JP2012202973A - Treatment device for treated object containing flammable gas - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent a human error such as a flaw or a mistake by automatizing the calibration treatment of an oxygen sensor and automatically performing the calibration treatment of the oxygen sensor certainly in supplying power to a device.SOLUTION: A treatment device 1 includes a treatment tank 2, a vacuum pump 5 for decompressing the treatment tank 2, an inactive gas source 4, an oxygen sensor 6, and a control part 7. The device also includes an air suction valve 45, and an inactive gas supply valve 38. The inactive gas source 4 supplies inactive gas to the treatment tank 2. The control part 7 supplies air to the oxygen sensor 6 when power is supplied so as to acquire a first measurement value, supplies the inactive gas to the oxygen sensor so as to acquire a second measurement value, and calculates the analytical curve of the oxygen sensor 6 based on the first measurement value and the second measurement value so as to perform the calibration of the oxygen sensor 6. Consequently, the control part 7 always acquires a new parameter, and the calibration treatment of the oxygen sensor 6 is linked with the treatment operation of the treatment device 1 thereby to attain the safe control of the device and equipment.

Description

  The present invention relates to a processing apparatus for processing equipment (processing object) containing combustible gas such as discarded aerosol can, LP cartridge can, lighter, and refrigeration cycle using a combustible refrigerant.

  At present, material recycling has become an indispensable technology for a sustainable society in order to reuse limited resources. On the other hand, in order to prevent global warming, low GWP butane, propane and other hydrocarbons are used for refrigerants in refrigeration cycles such as refrigerators and vending machines, and propellants for aerosol cans. This hydrocarbon is a highly flammable gas and is used for filling purposes such as LP cartridge cans and lighters.

  Patent Document 1 describes a technique for recovering a flammable refrigerant used in a refrigerator, a vending machine, a car air conditioner, an air conditioner, or the like.

  Furthermore, equipment containing flammable gas includes fuel, gas cans for tabletop gas stoves for fuel, gas lighters for ignition, and medicinal spray cans (including insecticides) used as propellants, spray cans for painting, gas There are cosmetic spray cans (hair spray cans) and the like, which are crushed using a technique as described in Patent Document 2.

  The biggest problem in processing in the recovery device described in Patent Document 1 and the processing method described in Patent Document 2 is that combustible gas ignites and explodes. Such explosions can lead to major accidents and are extremely important issues for the treatment of these combustible gas-containing devices.

  A general flammable gas fire or explosion occurs due to the presence of an inherent mixing ratio (explosion range) and ignition energy of the flammable gas and oxygen in the air. Since the ignition energy is small and can be easily applied by static electricity or tool impact, etc., to prevent fire and explosion, the oxygen concentration in the processing unit is always reduced to keep the processing unit outside the explosion range. It is demanded.

  In addition, some of the objects to be recovered discarded in the recovery apparatus described in Patent Document 1 and the gas can processing method described in Patent Document 2 include oxygen cans that are erroneously charged. Therefore, in such a recovery operation, it is necessary to presume that air (oxygen) is mixed. In addition, in equipment operating in a vacuum system accompanied by these pressure fluctuations, it is difficult to detect and detect air leakage from outside to inside due to deterioration or the like.

  In general, an oxygen sensor is used to continuously measure the oxygen concentration during processing. When the oxygen concentration value measured by the oxygen sensor exceeds the explosion limit, an explosion can be caused by injecting an inert gas into the device, stopping the recovery of combustible gas, or crushing the gas can. This is prevented (see Patent Document 1).

JP 2008-121915 A JP 2006-346520 A

  However, the oxygen sensor for such use is rapidly contaminated by a large amount of oil mist or mist of the contents of the spray can, the output is lowered, and an oxygen concentration lower than the actual one is displayed (output). This is fatal for security reasons. When the performance of the oxygen sensor is lowered, the reliability of the oxygen concentration value measured by the oxygen sensor is lowered, and there is a problem that the inside of the processing unit cannot always be maintained outside the explosion range. Further, in order to perform the calibration process of the oxygen sensor, it is necessary to prepare a gas for span and a gas for zero point calibration, which is very complicated. Furthermore, it is very difficult to observe the necessary and sufficient calibration period at the work site, and there is a possibility that human error will occur, and human error cannot be prevented.

