JP2012196948A - Head cap member and inkjet recording apparatus - Google Patents

Head cap member and inkjet recording apparatus Download PDF

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JP2012196948A
JP2012196948A JP2011083498A JP2011083498A JP2012196948A JP 2012196948 A JP2012196948 A JP 2012196948A JP 2011083498 A JP2011083498 A JP 2011083498A JP 2011083498 A JP2011083498 A JP 2011083498A JP 2012196948 A JP2012196948 A JP 2012196948A
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cap
elastic convex
cap body
reinforcing wall
base member
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Kokichi Arikawa
光吉 有川
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Ricoh Co Ltd
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Ricoh Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To prevent fall in negative pressure suction force and cost increase by preventing the deformation of a cap body during negative pressure suction to prevent a fall in airtightness even when the cap body is formed of an elastic material.SOLUTION: This head cap member includes a base member 2 having, in a tip surface, a cavity S communicating with a negative pressure lead-in hole 5; an annular reinforcing wall part 10 protrusively provided on the tip surface of the base member; the cap body 20 partially attached to the tip surface of the base member and comprising an annular elastic protruding member 25 whose tip part is projected forward from the tip part of the reinforcing wall part and whose inner peripheral surface is brought into close contact with the outer peripheral surface of the reinforcing wall part; and a pressing member 30. The cross-sectional shape along the thickness direction of the tip part of the elastic protruding member is nearlly angle shape having a top part 25a and inclined surfaces 25b, 25c, and the top part is in a position displaced outward from the wall thickness center of the elastic protruding member.

Description

本発明は、インクジェット記録装置の記録ヘッドに装着されてノズルの乾燥、詰まり等を防止するために使用されるヘッドキャップ部材の改良に関する。   The present invention relates to an improvement in a head cap member that is mounted on a recording head of an ink jet recording apparatus and used to prevent nozzles from being dried or clogged.

インクジェット記録装置は、記録ヘッドの乾燥防止、あるいはノズルの目詰り防止のために、待機中や停止中に記録ヘッドに被せるキャップ部材を備えている。
図5(a)(b)及び(c)は従来のインクジェット記録装置に用いられるヘッドキャップ部材の構成を示す外観斜視図、断面図、及び平面図である。
ヘッドキャップ部材100は、記録ヘッド110の先端面(ノズル形成面)110aに当接させるゴム等の弾性材料からなるキャップ本体101と、キャップ本体101の底面に接続された負圧吸引用のパイプ102及び大気解放用のパイプ103と、キャップ本体101及び各パイプ102、103の外面に接してこれらを保持するキャップホルダ104と、を有する。キャップ本体101は先端面が開放した箱形状を有しており、この開放部を塞ぐように記録ヘッド110の先端面110aを当接させた時に、記録ヘッド先端面に配置されたノズルが各パイプ102、103と連通するように構成されている。
負圧吸引用のパイプ102はポンプ(負圧生成手段)と接続され、大気解放用のパイプ103は外気と接続されている。
The ink jet recording apparatus includes a cap member that covers the recording head during standby or during stoppage in order to prevent the recording head from drying or nozzle clogging.
5A, 5B, and 5C are an external perspective view, a cross-sectional view, and a plan view showing a configuration of a head cap member used in a conventional ink jet recording apparatus.
The head cap member 100 includes a cap main body 101 made of an elastic material such as rubber that is brought into contact with the front end surface (nozzle forming surface) 110 a of the recording head 110, and a negative pressure suction pipe 102 connected to the bottom surface of the cap main body 101. And a pipe 103 for releasing the atmosphere, and a cap body 104 and a cap holder 104 that contacts and holds the outer surfaces of the pipes 102 and 103. The cap body 101 has a box shape with an open front end surface. When the front end surface 110a of the recording head 110 is brought into contact so as to close the open portion, the nozzles arranged on the front end surface of the recording head serve as pipes. 102 and 103 so as to communicate with each other.
The negative pressure suction pipe 102 is connected to a pump (negative pressure generating means), and the air release pipe 103 is connected to outside air.

図5(b)のように、記録ヘッド110の待機中や停止中に記録ヘッド先端面110aにキャップ本体101の先端縁を圧接して空所Sを密閉してノズルを外気から遮断することにより記録ヘッドを保護すると共に、図示しないポンプによってパイプ102を介してキャップ本体101内部のインクを吸引することによってクリーニングを行い、記録ヘッドのノズル111の乾燥に伴うインクの固化による目詰りを防止する。
即ち、記録ヘッド110のクリーニング時には、記録ヘッドのノズル形成面をキャップ本体101の先端縁に密着させることにより空所Sを気密化し、この気密化された空所S内に負圧吸引用のパイプ102から負圧を導入してノズル内のインクを排出させる。その後、パイプ103を介して空所Sを大気と連通させることにより空所S内を大気圧に戻してからキャップ本体101を取り外し、記録ヘッドのノズル形成面をワイパーで拭き取ってメニスカスを形成する。
As shown in FIG. 5B, when the recording head 110 is in a standby state or stopped, the front end edge of the cap body 101 is pressed against the recording head front end surface 110a to seal the space S, thereby blocking the nozzle from the outside air. In addition to protecting the recording head, cleaning is performed by sucking ink inside the cap body 101 through the pipe 102 by a pump (not shown), thereby preventing clogging due to solidification of ink accompanying drying of the nozzle 111 of the recording head.
That is, when the recording head 110 is cleaned, the space S is hermetically sealed by bringing the nozzle forming surface of the recording head into close contact with the tip edge of the cap body 101, and the negative pressure suction pipe is sealed in the airtight space S. A negative pressure is introduced from 102 to discharge the ink in the nozzle. Thereafter, the space S is communicated with the atmosphere via the pipe 103 to return the inside of the space S to the atmospheric pressure, the cap body 101 is removed, and the nozzle forming surface of the recording head is wiped with a wiper to form a meniscus.

