JP2012192377A - Ultrasonic atomizer using surface acoustic wave element - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ultrasonic atomizer capable of continuously atomizing a plurality of kinds of liquid without having them mixed while having a mechanism for automatically washing a region where liquid has dripped.SOLUTION: The ultrasonic atomizer continuously atomizes the plurality of kinds of liquid without having them mixed while keeping clean the region where liquid drips by alternately performing the operation of dropping the liquid to be atomized and atomizing the liquid by surface acoustic waves and the operation of carrying out washing by dropping a washing liquid and atomizing the washing liquid or causing the flow of the washing liquid by surface acoustic waves.

Description

  The present invention relates to an ultrasonic atomizer using a surface acoustic wave element.

  BACKGROUND ART A surface acoustic wave element that generates a surface acoustic wave on a substrate and receives the surface acoustic wave generated on the substrate is well known.

  A surface acoustic wave is an elastic wave that concentrates and propagates much of its energy on the surface of a material, unlike longitudinal and transverse waves called normal bulk waves. Examples of surface acoustic waves include Rayleigh waves, Sezawa waves, pseudo Sezawa waves, Love waves, and the like.

  The most well-known structure among surface acoustic wave elements is a planar surface acoustic wave element. In a planar type surface acoustic wave device, a pair of comb-shaped electrodes are provided on a flat piezoelectric material disposed on a flat substrate. When a high frequency is applied to the comb electrode, a surface acoustic wave is generated and propagates on the surface of the piezoelectric material.

  One example of application of such a planar surface acoustic wave element is an ultrasonic atomizing device that atomizes a liquid using surface acoustic waves.

  As an example of an ultrasonic atomizer, a high frequency is applied to a comb-shaped electrode to generate a surface acoustic wave to propagate the surface of a piezoelectric material, and a droplet is dropped on the propagation path of the surface acoustic wave to generate elasticity. There is an apparatus that transmits surface wave energy to a droplet, thereby atomizing and flying the droplet (see Patent Document 1).

  By using such an ultrasonic atomizer, various liquids such as water, aqueous solution, organic liquid, oil, various treatment liquids, chemical liquids, inks, and odorous substances are converted into fine particles having a particle diameter of about several tens to several hundreds of micrometers Can be atomized. Such an ultrasonic atomizer can obtain fine particles having a smaller particle diameter as compared with a conventional ink jet method, and can easily atomize even a volatile liquid. It is expected to be applied to a wide range of applications such as surface treatment devices, printers, medical equipment, and odor regenerating devices.

Japanese Patent Laid-Open No. 11-114467

Monthly Display September 2010 Issue Vo; 9, pp. 72-79 (ISSN 1341-3961)

  However, when a plurality of types of liquids are continuously atomized with such an ultrasonic atomizer, different types of liquids are dropped when another type of liquid is dropped while the previously dropped liquid remains. There is concern over the occurrence of a phenomenon in which the liquid is atomized simultaneously (hereinafter abbreviated as “contamination”). In particular, considering the application of an ultrasonic atomizer as an odor regenerator, if contamination occurs, it will be atomized in a state where multiple odor substances are mixed together, and the desired odor can be reproduced. Not preferable. In order to prevent contamination, it is necessary to provide a mechanism that mechanically cleans or wipes the area where the liquid has been dropped after the liquid has been dropped and atomized. It is expected to become.

  The present invention has been made to solve the above-described problems, and is an ultrasonic atomizing device having a mechanism for automatically cleaning a region where a liquid has been dropped. It is characterized by atomizing a plurality of types of liquid while preventing nation.

  The invention corresponding to claim 1 of the present invention includes at least two sets of comb-shaped electrodes provided on the surface of the piezoelectric material and liquids at approximately the same location on the propagation path of the surface acoustic wave generated by the comb-shaped electrodes. A pair of liquid dropping devices for dropping droplets, and from one of the two sets of liquid dropping devices, a cleaning liquid for cleaning a portion where the droplets are dropped is dropped. This is an ultrasonic atomizer.

  In the invention corresponding to claim 2, at least two sets of comb-shaped electrodes provided on the surface of the piezoelectric material, and droplets at different locations on the propagation path of the surface acoustic wave generated by the comb-shaped electrodes are provided. A pair of liquid dropping devices for dropping, and a cleaning liquid for cleaning the surface of the piezoelectric material is dropped from one of the two sets of liquid dropping devices. An ultrasonic atomizing device.

