JP2012170898A - Fluid mixing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a micromixer which is capable of uniformly mixing two or more kinds of fluids.SOLUTION: A fluid mixing apparatus includes a tank in which a first fluid and a second fluid are stored, a mixer, and a heat exchanger in which the tank storing the first fluid and the mixer are disposed or a heat exchanger in which the tank storing the second fluid and the mixer are disposed. The mixer comprises a minute tube-like duct 1 through which the first fluid is circulated, a minute tube-like duct 2 through which the second fluid is circulated, and a mixing section in which the first fluid and the second fluid are mixed. The heat exchanger comprises a minute tube-like duct 3 in which the first fluid or the second fluid is circulated in a liquid-tight state. A ratio [B/A] of a total volume (A) of the volume of the first fluid circulating in the liquid-tight state inside the minute tube-like duct 1 and the volume of the second fluid circulating in the liquid-tight state inside the minute tube-like duct 2 and a total volume (B) of the first fluid or the second fluid circulating in the liquid-tight state inside the minute tube-like duct 3 is 2 to 50.

Description

  The present invention provides a fluid mixing device, preferably a microtubular channel, which can be mixed uniformly even when mixing high-viscosity fluids or when mixing low-viscosity fluids and fluids whose viscosity is about 10 times higher than that fluid. The present invention relates to a fluid mixing apparatus having a micromixer.

  Various stationary mixers have been proposed for the purpose of mixing at least two kinds of fluids in a fine particle production process or a chemical reaction process by crystallization or the like. Among them, a micromixer that supplies a fluid to be mixed into a microchannel has been attracting attention as an efficient fluid mixing device.

  The micromixer has a mechanism for dividing at least two kinds of fluids into minute flows in a microchannel having a channel width of about 10 μm to 1000 μm and then mixing them. Since the fluid supplied into the micromixer is divided into fine flows, the diffusion distance is shortened and the mixing speed thereof is increased. Therefore, the fluid is efficiently mixed in a shorter time than a conventional static mixer.

  As a structure of the micromixer, for example, a mixer having a Y-shaped channel (Y-shaped micromixer) is known. The Y-shaped micromixer has a structure in which the flow path for flowing the first fluid and the flow path for flowing the second fluid on one plate are acute, that is, intersect with the Y shape to form one combined flow path. ing. The fluids supplied to the mixer merge in a laminar flow state at the intersection of the flow paths and are mixed by mutual diffusion.

  When a low-viscosity fluid and a fluid whose viscosity is about 10 times higher than that fluid (heteroviscous fluid) are circulated through the Y-shaped micromixer at the same flow rate, the pressure loss of the two types of fluids tends to be the same. That is, a fluid having a low viscosity has a high flow rate, and a use cross-sectional ratio of the microchannel is reduced. A high viscosity fluid has the same pressure loss by the reverse. When the viscosity difference is large to some extent, a fluid having a low viscosity flows in an extremely small cross section at a high flow velocity, which causes unstable flow such as intermittent feeding. For this reason, there is a problem that the fluid cannot be stably distributed and the fluid cannot be mixed uniformly. As described above, in the case of mutual diffusion of liquids in a microchannel, there is often no problem in mixing low viscosity, but there is a high possibility that a problem of lowering the mixing property is often generated in a heteroviscous fluid or a high viscosity fluid. .

  Other micromixers other than the Y-shaped micromixer include, for example, a plate on which fine channels (microtubular channels) through which the reactant A to be mixed flows and a fine channel through which the reactant B flows are formed. A stacked micromixer having a structure in which stacked plates are stacked is known (for example, see Patent Document 1). The fine channels of the stacked micromixer are arranged at an acute angle when viewed from the upper surface of the plate, and the fluids are joined and mixed in a merging chamber provided at the outlet of each fine channel.

  A micromixer (exit mixing type micromixer) provided with a stacked structure described in Patent Document 1 and a merging chamber for merging fluids is composed of two plates stacked one above the other. A flow path is formed, and each of the formed micro flow paths has a structure that crosses toward a mixing chamber that is a common outlet. In addition, the flow path width and depth are 250 μm or less, and are intended for fluids that are low in viscosity and easily mixed instantaneously, and are not mixers that are compatible with high viscosity fluids or heteroviscous fluids. Therefore, when high-viscosity fluid or heteroviscous fluid is circulated in the fluid mixing device using the mixer described in Patent Document 1, pressure loss, clogging, etc. may occur, making it difficult to circulate and possibly preventing sufficient mixing. is there.

JP-T 9-512742 (page 12, FIG. 3)

  An object of the present invention is to provide a fluid mixing apparatus that has good mixing efficiency and can be mixed evenly when mixing high-viscosity fluids or when mixing low-viscosity fluids and fluids that are about 10 times higher than the fluids. There is a thing.

  As a result of intensive studies to solve the above problems, the inventors of the present invention have a fluid mixer and a heat exchanger in which at least one of a plurality of fluids flows before flowing to the fluid mixer. The total fluid volume when the fluid circulates in the liquid crystal form in the microtubular channel of the heat exchanger is 2 with respect to the total fluid volume when the fluid circulates in the liquid form in the microtubular channel of the vessel. By using a mixing device in the range of ~ 50, mixing efficiency is good even when mixing high-viscosity fluids, or when mixing low-viscosity fluids and fluids whose viscosity is 10 times higher than that fluid, The inventors have found that they can be mixed uniformly and have completed the present invention.

That is, the present invention includes a tank for storing a first fluid, a tank for storing a second fluid, a mixer, and a heat exchanger or a second fluid in which at least the tank for storing the first fluid and the mixer are arranged. A fluid mixing device having any one of heat exchangers arranged in a tank and a mixer;
The mixer includes a microtubular channel 1 through which a first fluid flows in a liquid-tight manner, a microtubular channel 2 through which a second fluid flows in a liquid-tight manner, and a first tube discharged from the microtubular channel 1. A mixing section in which the fluid and the second fluid discharged from the microtubular channel 2 are mixed,
The heat exchanger has a microtubular channel 3 through which the first fluid or the second fluid flows in a liquid form,
Moreover, the total volume (A) of the volume of the first fluid that flows in a liquid-tight manner in the microtubular channel 1 and the volume of a second fluid that flows in a liquid-tight manner in the microtubular channel 2; The ratio [(B) / (A)] to the total volume (B) of the first fluid or the second fluid flowing in a liquid-tight manner in the microtubular channel 3 is 2-50. A fluid mixing apparatus is provided.

  The fluid mixing apparatus of the present invention has two different types of mixers, and the ratio of the fluid cross-sectional area of the fluid outlet portion in each mixer has a specific range. By setting the ratio of the fluid cross-sectional areas within this range, the fluid flowing through the micro flow channel is not affected by pressure loss, the flow velocity of the fluid can be increased, and the fluid becomes a turbulent flow, thereby improving the mixing efficiency. Therefore, the fluid mixing device of the present invention is particularly useful when mixing high-viscosity fluids or when mixing a low-viscosity fluid and a fluid having a significantly higher viscosity than that fluid.

The schematic diagram whole structure of a fluid mixing apparatus. The disassembled perspective view of the laminated body which a heat exchanger has. Schematic of the heat exchanger including the joint part of the heat exchanger. The disassembled perspective view which shows two types of plate structures in FIG. 1 is a schematic view of a micromixer 1 according to an embodiment. The disassembled perspective view of the laminated body which the micro mixer 1 has. The perspective view of the 1st plate which is a structural member of the micro mixer 1. FIG. The perspective view of the 1st plate of another example which is a structural member of the micro mixer 1. FIG. The perspective view of the 1st plate of another example which is a structural member of the micro mixer 1. FIG. The perspective view of the 1st plate of another example which is a structural member of the micro mixer 1. FIG. The perspective view of the 2nd plate which is a structural member of the micro mixer 1. FIG. The perspective view of the 2nd plate of another example which is a structural member of the micro mixer 1. FIG. Schematic of another example of the micromixer 1. The exploded perspective view of the laminated body which the micromixer 1 which has a plate provided with the flow path through which a heat exchange medium distribute | circulates has 1 is a schematic diagram of a micromixer 2 according to an embodiment. The disassembled perspective view of the laminated body which the micro mixer 2 has. The perspective view of the mixing plate which is a structural member of the micro mixer 2. FIG. The top view of the mixing plate which is a structural member of the micromixer 2. FIG. The perspective view of the temperature control plate which is a structural member of the micro mixer 2. FIG. The perspective view of the laminated body which the micro mixer 2 has. The schematic of the microtubular channel which a mixer has separately. The disassembled perspective view of the laminated body which a mixer has separately. Schematic conceptual diagram schematically showing the manufacturing apparatus used in Example 1 and Example 3. Schematic conceptual diagram schematically showing the manufacturing apparatus used in Example 2 Schematic conceptual diagram schematically showing the manufacturing apparatus used in Example 4

  The fluid mixing apparatus of the present invention is a heat exchanger in which a tank for separately containing a first fluid and a second fluid, a mixer for mixing the fluid, a tank for storing at least the first fluid, and a mixer are arranged. Or it has any one of the heat exchanger arrange | positioned with the tank and mixer which contain a 2nd fluid. For example, when mixing a low-viscosity fluid of about 1 to 5 mPa · S and a high-viscosity fluid of about 50 to 2000 mPa · S by using the fluid mixing apparatus of the present invention, a tank and a mixer for storing the low-viscosity fluid It is not necessary to arrange a heat exchanger between them. On the other hand, when mixing fluids with high viscosity using the fluid mixing apparatus of the present invention, it is preferable to dispose a heat exchanger between each tank and the mixer.

  In the fluid mixing apparatus of the present invention, the mixing apparatus to be used considers pressure loss, and the cross-sectional area of the outlet portion is made as small as possible to increase the mixing efficiency by increasing the flow velocity. For example, in FIG. 9, which will be described later, the speed of the fluid flowing through the first microtubular channel 6g is preferably 0.1 m / second or more because the shearing force acting on the fluid is increased. More preferably 3 m / sec or more. More preferably, it is 1.0 m / second or more and 3.0 m / second or more is particularly preferable. In particular, when mixing fluids having high viscosities or when mixing fluids having viscosities greatly different from each other, the flow rate is preferably 1.0 m / second or more.

  When a high-viscosity fluid is passed through such a mixing device, a large pressure loss occurs at the inlet of the mixing device flow path, and smooth liquid passing may be difficult. It is also important to lower the viscosity of the fluid depending on the temperature as a method for increasing the mixing efficiency. In the mixing apparatus of the present invention, it is difficult to ensure sufficient residence time. It is necessary to install a vessel.

  For example, when a fluid having a viscosity of 1000 mPa · S is passed at a temperature of 20 ° C., the viscosity is 1000 mPa · S at the inlet of the heat exchanger, but by ensuring a sufficient residence time in the heat exchanger, By increasing the temperature of the fluid to the same level as the temperature of 100 ° C. and setting the viscosity to 10 mPa · S, the pressure loss at the inlet of the fluid mixing device can be reduced, and the flow rate of the fluid can be increased to 1.0 m / second or more. It becomes possible. As a result, the mixing efficiency of the high viscosity fluid can be increased.

  The residence time in the heat exchanger depends on the properties of the fluid, but in order to sufficiently raise the fluid temperature, it is preferably 1.0 seconds or more, more preferably 3.0 seconds or more, and further 5.0 seconds or more. preferable. Moreover, the pressure loss of the heat exchanger is preferably 2.0 MPa or less, more preferably 1.0 MPa or less, and particularly preferably 0.5 MPa or less.

  The fluid mixing device of the present invention includes a volume of a first fluid that flows in a liquid-tight manner in a microtubular channel 1 of a mixer and a second fluid that flows in a liquid-tight manner in a microtubular channel 2. The ratio of the total volume (A) to the volume and the total volume (B) of the first fluid or the second fluid flowing in a liquid-tight manner in the microtubular channel 3 of the heat exchanger [(B ) / (A)] is required to be 2-50. By setting [(B) / (A)] to 2 to 50, the residence time is long and the fluid can be easily raised to a predetermined temperature, and the fluid can be circulated through the fluid mixing device with a low viscosity. Smooth fluid flow without pressure at the entrance. Further, by setting [(B) / (A)] to 2 to 50, the residence time is not too long, and the heat exchanger is not unnecessarily large, which is advantageous in terms of cost. [(B) / (A)] is more preferably 5-30.

  FIG. 1 is a block diagram showing an example of a fluid mixing apparatus of the present invention. The outlet of the tank 61 for containing the first fluid and the inlet of the plunger pump 63 are connected via a pipe through which the first fluid passes, and the outlet of the tank 62 for containing the second fluid. And the inlet of the plunger pump 64 are connected via a pipe through which the second fluid passes. From the outlet of the plunger pump 63 and the outlet of the plunger pump 64, pipes through which the first fluid or the second fluid passes through the plunger pump 63 or the plunger pump 64 respectively extend.

