JP2012205970A - Evaporator - Google Patents

Abstract

PROBLEM TO BE SOLVED: To solve a problem in which when a small amount of liquid to the exothermic capacity of a heating element is evaporated, the lower part of the heating element does not have the liquid that should be evaporated, thereby a high-temperature state continues and the product life is harmfully influenced; to the reverse, when the liquid is a small amount, when the calorific value is decreased, a long time is taken to achieve a target humidity from the feeding start of the liquid.SOLUTION: The evaporator includes: a body container; a cylindrical heating element erected in the body container; a liquid evaporation layer that coats the outer side and the top surface of the cylindrical heating element; a first liquid supply pipe that supplies a liquid to the liquid evaporation layer of the top surface of the cylindrical heating element; a second liquid supply pipe that supplies a liquid to the liquid evaporation layer of the outer side of the cylindrical heating element; a gas supply pipe that supplies a carrier gas into the inside of the body container; a mixed gas outlet that exhausts a mixed gas of an evaporated object and the carrier gas to the external of the body container; and a controller that controls the cylindrical heating element.

Description

  The present invention is an apparatus for generating evaporative gas, and in particular, an evaporating apparatus used as a water vapor generating apparatus of a humidifier used in a fuel cell or the like.

  A fuel cell requires reforming of a gas serving as a fuel depending on the type of the fuel cell. In general, the main component of gas serving as fuel is city gas including methane. Hydrogen is produced and reformed by reacting water vapor with the fuel gas, and used as fuel for the fuel cell.

  In addition to reforming the gas that serves as the fuel, water vapor may be included in the fuel gas in order to ensure the ionic conductivity of the polymer electrolyte membrane of the fuel cell. The hydrogen gas in the fuel becomes hydrogen ions at the hydrogen electrode in the fuel cell and then moves through the membrane with water molecules when moving to the oxygen electrode. For this reason, a hydrogen electrode becomes easy to dry and internal resistance will become large. For this reason, it is necessary to include water vapor in the fuel gas.

  As described above, what is necessary for including moisture in the fuel gas is an evaporator for generating water vapor. As this evaporation apparatus, an evaporation gas generating apparatus as shown in Patent Document 1 and Patent Document 2 has been proposed.

Japanese Patent Application No. 2009-226237 Japanese Patent Application No. 2009-271306

  In the evaporation apparatuses shown in Patent Document 1 and Patent Document 2, it is possible to efficiently evaporate a large amount of liquid such as water. However, when a small amount of liquid is evaporated with respect to the heat generation capacity of the heating element, the liquid evaporates only at the upper part of the heating element to which the liquid is supplied. For this reason, since there is no liquid to evaporate in the lower part of the heating element, it generates heat unnecessarily, and a high temperature state continues. For a heating element, the continued high temperature condition greatly reduces the life of the heating element. Conversely, if the amount of liquid is small, reducing the amount of power supplied to the heating element and reducing the amount of heat generated can avoid unnecessary heat generation and high-temperature conditions as described above. There is a problem that it takes time until the target humidity is achieved.

  In view of the above problems, the present invention provides the following evaporation apparatus. That is, as a first invention, a main body container, a cylindrical heating element standing inside the main body container, a liquid evaporation layer covering the outer surface and upper surface of the cylindrical heating element, and a liquid on the upper surface of the cylindrical heating element A first liquid supply pipe for supplying liquid to the evaporation layer, a second liquid supply pipe for supplying liquid to the liquid evaporation layer on the outer surface of the cylindrical heating element, a gas supply pipe for supplying carrier gas into the main body container, A mixed gas discharge port for discharging a mixed gas of the evaporated product and carrier gas from which the liquid has evaporated to the outside of the main body container, a control unit for controlling the calorific value and liquid supply amount of the cylindrical heating element, and the carrier gas supply amount; An evaporation device is provided.

