JP2012196616A - Ultrasonic atomizing device using surface acoustic wave device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To continuously atomize a plurality of kinds of liquids while preventing the contamination of a plurality of liquids.SOLUTION: The ultrasonic atomizing device using surface acoustic wave device is provided with a piezoelectric base body 11 having a groove like part, a plurality of comb-shaped electrodes 21-25 formed in a place facing a direction interposing a groove like part of the upper surface of the base body and the groove like part and each generating the surface acoustic wave and a plurality of liquid droplet devices 31-33 for dropping the droplets on a propagation path of the surface acoustic wave generated in each comb-shaped electrode. The liquid to be atomized is dropped from the liquid dropping devices 22-25 corresponding to at least one comb-shaped electrode to be atomized by the surface acoustic wave. After the atomization of the liquid, a cleaning liquid is dropped from the liquid dropping device 21 corresponding at least to one comb-shaped electrode to be atomized or fluidized by the surface acoustic wave, being discharged to the outside along the groove-like part.

Description

  The present invention relates to an ultrasonic atomizer using a surface acoustic wave element.

  2. Description of the Related Art Conventionally, surface acoustic wave elements that generate surface acoustic waves on a substrate and receive the generated surface acoustic waves are well known.

  Here, the surface acoustic wave is a surface acoustic wave that propagates while concentrating much of its energy on the surface of the material, unlike a longitudinal wave or a transverse wave called a normal bulk wave. Examples of surface acoustic waves include Rayleigh waves, Sezawa waves, pseudo Sezawa waves, Love waves, and the like.

  Among them, as a surface acoustic wave element that has been well known, there is a planar surface acoustic wave element. In this planar type surface acoustic wave element, comb-shaped electrodes are provided on the surface of a piezoelectric substrate made of a flat piezoelectric material disposed on a flat substrate. When a high frequency is applied to the comb-shaped electrode, a surface acoustic wave is generated and propagates on the surface of the piezoelectric substrate.

  One application example of such a planar surface acoustic wave element is an ultrasonic atomizer that atomizes a liquid by using a surface acoustic wave.

  As an example of an ultrasonic atomizer, a high frequency is applied to a comb-shaped electrode to generate a surface acoustic wave to propagate the surface of a piezoelectric substrate, and a droplet is dropped on the propagation path of this surface acoustic wave. It is an apparatus configured to transmit surface wave energy to a droplet, thereby atomizing and flying the droplet (see Patent Document 1).

  Therefore, if such an ultrasonic atomizer is used, various liquids such as water, aqueous solutions, organic liquids, oils, various treatment liquids, chemical liquids, inks, and odorous substances have a particle size of about several tens to several hundreds of micrometers. It becomes possible to atomize the fine particles. As a result, the ultrasonic atomizer has features such as being able to obtain finer particles with a smaller particle size compared to conventional ink jet methods, etc., and being able to easily atomize even a volatile liquid. It is expected to be applied to a wide range of applications such as surface treatment equipment, printing presses, medical equipment, and olfactory displays.

  Here, the olfactory display is a device that presents an odor to the user's nose, and devices that are configured to atomize aroma components using an ultrasonic atomizer have been studied (non-patented). Reference 1).

Japanese Patent Laid-Open No. 11-114467

Basic research on olfactory display using micro liquid pump and SAW device, IEEJ General Research Group, June 2010, CHS-10-001 Monthly Display September 2010 Vo: 16, No. 9, pp.72-79 (ISSN 1341-3961)

  However, when different liquids are continuously atomized using the ultrasonic atomizing apparatus as described above, a new liquid is dropped to form a mist while the liquid previously dropped on the piezoelectric substrate remains. It is expected that the previously dropped liquid and the newly dropped liquid are mixed and atomized at the same time (hereinafter abbreviated as contamination). In particular, when considering application of an ultrasonic atomizer as an olfactory display, for example, when contamination occurs, it is atomized in a state where different odor substances are mixed, and a desired odor cannot be reproduced, which is preferable. The result is not obtained.

  The present invention has been made in order to solve the above-described problems, and can be prepared by atomizing a plurality of types of liquids at an arbitrary ratio while dropping a plurality of types of liquids. It is an object of the present invention to provide an ultrasonic atomizing device using a surface acoustic wave element that continuously cleans the liquid and continuously atomizes a plurality of types of liquids while preventing contamination.

