CN110559746B - Waste gas recovery experiment system and implementation method - Google Patents

Waste gas recovery experiment system and implementation method Download PDF

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CN110559746B
CN110559746B CN201910831346.9A CN201910831346A CN110559746B CN 110559746 B CN110559746 B CN 110559746B CN 201910831346 A CN201910831346 A CN 201910831346A CN 110559746 B CN110559746 B CN 110559746B
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exhaust gas
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梁学锋
郭东亮
涂云宏
张东伟
支佳运
李壮
冯小磊
马世伟
朱丹丹
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Beijing Ucas Technology Co ltd
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    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
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Abstract

本发明公开了一种废气回收系统及实现方法,本发明实施例在设置的真空/加压实验系统中,增加废气回收单元,该废气回收单元接入到该实验系统的真空单元的一端,接收实验产生的废气并储存到设置的回收气瓶中,这样,本发明实施例在提供实验的真空/加压工况的情况下,实现对废气气体的回收。

The invention discloses an exhaust gas recovery system and an implementation method. In the embodiment of the present invention, an exhaust gas recovery unit is added to a vacuum/pressurization experimental system. The exhaust gas recovery unit is connected to one end of the vacuum unit of the experimental system and receives The waste gas generated by the experiment is stored in the provided recovery gas bottle. In this way, the embodiment of the present invention realizes the recovery of the waste gas while providing the vacuum/pressure working conditions of the experiment.

Description

一种废气回收实验系统及实现方法An exhaust gas recovery experimental system and implementation method

技术领域Technical field

本发明涉及实验技术领域,特别涉及一种废气回收系统及实现方法。The invention relates to the field of experimental technology, and in particular to an exhaust gas recovery system and an implementation method.

背景技术Background technique

在卫星平台进行的空间实验为各个领域提供了大量的实验数据及实验结果,因此,不同类型的各种实验都在卫星平台进行实施。在卫星平台进行实验的成本很高,包括发射成本、实验能源成本及在空间轨道运行成本等。为了降低研究实验成本,在实验设计和规划方面尽可能遵循低成本及高可靠性的原则,在卫星平台中设置的实验系统尽可能完成多项不同实验,因此,在设置实验系统时,采用专用性实验系统向通用性实验系统靠拢的指导思想,尽可能对设置的实验系统的功能进行拓展。更进一步地,考虑到卫星平台环境的复杂性,所设置的实验系统需要尽可能地避免对外界环境的依赖。Space experiments conducted on satellite platforms provide a large amount of experimental data and experimental results for various fields. Therefore, various types of experiments are implemented on satellite platforms. The cost of conducting experiments on satellite platforms is very high, including launch costs, experimental energy costs, and orbital operation costs in space. In order to reduce the cost of research experiments, the principles of low cost and high reliability should be followed as much as possible in experimental design and planning. The experimental system set up in the satellite platform should complete as many different experiments as possible. Therefore, when setting up the experimental system, a dedicated The guiding ideology is to move the sexual experimental system closer to the general experimental system and expand the functions of the set experimental system as much as possible. Furthermore, considering the complexity of the satellite platform environment, the experimental system set up needs to avoid dependence on the external environment as much as possible.

在卫星平台中可以构造真空及加压系统,用于进行真空及加压的空间实验。但是,在卫星平台的真空和/或加压工况下完成实验,均需要依赖外界环境提供的一级真空或废气接口,如果直接将气体排到卫星平台的废气系统,会造成气体的浪费,增加了卫星平台的气体运输成本,频繁地更换装载实验所需的气体的气瓶造成了不容易实施。Vacuum and pressurization systems can be constructed in satellite platforms to conduct vacuum and pressurized space experiments. However, completing experiments under the vacuum and/or pressurized conditions of the satellite platform requires relying on the first-level vacuum or exhaust gas interface provided by the external environment. If the gas is directly discharged to the exhaust system of the satellite platform, it will cause a waste of gas. The gas transportation cost of the satellite platform is increased, and the frequent replacement of gas bottles containing the gas required for the experiment makes it difficult to implement.

同样地,在地面上构造的真空及加压系统,在真空和/或加压工况下完成实验,也会将废气气体直接排放到环境中,造成了气体的浪费及气体对环境的污染。Similarly, vacuum and pressurized systems constructed on the ground will also discharge waste gas directly into the environment when completing experiments under vacuum and/or pressurized conditions, resulting in waste of gas and pollution of the environment.

发明内容Contents of the invention

有鉴于此,本发明实施例提供一种废气回收实验系统,该系统能够在提供实验的真空/加压工况的情况下,实现对废气气体的回收。In view of this, embodiments of the present invention provide an exhaust gas recovery experimental system, which can realize the recovery of exhaust gas while providing experimental vacuum/pressurization conditions.

本发明实施例提供一种废气回收实验实现方法,该方法能够在提供实验的真空/加压工况的情况下,实现对废气气体的回收。Embodiments of the present invention provide a method for implementing an exhaust gas recovery experiment, which can realize the recovery of exhaust gas while providing experimental vacuum/pressurization conditions.

本发明实施例是这样实现的:The embodiment of the present invention is implemented as follows:

一种废气回收系统,包括:实验腔体、真空单元、气体储存与供应单元、及废气回收单元,其中,An exhaust gas recovery system, including: an experimental chamber, a vacuum unit, a gas storage and supply unit, and an exhaust gas recovery unit, wherein,

气体储存与供应单元通过气体入口连接到实验腔体中,通过气体入口将气体输入到实验腔体中,直到实验腔体的压力达到设定值;The gas storage and supply unit is connected to the experimental chamber through the gas inlet, and the gas is input into the experimental chamber through the gas inlet until the pressure of the experimental chamber reaches the set value;

真空单元的一端接入到实验腔体的气体出口中,另一端接入到废气回收单元中,在加压之前对实验腔体抽真空,在加压实验完成后,将废气气体回收到废气回收单元中;One end of the vacuum unit is connected to the gas outlet of the experimental cavity, and the other end is connected to the exhaust gas recovery unit. The experimental cavity is evacuated before pressurization. After the pressurization experiment is completed, the exhaust gas is recovered to the exhaust gas recovery unit. in unit;

废气回收单元设置有回收气瓶,废气回收单元接入到真空单元的另一端中,接收真空单元输入的废气气体储存到回收气瓶中。The exhaust gas recovery unit is provided with a recovery gas bottle. The exhaust gas recovery unit is connected to the other end of the vacuum unit, and the exhaust gas received from the vacuum unit is stored in the recovery gas bottle.