  In FIG. 1, the inlet of the heat exchanger 70 is connected in the extending direction of the pipe through which the first fluid connected to the outlet of the plunger pump 63 passes. In such a case, a highly viscous fluid is usually used as the first fluid. A pipe through which the first fluid subjected to heat exchange (heating) passes is connected to the outlet of the heat exchanger, and this pipe circulates in the microtubular channel 1 of the mixer via the connector 64. The second fluid flows through the microtubular channel 2 of the mixer via a connector connected to a pipe through which the second fluid connected to the plunger pump 64 passes, and the first fluid and the second fluid are It mixes in the mixing part which a mixer has.

  The mixed fluid obtained by mixing in the mixing unit may be collected by a dunk outside the drawing through a pipe connected to the outlet of the mixer, or the pipe connected to the outlet of the mixer It may be connected to the inlet of various reactors such as an external microreactor, and the mixed solution may be reacted in the reactor.

  The heat exchanger which the fluid mixing apparatus of the present invention has has a microtubular channel 3 through which the first fluid or the second fluid flows in a liquid form. The cross-sectional shape obtained by cutting perpendicularly to the fluid flow of the microtubular channel 3 is a square, a rectangle including a rectangle, a polygon including a trapezoid, a parallelogram, a triangle, a pentagon, etc. The shape may be a high-aspect ratio (that is, including a slit shape), a star shape, a semicircle, or a circular shape including an elliptical shape. The cross-sectional shape of the microchannel does not need to be constant.

  The method for forming the microtubular channel 3 is not particularly limited, but generally, the member (X) having a groove on the surface thereof is laminated and joined with another member (Y) on the surface having the groove. And is formed as a space between the member (X) and the member (Y).

  In the case of forming a microtubular flow path between the member (X) and the member (Y), in order to provide a heat exchange function to the member (X), for example, a temperature-controlled fluid flows on the surface of the member (X). What is necessary is just to adhere | attach by the method of providing a groove | channel and bonding or laminating | stacking another member on the surface in which the groove | channel for this temperature control fluid flows was provided. In general, a member (X) having a groove on the surface and a member (Y) provided with a groove for flowing a temperature-controlled fluid include a surface provided with a groove, and a surface provided with a groove of another member. A flow path may be formed by fixing the opposite surface, and a plurality of these members (X) and members (Y) may be fixed alternately.

  At this time, the groove formed on the member surface may be formed as a so-called groove lower than the peripheral portion thereof, or may be formed between the walls standing on the member surface. The method of providing the groove on the surface of the member is arbitrary, and for example, methods such as injection molding, solvent casting method, melt replica method, cutting, etching, photolithography (including energy beam lithography), and laser ablation can be used.

  The layout of the flow paths in the member may be in the form of a straight line, a branch, a comb, a curve, a spiral, a zigzag, or any other arrangement according to the purpose of use.

  The flow path is, for example, a mixing field, an extraction field, a separation field, a flow rate measurement unit, a detection unit, a liquid storage tank, a membrane separation mechanism, a connection port to the inside or outside of the device, a tangential line, a development path for chromatography or electrophoresis, and the like. Further, it may be connected to a part of the valve structure (portion surrounding part), a pressurizing mechanism, a depressurizing mechanism, or the like.

  The outer shape of the member need not be particularly limited, and can take a shape according to the purpose of use. The shape of the member may be, for example, a plate shape, a sheet shape (including a film shape, a ribbon shape, etc.), a coating film shape, a rod shape, a tube shape, and other complicated shapes. External dimensions such as thickness are preferably constant. The material of the member is arbitrary, and may be, for example, a polymer, glass, ceramic, metal, semiconductor, or the like.

  As the heat exchanger, the member (X) having a groove on the surface as described above, another member (Y) is fixed to the surface having the groove by lamination, bonding or the like, and the member (X) and the member (Y ) Can be preferably used in which the microtubular channel 3 is formed. Examples of such a heat exchanger include those having a structure in which a plurality of heat conductive plate-like structures having a plurality of grooves formed on the surface are stacked.

  As the heat exchanger, for example, a heat conductive plate-like structure provided with a heat conductive plate-like structure provided with a microtubular flow channel and a flow channel for flowing a fluid for heat exchange between the mixed liquids. The heat exchange etc. which a body laminates | stacks alternately are mentioned.

  Hereinafter, the heat exchanger will be specifically described. FIG. 2 shows a flow path for flowing a fluid in which heat is exchanged between a plate having a microtubular flow path 3 for flowing the first fluid or the second fluid and the first fluid or the second fluid. It is the example of schematic structure of the heat exchanger which the plate which has arrange | positioned is laminated | stacked alternately.

The heat exchanger is configured, for example, by laminating a plurality of first plates (2 in FIG. 2) and second plates (3 in FIG. 2) having the same rectangular plate shape in 2 above. ing. Each one first plate is provided with a micro tubular channel (hereinafter referred to as a reaction channel) having a cross-sectional area of 0.1 to 4.0 (mm ² ) (hereinafter referred to as a reaction channel). The obtained plate is called process plate). The second plate is provided with a flow channel for temperature control fluid (hereinafter referred to as a temperature control channel) (hereinafter, the plate provided with the temperature control channel is referred to as a temperature control plate). Then, as shown in FIG. 3, these supply ports and discharge ports are distributed and arranged in each region of the end surface 1b, 1c, side surface 1d, 1e of the chemical reaction device 1, and the compound (A) and The joint part 32 which consists of the connector 30 and the joint part 31 for flowing a compound (B), and a temperature control fluid is each connected.

  The first fluid or the second fluid α is supplied from the end surface 1b through these joint portions, and the heat-exchanged first fluid or the second fluid β is discharged to the end surface 1c, and the temperature control fluid γ is supplied from the side surface 1d and discharged to the side surface 1e.

  The planar shape of the chemical reaction device 1 is not limited to a rectangle as shown in FIG. 2, and may be a square shape or a rectangular shape having longer side surfaces 1d and 1e than between end surfaces 1b and 1c. For the sake of simplicity, the direction from the end surface 1b to the end surface 1c is referred to as the longitudinal direction of the process plate and the temperature control plate of the heat exchanger, and the direction from the side surface 1d to the side surface 1e is referred to as the shape of the heat exchanger. This is referred to as the short direction of the process plate and the temperature control plate.

As shown in FIG. 4, the process plate extends on one surface 2 a by passing through the channel 4 having a concave groove shape in the longitudinal direction of the process plate, and a plurality of process plates are arranged at a predetermined interval p ₀ in the short direction. Is. Let L be the length of the flow path 4. The cross-sectional shape is a width w ₀ and a depth d ₀ .

The cross-sectional shape of the flow path 4 can be appropriately set according to the type, flow rate, and flow path length L of the first fluid or the second fluid α, but ensures the uniformity of the temperature distribution in the cross section. Therefore, the width w ₀ and the depth d ₀ are set in the range of 0.1 to 16 [mm] and 0.1 to 2 [mm], respectively. In addition, description of a width | variety and a depth is a case where a drawing is referred, Comprising: This value can be interpreted suitably so that it may become a wide value with respect to a heat transfer surface. Although it does not specifically limit, For example, 1-1000 pieces per plate, Preferably it is 10-100 pieces.

  The fluid α flows in each flow path 4, and is supplied from one end face 2b side and discharged to the other end face 2c side as shown by arrows in FIGS.

As shown in FIG. 2, the temperature control plate is provided with a temperature control flow path 6 having a concave groove shape on one surface 3 a at a predetermined interval. The cross-sectional area of the temperature control channel 6 is not particularly limited as long as heat can be transferred to the reaction channel, but is approximately in the range of 0.1 to 4.0 (mm ² ). More preferably, it is 0.3-1.0 (mm < ² >). The number of the temperature control flow paths 6 can adopt an appropriate number in consideration of heat exchange efficiency, and is not particularly limited, but is, for example, 1 to 1000, preferably 10 to 100 per plate. It is.

  As shown in FIGS. 2 and 4, the temperature control channel 6 flows in a plurality of main channels 6 a arranged along the longitudinal direction of the temperature control plate, and upstream and downstream ends of the main channel 6 a, respectively. You may provide the supply side flow path 6b and the discharge side flow path 6c which are arrange | positioned substantially orthogonally to the path | route 4, and are connected to each main flow path 6a. 2 and 4, the supply-side flow path 6b and the discharge-side flow path 6c are bent twice at right angles and open to the outside from the side surfaces 3d and 3e of the temperature control plate. As for the number of each temperature control channel 6, only the main channel 6 a portion of the temperature control channel 6 is arranged, and the supply side channel 6 b and the discharge side channel 6 c are each composed of one. .

  In addition, each main flow path 6a of the temperature control flow path 6 is provided in a range in which the range in which the flow paths 4 are distributed overlaps the stack direction in the short direction of the temperature control plate with respect to the flow path 4.

  Preferably, the main flow paths 6a are arranged in the stacking direction so as to be positioned between two adjacent flow paths 4, 4. More preferably, each main flow path 6a overlaps each flow path 4 in the stacking direction. Arrange as follows.

  The plurality of process plates and temperature control plates are stacked by alternately stacking process plates and temperature control plates in the same direction, and are fixed to each other and stacked.

  Therefore, in the form of the chemical reaction device 1, each flow path 4 and the temperature control flow path 6 are covered with a lower surface of a plate on which a groove is opened and a tunnel shape having a rectangular cross section with both ends open. It is said.

  As described above, the mixer has two microtubular channels and a mixing section. As a preferred form of such a mixer, the mixer is a fluid in which a second fluid circulates in a first plate having a first microtubular channel communicating with a fluid supply channel in which the first fluid circulates. A laminated portion in which a second plate having a second microtubular channel communicating with a second fluid communicating with the supply path is laminated, an outlet of the first microtubular channel, and an outlet of the second microtubular channel A micromixer having a mixing portion for mixing the first fluid and the second fluid, wherein at least one of the first plate and the second plate communicates with the fluid supply path An inlet portion of the passage and an outlet portion of the microtubular channel communicating with the mixing portion, and the microtubular channel of the inlet portion is a single channel, and the inside of the microtubular channel in the outlet portion The fluid cross-sectional area that circulates in a liquid-tight manner is one minute at the entrance. The micro mixer 1 is a plate having a smaller cross-sectional area than the fluid cross-sectional area which flows through the Jo passage in a liquid-tight manner can be exemplified.

  Hereinafter, one embodiment of the micromixer 1 will be described with reference to FIGS. FIG. 5 is a schematic diagram illustrating an example of the micromixer 1.

  The micromixer 1 has a hollow case C, and a first plate having a first microtubular channel that communicates with a fluid supply channel through which the first fluid (F1) flows. A laminated body 110 having a laminated portion in which a second plate having a second microtubular channel that circulates a second fluid that communicates with a fluid supply passage through which a second fluid (F2) circulates is laminated. ing.

  In the micromixer 1, in addition to the laminated portion in which the first plate and the second plate are laminated, for example, a temperature control plate having a heat exchange medium flow path for circulating the heat exchange medium as shown in FIG. 5 is laminated. A certain mixer is preferable because the temperature of the mixed solution can be precisely controlled.

  Furthermore, the temperature control plate having the heat exchange medium flow path through which the heat medium H11 that exchanges heat between the fluid F1 and the fluid F2 is laminated on the laminated body 110 can equalize the temperatures of the fluid F1 and the fluid F2. It is preferable because a decrease in mixing efficiency due to a difference in temperature between the fluid F1 and the fluid F2 can be reduced.

  The left end C1 of the case C of the micromixer 1 is provided with a first fluid supply unit 1A for supplying the first fluid (F1) into the case C. The lower right end C2 of the case C has a second fluid. A second fluid supply unit 2A for supplying (F2) into the case C is provided. Hereinafter, when the fluid supply units 1A and 2A are described without being distinguished from each other, the fluid supply unit 1 is simply described.

  1 A of fluid supply parts have the opening part 1B formed in the left end part of case C, and the connector 1C connected with the opening part 1B. The connector 1C communicates with a fluid supply path through which the first fluid (F1) flows. Therefore, the fluid supply path communicates with the first microtubular flow path of the first plate. The fluid supply path is connected to a tank for storing the first fluid (F1), a pressurizing pump, and a pressure feeding mechanism including a pipe line connected to the pump, and the first fluid (F1). Is fed to the connector 1C side in a pressurized state by the mechanism. A space is provided in the side surface 11a of the laminated body 11 fixed in the opening 1B and the case C, and the space functions as a storage portion S1 for temporarily storing the first fluid (F1) delivered from the pressure feeding mechanism. To do.