In order to solve the above problems, the invention corresponding to claim 1 is a piezoelectric substrate formed of a piezoelectric material so as to have at least a groove-shaped portion, a groove-shaped portion on the upper surface portion of the piezoelectric substrate, and the groove-shaped portion. A plurality of comb-shaped electrodes that generate a surface acoustic wave upon receiving a high-frequency signal, and a droplet is dropped on the propagation path of the surface acoustic waves generated by the plurality of comb-shaped electrodes. A plurality of liquid dropping devices for
A liquid to be atomized is dropped from a liquid dropping device corresponding to at least one comb-shaped electrode formed at a position facing the groove-shaped portion among the plurality of liquid dropping devices, and the comb-shaped electrode The liquid is atomized by the generated surface acoustic wave, and after the liquid is atomized, the cleaning liquid is dropped from a liquid dropping device corresponding to at least one comb-shaped electrode formed in at least the groove-shaped portion, and generated at the comb-shaped electrode. An ultrasonic atomizing device using a surface acoustic wave element, characterized in that the cleaning liquid is atomized or fluidized by a surface acoustic wave and discharged to the outside along the groove-shaped portion.

The invention corresponding to claim 2 is the structure of the invention corresponding to claim 1, and the comb-shaped electrode formed in the groove-shaped portion of the upper surface portion of the piezoelectric substrate and the liquid dropping device corresponding to the comb-shaped electrode Instead of removing a cut groove along the groove,
A liquid to be atomized is dropped from a liquid dropping device corresponding to at least one comb-shaped electrode formed in a position facing the groove-shaped portion, and is atomized by a surface acoustic wave generated by the comb-shaped electrode. An ultrasonic atomizing device using a surface acoustic wave element, wherein the cleaning liquid is caused to flow along the kerf after the liquid is atomized.

According to a third aspect of the present invention, there is provided a piezoelectric substrate formed of a piezoelectric material so as to form a cylindrical shape, a direction orthogonal to the cylindrical direction of the piezoelectric substrate and a cylindrical direction, and a high frequency signal. Receiving a plurality of comb-shaped electrodes each generating a surface acoustic wave, and a plurality of liquid dropping devices for dropping droplets on the propagation path of the surface acoustic waves generated by the plurality of comb-shaped electrodes,
Among the plurality of liquid dropping devices, a liquid to be atomized is dropped from a liquid dropping device corresponding to at least one comb-shaped electrode formed in the cylindrical direction, and surface acoustic waves generated by the comb-shaped electrode are dropped. Elasticity generated at the comb electrode by atomizing the cleaning liquid from a liquid dropping device corresponding to at least one comb electrode formed in a direction orthogonal to the cylindrical direction after atomization of the liquid A surface acoustic wave element is used, wherein the cleaning liquid is atomized or fluidized by a surface wave and discharged to the outside along a lowermost cylindrical surface in a direction orthogonal to a cylindrical direction of the piezoelectric substrate. It is an ultrasonic atomizer.

An invention corresponding to claim 4 is the invention corresponding to claim 3, and corresponds to a comb-shaped electrode formed in a direction perpendicular to a cylindrical shape of the piezoelectric substrate and the comb-shaped electrode. Instead of removing the liquid dropping device, a kerf is provided along the lowermost cylindrical surface in the direction orthogonal to the direction of the cylindrical shape,
The liquid to be atomized is dropped from at least one liquid dropping device corresponding to the comb-shaped electrode formed in the cylindrical direction, and atomized by the surface acoustic wave generated by the comb-shaped electrode, and the liquid is atomized. An ultrasonic atomizing device using a surface acoustic wave element, wherein the cleaning liquid is caused to flow along the kerf later.

Further, the invention corresponding to claim 5 is a piezoelectric substrate formed of a piezoelectric material so as to have a hemispherical concave surface portion, and formed toward the bottom portion of the concave surface portion of the piezoelectric substrate, and receives a high frequency signal. A plurality of comb electrodes for generating surface acoustic waves, a plurality of liquid dropping devices for dropping droplets on the propagation path of the surface acoustic waves generated by the plurality of comb electrodes, and a concave surface portion of the piezoelectric substrate And a drainage port penetrated through the bottom of the
A liquid to be atomized is dropped from a liquid dropping device corresponding to at least one comb-shaped electrode among the plurality of liquid dropping devices, and is atomized by a surface acoustic wave generated by the comb-shaped electrode. The ultrasonic atomizing device using the surface acoustic wave element is characterized in that the cleaning liquid is caused to flow from the drainage port along the concave surface portion of the piezoelectric substrate after conversion.

  Further, the invention corresponding to claim 6 is the invention according to any one of claims 1 to 5, wherein the atomization of the liquid dropped from the liquid dropping device and the supply of the cleaning liquid are alternately performed. The ultrasonic mist according to any one of claims 1 to 5, wherein the odor of a newly dropped liquid is not mixed with the odor of the previously dropped liquid. It is an olfactory display using a composing device.