  According to a third aspect of the present invention, at least two sets of comb electrodes provided on the surface of the piezoelectric material and droplets at substantially the same location on the propagation path of the surface acoustic wave generated by the comb electrodes. Two sets of liquid dropping devices, and a cover for preventing fine particles from diffusing outside the device when the droplets are atomized into fine particles, and the two sets of liquid dropping devices One of the ultrasonic atomizers is characterized in that a cleaning liquid for cleaning a portion where the liquid droplets are dropped is dropped.

  In the invention corresponding to claim 4, at least two sets of comb-shaped electrodes provided on the surface of the piezoelectric material and droplets at different locations on the propagation path of the surface acoustic wave generated by the comb-shaped electrodes are provided. Two sets of liquid dropping devices for dripping, and a cover for preventing the fine particles from diffusing outside the device when the droplets are atomized to form fine particles. The ultrasonic atomizing device is characterized in that a cleaning liquid for cleaning the surface of the piezoelectric material is dropped from one of them.

  An invention corresponding to claim 5 is an odor reproducing apparatus using the ultrasonic atomizer according to any one of claims 1 to 4.

  According to the present invention, by using an ultrasonic atomizer equipped with a mechanism for cleaning an area where liquid has been dropped, a simple mechanism is used to continuously mist a plurality of types of liquid while preventing contamination. It becomes possible to make it. In particular, when the ultrasonic atomizing device described in the present invention is used as an odor regenerating device, it is possible to atomize and present a plurality of odorous substances continuously without mixing as compared with the conventional technology. become.

It is the perspective view and sectional drawing of the ultrasonic atomizer which concern on Embodiment 1 of this invention. It is sectional drawing of the ultrasonic atomizer which concerns on Embodiment 2 of this invention. It is the perspective view and sectional drawing of the ultrasonic atomizer which concern on invention of Embodiment 3 of this invention. It is sectional drawing of the ultrasonic atomizer which concerns on Embodiment 4 of this invention. It is sectional drawing of the ultrasonic atomizer which concerns on Embodiment 5 of this invention. It is sectional drawing of the ultrasonic atomizer which concerns on Embodiment 6 of this invention.

  Below, the structure and embodiment of the ultrasonic atomizer which concerns on this invention are demonstrated, referring drawings.

Embodiment 1

  Fig.1 (a) and FIG.1 (b) are the perspective views and sectional drawings of the ultrasonic atomizer which concern on Embodiment 1 of this invention, respectively. As shown in FIG. 1, the ultrasonic atomizer of the present invention has a structure in which comb-shaped electrodes 12 and 13 are provided on the surface of a piezoelectric material 11 cut into a flat plate shape. The piezoelectric material 11 is made of a material such as quartz, langasite, lithium niobate, lithium tantalate, or the like. The comb-shaped electrodes 12 and 13 are made of a metal material such as copper, silver, gold, platinum, or chromium, and are publicly known on the surface of the piezoelectric material 11 such as vapor deposition, sputtering, lithography, printing, and electroless plating. It is formed by combining techniques appropriately.

  The comb-shaped electrodes 12 and 13 are connected to high-frequency power sources 31 and 32 provided outside the piezoelectric material 11, respectively, and can generate surface acoustic waves and propagate the surface of the piezoelectric material 11. In FIG. 1, the comb electrodes 12 and 13 are provided so as to face each other on the piezoelectric material 11, but are not necessarily limited to this form. The direction in which the surface acoustic wave generated in the comb-shaped electrodes 12 and 13 propagates only needs to be designed to intersect on the piezoelectric material 11.

  In addition, liquid dropping devices 21 and 22 are provided in an upper part in a direction perpendicular to the piezoelectric material 11. The liquid dropping devices 21 and 22 have a function of dropping liquid onto the piezoelectric material 11 at an arbitrary amount and at an arbitrary timing. Further, the liquid dropped from the liquid dropping devices 21 and 22 may be dropped on the piezoelectric material 11 in the vicinity of an intermediate point between the comb electrode 12 and the comb electrode 13. For the liquid dropping devices 21 and 22, elements such as electromagnetic valves, diaphragm valves, ink jet elements, electroosmotic flow pumps, and the like may be used.

