric 301 is 4.2, the dielectric loss tangent of the dielectric 301 is 0.0016, the conductivity of the signal line conductor, the ground conductor, and the columnar conductor is 3.8 × 10 7, and the signal line conductor ± x The simulation is performed by setting the thickness in the direction to 3 μm, the thickness in the ± z direction of the signal line conductor to 2 μm, and the interval in the ± z direction between the signal line conductor and the ground conductor to 1 μm.

The high-frequency transmission line according to the fifth embodiment (part 1) is D1 = D2 = 40 um and D3 = D4 = 30 um, and the high-frequency transmission line according to the fifth embodiment (part 2) is D1 = D2 = 40 um. D3 = D4 = 3.5 μm.
As shown in FIG. 37, the high frequency transmission line according to the fifth embodiment has a higher delay rate than the conventional structure and the high frequency transmission line according to the first embodiment. Among the high frequency transmission lines according to the fifth embodiment, It can be seen that the slow wave rate increases as the signal line conductor and the ground conductor in the ± x direction of the signal line conductor come closer to each other.
As described above, the high-frequency transmission line according to the fifth embodiment can obtain a high delay effect.

Here, in the fifth embodiment, the case where the ground conductor is one layer below the signal line and the ground conductor is one layer above the signal line has been described. However, the ground conductor is two or more layers below the signal line. Alternatively, two or more ground conductors may be disposed above the signal line.
Moreover, although the case where only the signal line conductor and the ground conductor are used as the conductor has been described, one or more signal line conductors and ground conductors may be provided, and the other conductors may not be grounded. Other material configurations may also be used. For example, the dielectric 301 in FIGS. 30 to 36 only needs to have insulating properties, and part and all of the dielectric may be air.

Embodiment 6 FIG.
FIG. 38 is a perspective view showing a high-frequency transmission line according to Embodiment 6 of the present invention.
39 is a top transparent view of FIG. 38, FIG. 40 is a sectional view of the AA ′ plane in FIG. 39, FIG. 41 is a sectional view of the BB ′ plane in FIG. 39, and FIG. 43 is a sectional view of the plane, FIG. 43 is a sectional view of the DD ′ plane in FIG. 39, and FIG. 44 is a side view of FIG.

The structure of the high-frequency transmission line will be specifically described.
As shown in FIG. 40, the signal line conductor 101 is disposed in the inner layer L1 layer of the dielectric 301, and the ground conductor 202 is disposed in the inner layer L3 layer of the dielectric 301.
As shown in FIG. 41, the signal line conductor 101 is disposed in the inner layer L1 layer of the dielectric 301, and the ground conductor 202 is disposed in the inner layer L3 layer of the dielectric 301.
Further, a ground conductor 203 is disposed in the inner layer L1 layer of the dielectric 301 at a distance D1 from the center plane CP in the + x direction, and a ground conductor is disposed in the inner layer L1 layer of the dielectric 301 at a distance D2 from the center plane CP in the −x direction. 203 is disposed, the ground conductor 202 is disposed in the inner layer L3 layer of the dielectric 301 at a distance D1 from the center plane CP in the + x direction, and the distance D2 from the center plane CP in the −x direction is disposed in the inner layer L3 layer of the dielectric 301. A ground conductor 202 is disposed on the ground.
Further, the ground conductor 201 and the ground conductor 203 positioned in the + x direction from the center plane CP are electrically connected via one or a plurality of columnar conductors 211a, and the ground conductor 201 positioned in the − direction from the center plane CP and the ground are connected. The conductor 203 is electrically connected via one or a plurality of columnar conductors 212a, and the ground conductor 203 and the ground conductor 202 located in the + x direction from the center plane CP are electrically connected via one or a plurality of columnar conductors 211b. The ground conductor 203 and the ground conductor 202 located in the − direction from the center plane CP are electrically connected via one or more columnar conductors 212b.