  According to the present invention, a function of dropping a plurality of types of liquids on a piezoelectric substrate and mixing and atomizing them at an arbitrary ratio, and a function of mechanically cleaning a region where the liquid on the piezoelectric substrate has been dropped. By providing multiple types of liquid, it can be prepared and atomized at any ratio while dripping, and the region of the piezoelectric substrate where the liquid has been dropped is automatically washed to prevent contamination and prevent multiple types. It is possible to provide an ultrasonic atomizer using a surface acoustic wave element that continuously atomizes the liquid.

  In particular, when the ultrasonic atomizer described in the present invention is used as an olfactory display, a plurality of odorous substances can be continuously atomized and presented without being mixed as compared with the conventional technique.

The perspective view and top view which show 1st Embodiment of the ultrasonic atomizer using the surface acoustic wave element which concerns on this invention. The perspective view and top view which show 2nd Embodiment of the ultrasonic atomizer using the surface acoustic wave element which concerns on this invention. The perspective view and AA arrow sectional drawing which show 3rd Embodiment of the ultrasonic atomizer using the surface acoustic wave element which concerns on this invention. The perspective view and AA arrow sectional view which show 4th Embodiment of the ultrasonic atomizer using the surface acoustic wave element which concerns on this invention. The perspective view and top view which show 5th Embodiment of the ultrasonic atomizer using the surface acoustic wave element which concerns on this invention.

Embodiments of the present invention will be described below with reference to the drawings.
(First embodiment: corresponding to the invention according to claim 1)
FIGS. 1A and 1B are a perspective view and a plan view for explaining a first embodiment of an ultrasonic atomizer using a surface acoustic wave element according to the present invention.

  The ultrasonic atomizer includes a piezoelectric substrate 11 made of a piezoelectric material cut into a corrugated plate shape so that at least a part thereof has a groove shape, and, for example, five sets of combs provided on the surface of the piezoelectric substrate 11. Electrodes 21-25 are provided.

  The piezoelectric substrate 11 is made of a piezoelectric material such as quartz, langasite, lithium niobate, or lithium tantalate. The piezoelectric substrate 11 shown in FIG. 1 is cut into a corrugated plate shape, but is not necessarily limited to this form, and any form having a groove-like portion, for example, a V-bent plate shape or a flat plate shape. The surface may be processed so as to have a U-shaped or V-shaped cross section.

  These comb-shaped electrodes 21 to 25 are made of a metal material such as copper, silver, gold, platinum, or chromium, and are all connected to a high-frequency power source (not shown) provided separately from the piezoelectric substrate 11. When a high-frequency signal generated from the high-frequency power source is applied, a surface acoustic wave is generated from each of the comb-shaped electrodes 21 to 25 by being excited by the high-frequency signal, and can propagate through the surface of the piezoelectric substrate 11.

  Among these, the comb-shaped electrode 21 is provided at a position where the generated surface acoustic wave propagates along the groove-shaped portion of the piezoelectric substrate 11, and the other comb-shaped electrodes 22 to 25 are respectively generated surface acoustic waves. Are respectively provided at positions that propagate in the direction of sandwiching the groove-shaped portion of the piezoelectric substrate 11.

  In FIG. 1, five sets of comb-shaped electrodes 21 to 25 are provided on the piezoelectric substrate 11, but it is not necessarily limited to the number of sets. The propagation direction of the surface acoustic wave generated by the comb-shaped electrodes 21 to 25 is along the propagation path of the surface acoustic wave on the piezoelectric substrate 11, and the propagation direction of the surface acoustic wave generated by the at least one comb-shaped electrode 21 is It is designed so that the propagation direction of the surface acoustic wave generated along the groove-shaped portion of the piezoelectric substrate 11 and the other comb-shaped electrodes 22 to 25 propagates in the direction sandwiching the groove-shaped portion of the piezoelectric substrate 11. If so, an arbitrary number of comb electrodes may be provided at an arbitrary position.

  Further, on the propagation path of the surface acoustic wave generated by the comb-shaped electrode 21, the liquid dropping device 31 is provided above the piezoelectric substrate 11, and the position is opposed to the grooved portion of the piezoelectric substrate 11. A liquid dripping device 32 is provided at an upper position at the intersection of the propagation paths of the surface acoustic waves generated by the comb-shaped electrodes 22 and 23 arranged at the same position, and at a position facing the groove portion of the piezoelectric substrate 11. A liquid dropping device 33 is provided at an upper position at the intersection of the propagation paths of the surface acoustic waves generated by the comb electrodes 24 and 25 arranged.

  These liquid dropping devices 31, 32, and 33 have a function of dropping a liquid onto the surface acoustic wave propagation path at an arbitrary amount or an arbitrary amount of mixing ratio at an arbitrary timing. For the liquid dropping devices 31, 32, 33, elements such as electromagnetic valves, diaphragm valves, ink jet elements, electroosmotic flow pumps, and the like may be used.