  According to a second aspect of the invention, the second liquid supply pipe is composed of a plurality of liquid supply pipes so that the liquid can be uniformly supplied around the outer surface of the cylindrical heating element. I will provide a.

  As a third invention, the cylindrical heating element is composed of a first cylindrical heating part and a second cylindrical heating part, and the second cylindrical heating part is connected to the lower part of the first cylindrical heating part. The control unit includes a first control unit that controls the first cylindrical heating unit and a second control unit that controls the second cylindrical heating unit. The two control means provide the evaporator according to the first invention or the second invention which can be controlled independently.

  According to a fourth aspect of the present invention, the second control means is configured to maintain the temperature when the liquid supply is only the first liquid supply pipe and the amount is sufficiently evaporated by the heat generated by the first cylindrical heat generating portion. An evaporator according to a third aspect of the present invention for controlling a second cylindrical heat generating part to generate heat for the purpose.

  As in the evaporation apparatus of the present invention, by supplying and evaporating liquid from at least two places on the upper surface and the side surface of the liquid evaporation layer covering the cylindrical heating element standing inside the container, the desired dew point and humidity can be obtained. It is possible to provide a highly responsive evaporation apparatus capable of promptly realizing the above.

  In addition, the second liquid supply pipe is composed of a plurality of liquid supply pipes, and the liquid is evenly supplied around the outer surface of the cylindrical heating element, thereby preventing local high temperature heat generation of the cylindrical heating element and improving the efficiency. Good evaporation efficiency can be realized.

  Furthermore, the cylindrical heating element is a first cylindrical heating part and a second cylindrical heating part, and these are connected in the vertical direction so that the second cylindrical type is useless even when the amount of liquid supply is small. There is no need to heat the heating element, and there is no need to reach an unnecessary high temperature state. In addition, since it is not necessary to reduce the heat generation amount in order to avoid the high temperature state of the second cylindrical heating element, it takes a long time from the start of the supply of liquid until the target humidity is achieved, and the response time may be prolonged. Disappear.

Sectional conceptual diagram for demonstrating the evaporation apparatus of Embodiment 1. FIG. Schematic for demonstrating the evaporation apparatus of Embodiment 1. FIG. Sectional conceptual diagram for demonstrating the evaporation apparatus of Embodiment 2. FIG. Sectional conceptual diagram for demonstrating the evaporation apparatus of Embodiment 2. FIG. Sectional conceptual diagram for demonstrating the evaporation apparatus of Embodiment 3. Example of hardware configuration of evaporation apparatus of embodiment 3

  Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In addition, this invention should not be limited to these embodiments at all, and can be implemented in various modes without departing from the gist thereof.

The first embodiment mainly relates to claims 1 and 2. The second embodiment mainly relates to claims 3 and 4.
<< Embodiment 1 >>
<Overview of Embodiment 1>

The present embodiment is an evaporation apparatus characterized in that a liquid is supplied and evaporated from at least two places, that is, an upper surface and a side surface of a liquid evaporation layer covering a cylindrical heating element standing inside a container. Thus, it is possible to provide a highly responsive evaporation apparatus that can quickly achieve the target dew point and humidity by supplying the liquid from the upper surface and the side surface.
<Configuration of Embodiment 1>

  FIG. 1 shows a conceptual cross-sectional view of the evaporator according to the present embodiment. The evaporation apparatus of the present embodiment includes a main body container (0101), a cylindrical heating element (0102) standing inside the main body container, and a liquid evaporation layer (0103) covering the outer surface and the upper surface of the cylindrical heating element. A first liquid supply pipe (0104) for supplying liquid to the liquid evaporation layer on the upper surface of the cylindrical heating element, a second liquid supply pipe (0105) for supplying liquid to the liquid evaporation layer on the outer surface of the cylindrical heating element, A gas supply pipe (0106) for supplying a carrier gas to the inside of the main body container, a mixed gas discharge port (0107) for discharging a mixed gas of the evaporated liquid and the carrier gas to the outside of the main body container, and the cylindrical heat generation And a control unit (0108) for controlling the calorific value, liquid supply amount, and carrier gas supply amount of the body.