しかしながら、パイプ102を介してキャップ本体101内部を吸引して負圧にしたとき、キャップ本体101が弾性材料からなるために、図5(b)に示すようにキャップ本体101の周壁部101aが内側に湾曲変形し、記録ヘッド先端面に対する密着性が悪くなるという問題がある。
このような不具合に対処するために特許文献1(特開平5−7432号公報)には、弾性部材からなるキャップ本体の内壁面にコの字形の補強壁部を固定したり、或いは、キャップ本体自体の内壁面の肉厚を厚くした補強部を形成して、吸引に伴うキャップの変形を補強壁部或いは補強部により防止する技術が開示されている。
しかし、弾性を有するキャップ本体の内壁面に補強壁部を設けたものにあっては、キャップ本体の内壁面と補強壁部との間にインクが入り込んで潤滑剤として機能し、キャップ本体の記録ヘッドへの脱着の繰り返しによって補強壁部がキャップ本体から外れてしまうことがある。また、キャップ本体の一部の肉厚を厚くした補強部を形成するものにあっては、同じ内容積を得るためにキャップ本体の外形寸法が大きくなるという問題がある。
However, when the inside of the cap body 101 is sucked into a negative pressure through the pipe 102, the cap body 101 is made of an elastic material, so that the peripheral wall portion 101a of the cap body 101 is on the inner side as shown in FIG. There is a problem that the film is bent and deformed, and the adhesion to the front end surface of the recording head is deteriorated.
In order to deal with such a problem, Patent Document 1 (Japanese Patent Laid-Open No. 5-7432) discloses that a U-shaped reinforcing wall is fixed to the inner wall surface of a cap body made of an elastic member, or the cap body. A technique is disclosed in which a reinforcing portion having a thickened inner wall surface is formed and deformation of the cap accompanying suction is prevented by the reinforcing wall portion or the reinforcing portion.
However, in the case where the inner wall surface of the cap body having elasticity is provided with a reinforcing wall portion, ink enters between the inner wall surface of the cap body and the reinforcing wall portion and functions as a lubricant. The reinforcing wall part may come off from the cap body due to repeated attachment to and removal from the head. Moreover, in what forms the reinforcement part which thickened part thickness of the cap main body, in order to obtain the same internal volume, there exists a problem that the external dimension of a cap main body becomes large.

また、特許文献2(特開平4−14461号公報)には、キャップ本体の内部に記録ヘッドに圧接するプラスチック或いは金属材料からなる中子部材を内蔵するようにしたもの、さらに、キャップ本体を樹脂材料から形成して、このキャップ本体の前面にシール部材を取付けたものが開示されている。
しかし、キャップ本体内にプラスチック或いは金属材料からなる中子部材を内蔵するものにあっては、キャップ本体の形状を袋状にするなど形状が複雑になってコストがかかると共に、中子部材を入れるキャップ本体内の空間に成形時のバリ等が発生しやすい。特に、ヘッド方向にそのバリが発生すると、先端の平面度が得られず密着性が低下するという問題がある。また、キャップ本体を樹脂材料から構成し、このキャップ本体の前面にシール部材を取り付けた場合には樹脂材料とシール部材との接着性が十分でなくなり、シール部材が記録ヘッド側に密着したときにキャップ本体から剥離してしまうことがある。
Further, in Patent Document 2 (Japanese Patent Laid-Open No. 4-14461), a cap member made of a plastic or metal material that press-contacts the recording head is incorporated inside the cap body, and the cap body is made of resin. A material made of a material and having a seal member attached to the front surface of the cap body is disclosed.
However, in the case where a core member made of a plastic or metal material is built in the cap body, the shape of the cap body becomes complicated, such as a bag shape, which is costly and the core member is inserted. Burrs and the like during molding are likely to occur in the space inside the cap body. In particular, when the burr is generated in the head direction, there is a problem that the flatness of the tip cannot be obtained and the adhesion is deteriorated. Further, when the cap body is made of a resin material and the seal member is attached to the front surface of the cap body, the adhesiveness between the resin material and the seal member is not sufficient, and the seal member is in close contact with the recording head side. May peel from the cap body.

また、特許文献3(特開平9−70979号公報)には、弾性部材からなるキャップ本体をキャップホルダと一体成形して、キャプホルダをキャップ本体で覆うようにした技術が開示されている。
しかし、図5に示した従来例と同様に、キャップ本体内部を負圧にしたとき、キャップ本体が弾性変形を起こして、インクジェットヘッドに対する密着性が悪くなるという問題がある。
Japanese Patent Application Laid-Open No. 9-70979 discloses a technique in which a cap body made of an elastic member is integrally formed with a cap holder so that the cap holder is covered with the cap body.
However, similarly to the conventional example shown in FIG. 5, when the inside of the cap body is set to a negative pressure, there is a problem that the cap body is elastically deformed and adhesion to the ink jet head is deteriorated.

このように、従来のヘッドキャップ部材にあっては、キャップ本体内を負圧吸引したときのキャップ本体の変形を防止するための構造が充分でなく、気密性の低下によって負圧吸引力が上がらない、コストが高くなるという課題があった。
本発明は上記の問題点に鑑みてなされたものであり、キャップ本体を弾性材料から構成した場合であっても、負圧吸引時のキャップ本体の変形を防止して気密性の低下を防止して、負圧吸引力の低下、及びコストアップを防止することができるインクジェット記録装置のヘッドキャップ部材を提供することを目的としている。
As described above, in the conventional head cap member, the structure for preventing the deformation of the cap body when the inside of the cap body is sucked with a negative pressure is not sufficient, and the negative pressure suction force is increased due to a decrease in airtightness. There was no problem that the cost would be high.
The present invention has been made in view of the above-described problems, and even when the cap body is made of an elastic material, the cap body is prevented from being deformed during negative pressure suction to prevent a decrease in airtightness. An object of the present invention is to provide a head cap member of an ink jet recording apparatus that can prevent a decrease in negative pressure suction force and an increase in cost.