As shown in FIG. 42, the signal line conductor 101 is disposed in the inner layer L1 layer of the dielectric 301, and the ground conductor 201 is disposed in the inner layer L2 layer of the dielectric 301.
As shown in FIG. 43, the signal line conductor 101 is disposed in the inner layer L1 layer of the dielectric 301, and the ground conductor 202 is disposed in the inner layer L3 layer of the dielectric 301.
The ground conductor 203 is disposed on the inner layer L1 of the dielectric 301 at a distance of D3 from the center plane CP in the + x direction, and the ground conductor is disposed on the inner layer L1 of the dielectric 301 at a distance of D4 from the center plane CP in the −x direction. 203, the ground conductor 201 is disposed in the inner layer L2 layer of the dielectric 301 at a distance D3 from the center plane CP in the + x direction, and the distance D4 from the center plane CP in the −x direction is disposed in the inner layer L2 layer of the dielectric 301. The ground conductor 201 is disposed on the side.
Further, the ground conductor 201 and the ground conductor 203 located in the + x direction from the center plane CP are electrically connected via one or a plurality of columnar conductors 213a, and the ground conductor 201 located in the − direction from the center plane CP and the ground The conductor 203 is electrically connected via one or more columnar conductors 214a, and the ground conductor 203 and the ground conductor 202 located in the + x direction from the center plane CP are electrically connected via one or more columnar conductors 213b. The ground conductor 203 and the ground conductor 202 located in the − direction from the center plane CP are electrically connected via one or a plurality of columnar conductors 214b.

Here, in FIGS. 40 to 43, D1 = D2 = D3 = D4, and the cross sections of FIGS. 40 to 43 are periodically arranged.
Next, the effect of the high frequency transmission line will be described.
FIG. 49 is an overhead view of the conventional high-frequency transmission line described in FIG.
FIG. 45A is a side view of the current path of the ground conductor in the conventional high-frequency transmission line shown in FIG. 49, and FIG. 45B is a side view of the current path of the ground conductor in the sixth embodiment of the present invention. .

The current path I1 of the ground conductor in the conventional high-frequency transmission line is linear as shown in FIG. 45 (a). In the sixth embodiment, the current of the ground conductor is shown in FIG. 45 (b). Since the path I2 is wave-shaped, it can be made longer than the current path I1 of the ground conductor in the conventional high-frequency transmission line. Thus, in the sixth embodiment, the inductance component per unit length can be increased.
Therefore, since the product of the inductance component and the capacitance component per unit length is increased, the slow wave rate of the high-frequency transmission line is increased.
Therefore, the slow wave effect can be enhanced as compared with the conventional high-frequency transmission line.

As a result, in order to obtain a high slow wave effect, it is not necessary to expand the occupied area in the width direction as in the conventional high-frequency transmission line, so that the high-frequency transmission line can be reduced in size.
46A is a central sectional view of the conventional high-frequency transmission line shown in FIG. 49, and FIG. 46B is a distributed constant circuit diagram of the conventional high-frequency transmission line shown in FIG.
FIG. 47A is a central sectional view in the sixth embodiment of the present invention, and FIG. 47B is a distributed constant circuit diagram in the sixth embodiment shown in FIG.

Here, the values of the minimum width of the conductor and the minimum distance between the conductors are the same in the conventional high-frequency transmission line and the sixth embodiment.
As shown in FIG. 46B, the conventional high-frequency transmission line section 1 ′ has a series resistance component R ′ ₁ , a series inductance component L ′ ₁ , a shunt conductance component G ′ ₁ , and a shunt capacitance component. 'consists of _one, section 2' C, the resistance component of the series R _'2, the inductance of series components L' _2, the conductance component of the shunt G _'2, the capacitance component of the shunt C' consists of _2.
However, although R ′ ₁ and R ′ ₂ are the same, L ′ ₁ and L ′ ₂ , G ′ ₁ and G ′ ₂ , and C ′ ₁ and C ′ ₂ are different. Since one period length of the conventional high-frequency transmission line is a distance obtained by adding the section 1 ′ and the section 2 ′, it is a value obtained by adding the minimum conductor width and the minimum conductor spacing.

From FIG. 47 (b), section 1 of the sixth embodiment is composed of a series resistance component R ₁ , a series inductance component L ₁ , a shunt conductance component G ₁ , and a shunt capacitance component C ₁ . Section 2 includes a series resistance component R ₂ , a series inductance component L ₂ , a shunt conductance component G ₂ , and a shunt capacitance component C ₂ .
However, since R ₁ and R ₂ are the same, and section 1 and section 2 are vertically symmetric about the center xy plane of the signal line conductor, L ₁ and L ₂ , G ₁ and G ₂ , C ₁ And C ₂ have the same value.