  The “main body container” is a container having a cylindrical heating element to be described later. The shape of the main body container may be a shape that can enclose a cylindrical heating element therein. Therefore, the main body container may have a cylindrical shape or a shape such as a rectangular parallelepiped or a cone. In the evaporation apparatus of this embodiment, the main body container has cylindrical heating elements each covered with a liquid evaporation layer described later. And the liquid supplied from the 1st liquid supply pipe | tube and 2nd liquid supply pipe | tube mentioned later is evaporated, and it discharges | emits from a mixed gas discharge port outside a main body container with the carrier gas supplied from the gas supply pipe | tube. In the evaporation apparatus of the present embodiment, the evaporated liquid may be cooled and liquefied on the inner wall of the main body container. In this case, a heat insulating material may be installed on the outer periphery of the main body container, or a heating element such as a ribbon heater may be wound to keep the heat and heat, so that the structure does not liquefy on the inner wall of the main body container.

  The “cylindrical heating element” is erected inside the main body container and covered with a liquid evaporation layer to be described later. The cylindrical heating element itself generates heat, thereby heating the liquid evaporation layer and evaporating the liquid supplied from the first liquid supply pipe and the second liquid supply pipe. A lead wire for supplying electric power is attached to the cylindrical heating element.

  The “liquid evaporation layer” covers the outer upper surface and the outer surface of the cylindrical heating element, and the liquid supplied from the first liquid supply pipe and the second liquid supply pipe, which will be described later, is heated on the liquid evaporation layer by the heat generation of the cylindrical heating element. Evaporate at. The liquid supplied to the liquid evaporation layer on the outer upper surface side of the cylindrical heating element diffuses according to gravity from the upper part to the lower part of the liquid evaporation layer. During the diffusion, the liquid evaporates due to the heat generated by the cylindrical heating element.

  Here, the material which comprises a 1st liquid evaporation layer is demonstrated. The liquid evaporation layer is preferably made of a material that can absorb water and retain water, and is strong against heat and has good thermal conductivity. For example, metal fibers formed from ultrafine metal fibers, aramid fibers having heat resistance, glass wool, and the like. In particular, metal fibers have good water retention, and the water retention is about 30% to about 60%.

  The “first liquid supply pipe” supplies the liquid from the upper part of the main body container to the liquid evaporation layer contacting the upper surface of the cylindrical heating element. Liquid that evaporates by controlling the amount of liquid supplied from the first liquid supply tube, the amount of liquid supplied from the second liquid supply tube described later, and the amount of heat generated by the cylindrical heating element described above It is possible to control the amount of. The amount of heat generated by the cylindrical heating element and the amount of liquid supplied from the first liquid supply pipe must be controlled so as not to exceed the amount of liquid that can be evaporated from the liquid evaporation layer covering the cylindrical heating element. . If the amount of liquid that can be evaporated is exceeded, the liquid stays inside the main body container.

  The “second liquid supply pipe” supplies a liquid to the liquid evaporation layer in contact with the outer surface of the cylindrical heating element. As described above, by controlling the amount of liquid supplied from the second liquid supply pipe, the amount of liquid supplied from the first liquid supply pipe, and the heat generation amount of the cylindrical heating element, the liquid is controlled. It is possible to control the amount of evaporation. The amount of liquid supplied from the second liquid supply tube may be the same as the amount of liquid supplied from the first liquid supply tube, or may be different from each other. The amount of liquid supplied from the first liquid supply pipe and the second liquid supply pipe must be controlled so as not to exceed the amount of liquid that can be evaporated from the liquid evaporation layer.

