JP2012159756A - Gray scale mask - Google Patents
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本発明は、マイクロレンズを製造する目的等のために用いられるグレースケールマスクに関するものである。 The present invention relates to a gray scale mask used for the purpose of manufacturing a microlens and the like.
従来、バイナリパターンで形成されるグレースケールマスクとしては、開口部の形状が共通で配置密度を制御することで光透過率を調整するもの（以下、密度制御型という）と、開口部の密度が等しくて開口率を制御することで光透過率を調整するもの（以下、開口率制御型という）との２種類がある（例えば、特許文献１参照）。ここで、密度制御型のグレースケールマスクでは原理的に開口率を細かく制御することができないため、光透過率の細かい制御を行う場合には、開口率制御型のグレースケールマスクを用いる必要があった。 Conventional gray scale masks formed with a binary pattern have the same shape of the opening and the light density is adjusted by controlling the arrangement density (hereinafter referred to as density control type), and the density of the opening is There are two types, one that adjusts the light transmittance by controlling the aperture ratio to be equal (hereinafter referred to as an aperture ratio control type) (see, for example, Patent Document 1). Here, since the aperture ratio cannot be finely controlled in principle with a density control type gray scale mask, it is necessary to use an aperture ratio control type gray scale mask when performing fine control of light transmittance. It was.
ところが、開口率制御型のグレースケールマスクでは、開口部のサイズ（開口率）がマスク描画装置の分解能に依存するため、従来、設計値で高い光透過率が設定されていても、マスク描画装置の分解能を超えた開口率、ひいては光透過率を再現することはできなかった。例えば、開口率制御型のグレースケールマスクでは、１ピクセル毎にその中心部分に開口部が配置されることが多く、この開口部の大きさを拡げていくことで光透過率を高くするようになっているが、このとき、マスク描画装置で表現可能な最小サイズが０．５μｍで、開口部ピッチ（すなわち、１ピクセルのサイズ）が５μｍの場合、隣接する開口部との最小ギャップも０．５μｍとなるため、結果として開口率は１〜８１％の間しか再現できなかった。 However, in the aperture ratio control type gray scale mask, since the size of the opening (aperture ratio) depends on the resolution of the mask drawing apparatus, even if a high light transmittance is conventionally set as a design value, the mask drawing apparatus It was impossible to reproduce the aperture ratio and the light transmittance exceeding the resolution. For example, in an aperture ratio control type grayscale mask, an opening is often arranged at the center of each pixel, and the light transmittance is increased by increasing the size of the opening. However, at this time, when the minimum size that can be expressed by the mask drawing apparatus is 0.5 μm and the opening pitch (that is, the size of one pixel) is 5 μm, the minimum gap between adjacent openings is also 0. As a result, the aperture ratio could be reproduced only between 1 and 81%.
ここで、さらに高い光透過率が必要な場合の対応案として、１ピクセル中の開口部と非開口部の面積比が１：１（５０％ずつ）の場合を境にして、１ピクセル中の開口部と非開口部の位置を逆転させる方法が提案されている。すなわち、１ピクセル中の開口部が５０％に達するまでは、その中心部分に配置された開口部が徐々に拡がるようにして開口率を高くしていき、１ピクセル中の開口部が５０％に達したら、その後は、中心部分の開口部と周辺部分の非開口部の位置を入れ替えた上で、当該入れ替えで中心部分に配置された非開口部を徐々に狭めていく（つまり、周辺部分の開口部が徐々に中心部分に向かって拡がっていく）ことで、再現できる開口率の上限を高くするものである。このようにすることで、マスク描画装置の分解能を超えずに高い開口率、ひいては高い光透過率を再現することが可能となる。 Here, as a countermeasure when a higher light transmittance is required, a case where the area ratio of the opening to the non-opening in the pixel is 1: 1 (50% each) is used as a boundary. A method for reversing the positions of the opening and the non-opening has been proposed. That is, until the aperture in one pixel reaches 50%, the aperture ratio is increased so that the aperture disposed in the central portion gradually expands, and the aperture in one pixel reaches 50%. After that, after replacing the positions of the opening of the central portion and the non-opening of the peripheral portion, the non-opening portion arranged in the central portion by the replacement is gradually narrowed (that is, the peripheral portion As the opening gradually expands toward the center portion, the upper limit of the reproducible aperture ratio is increased. By doing so, it is possible to reproduce a high aperture ratio and thus a high light transmittance without exceeding the resolution of the mask drawing apparatus.