还包括:气体回收与复用单元,废气回收单元中还包括四通开关,其中,It also includes: gas recovery and reuse unit. The exhaust gas recovery unit also includes a four-way switch, among which,

四通开关分别与真空单元的另一端连接,及气体回收与复用单元的另一端连接;The four-way switch is connected to the other end of the vacuum unit and the other end of the gas recovery and reuse unit;

气体回收与复用单元的一端接到气体储存与供应单元,通过四通开关的开闭,使得通过真空单元回收实验腔体中的回收气体,经过气体回收与复用单元输入到气体储存与供应单元中储存。One end of the gas recovery and reuse unit is connected to the gas storage and supply unit. Through the opening and closing of the four-way switch, the recovered gas in the experimental cavity is recovered through the vacuum unit and input to the gas storage and supply through the gas recovery and reuse unit. stored in the unit.

所述废气回收单元包括:四通开关串联接入第二升压泵、第四电磁阀及回收气瓶,第二升压泵在接收真空单元输入的废气气体储存到回收气瓶中时,第二升压泵打开以使废气气体升压,打开第四电磁阀使得升压的废气气体通入到回收气瓶中。The exhaust gas recovery unit includes: a four-way switch connected in series to a second boost pump, a fourth solenoid valve and a recovery gas cylinder. When the second boost pump receives the exhaust gas input from the vacuum unit and stores it in the recovery gas cylinder, the third boost pump The second booster pump is opened to boost the pressure of the exhaust gas, and the fourth solenoid valve is opened to allow the boosted exhaust gas to flow into the recovery gas bottle.

所述回收气瓶与第四电磁阀之间还设置有第三截止阀,对回收气瓶流入的废气气体进行截止。A third stop valve is also provided between the recycled gas bottle and the fourth solenoid valve to cut off the exhaust gas flowing into the recycled gas bottle.

所述废气回收单元中的四通开关还具有浓度传感器,对废气气体的浓度进行检测,当废气气体的浓度达到设定值时,关闭第二升压泵及第四电磁阀,停止废气气体流入到回收气瓶中。The four-way switch in the exhaust gas recovery unit also has a concentration sensor to detect the concentration of exhaust gas. When the concentration of exhaust gas reaches the set value, the second boost pump and the fourth solenoid valve are closed to stop the inflow of exhaust gas. into recycled gas bottles.

所述废气回收单元还包括回收气瓶的压力传感器,设置在第三截止阀和回收气瓶之间,监测回收气瓶的压力。The exhaust gas recovery unit also includes a pressure sensor of the recovered gas bottle, which is arranged between the third stop valve and the recovered gas bottle to monitor the pressure of the recovered gas bottle.

废气回收单元中的四通开关的开闭真空单元另一端的一路开关还设置有真空单元的温度传感器及第五电磁阀,真空单元的温度传感器监测流入到废气回收单元的废气气体的温度,当温度达到设定值时,关闭第五电磁阀,停止废气回收单元回收废气气体。The four-way switch in the exhaust gas recovery unit opens and closes. The one-way switch at the other end of the vacuum unit is also equipped with a temperature sensor of the vacuum unit and a fifth solenoid valve. The temperature sensor of the vacuum unit monitors the temperature of the exhaust gas flowing into the exhaust gas recovery unit. When the temperature reaches the set value, the fifth solenoid valve is closed and the waste gas recovery unit stops recovering waste gas.

一种废气回收实现方法,该方法包括:A method for realizing exhaust gas recovery, the method includes:

设置实验腔体、真空单元、气体储存与供应单元、及废气回收单元;Set up experimental chamber, vacuum unit, gas storage and supply unit, and exhaust gas recovery unit;

气体储存与供应单元通过气体入口连接到实验腔体中,通过气体入口将气体输入到实验腔体中,直到实验腔体的压力达到设定值;The gas storage and supply unit is connected to the experimental chamber through the gas inlet, and the gas is input into the experimental chamber through the gas inlet until the pressure of the experimental chamber reaches the set value;

真空单元的一端接入到实验腔体的气体出口中,另一端接入到废气回收单元中,在加压之前对实验腔体抽真空,在加压实验完成后,将废气气体回收到废气回收单元中;One end of the vacuum unit is connected to the gas outlet of the experimental cavity, and the other end is connected to the exhaust gas recovery unit. The experimental cavity is evacuated before pressurization. After the pressurization experiment is completed, the exhaust gas is recovered to the exhaust gas recovery unit. in unit;

废气回收单元设置有回收气瓶,废气回收单元接入到真空单元的另一端中,接收真空单元输入的废气气体储存到回收气瓶中。The exhaust gas recovery unit is provided with a recovery gas bottle. The exhaust gas recovery unit is connected to the other end of the vacuum unit, and the exhaust gas received from the vacuum unit is stored in the recovery gas bottle.

所述方法还包括:The method also includes:

设置气体回收与复用单元,气体回收与复用单元的一端接入到真空单元中,另一端接入到气体储存与供应单元中;Set up a gas recovery and reuse unit, one end of the gas recovery and reuse unit is connected to the vacuum unit, and the other end is connected to the gas storage and supply unit;

通过真空单元回收实验腔体中的回收气体,经过气体回收与复用单元输入到气体储存与供应单元中储存。The recovered gas in the experimental cavity is recovered through the vacuum unit, and is input to the gas storage and supply unit for storage through the gas recovery and reuse unit.

该方法还包括:The method also includes:

废气回收单元监测输入的废气气体的气体浓度是否达到设定值,如果是,则停止输入废气气体;The exhaust gas recovery unit monitors whether the gas concentration of the input exhaust gas reaches the set value, and if so, stops inputting the exhaust gas;

所述设定值为气体储存与供应单元中的储气瓶浓度值、或者设定值为0时且实验腔体内的真空值被测量达到设置的初始目标真空值。The set value is the concentration value of the gas storage bottle in the gas storage and supply unit, or when the set value is 0 and the vacuum value in the experimental chamber is measured to reach the set initial target vacuum value.

如上所见,本发明实施例在设置的真空/加压实验系统中,增加废气回收单元,该废气回收单元接入到该实验系统的真空单元的一端,接收实验产生的废气并储存到设置的回收气瓶中,这样,本发明实施例在提供实验的真空/加压工况的情况下,实现对废气气体的回收。As seen above, in the embodiment of the present invention, a waste gas recovery unit is added to the vacuum/pressurization experimental system. The waste gas recovery unit is connected to one end of the vacuum unit of the experimental system, receives the waste gas generated by the experiment, and stores it in the set In this way, the embodiment of the present invention realizes the recovery of exhaust gas while providing experimental vacuum/pressurization conditions.

附图说明Description of the drawings

图1为本发明实施例提供的一种废气回收实验系统结构示意图;Figure 1 is a schematic structural diagram of an exhaust gas recovery experimental system provided by an embodiment of the present invention;

图2为本发明实施例提供的一种废气回收实验实现方法流程图。Figure 2 is a flow chart of a method for implementing an exhaust gas recovery experiment provided by an embodiment of the present invention.