  The liquid dropping device 32 is at the intersection of the propagation paths of the surface acoustic waves generated by the comb-shaped electrodes 22 and 23, and the liquid dropping device 32 is at the intersection of the propagation paths of the surface acoustic waves generated by the comb-shaped electrodes 24 and 25. Although it is arranged so that the liquid can be dropped, it is not necessarily limited to this form. For example, an arbitrary path on the propagation path of the surface acoustic wave generated by the four sets of comb-shaped electrodes 22, 23, 24, 25 is used. You may provide four sets of liquid dripping apparatuses so that a liquid can be dripped at a point.

  Next, the operation of the ultrasonic atomizer using the surface acoustic wave element will be described.

  In this ultrasonic atomizing device, first, the liquid to be atomized is dropped from the liquid dropping devices 32 and 33 onto the surface of the piezoelectric substrate 11 in a desired amount or an arbitrary mixing ratio. Thereafter, a high-frequency signal is applied from the high-frequency power source to the comb-shaped electrodes 22, 23, 24, and 25 to generate surface acoustic waves. All the surface acoustic waves generated from the comb-shaped electrodes 22 to 25 propagate toward the groove-shaped portion of the piezoelectric substrate 11. At this time, liquid drop devices 32 and 33 are provided near the intersection of the propagation paths of the surface acoustic waves generated by the comb-shaped electrodes 22 and 23 and near the intersection of the propagation paths of the surface acoustic waves generated by the comb-shaped electrodes 24 and 25, respectively. Since liquids to be atomized are dropped, these liquids are atomized by receiving the energy of the surface acoustic wave. The atomized liquid is collected by an appropriate mechanism (not shown) such as a fan or a pump, and is output to the outside of the ultrasonic atomizer.

Subsequently, an appropriate amount of cleaning liquid is dropped from the liquid dropping device 31 onto the surface of the piezoelectric substrate 11. As the cleaning liquid, a solvent capable of dissolving the liquid to be atomized dropped on the surface of the piezoelectric substrate 11, for example, a liquid such as water, methanol, ethanol, acetone, chloroform, benzene, and toluene is appropriately selected and used. Good After dripping the cleaning liquid, a high frequency signal is applied to the comb-shaped electrode 31 from a high frequency power source to generate surface acoustic waves. The surface acoustic wave generated by the comb-shaped electrode 31 propagates along the groove-shaped portion of the piezoelectric substrate 11. At this time, since the cleaning liquid is dropped on the propagation path, the cleaning liquid is atomized by receiving the energy of the surface acoustic wave. The atomized cleaning liquid is collected by an appropriate mechanism (not shown) such as a fan or a pump, and is discharged to the outside of the ultrasonic atomizer.

  At this time, even if the liquid to be atomized previously dropped from the liquid dropping devices 32 and 33 remains on the surface of the piezoelectric substrate 11, it is dissolved by the cleaning liquid and atomized together with the cleaning liquid by the energy of the surface acoustic wave. Therefore, the surface of the piezoelectric substrate 11 is cleaned.

  By appropriately adjusting the design conditions of the comb-shaped electrodes 21 to 25 and the frequency of the high-frequency signal applied from the high-frequency power source, the surface acoustic wave energy generated in the comb-shaped electrodes 21 to 25 is used to adjust the liquid. In addition to atomizing the liquid, it is possible to cause the liquid to flow along the propagation direction of the surface acoustic wave. After the cleaning liquid is dropped from the liquid dropping device 31 by using the flow of the liquid, the cleaning liquid is made to flow along the groove-shaped portion by the energy of the surface acoustic wave generated by the comb-shaped electrode 21, and to the outside of the piezoelectric substrate 11. And may be discharged. At this time, even if the liquid to be atomized dropped from the liquid dropping devices 32 and 33 remains on the surface of the piezoelectric substrate 11, it is dissolved by the cleaning liquid and flows with the cleaning liquid by the energy of the surface acoustic wave. Since it is discharged to the outside, the surface of the piezoelectric substrate 11 is cleaned.

  Therefore, according to the above embodiment, the liquid to be atomized is dropped from the liquid dropping devices 32 and 33, and the liquid is atomized using the surface acoustic waves generated from the comb electrodes 22 to 25. Thereafter, the operation of alternately cleaning the surface of the piezoelectric substrate 11 by dropping the cleaning liquid from the liquid dropping device 31 and atomizing or flowing the cleaning liquid by the surface acoustic wave generated from the comb-shaped electrode 21 is performed. Thus, it is possible to keep the surface of the piezoelectric substrate 11 clean and atomize without causing contamination even when another liquid is dropped from the liquid dropping devices 32 and 33.