しかしながら、１ピクセル中の開口部と非開口部の位置をある状態（ここでは面積比が１：１の場合）を境に逆転させると、その逆転する箇所で光透過率にずれが生じてしまうという問題が起こることがわかった。すなわち、計算上は１ピクセル中の開口部と非開口部の位置を逆転させても開口率（光透過率）は連続性を保つこととなるが、実際には、開口箇所の誤差や開口形状が変化することで開口率が大きく変化してしまい、１ピクセル中の開口部と非開口部の位置を逆転させた箇所を境に開口率の連続性を保つことができなくなってしまうという問題が生じてしまうのである。 However, if the position of the opening and the non-opening in one pixel is reversed at a certain state (here, the area ratio is 1: 1), the light transmittance is shifted at the reversed position. It was found that the problem occurred. That is, in calculation, the aperture ratio (light transmittance) is maintained even if the positions of the opening and non-opening in one pixel are reversed. Changes the aperture ratio greatly, and the continuity of the aperture ratio cannot be maintained at a position where the positions of the opening and the non-opening in one pixel are reversed. It will occur.
本発明は、このような事情に鑑みてなされたものであり、光透過率の連続性を保った上で、高い光透過率を再現することができるグレースケールマスクを提供することを目的とする。 The present invention has been made in view of such circumstances, and an object thereof is to provide a gray scale mask capable of reproducing high light transmittance while maintaining continuity of light transmittance. .
かかる課題を解決するために、本発明は、隣接配置された複数のピクセル（１）で構成されたグレースケールマスクにおいて、１ピクセル（１）には少なくとも１の単位領域（１０）を有しており、前記単位領域（１０）はそれぞれ、光を通す第１領域（ａ）と光を通さない第２領域（ｂ）とで構成され、前記第１領域（ａ）と前記第２領域（ｂ）の面積比に応じて光透過率が決定されるようになっており、前記１ピクセル（１）の光透過率が５０％からの差の絶対値が同じで、前記５０％よりも大きい光透過率を有したときと小さい光透過率を有したときを比較すると、前記第１領域（ａ）と前記第２領域（ｂ）の面積比が１：１となる前記単位領域（１０）における前記第１領域（ａ）と前記第２領域（ｂ）の境界線（Ｌ）を中心線として線対称で、かつ、前記第１領域（ａ）と前記第２領域（ｂ）が入れ替わった形状となるグレースケールマスクとしたことを特徴とする。 In order to solve such a problem, the present invention provides at least one unit region (10) in one pixel (1) in a gray scale mask composed of a plurality of pixels (1) arranged adjacent to each other. Each of the unit regions (10) includes a first region (a) that transmits light and a second region (b) that does not transmit light, and the first region (a) and the second region (b) ) Is determined in accordance with the area ratio of light), the light transmittance of the one pixel (1) is the same as the absolute value of the difference from 50%, and the light is larger than 50%. Comparing when it has a transmittance and when it has a small light transmittance, in the unit region (10) where the area ratio of the first region (a) and the second region (b) is 1: 1. The boundary line (L) between the first area (a) and the second area (b) is the center line. In line symmetry, and is characterized in that a gray-scale mask to be the first region (a) and the second region (b) is replaced shape.
なお、ここでは、本発明をわかりやすく説明するため、実施の形態を表す図面の符号に対応付けて説明したが、本発明が実施の形態に限定されるものではないことは言及するまでもない。 Here, in order to explain the present invention in an easy-to-understand manner, the description has been made in association with the reference numerals of the drawings representing the embodiments. However, it is needless to mention that the present invention is not limited to the embodiments. .