  Note that the liquid to be atomized is supplied from one of the liquid dropping devices 21 and 22, and the cleaning liquid for cleaning the region where the liquid is dropped on the piezoelectric material 11 is supplied from the other. As the cleaning liquid, a solvent capable of dissolving the liquid to be atomized, for example, water, methanol, ethanol, acetone, chloroform, benzene, toluene, and the like may be appropriately selected and used.

  As an example, consider a case where n-butanol is first dropped onto the piezoelectric material 11 from the liquid dropping device 22, then acetone is dropped as a cleaning liquid from the liquid dropping device 21, and butyl acetate is further dropped from the liquid dropping device 22.

  First, a desired amount of n-butanol is dropped on the piezoelectric material 11 from the liquid dropping device 22, and a high frequency is applied to the comb electrode 13 from the high frequency power supply 32. At this time, a surface acoustic wave is generated in the comb-shaped electrode 13. The surface acoustic wave propagates on the piezoelectric material 11 from the comb electrode 13 to the comb electrode 12. Since n-butanol is dripped on this propagation path, n-butanol is atomized by the energy of the surface acoustic wave.

  Next, an appropriate amount of acetone is dropped on the piezoelectric material 11 as a cleaning liquid from the liquid dropping device 21. A high frequency is applied to the comb-shaped electrode 12 from the high-frequency power source 31 to propagate a surface acoustic wave from the comb-shaped electrode 12 toward the comb-shaped electrode 13. Acetone is dripped on the propagation path and is atomized by the energy of the surface acoustic wave. At this time, even if n-butanol remains on the piezoelectric material 11, it is dissolved by acetone and atomized together with acetone by the energy of the surface acoustic wave, so that it can be expected that the piezoelectric material 11 is cleaned.

  The energy of the surface acoustic waves generated in the comb electrodes 12 and 13 is utilized by appropriately adjusting the design of the comb electrodes 12 and 13 or the frequency of the high frequency applied from the high frequency power sources 31 and 32. In addition to atomizing the liquid, it is possible to cause the liquid to flow along the propagation direction of the surface acoustic wave. Using this, for example, n-butanol dropped from the liquid dropping device 22 is atomized by the surface acoustic wave energy generated by the comb electrode 13, and acetone dropped from the liquid dropping device 21 is generated by the comb electrode 12. The piezoelectric material 11 may be cleaned by flowing by the energy of the surface acoustic wave, moving on the piezoelectric material 11 from the comb electrode 12 toward the comb electrode 13, and discharging the piezoelectric material 11 to the outside as it is. .

  Thereafter, a desired amount of butyl acetate is dropped from the liquid dropping device 22 onto the piezoelectric material 11. When a high frequency is applied to the comb electrode 13 from the high frequency power supply 32 and a surface acoustic wave is propagated from the comb electrode 13 toward the comb electrode 12, butyl acetate is atomized by the energy of the surface acoustic wave. At this time, since the piezoelectric material 11 is cleaned by the dropping of the acetone, the butyl acetate does not contaminate the previously atomized n-butanol, and neat pure butyl acetate. Is possible.

  In this way, the liquid to be atomized is dropped from the liquid dropping device 22 and the liquid is atomized by the surface acoustic wave from the comb-shaped electrode 13. The cleaning liquid is dropped from the liquid dropping device 21 to remove the liquid from the comb-shaped electrode 12. By alternately performing the operation of cleaning the piezoelectric material 11 by atomizing or flowing the cleaning liquid by the surface acoustic wave, the piezoelectric material 11 is kept clean and the liquid dropped from the liquid dropping device 22 is contaminated. It becomes possible to atomize without causing a nation.

Embodiment 2

  FIG. 2 is a cross-sectional view of an ultrasonic atomizer according to Embodiment 2 of the present invention. In the ultrasonic atomizer shown in FIG. 2, compared to the ultrasonic atomizer shown in FIG. 1, the liquid dropping devices 21 and 22 are provided closer to the comb electrodes 12 and 13, respectively. Is different.

  Also in the ultrasonic atomizer shown in FIG. 2, the liquid to be atomized is dropped from the liquid dropping device 22, and the liquid is atomized by the surface acoustic wave from the comb-shaped electrode 13. The operation of alternately dropping and washing the piezoelectric material 11 by atomizing or flowing the cleaning liquid by the surface acoustic wave from the comb-shaped electrode 12 is the same as that of the ultrasonic atomizing apparatus of FIG. . However, since the liquid dropping devices 21 and 22 are provided closer to the comb electrode 12 and the comb electrode 13, respectively, the energy of the surface acoustic wave generated in the comb electrode 12 and the comb electrode 13 is respectively It is possible to efficiently transmit the cleaning liquid dropped from the liquid dropping device 21 and the liquid to be atomized dropped from the liquid dropping device 22 to reduce energy loss.