附图标记Reference signs

101-实验腔体101-Experimental cavity

1011-真空计单元1011-Vacuum gauge unit

1012-压力计单元1012-Pressure Gauge Unit

102-真空单元102-Vacuum unit

1021-机械泵1021-Mechanical pump

1022-第三电子阀1022-Third electronic valve

1023-过滤器1023-Filter

1024-分子泵1024-Molecular pump

1025-第四电子阀1025-Fourth electronic valve

1026-机械泵单向阀1026-Mechanical pump check valve

103-气体储存与供应单元103-Gas storage and supply unit

1031-储气瓶1031-Gas storage bottle

1032-第一截止阀1032-First stop valve

1033-减压阀1033-Pressure reducing valve

1034-第二截止阀1034-Second stop valve

1035-第一电磁阀1035-First solenoid valve

1036-充气单向阀1036-Inflatable one-way valve

1037-第一压力传感器1037-First pressure sensor

1038-第二压力传感器1038-Second pressure sensor

1039-安全阀1039-Safety valve

104-气体回收与复用单元104-Gas recovery and reuse unit

1041-升压泵1041-Boost pump

1042-稳压瓶1042-Stabilizer bottle

1043-第二电子阀1043-Second electronic valve

1044-第三压力传感器1044-Third pressure sensor

105-废气回收单元105-Exhaust gas recovery unit

1051-回收气瓶1051-Recycling gas cylinders

1052-四通开关1052-Four-way switch

1053-第二升压泵1053-Second booster pump

1054-第四电磁阀1054-Fourth solenoid valve

1055-第三截止阀1055-Third stop valve

1056-浓度传感器1056-Concentration sensor

1057-回收气瓶的压力传感器1057-Pressure sensor for recycling gas cylinders

1058-真空单元的温度传感器1058-Temperature sensor for vacuum unit

1059-第五电磁阀1059-Fifth solenoid valve

具体实施方式Detailed ways

为使本发明的目的、技术方案及优点更加清楚明白,以下参照附图并举实施例,对本发明进一步详细说明。In order to make the purpose, technical solutions and advantages of the present invention more clear, the present invention will be further described in detail below with reference to the accompanying drawings and examples.

本发明实施例在设置的真空/加压实验系统中,增加废气回收单元,该废气回收单元接入到该实验系统的真空单元的一端,接收实验产生的废气并储存到设置的回收气瓶中,In the embodiment of the present invention, a waste gas recovery unit is added to the set vacuum/pressurization experimental system. The waste gas recovery unit is connected to one end of the vacuum unit of the experimental system, receives the waste gas generated by the experiment and stores it in the set recovery gas bottle. ,

这样,本发明实施例在提供实验的真空/加压工况的情况下,实现对废气气体的回收。In this way, the embodiment of the present invention realizes the recovery of exhaust gas while providing experimental vacuum/pressurization conditions.

本发明实施例设置的废气回收系统可以应用在地面上,也可以应用在卫星平台中。无论是应用在卫星平台上还是应用在地面上,都可以在实现加压或/和真空实验后,对废气进行有效回收。以下以应用在卫星平台的废气回收系统如何具体进行废气回收为例进行详细说明。The exhaust gas recovery system provided in the embodiment of the present invention can be applied on the ground or in a satellite platform. Whether applied on a satellite platform or on the ground, exhaust gas can be effectively recovered after pressurization and/or vacuum experiments. The following is a detailed description of how the exhaust gas recovery system used on a satellite platform specifically performs exhaust gas recovery as an example.

图1为本发明实施例提供的废气回收实验系统结构示意图,该系统设置在卫星平台中,包括:实验腔体101、真空单元102、气体储存与供应单元103、及废气回收单元105,其中,Figure 1 is a schematic structural diagram of an exhaust gas recovery experimental system provided by an embodiment of the present invention. The system is installed in a satellite platform and includes: an experimental chamber 101, a vacuum unit 102, a gas storage and supply unit 103, and an exhaust gas recovery unit 105, where,

气体储存与供应单元103通过气体入口连接到实验腔体101中,通过气体入口将气体输入到实验腔体101中,直到实验腔体101的压力达到设定值;The gas storage and supply unit 103 is connected to the experimental chamber 101 through the gas inlet, and the gas is input into the experimental chamber 101 through the gas inlet until the pressure of the experimental chamber 101 reaches the set value;

真空单元102的一端接入到实验腔体101的气体出口中,另一端接入到废气回收单元105中,在加压之前对实验腔体101抽真空,在加压实验完成后,将废气气体回收到废气回收单元105中;One end of the vacuum unit 102 is connected to the gas outlet of the experimental chamber 101, and the other end is connected to the exhaust gas recovery unit 105. The experimental chamber 101 is evacuated before pressurization. After the pressurization experiment is completed, the exhaust gas is Recycled into the exhaust gas recovery unit 105;

废气回收单元105设置有回收气瓶1051,废气回收单元105接入到真空单元102的另一端中,接收真空单元102输入的废气气体,储存到回收气瓶1051中。The exhaust gas recovery unit 105 is provided with a recovery gas bottle 1051. The exhaust gas recovery unit 105 is connected to the other end of the vacuum unit 102, receives the exhaust gas input from the vacuum unit 102, and stores it in the recovery gas bottle 1051.

在该系统中,还包括气体回收与复用单元104,废气回收单元105中还包括四通开关1052,四通开关1052分别与真空单元102的另一端连接,及气体回收与复用单元104的另一端连接;气体回收与复用单元104的一端接到气体储存与供应单元103,通过四通开关1052的开闭,使得通过真空单元102回收实验腔体101中的回收气体,经过气体回收与复用单元104输入到气体储存与供应单元103中储存。The system also includes a gas recovery and reuse unit 104. The exhaust gas recovery unit 105 also includes a four-way switch 1052. The four-way switch 1052 is respectively connected to the other end of the vacuum unit 102, and the gas recovery and reuse unit 104. The other end is connected; one end of the gas recovery and reuse unit 104 is connected to the gas storage and supply unit 103. By opening and closing the four-way switch 1052, the recovered gas in the experimental chamber 101 is recovered through the vacuum unit 102. After gas recovery and The multiplexing unit 104 is input to the gas storage and supply unit 103 for storage.

在该系统中,废气回收单元105包括:四通开关1052串联接入第二升压泵1053、第四电磁阀1054及回收气瓶1051,第二升压泵1053在接收真空单元102输入的废气气体储存到回收气瓶1051中时,第二升压泵1053打开以使废气气体升压,打开第四电磁阀1054使得升压的废气气体通入到回收气瓶1051中。In this system, the exhaust gas recovery unit 105 includes: a four-way switch 1052 connected in series to a second boost pump 1053, a fourth solenoid valve 1054, and a recovery gas bottle 1051. The second boost pump 1053 receives exhaust gas input from the vacuum unit 102. When the gas is stored in the recovered gas bottle 1051, the second booster pump 1053 is opened to increase the pressure of the exhaust gas, and the fourth solenoid valve 1054 is opened to allow the pressurized exhaust gas to flow into the recovered gas bottle 1051.