  In view of the above problems, the object of the present invention is to automatically perform calibration processing of the oxygen sensor whenever the apparatus is turned on, and to prevent an object to be processed containing combustible gas from being generated by a human cellar. It is to provide a processing apparatus.

In order to solve the above-described problems and achieve the object of the present invention, the processing apparatus for an object to be processed containing a combustible gas according to the present invention performs a predetermined process on an object to be processed containing a combustible gas. And a decompression unit for decompressing the processing unit. An inert gas source for supplying an inert gas to the processing unit, an oxygen sensor for measuring the oxygen concentration of the processing unit, an air suction mechanism for taking in air and supplying air to the oxygen sensor, and inert from the inert gas source An inert gas supply valve that takes in the gas and supplies an inert gas to the oxygen sensor. A control unit that controls the operation of the air suction mechanism and the opening and closing of the inert gas supply valve and calibrates the oxygen sensor by supplying air and inert gas to the oxygen sensor.
Then, the control unit operates the air suction mechanism when the power is turned on to supply air to the oxygen sensor, acquires the first measurement value, and opens the inert gas supply valve to supply the inert gas to the oxygen sensor. Thus, the second measurement value is acquired, and a calibration curve of the oxygen sensor is calculated based on the first measurement value and the second measurement value, and the oxygen sensor is calibrated.

  In addition, when there is no inert gas or when the output of the oxygen sensor is equal to or lower than a predetermined value, the control unit does not enter into the operation of the processing apparatus.

  According to the apparatus for processing an object containing combustible gas according to the present invention, the control unit controls the operation of the air suction mechanism and the opening / closing of the inert gas supply valve, and the inert gas used for the processing operation by the air and the processing unit. Is used to calibrate the oxygen sensor. This eliminates the need to separately prepare span gas for span calibration and gas for zero point calibration.

  Further, the control unit performs calibration processing of the oxygen sensor every time the power is turned on, that is, every time the apparatus is started. As a result, the oxygen concentration in the processing unit can be accurately measured by the oxygen sensor, and safe control and safe processing of the workpiece can be performed.

It is a block diagram which shows the 1st Embodiment of the processing apparatus of the to-be-processed object containing the combustible gas of this invention. It is explanatory drawing which shows the state of the valve at the time of span calibration in the 1st Embodiment of the processing apparatus of the to-be-processed object containing the combustible gas of this invention. It is explanatory drawing which shows the state of the valve at the time of the zero point calibration in the 1st Embodiment of the processing apparatus of the to-be-processed object containing the combustible gas of this invention. It is a graph which shows the state which A / D converts the value detected with the oxygen sensor in the processing apparatus of the to-be-processed object containing the combustible gas of this invention. It is a graph which shows the state which calculates the calibration curve of the oxygen sensor in the processing apparatus of the to-be-processed object containing the combustible gas of this invention. It is a block diagram which shows the 2nd Embodiment of the processing apparatus of the to-be-processed object containing the combustible gas of this invention.

Embodiments of a processing apparatus (hereinafter referred to as “processing apparatus”) for an object to be processed containing a combustible gas according to the present invention will be described below with reference to FIGS. In addition, the same code | symbol is attached | subjected to the common member in each figure. The present invention is not limited to the following form.
The description will be given in the following order.
1. First embodiment example 1-1. Configuration of processing device 1-2. Processing method of processing apparatus 1-3. 1. Calibration method of oxygen sensor Second embodiment

<1. First Embodiment>
1-1. Configuration of Processing Apparatus First, the configuration of a processing apparatus according to a first embodiment of the present invention (hereinafter referred to as “this example”) will be described with reference to FIG.
FIG. 1 is a block diagram showing the processing apparatus of this example.

  The processing apparatus 1 of this example is an apparatus that separates and collects hydrocarbons used as refrigerants from combustibles such as refrigerators and air conditioners, or flammable chlorofluorocarbons, so-called flammable gases, and refrigerator oil. As shown in FIG. 1, the processing apparatus 1 is disposed on the downstream side of a processing tank 2 showing an example of a processing unit, an inert gas source 4, a vacuum pump 5 showing an example of a decompression unit, and the vacuum pump 5. The oxygen sensor 6 and the control unit 7 are configured. As the oxygen sensor 6, for example, a galvanic cell type is used.