上記目的を達成するため、請求項1の発明に係るヘッドキャップ部材は、インクジェット式記録ヘッドのノズル形成面に先端で当接するヘッドキャップ部材であって、負圧導入穴、及び大気圧導入穴と連通する空所を先端面に有したベース部材と、前記空所の外周縁に沿った前記ベース部材先端面に突設された環状の補強壁部と、前記補強壁部の外周面と内周面で密着した状態で先端部を該補強壁部の先端部よりも先方に突出させた環状の弾性凸部材を備え、且つ前記ベース部材先端面に一部を添設されたキャップ本体と、前記ベース部材の先端面との間で該キャップ本体の一部を挟圧保持する押え部材と、を備え、前記弾性凸部材の先端部の厚み方向に沿った断面形状は、頂部と、該頂部の両側方に夫々連設された傾斜面と、を備えた略山形をなし、前記弾性凸部材の頂部は、該弾性凸部材の肉厚中心部よりも外側に偏位した位置にあることを特徴とする。
キャップ本体のシール部先端(弾性凸部材先端)は、環状に連続すると共に断面形状が山形になっており、少なくとも山形の頂部は、山形の肉厚中心部よりも外側にずれている。このため、弾性凸部材先端を記録ヘッドのノズル形成面と密着させた状態で空所内に負圧を導入した時に山形の頂部が内側へ変形することが防止され、負圧の漏れを確実に防止できる。特に、弾性凸部材の内側を補強壁部により補強しているため、内側への変形を効果的に防止できるので、経時的に弾性凸部材に内側への撓み変形癖が形成されることが防止される。
In order to achieve the above object, a head cap member according to a first aspect of the present invention is a head cap member that comes into contact with the nozzle forming surface of an ink jet recording head at the tip, and includes a negative pressure introducing hole, an atmospheric pressure introducing hole, A base member having a communicating space at its distal end surface, an annular reinforcing wall portion protruding from the distal end surface of the base member along the outer peripheral edge of the void, and an outer peripheral surface and an inner periphery of the reinforcing wall portion A cap main body provided with an annular elastic convex member having a distal end projecting further forward than the distal end of the reinforcing wall portion in close contact with the surface, and a part of which is attached to the distal end surface of the base member; A pressing member that holds and holds a part of the cap body between the tip surface of the base member, and the cross-sectional shape along the thickness direction of the tip portion of the elastic convex member has a top portion and a top portion of the top portion. A mountain with an inclined surface provided on both sides. Without a top portion of the elastic convex member is characterized in that than the thickness center of the elastic convex member is in a position offset to the outside.
The front end of the seal portion (the front end of the elastic convex member) of the cap body is continuous in an annular shape and has a mountain shape in cross section, and at least the top of the mountain shape is shifted outward from the central thickness portion of the mountain shape. Therefore, when the negative pressure is introduced into the void with the elastic convex member tip in close contact with the nozzle forming surface of the recording head, the peak of the mountain shape is prevented from being deformed inward, and negative pressure leakage is reliably prevented. it can. In particular, since the inside of the elastic convex member is reinforced by the reinforcing wall portion, it is possible to effectively prevent the inward deformation, so that the elastic convex member is prevented from forming inward bending deformation wrinkles over time. Is done.

請求項2の発明に係るヘッドキャップ部材は、インクジェット式記録ヘッドのノズル形成面に先端で当接するヘッドキャップ部材であって、負圧導入穴、及び大気圧導入穴と連通する空所を先端面に有したベース部材と、前記空所の外周縁に沿った前記ベース部材先端面に突設された環状の補強壁部と、前記補強壁部の外周面と内周面で密着した状態で先端部を該補強壁部の先端部よりも先方に突出させた環状の弾性凸部材を備え、且つ前記ベース部材先端面に一部を添設されたキャップ本体と、前記ベース部材の先端面との間で該キャップ本体の一部を挟圧保持する押え部材と、を備え、前記弾性凸部材の先端部の厚み方向に沿った断面形状は、頂部と、該頂部の両側方に夫々連設された傾斜面と、を備えた略山形をなし、前記弾性凸部材の頂部は、該弾性凸部材の肉厚中心部よりも内側に偏位した位置にあることを特徴とする。
キャップ本体のシール部先端(弾性凸部材先端)は、環状に連続すると共に断面形状が山形になっており、少なくとも山形の頂部は、山形の肉厚中心部よりも内側にずれている。このため、弾性凸部材先端を記録ヘッドのノズル形成面と密着させた状態で空所内に大気圧を導入した時(大気圧に戻したとき)に、頂部が外側へ変形することを防止でき、大気圧と同等となっている気圧の漏れを確実に防止できる。特に、弾性凸部材の内側を補強壁部により補強しているため、外側への変形を効果的に防止できる。
A head cap member according to a second aspect of the present invention is a head cap member that abuts against the nozzle forming surface of an ink jet recording head at the tip, and has a space communicating with the negative pressure introduction hole and the atmospheric pressure introduction hole at the tip surface. The base member, the annular reinforcing wall portion protruding from the front end surface of the base member along the outer peripheral edge of the space, and the tip end in close contact with the outer peripheral surface and the inner peripheral surface of the reinforcing wall portion A cap main body provided with an annular elastic convex member that protrudes further forward than the front end of the reinforcing wall, and a part of the cap main body is attached to the front end surface of the base member; and a front end surface of the base member A pressing member that holds and holds a part of the cap body therebetween, and the cross-sectional shape along the thickness direction of the distal end portion of the elastic convex member is connected to the top portion and both sides of the top portion, respectively. And the elastic convex member. Top portion, characterized in that in a position offset inward than the thickness center of the elastic convex member.
The front end of the seal part (the front end of the elastic convex member) of the cap body is annularly continuous and has a mountain shape in cross section, and at least the top of the mountain shape is shifted inward from the thick central portion of the mountain shape. For this reason, when the atmospheric pressure is introduced into the void with the tip of the elastic convex member in close contact with the nozzle forming surface of the recording head (when the pressure is returned to the atmospheric pressure), the top portion can be prevented from being deformed to the outside. It is possible to reliably prevent leakage of atmospheric pressure that is equivalent to atmospheric pressure. In particular, since the inner side of the elastic convex member is reinforced by the reinforcing wall portion, the outward deformation can be effectively prevented.

請求項3の発明は、前記ベース部材の先端面と接する前記キャップ本体の底面に、前記空所の周縁に沿って環状に連続して延在する環状凸部を突設したことを特徴とする。
環状凸部の存在によりベース部材とキャップ本体との接合面での負圧、大気圧の漏れを防止できる。
請求項4の発明は、前記キャップ本体、及び前記押え部材が金属製であることを特徴とする。
これらの部材を金属製とすることにより弾性凸部材の変形を効果的に防止することができる。このため、負圧導入時により吸引力をあげることが可能になりかつ、吸引に伴うキャップ本体の変形を防止することができると共に、構成も簡単でコストも安価になる。
The invention according to claim 3 is characterized in that an annular convex portion that continuously extends in an annular shape along the peripheral edge of the space is provided on the bottom surface of the cap main body in contact with the tip end surface of the base member. .
Due to the presence of the annular convex portion, it is possible to prevent leakage of negative pressure and atmospheric pressure at the joint surface between the base member and the cap body.
According to a fourth aspect of the present invention, the cap body and the pressing member are made of metal.
By making these members made of metal, deformation of the elastic convex member can be effectively prevented. For this reason, it is possible to increase the suction force when the negative pressure is introduced, and it is possible to prevent the deformation of the cap body due to the suction, and the configuration is simple and the cost is low.