  The second liquid supply pipe is arranged so that the tip of the second liquid supply pipe does not contact the liquid evaporation layer, and supplies the liquid from the second liquid supply pipe to the liquid evaporation layer. When the second liquid supply pipe is in contact with the liquid evaporation layer, the liquid cannot be supplied to the liquid evaporation layer while maintaining an accurate flow rate from the second liquid supply, or the heat of the liquid evaporation layer is This is to prevent the liquid from being transmitted to the supply pipe and evaporating in the second liquid supply pipe. This is because when the liquid evaporates in the second liquid supply pipe, the pressure in the liquid supply pipe increases, and the liquid may not be supplied accurately.

  The second liquid supply pipe must supply liquid to the liquid evaporation layer on the outer surface of the cylindrical heating element. Therefore, the liquid cannot be simply supplied to the liquid evaporation layer by dropping the liquid according to gravity as in the first liquid supply pipe. Therefore, in the evaporation apparatus of the present embodiment, as shown in FIG. 2, a recess is provided on the side surface of the liquid evaporation layer, the tip of the second liquid supply pipe is disposed in the recess, and the supply from the tip of the second liquid supply pipe is performed. The configured liquid is configured to fall on the inner surface of the recess. By comprising in this way, it becomes possible to supply a liquid to the liquid evaporation layer on the outer surface of a cylindrical heating element. The tip of the second liquid supply tube may have a simple cross section as shown in FIG. 2A, or an injection needle as shown in FIG. 2B so that the liquid can be smoothly supplied to the liquid evaporation layer. It is good also as a sharp pointed shape like the tip of.

  Further, it is desirable that the position at which the second liquid supply pipe supplies the liquid to the outer surface of the liquid evaporation layer is changed according to the amount of liquid supplied from the first liquid supply pipe and the second liquid supply pipe. When the amount of liquid supplied from the first liquid supply tube is smaller than the amount of liquid supplied from the second liquid supply tube, the second liquid supply tube is disposed at a position above the cylindrical heating element in the vertical direction, When the liquid supply amount from one liquid supply pipe is substantially equal to the supply amount from the second liquid supply pipe, the liquid supply amount from the first liquid supply pipe is arranged near the longitudinal center of the cylindrical heating element. Is larger than the amount of liquid supplied from the second liquid supply pipe, it is changed in accordance with the amount of liquid supplied, such as being arranged at a vertically lower position of the cylindrical heating element.

  The “gas supply pipe” supplies a gas serving as a carrier gas into the main body container. Generally, the gas supply pipe is provided at the upper part of the main body container, and the carrier gas is supplied from the upper part to the inside. If the mixed gas discharge port, which will be described later, is arranged at the lower part of the main body container and the gas supply pipe is also arranged at the lower part of the main body container, the liquid evaporated in the main body container is discharged from the mixed gas discharge port by the carrier gas. There is a risk that it will not stay. Therefore, the attachment position of the gas supply pipe is determined based on the relationship with the position of the mixed gas discharge port and the like.

  The “mixed gas discharge port” is a main body container that mixes a gas, which is a carrier gas, with a mixture of a liquid supplied from a liquid supply pipe and an evaporant obtained by evaporating in a liquid evaporation layer due to heat generated by a cylindrical heating element. This is the outlet for discharging from the inside to the outside. The arrangement position of the mixed gas discharge port in the main body container is determined by the relationship with the attachment position of the gas supply pipe as described above.

  The “control unit” controls the amount of heat generated by the cylindrical heating element, the amount of liquid supplied from the first liquid supply pipe and the second liquid supply pipe to the liquid evaporation layer, and the amount of gas supplied from the gas supply pipe. As described above, if the liquid is supplied excessively, the supplied liquid may not be sufficiently evaporated with the calorific value of the cylindrical heating element. Further, the temperature, humidity, dew point, etc. of the mixed gas can be controlled by controlling the liquid supply amount, the calorific value of the cylindrical heating element, the flow rate of the carrier gas, and the like. Further, the control unit may be configured to collect information by being connected to a dew point, a humidity sensor, or the like installed in the vicinity of the mixed gas outlet in order to collect the mixed gas state. Based on the collected information, the liquid supply amount and the carrier gas supply amount are controlled as described above, and the heat generation amount of the cylindrical heating element is adjusted.