在该系统中,回收气瓶1051与第四电磁阀1054之间还设置有第三截止阀1055,对回收气瓶1051流入的废气气体进行截止。In this system, a third stop valve 1055 is provided between the recycled gas bottle 1051 and the fourth solenoid valve 1054 to block the exhaust gas flowing into the recycled gas bottle 1051.

在该系统中,废气回收单元105中的四通开关1052还包括浓度传感器1056,对废气气体的浓度进行检测,当废气气体的浓度达到设定值时,关闭第二升压泵1053及第四电磁阀1054,停止废气气体流入到回收气瓶1051中。In this system, the four-way switch 1052 in the exhaust gas recovery unit 105 also includes a concentration sensor 1056 to detect the concentration of the exhaust gas. When the concentration of the exhaust gas reaches the set value, the second booster pump 1053 and the fourth booster pump 1053 are turned off. The solenoid valve 1054 stops the exhaust gas from flowing into the recovery gas cylinder 1051.

在这里,可以将设定值设置为气体储存与供应单元103中的储气瓶1031的浓度值,当到达该设定值时,证明实验腔体101被清洗干净或实验产生的多余气体被排空干净,则关闭第二升压泵1053及第四电磁阀1054,使得剩余的气体通过气体回收与复用单元104压缩回气体储存与供应单元103中的储气瓶1031中。Here, the set value can be set as the concentration value of the gas storage bottle 1031 in the gas storage and supply unit 103. When the set value is reached, it proves that the experimental chamber 101 has been cleaned or the excess gas generated by the experiment has been exhausted. If the gas is completely empty, the second boost pump 1053 and the fourth solenoid valve 1054 are closed, so that the remaining gas is compressed back into the gas storage bottle 1031 in the gas storage and supply unit 103 through the gas recovery and reuse unit 104 .

在这里,还可以将设定值设置为0,当达到设定值0时且实验腔体101内的真空值被测量达到设置的初始目标真空值时,证明实验腔体101内部气体均压缩到回收气瓶1051中。Here, the set value can also be set to 0. When the set value 0 is reached and the vacuum value in the experimental chamber 101 is measured to reach the set initial target vacuum value, it is proved that the gas inside the experimental chamber 101 is compressed to Recycling gas bottles 1051.

在该系统中,废气回收单元105还包括回收气瓶的压力传感器1057,设置在第三截止阀1055和回收气瓶1051之间,监测回收气瓶1051的压力。In this system, the exhaust gas recovery unit 105 also includes a pressure sensor 1057 of the recovered gas bottle, which is arranged between the third stop valve 1055 and the recovered gas bottle 1051 to monitor the pressure of the recovered gas bottle 1051 .

在该系统中,废气回收单元105中的四通开关1052的开闭真空单元102另一端的一路开关还设置有真空单元的温度传感器1058及第五电磁阀1059,真空单元的温度传感器1058监测流入到废气回收单元105的废气气体的温度,当温度达到设定值时,关闭第五电磁阀1059,停止废气回收单元105回收废气气体。In this system, the four-way switch 1052 in the exhaust gas recovery unit 105 and the switch at the other end of the opening and closing vacuum unit 102 are also provided with a temperature sensor 1058 of the vacuum unit and a fifth solenoid valve 1059. The temperature sensor 1058 of the vacuum unit monitors the inflow. to the temperature of the exhaust gas in the exhaust gas recovery unit 105. When the temperature reaches the set value, the fifth solenoid valve 1059 is closed to stop the exhaust gas recovery unit 105 from recovering the exhaust gas.

本发明实施例在卫星平台或地面上进行实验时,为了避免实验之间的交叉污染,需要在一次实验完成后对实验腔体101进行冲洗,且冲洗的废气进行统一回收处理,本发明实施例提供的废气回收单元105的作用就在此。In the embodiment of the present invention, when conducting experiments on a satellite platform or on the ground, in order to avoid cross-contamination between experiments, the experimental cavity 101 needs to be flushed after an experiment is completed, and the flushed exhaust gas is uniformly recycled. This is where the exhaust gas recovery unit 105 is provided.

本发明实施例提供的系统可提供全种类的真空/加压环境的实验腔体,且兼容实验过程中产生的有毒、有污染的废气气体回收处理,及独立完成对实验腔体的清洁及处理工作,同时实验的废气气体回收对后期分析实验中产生的气体成分等科学实验工作也提供了便利及依据。The system provided by the embodiment of the present invention can provide all types of experimental chambers in vacuum/pressurized environments, and is compatible with the recovery and processing of toxic and polluted exhaust gases generated during the experiment, and can independently complete the cleaning and processing of the experimental chambers. At the same time, the exhaust gas recovery of the experiment also provides convenience and basis for scientific experimental work such as later analysis of gas components generated in the experiment.

在本发明实施例中,本系统采用废气气体回收模式时主要适用于以下实验:In the embodiment of the present invention, when the system adopts the exhaust gas recovery mode, it is mainly suitable for the following experiments:

1)在实验过程中产生多余或有污染的气体实验;1) Generating excess or contaminated gas during the experiment;

2)在实验过程中对实验腔体产生污染,实验完成后需要对实验容器进行清洗的实验;2) The experimental cavity is contaminated during the experiment, and the experimental container needs to be cleaned after the experiment is completed;

3)在实验过程中产生的气体需要收集,后期需进行科学分析研究的实验。3) The gas generated during the experiment needs to be collected, and scientific analysis and research experiments need to be carried out later.

本发明实施例提供的系统极大地扩展了卫星平台或地面上的可用实验范围,同时降低了对外界环境的依赖。卫星平台或地面上的常规实验在完成压力实验后,采用气体回收与复用单元直接将回收气体回收到气体储存与供应单元中,完成回收气体的回收再利用。对于特殊实验,真空或加压实验完成后,需要采用废气回收单元,对于不同的实验废气气体进行回收。The system provided by the embodiments of the present invention greatly expands the range of experiments available on the satellite platform or on the ground, while reducing dependence on the external environment. After completing the pressure experiment in conventional experiments on satellite platforms or on the ground, the gas recovery and reuse unit is used to directly recover the recovered gas into the gas storage and supply unit to complete the recovery and reuse of the recovered gas. For special experiments, after the vacuum or pressure experiment is completed, an exhaust gas recovery unit needs to be used to recover different experimental exhaust gases.