請求項5の発明は、前記キャップ本体、及び前記押え部材が、前記弾性凸部材よりも硬質の樹脂製であることを特徴とする。
これらの部材を硬質樹脂製とすることにより弾性凸部材の変形を効果的に防止することができる。このため、吸引力を高めることが可能になりかつ、吸引に伴うキャップ本体の変形を防止することができると共に、構成も簡単でコストもより安価になる。
請求項6の発明は、前記ベース部材、前記キャップ本体、押え部材が一体成型されていることを特徴とする。
射出成形によりこれらを一体化してもよい。これらを一体成形したので、吸引力をあげることが可能になり、かつ、吸引に伴うキャップ本体の変形を防止することができると共に、構成も簡単でコストもさらに安価になる。
請求項7の発明に係るインクジェット記録装置は、請求項1乃至6の何れか一項に記載のヘッドキャップ部材と、記録ヘッドと、を備えたことを特徴とする。
The invention according to claim 5 is characterized in that the cap body and the pressing member are made of a resin harder than the elastic convex member.
By making these members made of hard resin, deformation of the elastic convex member can be effectively prevented. Therefore, it is possible to increase the suction force, to prevent the cap body from being deformed due to the suction, and to simplify the configuration and the cost.
The invention according to claim 6 is characterized in that the base member, the cap body, and the pressing member are integrally formed.
These may be integrated by injection molding. Since these are integrally molded, the suction force can be increased, the deformation of the cap body accompanying the suction can be prevented, the configuration is simple, and the cost is further reduced.
An ink jet recording apparatus according to a seventh aspect of the invention includes the head cap member according to any one of the first to sixth aspects and a recording head.

本発明によれば、キャップ本体を弾性材料から構成した場合であっても、負圧吸引時のキャップ本体の変形を防止して気密性の低下を防止して、負圧吸引力の低下、及びコストアップを防止することができる。   According to the present invention, even when the cap main body is made of an elastic material, the cap main body is prevented from being deformed at the time of negative pressure suction to prevent a decrease in airtightness, a negative pressure suction force is reduced, and Cost increase can be prevented.

(a)及び(b)は本発明の一実施形態に係るインクジェット記録装置のヘッドキャップ部材の外観斜視図、及びA−A断面図である。(A) And (b) is the external appearance perspective view of the head cap member of the inkjet recording device which concerns on one Embodiment of this invention, and AA sectional drawing. (a)及び(b)は図1(b)の要部拡大図、及びキャップ本体の要部拡大図である。(A) And (b) is the principal part enlarged view of FIG.1 (b), and the principal part enlarged view of a cap main body. 本発明の変形実施形態の断面図である。It is sectional drawing of the deformation | transformation embodiment of this invention. 本発明の他の実施形態に係るヘッドキャップ部材の要部縦断面図である。It is a principal part longitudinal cross-sectional view of the head cap member which concerns on other embodiment of this invention. (a)(b)及び(c)は従来のインクジェット記録装置に用いられるヘッドキャップ部材の構成を示す外観斜視図、断面図、及び平面図である。(A), (b), and (c) are the external appearance perspective view, sectional drawing, and top view which show the structure of the head cap member used for the conventional inkjet recording device.

以下、本発明を添付図面を参照して説明する。
図1(a)及び(b)は本発明の一実施形態に係るインクジェット記録装置のヘッドキャップ部材の外観斜視図、及びA−A断面図であり、図2(a)及び(b)は図1(b)の要部拡大図、及びキャップ本体の要部拡大図である。
本発明のヘッドキャップ部材1は、先端面(ノズル形成面)50aにノズル51を有したインクジェット式の記録ヘッド50に着脱し、記録ヘッド先端面50aと先端縁で密着した時にノズル51を負圧導入穴5及び図示しない大気解放穴と連通させる手段である。
ヘッドキャップ部材1は、先端面に負圧導入穴5及び大気解放穴と連通した空所6を備えたベース部材2と、空所6の外側開口部6aの外周縁に沿ったベース部材先端面2aに突設された連続した環状の補強壁部(リブ=キャップホルダ)10と、補強壁部10の外周面と内周面で密着した状態で先端部を補強壁部の先端部よりも先方に突出させた弾性凸部材25を備え、且つベース部材先端面2aに一部(被挟圧部)21を添設されたキャップ本体20と、ベース部材の先端面2aとの間でキャップ本体20の一部である被挟圧部21を挟圧した状態で図示しないボルトによりベース部材に固定する押え部材30と、を備えている。
ベース部材先端面2aにはボルト穴35aが形成され、キャップ本体20と押え部材30のボルト穴35aと連通する位置にはボルト装着穴35b、35cが夫々貫通形成されている。ボルト穴35a、各ボルト装着穴35b、35cを連通させた状態で図示しないボルトを螺着することにより、ベース部材2上にキャップ本体20と押え部材30を固定することができる。
The present invention will be described below with reference to the accompanying drawings.
1A and 1B are an external perspective view and an AA cross-sectional view of a head cap member of an ink jet recording apparatus according to an embodiment of the present invention, and FIGS. 2A and 2B are diagrams. It is the principal part enlarged view of 1 (b), and the principal part enlarged view of a cap main body.
The head cap member 1 of the present invention is attached to and detached from an ink jet recording head 50 having a nozzle 51 on the tip surface (nozzle forming surface) 50a, and the nozzle 51 is negatively pressurized when closely attached to the tip surface 50a of the recording head. It is means for communicating with the introduction hole 5 and an air release hole (not shown).
The head cap member 1 includes a base member 2 provided with a void 6 communicating with the negative pressure introduction hole 5 and the air release hole on the distal end surface, and a base member distal end surface along the outer peripheral edge of the outer opening 6 a of the void 6. A continuous annular reinforcing wall portion (rib = cap holder) 10 projecting from 2a and the tip end portion in front of the tip end portion of the reinforcing wall portion in close contact with the outer peripheral surface and inner peripheral surface of the reinforcing wall portion 10 The cap main body 20 is provided between the cap main body 20 provided with the elastic convex member 25 protruded to the base and a part (clamped portion) 21 attached to the base member front end surface 2a and the front end surface 2a of the base member. And a pressing member 30 that is fixed to the base member by a bolt (not shown) in a state where the pressed portion 21 that is a part of the pressing member 21 is pressed.
Bolt holes 35a are formed in the front end surface 2a of the base member, and bolt mounting holes 35b and 35c are formed through the cap body 20 and the position where the cap member 20 communicates with the bolt holes 35a. The cap body 20 and the pressing member 30 can be fixed on the base member 2 by screwing bolts (not shown) in a state where the bolt holes 35a and the respective bolt mounting holes 35b and 35c are communicated.