More specifically, the control unit controls a liquid supply pump for supplying liquid to the liquid supply pipe and a carrier gas supply pump for supplying carrier gas to the gas supply pipe. The carrier gas supply pump may be a flow rate adjustment valve, a mass flow controller, or the like.
<Embodiment 1 effect>

Like the evaporation apparatus of this embodiment, by supplying and evaporating liquid from at least two places on the upper surface and the side surface of the liquid evaporation layer covering the cylindrical heating element standing inside the container, the target dew point and It is possible to provide a highly responsive evaporation apparatus capable of quickly realizing humidity.
<< Embodiment 2 >>
<Overview of Embodiment 2>

In this embodiment, in the evaporation apparatus described in the first embodiment, it is impossible to supply liquid evenly around the outer surface of the cylindrical heating element with a single second liquid supply pipe. An evaporator having a plurality of liquid supply pipes so that the liquid can be supplied.
<Configuration of Embodiment 2>

  FIG. 3 shows a conceptual diagram of the evaporator according to the present embodiment. In this embodiment, the main body container (0301), the cylindrical heating element (0302), the liquid evaporation layer (0303), the first liquid supply pipe (0304), and the second liquid supply pipe shown in the first embodiment are used. (0305), a gas supply pipe (0306), a mixed gas discharge port (0307), and a control unit (0308), the second liquid supply pipe is further connected to the outer surface of the cylindrical heating element. It is composed of a plurality of liquid supply pipes so that the liquid can be evenly supplied to the periphery. 3A is a conceptual cross-sectional view from the side surface direction, and FIG. 3B is a cross-sectional view taken along the line AA ′ in FIG. In FIG. 3A, the liquid supply pipe constituting the second liquid supply pipe is omitted from illustration because the drawing becomes complicated.

  As shown in FIG. 1 of the first embodiment, when the second liquid supply pipe is configured from one liquid supply pipe, the liquid cannot be supplied uniformly to the outer surface of the liquid evaporation layer. When the liquid is supplied locally as described above, the liquid is evaporated at the portion where the liquid is supplied, so that the cylindrical heating element inside the liquid evaporation layer does not reach an abnormally high temperature. However, in the portion where the liquid is not supplied, since the cylindrical heating element generates heat to evaporate the liquid, the temperature is locally abnormally high.

  For this reason, in the evaporation apparatus of the present embodiment, as shown in FIG. 3, in order to supply the liquid uniformly in the side surface direction of the cylindrical heating element, the second liquid supply pipe is constituted by a plurality of liquid supply pipes. Yes. In FIG. 3B, the number of liquid supply pipes constituting the second liquid supply pipe is eight, but the number of liquid supply pipes constituting the second liquid supply pipe is a cylindrical heating element. It may be determined appropriately according to the diameter of the liquid evaporation layer.

As shown in FIG. 4A, the plurality of liquid supply pipes constituting the second liquid supply pipe penetrate from the upper side of the main body container (0401) toward the inside of the main body container, that is, through the upper surface (0402) of the main body container. The liquid supply pipe (0403) constituting the second liquid supply pipe is arranged, and the liquid supply pipe constituting the second liquid supply pipe is bent toward the liquid evaporation layer in the vicinity of the position where the liquid is supplied to the liquid evaporation layer (0404). Alternatively, the liquid may be supplied to the liquid evaporation layer. Further, as shown in (b), the liquid supply pipe penetrates from the side surface (0405) of the main body container in the direction of supplying the liquid evaporation layer without arranging the liquid supply pipe so as to penetrate the upper surface of the main body container. You may comprise. The arrangement of the plurality of liquid supply pipes constituting the second liquid supply pipe may be determined in consideration of the size of the evaporation device, the installation location, the temperature inside the main body container, and the like. FIG. 4 shows only a part of the configuration of the evaporation apparatus in the present embodiment for the sake of explanation.
<Embodiment 2 Effect>