(Second Embodiment: Corresponding to Invention of Claim 2)
FIGS. 2A and 2B are a perspective view and a plan view for explaining a second embodiment of the ultrasonic atomizing apparatus using the surface acoustic wave element according to the present invention.

  Compared with the ultrasonic atomizing device shown in FIG. 1, the ultrasonic atomizing device of this embodiment is arranged along the groove-shaped portion of the piezoelectric substrate 11 instead of deleting the comb-shaped electrode 21 and the liquid dropping device 31. The difference is that a kerf 41 is provided. The kerf 41 is formed on the piezoelectric substrate 11 by appropriately selecting a known technique such as machining, cutting, lithography, etching, or the like.

  In this ultrasonic atomizing device, first, the liquid to be atomized is dropped from the liquid dropping devices 32 and 33 onto the surface of the piezoelectric substrate 11 in a desired amount or an arbitrary mixing ratio. Thereafter, surface acoustic waves are generated from the comb-shaped electrodes 22 to 25, and the liquid to be atomized dropped from the liquid dropping devices 32 and 33 is atomized by the energy of the surface acoustic waves.

  After the liquid dropped from the liquid dropping devices 32 and 33 is atomized, a cleaning liquid for cleaning the surface of the piezoelectric substrate 11 is applied to the piezoelectric substrate 11 using a pump, a syringe (not shown) or the like as necessary. It introduce | transduces into the surface and flows the kerf 41 as a flow path. As a result, even if the liquid dropped from the liquid dropping devices 32 and 33 remains on the surface of the piezoelectric substrate 11, it is dissolved by the cleaning liquid flowing in the kerf 41 and discharged to the outside of the piezoelectric substrate 11. The surface of the substrate 11 is cleaned. Alternatively, the groove 41 may be used as it is as the cleaning liquid flow path without using the groove 41.

  Therefore, according to this embodiment, the liquid to be atomized is dropped from the liquid dropping devices 32 and 33 and is atomized by the surface acoustic waves generated from the comb electrodes 22 to 25. Thereafter, by repeatedly performing an operation such as flowing the cleaning liquid into the kerf 41 to clean the surface of the piezoelectric substrate 11, the surface of the piezoelectric substrate 11 is kept clean, and another liquid is newly supplied from the liquid dropping devices 32 and 33. Even when dripping, it can be atomized without causing contamination. In addition, unlike the ultrasonic atomizer shown in FIG. 1, the surface of the piezoelectric substrate 11 is cleaned by flowing a cleaning liquid through the kerf 41, so that the cleaning liquid can be easily collected, and the cleaning liquid is in the vicinity of the piezoelectric substrate 11. Can be prevented from spreading to

(Third Embodiment: Corresponding to Invention of Claim 3)
FIG. 3A is a perspective view for explaining a third embodiment of an ultrasonic atomizing device using a surface acoustic wave element according to the present invention, and FIG. 3B is an AA line in FIG. FIG.

  In this ultrasonic atomizing apparatus, comb-shaped electrodes 21, 22, 23, 24, and 25 are provided on the inner surface of a cylindrical piezoelectric substrate 12 in the same positional relationship as in FIG. Among these, the comb-shaped electrode 21 is provided at a position where the surface acoustic wave generated from the comb-shaped electrode 21 is propagated in a direction perpendicular to the cylindrical direction, and the comb-shaped electrodes 22 to 25 are the corresponding electrodes. The surface acoustic waves generated from 22 to 25 are provided at positions that propagate in the cylindrical direction.

  The comb electrodes 22, 23, 24, and 25 are cylindrical piezoelectric substrates as long as the propagation direction of the generated surface acoustic waves intersects the propagation direction of the surface acoustic waves generated by the comb electrode 21. Any number may be provided at any position on the inner surface of the twelve.

  A liquid dropping device 31 is provided on the propagation path of the surface acoustic wave generated by the comb-shaped electrode 21 so as to penetrate from the upper position outside to the inside of the piezoelectric substrate 12. Similarly, the intersection part of the propagation paths of the surface acoustic waves generated by the comb-shaped electrodes 22 and 23 in the opposing relation and the intersection part of the propagation paths of the surface acoustic waves generated by the comb-shaped electrodes 24 and 25 in the same opposing relation. The liquid dropping devices 32 and 33 are provided so as to penetrate from the upper position outside the piezoelectric substrate 12 to the inside.