補強壁部10は、金属、硬質樹脂等、弾性凸部材25よりも硬質な材料により構成することにより、弾性凸部材25が内側(負圧導入穴側)へ過大に変形することを阻止している。補強壁部10はその先端部が弾性凸部材25の先端部よりも後方へ退避した位置となるようにその突出長Lを設定されているため、補強壁部の先端部よりも突出した位置にある弾性凸部材25の先端部は記録ヘッドと圧接したときに弾性変形して密着することが可能となっている。
なお、図3の変形例に示すようにベース部材2をベース部材本体2Aと、補強壁部10を備えた補強部材2Bと、から構成し、補強部材2Bをベース部材本体2Aの先端面とキャップ本体20との間に挟んでボルト締めするようにしてもよい。このように構成した場合には、補強部材2Bを硬質な材料にて構成し、ベース部材本体2Aを任意の材料から構成することができる。
The reinforcing wall portion 10 is made of a material harder than the elastic convex member 25, such as metal, hard resin, etc., thereby preventing the elastic convex member 25 from being excessively deformed to the inside (negative pressure introduction hole side). Yes. Since the protruding length L of the reinforcing wall portion 10 is set so that the tip portion of the reinforcing wall portion is retracted rearward from the tip portion of the elastic convex member 25, the reinforcing wall portion 10 is in a position protruding from the tip portion of the reinforcing wall portion. The tip of a certain elastic convex member 25 can be elastically deformed and brought into close contact with the recording head when pressed.
As shown in the modification of FIG. 3, the base member 2 is composed of a base member main body 2A and a reinforcing member 2B provided with a reinforcing wall portion 10, and the reinforcing member 2B is composed of a front end surface of the base member main body 2A and a cap. Bolts may be clamped between the main body 20 and the body 20. In the case of such a configuration, the reinforcing member 2B can be made of a hard material, and the base member body 2A can be made of an arbitrary material.

押え部材30は、ベース部材2の先端面との間で弾性材料から成るキャップ本体20を挟圧保持する手段であるため、所定の剛性を有している必要がある。従って、金属や、所定の硬度を有した樹脂材料から構成する。押え部材30の肉厚T1は、図示したようにキャップ本体20の被挟圧部21上に添設された際に、その先端面が補強壁部10の先端部よりも後方に退避した位置となる程度に設定する。
キャップ本体20及び押え部材30は、ベース部材2に対して後から組み付けても良いし、これらを金型内で一体成型してもよい。
また、補強壁部10の先端部の位置と、押え部材30の先端面の位置を同等の突出位置としてもよいし、押え部材30の先端面の位置を補強壁部10の先端部よりも先方に突出させてもよい。但し、空所S内への負圧導入時に弾性凸部材25の先端部が記録ヘッドのノズル形成面と圧接して圧縮変形した時に、ノズル形成面が補強壁部や押え部材と接触しないように寸法設定する必要があることは勿論である。
The pressing member 30 is a means for holding the cap main body 20 made of an elastic material between the distal end surface of the base member 2 and needs to have a predetermined rigidity. Therefore, it is made of a metal or a resin material having a predetermined hardness. The thickness T1 of the presser member 30 is such that the front end surface of the presser member 30 is retracted rearward from the front end of the reinforcing wall 10 when it is attached on the clamped pressure portion 21 of the cap body 20 as illustrated. Set to a certain level.
The cap main body 20 and the pressing member 30 may be assembled to the base member 2 later, or may be integrally formed in a mold.
Further, the position of the distal end portion of the reinforcing wall portion 10 and the position of the distal end surface of the pressing member 30 may be set to the same protruding position, or the position of the distal end surface of the pressing member 30 is located ahead of the distal end portion of the reinforcing wall portion 10. You may make it project. However, when a negative pressure is introduced into the space S, when the tip of the elastic convex member 25 is in compression contact with the nozzle forming surface of the recording head and is compressed and deformed, the nozzle forming surface does not come into contact with the reinforcing wall or the pressing member. Of course, it is necessary to set the dimensions.

本実施形態に係るヘッドキャップ部材1の特徴的な構成は、弾性凸部材25の先端部の厚み方向に沿った断面形状を、頂部25aと、頂部の両側方に夫々連設された(山形に下向き傾斜した)傾斜面25b、25cと、を備えた略山形とし、更に弾性凸部材の頂部25aの位置を、弾性凸部材の肉厚中心部Cよりも外側OUTに偏位した位置とした点にある。つまり、弾性凸部材の先端部は、肉厚中心部Cの外側部分の肉厚の方が内側部分の肉厚よりも厚くなっているため、内側へ変形しにくくなっている。
なお、弾性凸部材の頂部25aの位置を弾性凸部材の肉厚中心部Cよりも外側OUTに偏位した位置とするとは、図示のように頂部と傾斜面25bとの境界が肉厚中心部Cと一致していることを意味せず、中心部Cが若干傾斜面25b側、或いは傾斜面25c側に位置している場合も含む。
The characteristic configuration of the head cap member 1 according to the present embodiment is such that the cross-sectional shape along the thickness direction of the tip portion of the elastic convex member 25 is continuously provided on the top portion 25a and on both sides of the top portion (in a mountain shape). A substantially mountain shape provided with inclined surfaces 25b and 25c (inclined downward), and the position of the top portion 25a of the elastic convex member is a position displaced to the outside OUT from the thickness center portion C of the elastic convex member. It is in. That is, the tip of the elastic convex member is less likely to be deformed inward because the thickness of the outer portion of the thickness center portion C is thicker than the thickness of the inner portion.
Note that the position of the top portion 25a of the elastic convex member is a position shifted to the outside OUT from the thickness center portion C of the elastic convex member is that the boundary between the top portion and the inclined surface 25b is the thickness center portion as shown in the figure. It does not mean that it coincides with C, and includes a case where the central portion C is slightly located on the inclined surface 25b side or the inclined surface 25c side.