  The processing tank 2 is a tank that stores a solution S in which a refrigerant (combustible gas) is dissolved in the refrigerating machine oil collected from the workpiece T and separates the combustible gas from the refrigerating machine oil. The processing tank 2 is provided with a liquid amount sensor 11 for detecting the recovered liquid amount, a pressure sensor 12 for measuring the pressure in the processing tank 2, and a temperature sensor 29 for measuring the temperature of the solution S. .

  Further, the processing tank 2 is connected to the object to be processed T through a recovery pipe 16. A spray nozzle 14 is provided at the end of the recovery pipe 16 on the processing tank 2 side. The sprayed solution 14 sprays the recovered solution S into the processing tank 2. A recovery valve 17 is provided in the recovery pipe 16.

  The processing tank 2 is connected to the vacuum pump 5 via a pipe 42. The piping 42 is provided with a valve 43. In addition, since the solution S collect | recovered from the to-be-processed object T is injected in the process tank 2 by the spray nozzle 14, a lot of refrigerating machine oil turns into a fine mist, and is sprayed. In order to prevent this fine mist from passing through the pipe 42 and being transferred to the vacuum pump 5 or the oxygen sensor 6, the mist separator 13 is disposed on the processing tank 2 side in the pipe 42.

  The mist separator 13 separates gas (combustible gas) and liquid (refrigeration oil), and passes only gas through the pipe 42. Further, an air suction valve 45 that is an air suction mechanism for taking in and sucking air used as a span gas into the oxygen sensor 6 is provided in the middle of the pipe 42.

  Further, a discharge pipe 27 is connected to the bottom of the processing tank 2, and a waste liquid valve 28 is provided in the pipe 27. The processing tank 2 is connected to the pump 30 via a pipe 31. The pipe 31 is provided with a spray nozzle 32 that injects the solution S sucked by the pump 30 into the processing tank 2 again.

  The inert gas source 4 supplies an inert gas to the processing tank 2 which is a processing unit. As the inert gas, nitrogen, carbon dioxide and the like are generally used, and rare gas elements such as helium, neon and argon, nitrogen and the like can also be used. The inert gas source 4 is connected to the processing tank 2 via a first inert gas pipe 33. A valve 36 is provided in the first inert gas pipe 33.

  Further, the inert gas source 4 is connected to the vacuum pump 5 and the oxygen sensor 6 via the second inert gas pipe 37. The second inert gas pipe 37 is provided with an inert gas supply valve 38. Then, by opening the inert gas supply valve 38, the zero point calibration inert gas is taken in from the inert gas source 4 and supplied to the oxygen sensor 6.

  The vacuum pump 5 is disposed on the downstream side of the pipe 42 and the second inert gas pipe 37. Further, in order to protect the vacuum pump 5, a bypass valve 46 and a bypass pipe 47 are provided. By the bypass valve 46 and the bypass pipe 47, the pressure in the apparatus can be made equal to the atmospheric pressure when the apparatus is started.

  An oxygen sensor 6 is provided on the downstream side of the vacuum pump 5. When the vacuum pump 5 is operated, the gas in the processing tank 2 passes through the pipe 42, is sucked into the vacuum pump 5, and is discharged to the downstream side of the vacuum pump 5. The oxygen sensor 6 measures the oxygen concentration in the gas discharged from the vacuum pump 5.

  The oxygen sensor 6 is electrically connected to the control unit 7, and the oxygen concentration measured by the oxygen sensor 6 is output to the control unit 7. In addition, all valves such as the recovery valve 17, the inert gas supply valve 38, and the air suction valve 45 are automatic valves that are opened and closed by electrical signals, and are controlled by the control unit 7. Based on the oxygen concentration output from the oxygen sensor 6, the control unit 7 performs, for example, an inert gas sealing, a recovery operation stop, and an alarm.