本発明によれば、１ピクセルに少なくとも１つ有する単位領域がそれぞれ、光を通す第１領域と光を通さない第２領域とで構成され、１ピクセルの光透過率が５０％からの差の絶対値が同じで、５０％よりも大きい光透過率を有したときと小さい光透過率を有したときを比較すると、第１領域と第２領域の面積比が１：１となる単位領域における双方の領域の境界線を中心線として線対称で、かつ、その領域同士が入れ替わった形状となることで、光透過率の連続性を保った上で、高い光透過率を再現することができる。 According to the present invention, each unit region having at least one pixel includes a first region that transmits light and a second region that does not transmit light, and the light transmittance of one pixel is different from 50%. When the absolute value is the same and the light transmittance greater than 50% is compared with the light transmittance smaller than that in the unit region where the area ratio of the first region and the second region is 1: 1. Highly light transmittance can be reproduced while maintaining the continuity of the light transmittance by forming a shape that is symmetrical with respect to the boundary line between the two regions and that the regions are interchanged. .
以下、本発明の実施の形態について説明する。
［発明の実施の形態１］
Embodiments of the present invention will be described below.
Embodiment 1 of the Invention
最初に、本発明の実施の形態１について、図１〜図３を用いて説明する。図１は、本発明の実施の形態１に係るグレースケールマスクの単位領域を示す図である。図２は、同実施の形態１に係るグレースケールマスクの単位領域を開口率順に配置したパターンを示す図である。図３は、グレースケールマスクにおける光透過率の設計値のグラフとそれに基づくグレースケールマスクのパターンを示す図である。 First, Embodiment 1 of the present invention will be described with reference to FIGS. FIG. 1 is a diagram showing a unit region of a grayscale mask according to Embodiment 1 of the present invention. FIG. 2 is a diagram showing a pattern in which unit areas of the grayscale mask according to the first embodiment are arranged in order of aperture ratio. FIG. 3 is a diagram showing a graph of a design value of light transmittance in a gray scale mask and a gray scale mask pattern based thereon.
本発明のグレースケールマスクは、図１に示すような、ピクセル１を複数、隣接配置した構成となっており、１ピクセル中に少なくとも１の単位領域１０を有している。この単位領域１０とは、後述する本発明の特徴を備える最小単位の領域であり、１ピクセルそのままの領域又は１ピクセルを同じ形状で等分割した１つの領域となっている。本実施の形態のグレースケールマスクでは、１ピクセル中に１つの単位領域１０を有している（すなわち、１ピクセル１そのままが１つの単位領域１０を構成している）。また、本実施の形態の単位領域１０は正方形状となっており、その単位領域１０がさらに４つの正方形状部１１，１２，１３，１４に区分けされている。 The gray scale mask of the present invention has a configuration in which a plurality of pixels 1 are arranged adjacent to each other as shown in FIG. 1, and has at least one unit region 10 in one pixel. The unit area 10 is a minimum unit area having the characteristics of the present invention to be described later. The unit area 10 is a single pixel area or a single area obtained by equally dividing one pixel into the same shape. In the gray scale mask according to the present embodiment, one unit area 10 is included in one pixel (that is, one pixel 1 itself constitutes one unit area 10). In addition, the unit region 10 of the present embodiment is a square shape, and the unit region 10 is further divided into four square-shaped portions 11, 12, 13, and 14.
また、単位領域１０は、光を通す透光部である第１領域ａと、光を通さない遮光部である第２領域ｂとで構成されている。そして、これら第１領域ａと第２領域ｂの面積が、マスク描画装置の分解能の限界に至るまでそれぞれ増減することで、当該単位領域１０における開口率（光透過率）が拡縮するようになっている。 The unit region 10 includes a first region a that is a light transmitting portion that transmits light and a second region b that is a light shielding portion that does not transmit light. The area of the first region a and the second region b is increased or decreased until reaching the resolution limit of the mask drawing apparatus, so that the aperture ratio (light transmittance) in the unit region 10 is expanded or reduced. ing.