弾性凸部材25の先端部の断面形状をこのように構成したため、内側に変形しにくい構造となっている。
更に、ベース部材2の先端面2aと接するキャップ本体20の底面に、空所6の周縁に沿って環状に延在する(周方向に連続した)環状凸部27を突設することにより気密性を高めた構成も特徴的である。環状凸部27と接するベース部材の先端面2aは平坦面としてもよいし、先端面2a上に環状凸部27を密着して嵌合させる環状の溝2bを形成してもよい。
このように構成したヘッドキャップ部材1においては、記録ヘッド50の先端面50aを弾性凸部材25の先端部に圧接した状態で負圧導入穴5から空所6内に負圧を導入した場合に負圧が漏れることなく十分な吸引力を発揮することができる。また、内側に変形しにくい形状とした弾性凸部材25の先端部を、補強壁部10によって更に内側に変形しにくくしているため、負圧導入時に弾性凸部材が内側に変形することが防止され、図5(c)に示した如き変形癖が形成されることを防止できる。このため、弾性凸部材の変形に起因して、記録ヘッドの先端面と当接したときに負圧の漏れが発生しなくなる。このような構造はシンプルであり、製造コストも安価で済む。
Since the cross-sectional shape of the distal end portion of the elastic convex member 25 is configured in this way, the structure is difficult to be deformed inward.
Further, the bottom surface of the cap body 20 in contact with the front end surface 2 a of the base member 2 is provided with an annular convex portion 27 extending annularly (continuously in the circumferential direction) along the peripheral edge of the space 6 so as to be airtight. The structure which raised is also characteristic. The front end surface 2a of the base member in contact with the annular convex portion 27 may be a flat surface, or an annular groove 2b for closely fitting the annular convex portion 27 on the front end surface 2a may be formed.
In the head cap member 1 configured as described above, when a negative pressure is introduced into the space 6 from the negative pressure introduction hole 5 in a state in which the front end surface 50a of the recording head 50 is in pressure contact with the front end portion of the elastic convex member 25. Sufficient suction force can be exhibited without leakage of negative pressure. In addition, since the distal end portion of the elastic convex member 25 having a shape that hardly deforms inward is further prevented from being deformed inward by the reinforcing wall portion 10, the elastic convex member is prevented from being deformed inward when negative pressure is introduced. Thus, it is possible to prevent the deformation defect as shown in FIG. For this reason, due to the deformation of the elastic convex member, negative pressure leakage does not occur when contacting the front end surface of the recording head. Such a structure is simple and the manufacturing cost is low.

次に、図4は本発明の他の実施形態に係るヘッドキャップ部材の要部縦断面図である。なお、前記第1の実施形態と同一部位には同一符号を付して説明する。
本実施形態に係るヘッドキャップ部材1の特徴的な構成は、弾性凸部材25の先端部の厚み方向に沿った断面形状を、頂部25aと、頂部の両側方に夫々連設された(山形に下向き傾斜した)傾斜面25b、25cと、を備えた略山形とし、更に弾性凸部材の頂部25aの位置を、弾性凸部材の肉厚中心部Cよりも内側INに偏位した位置とした点にある。つまり、弾性凸部材の先端部は、肉厚中心部Cの内側部分の肉厚の方が外側部分の肉厚よりも厚くなっているため、外側へ変形しにくくなっている。
なお、弾性凸部材の頂部25aの位置を弾性凸部材の肉厚中心部Cよりも内側INに偏位した位置とするとは、図示のように頂部と傾斜面25cとの境界が肉厚中心部Cと一致していることを意味せず、中心部Cが若干傾斜面25b側、或いは傾斜面25c側に位置している場合も含む。
このように、弾性凸部材25の先端部の形状自体が外側へ向けて変形しにくい形状となっている。
Next, FIG. 4 is a longitudinal sectional view of an essential part of a head cap member according to another embodiment of the present invention. The same parts as those in the first embodiment will be described with the same reference numerals.
The characteristic configuration of the head cap member 1 according to the present embodiment is such that the cross-sectional shape along the thickness direction of the tip portion of the elastic convex member 25 is continuously provided on the top portion 25a and on both sides of the top portion (in a mountain shape). A substantially chevron with inclined surfaces 25b and 25c (inclined downward), and the position of the top portion 25a of the elastic convex member is a position displaced to the inner side IN from the thickness central portion C of the elastic convex member. It is in. That is, the tip of the elastic convex member is less likely to deform outward because the thickness of the inner portion of the thickness center portion C is thicker than the thickness of the outer portion.
Note that the position of the top portion 25a of the elastic convex member is a position displaced to the inner side IN from the thickness center portion C of the elastic convex member means that the boundary between the top portion and the inclined surface 25c is the thickness center portion as shown in the figure. It does not mean that it coincides with C, and includes a case where the central portion C is slightly located on the inclined surface 25b side or the inclined surface 25c side.
In this way, the shape of the tip portion of the elastic convex member 25 is not easily deformed outward.

ヘッドキャップ部材1は、記録ヘッドのノズル形成面に負圧と大気圧を加えるときに使用される。
このように構成したヘッドキャップ部材1においては、弾性凸部材25の先端を記録ヘッドのノズル形成面に密着させた状態で図示しない大気圧導入穴から大気圧を加えた場合であっても、弾性凸部材先端を記録ヘッドのノズル形成面に強く押し付けることができる。しかも、押え部材30が弾性凸部材25の外周面を外側へ大きく変形しないようにガイドしている。つまり、弾性凸部材25の内側への変形は補強壁部10が阻止し、外側への変形は弾性凸部材25自体の形状と、押え部材30による補強機能によって阻止されている。このような構成は、シンプルであり、低コストで実現可能である。
The head cap member 1 is used when negative pressure and atmospheric pressure are applied to the nozzle forming surface of the recording head.
In the head cap member 1 configured as described above, even when atmospheric pressure is applied from an atmospheric pressure introduction hole (not shown) in a state where the tip of the elastic convex member 25 is in close contact with the nozzle forming surface of the recording head, elasticity The tip of the convex member can be strongly pressed against the nozzle forming surface of the recording head. Moreover, the pressing member 30 guides the outer peripheral surface of the elastic convex member 25 so as not to be greatly deformed outward. That is, the reinforcing wall portion 10 prevents the elastic convex member 25 from deforming inward, and the outward deformation is prevented by the shape of the elastic convex member 25 itself and the reinforcing function of the pressing member 30. Such a configuration is simple and can be realized at low cost.