  In the ultrasonic atomizer of FIGS. 1 and 2, the liquid dropping devices 21 and 22 are provided in a direction perpendicular to the piezoelectric material 11, but it is not necessarily limited to this form. Arbitrary forms, for example, a form arranged in a direction parallel to the piezoelectric material 11, an oblique direction with respect to the piezoelectric material 11, etc., and a liquid to be atomized and a cleaning liquid can be dropped onto the piezoelectric material 11 (Not shown).

Embodiment 3

  FIGS. 3A and 3B are a perspective view and a cross-sectional view, respectively, of an ultrasonic atomizer according to Embodiment 3 of the present invention. The ultrasonic atomizer shown in FIG. 3 has a structure in which a cover 23 is provided on the piezoelectric material 11 in parallel with the piezoelectric material 11 in addition to the ultrasonic atomizer shown in FIG. is doing. The cover 23 is made of a material such as metal, resin, or ceramic, and is provided so as to cover the vicinity of a region where the liquid is dropped from the comb electrode 13 and the liquid dropping device 22 in the piezoelectric material 11. Further, as shown in FIG. 3, the cover 23 may have a notch 24 or an opening (not shown) through which the liquid dropping devices 21 and 22 penetrate.

  Also in the ultrasonic atomizer shown in FIG. 3, the liquid to be atomized is dropped from the liquid dropping device 22 and the liquid is atomized by the surface acoustic wave from the comb-shaped electrode 13. The ultrasonic atomizing apparatus shown in FIGS. 1 and 2 alternately performs the operation of dropping and cleaning the piezoelectric material 11 by atomizing or flowing the cleaning liquid by the surface acoustic wave from the comb electrode 12. It is the same. However, in the piezoelectric material 11, the comb-shaped electrode 13 and the vicinity of the region where the liquid is dropped from the liquid dropping device 22 are covered with the cover 23, so the liquid dropped from the liquid dropping device 22 is the comb-shaped electrode 13. The cleaning liquid dropped from the liquid dropping device 21 is covered with the cleaning liquid dropped from the liquid dropping device 21 even if atomized by the surface acoustic wave from the comb-shaped electrode 12. Since 23 exists, it can prevent spreading outside the apparatus. Thereby, it is possible to efficiently atomize only the liquid to be atomized that is dropped from the liquid dropping device 22 and to diffuse the liquid to the outside of the device. At this time, if an exhaust device (not shown) or the like is provided between the piezoelectric material 11 and the cover 23, the cleaning liquid dropped from the liquid dropping device 21 is more reliably atomized and diffused to the outside of the device. Can be prevented.

Embodiment 4

  In the ultrasonic atomizing apparatus according to the third embodiment shown in FIG. 3, the liquid dropping apparatuses 21 and 22 are provided in the upper part in the direction perpendicular to the piezoelectric material 11, but are not necessarily limited to this form. The liquid dripping devices 21a and 22a are arranged in a direction parallel to the piezoelectric material 11 as shown in FIG. You may have a form which can be dripped on.

Embodiment 5

  FIG. 5 is a cross-sectional view of an ultrasonic atomizer according to Embodiment 5 of the present invention. In the ultrasonic atomizer shown in FIG. 5, compared to the ultrasonic atomizer according to Embodiment 3 shown in FIG. 3, the liquid dropping devices 21 and 22 are closer to the comb electrodes 12 and 13, respectively. The only difference is that only the liquid dropping device 22 passes through a notch 24 provided in the cover 23.

  Also in the ultrasonic atomizer shown in FIG. 5, the liquid to be atomized is dropped from the liquid dropping device 22, and the liquid is atomized by the surface acoustic wave from the comb-shaped electrode 13. The ultrasonic fogging of FIGS. 1, 2 and 3 is performed alternately by dropping and cleaning the piezoelectric material 11 by atomizing or flowing the cleaning liquid by the surface acoustic wave from the comb-shaped electrode 12. This is the same as the conversion device. However, since the liquid dropping devices 21 and 22 are provided closer to the comb electrode 12 and the comb electrode 13, respectively, the energy of the surface acoustic wave generated in the comb electrode 12 and the comb electrode 13 is respectively It is possible to efficiently transmit the cleaning liquid dropped from the liquid dropping device 21 and the liquid to be atomized dropped from the liquid dropping device 22 to reduce energy loss.