  And the control part 7 performs the calibration process of the oxygen sensor 6 when the apparatus is turned on. Thus, the apparatus can be operated safely by performing the calibration process of the oxygen sensor 6 when the power is turned on. Moreover, human error such as wrinkles or negligence by a person can be prevented by performing the calibration process using the control unit 7 provided in the apparatus instead of a person. Further, the calibration processing of the oxygen sensor 6 can be linked with the processing operation of the processing device 1 to realize safe control of the processing device 1. The detailed description of the calibration process of the oxygen sensor 6 will be described later.

  As the control unit 7, a personal computer (PC), a programmable logic controller (PLC), or the like is used. The control unit 7 is provided with an A / D conversion unit, a booster circuit (amplifier), and the like.

  A backfire preventer 48, a valve 49, and a fan 51 are provided on the downstream side of the oxygen sensor 6. A gas such as a combustible gas sucked by the vacuum pump 5 is diluted to the lower limit of explosion through the fan 51 and discharged.

1-2. Next, a method for recovering refrigerant and refrigerating machine oil from the workpiece T of the processing apparatus 1 having the calibration described above will be described.
First, the oxygen sensor 6 is calibrated before performing the recovery operation so that the oxygen sensor 6 can accurately measure the oxygen concentration in the processing section. A method for calibrating the oxygen sensor 6 will be described later.

  Here, when the processing apparatus 1 is in an operating state, the processing tank 2 is operated in a negative pressure state. Therefore, when stopping, an inert gas is automatically pressurized and sealed in order to prevent outside air from entering the processing tank 2. In this state, the oxygen sensor 6 is calibrated at startup. After calibration, the valves 43 and 49 are opened and exhausted until the inside of the processing tank 2 reaches atmospheric pressure. Next, the vacuum pump 5 is operated, and the processing tank 2 is depressurized and evacuated. When the processing tank 2 is depressurized to a predetermined pressure, the recovery valve 17 is opened, and the recovery of the solution S from the object T is started.

  When the oxygen concentration in the processing tank 2 exceeds a specified concentration (for example, 4%) due to air being entrained during the recovery of the solution S, an inert gas is sealed in the processing tank 2. When the oxygen concentration further increases, for example, when the oxygen concentration reaches 8%, the supply of the inert gas is continued and the recovery of the solution S from the workpiece T is stopped.

  The collection operation and the processing operation are performed simultaneously. That is, the recovered solution S is heated by the heater 26 provided in the processing tank 2 and depressurized by the vacuum pump 5. Thereby, the refrigerant | coolant which is a combustible gas continuously vaporizes, and isolate | separates from refrigeration oil. Then, when a predetermined refrigerating machine oil is accumulated in the processing tank 2 and the liquid temperature reaches a predetermined temperature or higher, the valve 36 is opened and pressurized. When the pressure in the processing tank 2 reaches atmospheric pressure or higher, the waste liquid valve 28 is opened and the refrigerating machine oil is discharged.

  In this way, the processing operation for the workpiece T by the processing apparatus 1 of this example is completed.

1-3. Next, a method for calibrating the oxygen sensor 6 will be described with reference to FIGS.
FIG. 2 is a diagram illustrating a state during span calibration, and FIG. 3 is a diagram illustrating a state during zero point calibration. In this example, an example in which a high-purity inert gas is used and the calibration curve is calculated and controlled at the zero point and the span will be described. FIG. 4 is a graph showing a state in which the value detected by the oxygen sensor 6 is A / D converted, and FIG. 5 is a graph showing a state in which a calibration curve of the oxygen sensor is calculated.

  First, as shown in FIG. 2, only the air suction valve 45 and the valve 49 are opened, and all valves other than the air suction valve 45 and the valve 49 are closed. Next, the vacuum pump 5 is activated to take in air from the air suction valve 45 and supply it to the oxygen sensor 6. Here, since the air suction valve 45 is provided on the downstream side of the valve 43, it is possible to prevent oxygen from being mixed into the processing tank 2. Here, 20.9% of oxygen is contained in the air. Then, this air is supplied as a span gas to the oxygen sensor 6. Here, the oxygen sensor 6 outputs a voltage of 40 mV in this example corresponding to the input.

  Next, the controller 7 boosts the voltage to a voltage suitable for the A / D conversion unit. Then, the A / D conversion unit converts the voltage level into a pulse and sends it to the arithmetic unit. FIG. 4 shows an example in which 20000 pulses are set when the sensor output is 100 mV.