また、図１及び図２に示すように、単位領域１０における開口率の拡縮において、第１領域ａと第２領域ｂの面積比が１：１（すなわち、５０％ずつ）となるより第２領域ｂの方が広い場合（例えば、図１における左側の図参照）には、４つの正方形状部１１，１２，１３，１４のうちの右上部１３と左下部１２は全て第２領域（遮光部）ｂのままで推移し、左上部１１と右下部１４のみ、当該部位のそれぞれの中心部分が、開口率が高くなるに連れて徐々に第２領域ｂから第１領域（透光部）ａの面積が大きくなるように変化する（開口部が大きくなる）ようになっている。 Further, as shown in FIGS. 1 and 2, in the enlargement / reduction of the aperture ratio in the unit region 10, the area ratio between the first region a and the second region b is 1: 1 (that is, 50% each). When the region b is wider (see, for example, the left diagram in FIG. 1), the upper right portion 13 and the lower left portion 12 of the four square-shaped portions 11, 12, 13, and 14 are all in the second region (light-shielding). Part) b remains unchanged, and only the upper left part 11 and the lower right part 14 are such that the central part of each part gradually increases from the second area b to the first area (translucent part) as the aperture ratio increases. It changes so that the area of a may become large (an opening part will become large).
そして、単位領域１０における開口率の拡縮において、第１領域ａと第２領域ｂの面積比が１：１（すなわち、５０％ずつ）となると（例えば、図１における中央の図参照）、４つの正方形状部１１，１２，１３，１４のうちの左上部１１と右下部１４は全て第１領域ａとなり、右上部１３と左下部１２は全て第２領域ｂとなる状態（所謂、市松模様の状態）になる。このときの第１領域ａと第２領域ｂとの境界（ここでは、単位領域１０の上下方向の中心線（なお、この場合刃単位領域１０の左右方向の中心線でも可））を境界線Ｌとする。 When the area ratio of the first region a and the second region b is 1: 1 (that is, 50% each) in the enlargement / reduction of the aperture ratio in the unit region 10 (see, for example, the center diagram in FIG. 1), 4 Of the two square portions 11, 12, 13, and 14, the upper left portion 11 and the lower right portion 14 are all in the first region a, and the upper right portion 13 and the lower left portion 12 are all in the second region b (so-called checkered pattern). State). The boundary between the first region a and the second region b at this time (here, the vertical center line of the unit region 10 (in this case, the horizontal center line of the blade unit region 10 is also acceptable)) Let L be.
さらに、単位領域１０における開口率の拡縮において、第１領域ａと第２領域ｂの面積比が１：１（すなわち、５０％ずつ）となるより第１領域ａの方が広くなると（例えば、図１における右側の図参照）、４つの正方形状部１１，１２，１３，１４のうちの左上部１１と右下部１４は全て第１領域ａのままで推移し、右上部１３と左下部１２のみ、当該部位のそれぞれの周辺部分が、開口率が高くなるに連れて徐々に第２領域ｂから第１領域ａの面積が大きくなるように変化する（開口部が大きくなる）ようになっている。 Further, in the enlargement / reduction of the aperture ratio in the unit region 10, when the first region a becomes wider than the area ratio of the first region a and the second region b becomes 1: 1 (that is, 50% each) (for example, (See the diagram on the right side in FIG. 1) Of the four square-shaped portions 11, 12, 13, and 14, the upper left portion 11 and the lower right portion 14 all remain in the first region a, and the upper right portion 13 and the lower left portion 12. Only the respective peripheral portions of the part change so that the area of the first region a gradually increases from the second region b (the opening becomes larger) as the aperture ratio increases. Yes.