  Also, in the ultrasonic atomizer of FIG. 5, the liquid dropping device 22 is dropped by appropriately adjusting the design of the comb-shaped electrodes 12 and 13 or the high-frequency frequency applied from the high-frequency power sources 31 and 32. The liquid is atomized by the surface acoustic wave energy generated by the comb-shaped electrode 13, and the cleaning liquid dropped from the liquid dropping device 21 is flowed by the surface acoustic wave energy generated by the comb-shaped electrode 12 to the outside of the piezoelectric material 11. It may be discharged. With such a design, it is possible to efficiently atomize only the liquid to be atomized from the liquid dripping device 22 and diffuse it to the outside of the device.

Embodiment 6

  In the ultrasonic atomizing apparatus according to the fifth embodiment shown in FIG. 5, the liquid dropping apparatuses 21 and 22 are provided in the upper part in the direction perpendicular to the piezoelectric material 11, but are not necessarily limited to this form. The liquid dropping devices 21b and 22b are arranged in a direction parallel to the piezoelectric material 11 and are to be atomized as shown in any form, for example, FIGS. 6 (a) and 6 (b). The liquid and the cleaning liquid may have a form that can be dropped onto the piezoelectric material 11. At this time, a cover 23 may be disposed between the piezoelectric material 11 and the liquid dropping device 22b as shown in FIG. 6A, or the piezoelectric material 11 and the cover are covered as shown in FIG. 6B. A liquid dripping device 22 b may be disposed between the two.

  As described above, by using an ultrasonic atomizer equipped with a mechanism for cleaning a region where liquid is dropped, a simple mechanism is used to continuously atomize a plurality of types of liquid while preventing contamination. It becomes possible. The ultrasonic atomization apparatus shown in the above embodiment can be expected to be applied to a wide range of uses such as a surface treatment apparatus, a printing machine, a medical device, and an odor regenerating apparatus, and particularly when used as an odor regenerating apparatus. In comparison, it is possible to continuously atomize and present a plurality of odorous substances without mixing.

  DESCRIPTION OF SYMBOLS 11 ... Piezoelectric material 12, 13 ... Comb-shaped electrode 21, 21a, 21b, 22, 22a, 22b ... Liquid dropping device, 23 ... Cover, 24 ... Notch, 31, 32 ... High frequency power supply.

Claims (5)

  At least two sets of comb-shaped electrodes provided on the surface of the piezoelectric material and two sets of liquid dropping devices for dropping droplets at substantially the same location on the propagation path of the surface acoustic wave generated by the comb-shaped electrodes And an ultrasonic atomizing device in which a cleaning liquid for cleaning a portion where the droplet is dropped is dropped from one of the two sets of liquid dropping devices.   At least two sets of comb-shaped electrodes provided on the surface of the piezoelectric material, and two sets of liquid dropping devices for dropping droplets at different locations on the propagation path of the surface acoustic wave generated by the comb-shaped electrodes; The ultrasonic atomizing apparatus is characterized in that a cleaning liquid for cleaning the surface of the piezoelectric material is dropped from one of the two sets of liquid dropping apparatuses.   At least two sets of comb-shaped electrodes provided on the surface of the piezoelectric material and two sets of liquid dropping devices for dropping droplets at substantially the same location on the propagation path of the surface acoustic wave generated by the comb-shaped electrodes And a cover for preventing the fine particles from diffusing to the outside of the device when the droplets are atomized to form fine particles, and the droplets are dropped from one of the two sets of liquid dropping devices. An ultrasonic atomizing device, wherein a cleaning liquid for cleaning a portion to be cleaned is dropped.   At least two sets of comb-shaped electrodes provided on the surface of the piezoelectric material, and two sets of liquid dropping devices for dropping droplets at different locations on the propagation path of the surface acoustic wave generated by the comb-shaped electrodes; And a cover for preventing the fine particles from diffusing to the outside of the device when the droplets are atomized to form fine particles. From one of the two sets of liquid dropping devices, the surface of the piezoelectric material is An ultrasonic atomizing device, wherein a cleaning liquid for cleaning is dropped.   An odor regenerating apparatus using the ultrasonic atomizer according to claim 1.

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