Then, as shown in FIG. 4, A / D conversion is performed to convert a value V ₂ (eg, 30 mV) detected by the oxygen sensor 6 into a pulse P ₂ (eg, 8000). The pulse P ₂ is the span calibration value which is the first measurement.

Next, as shown in FIG. 3, at the time of zero point calibration, only the inert gas supply valve 38 and the valve 49 are opened, and all valves other than the inert gas supply valve 38 and the valve 49 are closed. Then, the inert gas is taken from the inert gas source 4 and sent to the oxygen sensor 6. Then, as shown in FIG. 4, A / D conversion is performed. At this time, a value V ₁ (for example, 6 mV) detected by the oxygen sensor 6 is converted into a pulse P ₁ (for example, 1800), and a second measured value is obtained. Measure the zero calibration value.

Next, as shown in FIG. 5, a calibration curve L of the oxygen sensor 6 is calculated from the pulse P ₂ that is the span calibration value and P ₁ that is the zero point calibration value, and is stored in the storage unit of the control unit 7. Thereby, the calibration (calibration) of the oxygen sensor 6 is completed, and control with a correct oxygen concentration is enabled.

Further, according to the processing apparatus 1 of the present example, air is used as the span gas, and the inert gas source 4 used for processing is used for zero point calibration. When the inert gas source 4 is less than the specified pressure or the difference between the values V ₁ and V ₂ becomes small, the calibration cannot be performed and the processing apparatus 1 cannot be started.

  Furthermore, the calibration operation of the oxygen sensor 6 can be performed frequently, and new parameters can be acquired as needed. Thereby, the reliability of the oxygen concentration detected by the oxygen sensor 6 can be improved. Moreover, it is possible to prevent human errors such as wrinkles and negligence by humans by automatically and periodically calibrating the oxygen sensor 6 by the control unit 7 provided in the apparatus instead of a human.

  Further, the control unit 7 may perform control so that the oxygen sensor 6 is calibrated at predetermined time intervals. Thereby, even when the apparatus is operated continuously for a long time, the apparatus can be operated safely. In addition, the control part 7 stops the process by another process part until the calibration process of the oxygen sensor 6 is complete | finished.

  In addition, when using a low purity inert gas, the high span value which is a 1st measured value is measured with air, and the low span value which is a 2nd measured value is measured with an inert gas. Then, a calibration curve is calculated from the two points of the high span value and the low span value, and the oxygen sensor 6 is calibrated.

<2. Second Embodiment>
Next, a second embodiment of the processing apparatus of the present invention will be described with reference to FIG.
FIG. 6 is a block diagram showing a processing apparatus according to the second embodiment.

  The processing apparatus 100 according to the second embodiment is an apparatus for crushing a gas can or a gas lighter containing a flammable gas as the object to be processed T. As shown in FIG. 6, a container-shaped crushing chamber 101, an example of a processing unit, a waste liquid tank 103, an oil tank 104 and a water tank 105, an inert gas source 4, a vacuum pump 5, and a downstream of the vacuum pump 5. It is comprised from the oxygen sensor 6 arrange | positioned at the side, and the control part not shown.

  The container-shaped crushing chamber 101 is provided with an opening at the top thereof for introducing the workpiece T. The container-like crushing chamber 101 has an input hatch 102 for closing the opening. Further, on the lower side surface of the container-like crushing chamber 101, an extraction hatch 107 for taking out the crushed material is provided. The input hatch 102 and the extraction hatch 107 have a high-density structure so that the pressure in the container-like crushing chamber 101 can be maintained. Inside the container-like crushing chamber 101, a crusher 106 for crushing the workpiece T is disposed. Further, the container-shaped crushing chamber 101 is provided with a pressure sensor 112 that measures the pressure inside the container-shaped crushing chamber 101.

  Further, a pipe 113 reaching the inert gas source 4 is connected to a side portion below the container-like crushing chamber 101 via a valve 115. For example, nitrogen gas is supplied from the inert gas source 4 into the container-like crushing chamber 101 as an inert gas. Further, a pipe 116 extending to the vacuum pump 5 through the oil tank 104 and the water tank 105 is connected to the container-shaped crushing chamber 101, and the air in the container-shaped crushing chamber 101 is sucked. Thereby, the inside of the container-shaped crushing chamber 101 can be made into a negative pressure. Further, the pipe 116 is provided with a valve 117 and a filter 118.