Since one cycle length of the sixth embodiment is half of the distance obtained by adding the section 1 and the section 2, it is half of the value obtained by adding the minimum width of the conductor and the minimum distance between the conductors.
Therefore, in the sixth embodiment, one cycle length can be halved as compared with the conventional high-frequency transmission line, and therefore the cutoff frequency can be increased.
In the fifth embodiment, a distributed constant circuit diagram similar to that of the sixth embodiment can be written. However, the inductance of the section 1 series is different from the inductance of the section 2 series. For this reason, in this Embodiment 6, compared with the said Embodiment 5, 1 period length can be halved and a cutoff frequency can be made high.
As a result, the frequency range in which the high-frequency transmission line can be adapted can be widened.

  Here, in the sixth embodiment, the case of D1 = D2 = D3 = D4 has been described as an example in FIGS. 40 to 43, but it is only necessary to satisfy D1 + D2 = D3 + D4. For example, D1 + D2 = D3 + D4, In addition, when D1 = D3, D1 + D2 = D3 + D4, and D1 = D4 may be used.

  In the present invention, within the scope of the invention, any combination of the embodiments, or any modification of any component in each embodiment, or omission of any component in each embodiment is possible. .

  DESCRIPTION OF SYMBOLS 1 Dielectric (insulator), 2 Signal line conductor, 3,11 Ground conductor (1st ground conductor board), 4 Ground conductor (2nd ground conductor board), 5 Columnar conductor (1st ground conductor), 6 Columnar conductor (Second ground conductor), 7 columnar conductor (third ground conductor), 8 columnar conductor (fourth ground conductor), 12 ground conductor (first ground conductor), 13 ground conductor (second ground conductor), 14 ground conductor (Third ground conductor), 15 ground conductor (fourth ground conductor), 101 signal line conductor, 201, 202, 203 ground conductor, 211, 211a, 211b, 212a, 212b, 213a, 213b, 214a, 214b columnar conductor, 301 dielectric.

Claims (13)