本実施の形態では、前記したように、第１領域ａと第２領域ｂの面積比を変化させていく際、図１における中央の図に示すような第１領域ａと第２領域ｂの面積比が１：１（すなわち、１ピクセルの光透過率が５０％）となる単位領域１０を基準とし、これより開口率が高いものと低いものとで、その面積比が丁度逆となるものについて（すなわち、１ピクセルの光透過率が５０％からの差の絶対値が同じで、５０％よりも大きい光透過率を有したときと小さい光透過率を有したときを比較すると）、面積比が１：１となる単位領域１０における第１領域ａと第２領域ｂとの境界線Ｌを中心線として線対称で、かつ、第１領域ａと第２領域ｂとが入れ替わった状態となっている。すなわち、単位領域１０における第１領域ａと第２領域ｂの面積比がＡ：Ｂのもの（１ピクセルの光透過率が５０％＋α）とＢ：Ａのもの（１ピクセルの光透過率が５０％−α）については、それぞれ、境界線Ｌで線対称で、かつ、第１領域ａと第２領域ｂとを入れ替えた形状となるように、単位領域１０の形状が構成されている。このようにすることで、急に開口形状が変化してグレースケールマスクの光透過率の連続性にずれが生じることを防ぎ、当該連続性を保ちながら、高い開口率（光透過率）を確保することができるものである。 In the present embodiment, as described above, when the area ratio between the first region a and the second region b is changed, the first region a and the second region b as shown in the center diagram in FIG. A unit area 10 having an area ratio of 1: 1 (that is, a light transmittance of 1 pixel of 50%) is used as a reference. (I.e., when the light transmittance of one pixel is the same as the absolute value of the difference from 50%, comparing when it has a light transmittance greater than 50% and when it has a small light transmittance) A state in which the first region a and the second region b are interchanged with each other in a line symmetry with respect to the boundary line L between the first region a and the second region b in the unit region 10 having a ratio of 1: 1; It has become. That is, the area ratio of the first region a and the second region b in the unit region 10 is A: B (light transmittance of one pixel is 50% + α) and B: A (light transmittance of one pixel is For 50% −α), the shape of the unit region 10 is configured so as to be symmetrical with respect to the boundary line L and to have a shape in which the first region a and the second region b are interchanged. By doing this, the aperture shape suddenly changes and the continuity of light transmittance of the gray scale mask is prevented from shifting, and high aperture ratio (light transmittance) is secured while maintaining the continuity. Is something that can be done.
ここで、図３に示すように、本実施の形態のグレースケールマスクにおける開口率の低いもの（ここでは、４．６％）から高いもの（ここでは、９１．７％）までの単位領域を順に並べると、その模様が綺麗にグラデーションとなっており、本実施の形態のグレースケールマスクが、光透過率の連続性を維持した状態となっていることがわかる。
［発明の実施の形態２〜７］
Here, as shown in FIG. 3, unit regions from a low aperture ratio (here, 4.6%) to a high area (here, 91.7%) in the gray scale mask of this embodiment are shown. When arranged in order, it can be seen that the pattern has a beautiful gradation, and the gray scale mask of the present embodiment maintains the continuity of light transmittance.
[Embodiments 2-7 of the invention]
次に、本発明の実施の形態２〜７について、図４を用いて説明する。図４は、本発明の実施の形態２〜７に係るグレースケールマスクの単位領域を示す図である。なお、本発明の実施の形態２〜７については、前記した本発明の実施の形態１と異なる箇所についてのみ説明し、同様の箇所については説明を省略する。 Next, Embodiments 2 to 7 of the present invention will be described with reference to FIG. FIG. 4 is a diagram showing a unit area of a gray scale mask according to Embodiments 2 to 7 of the present invention. In addition, about Embodiment 2-7 of this invention, only a different location from Embodiment 1 of above-mentioned this invention is demonstrated, and description is abbreviate | omitted about the same location.
本発明の実施の形態２のグレースケールマスクは、図４（１）に示すように、１ピクセル１０１中に正方形状の１つの単位領域１１０を有しており、第１領域ａと第２領域ｂの面積比が１：１となる単位領域１１０における境界線Ｌ１が、左上から右下に掛けての対角線と同じ線となるように構成されている（図４（１）における中央の図参照）。また、この単位領域１１０における第１領域ａと第２領域ｂは、境界線Ｌ１で仕切られたそれぞれの範囲の中心部分を中心として直角二等辺三角形状で増減するようになっている。このような単位領域１１０でも、前記した本発明の実施の形態１と同様の作用効果を得ることができる。 As shown in FIG. 4A, the grayscale mask according to the second embodiment of the present invention includes one unit area 110 having a square shape in one pixel 101, and includes a first area a and a second area. The boundary line L1 in the unit region 110 in which the area ratio of b is 1: 1 is configured to be the same line as the diagonal line from the upper left to the lower right (see the central diagram in FIG. 4 (1)). ). In addition, the first region a and the second region b in the unit region 110 increase and decrease in a right isosceles triangle shape with the central portion of each range partitioned by the boundary line L1 as the center. Even in such a unit region 110, the same effects as those of the first embodiment of the present invention can be obtained.