在该系统中,气体储存与供应单元103由充气单向阀1036、储气瓶1031、第一截止阀1032、减压阀1033、第二截止阀1034、及第一电磁阀1035串联组成,其中,In this system, the gas storage and supply unit 103 is composed of a charging check valve 1036, a gas storage bottle 1031, a first stop valve 1032, a pressure reducing valve 1033, a second stop valve 1034, and a first solenoid valve 1035 in series, where ,

在为实验腔体101加压时,关闭充气单向阀1036,依次打开第一截止阀1032、减压阀1033、第二截止阀1034、及第一电磁阀1035,使得储气瓶1031中的气体通过气体入口输入到实验腔体101中,直到实验腔体101的压力达到设定值,依次关闭第一截止阀1032、减压阀1033、第二截止阀1034、及第一电磁阀1035;When pressurizing the experimental chamber 101, close the inflation check valve 1036, and open the first stop valve 1032, the pressure reducing valve 1033, the second stop valve 1034, and the first solenoid valve 1035 in sequence, so that the gas in the gas cylinder 1031 The gas is input into the experimental chamber 101 through the gas inlet. Until the pressure of the experimental chamber 101 reaches the set value, the first stop valve 1032, the pressure reducing valve 1033, the second stop valve 1034, and the first solenoid valve 1035 are closed in sequence;

在排出实验腔体101的气体时,开启充气单向阀1036,依次关闭第一截止阀1032、减压阀1033、第二截止阀1034、及第一电磁阀1035,将气体回收与复用单元104从实验腔体101回收的气体通过充气单向阀1036输入到储气瓶1031中。When the gas in the experimental chamber 101 is discharged, the inflation check valve 1036 is opened, the first stop valve 1032, the pressure reducing valve 1033, the second stop valve 1034, and the first solenoid valve 1035 are closed in sequence, and the gas recovery and reuse unit 104 The gas recovered from the experimental chamber 101 is input into the gas storage bottle 1031 through the charging one-way valve 1036.

在储气瓶1031中的气体可以是实验腔体101进行压力测试的各种类型气体,比如氩气。The gas in the gas storage bottle 1031 can be various types of gas for pressure testing in the experimental chamber 101, such as argon.

在储气瓶1031与第一截止阀1032之间中置有第一压力传感器1037,检测储气瓶1031的压力,压力大时,则开启减压阀1033;在第一截止阀1032与第二截止阀1033之间中置有第二压力传感器1038,检测气体储存与供应单元103中的气道中传输的气体压力,在第二压力传感器1038位置处,还可以置有温度传感器,用于对气体储存与供应单元103中的气道中的气体温度进行检测。A first pressure sensor 1037 is placed between the gas storage bottle 1031 and the first stop valve 1032 to detect the pressure of the gas storage bottle 1031. When the pressure is high, the pressure reducing valve 1033 is opened; between the first stop valve 1032 and the second A second pressure sensor 1038 is placed between the stop valves 1033 to detect the gas pressure transmitted in the air channel in the gas storage and supply unit 103. A temperature sensor can also be placed at the position of the second pressure sensor 1038 for monitoring the gas. The gas temperature in the air passage in the storage and supply unit 103 is detected.

在第一电磁阀1035与气体入口之间置有安全阀1039,用于当气体储存与供应单元103中的气道中传输的气体不安全时,关闭。在安全阀1039处还置有电磁阀,用于控制安全阀1039的开闭。A safety valve 1039 is disposed between the first solenoid valve 1035 and the gas inlet for closing when the gas transmitted in the air channel in the gas storage and supply unit 103 is unsafe. A solenoid valve is also provided at the safety valve 1039 for controlling the opening and closing of the safety valve 1039.

在该系统中,气体回收与复用单元104由升压泵1041、稳压瓶1042、第二电子阀1043串联组成,其中,In this system, the gas recovery and reuse unit 104 is composed of a boost pump 1041, a pressure stabilizing bottle 1042, and a second electronic valve 1043 connected in series, wherein,

在排出实验腔体101的气体时,打开第二电子阀1043,启动升压泵1041,实验腔体101回收的气体通过气体出口,依次经过稳压瓶1042和升压泵1041后,传输到气体储存与供应单元103中;When the gas in the experimental chamber 101 is discharged, the second electronic valve 1043 is opened and the boost pump 1041 is started. The gas recovered from the experimental chamber 101 passes through the gas outlet, passes through the pressure stabilizing bottle 1042 and the boost pump 1041 in sequence, and then is transmitted to the gas In the storage and supply unit 103;

在为实验腔体101加压或废气回收单元105回收废气气体时,关闭第二电子阀1043。When the experimental chamber 101 is pressurized or the exhaust gas is recovered by the exhaust gas recovery unit 105, the second electronic valve 1043 is closed.

在气体回收与复用单元104中,还包括第三压力传感器1044,位于升压泵1041与稳压瓶1042之间,监测升压泵1041与稳压瓶1042之间的压力。The gas recovery and reuse unit 104 also includes a third pressure sensor 1044 located between the boost pump 1041 and the pressure stabilizing bottle 1042 to monitor the pressure between the boost pump 1041 and the pressure stabilizing bottle 1042 .

在气体回收与复用单元104中的升压泵1041与充气单向阀1036之间还包括压力传感器和温度传感器,用于对升压泵1041的压力及温度进行检测。A pressure sensor and a temperature sensor are also included between the boost pump 1041 and the charging check valve 1036 in the gas recovery and reuse unit 104 for detecting the pressure and temperature of the boost pump 1041.

在该系统中,真空单元102包括:In this system, vacuum unit 102 includes:

机械泵1021、第三电子阀1022、过滤器1023及分子泵1024进行串联后,接入气体出口;The mechanical pump 1021, the third electronic valve 1022, the filter 1023 and the molecular pump 1024 are connected in series and then connected to the gas outlet;

在对实验腔体101形成一级真空时,打开第三电子阀1022,启动机械泵1021,实验腔体101中的空气分子在机械泵1021的作用下,通过气体出口及分子泵1024后,经过过滤器1023的过滤后,通过第三电子阀1022被抽取到机械泵1021中,直到实验腔体101达到分子泵1024的启动压力后,启动分子泵1024,继续抽取实验腔体101中的空气分子,为实验腔体101实现高真空环境。When a first-level vacuum is formed in the experimental chamber 101, the third electronic valve 1022 is opened and the mechanical pump 1021 is started. Under the action of the mechanical pump 1021, the air molecules in the experimental chamber 101 pass through the gas outlet and the molecular pump 1024. After filtration by the filter 1023, it is extracted into the mechanical pump 1021 through the third electronic valve 1022. After the experimental chamber 101 reaches the starting pressure of the molecular pump 1024, the molecular pump 1024 is started to continue to extract air molecules in the experimental chamber 101. , to achieve a high vacuum environment for the experimental cavity 101.