  2 A of fluid supply parts have the opening part 2B formed in the lower right end of case C, and the connector 2C connected with the opening part 2B. The connector 2C communicates with a fluid supply path through which the second fluid (F2) flows, and thus the fluid supply path communicates with the second microtubular channel of the second plate. The fluid supply path is connected to a tank for storing the second fluid (F2), a pressurizing pump, a pressure feeding mechanism including a pipe connected to the pump, and the like. The second fluid (F2) Is fed to the connector 3B side in a pressurized state by the mechanism. A space is provided in the side surface 11b of the laminate 11 fixed in the opening 1B and the case C, and the space functions as a storage portion S2 for temporarily storing the second fluid (F2) sent from the pressure feeding mechanism. To do.

  Further, a heat medium supply part 3A for supplying the heat medium H1 into the case C is formed at the lower left end C3 of the case C. The heat medium supply unit 3A has an opening 3B and a connector 3C, similar to the fluid supply units 1A and 2A. The heat medium H1 supplied to the heat medium supply part 3A passes through the flow path formed in the laminated body 11, and is sent out of the case C from the heat medium supply part 4A formed at the upper end C4 of the case C. . 4 A of heating medium delivery parts have the opening part 4B and the connector 4C similarly to the said fluid supply parts 1A and 2A, respectively.

  The right end C4 of the case C has an opening 5B formed at the right end of the case C and a delivery part 5A including a connector 5C connected to the opening 5B. A space is provided in the opening 5B and the side surface 11c of the laminate 11 fixed in the case C, and the space communicates with the outlet of the first microtubular channel and the outlet of the second microtubular channel. The first fluid and the second fluid function as a mixing unit S3. As the volume of S3, the generated pressure loss, stable flow of high-viscosity fluid and heteroviscous fluid, mixing force, and device strength are considered. It can be changed according to the viscosity of each fluid, the desired degree of mixing, and the like. In particular, when the difference in viscosity between the first fluid and the second fluid is large, for example, 10 times or more, it is necessary to increase the cross-sectional area of the mixing unit S3 in order to perform stable circulation. This is preferable because a uniform mixture with the two fluids can be obtained. In addition, when the viscosity difference between the first fluid and the second fluid is large and the flow rate of the high-viscosity fluid is larger than the flow rate of the low-viscosity fluid, it is necessary to further increase the cross-sectional area of the mixing portion.

The area of the cross section leading to the outlet of the first microtubular channel and the outlet of the second microtubular channel of the mixing part S3 is such that a uniform mixture of the first fluid and the second fluid is obtained. To 1.0 mm ² or more.

  In addition, the cross-sectional area leading to the outlet of the first microtubular channel and the outlet of the second microtubular channel of the mixing unit S3 is equal to the cross-sectional area of the outlet of the first microtubular channel and the second A micromixer that is 2 to 200 times the total cross-sectional area of the outlet of the microtubular channel is preferable because the flow is stable and good mixing without stagnating can be achieved even in the mixing part S3 part. Is more preferable.

  The first fluid (F1) and the second fluid (F2) are supplied from the fluid supply portions 1A and 2A to the inside of the case C, and the first microtubular channel and the second fluid are formed in the laminate 11. Each flows through the microtubular channel. The first fluid (F1) that has reached the outlet of the first microtubular channel and the second fluid (F2) that has reached the outlet of the second microtubular channel are in communication with these outlets. It is discharged to the mixing unit S3 and mixed. The obtained mixed fluid (F3) is sent out of the case C from the sending part 5A. The positions of the case C of the micromixer 1, the fluid supply units 1 </ b> A, 2 </ b> A, and the delivery unit 5 </ b> A are not limited to the above configuration and can be changed as appropriate.

  Next, the laminate 11 will be described. As shown in FIG. 6, the laminate 11 includes a plate group 13 in which a flow path is formed between the rectangular cover plates P <b> 1 and P <b> 2.

  The plate group 13 is configured by laminating two first plates 5 and two second plates 7. In the present embodiment, a laminated body in which the first plate and the second plate are alternately laminated is formed.

  The cover plates P1, P2, the first plate 5, and the second plate 7 are formed in the same rectangular shape. Further, the materials of the cover plates P1, P2, the first plate 5 and the second plate 7 are not particularly limited, and for example, metal material, resin, glass, ceramics and the like can be easily processed to form a flow path, Any material may be used as long as the plates can be fixed to each other in a close contact state in which liquid leakage is unlikely to occur. Moreover, each plate may be formed from the same material, and may be formed from a different material. For example, each plate may be formed from stainless steel and fixed in a tight contact state by diffusion bonding. As a processing method of each plate, a suitable method according to the material can be selected from various known methods such as injection molding, solvent casting method, melt replica method, cutting, etching, photolithography, laser application, and the like.

  Next, the first plate 5 and the second plate 7 will be described in detail. As shown in FIG. 7, the first plate 5 has a rectangular and plate-like first microtubular channel forming portion 6 </ b> A.

  The first microtubular channel forming portion 6A has one or more first microtubular channels 6 at the center of the upper surface 6a in the short direction (Y direction in the figure). The first microtubular channel 6 is formed in a groove shape from the left end 6b to the right end 6c of the first microtubular channel forming portion 6A, and is open at the left end 6b, the right end 6c, and the upper surface 6a. is doing. The opening at the left end 6 b is the inlet 6 d of the first microtubular channel 6, and the opening at the right end 5 c is the outlet 6 e of the first microtubular channel 6. The inlet 6d communicates with the first fluid supply unit 1A to which the first fluid F1 is supplied.

  The first microtubular channel 6 is a channel whose cross section in a direction orthogonal to the flow direction is rectangular, and extends from the left end 6b to the right end 6c. The width and depth of the first microtubular channel 6 are preferably in the range of, for example, a width of 0.1 mm or more and 100 mm or less and a depth of 5 mm or less in order to ensure the uniformity of the temperature distribution of the fluid and the device strength. More preferably, the width ranges from 0.1 mm to 20 mm and the depth is 2 mm or less. That is, as the shape of the first microtubular channel 6, the pressure loss does not become excessive, the channel is not easily blocked, and the heating and cooling of the channel can be quickly controlled, thereby improving the productivity. Any flow channel shape that can be used is acceptable.

Moreover, as a cross-sectional area of the fluid which distribute | circulates the inside of the 1st micro tubular flow path 6 in a liquid-tight state, 0.01-500 mm < ² > is preferable and 0.01-40 mm < ² > is more preferable.

  In FIG. 7, five first microtubular channels 6 are arranged, but the number is not particularly limited. When arranging a plurality, the width and depth of each microtubular channel 6 may be the same or different. In addition, the inlet and outlet channel widths of the first microtubular channel 6 may be the same or different. A further illustration of the first plate is shown in FIG.

  Among the micromixers, the first plate (5) has an inlet portion of a microtubular channel communicating with a fluid supply channel, and an outlet portion of a microtubular channel communicating with a mixing unit, A plate having a cross-sectional area in which the fluid cross-sectional area flowing in the liquid-tight manner in the micro-tubular flow path at the outlet portion is smaller than the cross-sectional area of the fluid flowing in the liquid-tight state in the micro-tubular flow path in the inlet portion; The plate has an inlet portion of a microtubular channel communicating with the fluid supply path and an outlet portion of the microtubular channel communicating with the mixing portion, and the microtubular channel of the inlet portion is a single channel. Moreover, the cross-sectional area of the fluid that flows in a liquid-tight manner in the microtubular channel at the outlet portion is smaller than the cross-sectional area of the fluid that flows in a liquid-tight manner in one microtubular channel in the inlet portion. The mixer, which is a plate, has good mixing efficiency Et al preferred. As such a 1st plate, the plate etc. which are shown, for example in FIG. 9 can be illustrated.

  The first plate 5 shown in FIG. 9 has a rectangular and plate-like first microtubular channel forming portion 6A. The first microtubular channel forming portion 6A has one or more first microtubular channels 6 at the center of the upper surface 6a in the short direction (Y direction in the figure). The first microtubular channel 6 is formed in a groove shape from the left end 6b to the right end 6c of the first microtubular channel forming portion 6A, and is open at the left end 6b, the right end 6c, and the upper surface 6a. is doing. The opening at the left end 6 b is the inlet 6 d of the first microtubular channel 6, and the opening at the right end 6 c is the outlet 6 e of the first microtubular channel 6. The inlet 6d communicates with the first fluid supply unit 1A to which the first fluid F1 is supplied.

  Also, in FIG. 9, the first microtubular channel 6 moderates the diameter change from the large diameter part 6f having a large channel diameter, the small diameter part 6g having a small channel diameter, and the large diameter part 6f to the small diameter part 6g. A tapered portion 6h is provided.

  The large-diameter portion 6f is a flow path having a rectangular cross section in a direction orthogonal to the flow direction, and extends from the left end 6b to the right end 6c. The width and depth of the large-diameter portion 6f are preferably set within a range of, for example, a width of 0.1 mm or more and 100 mm or less and a depth of 0.1 mm or more and 5 mm or less in order to ensure the uniformity of the temperature distribution of the fluid and the device strength. The range of 0.1 mm to 20 mm in width and 0.1 mm to 2 mm in depth is more preferable. Furthermore, the width of 0.1 mm or more and 20 mm or less and the depth of 0.1 mm or more and 1 mm or less are more preferable. That is, as the shape of the large-diameter portion 16, the pressure loss does not increase too much, the flow path is not easily blocked, the flow path can be quickly controlled for heating and cooling, and the flow rate of the fluid can be increased. Any flow channel shape may be used as long as the shearing force acts and molecular diffusion occurs in a state accompanied by a slight turbulent flow, thereby improving the mixing efficiency.

Moreover, as a cross-sectional area of the fluid which distribute | circulates the inside of the 1st micro tubular flow path 6f in a liquid-tight state, 0.01-500 mm < ² > is preferable and 0.01-40 mm < ² > is more preferable. Furthermore, 0.01-20 mm < ² > is more preferable.

  The small diameter portion 6g is also a channel formed in a rectangular cross section, and extends from the front of the right end 6f toward the right end 6c. The small-diameter portion 6g only needs to have a cross-sectional area smaller than at least the cross-sectional area of the large-diameter portion 16. For example, the width is 0.1 mm to 20 mm, the depth is 0.1 mm to 5 mm, and the width is 0.1 mm to 5 mm. Hereinafter, a depth range of 0.1 mm to 2 mm is more preferable. Furthermore, the width of 0.1 mm or more and 5 mm or less and the depth of 0.1 mm or more and 1 mm or less are more preferable. That is, as the shape of the small-diameter portion 6g, the pressure loss does not increase excessively, the flow path is not easily blocked, the flow path can be quickly controlled for heating / cooling, the fluid flow velocity can be increased, Any channel shape that can act as a force and molecular diffusion in a state accompanied by a slight turbulent flow can improve mixing efficiency.

As the cross-sectional area of the fluid flowing through the first micro-tubular flow channel 6g in in Figure 9 in a liquid-tight manner, preferably 0.01~100mm ^2, 0.01~10mm ² is more preferable. Furthermore, 0.01-5 mm <2> is more preferable.

  The fluid velocity when flowing through the first microtubular channel 6g in FIG. 9 is preferably 0.1 m / second or more, more preferably 0.3 m / second or more because shearing force acting on the fluid increases. More preferably, it is 1.0 m / second or more and 3.0 m / second or more is particularly preferable. In particular, when mixing fluids having high viscosities or when mixing fluids having viscosities greatly different from each other, the flow rate is preferably 1.0 m / second or more.

  The first microtubular channel 6 in FIG. 9 is a channel whose cross section in the direction orthogonal to the flow direction is rectangular, and extends from the left end 6b to the right end 6c. The width and depth of the first microtubular channel 6 are, for example, from 0.1 mm to 100 mm in width and from 0.1 mm to 5 mm in depth in order to ensure the uniformity of the temperature distribution of the fluid and the device strength. Preferably, the width is 0.1 mm to 10 mm, and the depth is 0.1 mm to 1 mm. A width of 0.1 mm to 20 mm and a depth of 0.1 mm to 2 mm are more preferable. Furthermore, the width of 0.1 mm or more and 2 mm or less and the depth of 0.1 mm or more and 0.5 mm or less are more preferable. That is, as the shape of the large-diameter portion 16, the pressure loss does not increase too much, the flow path is not easily blocked, the flow path can be quickly controlled for heating and cooling, and the flow rate of the fluid can be increased. Any flow channel shape may be used as long as the shearing force acts and molecular diffusion occurs in a state accompanied by a slight turbulent flow, thereby improving the mixing efficiency.