また、本発明の実施の形態３のグレースケールマスクは、図４（２）に示すように、１ピクセル２０１中に正方形状の１つの単位領域２１０を有しており、第１領域ａと第２領域ｂの面積比が１：１となる単位領域２１０における境界線Ｌ２が、上下方向の中心線と同じ線となるように構成されている（図４（２）における中央の図参照）。また、この単位領域２１０における第１領域ａと第２領域ｂは、境界線Ｌ２で仕切られたそれぞれの範囲の中心部分を中心として縦長の長方形状で増減するようになっている。このような単位領域２１０でも、前記した本発明の実施の形態１と同様の作用効果を得ることができる。 In addition, as shown in FIG. 4B, the grayscale mask according to the third embodiment of the present invention has one square unit region 210 in one pixel 201, and the first region a and the first region a. The boundary line L2 in the unit region 210 in which the area ratio of the two regions b is 1: 1 is configured to be the same line as the vertical center line (see the center diagram in FIG. 4 (2)). Further, the first area a and the second area b in the unit area 210 increase or decrease in a vertically long rectangular shape centering on the central portion of each range partitioned by the boundary line L2. Even in such a unit region 210, the same effects as those of the first embodiment of the present invention can be obtained.
また、本発明の実施の形態４のグレースケールマスクは、図４（３）に示すように、１ピクセル３０１中に正方形状の４つの単位領域３１０を有しており、第１領域ａと第２領域ｂの面積比が１：１となる単位領域３１０における境界線Ｌ３が、単位領域３１０における左上から右下への対角線と同じ線となるように構成されている（図４（３）における中央の図参照）。また、この単位領域１１０における第１領域ａと第２領域ｂは、境界線Ｌ３で仕切られたそれぞれの範囲の対角の角部を中心として直角二等辺三角形状で増減するようになっている。このような単位領域３１０でも、前記した本発明の実施の形態１と同様の作用効果を得ることができる。 Further, as shown in FIG. 4 (3), the grayscale mask of Embodiment 4 of the present invention has four square unit regions 310 in one pixel 301, and the first region a and the first region a. The boundary line L3 in the unit region 310 in which the area ratio of the two regions b is 1: 1 is configured to be the same line as the diagonal line from the upper left to the lower right in the unit region 310 (in FIG. 4 (3)). (See the middle figure). Further, the first region a and the second region b in the unit region 110 increase or decrease in a right isosceles triangle shape with the diagonal corners of the respective ranges partitioned by the boundary line L3 as the center. . Even in such a unit region 310, the same effects as those of the first embodiment of the present invention can be obtained.
また、本発明の実施の形態５のグレースケールマスクは、図４（４）に示すように、１ピクセル４０１中に正方形状の４つの単位領域４１０を有しており、第１領域ａと第２領域ｂの面積比が１：１となる単位領域４１０における境界線Ｌ４が、単位領域４１０における左上から右下への対角線と同じ線となるように構成されている（図４（４）における中央の図参照）。また、この単位領域１１０における第１領域ａと第２領域ｂは、境界線Ｌ４で仕切られたそれぞれの範囲の対角の角部を中心として略円弧形状（途中から変形していく）で増減するようになっている。このような単位領域４１０でも、前記した本発明の実施の形態１と同様の作用効果を得ることができる。 Further, as shown in FIG. 4 (4), the grayscale mask according to the fifth embodiment of the present invention has four square unit regions 410 in one pixel 401, and the first region a and the first region a. The boundary line L4 in the unit region 410 in which the area ratio of the two regions b is 1: 1 is configured to be the same line as the diagonal line from the upper left to the lower right in the unit region 410 (in FIG. 4 (4)). (See the middle figure). Further, the first region a and the second region b in the unit region 110 increase or decrease in a substantially arc shape (deforms from the middle) centering on the diagonal corners of the respective ranges partitioned by the boundary line L4. It is supposed to be. Even in such a unit region 410, the same effects as those of the first embodiment of the present invention can be obtained.