A signal line conductor disposed on the first layer of the insulator, and a plurality of first ground conductor plates disposed on the second layer of the insulator and extending in a direction different from the extending direction of the signal line conductor; A plurality of second ground conductor plates disposed in the third layer of the insulator, extending in a direction different from the extension direction of the signal line conductor, and extending substantially parallel to the first ground conductor plate; With
The second layer is disposed between the first layer and the third layer;
In the region between the n-th first ground conductor plate and the (n + 1) -th first ground conductor plate from the front of the plurality of first ground conductor plates, the n-th first from the front of the second ground conductor plate. 2 A part of the ground conductor plate is arranged,
The first ground conductor plate and the second ground conductor plate are separated from the front of the plurality of first ground conductor plates by a first distance in the right direction from the intersection where the signal line conductor intersects. A plurality of first ground conductors for short-circuiting the n-th second ground conductor plate from the front of the second first ground conductor plate and the plurality of second ground conductor plates;
At a position left by a second distance in the left direction from the intersection position, the nth first ground conductor plate from the front of the plurality of first ground conductor plates and the front of the plurality of second ground conductor plates n A plurality of second ground conductors that short-circuit the second ground conductor plate;
N + 1 from the front of the nth second ground conductor plate and the plurality of first ground conductor plates from the front side of the plurality of second ground conductor plates at a position separated by a third distance in the right direction from the intersection position. A plurality of third ground conductors that short-circuit the th first ground conductor plate;
N + 1 from the front of the nth second ground conductor plate and the plurality of first ground conductor plates from the front of the plurality of second ground conductor plates at a position left by a fourth distance in the left direction from the intersection position. A plurality of fourth ground conductors for short-circuiting the first ground conductor plate of the th,
A high-frequency transmission line, wherein there are at least one place where the first distance and the third distance are different, or at least one place where the second distance and the fourth distance are different. A plurality of third ground conductor plates disposed in the fourth layer of the insulator and extending in a direction different from the extending direction of the signal line conductor; and disposed in the fifth layer of the insulator; A plurality of fourth ground conductor plates extending in a direction different from the stretching direction and extending substantially parallel to the third ground conductor plate,
The fourth layer is disposed between the first layer and the fifth layer,
In the region between the m-th third ground conductor plate and the (m + 1) -th third ground conductor plate from the front of the plurality of third ground conductor plates, the m-th first from the front of the fourth ground conductor plate. A part of 4 ground conductor plates are arranged,
The third ground conductor plate and the fourth ground conductor plate are separated from each other by a fifth distance in the right direction from the intersecting position where the signal line conductor intersects, and m from the front of the plurality of third ground conductor plates. A plurality of fifth ground conductors for short-circuiting the m-th fourth ground conductor plate from the front side of the third ground conductor plate and the fourth ground conductor plate;
The m-th third ground conductor plate from the front side of the plurality of third ground conductor plates and the front sides of the plurality of fourth ground conductor plates at a position left by a sixth distance in the left direction from the intersection position. A plurality of sixth ground conductors that short-circuit the fourth ground conductor plate;
M + 1 from the front of the plurality of fourth ground conductor plates and the mth fourth ground conductor plate from the front of the plurality of fourth ground conductor plates at a position spaced by a seventh distance in the right direction from the intersection position. A plurality of seventh ground conductors that short-circuit the third ground conductor plate;
M + 1 from the front of the mth fourth ground conductor plate and the plurality of third ground conductor plates from the front of the plurality of fourth ground conductor plates at a position that is an eighth distance leftward from the intersection position. A plurality of eighth ground conductors that short-circuit the th third ground conductor plate;
2. The high frequency device according to claim 1, wherein there are at least one place where the fifth distance and the seventh distance are different, or one place where the sixth distance and the eighth distance are different. Transmission line. A signal line conductor disposed on the first layer of the insulator, and a plurality of first ground conductor plates disposed on the second layer of the insulator and extending in a direction different from the extending direction of the signal line conductor; With
The odd numbered first ground conductor plate from the front of the plurality of first ground conductor plates at a position that is a first distance in the right direction from the intersecting position where the first ground conductor plate intersects the signal line conductor. And a plurality of first ground conductors that short-circuit the even-numbered first ground conductor plates;
The odd-numbered first ground conductor plates and the even-numbered first ground conductor plates from the front of the plurality of first ground conductor plates are short-circuited at a position left by a second distance in the left direction from the intersection position. A plurality of second ground conductors;
The even-numbered first ground conductor plate and the odd-numbered first ground conductor plate are short-circuited from the front side of the plurality of first ground conductor plates at a position that is a third distance in the right direction from the intersection position. A plurality of third ground conductors;
The even-numbered first ground conductor plates and the odd-numbered first ground conductor plates are short-circuited from the front of the plurality of first ground conductor plates at a position that is a fourth distance leftward from the intersection position. A plurality of fourth ground conductors,
A high-frequency transmission line, wherein there are at least one place where the first distance and the third distance are different, or at least one place where the second distance and the fourth distance are different. A plurality of second ground conductor plates disposed in the third layer of the insulator and extending in a direction different from the extending direction of the signal line conductor;