  Further, a discharge pipe 108 for discharging the liquid material remaining on the workpiece T is connected to the bottom of the container-like crushing chamber 101, and a waste liquid valve 109 and a filter 111 are provided in the pipe 108. Further, the pipe 108 is connected to the waste liquid tank 103, and the liquid material accumulated at the bottom of the container-like crushing chamber 101 is transferred to the waste liquid tank 103.

  An oil tank 104 and a water tank 105 are provided on the downstream side of the waste liquid tank 103. The oil tank 104 is filled with a filling oil 104a as a solvent, and the water tank 105 is filled with water 105a as a solvent. Turbine oil or the like having a low viscosity is used as the filling oil 104a. The waste liquid tank 103, the oil tank 104, and the water tank 105 are connected to the inert gas source 4 through pipes 116 and 128.

  The waste liquid tank 103 is provided with a liquid amount sensor 103b for measuring the amount of liquid. Further, the oil tank 104 and the water tank 105 are provided with level gauges 104b and 105b for displaying the liquid amount, respectively. The waste liquid tank 103, the oil tank 104, and the water tank 105 are provided with discharge pipes 103c, 104c, and 105c, respectively.

  The waste liquid tank 103 is connected to the oil tank 104 through a pipe 127, and the oil tank 104 is connected to the water tank 105 through a pipe 128. The water tank 105 is provided with a pipe 129 leading to the vacuum pump 5.

  The gas in the waste liquid tank 103 and the waste liquid tank 103 is transferred to the oil tank 104 and the water tank 105. Then, the liquid oil 104a and the water 105a filled in the oil tank 104 and the water tank 105 can be used to adsorb and capture a liquid substance or remove odor contained in the gas.

  An oxygen sensor 6 is provided on the downstream side of the vacuum pump 5 and measures the oxygen concentration in the gas discharged from the vacuum pump 5. Further, a pipe 141 leading to the combustible gas dilution fan 140 is connected to the downstream side of the oxygen sensor 6. The fan 140 exhausts the diluted gas. A combustion device that burns gas may be provided downstream of the oxygen sensor 6.

  The vacuum pump 5 is provided with an inert gas pipe 135 connected to the inert gas source 4. An inert gas is supplied to the oxygen sensor 6 through the inert gas pipe 135. An inert gas supply valve 136 is attached to the inert gas pipe 135. Further, on the downstream side of the water tank 105 and on the upstream side of the vacuum pump 5, an air suction valve 137 that is an air suction mechanism for taking in and supplying air to the oxygen sensor 6 is disposed. Air is supplied to the oxygen sensor 6 by taking in air from the air suction valve 137.

  In the processing apparatus 100 according to the second embodiment, since a solid processed product is charged and discharged, it is always opened to the atmosphere. Therefore, the air suction valve 137 may not be provided in the case where the internal air is discharged when the vacuum pump 5 is started and the flow rate necessary for the calibration process of the oxygen sensor 6 is ensured. In this case, the vacuum pump 5, the container-like crushing chamber 101, the waste liquid tank 103, and the like serve as an air suction mechanism.

  Further, the processing device 100 is provided with a control device (not shown), and the control device controls the entire processing device and controls the calibration process of the oxygen sensor 6. During the processing operation by the processing apparatus 100, the operations of the vacuum pump 5 and the crusher 106 are controlled based on the oxygen concentration detected by the oxygen sensor 6. For example, when the oxygen concentration rises above a predetermined value, the crushing process by the crusher 106 is stopped and the inert gas is supplied into the container crushing chamber 101. Thereby, it is possible to prevent an explosion from occurring due to a spark generated when the object T is crushed by the crusher 106.

  Next, the crushing process of the processing apparatus 100 having such a configuration will be described. First, as an initial state, all valves are closed. The calibration process of the oxygen sensor 6 is performed before the crushing process.

  First, the input hatch 102 is opened, and an object T to be processed such as a gas can or a lighter discarded in the container crushing chamber 101 is input. Next, the input hatch 102 of the container-like crushing chamber 101 is closed, and the sealing door of the take-out hatch 107 disposed at the lower part of the crusher 106 is also closed. Therefore, the container-like crushing chamber 101 is in a state of being blocked from the outside.