  In FIG. 9, three first microtubular channels 6 are arranged, but the number is not particularly limited. When arranging a plurality, the width and depth of each microtubular channel 6 may be the same or different. In addition, the inlet and outlet channel widths of the first microtubular channel 6 may be the same or different. A further illustration of the first plate is shown in FIG.

  The viscosity of the fluid flowing through the first microtubular channel is preferably 2000 mPa · s or less, and more preferably 1000 mPa · s or less. More preferably, it is 500 mPa · s or less.

  Next, the second plate 7 will be described in detail. As shown in FIG. 11, the second plate 7 has a rectangular and plate-like second microtubular flow path forming portion 7A.

  The second microtubular channel forming portion 7A has one second microtubular channel 8 on the upper surface 7a. The second microtubular channel 8 is formed in a groove shape from the lower end 7b of the second microtubular channel forming portion 7A toward the short direction (7c direction, Y direction in the figure). It is bent at right angles to the right end direction once near the center of the direction, and is open at the lower end 7b, the right end 7d, and the upper surface 7a. The opening at the lower end 7 b is the inlet 8 a of the second microtubular channel 8, and the opening at the right end 7 d is the outlet 8 b of the first microtubular channel 6. The inlet 8a communicates with the second fluid supply unit 2A to which the second fluid F1 is supplied.

  In the microtubular channel of the second plate used in the present invention, the fluid cross-sectional area flowing in a liquid-tight manner in the microtubular channel at the outlet is liquid-tight in the one microtubular channel in the inlet. The cross-sectional area is smaller than the cross-sectional area of the fluid flowing in a shape. By having such a structure, the second fluid F2 flows through the large-diameter inlet 8a at the inlet and flows into the small-diameter 8b. Each fluid second fluid F2 that has flowed into the small diameter portion flows into the outlet 8b at a flow velocity larger than the flow velocity at the time of flowing into the inlet, and flows into the mixing portion (S3 in FIG. 5). As a result, the mixing speed of the first fluid F1 and the second fluid F2 can be increased. In particular, at least one of the first fluid F1 and the second fluid F2 is particularly effective when the fluidity is low and the fluid is difficult to mix, that is, when the fluid is a high-viscosity fluid or when the viscosity is significantly different from each other. Can be demonstrated.

  The width and depth of the large-diameter portion are preferably in the range of, for example, a width of 0.1 mm or more and 100 mm or less and a depth of 0.1 mm or more and 5 mm or less in order to ensure uniformity of temperature distribution of the fluid and device strength. The range of 0.1 mm to 20 mm in width and 0.1 mm to 2 mm in depth is more preferable. That is, as the shape of the large diameter portion, the pressure loss does not become excessive, the flow path is not easily blocked, the flow path can be quickly controlled for heating / cooling, and the mixing performance can be improved. Any shape is acceptable.

Moreover, as a cross-sectional area of the fluid which distribute | circulates a large diameter part liquid-tightly, 0.01-500 mm < ² > is preferable and 0.01-40 mm < ² > is more preferable.

  The cross-sectional area of the small-diameter portion may be a cross-sectional area that is at least smaller than the cross-sectional area of the large-diameter portion. For example, the width and depth of the small-diameter portion are preferably in the range of 0.1 mm to 20 mm in width and 5 mm in depth, in the range of 0.1 mm to 5 mm in width, and 0.1 mm to 2 mm in depth. That is, as the shape of the small diameter portion, the pressure loss does not become too large, the flow path is not easily blocked, the flow path heating and cooling can be quickly controlled, and the productivity can be improved. Is preferred.

As the cross-sectional area of the fluid flowing through the small-diameter portion in a liquid-tight manner, preferably 0.01~100mm ^2, 0.01~10mm ² is more preferable.

  The speed of the fluid when flowing through the second microtubular channel 8b is preferably 0.1 m / second or more, more preferably 0.3 m / second or more because shearing force acting on the fluid increases. More preferably, it is 1.0 m / second or more and 3.0 m / second or more is particularly preferable. In particular, the flow rate when mixing fluids with high viscosities or when mixing fluids with viscosities greatly different is preferably 1.0 m / sec or more.

  The viscosity of the fluid flowing through the second microtubular channel is preferably 2000 mPa · s or less, and more preferably 1000 mPa · s or less. More preferably, it is 500 mPa · s or less.

  In addition, as shown in FIG. 11, the second plate is divided by a plurality of walls in which the outlet portion communicating with the mixing portion is installed in parallel with the fluid traveling direction, and a plurality of flow paths are formed. In addition to the above, for example, a single flow path may be used as illustrated in FIG. Here, the number of walls is, for example, 0 to 250, and more preferably 1 to 50. Further, the number of the second microtubular channels formed on the second plate may be one as shown in FIG. 11 or may be plural as shown in FIG.

  Since the micromixer 1 can easily increase the number of inlets of the microtubular channels of the second plate, it is possible to obtain a mixed fluid of many kinds of fluids. When a variety of fluids are allowed to flow through the micromixer 1, for example, at least one first plate and at least two second plates are stacked, and the stacked portion has the second plate. A micromixer having a laminated portion in which the inlet portion of the microtubular channel included in the first plate is installed on a side surface different from the side surface in which the inlet portion of the microtubular channel is installed can be preferably exemplified. An example of such a micromixer is the micromixer shown in FIG.

  The micromixer 1 may be laminated with a temperature control plate for circulating a heat exchange medium. For example, FIG. 14 shows a micromixer in which a temperature control plate, a first plate, and a second plate are stacked.

As shown in FIG. 14, the temperature control plate 12 is provided with a plurality of main flow paths 13 a arranged on one surface 12 a along the longitudinal direction of the temperature control plate 12 at a predetermined interval. The cross-sectional area of the main flow path 13a is not particularly limited as long as heat can be transferred to the reaction flow path, but is generally in the range of 0.1 to 4.0 (mm ² ). More preferably, it is 0.3-1.0 (mm < ² >). The number of the main flow paths 13a can adopt an appropriate number in consideration of heat exchange efficiency, and is not particularly limited, but is, for example, 1 to 1000, preferably 10 to 100 per plate. .

  As shown in FIG. 14, the temperature control flow path 12 includes a plurality of main flow paths 13a arranged along the longitudinal direction of the temperature control plate 12, and upstream and downstream end portions of the main flow path 13a. You may provide the supply side flow path 13b and the discharge side flow path 13c which are connected.

  In FIG. 14, the supply-side flow path 13b and the discharge-side flow path 13c are bent twice at right angles and open to the outside from the side surfaces 12d and 12e of the temperature control plate. As for the number of each temperature control channel 12, only the main channel 13a portion of the temperature control channel 12 is arranged, and the supply side channel 13b and the discharge side channel 13c are each composed of one. .

  In the laminate 11 configured as described above, the first fluid (F1) supplied in a pressurized state from the first fluid supply unit 1A into the case C is temporarily stored in the storage unit S1, and then stacked. The body 110 is divided into a plurality of first microtubular channels 6 provided in the body 110. In addition, a second fluid (F2) storage unit S2 supplied in a pressurized state from the second fluid supply unit 2A into the case C may be temporarily stored, and then a plurality of layers may be provided in the stacked body 11. Divided into microtubular channels 8.

  The 1st fluid (F1) which flowed into each 1st microtubular channel 6 of the 1st plate 5 leads to outlet 6e of the 1st microtubular channel 6, and is sent to mixing part S3. . The second fluid (F2) that has flowed into each second microtubular channel 8 of the second plate 7 is sent out while increasing the flow rate from the large diameter portion to the small diameter portion, and from the outlet 8b to the mixing portion S3. Sent out.

  The second fluid (F2) sent to the mixing unit S3 while increasing the flow rate is mixed with the second fluid (F2) sent to the mixing unit S3. At this time, since the speed of the second fluid (F2) is increased, the mixing efficiency in the mixing unit S3 is improved.

  The first fluid (F1) and the second fluid (F2) are mixed while generating turbulent flow in the mixing unit S3, and the obtained mixed fluid (F3) flows toward the mixed fluid delivery unit 5A. And it sends out from case C from sending part 5A.

  In addition, as a second micromixer that can be preferably used, for example, a first flow path forming portion in which a first flow path through which the first fluid flows is formed, and a second flow path through which the second fluid flows are formed. A mixing plate having a second flow path forming portion, wherein an outlet of the first flow path and an outlet of the second flow path are opposed to each other via a merged flow path where the first fluid and the second fluid merge. The opening position of the outlet of the first flow path in the central axis direction of the combined flow path is included in or the same as the opening position of the second flow path in the central axis direction of the combined flow path. The micromixer 2 to be used can be mentioned.

  Hereinafter, an embodiment of the present invention will be described with reference to FIGS. FIG. 15 is a schematic diagram illustrating an example of the micromixer 2. The micromixer 2 has a hollow case C, and a laminated body 11 in which various fine channels are formed is fixed in the case C. The laminated body 11 includes a first fluid F1 and a second fluid F2 that are mixed objects or reaction objects, and a first heat medium H1 (first medium) that performs heat exchange with each of the fluids F1 and F2. And the flow path through which the second heat medium H2 (second medium) flows is formed.

  A first fluid supply unit 4A that supplies the first fluid F1 into the case C is provided at the left end C1 of the case C, and a second fluid F2 that supplies the second fluid F2 into the case C is provided at the right end C2 of the case C. A fluid supply unit 4B is provided. Hereinafter, when the fluid supply units 4A and 4B are described without being distinguished from each other, the fluid supply unit 4 is simply described.

  The fluid supply unit 4 has an opening 2 formed at the end of the case C and a connector 3 connected to the opening 2. The connector 3 is connected to a tank for storing each of the fluids F1 and F2, a pressure pump, a pressure feeding mechanism including a pipe line connected to the pump, and the fluids F1 and F2 are pressurized by the mechanism. In the state, it is pumped to the connector 3 side. A space is provided between the opening 2 and each side surface 11a, 11b of the laminated body 11 fixed in the case C. The space temporarily stores the fluids F1, F2 sent from the pressure feeding mechanism. It functions as part S1, S2.

  In addition, at the upper end C3 of the case C, heating medium supply portions 7A and 7B for supplying the heating media H1 and H2 into the case C are formed, respectively. Similarly to the fluid supply unit 4, the heat medium supply units 7A and 7B have openings 5A and 5B and connectors 6A and 6B, respectively. The heat mediums H1 and H2 supplied to the heat medium supply units 7A and 7B pass through the flow path formed in the laminated body 11, and from the heat medium delivery units 7C and 7D formed at the lower end C4 of the case C. Each case C is sent to the outside. Each of the heat medium delivery sections 7C and 7D has openings 5C and 5D and connectors 6C and 6D, respectively, similarly to the fluid supply section 4.

  In addition, the lower end C4 of the case C is provided with a delivery unit 10 that sends out the mixed liquid F3 (or reaction liquid) of the fluids F1 and F2 mixed or reacted in the stacked body 11 to the outside of the case C. The delivery unit 10 includes an opening 8 and a connector 9 connected to the opening 8.

  That is, the fluids F1 and F2 are supplied from the fluid supply portions 4A and 4B to the inside of the case C, and are mixed or reacted in the fine flow path formed in the stacked body 11. Here, the fluids F1 and F2 are mixed in the fine flow path, whereby the diffusion distance is shortened and the mixing speed is increased, and only a desired processing amount is efficiently mixed. The mixed liquid F3 (or reaction liquid) is sent out from the sending section 10 to the outside of the case C. The positions of the case C, the fluid supply units 4A and 4B, the delivery unit 10 and the like of the micromixer 1 are not limited to the above-described configuration, and can be changed as appropriate.

  Next, the laminate 11 will be described. As shown in FIG. 16, the laminate 11 includes a plate group 12 in which a flow path is formed between the rectangular cover plates P <b> 1 and P <b> 2.

  The plate group 12 is configured by laminating three temperature control plates 13 and two mixing plates 14. In the present embodiment, the temperature control plate 13 is the uppermost layer and the lowermost layer, and the mixing plate 14 is stacked in a state of being sandwiched between any of the temperature control plates 13.

  Each cover plate P1, P2, each temperature control plate 13, and each mixing plate 14 are formed in the same rectangular shape. Moreover, the material of each cover plate P1, P2, temperature control plate 13, and mixing plate is not specifically limited, For example, the process for forming a flow path, such as a metal material, resin, glass, ceramics, is easy, and each plate 13 , 14, P1, P2 may be any material that can be fixed to each other in a close contact state in which liquid leakage is unlikely to occur. Moreover, each plate 13, 14, P1, P2 may be formed from the same material, and may be formed from a different material. For example, each plate 13, 14, P2, P2 may be formed from stainless steel and fixed in a tight contact state by diffusion bonding. The processing method of each of the plates 13, 14, P2, P2 is in accordance with the material among various known methods such as injection molding, solvent casting method, melt replica method, cutting, etching, photolithography, laser application, and the like. A suitable method can be selected.