在该真空单元102中,所述一级真空环境实际上就是低真空环境。In the vacuum unit 102, the first-level vacuum environment is actually a low vacuum environment.

在该真空单元102中,还包括第四电子阀1025,第四电子阀1025的一端接入到第三电子阀1022与过滤器1023之间,另一端接入到机械泵1021置有的机械泵单向阀1026上,当在对实验腔体101抽真空的过程中,第四电子阀1025关闭。The vacuum unit 102 also includes a fourth electronic valve 1025. One end of the fourth electronic valve 1025 is connected between the third electronic valve 1022 and the filter 1023, and the other end is connected to the mechanical pump provided in the mechanical pump 1021. On the one-way valve 1026, when the experimental chamber 101 is evacuated, the fourth electronic valve 1025 is closed.

在为实验腔体101加压时,第四电子阀1025、第三电子阀1022、机械泵1021及分子泵1024关闭。When the experimental chamber 101 is pressurized, the fourth electronic valve 1025, the third electronic valve 1022, the mechanical pump 1021 and the molecular pump 1024 are closed.

在为实验腔体101排出加压的气体时,打开第四电子阀1025,直到实验腔体的压力达到升压泵1041设置的压力后,则打开第三电子阀1022,启动机械泵1021,关闭第四电子阀1025,直到实验腔体的压力达到分子泵1024的启动压力后,开启分子泵1024持续排气到气体回收与复用单元104或废气回收单元105中。When the pressurized gas is discharged from the experimental chamber 101, the fourth electronic valve 1025 is opened until the pressure in the experimental chamber reaches the pressure set by the boost pump 1041, then the third electronic valve 1022 is opened, the mechanical pump 1021 is started, and then closed The fourth electronic valve 1025, until the pressure of the experimental chamber reaches the starting pressure of the molecular pump 1024, opens the molecular pump 1024 and continues to exhaust gas into the gas recovery and reuse unit 104 or the exhaust gas recovery unit 105.

在该系统中,分子泵1024实际上就是控制实验腔体101中的空气分子定向流动,使得空气分子持续的排出实验腔体101。In this system, the molecular pump 1024 actually controls the directional flow of air molecules in the experimental chamber 101, so that the air molecules continue to be discharged from the experimental chamber 101.

在该系统中,实验腔体101还接入真空计单元1011,对实验腔体101的真空环境进行监测得到真空值,并显示。In this system, the experimental chamber 101 is also connected to the vacuum gauge unit 1011, which monitors the vacuum environment of the experimental chamber 101 to obtain the vacuum value and displays it.

在该系统中,实验腔体101还接入压力计单元1012,对实验腔体101进行压力监测得到压力值,并显示。In this system, the experimental chamber 101 is also connected to the pressure gauge unit 1012, and the pressure of the experimental chamber 101 is monitored to obtain the pressure value and displayed.

在该系统中,过滤器1023的作用是对从实验腔体101中抽取的空气分子的杂质进行过滤,避免对机械泵1021的损伤。In this system, the function of the filter 1023 is to filter impurities in air molecules extracted from the experimental chamber 101 to avoid damage to the mechanical pump 1021.

图2为本发明实施例提供的加压实验实现方法流程图,其具体步骤为:Figure 2 is a flow chart of a method for implementing a pressurization experiment provided by an embodiment of the present invention. The specific steps are:

步骤201、设置实验腔体、真空单元、气体储存与供应单元、及废气回收单元;Step 201: Set up the experimental chamber, vacuum unit, gas storage and supply unit, and exhaust gas recovery unit;

步骤202、气体储存与供应单元通过气体入口连接到实验腔体中,通过气体入口将气体输入到实验腔体中,直到实验腔体的压力达到设定值;Step 202: The gas storage and supply unit is connected to the experimental chamber through the gas inlet, and the gas is input into the experimental chamber through the gas inlet until the pressure of the experimental chamber reaches the set value;

步骤203、真空单元的一端接入到实验腔体的气体出口中,另一端接入到废气回收单元中,在加压之前对实验腔体抽真空,在加压实验完成后,将废气气体回收到废气回收单元中;Step 203. One end of the vacuum unit is connected to the gas outlet of the experimental cavity, and the other end is connected to the exhaust gas recovery unit. The experimental cavity is evacuated before pressurization. After the pressurization experiment is completed, the exhaust gas is recovered. to the exhaust gas recovery unit;

步骤204、废气回收单元设置有回收气瓶,废气回收单元接入到真空单元的另一端中,接收真空单元输入的废气气体储存到回收气瓶中。Step 204: The exhaust gas recovery unit is provided with a recovery gas bottle. The exhaust gas recovery unit is connected to the other end of the vacuum unit, and the exhaust gas received from the vacuum unit is stored in the recovery gas bottle.

在该方法中,还包括:设置气体回收与复用单元,气体回收与复用单元的一端接入到真空单元中,另一端接入到气体储存与供应单元中;In this method, it also includes: setting up a gas recovery and reuse unit, one end of the gas recovery and reuse unit is connected to the vacuum unit, and the other end is connected to the gas storage and supply unit;

通过真空单元回收实验腔体中的回收气体,经过气体回收与复用单元输入到气体储存与供应单元中储存。The recovered gas in the experimental cavity is recovered through the vacuum unit, and is input to the gas storage and supply unit for storage through the gas recovery and reuse unit.

在该方法中,还包括:This method also includes:

废气回收单元监测输入的废气气体的气体浓度是否达到设定值,如果是,则停止输入废气气体。The exhaust gas recovery unit monitors whether the gas concentration of the input exhaust gas reaches the set value, and if so, stops inputting the exhaust gas.

所述设定值为气体储存与供应单元中的储气瓶浓度值、或者设定值为0时且实验腔体内的真空值被测量达到设置的初始目标真空值。The set value is the concentration value of the gas storage bottle in the gas storage and supply unit, or when the set value is 0 and the vacuum value in the experimental chamber is measured to reach the set initial target vacuum value.

在该方法中,真空单元还设置有过滤器,对通过实验腔体与机械泵之间的气道排出的空气分子进行过滤。In this method, the vacuum unit is also equipped with a filter to filter air molecules discharged through the airway between the experimental chamber and the mechanical pump.

在该方法中,还对实验腔体进行实时压力监测和真空监测。In this method, real-time pressure monitoring and vacuum monitoring of the experimental chamber are also performed.

以上所述仅为本发明的较佳实施例而已,并不用以限制本发明,凡在本发明的精神和原则之内,所做的任何修改、等同替换、改进等,均应包含在本发明保护的范围之内。The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention shall be included in the present invention. within the scope of protection.