また、本発明の実施の形態６のグレースケールマスクは、図４（５）に示すように、正六角形状の１ピクセル５０１中に菱形の３つの単位領域５１０を有しており、第１領域ａと第２領域ｂの面積比が１：１となる単位領域５１０における境界線Ｌ５が、菱形の単位領域５１０における短い対角線と同じ線となるように構成されている（図４（５）における中央の図参照）。また、この単位領域５１０における第１領域ａと第２領域ｂは、境界線Ｌ５で仕切られたそれぞれの範囲の中心部分を中心として正三角形状で増減するようになっている。このような単位領域５１０でも、前記した本発明の実施の形態１と同様の作用効果を得ることができる。 In addition, as shown in FIG. 4 (5), the grayscale mask according to the sixth embodiment of the present invention has three rhombic unit regions 510 in one regular hexagonal pixel 501. The boundary line L5 in the unit region 510 in which the area ratio of a and the second region b is 1: 1 is configured to be the same line as the short diagonal line in the rhomboid unit region 510 (in FIG. 4 (5)). (See the middle figure). In addition, the first area a and the second area b in the unit area 510 increase or decrease in an equilateral triangle shape with the central portion of each range partitioned by the boundary line L5 as the center. Even in such a unit region 510, the same effects as those of the first embodiment of the present invention can be obtained.
また、本発明の実施の形態７のグレースケールマスクは、図４（６）に示すように、正六角形状の１ピクセル６０１中に１つの単位領域６１０を有しており、第１領域ａと第２領域ｂの面積比が１：１となる単位領域６１０における境界線Ｌ６が、上下方向の中心線と同じ線となるように構成されている（図４（６）における中央の図参照）。また、この単位領域６１０における第１領域ａと第２領域ｂは、境界線Ｌ６で仕切られたそれぞれの範囲の中心部分を中心として台形状で増減するようになっている。このような単位領域６１０でも、前記した本発明の実施の形態１と同様の作用効果を得ることができる。 In addition, as shown in FIG. 4 (6), the grayscale mask according to the seventh embodiment of the present invention has one unit region 610 in one regular hexagonal pixel 601. The boundary line L6 in the unit region 610 in which the area ratio of the second region b is 1: 1 is configured to be the same line as the vertical center line (see the center diagram in FIG. 4 (6)). . Further, the first region a and the second region b in the unit region 610 increase or decrease in a trapezoidal shape with the center portion of each range partitioned by the boundary line L6 as the center. Even in such a unit region 610, the same effects as those of the first embodiment of the present invention can be obtained.
なお、図４（１）〜（６）において第１領域ａと第２領域ｂの面積比がＡ：Ｂのもの（１ピクセルの光透過率が５０％＋α）とＢ：Ａのもの（１ピクセルの光透過率が５０％−α）、Ｃ：Ｄのもの（１ピクセルの光透過率が５０％＋β）とＤ：Ｃ（１ピクセルの光透過率が５０％−β）のもの、Ｅ：Ｆのもの（１ピクセルの光透過率が５０％＋γ）とＦ：Ｅのもの（１ピクセルの光透過率が５０％−γ）はそれぞれ、境界線で線対称で、かつ、第１領域と第２領域を入れ替えた形状となっている。 4 (1) to (6), the area ratio of the first region a and the second region b is A: B (light transmittance of one pixel is 50% + α) and B: A (1 Light transmittance of pixels: 50% -α), C: D (light transmittance of one pixel is 50% + β) and D: C (light transmittance of one pixel is 50% -β), E : F (light transmittance of one pixel is 50% + γ) and F: E (light transmittance of one pixel is 50% −γ) are both symmetrical with respect to the boundary line, and the first region. And the second region are replaced.