  Next, the mixing plate 14 will be described in detail with reference to FIGS. 17 and 18. As shown in FIG. 17, the mixing plate 14 of the present embodiment is composed of a pair of plates, and has a rectangular and plate-like first flow path forming portion 14A and a second flow path forming portion 14B.

  14 A of 1st flow-path formation parts have the three 1st flow paths 15 in the center part of the transversal direction (Y direction in a figure) in the upper surface 14a. The first flow paths 15 are arranged at equal intervals and are formed in a groove shape from the left end 14b to the right end 14c of the first flow path forming portion 14A, and the left end 14b, the right end 14c, and the upper surface 14a. Is open. Each opening of the left end 14 b is an inlet 15 a of the first flow path 15, and the opening of the right end 14 c is an outlet 15 b of the first flow path 15. The inlet 15a communicates with the first fluid supply unit 4A to which the first fluid F1 is supplied.

  Further, the first flow path 15 is provided with a large diameter section 16 having a large flow path diameter, a small diameter section 17 having a small flow path diameter, and a tapered section 18 for gradual change in diameter from the large diameter section 16 to the small diameter section 17. It has been.

  The large-diameter portion 16 is a flow path having a rectangular cross section in a direction orthogonal to the flow direction, and extends from the left end 14b to the right end 14c. The width and depth of the large-diameter portion 16 are preferably in the range of, for example, a width of 0.1 mm or more and 100 mm or less and a depth of 5 mm or less in order to ensure uniformity of the temperature distribution of the fluid and device strength. A range of 1 mm to 20 mm and a depth of 2 mm is more preferable. In other words, the shape of the large-diameter portion 16 is such that the pressure loss does not increase excessively, the flow path is not easily blocked, the flow path can be quickly controlled for heating and cooling, and the productivity can be improved. Any road shape may be used.

  The small-diameter portion 17 is also a flow channel formed in a rectangular cross section, and extends from the front of the right end 14c toward the right end 14c. The small-diameter portion 17 only needs to have a cross-sectional area that is at least smaller than the cross-sectional area of the large-diameter portion 16, for example, a width of 0.1 mm to 20 mm, a depth of 5 mm or less, a width of 0.1 mm to 5 mm, and a depth The range of 2 mm or less is more preferable. That is, as the shape of the small-diameter portion 17, the pressure loss does not become excessively large, the flow path is not easily blocked, the flow path can be quickly controlled for heating and cooling, and the productivity can be improved. Any shape is acceptable.

  Further, a joint channel 19 having a space of a predetermined width is provided between the first channel forming portion 14A and the second channel forming portion 14B. In FIG. 17, the bottom surface and the top surface are opened, and the mixing plate 14 has an opening on the front surface 14g side and an opening on the back surface 14h side. The opening part 19c on the front surface 14g side is an outlet of the combined flow path 19 and communicates with the above-described delivery part 10. The opening 19b on the back surface 14h side is closed by the case C or other members. The joint channel 19 is a long channel having a rectangular shape in a plan view, each side surface of which is constituted by the first channel forming unit 14A and the second channel forming unit 14B, and its longitudinal direction. Is parallel to the short direction of the mixing plate 14.

  The second flow path forming portion 14B has a second flow path 20 through which the second fluid F2 flows, and is formed symmetrically (line symmetric) with respect to the first flow path forming portion 14A with respect to the combined flow path 19. Yes. That is, three second flow paths 20 are formed in a groove shape at the center in the short direction on the upper surface 14d of the second flow path forming portion 14B, and are arranged at equal intervals. Each second flow path 20 is open at the left end 14e, the right end 14f, the upper surface 14d, and the bottom surface. Each opening of the left end 14 e is an outlet 20 b of the second flow path 20, and the opening of the right end 14 f constitutes an inlet 20 a of the second flow path 20. These inlets 20a communicate with the second fluid supply unit 4B to which the second fluid F2 is supplied.

  Moreover, the 2nd flow path 20 has the large diameter part 21 and the small diameter part 22, and the taper part 23 provided among them. The large diameter portion 21 has the same shape and the same flow path diameter as the large diameter portion 16 of the first flow path forming portion 14A, and extends from the right end 14f of the second flow path forming portion 14B to the front of the left end 14e. The small diameter portion 22 also has the same shape and the same flow path diameter as the small diameter portion 17 of the first flow path forming portion 14A, and extends from the front of the left end 14e toward the left end 14e.

  As shown in FIG. 18, the first and second flow path forming portions 14 </ b> A and 14 </ b> B formed in this way are configured such that the outlet 15 b of the first flow path 15 and the outlet 20 b of the second flow path 20 are combined channels 19. It arrange | positions so that it may become the position which faced one-on-one via. Further, the outlet 15b of the first flow path 15 is arranged so that the opening position in the direction of the central axis X1 of the combined flow path 19 is the same as the opening position of the outlet 20b of the second flow path 20 in the central axis X1. The Furthermore, the opening surfaces of the outlets 15b and 20b are parallel. Moreover, the central axis in the cross section of exit 15b, 20b of the 1st flow path 15 and the 2nd flow path 20 is the same central axis X2. The first flow path 15 does not need to be provided on the left side in plan view, and may be on the right side, and the second flow path 20 does not have to be provided on the right side in plan view and may be on the left side. Further, the outlets 15b of the three first flow paths 15 are arranged along the longitudinal direction of the combined flow path 19 on one side face among the opposing side faces of the combined flow path 19, and three second flow streams are arranged on the other side face. The outlet 20 b of the channel 20 is arranged along the longitudinal direction of the combined channel 19.

  For this reason, when each fluid F1, F2 is supplied in a pressurized state from the inlets 15a, 20a of the first channel 15 and the second channel 20, respectively, the fluids F1, F2 flow through the large diameter portions 16, 21, It flows into each small diameter part 17 and 22 via each taper part 18 and 23. The fluids F1 and F2 that have flowed into the small diameter portions 17 and 22 flow into the combined flow path 19 from the outlets 15b and 20b at a flow velocity that is greater than the flow velocity when flowing into the inlets 15a and 20a. At this time, as described above, the outlets 15b and 20b are at the same opening position in the direction of the central axis X1 and are opposed one-to-one, so that the flows of the fluids F1 and F2 sent from the outlets 15b and 20b are merged. The road 19 collides from the front. For this reason, compared with the case where each fluid F1, F2 is made to merge in a laminar flow state, the contact area of each fluid F1, F2 can be increased and it can mix efficiently. Further, by causing the flows of the fluids F1 and F2 facing each other from the front to collide, the fluid element in each of the fluids F1 and F2 is a second fluid that is in the direction opposite to the direction of the flow of the first fluid F1. Since the shear force is received from the direction of the flow of F2, the mixing speed can be increased. In particular, when at least one of the fluids F1 and F2 is a fluid that has low fluidity and is difficult to mix, that is, when it is a high-viscosity fluid, or when the viscosities are greatly different from each other, it is particularly effective.

Since the rear surface side opening 19b of the combined channel 19 is closed, the fluids F1 and F2 that have collided flow toward the opening 19c due to the pressure of the main liquid pressure feeding mechanism.
Considering the pressure loss generated in the combined flow path 19, stable flow of high-viscosity fluid and heteroviscous fluid, mixing force, and device strength, the width of the combined flow path 19, that is, the distance between the outlets 15 b and 20 b is The depth is preferably 0.1 mm or more and 30 mm or less, and the depth is preferably 0.3 mm or more. This width can be changed according to the viscosity (ease of flow) of the fluids F1 and F2 and the target degree of mixing. If the width is shortened, the pressure loss becomes relatively large, but the collision force between the fluids can be increased and the shear force in the fluid can be increased. If the width is increased, the impact force becomes relatively weak, but the pressure loss can be reduced.

  Next, the temperature control plate 13 will be described with reference to FIG. The temperature control plate 13 is formed in a rectangular shape and a plate shape, and has almost the same size as the mixing plate 14. The temperature control plate 13 has a heat insulating portion 30 at a position in the center in the longitudinal direction and overlapping with the merge channel 19 when the mixing plate 14 is laminated. The heat insulating portion 30 is formed by cutting out in a long shape from the front surface 13c of the temperature control plate 13 in the depth direction (Y direction in the drawing), and penetrates in the thickness direction (Z direction in the drawing), and the front surface 13c. An opening 30a is provided on the side. The width of the heat insulating portion 30 is substantially the same as the width of the joint channel 19 of the mixing plate 14.

  A substantially rectangular recess 24 is formed on the left and right sides of the heat insulating portion 30. An inflow path 26 and an outflow path 27 formed in a groove shape on the upper surface 13 a of the temperature control plate 13 communicate with the recess 24.

  Further, on the front side and the back side of the recess 24, long wall portions 24 a and 24 b are formed so as to protrude from the bottom surface of the recess 24. The wall portions 24a and 24b are provided so as to extend in the longitudinal direction (X direction in the drawing) of the temperature control plate 13, and a part of the flow path is formed between the tip and the inner wall surface of the recess 24. A space is provided. Further, on the bottom surface of the recess 24, four long wall portions 25 are formed so as to protrude between the wall portions 24a and 24b. The wall portion 25 is shorter than the width of the recess 24 (the length in the X direction in the figure), and a space for forming a part of the flow path is provided between both ends of the wall portion 25 and the inner wall surface of the recess 24. Yes. These walls 24 a, 24 b, 25 divide the space in the recess 24 to form a flow path through which the heat medium H 1, H 2 flows, and the heat medium H 1, H 2 including the inflow path 26 and the outflow path 27 A heat medium flow path 31 is configured as a flowing medium flow path. The heat medium flow path 31 has the inflow path 26 on the back side as an inlet, extends from the center side of the temperature control plate 13 toward the left side 24c of the recess 24, bends in front of the left side 24c, and toward the right side 24d. Extend. Furthermore, it bends in front of the right side surface 24d and extends toward the left side surface 24c again. As described above, the heat medium flow path 31 has a bent shape that is bent a plurality of times in the recess 24, and uses the outflow path 27 provided on the front side as an outlet.

  The heat medium H1 is supplied to the heat medium flow path 31A formed in the left recess 24 of the temperature control plate 13, and the heat medium H2 is supplied to the heat medium flow path 31B formed in the right recess 24. When the mixing plate 14 is stacked above or below the temperature control plate 13, as shown in FIG. 19, the first heat flows through the heat medium H1 above or below the first flow path 15 through which the first fluid F1 flows. The medium flow path 31A overlaps, and the second heat medium flow path 31B through which the heat medium H2 flows is overlapped above or below the second flow path 20 through which the second fluid F2 flows. For this reason, heat exchange is performed between the first heat medium H1 and the first fluid, and heat exchange is performed between the second heat medium H2 and the second fluid.

  Since these heat medium flow paths 31A and 31B suppress heat transfer between the peripheral portions of the heat medium flow paths 31A and 31B due to the interposition of the heat insulating portion 30, the heat medium H1 and H2 having a large temperature difference are suppressed. Even if it supplies to each heat-medium flow path 31A, 31B, the temperature of heat-medium H1, H2 does not fall or raise remarkably from desired temperature. For this reason, even in the micromixer 1 in which the temperatures of the fluids F1 and F2 in the flow path are likely to change, precise temperature adjustment of the first fluid and the second fluids F1 and F2 can be performed. Accordingly, since the fluids F1 and F2 can be prevented from falling below the desired temperature, the flow paths 15 and 20 and the combined flow path 19 are not clogged with precipitates, and in the production of fine particles by crystallization or the like. A reduction in productivity can be prevented.

  As shown in FIG. 20, when the three layers of the temperature control plates 13 and the two layers of the mixing plates 14 are alternately stacked, the heat insulating portion 30 of the temperature control plate 13 and the combined flow path 19 of the mixing plate 14 overlap each other to form the stacked body 11. The combined flow path 32 having the same depth as the length in the stacking direction is configured. On the left side of the combined flow path 32, six outlets 15 b of the first flow path 15 are opened, and on the right side, six second flow paths 20 are located at positions corresponding to the outlets 15 b of the first flow path 15. The outlet 20b is opened. When each temperature control plate 13 and each mixing plate 14 are bonded together, the first flow path 15 and the second flow path 20 of the mixing plate 14 are opened on the upper surface side by the bottom surface of the temperature control plate 13. Will be occluded. Further, the heating medium flow paths 31A and 31B of the temperature control plate 13 are closed at the upper surface side by the bottom surface of the mixing plate 14 or the bottom surface of the cover plate P1.