An odd-numbered second ground conductor plate from the front of the plurality of second ground conductor plates at a position spaced by a fifth distance in the right direction from the intersection position where the second ground conductor plate intersects the signal line conductor. And a plurality of fifth ground conductors for short-circuiting the even-numbered second ground conductor plates;
The odd-numbered second ground conductor plates and the even-numbered second ground conductor plates are short-circuited from the front side of the plurality of second ground conductor plates at a position separated by a sixth distance in the left direction from the intersection position. A plurality of sixth ground conductors;
Short-circuit the even-numbered second ground conductor plate and the odd-numbered second ground conductor plate from the front of the plurality of second ground conductor plates at a position that is a right distance from the crossing position by a seventh distance. A plurality of seventh ground conductors;
The even-numbered second ground conductor plate and the odd-numbered second ground conductor plate are short-circuited from the front of the plurality of second ground conductor plates at a position that is an eighth distance leftward from the intersection position. A plurality of eighth ground conductors,
4. The high frequency device according to claim 3, wherein at least one or more places where the fifth distance and the seventh distance are different or where the sixth distance and the eighth distance are different exist. Transmission line.   5. The high-frequency transmission line according to claim 1, wherein the first distance and the second distance are the same, and the third distance and the fourth distance are the same. .   5. At least one or more locations where the sum of the first distance and the second distance and the sum of the third distance and the fourth distance are the same exist. The high frequency transmission line of any one of these.   The first distance is at least one half of the second distance and less than or equal to two times, or the third distance is at least one half of the fourth distance and less than or equal to two times. The high-frequency transmission line according to any one of claims 1 to 4. A signal line conductor disposed on the first layer of the insulator, and a plurality of first ground conductor plates disposed on the second layer of the insulator and extending in a direction different from the extending direction of the signal line conductor; A plurality of second ground conductor plates disposed in the third layer of the insulator, extending in a direction different from the extension direction of the signal line conductor, and extending substantially parallel to the first ground conductor plate; With
The second layer is disposed between the first layer and the third layer;
In the region between the n-th first ground conductor plate and the (n + 1) -th first ground conductor plate from the front of the plurality of first ground conductor plates, the n-th first from the front of the second ground conductor plate. 2 A part of the ground conductor plate is arranged,
The first ground conductor plate and the second ground conductor plate are separated from the front of the plurality of first ground conductor plates by a first distance in the right direction from the intersection where the signal line conductor intersects. A plurality of first ground conductors for short-circuiting the n-th second ground conductor plate from the front of the second first ground conductor plate and the plurality of second ground conductor plates;
At a position left by a second distance in the left direction from the intersection position, the nth first ground conductor plate from the front of the plurality of first ground conductor plates and the front of the plurality of second ground conductor plates n A plurality of second ground conductors that short-circuit the second ground conductor plate;
N + 1 from the front of the nth second ground conductor plate and the plurality of first ground conductor plates from the front side of the plurality of second ground conductor plates at a position separated by a third distance in the right direction from the intersection position. A plurality of third ground conductors that short-circuit the th first ground conductor plate;
N + 1 from the front of the nth second ground conductor plate and the plurality of first ground conductor plates from the front of the plurality of second ground conductor plates at a position left by a fourth distance in the left direction from the intersection position. A plurality of fourth ground conductors for short-circuiting the first ground conductor plate of the th,
In the second layer, the n-th first ground conductor plate and the (n + 1) -th first ground conductor plate from the front of the plurality of first ground conductor plates do not short-circuit, and the third layer An n-th first ground conductor plate and an (n + 1) -th first ground conductor plate from the front of a plurality of second ground conductor plates are not short-circuited. A signal line conductor disposed on the first layer of the insulator, and a plurality of first ground conductor plates disposed on the second layer of the insulator and extending in a direction different from the extending direction of the signal line conductor; A plurality of second ground conductor plates disposed in the third layer of the insulator, extending in a direction different from the extension direction of the signal line conductor, and extending substantially parallel to the first ground conductor plate; , A plurality of third ground conductor plates arranged in the first layer and not short-circuited with the signal line conductors (a plurality of third ground conductor plates, a plurality of third ground conductor plates, a plurality of third conductor plates). -3 ground conductor plate, a plurality of 3-4 ground conductor plates),
The first layer is disposed between the second layer and the third layer;
In the region between the n-th first ground conductor plate and the (n + 1) -th first ground conductor plate from the front of the plurality of first ground conductor plates, the n-th first from the front of the second ground conductor plate. 2 A part of the ground conductor plate is arranged,
The first ground conductor plate and the second ground conductor plate are separated from the front of the plurality of first ground conductor plates by a first distance in the right direction from the intersection where the signal line conductor intersects. A plurality of first ground conductors for short-circuiting the n-th 3-1 ground conductor plate from the front of the first ground conductor plate of the th and the plurality of third ground conductor plates;
Near the n-th 3-1 ground conductor plate and the plurality of second ground conductor plates from the near side of the plurality of third ground conductor plates at a position that is a right distance from the intersection position in the right direction. A plurality of 1b ground conductors that short-circuit the nth second ground conductor plate from
At a position left by a second distance in the left direction from the intersection position, the nth first ground conductor plate from the front of the plurality of first ground conductor plates and n from the front of the plurality of third ground conductor plates. A plurality of 2a ground conductors that short-circuit the th-3-2 ground conductor plate;