  In the ultrasonic atomizer shown in FIG. 3, the piezoelectric substrate 12 itself has a cylindrical shape. However, in the ultrasonic atomizer of the third embodiment of the present invention and the fourth embodiment described later, the invention is not limited to the embodiment shown in FIG. 3 and FIG. A piezoelectric substrate processed so as to have a through-hole serving as a continuous surface can also be used as the cylindrical piezoelectric substrate 12. For example, the cylindrical piezoelectric substrate 12 may be a piezoelectric substrate obtained by hollowing a through hole having a circular or elliptical cross section in a rectangular parallelepiped piezoelectric material. In the ultrasonic atomizer of the third embodiment of the present invention and the fourth embodiment described later, the “piezoelectric substrate formed of a piezoelectric material so as to form a cylindrical shape” means that the cylindrical inner surface is made of a piezoelectric material. What is necessary is just to be comprised, and it is not limited to embodiment shown by FIG.3 and FIG.4.

  Next, the operation of the ultrasonic atomizer using the surface acoustic wave element in this embodiment will be described.

  In this ultrasonic atomizer, first, a desired amount of liquid to be atomized is dropped from the liquid dropping devices 32 and 33 onto the inner surface of the cylindrical piezoelectric substrate 12. After that, surface acoustic waves are generated from the comb-shaped electrodes 22, 23, 24, 25, and the liquid to be atomized dropped from the liquid dropping devices 32, 33 is atomized by the energy of the surface acoustic waves. The atomized liquid is collected by an appropriate mechanism (not shown) such as a fan or a pump, and is output from the opening of the cylindrical piezoelectric substrate 12 to the outside of the ultrasonic atomizer.

  Subsequently, an appropriate amount of cleaning liquid is dropped from the liquid dropping device 31 onto the inner surface of the piezoelectric substrate 12. After the cleaning liquid is dropped, a high-frequency signal is applied from the high-frequency power source to the comb electrode 31 to generate a surface acoustic wave and propagate in a direction perpendicular to the cylindrical surface of the piezoelectric substrate 12. The cleaning liquid dropped on the propagation path is atomized by the energy of the surface acoustic wave. The atomized cleaning liquid is collected by an appropriate mechanism (not shown) such as a fan or a pump, and is discharged to the outside of the ultrasonic atomizer.

At this time, even if the liquid previously dropped from the liquid dropping devices 32 and 33 remains on the inner surface of the piezoelectric substrate 12, it is dissolved by the cleaning liquid and atomized together with the cleaning liquid by the energy of the surface acoustic wave. The inner surface of the substrate 12 is cleaned. Further, after the cleaning liquid is dropped from the liquid dropping device 31, the cleaning liquid is caused to flow in a direction perpendicular to the cylindrical direction by the energy of the surface acoustic waves generated by the comb-shaped electrode 21, thereby By discharging to the outside of 12, the inner surface of the piezoelectric substrate 12 on which the liquid has been dropped can be cleaned.

  Therefore, according to this embodiment, the liquid to be atomized is dropped from the liquid dropping devices 32 and 33, and the liquid is atomized by the surface acoustic waves generated from the comb-shaped electrodes 22, 23, 24 and 25. Thereafter, the cleaning liquid is dropped from the liquid dropping device 31 and the cleaning liquid is atomized or flowed by the surface acoustic wave from the comb-shaped electrode 21 to alternately clean the inner surface of the piezoelectric substrate 12. Thus, the inner surface of the piezoelectric substrate 12 can be kept clean and can be atomized without causing contamination even when another liquid is dropped from the liquid dropping devices 32 and 33. In addition, unlike the ultrasonic neutralizing apparatus shown in FIGS. 2 and 2, the atomized liquid and the cleaning liquid can be taken out from the opening of the cylindrical piezoelectric substrate 12, and the outside of the ultrasonic neutralizing apparatus. Easy to output and discharge.

(Fourth embodiment: corresponding to the invention according to claim 4)
FIG. 4A is a perspective view for explaining a fourth embodiment of an ultrasonic atomizing device using the surface acoustic wave element according to the present invention, and FIG. 4B is an AA line in FIG. FIG.

  The ultrasonic atomizing device according to this embodiment is an inner surface of the piezoelectric substrate 12 instead of removing the comb-shaped electrode 21 and the liquid dropping device 31 as compared with the ultrasonic atomizing device shown in FIG. The difference is that a kerf 42 is provided along the region where the liquid is dropped from the liquid dropping devices 32 and 33.

  In this ultrasonic atomizer, first, a desired amount of liquid to be atomized is dropped from the liquid dropping devices 32 and 33 onto the inner surface of the cylindrical piezoelectric substrate 12. After that, surface acoustic waves are generated from the comb-shaped electrodes 22, 23, 24, 25, and the liquid to be atomized dropped from the liquid dropping devices 32, 33 is atomized by the energy of the surface acoustic waves.