Claims (8)

1.一种废气回收装置,其特征在于,用于在卫星平台上完成实验,包括:实验腔体(101)、真空单元(102)、气体储存与供应单元(103)、及废气回收单元(105),其中,1. An exhaust gas recovery device, characterized in that it is used to complete experiments on a satellite platform, including: an experimental chamber (101), a vacuum unit (102), a gas storage and supply unit (103), and an exhaust gas recovery unit ( 105), among which, 气体储存与供应单元(103)通过气体入口连接到实验腔体(101)中,通过气体入口将气体输入到实验腔体中,直到实验腔体的压力达到设定值;The gas storage and supply unit (103) is connected to the experimental chamber (101) through the gas inlet, and the gas is input into the experimental chamber through the gas inlet until the pressure of the experimental chamber reaches the set value; 真空单元(102)的一端接入到实验腔体(101)的气体出口中,另一端接入到废气回收单元(105)中,在加压之前对实验腔体(101)抽真空,在加压实验完成后,将废气气体回收到废气回收单元(105)中;One end of the vacuum unit (102) is connected to the gas outlet of the experimental cavity (101), and the other end is connected to the exhaust gas recovery unit (105). The experimental cavity (101) is evacuated before pressurization. After the pressure test is completed, the exhaust gas is recovered into the exhaust gas recovery unit (105); 废气回收单元(105)设置有回收气瓶(1051),废气回收单元(105)接入到真空单元(102)的另一端中,接收真空单元(102)输入的废气气体储存到回收气瓶(1051)中;The exhaust gas recovery unit (105) is provided with a recovery gas bottle (1051). The exhaust gas recovery unit (105) is connected to the other end of the vacuum unit (102), and receives the exhaust gas input from the vacuum unit (102) and stores it in the recovery gas bottle (1051). 1051); 还包括:气体回收与复用单元(104),废气回收单元(105)中还包括四通开关(1052),其中,It also includes: a gas recovery and reuse unit (104). The exhaust gas recovery unit (105) also includes a four-way switch (1052), wherein, 四通开关(1052)分别与真空单元(102)的另一端连接,及气体回收与复用单元(104)的另一端连接;The four-way switch (1052) is connected to the other end of the vacuum unit (102) and the other end of the gas recovery and reuse unit (104) respectively; 气体回收与复用单元(104)的一端接到气体储存与供应单元(103),通过四通开关(1052)的开闭,使得通过真空单元(102)回收实验腔体(101)中的回收气体,经过气体回收与复用单元(104)输入到气体储存与供应单元(103)中储存;One end of the gas recovery and reuse unit (104) is connected to the gas storage and supply unit (103), and through the opening and closing of the four-way switch (1052), the gas recovered in the experimental cavity (101) is recovered through the vacuum unit (102). The gas is input to the gas storage and supply unit (103) for storage through the gas recovery and reuse unit (104); 所述真空单元(102)包括:The vacuum unit (102) includes: 机械泵(1021)、第三电子阀(1022)、过滤器(1023)及分子泵(1024)进行串联后,接入气体出口;The mechanical pump (1021), the third electronic valve (1022), the filter (1023) and the molecular pump (1024) are connected in series and then connected to the gas outlet; 在对实验腔体(101)形成一级真空时,所述一级真空为低真空环境,打开第三电子阀(1022),启动机械泵(1021),实验腔体(101)中的空气分子在机械泵(1021)的作用下,通过气体出口及分子泵(1024)后,经过过滤器(1023)的过滤后,通过第三电子阀(1022)被抽取到机械泵(1021)中,直到实验腔体(101)达到分子泵(1024)的启动压力后,启动分子泵(1024),继续抽取实验腔体(101)中的空气分子,为实验腔体(101)实现高真空环境;When forming a first-level vacuum in the experimental cavity (101), which is a low vacuum environment, the third electronic valve (1022) is opened, the mechanical pump (1021) is started, and the air molecules in the experimental cavity (101) Under the action of the mechanical pump (1021), after passing through the gas outlet and the molecular pump (1024), after being filtered by the filter (1023), it is pumped into the mechanical pump (1021) through the third electronic valve (1022) until After the experimental chamber (101) reaches the starting pressure of the molecular pump (1024), start the molecular pump (1024) and continue to extract air molecules in the experimental chamber (101) to achieve a high vacuum environment for the experimental chamber (101); 在所述真空单元(102)中,还包括第四电子阀(1025),第四电子阀(1025)的一端接入到第三电子阀(1022)与过滤器(1023)之间,另一端接入到机械泵(1021)置有的机械泵单向阀(1026)上,当在对实验腔体(101)抽真空的过程中,第四电子阀(1025)关闭。The vacuum unit (102) also includes a fourth electronic valve (1025). One end of the fourth electronic valve (1025) is connected between the third electronic valve (1022) and the filter (1023), and the other end of the fourth electronic valve (1025) It is connected to the mechanical pump check valve (1026) provided in the mechanical pump (1021). When the experimental chamber (101) is evacuated, the fourth electronic valve (1025) is closed. 2.如权利要求1所述的装置,其特征在于,所述废气回收单元(105)包括:四通开关(1052)串联接入第二升压泵(1053)、第四电磁阀(1054)及回收气瓶(1051),第二升压泵(1053)在接收真空单元(102)输入的废气气体储存到回收气瓶(1051)中时,第二升压泵(1053)打开以使废气气体升压,打开第四电磁阀(1054)使得升压的废气气体通入到回收气瓶(1051)中。2. The device according to claim 1, characterized in that the exhaust gas recovery unit (105) includes: a four-way switch (1052) connected in series to a second boost pump (1053) and a fourth solenoid valve (1054). and the recovery gas bottle (1051). When the second booster pump (1053) receives the exhaust gas input from the vacuum unit (102) and stores it in the recovery gas bottle (1051), the second booster pump (1053) opens to allow the exhaust gas to The gas is pressurized, and the fourth solenoid valve (1054) is opened to allow the pressurized exhaust gas to flow into the recovery gas bottle (1051). 3.如权利要求2所述的装置,其特征在于,所述回收气瓶(1051)与第四电磁阀(1054)之间还设置有第三截止阀(1055),对回收气瓶(1051)流入的废气气体进行截止。3. The device according to claim 2, characterized in that a third stop valve (1055) is also provided between the recycled gas bottle (1051) and the fourth solenoid valve (1054). ) to cut off the inflow of exhaust gas. 4.如权利要求2所述的装置,其特征在于,所述废气回收单元(105)中的四通开关(1052)还具有浓度传感器(1056),对废气气体的浓度进行检测,当废气气体的浓度达到设定值时,关闭第二升压泵(1053)及第四电磁阀(1054),停止废气气体流入到回收气瓶(1051)中。