以上のように、本発明の各実施の形態のグレースケールマスクによれば、１ピクセル１に少なくとも１つ有する単位領域１０，１１０，２１０，３１０，４１０，５１０，６１０がそれぞれ、光を通す第１領域ａと光を通さない第２領域ｂとで構成され、１ピクセル１の光透過率が５０％からの差の絶対値が同じで、５０％よりも大きい光透過率を有したときと小さい光透過率を有したときを比較すると、第１領域ａと第２領域ｂの面積比が１：１となる単位領域１０，１１０，２１０，３１０，４１０，５１０，６１０における双方の領域の境界線Ｌ，Ｌ１，Ｌ２，Ｌ３，Ｌ４，Ｌ５，Ｌ６を中心線として線対称で、かつ、その領域同士が入れ替わった形状となることで、光透過率の連続性を保った上で、高い光透過率を再現することができる。 As described above, according to the grayscale mask of each embodiment of the present invention, each of the unit regions 10, 110, 210, 310, 410, 510, 610 having at least one per pixel 1 transmits light. When the light transmittance of one pixel 1 is the same as the absolute value of the difference from 50% and has a light transmittance greater than 50% Comparing the cases where the light transmittance is small, the area ratios of the first region a and the second region b are 1: 1 in the unit regions 10, 110, 210, 310, 410, 510, and 610. Since the boundary lines L, L1, L2, L3, L4, L5, and L6 are line symmetric with respect to the center line and the regions are interchanged, the light transmittance is kept high and the continuity is maintained. It is possible to reproduce the light transmittance That.
なお、以上説明した実施の形態は、本発明の理解を容易にするために記載されたものであって、本発明を限定するために記載されたものではない。 The embodiment described above is described in order to facilitate understanding of the present invention, and is not described in order to limit the present invention.
例えば、本発明は、前記した各実施の形態の例に限って適用されるものではなく、前記した各実施の形態以外の単位領域の形状であっても、第１領域と第２領域の面積比が逆になる単位領域同士の形状が（すなわち、１ピクセルの光透過率が５０％からの差の絶対値が同じで、５０％よりも大きい光透過率を有したときと小さい光透過率を有したときを比較したときに）、第１領域と第２領域の面積比が１：１となる単位領域における双方の領域の境界線を中心線として線対称で、かつ、その領域同士が入れ替わった形状となる法則を有していれば適用可能である。 For example, the present invention is not limited to the example of each embodiment described above, and the area of the first region and the second region is not limited to the shape of the unit region other than each embodiment described above. The shape of the unit areas whose ratios are reversed (that is, the light transmittance of one pixel is the same as the absolute value of the difference from 50%, and the light transmittance is smaller than when the light transmittance is greater than 50%. When the area ratio between the first area and the second area is 1: 1, the boundary line between both areas in the unit area is 1: 1, and the areas are symmetrical with each other. It is applicable if it has a law that results in a swapped shape.
１，１０１，２０１，３０１，４０１，５０１，６０１ ピクセル
１０，１１０，２１０，３１０，４１０，５１０，６１０ 単位領域
ａ 第１領域
ｂ 第２領域
Ｌ，Ｌ１，Ｌ２，Ｌ３，Ｌ４，Ｌ５，Ｌ６ 境界線
1,101,201,301,401,501,601 pixels 10,110,210,310,410,510,610 unit area a first area b second area L, L1, L2, L3, L4, L5, L6 border
Claims (2)
１ピクセルには少なくとも１の単位領域を有しており、
前記単位領域はそれぞれ、
光を通す第１領域と光を通さない第２領域とで構成され、前記第１領域と前記第２領域の面積比に応じて光透過率が決定されるようになっており、
前記１ピクセルの光透過率が５０％からの差の絶対値が同じで、前記５０％よりも大きい光透過率を有したときと小さい光透過率を有したときを比較すると、前記第１領域と前記第２領域の面積比が１：１となる前記単位領域における前記第１領域と前記第２領域の境界線を中心線として線対称で、かつ、前記第１領域と前記第２領域が入れ替わった形状となることを特徴とするグレースケールマスク。 In a grayscale mask composed of a plurality of adjacent pixels,
One pixel has at least one unit area,
Each of the unit areas is
It is composed of a first region that transmits light and a second region that does not transmit light, and the light transmittance is determined according to the area ratio of the first region and the second region,
When the absolute value of the difference between the light transmittance of one pixel from 50% is the same and the light transmittance is greater than 50%, the first region has a smaller light transmittance. And the unit area where the area ratio of the second area is 1: 1 is axisymmetric about the boundary line between the first area and the second area in the unit area, and the first area and the second area are A gray scale mask characterized by a swapped shape.
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