  After the liquid dropped from the liquid dropping devices 32 and 33 is atomized as described above, a cleaning liquid for cleaning the inner surface of the piezoelectric substrate 12 is used using a pump or a syringe (not shown) as necessary. Then, it is introduced into the inner surface of the piezoelectric substrate 12, and the kerf 42 is flowed as a channel. At this time, even if the liquid dropped from the liquid dropping devices 32 and 33 remains on the inner surface of the piezoelectric substrate 12, it is dissolved by the cleaning liquid flowing in the kerf 42 and discharged to the outside of the piezoelectric substrate 12. The inner surface of the substrate 12 is cleaned.

  Therefore, according to this embodiment, the liquid to be atomized is dropped from the liquid dropping devices 32 and 33 and the liquid is atomized by the surface acoustic waves from the comb-shaped electrodes 22 to 25. The inner surface of the piezoelectric substrate 12 is alternately washed to clean the inner surface of the piezoelectric substrate 12 so that the inner surface of the piezoelectric substrate 12 can be kept clean and when another liquid is dropped from the liquid dropping devices 32 and 33. It is possible to atomize without causing contamination. Further, similarly to the ultrasonic nulling apparatus shown in FIG. 3, the atomized liquid and the cleaning liquid can be taken out from the opening of the cylindrical piezoelectric substrate 12, and output to the outside of the ultrasonic nulling apparatus. And easy to discharge.

(Fifth embodiment: corresponding to the invention according to claim 5)
FIGS. 5A and 5B are a perspective view and a plan view for explaining a fifth embodiment of the ultrasonic atomizer using the surface acoustic wave element according to the present invention.

  The ultrasonic atomization apparatus according to this embodiment has a comb-shaped electrode in such a positional relationship that the generated surface acoustic wave propagates toward the bottom of the concave portion of the piezoelectric base 13 having a hemispherical concave surface. 21, 22, and 23 are provided. On the propagation path of the surface acoustic waves generated by the comb-shaped electrodes 21, 22, and 23, liquid dropping devices 31, 32, and 33 are disposed on the piezoelectric substrate 13, respectively. Further, a drainage port 43 penetrating the piezoelectric substrate 13 is provided at the lowermost bottom portion of the concave surface portion of the piezoelectric substrate 13.

  For the comb-shaped electrodes 21, 22, and 23, if the propagation direction of the generated surface acoustic wave matches the propagation direction of the surface acoustic wave in the concave portion of the piezoelectric substrate 13, the concave surface portion of the piezoelectric substrate 13 Any number may be provided at any position.

  Next, the operation of the ultrasonic atomizer according to this embodiment will be described. In this ultrasonic atomizing device, first, the liquid to be atomized is dropped on the concave surface portion of the piezoelectric substrate 13 from the liquid dropping devices 31, 32, 33, and the elasticity generated by the comb electrodes 21, 22, 23 is generated. The liquid is atomized by the energy of the surface wave. The atomized liquid is collected by an appropriate mechanism (not shown) such as a fan or a pump, and is output from the concave portion of the piezoelectric substrate 13 to the outside of the ultrasonic atomizer.

  After the liquid dropped from the liquid dropping devices 31, 32, 33 is atomized, a cleaning liquid for cleaning the concave surface portion of the piezoelectric substrate 13 is piezoelectric using a pump or a syringe (not shown) as necessary. After being introduced onto the concave portion of the substrate 13 and cleaning the concave portion, it is discharged out of the piezoelectric substrate 13 through the drainage port 43. At this time, even if the liquid dropped from the liquid dropping devices 31, 32, 33 remains on the concave surface portion of the piezoelectric substrate 13, it is dissolved by the cleaning liquid and discharged from the drainage port 43 to the outside of the piezoelectric substrate 13. The concave surface of the piezoelectric material 13 is cleaned.

  Therefore, according to this embodiment, the liquid to be atomized is dropped from the liquid dropping devices 31, 32, 33, and the liquid is atomized by the surface acoustic waves from the comb-shaped electrodes 21, 22, 23. Even when another liquid is dropped from the liquid dropping devices 31, 32, and 33 by alternately performing the operation of introducing the cleaning liquid into the concave surface portion and performing the cleaning, the concave surface portion of the piezoelectric substrate 13 is kept clean. It is possible to atomize without causing contamination. Further, the atomized liquid is output from the concave surface portion of the piezoelectric substrate 13 to the outside of the ultrasonic atomizer, and the cleaning liquid used for cleaning the concave surface portion of the piezoelectric substrate 13 passes through the drainage port 43 to the outside of the piezoelectric material 13. Therefore, the atomized liquid and the cleaning liquid can be prevented from being mixed with each other, and only the atomized liquid can be efficiently taken out.

  DESCRIPTION OF SYMBOLS 11, 12, 13 ... Piezoelectric base | substrate, 21, 22, 23, 24, 25 ... Comb-shaped electrode, 31, 32, 33 ... Liquid dripping apparatus, 41, 42 ... Cut groove, 43 ... Drainage port.