4. The device according to claim 2, characterized in that the four-way switch (1052) in the exhaust gas recovery unit (105) also has a concentration sensor (1056) to detect the concentration of the exhaust gas. When the concentration reaches the set value, the second booster pump (1053) and the fourth solenoid valve (1054) are closed to stop the flow of exhaust gas into the recovery gas bottle (1051). 5.如权利要求2所述的装置,其特征在于,所述废气回收单元(105)还包括回收气瓶的压力传感器(1057),设置在第三截止阀(1055)和回收气瓶(1051)之间,监测回收气瓶(1051)的压力。5. The device according to claim 2, wherein the exhaust gas recovery unit (105) further includes a pressure sensor (1057) of the recovered gas bottle, which is disposed between the third stop valve (1055) and the recovered gas bottle (1051). ), monitor the pressure of the recovery gas cylinder (1051). 6.如权利要求2所述的装置,其特征在于,所述废气回收单元(105)中的四通开关(1052)的开闭真空单元(102)另一端的一路开关还设置有真空单元(102)的温度传感器(1058)及第五电磁阀(1059),真空单元(102)的温度传感器(1058)监测流入到废气回收单元(105)的废气气体的温度,当温度达到设定值时,关闭第五电磁阀(1059),停止废气回收单元(105)回收废气气体。6. The device according to claim 2, characterized in that the one-way switch at the other end of the opening and closing vacuum unit (102) of the four-way switch (1052) in the exhaust gas recovery unit (105) is also provided with a vacuum unit ( The temperature sensor (1058) and the fifth solenoid valve (1059) of 102), the temperature sensor (1058) of the vacuum unit (102) monitors the temperature of the exhaust gas flowing into the exhaust gas recovery unit (105), when the temperature reaches the set value , close the fifth solenoid valve (1059), and stop the waste gas recovery unit (105) from recovering waste gas. 7.一种废气回收实现方法,其特征在于,用于在卫星平台上完成实验,该方法包括:7. A method for realizing waste gas recovery, characterized in that it is used to complete experiments on a satellite platform. The method includes: 设置实验腔体、真空单元、气体储存与供应单元、及废气回收单元;Set up experimental chamber, vacuum unit, gas storage and supply unit, and exhaust gas recovery unit; 气体储存与供应单元通过气体入口连接到实验腔体中,通过气体入口将气体输入到实验腔体中,直到实验腔体的压力达到设定值;The gas storage and supply unit is connected to the experimental chamber through the gas inlet, and the gas is input into the experimental chamber through the gas inlet until the pressure of the experimental chamber reaches the set value; 真空单元的一端接入到实验腔体的气体出口中,另一端接入到废气回收单元中,在加压之前对实验腔体抽真空,在加压实验完成后,将废气气体回收到废气回收单元中;One end of the vacuum unit is connected to the gas outlet of the experimental cavity, and the other end is connected to the exhaust gas recovery unit. The experimental cavity is evacuated before pressurization. After the pressurization experiment is completed, the exhaust gas is recovered to the exhaust gas recovery unit. in unit; 废气回收单元设置有回收气瓶,废气回收单元接入到真空单元的另一端中,接收真空单元输入的废气气体储存到回收气瓶中;The waste gas recovery unit is provided with a recovery gas bottle, which is connected to the other end of the vacuum unit, and receives the waste gas input from the vacuum unit and stores it in the recovery gas bottle; 所述方法还包括:The method also includes: 设置气体回收与复用单元,气体回收与复用单元的一端接入到真空单元中,另一端接入到气体储存与供应单元中;Set up a gas recovery and reuse unit, one end of the gas recovery and reuse unit is connected to the vacuum unit, and the other end is connected to the gas storage and supply unit; 通过真空单元回收实验腔体中的回收气体,经过气体回收与复用单元输入到气体储存与供应单元中储存;The recovered gas in the experimental cavity is recovered through the vacuum unit, and is input to the gas storage and supply unit for storage through the gas recovery and reuse unit; 所述方法的真空单元包括:The vacuum unit of the method includes: 机械泵(1021)、第三电子阀(1022)、过滤器(1023)及分子泵(1024)进行串联后,接入气体出口;The mechanical pump (1021), the third electronic valve (1022), the filter (1023) and the molecular pump (1024) are connected in series and then connected to the gas outlet; 在对实验腔体(101)形成一级真空时,所述一级真空为低真空环境,打开第三电子阀(1022),启动机械泵(1021),实验腔体(101)中的空气分子在机械泵(1021)的作用下,通过气体出口及分子泵(1024)后,经过过滤器(1023)的过滤后,通过第三电子阀(1022)被抽取到机械泵(1021)中,直到实验腔体(101)达到分子泵(1024)的启动压力后,启动分子泵(1024),继续抽取实验腔体(101)中的空气分子,为实验腔体(101)实现高真空环境;When forming a first-level vacuum in the experimental cavity (101), which is a low vacuum environment, the third electronic valve (1022) is opened, the mechanical pump (1021) is started, and the air molecules in the experimental cavity (101) Under the action of the mechanical pump (1021), after passing through the gas outlet and the molecular pump (1024), after being filtered by the filter (1023), it is pumped into the mechanical pump (1021) through the third electronic valve (1022) until After the experimental chamber (101) reaches the starting pressure of the molecular pump (1024), start the molecular pump (1024) and continue to extract air molecules in the experimental chamber (101) to achieve a high vacuum environment for the experimental chamber (101); 在所述真空单元(102)中,还包括第四电子阀(1025),第四电子阀(1025)的一端接入到第三电子阀(1022)与过滤器(1023)之间,另一端接入到机械泵(1021)置有的机械泵单向阀(1026)上,当在对实验腔体(101)抽真空的过程中,第四电子阀(1025)关闭。The vacuum unit (102) also includes a fourth electronic valve (1025). One end of the fourth electronic valve (1025) is connected between the third electronic valve (1022) and the filter (1023), and the other end of the fourth electronic valve (1025) It is connected to the mechanical pump check valve (1026) provided in the mechanical pump (1021). When the experimental chamber (101) is evacuated, the fourth electronic valve (1025) is closed. 8.如权利要求7所述的方法,其特征在于,该方法还包括:8. The method of claim 7, further comprising: 废气回收单元监测输入的废气气体的气体浓度是否达到设定值,如果是,则停止输入废气气体;The exhaust gas recovery unit monitors whether the gas concentration of the input exhaust gas reaches the set value, and if so, stops inputting the exhaust gas; 所述设定值为气体储存与供应单元中的储气瓶浓度值、或者设定值为0时且实验腔体内的真空值被测量达到设置的初始目标真空值。The set value is the concentration value of the gas storage bottle in the gas storage and supply unit, or when the set value is 0 and the vacuum value in the experimental chamber is measured to reach the set initial target vacuum value.
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