Near the nth third ground conductor plate and the plurality of second ground conductor plates from the near side of the plurality of third ground conductor plates at a position left by a second distance in the left direction from the intersection position. A plurality of 2b ground conductors that short-circuit the nth second ground conductor plate from
The n-th second ground conductor plate from the front side of the plurality of second ground conductor plates and the front side of the plurality of third ground conductor plates at a position separated by a third distance in the right direction from the intersection position. A plurality of 3a ground conductors that short-circuit the th-3rd ground conductor plate;
Near the nth third 3-3 conductor plate and the plurality of first ground conductor plates from the near side of the plurality of third ground conductor plates at a position separated by a third distance in the right direction from the intersection position. A plurality of 3b ground conductors that short-circuit the n + 1th first ground conductor plate from
At a position that is a fourth distance in the left direction from the intersection position, the n-th second ground conductor plate from the front of the plurality of second ground conductor plates and the front of the plurality of third ground conductor plates n A plurality of 4a ground conductors that short-circuit the third 3-4 ground conductor plate;
Near the nth third 3-4 ground conductor plate and the plurality of first ground conductor plates from the near side of the plurality of third ground conductor plates at a position left by a fourth distance in the left direction from the intersection position. A plurality of 4b ground conductors that short-circuit the (n + 1) th first ground conductor plate from
A high-frequency transmission line, wherein there are at least one place where the first distance and the third distance are different, or at least one place where the second distance and the fourth distance are different.   The high-frequency transmission line according to claim 9, wherein the first distance and the second distance are the same, and the third distance and the fourth distance are the same.   10. The high-frequency transmission according to claim 9, wherein there are at least one place where the sum of the first distance and the second distance and the sum of the third distance and the fourth distance are the same. line   There are at least one place where the first distance is less than half of the second distance and more than twice, or there is at least one place where the third distance is less than half of the fourth distance and more than twice. The high-frequency transmission line according to claim 9, wherein the high-frequency transmission line is provided. A signal line conductor disposed on the first layer of the insulator, and a plurality of first ground conductor plates disposed on the second layer of the insulator and extending in a direction different from the extending direction of the signal line conductor; A plurality of second ground conductor plates disposed in the third layer of the insulator, extending in a direction different from the extension direction of the signal line conductor, and extending substantially parallel to the first ground conductor plate; , A plurality of third ground conductor plates arranged in the first layer and not short-circuited with the signal line conductors (a plurality of third ground conductor plates, a plurality of third ground conductor plates, a plurality of third conductor plates). -3 ground conductor plate, a plurality of 3-4 ground conductor plates),
The first layer is disposed between the second layer and the third layer;
In the region between the n-th first ground conductor plate and the (n + 1) -th first ground conductor plate from the front of the plurality of first ground conductor plates, the n-th first from the front of the second ground conductor plate. 2 A part of the ground conductor plate is arranged,
The first ground conductor plate and the second ground conductor plate are separated from the front of the plurality of first ground conductor plates by a first distance in the right direction from the intersection where the signal line conductor intersects. A plurality of first ground conductors for short-circuiting the n-th 3-1 ground conductor plate from the front of the first ground conductor plate of the th and the plurality of third ground conductor plates;
Near the n-th 3-1 ground conductor plate and the plurality of second ground conductor plates from the near side of the plurality of third ground conductor plates at a position that is a right distance from the intersection position in the right direction. A plurality of 1b ground conductors that short-circuit the nth second ground conductor plate from
At a position left by a second distance in the left direction from the intersection position, the nth first ground conductor plate from the front of the plurality of first ground conductor plates and n from the front of the plurality of third ground conductor plates. A plurality of 2a ground conductors that short-circuit the th-3-2 ground conductor plate;
Near the nth third ground conductor plate and the plurality of second ground conductor plates from the near side of the plurality of third ground conductor plates at a position left by a second distance in the left direction from the intersection position. A plurality of 2b ground conductors that short-circuit the nth second ground conductor plate from
The n-th second ground conductor plate from the front side of the plurality of second ground conductor plates and the front side of the plurality of third ground conductor plates at a position separated by a third distance in the right direction from the intersection position. A plurality of 3a ground conductors that short-circuit the th-3rd ground conductor plate;
Near the nth third 3-3 conductor plate and the plurality of first ground conductor plates from the near side of the plurality of third ground conductor plates at a position separated by a third distance in the right direction from the intersection position. A plurality of 3b ground conductors that short-circuit the n + 1th first ground conductor plate from
At a position that is a fourth distance in the left direction from the intersection position, the n-th second ground conductor plate from the front of the plurality of second ground conductor plates and the front of the plurality of third ground conductor plates n A plurality of 4a ground conductors that short-circuit the third 3-4 ground conductor plate;
Near the nth third 3-4 ground conductor plate and the plurality of first ground conductor plates from the near side of the plurality of third ground conductor plates at a position left by a fourth distance in the left direction from the intersection position. A plurality of 4b ground conductors that short-circuit the (n + 1) th first ground conductor plate from
In the second layer, the n-th first ground conductor plate and the (n + 1) -th first ground conductor plate from the front of the plurality of first ground conductor plates do not short-circuit, and the third layer An n-th first ground conductor plate and an (n + 1) -th first ground conductor plate from the front of a plurality of second ground conductor plates are not short-circuited.

Images