以上の構成を備えた本発明は次のような効果を奏する。
まず、キャップ本体のシール部先端(弾性凸部材先端)は、環状に連続すると共に断面形状が山形になっており、少なくとも山形の頂部は、山形の肉厚中心部よりも外側にずれている。このため、弾性凸部材先端を記録ヘッドのノズル形成面と密着させた状態で空所内に負圧を導入した時に山形の頂部が内側へ変形することが防止され、負圧の漏れを確実に防止できる。特に、弾性凸部材の内側を補強壁部により補強しているため、内側への変形を効果的に防止できるので、経時的に弾性凸部材に内側への撓み変形癖が形成されることが防止される。
次に、キャップ本体のシール部先端(弾性凸部材先端)は、環状に連続すると共に断面形状が山形になっており、少なくとも山形の頂部は、山形の肉厚中心部よりも内側にずれている。このため、弾性凸部材先端を記録ヘッドのノズル形成面と密着させた状態で空所内に大気圧を導入した時(大気圧に戻したとき)に、頂部が外側へ変形することを防止でき、大気圧と同等な空所内の気圧の漏れを確実に防止できる。特に、弾性凸部材の内側を補強壁部により補強しているため、外側への変形を効果的に防止できる。
The present invention having the above configuration has the following effects.
First, the front end of the seal part (the front end of the elastic convex member) of the cap body is continuous in an annular shape and has a mountain shape in cross section, and at least the top of the mountain shape is shifted to the outside from the thick central portion of the mountain shape. Therefore, when the negative pressure is introduced into the void with the elastic convex member tip in close contact with the nozzle forming surface of the recording head, the peak of the mountain shape is prevented from being deformed inward, and negative pressure leakage is reliably prevented. it can. In particular, since the inside of the elastic convex member is reinforced by the reinforcing wall portion, it is possible to effectively prevent the inward deformation, so that the elastic convex member is prevented from forming inward bending deformation wrinkles over time. Is done.
Next, the front end of the seal part (the front end of the elastic convex member) of the cap body is continuous in an annular shape and the cross-sectional shape is a mountain shape, and at least the top of the mountain shape is displaced inward from the central thickness portion of the mountain shape. . For this reason, when the atmospheric pressure is introduced into the void with the tip of the elastic convex member in close contact with the nozzle forming surface of the recording head (when the pressure is returned to the atmospheric pressure), the top portion can be prevented from being deformed to the outside. Leakage of atmospheric pressure in the space equivalent to atmospheric pressure can be reliably prevented. In particular, since the inner side of the elastic convex member is reinforced by the reinforcing wall portion, the outward deformation can be effectively prevented.

次に、ベース部材の先端面と接するキャップ本体の底面に、空所の周縁に沿って環状に連続して延在する環状凸部を突設した。このため、環状凸部の存在によりベース部材とキャップ本体との接合面での負圧、大気圧の漏れを防止できる。
次に、キャップ本体、及び押え部材を金属製とすることにより弾性凸部材の変形を効果的に防止することができる。即ち、負圧導入時により吸引力をあげることが可能になりかつ、吸引に伴うキャップ本体の変形を防止することができると共に、構成も簡単でコストも安価になる。
次に、キャップ本体、及び押え部材を硬質樹脂製とすることにより弾性凸部材の変形を効果的に防止することができる。即ち、吸引力を高めることが可能になりかつ、吸引に伴うキャップ本体の変形を防止することができると共に、構成も簡単でコストもより安価になる。
Next, an annular convex portion that continuously extends in an annular shape along the peripheral edge of the void was provided on the bottom surface of the cap main body in contact with the tip end surface of the base member. For this reason, the presence of the annular convex portion can prevent leakage of negative pressure and atmospheric pressure at the joint surface between the base member and the cap body.
Next, deformation of the elastic convex member can be effectively prevented by making the cap body and the pressing member metal. That is, the suction force can be increased when the negative pressure is introduced, the deformation of the cap body due to the suction can be prevented, and the configuration is simple and the cost is low.
Next, deformation of the elastic convex member can be effectively prevented by making the cap body and the pressing member made of hard resin. That is, the suction force can be increased, the deformation of the cap body accompanying the suction can be prevented, the configuration is simple, and the cost is reduced.

次に、ベース部材、キャップ本体、押え部材を射出成形により一体化することにより、吸引力をあげることが可能になり、かつ、吸引に伴うキャップ本体の変形を防止することができると共に、構成も簡単でコストもさらに安価になる。具体的には、例えば、ベース部材、押え部材を金型内に組み付けた状態で、キャップ本体を構成する弾性材料(ゴム、樹脂)を成形空間内に注入してから固化させることにより、これらを一体成形することができる。
なお、本発明に係るヘッドキャップ部材は、インクジェット記録装置に装備される記録ヘッドに適用することにより、上記の優れた作用効果を奏することができる。
Next, by integrating the base member, the cap main body, and the presser member by injection molding, it becomes possible to increase the suction force, and it is possible to prevent the cap main body from being deformed due to suction, and the configuration It's simpler and cheaper. Specifically, for example, in a state where the base member and the presser member are assembled in the mold, the elastic material (rubber, resin) constituting the cap body is injected into the molding space and then solidified. Can be integrally molded.
Note that the head cap member according to the present invention can achieve the above-described excellent operational effects when applied to a recording head equipped in an ink jet recording apparatus.