  Next, the valve 117 is opened, and the vacuum pump 5 and the fan 140 are operated. Then, the inside of the container-shaped crushing chamber 101 is depressurized by the vacuum pump 5. Then, the air in the container-like crushing chamber 101 passes through the vacuum pump 5 and is forcibly exhausted from the fan 140 to the atmosphere.

  Next, the air in the container-shaped crushing chamber 101 is replaced with an inert gas. First, when the inside of the container-like crushing chamber 101 is depressurized to a predetermined pressure, the valve 115 is opened and the inert gas is supplied from the inert gas source 4 to the container-like crushing chamber 101, the waste liquid tank 103, the oil tank 104, and the water tank 105. Vent inside. In this manner, air and inert gas can be efficiently replaced by supplying the inert gas from the upstream side and exhausting the downstream side.

  In the second embodiment, since the supply amount of the inert gas is set to be larger than the exhaust amount, the internal pressure increases. In the second embodiment, the supply of the inert gas is stopped at -0.03 Mpa MPa, only the vacuum pump 5 is operated, and the exhaust gas is exhausted to -0.07 Mpa MPa. Then, the inert gas is supplied again. By repeating this several times, the oxygen concentration in the container-like crushing chamber 101 decreases to below the explosion limit.

  It is confirmed that the pressure in the container-like crushing chamber 101 has been reduced to a predetermined pressure. Then, all the valves are further closed and held for a certain period of time, and after confirming that there is no leak in the container-like crushing chamber 101 by the pressure sensor 112 (airtight test mode), the crusher 106 is activated and the workpiece T A crushing process is performed. The to-be-processed object T by which the crushing process was carried out falls in the container not shown stored below the crusher 106, and is collect | recovered.

  At this time, the gas or liquid remaining from the object to be processed T is ejected or flows out, but the liquid is transferred to the waste liquid tank 103 through the pipe 108. Gas and steam pass through the valve 117 and are sent to the oil tank 104 and the water tank 105. The gas and vapor evaporated in the waste liquid tank 103 pass through the pipe 127 and are sent to the oil tank 104 and the water tank 105. The oil-soluble vapor is dissolved and captured by the filling oil 104 a filled in the oil tank tank 104. The water-soluble vapor is dissolved and trapped by the water 105 a filled in the water tank 105.

  During the processing as described above, the oxygen sensor 6 constantly measures the oxygen concentration in the gas discharged from the vacuum pump 5. This makes it possible to realize effective control against leakage that occurs during the introduction or processing of the oxygen can by mistake.

  Specifically, when the oxygen concentration increases, the crusher 106 is stopped, the valve 115 is opened, and the inert gas from the inert gas source 4 is supplied to the container crushing chamber 101, the waste liquid tank 103, the oil tank 104, and the water tank. Air is passed through the tank 105 to reduce the oxygen concentration. And if oxygen concentration falls to a predetermined | prescribed density | concentration, the crusher 106 will be restarted and crushing processing will be restarted.

  In addition, if the oxygen concentration exceeds the specified oxygen concentration and exceeds a higher set concentration, or if the oxygen concentration does not decrease even after the above operation is repeated, the vacuum pump 5 is stopped and the inert gas is sealed up to atmospheric pressure. To do. Then, an alarm is displayed or sounded, and the operation of the processing apparatus 100 is stopped. The caustic oxygen can and the like are removed from the container-like crushing chamber 101.

  And when all the to-be-processed workpieces T are crushed and there are no unprocessed workpieces T in the container-like crushing chamber 101, the generation of gas due to the crushing of the workpieces T is stopped. When the pressure sensor 112 detects that the load on the crusher 106 is lost, the crushing process ends and the crusher 106 stops.

  In this state, the concentration in the container-like crushing chamber 101 is close to 100% with combustible gas. Therefore, similar to the above-described step of replacing the air in the container-shaped crushing chamber 101 with an inert gas, the combustible gas is replaced with an inert gas, and after the atmosphere is introduced, the take-out hatch 107 is opened and crushed. The workpiece T is taken out.