  In the laminated body 11 configured as described above, the first fluid F1 supplied in a pressurized state from the first fluid supply part 4A into the case C is temporarily stored in the storage part S1, and then stored in the laminated body 11. Divided into six first flow paths 15 provided. The second fluid F2 supplied in a pressurized state from the second fluid supply unit 4B into the case C is temporarily stored in the storage unit S2, and then the six second flow paths 20 provided in the stacked body 11. It is divided into.

  The first fluid F1 that has flowed into each first flow path 15 of the mixing plate 14 is sent from the large diameter part 16 to the small diameter part 17 while increasing the flow velocity, and is sent from the outlet 15b to the combined flow path 19. The second fluid F2 that has flowed into each second flow path 20 is sent from the large diameter part 21 to the small diameter part 22 while increasing the flow velocity, and is sent from the outlet 20b to the combined flow path 19.

  The minute flow of the first fluid F1 sent from the outlet 15b of each first flow path 15 has a one-to-one correspondence with the minute flow of the second fluid F2 sent from the outlet 20b of each second flow path 20 respectively. Collide from the front. For this reason, since the minute flows of the fluids F1 and F2 are mixed in the vicinity of the collision position, the mixing speed as a whole can be further increased.

  The fluids F1 and F2 sent from the six pairs of outlets 15b and 20b are mixed while generating turbulent flow in the combined flow path 19 and flow toward the outlet 32a of the combined flow path 32. The mixed solution F3 sent from the outlet 32a is sent to the sending unit 10 and is sent out of the case C from the sending unit 10.

  In this micromixer 2, when increasing the throughput of the fluids F1 and F2 to be mixed, the length of the combined flow path 32 is extended without changing the width of the combined flow path 32, that is, the distance between the outlets 15b and 20b. do it. Alternatively, without changing the width of the combined flow path 32, the number of the flow paths 15 and 20 that open to the side surface of the combined flow path 19 may be increased, or the number of layers of the mixing plate 14 may be increased. Therefore, the processing amount can be increased without reducing the mixing efficiency in the combined flow path 32. Further, in the micromixer having a small flow path width and a high pressure loss, the micromixer 1 has a relatively large volume of the combined flow path 32 and can prevent the blockage of the flow path due to an increase in the pressure loss. Furthermore, since the width of the combined flow path 32 can be appropriately changed according to the viscosity of the fluid to be mixed, the degree of freedom of the apparatus can be improved.

  The fluid mixing apparatus of the present invention can be provided with a separate mixer connected to the outlet of the mixer after the mixed fluid is obtained, and further mixed with the mixed fluid discharged from the mixer (1). The separate mixer has a microtubular channel 4 in which the mixed fluid flows in a liquid-tight manner, and the cross-sectional area of the mixed fluid at the outlet of the microtubular channel 4 is smaller than the cross-sectional area of the mixed fluid at the inlet A mixer having a cross-sectional area is preferable because of good mixing efficiency. Further, the separate mixer is in contact with the mixing portion of the mixer, and the cross-sectional area of the fluid flowing through the microtubular channel 1 in the form of honey and the mixing portion of the mixer, and the inside of the microtubular channel 2 is liquefied. The ratio of the cross-sectional area of the fluid (B) that is in contact with the outlet of the separate mixer and circulates in the form of the liquid nectar in the microtubular channel 4 with respect to the total area (A) of the cross-sectional area of the fluid that circulates B) / (A)] is preferably a mixer of 1/2 to 1/100.

  The microfluidic channel 4 through which the mixed fluid flows in a liquid-tight manner has a cross-sectional area of the mixed fluid at the outlet of the microtubular channel 4 that is smaller than the cross-sectional area of the mixed fluid at the inlet Examples of the mixer include a flow path shown in FIG. Hereinafter, a separate mixer having the microtubular channel 4 will be described with reference to FIG.

  The mixers (2) and (40) shown in FIG. 21 have a rectangular and plate-like microtubular channel forming portion 40A. The microtubular channel forming portion 6A has one or more first microtubular channels 40 at the center in the short side direction (Y direction in the drawing) of the upper surface 40a. The microtubular channel 40 is formed in a groove shape from the left end 40b to the right end 40c of the first microtubular channel forming portion 40A, and is open at the left end 40b, the right end 40c, and the upper surface 40a. . The opening at the left end 40b is the inlet 40d of the first microtubular channel 40, and the opening at the right end 40c is the outlet 40e of the microtubular channel 40. The inlet 40d communicates with the outlet of the mixer (1) to which the mixed fluid is supplied.

  In FIG. 21, a microtubular channel 40 includes a large-diameter portion 40f having a large channel diameter, a small-diameter portion 40g having a small channel diameter, and a tapered portion 40h that moderates the diameter change from the large-diameter portion 40f to the small-diameter portion 40g. Is provided.

  The large-diameter portion 40f is a flow path having a rectangular cross section in a direction orthogonal to the flow direction, and extends from the left end 40b to the right end 40c. The width and depth of the large-diameter portion 40f are preferably set within a range of, for example, a width of 0.1 mm or more and 100 mm or less and a depth of 0.1 mm or more and 5 mm or less in order to ensure the uniformity of the temperature distribution of the fluid and the device strength. The range of 0.1 mm to 20 mm in width and 0.1 mm to 2 mm in depth is more preferable. Furthermore, the width of 0.1 mm or more and 20 mm or less and the depth of 0.1 mm or more and 1 mm or less are more preferable. That is, as the shape of the large-diameter portion 40f, the pressure loss does not become too large, the flow path is not easily blocked, the flow path can be quickly controlled for heating and cooling, and the flow rate of the fluid can be increased. Any flow channel shape may be used as long as the shearing force acts and molecular diffusion occurs in a state accompanied by a slight turbulent flow, thereby improving the mixing efficiency.

Moreover, as a cross-sectional area of the fluid which distribute | circulates the inside of the 1st micro tubular flow path 6f in a liquid-tight state, 0.01-500 mm < ² > is preferable and 0.01-40 mm < ² > is more preferable. Furthermore, 0.01-20 mm < ² > is more preferable.

Moreover, as a cross-sectional area of the fluid which distribute | circulates the inside of the large diameter part 40f in a liquid-tight state, 0.01-500 mm < ² > is preferable and 0.01-40 mm < ² > is more preferable. Furthermore, 0.01-20 mm < ² > is more preferable.

  The small-diameter portion 40g is also a channel formed in a rectangular cross section, and extends from the front of the right end 40f toward the right end 40c. The small-diameter portion 40g only needs to have a cross-sectional area smaller than at least the cross-sectional area of the large-diameter portion 40f. For example, the width is 0.1 mm to 10 mm, the depth is 0.1 mm to 2.5 mm, and the width is 0.1 mm. A range of 5 mm or less and a depth of 0.1 mm or more and 1 mm or less is more preferable. Furthermore, the width of 0.1 mm or more and 2 mm or less and the depth of 0.1 mm or more and 0.5 mm or less are more preferable. That is, as the shape of the small diameter portion 40g, the pressure loss does not increase excessively, the flow path is not easily blocked, the flow path can be quickly controlled for heating and cooling, the fluid flow velocity can be increased, Any channel shape that can act as a force and molecular diffusion in a state accompanied by a slight turbulent flow can improve mixing efficiency.

Moreover, as a cross-sectional area of the fluid which distribute | circulates the inside of the 1st micro tubular flow path 6g in FIG. 21 liquid-tightly, 0.01-25 mm < ² > is preferable and 0.01-5 mm < ² > is more preferable. Furthermore, 0.01-1 mm < ² > is more preferable.

  The speed of the fluid when flowing through the small diameter portion 40g in FIG. 21 is preferably 0.5 m / second or more, more preferably 1.0 m / second or more because shearing force acting on the fluid increases. More preferably, it is 2.0 m / second or more and 5.0 m / second or more is particularly preferable. In particular, when mixing fluids having high viscosities or when mixing fluids having viscosities greatly different, the flow rate is preferably 2.0 m / second or more.

  In FIG. 21, one microtubular channel 40 is arranged, but the number is not particularly limited. When arranging a plurality, the width and depth of each microtubular channel 40 may be the same or different. Moreover, the channel width of the inlet and outlet of the microtubular channel 40 may be the same or different.

  By making the cross-sectional area of the mixed fluid at the outlet of the microtubular channel 4 of the separate mixer smaller than the cross-sectional area of the mixed fluid at the inlet, the pressure loss can be reduced, and the flow rate of the fluid can be reduced. By making it faster, fine turbulence can be generated and the mixing efficiency can be greatly improved. Specifically, the cross-sectional area of the fluid that flows in a liquid-tight manner in the micro-tubular channel at the inlet of the micro-tubular channel 3 is 0.01 to 20 mm2, and the inside of the micro-tubular channel in the outlet is liquid-tight. The fluid cross-sectional area is set to 0.01 to 5 mm2, and the fluid cross-sectional area flowing in a liquid-tight manner in the microtubular channel at the outlet portion is fluid-tightly flowing in the microtubular channel in the inlet portion. It is preferable to make it smaller than the area.

According to the above embodiment, the fluid mixing apparatus of the present invention can obtain the following effects.
(1) In the above-described embodiment, a microtubular channel having a heat exchanger and a mixer and separately flowing the first fluid and the second fluid as the first mixer, Using a mixer having a mixing section for mixing the fluid and the second fluid, the volume of the first fluid flowing in a liquid-tight manner in the microtubular channel 1 of the mixer and the liquid in the microtubular channel 2 The total volume (A) of the volume of the second fluid flowing in a dense manner and the total volume (B) of the first fluid or the second fluid flowing in a liquid-tight manner in the microtubular channel 3 The ratio [(B) / (A)] is 100 to 500. By adopting such a configuration, it is possible to efficiently mix a low-viscosity fluid and a fluid whose viscosity is significantly higher than that of the high-viscosity fluid.

  Hereinafter, the present invention will be described in more detail by way of examples. In the examples,% is based on weight unless otherwise specified.

Example 1
The mixing efficiency of the first fluid and the second fluid was evaluated by synthesizing urethane acrylate with the reaction device shown in FIG. In FIG. 23, the outlet of the tank 61 into which the first fluid is placed and the inlet of the plunger pump 63 are connected via a pipe through which the first fluid passes. In addition, the outlet of the tank 62 for storing the second fluid and the inlet of the plunger pump 64 are connected via a pipe through which the second fluid passes, and further, heat exchange with the outlet of the plunger pump 64 is performed. The inlet of the vessel 70 is connected via a pipe through which the second fluid passes. From the outlet of the plunger pump 63 and the outlet of the heat exchanger, piping through which the first fluid or the second fluid passes through the plunger pump 63 or the heat exchanger respectively extends. Is connected to the inlet of the micromixer 1.

  Further, the pipe connected to the outlet of the micromixer 1 is connected to the reaction line 1 including the chemical reaction microreactor 65 or 66 and the receiving container 68 via the connector 67, and the chemical reaction microreactor 65 or 66 and the receiving container. 69 is connected to reaction line 2 comprising 69.

  The first fluid and the second fluid are mixed in the micromixer 1 to form a mixed fluid. The mixed fluid is distributed to the reaction line 1 and the reaction line 2 according to the time when the mixed fluid is formed. The distributed mixed solution reacts in the microreactor, and the obtained reaction product is discharged to the receiving container 68 or 69 through the pipe connected to the outlet.

  The first fluid and the second fluid are mixed in the micromixer 1 to form a mixed fluid. The mixed fluid is distributed to the reaction line 1 and the reaction line 2 according to the time when the mixed fluid is formed.

  The distributed mixed solution reacts while flowing through the reaction line 1 or the reaction line 2 and is cooled. The reaction is performed in the microreactor 65 and the cooling is performed in the microreactor 66.

  The heat exchanger shown in FIG. 3 was used as the heat exchanger, and the heat exchanger having the laminated portion shown in FIG. 2 was used. The heat exchanger is formed by alternately stacking seven temperature control plates having 20 temperature control channels 6 formed by etching as well as six process plates having 20 reaction channels 4 formed by dry etching. . The material of the process plate 2 and the temperature control plate 3 is SUS304, and the plate thickness is 1 mm. The cross-sectional dimensions of the reaction channel 4 and the temperature control channel 6 are both width 1.2 mm × depth 0.5 mm. The length of the reaction channel 4 is 80 mm.

  The micromixer 1 is the one shown in FIG. 3, and the lamination part is the lamination part shown in FIG.