1…ヘッドキャップ部材、2…ベース部材、2a…先端面、2b…溝、2A…ベース部材本体、2B…補強部材、5…負圧導入穴、6…空所、6a…外側開口部、10…補強壁部、20…キャップ本体、21…被挟圧部、25…弾性凸部材、25a…頂部、25b…傾斜面、25c…傾斜面、27…環状凸部、30…押え部材、35a…ボルト穴、35b…ボルト装着穴、50…記録ヘッド、50a…先端面(ノズル形成面)、51…ノズル DESCRIPTION OF SYMBOLS 1 ... Head cap member, 2 ... Base member, 2a ... Front end surface, 2b ... Groove, 2A ... Base member main body, 2B ... Reinforcement member, 5 ... Negative pressure introduction hole, 6 ... Space, 6a ... Outer opening part, 10 DESCRIPTION OF SYMBOLS ... Reinforcement wall part, 20 ... Cap main body, 21 ... Clamped part, 25 ... Elastic convex member, 25a ... Top part, 25b ... Inclined surface, 25c ... Inclined surface, 27 ... Annular convex part, 30 ... Holding member, 35a ... Bolt hole, 35b ... Bolt mounting hole, 50 ... Recording head, 50a ... End face (nozzle forming surface), 51 ... Nozzle

特開平5−7432号公報Japanese Patent Laid-Open No. 5-7432 特開平4−14461号公報JP-A-4-14461 特開平9−70979号公報JP-A-9-70979

Claims (7)

インクジェット式記録ヘッドのノズル形成面に先端で当接するヘッドキャップ部材であって、
負圧導入穴、及び大気圧導入穴と連通する空所を先端面に有したベース部材と、前記空所の外周縁に沿った前記ベース部材先端面に突設された環状の補強壁部と、前記補強壁部の外周面と内周面で密着した状態で先端部を該補強壁部の先端部よりも先方に突出させた環状の弾性凸部材を備え、且つ前記ベース部材先端面に一部を添設されたキャップ本体と、前記ベース部材の先端面との間で該キャップ本体の一部を挟圧保持する押え部材と、を備え、
前記弾性凸部材の先端部の厚み方向に沿った断面形状は、頂部と、該頂部の両側方に夫々連設された傾斜面と、を備えた略山形をなし、
前記弾性凸部材の頂部は、該弾性凸部材の肉厚中心部よりも外側に偏位した位置にあることを特徴とするヘッドキャップ部材。
A head cap member that comes into contact with a nozzle forming surface of an ink jet recording head at a tip;
A base member having a negative pressure introduction hole and a space communicating with the atmospheric pressure introduction hole on the front end surface; and an annular reinforcing wall portion protruding from the front end surface of the base member along the outer peripheral edge of the space; An annular elastic convex member having a distal end projecting forward from the distal end of the reinforcing wall in a state in which the outer circumferential surface and the inner circumferential surface of the reinforcing wall are in close contact with each other. A cap body provided with a portion, and a pressing member that holds and holds a part of the cap body between the front end surface of the base member,
The cross-sectional shape along the thickness direction of the distal end portion of the elastic convex member has a substantially chevron shape including a top portion and inclined surfaces continuously provided on both sides of the top portion,
The head cap member according to claim 1, wherein a top portion of the elastic convex member is located at a position displaced outward from a thickness center portion of the elastic convex member.
インクジェット式記録ヘッドのノズル形成面に先端で当接するヘッドキャップ部材であって、
負圧導入穴、及び大気圧導入穴と連通する空所を先端面に有したベース部材と、前記空所の外周縁に沿った前記ベース部材先端面に突設された環状の補強壁部と、前記補強壁部の外周面と内周面で密着した状態で先端部を該補強壁部の先端部よりも先方に突出させた環状の弾性凸部材を備え、且つ前記ベース部材先端面に一部を添設されたキャップ本体と、前記ベース部材の先端面との間で該キャップ本体の一部を挟圧保持する押え部材と、を備え、
前記弾性凸部材の先端部の厚み方向に沿った断面形状は、頂部と、該頂部の両側方に夫々連設された傾斜面と、を備えた略山形をなし、
前記弾性凸部材の頂部は、該弾性凸部材の肉厚中心部よりも内側に偏位した位置にあることを特徴とするヘッドキャップ部材。
A head cap member that comes into contact with a nozzle forming surface of an ink jet recording head at a tip;
A base member having a negative pressure introduction hole and a space communicating with the atmospheric pressure introduction hole on the front end surface; and an annular reinforcing wall portion protruding from the front end surface of the base member along the outer peripheral edge of the space; An annular elastic convex member having a distal end projecting forward from the distal end of the reinforcing wall in a state in which the outer circumferential surface and the inner circumferential surface of the reinforcing wall are in close contact with each other. A cap body provided with a portion, and a pressing member that holds and holds a part of the cap body between the front end surface of the base member,
The cross-sectional shape along the thickness direction of the distal end portion of the elastic convex member has a substantially chevron shape including a top portion and inclined surfaces continuously provided on both sides of the top portion,
The head cap member according to claim 1, wherein a top portion of the elastic convex member is located at a position displaced inward from a thickness center portion of the elastic convex member.
前記ベース部材の先端面と接する前記キャップ本体の底面に、前記空所の周縁に沿って環状に連続して延在する環状凸部を突設したことを特徴とする請求項1又は2に記載のヘッドキャップ部材。   The ring-shaped convex part extended in the ring shape along the peripheral edge of the said space | gap was projectedly provided in the bottom face of the said cap main body which contact | connects the front end surface of the said base member, The Claim 1 or 2 characterized by the above-mentioned. Head cap member. 前記キャップ本体、及び前記押え部材が金属製であることを特徴とする請求項1乃至3の何れか一項に記載のヘッドキャップ部材。   The head cap member according to any one of claims 1 to 3, wherein the cap body and the pressing member are made of metal. 前記キャップ本体、及び前記押え部材が前記弾性凸部材よりも硬質の樹脂製であることを特徴とする請求項1乃至3の何れか一項に記載のヘッドキャップ部材。   The head cap member according to claim 1, wherein the cap main body and the pressing member are made of a resin harder than the elastic convex member. 前記ベース部材、前記キャップ本体、押え部材が一体成型されていることを特徴とする請求項1乃至5の何れか一項に記載のヘッドキャップ部材。   The head cap member according to any one of claims 1 to 5, wherein the base member, the cap body, and the pressing member are integrally formed. 請求項1乃至6の何れか一項に記載のヘッドキャップ部材と、記録ヘッドと、を備えたことを特徴とするインクジェット記録装置。   An ink jet recording apparatus comprising: the head cap member according to any one of claims 1 to 6; and a recording head.
JP2011083498A 2011-03-07 2011-04-05 Head cap member and inkjet recording apparatus Withdrawn JP2012196948A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110918333A (en) * 2018-09-19 2020-03-27 长鑫存储技术有限公司 Photoresist spray head device and method for coating photoresist

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110918333A (en) * 2018-09-19 2020-03-27 长鑫存储技术有限公司 Photoresist spray head device and method for coating photoresist

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