Next, a method for calibrating the oxygen sensor 6 according to the processing apparatus 100 of the second embodiment will be described.
First, the air suction valve 137 is opened in order to measure the first measured value by the oxygen sensor 6, that is, the so-called span calibration value. Next, the vacuum pump 5 is activated to take in air as a span gas from the air suction valve 137 and supply it to the oxygen sensor 6. Then, the value detected by the oxygen sensor 6 is A / D converted to obtain a span calibration value which is the first measurement value.

  Next, the air suction valve 137 is closed and the inert gas supply valve 136 is opened. Then, an inert gas is sent from the inert gas source 4 to the oxygen sensor 6 to the oxygen sensor 6, and the zero point calibration value that is the second measurement value is acquired by the oxygen sensor 6.

  Next, a calibration curve for the oxygen sensor 6 is calculated from the span calibration value that is the first measurement value and the zero point calibration value that is the second measurement value, and the oxygen sensor 6 is calibrated. Thereby, the calibration of the oxygen sensor 6 is completed.

  Also with the processing apparatus 100 having such a configuration, the oxygen sensor 6 is calibrated similarly to the processing apparatus 1 according to the first embodiment described above. Since the calibration process of the oxygen sensor 6 is the same as that of the processing apparatus 1 according to the first embodiment described above, the description thereof is omitted. Even with the processing apparatus 100 having such a configuration, the same operations and effects as those of the processing apparatus 1 according to the first embodiment described above can be obtained.

  The present invention is not limited to the embodiment described above and shown in the drawings, and various modifications can be made without departing from the scope of the invention described in the claims.

  DESCRIPTION OF SYMBOLS 1,100 ... Processing apparatus, 2 ... Processing tank (processing part), 4 ... Inert gas source, 5 ... Vacuum pump (decompression part), 6 ... Oxygen sensor, 7 ... Control part, 16 ... Recovery piping, 17 ... Recovery valve, 33 ... first inert gas piping, 37 ... second inert gas piping, 38,136 ... inert gas supply valve, 45,137 ... air suction valve (air suction mechanism), 101 ... container shape Crushing chamber (processing section), 103 ... Waste liquid tank, 104 ... Oil tank tank, 105 ... Water tank tank, 135 ... Inert gas piping

Claims (5)

A processing unit that performs a predetermined process on an object to be processed containing a combustible gas;
A decompression unit for decompressing the processing unit;
An inert gas source for supplying an inert gas to the processing unit;
An oxygen sensor for measuring the oxygen concentration of the processing unit;
An air suction mechanism for taking in air and supplying the air to the oxygen sensor;
An inert gas supply valve that takes in the inert gas from the inert gas source and supplies the inert gas to the oxygen sensor;
A controller that calibrates the oxygen sensor by controlling the operation of the air suction mechanism and opening / closing of the inert gas supply valve, and supplying air and the inert gas to the oxygen sensor;
Prepared,
The control unit obtains a first measurement value by operating the air suction mechanism and supplying air to the oxygen sensor when the power is turned on, and opens the inert gas supply valve to provide an inert gas to the oxygen sensor. To obtain a second measured value, calculate a calibration curve of the oxygen sensor based on the first measured value and the second measured value, and calibrate the oxygen sensor Combustible gas The processing apparatus of the to-be-processed object containing this. The first measurement value is a span calibration value for span calibration of the oxygen sensor.
The processing apparatus of the to-be-processed object containing the combustible gas of Claim 1. The said 2nd measured value is the zero point calibration value for the zero point calibration of the said oxygen sensor. The processing apparatus of the to-be-processed object containing the combustible gas of Claim 1 or 2. The said process part does not operate | move until the calibration process of the said oxygen sensor by the said control part is complete | finished. The processing apparatus of the to-be-processed object containing the combustible gas in any one of Claims 1-3. The calibration process of the said oxygen sensor is performed for every predetermined time. The processor is
A container into which an object to be processed containing the combustible gas is charged;
A crusher provided in the container for crushing the workpiece;
The processing apparatus of the to-be-processed object containing the combustible gas in any one of Claims 1-4 which consists of the discharge part which discharges | emits the combustible gas which generate | occur | produces from the to-be-processed object crushed within the said container.

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