  The micromixer 1 has one first plate 5 in which a first microtubular channel is formed by dry etching and a second plate 7 in which a second microtubular channel is also formed by etching. One plate, two temperature control plates 12 and plates 5, 7 and temperature control plates 12 are alternately stacked as shown in FIG. 7, and this stacked body is sandwiched between two cover plates. Yes. The material of the plate is SUS304. The plate thickness of the plates 5 and 7 is 0.4 mm. The temperature control plate 12 is 1.0 mm.

  The first microtubular channel 6 has a large diameter portion 6f of width 1.2 mm × depth 0.2 mm × length 38 mm, and a small diameter portion 6 g of width 0.4 mm × depth 0.2 mm × length 2 mm. did. The number of microtubular channels on the first plate 5 is ten.

  In the second plate 7, the cross-sectional dimension of the large diameter portion 8a of the microtubular channel is 4.0 mm wide × 0.2 mm deep × 20 mm long. The small diameter portion 8b of the small tubular channel has a width of 0.4 mm, a depth of 0.2 mm, and a length of 2 mm, and the number of microtubular channels is ten. The cross-sectional dimension of the flow path of the temperature control plate 12 is width 1.2 × depth 0.5 × length (L1) 40 mm. The number of temperature control plates is ten.

  The microreactor 65 or 66 is the microreactor shown in FIG. 3, and the stacked portion for performing the reaction has the structure shown in FIG. In FIG. 3, α is a mixed fluid of the first fluid and the second fluid. β is a reactant of the mixed fluid. γ is a heat exchange medium.

  A urethane acrylate was synthesized using an isocyanate compound whose viscosity at 60 ° C. was adjusted to 2 mPa · s as the first fluid and a polyfunctional acrylate whose viscosity at 60 ° C. was adjusted to 300 mPa · s as the second fluid. The heat exchanger adjusted the temperature of the heat medium so that the temperature of the polyfunctional acrylate after distribution was 60 ° C. The temperature of the inlet of the heat exchanger of the second fluid is 20 ° C., and the viscosity at that time is 1500 mPa · s.

  The above compound was circulated at a flow rate of 100 g / min with the plunger pumps 63 and 64 and circulated through the micromixer 1 to obtain a mixed fluid. The obtained mixed fluid was divided into an early stage and a late stage, and the connectors were operated to send them to the microreactors 65 and 66, respectively. In each microreactor, the reaction was allowed to proceed at 160 ° C. under a residence time of 50 seconds. Urethane acrylates obtained using the microreactors 65 and 66 are abbreviated as urethane acrylate (1-1) and urethane acrylate (1-2), respectively. As a result of gel permeation chromatography (GPC) analysis, the area ratio [%] of urethane acrylate in urethane acrylate (1-1) and urethane acrylate (1-2) and the area ratio [%] of residual acrylate were 95. The values were the same as 5 [%] and 1.2 [%]. From this, it is considered that the fluid mixing apparatus of the present invention is capable of uniform mixing.

Example 2
The performance of the mixing apparatus of the present invention was evaluated by observing the process of obtaining a mixed solution of the first fluid and the second fluid with the reaction device shown in FIG. In FIG. 24, the outlet of the tank 61 into which the first fluid is placed and the inlet of the plunger pump 63 are connected via a pipe through which the first fluid passes. In addition, the outlet of the tank 62 for storing the second fluid and the inlet of the plunger pump 64 are connected via a pipe through which the second fluid passes, and further, heat exchange with the outlet of the plunger pump 64 is performed. The inlet of the vessel is connected via a pipe through which the second fluid passes. From the outlet of the plunger pump 63 and the outlet of the heat exchanger, piping through which the first fluid or the second fluid passes through the plunger pump 63 or the heat exchanger respectively extends. Is connected to the inlet of the micromixer 2. The obtained mixed fluid is discharged from the outlet of the micromixer 1 and collected in the receiving container 68.

  In the present embodiment, the heat exchanger is the heat exchanger shown in FIG. 3, and the heat exchanger having a laminated portion having the laminated portion shown in FIG. 2 was used. In the heat exchanger, two temperature control plates having 20 temperature control channels 6 formed by etching are alternately stacked, as well as one process plate having 20 reaction channels 4 formed by dry etching. . The material of the process plate 2 and the temperature control plate 3 is SUS304, and the plate thickness is 1 mm. The cross-sectional dimensions of the reaction channel 4 and the temperature control channel 6 are both width 1.2 mm × depth 0.5 mm. The length of the reaction channel 4 is 80 mm. The micromixer 2 has a structure in which the temperature control plate of the micromixer 1 is omitted.

  Specifically, one first plate 5 on which the first microtubular channel is formed by dry etching and one second plate 7 on which the second microtubular channel is also formed by etching are used. Is sandwiched between two cover plates. The material of the plate is SUS304. The plate thickness of the plates 5 and 7 is 0.4 mm.

  The large diameter portion 6f of the first microtubular channel 6 of the first plate 5 has a width of 1.2 mm × a depth of 0.2 mm × a length of 38 mm, and the small diameter portion 6g has a width of 0.4 mm × depth of 0.1 mm. It was 2 mm × length 2 mm. The number of microtubular channels on the first plate 5 is one. In the second plate 7, the cross-sectional dimension of the large-diameter portion 8a of the microtubular channel is 1.2 mm wide × 0.2 mm deep × 20 mm long. The small diameter portion 8b of the small tubular channel has a width of 0.4 mm, a depth of 0.2 mm, and a length of 2 mm, and the number of microtubular channels is one.

  An experiment was conducted to obtain a mixed fluid of water having a viscosity of 1 mPa · s at 20 ° C. as the first fluid and water tank having a viscosity of 30 mPa · s adjusted at 60 ° C. as the second fluid. The heat exchanger adjusted the temperature of the heat medium so that the temperature of the water tank after distribution was 60 ° C. Water and water tank were each circulated with a plunger pump at a flow rate of 10 g / min. As a result, it was confirmed that mixing was possible without pulsation.

Example 3
Urethane acrylate (3-1) and urethane acrylate (3-2) were obtained in the same manner as in Example 1 except that the micromixer 3 was used instead of the micromixer 1. As a result of gel permeation chromatography (GPC) analysis, the area ratio [%] of urethane acrylate in urethane acrylate (3-1) and urethane acrylate (3-2) and the area ratio [%] of residual acrylate were 95. The values were the same as 0 [%] and 1.2 [%]. From this, it is considered that the fluid mixing apparatus of the present invention is capable of uniform mixing.

  The micromixer 3 is the one shown in FIG. 15, and the laminated portion is the laminated portion shown in FIG. Specifically, in the process plate 14 of the micromixer 3, the first flow path 15 and the second flow path 20 have large diameter portions 16 and 21 having a width 8 mm × depth 0.2 mm × length 30 mm, and a small diameter portion 17. , 22 are 0.4 mm wide × 0.2 mm deep × 1 mm long. The process plate 14 is formed with one first flow path 15 and one second flow path 20. The process plates 14 and the temperature control plates 13 are alternately stacked, and the number of the plates is 5 and 6. In addition, the joint channel 19 and the heat insulating portion 30 were 2.0 mm wide × 11 deep × 15 mm long. This mixer has a structure in which one mixing plate 14 is fixed by cover plates P1 and P2, and two temperature control plates 13 are stacked in a vertical direction and accommodated in a case C.

Example 4
The mixing efficiency of the first fluid and the second fluid was evaluated by synthesizing urethane acrylate with the reaction device shown in FIG. 24, the outlet of the tank 61 for containing the first fluid and the inlet of the plunger pump 63 are connected via a pipe through which the first fluid passes, and the tank for containing the second fluid. The outlet of 62 and the inlet of the plunger pump 64 are connected via a pipe through which the second fluid passes. From the outlet of the plunger pump 63 and the outlet of the plunger pump 64, piping through which the first fluid or the second fluid passes through the plunger pump 63 or the plunger pump 64, respectively, extends. It is connected to the inlet of the micromixer 1 which is a mixer.

  In the micromixer 1, the first fluid and the second fluid are mixed to form a mixed fluid. The mixed fluid flows through the pipe connected to the micromixer 1 through the microtubular channel of a separate mixer connected via a connector, and is further mixed and discharged. The separate mixer is connected to a chemical reaction microreactor 65 or 66 connected in parallel via a connector 67. The piping connected to the outlet of the micromixer 1 is connected to the reaction line 1 including the chemical reaction microreactors 65 and 66 and the receiving container 68 via the connector 67, and the chemical reaction microreactors 65 and 66 and the receiving container 69. Connected to the reaction line 2. The mixed fluid mixed by the micromixer 1 and a separate mixer is distributed to the chemical reaction microreactor 65 or 66 according to the time when the mixed fluid is formed. The distributed mixed solution reacts in the microreactor, and the obtained reaction product is discharged to the receiving container 68 or 69 through the pipe connected to the outlet.

The first fluid and the second fluid are mixed in the micromixer 1 to form a mixed fluid.
The mixed fluid is distributed to the reaction line 1 and the reaction line 2 according to the time when the mixed fluid is formed.

  The distributed mixed solution reacts while flowing through the reaction line 1 or the reaction line 2 and is cooled. The reaction is performed in the microreactor 65 and the cooling is performed in the microreactor 66.

  The heat exchanger and micromixer 1 are the same as those used in Example 1. Separately, the mixer is the following mixer.

  Separately, the mixer includes one first plate 40 in which the microtubular channel 40 is formed by dry etching, two temperature control plates 12, and the plate 40 and temperature control plate 12 as shown in FIG. The laminated body is further sandwiched between two cover plates. The material of the plate is SUS304. The plate thickness of the plate 40 is 0.4 mm. The temperature control plate 12 is 1.0 mm.

  In the microtubular channel 40, the large diameter portion 40f has a width of 4.8 mm × depth of 0.2 mm × length of 38 mm, and the small diameter portion 40g has a width of 0.4 mm × depth of 0.2 mm × length of 2 mm. The number of microtubular channels on the plate 40 is two.

  The cross-sectional dimension of the flow path of the temperature control plate 12 is width 1.2 × depth 0.5 × length (L1) 40 mm.

  A urethane acrylate was synthesized using an isocyanate compound whose viscosity at 60 ° C. was adjusted to 10 mPa · s as the first fluid and a polyfunctional acrylate whose viscosity at 60 ° C. was adjusted to 300 mPa · s as the second fluid. The heat exchanger adjusted the temperature of the heat medium so that the temperature of the polyfunctional acrylate after distribution was 60 ° C. The temperature of the inlet of the heat exchanger of the second fluid is 20 ° C., and the viscosity at that time is 1500 mPa · s.

  Urethane acrylate (4-1) and urethane acrylate (4-2) were obtained in the same manner as in Example 1 except that the reaction device shown in FIG. 25 was used. As a result of gel permeation chromatography (GPC) analysis, the urethane acrylate area ratio [%] in urethane acrylate (4-1) and urethane acrylate (4-2) and the area ratio [%] of residual acrylate were 96. The values were the same as 0 [%] and 1.1 [%]. From this, it is considered that the fluid mixing apparatus of the present invention is capable of uniform mixing.

Comparative Example 1
A heterogeneous fluid mixing experiment was conducted in the same manner as in Example 2 except that a Y-shaped micromixer was used instead of the micromixer 2. The flow path through which the first fluid provided in the Y-shaped micromixer is 0.4 mm wide × 0.2 mm deep × 15 mm long. The flow path through which the second fluid flows is similarly 0.4 mm wide × 0.2 mm deep × 15 mm long. The flow path through which the mixed solution flows is 0.8 mm wide × 0.2 depth × 15 mm long. Since the plate forming the flow path is made of the same material as the micromixer 1, the roughness of the flow path wall surface is the same as that of the micromixer 1.

  As a result of the experiment, it was confirmed that intermittent flow was observed in water having a low viscosity, and stable flow was difficult. In other words, the Y-shaped mixer is designed so that the fluids intersect with each other, so when two types of fluids with different viscosities are passed through the fluidic channels, the low-viscosity fluid has a higher flow rate, It can be presumed that intermittent feeding occurs because the fluid with high viscosity has a low flow velocity.

Comparative Example 2
Other than using the micromixer used in the example of JP-T 9-512742 instead of the micromixer 1 and circulating each with a plunger pump so that the flow rate when flowing is 12.5 g / min. Produced urethane acrylate (2′-1) and urethane acrylate (2′-2) in the same manner as in Example 1. The cross-sectional dimensions of the microtubular channels of the first and second plates of the micromixer used in the embodiment of JP-T 9-512742 are width 0.4 mm × depth 0.2 mm × length 38 mm. The number of microtubular channels is ten. The number of stacked layers is one each.