Claims (6)

A piezoelectric substrate formed of a piezoelectric material so as to have at least a groove-shaped portion;
A plurality of comb-shaped electrodes which are formed at positions facing the groove-shaped portion of the upper surface portion of the piezoelectric substrate and the direction sandwiching the groove-shaped portion, and which respectively generate high-frequency signals and generate surface acoustic waves;
A plurality of liquid dropping devices for dropping droplets on the propagation path of the surface acoustic wave generated by the plurality of comb-shaped electrodes;
A liquid to be atomized is dropped from a liquid dropping device corresponding to at least one comb-shaped electrode formed at a position facing the groove-shaped portion among the plurality of liquid dropping devices, and the comb-shaped electrode The liquid is atomized by the generated surface acoustic wave, and after the liquid is atomized, the cleaning liquid is dropped from a liquid dropping device corresponding to at least one comb-shaped electrode formed in at least the groove-shaped portion, and generated at the comb-shaped electrode. An ultrasonic atomizing device using a surface acoustic wave element, characterized in that the cleaning liquid is atomized or fluidized by a surface acoustic wave and discharged along the groove-shaped portion. In the ultrasonic atomization apparatus using the surface acoustic wave element according to claim 1,
Instead of removing the comb-shaped electrode formed on the groove-shaped portion of the upper surface portion of the piezoelectric substrate and the liquid dropping device corresponding to the comb-shaped electrode, a cut groove is provided along the groove-shaped portion,
A liquid to be atomized is dropped from a liquid dropping device corresponding to at least one comb-shaped electrode formed in a position facing the groove-shaped portion, and is atomized by a surface acoustic wave generated by the comb-shaped electrode. An ultrasonic atomizing device using a surface acoustic wave element, wherein the cleaning liquid is made to flow along the kerf after the liquid is atomized. A piezoelectric substrate formed of a piezoelectric material so as to form a cylindrical shape;
A plurality of comb-shaped electrodes that are formed in a direction perpendicular to the cylindrical direction of the piezoelectric substrate and in a cylindrical direction, and each receive a high-frequency signal and generate a surface acoustic wave;
A plurality of liquid dropping devices for dropping droplets on the propagation path of the surface acoustic wave generated by the plurality of comb-shaped electrodes;
Among the plurality of liquid dropping devices, a liquid to be atomized is dropped from a liquid dropping device corresponding to at least one comb-shaped electrode formed in the cylindrical direction, and surface acoustic waves generated by the comb-shaped electrode are dropped. Elasticity generated at the comb electrode by atomizing the cleaning liquid from a liquid dropping device corresponding to at least one comb electrode formed in a direction orthogonal to the cylindrical direction after atomization of the liquid A surface acoustic wave element is used, wherein the cleaning liquid is atomized or fluidized by a surface wave and discharged to the outside along a lowermost cylindrical surface in a direction orthogonal to a cylindrical direction of the piezoelectric substrate. Ultrasonic atomizer. In the ultrasonic atomizer using the surface acoustic wave element according to claim 3,
Instead of removing the comb-shaped electrode formed in the direction orthogonal to the cylindrical direction of the piezoelectric substrate and the liquid dropping device corresponding to the comb-shaped electrode, the lowermost cylinder in the direction orthogonal to the cylindrical direction A kerf is provided along the surface,
The liquid to be atomized is dropped from at least one liquid dropping device corresponding to the comb-shaped electrode formed in the cylindrical direction, and atomized by the surface acoustic wave generated by the comb-shaped electrode, and the liquid is atomized. An ultrasonic atomizing device using a surface acoustic wave element, wherein the cleaning liquid is made to flow along the kerf later. A piezoelectric substrate formed of a piezoelectric material so as to have a hemispherical concave portion;
A plurality of comb-shaped electrodes that are formed toward the bottom of the concave surface portion of the piezoelectric substrate and generate a surface acoustic wave in response to a high-frequency signal;
A plurality of liquid dropping devices for dropping droplets on a propagation path of surface acoustic waves generated by the plurality of comb-shaped electrodes;
A drainage port penetrating the bottom of the concave portion of the piezoelectric substrate,
A liquid to be atomized is dropped from a liquid dropping device corresponding to at least one comb-shaped electrode among the plurality of liquid dropping devices, and is atomized by a surface acoustic wave generated by the comb-shaped electrode. An ultrasonic atomizing device using a surface acoustic wave element, wherein the cleaning liquid is made to flow from the drainage port along the concave surface portion of the piezoelectric substrate after conversion.   The atomization of the liquid dropped from the liquid dropping device and the supply of the cleaning liquid are alternately performed so that the odor of the newly dropped liquid is not mixed with the odor of the previously dropped liquid. An olfactory display using the ultrasonic atomizer according to any one of claims 1 to 5.

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