As in the evaporation apparatus of the present embodiment, the second liquid supply pipe is composed of a plurality of liquid supply pipes, and the liquid is evenly supplied around the outer surface of the cylindrical heating element, so that the cylindrical heating element is locally provided. It is possible to prevent heat generation at a high temperature and realize efficient evaporation efficiency.
<< Embodiment 3 >>
<Overview of Embodiment 3>

In this embodiment, the cylindrical heating element described in the first and second embodiments is composed of a first cylindrical heating part and a second cylindrical heating part connected in the vertical direction, and each can be controlled independently. It is the evaporator characterized by having comprised.
<Configuration of Embodiment 3>

  The conceptual diagram for demonstrating the evaporation apparatus of this embodiment in FIG. 5 was shown. The evaporation apparatus of this embodiment includes the main body container (0501), the cylindrical heating element (0502), the liquid evaporation layer (0503), and the first liquid supply pipe (0504) shown in the first and second embodiments. In addition, the cylindrical heating element includes a second liquid supply pipe (0505), a gas supply pipe (0506), a mixed gas discharge port (0507), and a controller (0508). It is composed of a single cylindrical heating unit (0509) and a second cylindrical heating unit (0510), and the second cylindrical heating unit is arranged to be connected to the lower part of the first cylindrical heating unit. The first control means (0511) for controlling the first cylindrical heat generating portion and the second control means for controlling the second cylindrical heat generating portion (0512), the first control means and the second control means. Are configured to be independently controllable.

  The “first cylindrical heating part” constitutes a part of the cylindrical heating element, and is disposed on the upper part of the second cylindrical heating part described later. The first cylindrical heating unit is covered with the liquid evaporation layer described in the first embodiment. When the first cylindrical heating unit generates heat, the liquid evaporation layer around the first cylindrical heating unit is heated and supplied to the liquid evaporation layer. The resulting liquid is evaporated.

  The “second cylindrical heat generating portion” is connected to the lower portion of the first cylindrical heat generating portion described above, and the side periphery of the second cylindrical heat generating portion is covered with a liquid evaporation layer. Similar to the first cylindrical heating unit, the second cylindrical heating unit heats itself to heat the liquid evaporation layer around the second cylindrical heating unit and evaporate the liquid supplied to the liquid evaporation layer. Let

  Here, the liquid evaporation layer, the first liquid supply pipe, and the second liquid supply pipe of this embodiment will be described. In the evaporation apparatus described in the first embodiment, it has been described that the liquid evaporation layer is integrated. However, in the evaporation apparatus according to the second embodiment, it is not always necessary to have one liquid evaporation layer. For example, a configuration may be adopted in which separate liquid evaporation layers are arranged around the first cylindrical heating unit and the second cylindrical heating unit. For example, the first cylindrical heat generating part covers the first liquid evaporating layer, and the second cylindrical heat generating part covers the second liquid evaporating layer.

  For the first liquid supply pipe and the second cylindrical heat supply pipe, the first liquid supply pipe supplies liquid to the liquid evaporation layer around the first cylindrical heat generation part, and The second liquid supply pipe may supply the liquid to the liquid evaporation layer. Further, the liquid supplied to the liquid evaporation layer around the first cylindrical heating unit flows to the liquid evaporation layer around the second cylindrical heating unit by diffusion due to gravity, and the heat generated by the second cylindrical heating unit You may comprise so that it may evaporate.