  The urethane acrylate area ratio [%] in the obtained urethane acrylate (2′-1) and urethane acrylate (2′-2) is 92 [%] and 77 [%], respectively, and the area of the remaining acrylate. The ratio [%] was 2.7 [%] and 18.8 [%], respectively, and the area ratios were different. From this result, it was concluded that urethane acrylates having different physical properties were produced and uniform mixing was not performed. Moreover, although it tried to distribute | circulate at 100 g / min, pressure loss became 10 Mpa or more, distribution was difficult and urethane acrylate was not obtained.

The following are symbols related to the heat exchanger: α: first fluid or second fluid β: heat exchanged first fluid or second fluid γ: temperature control fluid 1: heat exchanger 1b: end face 1c of the heat exchanger : End face of heat exchanger 1d: Side face of heat exchanger 1e: Side face of heat exchanger 2: First plate (process plate)
2a: surface of the first plate 2b: end surface of the first plate 2c: end surface of the first plate 2d: side surface of the first plate 2e: side surface of the first plate 3: second plate (temperature control plate)
3a: The surface of the second plate 3b: The end surface of the second plate 3c: The end surface of the second plate 3d: The side surface of the second plate 3e: The side surface of the second plate 4: The flow path having the cross-sectional groove shape 6: The cross-sectional groove shape 6a: Supply channel with cross-sectional groove shape 6c: Discharge-side flow channel with cross-sectional groove shape p0: Predetermined interval w0: Width d0: Depth L: Flow Road length 30: Connector 31: Joint part 32: Joint part

The following symbols are related to the micromixer C: Case of the micromixer 1 C1: Left end of the case C C2: Lower right end of the case C C3: Lower left end of the case C C4: Upper end of the case C F1: First fluid F2: Second Fluid F3: Mixed fluid of first fluid and second fluid H1: Heat medium S1: Reservoir for temporarily storing first fluid (F1) S2: Reservoir for temporarily storing second fluid (F2) S3: mixing unit 1A: first fluid supply unit 1B: opening formed at the left end of case C 1C: connector connected to opening 2B 2A: second fluid supply unit 2B: formed at the lower right end of case C Opened portion 2C: Connector connected to opening portion 2B 3A: Heat medium supply portion for supplying heating medium H1 into case C 3B: Opening portion formed at lower left end of case C 3C: Connected to opening portion 3B Connector 4A: Heat medium delivery part 4B: Opening part formed at the upper right end of case C 4C: Connector connected to opening part 4B 5: First plate 5A: Delivery part comprising opening part 5B and connector 5C 5B: Case Opening portion formed at the right end of C 5C: Connector connected to opening portion 5B 6: First microtubular channel 6A: First microtubular channel forming portion 6a: First microtubular channel forming Upper surface of part 6A 6b: Left end of first microtubular flow path forming part 6A 6c: Right end of first microtubular flow path forming part 6A 6d: Inlet of first microtubular flow path 6e: First 6f: Large diameter portion of the first microtubular flow path 6g: Small diameter portion of the first microtubular flow path 6h: Tapered portion 7 of the first microtubular flow path 6: Second plate 7A: Second microtubular flow path forming portion 7a: Second microtubular flow path forming Upper surface of portion 7A 7b: Lower end of second microtubular flow path forming portion 7A 7c: End in the short direction from lower end 7b of second microtubular flow path forming portion 7A 7d: Second microscopic Right end of the tubular flow path forming portion 7A 8: second microtubular flow path 8a: inlet of the second microtubular flow path 8b: outlet of the first microtubular flow path 11: as fluid mixing structure Laminate,
12: Temperature control plate 12a: Surface of temperature control plate 12 13a: Main flow path arranged in the longitudinal direction of temperature control plate 12 13b: Supply side flow path communicating with main flow path 13a 13c: Main flow path 13a Communicating discharge side channel

The following is a code related to the micromixer C: Case of the micromixer 1 F1: First fluid F2: Second fluid F3: Mixed fluid of the first fluid and the second fluid H1: First heating medium H2: Second Heat medium C1: left end of case C2: lower right end of case C C3: upper end of case C4: lower end of case C 2: opening formed at end of case C 3: connector connected to opening 2 4: Fluid supply part 5A: Opening part 5B: Opening part 5C: Opening part 5D: Opening part 6A: Connector connected to the opening part 6B: Connector connected to the opening part 6C: Connector connected to the opening part 6D: Connector 7A: Heat medium supply part 7B: Heat medium supply part 7C: Medium delivery part 7D: Medium delivery part 8: Opening part 9: Connector 10: Delivery part 11: Laminate as fluid mixing structure ,
11a: Each side surface of the laminated body 11b: Each side surface of the laminated body 11 S1: A storage part for temporarily storing the first fluid (F1) S2: A storage part for temporarily storing the second fluid (F2) 13: Temperature control Temperature control plate as plate,
14: Mixing plate,
14A: 1st flow-path formation part,
14B: 2nd flow-path formation part,
15: 1st flow path 16: 2nd flow path,
15b, 20b: exit,
19: Joint channel,
30: heat insulation part,
31A: a first heat medium flow path as a first medium flow path,
31B: a second heat medium flow path as a second medium flow path,
46: Heat medium flow path,
F1: first fluid,
F2: second fluid,
H1: a first heat medium as a first medium,
H2: second heat medium as the second medium,
X1, X2: central axes.

The following are the symbols related to the micro heat exchanger 1 .alpha.... Fluid containing the mixed fluid (A) .beta.... Fluid containing the mixed fluid (A) .gamma. ··· Micro heat exchanger 1b ··· End surface 1c of the laminate included in the micro heat exchanger · · · End surface 1d of the laminate included in the micro heat exchanger 1d ··· Layer included in the micro heat exchanger Side surface of body 1e... Side surface of laminated body of micro heat exchanger 2... First plate (process plate)
2a ... the first plate surface 2b ... the first plate end surface 2c ... the first plate end surface 2d ... the first plate side surface 2e ... the first plate side surface 3 ... 2nd plate (temperature control plate)
3a ··· surface of the second plate 3b ··· end surface of the second plate 3c ··· end surface of the second plate 3d ··· side surface of the second plate 3e ··· side surface of the second plate 4... Cross-sectional groove-shaped channel 6... Cross-sectional groove-shaped temperature control channel 6 a... Cross-sectional groove-shaped main channel 6 b. Supply side flow path 6c ··· Discharge side flow path having a groove shape in cross section p ₀ · · · Predetermined interval w ₀ ··· width d ₀ ··· depth L ···· Channel length

61: Tank for storing the first fluid 62: Tank for storing the second fluid 63: Plunger pump 64: Plunger pump 65: Microreactor 66: Microreactor 67: Connector 68: Receiving container 69: Receiving container 70: Heat Exchanger

Claims (13)

A tank for storing a first fluid, a tank for storing a second fluid, a mixer, and a heat exchanger in which at least a tank for storing the first fluid and a mixer are arranged, or a tank for storing the second fluid and the mixer A fluid mixing device having any one of the arranged heat exchangers,
The mixer includes a microtubular channel 1 through which a first fluid flows in a liquid-tight manner, a microtubular channel 2 through which a second fluid flows in a liquid-tight manner, and a first tube discharged from the microtubular channel 1. A mixing section in which the fluid and the second fluid discharged from the microtubular channel 2 are mixed,
The heat exchanger has a microtubular channel 3 through which the first fluid or the second fluid flows in a liquid form,
Moreover, the total volume (A) of the volume of the first fluid that flows in a liquid-tight manner in the microtubular channel 1 and the volume of a second fluid that flows in a liquid-tight manner in the microtubular channel 2; The ratio [(B) / (A)] to the total volume (B) of the first fluid or the second fluid flowing in a liquid-tight manner in the microtubular channel 3 is 2
A fluid mixing device, characterized in that the fluid mixing device is 50.   The area of the cross section leading to the outlet of the first microtubular channel and the outlet of the second microtubular channel in the mixing portion of the mixer is equal to the cross-sectional area of the outlet of the first microtubular channel and the second The fluid mixing device according to claim 1, wherein the fluid mixing device is 4 to 100 times the total cross-sectional area of the outlet of the microtubular channel.   The mixer communicates with a second fluid that communicates with a fluid supply path through which a second fluid circulates in a first plate having a first microtubular channel that communicates with a fluid supply path through which the first fluid circulates. The second plate having the second microtubular channel to be laminated, the outlet of the first microtubular channel, and the outlet of the second microtubular channel, the first fluid and the second A micromixer having a mixing part for mixing two fluids, wherein at least one of the first plate and the second plate is in communication with the inlet part of the microtubular channel communicating with the fluid supply path and the mixing part And a cross-sectional area of the fluid that flows in a liquid-tight manner in the microtubular channel at the outlet portion. Is a fluid cross-sectional area that circulates in a liquid-tight manner in one microtubular channel at the entrance. Fluid mixing apparatus according to claim 1, wherein the plate has a smaller cross-sectional area Ri.   The first plate has an inlet portion of a microtubular channel that communicates with the fluid supply path and an outlet portion of the microtubular channel that communicates with the mixing portion, and the inside of the microtubular channel at the outlet portion is liquid-tight. The cross-sectional area of the fluid that circulates in a shape is a plate that has a smaller cross-sectional area than the cross-sectional area of the fluid that circulates in a liquid-tight manner in the microtubular channel at the inlet, and the second plate communicates with the fluid supply path An inlet portion of the channel and an outlet portion of the microtubular channel that communicates with the mixing portion, and the microtubular channel of the inlet portion is a single channel, and the inside of the microtubular channel in the outlet portion 4. The fluid mixing device according to claim 3, wherein the fluid cross-sectional area flowing in a liquid-tight state is a plate having a smaller cross-sectional area than the fluid cross-sectional area flowing in a liquid-tight state in one microtubular channel at the inlet. The fluid cross-sectional area which flows through the fine tubular flow channel in a liquid-tight manner at the inlet portion of the first plate is 0.01~40mm ^2, fluid flowing through the fine tubular flow channel at the outlet portion to the liquid-tight cross-sectional area at 0.01 to 10 mm ^2, the fluid cross-sectional area which flows through one of the small tubular passage at the inlet portion of the second plate in a liquid-tight manner is 0.01~40mm ^2, the outlet section The fluid mixing device according to claim 4, wherein the fluid has a cross-sectional area of 0.01 to 10 mm ² flowing in a liquid-tight manner in the microtubular channel.   The fluid mixing device according to any one of claims 3 to 5, wherein a temperature control plate having a heat exchange medium flow path through which the heat exchange medium is further circulated is laminated on the laminated portion. The mixer has a first flow path forming portion in which a first flow path through which a first fluid flows and a second flow path formation in which a second flow path through which a second fluid flows are formed. A mixing plate having a portion,
The outlet of the first channel and the outlet of the second channel are opposed to each other via a merge channel where the first fluid and the second fluid merge, and in the central axis direction of the merge channel The fluid mixing device according to claim 7, wherein the opening position of the outlet of the first flow path is included in or the same as the opening position of the second flow path in the central axis direction of the combined flow path.   The fluid mixing device according to claim 7, wherein the mixing plate has a central axis with respect to a cross section of the outlet of the first flow path and a central axis with respect to a cross section of the outlet of the second flow path.   The fluid mixing device according to claim 7, wherein an opening surface of the outlet of the first channel and an opening surface of the outlet of the second channel are parallel.   A plurality of outlets of the first channel and a plurality of outlets of the second channel are formed, respectively, and the outlet of the first channel and the outlet of the second channel face each other on a one-to-one basis. The fluid mixing apparatus according to claim 7.   The combined flow path is formed in an elongated shape, and among the opposing side surfaces of the combined flow path, a plurality of outlets of the first flow paths are arranged side by side along the longitudinal direction of the combined flow path. The fluid mixing device according to claim 7, wherein outlets of the plurality of second flow paths are arranged side by side along the longitudinal direction of the combined flow path on the other side surface. A temperature control plate laminated with the mixing plate;
The temperature control plate is provided between the first medium flow path through which the first medium flows, the second medium flow path through which the second medium flows, and the first medium flow path and the second medium flow path. Has a heat insulation,
In the mixing plate and the temperature control plate, the first flow path forming section and the first medium flow path correspond in the stacking direction, and the second flow path forming section and the second medium flow path are stacked in the stacking direction. The fluid mixing device according to claim 7, wherein the fluid mixing devices are stacked so as to correspond to each other.   The total volume (A) of the volume of the first fluid flowing in a liquid-tight manner in the microtubular channel 1 and the volume of the second fluid flowing in a liquid-tight manner in the microtubular channel 2 and the microtubular The fluid mixing according to claim 1, wherein the ratio ((B) / (A)) of the first fluid or the second fluid (B) flowing in a liquid-tight manner in the flow path 3 is 5-30. apparatus.

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