  The “first control means” and the “second control means” have a configuration capable of independently controlling the first cylindrical heat generating portion and the second cylindrical heat generating portion, respectively. By providing the first control means and the second control means, it is possible to control the first cylindrical heat generating portion and the second cylindrical heat generating portion independently. For example, the liquid supply amount supplied from the liquid supply pipe is small. Yes, if the amount of heat generated by the first cylindrical heat generating part is sufficient to evaporate, control only the first cylindrical heat generating part to generate heat and the second cylindrical heat generating part not to generate heat. Also good. In this way, power consumption can be kept low. In addition, when the liquid supply amount is small as described above, if the liquid sufficiently evaporates due to the heat generated by the first cylindrical heating element, the second cylindrical heating unit does not evaporate the liquid to be evaporated. In other words, the state of empty cooking will continue. However, by providing the first control means and the second control means and controlling them independently, there is no need to maintain the second cylindrical heat generating portion in a useless high temperature state, and the product deterioration of the second cylindrical heat generating portion is prevented. It can also be suppressed.

  The control unit, the first control unit, and the second control unit may be controlled by inputting a predetermined value in advance by the user, or the first cylindrical heating unit and the second cylinder. Sensors such as temperature sensors are provided in the mold heating section, the first liquid evaporation layer, the second liquid evaporation layer, and the like, and the control unit, the first control means, and the second control means are controlled based on information from these sensors. You may comprise. For example, if the temperature in the vicinity of the upper part of the second cylindrical heating unit is abnormally high, it is assumed that the liquid is sufficiently evaporated in the first cylindrical heating unit. You may control to stop the heat_generation | fever of a part. Further, when the temperature in the vicinity of the lower portion of the first cylindrical heat generating portion becomes low, there is a possibility that the liquid cannot be sufficiently evaporated only by the heat generated by the first cylindrical heat generating portion. The mold heat generating unit may be configured to start heat generation for liquid evaporation.

  Further, in the evaporation apparatus of the present embodiment, the second control means is configured to maintain the temperature when the supply amount of the liquid from the liquid supply pipe is an amount that sufficiently evaporates due to the heat generated by the first cylindrical heating unit. The second cylindrical heating unit may be controlled so as to generate heat.

  As described above, the first cylindrical heating unit and the second cylindrical heating unit can be individually controlled by the first control unit and the second control unit, respectively. For this reason, when the amount of liquid that can be sufficiently evaporated by the first cylindrical heating unit is supplied from the liquid supply pipe, the second cylindrical heating unit needs to generate heat to evaporate the liquid. Absent. However, when the second cylindrical heating unit does not generate heat at all, the second cylindrical heating unit cools, and the liquid evaporated by the heat generated by the first cylindrical heating unit is cooled to the second cylindrical type. There is a possibility of condensation around the heat generating part. In order to prevent this, in the evaporation apparatus of the present embodiment, the second cylindrical heating unit generates heat for maintaining the temperature so that the liquid evaporated by the first cylindrical heating unit is not condensed. The second cylindrical heat generating part generates heat to maintain the temperature, so that it is possible to suppress condensation of the evaporated liquid.

  FIG. 6 shows a schematic diagram illustrating an example of a configuration when the control unit of the present embodiment is realized as hardware. As shown in FIG. 3, the control unit of the evaporation apparatus of the present embodiment includes a CPU (0601) and a main memory (0602) that perform various arithmetic processes, a program that performs various processes and determinations, and a control history depending on circumstances. A storage device (0603) such as a hard disk or flash memory for storing and holding, a display for notifying the user of various information such as temperature information, a monitor LED (0604), a speaker (0605), the first Cylindrical heating unit (0606), second cylindrical heating unit (0607), liquid supply pump (0608) for supplying liquid to the liquid supply pipe, carrier gas supply pump (0609) for supplying gas to the gas supply pipe, humidity Connected to various sensors (0610) that collect information on gas mixtures such as the dew point and the control of power supply to the heating element, And interface (0611) for carrying out communication and the like for carrying out control, and a like operation key for receiving an operation from the user (0612). These are connected to each other by a system bus or a data communication path (0613) to perform transmission / reception and processing of information. The main memory provides a work area that is a work area for the program at the same time that the program for performing various processes is read for the CPU to execute. In addition, a plurality of memory addresses are assigned to the main memory and the storage device, respectively, and a program executed by the CPU performs data exchange and processing by specifying and accessing the memory address. Is possible.

  The CPU controls the first cylindrical heating unit, the second cylindrical heating unit, the liquid supply pump, and the carrier gas supply pump, and develops a control program in the main memory. The CPU balances information on the temperature of the first and second cylindrical heating units, the temperature inside the main body container, the temperature and humidity at the gas mixture outlet, the dew point, etc. based on the developed program. Perform various calculations to control proper temperature, humidity, and dew point. The calculation result is temporarily stored in the main memory. At this time, the calculation result may be set to be stored in the storage device. Further, the CPU may be set to sequentially save the collected various information in the storage device. The CPU controls the second cylindrical heating unit, the liquid supply pump, and the carrier gas supply pump via the interface based on the calculation result in accordance with the developed program.

In the evaporation apparatus of the embodiment, the liquid and gas supplied to the inside of the main body are not particularly limited. For example, the supplied gas may be air and the liquid may be water, or the liquid may be alcohols such as methanol, hydrocarbons, or the like. When the supplied gas is air and the liquid is water, it functions as a so-called humidifier.
<Effect of Embodiment 3>

  When the amount of liquid supply is small by arranging the cylindrical heating element as a first cylindrical heating element and a second cylindrical heating element and connecting them in the vertical direction as in the evaporator of the present embodiment However, it is not necessary to heat the second cylindrical heating element unnecessarily, and it is not necessary to be in an unnecessary high temperature state. In addition, since it is not necessary to reduce the heat generation amount in order to avoid the high temperature state of the second cylindrical heating element, it takes a long time from the start of the supply of liquid until the target humidity is achieved, and the response time may be prolonged. Disappear.

0101 0301 0501 Main body container 0102 0302 0502 Cylindrical heating element 0103 0303 0503 Liquid evaporation layer 0104 0304 0504 First liquid supply pipe 0105 0305 0505 Second liquid supply pipe 0106 0306 0506 Gas supply pipe 0107 0307 0508 0507 Mixing gas exhaust 0050 Control unit 0509 First cylindrical heating unit 0510 Second cylindrical heating unit 0511 First control unit 0512 Second cylindrical heating unit

Claims (4)

A body container;
A cylindrical heating element erected inside the main body container;
A liquid evaporation layer covering the outer and upper surfaces of the cylindrical heating element;
A first liquid supply pipe for supplying a liquid to the liquid evaporation layer on the upper surface of the cylindrical heating element;
A second liquid supply pipe for supplying liquid to the liquid evaporation layer on the outer surface of the cylindrical heating element;
A gas supply pipe for supplying a carrier gas into the main body container;
A mixed gas discharge port for discharging a mixed gas of the evaporated product and the carrier gas to the outside of the main body container;
A control unit for controlling the heat generation amount and liquid supply amount of the cylindrical heating element, and the carrier gas supply amount;
An evaporation device comprising:   The evaporator according to claim 1, wherein the second liquid supply pipe is composed of a plurality of liquid supply pipes so that the liquid can be supplied uniformly around the outer surface of the cylindrical heating element. The cylindrical heating element is composed of a first cylindrical heating part and a second cylindrical heating part,
The second cylindrical heat generating part is arranged to be connected to the lower part of the first cylindrical heat generating part,
The control unit
First control means for controlling the first cylindrical heating unit;
Second control means for controlling the second cylindrical heating unit;
Consists of
The evaporator according to claim 1 or 2, wherein the first control means and the second control means can be controlled independently.   The second control means is configured to perform heat generation for maintaining the temperature when the liquid supply is only the first liquid supply pipe and the amount is sufficiently evaporated by the heat generated by the first cylindrical heating unit. The evaporator according to claim 3, wherein the two-cylindrical heating unit is controlled.